JP7448599B2 - Lamination device and method for manufacturing a laminate - Google Patents

Description

The present invention relates to a laminating apparatus and a method for manufacturing a laminated body.

In the manufacturing process of multilayer ceramic electronic components with multilayer structures (e.g., multilayer ceramic capacitors (MLCCs), chip inductors, low temperature co-fired ceramics (LTCCs), etc.), film-like substrates are used. A ceramic green sheet is formed on the material. Then, internal electrodes are appropriately printed on the ceramic green sheet. Next, the ceramic green sheet is peeled from the base material, and a plurality of ceramic green sheets are laminated to form a laminate of ceramic green sheets. Next, the laminate is heated and pressed, and cut into a predetermined size to form chips. Next, the chipped laminate is fired, external electrodes are formed on the surface of the fired body, and a multilayer ceramic electronic component is completed (see, for example, Patent Document 1).

In this way, a large number of laminated ceramic electronic components are manufactured from a laminated body in which a plurality of ceramic green sheets of a predetermined size are laminated. In recent years, the size of multilayer ceramic electronic components has progressed, and the number of multilayer ceramic electronic components manufactured from one laminate is increasing. As a result, internal electrodes have become finer, requiring highly precise lamination of ceramic green sheets.

Ceramic green sheets are thin (eg, several μm to several tens of μm) and soft. Therefore, the ceramic green sheet is transported from the ceramic green sheet mounting table (supply table) to the stacking table by, for example, a suction and holding device that suctions and holds the entire surface of the ceramic green sheet (for example, see Patent Document 2).

JP 2021-122068 Publication Japanese Patent Application Publication No. 2005-125799

In the stacking apparatus disclosed in Patent Document 2, a transport shaft (for example, a linear rail, etc.) that moves the suction and holding device linearly between the mounting table and the stacking table is used to move the suction and holding device. Therefore, the laminating apparatus requires a layout of the conveyance path along the conveyance axis, and the space (footprint) required for installing the laminating apparatus tends to become large. Furthermore, the cost of introducing the laminating device also increases.

An object of the present invention is to provide a laminating apparatus and a method for manufacturing a laminated body in which a conveyance path can be freely laid out.

A laminating apparatus according to an embodiment of the present invention includes a mounting table on which a sheet-like object to be laminated is placed, a laminating table on which a plurality of the objects to be laminated are laminated, and a laminating apparatus that holds the object to be laminated, and an articulated robot that transports the objects from a mounting position on the mounting table to a standby position above the stacking table; an imaging device that captures an image of a characteristic part of the stacked objects held by the articulated robot; a position adjustment unit that adjusts the position of the stacked body held by the articulated robot with respect to an intermediate stacked body constituted by the stacked bodies stacked on the stacking table; and and the object to be stacked held by the articulated robot, and a distance adjustment mechanism for stacking the object to be stacked on the intermediate laminate by adjusting the relative distance between the objects to be stacked and the object to be stacked held by the articulated robot, The distance adjustment mechanism is a lifting device that raises and lowers the stacking table, and the lifting device lifts the stacking table toward the stacked body held by the articulated robot at the standby position. This is a laminating apparatus that laminates the object to be laminated on the intermediate laminate .

A method for manufacturing a laminate according to an embodiment of the present invention includes: a mounting table on which a sheet-like object to be laminated is placed; a laminate table on which a plurality of the objects to be laminated are stacked; and a laminated body holding the object to be laminated. , an articulated robot that transports the object from the mounting position on the mounting table to a standby position above the stacking table ; an imaging device that captures an image of a characteristic part of the stacked object; a position adjustment unit that adjusts the position of the stacked body held by the multi-joint robot with respect to an intermediate stack formed by the stacked bodies stacked on the intermediate stack, the intermediate stack and the multi-joint robot; A method for manufacturing a laminate carried out by a laminate apparatus comprising: a distance adjustment mechanism that adjusts a relative distance between the stacked object and the stacked object being held; a lifting device for raising and lowering a robot, the step of the multi-joint robot holding the stacked object placed on the mounting table, and the step of the multi-joint robot transporting the stacked object to the standby position. and a step in which the imaging device captures the image of the stacked body held by the multi-jointed robot, and the position adjustment unit is held by the multi-jointed robot with respect to the intermediate stacked body. adjusting the position of the stacked objects; and the lifting device raises the stacking table toward the stacked objects held by the articulated robot at the standby position, and lifts the intermediate stacked objects. and the object to be laminated held by the articulated robot, and the step of laminating the object to be laminated on the intermediate laminate by adjusting the relative distance between the object and the object to be laminated held by the articulated robot. .

According to the present invention, the conveyance route can be freely laid out.

1 is a schematic diagram showing an embodiment of a lamination apparatus according to the present invention. FIG. 2 is a functional block diagram of the laminating apparatus of FIG. 1. FIG. FIG. 2 is a schematic cross-sectional view of a stacking table and a lifting device included in the stacking device of FIG. 1. FIG. FIG. 2 is a schematic perspective view showing the positional relationship between an imaging unit and a lighting unit included in the stacking device of FIG. 1. FIG. FIG. 2 is a schematic partial enlarged cross-sectional view showing an example of the operation of the lamination apparatus of FIG. 1; FIG. 6 is a schematic partially enlarged cross-sectional view showing an example of the operation of the laminating apparatus in the state shown in FIG. 5; FIG. 7 is a schematic partially enlarged cross-sectional view showing an example of the operation of the laminating apparatus in the state shown in FIG. 6; 8 is a schematic partially enlarged perspective view illustrating the operation shown in FIG. 7. FIG. FIG. 8 is a schematic partially enlarged sectional view showing an example of the operation of the laminating apparatus in the state shown in FIG. 7; FIG. 10 is a schematic partially enlarged cross-sectional view showing an example of the operation of the laminating apparatus in the state shown in FIG. 9; 11 is a schematic cross-sectional view showing an example of the operation of the lamination apparatus in the state shown in FIG. 10. FIG. FIG. 3 is a schematic partially enlarged sectional view showing a lamination device according to a first modification of the present invention. It is a schematic partial enlarged cross-sectional view which shows the lamination|stacking apparatus based on the 2nd modification of this invention. It is a schematic partial enlarged cross-sectional view which shows the measuring device based on the 3rd modification of this invention. It is a schematic partial enlarged cross-sectional view which shows the measuring device based on the 4th modification of this invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a laminating apparatus and a method for manufacturing a laminated body (hereinafter referred to as "this manufacturing method") according to the present invention will be described with reference to the drawings. In each figure, the same members and elements are denoted by the same reference numerals, and redundant explanations will be omitted. Further, the dimensional ratio of each element may be exaggerated for convenience of explanation, and is not limited to the ratio illustrated in each drawing.

●Lamination device●
First, an embodiment of a laminating apparatus according to the present invention will be described.

●Configuration of lamination apparatus FIG. 1 is a schematic diagram showing an embodiment of a lamination apparatus according to the present invention.
FIG. 2 is a functional block diagram of the laminating apparatus 1. As shown in FIG.

The laminating apparatus 1 laminates ceramic green sheets S (hereinafter referred to as "sheets S") to produce a laminate L of sheets S. The laminating apparatus 1 is used, for example, to manufacture a laminated body L in a manufacturing process of a laminated ceramic electronic component having a multilayer structure. The stacking device 1 includes a housing 2, a control device 3, a mounting table 4, a transport device 5, a stacking table 6, a lifting device 7, an imaging unit 8, a lighting unit 9, and a charging unit 10.

A "multilayer ceramic electronic component" is an electronic component having a ceramic multilayer structure, such as a multilayer ceramic capacitor (MLCC), a chip inductor, or a low temperature co-fired ceramic (LTCC). .

"Sheet S" is a sheet-like member that becomes each layer (dielectric layer) of the multilayer ceramic electronic component. The sheet S is an example of a laminated body in the present invention. In this embodiment, internal electrodes (not shown) of a multilayer ceramic electronic component are printed on the sheet S.

“Laminated body L” is an aggregate of sheets S formed by laminating a plurality of sheets S. The laminate L is an example of a laminate according to the present invention. The structure of the laminate L is common to that of a known laminate of ceramic green sheets. Therefore, details of the configuration of the laminate L will be omitted.

The housing 2 accommodates and supports a control device 3, a mounting table 4, a transport device 5, a stacking table 6, a lifting device 7, an imaging unit 8, a lighting unit 9, and a charging unit 10. The housing 2 includes a storage chamber 21 and a machine room 22. The accommodation chamber 21 is arranged at the lower part of the housing 2 and accommodates and supports the control device 3. The machine room 22 is arranged above and adjacent to the storage chamber 21, and houses and supports the mounting table 4, the transport device 5, the stacking table 6, the lifting device 7, the imaging unit 8, the lighting unit 9, and the charging unit 10. ing. The shape of the storage chamber 21 and the machine room 22 is, for example, box-shaped.

The control device 3 controls the operation of the entire laminating device 1. The control device 3 includes, for example, one or more PLCs (Programmable Logic Controllers). The control device 3 includes a control section 31 and a storage section 32.

The control unit 31 controls the operations of the transport device 5 , the lifting device 7 , the imaging unit 8 , the lighting unit 9 , and the charging unit 10 . The control unit 31 includes, for example, a processor such as a CPU (Central Processing Unit) 31a, a volatile memory such as a RAM (Random Access Memory) 31b that functions as a work area for the CPU 31a, and a ROM that stores various information such as control programs. (Read Only Memory) 31c and other nonvolatile memories. The control section 31 includes a position adjustment section 311 , a transport control section 312 , an elevation control section 313 , an imaging control section 314 , an illumination control section 315 , and a charging control section 316 .

The position adjustment unit 311 adjusts the position of the sheet S held by the conveying device 5 with respect to the intermediate stacked body IL on the stacking table 6 based on the image captured by the imaging unit 8 . The specific operation of the position adjustment section 311 will be described later.

The "intermediate laminate IL" is a laminate formed of some of the sheets S that are to be stacked on the stacking table 6 and are stacked on the stacking table 6. That is, the intermediate laminate IL is in a state where the laminate L is in the middle of being laminated (for example, in the case of a 100-layer stack, 1 to 99 sheets S are stacked). For convenience of explanation, the intermediate laminate IL also includes a state in which only the lowest sheet S is placed on the stacking table 6.

The transport control unit 312 controls the operation of the transport device 5. The specific operation of the transport control unit 312 will be described later.

The lift control unit 313 controls the operation of the lift device 7. The specific operation of the elevation control section 313 will be described later.

The imaging control section 314 controls the operation of the imaging unit 8. The specific operation of the imaging control unit 314 will be described later.

The lighting control section 315 controls the operation of the lighting unit 9. The specific operation of the lighting control section 315 will be described later.

The charging control section 316 controls the operation of the charging unit 10. The specific operation of the charging control section 316 will be described later.

The storage unit 32 stores information necessary for the operation of the laminating apparatus 1 (for example, a first image, a second image, a threshold value, etc., which will be described later). The storage unit 32 is, for example, a nonvolatile memory such as a flash memory.

Note that in the present invention, the control device 3 is not limited to a PLC. That is, for example, the control device 3 may be configured by a personal computer, a microcontroller, or a combination of these and a PLC.

Further, in the present invention, the control device 3 may include a plurality of control devices that individually control the operations of the transport device 5, the lifting device 7, the imaging unit 8, the lighting unit 9, and the charging unit 10. .

The mounting table 4 is a stage on which sheets S to be handled (stacked) in the stacking device 1 are placed. The mounting table 4 is made of metal, for example. The mounting table 4 includes a planar upper surface 4a, which is the mounting position P1 in the present invention. The mounting table 4 is attached to the floor surface 22a of the machine room 22.

The conveyance device 5 holds the sheet S placed on the placement table 4 and conveys it from the placement position P1 to the standby position P2. The transport device 5 is, for example, a known six-axis vertical articulated robot. The transport device 5 includes a base section 51, an arm section 52, a holding member 53, and a vacuum generator 54.

“Placement position P1” is a position on the upper surface 4a of the mounting table 4 where the sheet S is placed.

"Standby position P2" is a position where, when the stacking table 6 is raised, the sheet S held on the conveying device 5 and the top surface 6a of the stacking table 6, or the sheets S stacked on the top surface 6a of the stacking table 6 ( This is the position where the intermediate laminate IL) comes into contact. That is, the standby position P2 is located above the stacking table 6. At the standby position P2, the sheet S held by the conveying device 5 faces the upper surface 6a of the stacking table 6.

The base portion 51 is attached to the floor surface 22a of the machine room 22 and supports the arm portion 52.

The arm portion 52 is connected by a plurality of joints (six in this embodiment) from the base end, which is the connection portion with the base portion 51, to the distal end, and can maintain a desired posture with respect to the base portion 51. It is configured to be freely displaceable (moveable) within a predetermined movable range in order to take the desired position. The movable range includes the mounting table 4 and the stacking table 6.

The holding member 53 is a so-called end effector that holds the sheet S. The shape of the holding member 53 is, for example, a rectangular parallelepiped. The holding member 53 is, for example, made of metal that can hold the sheet S without distortion and has a rigidity that can withstand the load described below. The holding member 53 is attached to the tip of the arm portion 52. The holding member 53 includes an upper surface 53a, a lower surface 53b, and four windows 53c, 53d, 53e, and 53f (see FIG. 4; the same applies hereinafter).

In the present invention, the holding member 53 may be made of synthetic resin as long as it has the necessary rigidity.

Further, in the present invention, the shape of the holding member 53 may be any shape that can hold the sheet S without distortion, and is not limited to a rectangular parallelepiped shape.

The lower surface 53b of the holding member 53 is a holding surface that holds the sheet S by suction. A plurality of suction holes (not shown; the same applies hereinafter) are arranged on the lower surface 53b of the holding member 53, and each suction hole is connected to a vacuum generator 54 via a pipe (not shown).

The windows 53c to 53f are through holes that vertically penetrate the upper surface 53a and lower surface 53b of the holding member 53. The shapes of the windows 53c to 53f are, for example, cylindrical. The windows 53c to 53f are arranged at positions overlapping the characteristic parts of the sheet S (near the four corners of the holding member 53) when viewed in the vertical direction.

In the present invention, the shape of the windows 53c to 53f is not limited to a cylindrical shape, as long as the imaging unit 8 can image the characteristic portion through the windows 53c to 53f. That is, for example, the window portions 53c to 53f may have a rectangular shape or a long hole shape.

The "characteristic part" is a part that functions as a positioning mark for stacking the sheets S, such as a part that characterizes the shape of the sheet S (unevenness, outline, etc.), a mark attached to the sheet S, etc. It is. In this embodiment, the characteristic portions are circular ("o" shaped) holes formed at the four corners of the sheet S.

Note that in the present invention, the characteristic portion is not limited to a hole. That is, for example, the characteristic portion may be a corner (outline) of the sheet S. Further, for example, the characteristic portion may be an alignment mark attached to the sheet S. Furthermore, the shape of the feature is not limited to circular. That is, for example, the shape of the characteristic portion may be a "+" shape or an "L" shape.

The vacuum generator 54 generates a reduced pressure atmosphere (vacuum) for the holding member 53 to adsorb the sheet S. The vacuum generator 54 is, for example, a known vacuum generation (depressurization) mechanism including a compressor and an ejector. Compressed air generated by the compressor is supplied to the ejector, so that the ejector evacuates the inside of the suction hole to reduce the pressure. At this time, the holding member 53 can hold the sheet S by suction due to the negative pressure generated within the suction hole. On the other hand, when the supply of compressed air from the compressor is stopped, the ejector breaks the vacuum inside the suction hole, the inside of the suction hole is opened to the atmosphere, and the suction of the sheet S by the holding member 53 is released.

Note that in the present invention, the configuration of the vacuum generator 54 is not limited to this embodiment. That is, for example, the vacuum generator 54 may be a vacuum pump.

FIG. 3 is a schematic cross-sectional view of the stacking table 6 and the lifting device 7.
The figure also shows a lighting unit 9 and a charging unit 10 for convenience of explanation. Further, in this figure, the stacking table 6, intermediate laminate IL, lighting unit 9, and charging unit 10 after movement are shown by broken lines, and the holding member 53 and sheet S after movement are shown by two-dot chain lines.

The stacking table 6 is a stage on which a plurality of sheets S are stacked. The stacking table 6 is made of metal, for example, and has a planar upper surface 6a. The stacking table 6 is supported by a lifting device 7, and can be moved up and down within a predetermined movement range by the lifting device 7.

The lifting device 7 raises and lowers the stacking table 6 between the lowered position P3 and the stacking position P4, thereby lifting the intermediate stack IL of sheets S stacked on the upper surface 6a of the stacking table 6 and the intermediate stack IL held by the conveying device 5. Adjust the relative distance between the sheet S and The lifting device 7 is an example of a distance adjustment mechanism in the present invention. The lifting device 7 includes, for example, four slide guides 71, 72 (two slide guides are not shown. The same applies below), four linear bushes 73, 74 (two linear bushes are not shown. The same applies below), and This is a known linear motion mechanism including a drive section 75.

The "lowering position P3" is a position that does not inhibit the operations of the transport device 5 and the lighting unit 9, and is a position where a first image, which will be described later, is captured.

The "stacking position P4" is above the lowering position P3 and is a position where sheets S, which will be described later, are stacked.

The slide guides 71 and 72 guide the vertical movement of the linear bushes 73 and 74. The slide guides 71 and 72 have a cylindrical shape. The slide guides 71 and 72 are made of metal, for example. The slide guides 71 and 72 are mounted upright on the floor surface 22a of the machine room 22.

The linear bushes 73 and 74 move the stacking table 6 up and down precisely by sliding vertically along the slide guides 71 and 72. The linear bushes 73 and 74 are attached to the four corners of the stacking table 6, for example. Corresponding slide guides 71 and 72 are inserted into the linear bushes 73 and 74, respectively. By sliding the linear bushes 73 and 74 along the corresponding slide guides 71 and 72, the stacking table 6 can be moved up and down precisely.

The drive unit 75 includes, for example, a motor and a ball screw, and is configured to generate a driving force to move the stacking table 6 up and down, so that the stacking table 6 can be moved up and down.

Note that in the present invention, the configuration of the drive section 75 is not limited to this embodiment.

FIG. 4 is a schematic perspective view showing the positional relationship between the imaging unit 8 and the illumination unit 9.

The imaging unit 8 images the characteristic portion of the sheet S (see FIG. 3) held by the holding member 53. The imaging unit 8 includes four imaging devices 81, 82, 83, and 84. The imaging devices 81 to 84 are, for example, digital cameras. The imaging devices 81 to 84 are arranged above the stacking table 6 and attached to the ceiling 22b of the machine room 22 (see FIG. 3). When the holding member 53 is located at a standby position P2 (see FIG. 3), which will be described later, the imaging devices 81 to 84 are arranged above the corresponding windows 53c to 53f, and inside the corresponding windows 53c to 53f. image the characteristic parts of.

The illumination unit 9 irradiates light toward the characteristic portions of the sheet S (see FIG. 3) held by the holding member 53. The lighting unit 9 includes four light sources 91, 92, 93, and 94, and a moving device 95 (see FIG. 2; the same applies hereinafter).

Light sources 91-94 emit light toward corresponding features. The light sources 91 to 94 are, for example, LEDs (Light Emitting Diodes).

The moving device 95 includes, for example, a motor and a slide mechanism, and is configured to be able to move the light sources 91 to 94 between the retracted position P5 and the irradiation position P6.

The “retreat position P5” is a position that does not inhibit the lifting and lowering of the stacking table 6 by the lifting device 7. In this embodiment, the retracted position P5 is located on the side of the lifting device 7 (see FIG. 3).

“Irradiation position P6” is a position where the light sources 91 to 94 can irradiate the corresponding feature. In this embodiment, the irradiation position P6 is located between the sheet S located at the standby position P2 (see FIG. 3) and the stacking table 6 that is lowered.

Return to FIGS. 1 to 3.
The charging unit 10 charges the upper surface ILa of the intermediate laminate IL of the sheets S. The charging unit 10 includes a charging bar 101 and a moving device 102.

When a high voltage is applied to the charging bar 101, the charging bar 101 discharges (irradiates charged particles) onto the upper surface ILa of the intermediate laminate IL of the sheet S, and performs charging processing on the upper surface ILa. The shape of the charging bar 101 is, for example, a rod-like shape that is elongated in the width direction of the sheet S (in the direction from the back to the front of the paper in FIG. 3). The length of the charging bar 101 is slightly longer than the length of the sheet S in the same width direction. The charging bar 101 is an example of an auxiliary processing device in the present invention, and the charging process is an example of auxiliary processing in the present invention.

The moving device 102 includes, for example, a motor and a slide mechanism, and is configured to be able to move the charging bar 101 between a first retracted position P7 and a second retracted position P8.

The “first retreat position P7” is a position that does not obstruct the conveyance of the sheet S by the conveyance device 5. In the present embodiment, the first retraction position P7 is above the standby position P2 in the vertical direction and is located to the side of the lifting device 7 when viewed from above.

The "second retreat position P8" is a position that does not obstruct the conveyance of the sheet S by the conveyance device 5, and is a position on the opposite side of the sheet S from the first retreat position P7 when viewed from above. In the present embodiment, the second retracted position P8 is a position where the charging bar 101 crosses over the intermediate stacked body IL of the sheet S and then turns back toward the first retracted position P7.

●Operation of the stacking device Next, the operation of the stacking device 1 (i.e., the present manufacturing method) is based on an example in which the sheets S are stacked on the intermediate stack IL of the sheets S placed on the stacking table 6. Explained below. In the following description, FIGS. 1 to 4 will be referred to as appropriate. Further, in the following FIGS. 5 to 7 and 9 to 11, for convenience of explanation, a part of the configuration of the control device 3 is illustrated with a two-dot chain line.

FIG. 5 is a schematic partially enlarged sectional view illustrating an example of the operation of the laminating apparatus 1. As shown in FIG.

First, the imaging control section 314 causes the imaging unit 8 to image a characteristic portion of the sheet S stacked on the top of the intermediate laminate IL. At this time, the stacking table 6 is located at the lowered position P3, and each of the imaging devices 81 to 84 images the corresponding feature. The captured image (hereinafter referred to as "first image") is stored in the storage unit 32, for example. The first image is a still image.

FIG. 6 is a schematic cross-sectional view illustrating an example of the next operation of the laminating apparatus 1 of FIG. 5.

Next, the conveyance control unit 312 causes the conveyance device 5 to take out the sheet S placed on the placement position P1 of the placement table 4. At this time, the holding member 53 holds the sheet S by adsorbing the sheet S to the lower surface 53b (holding step). When viewed from above, characteristic parts of the sheet S are arranged within the windows 53c to 53f.

FIG. 7 is a schematic partially enlarged cross-sectional view illustrating an example of the next operation of the laminating apparatus 1 of FIG. 6.
FIG. 8 is a schematic partially enlarged perspective view illustrating the operation shown in FIG. 7.

Next, the conveyance control unit 312 causes the conveyance device 5 to convey the sheet S held by the holding member 53 to the standby position P2 (conveyance step). At this time, corresponding imaging devices 81 to 84 are arranged above the windows 53c to 53f. Therefore, the imaging devices 81 to 84 can image the characteristic portions of the sheet S held by the holding member 53 through the corresponding windows 53c to 53f.

Next, the illumination control unit 315 causes the moving device 95 to move the light sources 91 to 94 from the retreat position P5 to the irradiation position P6. Next, the imaging control section 314 causes the imaging unit 8 to image the characteristic portion. At this time, the imaging unit 8 starts imaging the characteristic portion of the sheet S held by the holding member 53 via the windows 53c to 53f. The light sources 91 to 94 emit light from below toward the corresponding features, and the imaging devices 81 to 84 capture images of the corresponding features (imaging step). That is, when the imaging devices 81 to 84 start imaging the corresponding feature, the moving device 95 moves the light sources 91 to 94 from the retracted position P5 to the irradiation position P6, and the light sources 91 to 94 apply light to the corresponding feature. irradiate. The captured image (hereinafter referred to as "second image") is stored in the storage unit 32, for example. The second image may be a still image or a moving image.

Next, the position adjustment unit 311 adjusts the position of the sheet S held by the holding member 53 with respect to the intermediate laminate IL on the stacking table 6 based on the first image and the second image (position adjustment step). . Specifically, the position adjustment unit 311 controls the operation of the arm unit 52 to change the attitude of the holding member 53 so that the characteristic part of the second image overlaps the characteristic part of the first image. At this time, the imaging unit 8 and the position adjustment unit 311 adjust the imaging and position of the second image until the amount of deviation between the characteristic parts of the first image and the second image falls within a predetermined threshold (for example, several μm). The adjustment is repeated. In other words, the position adjustment unit 311 adjusts the position of the sheet S held on the conveyance device 5 until the amount of positional deviation of the sheet S held on the conveyance device 5 with respect to the intermediate stacked body IL satisfies a predetermined threshold value. We are making repeated adjustments.

Here, the holding member 53 is attached to the tip of the arm portion 52. Therefore, the posture and position of the holding member 53 are changed by a combination of movements of each joint (axis) of the arm portion 52. That is, the adjustment of the amount of positional deviation is performed by a combination of movements of each joint (axis). That is, for example, when the holding member 53 is moved in parallel downward while maintaining the posture of the holding member 53, the change in posture caused by the movement of a certain axis and the change in position in the front, back, left, and right directions are canceled out by the movement of other axes. movement is adjusted. Therefore, by adjusting the position once (changing the posture of the holding member 53), it may not be possible to accurately adjust the amount of deviation while maintaining the sheet S at the standby position P2. Therefore, the adjustment of the amount of deviation is not completed in one go, but may be repeated multiple times until the amount of deviation satisfies a predetermined threshold value.

When the amount of deviation falls within a predetermined range, the position adjustment section 311 fixes the postures of the arm section 52 and the holding member 53, the imaging control section 314 causes the imaging unit 8 to stop imaging the characteristic part, and the illumination control section Step 315 causes the light sources 91 to 94 to stop emitting light, and moves the light sources 91 to 94 to the retreat position P5. That is, when the imaging devices 81 to 84 stop imaging the corresponding feature, the light sources 91 to 94 stop emitting light, and the moving device 95 moves the light sources 91 to 94 from the irradiation position P6 to the retreat position P5. .

FIG. 9 is a schematic partial enlarged sectional view illustrating an example of the next operation of the laminating apparatus 1 of FIG. 7.

Next, the lift control unit 313 causes the lift device 7 to lift the stacking table 6 toward the sheet S held by the holding member 53 at the standby position P2. At this time, the lifting device 7 raises the stacking table 6 until the intermediate laminate IL on the stacking table 6 comes into contact with the sheet S and is pressed with a predetermined pressure. The predetermined pressure is detected, for example, by a force sensor (not shown) included in the arm portion 52. In other words, the elevating device 7 raises the stacking table 6 to the stacking position P4 and stacks the sheets S based on the detection result of the sensor included in the arm portion 52 (stacking step).

Next, the conveyance control unit 312 causes the holding member 53 to release the sheet S from being attracted.

Here, as described above, the postures of the arm portion 52 and the holding member 53 after the position adjustment are fixed. Further, by sliding the linear bushes 73 and 74 along the corresponding slide guides 71 and 72, the stacking table 6 can be moved up and down precisely in the vertical direction. Therefore, by precisely raising the stacking table 6 (intermediate laminate IL) toward the sheet S whose position has been adjusted, the sheet S is accurately stacked on the intermediate laminate IL.

Further, the upper surface ILa of the intermediate laminate IL has already been subjected to a charging process, which will be described later. Therefore, the intermediate laminate IL and the sheet S are electrostatically attracted to each other. As a result, the sheet S adheres closely to the intermediate laminate IL without any gaps. In this way, the charging process functions as an auxiliary process that assists in laminating the sheet S and the intermediate laminate IL.

FIG. 10 is a schematic partial enlarged sectional view illustrating an example of the next operation of the laminating apparatus 1 of FIG.

Next, the transport control unit 312 causes the transport device 5 to evacuate the holding member 53 from above the stacking table 6.

Next, the charging control unit 316 causes the moving device 102 to move the charging bar 101 from the first retraction position P7 to the second retraction position P8, and then from the second retraction position P8 to the first retraction position P7. At this time, the charging bar 101 charges the upper surface ILa of the intermediate laminate IL (the upper surface of the newly stacked sheet S).

In the present invention, the moving device 102 moves the charging bar 101 from the first retraction position P7 to the second retraction position P8, then stops the charging bar 101 at the second retraction position P8, and then moves the charging bar 101 to the second retraction position P8. After stacking, the charging bar 101 may be moved from the second retracted position P8 to the first retracted position P7, and then the charging bar 101 may be stopped at the first retracted position P7. In this case, when the charging bar 101 crosses above the intermediate laminate IL, it charges the upper surface ILa of the intermediate laminate IL.

FIG. 11 is a schematic partially enlarged sectional view illustrating an example of the next operation of the laminating apparatus 1 of FIG. 10.

Next, the elevation control unit 313 causes the elevation device 7 to lower the stacking table 6 to the lowered position P3. Thereafter, the above operations are repeated until the required number of sheets S are stacked to complete the stacked body L.

In this way, in the stacking apparatus 1, an articulated robot is used to convey the sheets S. Therefore, in the stacking apparatus 1, the mounting table 4 and the stacking table 6 can be freely laid out within the movable range of the arm section 52. That is, in the stacking apparatus 1, the conveyance route of the sheet S (the route from the mounting table 4 to the stacking table 6) can be freely laid out. In addition, compared to a conventional laminating apparatus (hereinafter referred to as "conventional apparatus") that uses a conveyance axis to transport between a loading table (supply table) and a stacking table, the space required for installing the laminating apparatus 1 ( footprint) will be smaller.

Furthermore, the stacking device 1 achieves highly accurate position adjustment by repeating the adjustment of the position of the sheet S held by the conveying device 5 with respect to the intermediate stack IL on the stacking table 6 multiple times. .

Furthermore, the stacking device 1 achieves highly accurate stacking of the sheets S by precisely raising the stacking table 6 toward the sheets S whose positions have been adjusted with high precision. As a result, the laminating apparatus 1 can manufacture the laminated body L in which the sheets S are laminated with high precision with a relatively simple configuration.

●Modified example●
Next, a modification of the laminating apparatus 1 will be described below, focusing on the differences from the previously described embodiment (hereinafter referred to as the "first embodiment"). In the following modified examples, for convenience of explanation, the same members as in the first embodiment and members having common functions are given the same reference numerals as in the first embodiment. Further, in the following modified examples, FIGS. 1 to 4 will be referred to as appropriate.

●First Modification FIG. 12 is a schematic partially enlarged cross-sectional view showing a lamination apparatus 1A according to a first modification.

In the laminating apparatus 1A according to the first modification, the operation of the laminating process is different from that of the first embodiment. The conveying device 5 lowers the sheets S held by the holding member 53 toward the stacking table 6, thereby stacking the sheets S on the intermediate stack IL. That is, the conveyance device 5 functions as a distance adjustment mechanism in the present invention. In this configuration, since the holding member 53 is lowered while controlling the posture of the holding member 53 by a combination of movements of each joint (axis) of the arm portion 52, the lamination accuracy is worse than that of the first embodiment. , relatively high precision lamination is possible. On the other hand, the lifting device 7 in the first embodiment is not required, the stacking device 1A is space-saving compared to the first embodiment, and the transport path of the sheet S can be freely laid out.

Note that in the first modification, the position adjustment section 311 may repeatedly adjust the position while the holding member 53 is being lowered.

●Second Modification FIG. 13 is a schematic partially enlarged cross-sectional view showing a lamination device 1B according to a second modification.

The laminating apparatus 1B according to the second modification differs from the first embodiment in that the charging bar 101 is attached to the end of the upper surface 53a of the holding member 53 and in the operation of the charging process. In the second modification, when the lifting device 7 raises the stacking table 6, the conveying device 5 directs the lower surface 53b of the holding member 53 toward the upper surface ILa side of the intermediate laminate IL, and after stacking the sheets S, the conveying device 5 moves to a standby position P2. The attitude of the holding member 53 is changed so that the charging bar 101 faces downward when the holding member 53 is evacuated. Next, the holding member 53 crosses over the intermediate laminate IL, and the charging bar 101 charges the upper surface ILa of the intermediate laminate IL (performs a charging process). That is, when the charging bar 101 performs the charging process, the conveyance device 5 changes the orientation of the holding member 53 so that the charging bar 101 is directed toward the upper surface ILa. Next, the attitude of the holding member 53 is changed so that the lower surface 53b of the holding member 53 faces downward. With this configuration, the moving device 102 in the first embodiment is unnecessary, and the charging process is performed simultaneously with the retraction of the holding member 53. In this way, since the conveyance device 5 is constituted by an articulated robot that can freely change the posture of the holding member 53, an auxiliary processing device that assists stacking can be attached to the holding member 53 as an attachment.

●Third Modification FIG. 14 is a schematic partially enlarged cross-sectional view showing a lamination apparatus 1C according to a third modification.
In the figure, light from the light source 91 is schematically shown with a two-dot chain line.

The stacking device 1C according to the third modification differs from the first embodiment in the positions of the light sources 91 to 94 and the configurations of the windows 53c to 53f. The light sources 91 to 94 are arranged above the standby position P2 and at positions that do not interfere with the angle of view of the imaging devices 81 to 84. Light from the light sources 91 to 94 is irradiated onto the corresponding windows 53c to 53f obliquely from above. The inner surfaces of the windows 53c to 53f are configured to reflect light (for example, the inner surfaces are painted white), and the light from the light sources 91 to 94 becomes diffused light within the windows 53c to 53f. With this configuration, even if light is irradiated obliquely, the characteristic portion is irradiated with light from relatively all directions above, and the imaging devices 81 to 84 can clearly image the characteristic portion.

-Fourth Modification FIG. 15 is a schematic partially enlarged sectional view showing a lamination device 1D according to a fourth modification.

In the stacking apparatus 1D according to the fourth modification, the configurations of the stacking table 6 and the lifting device 7 are different from those in the first embodiment. At the four corners of the stacking table 6, instead of the linear bushes 73 and 74, four through holes 6b and 6c (two through holes are not shown) are arranged. The lifting device 7 includes a pin support portion 76 and four guide pins 77 and 78 (two guide pins are not shown). The pin support part 76 is arranged around the stacking table 6 and is attached to the floor surface 22a of the machine room 22 so as to stand upright. The guide pins 77 and 78 are directed to the pin support portion 76 so that the tip portions 77a and 78a are directed downward. When the lifting device 7 raises the stacking table 6, the guide pins 77 and 78 are inserted into the corresponding through holes 6b and 6c, and the stacking table 6 moves up along the guide pins 77 and 78. Therefore, the accuracy of raising the stacking table 6 can be adjusted by adjusting the tolerance of the gaps between the through holes 6b, 6c and the guide pins 77, 78.

Summary According to the embodiment described above, the stacking device 1 includes the mounting table 4, the stacking table 6, the transport device 5, the imaging devices 81 to 84, the position adjustment section 311, and the lifting device 7. A sheet S is placed on the mounting table 4, and a plurality of sheets S are stacked on the stacking table 6. The conveyance device 5 is a known vertical articulated robot, and holds the sheet S and conveys it from the placement position P1 to the standby position P2. The imaging devices 81 to 84 take images of characteristic parts of the sheet S held by the conveying device 5. The position adjustment unit 311 adjusts the position of the sheet S held by the conveyance device 5 with respect to the intermediate laminate IL based on the first image and the second image. The elevating device 7 adjusts the relative distance between the intermediate laminate IL and the sheet S held by the transport device 5 by raising and lowering the stacking table 6, and stacks the sheets S on the intermediate laminate IL. According to this configuration, since a multi-joint robot is used to transport the sheet S, the mounting table 4 and the stacking table 6 can be freely laid out within the movable range of the multi-joint robot (arm part 52). That is, in the stacking apparatus 1, the conveyance route of the sheet S (the route from the mounting table 4 to the stacking table 6) can be freely laid out.

Further, according to the embodiment described above, the lifting device 7 moves the sheet S into the intermediate stack by raising the stacking table 6 toward the sheet S held by the conveying device 5 at the standby position P2. Laminated on IL. According to this configuration, the stacking device 1 achieves highly accurate stacking that cannot be obtained when the sheets S are stacked by an articulated robot by increasing the lifting precision of the lifting device 7.

Furthermore, according to the embodiment described above, the imaging devices 81 to 84 are arranged above the standby position P2. According to this configuration, the stacking apparatus 1 can adjust the position of the sheets S and stack them at the standby position P2. That is, a space dedicated to adjusting the position of the sheet S is not required in the conveyance path of the sheet S. Therefore, it is possible to save space in the laminating apparatus 1, and the conveyance path of the sheet S can be freely laid out.

Furthermore, according to the embodiment described above, the laminating apparatus 1 includes the lighting unit 9. The lighting unit 9 includes light sources 91 to 94 that irradiate light to the sheet S held in the conveyance device 5, and a moving device 95 that moves the light sources 91 to 94 between the irradiation position P6 and the retreat position P5. Be prepared. The moving device 95 moves the light sources 91 to 94 to the irradiation position P6 when the imaging devices 81 to 84 start imaging the feature, and moves the light sources 91 to 94 to the irradiation position P6 when the imaging devices 81 to 84 stop imaging the feature. is moved to the retreat position P5. According to this configuration, the light sources 91 to 94 can emit light from the lower surface side of the sheet S without interfering with the movement of the stacking table 6 during stacking. Therefore, the imaging devices 81 to 84 can clearly image the outline of the characteristic portion that is the through hole. As a result, the accuracy of position adjustment by the position adjustment section 311 is improved.

Furthermore, according to the embodiment described above, the conveyance device 5 includes a holding member 53 that holds the sheet S. The holding member 53 includes window portions 53c to 53f. The windows 53c to 53f pass through the holding member 53 in the vertical direction, and are configured so that the characteristic parts can be imaged by the imaging devices 81 to 84 when the sheet S is conveyed to the standby position P2. According to this configuration, the imaging devices 81 to 84 arranged above the standby position P2 can image the characteristic portion of the sheet S held at the standby position P2 without being obstructed by the holding member 53.

Furthermore, according to the embodiment described above, the position adjusting unit 311 adjusts the position of the sheet S held in the conveying device 5 until the amount of positional deviation of the sheet S held in the conveying device 5 with respect to the intermediate laminate IL satisfies a predetermined threshold value. Repeat the adjustment. According to this configuration, the accuracy of position adjustment by the position adjustment section 311 is improved.

●Other embodiments●
Note that in the present invention, the mounting table 4 may be configured to be movable. That is, for example, the mounting table 4 may be configured to be movable up and down, or may be configured to be conveyable from the previous process (the process of peeling the sheet S from the film).

Further, in the present invention, only one sheet S may be placed on the mounting table 4, or a plurality of sheets S may be placed in a stacked manner.

Furthermore, in the present invention, the laminating apparatus 1 may include a plurality of mounting tables 4. In this case, for example, the plurality of mounting tables 4 may be arranged in a shelf-like manner in the vertical direction.

Furthermore, in the present invention, the transport device 5 may be any articulated robot, and is not limited to a 6-axis vertical articulated robot. That is, for example, the transport device 5 may be a known four-axis horizontal articulated robot.

Furthermore, in the present invention, a translucent cylinder may be fitted into each of the windows 53c to 53f. In this case, the upper end of the cylinder protrudes above the upper surface 53a of the holding member 53, and the light from the light sources 91 to 94 is irradiated onto the protruding upper end. In this configuration, the light from the light sources 91 to 94 is emitted from the side of the upper end, guided into the cylinder from the upper end, and illuminated into the space inside the cylinder.

Furthermore, in the present invention, the number of windows 53c to 53f may correspond to the number of feature parts, and is not limited to "4".

Furthermore, in the present invention, the positions of the windows 53c to 53f are not limited to the vicinity of the four corners of the holding member 53. That is, for example, the windows 53c to 53f may be arranged near the center of each side of the holding member 53 when viewed in the vertical direction.

Furthermore, in the present invention, the windows 53c to 53f are not limited to through holes. That is, for example, the windows 53c to 53f may be formed by notches extending from the ends of the holding member 53 toward the center when viewed from above.

Furthermore, in the present invention, a member made of a translucent material (eg, glass) may be disposed (inserted) in the windows 53c to 53f.

Furthermore, in the present invention, the stacking device 1 may include a plurality of stacking tables 6 and lifting devices 7.

Furthermore, in the present invention, the configuration of the lifting device 7 is not limited to the configurations of the first embodiment and the fourth example. That is, for example, the lifting device 7 has an "L" shape when viewed from above, and includes an abutment wall disposed along two adjacent sides of the stacking table 6 on the side of the stacking table 6, and It may be configured such that the stand 6 is moved up and down while being abutted against the abutment wall from two sides.

Furthermore, in the present invention, the number of imaging devices 81 to 84 may correspond to the number of feature parts, and is not limited to "4".

Furthermore, in the present invention, the imaging devices 81 to 84 may be configured to be able to move forward and backward below the standby position P2. In this case, the imaging devices 81 to 84 may be configured to image only the characteristic portions of the sheet S held by the holding member 53 from below. In this configuration, the position adjustment unit 311 may perform position adjustment based on the image of the characteristic portion of the sheet S stacked immediately before and the newly captured image of the characteristic portion. Further, the imaging devices 81 to 84 are configured to simultaneously image the characteristic portion of the sheet S held by the holding member 53 and the characteristic portion of the sheet S stacked on the top of the intermediate laminate IL. may have been done. With this configuration, the position adjustment unit 311 can perform the same position adjustment as in the first embodiment.

Furthermore, in the present invention, the number of light sources 91 to 94 may correspond to the number of feature parts, and is not limited to "4".

Furthermore, in the present invention, the laminating apparatus 1 does not need to include the illumination unit 9 as long as the imaging devices 81 to 84 can image the characteristic portions of the sheet S held by the holding member 53.

Furthermore, in the present invention, the laminating device 1 does not need to include the charging unit 10.

Furthermore, in the present invention, the length of the charging bar 101 may be shorter than the length of the sheet S. In this case, for example, the conveyance device 5 is configured so that the charging bar 101 traverses above the upper surface ILa while also reciprocating in the width direction so as to charge the entire upper surface ILa.

Furthermore, in the present invention, the charging bar 101 may be arranged on the conveyance path from the placement position P1 to the standby position P2, and may perform charging processing on the lower surface of the sheet S held by the holding member 53. .

Furthermore, in the present invention, the laminating apparatus 1 may include a dispenser that applies adhesive to the upper surface ILa of the intermediate laminate IL. In this case, the dispenser is an example of the auxiliary processing device in the present invention, and the adhesive application process is an example of the auxiliary processing in the present invention. The dispenser may be attached to the moving device 102 instead of the charging bar 101 of the first embodiment. Further, the dispenser may be attached to the upper surface 53a of the holding member 53 instead of the charging bar 101 of the second modification. In this case, the dispenser may be configured to be movable by controlling the operation of the arm portion 52 so as to apply the adhesive to the entire upper surface ILa or partially, separately from the charging bar 101.

Furthermore, in the present invention, the stacking apparatus 1 may include an alignment stage (alignment table) on the path from the mounting table 4 to the stacking table 6. In this case, the laminating apparatus 1 includes an imaging device that is disposed above or below the alignment table and captures an image (second image) of the characteristic portion of the sheet S held by the holding member 53. In this configuration, the imaging devices 81 to 84 may capture only the first image.

Furthermore, in the present invention, the auxiliary processing device is not limited to the charging bar 101 or the dispenser, as long as it is capable of performing auxiliary processing to assist lamination.

Furthermore, in the present invention, transparent glass or synthetic resin may be fitted into the windows 53c to 53f.

Furthermore, in the present invention, a known laminated sheet or film may be placed between the first layer sheet S and the upper surface 6a of the lamination table 6.

●Embodiments of the present invention●
Next, embodiments of the present invention understood from each of the embodiments described above will be described below, using the terms and symbols described in each embodiment.

A first embodiment of the present invention includes a mounting table (e.g., mounting table 4) on which a sheet-shaped object to be laminated (e.g., sheet S) is placed, and a stacking table on which a plurality of the objects to be laminated are laminated. (e.g., stacking table 6) and the objects to be stacked, and transporting them from a mounting position on the mounting table (e.g., mounting position P1) to a standby position (e.g., standby position P2) above the stacking table. an articulated robot (e.g., transport device 5), an imaging device (e.g., imaging devices 81 to 84) that captures an image of a characteristic portion of the object to be laminated held by the articulated robot; based on the position of adjusting the position of the stacked body held by the articulated robot with respect to an intermediate stacked body (for example, intermediate stacked body IL) configured of the stacked bodies stacked on the stacking table. By adjusting the relative distance between an adjustment unit (for example, position adjustment unit 311), the intermediate stacked body, and the stacked body held by the articulated robot, the stacked bodies are adjusted to the intermediate stacked body. This is a stacking device (for example, a stacking device 1, 1A, 1B, 1C, 1D) that includes a distance adjustment mechanism (for example, a lifting device 7) for stacking on a body.
According to this configuration, the conveyance path of the ceramic green sheet can be freely laid out.

A second embodiment of the present invention, in the first embodiment, includes a lifting device (for example, lifting device 7) that functions as the distance adjustment mechanism and lifts and lowers the stacking table, and the lifting device The stacking device (for example, These are lamination devices 1, 1B, 1C, 1D).
According to this configuration, the laminating apparatus can realize highly accurate lamination that cannot be obtained when ceramic green sheets are laminated by an articulated robot by increasing the accuracy of the lifting and lowering of the lifting device.

In a third embodiment of the present invention, in the first embodiment, the multi-joint robot functions as the distance adjustment mechanism and directs the object held by the multi-joint robot toward the intermediate stacked body. The laminating apparatus (for example, laminating apparatus 1A) stacks the object to be laminated on the intermediate laminated body by lowering the laminated body.
According to this configuration, the lamination device is space-saving, and the conveyance path of the ceramic green sheets can be freely laid out.

A fourth embodiment of the present invention is a light source (for example, a light source 91) that irradiates light toward the stacked body held by the articulated robot in any one of the first to third embodiments. ~94), the light source is placed at an irradiation position below the standby position (e.g., irradiation position P6), and at a retracted position (e.g., retracted position P5) that does not inhibit adjustment of the relative distance by the distance adjustment mechanism; a moving device (for example, moving device 95) for moving between When starting, the light source is moved from the retracted position to the irradiation position, and when the imaging device finishes imaging the characteristic part, the light source is moved from the irradiation position to the retracted position. It is.
According to this configuration, the imaging device can clearly image the outline of the characteristic portion, which is the through hole, of the ceramic green sheet conveyed to the standby position. As a result, the position adjustment and stacking of the ceramic green sheets can be performed at the standby position, and the position adjustment accuracy by the position adjustment section is improved.

In a fifth embodiment of the present invention, in the fourth embodiment, the articulated robot includes a holding member (for example, a holding member 53) that holds the stacked body, and the holding member is configured to hold the stacked body. When the body is transported to the standby position, a portion of the stacked body held by the holding member opens a window portion (for example, window portions 53c to 53f) configured to be imaged from above by the imaging device. This is a laminating device.
According to this configuration, the imaging device disposed above the standby position can image the characteristic portion without being obstructed by the holding member.

In a sixth embodiment of the present invention, in the fourth embodiment, the position adjustment section is arranged such that the amount of displacement of the position of the stacked body held by the multi-joint robot with respect to the intermediate stacked body is set to a predetermined value. The stacking apparatus repeats the adjustment of the position of the stacked objects held by the articulated robot until a threshold value is satisfied.
According to this configuration, the accuracy of position adjustment by the position adjustment section is improved.

In a seventh embodiment of the present invention, in the first embodiment, before the object to be laminated is laminated on the intermediate laminate, the upper surface (for example, the upper surface ILa) of the intermediate laminate or the object to be laminated is The articulated robot has an auxiliary processing device (e.g., charging bar 101) that performs auxiliary processing for assisting the lamination on the lower surface of the robot, and the articulated robot has a holding surface (e.g., , a holding member having a lower surface 53b), the auxiliary processing device is attached to the holding member to perform the auxiliary processing on the upper surface of the intermediate laminate, and the articulated robot is configured to perform the distance adjustment. When the mechanism adjusts the relative distance, the holding surface is oriented toward the upper surface, and when the auxiliary processing device executes the auxiliary processing, the auxiliary processing device is oriented toward the upper surface. This is a laminating apparatus (for example, laminating apparatus 1B) that changes the orientation of members.
According to this configuration, a device for moving the charging bar is not required, and the charging process can be performed at the same time as the holding member is retracted.

An eighth embodiment of the present invention includes a mounting table (e.g., mounting table 4) on which a sheet-shaped object to be laminated (e.g., sheet S) is placed, and a stacking table on which a plurality of the objects to be laminated are laminated. (e.g., stacking table 6), an articulated robot (e.g., transport device 5) that holds and transports the objects to be stacked, and an imaging device (e.g., an imaging device) that captures images of characteristic parts of the objects to be stacked. 81 to 84), and, based on the image, the intermediate laminate (for example, the intermediate laminate IL) constituted by the objects to be stacked on the stacking table, which is held by the articulated robot. a position adjustment section (for example, position adjustment section 311) that adjusts the position of the stacked body; a distance adjustment mechanism that adjusts the relative distance between the intermediate stacked body and the stacked body held by the articulated robot; (e.g., elevating device 7); present manufacturing method), the multi-joint robot holds the stacked objects placed on the mounting table (for example, a holding step); a step of transporting the object above the table (e.g., a transport step); a step of the imaging device taking an image of the object to be stacked held by the articulated robot (e.g., an imaging step); a step in which the adjustment unit adjusts the position of the stacked body held by the articulated robot with respect to the intermediate stacked body (for example, a position adjustment step); and a step in which the distance adjustment mechanism adjusts the position of the stacked body held by the articulated robot with respect to the intermediate stacked body; , a step of stacking the object to be stacked on the intermediate laminate by adjusting the relative distance between the object to be stacked and the object held by the articulated robot (e.g., a stacking step). It is a method of manufacturing the body.
According to this configuration, the conveyance path of the ceramic green sheet can be freely laid out.

1 Lamination device 1A Lamination device (first modification)
1B Laminating device (second modification)
1C Laminating device (third modification)
1D lamination device (4th modification)
311 Position adjustment unit 4 Mounting table 5 Transfer device (articulated robot, distance adjustment mechanism)
53 Holding member 53b Lower surface (holding surface)
53c Window 53d Window 53e Window 53f Window 6 Stacking table 7 Lifting device (distance adjustment mechanism)
81 Imaging device 82 Imaging device 83 Imaging device 84 Imaging device 91 Light source 92 Light source 93 Light source 94 Light source 95 Moving device 101 Charging bar (auxiliary processing device)
IL Intermediate laminate ILa Top surface L laminate P1 Placement position P2 Standby position P5 Retraction position P6 Irradiation position S Ceramic green sheet (laminated body)

Claims (6)

a mounting table on which a sheet-shaped object to be laminated is mounted;
a stacking table on which a plurality of the objects to be stacked are stacked;
an articulated robot that holds the stacked objects and transports them from a mounting position on the mounting table to a standby position above the stacking table;
an imaging device that captures an image of a characteristic portion of the stacked body held by the articulated robot;
a position adjustment unit that adjusts the position of the stacked body held by the articulated robot with respect to an intermediate stacked body formed of the stacked bodies stacked on the stacking table based on the image;
a distance adjustment mechanism that stacks the stacked body on the intermediate stacked body by adjusting a relative distance between the intermediate stacked body and the stacked body held by the articulated robot;
It has
The distance adjustment mechanism is a lifting device that lifts and lowers the stacking table,
The lifting device stacks the stacked bodies on the intermediate stacked body by raising the stacking table toward the stacked bodies held by the articulated robot at the standby position.
Lamination equipment. a light source that irradiates light toward the stacked body held by the articulated robot;
a moving device that moves the light source between an irradiation position below the standby position and a retracted position that does not inhibit adjustment of the relative distance by the distance adjustment mechanism;
It has
The imaging device is arranged above the standby position,
The mobile device includes:
When the imaging device starts imaging the feature, moving the light source from the retracted position to the irradiation position,
when the imaging device finishes imaging the characteristic portion, moving the light source from the irradiation position to the retreat position;
The laminating apparatus according to claim 1 . The articulated robot includes a holding member that holds the object to be laminated,
The holding member includes a window portion configured to allow the imaging device to image a portion of the stacked body held by the holding member from above when the stacked body is transported to the standby position. ,
The laminating apparatus according to claim 2 . The position adjustment unit adjusts the position of the stacked object held by the multi-joint robot until the amount of positional deviation of the stacked object held by the multi-joint robot with respect to the intermediate stacked body satisfies a predetermined threshold value. repeating the adjustment of the position of the laminate;
The laminating apparatus according to claim 1 . An auxiliary processing device that performs an auxiliary process to assist the lamination on the upper surface of the intermediate laminate or the lower surface of the object to be laminated, before the object to be laminated is laminated on the intermediate laminate;
It has
The articulated robot includes a holding member having a holding surface that holds the object to be laminated,
The auxiliary processing device is attached to the holding member and performs the auxiliary processing on the upper surface of the intermediate laminate;
The articulated robot is
When the distance adjustment mechanism adjusts the relative distance, the holding surface is directed toward the upper surface,
When the auxiliary processing device executes the auxiliary processing, changing the orientation of the holding member so that the auxiliary processing device is directed toward the upper surface side;
The laminating apparatus according to claim 1. a mounting table on which a sheet-shaped object to be laminated is mounted;
a stacking table on which a plurality of the objects to be stacked are stacked;
an articulated robot that holds the stacked objects and transports them from a mounting position on the mounting table to a standby position above the stacking table ;
an imaging device that captures an image of a characteristic portion of the laminated body;
a position adjustment unit that adjusts the position of the stacked body held by the articulated robot with respect to an intermediate stacked body formed of the stacked bodies stacked on the stacking table based on the image;
a distance adjustment mechanism that adjusts a relative distance between the intermediate stacked body and the stacked body held by the articulated robot;
A method for manufacturing a laminate carried out by a laminate apparatus comprising:
The distance adjustment mechanism is a lifting device that lifts and lowers the stacking table,
a step in which the articulated robot holds the stacked body placed on the mounting table;
a step in which the articulated robot transports the stacked objects to the standby position ;
a step in which the imaging device captures the image of the stacked object held by the articulated robot;
the position adjustment unit adjusting the position of the stacked body held by the articulated robot with respect to the intermediate stacked body;
The lifting device raises the stacking table toward the stacked body held by the articulated robot at the standby position, and lifts the intermediate stacked body and the stacked body held by the articulated robot. laminating the object to be laminated on the intermediate laminate by adjusting the relative distance between the laminate and the intermediate laminate;
including,
Method for manufacturing a laminate.

Images