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JP7452466B2 - Fuel cell separator manufacturing equipment - Google Patents
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JP7452466B2 - Fuel cell separator manufacturing equipment - Google Patents

Fuel cell separator manufacturing equipment Download PDF

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JP7452466B2
JP7452466B2 JP2021027720A JP2021027720A JP7452466B2 JP 7452466 B2 JP7452466 B2 JP 7452466B2 JP 2021027720 A JP2021027720 A JP 2021027720A JP 2021027720 A JP2021027720 A JP 2021027720A JP 7452466 B2 JP7452466 B2 JP 7452466B2
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metal base
base material
fuel cell
hook member
cell separator
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JP2022129141A (en
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仁 谷野
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Toyota Motor Corp
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Toyota Motor Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/02Details
    • H01M8/0202Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/023Porous and characterised by the material
    • H01M8/0232Metals or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/02Details
    • H01M8/0202Collectors; Separators, e.g. bipolar separators; Interconnectors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Fuel Cell (AREA)

Description

本発明は、燃料電池用セパレータの製造装置に関する。 The present invention relates to an apparatus for manufacturing a fuel cell separator.

従来、このような技術分野として、例えば特許文献1に記載されるように、重力方向に沿って配置された金属基材に対し、PVD(Physical Vapor Deposition)法によって金属被膜を形成する燃料電池用セパレータの製造装置が知られている。 Conventionally, as described in Patent Document 1, for example, as described in Patent Document 1, a technology for fuel cells in which a metal film is formed by a PVD (Physical Vapor Deposition) method on a metal base material arranged along the direction of gravity. Separator manufacturing apparatuses are known.

特開2008-277287号公報JP2008-277287A

上述した燃料電池用セパレータの製造装置では、フレーム部材を用いて金属基材の一部を覆うことにより、該金属基材を固定する。しかし、フレーム部材で金属基材の一部を覆うと、PVD成膜際の加熱処理では、金属基材に対して熱が加わる箇所と加わらない箇所が発生し、金属基材が熱変形する問題が生じる。 In the fuel cell separator manufacturing apparatus described above, the metal base material is fixed by covering a part of the metal base material using a frame member. However, if a part of the metal base material is covered with a frame member, heat treatment during PVD film formation may cause heat to be applied to the metal base material in some areas and areas not to be applied to the metal base material, resulting in thermal deformation of the metal base material. occurs.

このような問題を防止するために、金属基材を覆わずに固定することが求められており、例えば金属基材に設けられたマニホールド(すなわち、空孔)を活用しフック部材に引掛けて吊り下げることが検討されている。しかし、この場合は、PVD成膜中に金属基材が振動等の原因で揺れやすく、金属基材がフックから外れる可能性がある。 In order to prevent such problems, it is required to fix the metal base material without covering it, for example, by using the manifold (i.e. hole) provided in the metal base material and hooking it on a hook member. Hanging it down is being considered. However, in this case, the metal base material is likely to shake due to vibrations or the like during PVD film formation, and there is a possibility that the metal base material may come off the hook.

本発明は、このような技術課題を解決するためになされたものであって、金属基材がフック部材から外れるのを抑制できる燃料電池用セパレータの製造装置を提供することを目的とする。 The present invention has been made to solve these technical problems, and an object of the present invention is to provide a fuel cell separator manufacturing apparatus that can suppress the metal base material from coming off the hook member.

本発明に係る燃料電池用セパレータの製造装置は、少なくとも一端部に空孔が設けられた板状の金属基材を他端部を自然垂下させた状態で吊り下げて、前記金属基材の表面に成膜して燃料電池用セパレータを製造する燃料電池用セパレータ製造装置であって、前記金属基材の前記空孔に挿通可能な開放端と、前記開放端の反対側である固定端とを有するフック部材と、前記金属基材の揺れを規制するように、前記金属基材の前記他端部側且つ前記フック部材の前記固定端側に位置し、前記金属基材と隙間を空けて配置された第1規制部材と、を備えることを特徴としている。 The fuel cell separator manufacturing apparatus according to the present invention suspends a plate-shaped metal base material provided with holes at least on one end with the other end hanging naturally, and A fuel cell separator manufacturing apparatus for manufacturing a fuel cell separator by forming a film on the metal substrate, the apparatus comprising: an open end that can be inserted into the hole of the metal base material; and a fixed end that is opposite to the open end. and a hook member located on the other end side of the metal base material and on the fixed end side of the hook member, and arranged with a gap from the metal base material so as to restrict swinging of the metal base material. and a first regulating member.

本発明に係る燃料電池用セパレータの製造装置では、金属基材の揺れを規制するように、金属基材の他端部側且つフック部材の固定端側に位置し、金属基材と隙間を空けて配置された第1規制部材を備えるので、該第1規制部材を利用して金属基材がフック部材から外れるのを抑制することができる。しかも、第1規制部材が金属基材と隙間を空けて配置されるので、該第1規制部材の配置による金属基材の成膜への影響を抑えることができる。 In the fuel cell separator manufacturing apparatus according to the present invention, the hook member is located on the other end side of the metal base material and on the fixed end side of the hook member, and is spaced apart from the metal base material so as to restrict the shaking of the metal base material. Since the first regulating member is provided, the first regulating member can be used to prevent the metal base material from coming off the hook member. Moreover, since the first regulating member is arranged with a gap between it and the metal base material, it is possible to suppress the influence of the arrangement of the first regulating member on the film formation of the metal base material.

本発明に係る燃料電池用セパレータの製造装置において、前記第1規制部材と対応するように、前記金属基材の前記他端部側且つ前記フック部材の前記開放端側に位置し、前記金属基材と隙間を空けて配置された第2規制部材を更に備えることが好ましい。このようにすれば、第1規制部材及び第2規制部材の協働によりフック部材の固定端側及び開放端側の双方から金属基材の揺れを規制することで、金属基材がフック部材から外れるのをより確実に抑制できる。しかも、第2規制部材が金属基材と隙間を空けて配置されるので、該第2規制部材の配置による金属基材の成膜への影響を抑えることができる。その結果、金属基材の成膜を確実に行うことができる。 In the fuel cell separator manufacturing apparatus according to the present invention, the metal substrate is located on the other end side of the metal base material and on the open end side of the hook member so as to correspond to the first regulating member. It is preferable to further include a second regulating member disposed with a gap from the material. In this way, the first regulating member and the second regulating member cooperate to regulate the swinging of the metal base material from both the fixed end side and the open end side of the hook member, so that the metal base material can be moved away from the hook member. You can more reliably prevent it from coming off. Moreover, since the second regulating member is arranged with a gap between the second regulating member and the metal base material, it is possible to suppress the influence of the arrangement of the second regulating member on the film formation of the metal base material. As a result, it is possible to reliably form a film on the metal base material.

また、本発明に係る燃料電池用セパレータの製造装置において、前記フック部材の前記固定端は、前記第1規制部材に固定されており、重力方向において、前記フック部材の前記開放端と前記第2規制部材との間には、隙間が設けられていることが好ましい。このようにすれば、金属基材の空孔にフック部材の開放端をスムーズに挿通できるので、金属基材を容易にフック部材に引掛けることができる。 Further, in the fuel cell separator manufacturing apparatus according to the present invention, the fixed end of the hook member is fixed to the first regulating member, and in the direction of gravity, the open end of the hook member and the second It is preferable that a gap be provided between the regulating member and the regulating member. In this way, the open end of the hook member can be smoothly inserted into the hole in the metal base material, so that the metal base material can be easily hooked onto the hook member.

本発明によれば、金属基材がフック部材から外れるのを抑制することができる。 According to the present invention, it is possible to suppress the metal base material from coming off the hook member.

燃料電池用セパレータの金属基材を示す平面図である。FIG. 2 is a plan view showing a metal base material of a fuel cell separator. 実施形態に係る燃料電池用セパレータの製造装置を示す斜視図である。FIG. 1 is a perspective view showing a fuel cell separator manufacturing apparatus according to an embodiment. 図2に示すA-A線に沿う断面図である。3 is a sectional view taken along line AA shown in FIG. 2. FIG. 燃料電池用セパレータの製造装置の関連寸法を示す模式側面図である。FIG. 2 is a schematic side view showing the relevant dimensions of the fuel cell separator manufacturing apparatus. 金属基材が右側横架材に当たったときの上昇距離を説明するための図である。It is a figure for demonstrating the rising distance when a metal base material hits a right side horizontal member.

以下、図面を参照して燃料電池用セパレータの製造装置の実施形態を説明する。下記の説明において、上下、左右の方向及び位置は説明の便宜上のものに過ぎず、燃料電池用セパレータの製造装置の姿勢や配置を限定するものではない。 Hereinafter, embodiments of a manufacturing apparatus for a fuel cell separator will be described with reference to the drawings. In the following description, the vertical, horizontal, and horizontal directions and positions are merely for convenience of explanation, and do not limit the posture or arrangement of the fuel cell separator manufacturing apparatus.

本実施形態の燃料電池用セパレータの製造装置10は、薄板状の金属基材1を重力方向に吊り下げた状態で、該金属基材の表面に成膜して燃料電池用セパレータを製造するための装置である。ここで、まず燃料電池用セパレータ及びその金属基材を簡単に説明する。 The fuel cell separator manufacturing apparatus 10 of the present embodiment is for manufacturing a fuel cell separator by forming a film on the surface of a thin metal base material 1 while the metal base material 1 is suspended in the direction of gravity. This is the device. Here, first, a fuel cell separator and its metal base material will be briefly explained.

燃料電池用セパレータは、電解質膜及び電極等の部材とともに積層されて燃料電池を構成するものであって、燃料ガス又は酸化ガスといった反応ガスの流路を形成するための部材である。燃料電池用セパレータには、充分な導電性と、燃料電池内部の環境下における充分な耐食性が要求されている。このため、燃料電池用セパレータは、導電性を有する金属基材の表面(両面)全体に、PVD法でチタン等の金属酸化膜とカーボン等の導電性被膜を順に形成する(言い換えれば、成膜する)ことが必要である。PVD法は、特に限定しないが、例えばスパッタリング、真空蒸着、イオン化蒸着、又はイオンプレーティング等を利用した物理的蒸着法であれば良い。 A fuel cell separator is a member that is stacked together with members such as an electrolyte membrane and electrodes to form a fuel cell, and is a member for forming a flow path for a reactive gas such as a fuel gas or an oxidizing gas. Fuel cell separators are required to have sufficient electrical conductivity and sufficient corrosion resistance in the environment inside the fuel cell. For this reason, fuel cell separators are produced by sequentially forming a metal oxide film such as titanium and a conductive film such as carbon on the entire surface (both sides) of a conductive metal base material using the PVD method. It is necessary to. The PVD method is not particularly limited, but any physical vapor deposition method using sputtering, vacuum evaporation, ionized evaporation, ion plating, or the like may be used.

図1は燃料電池用セパレータの金属基材を示す平面図である。図1に示すように、金属基材1は、矩形板状を呈しており、導電性やガス不透過性等に優れたステンレス、チタン、アルミニウム、ニオブ等の金属材料によって形成されている。金属基材1の中央部分には反応ガスの流路を形成するための凹部が複数形成されているが、図1では該凹部を省略している。 FIG. 1 is a plan view showing a metal base material of a fuel cell separator. As shown in FIG. 1, the metal base material 1 has a rectangular plate shape and is made of a metal material such as stainless steel, titanium, aluminum, or niobium that has excellent conductivity and gas impermeability. A plurality of recesses are formed in the central portion of the metal base material 1 to form flow paths for the reactant gas, but the recesses are omitted in FIG. 1.

金属基材1の長手方向の両端部には、それぞれ3つの空孔2が形成されている。より具体的には、該金属基材1の長手方向の一端部1a(図1では、上端部1a)に、燃料ガス入口用空孔2aと、冷媒出口用空孔2bと、酸化剤ガス出口用空孔2cとが順に設けられており、金属基材1の長手方向の他端部1b(図1では下端部1b)に、酸化剤ガス入口用空孔2dと、冷媒入口用空孔2eと、燃料ガス出口用空孔2fとが順に設けられている。以下では、これらの空孔をまとめて空孔2という。これらの空孔2は、マニホールド孔ともいい、それぞれ矩形状に形成されている。 Three holes 2 are formed at both ends of the metal base material 1 in the longitudinal direction, respectively. More specifically, a fuel gas inlet hole 2a, a refrigerant outlet hole 2b, and an oxidizing gas outlet are provided at one longitudinal end 1a (upper end 1a in FIG. 1) of the metal base 1. Oxidant gas inlet holes 2d and refrigerant inlet holes 2e are provided at the other longitudinal end 1b (lower end 1b in FIG. 1) of the metal base 1 in this order. and a fuel gas outlet hole 2f are provided in this order. Below, these holes are collectively referred to as holes 2. These holes 2 are also called manifold holes, and are each formed in a rectangular shape.

図2は実施形態に係る燃料電池用セパレータの製造装置を示す斜視図であり、図3は図2に示すA-A線に沿う断面図である。図2及び図3において、燃料電池用セパレータの製造装置10の構造をより分かり易くするために、金属基材1も示している。図2に示すように、燃料電池用セパレータの製造装置10は、主に、複数の長尺部材を組み立ててなるラック11と、該ラック11に取り付けられて金属基材1を吊り下げる複数のフック部材12とを備えている。 FIG. 2 is a perspective view showing a fuel cell separator manufacturing apparatus according to the embodiment, and FIG. 3 is a sectional view taken along line AA shown in FIG. 2. In FIGS. 2 and 3, the metal base material 1 is also shown in order to make the structure of the fuel cell separator manufacturing apparatus 10 easier to understand. As shown in FIG. 2, the fuel cell separator manufacturing apparatus 10 mainly includes a rack 11 formed by assembling a plurality of elongated members, and a plurality of hooks attached to the rack 11 for suspending the metal base material 1. member 12.

ラック11は、基台となる台車111と、台車111に所定の間隔で離れた状態で立設された2本の支柱112,113と、支柱112,113の上端部において該支柱112,113の間に架設された上側横梁114と、支柱112,113を挟持するように該支柱112,113の間に架設された複数組の左右一対の横架材(左側横架材115,右側横架材116)とを有する。 The rack 11 includes a truck 111 serving as a base, two columns 112 and 113 that are erected on the truck 111 at a predetermined distance apart, and two columns 112 and 113 at the upper ends of the columns 112 and 113. An upper cross beam 114 is installed between the upper cross beam 114 and a plurality of pairs of left and right horizontal beams (left side cross member 115, right side cross member 115, right side cross member 115, right side cross member 116).

複数組の左側横架材115及び右側横架材116は、上側横梁114の下方に位置するとともに、上下方向(本実施形態では、上下方向はすなわち重力方向)に沿って所定の間隔をもって配置されている。これによって、ラック11は複数段に分けられている。本実施形態では、左側横架材115及び右側横架材116は、3組であり、上下方向において等間隔で配置されている。従って、ラック11は、上下3段構造になっている。 The plurality of sets of left side horizontal members 115 and right side horizontal members 116 are located below the upper side crossbeam 114 and are arranged at predetermined intervals along the vertical direction (in this embodiment, the vertical direction is the direction of gravity). ing. As a result, the rack 11 is divided into multiple stages. In this embodiment, there are three sets of left side horizontal members 115 and right side horizontal members 116, which are arranged at equal intervals in the vertical direction. Therefore, the rack 11 has an upper and lower three-tier structure.

図3に示すように、フック部材12は、例えば金属ワイヤによって鈎状に形成されており、ラック11に固定された固定端121と、固定端121の反対側であって金属基材1の空孔2に挿通可能な開放端122とを有する。このようなフック部材12は、金属基材1の上端部1aに設けられた3つの空孔2と対応するように3つのフック部材12を1組とし、ラック11の各段にそれぞれ配列されている。 As shown in FIG. 3, the hook member 12 is formed in the shape of a hook by, for example, a metal wire, and has a fixed end 121 fixed to the rack 11 and an empty space in the metal base material 1 on the opposite side of the fixed end 121. It has an open end 122 that can be inserted into the hole 2. Such hook members 12 are arranged in a set of three hook members 12 in each stage of the rack 11 so as to correspond to the three holes 2 provided in the upper end portion 1a of the metal base material 1. There is.

より具体的には、最上段である1段目では、各フック部材12の固定端121が溶接や接着等で上側横梁114の下端に固定されており、各フック部材12の開放端122が同じ方向(図2及び3では、左方向)に向けられている。 More specifically, in the first stage, which is the highest stage, the fixed end 121 of each hook member 12 is fixed to the lower end of the upper cross beam 114 by welding, adhesive, etc., and the open end 122 of each hook member 12 is the same. direction (leftward in FIGS. 2 and 3).

中間段である2段目では、各フック部材12の固定端121が溶接や接着等で右側横架材116の下端に固定されており、各フック部材12の開放端122が左側横架材115に向けられている。そして、上下方向において、開放端122と左側横架材115との間には、隙間が設けられている。 In the second stage, which is an intermediate stage, the fixed end 121 of each hook member 12 is fixed to the lower end of the right side horizontal member 116 by welding, adhesive, etc., and the open end 122 of each hook member 12 is fixed to the lower end of the right side horizontal member 115. is directed towards. A gap is provided between the open end 122 and the left horizontal member 115 in the vertical direction.

最下段である3段目では、各フック部材12の固定端121が溶接や接着等で右側横架材116の下端に固定されており、各フック部材12の開放端122が左側横架材115に向けられている。そして、上下方向において、開放端122と左側横架材115との間には、隙間が設けられている。 In the third stage, which is the lowest stage, the fixed end 121 of each hook member 12 is fixed to the lower end of the right side horizontal member 116 by welding, adhesive, etc., and the open end 122 of each hook member 12 is fixed to the lower end of the left side horizontal member 115. is directed towards. A gap is provided between the open end 122 and the left horizontal member 115 in the vertical direction.

このような燃料電池用セパレータの製造装置10を用いて金属基材1の表面に成膜する際に、まず、金属基材1の上端部1aに設けられた空孔2にフック部材12の開放端122を挿通させ、金属基材1の下端部1bを自然垂下させた状態で、金属基材1をフック部材12に引掛けて吊り下げる。次に、金属基材1が吊り下げられたラック11をインライン設備のラインに載せ、真空引き、加熱、イオンエッチング、チタン等の金属酸化膜の形成、カーボン等の導電性被膜の形成、冷却等の処理を順次行うことにより、燃料電池用セパレータを製造する。 When forming a film on the surface of the metal base material 1 using such a fuel cell separator manufacturing apparatus 10, first, the hook member 12 is opened in the hole 2 provided in the upper end portion 1a of the metal base material 1. With the end 122 inserted through and the lower end 1b of the metal base 1 naturally hanging down, the metal base 1 is hooked onto the hook member 12 and suspended. Next, the rack 11 with the metal base material 1 suspended thereon is placed on the line of in-line equipment, and subjected to evacuation, heating, ion etching, formation of a metal oxide film such as titanium, formation of a conductive film such as carbon, cooling, etc. A fuel cell separator is manufactured by sequentially performing the following processes.

そして、上記処理を行う際に、振動等の原因で金属基材1はその法線方向において揺れる場合がある。特に、自然垂下した金属基材1の下端部1bは、フリーな状態であるので、揺れの範囲が大きい。ここでの法線方向は、すなわち金属基材1の表面と直交する方向であり、図2及び図3では左右方向を指す。この揺れによって、PVD蒸着源との距離が変動し、金属基材1の表面に形成された被膜の膜厚と膜質が不安定になる問題が生じる。また、この揺れによって、空孔2が形成された金属基材1の上端部1aのエッジとフック部材12とが干渉し、上端部1aが変形する問題が発生してしまう。更に揺れが大きい場合は、金属基材1がフック部材12から外れて落下する可能性がある。 When performing the above processing, the metal base material 1 may shake in its normal direction due to vibrations or the like. In particular, since the lower end portion 1b of the metal base material 1, which naturally hangs down, is in a free state, the range of sway is large. The normal direction here is a direction perpendicular to the surface of the metal base material 1, and refers to the left-right direction in FIGS. 2 and 3. This vibration causes a problem in that the distance to the PVD deposition source fluctuates, and the thickness and quality of the film formed on the surface of the metal base material 1 become unstable. Further, due to this shaking, the edge of the upper end 1a of the metal base material 1 in which the holes 2 are formed interferes with the hook member 12, causing a problem that the upper end 1a is deformed. If the shaking is even larger, there is a possibility that the metal base material 1 will come off the hook member 12 and fall.

上記問題を解決するため、本実施形態の燃料電池用セパレータの製造装置10では、左側横架材115及び右側横架材116を用いて金属基材1の揺れを規制する。具体的には、右側横架材116は、特許請求の範囲に記載の「第1規制部材」に相当するものであり、吊り下げられた金属基材1の下端部1b側且つフック部材12の固定端121側に位置し、金属基材1の表面と隙間を空けて配置されている。 In order to solve the above problem, in the fuel cell separator manufacturing apparatus 10 of the present embodiment, the left side horizontal member 115 and the right side horizontal member 116 are used to restrict the shaking of the metal base material 1. Specifically, the right side horizontal member 116 corresponds to the "first regulating member" described in the claims, and is located on the lower end 1b side of the suspended metal base material 1 and on the hook member 12. It is located on the fixed end 121 side and is arranged with a gap between it and the surface of the metal base material 1 .

一方、左側横架材115は、特許請求の範囲に記載の「第2規制部材」に相当するものである。左側横架材115は、右側横架材116と対応するように、吊り下げられた金属基材1の下端部1b側且つフック部材12の開放端122側に位置し、金属基材1の表面と隙間を空けて配置されている(図2参照)。 On the other hand, the left side horizontal member 115 corresponds to the "second regulating member" described in the claims. The left side horizontal member 115 is located on the lower end 1b side of the suspended metal base material 1 and on the open end 122 side of the hook member 12 so as to correspond to the right side horizontal member 116, and is located on the surface of the metal base material 1. They are arranged with a gap between them (see Figure 2).

上述したように、ラック11の2段目及び3段目では、フック部材12の固定端121が右側横架材116の下端に固定されており、フック部材12の開放端122が左側横架材115に向けられている。図3に示すように、上下方向において、フック部材12の開放端122と左側横架材115との間には、隙間が設けられている。ここの隙間は、金属基材1の空孔2に開放端122を挿通させる際に金属基材1の上端部1aと干渉しない程度に設定されている。 As described above, in the second and third stages of the rack 11, the fixed end 121 of the hook member 12 is fixed to the lower end of the right horizontal member 116, and the open end 122 of the hook member 12 is fixed to the lower end of the right horizontal member 116. It is aimed at 115. As shown in FIG. 3, a gap is provided between the open end 122 of the hook member 12 and the left horizontal member 115 in the vertical direction. The gap here is set to such an extent that when the open end 122 is inserted into the hole 2 of the metal base material 1, it does not interfere with the upper end portion 1a of the metal base material 1.

以上のように構成された燃料電池用セパレータの製造装置10では、金属基材1の揺れを規制するように、金属基材1の下端部1b側且つフック部材12の固定端121側に位置し、金属基材1の表面と隙間を空けて配置された右側横架材116を備えるので、該右側横架材116を利用し金属基材1の揺れを規制することで、金属基材1がフック部材12から外れるのを抑制することができる。しかも、右側横架材116が金属基材1の表面と隙間を空けて配置されるので、該右側横架材116の配置による金属基材1の成膜への影響を抑えることができる。 In the fuel cell separator manufacturing apparatus 10 configured as described above, the metal base material 1 is located on the lower end 1b side of the metal base material 1 and on the fixed end 121 side of the hook member 12 so as to restrict the shaking of the metal base material 1. Since the right side horizontal member 116 is arranged with a gap between the surface of the metal base material 1 and the right side horizontal member 116, by regulating the shaking of the metal base material 1 using the right side horizontal member 116, the metal base material 1 can be It is possible to prevent it from coming off the hook member 12. Moreover, since the right side horizontal member 116 is arranged with a gap between the surface of the metal base material 1 and the surface of the metal base material 1, the influence of the arrangement of the right side horizontal member 116 on the film formation of the metal base material 1 can be suppressed.

加えて、右側横架材116と対応するように、金属基材1の下端部1b側且つフック部材12の開放端122側に位置し、金属基材1の揺れを規制する左側横架材115を更に備える。このようにすれば、右側横架材116及び左側横架材115の協働によりフック部材12の固定端121側及び開放端122側の双方から金属基材1の揺れを規制することで、金属基材1がフック部材12から外れるのをより確実に抑制できる。しかも、左側横架材115が金属基材1の表面と隙間を空けて配置されるので、該左側横架材115の配置による金属基材1の成膜への影響を抑えることができる。その結果、金属基材1の成膜を確実に行うことができる。 In addition, a left side horizontal member 115 is located on the lower end 1b side of the metal base material 1 and on the open end 122 side of the hook member 12 so as to correspond to the right side horizontal member 116, and restricts the swinging of the metal base material 1. It further includes: In this way, the right side horizontal member 116 and the left side horizontal member 115 cooperate to restrict the swinging of the metal base material 1 from both the fixed end 121 side and the open end 122 side of the hook member 12. The base material 1 can be more reliably prevented from coming off the hook member 12. Furthermore, since the left side horizontal member 115 is arranged with a gap between the surface of the metal base material 1 and the surface of the metal base material 1, the influence of the arrangement of the left side horizontal member 115 on the film formation of the metal base material 1 can be suppressed. As a result, the metal base material 1 can be deposited reliably.

更に、フック部材12の固定端121は、右側横架材116に固定されており、上下方向(言い換えれば、重力方向)において、フック部材12の開放端122と左側横架材115との間には、隙間が設けられている。このようにすれば、金属基材1の空孔2にフック部材12の開放端122をスムーズに挿通できるので、金属基材1を容易にフック部材12に引掛けることができる。 Furthermore, the fixed end 121 of the hook member 12 is fixed to the right side horizontal member 116, and there is a space between the open end 122 of the hook member 12 and the left side horizontal member 115 in the vertical direction (in other words, in the direction of gravity). There is a gap. In this way, the open end 122 of the hook member 12 can be smoothly inserted into the hole 2 of the metal base material 1, so that the metal base material 1 can be easily hooked onto the hook member 12.

図4に示すように、燃料電池用セパレータの製造装置10の側面視において、自然垂下して静止した金属基材1の中心を通る中心線Lに対し、左側横架材115及び右側横架材116は、それぞれ30mmの範囲に配置されるのが好ましい。すなわち、左側横架材115の金属基材1に面する表面から金属基材1の中心線Lまでの最短距離と、右側横架材116の金属基材1に面する表面から金属基材1の中心線Lまでの最短距離とが等しい場合、該最短距離Xは、X≦30mmの関係を満たす。このようにすれば、仮に金属基材1が振動等で揺れたとしても、PVD蒸着源との距離のばらつきを許与範囲に抑えることができるので、金属基材1の表面に形成された被膜の膜厚と膜質の安定性を確保することができる。 As shown in FIG. 4, in a side view of the fuel cell separator manufacturing apparatus 10, the left side horizontal member 115 and the right side horizontal member 116 are preferably arranged within a range of 30 mm each. That is, the shortest distance from the surface of the left horizontal member 115 facing the metal base material 1 to the center line L of the metal base material 1, and the shortest distance from the surface of the right side horizontal member 116 facing the metal base material 1 to the metal base material 1 is equal to the shortest distance to the center line L, the shortest distance X satisfies the relationship X≦30 mm. In this way, even if the metal base material 1 shakes due to vibration etc., the variation in the distance to the PVD deposition source can be suppressed within a permissible range, so that the coating formed on the surface of the metal base material 1 can be The stability of film thickness and film quality can be ensured.

また、上下方向において、金属基材1の上端部1aに設けられた空孔2の上端から金属基材1の下端までの長さをa(図1参照)、左側横架材115の高さをd(図4参照)としたとき、左側横架材115の高さdは、下記式(1)を満たすことが好ましい。
a(1-(1-(X/a)2)0.5)+3≦d≦a(1-(1-(30/X)2)0.5)+20 (1)
In addition, in the vertical direction, the length from the upper end of the hole 2 provided in the upper end 1a of the metal base material 1 to the lower end of the metal base material 1 is a (see FIG. 1), and the height of the left side horizontal member 115 is is d (see FIG. 4), it is preferable that the height d of the left horizontal member 115 satisfies the following formula (1).
a(1-(1-(X/a) 2 ) 0.5 )+3≦d≦a(1-(1-(30/X) 2 ) 0.5 )+20 (1)

式(1)において、Xは上述した左側横架材115の金属基材1に面する表面(又は右側横架材116の金属基材1に面する表面)から金属基材1の中心線Lまでの最短距離である。X、a及びdの単位はともにmmである。また、式(1)中のa(1-(1-(X/a)2)0.5)は、例えば図5に示すように、金属基材1が揺れて右側横架材116に当たったときの、金属基材1の下端が最下点から上昇した距離Zである。なお、Zは金属基材1が揺れて左側横架材115に当たったときの、金属基材1の下端が最下点から上昇した距離であっても良い。 In formula (1), This is the shortest distance to. The units of X, a and d are all mm. In addition, a(1-(1-(X/a) 2 ) 0.5 ) in equation (1) is, for example, when the metal base material 1 shakes and hits the right side horizontal member 116, as shown in FIG. is the distance Z that the lower end of the metal base material 1 has risen from the lowest point. Note that Z may be the distance that the lower end of the metal base material 1 rises from the lowest point when the metal base material 1 swings and hits the left side horizontal member 115.

具体的には、図5に示すように、aは上記金属基材1の上端部1aに設けられた空孔2の上端から金属基材1の下端までの長さであり、Xは上記右側横架材116の金属基材1に面する表面から金属基材1の中心線Lまでの最短距離であり、θは金属基材1が自然垂下して静止した位置から右側横架材116に当たった位置までの角度である。 Specifically, as shown in FIG. 5, a is the length from the upper end of the hole 2 provided in the upper end 1a of the metal base 1 to the lower end of the metal base 1, and X is the length from the right side of the metal base 1. It is the shortest distance from the surface of the horizontal member 116 facing the metal base material 1 to the center line L of the metal base material 1, and θ is the distance from the position where the metal base material 1 naturally hangs and stands still to the right side horizontal member 116. This is the angle to the point of impact.

そして、金属基材1が右側横架材116に当たったときの、金属基材1の下端が最下点から上昇した距離Zは、下記式(2)に基づいて計算することができる。
Z=a(1-cosθ) (2)
Then, the distance Z that the lower end of the metal base material 1 rises from the lowest point when the metal base material 1 hits the right side horizontal member 116 can be calculated based on the following formula (2).
Z=a(1-cosθ) (2)

更に、cosθは下記式(3)に基づいて計算することができる。
cosθ=(1-sin2θ)0.5=(1-(X/a)2)0.5 (3)
Furthermore, cosθ can be calculated based on the following equation (3).
cosθ=(1-sin 2 θ) 0.5 =(1-(X/a) 2 ) 0.5 (3)

そして、式(3)を式(2)に代入すると、下記式(4)になる。
Z=a(1-(1-(X/a)2)0.5) (4)
Then, by substituting equation (3) into equation (2), the following equation (4) is obtained.
Z=a(1-(1-(X/a) 2 ) 0.5 ) (4)

左側横架材115の高さdが小さすぎると、左側横架材115が規制部材としての役割を充分に果たさない可能性がある。一方、左側横架材115の高さdが大きすぎると、左側横架材115が成膜時の陰となり、金属基材1の表面全面の成膜ができなくなる可能性がある。上述の式(1)を満たすことで、左側横架材115は規制部材としての役割を充分に果たしつつ金属基材1の成膜への影響を抑えることができる。 If the height d of the left side horizontal member 115 is too small, the left side horizontal member 115 may not sufficiently fulfill its role as a regulating member. On the other hand, if the height d of the left side horizontal member 115 is too large, the left side horizontal member 115 will become a shadow during film formation, and there is a possibility that it will not be possible to form a film on the entire surface of the metal base material 1. By satisfying the above formula (1), the left horizontal member 115 can sufficiently fulfill its role as a regulating member while suppressing the influence on the film formation of the metal base material 1.

なお、右側横架材116の高さについては、左側横架材115の高さと同じであっても良く、フック部材12の開放端122と左側横架材115との隙間を確保するために左側横架材115よりも少し大きくしても良い(図3参照)。 Note that the height of the right side horizontal member 116 may be the same as the height of the left side horizontal member 115, and in order to ensure a gap between the open end 122 of the hook member 12 and the left side horizontal member 115. It may be made slightly larger than the horizontal member 115 (see FIG. 3).

更に、図4に示すように、金属基材1が自然垂下して静止した状態において、金属基材1の中心線Lからフック部材12の固定端121までの最短距離と、金属基材1の中心線Lから開放端122までの最短距離とが等しい場合、該最短距離eは下記式(5)を満たすことが好ましい。
e≧Xb/a (5)
Furthermore, as shown in FIG. 4, when the metal base material 1 naturally hangs and stands still, the shortest distance from the center line L of the metal base material 1 to the fixed end 121 of the hook member 12 and the distance between the metal base material 1 and the fixed end 121 of the hook member 12 are When the shortest distance from the center line L to the open end 122 is equal, it is preferable that the shortest distance e satisfies the following formula (5).
e≧Xb/a (5)

式(5)において、aは上記金属基材1の上端部1aに設けられた空孔2の上端から金属基材1の下端までの長さであり、Xは上記右側横架材116の金属基材1に面する表面から金属基材1の中心線Lまでの最短距離である。bは金属基材1の上端部1aに設けられた空孔2の上端から該金属基材1の上端までの長さである。 In formula (5), a is the length from the upper end of the hole 2 provided in the upper end 1a of the metal base material 1 to the lower end of the metal base material 1, and X is the length of the metal of the right side horizontal member 116. This is the shortest distance from the surface facing the base material 1 to the center line L of the metal base material 1. b is the length from the upper end of the hole 2 provided in the upper end portion 1a of the metal base material 1 to the upper end of the metal base material 1.

金属基材1は薄いため、変形しやすい。空孔2が形成された金属基材1の上端部1aとフック部材12とが干渉すると、金属基材1の上端部1aのエッジが変形する可能性がある。式(5)を満たすことで、エッジ変形を抑制することができる。 Since the metal base material 1 is thin, it is easily deformed. If the upper end 1a of the metal base 1 in which the holes 2 are formed interferes with the hook member 12, the edge of the upper end 1a of the metal base 1 may be deformed. By satisfying equation (5), edge deformation can be suppressed.

以上、本発明の実施形態について詳述したが、本発明は、上述の実施形態に限定されるものではなく、特許請求の範囲に記載された本発明の精神を逸脱しない範囲で、種々の設計変更を行うことができるものである。 Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various designs can be made without departing from the spirit of the present invention as described in the claims. Changes can be made.

1 金属基材
1a 上端部
1b 下端部
2 空孔
10 燃料電池用セパレータの製造装置
11 ラック
12 フック部材
111 台車
112,113 支柱
114 上側横梁
115 左側横架材
116 右側横架材
121 固定端
122 開放端
1 Metal base material 1a Upper end 1b Lower end 2 Hole 10 Fuel cell separator manufacturing device 11 Rack 12 Hook member 111 Carts 112, 113 Support 114 Upper cross beam 115 Left side cross member 116 Right side cross member 121 Fixed end 122 Open end

Claims (1)

少なくとも一端部に空孔が設けられた板状の金属基材を他端部を自然垂下させた状態で吊り下げて、前記金属基材の表面に成膜して燃料電池用セパレータを製造する燃料電池用セパレータ製造装置であって、
前記金属基材の前記空孔に挿通可能な開放端と、前記開放端の反対側である固定端とを有するフック部材と、
前記金属基材の揺れを規制するように、前記金属基材の前記他端部側且つ前記フック部材の前記固定端側に位置し、前記金属基材と隙間を空けて配置された第1規制部材と、
前記第1規制部材と対応するように、前記金属基材の前記他端部側且つ前記フック部材の前記開放端側に位置し、前記金属基材と隙間を空けて配置された第2規制部材と、
を備え
前記フック部材の前記固定端は、前記第1規制部材に固定されており、
重力方向において、前記フック部材の前記開放端と前記第2規制部材との間には、隙間が設けられていることを特徴とする燃料電池用セパレータの製造装置。
A fuel cell separator is manufactured by suspending a plate-shaped metal base material provided with holes at least at one end with the other end hanging naturally, and forming a film on the surface of the metal base material. A battery separator manufacturing device,
a hook member having an open end that can be inserted into the hole of the metal base material and a fixed end that is opposite to the open end;
A first restriction located on the other end side of the metal base material and on the fixed end side of the hook member and spaced from the metal base material so as to restrict swinging of the metal base material. parts and
a second regulating member located on the other end side of the metal base material and on the open end side of the hook member so as to correspond to the first regulating member, and disposed with a gap from the metal base material; and,
Equipped with
The fixed end of the hook member is fixed to the first regulating member,
An apparatus for manufacturing a fuel cell separator , wherein a gap is provided between the open end of the hook member and the second regulating member in the direction of gravity .
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