JP7462339B2 - A traveling robot for traveling the substrate transfer robot within the chamber. - Google Patents

Description

The present invention relates to a traveling robot, and more specifically, to a traveling robot for traveling within a chamber of a substrate processing apparatus, the substrate transfer robot for transferring substrates within the chamber.

Generally, substrates such as wafers for semiconductor devices, glass substrates for displays, or glass substrates for thin-film solar cells are manufactured by performing various processes on the substrate. In this case, the substrate is loaded and processed in a substrate processing apparatus that provides optimal conditions required for each process.

Recently, cluster-type substrate processing devices that can process substrates in bulk have been developed and are being used to improve productivity.

A cluster-type substrate processing apparatus includes a load lock chamber in which substrates are stored, a transfer chamber for transferring the substrates, and multiple process chambers for performing each process.

A substrate transfer robot for transferring substrates is provided in the transfer chamber and can perform substrate transfer from the load lock chamber to the transfer chamber, substrate transfer from the transfer chamber to the load lock chamber, substrate transfer between transfer chambers, or substrate transfer for loading and unloading into and from the process chamber.

Recently, in order to minimize the installation area of substrate processing equipment in a limited space and improve space efficiency, research is underway to change the circular structure in which process chambers are evenly spaced around the outer periphery of the transfer chamber, as in Korean Patent Registration No. 10-2200550, to a square structure in which process chambers are located on both sides of the substrate transfer path of the transfer chamber.

In such a rectangular substrate processing apparatus, the substrate transfer distance in the transfer chamber increases due to the loading and unloading of the substrate in the process chamber.

Therefore, efforts are being made to increase the substrate transfer distance in square-structure substrate processing equipment by using a substrate transfer robot that utilizes a three-bar linkage as shown in U.S. Patent No. 5,993,142.

However, conventional substrate transfer robots using three-bar links use a single motor attached to the base shaft to move each link arm in conjunction with a pulley to perform linear motion, and as this limits the maximum distance over which a substrate can be transferred, if the installation distance of the process chambers is greater than the maximum distance, a single substrate transfer robot cannot transfer substrates.

Therefore, a square structure may necessitate positional movement of the substrate transfer robot to accommodate the installation positions of each process chamber.

To achieve this, a method has been proposed in which a transfer path such as a rail is provided inside the transfer chamber and the transfer robot travels along the transfer path.

However, when providing a transfer path such as a rail within the transfer chamber, a structure for forming the transfer path must first be provided within the transfer chamber, and then the substrate transfer robot must be provided on top of the structure. This not only makes the installation of the substrate transfer robot difficult, but also makes subsequent maintenance and repair work on the substrate transfer robot difficult.

Korean Patent No. 10-2200250 U.S. Patent No. 5,993,142

The purpose of this invention is to solve all of the above problems.

Another object of the present invention is to provide a traveling robot for traveling a substrate transfer robot within a transfer chamber.

Another object of the present invention is to make it possible to easily provide a traveling robot for traveling a substrate transfer robot within a transfer chamber.

Another object of the present invention is to facilitate maintenance and repair of a traveling robot for traveling a substrate transfer robot provided in a transfer chamber.

Another object of the present invention is to provide a traveling robot that maintains a vacuum state in the transfer chamber and travels a substrate transfer robot.

The characteristic features of the present invention that achieve the above-mentioned object of the present invention and realize the characteristic effects of the present invention described below are as follows.

According to one embodiment of the present invention, a traveling robot for traveling a substrate transfer robot within a transfer chamber includes an elevator unit for vertically and rotationally moving an elevator drive shaft provided inside the transfer chamber; a first traveling link arm having a first end region connected to the elevator drive shaft; a first drive motor is provided in a sealed internal space, a first traveling drive shaft interlocked with the first drive motor and a first traveling output shaft interlocked with the first traveling drive shaft are provided to be sealed at a second end region on one side, a second traveling drive shaft interlocked with the first drive motor and a second traveling output shaft interlocked with the second traveling drive shaft are provided to be sealed at a second end region on one side, A traveling robot is provided that includes a second traveling link arm in which a second traveling output shaft is sealed in the other second tip region, and the first traveling output shaft is coupled to the other first tip region of the first traveling link arm; and a third traveling link arm in which a second drive motor is provided in the sealed internal space, a rotation drive shaft interlocked with the second driving motor and a rotation output shaft interlocked with the rotation drive shaft are provided in the other third tip region, one third tip region is coupled to the second traveling output shaft of the second traveling link arm, and a substrate transfer robot is coupled to the rotation output shaft.

The lifting section is located in the outer lower region of the housing that seals the inside of the transfer chamber, and its upper end is connected to the through hole of the transfer chamber formed in the lower region of the housing so as to be sealed, so that the lifting drive shaft can move up and down through the through hole of the transfer chamber.

The rotational speeds of the lift drive shaft, the first travel drive shaft, and the second travel drive shaft may have a speed ratio of 1:2:2.

The rotational speeds of the lift drive shaft, the first travel drive shaft, the second travel drive shaft, and the rotation drive shaft may have a speed ratio of 1:2:2:1.

The lifting drive shaft of the lifting section includes a lifting output shaft that is linked to the lifting drive shaft, and the lifting output shaft is coupled to the first tip region of one of the first traveling link arms, and the rotational speeds of the lifting output shaft, the first traveling output shaft, and the second traveling output shaft can have a speed ratio of 1:2:2.

The lifting drive shaft of the lifting section includes a lifting output shaft that is linked to the lifting drive shaft, and the lifting output shaft is coupled to the first tip region of one of the first traveling link arms, and the rotational speeds of the lifting output shaft, the first traveling output shaft, the second traveling output shaft, and the rotation output shaft can have a speed ratio of 1:2:2:1.

The connection between the first running output shaft and the first tip region of the other may be made by a first connecting member having a first side end of one connected to the first running output shaft and a first side end of the other connected to the first tip region of the other, and the connection between the second running output shaft and the third tip region of the one may be made by a second connecting member having a second side end of one connected to the second running output shaft and a second side end of the other connected to the third tip region of the one.

The distance between the lift drive shaft and the first travel drive shaft, the distance between the first travel drive shaft and the second travel drive shaft, and the distance between the second travel drive shaft and the rotation drive shaft may have a distance ratio of 1:2:1.

Each of the lift drive shaft, the first travel drive shaft, the second travel drive shaft, and the rotation drive shaft is hollow, and wiring for controlling the first drive motor, the second drive motor, and the substrate transfer robot can be provided inside the first travel link arm, the second travel link arm, and the third travel link arm through the hollow.

The substrate transfer robot is divided into a first upper space and a first lower space by a first locking member having a first through hole formed in a central region corresponding to the rotation drive shaft of the second traveling link arm, the first upper space is divided into a second upper space and a second lower space by a first coupling hole sealed by a first cover and a second locking member having a second through hole formed in one fourth end region, the second lower space is divided into a third upper space and a third lower space by a second coupling hole sealed by a second cover and a third locking member having a third through hole formed in the other fourth end region, and the third lower space is divided into a third coupling hole sealed by a second cover. a transfer arm platform having a link connection member including a first blade and a second blade for link connection fixedly connected to a front region (the front is a direction in which the process chamber is located when the substrate transfer robot is located to transfer a substrate to the process chamber connected to the transfer chamber) formed with a joint hole, and the rotation output shaft is fixedly connected to a third connection member which is drawn into the first lower space and fixedly connected to the first locking member; a third drive motor and a first reducer which reduces a rotation speed by half in cooperation with the third drive motor are provided in the sealed internal space, and a third drive motor is connected to the first reducer. a 1_1 transfer link arm: one 5_2 end region of the 1_1 transfer link arm is provided to seal a 1_1 transfer drive shaft which is driven by a 3rd drive motor and a 1_1 transfer output shaft which is interlocked with the 1_1 transfer drive shaft, and a 1_2 transfer drive shaft which is interlocked with the 3rd drive motor and a 1_2 transfer output shaft which is interlocked with the 1_2 transfer drive shaft are provided to seal a 5_1 end region of the other, and the 1_1 transfer output shaft is fixedly connected to a 4_1 connecting member which is pulled into the second upper space of the transfer arm platform and fixedly connected to the second locking member; a first_2 transport link arm fixedly connected to the second transport output shaft through a first fixed connection shaft; a first common link arm rotatably connected to the first fixed connection shaft; a first_1 auxiliary link arm parallel to the first_1 transport link arm, one of which has a 5_3 end region rotatably connected to the first blade of the link connecting member of the transport arm platform and the other of which has a 5_3 end region rotatably connected to a 5_4 end region of one of the first common link arms; a first_1 auxiliary link arm parallel to the first_2 transport link arm, one of which has a 5_5 end region rotatably connected to the other 5_4 end region of the first common link arm; a first_2 auxiliary link arm rotatably coupled to the first common link arm; a first_3 auxiliary link arm rotatably coupled to the first common link arm, the first_3 auxiliary link arm having a 5_6 end region on one side rotatably coupled to the 5_5 end region on the other side of the first_2 auxiliary link arm and a 5_6 end region on the other side rotatably coupled to the 5_2 end region on the other side of the first_2 transfer link arm; and a first end effector fixed to the 5_6 end region on the other side of the first_3 auxiliary link arm and supporting the substrate; and a fourth drive motor in the sealed internal space, and a rotation speed control unit for controlling the rotation speed of the fourth drive motor in cooperation with the fourth drive motor. a second reducer for reducing the rotational speed by 1/2, a 2_1 transfer drive shaft interlocked with the second reducer and a 2_1 transfer output shaft interlocked with the 2_1 transfer drive shaft are provided to be sealed in a 6_1 tip region on one side, and a 2_2 transfer drive shaft interlocked with the 4th drive motor and a 2_2 transfer output shaft interlocked with the 2_2 transfer drive shaft are provided to be sealed in a 6_1 tip region on the other side, and the 2_1 transfer output shaft is fixedly connected to a 4_2 connection member that is pulled into the third upper space of the transfer arm platform and fixedly connected to the third locking member; a second_2 transport link arm having a 6_2 tip region fixedly connected to the 2_2 transport output shaft of the second_1 transport link arm through a second fixed connection shaft; a second common link arm rotatably connected to the second fixed connection shaft; a second_1 auxiliary link arm parallel to the 2_1 transport link arm, one of which has a 6_3 tip region rotatably connected to the second blade of the link connecting member of the transport arm platform and the other of which has a 6_3 tip region rotatably connected to one of the 6_4 tip regions of the second common link arm; It may include a second transfer arm portion including: a second_2 auxiliary link arm, one end region of which is rotatably coupled to the other 6_4 end region of the second common link arm; a second_3 auxiliary link arm, which is parallel to the second common link arm and one 6_6 end region of which is rotatably coupled to the other 6_5 end region of the second_2 auxiliary link arm and the other 6_6 end region of which is rotatably coupled to the other 6_2 end region of the second_2 transfer link arm; and a second end effector, which is fixed to the other 6_6 end region of the second_3 auxiliary link arm and supports the substrate.

The first end effector may be fixed to the other 5_6 tip region through a bracket, or the second end effector may be fixed to the other 6_6 tip region through a bracket.

The transfer arm platform may further include a first wiring hole connecting the first upper space and the second lower space, and a second wiring hole connecting the first upper space and the third lower space.

The present invention allows a traveling robot to be provided within a transfer chamber, and allows the substrate transfer robot to travel within the transfer chamber to transfer substrates.

In addition, by forming the traveling robot into a link arm structure, the present invention makes it possible to easily install the traveling robot within the transfer chamber without providing a separate structure for generating a transfer path.

In addition, the present invention makes it easy to maintain and repair the traveling robot by providing a traveling robot formed in a link arm structure without providing a separate structure for generating a transport path.

In addition, the present invention forms the driving part of the traveling robot in an enclosed structure and forms the wiring for operating the driving part inside the traveling robot, thereby preventing sources of contamination and maintaining the vacuum state of the transfer chamber.

The following drawings, attached for use in explaining the embodiments of the present invention, are merely a part of the embodiments of the present invention, and a person having ordinary knowledge in the technical field to which the present invention pertains (hereinafter, "ordinary engineers") can derive the other drawings based on these drawings without performing any inventive work.

FIG. 1 is a diagram showing an example of a cluster type substrate processing apparatus provided with a traveling robot according to an embodiment of the present invention. FIG. 2a is a schematic diagram of a running robot according to an embodiment of the present invention. FIG. 2b is a schematic diagram of a running robot according to an embodiment of the present invention. FIG. 3 is a schematic cross-sectional view of a running robot according to an embodiment of the present invention. FIG. 4a is a schematic diagram of a substrate transfer robot coupled to a traveling robot in accordance with one embodiment of the present invention. FIG. 4b is a schematic diagram of a substrate transfer robot coupled to a traveling robot in accordance with one embodiment of the present invention. FIG. 5a is a simplified diagram of a transfer arm platform of a substrate transfer robot coupled to a traveling robot in one embodiment of the present invention. FIG. 5b is a simplified diagram of a transfer arm platform of a substrate transfer robot coupled to a traveling robot in one embodiment of the present invention. FIG. 5c is a simplified diagram of a transfer arm platform of a substrate transfer robot coupled to a traveling robot in one embodiment of the present invention. FIG. 6 is a schematic diagram illustrating a first_1 transfer link arm (or a second_1 transfer link arm) of a substrate transfer robot coupled to a traveling robot in accordance with an embodiment of the present invention.

The following detailed description of the invention refers to the accompanying drawings which show, by way of example, specific embodiments in which the invention may be practiced in order to clarify the objects, technical solutions and advantages of the invention. These embodiments are described in sufficient detail to enable one of ordinary skill in the art to practice the invention.

The following detailed description of the invention refers to the accompanying drawings, which show, by way of example, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable one skilled in the art to practice the invention. It should be understood that the various embodiments of the invention are different from one another, but are not necessarily mutually exclusive. For example, a particular shape, structure, and characteristic described herein in connection with one embodiment may be embodied in other embodiments without departing from the spirit and scope of the invention.

It should also be understood that the location or arrangement of individual components within each disclosed embodiment may be modified without departing from the spirit and scope of the present invention. Therefore, the following detailed description is not intended to be taken in a limiting sense, and the scope of the present invention is limited only by the appended claims, with the full scope of equivalents that such claims are entitled to, if properly interpreted. Like reference characters in the drawings refer to the same or similar functionality across the various aspects.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention.

Figure 1 is a simplified diagram showing a cluster-type substrate processing apparatus equipped with a traveling robot in one embodiment of the present invention.

Figure 1 shows a substrate processing apparatus that processes substrates and has five process chambers PC1 to PC10 on each side of a rectangular transfer chamber TC. A traveling robot 100 is installed in the transfer chamber TC and moves a substrate transfer robot 200 to correspond to the position of each process chamber.

As an example, the traveling robot 100 travels the substrate transfer robot 200 to correspond to the substrate position P1 in the process chamber PC1, and while the traveling robot 100 is positioned at the substrate position P1, the substrate transfer robot 200 is rotated to face the process chamber PC1, so that the substrate transfer robot 200 can load a substrate into or unload a substrate from the process chamber PC1.

In addition, the traveling robot 100 travels the substrate transfer robot 200 to correspond to the substrate position P5 in the process chamber PC10, and when the traveling robot 100 is positioned at the substrate position P5, the traveling robot 100 rotates the substrate transfer robot 200 to face the process chamber PC10, so that the substrate transfer robot 200 can load a substrate into the process chamber PC10 or unload a substrate from the process chamber PC10.

Meanwhile, FIG. 1 illustrates an example of a substrate processing apparatus having five process chambers PC1 to PC5 or PC6 to PC10 on one side of the transfer chamber TC, but the present invention is not limited to this, and the number of process chambers on both sides of the transfer chamber TC can be changed as necessary.

Figures 2a and 2b are diagrams showing a simplified running robot 100 in one embodiment of the present invention.

Referring to Figures 2a and 2b, the running robot 100 may include a lifting section 110, a first running link arm 120, a second running link arm 130, and a third running link arm 140.

First, the lifting unit 110 can move the lifting drive shaft installed inside the transfer chamber up and down and rotate.

In this case, the lifting unit 110 is located in the outer lower region of the housing that seals the inside of the transfer chamber, and its upper end is connected to be sealed in a through-hole of the transfer chamber formed in the lower region of the housing, so that the lifting drive shaft can move up and down through the through-hole of the transfer chamber. As a result, the traveling robot 1000 can adjust the vertical position of the substrate transfer robot 200 to position the substrate transfer robot 200 at an appropriate height for loading or unloading substrates in a process chamber, etc.

In addition, the lifting unit 110 can not only move the lifting drive shaft up and down, but also rotate the lifting drive shaft. As a result, the traveling robot 100 can move the substrate transfer robot 200 in various directions depending on the rotation angle of the lifting unit 110.

Next, the first running link arm 120 has a first end region on one side coupled to the lifting drive shaft of the lifting unit 110, the second running link arm 130 has a second end region on one side rotatably coupled to the first end region on the other side of the first running link arm 120, and the third running link arm 140 has a third end region on one side rotatably coupled to the second end region on the other side of the second running link arm 130, and the substrate transfer robot 200 can be coupled to the third end region on the other side of the third running link arm 140.

As a result, while the traveling robot 100 is fixed at a specific position within the transfer chamber, the first traveling link arm 120, the second traveling link arm 130, and the third traveling link arm 140 rotate to move the substrate transfer robot 200 connected to the third traveling link arm 140 along a substrate transfer path within the transfer chamber, and the substrate transfer robot 200 is positioned at a set position, i.e., a process chamber for loading or unloading a substrate, and the substrate transfer robot 200 can load or unload a substrate in a process chamber, etc., by adjusting the height position of the substrate transfer robot 200 through the up and down movement of the lifting unit 110.

In one embodiment of the present invention, the running robot 100 is described in more detail below with reference to FIG. 3.

The lifting section 110 may include a lifting drive shaft 113 that moves up and down and rotates.

In addition, the lifting unit 110 may be provided with a drive motor 111 that generates a drive force for moving the lifting drive shaft 113 up and down, and a drive motor 112 that generates a drive force for rotating the lifting drive shaft 113.

The lifting drive shaft 113 of the lifting unit 110 can be connected to a first end region of one of the first traveling link arms 120.

In this case, the lifting drive shaft 113 may be formed with a lifting output shaft 114 that is linked to the lifting drive shaft 113, and the lifting output shaft 114 may be coupled to a first end region of one of the first traveling link arms 120.

In addition, a connecting member 115 may be used to connect the lifting output shaft 114 to one first end region of the first traveling link arm 120, with one side end of the connecting member 115 being connected to the lifting output shaft 114 and the other side end being connected to one first end region of the first traveling link arm 120.

In this case, when the lift drive shaft 113 and the first end region of one of the first traveling link arms 120 are fixedly connected, a sealing member such as an O-ring or a gasket can be added to improve the sealing performance in the fixed connection region. The configuration of adding a sealing member such as an O-ring or a gasket can be applied to other connection parts described below in the same way, so the description of this will be omitted in the following description.

This not only makes it easier to connect the first running link arm 120 to the lifting unit 110, but also makes it easier to remove the first running link arm 120 from the lifting unit 110 within the transfer chamber for maintenance and repair.

Next, the second traveling link arm 130 may have a first drive motor 131 provided in a sealed internal space, a first traveling drive shaft 133 linked to the first drive motor 131, and a first traveling output shaft 134 linked to the first traveling drive shaft 133, sealed in one second tip region, and a second traveling drive shaft 136 linked to the first drive motor 131, and a second traveling output shaft 137 linked to the second traveling drive shaft 136, sealed in the other second tip region.

In this case, the first drive motor 131 and the first traveling drive shaft 133 and the first drive motor 131 and the second traveling drive shaft 136 can be linked by a pulley system, but the present invention is not limited to this, and various methods for transmitting rotational force, such as a gear system, can be used.

The first traveling drive shaft 133 and the second traveling drive shaft 136 may rotate in opposite directions. The first traveling drive shaft 133 and the first traveling output shaft 134, and the second traveling drive shaft 136 and the second traveling output shaft 137 may each be configured with a reduction gear, and the same reduction gear may be provided in the opposite direction.

In addition, a driving force position converter 132 for compensating for the position of the output shaft of the first driving motor 131 and the position of the input shaft of the first driving shaft 133 may be provided between the first driving motor 131 and the first traveling driving shaft 133. In this case, as opposed to the case in which the output shaft of the first driving motor 131 is located at the bottom as shown in FIG. 3, when the output shaft of the first driving motor 131 is located at the top, the driving force position converter 132 may be located between the first driving motor 131 and the second traveling driving shaft 136.

Then, the first running output shaft 134 of the second running link arm 130 can be connected to the other first tip region of the first running link arm 120.

At this time, the first running output shaft 134 and the other first tip region of the first running link arm 120 can be connected by a first connecting member 135, and one side end of the first connecting member 135 can be fixedly connected to the other first tip region of the first running link arm 120, and the other side end of the first connecting member 135 can be fixedly connected to the first running output shaft 134.

As a result, a separate device for transmitting driving force is not required inside the first running link arm 120, and therefore the thickness of the first running link arm 120 can be reduced. In addition, since no separate components are provided inside the first running link arm 120, the first running link arm 120 can be configured in a bar shape, and therefore the strength of the first running link arm 120 that supports the traveling robot 100 and the substrate transfer robot can be increased.

Next, the third traveling link arm 140 has a second drive motor 141 provided in a sealed internal space, and a rotary drive shaft 142 linked to the second drive motor 141 and a rotary output shaft 143 linked to the rotary drive shaft 142 can be provided in the other third tip region.

In this case, the second drive motor 141 and the rotary drive shaft 142 can be linked by a pulley, but the present invention is not limited to this.

The rotary drive shaft 142 and the rotary output shaft 143 may also be configured as a reduction gear.

Then, one third end region of the third running link arm 140 can be connected to the second running output shaft 137 of the second running link arm 130.

At this time, the connection between one third end region of the third running link arm 140 and the second running output shaft 137 can be made by the second connecting member 138, and one side end of the second connecting member 138 can be fixedly connected to the second running output shaft 137, and the other side end of the second connecting member 138 can be fixedly connected to one third end region of the third running link arm 140.

A substrate transfer robot can be coupled to the rotation output shaft 143 provided at the other third tip region of the third traveling link arm 140.

At this time, the rotation output shaft 143 of the third traveling link arm 140 can be connected to the substrate transfer robot by a connecting member 144, and one side end of the connecting member 144 can be fixedly connected to the rotation output shaft 143, and the other side end of the connecting member 144 can be fixedly connected to the substrate transfer robot.

In this way, in one embodiment of the present invention, the traveling robot 100 can transfer substrates by moving the substrate transfer robot connected to the third traveling link arm 140 in a linear motion on the substrate transfer path in the transfer chamber by the rotational movements of the lifting drive shaft 113, the first traveling drive shaft 133, and the second traveling drive shaft 136.

In this case, the distance between the lift drive shaft 113 and the first travel drive shaft 133, the distance between the first travel drive shaft 133 and the second travel drive shaft 136, and the distance between the second travel drive shaft 136 and the rotation drive shaft 142 are configured to have a distance ratio of 1:2:1, thereby maximizing the travel distance of the travel robot 100. In addition, the length of the second travel link arm 130 can correspond to the distance between both sides of the transfer chamber.

In addition, for the linear motion of the substrate transfer robot, the rotational speed of the first transfer link arm 120, the rotational speed of the second transfer link arm 130, and the rotational speed of the third transfer link arm 140 can be set to a speed ratio of 1:2:2.

That is, the rotational speeds of the lift drive shaft 113, the first running drive shaft 133, and the second running drive shaft 136 can be set to have a speed ratio of 1:2:2, or the rotational speeds of the lift output shaft 114, the first running output shaft 134, and the second running output shaft 137 can be set to have a speed ratio of 1:2:2.

Meanwhile, the traveling robot 100 can maintain the same direction of the substrate transfer robot while the substrate transfer robot is traveling, and to this end, the rotation speed of the rotary drive shaft 132 by the second drive motor 141 can be adjusted in conjunction with the first drive motor 131.

That is, the direction of the substrate transfer robot can be maintained the same by making the rotational speeds of the lift drive shaft 113, the first travel drive shaft 133, the second travel drive shaft 136, and the rotation drive shaft 142 have a speed ratio of 1:2:2:1, or by making the rotational speeds of the lift output shaft 114, the first travel output shaft 134, the second travel output shaft 137, and the rotation output shaft 143 have a speed ratio of 1:2:2:1.

Then, when the substrate transfer robot is positioned at a set position in the transfer chamber by the traveling robot 100, the direction of the substrate transfer robot is adjusted by the rotation of the rotary drive shaft 142 by the second drive motor 141, and the substrate transfer robot can transfer the substrate with the direction adjusted.

In addition, in the traveling robot 100 according to one embodiment of the present invention, the lifting drive shaft 113, the first traveling drive shaft 133, the second traveling drive shaft 136, and the rotation drive shaft 142 may each be formed with a hollow space, and the first driving motor 131, the second driving motor 141, and wiring for controlling the substrate transfer robot may be provided inside the first traveling link arm 120, the second traveling link arm 130, and the third traveling link arm 140 through the hollow space. This can improve the airtightness of the transfer chamber.

Next, the substrate transfer robot 200 corresponding to the traveling robot 100 according to one embodiment of the present invention will be described as follows.

Referring to Figures 4a and 4b, the substrate transfer robot 200 may include a transfer arm platform 210 coupled to the third traveling link arm of the traveling robot, a first transfer arm section 220 coupled to the transfer arm platform 210, and a second transfer arm section 230, and a first end effector 228 and a second end effector 238 for supporting a substrate may be coupled to each of the first transfer arm section 220 and the second transfer arm section 230.

As a result, the substrate transfer robot 200 travels within the transfer chamber and is positioned at a specific position by the operation of the first transfer link arm, second transfer link arm, and third transfer link arm of the traveling robot, or is further positioned at a specific position by the rotational movement of the lifting part of the traveling robot, and with the first end effector 228 or the second end effector 238 positioned at a substrate loading or unloading position by the up and down movement of the lifting part of the traveling robot, the first end effector 228 or the second end effector 238 can load or unload a substrate by the operation of the first transfer arm unit 220 or the second transfer arm unit 230.

First, referring to Figures 5a to 5c, the transfer arm platform 210 may include a first coupling hole 212 formed in a central region of the body 211, a second coupling hole 213a formed in one fourth end region, and a third coupling hole 213b formed in the other fourth end region.

The first connection hole 212 is divided into a first upper space 212_1 and a first lower space 212_2 by a first locking member having a first through hole formed in the central region corresponding to the rotation drive shaft of the third transport link arm of the transport robot, and the first upper space 212_1 can be sealed by a first cover 214.

The second connection hole 213a is divided into a second upper space 213a_1 and a second lower space 213a_2 by a second locking member having a second through hole formed in one fourth end region of the main body 211, and the second lower space 213a_2 can be sealed by a second cover 215a.

The third connection hole 213b is divided into a third upper space 213b_1 and a third lower space 213b_2 by a third locking member having a third through hole formed in the other fourth end region of the main body 211, and the third lower space 213b_2 can be sealed by a third cover 215b.

The transfer arm platform 210 may have a link connection member 217, including a first blade 218a and a second blade 218b for link connection, fixedly connected to its front region. In this case, the front may be the direction in which the process chamber is located when the substrate transfer robot 200 is positioned to transfer the substrate to the process chamber connected to the transfer chamber.

The transfer arm platform 210 may be coupled to the traveling robot, and specifically, the rotation output shaft of the third traveling link arm of the traveling robot or the third connecting member coupled to the rotation output shaft may be pulled into the first lower space 212_2 of the first coupling hole 212, and the rotation output shaft of the third traveling link arm of the transfer robot may be fixedly coupled to the first locking member. In this case, when the rotation output shaft is fixedly coupled to the first locking member, a sealing member such as an O-ring or a gasket may be added to improve the sealing performance in the fixed coupling area. The configuration of adding a sealing member such as an O-ring or a gasket may be similarly applied to other coupling parts described below, and therefore the description thereof will be omitted in the following description.

In this case, a hollow may be formed in the rotary drive shaft of the third traveling link arm of the traveling robot, and a wiring hole may be formed in the transfer arm platform 210 for leading the wiring led through the hollow of the rotary drive shaft into the first transfer arm part 220 and the second transfer arm part 230.

That is, a first_1 wiring hole H11 and a first_2 wiring hole H21 that respectively connect the first upper space 212_1 may be formed on one side of the body 211 of the transfer arm platform 210, and a second_1 wiring hole H12 that connects the second lower space 213a_2 may be formed on one side of the body 211 of the transfer arm platform 210, and a second_2 wiring hole H22 that connects the third lower space 213b_2 may be formed on one side of the body 211 of the transfer arm platform 210.

To seal the wiring holes, a first sealing cover 216a may be provided to seal the first_1 wiring hole H11 and the second_1 wiring hole H12 on one side of the body 211 of the transfer arm platform 210, and a second sealing cover 216b may be provided to seal the first_2 wiring hole H21 and the second_2 wiring hole H22 on one side of the body 211 of the transfer arm platform 210.

In addition, wiring holes can be formed inside the body 211 of the transfer arm platform 210 to pull in the wiring that is pulled in through the rotation drive shaft of the traveling robot into the first transfer arm section 220 and the second transfer arm section 230.

That is, a third wiring hole H3 connecting the first upper space 212_1 and the second lower space 213a_2 and a fourth wiring hole H4 connecting the first upper space 212_1 and the third lower space 213b_2 are formed inside the body 211 of the transfer arm platform 210, so that the inside of the transfer arm platform 210 can be sealed without a separate sealing member.

Next, the first_1 transfer link arm 221 of the first transfer arm section 220 can be coupled to the second coupling hole 213a of the transfer arm platform 210, and the second_1 transfer link arm 231 of the second transfer arm section 230 can be coupled to the third coupling hole 213b of the transfer arm platform 210.

In this case, referring to FIG. 6, the first_1 transfer link arm 221 of the first transfer arm unit 220 has a sealed internal space, in which a third drive motor 221_1 and a first reducer 221_2 that reduces the rotation speed to 1/2 in conjunction with the third drive motor 221_1 may be provided.

In addition, the 5_1 tip region on one side of the 1_1 transport link arm 221 may be provided with a 1_1 transport drive shaft 221_3 having a hollow formed therein and linked to the first reducer 221_2, and a 1_1 transport output shaft 221_4 linked to the 1_1 transport drive shaft 221_3, so as to be sealed, and the 5_1 tip region on the other side of the 1_1 transport link arm 221 may be provided with a 1_2 transport drive shaft 221_6 having a hollow formed therein and linked to the third drive motor 221_1, and a 1_2 transport output shaft 221_7 linked to the 1_2 transport drive shaft 221_6, so as to be sealed. In this case, the interlocking between the third driving motor 221_1 and the first reducer 221_2, the interlocking between the first reducer 221_2 and the 1_1 transfer driving shaft 221_3, and the interlocking between the third driving motor 221_1 and the 1_2 transfer driving shaft 221_6 may be performed by a pulley system, but the present invention is not limited thereto, and various systems for transmitting rotational force, such as a gear system, may be used. In addition, the 1_1 transfer driving shaft 221_3 and the 1_1 transfer output shaft 221_4, the 1_2 transfer driving shaft 221_6 and the 1_2 transfer output shaft 221_7 may be formed of reducers having the same reduction ratio. In addition, the 1_1 transfer output shaft 221_4 and the 1_2 transfer output shaft 221_7 may rotate in opposite directions.

Then, the 1_1 transfer output shaft 221_4 provided on one 5_1 tip region of the 1_1 traveling link arm 221 of the first transfer arm section 220 can be pulled into the second upper space 213a_1 of the second connecting hole 213a of the transfer arm platform 210 and fixedly connected to the second locking member.

In this case, the 4_1 connecting member 221_5 may be used to connect the 1_1 transfer output shaft 221_4 to the second locking member, and the 4_1 connecting member 221_5 is a tubular shaft having a length extended by the distance between the 1_1 transfer output shaft 221_4 and the second locking member at the position where the transfer arm platform 210 and the 1_1 transfer link arm 221 are connected, and both ends of the 4_1 connecting member 221_5 may be fixedly connected to the 1_1 transfer output shaft 221_4 and the second locking member, respectively.

The 5_2 end region of one of the 1_2 transfer link arms 222 can be fixedly connected to the 1_2 transfer output shaft 221_7 of the 1_1 transfer link arm 221 of the first transfer arm portion 220.

In this case, a first fixed coupling shaft may be used to couple the first_2 transfer output shaft 221_7 to one of the 5_2 tip regions, and the first fixed coupling shaft is a tubular shaft having a length extended by the distance between the coupling region between the first_2 transfer output shaft 221_7 and one of the 5_2 tip regions at the position where the first_1 transfer link arm 221 and the first_2 transfer link arm 222 are coupled, and both ends of the first fixed coupling shaft may be fixedly coupled to the coupling region between the first_2 transfer output shaft 221_7 and one of the 5_2 tip regions, respectively.

Then, a first common link arm 225 can be provided at the connection region between the first_2 transfer output shaft 221_7 and one of the fifth_2 tip regions.

That is, the first common link arm 225 can have a central region rotatably connected to a first fixed connecting shaft that connects the first_2 transfer output shaft 221_7 and one of the fifth_2 tip regions.

The first transfer arm section 220 may include a 1_1 auxiliary link arm 223, which is parallel to the 1_1 transfer link arm 221, and one 5_3 tip region may be rotatably coupled to the first blade 218a of the link connection member 217 of the transfer arm platform 210, and the other 5_3 tip region may be rotatably coupled to one 5_4 tip region of the first common link arm 225.

The first transfer arm portion 220 may also include a 1_2 auxiliary link arm 226 that is parallel to the 1_2 transfer link arm 222 and has one 5_5 tip region rotatably coupled to the other 5_4 tip region of the first common link arm 225.

The first transfer arm portion 220 may include a 1_3 auxiliary link arm 227, which is parallel to the first common link arm 225, and one 5_6 end region may be rotatably connected to the other 5_5 end region of the 1_2 auxiliary link arm 226, and the other 5_6 end region may be rotatably connected to the other 5_2 end region of the 1_2 transfer link arm 222.

The first transfer arm portion 220 may also include a first end effector 228, which may be fixed to the other 5_6 tip region of the 1_3 auxiliary link arm 227 to support the substrate.

The first transfer arm unit 220 configured in this manner allows the first end effector 228 to move forward and backward in a straight line through each transfer link arm and auxiliary link arm in response to the operation of the third drive motor 221_1, thereby allowing the substrate to be loaded or unloaded at a set position through the first end effector 228.

On the other hand, the second transfer arm section 230 may be configured similarly to the first transfer arm section 220 and may be mounted on the transfer arm platform 210 symmetrically to each other around the central region of the transfer arm platform 210.

That is, the second_1 transfer link arm 231 of the second transfer arm section 220 has a sealed internal space, in which a fourth drive motor and a second reducer that works in conjunction with the fourth drive motor to reduce the rotational speed by half can be provided.

In addition, the 2_1 transfer drive shaft having a hollow formed therein and linked to the 2_1 transfer drive shaft may be sealed in the 6_1 end region of one of the 1_1 transfer link arms 231, and the 2_2 transfer drive shaft having a hollow formed therein and linked to the 2_2 transfer drive shaft may be sealed in the other 6_1 end region of the 2_1 transfer link arm 231. In this case, the interlocking between the 4th drive motor and the 2nd reducer, the interlocking between the 2nd reducer and the 2_1 transfer drive shaft, and the interlocking between the 4th drive motor and the 2_2 transfer drive shaft may each be performed by a pulley system, but the present invention is not limited thereto, and various systems for transmitting rotational force, such as a gear system, may be used. In addition, the 2_1 transfer drive shaft and the 2_1 transfer output shaft, and the 2_2 transfer drive shaft and the 2_2 transfer output shaft may each be formed by a reducer having the same reduction ratio. In addition, the 2_1 transfer output shaft and the 2_2 transfer output shaft can rotate in opposite directions.

Then, the 2_1 transfer output shaft provided at one 6_1 tip region of the 2_1 traveling link arm 231 of the second transfer arm section 230 can be pulled into the second upper space 213b_1 of the third connection hole 213b of the transfer arm platform 210 and fixedly connected to the third locking member.

In this case, the 5_1 connecting member may be used to connect the 2_1 transfer output shaft and the third locking member, and the 5_1 connecting member is a tubular shaft having a length extended by the distance between the 2_1 transfer output shaft and the third locking member at the position where the transfer arm platform 210 and the 2_1 transfer link arm 231 are connected, and both ends of the 5_1 connecting member may be fixedly connected to the 2_1 transfer output shaft and the third locking member, respectively.

The 6_2 tip region of one of the 2_2 transfer link arms 232 may be fixedly connected to the 2_2 transfer output shaft of the 2_1 transfer link arm 231 of the second transfer arm portion 230.

In this case, a second fixed coupling shaft may be used to couple the second_2 transfer output shaft to one of the 6_2 tip regions, and the second fixed coupling shaft is a tubular shaft having a length extended by the distance between the coupling region between the second_2 transfer output shaft and one of the 6_2 tip regions at the position where the second_1 transfer link arm 231 and the second_2 transfer link arm 232 are coupled, and both ends of the second fixed coupling shaft may be fixedly coupled to the coupling region between the second_2 transfer output shaft and one of the 6_2 tip regions, respectively.

A second common link arm 235 may be provided at the connection area between the second_2 transfer output shaft and one of the sixth_2 tip areas.

That is, the second common link arm 235 can have its central region rotatably connected to a second fixed connecting shaft that connects the second_2 transfer output shaft and one of the sixth_2 tip regions.

The second transfer arm section 230 may include a 2_1 auxiliary link arm 233, which is parallel to the 2_1 transfer link arm 231, and one 6_3 tip region may be rotatably coupled to the second blade 218b of the link connection member 217 of the transfer arm platform 210, and the other 6_3 tip region may be rotatably coupled to one 6_4 tip region of the second common link arm 235.

The second transfer arm portion 230 may also include a second_2 auxiliary link arm 236 that is parallel to the second_2 transfer link arm 232 and has one 6_5 tip region rotatably coupled to the other 6_4 tip region of the second common link arm 235.

The second transfer arm portion 230 may include a 2_3 auxiliary link arm 237, which is parallel to the second common link arm 235, and one 6_6 tip region may be rotatably connected to the other 6_5 tip region of the 2_2 auxiliary link arm 236, and the other 6_6 tip region may be rotatably connected to the other 6_2 tip region of the 2_2 transfer link arm 232.

The second transfer arm portion 230 may also include a second end effector 238, which may be fixed to the other 6_6 tip region of the 2_3 auxiliary link arm 237 to support the substrate.

The second transfer arm unit 230 configured in this manner allows the second end effector 238 to move forward and backward in a straight line through the respective transfer link arms and auxiliary link arms in response to the operation of the fourth drive motor, thereby allowing the substrate to be loaded or unloaded at a set position through the second end effector 238.

Meanwhile, the first end effector 228 of the first transfer arm section 220 is fixedly connected to the other 5_6 tip region of the 1_3 auxiliary link arm, while the second end effector 238 of the second transfer arm section 230 is fixedly connected to the other 6_6 tip region of the 2_3 auxiliary link arm, and is connected through a bracket to make the heights of the first end effector 228 different. Here, the bracket may be configured in a "C" shape, but is not limited thereto.

Therefore, the first end effector 228 of the first transfer arm part 220 and the second end effector 238 of the second transfer arm part 230 can support the substrate at different heights, which is equal to the distance between the upper and lower surfaces of the bracket.

In addition, when the substrate is transferred by the operation of the first transfer arm unit 220 and the second transfer arm unit 230, the first end effector 228 or the substrate supported by the first end effector 228 is moved between the upper and lower surfaces of the bracket of the second transfer arm unit 230, thereby preventing contact between the first end effector 228 and the second end effector 238.

However, the present invention is not limited to this, and the heights of the first end effector 228 and the second end effector 238 can be opposite to each other by changing the installation position of the bracket, or the heights of the first end effector 228 and the second end effector 238 can be different from each other through various mechanical configurations other than the bracket.

The above describes the characteristic configuration of the substrate transfer robot 200 supported by the traveling robot 100, but the present invention is not limited to the substrate transfer robot described above, and all types of substrate transfer robots capable of transferring substrates within a transfer chamber can be coupled to the traveling robot, and the traveling robot can run the substrate transfer robot within the transfer chamber, and the substrate transfer robot can transfer substrates within the transfer chamber.

In addition, while the above describes the transportation of a substrate, the same can be applied to the transportation of a mask required to carry out a process on the substrate.

The present invention has been described above using specific examples and drawings that are limited to specific items such as specific components, but this is provided merely to aid in a more general understanding of the present invention, and the present invention is not limited to the above examples. Those with ordinary knowledge in the technical field to which the present invention pertains may make various modifications and variations from such descriptions.

Therefore, the concept of the present invention should not be limited to the embodiments described above, and all modifications equivalent to or equivalent to the scope of the claims, as well as the scope of the claims described below, are within the scope of the concept of the present invention.

100: Traveling robot 110: Lifting unit 120: First traveling link arm 130: Second traveling link arm 140: Third traveling link arm 200: Substrate transfer robot

Claims (11)

A traveling robot for traveling a substrate transfer robot within a transfer chamber, comprising:
an elevator unit for vertically and rotationally moving an elevator drive shaft provided inside the transfer chamber;
a first traveling link arm having a first end region connected to the lifting drive shaft;
a second traveling link arm, the second traveling link arm including a first driving motor provided in the sealed internal space, a first traveling drive shaft interlocked with the first driving motor and a first traveling output shaft interlocked with the first traveling drive shaft provided to be sealed in a second end region on one side, a second traveling drive shaft interlocked with the first driving motor and a second traveling output shaft interlocked with the second traveling drive shaft provided to be sealed in a second end region on the other side, the first traveling output shaft being coupled to the first end region on the other side of the first traveling link arm; and a third traveling link arm, the second traveling link arm including a second driving motor provided in the sealed internal space, a rotation drive shaft interlocked with the second driving motor and a rotation output shaft interlocked with the rotation drive shaft provided in a third end region on the other side, one third end region being coupled to the second traveling output shaft of the second traveling link arm, and a substrate transfer robot being coupled to the rotation output shaft;
Including,
The substrate transfer robot includes:
a transfer arm platform, the transfer arm platform being divided into a first upper space and a first lower space by a first locking member having a first through hole formed in a central region thereof corresponding to the rotation drive shaft of the second traveling link arm, the first upper space being divided into a second upper space and a second lower space by a first coupling hole sealed by a first cover, a second locking member having a second through hole formed in a fourth end region on one side thereof, the second lower space being divided into a third upper space and a third lower space by a second coupling hole sealed by a second cover, and a third locking member having a third through hole formed in a fourth end region on the other side thereof, the third lower space being divided into a third coupling hole sealed by a third cover, a link connecting member including a first blade and a second blade for link connection being fixedly connected to a front region (the front being a direction in which the process chamber is located when the substrate transfer robot is located to transfer a substrate to a process chamber connected to the transfer chamber) and being pulled into the first lower space, the rotation output shaft being fixedly connected to a third connecting member fixedly connected to the first locking member;
a 1_1 transport link arm, the 1_1 transport output shaft of which is fixedly connected to a 4_1 connecting member which is fixedly connected to the second locking member and which is pulled into the second upper space of the transport arm platform; a 1_2 transport link arm, the 1_2 transport output shaft of which is fixedly connected to the 1_2 transport output shaft of the 1_1 transport link arm through a first fixed connecting shaft; a 1_2 transport link arm, the 1_2 transport link arm having one 5_2 end region fixedly connected to the 1_2 transport output shaft of the 1_1 transport link arm through a first fixed connecting shaft; a first common link arm rotatably connected to the first fixed connecting shaft; a first transfer arm portion including: a first_1 auxiliary link arm parallel to the first_2 transfer link arm, one of which has a 5_3 tip region rotatably coupled to the first blade of the link connecting member of the transfer arm platform and the other of which has a 5_3 tip region rotatably coupled to the 5_4 tip region of one of the first common link arms; a first_2 auxiliary link arm parallel to the first_2 transfer link arm, one of which has a 5_5 tip region rotatably coupled to the 5_4 tip region of the other of the first common link arm; a first_3 auxiliary link arm parallel to the first common link arm, one of which has a 5_6 tip region rotatably coupled to the 5_5 tip region of the other of the first_2 auxiliary link arm and the other of which has a 5_6 tip region rotatably coupled to the 5_2 tip region of the other of the first_2 transfer link arm; and a first end effector fixed to the 5_6 tip region of the other of the first_3 auxiliary link arm and supporting the substrate; and
A fourth drive motor and a second reducer that is linked to the fourth drive motor and reduces a rotation speed to 1/2 are provided in the sealed internal space, a second_1 transfer drive shaft that is linked to the second reducer and a second_1 transfer output shaft that is linked to the second_1 transfer drive shaft are provided to be sealed in one 6_1 tip region, a second_2 transfer drive shaft that is linked to the fourth drive motor and a second_2 transfer output shaft that is linked to the second_2 transfer drive shaft are provided to be sealed in the other 6_1 tip region, and the transfer arm plug is provided with a second transfer drive shaft that is connected to the second transfer drive shaft. a second_1 transfer link arm having a second_1 transfer output shaft fixedly connected to a fourth_2 connecting member which is fixedly connected to the third locking member and is inserted into the third upper space of the platform; a second_2 transfer link arm having a sixth_2 end region fixedly connected to the second_2 transfer output shaft of the second_1 transfer link arm through a second fixed connecting shaft; a second common link arm rotatably connected to the second fixed connecting shaft;
a second_1 auxiliary link arm rotatably coupled to the second blade of the link connecting member of the platform and having a 6_3 tip region of one of the first and second common link arms rotatably coupled to a 6_4 tip region of the other of the first and second common link arms; a second_2 auxiliary link arm parallel to the second_2 transport link arm and having a 6_5 tip region of one of the first and second common link arms rotatably coupled to a 6_4 tip region of the other of the first and second common link arms; a second_3 auxiliary link arm parallel to the second common link arm and having a 6_6 tip region of one of the first and second common link arms rotatably coupled to a 6_5 tip region of the other of the first and second auxiliary link arms rotatably coupled to a 6_2 tip region of the other of the first and second transport link arms; and a second end effector fixed to the 6_6 tip region of the other of the first and second auxiliary link arms for supporting the substrate;
A running robot comprising: The traveling robot according to claim 1, wherein the lifting unit is located in the outer lower region of the housing that seals the inside of the transfer chamber, and the upper end is connected to the through hole of the transfer chamber formed in the lower region of the housing so as to be sealed, and the lifting drive shaft moves up and down through the through hole of the transfer chamber. The traveling robot according to claim 1, wherein the rotational speeds of the lifting drive shaft, the first traveling drive shaft, and the second traveling drive shaft have a speed ratio of 1:2:2. The traveling robot according to claim 1, wherein the rotational speeds of the lifting drive shaft, the first traveling drive shaft, the second traveling drive shaft, and the rotation drive shaft have a speed ratio of 1:2:2:1. The lifting drive shaft of the lifting section includes a lifting output shaft that is interlocked with the lifting drive shaft, and the lifting output shaft is coupled to a first tip region of the one of the first traveling link arms,
The traveling robot according to claim 1 , wherein the rotational speeds of the lifting output shaft, the first traveling output shaft, and the second traveling output shaft have a speed ratio of 1:2:2. The lifting drive shaft of the lifting section includes a lifting output shaft that is interlocked with the lifting drive shaft, and the lifting output shaft is coupled to a first tip region of the one of the first traveling link arms,
The running robot according to claim 1 , wherein the rotational speeds of the lifting output shaft, the first traveling output shaft, the second traveling output shaft, and the rotation output shaft have a speed ratio of 1:2:2:1. The connection between the first traveling output shaft and the other first tip region is made by a first connecting member, one of which has a first side end connected to the first traveling output shaft and the other of which has a first side end connected to the other first tip region,
2. The traveling robot according to claim 1, wherein the connection between the second traveling output shaft and the one third tip region is made by a second connecting member, one of which has a second side end connected to the second traveling output shaft and the other of which has a second side end connected to the one third tip region. The traveling robot according to claim 1, wherein the distance between the lifting drive shaft and the first traveling drive shaft, the distance between the first traveling drive shaft and the second traveling drive shaft, and the distance between the second traveling drive shaft and the rotation drive shaft have a distance ratio of 1:2:1. 2. The traveling robot of claim 1, wherein each of the lifting drive shaft, the first traveling drive shaft, the second traveling drive shaft, and the rotation drive shaft is formed with a hollow, and wiring for controlling the first driving motor, the second driving motor, and the substrate transfer robot is provided inside the first traveling link arm, the second traveling link arm, and the third traveling link arm through the hollow. The running robot according to claim 1 , wherein the first end effector is fixed to the other 5_6 tip region through a bracket, or the second end effector is fixed to the other 6_6 tip region through the bracket. 2. The traveling robot of claim 1, wherein the transfer arm platform further includes a first wiring hole connecting the first upper space and the second lower space, and a second wiring hole connecting the first upper space and the third lower space.