JP7487703B2 - Storage Shelf - Google Patents

Description

The present invention relates to a storage shelf that has multiple storage compartments, each of which can store a container.

An example of such a storage shelf is disclosed in the following Patent Document 1. In the following explanation of the background art, the reference numbers in Patent Document 1 are quoted in parentheses.

In the storage shelf of Patent Document 1, a supply port (30) is arranged in each of the multiple storage sections (3). A purge gas such as nitrogen is supplied to the container (F) stored in the storage section (3) through the supply port (30).

JP 2016-218603 A

In the storage shelf described above, multiple types of purge gases including a first gas and a second gas are used, and the purge gas supplied to the supply port may be switched from one of the first gas and the second gas to the other. For example, when the purge gas supplied to the supply port is switched from the first gas to the second gas, there is a possibility that the first gas remaining in the piping may be supplied to the supply port even after such switching.

Therefore, it is desirable to realize a storage shelf that can appropriately reduce the amount of purge gas remaining in the piping before the switch that is supplied to the supply port when the purge gas supplied to the supply port is switched between the first gas and the second gas.

In view of the above, the characteristics and configuration of the storage shelves are as follows:
A storage shelf having a plurality of storage sections each for storing a container,
a supply port disposed in each of the plurality of storage units and configured to supply a first gas or a second gas to the container stored in the storage unit;
A branch pipe connected to each of the plurality of supply ports;
A supply pipe connected to a plurality of the branch pipes;
a first supply unit that supplies the first gas to the supply pipe;
a second supply unit that supplies the second gas to the supply pipe;
an exhaust unit that exhausts the first gas and the second gas from the supply pipe,
the first supply unit includes a first supply source that is a supply source of the first gas, a first gas pipe that connects the first supply source and the supply pipe, and a first valve that selectively blocks a flow of the first gas in the first gas pipe;
the second supply unit includes a second supply source that is a supply source of the second gas, a second gas pipe that connects the second supply source and the supply pipe, and a second valve that selectively blocks the flow of the second gas in the second gas pipe;
the exhaust unit includes an exhaust port for discharging the first gas and the second gas, and an exhaust valve that selectively blocks the flow of the first gas and the second gas between the supply pipe and the exhaust port ;
a control unit that controls the first valve, the second valve, and the exhaust valve,
The control unit is
a first gas supply mode in which the first valve is opened and the second valve and the exhaust valve are closed;
a second gas supply mode in which the second valve is opened and the first valve and the exhaust valve are closed;
an exhaust mode in which the first valve and the second valve are closed and the exhaust valve is opened;
The exhaust mode is executed between the first gas supply mode and the second gas supply mode when switching from one of the first gas supply mode and the second gas supply mode to the other .

According to this characteristic configuration, when the purge gas to be supplied to the supply ports arranged in each of the multiple storage units is switched from the first gas to the second gas, for example, the first valve is closed and then the exhaust valve is opened, so that the first gas remaining inside the supply pipe and the branch pipe can be appropriately discharged from the exhaust port. After that, by opening the second valve while maintaining the first valve closed, the second gas can be appropriately supplied to the multiple supply ports while keeping the amount of the first gas remaining inside the supply pipe and the branch pipe supplied to the multiple supply ports small. Also, when switching from the second gas to the first gas, the first gas can be appropriately supplied to the multiple supply ports while keeping the amount of the second gas remaining inside the supply pipe and the branch pipe supplied to the multiple supply ports small by performing the operation of the first valve and the second valve in the reverse order to the above. Thus, according to this characteristic configuration, when the purge gas to be supplied to the supply port is switched between the first gas and the second gas, the amount of the purge gas remaining in the pipe before the switch that is supplied to the supply port can be appropriately reduced.
Here, if one of the first valve and the second valve is opened in the exhaust mode, the pressure inside the supply pipe is unlikely to decrease, and the gas inside the branch pipe may be unlikely to escape. In contrast, according to this characteristic configuration, both the first valve and the second valve are closed in the exhaust mode. Therefore, compared to a configuration in which one of the first valve and the second valve is opened in the exhaust mode, it is easier to exhaust the purge gas from both the supply pipe and the branch pipe from the exhaust port.

FIG. 1 is a schematic diagram showing a schematic configuration of a storage shelf according to an embodiment; A flowchart showing an example of a control process of a control unit according to an embodiment.

The storage shelf 100 according to the embodiment will be described below with reference to the drawings. As shown in FIG. 1, the storage shelf 100 includes a plurality of storage sections 1, a plurality of supply ports 2, a plurality of branch pipes 3, a supply pipe 4, a first supply section 5, a second supply section 6, and an exhaust section 7. In this embodiment, the storage shelf 100 further includes a pressure sensor 8 and an oxygen concentration sensor 9.

Each of the multiple storage sections 1 is configured to store a container W. The container W is a sealed container configured to be able to supply purge gas to the inside. In this embodiment, the container W is configured to store a semiconductor substrate. In this example, the container W is a front-opening sealed container called a FOUP (Front Opening Unified Pod).

Although not shown in the figures, in this embodiment, each of the multiple storage units 1 is equipped with a support member that supports the container W from below. In addition, the multiple storage units 1 are arranged side by side in the vertical and horizontal directions.

Each of the multiple supply ports 2 is disposed in each of the multiple storage sections 1. That is, a supply port 2 is disposed in each storage section 1. The supply port 2 is configured to supply purge gas to the container W contained in the storage section 1 corresponding to the supply port 2. In this embodiment, a supply nozzle configured to be connectable to a purge gas inlet provided in the container W functions as the supply port 2. The purge gas includes first and second gases of different types. In this embodiment, the first gas is an inert gas, and the second gas is clean air. In this example, the inert gas is nitrogen gas, and the clean air is what is called clean dry air.

The multiple branch pipes 3 and the supply pipes 4 are configured so that purge gas flows through them. The multiple branch pipes 3 and the supply pipes 4 are connected so as to communicate with each other. Each of the multiple branch pipes 3 is connected to each of the multiple supply ports 2.

In this embodiment, each of the multiple branch pipes 3 includes a first branch pipe 31, multiple second branch pipes 32, and multiple third branch pipes 33.

The first branch pipe 31 is connected to the supply pipe 4 so as to branch off from the supply pipe 4. The multiple second branch pipes 32 are connected to the first branch pipe 31 so as to branch off from the first branch pipe 31. The multiple third branch pipes 33 are connected to the multiple second branch pipes 32 so as to branch off from each of the multiple second branch pipes 32. Each of the multiple third branch pipes 33 is connected to each of the multiple supply ports 2. In this manner, in this embodiment, the branch pipes 3 are formed so that the multiple first branch pipes 31 branch off from the supply pipe 4, the multiple second branch pipes 32 branch off from each of the multiple first branch pipes 31, and the multiple third branch pipes 33 branch off from each of the multiple second branch pipes 32.

In this embodiment, a flow control device 34 that controls the flow rate of the purge gas passing through each of the multiple second branch pipes 32 is disposed. In this example, the flow control device 34 is a mass flow controller that measures the mass flow rate of the purge gas flowing through the second branch pipe 32 in which the flow control device 34 is disposed, and controls the mass flow rate.

In addition, in this embodiment, a pressure reducing valve 41 is disposed in the supply pipe 4. The pressure reducing valve 41 is a pressure adjusting valve that reduces the pressure of the purge gas downstream of the pressure reducing valve 41 to less than the pressure of the purge gas upstream of the pressure reducing valve 41 inside the supply pipe 4. In this embodiment, the pressure of the purge gas after pressure adjustment by the pressure reducing valve 41 is set so as not to fall below the pressure of the purge gas required to operate the flow control device 34.

The first supply unit 5 is configured to supply a first gas to the supply pipe 4. In this embodiment, the first supply unit 5 supplies the first gas at a pressure higher than atmospheric pressure. The first supply unit 5 includes a first supply source 51, a first gas pipe 52, and a first valve 53.

The first supply source 51 is a supply source of the first gas. The first supply source 51 supplies the first gas to the first gas pipe 52. The first gas pipe 52 is formed to connect the first supply source 51 and the supply pipe 4. In other words, the first supply source 51 and the supply pipe 4 are in communication with each other via the first gas pipe 52. The first valve 53 is a valve that selectively blocks the flow of the first gas in the first gas pipe 52. In this example, the first valve 53 is an air pressure valve that is controlled to open and close using compressed air.

The second supply unit 6 is configured to supply the second gas to the supply pipe 4. In this embodiment, the second supply unit 6 supplies the second gas at a pressure higher than atmospheric pressure. The second supply unit 6 includes a second supply source 61, a second gas pipe 62, and a second valve 63.

The second supply source 61 is a supply source of the second gas. The second supply source 61 supplies the second gas to the second gas pipe 62. The second gas pipe 62 is formed to connect the second supply source 61 and the supply pipe 4. In other words, the second supply source 61 and the supply pipe 4 are in communication with each other via the second gas pipe 62. The second valve 63 is a valve that selectively blocks the flow of the second gas in the second gas pipe 62. In this example, the second valve 63 is an air pressure valve that is controlled to open and close using compressed air.

The exhaust unit 7 is configured to exhaust the purge gas from the supply pipe 4. The exhaust unit 7 includes an exhaust port 71 and an exhaust valve 72. In this embodiment, the exhaust unit 7 further includes an exhaust pipe 73 and a check valve 74.

The exhaust port 71 is an opening for discharging the purge gas. In this embodiment, the exhaust port 71 is disposed in a space with a pressure equivalent to atmospheric pressure. The exhaust valve 72 is a valve that selectively blocks the flow of the purge gas between the supply pipe 4 and the exhaust port 71. In this example, the exhaust valve 72 is an electromagnetic valve that is controlled to open and close using an electromagnet. The exhaust pipe 73 is formed to connect the supply pipe 4 and the exhaust port 71. That is, the supply pipe 4 and the exhaust port 71 communicate with each other through the exhaust pipe 73. The check valve 74 is a valve that allows the flow of the purge gas in one direction but restricts the flow of the purge gas in the opposite direction. The check valve 74 is disposed in the exhaust pipe 73. Therefore, the check valve 74 allows the flow of the purge gas from the supply pipe 4 side to the exhaust port 71 side in the exhaust pipe 73, but restricts the flow of the purge gas in the opposite direction. In this embodiment, the check valve 74 is located upstream of the exhaust valve 72 in the exhaust pipe 73.

The pressure sensor 8 is a sensor that detects the gas pressure P, which is the pressure of the purge gas flowing through the supply pipe 4. In this embodiment, the pressure sensor 8 is disposed downstream of the first valve 53 and the second valve 63 in the supply pipe 4 and upstream of the exhaust valve 72.

The oxygen concentration sensor 9 is a sensor that detects the oxygen concentration C, which is the concentration of oxygen in the supply pipe 4. In other words, the oxygen concentration sensor 9 detects the oxygen concentration C as the concentration of oxygen contained in the purge gas flowing through the supply pipe 4. In this embodiment, the oxygen concentration sensor 9 is disposed downstream of the first valve 53 and the second valve 63 and upstream of the exhaust valve 72 in the supply pipe 4.

In the following description, the connection between the supply pipe 4 and the first gas pipe 52 is referred to as the "first connection part X1." The connection between the supply pipe 4 and the second gas pipe 62 is referred to as the "second connection part X2." The connection between the supply pipe 4 and the exhaust pipe 73 is referred to as the "exhaust connection part X3." The connection between the supply pipe 4 and each of the multiple branch pipes 3 (here, the multiple first branch pipes 31) is referred to as the "branch connection part X4."

In this embodiment, the first connection part X1 and the second connection part X2 are arranged in the same position. Also, in this embodiment, the multiple branch connection parts X4 are arranged in different positions.

In this embodiment, the exhaust connection part X3 is disposed at the same position as or further downstream than the downstream one of the first connection part X1 and the second connection part X2, and at the same position as or further upstream than the most upstream one of the multiple branch connection parts X4. In the example shown in FIG. 1, the exhaust connection part X3 is disposed downstream of both the first connection part X1 and the second connection part X2, and further upstream than the most upstream one of the multiple branch connection parts X4 (the one on the leftmost side in FIG. 1).

In addition, in this embodiment, the pressure reducing valve 41, the pressure sensor 8, and the oxygen concentration sensor 9 are disposed downstream of both the first connection part X1 and the second connection part X2 in the supply pipe 4, and upstream of the exhaust connection part X3. In the example shown in FIG. 1, the pressure sensor 8 is disposed upstream of the exhaust connection part X3 in the supply pipe 4, and downstream of the pressure reducing valve 41. Therefore, in this embodiment, the pressure sensor 8 detects the gas pressure P downstream of the pressure reducing valve 41 in the supply pipe 4. In addition, the oxygen concentration sensor 9 is disposed downstream of both the first connection part X1 and the second connection part X2 in the supply pipe 4, and upstream of the pressure reducing valve 41.

As shown in FIG. 1, in this embodiment, the storage shelf 100 further includes a control unit 10 that controls the first valve 53, the second valve 63, and the exhaust valve 72.

The control unit 10 switches each of the first valve 53, the second valve 63, and the exhaust valve 72 between an open state and a closed state. In this embodiment, the control unit 10 acquires the gas pressure P detected by the pressure sensor 8. In addition, in this embodiment, the control unit 10 acquires the oxygen concentration C detected by the oxygen concentration sensor 9.

The control unit 10 is configured to be able to selectively execute a first gas supply mode, a second gas supply mode, and an exhaust mode. The first gas supply mode is a mode in which the first supply unit 5 supplies the first gas to the supply pipe 4. In the first gas supply mode of this embodiment, the first valve 53 is opened, and the second valve 63 and the exhaust valve 72 are closed. The second gas supply mode is a mode in which the second supply unit 6 supplies the second gas to the supply pipe 4. In the second gas supply mode of this embodiment, the second valve 63 is opened, and the first valve 53 and the exhaust valve 72 are closed. The exhaust mode is a mode in which the exhaust unit 7 exhausts the purge gas from the supply pipe 4. In the exhaust mode of this embodiment, the first valve 53 and the second valve 63 are closed, and the exhaust valve 72 is opened.

In this embodiment, the exhaust mode is executed between the first gas supply mode and the second gas supply mode when switching from one of the first gas supply mode and the second gas supply mode to the other. As described above, in this embodiment, the first gas is an inert gas, and the second gas is clean air. Since the inert gas does not contain oxygen, it is preferable to execute the exhaust mode at least when switching from the first gas supply mode to the second gas supply mode, taking into consideration the exposure of the operator to the inert gas. In this case, it is more preferable that the control unit 10 outputs a signal indicating that the switching to the second gas supply mode is completed when the oxygen concentration C detected by the oxygen concentration sensor 9 is equal to or greater than the specified concentration threshold value THc after switching from the first gas supply mode to the second gas supply mode.

The control process of the control unit 10 will be described below with reference to FIG. 2. FIG. 2 is a flowchart showing an example of the control process of the control unit 10. Note that the control process of the control unit 10 shown below is a control process executed when the first valve 53 is in an open state and both the second valve 63 and the exhaust valve 72 are in a closed state, that is, when switching from a state in which the control unit 10 is operating in the first gas supply mode to the second gas supply mode.

As shown in FIG. 2, first, the control unit 10 switches the first valve 53 from an open state to a closed state (step #1). As a result, the first valve 53, the second valve 63, and the exhaust valve 72 are all closed. In this state, neither the supply of purge gas to the supply pipe 4 nor the exhaust of purge gas from the supply pipe 4 is performed.

Next, the control unit 10 switches the exhaust valve 72 from a closed state to an open state (step #2). That is, the control unit 10 switches the operation mode to the exhaust mode. As described above, in this embodiment, the first gas is supplied to the supply pipe 4 at a pressure higher than atmospheric pressure in the first gas supply mode. Therefore, the pressure of the purge gas in the supply pipe 4 and the branch pipe 3 is higher than atmospheric pressure. Also, as described above, in this embodiment, the exhaust port 71 is arranged in a space with a pressure equivalent to atmospheric pressure. Therefore, when the first valve 53 and the second valve 63 are closed and the exhaust valve 72 is open, the first gas remaining inside the supply pipe 4 and the branch pipe 3 is discharged from the exhaust port 71 due to the pressure difference between the inside of the supply pipe 4 and the branch pipe 3 and the outside of the exhaust port 71.

While maintaining this state, the control unit 10 determines whether a prescribed time T1 has elapsed (step #3). If the time T1 has elapsed (step #3: Yes), the control unit 10 determines whether the gas pressure P detected by the pressure sensor 8 is less than a prescribed pressure threshold THp (step #4).

If the gas pressure P is equal to or greater than the pressure threshold THp (step #4: No), the control unit 10 determines that the first gas remaining inside the supply pipe 4 and the branch pipe 3 has not been sufficiently discharged from the exhaust port 71, and performs the above step #3 again.

On the other hand, if the gas pressure P is less than the pressure threshold THp (step #4: Yes), the control unit 10 determines that the first gas remaining inside the supply pipe 4 and the branch pipe 3 has been sufficiently discharged from the exhaust port 71, and the control unit 10 switches the exhaust valve 72 from an open state to a closed state (step #5). As a result, the first valve 53, the second valve 63, and the exhaust valve 72 are all closed.

Then, the control unit 10 switches the second valve 63 from a closed state to an open state (step #6). That is, the control unit 10 switches the operation mode to the second gas supply mode. As a result, the second gas is supplied from the second supply source 61 to the supply pipe 4, and further to the multiple supply ports 2 through the multiple branch pipes 3.

While maintaining this state, the control unit 10 determines whether a prescribed time T2 has elapsed (step #7). If the time T2 has elapsed (step #7: Yes), the control unit 10 determines whether the oxygen concentration C detected by the oxygen concentration sensor 9 is equal to or greater than a prescribed concentration threshold THc (step #8).

If the oxygen concentration C is less than the concentration threshold THc (step #8: No), the control unit 10 determines that sufficient oxygen is not being supplied to the supply port 2 and performs the above step #7 again.

When the oxygen concentration C is equal to or greater than the concentration threshold value THc (step #8: Yes), the control unit 10 determines that sufficient oxygen is being supplied to the supply port 2, and outputs a mode switching completion signal, which is a signal indicating that switching to the second gas supply mode has been completed (step #9). In this example, the multiple storage units 1 are arranged in an enclosed space, and an operator can access the enclosed space through an inspection door. In this example, the inspection door is configured not to open unless the mode switching completion signal is output. In this way, measures are taken to prevent the operator from being exposed to an inert gas that does not contain oxygen, based on the mode switching completion signal.

Other embodiments
(1) In the above embodiment, the first valve 53 and the second valve 63 are independent of each other. However, the present invention is not limited to such a configuration, and the first valve 53 and the second valve 63 may be integrally configured so as to be switchable between, for example, a first state in which the first valve 53 and the second valve 63 are closed, a second state in which the first valve 53 is open and the second valve 63 is closed, and a third state in which the first valve 53 is closed and the second valve 63 is open.

(2) In the above embodiment, a configuration in which the first connection portion X1 and the second connection portion X2 are arranged in the same position has been described as an example. However, the present invention is not limited to such a configuration, and the first connection portion X1 and the second connection portion X2 may be arranged in different positions.

(3) In the above embodiment, a configuration in which the supply pipe 4 and the exhaust pipe 73 are connected has been described as an example. However, the present invention is not limited to such a configuration, and may be configured, for example, in which the supply pipe 4 and the exhaust pipe 73 are not connected, and the exhaust pipe 73 is connected to at least one of the multiple branch pipes 3. In addition, two or more exhaust units 7 may be provided.

(4) In the above embodiment, the exhaust unit 7 is described as having an exhaust pipe 73 that connects the supply pipe 4 and the exhaust port 71. However, the present invention is not limited to such a configuration, and the exhaust unit 7 may not have an exhaust pipe 73, and the exhaust port 71 and the exhaust valve 72 may be provided directly on the supply pipe 4.

(5) In the above embodiment, a configuration in which the first valve 53 and the second valve 63 are closed in the exhaust mode has been described as an example. However, the present invention is not limited to such a configuration. For example, when switching from the first gas supply mode to the second gas supply mode, the exhaust mode may be executed with the first valve 53 in a closed state and the second valve 63 in an open state.

(6) In the above embodiment, a configuration has been described as an example in which, in the exhaust mode, the purge gas remaining inside the supply pipe 4 and the branch pipe 3 is discharged from the exhaust port 71 due to the pressure difference between the inside of the supply pipe 4 and the branch pipe 3 and the outside of the exhaust port 71. However, the present invention is not limited to such a configuration, and for example, a configuration in which the purge gas remaining inside the supply pipe 4 and the branch pipe 3 is sucked in using a suction device such as a pump connected to the exhaust port 71 may be used. In this configuration, the first supply unit 5 and the second supply unit 6 may supply the purge gas at a pressure equal to or lower than atmospheric pressure, and the exhaust port 71 may be disposed in a space with a pressure significantly different from atmospheric pressure.

(7) In the above embodiment, a configuration has been described as an example in which the exhaust mode is executed when switching from a first gas supply mode in which a first gas, which is an inert gas, is supplied to the supply pipe 4 to a second gas supply mode in which a second gas, which is clean air, is supplied to the supply pipe 4. However, the present invention is not limited to such a configuration, and the exhaust mode may be executed not only when switching from the first gas supply mode to the second gas supply mode, but also when switching from the second gas supply mode to the first gas supply mode.

(8) In the above embodiment, a configuration in which the first gas is an inert gas and the second gas is clean air has been described as an example. However, the present invention is not limited to such a configuration, and the first gas may be, for example, nitrogen gas as an inert gas, and the second gas may be argon gas as an inert gas. In this way, the first gas and the second gas may be different types of purge gas and may be changed as appropriate depending on the application.

(9) The configurations disclosed in each of the above-described embodiments may be combined with configurations disclosed in other embodiments, provided no contradictions arise. With respect to other configurations, the embodiments disclosed in this specification are merely illustrative in all respects. Therefore, various modifications may be made as appropriate within the scope of the spirit of this disclosure.

[Summary of the above embodiment]
The following provides an overview of the storage shelves described above.

The storage shelves are
A storage shelf having a plurality of storage sections each for storing a container,
a supply port disposed in each of the plurality of storage units and configured to supply a first gas or a second gas to the container stored in the storage unit;
A branch pipe connected to each of the plurality of supply ports;
A supply pipe connected to a plurality of the branch pipes;
a first supply unit that supplies the first gas to the supply pipe;
a second supply unit that supplies the second gas to the supply pipe;
an exhaust unit that exhausts the first gas and the second gas from the supply pipe,
the first supply unit includes a first supply source that is a supply source of the first gas, a first gas pipe that connects the first supply source and the supply pipe, and a first valve that selectively blocks a flow of the first gas in the first gas pipe;
the second supply unit includes a second supply source that is a supply source of the second gas, a second gas pipe that connects the second supply source and the supply pipe, and a second valve that selectively blocks the flow of the second gas in the second gas pipe;
The exhaust section includes an exhaust port for discharging the first gas and the second gas, and an exhaust valve for selectively blocking the flow of the first gas and the second gas between the supply pipe and the exhaust port.

According to this configuration, when the purge gas to be supplied to the supply ports arranged in each of the multiple storage units is switched from the first gas to the second gas, for example, by closing the first valve and then opening the exhaust valve, the first gas remaining inside the supply pipe and the branch pipe can be appropriately discharged from the exhaust port. After that, by opening the second valve while maintaining the first valve closed, the second gas can be appropriately supplied to the multiple supply ports while keeping the amount of the first gas remaining inside the supply pipe and the branch pipe supplied to the multiple supply ports small. Also, when switching from the second gas to the first gas, by performing the operation of the first valve and the second valve in the reverse order to the above, the first gas can be appropriately supplied to the multiple supply ports while keeping the amount of the second gas remaining inside the supply pipe and the branch pipe supplied to the multiple supply ports small. Thus, according to this configuration, when the purge gas to be supplied to the supply port is switched between the first gas and the second gas, the amount of the purge gas remaining in the pipe before the switch that is supplied to the supply port can be appropriately reduced.

Here, the exhaust unit further includes an exhaust pipe connecting the supply pipe and the exhaust port,
a connection portion between the supply pipe and the first gas pipe as a first connection portion, a connection portion between the supply pipe and the second gas pipe as a second connection portion, a connection portion between the supply pipe and the exhaust pipe as an exhaust connection portion, and connection portions between the supply pipe and each of the plurality of branch pipes as branch connection portions,
It is preferable that the exhaust connection portion is arranged at the same position as the downstream one of the first connection portion and the second connection portion or further downstream than that, and at the same position as the most upstream one of the plurality of branch connection portions or further upstream than that.

With this configuration, the purge gas remaining inside the supply pipe and the branch pipes can be properly discharged from the exhaust port through an exhaust pipe arranged to connect the supply pipes connected to the multiple branch pipes to the exhaust port.

The exhaust valve may further include a control unit that controls the first valve, the second valve, and the exhaust valve.
The control unit is
a first gas supply mode in which the first valve is opened and the second valve and the exhaust valve are closed;
a second gas supply mode in which the second valve is opened and the first valve and the exhaust valve are closed;
an exhaust mode in which the first valve and the second valve are closed and the exhaust valve is opened;
It is preferable that the exhaust mode be performed between the first gas supply mode and the second gas supply mode when switching from one of the first gas supply mode and the second gas supply mode to the other.

Here, if one of the first valve and the second valve is open in the exhaust mode, the pressure inside the supply pipe is unlikely to decrease, and the gas inside the branch pipe may be difficult to escape. In contrast, with this configuration, both the first valve and the second valve are closed in the exhaust mode. Therefore, it is easier to exhaust the purge gas from both the supply pipe and the branch pipe from the exhaust port compared to a configuration in which one of the first valve and the second valve is open in the exhaust mode.

Moreover, the first supply unit supplies the first gas at a pressure higher than atmospheric pressure,
The second supply unit supplies the second gas at a pressure higher than atmospheric pressure,
It is preferable that the control unit executes the exhaust mode for a period until the pressure inside the supply pipe becomes equal to or lower than atmospheric pressure.

With this configuration, in exhaust mode, the purge gas remaining inside the supply pipe and the branch pipe can be discharged by utilizing the pressure difference between the inside of the supply pipe and the branch pipe and the outside of the exhaust port. Therefore, the purge gas remaining inside the supply pipe and the branch pipe can be properly discharged.

The container is configured to receive a semiconductor substrate,
the first gas is an inert gas;
the second gas is clean air;
It is preferable that the control unit executes the exhaust mode at least when switching from the first gas supply mode to the second gas supply mode.

According to this configuration, the exhaust mode is executed when the purge gas supplied to the multiple supply ports is switched from inert gas to clean air. This makes it possible to reduce the amount of inert gas remaining inside the supply pipe and the branch pipe that is supplied to the multiple supply ports after the supply of clean air begins. Therefore, for example, when an operator works in a space filled with purge gas supplied to the multiple supply ports after switching to the second gas supply mode, it is easy to avoid exposing the operator to the inert gas that does not contain oxygen.

The apparatus further includes an oxygen concentration sensor for detecting the concentration of oxygen in the supply pipe,
the oxygen concentration sensor is disposed in the supply pipe downstream of the first valve and the second valve and upstream of the exhaust valve,
It is preferable that, after switching from the first gas supply mode to the second gas supply mode, the control unit outputs a signal indicating that switching to the second gas supply mode has been completed when the concentration detected by the oxygen concentration sensor is equal to or greater than a specified concentration threshold value.

According to this configuration, when it is determined that the oxygen concentration in the supply pipe is sufficiently high in the exhaust mode, a signal indicating that switching to the second gas supply mode is complete is output. Therefore, for example, when an operator works in a space filled with purge gas supplied to multiple supply ports after switching to the second gas supply mode, measures can be taken to avoid exposing the operator to an inert gas that does not contain oxygen based on the signal indicating that switching to the second gas supply mode is complete.

The technology disclosed herein can be used in a storage shelf that has multiple storage compartments, each of which can hold a container.

100: Storage shelf 1: Storage section 2: Supply port 3: Branch pipe 4: Supply pipe 5: First supply section 51: First supply source 52: First gas pipe 53: First valve 6: Second supply section 61: Second supply source 62: Second gas pipe 63: Second valve 7: Exhaust section 71: Exhaust port 72: Exhaust valve

Claims (5)

A storage shelf having a plurality of storage sections each for storing a container,
a supply port disposed in each of the plurality of storage units and configured to supply a first gas or a second gas to the container stored in the storage unit;
A branch pipe connected to each of the plurality of supply ports;
A supply pipe connected to a plurality of the branch pipes;
a first supply unit that supplies the first gas to the supply pipe;
a second supply unit that supplies the second gas to the supply pipe;
an exhaust unit that exhausts the first gas and the second gas from the supply pipe,
the first supply unit includes a first supply source that is a supply source of the first gas, a first gas pipe that connects the first supply source and the supply pipe, and a first valve that selectively blocks a flow of the first gas in the first gas pipe;
the second supply unit includes a second supply source that is a supply source of the second gas, a second gas pipe that connects the second supply source and the supply pipe, and a second valve that selectively blocks the flow of the second gas in the second gas pipe;
the exhaust unit includes an exhaust port for discharging the first gas and the second gas, and an exhaust valve that selectively blocks the flow of the first gas and the second gas between the supply pipe and the exhaust port ;
A control unit that controls the first valve, the second valve, and the exhaust valve,
The control unit is
a first gas supply mode in which the first valve is opened and the second valve and the exhaust valve are closed;
a second gas supply mode in which the second valve is opened and the first valve and the exhaust valve are closed;
an exhaust mode in which the first valve and the second valve are closed and the exhaust valve is opened;
The exhaust mode is executed between the first gas supply mode and the second gas supply mode when switching from one of the first gas supply mode and the second gas supply mode to the other . The exhaust unit further includes an exhaust pipe connecting the supply pipe and the exhaust port,
a connection portion between the supply pipe and the first gas pipe as a first connection portion, a connection portion between the supply pipe and the second gas pipe as a second connection portion, a connection portion between the supply pipe and the exhaust pipe as an exhaust connection portion, and connection portions between the supply pipe and each of the plurality of branch pipes as branch connection portions,
2. The storage shelf according to claim 1, wherein the exhaust connection portion is disposed at the same position as or downstream of a downstream one of the first connection portion and the second connection portion, and at the same position as or upstream of a most upstream one of the plurality of branch connection portions. The first supply unit supplies the first gas at a pressure higher than atmospheric pressure,
The second supply unit supplies the second gas at a pressure higher than atmospheric pressure,
The storage shelf according to claim 1 , wherein the control unit executes the exhaust mode for a period until the pressure inside the supply pipe becomes equal to or lower than atmospheric pressure. the container is configured to receive a semiconductor substrate;
the first gas is an inert gas;
the second gas is clean air;
The storage shelf according to claim 1 , wherein the control unit executes the exhaust mode at least when switching from the first gas supply mode to the second gas supply mode. Further comprising an oxygen concentration sensor for detecting the concentration of oxygen in the supply pipe,
the oxygen concentration sensor is disposed in the supply pipe downstream of the first valve and the second valve and upstream of the exhaust valve,
5. The storage shelf according to claim 4, wherein the control unit outputs a signal indicating that switching to the second gas supply mode has been completed when, after switching from the first gas supply mode to the second gas supply mode, the concentration detected by the oxygen concentration sensor is equal to or greater than a specified concentration threshold value.

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