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JP7493837B2 - Metal mask for printing - Google Patents
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JP7493837B2 - Metal mask for printing - Google Patents

Metal mask for printing Download PDF

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JP7493837B2
JP7493837B2 JP2022558837A JP2022558837A JP7493837B2 JP 7493837 B2 JP7493837 B2 JP 7493837B2 JP 2022558837 A JP2022558837 A JP 2022558837A JP 2022558837 A JP2022558837 A JP 2022558837A JP 7493837 B2 JP7493837 B2 JP 7493837B2
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diamond
mesh holes
printing
mesh
shaped
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JPWO2022091449A1 (en
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忍 油井
隆二 市川
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Bon Mark Co Ltd
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Bon Mark Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/24Stencils; Stencil materials; Carriers therefor
    • B41N1/247Meshes, gauzes, woven or similar screen materials; Preparation thereof, e.g. by plasma treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/04Printing plates or foils; Materials therefor metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/24Stencils; Stencil materials; Carriers therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Textile Engineering (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

この発明は、コンデンサー内部電極を印刷するための印刷用メタルマスクに関するものである。The present invention relates to a printing metal mask for printing internal electrodes of a capacitor.

従来、積層セラミックコンデンサーは、スクリーン印刷版を用いてセラミックグリーンシート上に内部電極となる導電性ペーストを印刷し、このセラミックグリーンシートを複数枚積層して焼成した後に、この積層体を個々に切断することによって製造される。セラッミクグリーンシート上には複数個分の内部電極が一度に印刷され、スクリーン印刷版には同一形状の印刷孔が多数形成されている(例えば、特許文献1参照)。また、スクリーン印刷を行った場合、印刷パターンの両端部が盛り上がってサドル状になる現象が発生するため、印刷パターンが形成されたセラミックグリーンシートを積層、圧着した場合、耐圧不良率が高くなるので、これを改善するために、印刷パターンの両端部に大きな盛り上がりは形成されず、ほぼ平坦な印刷パターンを形成する印刷パターン形成材が知られている(特許文献2参照)。また、所定の矩形領域の中央部には菱形の孔が規則的に形成され、矩形領域の端部(周辺部)には菱形の一部の辺と矩形領域を成す辺の一部とを含む五角形の孔が規則的に形成された印刷パターン開口用のメッシュを有するマスクであって、矩形領域の角(四隅)を除く端部には、ホームベース状の五角形の孔が形成されており、矩形領域の角には、ダイヤモンド状の五角形の孔が形成されているマスクが知られている(特許文献3参照)。Conventionally, multilayer ceramic capacitors are manufactured by printing conductive paste to be internal electrodes on ceramic green sheets using a screen printing plate, stacking and firing a plurality of these ceramic green sheets, and then cutting the stack into individual pieces. A plurality of internal electrodes are printed on the ceramic green sheets at once, and a large number of printing holes of the same shape are formed on the screen printing plate (see, for example, Patent Document 1). In addition, when screen printing is performed, a phenomenon occurs in which both ends of the printed pattern are raised and saddle-shaped, so that when the ceramic green sheets on which the printed pattern is formed are stacked and pressed, the withstand voltage failure rate increases. In order to improve this, a printed pattern forming material is known that does not form a large rise at both ends of the printed pattern and forms a nearly flat printed pattern (see Patent Document 2). Also known is a mask having a mesh for printing pattern openings in which diamond-shaped holes are regularly formed in the center of a specified rectangular area, and pentagonal holes including some of the sides of the diamonds and some of the sides that form the rectangular area are regularly formed at the ends (periphery) of the rectangular area, and in which home plate-shaped pentagonal holes are formed at the ends excluding the corners (four corners) of the rectangular area, and diamond-shaped pentagonal holes are formed at the corners of the rectangular area (see Patent Document 3).

特開2001-39048号公報JP 2001-39048 A 特開2005-212285号公報JP 2005-212285 A 特許第5395850号公報Patent No. 5395850

従来の特許文献2又は特許文献3に記載の印刷パターン形成材又はマスクでは、昨今より薄く印刷することを目的にマスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴い、印刷パターンの両端部が盛り上がってサドル状になる現象(外周部が内部と比べて導電性ペーストの厚みが厚くなる現象)が目立つようになっており、それが顕著になってきているので、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターンのサドル現象の更なる低減化を図ることが必須となっている。In the conventional printing pattern forming materials or masks described in Patent Document 2 or Patent Document 3, as the masks have become thinner and the mesh holes of the printing pattern have become finer in order to print thinner, the phenomenon in which both ends of the printing pattern rise up and form a saddle shape (the conductive paste becomes thicker at the outer periphery than at the inside) has become more noticeable and this phenomenon is becoming more pronounced, so it has become essential to further reduce the saddle phenomenon in the printing pattern that accompanies the thinner masks and finer mesh holes of the printing pattern.

この発明は、上述のような課題を解決するためになされたもので、印刷パターンの外周部に配列されメッシュ孔の面積を中央部に配列されるメッシュ孔の面積に比べ小さくして、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターンのサドル現象を低減することが可能な印刷用メタルマスクを提供するものである。 The present invention has been made to solve the problems described above, and provides a printing metal mask in which the area of mesh holes arranged on the periphery of the printing pattern is smaller than the area of mesh holes arranged in the center, thereby making it possible to reduce the saddle phenomenon in the printing pattern that occurs with thinner masks and finer mesh holes in the printing pattern.

この発明に係る印刷用メタルマスクにおいては、ペーストを印刷するためのものであって、互いに平行な上下二面を有する平板状のマスク本体部と、マスク本体部の下面側の被印刷物と対向する面に形成され、マスク本体部の上面側に向かって凹んでいる凹部と、マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備える。多数のメッシュ孔は、印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、大型の菱形メッシュ孔の外周部に配置され、中央部の大型の菱形メッシュ孔の面積よりも小さいメッシュ孔面積を有する外周部の小型の菱形メッシュ孔と、印刷パターン領域の隅角部を除く最外周部に配置され、外周部の小型の菱形メッシュ孔と同じ面積を有するホームベース状の五角形のメッシュ孔と、印刷パターン領域の隅角部に配置され、中央部の大型の菱形メッシュ孔の面積よりも小さいメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔とからなるものである。 The printing metal mask according to the present invention is used for printing a paste and comprises a flat mask body having two parallel upper and lower surfaces, a recess formed on the lower surface of the mask body facing the printed material and recessed toward the upper surface of the mask body, and a large number of diamond-shaped mesh holes formed in a printing pattern area formed on the upper surface of the mask body . The large number of mesh holes include large diamond-shaped mesh holes arranged in large numbers in the center of the printing pattern area, small diamond-shaped mesh holes arranged on the outer periphery of the large diamond-shaped mesh holes and having a mesh hole area smaller than that of the large diamond-shaped mesh holes in the center, home plate-shaped pentagonal mesh holes arranged on the outermost periphery excluding the corners of the printing pattern area and having the same area as the small diamond-shaped mesh holes in the outer periphery, and diamond-shaped pentagonal mesh holes arranged on the corners of the printing pattern area and having a mesh hole area smaller than that of the large diamond-shaped mesh holes in the center .

この発明によれば、印刷パターンの外周部に配列されメッシュ孔の面積を印刷パターンの中央部に配列されるメッシュ孔の面積に比べ小さくしたので、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターンのサドル現象を著しく低減することができる。

According to this invention, the area of the mesh holes arranged on the outer periphery of the printing pattern is made smaller than the area of the mesh holes arranged in the center of the printing pattern, thereby significantly reducing the saddle phenomenon of the printing pattern that occurs when the mask is made thinner and the mesh holes of the printing pattern are made finer.

この発明の実施例1における印刷用メタルマスクの一部を下方から見た底面図である。FIG. 2 is a bottom view of a portion of the printing metal mask according to the first embodiment of the present invention, as viewed from below. 図1に示す印刷用メタルマスクのA-A線に沿った中央部を一部省略した断面図である。2 is a cross-sectional view of the printing metal mask shown in FIG. 1 taken along line AA, with a central portion omitted. 図1に示す印刷用メタルマスクのB-B線に沿った中央部を一部省略した断面図である。2 is a cross-sectional view of the printing metal mask taken along line BB of FIG. 1, with a portion of the central portion omitted. この発明の実施例1における印刷用メタルマスクの一部を上方から見た平面図である。1 is a plan view of a portion of a printing metal mask according to a first embodiment of the present invention, as viewed from above. FIG. この発明の実施例1における印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図である。1 is a cross-sectional view showing a printed pattern when printing is performed using a printing metal mask in Example 1 of the present invention. FIG. 比較例として従来の印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図である。FIG. 11 is a cross-sectional view showing a printed pattern when printing is performed using a conventional metal mask for printing as a comparative example. この発明の実施例2における印刷用メタルマスクの一部を下方から見た底面図である。FIG. 11 is a bottom view of a portion of a printing metal mask according to a second embodiment of the present invention, as viewed from below.

実施例1.
図1はこの発明の実施例1における印刷用メタルマスクの一部を下方から見た底面図、図2は図1のA-A線に沿った断面図、図3は図1のB-B線に沿った断面図、図4は同じく印刷用メタルマスクの一部を上方から見た平面図、図5は印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図、図6は比較例として従来の印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図である。
印刷用メタルマスク1は、互いに平行な上下二面を有する平板状のマスク本体部2と、このマスク本体部2の下面側の被印刷物と対向する面に形成された横長矩形状の凹部3と、マスク本体部2の上面側の横長矩形状の印刷パターン領域4内に形成された菱形を基本形とする多数のメッシュ孔5とを備えている。マスク本体部2は薄型化が図られており、全体の厚さは約10~25μm程度であり、横長矩形状の凹部3は深さ約1~5μmの範囲で上面側に向かって凹んで形成されている。この横長矩形状の凹部3の外周側壁は、横長矩形状の印刷パターン領域4の周囲を取り囲むように形成されており、横長矩形状の印刷パターン領域4の形成領域は、横長矩形状の凹部3の外周側壁の内側に形成されている。なお、印刷用メタルマスク1は、図示ではマスク本体部2、横長矩形状の凹部3及び横長矩形状の印刷パターン領域4の一部のみを示しているが、実際には、マスク本体部2、横長矩形状の凹部3及び横長矩形状の印刷パターン領域4は上下、左右に連続して配置される。横長矩形状の印刷パターン領域4内に形成される菱形を基本形とする多数のメッシュ孔5のうち、大部分が印刷パターン領域4内の中央部に配置される大型の菱形メッシュ孔5aは、この実施例では縦方向に3~4個、横方向に20~21個、計143個が配列されており、例えばメッシュ孔開口が約19~25μm、メッシュ線径D1が約16~10μmであり、そのメッシュ孔面積をS1とする。また、横長矩形状の印刷パターン領域4内に形成される菱形を基本形とする多数のメッシュ孔5のうち、大型の菱形メッシュ孔5aの左右両側端部に隣接して縦1列に配置される菱形を基本形とする大型の菱形メッシュ孔5aよりも小型で小さ目の菱形メッシュ孔5bは、この実施例では縦方向に各4個、計8個が配列されており、例えばメッシュ孔開口が約18~23μm、メッシュ線径D2が約17~12μmであり、そのメッシュ孔面積をS2とすると、メッシュ面積の相関関係はS1>S2の関係にある。また、メッシュ線径の相関関係はD1<Dの関係にある。なお、この小型で小さ目の菱形メッシュ孔5bは、少なくとも左右両側端部のいずれか一方に隣接して縦2列又は縦3列に配置しても良い。横長矩形状の印刷パターン領域4内に形成される菱形を基本形とする多数のメッシュ孔5のうち、横長矩形状の印刷パターン領域4の各隅角部を除く左右両側端部及び上下両側端部に配置されるホームベース状の五角形のメッシュ孔5cは、この実施例では縦方向に6個、横方向に42個、計48個が配列されており、例えばメッシュ孔開口が約18~23μm、メッシュ線径D3が約17~12μmであり、そのメッシュ孔面積をS3とすると、メッシュ面積の相関関係はS1>S2≒S3の関係にあり、小さ目のメッシュ孔である。また、メッシュ線径の相関関係はD1<D2≒D3の関係である。また、横長矩形状の印刷パターン領域4内に形成される菱形を基本形とする多数のメッシュ孔5のうち、横長矩形状の印刷パターン領域4の各隅角部に配置されるダイヤモンド状の五角形のメッシュ孔5dは、この実施例では四隅に各1個、計4個が配列されており、例えばメッシュ孔開口が約17~21μm、メッシュ線径D4が約18~14μmとしているが、例えばホームベース状の五角形のメッシュ孔5cと同等の大きさであるメッシュ孔開口が約18~23μm、メッシュ線径D4が約17~12μmとしても良い。そして、そのメッシュ孔面積をS4とすると、メッシュ面積の相関関係はS1>S2≒S3>S4の関係、又はS1>D2≒S3≒S4の関係にあり、ホームベース状の五角形のメッシュ孔5cよりも小型で小さ目のメッシュ孔、又はホームベース状の五角形のメッシュ孔5cと同等の大きさのメッシュ孔である。また、メッシュ線径の相関関係はD1<D2≒D3<D4、又はD1<D2≒D3≒D4の関係にある。なお、ダイヤモンド状の五角形のメッシュ孔5dは、横長矩形状の印刷パターン領域4の全ての隅角部(4隅)に配置されなくても良く、例えば、対角線上に対向する2箇所(2隅)であっても良い。
横長矩形状の印刷パターン領域4内に形成される菱形を基本形とする多数のメッシュ孔5のうち、横長矩形状の印刷パターン領域4の外周部の1~4列目に配置される小型で小さ目の菱形メッシュ孔5bの面積S2と、ホームベース状の五角形のメッシュ孔5cの面積S3と、ダイヤモンド状の五角形のメッシュ孔5dの面積S4を、中央に配置される大型のメッシュ孔5aの面積S1に比べて約5~30%程度小さくすることにより、図5に示すように、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターン(導電性ペースト等)の両端部が盛り上がってサドル状になる現象を避けることができ、サドル現象を著しく低減することが可能となり、マスク本体の板厚が約10~25μm程度のマスクでは顕著な効果を期待できる。なお、比較例として従来の印刷用メタルマスクを用いて印刷を行った場合は、図6に示すように、印刷パターンの両端部が盛り上がってサドル状になる現象が発生することは避けられないものであった。
Example 1.
FIG. 1 is a bottom view of a portion of a printing metal mask in Example 1 of the present invention, as viewed from below, FIG. 2 is a cross-sectional view along line A-A in FIG. 1, FIG. 3 is a cross-sectional view along line B-B in FIG. 1, FIG. 4 is a plan view of the same portion of the printing metal mask, as viewed from above, FIG. 5 is a cross-sectional view showing a printed pattern when printing is performed using a printing metal mask, and FIG. 6 is a cross-sectional view showing a printed pattern when printing is performed using a conventional printing metal mask as a comparative example.
The printing metal mask 1 comprises a flat mask body 2 having two parallel upper and lower surfaces, a horizontally elongated rectangular recess 3 formed on the lower surface of the mask body 2 facing the printing substrate, and a large number of mesh holes 5 having a basic shape of a rhombus formed in a horizontally elongated rectangular printing pattern region 4 on the upper surface of the mask body 2. The mask body 2 is thinned to a total thickness of about 10 to 25 μm, and the horizontally elongated rectangular recess 3 is recessed toward the upper surface with a depth of about 1 to 5 μm. The outer peripheral side wall of the horizontally elongated rectangular recess 3 is formed so as to surround the periphery of the horizontally elongated rectangular printing pattern region 4, and the region in which the horizontally elongated rectangular printing pattern region 4 is formed is formed inside the outer peripheral side wall of the horizontally elongated rectangular recess 3. In the illustration of the printing metal mask 1, only the mask body 2, the horizontally long rectangular recesses 3, and a portion of the horizontally long rectangular printing pattern region 4 are shown, but in reality, the mask body 2, the horizontally long rectangular recesses 3, and the horizontally long rectangular printing pattern region 4 are continuously arranged vertically and horizontally. Of the numerous mesh holes 5 having a diamond shape as a basic shape formed in the horizontally long rectangular printing pattern region 4, the large diamond-shaped mesh holes 5a, most of which are arranged in the center of the printing pattern region 4, are arranged in a total of 143 holes, 3 to 4 holes vertically and 20 to 21 holes horizontally, in this embodiment, and have a mesh hole opening of about 19 to 25 μm and a mesh wire diameter D1 of about 16 to 10 μm, with the mesh hole area being S1. Among the numerous mesh holes 5 having a diamond shape as a basic shape formed in the horizontally elongated rectangular print pattern region 4, the smaller diamond-shaped mesh holes 5b, which are smaller than the large diamond-shaped mesh holes 5a and arranged in a vertical row adjacent to the left and right end portions of the large diamond-shaped mesh holes 5a, are arranged in a vertical direction, four on each side, for a total of eight, in this embodiment. For example, the mesh hole opening is about 18 to 23 μm, the mesh wire diameter D2 is about 17 to 12 μm, and if the mesh hole area is S2, the correlation of the mesh areas is S1>S2. Also, the correlation of the mesh wire diameters is D1<D. The small diamond-shaped mesh holes 5b may be arranged in two or three vertical rows adjacent to at least one of the left and right end portions. Among the numerous mesh holes 5 formed in the horizontally elongated rectangular print pattern region 4 and having a diamond shape as a basic shape, the home plate-shaped pentagonal mesh holes 5c arranged at both the left and right ends and the top and bottom ends of the horizontally elongated rectangular print pattern region 4 excluding each corner are arranged in this embodiment with 6 holes arranged vertically and 42 holes arranged horizontally, for a total of 48 holes, and for example, the mesh hole opening is about 18 to 23 μm, the mesh wire diameter D3 is about 17 to 12 μm, and if the mesh hole area is S3, the correlation of the mesh areas is S1>S2≒S3, and the mesh holes are small. Also, the correlation of the mesh wire diameters is D1<D2≒D3. In addition, among the many mesh holes 5 formed in the horizontally elongated rectangular print pattern region 4 and having a rhombus as a basic shape, the diamond-shaped pentagonal mesh holes 5d arranged at each corner of the horizontally elongated rectangular print pattern region 4 are arranged in this embodiment, one at each of the four corners, for a total of four, and for example, the mesh hole opening is about 17 to 21 μm and the mesh wire diameter D4 is about 18 to 14 μm, but for example, the mesh hole opening, which is the same size as the home base-shaped pentagonal mesh hole 5c, may be about 18 to 23 μm and the mesh wire diameter D4 may be about 17 to 12 μm. If the mesh hole area is S4, the correlation of the mesh areas is S1>S2≒S3>S4, or S1>D2≒S3≒S4, and the mesh hole is smaller than the home base-shaped pentagonal mesh hole 5c, or is the same size as the home base-shaped pentagonal mesh hole 5c. The mesh wire diameters have a correlation of D1<D2≒D3<D4, or D1<D2≒D3≒D4. The diamond-shaped pentagonal mesh holes 5d do not have to be disposed at all corners (four corners) of the horizontally elongated rectangular printing pattern area 4, and may be disposed at, for example, two locations (two corners) that are diagonally opposite to each other.
Among the many mesh holes 5 having a diamond shape as a basic shape formed in the horizontally elongated rectangular printing pattern region 4, the area S2 of the small diamond-shaped mesh holes 5b arranged in the first to fourth rows on the outer periphery of the horizontally elongated rectangular printing pattern region 4, the area S3 of the home base-shaped pentagonal mesh hole 5c, and the area S4 of the diamond-shaped pentagonal mesh hole 5d are made smaller by about 5 to 30% than the area S1 of the large mesh hole 5a arranged in the center, as shown in Figure 5, by making it possible to avoid the phenomenon in which both ends of the printing pattern (conductive paste, etc.) rise and become saddle-like due to the thinning of the mask and the fineness of the mesh holes of the printing pattern, and it is possible to significantly reduce the saddle phenomenon, and a remarkable effect can be expected with a mask having a plate thickness of about 10 to 25 μm. Note that, when printing is performed using a conventional printing metal mask as a comparative example, the phenomenon in which both ends of the printing pattern rise and become saddle-like is unavoidable, as shown in Figure 6.

実施例2.
図7はこの発明の実施例2における印刷用メタルマスクの一部を下方から見た底面図である。
上記実施例1では、中央部に配置される大型の菱形メッシュ孔5aの左右両側端部に隣接して縦1列に配置される菱形を基本形とする大型の菱形メッシュ孔5aよりも小型で小さ目の菱形メッシュ孔5bを配列した例を示したが、この実施例2においては、中央部に配置される大型のメッシュ孔5aの左右両側端部だけでなく、上下両側端部に隣接して横1列に配置される菱形を基本形とする大型の菱形メッシュ孔5aよりも小型で小さ目の菱形メッシュ孔5bを追加したものである。なお、この小型で小さ目の菱形メッシュ孔5bは、少なくとも左右両側端部のいずれか一方及び少なくとも上下両側端部のいずれか一方に隣接して縦2列又は縦3列に配置しても良い。なお、メッシュ面積の相関関係は、実施例1と同様に、S1>S2≒S3>S4の関係、又はS1>D2≒S3≒S4の関係にあり、メッシュ線径の相関関係は、実施例1と同様に、D1<D2≒D3<D4、又はD1<D2≒D3≒D4の関係にある。
Example 2.
FIG. 7 is a bottom view of a portion of a printing metal mask according to a second embodiment of the present invention, as viewed from below.
In the above embodiment 1, an example was shown in which diamond-shaped mesh holes 5b smaller than the large diamond-shaped mesh holes 5a, which have a diamond shape as their basic shape, are arranged in a vertical row adjacent to the left and right end portions of the large diamond-shaped mesh hole 5a arranged in the center, but in this embodiment 2, diamond-shaped mesh holes 5b smaller than the large diamond-shaped mesh holes 5a, which have a diamond shape as their basic shape, are added not only to the left and right end portions of the large mesh hole 5a arranged in the center, but also to the upper and lower end portions and arranged in a horizontal row. Note that these small diamond-shaped mesh holes 5b may be arranged in two or three vertical rows adjacent to at least one of the left and right end portions and at least one of the upper and lower end portions. The correlation between the mesh areas is S1>S2≒S3>S4, or S1>D2≒S3≒S4, as in Example 1, and the correlation between the mesh wire diameters is D1<D2≒D3<D4, or D1<D2≒D3≒D4, as in Example 1.

実施例3.
上記実施例1、2では、マスク本体部2の上面側の横長矩形状の印刷パターン領域4内に形成される菱形を基本形とする多数のメッシュ孔5を備えた印刷用メタルマスクについて説明したが、多数のメッシュ孔5の形状は、菱形、ホームベース状、ダイヤモンド状に限らず、例えば、三角形、四角形、その他の多角形や丸形等であっても良い。要は、横長矩形状の印刷パターン領域4の外周部の1~4列目に配置される小型又は小さ目のメッシュ孔5b~5dの面積S2~S4を、中央部に配置される大型のメッシュ孔5aの面積S1に比べて約5~30%程度小さくすることにより、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターン(導電性ペースト等)の両端部が盛り上がってサドル状になる現象を避けることができ、サドル現象を著しく低減することが可能となるものであれば多少の変更は構わない。
Example 3.
In the above-mentioned Examples 1 and 2, the printing metal mask having a large number of mesh holes 5 with a basic shape of a rhombus formed in the horizontally elongated rectangular printing pattern region 4 on the upper surface side of the mask main body 2 has been described, but the shape of the large number of mesh holes 5 is not limited to a rhombus, a home plate shape, or a diamond shape, and may be, for example, a triangle, a square, other polygons, a circle, etc. In short, by making the areas S2 to S4 of the small or smallish mesh holes 5b to 5d arranged in the first to fourth rows on the outer periphery of the horizontally elongated rectangular printing pattern region 4 smaller by about 5 to 30% than the area S1 of the large mesh hole 5a arranged in the center, it is possible to avoid the phenomenon in which both ends of the printing pattern (conductive paste, etc.) rise up and become saddle-like due to the thinning of the mask and the fineness of the mesh holes of the printing pattern, and some modification is acceptable as long as it is possible to significantly reduce the saddle phenomenon.

1 印刷用メタルマスク
2 マスク本体部
3 横長矩形状の凹部
4 横長矩形状の印刷パターン領域
5 多数のメッシュ孔
5a 中央部に配置される大型の菱形メッシュ孔
5b 左右両側端部又は上下両側端部に配置される小型で小さ目の菱形メッシュ孔
5c ホームベース状の五角形のメッシュ孔
5d ダイヤモンド状の五角形のメッシュ孔
1 Metal mask for printing 2 Mask body 3 Horizontally elongated rectangular recess 4 Horizontally elongated rectangular print pattern area 5 Numerous mesh holes 5a Large diamond-shaped mesh hole 5b arranged in the center Smaller diamond-shaped mesh holes 5c arranged on both left and right ends or both top and bottom ends Pentagonal mesh hole 5d in the shape of a home base Pentagonal mesh hole in the shape of a diamond

Claims (4)

ペーストを印刷するための印刷用メタルマスクであって、
互いに平行な上下二面を有する平板状のマスク本体部と、
前記マスク本体部の下面側の被印刷物と対向する面に形成され、前記マスク本体部の上面側に向かって凹んでいる凹部と、
前記マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備え、
前記多数のメッシュ孔は、前記印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、前記大型の菱形メッシュ孔の外周部に配置され、前記中央部の大型の菱形メッシュ孔の面積よりも小さいメッシュ孔面積を有する外周部の小型の菱形メッシュ孔と、前記印刷パターン領域の隅角部を除く最外周部に配置され、前記外周部の小型の菱形メッシュ孔と同じ面積を有するホームベース状の五角形のメッシュ孔と、前記印刷パターン領域の隅角部に配置され、前記中央部の大型の菱形メッシュ孔の面積よりも小さいメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔とからなることを特徴とする印刷用メタルマスク。
A printing metal mask for printing a paste,
A flat mask body having two parallel upper and lower surfaces;
A recess is formed on a surface of the mask body facing a print substrate on the lower surface side thereof and recessed toward an upper surface side of the mask body.
a plurality of mesh holes, each of which is basically a diamond shape, formed within a print pattern area formed on the upper surface side of the mask body;
a metal mask for printing characterized in that the numerous mesh holes comprise large diamond-shaped mesh holes arranged in a large number in the center of the printing pattern area; small diamond-shaped mesh holes arranged on the outer periphery of the large diamond-shaped mesh holes and having a mesh hole area smaller than the area of the large diamond-shaped mesh holes in the center; home plate-shaped pentagonal mesh holes arranged on the outermost periphery excluding the corners of the printing pattern area and having the same area as the small diamond-shaped mesh holes in the outer periphery; and diamond-shaped pentagonal mesh holes arranged in the corners of the printing pattern area and having a mesh hole area smaller than the area of the large diamond-shaped mesh holes in the center .
前記ダイヤモンド状の五角形のメッシュ孔は、前記外周部の小型の菱形メッシュ孔メッシュ孔面積同等のメッシュ孔面積を有する請求項1記載の印刷用メタルマスク。 2. The printing metal mask according to claim 1 , wherein the diamond-shaped pentagonal mesh holes have a mesh hole area equal to a mesh hole area of the small rhombic mesh holes in the outer periphery. 前記外周部の小型の菱形メッシュ孔は、前記大型の菱形メッシュ孔左右両側端部隣接して縦1列、縦2列、又は縦3列に配置され、前記大型の菱形メッシュ孔の上下両側端部に隣接して横1列、横2列、又は横3列に配置されていることを特徴とする請求項1又は2記載の印刷用メタルマスク。 3. The printing metal mask according to claim 1 or 2, characterized in that the small diamond-shaped mesh holes in the outer periphery are arranged in one vertical row , two vertical rows, or three vertical rows adjacent to both left and right end portions of the large diamond-shaped mesh holes, and are arranged in one horizontal row, two horizontal rows, or three horizontal rows adjacent to both top and bottom end portions of the large diamond-shaped mesh holes. 前記外周部の小型の菱形メッシュ孔のメッシュ孔面積は、前記大型の菱形メッシュ孔のメッシュ孔面積と比べて5~30%小さい請求項1から3の何れか一項に記載の印刷用メタルマスク。 4. The printing metal mask according to claim 1, wherein the mesh hole area of the small diamond-shaped mesh holes in the outer periphery is 5 to 30% smaller than the mesh hole area of the large diamond-shaped mesh holes .
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JP2004017461A (en) 2002-06-14 2004-01-22 Murata Mfg Co Ltd Screen printing plate
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JP2006347099A (en) 2005-06-20 2006-12-28 Kenseidou Kagaku Kogyo Kk Metal mask with mesh layer
JP2010023254A (en) 2008-07-16 2010-02-04 Bonmaaku:Kk Mesh for printing pattern aperture of mask, method of creating mesh pattern data, mask, two-layer structured mask, method of manufacturing mask and method of manufacturing two-layer structured mask
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