JP7501332B2 - Rotary Actuator - Google Patents

Description

The present invention relates to a rotary actuator.

Conventionally, there is a device that passes a material between two rolls arranged in parallel, sandwiches the material between the two rolls, and sends out the material to mold, process, and transport it. An example of such a device is a thin film forming device using an extrusion method.
In a thin film forming device, one roll is a movable roll and the other is a fixed roll, and the pressing force against the fixed roll and the gap between the movable roll and the fixed roll are adjusted by moving the movable roll using the thrust of an actuator.
For example, Patent Document 1 discloses a thin film member molding device equipped with a roll gap adjustment mechanism using a hydraulic servo as an actuator. In this roll gap adjustment mechanism, the actuator applies a load in a direction narrowing the gap between the rolls to a bearing portion supporting a movable roll.

JP 2018-202724 A

In the case of a configuration in which a thrust force is applied to the bearing portion of the roll as in the technology described in the above-mentioned Patent Document 1, the actuator must be arranged perpendicular to the roll rotation axis, which causes a problem that the actuator occupies a large space inside the device.
SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide a rotary actuator that saves space on an apparatus.

In order to solve the above problem, one aspect of the rotary actuator of the present invention is an eccentric two-shaft integrated motor having an inner rotor and an outer rotor whose rotation axes are parallel and at different positions, and in which the inner rotor, inner stator, outer stator, and outer rotor are arranged in this order radially outward from the rotation axis, and the eccentric two-shaft integrated motor further includes a first rotation output part connected to or integrated with the inner rotor, a second rotation output part connected to or integrated with the outer rotor, and a stator fixing part provided between the inner stator and the outer stator to which the inner stator and the outer stator are fixed, and one of the first and second rotation output parts is fixed non-rotatably to a stationary base, and the other rotation output part is connected to or integrated with a driven object.

In this way, by fixing one of the rotation output parts to a stationary base, the rotational force of the rotor of the one rotation output part becomes a force that rotates the stator fixing part, and the other rotation output part can be rotated eccentrically. Here, since the other rotation output part is connected to or integrated with the driven object, the eccentric rotation of the other rotation output part can move the driven object in a plane perpendicular to the rotation axis, and the gap between the driven object and the mating member can be adjusted. In addition, by driving the rotor of the other rotation output part, the driven object can be rotated around the rotation axis. In other words, it can be an actuator that has a function of rotating the driven object and a function of adjusting the gap. Furthermore, since the actuator can be arranged coaxially with the driven object, the space occupied by the actuator on the device can be reduced.

In the rotary actuator described above, the inner shaft rotor may be fixed unrotatably to the base.
In this case, the rotational force of the inner rotor serves to rotate the stator fixed portion, and the entire actuator can be rotated eccentrically, so that the entire actuator can be used like an eccentric cam.

Furthermore, in the above rotary actuator, the outer shaft rotor may be fixed unrotatably to the base.
In this case, the rotational force of the outer rotor serves to rotate the stator fixed portion, causing the inner rotor to rotate eccentrically, and thus the inner rotor can be moved like an eccentric cam.

In the above rotary actuator, the one of the rotation output parts may include a speed reducing mechanism that reduces the speed of a driving force from the rotor of the one of the rotation output parts and transmits the driving force to the stator fixed part.
In this case, it is possible to increase the torque when the rotor of one of the rotation output parts is driven to rotate the stator fixed part. For example, if the driven object is a pressing object, it is possible to increase the force with which the driven object is pressed against the object.

Furthermore, in the above rotary actuator, the reduction mechanism may be a planetary gear mechanism that is arranged coaxially with a rotor of the one of the rotation output portions.
In this case, the driving force from the rotor of one of the rotation output portions can be appropriately decelerated and transmitted to the stator fixed portion with a relatively simple configuration, and the reduction mechanism can be arranged compactly.

The rotary actuator may further include a brake mechanism for stopping the rotation of the stator fixed portion, in which case the position of the other rotation output portion can be fixed.
Furthermore, in the rotary actuator, the brake mechanism may be a permanent magnet type electromagnetic brake capable of fixing the rotor of the one rotation output part and the stator fixed part, in which case the position of the other rotation output part can be fixed with a relatively simple structure.

The rotary actuator may further include bearings supporting both axial ends of the rotor of the one of the rotation output portions.
In this case, it is possible to improve the rigidity when the rotor of one of the rotation output parts is driven to rotate the stator fixed part.

According to one aspect of the present invention, it is possible to provide a rotary actuator that saves space on the device.

FIG. 1 shows an application example of a rotary actuator according to this embodiment. FIG. 2 is a cross-sectional view of the rotary actuator of the first embodiment. FIG. 3 is a conceptual diagram of the operation of the pressing mechanism using eccentricity. FIG. 4 is a cross-sectional view of a rotary actuator according to the second embodiment. FIG. 5 is a cross-sectional view of a rotary actuator according to the third embodiment. FIG. 6 is a cross-sectional view of a rotary actuator according to the fourth embodiment. FIG. 7 is a cross-sectional view of a rotary actuator according to the fifth embodiment. FIG. 8 is a cross-sectional view of a rotary actuator according to the sixth embodiment. FIG. 9 is a cross-sectional view of a rotary actuator according to the seventh embodiment. FIG. 10 is a cross-sectional view of a rotary actuator according to the eighth embodiment. FIG. 11 is a cross-sectional view of a rotary actuator according to the ninth embodiment. FIG. 12 is a cross-sectional view showing another example of the rotary actuator according to the ninth embodiment.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The scope of the present invention is not limited to the following embodiments, and can be modified as desired within the scope of the technical concept of the present invention.

(First embodiment)
FIG. 1 is a diagram showing an application example of a rotary actuator according to the present embodiment.
In this embodiment, a rotary actuator is applied to a thin film forming apparatus 1.
As shown in FIG. 1, the thin film forming device 1 is a film extrusion molding machine that includes a fixed roll 2 and a movable roll 3, and sandwiches and sends out the material discharged from a T-die 4 between these two rolls to form a thin film member. Here, the thin film member to be formed can be, for example, a thin film member made of resin. The fixed roll 2 and the movable roll 3 are fixedly arranged in a rotatable state. In addition, the movable roll 3 is configured to be movable in a direction approaching or moving away from the fixed roll 2 while being fixedly arranged. By moving the movable roll 3 relative to the fixed roll 2, the gap between the two rolls 2 and 3 can be adjusted.
The rotary actuator in this embodiment can be used as an actuator that realizes the movement of the movable roll 3 relative to the fixed roll 2 and the rotational drive for feeding the material.

FIG. 2 is a cross-sectional view showing the main configuration of the rotary actuator 100A according to this embodiment.
The rotary actuator 100A in this embodiment has, in addition to a rotation function for rotating an object to be driven, a gap adjustment function for moving the object to be driven and adjusting the gap between the object to be driven and a mating member.
2, the rotary actuator 100A includes an eccentric two-shaft integrated motor 110 having two eccentric rotors, and a base 200. The eccentric two-shaft integrated motor 110 has an inner motor 120 that rotates about a rotation axis P1, and an outer motor 130 that rotates about a rotation axis P2 that is parallel to the rotation axis P1 and located at a different position from the rotation axis P1.

Each of the inner motor 120 and the outer motor 130 has a cylindrical rotor, a magnet (permanent magnet) provided on the rotor, and a motor stator.
Specifically, the inner motor 120 has a cylindrical inner rotor (inner shaft rotor) 121, a magnet 122 arranged in an annular shape along the outer circumferential surface of the inner rotor 121, and a motor stator (inner shaft stator) 123. The motor stator 123 has a stator core 123a and a coil 123b wound around the stator core 123a.
The outer motor 130 has a cylindrical outer rotor (outer shaft rotor) 131, a magnet 132 arranged in an annular shape along the inner circumferential surface of the outer rotor 131, and a motor stator (outer shaft stator) 133. The motor stator 133 has a stator core 133a and a coil 133b wound around the stator core 133a.

The inner rotor 121 and the outer rotor 131 are provided to be rotatable on the inner peripheral side and the outer peripheral side of the stator fixing portion 111, respectively, with the stator fixing portion 111 sandwiched therebetween. Here, the stator fixing portion 111 is a cylindrical member having a diameter larger than the outer diameter of the inner rotor 121 and smaller than the inner diameter of the outer rotor 131. Specifically, the center of the inner circumference of the stator fixing portion 111 coincides with the central axis P1, and the center of the outer circumference of the stator fixing portion 111 coincides with the central axis P2.
The motor stator 123 of the inner motor 120 is fixed to the inner circumferential surface of the stator fixing part 111, and the motor stator 133 of the outer motor 130 is fixed to the outer circumferential surface of the stator fixing part 111. In other words, the inner rotor 121, the motor stator 123, the motor stator 133, and the outer rotor 131 are arranged in this order from the rotation axes P1 and P2 toward the radially outward direction.
With this configuration, the inner rotor 121 rotates in response to the supply of electric power to the coil 123b. Similarly, the outer rotor 131 rotates in response to the supply of electric power to the coil 133b.

Furthermore, the eccentric two-shaft integrated motor 110 has a detection unit and a bearing unit provided in this order from one end side of the stator fixing unit 111. In the following description, the upper side in Fig. 2 in the direction along the rotation axes P1 and P2 will be referred to as the "one end side" and the lower side in Fig. 2 will be referred to as the "other end side."
In addition, although not specifically shown, the side surfaces (inner and outer surfaces) and end surfaces of the stator fixing portion 111 may be provided with steps, protrusions, recesses, holes, etc., depending on the configuration of each part, such as the detection portion, bearing portion, motor stator, etc., fixed to the stator fixing portion 111.

The detection unit includes a first detection unit 112 and a second detection unit 113 .
The first detection unit 112 detects the rotation angle of the inner rotor 121. Specifically, the first detection unit 112 has a first rotating part that is fixed to the inner rotor 121 and rotates together with the inner rotor 121, and a first fixed part that is fixed to the stator fixed part 111 and detects the rotation angle of the first rotating part. The first detection unit 112 is, for example, a resolver.
The second detection unit 113 detects the rotation angle of the outer rotor 131. Specifically, the second detection unit 113 has a second rotating part that is fixed to the outer rotor 131 and rotates together with the outer rotor 131, and a second fixed part that is fixed to the stator fixed part 111 and detects the rotation angle of the second rotating part. The second detection unit 113 is, for example, a resolver.

In this embodiment, a case will be described in which the first detection unit 112 and the second detection unit 113 are resolvers; however, this is not limited to the above, and the first detection unit 112 and the second detection unit 113 may be, for example, optical encoders.
The positions of the first detector 112 and the second detector 113 are not limited to the positions shown in Fig. 2. The first detector 112 and the second detector 113 may be disposed closer to the other end of the stator fixing portion 111 than the positions shown in Fig. 2, for example, between the bearing portion and the motor stator or closer to the other end than the motor stator.

The bearing portion also has a first bearing 114 and a second bearing 115 .
The first bearing 114 rotates in conjunction with the inner rotor 121. The second bearing 115 rotates in conjunction with the outer rotor 131.
Specifically, the first bearing 114 is provided at a position that is on the inner circumferential side with respect to the stator fixing portion 111 and on the outer circumferential side with respect to the inner rotor 121. With the first bearing 114 thus interposed between the stator fixing portion 111 and the inner rotor 121, the inner rotor 121 is rotatably supported with respect to the stator fixing portion 111. The second bearing 115 is provided at the outer circumferential side with respect to the stator fixing portion 111 and on the inner circumferential side with respect to the outer rotor 131. With the second bearing 115 thus interposed between the stator fixing portion 111 and the outer rotor 131, the outer rotor 131 is rotatably supported with respect to the stator fixing portion 111.

In this manner, the eccentric two-shaft integrated motor 110 is configured to include two direct drive motors (DD motors). Here, the two DD motors (the inner motor 120 and the outer motor 130) are arranged on different axes parallel to each other, and the inner motor 120 is arranged inside the outer motor 130.
2, in this embodiment, the inner rotor 121 is fixed to a stationary base 200, and the outer rotor 131 is connected to the movable roll 3 (see FIG. 1) which is the object to be driven. Note that the outer rotor 131 may be integral with the movable roll 3 which is the object to be driven.

By fixing the inner rotor 121 to the stationary base 200, the rotational force of the inner rotor 121 becomes a force that rotates the stator fixing part 111. In other words, when the inner motor 120 is driven to rotate the stator fixing part 111 around the rotation axis P1 of the inner motor 120, the entire motor rotates around the rotation axis P1 like an eccentric cam, and the movable roll 3 connected to the outer rotor 131 moves within a plane perpendicular to the rotation axes P1 and P2 (gap adjustment function).
Moreover, if the outer motor 130 is driven to rotate the outer rotor 131, the movable roll 3 can be driven to rotate (rotation function). Therefore, if the movable roll 3 is moved by the above-mentioned gap adjustment function to adjust the gap between the fixed roll 2 and the movable roll 3, and the outer motor 130 is driven to rotate the outer rotor 131, the material can be sandwiched between the two rolls 2 and 3 and fed out, thereby forming the material.

The operation of the rotary actuator 100A of this embodiment will now be described in detail.
As shown in Fig. 3(a), the fixed roll 2 and the movable roll 3 are separated from each other, and then, as shown in Fig. 3(b), the inner motor 120 is driven to rotate the inner rotor 121 about the rotation axis P1. Note that the rotation direction shown in Fig. 3(b) may be the rotation direction when the eccentric two-shaft integrated motor 110 is viewed from the output side, or may be the rotation direction when viewed from the opposite output side.
3B, when the inner rotor 121 is rotated clockwise, the stator fixing portion 111 and the outer rotor 131 rotate eccentrically together about the rotation axis P1, and the movable roll 3 is displaced in the tangential direction. As a result, the movable roll 3 moves in a direction approaching the fixed roll 2, and a force is generated to press the movable roll 3 against the fixed roll 2. At this time, by controlling the amount of displacement of the movable roll 3, it is possible to control the pressing force against the fixed roll 2 and the gap between the movable roll 3 and the fixed roll 2.

In this state, the outer motor 130 is driven to rotate the outer rotor 131. For example, as shown in Fig. 3(b), when the fixed roll 2 rotates in the clockwise direction, the outer rotor 131 is rotated in the counterclockwise direction about the rotation axis P2, and the movable roll 3 is rotated in the counterclockwise direction. This allows the material 5 to be fed.
In this manner, the movable roll 3 is pressed against the fixed roll 2 by the rotation of the inner rotor 121, and the material 5 is fed by the rotation of the outer rotor 131.
When the inner rotor 121 is rotated counterclockwise in the state shown in Fig. 3(b), the outer rotor 131 rotates eccentrically about the rotation axis P1, and the movable roll 3 moves in a direction away from the fixed roll 2. This makes it possible to return to the state shown in Fig. 3(a).

As described above, the rotary actuator 100A in this embodiment includes the eccentric two-shaft integrated motor 110. Here, the eccentric two-shaft integrated motor 110 has an inner rotor (inner shaft rotor) 121 and an outer rotor (outer shaft rotor) 131 whose rotation axes are parallel to each other but at different positions, and has a configuration in which the inner rotor 121, motor stator (inner shaft stator) 123, motor stator (outer shaft stator) 133, and outer rotor 131 are arranged in this order radially outward from the rotation axes P1, P2.
In addition, the eccentric two-shaft integrated motor 110 further includes a first rotational output section connected to or integrated with the inner rotor 121, a second rotational output section connected to or integrated with the outer rotor 131, and a stator fixing section 111 provided between the motor stator 123 and the motor stator 133 to which the motor stator 123 and the motor stator 133 are fixed.

Then, one of the two rotational output parts, specifically the inner rotor 121, is fixed non-rotatably to the stationary base 200, and the other rotational output part, specifically the outer rotor 131, is connected or integrated with the object to be driven.
In this way, by fixing the inner rotor 121 to the stationary base 200, the rotational force of the inner rotor 121 when the inner motor 120 is driven becomes a force that rotates the stator fixing part 111, and the entire actuator can be moved like an eccentric cam. Also, by driving the outer motor 130, the driven object can be driven to rotate.
That is, the rotary actuator 100A in this embodiment can realize a gap adjustment function with the rotation axis P1 as the rotation axis of the eccentric cam, and a rotation function with the rotation axis P2 as the center. Specifically, if the driven object is the movable roll 3 provided in the thin film forming apparatus 1, a function of pressing the movable roll 3 against the fixed roll 2 and a function of feeding out the material from the movable roll 3 can be realized.

Furthermore, the rotary actuator 100A realizes a function of pressing the movable roll 3 against the fixed roll 2 by utilizing a displacement generated in the tangential direction by the eccentric rotation. Therefore, the rotary actuator 100A can be arranged coaxially with the rotation axis of the movable roll 3. Therefore, compared with a conventional configuration in which the actuator is arranged perpendicular to the roll rotation axis, the space occupied by the actuator on the apparatus can be made smaller. Furthermore, since the rotary actuator 100A has a configuration including an eccentric two-shaft integrated motor 110 in which the inner motor 120 is arranged inside the outer motor 130, it is possible to realize space saving of the actuator.
Furthermore, the rotary actuator 100A does not have a hydraulic drive mechanism, which improves the cleanliness of the device. Furthermore, a linear slider for moving the roll is not necessary, and one actuator can press the roll and feed the material, which reduces the number of parts in the entire device.

The inner rotor 121 may have a hollow hole passing through along the rotation axis P1, which facilitates wiring and piping (air tubes, etc.).
The inner rotor 121 does not have to have a hollow structure. In other words, the inner motor 120 may be a solid motor.

Second Embodiment
Next, a second embodiment of the present invention will be described.
In the second embodiment, a case will be described in which a speed reduction mechanism is provided in the inner rotor 121 of the rotary actuator 100A in the above-described first embodiment.
Fig. 4 is a cross-sectional view showing the main configuration of a rotary actuator 100B according to a second embodiment. In Fig. 4, parts having the same configuration as the rotary actuator 100A shown in Fig. 2 are given the same reference numerals as in Fig. 2, and detailed explanations thereof will be omitted here.

4, the rotary actuator 100B includes an eccentric two-shaft integrated motor 110 and a speed reducing mechanism 140A. The eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100A in the first embodiment described above.
The reduction mechanism 140A reduces the speed of the driving force from the inner rotor 121 and transmits it to the stator fixing portion 111 .

In this embodiment, the reduction mechanism 140A is a planetary gear mechanism arranged coaxially with the inner motor 120 of the eccentric two-shaft integrated motor 110.
As shown in FIG. 4, the reduction mechanism 140A includes an external gear (sun gear) 141a, a plurality of planetary gears 142a, a carrier 143a, a carrier shaft (planetary gear support shaft) 144a, and an internal gear (ring gear) 145a.
The external gear 141a is disposed coaxially with the inner rotor 121 inside the internal gear 145a, and the multiple planetary gears 142a mesh with the external gear 141a and the internal gear 145a. The multiple planetary gears 142a are rotatably supported by a carrier shaft 144a, one end of which is fixed to a carrier 143a. The number of planetary gears 142a is not particularly limited.

4, the other end of the external gear 141a (lower side in FIG. 4) is connected to one end of the inner rotor 121 (upper side in FIG. 4). Also, one end of the carrier shaft 144a is connected to the base 200. Furthermore, the other end of the internal gear 145a is connected to one end of the carrier fixing portion 111.
The external gear 141a has a hollow hole passing through it with the rotation axis P1 as its central axis, and this hollow hole communicates with the hollow hole of the inner rotor 121 when the external gear 141a is connected to the cylindrical inner rotor 121.
In the present embodiment, the reduction mechanism 140A is a so-called star-type planetary gear mechanism in which the carrier 143a is connected and fixed to the base 200 via the carrier shaft 144a, and therefore the multiple planetary gears 142a do not revolve but only rotate on their axes between the external gear 141a and the internal gear 145a.

When the movable roll 3 is pressed against the fixed roll 2 or when the movable roll 3 is separated from the fixed roll 2, the inner motor 120 is driven in the same manner as in the first embodiment described above. Then, in this embodiment, the inner rotor 121 rotates, and the external gear 141a of the reduction mechanism 140A rotates together with the inner rotor 121. At this time, the planetary gear 142a meshing with the external gear 141a rotates on its axis, rotating the internal gear 145a meshing with the planetary gear 142a. The internal gear 145a then rotates the stator fixing part 111. In other words, the torque generated by the stator fixing part 111 becomes the torque generated from the inner rotor 121 via the reduction mechanism 140A, and the pressing torque of the movable roll 3 against the fixed roll 2 can be increased.

As described above, the rotary actuator 100B in this embodiment includes the eccentric two-shaft integrated motor 110 and the speed reduction mechanism 140 A. Specifically, of the two rotation output parts included in the eccentric two-shaft integrated motor 110, the first rotation output part connected to the inner rotor 121 includes the speed reduction mechanism 140A that reduces the speed of the driving force from the inner rotor 121 and transmits it to the stator fixed part 111.
As a result, similarly to the first embodiment described above, one actuator can achieve both the function of pressing the movable roll 3 against the fixed roll 2 and the function of feeding the material from the movable roll 3. Furthermore, by providing the speed reducing mechanism 140A, it is possible to increase the torque when driving the rotor to rotate the stator fixing part 111. In other words, it is possible to increase the pressing torque of the movable roll 3 against the fixed roll 2. Furthermore, it is possible to finely adjust the gap between the two rolls.

Here, a planetary gear mechanism can be adopted as the speed reducing mechanism 140A. Specifically, the external gear 141a can be connected to the inner rotor 121, the carrier 143a can be fixed to the stationary base 200, and the internal gear 145a can be connected to the stator fixing portion 111.
As a result, when the inner motor 120 is driven, the inner rotor 121 (external gear 141 a) drives the planetary gear 142 a, and a high torque can be generated in the stator fixed portion 111 (internal gear 145 a). In this way, the pressing force of the movable roll 3 can be increased with a relatively simple configuration.

In this embodiment, the planetary gear mechanism employed as the reduction mechanism may be a so-called planetary type planetary gear mechanism in which the internal gear is fixed, the external gear is the drive shaft, and the carrier is the output shaft.
In this embodiment, a reduction mechanism having two or more stages can be used, which makes it possible to obtain a larger reduction ratio and thus a larger torque.
Furthermore, in this embodiment, a planetary gear mechanism is used as the reduction mechanism, but as long as the driving force from the inner rotor 121 can be reduced and transmitted to the carrier fixing part 111, other reduction mechanisms, such as a traction drive reducer, can also be used.

Third Embodiment
Next, a third embodiment of the present invention will be described.
In the third embodiment, a case will be described in which a brake mechanism is provided on the inner rotor 121 of the rotary actuator 100A in the above-described first embodiment.
Fig. 5 is a cross-sectional view showing the main configuration of a rotary actuator 100C according to a third embodiment. In Fig. 5, parts having the same configuration as the rotary actuator 100A shown in Fig. 2 are denoted by the same reference numerals as in Fig. 2, and detailed explanations thereof will be omitted here.

5, the rotary actuator 100C includes an eccentric two-shaft integrated motor 110 and a brake mechanism 150A. The eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100A in the first embodiment described above.
The brake mechanism 150A has a function of stopping the rotation of the stator fixing part 111.

The brake mechanism 150A may be, for example, a permanent magnet type electromagnetic brake.
As shown in FIG. 5, the brake mechanism 150A includes a flange 151a, a spring 152a, an armature 153a, and a magnet yoke 154a.
The flange 151a is provided so as to protrude radially outward from the other end (lower side in FIG. 5) of the inner rotor 121. An armature 153a is attached to the flange 151a via a spring 152a. The spring 152a biases the armature 153a toward the flange 151a. The magnet yoke 154a is attached to the stator fixing part 111 so as to face the armature 153a.

As described in detail in the first embodiment, by driving the inner motor 120 to rotate the stator fixed part 111 about the rotation axis P1 of the inner motor 120, the entire motor moves like an eccentric cam about the rotation axis P1, and the movable roll 3 connected to or integrated with the outer rotor 131 can be moved. This makes it possible to adjust the gap between the fixed roll 2 and the movable roll 3 to a desired gap.
After this gap adjustment, when the brake mechanism 150A is operated, the armature 153a and the magnet yoke 154a are attracted to each other, and the inner rotor 121 and the stator fixing part 111 are fixed. This makes it possible to fix the position of the stator fixing part 111, i.e., the position of the movable roll 3, and to maintain the gap between the two rolls at a desired value.

As described above, the rotary actuator 100C in this embodiment includes the eccentric two-shaft integrated motor 110 and the brake mechanism 150A.
As a result, similarly to the first embodiment described above, one actuator can realize the function of pressing the movable roll 3 against the fixed roll 2 and the function of feeding out the material from the movable roll 3. Furthermore, by providing the brake mechanism 150A, it becomes possible to fix the position of the movable roll 3 after adjusting the gap between the fixed roll 2 and the movable roll 3.

Therefore, for example, when the movable roll 3 is being pressed against the fixed roll 2 by the movement of the eccentric cam of the rotary actuator 100C, even if the power supply is temporarily cut off for some reason, it is possible to prevent the position of the movable roll 3 from fluctuating. In other words, it can function as an emergency brake.
In addition, since the position of the movable roll 3 can be fixed, there is no need to perform control to keep the gap between the fixed roll 2 and the movable roll 3 constant during material molding by the thin film molding device 1. In other words, it is possible to reduce unnecessary power consumption.

In this embodiment, the flange 151a is attached to the inner rotor 121 and the magnet yoke 154a is attached to the stator fixing portion 111, but the flange 151a may be attached to the stator fixing portion 111 and the magnet yoke 154a may be attached to the inner rotor 121.
Furthermore, in this embodiment, the brake mechanism 150A is configured to fix the inner rotor 121 and the stator fixing portion 111. However, the brake mechanism 150A may be configured to fix the stator fixing portion 111 to a fixing member (e.g., the base 200, etc.) other than the inner rotor 121 as long as it can stop the rotation of the stator fixing portion 111.
In addition, in the present embodiment, the brake mechanism is a permanent magnet type electromagnetic brake, but the brake mechanism is not limited to this.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described.
In the fourth embodiment, a case will be described in which a brake mechanism is provided on the inner rotor 121 of the rotary actuator 100B in the second embodiment described above.
Fig. 6 is a cross-sectional view showing the main configuration of a rotary actuator 100D according to a fourth embodiment. In Fig. 6, parts having the same configuration as the rotary actuator 100B shown in Fig. 4 are given the same reference numerals as in Fig. 4, and detailed explanations thereof will be omitted here.

As shown in FIG. 6, the rotary actuator 100D includes an eccentric two-shaft integrated motor 110, a speed reduction mechanism 140A, and a brake mechanism 150A.
The eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100B in the second embodiment described above. The speed reduction mechanism 140A has the same configuration as the speed reduction mechanism 140A included in the rotary actuator 100B in the second embodiment described above. The brake mechanism 150A has the same configuration as the brake mechanism 150A included in the rotary actuator 100C in the third embodiment described above.

As a result, as in the second embodiment described above, one actuator can achieve both the function of pressing the movable roll 3 against the fixed roll 2 and the function of feeding the material from the movable roll 3. In addition, by providing the speed reducing mechanism 140A, the torque when the rotor is driven to rotate the stator fixing part 111 can be increased. In other words, the pressing torque of the movable roll 3 against the fixed roll 2 can be increased. Furthermore, by providing the brake mechanism 150A, as in the third embodiment described above, it is possible to fix the position of the movable roll 3 after adjusting the gap between the fixed roll 2 and the movable roll 3.

Fifth embodiment
Next, a fifth embodiment of the present invention will be described.
In the above-described first to fourth embodiments, the case where the inner rotor 121 is fixed to the base 200 and the rotation axis P1 of the inner motor 120 is used as the rotation axis of the eccentric cam has been described. In this fifth embodiment, the case where the outer rotor 131 is fixed to the base 200 and the rotation axis P2 of the outer motor 130 is used as the rotation axis of the eccentric cam will be described.
Fig. 7 is a cross-sectional view showing the main configuration of a rotary actuator 100E according to a fifth embodiment. In Fig. 7, parts having the same configuration as the rotary actuator 100A shown in Fig. 2 are given the same reference numerals as in Fig. 2, and detailed explanations thereof will be omitted here.

7, the rotary actuator 100E includes an eccentric two-shaft integrated motor 110. Here, the eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100A in the first embodiment described above.
In this embodiment, the outer rotor 131 of the eccentric two-shaft integrated motor 110 is fixed to a stationary base 200, and the inner rotor 121 is connected to the movable roll 3 (see FIG. 1) which is the object to be driven.

By fixing the outer rotor 131 to the stationary base 200, the rotational force of the outer rotor 131 serves as a force for rotating the stator fixing part 111. In other words, when the outer motor 130 is driven to rotate the stator fixing part 111 around the rotation axis P2 of the outer motor 130, the inner rotor 121 is rotated around the rotation axis P2 like an eccentric cam, and the movable roll 3 connected to the inner rotor 121 moves (gap adjustment function).
Moreover, if the inner motor 120 is driven to rotate the inner rotor 121, the movable roll 3 can be driven to rotate (rotation function). Therefore, if the movable roll 3 is moved by the above-mentioned gap adjustment function to adjust the gap between the fixed roll 2 and the movable roll 3, and the inner motor 120 is driven to rotate the inner rotor 121, the material can be sandwiched between the two rolls 2 and 3 and fed out, thereby forming the material.

As described above, in the rotary actuator 100E of this embodiment, one of the two rotational output parts of the eccentric two-shaft integrated motor 110, specifically the outer rotor 131, is fixed so as not to rotate relative to the stationary base 200, and the other rotational output part, specifically the inner rotor 121, is connected to or integrated with the object to be driven.
In this way, by fixing the outer rotor 131 to the stationary base 200, the rotational force of the outer rotor 131 when the outer motor 130 is driven becomes a force that rotates the stator fixing part 111, and the inner rotor 121 can be moved like an eccentric cam. Also, by driving the inner motor 120, it is possible to rotate an object to be driven.
That is, the rotary actuator 100E in this embodiment can realize a gap adjustment function with the rotation axis P2 as the rotation axis of the eccentric cam, and a rotation function centered on the rotation axis P1. That is, similar to the first to fourth embodiments described above, the rotary actuator 100E can realize a function of pressing the movable roll 3 against the fixed roll 2 and a function of the movable roll 3 to feed out the material.

(Sixth embodiment)
Next, a sixth embodiment of the present invention will be described.
In the sixth embodiment, a case will be described in which a speed reduction mechanism is provided in the outer rotor 131 of the rotary actuator 100E in the above-described fifth embodiment.
Fig. 8 is a cross-sectional view showing the main configuration of a rotary actuator 100F according to a sixth embodiment. In Fig. 8, parts having the same configuration as the rotary actuator 100E shown in Fig. 7 are given the same reference numerals as in Fig. 7, and detailed explanations thereof will be omitted here.

8, the rotary actuator 100F includes an eccentric two-shaft integrated motor 110 and a speed reduction mechanism 140B. The eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100E in the fifth embodiment described above.
The reduction mechanism 140B reduces the speed of the driving force from the outer rotor 131 and transmits it to the stator fixing portion 111 .

In this embodiment, the speed reducing mechanism 140B is a planetary gear mechanism that is arranged coaxially with the outer motor 130 of the eccentric two-shaft integrated motor 110.
As shown in FIG. 8, the reduction mechanism 140B includes an external gear (sun gear) 141b, a plurality of planetary gears 142b, a carrier 143b, a carrier shaft (planetary gear support shaft) 144b, and an internal gear (ring gear) 145b.
The external gear 141b is disposed coaxially with the outer rotor 131 inside the internal gear 145b, and the multiple planetary gears 142b mesh with the external gear 141b and the internal gear 145b. The multiple planetary gears 142b are rotatably supported by a carrier shaft 144b, one end of which is fixed to a carrier 143b. The number of planetary gears 142b is not particularly limited.

8, one end of the external gear 141b (upper side in FIG. 8) is connected to the base 200. The other end of the carrier shaft 144b (lower side in FIG. 8) is connected to one end of the carrier fixing part 111 via the carrier 143b. Furthermore, the other end of the internal gear 145b is connected to one end of the outer rotor 131.
The external gear 141b has a hollow hole passing through it with the rotation axis P2 as its central axis, and this hollow hole communicates with the hollow hole of the inner rotor 121 when the external gear 141b is connected to the base 200.
In the present embodiment, the reduction mechanism 140B is a so-called solar type planetary gear mechanism in which the external gear 141b is connected and fixed to the base 200, and multiple planetary gears 142b revolve while rotating between the external gear 141b and the internal gear 145b.

When the movable roll 3 is pressed against the fixed roll 2 or when the movable roll 3 is separated from the fixed roll 2, the outer motor 130 is driven in the same manner as in the fifth embodiment described above. Then, in this embodiment, the outer rotor 131 rotates, and the internal gear 145b of the reduction mechanism 140B rotates together with the outer rotor 131. At this time, the planetary gear 142b meshing with the internal gear 145b revolves while rotating, and the revolution of the planetary gear 142b rotates the stator fixing part 111. In other words, the torque generated by the stator fixing part 111 becomes the torque generated from the outer rotor 131 via the reduction mechanism 140B, and the pressing torque of the movable roll 3 against the fixed roll 2 can be increased.

As described above, the rotary actuator 100F in this embodiment includes the eccentric two-shaft integrated motor 110 and the speed reduction mechanism 140B. Specifically, of the two rotation output parts included in the eccentric two-shaft integrated motor 110, the second rotation output part connected to the outer rotor 131 includes the speed reduction mechanism 140B that reduces the speed of the driving force from the outer rotor 131 and transmits it to the stator fixed part 111.
As a result, similar to the fifth embodiment described above, one actuator can realize the function of pressing the movable roll 3 against the fixed roll 2 and the function of feeding the material from the movable roll 3. Also, by providing the speed reducing mechanism 140B, similar to the second embodiment described above, it is possible to increase the torque when the rotor is driven to rotate the stator fixed part. In other words, it is possible to increase the pressing torque of the movable roll 3 against the fixed roll 2. Also, it is possible to finely adjust the gap between the two rolls.

Seventh embodiment
Next, a seventh embodiment of the present invention will be described.
In the seventh embodiment, a case will be described in which a brake mechanism is provided on the outer rotor 131 of the rotary actuator 100E in the above-described fifth embodiment.
Fig. 9 is a cross-sectional view showing the main configuration of a rotary actuator 100G according to a seventh embodiment. In Fig. 9, parts having the same configuration as the rotary actuator 100E shown in Fig. 7 are given the same reference numerals as in Fig. 7, and detailed explanations thereof will be omitted here.

9, the rotary actuator 100G includes an eccentric two-shaft integrated motor 110 and a brake mechanism 150B. The eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100E in the fifth embodiment described above.
The brake mechanism 150B has a function of stopping the rotation of the stator fixing part 111.

The brake mechanism 150B may be, for example, a permanent magnet type electromagnetic brake.
As shown in FIG. 9, the brake mechanism 150B includes a flange 151b, a spring 152b, an armature 153b, and a magnet yoke 154b.
The flange 151b is provided so as to protrude radially outward from the other end (lower side in FIG. 9 ) of the stator fixing portion 111. An armature 153b is attached to the flange 151b via a spring 152b. The spring 152b biases the armature 153b toward the flange 151b. The magnet yoke 154b is attached to the outer rotor 131 so as to face the armature 153b.

As described in detail in the fifth embodiment, by driving the outer motor 130 to rotate the stator fixed part 111 about the rotation axis P2 of the outer motor 130, the entire motor moves like an eccentric cam about the rotation axis P2, and the movable roll 3 connected to or integrated with the inner rotor 121 can be moved. This makes it possible to adjust the gap between the fixed roll 2 and the movable roll 3 to a desired gap.
After this gap adjustment, when the brake mechanism 150B is operated, the armature 153b and the magnet yoke 154b are attracted to each other, and the outer rotor 131 and the stator fixing part 111 are fixed. This makes it possible to fix the position of the stator fixing part 111, i.e., the position of the movable roll 3, and to maintain the gap between the two rolls at a desired value.

As described above, the rotary actuator 100G in this embodiment includes the eccentric two-shaft integrated motor 110 and the brake mechanism 150B.
As a result, similar to the fifth embodiment described above, a single actuator can be used to realize the function of pressing the movable roll 3 against the fixed roll 2 and the function of feeding out the material from the movable roll 3. Furthermore, by providing the brake mechanism 150B, it becomes possible to fix the position of the movable roll 3 after adjusting the gap between the fixed roll 2 and the movable roll 3, similar to the third embodiment described above.

In this embodiment, the flange 151b is attached to the stator fixing portion 111 and the magnet yoke 154b is attached to the outer rotor 131. However, the flange 151b may be attached to the outer rotor 131 and the magnet yoke 154b may be attached to the stator fixing portion 111.
Furthermore, in this embodiment, the brake mechanism 150B is configured to fix the outer rotor 131 and the stator fixing portion 111. However, the brake mechanism may be configured to stop the rotation of the stator fixing portion 111, and may be configured to fix the stator fixing portion 111 to a fixing member (e.g., the base 200, etc.) separate from the outer rotor 131.
In addition, in the present embodiment, the brake mechanism is a permanent magnet type electromagnetic brake, but the brake mechanism is not limited to this.

Eighth embodiment
Next, an eighth embodiment of the present invention will be described.
In the eighth embodiment, a case will be described in which a brake mechanism is provided on the outer rotor 131 of the rotary actuator 100F in the sixth embodiment described above.
Fig. 10 is a cross-sectional view showing the main configuration of a rotary actuator 100H according to an eighth embodiment. In Fig. 10, parts having the same configuration as the rotary actuator 100F shown in Fig. 8 are given the same reference numerals as in Fig. 8, and detailed explanations thereof will be omitted here.

As shown in FIG. 10, the rotary actuator 100H includes an eccentric two-shaft integrated motor 110, a speed reduction mechanism 140B, and a brake mechanism 150B.
The eccentric two-shaft integrated motor 110 has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100F in the sixth embodiment described above. The speed reduction mechanism 140B has the same configuration as the speed reduction mechanism 140B included in the rotary actuator 100F in the sixth embodiment described above. The brake mechanism 150B has the same configuration as the brake mechanism 150B included in the rotary actuator 100G in the seventh embodiment described above.

As a result, similar to the sixth embodiment described above, a single actuator can be used to realize both the function of pressing the movable roll 3 against the fixed roll 2 and the function of feeding the material from the movable roll 3. Furthermore, by providing the speed reducing mechanism 140B, the pressing torque of the movable roll 3 against the fixed roll 2 can be increased. Furthermore, by providing the brake mechanism 150B, similar to the seventh embodiment described above, it is possible to fix the position of the movable roll 3 after adjusting the gap between the fixed roll 2 and the movable roll 3.

Ninth embodiment
Next, a ninth embodiment of the present invention will be described.
In the ninth embodiment, a case will be described in which a bearing is also provided on the other end side of the inner rotor 121 of the rotary actuator 100A in the above-described first embodiment.
Fig. 11 is a cross-sectional view showing the main configuration of a rotary actuator 100I according to a ninth embodiment. In Fig. 11, parts having the same configuration as the rotary actuator 100A shown in Fig. 2 are given the same reference numerals as in Fig. 2, and detailed explanations thereof will be omitted here.

As shown in Fig. 11, the rotary actuator 100I includes an eccentric two-shaft integrated motor 110A. The eccentric two-shaft integrated motor 110A has the same configuration as the eccentric two-shaft integrated motor 110 included in the rotary actuator 100A in the first embodiment described above, except that a third bearing 116 is added to the other end side (the lower side in Fig. 11) of the inner rotor 121.
The third bearing 116 is provided at a position on the inner peripheral side with respect to the stator fixing portion 111 and on the outer peripheral side with respect to the inner rotor 121 .

In this way, by arranging the third bearing 116 on the other end side of the inner rotor 121, the rigidity of the actuator can be improved.
In this embodiment, the case has been described in which the third bearing 116 is disposed on the other end side of the inner rotor 121 of the rotary actuator 100A in the first embodiment described above, but the third bearing 116 can also be disposed on the other end side of the inner rotor 121 in the rotary actuators 100B to 100D in the second to fourth embodiments described above.

Furthermore, in each of the rotary actuators 100E to 100H in the fifth to eighth embodiments described above, the third bearing 116 can be disposed at a position that is on the outer periphery side of the stator fixed portion 111 and on the inner periphery side of the outer rotor 131.
FIG. 12 shows a configuration example in which a third bearing 116 is disposed on the other end side of an outer rotor 131 of a rotary actuator 100E according to the fifth embodiment.
In this way, by supporting both axial ends of the rotor of the rotation output part (the inner rotor 121 in the first to fourth embodiments, and the outer rotor 131 in the fifth to eighth embodiments) fixed to the base 200 with bearings, the rigidity when driving the rotor to rotate the stator fixing part 111 can be improved.

(Modification)
In each of the above embodiments, the rotor rotation output surface on the side closer to the detection unit (first detection unit 112, second detection unit 113) is described as being the fixed surface to the base 200, but the rotor rotation output surface on the opposite side (the side farther from the detection unit) may also be the fixed surface to the base 200.
In addition, the rotary actuator in each of the above embodiments may be provided in a plurality of units for the object to be driven. For example, in the case of the movable roll 3 of the thin film forming apparatus 1, the rotary actuator in each of the above embodiments may be disposed at both ends in the axial direction of the movable roll 3. However, in this case, the actuators disposed at both ends must be synchronized.

Furthermore, in each of the above embodiments, the rotary actuator is described as being applied to driving the movable roll of a thin film forming device, but the present invention is not limited to the above. For example, the rotary actuator can be applied to driving a tension roll of a thin film forming device. In addition to rolls provided in a thin film forming device, the rotary actuator can also be applied to driving rolls provided in a thin film conveying device such as a film winder. In short, the object to be driven may be any member that requires rotational drive and position adjustment.
In addition, in each of the above embodiments, the two DD motors (the inner motor 120 and the outer motor 130) are arranged parallel to each other and on different axes, and the inner motor 120 is arranged inside the outer motor 130. However, the two DD motors can also be connected in series.

1...Thin film forming device, 2...Fixed roll, 3...Movable roll, 100A-100I...Rotary actuator, 110...Eccentric two-shaft integrated motor, 111...Stator fixing part, 120...Inner motor, 121...Inner rotor (inner shaft rotor), 122...Magnet, 123...Motor stator (inner shaft stator), 123a...Stator core, 123b...Coil, 130...Outer motor, 131...Outer rotor (outer shaft rotor), 132...Magnet, 133...Motor stator (outer shaft stator), 133a...Stator core, 133b...Coil, 140A, 140B...Reduction mechanism, 150A, 150B...Brake mechanism, 200...Base

Claims (8)

an eccentric two-shaft integrated motor having an inner rotor and an outer rotor whose rotation axes are parallel to each other but at different positions, the inner rotor, the inner stator, the outer stator, and the outer rotor being disposed in this order radially outward from the rotation axis;
The eccentric two-shaft integrated motor is
a first rotation output part connected to or integrated with the inner shaft rotor;
a second rotation output part connected to or integrated with the outer shaft rotor;
a stator fixing portion provided between the inner stator and the outer stator to which the inner stator and the outer stator are fixed,
A rotary actuator, characterized in that one of the first rotation output part and the second rotation output part is fixed so as not to rotate relative to a stationary base, and the other rotation output part is connected to or integrated with an object to be driven. The rotary actuator according to claim 1, characterized in that the inner shaft rotor is fixed to the base so as not to rotate. The rotary actuator according to claim 1, characterized in that the outer shaft rotor is fixed to the base so as not to rotate. The one rotation output portion is
2. The rotary actuator according to claim 1, further comprising a speed reducing mechanism that reduces the speed of a driving force from the rotor of said one of said rotation output portions and transmits the reduced speed to said stator fixed portion. The rotary actuator according to claim 4, characterized in that the reduction mechanism is a planetary gear mechanism arranged coaxially with the rotor of one of the rotation output sections. The rotary actuator according to any one of claims 1 to 5, further comprising a brake mechanism that stops the rotation of the stator fixing part. The rotary actuator according to claim 6, characterized in that the brake mechanism is a permanent magnet type electromagnetic brake capable of fixing the rotor of one of the rotation output parts and the stator fixed part. The rotary actuator according to any one of claims 1 to 7, further comprising bearings that support both axial ends of the rotor of one of the rotation output sections.

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