JP7517867B2

JP7517867B2 - Mechanical system with correction function for changing operating speed

Info

Publication number: JP7517867B2
Application number: JP2020090045A
Authority: JP
Inventors: 伸一鷲頭; 元鈴木
Original assignee: Fanuc Corp
Current assignee: Fanuc Corp
Priority date: 2020-05-22
Filing date: 2020-05-22
Publication date: 2024-07-17
Anticipated expiration: 2040-05-22
Also published as: JP2021183373A

Description

本発明は、機械システムに関し、特に動作速度変更時の補正量修正機能を備えた機械システムに関する。 The present invention relates to a mechanical system, and in particular to a mechanical system equipped with a correction amount correction function when the operating speed is changed.

ロボット、工作機械等の機械の動作を高速化し、タクトタイムを短縮することは作業効率に直結する。しかし、機械の動作を一定以上高速化した場合には、減速機や機械機構部の剛性不足等に起因して機械先端部に振動が発生してしまう。斯かる問題の対処法としては次の文献が公知である。 Increasing the speed of robots, machine tools, and other machines and shortening takt time directly leads to improved work efficiency. However, when the speed of a machine is increased beyond a certain level, vibrations occur at the tip of the machine due to factors such as a lack of rigidity in the reducer or mechanical mechanism. The following literature is known as a method for dealing with this problem:

特許文献１には、機械先端部にセンサを取付けて動作中の振動を計測することで機械の動作速度を高速化しながら機械先端部の振動を学習制御する方法が記載されている。 Patent document 1 describes a method for learning and controlling the vibration of the machine tip while increasing the operating speed of the machine by attaching a sensor to the tip of the machine to measure vibration during operation.

特許文献２には、スポット溶接ロボットの高速動作によって発生する軌跡誤差や振動成分によってロボットの最適動作が阻害されるという問題を解決するため、制御対象部位に設置されたセンサの検出結果から制御対象部位の軌跡又は位置を算出し、該軌跡と目標軌跡との間の軌跡誤差、又は該位置と目標位置との間の位置誤差を補正するための、若しくはロボット機構部を動作させたときに生じる制御対象部位の振動を抑制するための学習補正量を学習制御により算出する学習制御部を備え、学習制御部は、学習補正量を算出する過程でロボット機構部に設定可能な最大動作速度を算出し、最大動作速度に至るまで１回又は複数回に渡って動作速度を増加させながら学習補正量を算出することが記載されている。 Patent Document 2 describes a problem in which optimal robot operation is hindered by trajectory errors and vibration components generated by high-speed operation of a spot welding robot, and describes a learning control unit that calculates the trajectory or position of the controlled part from the detection results of a sensor installed in the controlled part, and calculates a learning correction amount by learning control to correct the trajectory error between the trajectory and a target trajectory, or the position error between the position and the target position, or to suppress vibration of the controlled part that occurs when the robot mechanism is operated, and describes that in the process of calculating the learning correction amount, the learning control unit calculates the maximum operating speed that can be set for the robot mechanism, and calculates the learning correction amount while increasing the operating speed one or more times until it reaches the maximum operating speed.

特許文献３には、生産ラインにおける運用を考慮して学習制御を行うロボットにおいて、学習制御部は、ロボット機構部の動作速度を増加又は減少するために設定される動作速度変更率の最大値を超えない範囲内で、且つ、制御対象部位で発生する振動の許容条件の範囲内で、複数回に渡って動作速度変更率を増加又は減少させる動作速度変更率調整部を備えることが記載されている。 Patent document 3 describes a robot that performs learning control in consideration of operations on a production line, and describes that the learning control unit is equipped with an operating speed change rate adjustment unit that increases or decreases the operating speed change rate multiple times within a range that does not exceed the maximum operating speed change rate that is set to increase or decrease the operating speed of the robot mechanism and within the range of allowable conditions for vibrations generated in the controlled part.

特許文献４には、速度一定が要求されるアプリケーションで学習制御を行うロボットにおいて、学習制御部は、速度一定を教示した作業プログラムに従って行われる加工作業中にロボット機構部の制約によって生じた最大速度及び最小速度を記憶しておき、最大速度と最小速度の比に相当する速度変動の許容条件を算出し、算出した速度変動の許容条件と記憶した最大速度及び最小速度とに基づいてロボット機構部の動作速度を増加又は減少させるために使用される動作速度変更率を設定する動作速度変更率調整部を備えることが記載されている。 Patent document 4 describes a robot that performs learning control in an application that requires a constant speed, and describes that the learning control unit stores the maximum and minimum speeds that arise due to constraints on the robot mechanical part during processing work performed according to a work program that teaches a constant speed, calculates the allowable conditions for speed fluctuations that correspond to the ratio of the maximum and minimum speeds, and includes an operating speed change rate adjustment unit that sets an operating speed change rate used to increase or decrease the operating speed of the robot mechanical part based on the calculated allowable conditions for speed fluctuations and the stored maximum and minimum speeds.

特開２０１１－１６７８１７号公報JP 2011-167817 A 特開２０１２－２４０１４２号公報JP 2012-240142 A 特開２０１８－１４９６０６号公報JP 2018-149606 A 特開２０１９－０１３９８４号公報JP 2019-013984 A

振動を打ち消すための補正量を算出して動作指令を補正するが、動作速度の変更直後に適用する補正量は動作速度の変更前に算出された補正量であるため、動作速度を変更したことによる振動の変化分が考慮されていない。例えば動作速度を増加させた直後にはそれに伴う振動の増加分を補正しきれずに振動が増加し、一方で、動作速度を減少させた直後には過度に補正することで振動が増加してしまう可能性がある。ひいては、動作速度の変更直後の振動の増加によって、機械がワーク等の周囲物体に干渉したり、補正量が収束するまでに時間が掛かったりすることがある。 The motion commands are corrected by calculating a compensation amount to cancel out the vibration, but the compensation amount applied immediately after changing the motion speed is the compensation amount calculated before changing the motion speed, and does not take into account the change in vibration caused by changing the motion speed. For example, immediately after increasing the motion speed, the associated increase in vibration cannot be fully compensated for, resulting in an increase in vibration, while immediately after decreasing the motion speed, excessive compensation may result in an increase in vibration. Ultimately, the increase in vibration immediately after changing the motion speed may cause the machine to interfere with surrounding objects such as workpieces, or it may take a long time for the compensation amount to converge.

そこで、動作速度の変更直後の振動の増加を抑制する技術が求められている。 Therefore, there is a need for technology that can suppress the increase in vibration immediately after changing the operating speed.

本開示の一態様は、制御対象部位の位置を検出するためのセンサを備えた機械機構部と、機械機構部の動作を制御する制御装置と、を備えた機械システムであって、制御対象部位の目標軌跡又は目標位置に関する動作指令によって機械機構部を動作させて、センサに基づき検出された制御対象部位の位置を目標位置に近づけるための補正量を導出する補正制御部と、動作指令が与えられ、与えられた動作指令及び導出された補正量を用いて機械機構部の動作を制御する機械制御部と、を備え、補正制御部は、機械機構部の動作速度を変更しながら補正量を算出し、過去の動作速度の変更前後の補正量の差分に対して前記補正量の修正分を求め、前記修正分を前記補正量に加算することで、動作速度の変更直後に適用する補正量を修正する補正量修正部を有する、機械システムを提供する。 One aspect of the present disclosure provides a mechanical system including a mechanical mechanism unit having a sensor for detecting the position of a part to be controlled, and a control device for controlling the operation of the mechanical mechanism unit, the mechanical mechanism unit being configured to operate the mechanical mechanism unit according to an operation command related to a target trajectory or target position of the part to be controlled, and to derive a correction amount for bringing the position of the part to be controlled detected based on the sensor closer to the target position, and a mechanical control unit to which an operation command is given, and which controls the operation of the mechanical mechanism unit using the given operation command and the derived correction amount, the correction control unit calculating the correction amount while changing the operating speed of the mechanical mechanism unit, determining a correction amount for the correction amount for the difference between the correction amounts before and after past changes in the operating speed, and adding the correction amount to the correction amount to correct the correction amount to be applied immediately after the operating speed is changed.

本開示の一態様によれば、過去の動作速度の変更前後の補正結果に基づき、動作速度の変更直後に適用する補正量を修正するため、修正した補正量が動作速度の変更に伴う振動の増加分を抑制することになる。ひいては、動作速度変更時における周囲物体への機械の干渉を抑制でき、また、補正量の収束時間を低減できることになる。 According to one aspect of the present disclosure, the amount of correction applied immediately after changing the operating speed is corrected based on the correction results before and after past changes in operating speed, so the corrected amount of correction suppresses the increase in vibration that accompanies the change in operating speed. As a result, it is possible to suppress interference of the machine with surrounding objects when changing the operating speed, and also to reduce the convergence time of the amount of correction.

一実施形態に係る機械システムの構成を示す概略図である。FIG. 1 is a schematic diagram illustrating a configuration of a mechanical system according to an embodiment. 機械機構部の一例を示す側面図である。FIG. 2 is a side view showing an example of a mechanical mechanism. 制御装置の一例を示すブロック図である。FIG. 2 is a block diagram showing an example of a control device. 補正量の修正例を示すタイムチャートである。6 is a time chart showing an example of modification of a correction amount. 補正量の修正例を示すグラフである。11 is a graph showing an example of modification of a correction amount. 補正量の適用時間の修正例を示すグラフである。11 is a graph showing an example of modification of the application time of the correction amount. 補正量の修正の変形例を示すグラフである。13 is a graph showing a modified example of the correction amount modification. 一実施形態に係る機械システムの動作を示すフローチャートである。1 is a flowchart illustrating an operation of a machine system according to an embodiment.

以下、添付図面を参照して本開示の実施形態を詳細に説明する。各図面において、同一又は類似の構成要素には同一又は類似の符号が付与されている。また、以下に記載する実施形態は、特許請求の範囲に記載される発明の技術的範囲及び用語の意義を限定するものではない。 The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. In each drawing, the same or similar components are given the same or similar reference numerals. Furthermore, the embodiments described below do not limit the technical scope of the invention described in the claims and the meaning of the terms.

図１は本実施形態に係る機械システム１０の構成を示している。機械システム１０は、制御対象部位の位置を検出するためのセンサ１１を備えた機械機構部１２と、センサ１１を用いて機械機構部１２の動作を制御する制御装置１３と、を備えている。センサ１１及び機械機構部１２は、動力線や信号線等の線条体１４を介して制御装置１３に接続されるが、無線を介して接続されてもよい。センサ１１は、制御対象部位である機械先端部１５に取付けられるが、振動を発生し得る部位であれば他の制御対象部位に取付けられてもよい。センサ１１は、制御対象部位の位置を検出可能なセンサであればよく、例えば加速度センサ、ジャイロセンサ、慣性センサ、力センサ、レーザトラッカ、カメラ、モーションキャプチャシステム等でよい。 Figure 1 shows the configuration of a mechanical system 10 according to this embodiment. The mechanical system 10 includes a mechanical mechanism 12 equipped with a sensor 11 for detecting the position of a controlled part, and a control device 13 that controls the operation of the mechanical mechanism 12 using the sensor 11. The sensor 11 and the mechanical mechanism 12 are connected to the control device 13 via a wire 14 such as a power line or a signal line, but may be connected wirelessly. The sensor 11 is attached to the machine tip 15, which is the controlled part, but may be attached to another controlled part as long as it is a part that can generate vibrations. The sensor 11 may be any sensor capable of detecting the position of the controlled part, and may be, for example, an acceleration sensor, a gyro sensor, an inertial sensor, a force sensor, a laser tracker, a camera, a motion capture system, or the like.

図２は機械機構部１２の一例を示している。機械機構部１２は、例えば多関節ロボットであるが、パラレルリンク型ロボット、ヒューマノイド、工作機械、建設機械等の他の機械機構部でもよい。多関節ロボットの場合、機械機構部１２は複数の関節軸Ｊ１～Ｊ６を備え、各関節軸Ｊ１～Ｊ６には、例えばサーボモータ等の駆動源、減速機等（図示せず）のアクチュエータが配設される。関節軸Ｊ１の近傍にはワールド座標系Ｃ１が規定され、フランジ１６の近傍にはインタフェイス座標系Ｃ２が規定されるが、他のユーザ座標系が規定されてもよい。制御装置１３は、これら座標系に基づく制御対象部位の目標軌跡又は目標位置（以下「目標位置」と称する。）に関する動作指令に応じて機械機構部１２を動作させ、センサ１１に基づき検出された制御対象部位の位置（以下「センサ位置」と称する。）をこれら座標系に基づく位置に適宜変換する。 Figure 2 shows an example of the mechanical mechanism 12. The mechanical mechanism 12 is, for example, a multi-joint robot, but may be another mechanical mechanism such as a parallel link robot, a humanoid, a machine tool, or a construction machine. In the case of a multi-joint robot, the mechanical mechanism 12 has a plurality of joint axes J1 to J6, and each joint axis J1 to J6 is provided with a drive source such as a servo motor, an actuator such as a reducer (not shown). A world coordinate system C1 is defined near the joint axis J1, and an interface coordinate system C2 is defined near the flange 16, but other user coordinate systems may be defined. The control device 13 operates the mechanical mechanism 12 in response to an operation command related to a target trajectory or target position (hereinafter referred to as "target position") of the controlled part based on these coordinate systems, and appropriately converts the position of the controlled part detected based on the sensor 11 (hereinafter referred to as "sensor position") to a position based on these coordinate systems.

図３は制御装置１３の一例を示している。制御装置１３は、ＣＰＵ（central processing unit）、ＦＰＧＡ（field-programmable gate array）、ＡＳＩＣ（application specific integrated circuit）等のプロセッサ、半導体集積回路等を備えたコンピュータ装置でよい。制御装置１３は機械制御部１８及び補正制御部１９を備えているが、補正制御部１９は上位コンピュータ装置等の外部装置に実装されてもよい。機械制御部１８は動作プログラム１７に従って動作指令が与えられ、与えられた動作指令及び導出された補正量を用いて機械機構部１２の動作を制御する。動作指令は、例えば時間に関する位置指令でよいが、速度指令、加速度指令、トルク指令等でもよい。 Figure 3 shows an example of the control device 13. The control device 13 may be a computer device equipped with a processor such as a central processing unit (CPU), a field-programmable gate array (FPGA), or an application specific integrated circuit (ASIC), a semiconductor integrated circuit, etc. The control device 13 is equipped with a machine control unit 18 and a correction control unit 19, but the correction control unit 19 may be implemented in an external device such as a higher-level computer device. The machine control unit 18 is given an operation command according to the operation program 17, and controls the operation of the mechanical mechanism unit 12 using the given operation command and the derived correction amount. The operation command may be, for example, a position command related to time, but may also be a speed command, an acceleration command, a torque command, etc.

機械制御部１８は、機械機構部１２に設けたモータ等の駆動源（図示せず）の位置を検出する位置検出器（図示せず）を用いて、制御対象部位の実位置、実速度、実加速度、実トルク等を、目標位置、目標速度、目標加速度、目標トルク等に一致させるように位置、速度、加速度、トルク等のフィードバック制御を行う。しかしながら、斯かる制御を行っても機械機構部１２の動作を高速化した場合には、減速機や機械機構部の剛性不足等に起因して機械先端部１５に振動が発生し、現在位置が目標位置から位置ずれして位置偏差を生じることがある。このため補正制御部１９が振動を打ち消すための補正量を導出し、機械制御部１８が導出された補正量に基づき動作指令を補正して機械機構部１２の動作を制御することで、振動を抑制するとよい。 The machine control unit 18 performs feedback control of the position, speed, acceleration, torque, etc., using a position detector (not shown) that detects the position of a drive source (not shown) such as a motor provided in the machine mechanism unit 12, so that the actual position, actual speed, actual acceleration, actual torque, etc. of the controlled part coincide with the target position, target speed, target acceleration, target torque, etc. However, even if such control is performed, when the operation of the machine mechanism unit 12 is accelerated, vibrations may occur in the machine tip unit 15 due to insufficient rigidity of the reducer or the machine mechanism unit, and the current position may shift from the target position, resulting in position deviation. For this reason, it is preferable that the correction control unit 19 derives a correction amount to cancel out the vibration, and the machine control unit 18 corrects the operation command based on the derived correction amount to control the operation of the machine mechanism unit 12, thereby suppressing the vibration.

補正制御部１９は、制御対象部位の振動成分である差分量を算出する差分量算出部２１を備えているとよい。差分量は、例えばセンサ位置と目標位置の差分量でよいが、センサ速度と目標速度の差分量、センサ加速度と目標加速度の差分量、センサトルクと目標トルクの差分量でもよい。このため、センサ位置と目標位置、センサ速度と目標速度、センサ加速度と目標加速度、センサトルクと目標トルク等を時系列に関連付けて第１メモリ２０に記憶しておくとよい。 The correction control unit 19 may include a difference amount calculation unit 21 that calculates a difference amount, which is a vibration component of the controlled part. The difference amount may be, for example, the difference amount between the sensor position and the target position, but may also be the difference amount between the sensor speed and the target speed, the difference amount between the sensor acceleration and the target acceleration, or the difference amount between the sensor torque and the target torque. For this reason, the sensor position and the target position, the sensor speed and the target speed, the sensor acceleration and the target acceleration, the sensor torque and the target torque, etc. may be associated in a time series and stored in the first memory 20.

また補正制御部１９は、算出された差分量（振動成分）に基づき、センサ位置を目標位置に近づけるための補正量を算出する補正量算出部２２を備えているとよい。補正量は、振動を打ち消すために動作指令を補正するものでよく、例えば位置補正量、速度補正量、加速度補正量、トルク補正量等でもよい。また補正量は、時系列データであるとよい。補正量算出部２２は、過去の補正量と、算出された差分量とに基づき、新たな補正量を算出する学習制御を行うが、差分量のみに基づき補正量を算出してもよい。学習制御を行うため又は後述する補正量の修正を行うため、過去及び現在の補正量を時系列に関連付けて第２メモリ２３に記憶しておくとよい。 The correction control unit 19 may also include a correction amount calculation unit 22 that calculates a correction amount for moving the sensor position closer to the target position based on the calculated difference amount (vibration component). The correction amount may be a correction amount for correcting the operation command to cancel out the vibration, and may be, for example, a position correction amount, a speed correction amount, an acceleration correction amount, or a torque correction amount. The correction amount may also be time-series data. The correction amount calculation unit 22 performs learning control to calculate a new correction amount based on past correction amounts and the calculated difference amount, but may also calculate the correction amount based only on the difference amount. In order to perform learning control or to modify the correction amount described below, the past and current correction amounts may be associated with a time series and stored in the second memory 23.

さらに補正制御部１９は、算出された差分量（振動成分）に基づき、動作速度を変更するために使用される動作速度変更率を調整する動作速度変更率調整部２５を備えているとよい。動作速度変更率は、動作速度に乗算する倍率でよく、例えば１１０％、９０％等として表される。動作速度変更率調整部２５は、動作速度変更率の最大値を超えない範囲内で、且つ、振動の許容条件（例えば振幅の許容値等でよい。）の範囲内で、過去の動作速度変更率を新たな動作速度変更率に調整するとよい。動作速度変更率を調整するため又は後述する補正量の修正のため、過去及び現在の動作速度変更率を時系列に関連付けて第２メモリ２３に記憶しておくとよい。また過去及び現在の動作速度変更率を過去及び現在の補正量と時系列に関連付けて第２メモリ２３に記憶しておくとよい。さらに動作速度変更率の最大値及び振動の許容条件を満たすように動作速度変更率を調整するため、動作速度変更率の最大値と振動の許容条件を第４メモリ２４に記憶しておくとよい。 The correction control unit 19 may further include a motion speed change rate adjustment unit 25 that adjusts the motion speed change rate used to change the motion speed based on the calculated difference amount (vibration component). The motion speed change rate may be a multiplication factor by which the motion speed is multiplied, and may be expressed as, for example, 110%, 90%, etc. The motion speed change rate adjustment unit 25 may adjust the past motion speed change rate to a new motion speed change rate within a range that does not exceed the maximum value of the motion speed change rate and within the range of the vibration tolerance condition (for example, the amplitude tolerance value, etc.). In order to adjust the motion speed change rate or to correct the correction amount described below, the past and current motion speed change rates may be associated with each other in a chronological order and stored in the second memory 23. The past and current motion speed change rates may also be associated with the past and current correction amounts in a chronological order and stored in the second memory 23. In order to adjust the motion speed change rate so as to satisfy the maximum value of the motion speed change rate and the vibration tolerance condition, the maximum value of the motion speed change rate and the vibration tolerance condition may be stored in the fourth memory 24.

加えて補正制御部１９は、過去の動作速度の変更前後の補正結果に基づき、動作速度の変更直後に適用する補正量を修正する補正量修正部２６を備えているとよい。例えば補正量修正部２６は、過去の動作速度変更率の調整前後の補正結果に基づき、動作速度変更率の調整直後に適用する補正量を修正するとよい。修正した補正量は動作速度の変更に伴う振動の増加分を抑制することになる。ひいては、動作速度変更時における周囲物体への機械の干渉を抑制でき、また、補正量の収束時間を低減できることになる。 In addition, the correction control unit 19 may include a correction amount correction unit 26 that corrects the correction amount to be applied immediately after changing the operating speed, based on the correction results before and after past changes in the operating speed. For example, the correction amount correction unit 26 may correct the correction amount to be applied immediately after adjusting the operating speed change rate, based on the correction results before and after past adjustments to the operating speed change rate. The corrected correction amount suppresses the increase in vibration accompanying the change in operating speed. As a result, it is possible to suppress interference of the machine with surrounding objects when changing the operating speed, and also to reduce the convergence time of the correction amount.

また補正制御部１９は、動作速度の変更直後に適用する補正量の適用時間を修正する適用時間修正部２７を備えているとよい。例えば適用時間修正部２７は、動作速度変更率の調整前後の動作速度変更率に基づき、動作速度変更率の調整直後に適用する補正量の適用時間を修正するとよい。適用時間を修正した補正量の適用タイミングは動作速度の変更直後の動作に一致するようになるため、修正した補正量が動作速度の変更に伴う振動の増加分を適時に抑制するようになる。ひいては、動作速度変更時における周囲物体への機械の干渉を抑制でき、また、補正量の収束時間を低減できることになる。なお、補正制御部１９は、補正量修正部２６を備えず、適用時間修正部２７のみを備えていてもよい。修正した補正量は過去及び現在の補正量として第２メモリ２３に記憶しておくとよい。 The correction control unit 19 may also include an application time correction unit 27 that corrects the application time of the correction amount to be applied immediately after the change in the operating speed. For example, the application time correction unit 27 may correct the application time of the correction amount to be applied immediately after the adjustment of the operating speed change rate based on the operating speed change rate before and after the adjustment of the operating speed change rate. The application timing of the correction amount with the application time corrected matches the operation immediately after the operating speed change, so the corrected correction amount timely suppresses the increase in vibration caused by the change in operating speed. As a result, it is possible to suppress the interference of the machine with surrounding objects when the operating speed is changed, and also to reduce the convergence time of the correction amount. The correction control unit 19 may not include the correction amount correction unit 26, and may only include the application time correction unit 27. The corrected correction amount may be stored in the second memory 23 as past and current correction amounts.

さらに補正制御部１９は、現在の補正量と過去の補正量を比較し、現在の動作速度変更率と過去の動作速度変更率を比較する比較部２８を備えているとよい。例えば比較部２８は、現在の補正量と過去の補正量との比が所定範囲内であるか否かを判定し、現在の動作速度変更率と過去の動作速度変更率の比が所定範囲内であるか否かを判定するとよい。これにより、補正量及び動作速度変更率が収束したか否かを判定できる。収束した補正量と収束した動作速度変更率を機械システム１０の電源切断後に再利用するため、収束した補正量と収束した動作速度変更率を時系列に関連付けて第３メモリ２９に記憶しておくとよい。収束した補正量と収束した動作速度変更率を電源切断後であっても記憶しておくため、第３メモリ２９は不揮発性メモリであるとよい。収束した補正量と収束した動作速度変更率を機械システム１０の電源投入後に第３メモリ２９から第２メモリ２３に読み出して再利用するとよい。なお、第１メモリ２０、第２メモリ２３、第４メモリ２４は、揮発性メモリでよいが、不揮発性メモリでもよい。 Furthermore, the correction control unit 19 may include a comparison unit 28 that compares the current correction amount with the past correction amount and compares the current operation speed change rate with the past operation speed change rate. For example, the comparison unit 28 may determine whether the ratio of the current correction amount to the past correction amount is within a predetermined range or not, and may determine whether the ratio of the current operation speed change rate to the past operation speed change rate is within a predetermined range or not. This makes it possible to determine whether the correction amount and the operation speed change rate have converged. In order to reuse the converged correction amount and the converged operation speed change rate after the power supply of the mechanical system 10 is turned off, the converged correction amount and the converged operation speed change rate may be associated with a time series and stored in the third memory 29. In order to store the converged correction amount and the converged operation speed change rate even after the power supply is turned off, the third memory 29 may be a non-volatile memory. The converged correction amount and the converged operation speed change rate may be read from the third memory 29 to the second memory 23 after the power supply of the mechanical system 10 is turned on, and reused. The first memory 20, the second memory 23, and the fourth memory 24 may be volatile memories, but may also be non-volatile memories.

図４は補正量の修正例を示すタイムチャートである。図４には、動作速度変更率の初期値をＯ０に設定し、第一回から第六回までの補正回Ｔ１～Ｔ６において動作速度変更率がＯ１からＯ４へ調整されていき、第七回の補正回で補正量と動作速度変更率が収束した例が示されている。このとき、補正量算出部２２の出力（補正量）がＡ１からＡ６へ変化し、補正量修正部２６の出力（動作速度の変更に伴い修正した補正量）がＡ１'からＡ６'へ変化し、適用時間修正部２７の出力（適用時間をさらに修正した補正量）がＡ１'ｔからＡ６'ｔへ変化し、適用時間修正部２７の出力（適用時間のみを修正した補正量）がＡ１ｔからＡ６ｔへ変化していくとする。 Figure 4 is a time chart showing an example of correction amount adjustment. Figure 4 shows an example in which the initial value of the motion speed change rate is set to O0, the motion speed change rate is adjusted from O1 to O4 in the first to sixth correction times T1 to T6, and the correction amount and motion speed change rate converge in the seventh correction time. At this time, the output (correction amount) of the correction amount calculation unit 22 changes from A1 to A6, the output of the correction amount adjustment unit 26 (correction amount adjusted in accordance with the change in motion speed) changes from A1' to A6', the output of the application time adjustment unit 27 (correction amount with further correction of application time) changes from A1't to A6't, and the output of the application time adjustment unit 27 (correction amount with only application time adjusted) changes from A1t to A6t.

例えば第二回のＴ２時に動作速度変更率がＯ１からＯ２へ調整された場合、補正量修正部２６は、過去の動作速度変更率の調整前後（例えばＯ０からＯ１への調整前後）の補正結果、つまり動作速度変更率Ｏ０で動作させて適用時間のみを修正した補正量Ａ１ｔと、動作速度変更率Ｏ１で動作させて算出した補正量Ａ２と、に基づき、動作速度変更率をＯ１からＯ２へ調整した直後の補正量Ａ２を修正するとよい。修正後の補正量Ａ２’は例えば次式から求めることができる。 For example, if the motion speed change rate is adjusted from O1 to O2 at the second time T2, the correction amount correction unit 26 may correct the correction amount A2 immediately after adjusting the motion speed change rate from O1 to O2 based on the correction results before and after the past adjustment of the motion speed change rate (for example, before and after adjustment from O0 to O1), that is, the correction amount A1t obtained by operating at the motion speed change rate O0 and correcting only the application time, and the correction amount A2 calculated by operating at the motion speed change rate O1. The corrected correction amount A2' can be calculated, for example, from the following formula.

式中、Ａ２－Ａ１ｔは過去の動作速度変更率の調整前後（Ｏ０からＯ１への調整前後）の補正量の差分を表し、Ｏ２－Ｏ１は現在の動作速度変更率調整量（Ｏ１からＯ２への調整量）であり、Ｏ１－Ｏ０は過去の動作速度変更率調整量（Ｏ０からＯ１への調整量）であり、（Ｏ２－Ｏ１）／（Ｏ１－Ｏ０）は現在及び過去の動作速度変更率調整量の比である。 In the formula, A2-A1t represents the difference in the correction amount before and after the past adjustment of the motion speed change rate (before and after adjustment from O0 to O1), O2-O1 is the current motion speed change rate adjustment amount (adjustment amount from O1 to O2), O1-O0 is the past motion speed change rate adjustment amount (adjustment amount from O0 to O1), and (O2-O1)/(O1-O0) is the ratio of the current and past motion speed change rate adjustment amounts.

つまり補正量修正部２６は、過去の動作速度変更率の調整前後の補正量の差分に対して現在及び過去の動作速度変更率調整量の比を乗算することで補正量の修正分（（Ａ２－Ａ１ｔ）×（Ｏ２－Ｏ１）／（Ｏ１－Ｏ０））を求め、補正量の修正分を動作速度変更率の調整時に算出された補正量Ａ２に加算することで補正量Ａ２の修正を行うとよい。 In other words, the correction amount correction unit 26 obtains the correction amount ((A2-A1t) x (O2-O1)/(O1-O0)) by multiplying the difference in the correction amount before and after the past adjustment of the motion speed change rate by the ratio of the current and past motion speed change rate adjustment amounts, and then corrects the correction amount A2 by adding the correction amount to the correction amount A2 calculated when adjusting the motion speed change rate.

同様に第三回のＴ３時に動作速度変更率がＯ２からＯ３へ調整された場合、補正量修正部２６は、過去の動作速度変更率の調整前後（Ｏ１からＯ２への調整前後）の補正結果、つまり動作速度変更率Ｏ１で動作させて算出し適用時間のみを修正した補正量Ａ２ｔと、動作速度変更率Ｏ２で動作させて算出した補正量Ａ３と、に基づき、動作速度変更率をＯ２からＯ３へ調整した直後の補正量Ａ３を修正するとよい。修正後の補正量Ａ３'は例えば次式から求めることができる。 Similarly, if the motion speed change rate is adjusted from O2 to O3 at the third time T3, the correction amount correction unit 26 may correct the correction amount A3 immediately after adjusting the motion speed change rate from O2 to O3 based on the correction results before and after the past adjustment of the motion speed change rate (before and after adjustment from O1 to O2), that is, the correction amount A2t calculated by operating at the motion speed change rate O1 and correcting only the application time, and the correction amount A3 calculated by operating at the motion speed change rate O2. The corrected correction amount A3' can be calculated, for example, from the following formula.

つまり補正量修正部２６は、過去の動作速度変更率の調整前後の補正量の差分（Ａ３－Ａ２ｔ）に対して現在及び過去の動作速度変更率調整量の比（（Ｏ３－Ｏ２）／（Ｏ２－Ｏ１））を乗算することで補正量の修正分（（Ａ３－Ａ２ｔ）×（Ｏ３－Ｏ２）／（Ｏ２－Ｏ１））を求め、補正量の修正分を動作速度変更率の調整時に算出された補正量Ａ３に加算することで補正量Ａ３の修正を行うとよい。 In other words, the correction amount correction unit 26 multiplies the difference (A3-A2t) in the correction amount before and after the past adjustment of the motion speed change rate by the ratio ((O3-O2)/(O2-O1)) of the current and past adjustment amounts of the motion speed change rate to obtain a correction amount ((A3-A2t) x (O3-O2)/(O2-O1)), and corrects the correction amount A3 by adding the correction amount to the correction amount A3 calculated when adjusting the motion speed change rate.

また第四回のＴ４時と第五回のＴ５時には動作速度変更率がＯ３のまま調整されていないため、補正量修正部２６は補正量Ａ４、Ａ５を修正する必要はない。つまり、修正後の補正量Ａ４'は修正前の補正量Ａ４と同じでよく、修正後の補正量Ａ５'は修正前の補正量Ａ５と同じでよい。 Also, at the fourth time T4 and the fifth time T5, the motion speed change rate remains at O3 and is not adjusted, so the correction amount correction unit 26 does not need to correct the correction amounts A4 and A5. In other words, the corrected correction amount A4' can be the same as the pre-correction correction amount A4, and the corrected correction amount A5' can be the same as the pre-correction correction amount A5.

さらに第六回のＴ６時に動作速度変更率がＯ３からＯ４へ調整された場合、補正量修正部２６は、過去の動作速度変更率の調整前後（Ｏ２からＯ３への調整前後）の補正結果、つまり動作速度変更率Ｏ２で動作させて算出し適用時間のみを修正した補正量Ａ３ｔと、動作速度変更率Ｏ３で動作させて算出した補正量Ａ４と、に基づき、動作速度変更率をＯ３からＯ４へ調整した直後の補正量Ａ６を修正するとよい。修正後の補正量Ａ６'は例えば次式から求めることができる。 Furthermore, if the motion speed change rate is adjusted from O3 to O4 at time T6 for the sixth time, the correction amount correction unit 26 may correct the correction amount A6 immediately after adjusting the motion speed change rate from O3 to O4 based on the correction results before and after the past adjustment of the motion speed change rate (before and after adjustment from O2 to O3), that is, the correction amount A3t calculated by operating at the motion speed change rate O2 and correcting only the application time, and the correction amount A4 calculated by operating at the motion speed change rate O3. The corrected correction amount A6' can be calculated, for example, from the following formula.

つまり補正量修正部２６は、過去の動作速度変更率の調整前後の補正量の差分（Ａ４－Ａ３ｔ）に対して現在及び過去の動作速度変更率調整量の比（（Ｏ４－Ｏ３）／（Ｏ３－Ｏ２））を乗算することで補正量の修正分（（Ａ４－Ａ３ｔ）×（Ｏ４－Ｏ３）／（Ｏ３－Ｏ２））を求め、補正量の修正分を動作速度変更率の調整時に算出された補正量Ａ６に加算することで補正量Ａ６の修正を行うとよい。 In other words, the correction amount correction unit 26 multiplies the difference (A4-A3t) in the correction amount before and after the past adjustment of the motion speed change rate by the ratio ((O4-O3)/(O3-O2)) between the current and past adjustment amounts of the motion speed change rate to obtain a correction amount ((A4-A3t) x (O4-O3)/(O3-O2)), and then corrects the correction amount A6 by adding the correction amount to the correction amount A6 calculated when adjusting the motion speed change rate.

なお、補正量の修正で使用される「過去の動作速度変更率の調整前後の補正結果」は、「直前」の動作速度変更率の調整前後の補正結果でよいが、「それ以前」の動作速度変更率の調整前後の補正結果でもよい。例えば第六回のＴ６時に動作速度変更率がＯ３からＯ４へ調整された場合、補正量修正部２６は、「直前」の動作速度変更率の調整（Ｏ２からＯ３への調整）前後の補正結果（Ａ４－Ａ３ｔ）を使用するのではなく、「それ以前」の動作速度変更率の調整（Ｏ１からＯ２への調整）前後の補正結果（Ａ３－Ａ２ｔ）を使用してもよい。この場合、修正後の補正量Ａ６'は例えば次式から求めることができる。 The "past correction results before and after adjustment of the motion speed change rate" used in correcting the correction amount may be the correction results before and after the "most recent" adjustment of the motion speed change rate, but may also be the correction results before and after the "previous" adjustment of the motion speed change rate. For example, if the motion speed change rate is adjusted from O3 to O4 at time T6 of the sixth time, the correction amount correction unit 26 may use the correction results (A3-A2t) before and after the "previous" adjustment of the motion speed change rate (adjustment from O2 to O3) rather than using the correction results (A4-A3t) before and after the "most recent" adjustment of the motion speed change rate (adjustment from O2 to O3). In this case, the corrected correction amount A6' can be calculated, for example, from the following formula.

図５は補正量の修正例を示すグラフである。太い実線及び細い実線は夫々、過去の動作速度変更率の調整（１００％から１１０％への調整）前後の補正量Ａ１ｔ（動作速度変更率１００％で動作させて算出し適用時間のみを修正した補正量）と補正量Ａ２（動作速度変更率１１０％で動作させて算出した補正量）とを表している。また太い破線は、過去の動作速度変更率の調整前後の補正量の差分Ａ２－Ａ１ｔを表している。さらに細い破線は、過去の動作速度変更率の調整前後の補正量の差分Ａ２－Ａ１ｔに基づき、動作速度変更率の調整（１１０％から１２０％への調整）直後に適用する補正量Ａ２を修正した補正量Ａ２'（適用時間修正前）を表している。このグラフによれば、修正した補正量Ａ２’が修正前の補正量Ａ２より大きくなっていることが分かる。つまり修正した補正量Ａ２’は動作速度の変更に伴う振動の増加分を抑制できることが分かる。 Figure 5 is a graph showing an example of correction amount. The thick solid line and thin solid line respectively represent the correction amount A1t (the correction amount calculated by operating at a motion speed change rate of 100% and correcting only the application time) and the correction amount A2 (the correction amount calculated by operating at a motion speed change rate of 110%) before and after a past adjustment of the motion speed change rate (adjustment from 100% to 110%). The thick dashed line represents the difference A2-A1t in the correction amount before and after the past adjustment of the motion speed change rate. The thin dashed line represents the correction amount A2' (before the application time is corrected) obtained by correcting the correction amount A2 applied immediately after the adjustment of the motion speed change rate (adjustment from 110% to 120%) based on the difference A2-A1t in the correction amount before and after the past adjustment of the motion speed change rate. From this graph, it can be seen that the corrected correction amount A2' is larger than the correction amount A2 before the correction. In other words, it can be seen that the corrected correction amount A2' can suppress the increase in vibration caused by the change in motion speed.

図６は補正量の適用時間の修正例を示すグラフである。太い破線は、動作速度変更率１００％で動作させて修正した適用時間修正前の補正量Ａ１'を表している。また太い実線は、動作速度変更率１００％で動作させて修正した適用時間修正後の補正量Ａ１'ｔを表している。第一回のＴ１時に動作速度変更率が１００％から１１０％へ調整された場合、機械先端部１５は動作開始から１１秒後に到達していた位置に１０秒後に到達するようになるため、動作速度変更率１００％で動作させて修正した補正量Ａ１'を動作速度変更率１１０％の動作にそのまま適用すると、補正量の適用タイミングが動作速度の変更に伴う動作に一致しなくなってしまう。そこで、適用時間修正部２７は、補正量Ａ１'の適用時間を１００％／１１０％に縮めるように補正量Ａ１'を修正するとよい。適用時間を修正した補正量Ａ１'ｔの適用タイミングは動作速度変更率１１０％へ調整した直後の動作に一致するようになるため、修正した補正量Ａ１'ｔが動作速度の変更に伴う振動の増加分を適時に抑制できるようになる。 Figure 6 is a graph showing an example of correction of the application time of the correction amount. The thick dashed line represents the correction amount A1' before the application time correction, which is corrected by operating with an operating speed change rate of 100%. The thick solid line represents the correction amount A1't after the application time correction, which is corrected by operating with an operating speed change rate of 100%. If the operating speed change rate is adjusted from 100% to 110% at the first T1, the machine tip 15 will reach the position it reached 11 seconds after the start of the operation 10 seconds later. Therefore, if the correction amount A1' corrected by operating with an operating speed change rate of 100% is applied directly to the operation with an operating speed change rate of 110%, the application timing of the correction amount will not match the operation associated with the change in operating speed. Therefore, the application time correction unit 27 may correct the correction amount A1' so as to shorten the application time of the correction amount A1' to 100%/110%. The application timing of the correction amount A1't, whose application time has been modified, will coincide with the movement immediately after the movement speed change rate has been adjusted to 110%, so the modified correction amount A1't will be able to timely suppress the increase in vibration that accompanies the change in movement speed.

図７は補正量の修正の変形例を示している。補正量修正部２６は、ピーク値を含む区間に時系列の補正量を分割し、区間毎に求めた修正前後の補正量のピーク値に基づき動作速度変更率の調整直後に適用する補正量を区間毎に修正する点で、前述のものと異なる。例えば補正量修正部２６は、補正量が０である時点を境界として補正量の山に分割すればよい。そして、補正量修正部２６は、区間毎に求めた修正前後の補正量のピーク値に基づき区間修正率を区間毎に求め、区間内の任意の補正量に対して区間修正率を乗算することで補正量を区間毎に修正するとよい。 Figure 7 shows a modified example of the correction amount. The correction amount correction unit 26 differs from the above in that it divides the time series correction amount into intervals including peak values, and corrects for each interval the correction amount to be applied immediately after adjusting the operation speed change rate based on the peak values of the correction amount before and after correction obtained for each interval. For example, the correction amount correction unit 26 may divide the correction amount into peaks with the time when the correction amount is 0 as the boundary. Then, the correction amount correction unit 26 may obtain an interval correction rate for each interval based on the peak values of the correction amount before and after correction obtained for each interval, and correct the correction amount for each interval by multiplying any correction amount within the interval by the interval correction rate.

例えば第一区間の場合、補正量修正部２７は、次式から、過去の動作速度変更率の調整（１００％から１１０％への調整）前後の補正量のピーク値の差分（Ａ２_Ｐ１－Ａ１ｔ_Ｐ１）に基づき、修正後の補正量のピーク値Ａ２'_P1を区間毎に求める。 For example, in the case of the first section, the correction amount correction unit 27 calculates the corrected peak value A2' P1 for each section based on the difference (A2 _P1 - A1t _P1 ) between the peak values of the correction amount before and after the past adjustment of the operating speed change rate (adjustment from 100% to 110 _% ) using the following formula.

次に補正量修正部２７は、次式から、修正前後の補正量のピーク値の比（Ａ２'_P1／Ａ２_P1）に基づき、区間修正率Ｉ１を区間毎に求める。 Next, the correction amount modification unit 27 obtains a section modification rate I1 for each section based on the ratio of the peak values of the correction amounts before and after modification (A2' _P1 /A2 _P1 ) using the following equation.

そして補正量修正部２７は、第一区間内の任意の補正量Ａ２に対して区間修正率Ｉ１を乗算することで動作速度変更率の調整直後に適用する補正量Ａ２を区間毎に修正するとよい。第一区間の修正後の補正量Ａ２’は例えば次式から求めることができる。 The correction amount correction unit 27 may then multiply any correction amount A2 in the first interval by the interval correction rate I1 to correct the correction amount A2 to be applied immediately after adjusting the operation speed change rate for each interval. The corrected correction amount A2' for the first interval can be calculated, for example, from the following formula.

また、例えば第四区間より後の区間では、補正量のピーク値の変化が小さいため、補正量修正部２７は補正量を修正しないと判定してもよい。 Also, for example, in sections after the fourth section, the change in the peak value of the correction amount is small, so the correction amount correction unit 27 may determine not to correct the correction amount.

このように振動の影響が大きい時点を示す補正量のピーク値に基づき区間修正率を求め、動作速度変更率の調整直後に適用する補正量を区間修正率に基づき修正することで、計算速度向上、メモリ容量節約といった種々の利点を得ることができる。 In this way, by calculating the section correction rate based on the peak value of the correction amount, which indicates the point at which the influence of vibration is greatest, and correcting the correction amount to be applied immediately after adjusting the operating speed change rate based on the section correction rate, various advantages can be obtained, such as improved calculation speed and reduced memory capacity.

図８は本実施形態に係る機械システム１０の動作を示すフローチャートである。先ずステップＳ１０では、振動の許容条件が作業者によって手動で設定される。このため機械システム１０は振動の許容条件を入力する手段を備えているとよい。ステップＳ１１では、動作指令に基づき機械機構部を動作させ、動作速度の最大値ω_max_jとトルクの最大値τ_max_j（ｊは軸番号）を夫々記憶しておき、その動作に対して設定可能な動作速度変更率の最大値α_maxを予め算出する。動作速度変更率の最大値α_maxは例えば次式から求めることができる。ここで、ω_alw_j、τ_alw_jは夫々、動作速度の許容値、トルクの許容値である。 8 is a flowchart showing the operation of the machine system 10 according to this embodiment. First, in step S10, the vibration tolerance conditions are manually set by an operator. For this reason, the machine system 10 may be provided with a means for inputting the vibration tolerance conditions. In step S11, the machine mechanism is operated based on the operation command, and the maximum operation speed ω_max _j and the maximum torque τ_max _j (j is the axis number) are stored, and the maximum operation speed change rate α _max that can be set for that operation is calculated in advance. The maximum operation speed change rate α _max can be obtained, for example, from the following formula. Here, ω_alw _j and τ_alw _j are the operation speed tolerance value and the torque tolerance value, respectively.

なお、機械システム１０は動作速度変更率の最大値を入力する手段を備えていてもよく、この場合には動作速度変更率の最大値は作業者によって手動で設定される。 The machine system 10 may also be provided with a means for inputting the maximum value of the operating speed change rate, in which case the maximum value of the operating speed change rate is set manually by the operator.

ステップＳ１２では、動作速度変更率の最大値を超えない範囲内で且つ振動の許容条件の範囲内で初期設定した動作速度変更率に基づき機械機構部１２を動作させ、センサ位置と目標位置との差分量を算出する。差分量は、センサ速度と目標速度の差分量、センサ加速度と目標加速度の差分量、センサトルクと目標トルクの差分量等でもよい。ステップＳ１３では、差分量に基づきセンサ位置を目標位置に近づけるための補正量を算出する。補正量は学習制御に基づき算出されてもよい。 In step S12, the mechanical mechanism 12 is operated based on an initially set operating speed change rate within a range that does not exceed the maximum operating speed change rate and within the range of vibration tolerance conditions, and the difference between the sensor position and the target position is calculated. The difference may be the difference between the sensor speed and the target speed, the difference between the sensor acceleration and the target acceleration, the difference between the sensor torque and the target torque, etc. In step S13, a correction amount for moving the sensor position closer to the target position is calculated based on the difference amount. The correction amount may be calculated based on learning control.

ステップＳ１４では、差分量に基づき動作速度変更率を調整する。例えば差分量が振動の許容条件を満たしていない場合には動作速度変更率を減少させ、差分量が振動の許容条件を満たしている場合には動作速度変更率を増加させる。この際、動作速度変更率の上限を動作速度変更率の最大値α_maxで制限するとよい。 In step S14, the motion speed change rate is adjusted based on the difference amount. For example, if the difference amount does not satisfy the vibration tolerance condition, the motion speed change rate is decreased, and if the difference amount satisfies the vibration tolerance condition, the motion speed change rate is increased. In this case, it is preferable to limit the upper limit of the motion speed change rate to the maximum value α _max of the motion speed change rate.

ステップＳ１５では、過去の動作速度変更率の調整前後の補正結果に基づき、動作速度変更率の調整直後に適用する補正量を修正する。過去の動作速度変更率の調整前後の補正結果は、過去の動作速度変更率の調整前後の補正量の差分を使用してもよいし、又は修正前後の補正量のピーク値に基づき求めた区間修正率を使用してもよい。これにより、修正した補正量は動作速度の変更に伴う振動の増加分を抑制することになる。ひいては、動作速度変更時における周囲物体への機械の干渉を抑制でき、また、補正量の収束時間を低減できることになる。 In step S15, the correction amount to be applied immediately after adjusting the operating speed change rate is corrected based on the correction results before and after past adjustments of the operating speed change rate. The correction results before and after past adjustments of the operating speed change rate may use the difference in the correction amounts before and after past adjustments of the operating speed change rate, or may use a section correction rate calculated based on the peak values of the correction amounts before and after the correction. This allows the corrected correction amount to suppress the increase in vibration associated with changes in the operating speed. This in turn makes it possible to suppress interference of the machine with surrounding objects when changing the operating speed, and also to reduce the convergence time of the correction amount.

ステップＳ１６では、動作速度変更率の調整前後の動作速度変更率に基づき、動作速度変更率の調整直後に適用する補正量の適用時間を修正する。これにより、適用時間を修正した補正量の適用タイミングが動作速度の変更直後の動作に一致するようになるため、修正した補正量が動作速度の変更に伴う振動の増加分を適時に抑制するようになる。ひいては、動作速度変更時における周囲物体への機械の干渉を抑制でき、また、補正量の収束時間を低減できることになる。 In step S16, the application time of the correction amount to be applied immediately after adjusting the motion speed change rate is corrected based on the motion speed change rate before and after the adjustment. This causes the application timing of the correction amount with the corrected application time to match the motion immediately after the motion speed is changed, so that the corrected correction amount timely suppresses the increase in vibration caused by the motion speed change. This in turn makes it possible to suppress interference of the machine with surrounding objects when the motion speed is changed, and also to reduce the convergence time of the correction amount.

ステップＳ１７では、現在の補正量と過去の補正量との比、及び現在の動作速度変更率と過去の動作速度変更率との比が所定範囲内か否かを夫々判定する。つまり補正量と動作速度変更率が夫々収束したか否かを判定する。補正量と動作速度変更率の少なくとも一方が収束していない場合には（ステップＳ１７のＮＯ）、ステップＳ１２に戻り、補正量と動作速度変更率が収束するまで補正制御を繰り返す。補正量と動作速度変更率の双方が収束した場合には（ステップＳ１７のＹＥＳ）、ステップＳ１８において収束した補正量と収束した動作速度変更率を不揮発性メモリに記憶して終了する。 In step S17, it is determined whether the ratio of the current correction amount to the past correction amount, and the ratio of the current motion speed change rate to the past motion speed change rate are each within a predetermined range. In other words, it is determined whether the correction amount and the motion speed change rate have each converged. If at least one of the correction amount and the motion speed change rate has not converged (NO in step S17), the process returns to step S12, and correction control is repeated until the correction amount and the motion speed change rate converge. If both the correction amount and the motion speed change rate have converged (YES in step S17), the converged correction amount and the converged motion speed change rate are stored in non-volatile memory in step S18, and the process ends.

以上の実施形態によれば、過去の動作速度の変更前後の補正結果に基づき、動作速度の変更直後に適用する補正量を修正するため、修正した補正量が動作速度の変更に伴う振動の増加分を抑制することになる。ひいては、動作速度変更時における周囲物体への機械の干渉を抑制でき、また、補正量の収束時間を低減できることになる。 According to the above embodiment, the correction amount to be applied immediately after changing the operating speed is corrected based on the correction results before and after the previous change in operating speed, so the corrected correction amount suppresses the increase in vibration caused by the change in operating speed. As a result, it is possible to suppress interference of the machine with surrounding objects when changing the operating speed, and also to reduce the convergence time of the correction amount.

なお、前述のプロセッサで実行されるプログラムや前述のフローチャートを実行するプログラムは、コンピュータ読取り可能な非一時的記録媒体、例えばＣＤ－ＲＯＭ等に記録して提供してもよいし、或いは有線又は無線を介してＷＡＮ（wide area network）又はＬＡＮ（local area network）上のサーバ装置から配信して提供してもよい。 The program executed by the aforementioned processor or the program executing the aforementioned flowchart may be provided by recording it on a computer-readable non-transitory recording medium, such as a CD-ROM, or may be provided by distributing it from a server device on a WAN (wide area network) or LAN (local area network) via wired or wireless connection.

本明細書において種々の実施形態について説明したが、本発明は、前述の実施形態に限定されるものではなく、特許請求の範囲に記載された範囲内において種々の変更を行えることを認識されたい。 Although various embodiments have been described herein, it should be recognized that the present invention is not limited to the above-described embodiments and that various modifications may be made within the scope of the claims.

１０機械システム
１１センサ
１２機械機構部
１３制御装置
１４線条体
１５機械先端部
１６フランジ
１７動作プログラム
１８機械制御部
１９補正制御部
２０第１メモリ
２１差分量算出部
２２補正量算出部
２３第２メモリ
２４第４メモリ
２５動作速度変更率調整部
２６補正量修正部
２７適用時間修正部
２８比較部
２９第３メモリ
Ｔ１～Ｔ６補正回
Ｏ０～Ｏ４動作速度変更率
Ａ１～Ａ６補正量
Ａ１'～Ａ６' 動作速度の変更に伴い修正した補正量
Ａ１'ｔ～Ａ６'ｔ適用時間をさらに修正した補正量
Ａ１ｔ～Ａ６ｔ適用時間のみを修正した補正量
Ａ１ｔ_P1 第一区間の補正量Ａ１ｔのピーク値
Ａ２_P1 第一区間の補正量Ａ２のピーク値
Ｉ１第一区間の区間修正率 LIST OF SYMBOLS 10 Mechanical system 11 Sensor 12 Mechanical mechanism 13 Control device 14 Wire 15 Mechanical tip 16 Flange 17 Operation program 18 Mechanical control unit 19 Correction control unit 20 First memory 21 Difference amount calculation unit 22 Correction amount calculation unit 23 Second memory 24 Fourth memory 25 Operation speed change rate adjustment unit 26 Correction amount correction unit 27 Application time correction unit 28 Comparison unit 29 Third memory T1 to T6 Correction times O0 to O4 Operation speed change rate A1 to A6 Correction amount A1' to A6' Correction amount corrected in accordance with change in operation speed A1't to A6't Correction amount with further correction of application time A1t to A6t Correction amount with only application time corrected A1t Peak value of correction amount A1t in _P1 first section A2 Peak value of correction amount A2 in _P1 first section I1 Section correction rate for the first section

Claims

A mechanical system including a mechanical mechanism unit having a sensor for detecting a position of a control target part, and a control device for controlling an operation of the mechanical mechanism unit,
a correction control unit that operates the mechanical mechanism unit according to an operation command related to a target trajectory or a target position of the control target part, and derives a correction amount for bringing the position of the control target part detected based on the sensor closer to the target position;
a machine control unit that receives the operation command and controls the operation of the mechanical mechanism unit using the received operation command and the derived correction amount;
Equipped with
the correction control unit includes a correction amount correction unit that calculates the correction amount while changing the operation speed of the mechanical mechanism unit, obtains a correction amount of the correction amount for a difference between the correction amounts before and after a past change in the operation speed, and adds the correction amount to the correction amount, thereby correcting the correction amount to be applied immediately after the change in the operation speed.
Mechanical systems.

The mechanical system of claim 1, wherein the correction control unit calculates the correction amount while adjusting the operation speed change rate for changing the operation speed, and the correction amount correction unit corrects the correction amount to be applied immediately after adjusting the operation speed change rate based on past correction results before and after adjusting the operation speed change rate.

The mechanical system of claim 2, wherein the correction amount modification unit modifies the correction amount to be applied immediately after adjusting the motion speed change rate based on the correction amount before and after past adjustments of the motion speed change rate and the current and past motion speed change rate adjustment amounts.

The mechanical system according to claim 2 or 3, wherein the correction control unit further includes an application time correction unit that corrects the application time of the correction amount to be applied immediately after adjusting the operation speed change rate based on the operation speed change rate before and after the adjustment of the operation speed change rate.

The mechanical system according to claim 4, wherein the correction control unit corrects the correction amount to be applied immediately after adjusting the operation speed change rate, taking into account the correction amount by at least one of the correction amount correction unit and the application time correction unit, and performs learning control to calculate a new correction amount based on the corrected correction amount and a vibration component generated by applying the corrected correction amount.

The mechanical system according to any one of claims 2 to 5, wherein the correction amount correction unit obtains a correction amount of the correction amount by multiplying the difference between the correction amount before and after the past adjustment of the operation speed change rate by the ratio of the current and past operation speed change rate adjustment amounts, and corrects the correction amount by adding the correction amount of the correction amount to the correction amount calculated when adjusting the operation speed change rate.

The mechanical system according to any one of claims 2 to 6, wherein the correction amount is time-series data, and the correction amount correction unit divides the correction amount into intervals including peak values, and corrects the correction amount to be applied immediately after adjusting the operating speed change rate for each interval based on the peak values of the correction amount before and after the correction obtained for each interval.

The mechanical system according to claim 7, wherein the correction amount correction unit obtains a section correction rate for each section based on the peak values of the correction amount before and after the correction, and corrects the correction amount for each section by multiplying any correction amount within the section by the section correction rate.

The mechanical system of any one of claims 1 to 6, wherein the sensor is an acceleration sensor, a gyro sensor, an inertial sensor, a force sensor, a laser tracker, a camera, or a motion capture system.