JP7519940B2 - Temperature sensor abnormality determination device, temperature sensor abnormality determination method, and temperature sensor abnormality determination program - Google Patents

Description

The present invention relates to a temperature sensor anomaly determination device, a temperature sensor anomaly determination method, and a temperature sensor anomaly determination program for determining anomalies in multiple temperature sensors that measure the temperature at approximately the same location in the atmosphere of a measurement target.

For example, in a heating furnace as a measurement target, temperature sensors such as thermocouples and resistance thermometers are used to control the heater temperature. In a heating furnace, the temperature inside the furnace is high, and the temperature sensors used to control the heater temperature deteriorate over time, reducing the accuracy of the detection results, making it impossible to accurately grasp the temperature inside the furnace and making it necessary to replace the temperature sensor.

As a method of knowing when to replace a temperature sensor, for example, the techniques disclosed in Patent Documents 1 and 2 below are known. In Patent Document 1, the resistance value is measured from the voltage drop when a current is supplied to the temperature sensor from a current source, and the time to replace the temperature sensor is predicted from the change in the measured resistance value over time, and the time to replace the temperature sensor is notified. In Patent Document 2, the number of excessive temperature events experienced by the temperature sensor, the duration of the excessive temperature events, the temperature between excessive temperature events, etc. are accumulated in the memory of the process variable transmitter or the memory of the temperature sensor, and the temperature sensor is monitored to notify the time to replace the temperature sensor.

Japanese Patent Application Publication No. 10-232170 Special table 2015-522160 publication

However, as in Patent Document 1, a method that measures resistance values to predict the lifespan of a temperature sensor has the problem of requiring dedicated equipment and parameter management. Also, as in Patent Document 2, a method that counts the number of uses to indicate when the temperature sensor should be replaced has the problem of requiring dedicated parameters to manage the temperature sensor.

The present invention has been made in consideration of the above problems, and aims to provide a temperature sensor anomaly determination device, a temperature sensor anomaly determination method, and a temperature sensor anomaly determination program that can predict an anomaly in a temperature sensor using the measurement value of the temperature sensor.

In order to achieve the above object, a temperature sensor anomaly determination device according to a first aspect of the present invention is a temperature sensor anomaly determination device for determining anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere of a measurement target, comprising:
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a verifier that verifies a difference in the magnitude of variance of the measurement values for each of the temperature sensors stored in the data accumulator;
and a sensor warning determiner for determining whether or not there is a temperature sensor that issues a warning of an abnormality among the plurality of temperature sensors based on the inspection result of the inspector.

The temperature sensor abnormality determination device according to claim 2 of the present invention is a temperature sensor abnormality determination device that determines abnormalities in a plurality of temperature sensors that measure temperatures at approximately the same locations in an atmosphere of a measurement target,
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a Bartlett tester that calculates an average of the variances of the samples of the measured values stored in the data storage device from the degrees of freedom of the temperature sensors and the sum of the degrees of freedom, calculates a test statistic based on the calculated average of the variances of the samples and a coefficient for calculating a test statistic, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors and a significance level;
a Hartley tester that calculates a test statistic based on the maximum and minimum variances of the samples of the measurement values of the plurality of temperature sensors stored in the data storage device, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors, the number of samples, and a significance level;
The present invention is characterized in that it comprises a sensor warning determiner that determines whether or not there is a temperature sensor that issues an abnormality warning among the plurality of temperature sensors based on the test results of the Bartlett tester and the Hartley tester.

A temperature sensor anomaly determination method according to claim 3 of the present invention is a temperature sensor anomaly determination method using a temperature sensor anomaly determination device that determines anomalies in a plurality of temperature sensors that measure temperatures at approximately the same locations in an atmosphere of a measurement target, comprising:
a step of storing, for each of the temperature sensors, a plurality of latest sample measurement values for each of the temperature sensors at each predetermined time interval by a data storage device included in the temperature sensor abnormality determination device;
a step of verifying a difference in the magnitude of variance of the measurement values stored in the data storage device for each of the temperature sensors by a verifying device included in the temperature sensor anomaly determination device;
The method further includes a step of determining, by a sensor warning determiner provided in the temperature sensor abnormality determination device, whether or not there is a temperature sensor among the plurality of temperature sensors that warns of an abnormality based on the inspection result of the inspection device.

A temperature sensor anomaly determination method according to a fourth aspect of the present invention is a temperature sensor anomaly determination method using a temperature sensor anomaly determination device that determines anomalies in a plurality of temperature sensors that measure temperatures at approximately the same locations in an atmosphere of a measurement target, comprising:
a step of storing, for each of the temperature sensors, a plurality of latest sample measurement values for each of the temperature sensors at each predetermined time interval by a data storage device included in the temperature sensor abnormality determination device;
a step of calculating an average of the variances of the samples of the measurement values stored in the data storage device from the degrees of freedom of the temperature sensors and the sum of the degrees of freedom using a Bartlett tester provided in the temperature sensor anomaly determination device, calculating a test statistic based on the calculated average of the variances of the samples and a coefficient for calculating a test statistic, and testing whether the variances of the multiple temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors and a significance level;
a step of calculating a test statistic based on the maximum variance and minimum variance of the sampled measured values of the plurality of temperature sensors stored in the data accumulator using a Hartley tester included in the temperature sensor anomaly determination device, and testing whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors, the number of samples, and a significance level;
The method further includes a step of determining, by a sensor warning determiner provided in the temperature sensor abnormality determination device, whether or not there is a temperature sensor that warns of an abnormality among the plurality of temperature sensors based on the inspection results of the Bartlett inspector and the Hartley inspector.

A temperature sensor anomaly determination program according to a fifth aspect of the present invention is a temperature sensor anomaly determination program for determining anomalies in a plurality of temperature sensors that measure temperatures at approximately the same locations in an atmosphere of a measurement target, comprising:
Computer,
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a verifier that verifies a difference in the magnitude of variance of the measurement values for each of the temperature sensors stored in the data accumulator;
The tester functions as a sensor warning determiner that determines whether or not there is a temperature sensor that issues a warning about an abnormality among the plurality of temperature sensors based on the test result of the tester.

A temperature sensor anomaly determination program according to a sixth aspect of the present invention is a temperature sensor anomaly determination program for determining anomalies in a plurality of temperature sensors measuring temperatures at substantially the same locations in an atmosphere of a measurement target, comprising:
Computer,
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a Bartlett tester that calculates an average of the variances of the samples of the measured values stored in the data storage device from the degrees of freedom of the temperature sensors and the sum of the degrees of freedom, calculates a test statistic based on the calculated average of the variances of the samples and a coefficient for calculating a test statistic, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors and a significance level;
a Hartley tester that calculates a test statistic based on the maximum and minimum variances of the samples of the measurement values of the plurality of temperature sensors stored in the data storage device, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors, the number of samples, and a significance level;
The present invention is characterized in that it functions as a sensor warning determiner that determines whether or not there is a temperature sensor that issues a warning about an abnormality among the plurality of temperature sensors based on the test results of the Bartlett tester and the Hartley tester.

According to the present invention, it is possible to predict abnormalities in a temperature sensor using the most recent measurement value of the temperature sensor, without the need for dedicated equipment or parameter management as in the past.

1 is a block diagram of a temperature sensor abnormality determination device according to the present invention; 1 is a diagram showing an example of a measurement system in which a temperature sensor abnormality determination device according to the present invention is adopted;

The following describes in detail the embodiment of the present invention with reference to the attached drawings.

First, an example of a measurement system in which the present invention is adopted will be described with reference to Figure 2. As shown in Figure 2, the measurement system 11 consists of a vacuum heat treatment furnace (heating furnace) 12 as the measurement target and four control loops 13.

The inside of the vacuum heat treatment furnace 12 is maintained in a vacuum state by a vacuum pump 14, and heaters 15 (15A, 15B, 15C, 15D) are arranged on the upper left and right sides of the furnace and on the lower left and right sides of the furnace.

In addition, multiple temperature sensors A1, A2, B1, B2 are arranged near each heater 15 (15A, 15B, 15C, 15D) to detect the temperature in the atmosphere of the vacuum heat treatment furnace 12 (furnace temperature). In the example of FIG. 2, temperature sensor A1 is arranged near heater 15A on the upper left side of the furnace, temperature sensor A2 is arranged near heater 15B on the upper right side of the furnace, temperature sensor B1 is arranged near heater 15C on the lower left side of the furnace, and temperature sensor B2 is arranged near heater 15D on the lower right side of the furnace.

In this embodiment, the temperature sensors A1, A2, B1, and B2 are, for example, thermocouples whose electromotive force increases with fluctuations in their internal resistance, but this is not limited to this and, for example, resistance temperature detectors can also be used.

The four control loops 13 consist of a first zone upper control loop 13A, a second zone upper control loop 13B, a first zone lower control loop 13C, and a second zone lower control loop 13D.

The first zone upper control loop 13A, the second zone upper control loop 13B, the first zone lower control loop 13C, and the second zone lower control loop 13D are each configured with a PID controller 13a and an SCR (thyristor) 13b to control the temperature inside the vacuum heat treatment furnace 12 to a target temperature so that the temperature distribution inside the furnace for each lot of batch processing is approximately uniform, for example.

In the first zone upper control loop 13A, the measurement value (temperature data) of the temperature sensor A1 and the upper furnace temperature set value are input to the PID controller 13a, which outputs an operation amount (0 to 100%) according to the difference between them to the SCR 13b for drive control, and the SCR 13b controls the heater 15A on/off.

Similarly, in the second zone upper control loop 13B, the measured value of the temperature sensor A2 and the upper furnace temperature set value are input to the PID controller 13a, which outputs an operation amount (0 to 100%) according to the difference between them to the SCR 13b for drive control, and the SCR 13b controls the heater 15B on/off.

In addition, in the first zone lower control loop 13C, the measured value of the temperature sensor B1 and the upper furnace temperature set value are input to the PID controller 13a, and the PID controller 13a outputs an operation amount (0 to 100%) according to the difference between them to the SCR 13b for drive control, and the SCR 13b controls the heater 15C on/off.

Furthermore, in the second zone lower control loop 13D, the measured value of the temperature sensor B2 and the upper furnace temperature set value are input to the PID controller 13a, and the PID controller 13a outputs an operation amount (0 to 100%) according to the difference between them to the SCR 13b for drive control, and the SCR 13b controls the heater 15D on/off.

The temperature sensor anomaly determination device according to this embodiment has the function of determining which of the multiple temperature sensors (including measurement system 11) is abnormal by examining the difference in the magnitude of the variance (measurement variation) of the measured values of the multiple temperature sensors in the measurement system (in the example of FIG. 2, the four temperature sensors A1, A2, B1, and B2 in measurement system 11) and alerting the operator.

As shown in FIG. 1, the temperature sensor anomaly determination device 1 is configured with a data accumulator 2, a verification device 3, and a sensor warning determiner 4 to realize the above functions.

The data accumulator 2 is composed of a data storage memory that accumulates the measurement values for each of the temperature sensors A1, A2, B1, and B2, and constantly accumulates and stores the most recent 10 sample measurement values (temperature data) from each of the temperature sensors A1, A2, B1, and B2 as reference samples.

The measurement values stored in the data accumulator 2 are, for example, the measurement values of each of the temperature sensors A1, A2, B1, and B2 for one lot (predetermined time) of batch processing. Note that the number of reference samples stored in the data accumulator 2 is not limited to the measurement values of 10 samples, and can be changed as appropriate.

The verifier 3 verifies the difference in the magnitude of variance of the measured values of the temperature sensors A1, A2, B1, and B2 stored in the data accumulator 2, and is composed of a first verifier 3A and a second verifier 3B. The first verifier 3A is composed of, for example, a Bartlett verifier.

The Bartlett test by the first tester 3A is a method for testing whether the variances of all temperature sensors A1, A2, B1, and B2 are equal (null hypothesis) or the variances of all temperature sensors A1, A2, B1, and B2 are different (alternative hypothesis) based on a comparison between the test statistic and the comparison reference value, and the test is performed according to steps 1 to 4 below. Note that the following explanation will be given using an example of four temperature sensors A1, A2, B1, and B2.

Step 1: Calculate each variance Calculate the variances of the temperature sensors A1, A2, B1, and B2. Here, the number of samples n is set to 10.

From the above formula (1), V _A1 =S _A1 /(n-1) =S _A1 /9.

Similarly,
V _A2 = S _A2 / (n-1) = S _A2 /9
V _B1 = S _B1 / (n-1) = S _B1 /9
V _B2 = S _B2 / (n-1) = S _B2 /9

Here, S _A1 is the sum of squares of the samples from temperature sensor A1 (the sum of squares of each measurement value minus the average value), S _A2 is the sum of squares of the samples from temperature sensor A2 (the sum of squares of each measurement value minus the average value), S _B1 is the sum of squares of the samples from temperature sensor B1 (the sum of squares of each measurement value minus the average value), S _B2 is the sum of squares of the samples from temperature sensor B2 (the sum of squares of each measurement value minus the average value), V _A1 is the variance of the samples from temperature sensor A1, V _A2 is the variance of the samples from temperature sensor A2, V _B1 is the variance of the samples from temperature sensor B1, and V _B2 is the variance of the samples from temperature sensor B2.

Step 2: Calculate variance Calculate the estimated value of V based on the following formula (2): V is the average of the variances of the samples, V _i is the variance of each sample, φ _i is the degree of freedom of each temperature sensor (number of samples - 1), and φ _T is the sum of the degrees of freedom.

Here, _φT is expressed by the following formula (3). Since the number of samples n is 10, V is calculated by the following formula (4).

In addition, _φT is calculated by the following formula (5).

Step 3: Calculation of test statistic b Bartlett's test statistic b is calculated using the following formula (6).

The coefficient c of the test statistic in equation (6) is expressed by the following equation (7).

Here, the number of groups k is 4 and the number of samples n is 10, so c is calculated as follows:

c=1+{1/3(4-1)}{4×(1/10-1)-(1/36)}=1+(1/9){(16/36)-(1/36)} =1+(5/3×36)=113/108

The Bartlett test statistic b is calculated using the following formula (8).

Step 4: Testing Bartlett's test is a type of hypothesis testing, and outputs a determination result of whether the null hypothesis or alternative hypothesis below is established based on a comparison between the test statistic and the comparison standard value.

The null hypothesis (H ₀ ): b<x ² (k−1,α) is not significant, ie, the variances of all the sensors are equal.
The alternative hypothesis (H ₁ ): b≧x ² (k−1,α) is significant, which means that the variances of all the sensors are different.
In this embodiment, if b≧x ² (3, 0.05), it is determined that the significance level is significant and the population variances of the temperature sensors A1, A2, B1, and B2 are not uniform.

Here, ^x2 (k-1,α) is the comparison standard value for the population variance test, k is the number of groups (individually, four groups of temperature sensors A1, A2, B1, and B2), and α is the significance level (generally 0.05). The rejection region based on the number of groups k is as shown in Table 1 below.

When the first tester 3A determines that the population variances of the temperature sensors A1, A2, B1, and B2 are uniform through the above-mentioned test, it outputs a test result signal of "0." When the first tester 3A determines that the population variances of the temperature sensors A1, A2, B1, and B2 are not uniform, it outputs a test result signal of "1."

The second verifier 3B calculates the variance of each of the temperature sensors A1, A2, B1, and B2, and verifies whether the smallest variance is different from the other variances. It is, for example, configured as a Hartley verifier.

The Hartley test by the second tester 3B is a method to detect when the variance of the temperature sensors A1, A2, B1, and B2 is smaller by one, and the test is performed according to steps 1 to 3 below. Note that here, the case of four temperature sensors A1, A2, B1, and B2 will be explained as an example.

Step 1: Calculate each variance Calculate the variance of temperature sensors A1, A2, B1, and B2. Here, the number of samples n is set to 10. When calculated using the same formula as Bartlett's test, V _A1 = S _A1 /(n-1) = S _A1 /9.

Similarly,
V _A2 = S _A2 / (n-1) = S _A2 /9
V _B1 = S _B1 / (n-1) = S _B1 /9
V _B2 = S _B2 / (n-1) = S _B2 /9

Step 2: Calculation of the test statistic h The test statistic h for performing the comparison test is calculated based on the following formula: where _Vmax is the maximum variance of the samples obtained by the temperature sensors A1, A2, B1, and B2, and _Vmin is the minimum variance of the samples obtained by the temperature sensors A1, A2, B1, and B2.
V _max = max (V _A1 , V _A2 , V _B1 , V _B2 )
V _min = min (V _A1 , V _A2 , V _B1 , V _B2 )
h = _Vmax / _Vmin

Step 3: Test If h ≥ F _max (k, φ: α), it is determined that the significance level is significant and the population variances of the temperature sensors are not uniform, where k is the number of groups (here, four groups: temperature sensors A1, A2, B1, and B2), φ is the degree of freedom for the number of samples (number of samples - 1), and F _max (k, φ: α) is the comparison standard value obtained from the variance ratio test table.
Since the number of groups k is 4 and the number of samples n is 10, the test statistic h≧F _max (k, φ:α)=F _max (4, 9: 0.05)=6.31.

The rejection region based on the number of groups k is as shown in Table 2 below.

If the second tester 3B determines through the above-mentioned test that the population variances of the temperature sensors A1, A2, B1, and B2 are uniform, it outputs a test result signal of "0." If it determines that the population variances of the temperature sensors A1, A2, B1, and B2 are not uniform, it outputs a test result signal of "1."

When the sensor warning determiner 4 receives a test result signal "1" from at least one of the first and second testers 3A and 3B, it determines that the variation of one of the multiple temperature sensors A1, A2, B1, and B2 is abnormal compared to the other multiple temperature sensors, and issues a warning to the operator, for example by sound or display.

Next, we will explain an example of testing using specific measurement values from the four temperature sensors A1, A2, B1, and B2.

Now, assume that the measurement values of temperature sensors A1, A2, B1, and B2 for each lot are obtained as shown in Table 3 below.

In the first tester 3A, when the Bartlett test is applied, φ _A1 = φ _A2 = φ _B1 = φ _B2 = n-1 = 9, V _A1 = S _A1 / (n-1) = S _A1 / 9, V _A2 = S _A2 / (n-1) = S _A2 / 9, V _B1 = S _B1 / (n-1) = S _B1 / 9, V _B2 = S _B2 / (n-1) = S _B2 / 9, and φ _T = φ _A1 + φ _A2 + φ _B1 + φ _B2 = 36, so the average V of the variance of the samples is calculated using the following formula (9), and the coefficient c for calculating the test statistic is calculated using the following formula (10).

The test statistic b is given by the following formula (11).

And, x ² (k-1, α) = x ² (3, 0.05) = 7.815, and b = 7.132 < 7.815, so it is not significant.

Therefore, it cannot be said that the population variances of the temperature sensors A1, A2, B1, and B2 are not uniform. In other words, Bartlett's test shows that there are no abnormalities in the temperature sensors A1, A2, B1, and B2.

Next, the second tester 3B performs a Hartley test.

Since V _max =4.46 and V _min =0.70, the test statistic h =V _max /V _min =4.46/0.70 =6.37.

Moreover, with k=4, φ=10-1=9, and φ=0.05, from the F _max table of the numerical table, F _max (k, φ:α) = F _max (4, 9:0.05) = 6.31, and h = 6.37 > 6.31, which is significant.

Therefore, it can be said that the population variance is not uniform. In other words, in the Hartley test, there are abnormalities in each of the temperature sensors A1, A2, B1, and B2.

From the above, the results of Bartlett's test and Hartley's test show that temperature sensor B2 has a small population variance, while temperature sensors A1, A2, and B1 have large variances, which means that there is an abnormality in the temperature sensors.

In the above embodiment, the Bartlett tester is used as the first tester 3A. However, instead of the Bartlett tester, the first tester 3A can be replaced with a Cochran tester that calculates the variance of each of the temperature sensors A1, A2, B1, and B2 and tests whether the largest variance is different from the other variances.

In addition, in the above-described embodiment, an example was described in which the temperature inside the vacuum heat treatment furnace 12 in the measurement system 11 is detected by four temperature sensors A1, A2, B1, and B2, but the number of measurement systems and temperature sensors is not limited.

Furthermore, in the above-described embodiment, the components of the temperature sensor anomaly determination device 1 (data accumulator 2, detector 3 (first detector 3A, second detector 3B), and sensor warning determiner 4) may be configured as a computer equipped with an arithmetic processing device, a storage device, etc., and the processing of each component may be executed by a program.

In this way, according to the above-described embodiment, it is possible to predict abnormalities in the temperature sensor using the most recent measurement value output by the temperature sensor itself, without the need for dedicated devices or parameter management as in the conventional technology.

The above describes the best mode of the temperature sensor anomaly determination device, temperature sensor anomaly determination method, and temperature sensor anomaly determination program according to the present invention, but the present invention is not limited to the description and drawings of this mode. In other words, it goes without saying that all other modes, examples, and operational techniques made by those skilled in the art based on this mode are included in the scope of the present invention.

REFERENCE SIGNS LIST 1 Temperature sensor abnormality determination device 2 Data accumulator 3 Verifier 3A First verifying device 3B Second verifying device 4 Sensor warning determination device 11 Measurement system 12 Vacuum heat treatment furnace 13 Control loop 13A First zone upper control loop 13B Second zone upper control loop 13C First zone lower control loop 13D Second zone lower control loop 13a PID controller 13b SCR (thyristor)
14 Vacuum pump 15 (15A, 15B, 15C, 15D) Heater A1, A2, B1, B2 Temperature sensor

Claims (6)

A temperature sensor anomaly determination device for determining anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere to be measured, comprising:
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a verifier that verifies a difference in the magnitude of variance of the measurement values for each of the temperature sensors stored in the data accumulator;
a sensor warning determiner for determining whether or not there is a temperature sensor that issues a warning about an abnormality among the plurality of temperature sensors based on a test result of the tester. A temperature sensor anomaly determination device for determining anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere to be measured, comprising:
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a Bartlett tester that calculates an average of the variances of the samples of the measured values stored in the data storage device from the degrees of freedom of the temperature sensors and the sum of the degrees of freedom, calculates a test statistic based on the calculated average of the variances of the samples and a coefficient for calculating a test statistic, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors and a significance level;
a Hartley tester that calculates a test statistic based on the maximum and minimum variances of the samples of the measurement values of the plurality of temperature sensors stored in the data storage device, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors, the number of samples, and a significance level;
a sensor warning determiner that determines whether or not there is a temperature sensor that warns of an abnormality among the plurality of temperature sensors based on the test results of the Bartlett tester and the Hartley tester. A temperature sensor anomaly determination method using a temperature sensor anomaly determination device that determines anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere of a measurement target, comprising:
a step of storing, for each of the temperature sensors, a plurality of latest sample measurement values for each of the temperature sensors at each predetermined time interval by a data storage device included in the temperature sensor abnormality determination device;
a step of verifying a difference in the magnitude of variance of the measurement values stored in the data storage device for each of the temperature sensors by a verifying device included in the temperature sensor anomaly determination device;
A temperature sensor anomaly determination method comprising: a step of determining, by a sensor warning determiner provided in the temperature sensor anomaly determination device, whether or not there is a temperature sensor among the plurality of temperature sensors that warns of an anomaly based on the inspection results of the inspection device. A temperature sensor anomaly determination method using a temperature sensor anomaly determination device that determines anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere of a measurement target, comprising:
a step of storing, for each of the temperature sensors, a plurality of latest sample measurement values for each of the temperature sensors at each predetermined time interval by a data storage device included in the temperature sensor abnormality determination device;
a step of calculating an average of the variances of the samples of the measurement values stored in the data storage device from the degrees of freedom of the temperature sensors and the sum of the degrees of freedom using a Bartlett tester provided in the temperature sensor anomaly determination device, calculating a test statistic based on the calculated average of the variances of the samples and a coefficient for calculating a test statistic, and testing whether the variances of the multiple temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors and a significance level;
a step of calculating a test statistic based on the maximum variance and minimum variance of the sampled measured values of the plurality of temperature sensors stored in the data accumulator using a Hartley tester included in the temperature sensor anomaly determination device, and testing whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors, the number of samples, and a significance level;
a step of determining, by a sensor warning determiner provided in the temperature sensor abnormality determination device, whether or not there is a temperature sensor among the plurality of temperature sensors that warns of an abnormality based on the inspection results of the Bartlett inspector and the Hartley inspector. A temperature sensor anomaly determination program for determining anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere of a measurement target, comprising:
Computer,
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a verifier that verifies a difference in the magnitude of variance of the measurement values for each of the temperature sensors stored in the data accumulator;
a temperature sensor abnormality determination program for causing the tester to function as a sensor warning determiner that determines whether or not there is a temperature sensor that issues an abnormality warning among the plurality of temperature sensors based on the test result of the tester. A temperature sensor anomaly determination program for determining anomalies in a plurality of temperature sensors that measure temperatures at substantially the same locations in an atmosphere of a measurement target, comprising:
Computer,
a data accumulator for accumulating a plurality of latest sample measurements of each of the temperature sensors at each predetermined time period;
a Bartlett tester that calculates an average of the variances of the samples of the measured values stored in the data storage device from the degrees of freedom of the temperature sensors and the sum of the degrees of freedom, calculates a test statistic based on the calculated average of the variances of the samples and a coefficient for calculating a test statistic, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors and a significance level;
a Hartley tester that calculates a test statistic based on the maximum and minimum variances of the samples of the measurement values of the plurality of temperature sensors stored in the data storage device, and tests whether the variances of the plurality of temperature sensors are uniform by comparing the test statistic with a comparison reference value based on the number of the temperature sensors, the number of samples, and a significance level;
a temperature sensor anomaly determination program for causing the program to function as a sensor warning determiner that determines whether or not there is a temperature sensor that warns of an anomaly among the plurality of temperature sensors based on the test results of the Bartlett tester and the Hartley tester.

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