JP7525846B2 - Flux transformer design support method, flux transformer design support device, flux transformer design support program, and sensor module - Google Patents

Description

The present invention relates to a flux transformer design support method, a flux transformer design support device, a flux transformer design support program, and a sensor module.

In one magnetic sensor manufacturing method, the number of turns of the input coil (secondary coil) of a flux transformer for a superconducting quantum interference device (SQUID) is selected so that the effective flux capture area is 85% or more (see, for example, Patent Document 1).

On the other hand, one magnetic field measuring device performs magnetic measurements using optically detected magnetic resonance (ODMR), which utilizes the electron spin resonance of a sensing material such as a diamond structure containing nitrogen and lattice defects (NVC: Nitrogen Vacancy Center) (see, for example, Patent Document 2).

Japanese Patent Application Publication No. 8-75834 JP 2020-8298 A

In general, when the frequency of the magnetic field to be measured is low, the magnetic field transmission efficiency of the flux transformer is low. For this reason, it is difficult to easily design a flux transformer for use in low-frequency magnetic field measurement using a sensing component that uses a color center such as NVC. For example, in experiments, it is necessary to search for a flux transformer configuration that provides good transmission efficiency by changing the number of coil turns and taking actual measurements, which takes a lot of time and effort.

The present invention has been made in consideration of the above problems, and aims to provide a flux transformer design support method, a flux transformer design support device, a flux transformer design support program, and a sensor module that enable efficient design of flux transformers for sensing components that use color centers.

The flux transformer design support method according to the present invention is a flux transformer design support method that supports the design of a flux transformer for a sensing member that uses a color center, and includes a parameter value designation step of designing the values of design parameters of the flux transformer, and a transmission efficiency calculation step of calculating the transmission efficiency corresponding to the design parameter values according to a predetermined calculation formula. In the transmission efficiency calculation step, the transmission efficiency is calculated based on (a) the electromotive force of the primary coil, which takes into account the coil diameter for each turn of the primary coil of the flux transformer, and (b) the induced magnetic field of the secondary coil, which takes into account the coil diameter for each winding layer of the secondary coil of the flux transformer.

The flux transformer design support device according to the present invention executes the above-mentioned flux transformer design support method.

The flux transformer program of the present invention causes a computer to execute the above-mentioned flux transformer design support method.

The sensor module according to the present invention comprises a sensing member, a flux transformer obtained using any one of the above-mentioned flux transformer design support method, the above-mentioned flux transformer design support device, and the above-mentioned flux transformer program, which senses a measured magnetic field at a predetermined measurement position and applies to the sensing member an applied magnetic field corresponding to the measured magnetic field sensed at the measurement position, a detection device which detects a physical event corresponding to the applied magnetic field from the sensing member, a measurement control unit which specifies a detection value of the physical event detected by the detection device, and a calculation unit which calculates the measured magnetic field at the measurement position based on the detection value.

The present invention provides a flux transformer design support method, a flux transformer design support device, a flux transformer design support program, and a sensor module that enable efficient design of a flux transformer for a sensing component that utilizes a color center.

FIG. 1 is a block diagram showing a configuration of a flux transformer design support device according to a first embodiment of the present invention. FIG. 2 is a block diagram for explaining a flux transformer as a design target in the flux transformer design support device shown in FIG. FIG. 3 is a cross-sectional view for explaining the configuration of the primary coil 111 or the secondary coil 112 in FIG. FIG. 4 is a diagram (1/5) for explaining the calculation formula used in the transmission efficiency evaluation unit 22 in FIG. FIG. 5 is a diagram (2/5) for explaining the calculation formula used in the transmission efficiency evaluation unit 22 in FIG. FIG. 6 is a diagram (3/5) for explaining the calculation formula used in the transmission efficiency evaluation unit 22 in FIG. FIG. 7 is a diagram (4/5) for explaining the calculation formula used in the transmission efficiency evaluation unit 22 in FIG. FIG. 8 is a diagram (5/5) for explaining the calculation formula used in the transmission efficiency evaluation unit 22 in FIG. FIG. 9 is a flowchart illustrating the operation of the flux transformer design support device shown in FIG. FIG. 10 is a diagram showing an example of a calculation result of the transmission efficiency BR. FIG. 11 is a diagram showing parameter values used in the calculation of the transmission efficiency BR shown in FIG. FIG. 12 is a diagram showing another example of the calculation result of the transmission efficiency BR. FIG. 13 is a diagram showing parameter values used in the calculation of the transmission efficiency BR shown in FIG. FIG. 14 is a diagram illustrating the frequency characteristics of the transmission efficiency BR. FIG. 15 is a diagram showing parameter values used in the calculation of the transmission efficiency BR shown in FIG. FIG. 16 is a block diagram showing a configuration of a sensor module according to the second embodiment of the present invention.

The following describes an embodiment of the present invention with reference to the drawings.

Embodiment 1.

Figure 1 is a block diagram showing the configuration of a flux transformer design support device according to a first embodiment of the present invention. The flux transformer design support device shown in Figure 1 is a device that supports the design of a flux transformer for a sensing component that uses a color center such as NVC.

Figure 2 is a block diagram that explains the flux transformer that is the design target in the flux transformer design support device shown in Figure 1.

As shown in FIG. 2, the flux transformer 101 transmits (transmits) the AC magnetic field of the measurement target 102 to the sensing device 103, and includes a primary coil 111, a secondary coil 112, and a conductive part 113. The flux transformer 101 to be designed is a flux transformer for a sensing member that uses a color center, and is used at room temperature.

The primary coil 111 is a coil that detects the AC magnetic field of the measurement target 102 and induces a voltage corresponding to the detected AC magnetic field. In this embodiment, the primary coil 111 is a cylindrical finite-length solenoid coil with a rod-shaped (e.g., cylindrical) magnetic core.

The secondary coil 112 is a coil that generates a magnetic field according to the current flowing through the conductive part 113 by the voltage induced in the primary coil 111, and applies the magnetic field to the sensing member of the sensing device 103. In this embodiment, the secondary coil 112 is a cylindrical finite-length solenoid coil that does not have a magnetic core. The sensing member of the sensing device 103 may be disposed in the hollow part of the secondary coil 112.

Figure 3 is a cross-sectional view explaining the configuration of the primary coil 111 or the secondary coil 112 in Figure 2.

In this embodiment, the primary coil 111 or the secondary coil 112 is a cylindrical finite-length solenoid coil, and as shown in FIG. 3, for example, a conductor is wound in a single direction to form multiple layers (number of layers M ₁ , M ₂ ) along the radial direction of the coil.

The conductive part 113 is a pair of electric wires (copper wires in this case) such as a Litz wire or a coaxial cable, and electrically connects the primary coil 111 and the secondary coil 112 to each other so as to form a closed circuit between the primary coil 111 and the secondary coil 112. Note that the conductive part 113 may include a passive element such as a coupling capacitor in addition to the electric wires.

In this way, since the AC magnetic field of the measurement object 102 is transmitted to the sensing device 103 by the flux transformer 101, the sensing device 103 may be arranged at a distance from the measurement object 102. Also, the sensing device 103 and the secondary coil 112 may be fixed, and the primary coil 111 may be scanned in a predetermined area.

The flux transformer design support device shown in FIG. 1 includes a storage device 1, a communication device 2, a processor 3, a display device 4, and an input device 5.

The storage device 1 is a non-volatile storage device such as a flash memory or a hard disk, and stores various data and programs. The storage device 1 stores a flux transformer design support program 11. The flux transformer design support program 11 may be recorded on a portable, non-transitory recording medium, and may be read from such a recording medium and installed in the storage device 1.

The communication device 2 is a device capable of data communication, such as a network interface, a peripheral device interface, or a modem, and performs data communication with other devices as necessary.

The arithmetic processing device 3 is a computer equipped with a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc., and operates as various processing units by loading programs from the ROM, storage device 1, etc. into the RAM and executing them on the CPU. Here, the arithmetic processing device 3 operates as a parameter adjustment unit 21 and a transmission efficiency evaluation unit 22 by executing the flux transformer design support program 11.

The parameter adjustment unit 21 specifies the values of the design parameters of the flux transformer.

The design parameters include the average coil diameters (here, radii) r _1av and r _2av , the unwound wire lengths l _ex,1 and l _ex,2 , the number of turns N ₁ and N ₂ , the wire diameters φ 1 and φ ₂ , and the wire electrical resistivity ρ of the primary coil ₁₁₁ and the secondary coil 112 .

The design parameters include the magnetic core cross-sectional area _Sm , the magnetic core relative permeability _μr , the magnetic core length (length in the coil axial direction) _lm , the effective magnetic core radius _rm , etc., of the magnetic core of the primary coil 111. Note that when _lm is longer than the axial length of the winding portion of the primary coil 111, the coil length _l1 is set to be equal to _lm .

The design parameters also include a coil radius r ₁ (i) for each turn i (1≦i≦N ₁ ) of the magnetic core of the primary coil 111 .

Furthermore, the design parameters include the number of turns _n2 (j), coil length (length in the coil axial direction) _l2 (j), and coil radius _r2 (j) for each layer j (1≦j≦M2) of the magnetic core of the secondary coil 112, as well as the number of layers _M2 (here, _M2 > ₁ ).

Further design parameters include the frequency f of the alternating magnetic field to be measured.

The values of the design parameters may be specified by a user operation on the input device 5, by external data communication via the communication device 2, or automatically by a predetermined algorithm. For example, the parameter adjustment unit 21 may fix the values of some of the specified design parameters and automatically vary the values of the remaining design parameters within a predetermined range each time the transmission efficiency is calculated.

The transmission efficiency evaluation unit 22 calculates the transmission efficiency BR corresponding to the above-mentioned design parameter values according to a predetermined calculation formula.

Figures 4 to 8 are diagrams explaining the calculation formulas used by the transmission efficiency evaluation unit 22 in Figure 1.

Specifically, in accordance with the above-mentioned predetermined calculation formula, the transmission efficiency evaluation unit 22 calculates the transmission efficiency BR based on (a) the electromotive force V of the primary coil 111 taking into account the coil diameter r ₁ (i) for each winding i of the primary coil 111 of the flux transformer 101 individually, and (b) the induced magnetic field B ₂ of the secondary coil 112 taking into account the coil diameter r ₂ (j) for each winding layer j of the secondary coil 112 of the flux transformer 101 individually.

Specifically, the transmission efficiency BR is defined as the ratio of the induced magnetic field (magnetic flux density) _B2 to the applied magnetic field (magnetic flux density) _B0 to the primary coil 111, as shown in formula (1) of FIG. 4. The applied magnetic field _B0 is uniformly applied to the primary coil 111 including the magnetic core. The induced magnetic field _B2 is derived as shown in formula (2) of FIG. 4 for the current I conducted to the primary coil 111 and the secondary coil 112. The current I is conducted based on the electromotive force V of the primary coil 111, as shown in formula (3) of FIG. 4, and the electromotive force V of the primary coil 111 is derived as shown in formula (4) of FIG. 4.

In the expressions (1) to (4), μ ₀ is the magnetic permeability of a vacuum, and Z ₁ and Z ₂ are the impedances of the primary coil 111 and the secondary coil 112 .

Specifically, as shown in equations (1) to (3), the impedances _Z1 and _Z2 of the primary coil 111 and the secondary coil 112 used in calculating the transmission efficiency BR are derived as shown in equations (5) and (6) in FIG.

Impedances Z ₁ and Z ₂ are derived from resistances R ₁ and R ₂ and inductances L ₁ and L ₂ of the primary coil 111 and the secondary coil 112, and the resistances R ₁ and R ₂ and the inductance L ₁ are derived taking the following items into consideration.

In the above-mentioned predetermined calculation formula, as shown in formulas (7) and (8) in FIG. 5, the transmission efficiency BR is calculated based on the values of the resistances R1 and R2 taking into account the lengths _lex,1 and lex _,2 of the non-winding portions (the portions of the wire that are not wound, such as the lead-out portions that constitute the conductive portion 113) of the primary coil ₁₁₁ and the secondary coil ₁₁₂ .

Furthermore, in the above-mentioned predetermined calculation formula, as shown in formulas (7) and (8) in Fig. 5, the transmission efficiency BR is calculated based on the values of the resistances _R1 and _R2 taking into account the skin effect of the windings (i.e., skin depth δ) for the primary coil 111 and the secondary coil 112. Here, the skin depth δ is derived as shown in formula (11) in Fig. 6.

Furthermore, in the above-mentioned predetermined calculation formula, as shown in formulas (9) and (10) in Fig. 5, the transmission efficiency BR is calculated for the primary coil 111 and the secondary coil 112 based on the values of inductances _L1 and _L2 taking into account the Nagaoka coefficients _A1 and _A2 . Here, the Nagaoka coefficients _A1 and _A2 are derived as shown in formulas (12) to (15) in Fig. 6. Note that _E1 ( _k1 ), _E1 ( _k2 ), _E2 ( _k1 ), and _E2 ( _k2 ) in formulas (12) and (13) are the first kind complete elliptic integrals and the second kind complete elliptic integrals of _k1 and _k2 .

Furthermore, in the above-mentioned predetermined calculation formula, as shown in formulas (9) and (10) in Fig. 5, the transmission efficiency BR of the primary coil 111 is calculated based on the value of inductance _L1 taking into account the effective relative permeability _μa of the magnetic core. Here, the effective relative permeability _μa is derived as shown in formulas (16) to (19) in Fig. 7. Note that _N0 in formula (16) is the demagnetizing factor of the center of the magnetic core, and _Nav is the average demagnetizing factor of the magnetic core.

In addition, in the above-mentioned predetermined calculation formula, as shown in formulas (1) and (4) in FIG. 1, for the primary coil 111, the transmission efficiency BR is calculated based on the electromotive force V taking into account the effective relative permeability _μa of the magnetic core.

Furthermore, in the above-mentioned predetermined calculation formula, as shown in formulas (1) and (4) in FIG. 1, the transmission efficiency BR is calculated for the primary coil 111 based on the electromotive force V taking into account the effective magnetic core cross-sectional area S _a of the magnetic core. Here, the effective magnetic core cross-sectional area S _a is derived taking into account the skin effect (skin depth s of the magnetic core) of the magnetic core as shown in formulas (20) to (22) in FIG. 8. In addition, since the magnetic core is a rod core, when its relative permeability becomes a certain value (for example, 1000) or more, the effective permeability becomes almost the same due to the influence of the demagnetizing field factor. In addition, in formulas (21) and (22), ε ₀ is the dielectric constant of a vacuum, κ _m is the relative dielectric constant of the magnetic core, and ρ _m is the electrical resistivity of the magnetic core.

Next, the operation of the above-mentioned flux transformer design support device (i.e., an example of a flux transformer design support method) will be described. Figure 9 is a flowchart explaining the operation of the flux transformer design support device shown in Figure 1.

First, the parameter adjustment unit 21 identifies the values of the above-mentioned design parameters (specifically, a set of values of a predetermined number of design parameters) specified by a user operation or the like (step S1).

Next, the transmission efficiency evaluation unit 22 uses the identified design parameter values to calculate the transmission efficiency BR according to the above-mentioned formula (step S2).

The transmission efficiency evaluation unit 22 determines whether or not a termination condition for the parameter adjustment is satisfied (step S3). This termination condition is set in advance, and may be, for example, (a) the transmission efficiency BR exceeds a predetermined threshold value, (b) all calculations of the transmission efficiency BR for multiple value sets of pre-specified design parameters are completed, or (c) a user operation for termination is detected after the calculation results of the transmission efficiency BR are notified to the user.

When the end condition for parameter adjustment is met, the transmission efficiency evaluation unit 22 outputs the calculation result of the transmission efficiency BR (i.e., the value of the transmission efficiency BR and the set of values of the corresponding design parameters, which are associated with each other) by displaying it on the display device 4, storing it as a data file in the storage device 1, or transmitting it to the outside via the communication device 2 (step S4).

In this way, by adjusting the set of design parameter values and repeatedly calculating the value of transmission efficiency BR, a set of design parameter values that results in a good value of transmission efficiency BR can be obtained.

As described above, according to the first embodiment, the parameter adjustment unit 21 specifies the design parameter values of the flux transformer, and the transmission efficiency evaluation unit 22 calculates the transmission efficiency BR corresponding to the design parameter values according to a predetermined calculation formula. In particular, the transmission efficiency evaluation unit 22 calculates the transmission efficiency BR based on (a) the electromotive force of the primary coil, taking into account the coil diameter for each turn of the primary coil of the flux transformer, and (b) the induced magnetic field of the secondary coil, taking into account the coil diameter for each winding layer of the secondary coil of the flux transformer.

This makes it possible to efficiently design flux transformers for sensing elements using color centers (i.e., derive a suitable set of design parameters) through calculations without performing experimental measurements.

FIG. 10 is a diagram showing an example of a calculation result of the transmission efficiency BR, and FIG. 11 is a diagram showing parameter values used in the calculation of the transmission efficiency BR shown in FIG. 10. FIG. 12 is a diagram showing another example of a calculation result of the transmission efficiency BR, and FIG. 13 is a diagram showing parameter values used in the calculation of the transmission efficiency BR shown in FIG. 12. FIG. 10 shows a calculation result for each number of turns N ₁ and N ₂ when the frequency f is 200 Hz, the coil diameter of the primary coil is 10 mm, and the coil diameter of the secondary coil is 5 mm. In the calculation shown in FIG. 10, the parameter values shown in FIG. 11 are used. FIG. 12 shows a calculation result for each number of turns N ₁ and N ₂ when the frequency f is 200 Hz, the coil diameter of the primary coil is 5 mm, and the coil diameter of the secondary coil is 2.5 mm. In the calculation shown in FIG. 12, the parameter values shown in FIG. 13 are used.

Figure 14 is a diagram explaining the frequency characteristics of the transmission efficiency BR, and Figure 15 is a diagram showing the parameter values used in calculating the transmission efficiency BR shown in Figure 14. For example, under the conditions shown in Figure 15, as shown in Figure 14, if the primary coil is a cored coil, the transmission efficiency BR is higher than that of a non-cored coil. However, even in the case of a cored coil, the transmission efficiency BR is low for low-frequency magnetic fields. Therefore, in designing a flux transformer, it is important to obtain a configuration of the primary and secondary coils (a set of design parameters such as dimensions) that can be effectively used for transmitting a magnetic field to a sensing member having a color center such as an ODMR with a high transmission efficiency BR. By using the above-mentioned flux transformer design support method, the user does not need to measure the transmission efficiency BR for each set of design parameters by experiments, etc., and can reduce the effort and time required to design a flux transformer.

Embodiment 2.

Figure 16 is a block diagram showing the configuration of a sensor module according to embodiment 2 of the present invention. The sensor module shown in Figure 16 includes a magnetic sensor unit 210, a processor 211, and a high-frequency power supply 212.

The magnetic sensor unit 210 detects a measured magnetic field (e.g., strength, direction, etc.) at a predetermined position (e.g., on or above the surface of the object to be inspected). The measured magnetic field may be an alternating magnetic field of a single frequency, or an alternating magnetic field of a predetermined period having multiple frequency components.

In this embodiment, the magnetic sensor unit 210 includes a magnetic resonance member 201, a high-frequency magnetic field generator 202, a static magnetic field generating unit 213, and a flux transformer 214.

The magnetic resonance member 201 is the sensing member described above, and here, it is a member that has a crystal structure and is capable of quantum manipulation of electron spins (based on Rabi oscillations) with microwaves of different frequencies depending on the arrangement direction of defects and impurities in the crystal lattice. In this embodiment, the magnetic resonance member 201 is a light-detecting magnetic resonance member having a plurality (i.e., an ensemble) of specific color centers. The specific color centers have energy levels that can be Zeeman split, and can take a plurality of directions (i.e., the arrangement directions described above) in which the shift width of the energy level during Zeeman splitting is different from one another. Here, the magnetic resonance member 201 is a plate material such as diamond that includes a plurality of NV (Nitrogen Vacancy) centers as a single type of specific color center, and is fixed to the support member 201a.

The high-frequency magnetic field generator 202 applies microwaves, which will be described later, to the magnetic resonance member 201. Here, the high-frequency power supply 212 generates a current of the microwaves and conducts it to the high-frequency magnetic field generator 202. The high-frequency magnetic field generator 2 is, for example, a type of coil, an LC resonator, a slit antenna, a rod-shaped antenna, or the like, or is a combination of a number of such devices.

The static magnetic field generating unit 213 also applies a static magnetic field (DC magnetic field) that Zeeman-splits the energy levels of multiple specific color centers (here, multiple NV centers) within the magnetic resonance member 1.

The flux transformer 214 is a flux transformer obtained using any of the flux transformer design support method, the flux transformer design support device, and the flux transformer program in embodiment 1, and senses the magnetic field to be measured at the measurement position and applies to the magnetic resonance member 201 an applied magnetic field corresponding to the magnetic field to be measured sensed at the measurement position.

In this embodiment, the magnetic sensor unit 210 includes an irradiation device 205 and a light receiving device 206 as detection devices that detect a physical event (here, fluorescence) corresponding to the above-mentioned applied magnetic field from the magnetic resonance member 201. The irradiation device 205 irradiates light (excitation light of a predetermined wavelength and measurement light of a predetermined wavelength) to the magnetic resonance member 201 as a light-detecting magnetic resonance member. The light receiving device 206 detects the fluorescence emitted from the magnetic resonance member 1 when the measurement light is irradiated. Note that, although this physical event is detected optically here, it may be a change in electrical characteristics (such as a change in the resistance value of the magnetic resonance member 1) or may be detected electrically.

The arithmetic processing device 211 includes, for example, a computer, and executes a program on the computer to operate as various processing units. In this embodiment, the arithmetic processing device 211 stores the detected optical or electrical signal data in a storage device (such as a memory) not shown, and performs control and calculation operations as the measurement control unit 221 and the calculation unit 222.

The measurement control unit 221 controls the high-frequency power supply 212 and identifies the detection values of physical events (here, the intensity of fluorescence) detected by the above-mentioned detection devices (here, the irradiation device 205 and the light receiving device 206) corresponding to the above-mentioned multiple measurement positions. In this embodiment, the measurement control unit 221 controls the high-frequency power supply 212 and the irradiation device 205 according to a predetermined measurement sequence based on the ODMR, and identifies the amount of detected fluorescence light detected by the light receiving device 206.

The calculation unit 222 calculates the measured magnetic field at the above-mentioned multiple measurement positions based on the detection values obtained by the measurement control unit 221 and stored in the storage device.

As described above, the sensor module according to the second embodiment uses a flux transformer 214 designed as in the first embodiment.

It should be noted that various changes and modifications to the above-described embodiments will be apparent to those skilled in the art. Such changes and modifications may be made without departing from the spirit and scope of the subject matter and without diminishing its intended advantages. In other words, such changes and modifications are intended to be included within the scope of the claims.

For example, in the above embodiment, the above-mentioned formula is a formula when the sensing member is disposed at the center of the hollow part of the secondary coil 103, and when the sensing member is disposed at another position (such as the outside of the secondary coil 103), a formula according to the position of the sensing member (specifically, the derivation formula of _B2 ) may be used. This makes it possible to calculate and evaluate the transmission efficiency in the same way as in the above-mentioned case.

In the first embodiment, the values of the resistances _R1 and _R2 may be calculated using the resistivity ρ(t) taking into account the temperature t. In that case, the temperature t of the flux transformer 101 (or its environment) is also set as the above-mentioned design parameter.

In addition, in the above embodiment 1, the primary coil 111 of the flux transformer 101 may be a differential coil.

The present invention can be applied, for example, to measuring low-frequency magnetic fields.

3. Processing unit (an example of a computer)
11 Flux transformer design support program 201 Magnetic resonance component (an example of a sensing component)
214 Flux transformer 205 Irradiation device (part of an example of a detection device)
206 Light receiving device (part of an example of a detection device)
221 Measurement control unit 222 Calculation unit

Claims (9)

A method for supporting the design of a flux transformer for a sensing member using a color center, comprising:
a parameter value specifying step of specifying values of design parameters of the flux transformer;
A transmission efficiency calculation step of calculating a transmission efficiency corresponding to the value of the design parameter according to a predetermined calculation formula,
In the transmission efficiency calculation step, the transmission efficiency is calculated based on (a) an electromotive force of the primary coil, taking into account a coil diameter for each turn of the primary coil of the flux transformer, and (b) an induced magnetic field of the secondary coil, taking into account a coil diameter for each winding layer of the secondary coil of the flux transformer;
A flux transformer design support method comprising: The flux transformer design support method according to claim 1, characterized in that in the transmission efficiency calculation step, the transmission efficiency is calculated based on resistance values that take into account the length of the non-winding parts of the primary coil and the secondary coil. The flux transformer design support method according to claim 1 or 2, characterized in that in the transmission efficiency calculation step, the transmission efficiency is calculated based on resistance values that take into account the skin effect of the windings for the primary coil and the secondary coil. the primary coil and the secondary coil are cylindrical solenoid coils,
In the transmission efficiency calculation step, the transmission efficiency is calculated based on an inductance value taking into account a Nagaoka coefficient for the primary coil and the secondary coil;
4. The flux transformer design support method according to claim 1, further comprising: The primary coil is a cored coil,
In the transmission efficiency calculation step, the transmission efficiency is calculated based on an inductance value taking into account an effective relative permeability of the primary coil;
5. The flux transformer design support method according to claim 1, further comprising: The calculation formula is: BR is the transmission efficiency, B2 is the induced magnetic field in the secondary coil, _B0 is the applied magnetic field in the primary coil, _f is the frequency of the applied magnetic field, _μ0 is the magnetic permeability of a vacuum, _N1 is the number of turns in the primary coil, _r1 (i) is the coil diameter of the i-th turn in the primary coil, S _a is the effective core cross-sectional area of the magnetic core of the primary coil, μ _a is the effective relative magnetic permeability of the magnetic core of the primary coil, _M2 is the number of layers in the secondary coil, _n2 (j) is the number of turns of the j-th layer in the secondary coil, _l2 (j) is the coil length of the j-th layer in the secondary coil, _r2 (j) is the coil diameter of the j-th layer in the secondary coil, _Z1 is the impedance of the primary coil, Z2 is the impedance of the secondary coil, _2. The flux transformer design support method according to claim 1, wherein the flux transformer design support method is expressed by the following equation:

A flux transformer design support device that executes the flux transformer design support method according to any one of claims 1 to 6. A flux transformer design support program that causes a computer to execute the flux transformer design support method according to any one of claims 1 to 6. A sensing member;
A flux transformer obtained by using any one of the flux transformer design support method according to claim 1, the flux transformer design support device according to claim 7, and the flux transformer design support program according to claim 8, which sense a measured magnetic field at a predetermined measurement position and apply an applied magnetic field corresponding to the measured magnetic field sensed at the measurement position to the sensing member; and
a detection device that detects a physical event corresponding to the applied magnetic field from the sensing member;
a measurement control unit that identifies a detection value of the physical event detected by the detection device;
A calculation unit that calculates the measured magnetic field at the measurement position based on the detection value;
A sensor module comprising:

Images