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JP7528405B2 - Atmospheric pressure low temperature plasma bubble liquid - Google Patents
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JP7528405B2 - Atmospheric pressure low temperature plasma bubble liquid - Google Patents

Atmospheric pressure low temperature plasma bubble liquid Download PDF

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JP7528405B2
JP7528405B2 JP2020161940A JP2020161940A JP7528405B2 JP 7528405 B2 JP7528405 B2 JP 7528405B2 JP 2020161940 A JP2020161940 A JP 2020161940A JP 2020161940 A JP2020161940 A JP 2020161940A JP 7528405 B2 JP7528405 B2 JP 7528405B2
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JP2022054748A (en
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崇 石塚
瑞生 塩島
保嗣 望月
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Sakata Inx Corp
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Description

本発明は、特定の原料ガスを、特定の条件でプラズマ化して得られた大気圧低温プラズマ含有ガスを微細な泡として液中に含む、大気圧低温プラズマバブル液に関する。
また、本発明は、特定の原料ガスを、特定の条件でプラズマ化して得られた大気圧低温プラズマ含有ガスを、バブル発生機を用いて液中に微細な泡として添加する、大気圧低温プラズマバブル液の製造方法に関する。
さらに、本発明は、特定の原料ガスを、特定の条件でプラズマ化して大気圧低温プラズマ含有ガスを製造するプラズマ含有ガス製造機、プラズマ含有ガスの温度を-25~100℃に保持するプラズマ含有ガス輸送路、及びバブル発生機を少なくとも備える、大気圧低温プラズマバブル液製造装置に関する。
The present invention relates to an atmospheric pressure low-temperature plasma bubble liquid, which contains atmospheric pressure low-temperature plasma-containing gas obtained by converting a specific raw material gas into plasma under specific conditions in the form of fine bubbles in the liquid.
The present invention also relates to a method for producing an atmospheric pressure low-temperature plasma bubble liquid, in which atmospheric pressure low-temperature plasma-containing gas obtained by plasmatizing a specific raw material gas under specific conditions is added to a liquid as fine bubbles using a bubble generator.
Furthermore, the present invention relates to an atmospheric pressure low-temperature plasma bubble liquid manufacturing apparatus comprising at least a plasma-containing gas manufacturing machine that produces atmospheric pressure low-temperature plasma-containing gas by plasmatizing a specific raw material gas under specific conditions, a plasma-containing gas transport path that maintains the temperature of the plasma-containing gas at -25 to 100°C, and a bubble generator.

直径が1mm未満の微細な気泡を含む液体は、微細な泡に起因する各種機能を発揮することから、多種多様な分野で注目され、多種多様な用途とすることが知られている。
また、プラズマ含有ガスを、多種多様な用途に使用することも知られている。
特許文献1~5には、プラズマ含有ガスを微細な泡として液中に含む、除菌機能や洗浄機能を有するプラズマバブル液が記載されている。
Liquids containing fine bubbles having a diameter of less than 1 mm have attracted attention in a wide variety of fields because of the various functions that are attributable to the fine bubbles, and are known to have a wide variety of applications.
It is also known to use plasma containing gases in a wide variety of applications.
Patent documents 1 to 5 describe plasma bubble liquids that contain plasma-containing gas in the form of fine bubbles in the liquid and have sterilizing and cleaning functions.

しかし、これらの特許文献には、「空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、圧力0.1~10気圧、原料ガス供給量0.001~100000L/min、及び電界強度1~1000kV/cm、の条件でプラズマ化して得られた温度-25~100℃の大気圧低温プラズマ含有ガス」を用いた微細な泡を用いてプラズマバブル液を形成することについて記載も示唆もされていない。 However, these patent documents do not state or suggest the formation of a plasma bubble liquid using fine bubbles made from "atmospheric pressure low-temperature plasma-containing gas at a temperature of -25 to 100°C obtained by plasmatizing at least one raw material gas selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor under conditions of a pressure of 0.1 to 10 atmospheres, a raw material gas supply rate of 0.001 to 100,000 L/min, and an electric field strength of 1 to 1,000 kV/cm."

特開2006-88115号公報JP 2006-88115 A 特開2008-178870号公報JP 2008-178870 A 特開2012-228644号公報JP 2012-228644 A 国際公開第2015/072461号International Publication No. 2015/072461 特開2016-203082号公報JP 2016-203082 A

本発明が解決しようとする課題は、汚染物質の分解機能(洗浄機能)、除菌機能等に優れた大気圧低温プラズマバブル液を提供することである。
また、汚染物質の分解機能(洗浄機能)、除菌機能等に優れた大気圧低温プラズマバブル液の製造方法を提供することである。
さらに、汚染物質の分解機能(洗浄機能)、除菌機能等に優れた大気圧低温プラズマバブル液の製造装置を提供することである。
The problem to be solved by the present invention is to provide an atmospheric pressure low-temperature plasma bubble liquid that has excellent pollutant decomposition (cleaning) and sterilization functions.
Another object of the present invention is to provide a method for producing an atmospheric pressure low-temperature plasma bubble liquid that has excellent pollutant decomposition (cleaning) and sterilization functions.
Furthermore, the present invention aims to provide an apparatus for producing atmospheric pressure low-temperature plasma bubble liquid that has excellent functions such as decomposing pollutants (cleaning function) and sterilizing functions.

本発明者らは、前記の課題を解決するために鋭意検討した結果、以下の発明を完成した。
[1] 空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、
圧力0.1~10気圧、
原料ガス供給量0.001~100000L/min、及び
電界強度1~1000kV/cm、
の条件でプラズマ化して得られた温度-25~100℃の大気圧低温プラズマ含有ガスを、液中に微細な泡として添加して得られる、大気圧低温プラズマバブル液。
[2] 前記温度が、-25~40℃である、[1]に記載の大気圧低温プラズマバブル液。
[3] 空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、
圧力0.1~10気圧、
原料ガス供給量0.001~100000L/min、及び
電界強度1~1000kV/cm、
の条件でプラズマ化して得られた温度-25~100℃の大気圧低温プラズマ含有ガスを、バブル発生機を用いて液中に微細な泡として添加する、大気圧低温プラズマバブル液の製造方法。
[4] 空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、
圧力0.1~10気圧、
原料ガス供給量0.001~100000L/min、及び
電界強度1~1000kV/cm、
の条件でプラズマ化して温度-25~100℃の大気圧低温プラズマ含有ガスを製造するプラズマ含有ガス製造機、及びバブル発生機を少なくとも備える、大気圧低温プラズマバブル液製造装置。
As a result of extensive investigations aimed at solving the above problems, the present inventors have completed the following invention.
[1] A method for producing a raw material gas, which is at least one selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor, comprising:
Pressure: 0.1 to 10 atmospheres
A raw material gas supply rate of 0.001 to 100,000 L/min and an electric field strength of 1 to 1,000 kV/cm;
The atmospheric pressure low-temperature plasma bubble liquid is obtained by adding atmospheric pressure low-temperature plasma-containing gas having a temperature of -25 to 100°C obtained by plasmatizing the gas under the above conditions into a liquid as fine bubbles.
[2] The atmospheric pressure low-temperature plasma bubble liquid according to [1], wherein the temperature is −25 to 40° C.
[3] A method for producing a raw material gas, which is at least one selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor, comprising:
Pressure: 0.1 to 10 atmospheres
A raw material gas supply rate of 0.001 to 100,000 L/min and an electric field strength of 1 to 1,000 kV/cm;
The atmospheric pressure low-temperature plasma-containing gas having a temperature of -25 to 100°C obtained by plasmatizing the gas under the above conditions is added to the liquid as fine bubbles using a bubble generator.
[4] A method for producing a raw material gas, which is at least one selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor, comprising:
Pressure: 0.1 to 10 atmospheres
A raw material gas supply rate of 0.001 to 100,000 L/min and an electric field strength of 1 to 1,000 kV/cm;
The atmospheric pressure low-temperature plasma bubble liquid producing device comprises at least a plasma-containing gas producing machine for producing atmospheric pressure low-temperature plasma-containing gas at a temperature of -25 to 100°C by plasmatizing the liquid under the above conditions, and a bubble generator.

本発明によれば、汚染物質の分解機能(洗浄機能)、除菌機能等に優れた大気圧低温プラズマバブル液が提供される。
また、汚染物質の分解機能(洗浄機能)、除菌機能等に優れた大気圧低温プラズマバブル液の製造方法が提供される。
さらに、汚染物質の分解機能(洗浄機能)、除菌機能等に優れた大気圧低温プラズマバブル液の製造装置が提供される。
According to the present invention, there is provided an atmospheric pressure low-temperature plasma bubble liquid having excellent pollutant decomposition (cleaning) and sterilization functions.
In addition, a method for producing atmospheric pressure low-temperature plasma bubble liquid that has excellent pollutant decomposition (cleaning) and sterilization functions is provided.
Furthermore, an apparatus for producing atmospheric pressure low-temperature plasma bubble liquid having excellent pollutant decomposition (cleaning) and sterilization functions is provided.

[大気圧低温プラズマバブル液]
本発明の大気圧低温プラズマバブル液は、特定の原料ガスを特定の条件でプラズマ化して得られた大気圧低温プラズマ含有ガスを、液中にナノバブル、ファインバブル及びマイクロバブルのいずれか1つ以上の微細な泡として含んでいる。
[Atmospheric pressure low-temperature plasma bubble liquid]
The atmospheric pressure low-temperature plasma bubble liquid of the present invention contains atmospheric pressure low-temperature plasma-containing gas obtained by plasmatizing a specific raw material gas under specific conditions in the form of one or more fine bubbles selected from the group consisting of nanobubbles, fine bubbles, and microbubbles.

<大気圧低温プラズマ含有ガス>
本発明における大気圧低温プラズマ含有ガスは、空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、圧力0.1~10気圧、原料ガス供給量0.001~100000L/min、及び電界強度1~1000kV/cm、の条件でプラズマ化して得られた温度-25~100℃の大気圧低温プラズマ含有ガスである。
<Atmospheric pressure low-temperature plasma-containing gas>
The atmospheric pressure low-temperature plasma-containing gas in the present invention is an atmospheric pressure low-temperature plasma-containing gas having a temperature of −25 to 100° C. obtained by converting one or more raw material gases selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor into plasma under conditions of at least a pressure of 0.1 to 10 atmospheres, a raw material gas supply rate of 0.001 to 100,000 L/min, and an electric field strength of 1 to 1,000 kV/cm.

大気圧低温プラズマ含有ガスの温度は、-25~100℃であり、好ましくは-25~40℃である。ガスの温度が100℃を超えると、大気圧低温プラズマバブル液の効果が消失・失活するおそれがあり、プラズマ含有ガス中のプラズマ濃度を高くすることが難しくなるおそれがある。また、プラズマ含有ガスが高温であることから、安全性や取扱性等の点で問題が生じるおそれがある。さらに、液を構成する液状媒体が沸点100℃以下の水等の場合、液が沸騰するおそれがあり、液中に微細な泡として含ませることが難しくなるおそれがある。 The temperature of the atmospheric pressure low-temperature plasma-containing gas is -25 to 100°C, preferably -25 to 40°C. If the gas temperature exceeds 100°C, the effect of the atmospheric pressure low-temperature plasma bubble liquid may be lost or inactivated, making it difficult to increase the plasma concentration in the plasma-containing gas. In addition, since the plasma-containing gas is at a high temperature, problems may arise in terms of safety, handling, etc. Furthermore, if the liquid medium that constitutes the liquid is water or the like with a boiling point of 100°C or less, the liquid may boil, making it difficult to include the liquid as fine bubbles.

本発明において、原料ガスは、空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である。これらの中でも、酸素及び二酸化炭素は、洗浄機能に優れたプラズマ含有ガスを形成することができる。
原料ガスは、大気圧低温プラズマ含有ガスを得るためにプラズマ処理空間に導入される。プラズマ処理空間に導入された原料ガスは、プラズマの原料ガスになるとともにキャリヤーガスにもなる。
原料ガス源としては、原料ガスの収容容器(ガスボンベ)であってもよく、また、ガスとして空気を用いる場合には、外気取入れブロアであってもよい。
In the present invention, the raw material gas is at least one selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor. Among these, oxygen and carbon dioxide can form a plasma-containing gas having excellent cleaning function.
The source gas is introduced into the plasma processing space to obtain atmospheric pressure low-temperature plasma-containing gas. The source gas introduced into the plasma processing space serves as both the source gas for plasma and the carrier gas.
The source of the raw gas may be a container (gas cylinder) for storing the raw gas, or, in the case where air is used as the gas, may be an outside air intake blower.

プラズマを生成する際の圧力は、0.1~10気圧であり、好ましくは0.7~1.5気圧である。温和な圧力条件とすることで、装置が大掛かりになるおそれがなく、コスト面で有利である。
原料ガスをプラズマ処理空間へ導入する際の原料ガス供給量は、0.001~100000L/minであり、好ましくは0.01~10000L/min、より好ましくは0.1~1000L/min、さらに好ましくは1~1000L/minである。
原料ガス供給量が0.001L/min未満であると、プラズマ含有ガスの生成量が少なくなるため、大気圧低温プラズマバブル液の汚染物質の分解機能(洗浄機能)及び除菌機能が低下するおそれがある。また、100000L/minを超えると、装置が大掛かりになるおそれがあり、また、プラズマ含有ガス中のプラズマ濃度が低下して、大気圧低温プラズマバブル液の汚染物質の分解機能(洗浄機能)及び除菌機能が低下するおそれがある。
The pressure at which the plasma is generated is 0.1 to 10 atm, and preferably 0.7 to 1.5 atm. By using a mild pressure condition, there is no risk of the apparatus becoming large-scale, which is advantageous in terms of cost.
The supply rate of the raw material gas when it is introduced into the plasma treatment space is 0.001 to 100,000 L/min, preferably 0.01 to 10,000 L/min, more preferably 0.1 to 1,000 L/min, and further preferably 1 to 1,000 L/min.
If the supply rate of the raw gas is less than 0.001 L/min, the amount of plasma-containing gas generated is small, which may reduce the decomposition (cleaning) and sterilization functions of the atmospheric pressure low-temperature plasma bubble liquid. If the supply rate exceeds 100,000 L/min, the device may become large-scale, and the plasma concentration in the plasma-containing gas may decrease, which may reduce the decomposition (cleaning) and sterilization functions of the atmospheric pressure low-temperature plasma bubble liquid.

プラズマ原料ガスが導入されるプラズマ処理空間は、電源に連接する一対の電極の間に設けられる。電源から高周波、パルス波、マイクロ波等が一対の電極に印加され、放電開始電圧を超えると、プラズマ処理空間内に電界が形成される。導入された原料ガスは、その少なくとも一部がプラズマ処理空間でプラズマ化された後に、プラズマ含有ガスとして放出される。したがって、プラズマ含有ガスは、原料ガスの少なくとも一部をプラズマ化処理して得られるすべてのガスを含む。 The plasma processing space into which the plasma raw material gas is introduced is provided between a pair of electrodes connected to a power source. High frequency waves, pulse waves, microwaves, etc. are applied from the power source to the pair of electrodes, and when the discharge start voltage is exceeded, an electric field is formed in the plasma processing space. At least a portion of the introduced raw material gas is converted into plasma in the plasma processing space, and then released as a plasma-containing gas. Therefore, the plasma-containing gas includes all gases obtained by converting at least a portion of the raw material gas into plasma.

プラズマ処理空間において発生させる電界強度は1~1000kV/cm、好ましくは2~300kV/cmである。電界強度が1000kV/cmを超えると、装置が大掛かりとなりコスト面で不利であり、電界強度が1kV/cm未満であると、十分な量のプラズマを得ることができないおそれがある。 The electric field strength generated in the plasma processing space is 1 to 1000 kV/cm, preferably 2 to 300 kV/cm. If the electric field strength exceeds 1000 kV/cm, the device becomes large and is disadvantageous in terms of cost, and if the electric field strength is less than 1 kV/cm, there is a risk that a sufficient amount of plasma cannot be obtained.

電界の立ち上がり所要時間(及び立ち下がり所要時間)は、プラズマ処理空間において、電圧が連続して増加(又は減少)するのに要する時間である。電界の立ち上がり所要時間は、特に限定されず、原料ガスのガス種、圧力、原料ガス供給量、電界強度、処理電圧、処理電流等に基づき任意に設定される。例えば10μs以下であり、好ましくは50ns~5μsである。電界の立ち上がりに要する時間を10μs以下とするためには、電極にはパルス波を印加することが好ましい。 The electric field rise time (and fall time) is the time required for the voltage to continuously increase (or decrease) in the plasma processing space. The electric field rise time is not particularly limited and is set arbitrarily based on the gas type of the raw material gas, pressure, raw material gas supply amount, electric field strength, processing voltage, processing current, etc. For example, it is 10 μs or less, and preferably 50 ns to 5 μs. In order to make the time required for the electric field to rise 10 μs or less, it is preferable to apply a pulse wave to the electrodes.

プラズマ処理空間における電力は、特に限定されず、原料ガスのガス種、圧力、原料ガス供給量、電界強度、処理電圧、処理電流等に基づき任意に設定される。例えば100kW/h以下、好ましくは10kW/h以下とすることができる。電力が100kW/hを超えると、装置が大掛かりとなりコスト面で不利となることがある。
プラズマ処理空間における処理電圧は、特に限定されず、原料ガスのガス種、圧力、原料ガス供給量、電界強度、処理電流等に基づき任意に設定される。例えば10~1000V、好ましくは20~600V、より好ましくは40~500Vとすることができる。
プラズマ処理空間における処理電流は、特に限定されず、原料ガスのガス種、圧力、原料ガス供給量、電界強度、処理電圧等に基づき任意に設定される。例えば0.001~1000A、好ましくは0.01~500A、より好ましくは0.1~100Aとすることができる。
プラズマ処理空間においてパルス波により電界をかける際の周波数は、特に限定されず、原料ガスのガス種、圧力、原料ガス供給量、電界強度、処理電圧、処理電流等に基づき任意に設定される。例えば0.001kHz以上、好ましくは0.01kHz~300MHz、より好ましくは、0.1kHz~150MHzとすることができる。
The power in the plasma processing space is not particularly limited, and is set arbitrarily based on the type of raw material gas, pressure, raw material gas supply amount, electric field strength, processing voltage, processing current, etc. For example, it can be 100 kW/h or less, preferably 10 kW/h or less. If the power exceeds 100 kW/h, the device becomes large-scale, which may be disadvantageous in terms of cost.
The processing voltage in the plasma processing space is not particularly limited and is set arbitrarily based on the type of source gas, pressure, source gas supply amount, electric field strength, processing current, etc. For example, it can be 10 to 1000 V, preferably 20 to 600 V, and more preferably 40 to 500 V.
The treatment current in the plasma treatment space is not particularly limited and is set arbitrarily based on the type of source gas, pressure, source gas supply amount, electric field strength, treatment voltage, etc. For example, it can be 0.001 to 1000 A, preferably 0.01 to 500 A, and more preferably 0.1 to 100 A.
The frequency when applying an electric field by a pulse wave in the plasma processing space is not particularly limited, and is set arbitrarily based on the type of raw material gas, pressure, raw material gas supply amount, electric field strength, processing voltage, processing current, etc. For example, it can be 0.001 kHz or more, preferably 0.01 kHz to 300 MHz, and more preferably 0.1 kHz to 150 MHz.

本発明におけるプラズマとしては、科学的に定義されたプラズマであれば特に制限なく用いられる。プラズマは、電離によって生じた荷電粒子を含むエネルギーの高い気体の状態のもので、イオンと電子の数が同数又はほぼ同数で、電気的に中性又はほぼ中性の状態であればよい。プラズマは、互いに離間した電極間での放電等の種々の方法で生成することができる。 The plasma used in this invention can be any scientifically defined plasma, without any particular limitations. Plasma is a high-energy gaseous state that contains charged particles produced by ionization, and it is sufficient that the number of ions and electrons is equal or nearly equal, and that the plasma is electrically neutral or nearly neutral. Plasma can be generated by various methods, such as by discharging electricity between electrodes spaced apart from each other.

プラズマ含有ガス中のプラズマは、生成直後は発光を伴う高エネルギー状態となっている。このため、プラズマ原料ガスの種類に応じた色に発光し、様々な化学反応を誘起させることができる。プラズマ含有ガス中のプラズマは、エネルギーの一部を失うことで不可視状態となる。例えば、プラズマ含有ガス中のプラズマは、気流に乗り長距離移送される際に、徐々にエネルギーを失って消光し、最終的に不可視状態となる。また、例えば、プラズマ含有ガス中の発光しているプラズマから、エネルギーを奪う操作等により、消光させて不可視状態とすることができる。なお、プラズマ含有ガス中のプラズマが消光した場合であっても、汚染物質の分解機能(洗浄機能)及び除菌機能を十分に発揮し得るプラズマが含まれていることを、本発明者は確認している。 Immediately after generation, the plasma in the plasma-containing gas is in a high-energy state accompanied by light emission. For this reason, it emits light in a color according to the type of plasma raw material gas, and can induce various chemical reactions. The plasma in the plasma-containing gas becomes invisible by losing part of its energy. For example, when the plasma in the plasma-containing gas is transported long distances in an air current, it gradually loses energy, becomes quenched, and finally becomes invisible. In addition, for example, the emitting plasma in the plasma-containing gas can be quenched and made invisible by an operation such as removing energy. Note that the inventor has confirmed that even when the plasma in the plasma-containing gas is quenched, the plasma contains plasma that can fully exert the function of decomposing pollutants (cleaning function) and the function of sterilization.

<液>
本発明の大気圧低温プラズマバブル液を構成する液は、液状の媒体であれば特に限定されない。例えば、水道水、工業用水、超純水、イオン交換水、蒸留水、有機溶剤からなる群より選ばれる1種以上があげられる。本発明においては、水道水、工業用水、超純水、イオン交換水、蒸留水等の水を用いることが好ましい。
また、必要に応じて、液状媒体に各種成分を添加した混合液を用いてもよい。液状媒体に含まれる各種成分としては、特に限定されないが、例えば、溶質又は分散質としての酸、液基、塩、低分子有機化合物、高分子化合物等からなる群より選ばれる1種以上があげられる。これらの液状媒体に含まれる各種成分を用いることで、大気圧低温プラズマが有する機能に加えて、所望の機能を付与した液とすることができる。各種成分の配合量は、特に限定されず、所望の機能を付与するのに必要な量とすればよい。
<Liquid>
The liquid constituting the atmospheric pressure low-temperature plasma bubble liquid of the present invention is not particularly limited as long as it is a liquid medium. For example, it may be at least one selected from the group consisting of tap water, industrial water, ultrapure water, ion-exchanged water, distilled water, and organic solvents. In the present invention, it is preferable to use water such as tap water, industrial water, ultrapure water, ion-exchanged water, and distilled water.
Also, if necessary, a mixed liquid in which various components are added to the liquid medium may be used. The various components contained in the liquid medium are not particularly limited, but may include, for example, one or more selected from the group consisting of acids, liquid bases, salts, low molecular weight organic compounds, polymeric compounds, etc. as solutes or dispersoids. By using the various components contained in these liquid media, a liquid can be made to have a desired function in addition to the function possessed by atmospheric pressure low temperature plasma. The amount of each component is not particularly limited, and may be the amount necessary to impart the desired function.

<バブル(泡)>
本発明の大気圧低温プラズマバブル液は、特定の原料ガスを特定の条件でプラズマ化して得られた大気圧低温プラズマ含有ガスを、微細な泡として含んでいる。泡の直径は、例えば、500μm以下程度であり、好ましくは200μm以下、より好ましくは100μm以下である。また、このような微細な泡とともに、直径500μm以上の泡が含まれていてもよい。このような微細な泡は、互いに合泡して大きな泡となることがほとんどなく、表面張力の影響で効率よく液中に分散・拡散・溶解し、液中で長時間存在し得るものである。微細な泡は、いわゆるナノバブル、ファインバブル又はマイクロバブルのいずれか1つ以上として知られている。
本発明の大気圧低温プラズマバブル液は、大気圧低温プラズマを含む微細な泡が、液中に分散・拡散・溶解したものである。液中の微細な大気圧低温プラズマにより、汚染物質の分解機能(洗浄機能)及び除菌機能が高い大気圧低温プラズマバブル液を得ることができる。
<Bubbles>
The atmospheric pressure low-temperature plasma bubble liquid of the present invention contains atmospheric pressure low-temperature plasma-containing gas obtained by plasmatizing a specific raw material gas under specific conditions as fine bubbles. The diameter of the bubbles is, for example, about 500 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. In addition to such fine bubbles, bubbles with a diameter of 500 μm or more may be contained. Such fine bubbles rarely merge with each other to form larger bubbles, and are efficiently dispersed, diffused, and dissolved in the liquid due to the influence of surface tension, and can exist in the liquid for a long time. The fine bubbles are known as one or more of so-called nanobubbles, fine bubbles, and microbubbles.
The atmospheric pressure low-temperature plasma bubble liquid of the present invention is a liquid in which fine bubbles containing atmospheric pressure low-temperature plasma are dispersed, diffused, and dissolved. The fine atmospheric pressure low-temperature plasma in the liquid makes it possible to obtain an atmospheric pressure low-temperature plasma bubble liquid with high pollutant decomposition (cleaning) and sterilization functions.

[大気圧低温プラズマバブル液の製造方法]
本発明の大気圧低温プラズマバブル液の製造方法は、空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、圧力0.1~10気圧、原料ガス供給量0.001~100000L/min、及び電界強度1~1000kV/cm、の条件でプラズマ化して得られた温度-25~100℃の大気圧低温プラズマ含有ガスを、バブル発生機を用いて液中に微細な泡として添加するものである。
大気圧低温プラズマ含有ガス及び微細な泡については、前記[大気圧低温プラズマ含有ガス]に記載したものと同様である。
また、大気圧低温プラズマ含有ガスを製造するためのプラズマ含有ガス製造機及びバブル発生機については、後述する大気圧低温プラズマバブル液製造装置を構成するプラズマ含有ガス製造機及びバブル発生機を用いることができる。
[Method of producing atmospheric pressure low-temperature plasma bubble solution]
The method for producing an atmospheric pressure low-temperature plasma bubble liquid of the present invention involves converting a raw material gas, which is at least one kind selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor, into plasma under conditions of at least a pressure of 0.1 to 10 atmospheres, a raw material gas supply rate of 0.001 to 100,000 L/min, and an electric field strength of 1 to 1,000 kV/cm, and adding the atmospheric pressure low-temperature plasma-containing gas having a temperature of -25 to 100°C to the liquid in the form of fine bubbles using a bubble generator.
The atmospheric pressure low-temperature plasma-containing gas and the fine bubbles are the same as those described above in [Atmospheric pressure low-temperature plasma-containing gas].
In addition, as for the plasma-containing gas producing machine and bubble generator for producing the atmospheric pressure low-temperature plasma-containing gas, the plasma-containing gas producing machine and bubble generator constituting the atmospheric pressure low-temperature plasma bubble liquid producing apparatus described later can be used.

[大気圧低温プラズマバブル液製造装置]
本発明の大気圧低温プラズマバブル液製造装置は、空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスを、少なくとも、圧力0.1~10気圧、原料ガス供給量0.001~100000L/min、及び電界強度1~1000kV/cm、の条件でプラズマ化して温度-25~100℃の大気圧低温プラズマ含有ガスを製造するプラズマ含有ガス製造機、及びバブル発生機を少なくとも備えている。
[Atmospheric pressure low-temperature plasma bubble liquid production equipment]
The atmospheric pressure low-temperature plasma bubble liquid producing apparatus of the present invention is equipped with at least a plasma-containing gas producing machine that produces atmospheric pressure low-temperature plasma-containing gas at a temperature of -25 to 100°C by plasmatizing a raw material gas, which is one or more kinds selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor, under conditions of at least a pressure of 0.1 to 10 atmospheres, a raw material gas supply rate of 0.001 to 100,000 L/min, and an electric field strength of 1 to 1,000 kV/cm, and a bubble generator.

<プラズマ含有ガス製造機>
プラズマ含有ガス製造機は、空気、酸素、二酸化炭素、窒素、及び水蒸気からなる群より選ばれる1種以上である原料ガスの少なくとも一部を、少なくとも、圧力0.1~10気圧、原料ガス供給量0.001~100000L/min、及び電界強度1~1000kV/cm、の条件でプラズマ化し、温度-25~100℃の大気圧低温プラズマ含有ガスを製造できるものであれば特に限定されない。
<Plasma-containing gas production machine>
The plasma-containing gas production apparatus is not particularly limited as long as it can convert at least a portion of a raw material gas, which is one or more types selected from the group consisting of air, oxygen, carbon dioxide, nitrogen, and water vapor, into plasma under conditions of at least a pressure of 0.1 to 10 atmospheres, a raw material gas supply rate of 0.001 to 100,000 L/min, and an electric field strength of 1 to 1,000 kV/cm, and can produce an atmospheric pressure low-temperature plasma-containing gas at a temperature of -25 to 100°C.

プラズマ含有ガス製造機は、原料ガスを導入する原料ガス導入部と、原料ガスをプラズマ化するプラズマ処理空間と、電界を形成することでプラズマ処理空間を形成する一対の電極と、電極に接続する電源と、プラズマ含有ガスを放出するプラズマ含有ガス放出部とを少なくとも有する。
プラズマ含有ガス製造装置は、圧力等の制御を容易にするために、プラズマ処理空間を覆う筐体を有することが好ましい。
The plasma-containing gas producing machine has at least a raw material gas inlet section for introducing a raw material gas, a plasma processing space for converting the raw material gas into plasma, a pair of electrodes for forming the plasma processing space by forming an electric field, a power source connected to the electrodes, and a plasma-containing gas discharge section for discharging the plasma-containing gas.
The plasma-containing gas production apparatus preferably has a housing that covers the plasma processing space in order to facilitate control of pressure and the like.

プラズマ原料ガス導入部は、プラズマ原料ガスのガス源とプラズマ処理空間とを接続する。なお、プラズマ原料ガスが空気の場合、ブロア等の給気機を用いることができる。 The plasma raw material gas inlet connects the plasma raw material gas source to the plasma processing space. If the plasma raw material gas is air, an air supply such as a blower can be used.

プラズマ処理空間を覆う筐体は、例えば、ガラス、セラミックのような誘電性を備えた材料で構成できる。また、チタン酸バリウム、酸化ケイ素、窒化アルミニウム、窒化ケイ素、炭化ケイ素等の誘電率が2000以下の誘電体を用いることもできる。また、筺体の少なくとも一部を導電性の材料で構成することで、筺体自体を電極として用いることもできる。
筺体の形状は、特に限定されず、筒状、球状、箱状等の任意の形状とすることができる。プラズマ処理空間を覆う筺体は、プラズマ含有ガス放出部に近づくほど細くなるように加工されたノズル形状となっていてもよい。
The housing covering the plasma processing space can be made of a dielectric material such as glass or ceramic. Dielectrics having a dielectric constant of 2000 or less, such as barium titanate, silicon oxide, aluminum nitride, silicon nitride, or silicon carbide, can also be used. By making at least a part of the housing out of a conductive material, the housing itself can be used as an electrode.
The shape of the housing is not particularly limited and may be any shape such as a cylinder, a sphere, a box, etc. The housing covering the plasma processing space may be in the shape of a nozzle that is processed so as to become narrower toward the plasma-containing gas emission part.

プラズマ処理空間内に電界を形成して放電させる手段は、特に限定されず、任意の手段を用いることができる。
例えば、筺体の外面又は内面に、互いに極性の異なる一対の電極を互いに離間して対向して形成し、それぞれの電極を、電源に接続して、電界を形成して放電させるための手段があげられる。一対の電極は、プラズマ処理空間を覆う筺体の内部に対向して設けることができる。また、表面に絶縁体等による層が形成された一対の電極の少なくとも一方を設置することもできる。放電用電極の間隔は、特に限定されず、電圧等を考慮して適宜好適化すればよく、例えば0.5~5.0mm程度とすることができる。電極を用いて放電した場合、プラズマ濃度を高くすることができる。
The means for forming an electric field in the plasma processing space to cause discharge is not particularly limited, and any means can be used.
For example, a pair of electrodes having different polarities are formed on the outer or inner surface of the housing, facing each other at a distance from each other, and each electrode is connected to a power source to form an electric field and discharge. The pair of electrodes can be provided facing each other inside the housing that covers the plasma processing space. At least one of the pair of electrodes can be provided with a layer of an insulator or the like formed on the surface. The interval between the discharge electrodes is not particularly limited and may be appropriately set in consideration of the voltage, etc., and may be, for example, about 0.5 to 5.0 mm. When discharging using the electrodes, the plasma concentration can be increased.

また、例えば、プラズマ処理空間を覆う筺体の外周又は内周に、コイルを設けるとともにプラズマ処理空間内に電極芯を設け、コイルと電極芯とを電源に接続して、電界を形成して放電させる手段があげられる。コイルの間隔、巻長、巻径、線径、電極芯とコイルの間隔、電極芯形状等は、特に限定されず、電圧等を考慮して適宜好適化される。原料ガス導入部からプラズマ含有ガス放出部が細長い筒状形状の筺体とした場合、筺体の外周又は内周に設けたコイル及び対応する電極芯を用いて放電すると、放電密度が比較的低いものの、プラズマ原料ガスが通過する放電体積を大きくすることができるため、多量のプラズマを生成することができる。
一対の電極又はコイルは、安定したプラズマ放電を得るために、プラズマ原料ガスと直接接触しない構成とするのが好ましい。そのため、一対の電極又はコイルの表面に、コーティング等の公知の手段により、石英、アルミナ等のガラス質材料やセラミック材料等の絶縁性被膜を設けてもよい。
Also, for example, a coil is provided on the outer or inner circumference of a housing covering the plasma processing space, and an electrode core is provided in the plasma processing space, and the coil and the electrode core are connected to a power source to form an electric field to cause discharge. The interval between the coils, the winding length, the winding diameter, the wire diameter, the interval between the electrode core and the coil, the electrode core shape, etc. are not particularly limited, and are appropriately optimized in consideration of the voltage, etc. When the housing is an elongated cylindrical shape from the raw material gas introduction part to the plasma-containing gas discharge part, if discharge is performed using a coil provided on the outer or inner circumference of the housing and a corresponding electrode core, although the discharge density is relatively low, the discharge volume through which the plasma raw material gas passes can be increased, and therefore a large amount of plasma can be generated.
In order to obtain a stable plasma discharge, it is preferable that the pair of electrodes or the coil is configured not to come into direct contact with the plasma raw material gas. Therefore, an insulating coating made of a glassy material such as quartz or alumina, or a ceramic material may be provided on the surface of the pair of electrodes or the coil by a known means such as coating.

<バブル発生機>
大気圧低温プラズマバブル液製造装置が備えているバブル発生機は、少なくともガス導入部とガス吐出部とを有し、微細な泡であるバブルを発生させることができれば特に限定されず、種々の形式のものを用いることができる。例えば、流動している液の液路にインライン接続し、旋回流方式によりガスを液中に吐出して混合し微細な泡であるバブルを発生させるもの、水中にガスを吐出する際に、撹拌部材等を用いることでガスと液とを混合して微細な泡であるバブルを発生させるもの等があげられる。
また、バブル発生機のガス導入部、内部、及びガス吐出部のうちの少なくとも1つに、プラズマ処理空間を設けた、プラズマ含有ガス製造機とバブル発生機との複合機を用いてもよい。
微細な泡であるバブルの直径は、例えば、500μm以下程度であり、好ましくは200μm以下、より好ましくは100μm以下である。また、このような微細な泡とともに、直径500μm以上の泡が含まれていてもよく、用途等に応じて設定することができる。
ガスの吐出量は、特に限定されないが、例えば、0L/minを超える量、好ましくは0.1L/min以上、より好ましくは0.5L/min以上である。ガス吐出量の上限は特に限定されず、製造量等に応じて設定することができる。例えば1000L/min以下、また、例えば100L/min以下とすることができる。
<Bubble generator>
The bubble generator provided in the atmospheric pressure low-temperature plasma bubble liquid manufacturing device is not particularly limited as long as it has at least a gas inlet and a gas outlet and can generate fine bubbles, and various types can be used. For example, there are those that are connected in-line to the liquid path of a flowing liquid and discharge gas into the liquid by a swirling flow method to mix and generate fine bubbles, and those that use a stirring member or the like to mix the gas and liquid when discharging gas into water to generate fine bubbles.
Also, a combined plasma-containing gas production device and bubble generator may be used in which a plasma processing space is provided in at least one of the gas inlet, interior, and gas outlet of the bubble generator.
The diameter of the fine bubbles is, for example, about 500 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. In addition to such fine bubbles, bubbles with a diameter of 500 μm or more may be included, and can be set according to the application, etc.
The gas discharge amount is not particularly limited, but is, for example, an amount exceeding 0 L/min, preferably 0.1 L/min or more, more preferably 0.5 L/min or more. The upper limit of the gas discharge amount is not particularly limited, and can be set according to the production amount, etc. For example, it can be 1000 L/min or less, or for example, 100 L/min or less.

<その他の機器等>
本発明の大気圧低温プラズマバブル液製造装置は、プラズマ含有ガス製造機とバブル発生機との間に、プラズマ含有ガスの温度を-25~100℃、好ましくは-20~80℃、より好ましくは-10~40℃に保持するプラズマ含有ガス輸送路を設けることができる。これにより、プラズマ含有ガス製造機とバブル発生機との間が離れている場合に、プラズマ含有ガスの移送中のプラズマの失活を抑えることができる。
また、本発明の大気圧低温プラズマバブル液製造装置は、必要に応じて、液状媒体を流動させるためのポンプ、製品として容器等に分注するためのノズル等、流量や液圧等の調節弁、流量、圧力、温度等の各種センサ、撹拌装置、プラズマ含有ガスの処理装置、原料ガスの輸送路等からなる群より選ばれる1種以上の機器を設けることができる。
<Other equipment, etc.>
The atmospheric pressure low-temperature plasma bubble liquid producing apparatus of the present invention can be provided with a plasma-containing gas transport path between the plasma-containing gas producing device and the bubble generator, which maintains the temperature of the plasma-containing gas at −25 to 100° C., preferably −20 to 80° C., and more preferably −10 to 40° C. This makes it possible to suppress deactivation of plasma during transport of the plasma-containing gas when the plasma-containing gas producing device and the bubble generator are separated from each other.
Furthermore, the atmospheric pressure low-temperature plasma bubble liquid manufacturing apparatus of the present invention may be provided with one or more devices selected from the group consisting of a pump for moving the liquid medium, a nozzle for dispensing the product into a container or the like, a control valve for controlling flow rate and liquid pressure, various sensors for flow rate, pressure, temperature, etc., a stirring device, a plasma-containing gas treatment device, a raw material gas transport path, etc., as necessary.

以下、実施例及び比較例をあげて本発明をさらに詳細に説明するが、本発明は以下の実施例に何ら限定されるものではない。 The present invention will be described in more detail below with reference to examples and comparative examples, but the present invention is not limited to the following examples.

[汚染物質の分解機能(洗浄機能)]
<実施例1>
大気圧低温プラズマ含有ガス製造機に、原料ガスとして空気を10L/minで供給し、圧力1気圧、電界強度3kV/cm、電流値0.32A(測定値)、電圧100V、及び電力25W/h条件でプラズマ化して、40℃の低温大気圧プラズマ含有ガスを得た。
温度を40℃に保持したプラズマ含有ガスを、プラズマ含有ガス製造機のプラズマ含有ガス出口とバブル発生機(FB-S 15A:坂本技研社製)のガス入口部の距離(プラズマ含有ガス輸送路長)を0m(直結)としてバブル発生機に導入し、20Lの水道水中に微細な泡として添加し、大気圧低温プラズマバブル液を得た。
得られた大気圧低温プラズマバブル液を、液流20L/minで循環させ、メチレンブルーを1質量ppmとなる量添加した。
表1に示すように、メチレンブルー投入直後(0分)、10分後、20分後、30分後、40分後、50分後、60分後、70分後及び90分後にそれぞれ循環している液を抜き出し、664nmの吸光度を測定した。結果を表1に示す。
[Pollutant decomposition function (cleaning function)]
Example 1
Air was supplied as a raw material gas to an atmospheric pressure low-temperature plasma-containing gas production machine at 10 L/min, and plasma was generated under conditions of a pressure of 1 atmosphere, an electric field strength of 3 kV/cm, a current value of 0.32 A (measured value), a voltage of 100 V, and a power of 25 W/h to obtain a low-temperature atmospheric pressure plasma-containing gas at 40°C.
The plasma-containing gas, whose temperature was kept at 40°C, was introduced into a bubble generator (FB-S 15A: manufactured by Sakamoto Giken Co., Ltd.) with the distance (plasma-containing gas transport path length) between the plasma-containing gas outlet of the plasma-containing gas production machine and the gas inlet of the bubble generator set to 0 m (direct connection), and was added to 20 L of tap water as fine bubbles to obtain an atmospheric pressure low-temperature plasma bubble liquid.
The obtained atmospheric pressure low-temperature plasma bubble liquid was circulated at a liquid flow rate of 20 L/min, and methylene blue was added in an amount to give 1 ppm by mass.
As shown in Table 1, the circulating liquid was withdrawn immediately after the addition of methylene blue (0 min), and 10, 20, 30, 40, 50, 60, 70, and 90 min later, and the absorbance at 664 nm was measured. The results are shown in Table 1.

<実施例2~5>
プラズマ含有ガス輸送路長を表1に示す距離としたほかは、実施例1と同様にして大気圧低温プラズマバブル液を製造し、実施例1と同様にして664nmの吸光度を測定した。結果を表1にあわせて示す。
<Examples 2 to 5>
Except for the length of the plasma-containing gas transport path being the distance shown in Table 1, an atmospheric pressure low-temperature plasma bubble liquid was produced in the same manner as in Example 1, and the absorbance at 664 nm was measured in the same manner as in Example 1. The results are also shown in Table 1.

<比較例1>
プラズマ含有ガスに代えて空気をバブル発生機(FB-S 15A:坂本技研社製)に導入し、20Lの水道水中に微細な泡として添加してバブル液を製造し、実施例1と同様にして664nmの吸光度を測定した。結果を表1にあわせて示す。
<Comparative Example 1>
Instead of the plasma-containing gas, air was introduced into a bubble generator (FB-S 15A: manufactured by Sakamoto Giken Co., Ltd.) and added as fine bubbles to 20 L of tap water to produce a bubble liquid, and the absorbance at 664 nm was measured in the same manner as in Example 1. The results are also shown in Table 1.

<実施例6~8、比較例2>
大気圧低温プラズマ含有ガス製造機に導入する原料ガスの種類を、空気に代えて表1の気体としたほかは、実施例1と同様にして大気圧低温プラズマバブル液を製造し、実施例1と同様にして664nmの吸光度を測定した。結果を表1にあわせて示す。
<Examples 6 to 8, Comparative Example 2>
Except for the fact that the type of raw material gas introduced into the atmospheric pressure low-temperature plasma-containing gas production apparatus was changed from air to the gas shown in Table 1, an atmospheric pressure low-temperature plasma bubble liquid was produced in the same manner as in Example 1, and the absorbance at 664 nm was measured in the same manner as in Example 1. The results are also shown in Table 1.

<実施例9、10>
大気圧低温プラズマ含有ガス製造機に導入する原料ガス供給量を、表1の供給量としたほかは、実施例1と同様にして大気圧低温プラズマバブル液を製造し、実施例1と同様にして664nmの吸光度を測定した。結果を表1にあわせて示す。
<Examples 9 and 10>
Except for the feed rate of the raw material gas introduced into the atmospheric pressure low-temperature plasma-containing gas production device being the feed rate shown in Table 1, an atmospheric pressure low-temperature plasma bubble liquid was produced in the same manner as in Example 1, and the absorbance at 664 nm was measured in the same manner as in Example 1. The results are also shown in Table 1.

なお、664nmの吸光度と、メチレンブルー濃度(質量ppm)との関係は、概略以下の表2のとおりである。 The relationship between absorbance at 664 nm and methylene blue concentration (ppm by mass) is roughly as shown in Table 2 below.

表1に示すとおり、大気圧低温プラズマを含むプラズマ含有ガスを、微細な泡として液中に含む、実施例1の大気圧低温プラズマバブル液は、およそ60分でメチレンブルーが分解されて664nmの吸光度が低下し、無色透明となった。一方、空気を微細な泡として液中に含むバブル液(比較例1)は、メチレンブルーが分解されなかった。
プラズマ含有ガス製造機のプラズマ含有ガス出口とバブル発生機のガス入口部の距離(プラズマ含有ガス輸送路長)は、10mまで延長してもメチレンブルーの分解機能が保持されることがわかった。
As shown in Table 1, in the atmospheric pressure low-temperature plasma bubble solution of Example 1, which contains plasma-containing gas including atmospheric pressure low-temperature plasma in the form of fine bubbles, methylene blue was decomposed in about 60 minutes, the absorbance at 664 nm decreased, and the solution became colorless and transparent. On the other hand, in the bubble solution containing air in the form of fine bubbles (Comparative Example 1), methylene blue was not decomposed.
It was found that the methylene blue decomposition function was maintained even if the distance (plasma-containing gas transport path length) between the plasma-containing gas outlet of the plasma-containing gas production machine and the gas inlet of the bubble generator was extended to 10 m.

大気圧低温プラズマの原料ガスとして、空気、窒素、酸素、又は二酸化炭素を用いた大気圧低温プラズマバブル液(実施例1~8)は、メチレンブルーの分解機能に優れているが、アルゴンを用いた場合(比較例2)は、メチレンブルーの分解機能が劣ることがわかる。
これより、本発明に係る大気圧低温プラズマ含有ガスを微細な泡として液中に含む大気圧低温プラズマバブル液は、汚染物質の分解機能に優れたものであり、優れた洗浄機能及び除菌機能を有する機能液であることがわかる。
It can be seen that the atmospheric pressure low-temperature plasma bubble liquid (Examples 1 to 8) using air, nitrogen, oxygen, or carbon dioxide as the raw material gas for the atmospheric pressure low-temperature plasma has excellent methylene blue decomposition function, but when argon is used (Comparative Example 2), the methylene blue decomposition function is inferior.
From this, it can be seen that the atmospheric pressure low-temperature plasma bubble liquid of the present invention, which contains the atmospheric pressure low-temperature plasma-containing gas of the present invention in the form of fine bubbles, has excellent pollutant decomposition function and is a functional liquid with excellent cleaning and sterilization functions.

[除菌機能]
<実施例11>
大気圧低温プラズマ含有ガス製造機に、原料ガスとして空気を10L/minで供給し、圧力1気圧、電界強度3kV/cm、電流値0.32A(測定値)、電圧100V、及び電力25W/hの条件でプラズマ化して、40℃の低温大気圧プラズマ含有ガスを得た。温度を40℃に保持したプラズマ含有ガスを、プラズマ含有ガス製造機のプラズマ含有ガス出口とバブル発生機(FB-S 15A:坂本技研社製)のガス入口部の距離(プラズマ含有ガス輸送路長)を0m(直結)としてバブル発生機に導入し、20Lの4倍希釈川水(千葉県野田市:江戸川)中に微細な泡として添加することにより大気圧低温プラズマバブル液を得た。
得られた大気圧低温プラズマバブル液を、液流20L/minで循環させ、1パス(循環時間1分)の処理を行った。各処理から3時間後の液1mLを日水製薬社製「コンパクトドライ EC」へ添加し、培養温度35±1℃、培養時間24時間の条件で培養し、大腸菌群の菌数を評価した。なお、大腸菌群の菌数評価は、赤紫色に染色されたコロニー数を目視によりカウントすることで行った。結果を表3に示す。
[Sterilization function]
Example 11
Air was supplied as a raw material gas to an atmospheric pressure low-temperature plasma-containing gas production machine at 10 L/min, and plasma was generated under the conditions of a pressure of 1 atmosphere, an electric field strength of 3 kV/cm, a current value of 0.32 A (measured value), a voltage of 100 V, and a power of 25 W/h to obtain a low-temperature atmospheric pressure plasma-containing gas at 40° C. The plasma-containing gas, whose temperature was kept at 40° C., was introduced into a bubble generator (FB-S 15A: manufactured by Sakamoto Giken Co., Ltd.) with the distance (plasma-containing gas transport path length) between the plasma-containing gas outlet of the plasma-containing gas production machine and the gas inlet of the bubble generator set to 0 m (direct connection), and the gas was added as fine bubbles to 20 L of 4-fold diluted river water (Edogawa River, Noda City, Chiba Prefecture) to obtain an atmospheric pressure low-temperature plasma bubble liquid.
The obtained atmospheric pressure low-temperature plasma bubble liquid was circulated at a liquid flow rate of 20 L/min, and one pass (circulation time 1 minute) was performed. 1 mL of the liquid 3 hours after each treatment was added to Nissui Pharmaceutical's "Compact Dry EC" and cultured at a culture temperature of 35±1°C for 24 hours, and the number of coliform bacteria was evaluated. The coliform bacteria count was evaluated by visually counting the number of colonies stained reddish purple. The results are shown in Table 3.

<実施例12、13>
実施例11において、大気圧低温プラズマバブル液の処理を1パスに代えて、10パス(循環時間10分)又は30パス(循環時間30分)の処理としたほかは、実施例11と同様にして大腸菌群の菌数を評価した。結果を表3に示す。
<Examples 12 and 13>
The coliform bacteria count was evaluated in the same manner as in Example 11, except that the treatment with the atmospheric pressure low-temperature plasma bubble liquid was changed from one pass to 10 passes (circulation time 10 minutes) or 30 passes (circulation time 30 minutes). The results are shown in Table 3.

<比較例3>
処理を行わなかった4倍希釈川水を用い、循環等の処理を行わないほかは、実施例11と同様にして大腸菌群の菌数を評価した。結果を表3に示す。
<Comparative Example 3>
The untreated 4-fold diluted river water was used to evaluate the coliform bacteria count in the same manner as in Example 11, except that no treatment such as circulation was performed. The results are shown in Table 3.

<比較例4~6>
プラズマ含有ガスに代えて空気をファインバブル発生機に導入してバブル液を得た。得られたバブル液を実施例11~13と同様の処理(1パス、10パス及び30パス)を行い、実施例11と同様にして大腸菌群の菌数を評価した。結果を表3に示す。
<Comparative Examples 4 to 6>
Air was introduced into the fine bubble generator instead of the plasma-containing gas to obtain a bubble liquid. The obtained bubble liquid was subjected to the same treatments (1 pass, 10 passes, and 30 passes) as in Examples 11 to 13, and the coliform bacteria count was evaluated in the same manner as in Example 11. The results are shown in Table 3.

<比較例7>
プラズマ含有ガスをバブル発生機に導入せず、30分バブリングして大気圧低温プラズマ吹込液を得た。得られた大気圧低温プラズマ吹込液について、実施例11と同様にして大腸菌群の菌数を評価した。結果を表3に示す。
<Comparative Example 7>
The plasma-containing gas was not introduced into the bubble generator, and the solution was bubbled for 30 minutes to obtain an atmospheric pressure low-temperature plasma injection solution. The coliform bacteria count of the obtained atmospheric pressure low-temperature plasma injection solution was evaluated in the same manner as in Example 11. The results are shown in Table 3.

表3に示すとおり、実施例11~13の大気圧低温プラズマバブル液は、比較例4~6の空気のバブル液及び比較例7の大気圧低温プラズマ吹込液と比較して、除菌機能が優れていることがわかる。 As shown in Table 3, the atmospheric pressure low-temperature plasma bubble liquids of Examples 11 to 13 have superior sterilization function compared to the air bubble liquids of Comparative Examples 4 to 6 and the atmospheric pressure low-temperature plasma injection liquid of Comparative Example 7.

Claims (3)

空気、酸素、二酸化炭素及び素からなる群より選ばれる1種以上である原料ガスを、少なくとも、
圧力0.7~1.5気圧、
原料ガス供給量0.1~1000L/min、及び
電界強度2~300kV/cm、
の条件でプラズマ化して得られた温度-25~40℃の大気圧低温プラズマ含有ガスを、液中に直径500μm以下の微細な泡として添加して得られる、大気圧低温プラズマバブル液。
A raw material gas which is at least one selected from the group consisting of air, oxygen, carbon dioxide and nitrogen is at least
Pressure : 0.7 to 1.5 atmospheres
A feed gas supply rate of 0.1 to 1000 L/min and an electric field strength of 2 to 300 kV/cm;
The atmospheric pressure low-temperature plasma bubble liquid is obtained by adding atmospheric pressure low-temperature plasma-containing gas having a temperature of -25 to 40°C obtained by plasmatizing the gas under the above conditions to a liquid as fine bubbles having a diameter of 500 μm or less .
空気、酸素、二酸化炭素及び素からなる群より選ばれる1種以上である原料ガスを、少なくとも、
圧力0.7~1.5気圧、
原料ガス供給量0.1~1000L/min、及び
電界強度2~300kV/cm、
の条件でプラズマ化して得られた温度-25~40℃の大気圧低温プラズマ含有ガスを、バブル発生機を用いて液中に直径500μm以下の微細な泡として添加する、大気圧低温プラズマバブル液の製造方法。
A raw material gas which is at least one selected from the group consisting of air, oxygen, carbon dioxide and nitrogen is at least
Pressure : 0.7 to 1.5 atmospheres
A feed gas supply rate of 0.1 to 1000 L/min and an electric field strength of 2 to 300 kV/cm;
The atmospheric pressure low-temperature plasma-containing gas having a temperature of -25 to 40°C obtained by plasmatizing the gas under the above conditions is added to the liquid as fine bubbles having a diameter of 500 μm or less using a bubble generator.
空気、酸素、二酸化炭素及び素からなる群より選ばれる1種以上である原料ガスを、少なくとも、
圧力0.7~1.5気圧、
原料ガス供給量0.1~1000L/min、及び
電界強度2~300kV/cm、
の条件でプラズマ化して温度-25~40℃の大気圧低温プラズマ含有ガスを製造するプラズマ含有ガス製造機、及び直径500μm以下の微細な泡を発生させるバブル発生機を少なくとも備える、大気圧低温プラズマバブル液製造装置。
A raw material gas which is at least one selected from the group consisting of air, oxygen, carbon dioxide and nitrogen is at least
Pressure : 0.7 to 1.5 atmospheres
A raw material gas supply rate of 0.1 to 1000 L/min and an electric field strength of 2 to 300 kV/cm;
The atmospheric pressure low-temperature plasma bubble liquid producing device includes at least a plasma-containing gas producing device that produces atmospheric pressure low-temperature plasma-containing gas at a temperature of -25 to 40°C by plasmatizing the gas under the above conditions, and a bubble generator that generates fine bubbles with a diameter of 500 μm or less.
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006088115A (en) 2004-09-27 2006-04-06 Kurita Water Ind Ltd Ballast water treatment method and apparatus
JP2008178870A (en) 2006-12-28 2008-08-07 Sharp Corp Plasma generating apparatus, radical generating method, and cleaning and purifying apparatus
JP2012228644A (en) 2011-04-26 2012-11-22 Institute Of National Colleges Of Technology Japan Liquid treating apparatus
WO2015072461A1 (en) 2013-11-18 2015-05-21 沖野 晃俊 Microbicidal liquid-generating device
JP2016203082A (en) 2015-04-21 2016-12-08 沖野 晃俊 Method for producing radical functional liquid and purification method using radical functional liquid
KR101830187B1 (en) 2016-09-05 2018-02-21 아주대학교 산학협력단 Apparatus for jetting cold atmospheric pressure plasma

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006088115A (en) 2004-09-27 2006-04-06 Kurita Water Ind Ltd Ballast water treatment method and apparatus
JP2008178870A (en) 2006-12-28 2008-08-07 Sharp Corp Plasma generating apparatus, radical generating method, and cleaning and purifying apparatus
JP2012228644A (en) 2011-04-26 2012-11-22 Institute Of National Colleges Of Technology Japan Liquid treating apparatus
WO2015072461A1 (en) 2013-11-18 2015-05-21 沖野 晃俊 Microbicidal liquid-generating device
JP2016203082A (en) 2015-04-21 2016-12-08 沖野 晃俊 Method for producing radical functional liquid and purification method using radical functional liquid
KR101830187B1 (en) 2016-09-05 2018-02-21 아주대학교 산학협력단 Apparatus for jetting cold atmospheric pressure plasma

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