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JP7540256B2 - W powder - Google Patents
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JP7540256B2 - W powder - Google Patents

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JP7540256B2
JP7540256B2 JP2020152616A JP2020152616A JP7540256B2 JP 7540256 B2 JP7540256 B2 JP 7540256B2 JP 2020152616 A JP2020152616 A JP 2020152616A JP 2020152616 A JP2020152616 A JP 2020152616A JP 7540256 B2 JP7540256 B2 JP 7540256B2
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清美 中村
功一 坂卷
和也 斉藤
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Description

本発明は、例えば、積層造形法(AM法)や射出成形法(MIM法)などのニアネット成形に適したW(タングステン)粉末に関する。 The present invention relates to W (tungsten) powder suitable for near-net molding, such as additive manufacturing (AM) and injection molding (MIM).

高融点金属であるWは、熱膨張率が低く、熱伝導率が高いことから、電子機器などの電極や、高温炉の発熱体や反射板などに用いられている。また、Wは、同体積における放射線の遮蔽特性がPb(鉛)よりも優れていることから、放射線遮蔽材や、散乱した放射線を吸収するコリメータといったX線検査機器の構成部品などにも用いられている。
また、Wは、機械加工性が悪いため、例えば、上記コリメータなどの複雑形状品は、W粉末を用いた焼結法のほか、AM法やMIM法といったニアネット成形によって造形物を作製し、この造形物に切削加工などを施して最終形状の製品を得ることが知られている。
W, a high melting point metal, has a low thermal expansion coefficient and high thermal conductivity, and is therefore used in electrodes of electronic devices, heating elements and reflectors of high-temperature furnaces, etc. In addition, W has better radiation shielding properties than Pb (lead) for the same volume, and is therefore also used in radiation shielding materials and components of X-ray inspection equipment, such as collimators that absorb scattered radiation.
Furthermore, since W has poor machinability, it is known that for complex shaped products such as the above-mentioned collimator, in addition to a sintering method using W powder, a molded object is produced by near-net molding such as the AM method or MIM method, and then this molded object is subjected to cutting processing or the like to obtain a product with the final shape.

ここで、Wは、高融点であるために、上記のニアネット成形に用いるW粉末をガスアトマイズ法や水アトマイズ法で得ることは困難である。このため、例えば、熱プラズマを利用したW粉末の製造方法が特許文献1で提案されている。この特許文献1は、減圧下に窒素ガスを用いて高温プラズマを発生させ、このプラズマでW原料を溶融し、雰囲気ガス流中に浮遊するW超微粒子を連続的に捕集・回収する方法が記載されており、工業的生産規模、すなわち大量かつ廉価で生産することができるという点で有用な技術である。 Here, since W has a high melting point, it is difficult to obtain the W powder used in the near-net molding by gas atomization or water atomization. For this reason, for example, Patent Document 1 proposes a method for producing W powder using thermal plasma. Patent Document 1 describes a method for generating high-temperature plasma using nitrogen gas under reduced pressure, melting the W raw material with this plasma, and continuously collecting and recovering ultrafine W particles suspended in the ambient gas flow. This is a useful technology in that it can be produced on an industrial scale, i.e., in large quantities and at low cost.

特開平2-6339号公報Japanese Patent Application Publication No. 2-6339

本発明者の検討によると、特許文献1の手法により、上記のニアネット成形に用いるW粉末を得ようとすると、W粉末が凝集する場合があることを確認した。このW粉末の凝集という問題は、ニアネット成形時に、造形装置や造形箇所へ安定して必要量のW粉末を供給する供給性や充填性に影響を及ぼす流動性を低下させ、得られる製品の高強度化が妨げられる。 The inventors have confirmed through their research that when attempting to obtain W powder for use in the above-mentioned near-net molding using the method of Patent Document 1, the W powder may aggregate. This problem of W powder aggregation reduces the fluidity that affects the supply and filling properties of the W powder during near-net molding, which stably supplies the required amount of W powder to the molding device and molding location, and prevents the resulting product from having high strength.

本発明の目的は、凝集が抑制され、供給性や充填性に影響を及ぼす流動性に優れる、ニアネット成形に適した成形用のW粉末を提供することである。 The object of the present invention is to provide a W powder for molding suitable for near-net molding, which has excellent flowability that affects supplyability and filling properties and is suppressed from agglomeration.

本発明者は、W粉末の凝集という問題に対して、表面性状に着目し、特定の波長で測定される反射率を所定の範囲にすることで、W粉末の供給性や充填性に影響を及ぼす流動性を大きく改善できることを見出し、本発明に到達した。 The inventors focused on the surface properties to address the problem of W powder agglomeration, and discovered that by setting the reflectance measured at a specific wavelength within a specified range, it is possible to significantly improve the fluidity that affects the supply and filling properties of W powder, thus arriving at the present invention.

本発明のW粉末は、Wおよび不可避不純物からなる組成を有し、波長360~740nmの範囲で測定される反射率の最小値が10%以上であり、JIS Z 2502に準拠して測定される流動度が15s/50g以下である。 The W powder of the present invention has a composition consisting of W and inevitable impurities, a minimum reflectance measured in the wavelength range of 360 to 740 nm of 10% or more, and a flowability measured in accordance with JIS Z 2502 of 15 s/50 g or less.

本発明のW粉末は、円形度が0.85以上であることが好ましい。 The W powder of the present invention preferably has a circularity of 0.85 or more.

本発明のW粉末は、酸素を0.001~0.020質量%の範囲で含むことが好ましい。 The W powder of the present invention preferably contains oxygen in the range of 0.001 to 0.020 mass%.

本発明のW粉末は、JIS Z 8781-4:2013に準拠して測定した明度L*が40以上であることが好ましい。 The W powder of the present invention preferably has a lightness L* of 40 or more as measured in accordance with JIS Z 8781-4:2013.

本発明は、凝集が抑制され、供給性や充填性に影響を及ぼす流動性に優れる、ニアネット成形に適したW粉末を提供することができ、例えば、X線検査機器の製造に有用な技術となる。 The present invention can provide W powder suitable for near-net molding, with suppressed aggregation and excellent fluidity that affects supplyability and filling properties, making it a useful technology for, for example, the manufacture of X-ray inspection equipment.

本発明例および比較例となるW粉末の外観を示す走査型電子顕微鏡写真。1 is a scanning electron microscope photograph showing the appearance of W powder according to an embodiment of the present invention and a comparative example.

本発明のW粉末は、波長360~740nmの範囲で測定される反射率の最小値が10%以上である。上述したAM法やMIM法といったニアネット成形では、体積基準の累積粒度分布の50%粒径(以下、「D50」という。)が1~250μmの範囲の粉末の集合体が用いられている。ここで、D50が1μmよりも小さい、超微粒子を含む成形用のW粉末の集合体は、例えば粒子径が0.3μm以下の超微粒子同士の凝集や、粒子径が1~250μmである成形に寄与するW粉末(以下、「成形用W粉末」ともいう。)の表面に粒子径が0.3μm以下の超微粒子や超微粒子同士の凝集物が付着しやすい。成形用W粉末の表面に多量の超微粒子が付着すると、成形用W粉末の表面に微細な凹凸が多数形成されてしまう。 The W powder of the present invention has a minimum reflectance of 10% or more measured in the wavelength range of 360 to 740 nm. In near-net molding such as the AM method and MIM method described above, a powder aggregate having a 50% particle size (hereinafter referred to as "D50") of the cumulative particle size distribution based on volume in the range of 1 to 250 μm is used. Here, an aggregate of W powder for molding containing ultrafine particles with a D50 smaller than 1 μm is prone to adhesion of ultrafine particles with a particle size of 0.3 μm or less or aggregates of ultrafine particles with a particle size of 0.3 μm or less to the surface of W powder (hereinafter also referred to as "W powder for molding") that contributes to molding and has a particle size of 1 to 250 μm. If a large amount of ultrafine particles adhere to the surface of the W powder for molding, many fine irregularities are formed on the surface of the W powder for molding.

表面に超微粒子が多量に付着した成形用W粉末の集合体は、超微粒子による光の乱反射や吸収が生じ、反射率が大きく低下する。このため、本発明のW粉末は、波長360~740nmの範囲で測定される反射率の最小値を10%以上とする。これにより、本発明のW粉末は、個々の成形用W粉末の表面に付着する超微粒子による微細な凹凸の形成が抑制される。このため、本発明のW粉末は、凝集が抑制され、供給性や充填性に影響を及ぼす流動性を向上することができる。上記と同様の理由から、本発明の実施形態に係るW粉末の反射率の最小値は13%以上が好ましく、13.5%以上がより好ましい。
尚、本発明でいう波長360~740nmの範囲で測定される反射率は、JIS Z 8781-4:2013に準拠して、例えば、コニカミノルタ製の分光測色計(CM-2500d)を用いて測定することができる。
In an aggregate of W powder for molding having a large amount of ultrafine particles attached to the surface, the ultrafine particles cause diffuse reflection and absorption of light, resulting in a large drop in reflectance. For this reason, the W powder of the present invention has a minimum reflectance value measured in the wavelength range of 360 to 740 nm of 10% or more. This suppresses the formation of fine irregularities due to the ultrafine particles attached to the surface of each W powder for molding. For this reason, the W powder of the present invention is suppressed from agglomerating, and can improve the flowability that affects the supplyability and filling properties. For the same reasons as above, the minimum reflectance value of the W powder according to the embodiment of the present invention is preferably 13% or more, more preferably 13.5% or more.
In addition, the reflectance measured in the wavelength range of 360 to 740 nm in the present invention can be measured in accordance with JIS Z 8781-4:2013 using, for example, a spectrophotometer (CM-2500d) manufactured by Konica Minolta.

本発明のW粉末は、JIS Z 2502に準拠して測定される流動度が15s/50g以下である。流動度は、50gの粉末が直径2.5mmのオリフィスを備える漏斗を通過する時間で表わされる。本発明の実施形態に係るW粉末は、その用途から、流動することが前提とされ、造形時に造形装置へ安定して必要量の粉末を供給する観点から、流動度は14s/50g以下が好ましく、12s/50g以下がより好ましく、10s/50g以下がさらに好ましい。
尚、流動度の測定においては、JIS Z 2502にもあるように、オリフィスを開けても粉末が流れ出さない場合は、粉末が流れ出すよう漏斗を軽く1回たたいてもよい。
The W powder of the present invention has a flowability of 15 s/50 g or less as measured in accordance with JIS Z 2502. The flowability is expressed as the time it takes for 50 g of powder to pass through a funnel equipped with an orifice having a diameter of 2.5 mm. The W powder according to the embodiment of the present invention is assumed to flow in view of its intended use, and from the viewpoint of stably supplying a required amount of powder to a molding apparatus during molding, the flowability is preferably 14 s/50 g or less, more preferably 12 s/50 g or less, and even more preferably 10 s/50 g or less.
In measuring the flow rate, as specified in JIS Z 2502, if the powder does not flow out even when the orifice is opened, the funnel may be lightly tapped once to make the powder flow out.

本発明の実施形態に係るW粉末は、所定の供給性や充填性を得ることができれば、どのような形状であってもよいところ、球形状であることが好ましく、具体的には、円形度が0.85以上であることが好ましく、0.95以上がより好ましい。
本発明でいう円形度は、下記の数式によって算出され、真球状の粉末であれば、その円形度は1.0となる。円形度は、供給性や充填性を向上させる観点から、高ければ高いほど好ましいが、分級による工数増加や歩留低下といった製造性を考慮すると0.99以下が好ましく、0.98以下がより好ましい。
[円形度]=4π[粒子の投影面積]/[粒子の周囲長]
ここで、粒子の投影面積および周囲長の測定は、例えば、画像分析装置を用いることができる。
The W powder according to the embodiment of the present invention may have any shape as long as it can obtain the desired supplyability and filling properties, but it is preferable that the powder be spherical. Specifically, the circularity of the powder is preferably 0.85 or more, and more preferably 0.95 or more.
The circularity in the present invention is calculated by the following formula, and if the powder is truly spherical, the circularity is 1.0. From the viewpoint of improving feedability and packing property, the higher the circularity, the better, but from the viewpoint of manufacturability such as an increase in the number of steps due to classification and a decrease in yield, the circularity is preferably 0.99 or less, and more preferably 0.98 or less.
[Circularity] = 4π [projected area of particle] / [perimeter of particle] 2
Here, the projected area and perimeter of the particle can be measured using, for example, an image analyzer.

本発明の実施形態に係るW粉末は、0.001~0.020質量%の酸素を含むことが好ましい。酸素は、W粉末に含まれる不純物や母材のWと結合して酸化物を形成する場合がある。この酸化物が造形物内へ取り込まれ、欠陥として残存し、造形物の機械的特性を低下させる。このため、本発明の実施形態に係るW粉末は、酸素含有量を0.020質量%以下にすることが好ましい。
一方、W粉末の酸素濃度が0.001質量%よりも低いと、大気に晒された場合に急激な酸化による発熱が生じる虞がある。このため、本発明の実施形態に係るW粉末は、酸素含有量を0.001質量%以上にすることが好ましい。
The W powder according to the embodiment of the present invention preferably contains 0.001 to 0.020 mass % of oxygen. Oxygen may combine with impurities contained in the W powder or with the W of the base material to form oxides. These oxides are taken into the molded product and remain as defects, reducing the mechanical properties of the molded product. For this reason, the W powder according to the embodiment of the present invention preferably has an oxygen content of 0.020 mass % or less.
On the other hand, if the oxygen concentration of the W powder is lower than 0.001% by mass, there is a risk of heat generation due to rapid oxidation when exposed to the air. Therefore, the W powder according to the embodiment of the present invention preferably has an oxygen content of 0.001% by mass or more.

本発明の実施形態に係るW粉末は、JIS Z8781-4:2013に準拠して測定される明度L*が40以上であることが好ましい。
表面に超微粒子が多量に付着した成形用W粉末の集合体は、超微粒子による光の乱反射や吸収が生じ、明度L*が大きく低下する。このため、本発明のW粉末は、明度L*を40以上とする。これにより、本発明のW粉末は、個々のW粉末表面に付着する超微粒子による微細な凹凸の形成が抑制され、W粉末の凝集が抑制され、供給性や充填性を向上することができる。上記と同様の理由から、本発明の実施形態に係るW粉末の明度L*は、45以上が好ましい。
尚、本発明でいう明度L*は、JIS Z 8781-4:2013に準拠して、例えば、コニカミノルタ製の分光測色計(CM-2500d)を用いて測定することができる。
The W powder according to the embodiment of the present invention preferably has a lightness L* of 40 or more as measured in accordance with JIS Z8781-4:2013.
In an aggregate of W powder for molding having a large amount of ultrafine particles attached to the surface, the ultrafine particles cause diffuse reflection and absorption of light, resulting in a significant decrease in lightness L*. For this reason, the W powder of the present invention has a lightness L* of 40 or more. This suppresses the formation of fine irregularities due to the ultrafine particles attached to the surface of each W powder, suppresses aggregation of the W powder, and improves supplyability and filling properties. For the same reasons as above, the lightness L* of the W powder according to the embodiment of the present invention is preferably 45 or more.
In addition, the lightness L* in the present invention can be measured in accordance with JIS Z 8781-4:2013 using, for example, a spectrophotometer (CM-2500d) manufactured by Konica Minolta.

本発明のW粉末は、例えば、酸化W粉末を還元したW原料粉末や、インゴット材を切削、粉砕処理したW原料粉末を、ニアネット成形の方法で適切なD50が1~250μmの範囲に分級したW粉末を用いることができる。尚、本発明では、波長360~740nmの範囲で測定される反射率の最小値を10%以上のW粉末とするために、必要に応じて、流動補助剤を添加・混合することが好ましい。そして、流動補助剤は、D50が1μm以下のアルミナやシリカの粉末が好ましく、50質量ppm以下の範囲で添加することが好ましい。 The W powder of the present invention can be, for example, W raw material powder obtained by reducing W oxide powder, or W raw material powder obtained by cutting and crushing an ingot material and classifying it into an appropriate D50 range of 1 to 250 μm using a near-net molding method. In the present invention, in order to obtain W powder with a minimum reflectance of 10% or more measured in the wavelength range of 360 to 740 nm, it is preferable to add and mix a flow aid as necessary. The flow aid is preferably alumina or silica powder with a D50 of 1 μm or less, and is preferably added in the range of 50 mass ppm or less.

また、上記のW原料粉末に、熱プラズマを利用した球状化処理を行なうことで、凝集が抑制された流動性の高いW粉末を得ることができる。ここで、球状化処理とは、上記のW原料粉末を熱プラズマ炎に通過させて、加熱溶融された液滴が凝固することで球状のW粉末を得る処理法である。溶融した液滴は、表面張力の働きにより球状化した状態で凝固するため、真球状に近い、サテライトの少ないW粉末を得ることが可能である。
ここで、熱プラズマ炎の動作ガスには、水素ガスと不活性ガスとの混合ガスを用いることが好ましい。動作ガスに水素ガスを用いることで、よりエネルギー密度の高い熱プラズマ炎を発生させることができ、W原料粉末の溶融、球状化が促進される。また、水素による還元作用により、W粉末の酸素含有量を低減することができる。
Moreover, by subjecting the above-mentioned W raw material powder to a spheroidizing treatment using thermal plasma, it is possible to obtain a W powder with high fluidity and suppressed aggregation. Here, the spheroidizing treatment is a treatment method in which the above-mentioned W raw material powder is passed through a thermal plasma flame, and droplets that are heated and melted are solidified to obtain spherical W powder. The molten droplets are solidified in a spherical state due to the action of surface tension, so it is possible to obtain W powder that is close to a perfect sphere and has few satellites.
Here, it is preferable to use a mixture of hydrogen gas and an inert gas as the operating gas for the thermal plasma flame. By using hydrogen gas as the operating gas, a thermal plasma flame with a higher energy density can be generated, and the melting and spheroidization of the W raw material powder can be promoted. In addition, the oxygen content of the W powder can be reduced by the reduction action of hydrogen.

熱プラズマ炎は、温度分布を有しており、高温領域では10000℃近くに達する。このような高温領域を通過したW原料粉末は、溶融するだけでなく、その一部が蒸発、揮発してガス化する場合があり、凝固する際に付着性の高い粒子径が0.3μm以下の超微粒子を生成してしまう場合がある。超微粒子の生成量は、球状化処理中の熱プラズマ炎の状態や、反応炉内の圧力変動などに影響を受ける。
特に、球状化処理中に反応炉の内圧が減圧状態の場合には、蒸気圧温度が低下するため、W原料粉末の気化が促進され、得られるW粉末への超微粒子量の付着が増加する。一方、球状化処理中に反応炉の内圧が加圧状態の場合には、エネルギー密度がより高い熱プラズマ炎が形成され、W原料粉末の球状化が促進される一方、Wの気化も促進されてしまい、得られるW粉末への超微粒子量の付着が増加する。このため、本発明のW粉末を熱プラズマを利用した球状化処理で得る場合は、球状化処理中に反応炉内の圧力値の変動(ばらつき)[(最大値-最小値)/(最大値+最小値)]×100(%)を5.0%以下に調整することが好ましい。
The thermal plasma flame has a temperature distribution, and in the high temperature region, it reaches nearly 10,000°C. The W raw material powder passing through such a high temperature region may not only melt, but also partially evaporate and volatilize to gasify, and may generate highly adhesive ultrafine particles with a particle size of 0.3 μm or less when solidified. The amount of ultrafine particles generated is affected by the state of the thermal plasma flame during the spheroidizing treatment, pressure fluctuations in the reaction furnace, etc.
In particular, when the internal pressure of the reactor is reduced during the spheroidizing treatment, the vapor pressure temperature is reduced, promoting the vaporization of the W raw material powder and increasing the amount of ultrafine particles adhering to the obtained W powder. On the other hand, when the internal pressure of the reactor is pressurized during the spheroidizing treatment, a thermal plasma flame with a higher energy density is formed, promoting the spheroidization of the W raw material powder while also promoting the vaporization of W, increasing the amount of ultrafine particles adhering to the obtained W powder. For this reason, when the W powder of the present invention is obtained by a spheroidizing treatment using thermal plasma, it is preferable to adjust the pressure fluctuation (variation) [(maximum value - minimum value) / (maximum value + minimum value)] x 100 (%) in the reactor during the spheroidizing treatment to 5.0% or less.

また、多量の超微粒子が付着したW粉末は、表面に微細な凹凸が形成され、凝集しやすくなり、供給性や充填性に影響を及ぼす流動性を低下させる。このため、本発明のW粉末を得るには、球状化処理を経たW粉末をW素粉とし、表面に付着する超微粒子を除去することが好ましい。
表面に付着した超微粒子を低減するには、例えば、気流式分級機による分級処理を行なうことが好ましい。この気流式分級は、例えば、精密空気分級機を用いて、ロータ回転数を2000rpm以上にして処理することで、超微粒子の低減が可能である。ロータ回転数は、3000rpm以上が好ましく、4000rpm以上がより好ましい。
Furthermore, W powder with a large amount of ultrafine particles attached thereto has fine irregularities on its surface, which makes it more likely to aggregate and reduces its flowability, which affects its supplyability and filling ability. Therefore, in order to obtain the W powder of the present invention, it is preferable to use W powder that has been subjected to a spheroidizing treatment as W elemental powder and to remove the ultrafine particles attached to the surface.
In order to reduce the ultrafine particles adhering to the surface, it is preferable to carry out classification processing using, for example, an air classifier. This air classifier can reduce the ultrafine particles by, for example, using a precision air classifier and setting the rotor rotation speed to 2000 rpm or more. The rotor rotation speed is preferably 3000 rpm or more, and more preferably 4000 rpm or more.

また、表面に付着した超微粒子を低減するには、W素粉を純水やアルコーなどへ浸漬させて、揺動や超音波を印加して洗浄を行なってもよい。また、超微粒子は、比表面積が高く高酸素濃度であることから、水素を導入した還元性雰囲気下で熱処理を施してもよい。
尚、本発明のW粉末を得るには、W素粉の表面からすべての超微粒子を除去する必要はなく、波長360~740nmの範囲で測定される反射率の最小値が10%以上となるように、超微粒子の付着量を低減すればよい。
To reduce the amount of ultrafine particles adhering to the surface, the W powder may be immersed in pure water or alcohol and washed by shaking or applying ultrasonic waves. Since ultrafine particles have a large specific surface area and a high oxygen concentration, they may be heat-treated in a reducing atmosphere containing hydrogen.
In order to obtain the W powder of the present invention, it is not necessary to remove all of the ultrafine particles from the surface of the W powder. It is sufficient to reduce the amount of attached ultrafine particles so that the minimum reflectance measured in the wavelength range of 360 to 740 nm is 10% or more.

市販のW粉末を、集合体のD50が11μmとなるように分級調整してW原料粉末を準備した。このW原料粉末に、JIS Z5052に準拠して測定した流動度が15s/50g以下となるまで、流動補助剤としてD50が1μm以下のシリカ粉末を合計で30質量ppm添加して混合し、本発明例1となるW粉末を得た。 A commercially available W powder was classified and adjusted so that the aggregate had a D50 of 11 μm to prepare a W raw material powder. A total of 30 mass ppm of silica powder with a D50 of 1 μm or less was added as a flow aid to this W raw material powder and mixed until the flow rate measured in accordance with JIS Z5052 was 15 s/50 g or less, thereby obtaining the W powder of Example 1 of the present invention.

市販のW粉末を、集合体のD50が11μmとなるように分級調整してW原料粉末を準備した。このW原料粉末を、高周波誘導熱プラズマ装置を用いて球状化処理を行ない、D50が11μmの本発明例2となるW粉末を得た。
動作条件は、プラズマ電力を120kWとし、動作ガスとしてアルゴン(流量=260L/min)と水素(流量=30L/min)を調整して、供給ガスにアルゴン(流量=8L/min)を用いた。このとき、球状化処理中の反応炉内の圧力変動[(最大値-最小値)/(最大値+最小値)]×100(%)が2.0%となるように調整した。
A commercially available W powder was classified and adjusted so that the aggregate had a D50 of 11 μm to prepare a W raw material powder. This W raw material powder was subjected to a spheroidizing treatment using a high-frequency induction thermal plasma device to obtain a W powder having a D50 of 11 μm, which is an example 2 of the present invention.
The operating conditions were as follows: plasma power was 120 kW, argon (flow rate = 260 L/min) and hydrogen (flow rate = 30 L/min) were adjusted as operating gases, and argon (flow rate = 8 L/min) was used as supply gas. At this time, the pressure fluctuation in the reactor during the spheroidization treatment [(maximum value - minimum value) / (maximum value + minimum value)] x 100 (%) was adjusted to be 2.0%.

市販のW粉末を、集合体のD50が11μmとなるように分級調整してW原料粉末を準備した。このW原料粉末を、高周波誘導熱プラズマ装置を用いて球状化処理を行ない、W素粉を得た。
動作条件は、プラズマ電力を120kWとし、動作ガスとしてアルゴン(流量=260L/min)と水素(流量=30L/min)を調整して、供給ガスにアルゴン(流量=8L/min)を用いた。このとき、球状化処理中の反応炉内の圧力変動[(最大値-最小値)/(最大値+最小値)]×100(%)が5.6%となるように調整した。
次に、球状化処理されたW素粉に対して、日清エンジニアリング製の精密空気分級機(TC-25)を使用し、ロータ回転数を4000rpmに設定して分級処理を行ない、D50が11μmの本発明例3となるW粉得た。
A commercially available W powder was classified and adjusted so that the aggregate had a D50 of 11 μm to prepare a W raw material powder. This W raw material powder was subjected to a spheroidizing treatment using a high-frequency induction thermal plasma device to obtain W elementary powder.
The operating conditions were as follows: plasma power was 120 kW, argon (flow rate = 260 L/min) and hydrogen (flow rate = 30 L/min) were adjusted as operating gases, and argon (flow rate = 8 L/min) was used as supply gas. At this time, the pressure fluctuation in the reactor during the spheroidization treatment [(maximum value - minimum value) / (maximum value + minimum value)] x 100 (%) was adjusted to be 5.6%.
Next, the spheroidized W powder was classified using a precision air classifier (TC-25) manufactured by Nisshin Engineering Co., Ltd., with the rotor rotation speed set to 4000 rpm, to obtain W powder of Example 3 of the present invention having a D50 of 11 μm.

市販のW粉末を、集合体のD50が11μmとなるように分級調整してW原料粉末を準備した。このW原料粉末を、高周波誘導熱プラズマ装置を用いて球状化処理を行ない、W素粉を得た。
動作条件は、プラズマ電力を120kWとし、動作ガスとしてアルゴン(流量=260L/min)と水素(流量=30L/min)を調整して、供給ガスにアルゴン(流量=8L/min)を用いた。このとき、球状化処理中の反応炉内の圧力変動[(最大値-最小値)/(最大値+最小値)]×100(%)が2.0%となるように調整した。
次に、球状化処理されたW素粉に対して、日清エンジニアリング製の精密空気分級機(TC-25)を使用し、ロータ回転数を4000rpmに設定して分級処理を行ない、D50が11μmの本発明例4となるW粉得た。
A commercially available W powder was classified and adjusted so that the aggregate had a D50 of 11 μm to prepare a W raw material powder. This W raw material powder was subjected to a spheroidizing treatment using a high-frequency induction thermal plasma device to obtain W elementary powder.
The operating conditions were as follows: plasma power was 120 kW, argon (flow rate = 260 L/min) and hydrogen (flow rate = 30 L/min) were adjusted as operating gases, and argon (flow rate = 8 L/min) was used as supply gas. At this time, the pressure fluctuation in the reactor during the spheroidization treatment [(maximum value - minimum value) / (maximum value + minimum value)] x 100 (%) was adjusted to be 2.0%.
Next, the spheroidized W powder was classified using a precision air classifier (TC-25) manufactured by Nisshin Engineering Co., Ltd., with the rotor rotation speed set to 4000 rpm, to obtain W powder having a D50 of 11 μm, which is Example 4 of the present invention.

市販のW粉末を、集合体のD50が11μmとなるように分級調整してW原料粉末を準備した。このW原料粉末を、高周波誘導熱プラズマ装置を用いて球状化処理を行ない、D50が11μmの比較例となるW粉末を得た。
動作条件は、プラズマ電力を120kWとし、動作ガスとしてアルゴン(流量=260L/min)と水素(流量=30L/min)を調整して、供給ガスにアルゴン(流量=8L/min)を用いた。このとき、球状化処理中の反応炉内の圧力変動[(最大値-最小値)/(最大値+最小値)]×100(%)が5.6%となるように調整した。
A commercially available W powder was classified and adjusted so that the aggregate had a D50 of 11 μm to prepare a W raw material powder. This W raw material powder was subjected to a spheroidizing treatment using a high-frequency induction thermal plasma device to obtain a W powder having a D50 of 11 μm as a comparative example.
The operating conditions were as follows: plasma power was 120 kW, argon (flow rate = 260 L/min) and hydrogen (flow rate = 30 L/min) were adjusted as operating gases, and argon (flow rate = 8 L/min) was used as supply gas. At this time, the pressure fluctuation in the reactor during the spheroidization treatment [(maximum value - minimum value) / (maximum value + minimum value)] x 100 (%) was adjusted to be 5.6%.

上記で得た各W粉末について、(1)反射率、(2)流動度、(3)円形度、(4)酸素含有量および(5)明度L*を測定した。その結果を表1に示す。
(1)反射率および(5)明度L*
JIS Z 8781-4:2013に準拠して、コニカミノルタ製の分光測色計(CM-2500d)を用いて測定した。尚、反射率および明度L*の測定は、ディテクターへの粉末の付着を抑制するために、ディテクターと測定用粉末試料の間に、厚さ1mmのスペーサを挟んで実施した。また、反射率は、波長360~740nmの範囲で測定される反射率の最小値を採用した。
(2)流動度
JIS Z 2502に準拠した方法で測定した。
尚、本発明例2~本発明例4および比較例となるW粉末は、オリフィスを開けても粉末が流れ出さなかったため、粉末が流れ出すように漏斗を軽く1回たたいてから測定をした。
(3)円形度
Malvern Instruments製の粒子画像分析装置(Morphologi G3)を用いて、20000個を測定することで求めた。
(4)酸素含有量
酸素含有量は、不活性ガス溶融―赤外線吸収法により分析した。
For each of the W powders obtained above, (1) reflectance, (2) fluidity, (3) circularity, (4) oxygen content, and (5) lightness L* were measured. The results are shown in Table 1.
(1) Reflectance and (5) Lightness L*
Measurements were performed using a Konica Minolta spectrophotometer (CM-2500d) in accordance with JIS Z 8781-4:2013. The reflectance and lightness L* were measured by placing a spacer having a thickness of 1 mm between the detector and the powder sample to prevent the powder from adhering to the detector. The reflectance was determined as the minimum value of the reflectance measured in the wavelength range of 360 to 740 nm.
(2) Flowability: Measured according to a method in accordance with JIS Z 2502.
In addition, in the case of the W powder of the invention examples 2 to 4 and the comparative example, the powder did not flow out even when the orifice was opened, so the funnel was lightly tapped once to make the powder flow out before the measurement.
(3) Circularity The circularity was determined by measuring 20,000 particles using a particle image analyzer (Morphologi G3) manufactured by Malvern Instruments.
(4) Oxygen Content The oxygen content was analyzed by inert gas fusion-infrared absorption method.

Figure 0007540256000001
Figure 0007540256000001

比較例となるW粉末は、図1に示すように、表面に粒子径が0.3μm以下の超微粒子(淡色の分布物である。)が多数観察された。また、比較例となるW粉末は、成形用W粉末同士が凝集している箇所も確認された。このようなW粉末は、流動度が15s/50g以下であっても、反射率が10%を下回っていた。また、比較例となるW粉末は、酸素含有量が0.020質量%を超えており、明度L*が40を下回っていた。 As shown in Figure 1, the W powder used as the comparative example had a large number of ultrafine particles (light-colored distribution) with a particle diameter of 0.3 μm or less observed on the surface. In addition, the W powder used as the comparative example also had areas where the W powder for molding had aggregated together. Even though the fluidity of this W powder was 15 s/50 g or less, the reflectance was below 10%. Furthermore, the W powder used as the comparative example had an oxygen content of more than 0.020 mass% and a lightness L* of less than 40.

一方、本発明例となるW粉末は、図1に示すように、いずれも、粒子径が0.3μm以下の超微粒子の付着が抑制されていることが確認できた。そして、本発明例となるW粉末は、いずれも、反射率が10%以上、流動度が15s/50g以下であった。また、本発明例となるW粉末は、いずれも、酸素含有量が0.020質量%以下であり、明度L*が40以上であり、成形用W粉末同士の凝集が抑制され、供給性や充填性といった取り扱い性に優れる、ニアネット成形に適した成形用のW粉末であることが確認できた。

On the other hand, it was confirmed that the adhesion of ultrafine particles having a particle diameter of 0.3 μm or less was suppressed in all of the W powders of the present invention, as shown in Figure 1. The W powders of the present invention all had a reflectance of 10% or more and a flowability of 15s/50g or less. It was also confirmed that the W powders of the present invention all had an oxygen content of 0.020 mass% or less, a lightness L* of 40 or more, and were W powders suitable for near-net molding, with excellent handling properties such as supplyability and filling properties, and with suppressed aggregation of the W powders for molding.

Claims (3)

Wおよび不可避不純物からなる組成を有し、波長360~740nmの範囲で測定される反射率の最小値が10%以上であり、JIS Z 8781-4:2013に準拠して測定される明度L*が40以上であり、JIS Z 2502に準拠して測定される流動度が14s/50g以下であるW粉末。 A W powder having a composition consisting of W and inevitable impurities, the W powder having a minimum reflectance of 10% or more as measured in a wavelength range of 360 to 740 nm, a lightness L* of 40 or more as measured in accordance with JIS Z 8781-4:2013, and a flowability of 14 s/50 g or less as measured in accordance with JIS Z 2502. 円形度が0.85以上である請求項1に記載のW粉末。 The W powder according to claim 1, having a circularity of 0.85 or more. 酸素を0.001~0.020質量%を含む請求項1または請求項2に記載のW粉末。 The W powder according to claim 1 or 2 contains 0.001 to 0.020 mass% oxygen.
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JP2000007378A (en) 1998-06-26 2000-01-11 Nippon Electric Glass Co Ltd Glass bead for retroreflector
JP2002220601A (en) 2001-01-29 2002-08-09 Hitachi Metals Ltd Method for producing low oxygen spherical metal powder by DC thermal plasma treatment
JP2004225135A (en) 2003-01-24 2004-08-12 High Frequency Heattreat Co Ltd Method for synthesizing/refining or spheroidizing powder by thermal plasma, and apparatus therefor
JP2007211333A (en) 2006-02-13 2007-08-23 Sumitomo Metal Mining Co Ltd Tungsten ultrafine powder and method for producing the same
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