JP7543602B2 - A firing jig consisting of a setter and a base plate - Google Patents

Description

The present invention relates to a baking jig consisting of a setter and a base plate. More specifically, the present invention relates to a baking jig consisting of a setter and a base plate on which the setter is placed, which can effectively prevent the setter from sliding.

When firing ceramic electronic components or glass, it is common to place the objects to be fired on a ceramic sheet setter, also known as a shelf board, and then fire the objects. In firing processes that use such setters, high production efficiency is required to fire a large number of objects to be fired simultaneously. For this reason, firing is carried out in a multi-tiered configuration in which multiple setters are stacked at specified intervals using a firing jig in which a setter is placed on a member called a firing base or firing rack.

Conventional techniques related to ceramic setters include, for example, a setter for hot forming processing made of ceramics whose main component is aluminum nitride and consisting of a porous plate with many holes penetrating from the front to the back, and a ceramic firing kiln tool plate in which at least the front and back sides on which the sintered object is placed are given an uneven shape and openings are formed. In addition, as a technique for preventing the occurrence of cracks in a setter when the sintered object is rapidly heated and cooled, a ceramic lattice body having a plurality of first ceramic striated portions and a plurality of second ceramic striated portions intersecting the first ceramic striated portions, in which the first and second striated portions have a specific contact form, has been disclosed (see Patent Document 1 for an example).

On the other hand, as a firing jig called a base plate or the like, for example, a firing jig has been disclosed that is characterized by having a frame body having a hollow part in the center and a plurality of bridge parts that span the hollow part of the frame body and cross each other at the hollow part, and the frame body and the bridge parts are integrally molded. It has been reported that this firing jig improves the productivity of manufacturing ceramic products by firing.
As another firing tool called a base plate, Patent Document 2 discloses a firing rack configured to place flat setters on which the objects to be fired are loaded, the firing rack comprising a frame having an opening on the surface of which the flat setters are placed, a column extending between the frames passing through the center of the frame, a number of surrounding sections surrounded by the frame and the column, and a number of sub-columns extending from the center of the surrounding section toward the frame or the column. It has been reported that this firing rack can reduce unevenness in the in-plane temperature distribution of the loaded flat setters.

JP 2018-193274 A International Publication No. 2021/033375

As shown in FIG. 1, such ceramic setters and base plates (firing racks) are often stacked in a multi-tiered configuration during firing, with a setter placed on each base plate and an object to be fired placed on each setter. In FIG. 1, S is a setter, P is a multi-tiered base plate, and C is an object to be fired, with a setter placed on each base plate and an object to be fired placed on it. In some cases, it may be necessary to store and transport the combination of ceramic setters and base plates stacked in a multi-tiered state. During such stacking operations or when transporting in a multi-tiered state, if the setter slides on the base plate due to a slight tilt or vibration (i.e., horizontal or vertical movement), it may lead to damage or falling of the setter, deformation or damage to the object to be fired placed on the setter, firing failure, and falling of fine objects to be fired such as electronic components from the setter. For this reason, when the ceramic setter and base plate are combined and stacked, or when they are transported in a multi-layered state, good handling properties are required so that the setter does not slide easily on the base plate. However, no technology capable of sufficiently preventing such sliding has been developed so far.

Therefore, the problem that the present invention aims to solve is to provide a firing jig consisting of a combination of a ceramic setter and a base plate, which has good handling properties so that the setter does not easily slide on the base plate due to slight tilt or vibration (horizontal or vertical movement) during stacking operations or when transporting them in a multi-layered state.

As a result of intensive research, the inventors have discovered that in a firing jig consisting of a setter, which is a ceramic sheet including at least a part of a so-called mesh-like portion, and a base plate on which the setter is placed, a sliding prevention portion is provided in a predetermined region facing the mesh-like portion on the surface of the base plate on which the setter is placed, and the average width of the first striated portion in a predetermined region of the first striated portion layer including the portion arranged above the sliding prevention portion is defined as D (mm), and the JIS According to B0601:1994, when the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope is Rzjis (μm), by designing Rzjis/D to be within a specific range, the frictional resistance to the movement of the setter on the base plate is increased, making it possible to sufficiently prevent the setter from sliding on the base plate, while at the same time effectively suppressing breakage or falling of the setter placed on the base plate and deformation or damage to the object to be sintered placed on the setter, thereby greatly improving the handleability as a sintering jig for ceramic products, and thus the sintering jig according to the present invention has been completed.

Thus, one exemplary embodiment of the present invention is as follows:
A firing jig consisting of a setter and a base plate on which the setter is placed,
the setter is a ceramic sheet including at least a portion of a mesh-like portion, the mesh-like portion including a first striated portion layer including a plurality of first striated portions arranged at a given interval and extending in one direction, and a second striated portion layer including a plurality of second striated portions arranged at a given interval so as to be in contact with and intersect with each of the first striated portions and extending in one direction, the first striated portion layer and the second striated portion layer being integrally formed;
(1) A sliding prevention portion is provided in a predetermined area facing the mesh portion on the surface of the base plate on which the setter is placed,
(2) In a predetermined region of the first filament portion layer including a portion disposed above the anti-slip portion, an average width of the first filament portion is D (mm),
When the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm),
The relationship of 5≦Rzjis/D≦100 is satisfied.
Firing fixture.

According to the firing jig consisting of the setter of the present invention and the base plate on which it is placed, by providing an anti-slip portion in a specified area on the base plate and setting the ratio of the 10-point average roughness Rzjis (measured in accordance with JIS B0601:1994) of the anti-slip portion to the average width D (mm) of the first striated portion in a specified area of the first striated portion layer within a specific range, it is possible to sufficiently prevent the setter from sliding on the base plate, while at the same time effectively suppressing breakage or falling of the setter placed on the base plate and deformation or damage to the object to be fired placed on the setter, and thus significantly improving the handleability of the firing jig for ceramic products.

FIG. 1 is a diagram illustrating a known layered configuration in which ceramic setters and base plates (firing racks) are stacked in multiple stages. FIG. 2 is a diagram illustrating an embodiment of a mesh portion of a setter in a baking jig according to the present invention. FIG. 3 is a diagram showing one embodiment of a combination of a setter and a bottom plate in a baking jig according to the present invention. FIG. 4 is a diagram for explaining one embodiment of the relationship between the first linear portions of the mesh portion of the setter and the anti-slip portion of the bottom plate in the baking jig according to the present invention. FIG. 5 is a diagram for explaining another embodiment of the relationship between the first linear portions of the mesh portion of the setter and the anti-slip portion of the bottom plate in the baking jig according to the present invention.

The setter to be combined with the base plate in the firing jig according to the present invention is a ceramic sheet including at least a mesh-like portion, the mesh-like portion including a first striated portion layer consisting of a plurality of first striated portions arranged at a given interval and each striated portion extending in one direction, and a second striated portion layer consisting of a plurality of second striated portions arranged at a given interval so as to contact and cross each of the first striated portions and extend in one direction, and the first striated portion layer and the second striated portion layer are integrally formed. The setter is not particularly limited as long as it includes such a mesh-like portion at least in part. Any known setter structure may be adopted for the portion other than the mesh-like portion of the setter. In one embodiment, a setter that is a mesh-like ceramic sheet sintered body formed integrally as a whole may be used.

Here, the fact that the first striated layer and the second striated layer are "integrally formed" mesh-like sintered bodies means that the striated groups constituting the first striated layer and the striated groups constituting the second striated layer are fired and connected to each other at their contact points to form an integral structure, and are formed so as not to be easily separated. In one embodiment, the first striated layer and the second striated layer are fired and connected to each other at their contact points to form an integral structure, and are formed so as not to be easily separated, and the first striated layer and the second striated layer, or different parts of each striated layer, may be formed from a single composition. In another embodiment, the first filamentary layer and the second filamentary layer are formed by firing and connecting the filaments constituting the first filamentary layer and the filaments constituting the second filamentary layer at their contact points to form an integral structure and are not easily separated, and the first filamentary layer and the second filamentary layer, or different portions of each filamentary layer, may be formed from a plurality of different compositions.

An embodiment of the mesh-like portion of the setter is illustrated in FIG. 2. In FIG. 2, the mesh-like portion 1 includes a first striated portion layer composed of a plurality of first striated portions 2 arranged at approximately regular intervals and stretched in one direction, and a second striated portion layer composed of a plurality of second striated portions 3 arranged at approximately regular intervals so as to contact and cross each of the first striated portions 2 and stretched in one direction. The intersection angle between the two striated portions 2 and 3 can be set appropriately, but for example, the intersection angle of the second striated portion 3 with respect to the first striated portion 2 can be set to about 90 degrees. Alternatively, the intersection angle of the second striated portion 3 with respect to the first striated portion 2 can be changed within a range of 90 degrees ± 10 degrees. The cross-sectional shapes of the first striated portion 2 and the second striated portion 3 are not particularly limited, but may be approximately circular or approximately elliptical as shown in the figure. The cross-sectional shape of the first filamentary portion 2 and the second filamentary portion 3 may be a substantially circular shape, a substantially elliptical shape, or a substantially polygonal shape such as a substantially rectangular shape, or a shape obtained by cutting a part of these shapes in a straight line.

The ceramic raw material powder of the first filament portion and the second filament portion of the mesh-like portion of the ceramic sheet is not particularly limited and may contain various ceramic materials. Examples of the ceramic raw material powder used as the ceramic raw material powder include one or a combination of two or more of alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), magnesium oxide (MgO), mullite (3Al ₂ O ₃ -2SiO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), aluminum nitride (AlN), boron carbide (B ₄ C), cordierite (MgO/Al ₂ O ₃ /SiO ₂ ), aluminum titanate (Al ₂ TiO ₅ ), magnesium titanate (MgTiO ₃ ), and titanium diboride (TiB ₂ ). In addition, a sintered body manufactured using raw material powder that is one or a combination of two or more of these ceramic materials will naturally have a composition that can be produced from these materials. In the mesh-like portion of the ceramic sheet according to one embodiment, the first striated layer and the second striated layer, or different parts of each striated layer, may be formed from a single composition. In the mesh-like portion of the ceramic sheet according to another embodiment, the first striated layer and the second striated layer, or different parts of each striated layer may be formed from a plurality of different compositions. In one embodiment, a setter that is a mesh-like ceramic sheet sintered body integrally formed as a whole from a single type of material may be used. By using such a setter, the strength of the entire ceramic sheet is very high, and it also leads to efficient production of the setter.

When the mesh-like portion occupies a part of the ceramic sheet, the ceramic raw material powder of the portion other than the mesh-like portion is not particularly limited and may be the same as or different from the raw material powder of the mesh-like portion described above. When the ceramic sheet has a portion other than the mesh-like portion, the raw material powder is preferably the same as the raw material powder of the mesh-like portion in contact with it. In a preferred embodiment, the mesh-like portion and the portion other than the mesh-like portion may be a ceramic sheet sintered body formed integrally. If the mesh-like portion and the portion other than the mesh-like portion constitute a sintered body formed integrally and the raw material powder of both is the same, the strength of the entire ceramic sheet is increased and the decrease in bonding strength due to the thermal history of heating and cooling during sintering (repeated expansion and contraction) can be prevented.

In one embodiment, the mesh-like portion of the ceramic sheet has a configuration in which, at any intersection between the first and second striated portions, the cross section of the first striated portion has a shape consisting of a straight portion and a convex curved portion having both ends of the straight portion as its ends, the cross section of the second striated portion has a circular or elliptical shape, and further, in a vertical cross-sectional view of the intersection, only the apex of the convex curved portion of the first striated portion and the downwardly convex apex of the circle or ellipse of the second striated portion are in contact (a so-called point contact configuration).

In another embodiment, the mesh-like portion of the ceramic sheet may have a cross section of the first striated portion that has a shape consisting of a straight portion and a convex curved portion having both ends of the straight portion as ends at a portion other than the intersection between the first striated portion and the second striated portion, and the cross section of the second striated portion has a circular or elliptical shape at a portion other than the intersection, and the first striated portion and the second striated portion each form an intersection where they contact each other not at a single point but over a surface. This configuration may be called a surface contact structure as opposed to the above-mentioned so-called point contact.

In one embodiment corresponding to a sub-concept of the above structural example based on such surface contact, the mesh-like portion of the ceramic sheet has a cross-section of the first striated portion that has a shape consisting of a straight portion and a convex curved portion having both ends of the straight portion as ends at a portion other than the intersection of the first striated portion and the second striated portion, and the cross-section of the second striated portion has a circular or elliptical shape at a portion other than the intersection, and further, the projected image of the second striated portion in a plan view has a shape that curves and bulges outward in the width direction at the intersection, so that the width of the projected image at the intersection is larger than the width of the projected image at the portion other than the intersection.

In yet another embodiment of the mesh-like portion of the ceramic sheet, the cross section of the first striated portion has a shape consisting of a straight portion and a convex curved portion having both ends of the straight portion as ends at a portion other than the intersection of the first striated portion and the second striated portion, and the cross section of the second striated portion has a circular or elliptical shape at a portion other than the intersection of the first striated portion and the second striated portion, and the sintered body may have a straight side portion in at least a portion of the outline in a plan view, and the first striated portion and the second striated portion may each independently intersect with this straight side portion (outer side) at an angle of 10 degrees or more and 170 degrees or less (i.e., within a wide angle range including angles that are not right angles).

In yet another embodiment, the mesh-like portion of the ceramic sheet may be a plate-like ceramic structure having, in addition to a plurality of first linear portions and a plurality of second linear portions, a plurality of third linear portions made of ceramic passing on the diagonals of a quadrilateral defined by the intersection of the first linear portions and the second linear portions, and having a plurality of triangular through holes defined by the first linear portions, the second linear portions, and the third linear portions.

When the mesh-like portion occupies a portion of the ceramic sheet, the portion other than the mesh-like portion is not particularly limited, but examples include a ceramic plate having a large number of fine pores (including a plate having different pore sizes/different pore densities in different areas) and a sheet in which a first striated layer (support layer) and a second striated layer are arranged in a shape other than a mesh (one example is a so-called lattice-shaped sheet).

The base plate in the baking jig according to the present invention is not particularly limited as long as it satisfies the following relationship between the base plate and the setter placed thereon:
(1) A sliding prevention portion is provided in a predetermined area facing the mesh portion on the surface of the base plate on which the setter is placed,
(2) In a predetermined region of the first filament portion layer including a portion disposed above the anti-slip portion, an average width of the first filament portion is D (mm),
When the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm),
The relationship: 5≦Rzjis/D≦100 is satisfied.
In the embodiments described below, _D1 and _D2 are both included in the above definition of D, and Rzjis ₁ and Rzjis ₂ in the embodiments described below are both included in the above definition of Rzjis.

The shape of the floor plate is not particularly limited as long as the base (reference surface) of the upper surface is flat at least in the area where the setter may be placed, the outer periphery is capable of accommodating the entire setter, and the setter can be stably placed. The shape of the floor plate may be, for example, a flat plate such as a substantially circular, substantially elliptical, or substantially rectangular polygon. The thickness of the base material part of the floor plate (hereinafter, the part of the floor plate other than the anti-slip part) is not particularly limited at least in the area where the setter may be placed, but may be, for example, 1 mm or more and 50 mm or less, or 2 mm or more and 30 mm or less. The thickness of the base material part of the floor plate may be the same throughout the entire floor plate at least in the area where the setter may be placed, or may vary in thickness in some parts. In addition, at least a part of the floor plate may have a peripheral wall or rib. The floor plate may have a peripheral wall or rib around its entire periphery. In addition, the sole plate may have legs at a part of its bottom (usually at a plurality of locations near the periphery) from the viewpoint of handling and ensuring breathability during firing by stacking in multiple layers. Alternatively, the sole plate may have support columns at a part of its top (usually at a plurality of locations near the periphery) instead of such legs. In order to maintain breathability during the firing process, it is preferable that the sole plate has a single or a plurality of openings (hollow portions). From the viewpoint of breathability, it is also preferable that the majority of the sole plate other than the vicinity of the periphery is an opening. From the same viewpoint, the openings of the sole plate are not particularly limited, but it is preferable that they occupy 60% or more, 70% or more, or 80% or more of the area in the plane formed by the outer edge of the sole plate. From the same viewpoint, the area of the openings of the sole plate is not particularly limited, but it is also preferable that it is 70% or more, 80% or more, or 90% or more of the area of the setter placed on the sole plate.

A sliding prevention part for preventing the setter from sliding is provided in a predetermined area facing the mesh-like part on the surface of the floor plate on which the setter is placed. In this specification, "sliding prevention" is intended to refer to any phenomenon in which a function capable of physically preventing or suppressing sliding is given to a predetermined area facing the mesh-like part on the surface of the floor plate on which the setter is placed, thereby giving a greater frictional resistance to sliding than the frictional resistance to sliding when the setter is placed on the plane on the assumption that the predetermined area on the surface of the floor plate on which the setter is placed is formed as a plane not given this function. The sliding prevention part is usually composed of a substantially continuous uneven shape formed on the surface of the floor plate (base material part), and refers to a part that is given a function of physically preventing or suppressing sliding, but is not limited to this. For example, the sliding prevention part may be a substantially continuous uneven shape formed within a predetermined area on the surface of the floor plate (base material part) and a substantially continuous uneven shape formed within a predetermined area at another position, which are arranged at a constant or non-constant predetermined interval.

The "predetermined area" on the surface of the floor plate on which the setter is placed is not particularly limited as long as it is an area including a position facing at least a part of the mesh-like portion, and this area may be one or more (e.g., 2 to 10). That is, the "predetermined area" on the surface of the floor plate can be appropriately determined in response to various elements such as the arrangement of the mesh-like portion in the setter and the shape design of the mesh. A slip prevention part may be provided in each of one or multiple separated (2 or 3 or more, 4 or more, or 5 or more) predetermined areas. When a slip prevention part is provided in multiple separated predetermined areas, the area of the slip prevention part in each area may be the same or different. A slip prevention part may be provided in an area including all positions facing the mesh-like portion on the surface of the floor plate on which the setter is placed. A slip prevention part may be provided on almost the entire surface of the floor plate on which the setter is placed.

An embodiment of a combination of a setter and a bottom plate in a baking jig according to the present invention is shown in Fig. 3. Neither the setter nor the bottom plate of the baking jig according to the present invention is limited to the form shown in Fig. 3, which is merely an example.
In FIG. 3, 4 indicates a firing jig (combined with a base plate and a setter), 5 indicates a setter (ceramic sheet), 6 indicates a base plate, 7 indicates a frame (base material of the base plate), 8 indicates a hollow portion (opening), 9 indicates a peripheral wall portion (rib), 10 indicates a leg portion, and 11 indicates a sliding prevention portion. The setter 5, which is one member of the firing jig 4, is entirely formed of a mesh-like portion consisting of a first linear portion layer consisting of a first linear portion extending in one direction at approximately regular intervals, and a second linear portion layer consisting of a second linear portion extending in one direction at approximately regular intervals and approximately perpendicular to the first linear portion. The base plate 6, which is the other member of the firing jig 4, is composed of a frame 7, which is a substantially rectangular plate-like body having a hollow portion 8, and has an upright peripheral wall portion 9 formed around the entire periphery, and is provided with legs 10 for stacking in multiple layers at each of the four corners of the rectangle. The peripheral wall portion (rib) 9 is illustrated as a configuration that forms the entire periphery, but may be a part of the periphery. The upper surface of the frame 7 of the sole plate 6 forms a flat surface on which the entire peripheral portion of the setter 5 can be placed, and the peripheral wall portion 9 is formed so that when the setter 5 is placed on the frame 7 of the sole plate 6, the entire peripheral portion of the setter 5 has a predetermined distance from the peripheral wall portion. A sliding prevention portion (approximately continuous uneven shape) 11 is formed at a predetermined position on the surface of each side of the frame 7 of the sole plate 6. When the setter 5 is placed on the frame 7 of the sole plate 6, the mesh-like portion that constitutes the entire setter 5 is placed on at least a part of the multiple sliding prevention portions 11 on the surface of each side of the frame 7, and the prevention and suppression performance against sliding is imparted. By vertically stacking multiple baking jigs 4, which are combinations of such setters 5 and sole plates 6, a multi-tiered baking jig can be formed. In such a multi-tiered stack, ventilation is ensured not only in the hollow portion 8 but also between the multiple leg portions 10, and also between the peripheral wall portions if they are formed as part of the periphery, allowing an efficient firing process to be carried out.

As shown as an example in Figure 3, a preferred embodiment of the baking jig according to the present invention is one in which anti-slip portions (typically having a substantially continuous uneven shape) are provided in each of a plurality of predetermined regions facing the mesh-like portion on the surface of the base plate on which the setter is placed, and the anti-slip portions are arranged so that each of the plurality of regions of the base plate corresponds to the vicinity of the periphery of the setter when the setter is placed on the base plate. By satisfying the relationship between the anti-slip portions and the first linear portions described below and adopting such an arrangement, the setter can be placed more stably on the base plate, and it is possible to effectively prevent and suppress sliding of the setter on the base plate.
In order to obtain this effect more reliably, the total area of the region on the base plate where the anti-slip portion is provided is preferably 0.004% or more of the total area of the opposing setter surface, more preferably 0.2% or more, and even more preferably 0.5% or more. On the other hand, from the viewpoint of reducing the rate of defective products during base plate production and efficiently firing the fired object with the base plates and the setters stacked in multiple layers, this ratio may be 15% or less, typically 10% or less.

FIG. 4 shows one embodiment of a combination of a setter and a base plate in a baking jig according to the present invention. In this figure, the setter is placed on the base plate. Here, 12 indicates the first linear portion of the mesh-like portion of the setter, 13 indicates the base plate (substrate portion), and 14 indicates a sliding prevention portion formed in a predetermined area on the base plate (one of the sliding prevention portions if multiple sliding prevention portions are formed in a predetermined area on the base plate). In this figure, when the setter is placed on the base plate, one or more of the small projections having an uneven shape formed substantially continuously as the sliding prevention portion 14 (usually multiple of the projections as shown in the figure) are in contact with the first linear portion 12.
In Figure 4 (and Figure 5 described later), the group of tiny protrusions with an uneven shape of the anti-slip portion 14 is depicted as being in contact with adjacent protrusions as an example for the convenience of explanation, but this is not limited to this.

As shown in FIG. 4 , when the average width of the first filamentary portion 12 in a predetermined region of the first filamentary portion layer arranged above the anti-slip portion 14 is D ₁ (mm), and the anti-slip portion 14 provided in a predetermined region facing the mesh-like portion on the base plate 13 has a 10-point average roughness Rzjis ₁ (μm) measured by observation with a laser microscope in accordance with JIS B0601:1994, the ratio of Rzjis ₁ (μm) to D ₁ (mm) is 5 or more and 100 or less, that is, the relationship 5≦Rzjis ₁ /D ₁ ≦100 is satisfied.

Here, the first striated portion 12 is usually designed to have a certain width and to be stretched in one direction, but the width may have a small error due to the forming process and the sintering process of the molded body to be sintered. Taking into account such an error in the width of the first striated portion, the average width of the first striated portion 12 is defined as _D1 (the same applies to the average width _D2 in another embodiment described later). That is, the average of the widths of any five points of the first striated portion in a predetermined region in a direction perpendicular to the design direction of the first striated portion and in a plan view parallel to the upper surface of the sole plate is defined as the average width _D1 .
In addition, the observation using a laser microscope to measure the 10-point average roughness Rzjis ₁ (μm) of the anti-slip portion 14 is performed by using, for example, a "VK-8710" manufactured by Keyence Corporation as the laser microscope, and measuring the cross-sectional curve scanned at a magnification of 200 times (the same applies to the average width Rzjis ₂ in another embodiment described later).

In this way, when the average width of the first striated portion in a predetermined region of the first striated portion layer is D (mm), and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope according to JIS B0601:1994 on the anti-slip portion provided in a predetermined region facing the mesh-like portion on the base plate is Rzjis (μm), the relationship 5≦Rzjis/D≦100 is satisfied, so that a sufficient and appropriate degree of friction resistance against the sliding of the setter on the base plate is imparted. This makes it possible to sufficiently prevent the setter from sliding on the base plate, and at the same time, it is possible to effectively suppress the breakage and falling of the setter placed on the base plate and the damage to the sintered object placed on the setter, and thus an unexpected and excellent effect is obtained in that the handleability of the ceramic product as a sintering jig can be greatly improved.

In a preferred embodiment, from the viewpoint of further enhancing the above-mentioned desired effects, the average width of the first striated portion in a predetermined region of the first striated portion layer is D (mm), and the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 for the anti-slip portion provided in a predetermined region facing the mesh-like portion on the floor plate is Rzjis (μm), the range of Rzjis/D is 5≦Rzjis/D≦95, 5≦Rzjis/D≦90, 5≦Rzjis/D≦85, 5≦Rzjis/D≦80, 5≦Rzjis/D≦75, 5≦Rzjis/D≦70, 5≦Rzjis/D≦65, 5≦Rzjis/D≦60, 5≦Rzjis/D≦55, 5≦Rzjis/D≦50, 10 ≦Rzjis/D≦100, 10≦Rzjis/D≦95, 10≦Rzjis/D≦90, 10≦Rzjis/D≦85, 10≦Rzjis/D≦80, 10≦Rzj is/D≦75, 10≦Rzjis/D≦70, 10≦Rzjis/D≦65, 10≦Rzjis/D≦60, 10≦Rzjis/D≦55, 10≦Rzjis/D≦50, 15 ≦Rzjis/D≦100, 15≦Rzjis/D≦95, 15≦Rzjis/D≦90, 15≦Rzjis/D≦85 、１５≦Ｒｚｊｉｓ／Ｄ≦８０、１５≦Ｒｚｊｉｓ／Ｄ≦７５、１５≦Ｒｚｊｉｓ／Ｄ≦７０、１５≦Ｒｚｊｉｓ／Ｄ≦６５、１５≦Ｒｚｊｉｓ／Ｄ≦６０、１５≦Ｒｚｊｉｓ／Ｄ≦５５、１５≦Ｒｚｊｉｓ／Ｄ≦５０、２０≦Ｒｚｊｉｓ／Ｄ≦１００、２０≦Ｒｚｊｉｓ／Ｄ≦９５、２０≦Ｒｚｊｉｓ／Ｄ≦９０、２０≦Ｒｚｊｉｓ／Ｄ≦８５、２０≦Ｒｚｊｉｓ／Ｄ≦８０、２０≦Ｒｚｊｉｓ／Ｄ≦７５、２０≦Ｒｚｊｉｓ／Ｄ≦７０、２０≦Ｒｚｊｉｓ／Ｄ≦ Rzjis/D≦65, 20≦Rzjis/D≦60, 20≦Rzjis/D≦55, 20≦Rzjis/D≦50, 25≦Rzjis/D≦100, 25≦Rzjis/D≦95, 25≦Rzjis/D≦90, 25≦Rzjis/D≦85, 25≦Rzjis/D≦80, 25≦Rzjis/D≦75, 25≦Rzjis/D≦70, 25≦Rzjis/D≦65, 25≦Rzjis/D≦60, 25≦Rzjis/D≦55, or 25≦Rzjis/D≦50.

In another preferred embodiment, from the viewpoint of further enhancing the above-mentioned desired effects, the anti-slip portion provided in a predetermined region facing the mesh-like portion on the floor plate is in accordance with JIS B0601:1994, and when the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope is Rzjis (μm), the range of Rzjis is 1≦Rzjis≦30 (hereinafter, the notation of μm, which is the unit of Rzjis, will be omitted.), 1≦Rzjis≦25, 1≦Rzjis≦20, 1≦Rzjis≦18, 1≦Rzjis≦16, 3≦Rzjis≦30, 3≦Rzjis≦25, 3≦Rzjis≦20, 3≦Rzjis≦20, is≦18, 3≦Rzjis≦16, 5≦Rzjis≦30, 5≦Rzjis≦25, 5≦Rzjis≦20, 5≦Rzjis≦18, 5≦Rzjis≦16, 7≦Rzjis≦30, 7≦Rzjis≦25, 7≦Rzjis≦20, 7≦Rzjis≦18, 7≦Rzjis≦16, 10≦Rzjis≦30, 10≦Rzjis≦25, 10≦Rzjis≦20, 10≦Rzjis≦18, or 10≦Rzjis≦16.

Figure 5 shows another embodiment of the combination of a setter and a base plate in a firing jig according to the present invention. In this figure, the setter is placed on the base plate. Here, 15 indicates the first linear portion of the mesh-like portion of the setter, 16 indicates the base plate (substrate portion), and 17 indicates a sliding prevention portion formed in a predetermined area on the base plate (one of the sliding prevention portions if multiple sliding prevention portions are formed in a predetermined area on the base plate). In this figure, when the setter is placed on the base plate, one or more of the group of minute projections with a substantially continuous uneven shape (usually multiple of the projections as shown in the figure) are in contact with the first linear portion 15.

As shown in FIG. 5 , when the average width of the first filamentary portion 15 in a predetermined region of the first filamentary portion layer arranged above the anti-slip portion 17 is _D2 (mm), the anti-slip portion 17 provided in a predetermined region facing the mesh-like portion on the floor plate 16 has a 10-point average roughness _Rzjis2 (μm) measured by observation with a laser microscope in accordance with JIS B0601:1994 and a maximum height Rz (μm) measured by observation with a laser microscope in accordance with JIS B0601:2001, not only does the relationship 5≦ _Rzjis2 / _D2 ≦100 (or any of the preferable ranges described above) hold, but also the ratio of Rz (μm) to _Rzjis2 (μm) is 1.1 or more and 10 or less, that is, 1.1≦Rz/ _Rzjis2 ≦10. In a preferred embodiment, this ratio may be 1.2≦Rz/Rzjis ₂ ≦3.
In addition, the observation using a laser microscope to measure the maximum height Rz (μm) of the anti-slip portion 17 is performed in the same manner as in Rzjis ₁ and Rzjis ₂ , by using, for example, a "VK-8710" manufactured by Keyence Corporation as the laser microscope and observing a cross-sectional curve scanned at a magnification of 200 times.

In this way, when the average width of the first striated portion in a predetermined region of the first striated portion layer is D (mm), the 10-point average roughness of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:1994 for the anti-slip portion provided in a predetermined region opposite the mesh-like portion on the base plate is Rzjis (μm), and the maximum height of the anti-slip portion measured by observation with a laser microscope in accordance with JIS B0601:2001 is Rz (μm), in addition to the relationship of 5≦Rzjis/D≦100 (or any of the preferred ranges described above), the relationship of 1.1≦Rz/Rzjis≦10 is satisfied, thereby eliminating the existence of uneven shapes with heights that protrude extremely high compared to the average roughness of the uneven shapes of the anti-slip portion, making it possible to sufficiently prevent the setter from sliding on the base plate, and more effectively suppressing breakage or falling of the setter placed on the base plate and damage to the sintered object placed on the setter. This can dramatically improve the handling properties of the ceramic product as a firing jig.

In a preferred embodiment, from the viewpoint of further enhancing the above-mentioned desired effects, the average width of the first striated portion in a predetermined region of the first striated portion layer is defined as D (mm), and the 10-point average roughness of the anti-slip portion provided in a predetermined region facing the mesh-like portion on the base plate, as measured by observation using a laser microscope in accordance with JIS B0601:1994, is defined as Rzjis (μm), and the 10-point average roughness of the anti-slip portion is defined as Rzjis (μm) in accordance with JIS B0601:1994. In accordance with B0601:2001, when the maximum height of the anti-slip portion measured by observation using a laser microscope is Rz (μm), the range of Rz/Rzjis is 1.1≦Rz/Rzjis≦10, 1.2≦Rz/Rzjis≦10, 1.3≦Rz/Rzjis≦10, 1.4≦Rz/Rzjis≦10, 1.5≦Rz/Rzjis≦10, 1.6≦Rz/Rzjis≦10, 1. 7≦Rz/Rzjis≦10, 1.8≦Rz/Rzjis≦10, 1.9≦Rz/Rzjis≦10, 2≦Rz/Rzjis≦10, 1.1≦Rz/Rzjis ≦7, 1.2≦Rz/Rzjis≦7, 1.3≦Rz/Rzjis≦7, 1.4≦Rz/Rzjis≦7, 1.5≦Rz/Rzjis≦7, 1.6≦Rz/Rz jis≦7, 1.7≦Rz/Rzjis≦7, 1.8≦Rz /Rzjis≦7, 1.9≦Rz/Rzjis≦7, 2≦Rz/Rzjis≦7, 1.1≦Rz/Rzjis≦5, 1.2≦Rz/Rzjis≦5, 1.3≦R z/Rzjis≦5, 1.4≦Rz/Rzjis≦5, 1.5≦Rz/Rzjis≦5, 1.6≦Rz/Rzjis≦5, 1.7≦Rz/Rzjis≦5, 1.8 ≦Rz/Rzjis≦5, 1.9≦Rz/Rzjis≦5 , 2≦Rz/Rzjis≦5, 1.1≦Rz/Rzjis≦3, 1.2≦Rz/Rzjis≦3, 1.3≦Rz/Rzjis≦3, 1.4≦Rz/Rzjis≦3, 1.5≦Rz/Rzjis≦3, 1.6≦Rz/Rzjis≦3, 1.7≦Rz/Rzjis≦3, 1.8≦Rz/Rzjis≦3, 1.9≦Rz/Rzjis≦3, or 2≦Rz/Rzjis≦3.

A method for manufacturing a floor plate having a setter and a sliding prevention portion will be described below, but these should be understood as non-limiting examples.

As described above, the portion of the setter other than the mesh portion (if any) may have any known setter structure, and the mesh portion and the other portion may be combined by any known method, or the two may be integrally formed into a sintered ceramic sheet. Therefore, the following description will focus on the manufacturing method of the mesh portion of the setter.
Examples of the ceramic raw material powder for producing the mesh portion of the setter are as described above. The mass ratio of the ceramic raw material powder in the raw material paste may be usually 20 mass% or more and 85 mass% or less, and preferably 30 mass% or more and 75 mass% or less, based on the mass of the entire paste.

The average particle size of the ceramic raw material powder used in the raw material paste may usually be in the range of 0.1 to 20 μm, and preferably in the range of 0.2 to 10 μm. The average particle size of the ceramic raw material powder here is the volume cumulative median diameter (D50) value measured by the laser diffraction/scattering method. By having the average particle size of the ceramic raw material powder within the above range, it is possible to obtain a sintered body with increased structural strength and stability after firing and reduced possibility of collapse.

Water is usually used as a medium for the raw material paste to create a molded body that is a precursor of the first and second striated layers of the mesh-like portion. As a medium other than water, alcohol, acetone, ethyl acetate, etc. can also be used. Two or more of these media may be mixed. The mass ratio of the medium in the raw material paste may usually be 10% by mass or more and 60% by mass or less, and preferably 15% by mass or more and 55% by mass or less, based on the mass of the entire paste.

The raw material paste for producing a molded body that is a precursor of the first and second striated layers of the mesh-like portion may optionally contain an appropriate amount of any known sintering aid. The raw material paste may also contain any known binder. The mass ratio of the binder in the raw material paste may be, for example, 0% by mass or more and 40% by mass or less, and preferably 1% by mass or more and 40% by mass or less, based on the total mass of the raw material paste.

It is preferable that the viscosity of the raw material paste is high at the temperature at which the linear coating body is applied, in order to successfully produce the linear coating body. The viscosity of the raw material paste is not particularly limited, but is preferably 1.5 MPa·s or more and 5.0 MPa·s or less at the temperature at which it is applied (typically room temperature, such as about 25°C). The viscosity of the raw material paste here refers to the measured value 4 minutes after the start of measurement at a rotation speed of 0.3 rpm using a cone-plate type rotational viscometer or rheometer. The raw material paste may contain any known thickener, flocculating agent, thixotropic agent, etc. as a viscosity adjusting agent.

In order to stabilize the amount of material discharged from the discharge device to obtain a molded body that is a precursor of the first and second striated layers of the mesh-like portion, the raw material paste may contain, for example, any known plasticizer, lubricant, dispersant, settling inhibitor, pH adjuster, etc.

The raw material paste thus obtained is discharged from a discharge device onto a flat substrate to form a first linear coated body having a plurality of stripes arranged at given intervals and each stripe extending in one direction. The first linear coated body corresponds to the first linear portion of the mesh-like portion.
As the discharge device, various known devices such as a small extruder or a printer can be used. These discharge devices may typically include a dispenser having a nozzle. After the first striated coated body is discharged, an operation can be performed to remove the medium contained in the first striated coated body, dry it, and increase the viscosity. The ratio of the medium in the first striated coated body after the medium removal operation may be reduced to preferably 50% by mass or less, more preferably 30% by mass or less.

Next, the raw material paste is used to form a second linear coated body, each stripe of which is extended in one direction and arranged at a given interval so as to contact and intersect with each stripe of the first linear coated body. The second linear coated body corresponds to the second linear portion of the mesh-like portion. The raw material paste for forming the second linear coated body may be the same as or different from the raw material paste for forming the first linear coated body, but it is more preferable that they are the same from the viewpoints of efficiency in forming the linear coated body and integrity of the structure and physical properties of the ceramic sheet sintered body to be produced.

The specific shapes of the multiple first filamentary coated body and the multiple second filamentary coated body formed as a molded body can be constructed to conform to the desired shapes of the various mesh-like portions described above.

In an additional embodiment, the raw material paste may be used to optionally form a third filamentary coating body having a plurality of stripes, each stripe of which is stretched in one direction and arranged at a given interval so as to contact each stripe of the second filamentary coating body and intersect with the first filamentary coating body and the second filamentary coating body. The raw material paste for forming the optional third filamentary coating body may be the same as or different from the raw material paste for forming the first/second filamentary coating bodies, but it is more preferable that they are the same from the viewpoints of efficiency of forming the filamentary coating body and integrity of the structure and physical properties of the mesh-like portion to be produced.

The thus obtained molded body including the multiple first filament coated bodies and the multiple second filament coated bodies is peeled off from the substrate (the workbench on which the molded body is formed) and placed in a firing jig (firing furnace), where it is fired to obtain the desired mesh-like portion. By firing, the mesh-like portion including the first filament layer consisting of the multiple first filament portions and the second filament layer consisting of the multiple second filament portions is usually constructed as a sintered body that is an integrated structure that does not involve physical bonding of the individual components by adhesive.

The firing process for obtaining the mesh-like portion may be carried out in an air atmosphere (atmospheric pressure) or under pressure with an inert gas such as nitrogen, as necessary. The firing temperature may be selected appropriately depending on the type of raw powder of the ceramic material. The same applies to the firing time. Non-limiting examples of the firing temperature may be 500°C or higher, 800°C or higher, or 1000°C or higher, and 4000°C or lower, 3500°C or lower, or 3000°C or lower. Non-limiting examples of the firing time may be 30 minutes or more, 1 hour or more, or 2 hours or more, and 24 hours or less, 12 hours or less, or 6 hours or less.

The ceramic raw material powder and additives for manufacturing the base material portion (other than the anti-slip portion) of the base plate and the anti-slip portion provided thereon may be appropriately selected from the items described above for the mesh-like portion of the setter. For example, the ceramic raw material powder of the base plate may be one or a combination of two or more of alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), magnesium oxide (MgO), mullite (3Al ₂ O ₃ -2SiO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), aluminum nitride (AlN), boron carbide (B ₄ C), cordierite (MgO/Al ₂ O ₃ /SiO ₂ ), aluminum titanate (Al ₂ TiO ₅ ), magnesium titanate (MgTiO ₃ ), titanium diboride (TiB ₂ ), etc.

The base plate's base material (other than the anti-slip portion) and the anti-slip portion provided thereon may be formed from the same raw material (i.e., raw material containing the same mixture of ceramic raw material powder and additives) or from different raw materials. It is more preferable that the base plate's base material and the anti-slip portion provided thereon be formed from the same raw material from the viewpoint of preventing and suppressing the detachment or peeling of the anti-slip portion due to heating and cooling (i.e., expansion and contraction) during firing and the load of the setter and the fired object.

The method of forming the anti-slip portion of the floor plate is not particularly limited as long as the above-mentioned relationship between the 10-point average roughness Rzjis and the average width D of the first striated portion is satisfied, and any known process capable of forming a substantially continuous uneven shape on the surface of the floor plate (substrate portion) can be adopted. Typical examples of the method of forming the anti-slip portion include blast processing (blast treatment) on the surface of the floor plate (substrate portion) which is a fired product when the substrate portion of the floor plate and the anti-slip portion provided thereon are formed from the same raw material, and a process of forming an uneven shape by spraying (thermal spraying) an inorganic substance when the substrate portion of the floor plate and the anti-slip portion provided thereon are formed from different raw materials. From the viewpoint of sufficiently preventing and suppressing the shedding or peeling of the anti-slip portion caused by repeated heating and subsequent cooling in the firing process of the fired product, and the load of the setter and the fired product, etc., blast processing is more preferable.

Typically, blasting can be performed by projecting particulate media (projection material) from a nozzle onto a predetermined area on the surface of a base plate (substrate portion) of the fired product.
For example, the nozzle discharge diameter may be 0.5 mm or more and 10.0 mm or less, and preferably 0.75 mm or more and 8.5 mm or less. The particle size of the media may be 1.0 μm or more and 1000 μm or less, and preferably 2.0 μm or more and 800 μm or less. The projection amount of the media may be 10 g/min or more and 3000 g/min or less, and preferably 25 g/min or more and 2750 g/min or less. The discharge pressure of the media may be 0.005 MPa or more and 0.5 MPa or less, and more preferably 0.01 MPa or more and 0.1 MPa or less. Examples of the material of the media include alumina, zirconia, silicon carbide, iron, aluminum, zinc, glass, steel, and boron carbide. The Mohs hardness of the media may be 4 or more, and preferably 5.5 or more, or 6.0 or more.
It is also preferred to use masking to selectively blast desired areas on the sole plate.

The type of inorganic material used in spraying (thermal spraying) the inorganic material is not particularly limited, but examples include ceramic materials that are metal oxides such as aluminum oxide (alumina), zirconium oxide (zirconia), titanium oxide (titania), chromium oxide (chromia), magnesium oxide (magnesia), or mixtures thereof.
The spraying (thermal spraying) process can be appropriately selected from any known method and conditions. Cold spraying (low temperature thermal spraying method) can be used. In addition, any method such as flame spraying, plasma spraying, high velocity flame (gas) spraying, etc. can be used.

Manufacture of mesh-shaped ceramic sheet 1 as a setter (1) Preparation of paste for forming filamentary coating body 65.3 parts of 3 mol% yttria-added partially stabilized zirconia powder with an average particle size of 0.8 μm, 5.0 parts of hydroxypropylmethylcellulose (average degree of polymerization: 300,000 g/mol) as an aqueous binder, 2.5 parts of glycerin as a plasticizer, 1.1 parts of a polycarboxylic acid-based dispersant (molecular weight 12000), and 26.1 parts of water were mixed and degassed to prepare a paste. The viscosity of the paste was 2.3 MPa·s at 25°C.
(2) Formation of a linear coated body Using the above paste as a raw material, a first linear coated body was formed on a resin substrate using a dispenser having a circular nozzle with a diameter of 0.8 mm. Next, hot air was blown onto the first linear coated body using a dryer to remove water and dry the first linear coated body. The water content of the first linear coated body after drying was 10%. Subsequently, a second linear coated body intersecting the first linear coated body was formed. The intersection angle of both linear coated bodies was 90 degrees. Hot air was blown onto the second linear coated body using a dryer to remove water and dry the second linear coated body. The water content of the second linear coated body after drying was 8%. Through these operations, a lattice-shaped precursor consisting of the first linear body and the second linear body perpendicularly intersecting was obtained.
(3) Firing process The dried lattice-shaped precursor was peeled off from the resin substrate and then placed in an air firing furnace. Degreasing and firing were performed in this firing furnace to obtain a mesh-shaped ceramic sheet 1 made of zirconia. The firing temperature was 1450°C, and the firing time was 3 hours. In the obtained mesh-shaped ceramic sheet 1, the first filament portion and the second filament portion (each of which has a cross-sectional shape that is a substantially ellipse slightly shorter in the vertical direction) were in point contact at their intersections. In the obtained mesh-shaped ceramic sheet 1, the width W1 of the first filament portion was 800 μm, and the width W2 of the second filament portion was 800 μm. At the intersections, the width W1a of the first filament portion was 880 μm, and the width W2a of the second filament portion was 820 μm. The pitch P1 of the first filament portion was 400 μm, and the pitch P2 of the second filament portion was 400 μm. The size of the through holes in the mesh-like ceramic sheet 1 (mesh size) was 0.4 mm square, and the area of the through holes was 0.16 ^mm2 . The angle between each linear portion and a side portion in the mesh-like ceramic sheet 1 was 45°, and the intersection angle between the first linear portion and the second linear portion was 90°. The size of the mesh-like ceramic sheet 1 was 200 mm long x 200 mm wide.
The width W1 (800 μm = 0.8 mm) of the first linear portion described above for this sheet is the average width D measured at any five points of the width of the first linear portion in a plan view parallel to the upper surface of the base plate in a direction perpendicular to the design direction of the first linear portion using a digital microscope (manufactured by Keyence, product name "VHX-5000").

Manufacturing the mesh-like ceramic sheet 2 as a setter: A lattice-like precursor consisting of the first and second filaments perpendicularly intersecting was obtained by the same process as above, except that a dispenser having a nozzle with a diameter of 0.2 mm was used, and then a mesh-like ceramic sheet 2 made of zirconia was obtained under the same firing conditions as above. The width W1 of the first filament in the mesh-like ceramic sheet 2 was 200 μm (average width D by the above measurement method = 0.2 mm), and the width W2 of the second filament was 200 μm. At the intersection, the width W1a of the first filament was 220 μm, and the width W2a of the second filament was 205 μm. The pitch P1 of the first filament was 200 μm, and the pitch P2 of the second filament was 200 μm. In addition, the size (opening size) of the through hole in the mesh-like ceramic sheet 2 was 0.2 mm□, and the area of the through hole was 0.04 ^mm2 . The angle between each linear portion and each side portion in the mesh-like ceramic sheet 2 was 45°, and the intersection angle between the first linear portion and the second linear portion was 90°. The size of the mesh-like ceramic sheet 2 was 200 mm long x 200 mm wide.

As the raw material for manufacturing the floor plate 1 , a mixture material containing 65 parts by mass of alumina, 35 parts by mass of silica, and polyvinyl alcohol (PVA) as a binder was used to obtain a precursor molded body, which was then fired at 1700° C. for 4 hours to obtain a rectangular floor plate 1 measuring 220 mm long x 220 mm wide x 2 mm thick. A rectangular opening measuring 180 mm long x 180 mm wide was provided in the center of the floor plate 1, and a rectangular peripheral wall with a height of 3 mm and a top width of 7 mm was provided over the entire periphery of the floor plate 1, thereby providing a rectangular flat surface with a width of 13 mm between the opening and the peripheral wall of the floor plate 1. In other words, the dimensions were measured so that when the mesh-like ceramic sheet measuring 200 mm long x 200 mm wide was placed over the entire opening and a 10 mm wide area of the rectangular flat surface, a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall over the entire periphery of the floor plate.
Masking was applied to the portions of the floor plate other than the rectangular flat portion, and a blower blasting device (manufactured by Fuji Manufacturing Co., Ltd., LDQ-3 (AB)) was used to blast the flat portion of the floor plate with white fused alumina #60 from a nozzle with a discharge diameter of 12 mm at a discharge pressure of 0.5 MPa for 60 seconds to perform roughening treatment by blasting to form a sliding prevention portion. This resulted in a floor plate 1 having a 10-point average roughness Rzjis of 18 μm in the entire flat portion on which the setter was placed. The 10-point average roughness Rzjis of the sliding prevention portion was measured using a laser microscope manufactured by Keyence Corporation, "VK-8710," and the cross-sectional curve scanned at a magnification of 200 times was used as the observation target.

Manufacturing of Sole Plate 2 Sole plate 2 was obtained in the same manner as sole plate 1, except that the 10-point average roughness Rzjis of the anti-slip portion was set to 10 μm by appropriately changing the conditions of the blasting process.

Manufacturing of Sole Plate 3 Sole plate 3 was obtained in the same manner as sole plate 1, except that the 10-point average roughness Rzjis of the anti-slip portion was set to 12 μm by appropriately changing the conditions of the blasting process.

Manufacturing of Sole Plate 4 Sole plate 4 was obtained in the same manner as sole plate 1, except that the 10-point average roughness Rzjis of the anti-slip portion was set to 14 μm by appropriately changing the conditions of the blasting process.

Manufacture of Sole Plate 5 (Manufacture for Use in Comparative Example 1 Below)
A floor plate 5 was obtained in the same manner as floor plate 1, except that the 10-point average roughness Rzjis of the anti-slip portion was set to 0.5 μm by appropriately changing the conditions of the blasting process.

Manufacture of Sole Plate 6 (Manufacture for Use in Comparative Example 2 Below)
A floor plate 6 was obtained in the same manner as floor plate 1, except that the 10-point average roughness Rzjis of the anti-slip portion was set to 24 μm by appropriately changing the conditions of the blasting process.

Manufacturing of floor plate 2a Floor plate 2a was obtained by the same procedure as floor plate 1, except that the blast processing conditions were appropriately changed to set the 10-point average roughness Rzjis of the anti-slip portion to 10 μm and further adjusted so that the maximum height Rz of the anti-slip portion was 12 μm (Rz/Rzjis = 1.2).
The maximum height Rz (JIS B0601:2001) was measured in the same manner as the 10-point average roughness Rzjis (JIS B0601:1994), using a laser microscope "VK-8710" manufactured by Keyence Corporation, and observing the cross-sectional curve scanned at a magnification of 200 times (the same applies to the subsequent planks 2b to 2e).

Manufacturing of floor plate 2b Floor plate 2b was obtained by the same procedure as floor plate 1, except that the blast processing conditions were appropriately changed to set the 10-point average roughness Rzjis of the anti-slip portion to 10 μm and further adjusted so that the maximum height Rz of the anti-slip portion was 20 μm (Rz/Rzjis = 2).

Manufacturing of floor plate 2c Floor plate 2c was obtained by the same procedure as floor plate 1, except that the blast processing conditions were appropriately changed to set the 10-point average roughness Rzjis of the anti-slip portion to 10 μm and further adjusted so that the maximum height Rz of the anti-slip portion was 30 μm (Rz/Rzjis = 3).

Manufacturing of floor plate 2d Floor plate 2d was obtained by the same procedure as floor plate 1, except that the blast processing conditions were appropriately changed to set the 10-point average roughness Rzjis of the anti-slip portion to 10 μm and further adjusted so that the maximum height Rz of the anti-slip portion was 10 μm (Rz/Rzjis = 1).

Manufacturing of Floor Plate 2e Floor plate 2e was obtained by the same procedure as floor plate 1, except that the blast processing conditions were appropriately changed to set the 10-point average roughness Rzjis of the anti-slip portion to 10 μm and further adjusted so that the maximum height Rz of the anti-slip portion was 50 μm (Rz/Rzjis = 5).

Example 1
A mesh-like ceramic sheet 1 (average width D of the first filamentary portion: 0.8 mm) was placed as a setter on the above-mentioned floor plate 1 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 18 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state, the ratio Rzjis (μm)/D (mm) was 22.5.

Example 2
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 2 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 10 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 50.

Example 3
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 1 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 18 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 90.

Example 4
A mesh-like ceramic sheet 1 (average width D of the first linear portion: 0.8 mm) was placed as a setter on the above-mentioned floor plate 3 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 12 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 15.

Example 5
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 4 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 14 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 70.

Comparative Example 1
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 5 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 0.5 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 2.5.

Comparative Example 2
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 6 (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 24 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 120.

Example 6
A mesh-like ceramic sheet 2 (average width D of the first filamentary portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 2a (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 10 μm; maximum height Rz of the anti-slip portion: 12 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 50, and the ratio Rz/Rzjis was 1.2.

Example 7
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 2b (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 10 μm; maximum height Rz of the anti-slip portion: 20 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 50, and the ratio Rz/Rzjis was 2.

Example 8
A mesh-like ceramic sheet 2 (average width D of the first filamentary portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 2c (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 10 μm; maximum height Rz of the anti-slip portion: 30 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 50, and the ratio Rz/Rzjis was 3.

Reference Example 1
A mesh-like ceramic sheet 2 (average width D of the first linear portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 2d (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 10 μm; maximum height Rz of the anti-slip portion: 10 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 50, and the ratio Rz/Rzjis was 1.

Reference Example 2
A mesh-like ceramic sheet 2 (average width D of the first filamentary portion: 0.2 mm) was placed as a setter on the above-mentioned floor plate 2e (10-point average roughness Rzjis of the anti-slip portion on the floor plate: 10 μm; maximum height Rz of the anti-slip portion: 50 μm) so that a gap of 3 mm was provided between the end of the mesh-like ceramic sheet and the rectangular peripheral wall portion over the entire circumference of the floor plate. In this state of placement, the ratio Rzjis (μm)/D (mm) was 50, and the ratio Rz/Rzjis was 5.

Measurement test of mesh ceramic sheet movement start angle One end of the firing jig consisting of a combination of the sole plate obtained in the above Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8, and Reference Examples 1 to 2 and a setter for the mesh ceramic sheet placed on it was slowly raised, and the inclination angle (°) of the sole plate was measured when the mesh ceramic sheet started to slide on the sole plate, and this was defined as the movement start angle when the sheet was inclined. As an angle measuring device for this test, an angle meter with the product name "AS ONE" model number BB01B manufactured by Iris Corporation was used.

Measurement test of retention time during vibration of mesh ceramic sheet The firing jig consisting of a combination of the sole plate obtained in the above Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8, and Reference Examples 1 to 2 and a setter for the mesh ceramic sheet placed thereon was set in a vibration tester and vibrated at an intensity of level 10. The time (seconds) until the mesh ceramic sheet slid 3 mm on the sole plate was measured and defined as the retention time during sheet vibration. As a 60 Hz vibration tester, a product name "VIBRATORY PACKER, TYPE VP-40" manufactured by SINFONIA TECHNOLOGY was used.

Observation test of the degree of damage to the mesh-like ceramic sheet during vibration The firing jig consisting of a combination of the base plate obtained in the above Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8, and Reference Examples 1 and 2 and a setter for the mesh-like ceramic sheet placed thereon was set in a vibration tester and vibrated continuously for 60 seconds at an intensity of level 10, and the appearance of the sheet was observed after the vibration was stopped. If the sheet fell off the base plate before the 60 seconds of vibration were completed, the test was terminated at that point.
The degree of damage to the sheet was judged according to the following criteria.
◯ (Good): No damage was found on the entire sheet.
△ (medium): Scratches were observed in some parts of the sheet.
× (Poor): Scratches were observed over a wide area or over the entire sheet, or the sheet fell off the base plate before vibration was completed.

The measurement and observation results of the start angle of movement when the seat is tilted, the holding time when the seat is vibrated, and the extent of damage when the seat is vibrated for the above Examples 1 to 5, Comparative Examples 1 to 2, Examples 6 to 8 and Reference Examples 1 to 2 are shown in Table 1 (Examples 1 to 5 and Comparative Examples 1 to 2) and Table 2 (Examples 6 to 8 and Reference Examples 1 to 2) together with the 10-point average roughness Rzjis (μm) of the anti-slip portion, the average width D (mm) of the first striated portion and the ratio Rzjis/D.

注：
・実施例３では、６０秒間の振動完了後に、摺動防止部との接触によりメッシュ状セラミックスシートの表面の一部に傷が発生したことが観察された。
・比較例１では、６０秒間の振動完了前に、メッシュ状セラミックスシートが敷板から落下した。

Notes:
In Example 3, after 60 seconds of vibration, it was observed that scratches were generated on part of the surface of the mesh-like ceramic sheet due to contact with the anti-slip portion.
In Comparative Example 1, the mesh-like ceramic sheet fell off the base plate before the 60 seconds of vibration was completed.

These results show that the firing jig of the present invention can adequately prevent the setter, which is a ceramic sheet including a mesh-like portion, from sliding on the base plate and can effectively prevent damage to the setter.

Various aspects or embodiments that can be included in the present invention are summarized as follows.
[1]
A firing jig consisting of a setter and a base plate on which the setter is placed,
the setter is a ceramic sheet including at least a portion of a mesh-like portion, the mesh-like portion including a first striated portion layer including a plurality of first striated portions arranged at a given interval and extending in one direction, and a second striated portion layer including a plurality of second striated portions arranged at a given interval so as to be in contact with and intersect with each of the first striated portions and extending in one direction, the first striated portion layer and the second striated portion layer being integrally formed;
(1) A sliding prevention portion is provided in a predetermined area facing the mesh portion on the surface of the base plate on which the setter is placed,
(2) In a predetermined region of the first filament portion layer including a portion disposed above the anti-slip portion, an average width of the first filament portion is D (mm),
When the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm),
The relationship of 5≦Rzjis/D≦100 is satisfied.
Firing fixture.
[2]
The relationship of 20≦Rzjis/D≦80 (where Rzjis and D are defined as above) is satisfied.
The firing jig described in [1] above.
[3]
The relationship of 5 (μm)≦Rzjis≦25 (μm) (where Rzjis is defined as above) is satisfied.
The firing jig according to the above item [1] or [2].
[4]
The firing jig according to any one of the above items [1] to [3], wherein the anti-slip portion is formed with irregularities by blasting.
[5]
the anti-slip portion is provided in one or more predetermined regions facing the mesh-like portion on the surface of the base plate on which the setter is placed,
The anti-slip portion is disposed so that, when the setter is placed on the base plate, each of the one or more regions corresponds to a periphery of the setter.
The firing jig according to any one of the above items [1] to [4].
[6]
In a predetermined area where the anti-slip portion is provided on the surface of the base plate on which the setter is placed,
The 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is defined as Rzjis,
When the maximum height of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:2001 is Rz,
1. The relationship of 2≦Rz/Rzjis≦3 is satisfied.
The firing jig according to any one of the above items [1] to [5].

C: object to be fired S: setter P: multi-layered sole plates M: multi-layered firing jig (the above symbols C, S, P, and M refer to FIG. 1 showing a known example).
1: Mesh-like portion 2: First linear portion 3: Second linear portion 4: Firing jig (combination of setter and base plate)
5: Setter 6: Base plate 7: Frame (base material of base plate)
8: Hollow part (opening)
9: Peripheral wall portion (rib)
10: Leg portion 11: Anti-slip portion 12: First linear portion 13: Base plate (substrate portion)
14: Anti-slip portion _D1 : Average width of the first filament portion _Rzjis1 : 10-point average roughness of the anti-slip portion (JIS B0601:1994)
15: First linear portion 16: Base plate (substrate portion)
17: Anti-slip portion _D2 : Average width of the first filament portion _Rzjis2 : 10-point average roughness of the anti-slip portion (JIS B0601:1994)
Rz: Maximum height of anti-slip part (JIS B0601:2001)

Claims (6)

A firing jig consisting of a setter and a base plate on which the setter is placed,
the setter is a ceramic sheet including at least a portion of a mesh-like portion, the mesh-like portion including a first striated portion layer including a plurality of first striated portions arranged at a given interval and extending in one direction, and a second striated portion layer including a plurality of second striated portions arranged at a given interval so as to be in contact with and intersect with each of the first striated portions and extending in one direction, the first striated portion layer and the second striated portion layer being integrally formed;
(1) A sliding prevention portion is provided in a predetermined area facing the mesh portion on the surface of the base plate on which the setter is placed,
(2) In a predetermined region of the first filament portion layer including a portion disposed above the anti-slip portion, an average width of the first filament portion is D (mm),
When the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm),
The relationship of 5≦Rzjis/D≦100 is satisfied.
Firing fixture. The relationship of 20≦Rzjis/D≦80 (where Rzjis and D are defined as above) is satisfied.
The firing jig according to claim 1 . The relationship of 5 (μm)≦Rzjis≦25 (μm) (where Rzjis is defined as above) is satisfied.
The firing jig according to claim 1 or 2. A method for manufacturing a firing jig comprising a setter and a base plate on which the setter is placed, comprising the steps of:
a step of obtaining the setter which is a ceramic sheet including at least a portion of a mesh-like portion, the step including integrally forming a first linear portion layer composed of a plurality of first linear portions arranged at a given interval and each of the first linear portions extending in one direction, and a second linear portion layer composed of a plurality of second linear portions arranged at a given interval so as to be in contact with and intersect with each of the first linear portions, thereby obtaining the mesh-like portion;
and,
A step of forming irregularities by blasting in a predetermined region of the surface of the base plate on which the setter is placed, the predetermined region of the first filament layer including a portion disposed above the anti-slip portion, the average width of the first filament is D (mm), and the 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is Rzjis (μm), where Rzjis/D satisfies the relationship 5≦Rzjis/D≦100.
A manufacturing method comprising : the anti-slip portion is provided in one or more predetermined regions facing the mesh-like portion on the surface of the base plate on which the setter is placed,
The anti-slip portion is disposed so that, when the setter is placed on the base plate, each of the one or more regions corresponds to the vicinity of the periphery of the setter .
The firing jig according to claim 1 or 2. In a predetermined area where the anti-slip portion is provided on the surface of the base plate on which the setter is placed,
The 10-point average roughness of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:1994 is defined as Rzjis,
When the maximum height of the anti-slip portion measured by observation using a laser microscope in accordance with JIS B0601:2001 is Rz,
1. The relationship of 2≦Rz/Rzjis≦3 is satisfied.
The firing jig according to claim 1 or 2.

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