JP7544282B2 - 天井搬送車 - Google Patents
天井搬送車 Download PDFInfo
- Publication number
- JP7544282B2 JP7544282B2 JP2023539643A JP2023539643A JP7544282B2 JP 7544282 B2 JP7544282 B2 JP 7544282B2 JP 2023539643 A JP2023539643 A JP 2023539643A JP 2023539643 A JP2023539643 A JP 2023539643A JP 7544282 B2 JP7544282 B2 JP 7544282B2
- Authority
- JP
- Japan
- Prior art keywords
- main body
- transport vehicle
- running
- pair
- ceiling transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3221—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/04—Monorail systems
- B61B13/06—Saddle or like balanced type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H10P72/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Vibration Prevention Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第一実施形態に係る天井搬送車1について説明する。図1に示される天井搬送車1は、クリーンルームの天井等、床面より高い位置に設けられる走行レールRに沿って走行する。天井搬送車1は、例えば保管設備と所定のロードポートとの間で被搬送物90を搬送する。被搬送物90の例には、複数の半導体ウェハを格納するFOUP(Front Opening Unified Pod)及びガラス基板を格納するレチクルポッド等のような容器、並びに一般部品等が含まれる。上記の容器は、天井搬送車1に保持されるフランジ98を有している。
以下、主に図1、図7~図11を用いて、第二実施形態に係る天井搬送車1Aについて説明する。なお、第二実施形態に係る天井搬送車1Aでは、防振ユニット120の構成が第一実施形態に係る天井搬送車1の防振ユニット20の構成と異なっている。ここでは、互いに構成が異なる、防振ユニット120について詳細に説明し、その他の構成については説明を省略する。防振ユニット120は、一対の支持部121,121と、ベース部123と、一対のダンパー130,130と、を備えている。
Claims (6)
- 本体フレームと、前記本体フレームの下部に設けられ、被搬送物を保持する保持部を昇降させる昇降部と、を有する本体部が、走行部に懸垂支持される天井搬送車であって、
前記走行部に懸垂されるベース部と、
前記ベース部と一体的に設けられると共に水平方向に延在する水平軸と、
前記本体フレームに設けられると共にゴムブッシュを介して前記水平軸を支持する一対の支持部と、を備え、
前記本体部は、鉛直方向において前記走行部と前記本体フレームとの間に配置される前記ベース部と、前記本体フレームの上面に設けられる前記一対の支持部と、を介して前記走行部に懸垂支持されている、天井搬送車。 - 前記水平軸は、前記走行部の走行方向及び鉛直方向の両方に直交する方向に延在するように配置されている、請求項1記載の天井搬送車。
- 前記水平軸は、前記水平軸の延在方向と鉛直方向との両方に直交する方向に沿って複数配列されており、
前記水平軸は、前記ベース部及び前記一対の支持部に対して回動不能に支持されている、請求項1又は2記載の天井搬送車。 - 前記水平軸は、一つだけ設けられており、
前記走行部の走行方向において、前記水平軸を挟むように前記ベース部に設けられると共に、前記本体フレームの上面に接触するように構成される一対のダンパーを更に備える、請求項1又は2記載の天井搬送車。 - 前記ベース部は、前記走行部から鉛直方向下方に向かって延在する一対の懸垂部材を介して前記走行部に懸垂されており、
前記ベース部は、前記懸垂部材の延在方向を回動軸とする軸周りに回動可能に前記懸垂部材を支持する、請求項1~4の何れか一項記載の天井搬送車。 - 前記一対の支持部のそれぞれに設けられる前記ゴムブッシュは、互いに硬度が異なる材料によって形成されている、請求項1~5の何れか一項記載の天井搬送車。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021126804 | 2021-08-02 | ||
| JP2021126804 | 2021-08-02 | ||
| PCT/JP2022/016111 WO2023013173A1 (ja) | 2021-08-02 | 2022-03-30 | 天井搬送車 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023013173A1 JPWO2023013173A1 (ja) | 2023-02-09 |
| JPWO2023013173A5 JPWO2023013173A5 (ja) | 2024-03-13 |
| JP7544282B2 true JP7544282B2 (ja) | 2024-09-03 |
Family
ID=85155693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023539643A Active JP7544282B2 (ja) | 2021-08-02 | 2022-03-30 | 天井搬送車 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12406868B2 (ja) |
| JP (1) | JP7544282B2 (ja) |
| CN (1) | CN117715812B (ja) |
| TW (1) | TWI871523B (ja) |
| WO (1) | WO2023013173A1 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7480797B2 (ja) * | 2022-03-14 | 2024-05-10 | 村田機械株式会社 | 天井搬送車システム |
| WO2024209771A1 (ja) * | 2023-04-06 | 2024-10-10 | 村田機械株式会社 | 天井搬送車 |
| WO2026014108A1 (ja) * | 2024-07-09 | 2026-01-15 | 村田機械株式会社 | 天井搬送車 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5685227A (en) * | 1995-09-18 | 1997-11-11 | Premark Feg L.L.C. | Brake assembly for overhead trolley |
| JPH10250978A (ja) | 1997-03-13 | 1998-09-22 | Murata Mach Ltd | 天井走行車 |
| JP2001298065A (ja) | 2000-04-14 | 2001-10-26 | Murata Mach Ltd | 無人搬送車 |
| JP2002067935A (ja) * | 2000-08-29 | 2002-03-08 | Japan Servo Co Ltd | 遊戯機械における重量物移動装置 |
| JP4273845B2 (ja) * | 2003-06-06 | 2009-06-03 | 株式会社Ihi | 搬送装置 |
| JP2005067772A (ja) * | 2003-08-21 | 2005-03-17 | Murata Mach Ltd | 天井走行車 |
| CN2931431Y (zh) * | 2006-07-04 | 2007-08-08 | 中国华电工程(集团)有限公司 | 集装箱起重机防摇起升机构 |
| JP6327124B2 (ja) * | 2014-11-12 | 2018-05-23 | 株式会社ダイフク | 物品搬送車 |
| JP6344410B2 (ja) * | 2016-02-19 | 2018-06-20 | 村田機械株式会社 | 天井搬送車 |
| KR102165435B1 (ko) * | 2016-10-25 | 2020-10-14 | 무라다기카이가부시끼가이샤 | 천장 반송차 |
| US11515186B2 (en) * | 2017-11-02 | 2022-11-29 | Murata Machinery, Ltd. | Ceiling conveyance vehicle system and temporary storage method for articles in ceiling conveyance vehicle system |
| TWM563072U (zh) * | 2018-03-08 | 2018-07-01 | 鑫鴻精密科技股份有限公司 | 減震元件 |
| CN210554783U (zh) * | 2019-07-30 | 2020-05-19 | 东莞开道科技有限公司 | 空中轨道车减振装置及空中轨道车 |
-
2022
- 2022-03-30 WO PCT/JP2022/016111 patent/WO2023013173A1/ja not_active Ceased
- 2022-03-30 US US18/293,103 patent/US12406868B2/en active Active
- 2022-03-30 JP JP2023539643A patent/JP7544282B2/ja active Active
- 2022-03-30 CN CN202280052907.5A patent/CN117715812B/zh active Active
- 2022-07-29 TW TW111128520A patent/TWI871523B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN117715812B (zh) | 2026-04-24 |
| WO2023013173A1 (ja) | 2023-02-09 |
| CN117715812A (zh) | 2024-03-15 |
| US20240375690A1 (en) | 2024-11-14 |
| TWI871523B (zh) | 2025-02-01 |
| US12406868B2 (en) | 2025-09-02 |
| TW202306816A (zh) | 2023-02-16 |
| JPWO2023013173A1 (ja) | 2023-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7544282B2 (ja) | 天井搬送車 | |
| JP7537620B2 (ja) | 天井搬送車 | |
| TWI716647B (zh) | 高架搬運車 | |
| JP6344410B2 (ja) | 天井搬送車 | |
| JP7226518B2 (ja) | 天井搬送車 | |
| JP7276474B2 (ja) | 天井搬送車 | |
| WO2022102280A1 (ja) | 天井搬送車 | |
| JP7537457B2 (ja) | 天井搬送車 | |
| TWI877505B (zh) | 高架搬運車 | |
| WO2024161712A1 (ja) | 天井搬送車 | |
| TW202439518A (zh) | 高架搬送車 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A529 | Written submission of copy of amendment under article 34 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A5211 Effective date: 20231102 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20231102 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240723 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240805 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7544282 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |