JP7544979B2 - Gyro Vibration Meter - Google Patents

Description

This disclosure relates to a gyroscopic vibrometer.

Vibrometers that detect vibration as a physical quantity are known. For example, there is a vibrometer that uses a film-shaped piezoelectric element to convert vibration into a voltage, which is then converted into an acoustic signal.

Japanese Patent Publication No. 2016-179177

A gyroscopic vibrometer according to an embodiment of the present disclosure includes a support, a membrane having an edge, the edge being disposed on the support, a gyroscopic sensor disposed on the support side of the membrane and having a first end and a second end facing each other, a first fixing part disposed on the membrane and fixing the first end of the gyroscopic sensor, and a second fixing part extending from the second end of the gyroscopic sensor and fixing the second end of the gyroscopic sensor. The gyroscopic sensor is fixed to the first fixing part and the second fixing part so that either the first end or the second end can be displaced relative to the other.

1 is a schematic diagram of a gyro vibrometer according to a first embodiment. FIG. 2 is a cross-sectional view of the gyro vibrometer according to the first embodiment taken along line AA in FIG. 1. 3 is a plan view of the gyro vibrometer according to the first embodiment, taken along line AA in FIG. 2. FIG. FIG. 4 is an enlarged view of the portion enclosed by the dashed line in FIG. 3 of the gyro vibrometer according to the first embodiment. 4 is a diagram illustrating an example of a relationship between a relative position on a membrane and a displacement of the membrane per unit time in the gyro vibrometer according to the first embodiment. FIG. 3A to 3C are schematic diagrams illustrating a process in which a gyro sensor in the gyro vibrometer according to the first embodiment detects vibration. 5A to 5C are schematic diagrams comparing vibrations of the gyro vibrometer according to the first embodiment and a gyro vibrometer having a configuration in which a gyro sensor is fixed to a membrane. FIG. 11 is a schematic diagram of a gyro vibrometer according to a second embodiment. 9 is a cross-sectional view of the gyro vibrometer according to the second embodiment taken along line AA in FIG. 8 . 10 is a plan view of a gyro vibrometer according to a second embodiment, taken along line AA of FIG. 9. FIG. 9 is a cross-sectional view of the gyro vibrometer according to the second embodiment taken along line AA in FIG. 8 . FIG. 11 is a schematic diagram of a gyro vibrometer according to a third embodiment. 13 is a plan view of the gyro vibrometer according to the third embodiment, taken along line AA in FIG. 12. FIG. FIG. 13 is a schematic diagram of a gyro vibrometer according to a fourth embodiment. 15 is a plan view of the gyro vibrometer according to the fourth embodiment, taken along line AA in FIG. 14. FIG. FIG. 13 is a schematic diagram of a gyro vibrometer according to a fifth embodiment.

Below, embodiments of the present disclosure are described with reference to the drawings.

Unless otherwise specified in this specification, the numerical range "X to Y" means "X or more and Y or less."

First Embodiment
Hereinafter, the gyro vibrometer 1 according to the first embodiment of the present disclosure will be described with appropriate reference to the drawings.

Figures 1, 2 and 3 show an outline of the gyro vibrometer 1 according to the first embodiment. Figure 1 is a top view of the gyro vibrometer 1 according to this embodiment, showing the external shape of the gyro vibrometer 1 as viewed from the positive Z-axis direction. Figure 2 shows the internal structure of the gyro vibrometer 1. Figure 3 shows the configuration of the membrane 20 of the gyro vibrometer 1 according to this embodiment as viewed from the negative Z-axis direction.

The gyroscopic vibrometer 1 has a support 10, a membrane 20 arranged on the support 10, and a gyroscopic sensor 30. Specifically, the membrane 20 has an edge 21, and the edge 21 is arranged on the support 10. The gyroscopic sensor 30 is arranged on the support 10 side of the membrane 20, and can detect vibrations of the membrane 20.

The gyro vibrometer 1 has the above-mentioned configuration and is a vibrometer that can be brought into contact with an object to detect the vibrations of the object. When the object is a patient's body, the gyro vibrometer 1 may be used by being brought into contact with the patient's chest, back, wrist, neck, abdomen, etc. The gyro vibrometer 1 may be configured to receive the vibrations of the object through a membrane 20 described below and detect the vibrations generated in the membrane 20. The gyro vibrometer 1 transmits a detection signal corresponding to the detected vibrations.

The support 10 can function as a part to be held by the user when used. The support 10 can also support the membrane 20. In particular, the support 10 can support the membrane 20 on the upper surface of the support 10 with a predetermined tension applied to the membrane 20. The support 10 may also support the membrane 20 so as to bend it toward the opposite side of the support 10 (positive direction of the Z axis) as shown in FIG. 2. As a result, when the gyro vibrometer 1 detects the vibration of the object, the adhesion between the membrane 20 and the object can be improved. The support 10 and the membrane 20 may also be fixed with an adhesive or the like. Examples of the adhesive include a resin material such as an epoxy resin, or a metal material such as solder.

In this embodiment, the support 10 has a recess 11 having an opening 12, as shown in FIG. 2. In this embodiment, the film 20 is arranged to cover the opening 12. The support 10 may also have a bottom 13 and a wall 14. The depth of the recess 11 is not particularly limited, but may be deep enough that the film 20 does not come into contact with the inner surface of the recess 11 when the film 20 vibrates. The recess 11 may also be connected to the outside through a hole or the like provided in the bottom 13 or the wall 14, or a gap between the bottom 13 and the wall 14. The support 10 is not limited to a shape having the recess 11 or the opening 12, and may be, for example, a cylindrical shape or a truncated cone shape. In addition, when the support 10 has a cylindrical shape, the shape on the positive Z-axis direction side may be a broken line shape or a wavy line shape with alternating concaves and cones.

In this embodiment, the outer shape of the support 10 when viewed from above in the Z-axis direction is circular. The outer shape of the support 10 when viewed from above in the Z-axis direction is not limited to circular, and may be square, rectangular, or elliptical. Furthermore, the outer shape of the support 10 when viewed from above in the Z-axis direction may be the same as the outer shape of the membrane 20 when viewed from above in the Z-axis direction. In particular, taking into account the impact resistance of the support 10, the outer shape when viewed from above in the Z-axis direction may be circular.

The support 10 may be made of, for example, resin, metal, ceramic, etc. Also, to prevent the support 10 from vibrating due to an external shock, the support 10 may be covered with a material that can easily deform in response to an external shock. Examples of materials that can easily deform include silicone rubber and urethane rubber.

In addition, in this embodiment, the support 10 is formed by integrally forming the bottom 13 and the wall 14. Here, integrally means that it is formed as one member without connecting multiple members. The support 10 may be formed by manufacturing the bottom 13 and the wall 14 as individual members and then combining them with an adhesive or the like. For example, a resin material such as epoxy resin or a metal material such as solder can be used as the adhesive or the like. In addition, the support 10 may be formed with a part of the outer surface of the wall 14 in a concave or convex shape so that the user can easily hold it in his/her hand. In addition, the bottom 13 or the wall 14 of the support 10 may be formed with a hole connecting the recess 11 to the outside. When the support 10 has a hole connecting the recess 11 to the outside, the user can check for a malfunction of the internal configuration (for example, a broken wire of the conductors 61a and 61b) without disassembling the gyro vibrometer 1.

The membrane 20 has an edge 21, which is disposed on the support 10. The membrane 20 receives vibrations from an object and can deform in response to the received vibrations so as to be displaced mainly in the up-down direction (the Z-axis direction in this embodiment). Here, the downward direction refers to the direction in which the support 10 is disposed relative to the membrane 20, and the upward direction refers to the direction in which the support 10 is not disposed relative to the membrane 20. The membrane 20 can also transmit vibrations from the object to the gyro sensor 30.

In this embodiment, as shown in Figure 2, the membrane 20 is arranged so as to cover the entire opening 12. In addition, a gyro sensor 30 is arranged on the surface of the membrane 20 facing the support 10. In this embodiment, as shown in Figure 3, the gyro sensor 30 is arranged in the center of the membrane 20. In addition, the gyro vibrometer 1 has a first fixing portion 40 arranged on the membrane 20 to fix the gyro sensor 30. In this embodiment, as shown in Figure 3, the first fixing portion 40 is arranged in the center of the surface of the membrane 20 facing the support 10.

As shown in FIG. 3, in this embodiment, the outer shape of the membrane 20 when viewed from above in the Z-axis direction is circular. The outer shape of the membrane 20 when viewed from above in the Z-axis direction is not limited to circular, and may be square, rectangular, or elliptical. In addition, the outer shape of the membrane 20 when viewed from above in the Z-axis direction may be the same as the outer shape of the support 10 when viewed from above in the Z-axis direction.

In addition, the shape of the membrane 20 when viewed from the cross section of the gyro vibrometer 1 shown in FIG. 2 may be, for example, a curved surface that is convex on one side. In particular, in this embodiment, it is convex with respect to the object to detect vibration, in other words, concave with respect to the bottom surface of the support 10. In the case of a curved surface that is convex on one side, for example, the membrane 20 is formed of a material that has enough rigidity to maintain a concave shape, and when the membrane 20 is formed, it is sufficient to form the curved surface that is convex on one side. In addition, as another example of forming the membrane 20 into a curved surface that is convex on one side, the membrane 20 may be formed into a plate shape and fixed to the support 10 so as to bend. The support 10 according to this embodiment has a recess 11, but as long as the membrane 20 has a curved surface that is convex on one side and a space in which the membrane 20 can vibrate is secured, the support 10 does not necessarily have to have a recess 11. The membrane 20 may also be flat. That is, the membrane 20 may have a planar shape along the opening 12.

The thickness of the membrane 20 may be, for example, 10 to 5000 μm. In particular, from the viewpoint of receiving vibrations with good sensitivity, it may be 20 to 2000 μm, or 50 to 1000 μm. The thickness of the membrane 20 may be uniform throughout the membrane 20, or may vary depending on the part of the membrane 20.

The Young's modulus of the film 20 may be, for example, 0.1 MPa to 1000 GPa. In particular, from the viewpoint of receiving vibrations with good sensitivity, it may be 0.5 to 500 GPa, or 1 MPa to 400 GPa. Here, the method for measuring the Young's modulus of the film 20 is not particularly limited, but is measured, for example, by a three-point bending test.

The density of the film 20 may be, for example, 100 to 5000 kg/m ^3. In particular, from the viewpoint of receiving vibrations with good sensitivity, the density may be 500 to 4000 kg/m ³ , or 800 to 2000 kg/m ³ .

The vibration reception sensitivity of the membrane 20 can also be evaluated based on the sound speed (m/s) of vibration that it can receive. It can be said that the higher the sound speed of vibration that the membrane 20 can receive, the higher the vibration reception sensitivity of the membrane 20. Since the sound speed is calculated by dividing the Young's modulus value by the density value, it can be said that the membrane 20 has a higher sound speed, i.e., a higher sensitivity, as the membrane 20 has a higher Young's modulus and a lower density. For example, the sound speed of vibration that the membrane 20 can receive may be 10 to 20,000 m/s. In particular, from the viewpoint of receiving vibrations with good sensitivity, the sound speed of vibration that the membrane 20 can receive may be 100 to 15,000 m/s, or may be 1,000 to 15,000 m/s.

The material of the membrane 20 is not particularly limited, but may be, for example, silicone, glass epoxy, ABS (acrylonitrile butadiene styrene), CFRP (carbon fiber reinforced plastic), urethane, epoxy, etc. In particular, from the viewpoint of receiving vibrations with good sensitivity, silicone, glass epoxy, and CFRP may be used.

A membrane 20 having different physical properties may be selected depending on the frequency of the vibration to be detected. When detecting high-frequency vibration, for example, a hard material, i.e., a material with a high Young's modulus, or a material with a large film thickness may be selected as the membrane 20. When detecting low-frequency vibration, a soft material, i.e., a material with a low Young's modulus, or a material with a small film thickness may be selected as the membrane 20. When an electronic device has multiple gyro vibrometers 1, for example, each gyro vibrometer 1 may have a membrane 20 with different physical properties.

As described above, the membrane 20 has an edge portion 21. The edge portion 21 is a portion of the membrane 20 that overlaps with the support 10 in the vertical direction. In this embodiment, the edge portion 21 corresponds to the outer edge of the membrane 20 and is a portion that is arranged on the support 10. Also, in this embodiment, as shown in FIG. 2, the edge portion 21 is arranged on the surface of the wall portion 14 of the support 10 on the positive Z-axis direction side. Also, the edge portion 21 may have the same shape as the fixing surface with the support 10 so that the fixation to the support 10 is more secure. In this embodiment, the membrane portion 20 is formed so that the shape of the edge portion 21 is the same as the outer shape of the support 10 when viewed from above in the Z-axis direction.

The edge portion 21 may be fixed to the support 10 with an adhesive or the like. For example, a resin material such as epoxy resin or a metal material such as solder may be used as the adhesive or the like. In particular, the adhesive or the like may be a resin material or the like from the viewpoint of reducing the transmission of vibration of the membrane 20 to the support 10. In this embodiment, the membrane 20 has the entire edge portion 21 fixed onto the support 10 with an adhesive. Only a portion of the edge portion 21 may be fixed onto the support 10. The edge portion 21 may be made of the same material as the membrane 20, or a different material.

In addition, the gyro vibrometer 1 of this embodiment further has a cover 22 that covers the upper surface of the membrane 20 (the surface on the positive side of the Z axis in Figures 1 and 2). The gyro vibrometer 1 with the cover 22 prevents the membrane 20 from directly touching the object, and can reduce deterioration of the membrane 20.

In this embodiment, the cover 22 is disposed on the support 10 so as to cover the entire opening 12 of the support 10. The cover 22 and the support 10 may be fixed with an adhesive or the like, similar to the fixing of the membrane 20 and the support 10. In this embodiment, the cover 22 is disposed between the membrane 20 and the object when the gyro vibrometer 1 detects the vibration of the object. From the viewpoint of the cover 22 transmitting vibration to the membrane 20, the cover 22 and the membrane 20 may be in contact with each other.

Furthermore, the cover 22 may be made of the same material as the membrane 20 or a different material. The cover 22 may be made of, for example, a waterproof material. This allows the part of the gyro vibrometer 1 that comes into contact with the object to be washed with tap water or the like, and keeps the gyro vibrometer 1 hygienic.

The gyro sensor 30 is a sensor for detecting vibrations emitted by an object as angular velocity. The gyro sensor 30 detects vibrations of the membrane 20 that accompany vibrations emitted by the object. The gyro sensor 30 may be any sensor that can detect vibrations as angular velocity, and may be a gyro sensor using quartz as in this embodiment, a gyro sensor using ceramics, or a gyro sensor using silicone.

The gyro sensor 30 is disposed on the support 10 side of the membrane 20. In particular, in this embodiment, the gyro sensor 30 is disposed in the center of the membrane 20. The gyro sensor 30 may be disposed in a location other than the center of the membrane 20.

Here, the external shape of the gyro sensor 30 in this embodiment will be described with reference to Fig. 4. Fig. 4 is a diagram showing the configuration of the gyro sensor 30 of the gyro type vibrometer 1. In this embodiment of the gyro sensor 30, the external shape of the gyro sensor 30 is, for example, rectangular. The external shape of the gyro sensor 30 is not limited to a rectangle, and may be a square, a circle, a trapezoid, or the like.

The gyro sensor 30 has a first end 31 and a second end 32 that face each other. In this embodiment, the first end 31 is one side that is fixed to the membrane 20 side among the sides that are parallel to the rotation axis of the angular velocity that the gyro sensor 30 can detect, as shown in Fig. 4. In this embodiment, the second end 32 is the opposite side to one side that is fixed to the membrane 20 side among the sides that are parallel to the rotation axis of the angular velocity that the gyro sensor 30 can detect, as shown in Fig. 4.

In addition, the gyro sensor 30 is fixed to the first fixing portion 40 and the second fixing portion 50 so that either the first end 31 or the second end 32 of the gyro sensor 30 can be displaced relative to the other. In this embodiment, the gyro sensor 30 is fixed so that the first end 31 can be displaced relative to the second end 32.

In this embodiment, the gyro sensor 30 includes a drive arm that excites bending vibration, a detection arm that detects bending vibration, and electrodes that convert the vibration of each arm into an electrical signal. The gyro sensor 30 may also be a quartz crystal oscillator made of quartz crystal.

A mechanism by which the gyro sensor 30 detects the vibration of the membrane 20 will be described. An example of the gyro sensor 30 is shown. The gyro sensor 30 is composed of drive arms 301 and 302, a detection arm 303, and a base 304. Although not shown, the gyro sensor 30 may be provided with an electrode for converting the vibration of the drive arms 301 and 302 into an electrical signal, and an electrode for converting the vibration of the detection arm 303 into an electrical signal. The drive arms 301 and 302 and the detection arm 303 have a longitudinal direction in the X-axis direction. The drive arms 301 and 302 excite bending vibration in the Y-axis direction. When an angular velocity around the X-axis is applied while the drive arms 301 and 302 are excited to bend, the detection arm 303 detects the bending vibration to detect the angular velocity around the X-axis. This allows the gyro sensor 30 to detect the vibration of the membrane 20 as an angular velocity.

From the viewpoint of detecting vibrations with high sensitivity, the gyro sensor 30 may be disposed so that an imaginary straight line L1 connecting the center c1 of the first fixed part 40 and the center c2 of the second fixed part 50 intersects with a rotation axis R1 of an angular velocity that can be detected by the gyro sensor 30. Here, the imaginary straight line connecting the first fixed part 40 and the second fixed part 50 is, in particular, a straight line connecting the center of the first fixed part 40 and the center of the second fixed part 50.

The gyro sensor 30 may be disposed at a position where the displacement per unit time of the membrane 20 is maximum when the membrane 20 receives the vibration of the object and deforms. When the membrane 20 receives the vibration of the object and deforms, the membrane 20 has an "abdomen a" where the amplitude is maximum and the displacement is maximum, but the inclination is zero, and a "node b" where the amplitude is zero but the inclination is maximum. The position where the displacement of the membrane 20 is maximum is the position of the abdomen a. Furthermore, the abdomen a and the node b appear at different positions depending on the frequency of the vibration. As an example, in the case of a third-order vibration, the abdomen a and the node b appear in a positional relationship as shown in FIG. 5. Here, FIG. 5 illustrates an example of the displacement of the membrane 20 per unit time on the vertical axis and the relative position on the membrane 20 on the horizontal axis. In this embodiment, the gyro sensor 30 is disposed in the center of the membrane 20, since it is assumed that the primary vibration is detected in particular.

The first fixing part 40 is disposed on the membrane 20. In this embodiment, as shown in FIG. 2, the first fixing part 40 is disposed on the support 10 side of the membrane 20. In this embodiment, as shown in FIG. 3, the first fixing part 40 is disposed in the center of the membrane 20. The first fixing part 40 may be disposed in a part other than the center of the membrane 20. In this embodiment, the first fixing part 40 fixes a part of the first end 31 of the gyro sensor 30 including the center, as shown in FIG. 4. The first fixing part 40 may fix the entire first end 31 of the gyro sensor 30, or may fix a part other than the center.

The first fixing part 40 fixes the first end 31 of the gyro sensor 30. The first fixing part 40 also fixes the first end 31 of the gyro sensor 30 so that either the first end 31 or the second end 32 of the gyro sensor 30 can be displaced relative to the other. In this embodiment, the first fixing part 40 fixes the first end 31 of the gyro sensor 30 so that the angle between the membrane 20 and the gyro sensor 30 can change when the membrane 20 vibrates. This allows the first end 31 of the gyro sensor 30 to be displaced relative to the second end 32.

The first fixing portion 40 may be formed of, for example, an adhesive, a resin, solder, a silver paste, a double-sided tape, or a combination thereof. In this case, the first fixing portion 40 may fix the first end 31 of the gyro sensor 30 to such an extent that the first end 31 of the gyro sensor 30 can be displaced relative to the second end 32.

For example, if the first fixing part 40 is made of a material soft enough to be deformed when the membrane 20 vibrates, the first fixing part 40 deforms when the membrane 20 vibrates, allowing the first end 31 to be displaced relative to the second end 32. If the first fixing part 40 is made of a material hard enough not to be deformed when the membrane 20 vibrates, the gyro sensor 30 bends when the membrane 20 vibrates, allowing the first end 31 to be displaced relative to the second end 32. The first fixing part 40 may be provided with a hinge-like structure made of aluminum alloy, stainless steel, or the like, to fix the first end 31 of the gyro sensor 30 to a degree that allows the first end 31 of the gyro sensor 30 to be displaced relative to the second end 32.

When the membrane 20 is manufactured, a mark may be provided at the portion where the first fixing portion 40 is disposed, thereby reducing variation in the position where the first fixing portion 40 is disposed during mass production, etc. This reduces variation in quality, such as the detection sensitivity and detection frequency band of the gyro vibrometer 1. In this case, the mark on the membrane 20 may be a protrusion shape provided on the membrane 20, or an area with a different film thickness may be provided in a portion of the membrane 20.

The second fixing portion 50 extends from the second end 32 of the gyro sensor 30 and fixes the second end 32 of the gyro sensor 30. In this embodiment, the second fixing portion 50 fixes the second end 32 of the gyro sensor 30 such that the first end 31 of the gyro sensor 30 is displaceable relative to the second end 32.

In this embodiment, the second fixing portion 50 extends from the second end 32 of the gyro sensor 30 to the control board 60 described below. The second fixing portion 50 may extend from the second end 32 of the gyro sensor 30 to a part of the support 10. The second fixing portion 50 may also be fixed to a part other than both ends, for example, to the bottom 13 or wall 14 of the support 10. In this embodiment, the second fixing portion 50 extends from the center of the second end 32 of the gyro sensor 30, as shown in FIG. 4.

In this embodiment, the second fixing portion 50 is formed in a linear shape. The cross section of the second fixing portion 50 is not particularly limited, but may be circular, elliptical, rectangular, or the like.

The material of the second fixing part 50 is not particularly limited, but when the second fixing part 50 includes the conductor 61a, it may be made of a conductive material such as copper, silver, or gold. When the second fixing part 50 includes the conductor 61a, it may be made of rubber, CFRP (Carbon Fiber Reinforced Plastics), GFRP (Glass Fiber Reinforced Plastics), etc. to protect the conductive part. When the second fixing part 50 is formed separately from the conductor 61a, it may be made of a resin such as rubber, CFRP (Carbon Fiber Reinforced Plastics), GFRP (Glass Fiber Reinforced Plastics), metal, ceramic, etc. The second fixing part 50 may be made of a material having flexibility. In this embodiment, the second fixing part 50 has a rigidity to such an extent that the position of the second end 32 of the gyro sensor 30 does not shift when the membrane 20 vibrates.

The gyro vibrometer 1 of this embodiment is provided with a control board 60 that is disposed on the support 10 and controls the gyro sensor 30. In this embodiment, the control board 60 is a board that can convert an electrical signal based on the angular velocity of the vibration input from the gyro sensor 30 into an electrical signal of vibration or sound. The support 10 can support the control board 60. In other words, the control board 60 may be provided on the support 10. The support 10 and the control board 60 may be fixed together with an adhesive or the like. Examples of the adhesive include a resin material such as an epoxy resin, or a metal material such as solder.

In this embodiment, as shown in FIG. 2, the control board 60 is disposed on the bottom 13 of the support 10. In this embodiment, the control board 60 and the gyro sensor 30 are connected via a conductor 61a. In this embodiment, the conductor 61a is formed and included in the second fixing portion 50. The conductor 61a and the second fixing portion 50 may be formed separately. In this case, the conductor 61a may be formed by printing on the surface covering the opening 12 of the membrane 20 or on the inner surface of the wall portion 14 of the support 10. The control board 60 may also be configured to transmit the detection signal of the gyro sensor 30 to an external device.

An electronic board such as a printed circuit board can be used as the control board 60. As described above, the conductor 61a may be made of a conductive material such as copper, silver, or gold, and may be made of rubber, carbon fiber reinforced plastics (CFRP), glass fiber reinforced plastics (GFRP), or the like to protect the conductive parts.

The gyro vibrometer 1 may also include a battery 62 for supplying electricity to the control board 60. In this embodiment, the battery 62 and the control board 60 are connected via a conductor 61b. Providing the gyro vibrometer 1 with the battery 62 has the advantage that the gyro vibrometer 1 is easy to carry and the place where the gyro vibrometer 1 can be used is not limited. The gyro vibrometer 1 may include a battery instead of the battery 62, or may be configured to be connected to an external power source.

The detection principle of the gyro vibrometer 1 of this embodiment is shown in FIG. 6. FIG. 6 is an enlarged view of the gyro sensor 30 and the first fixed part 40 from the same viewpoint as FIG. 2, and is a schematic diagram showing the movement of the gyro sensor 30 when the membrane 20 vibrates. As described above, in the gyro vibrometer 1 of this embodiment, the gyro sensor 30 is fixed to the first fixed part 40 and the second fixed part 50 so that the first end 31 of the gyro sensor 30 can be displaced relative to the second end 32. Therefore, when the membrane 20 receives vibration from an object and deforms in response to the received vibration, the first end 31 of the gyro sensor 30 is displaced in accordance with the deformation of the membrane 20. As a result, the gyro sensor 30 generates vibrations centered on the second end 32. In this embodiment, the vibration of the object can be detected by detecting the angular velocity of this vibration around the Y axis.

Figure 7 shows only the membrane 20, gyro sensor 30, and first fixed part 40 of the gyro vibrometer 1. Also shown is a configuration in which one surface of the gyro sensor 30 is fixed to the membrane 20, with the arrow indicating the displacement of one end of the gyro sensor 30. As shown in Figure 6, the gyro vibrometer 1 of this embodiment generates larger vibrations in response to the displacement of the membrane 20 compared to a configuration in which one surface of the gyro sensor 30 is fixed onto the membrane 20. Thus, by adopting a configuration such as that of this embodiment, a highly sensitive gyro vibrometer 1 can be realized.

In this embodiment, the first end 31 of the gyro sensor 30 is displaced, but the present invention is not limited to this. For example, the first end 31 and the second end 32 of the gyro sensor 30 may both be displaced, and the relative displacement between the first end 31 and the second end 32 may be detected.

The gyro vibrometer 1 of this embodiment is arranged on the support 10 and includes a control board 60 that controls the gyro sensor 30 and a conductor 61a that connects the gyro sensor 30 and the control board 60, and the second fixed part 50 has the conductor 61a. Since the second fixed part 50 of the gyro vibrometer 1 having this configuration also serves as the conductor 61 for signal transmission, the structure can be simplified and manufacturing processes can be omitted and costs can be reduced.

The second fixing part 50 may be flexible. The gyro vibrometer 1 having this configuration can reduce the risk of the second fixing part 50 being displaced or coming loose from the gyro sensor 30 due to an external impact.

Furthermore, the first fixed portion 40 is disposed at a position on the membrane 20 where the displacement per unit time is maximum when the membrane 20 vibrates. The gyro vibrometer 1 having this configuration can efficiently convert the vibration of the membrane 20 into angular velocity, thereby improving sensitivity. In particular, in the gyro vibrometer 1 of this embodiment, the first fixed portion 40 is disposed at the center of the membrane 20. The center of the membrane 20 is the location where the displacement is greatest during the primary vibration, and therefore sensitivity can be improved, particularly in the low frequency band.

Furthermore, in the gyro vibrometer 1 of this embodiment, the second fixing part 50 can fix the second end 32 of the gyro sensor 30 while keeping the second end 32 floating relative to the membrane 20. The gyro vibrometer 1 having this configuration can reduce noise generated by the gyro sensor 30 colliding with the membrane 20 during vibration detection.

In addition, in the gyro vibrometer 1 of this embodiment, the gyro sensor 30 is arranged so that a virtual line connecting the first fixed part 40 and the second fixed part 50 intersects with the rotation axis of the angular velocity that can be detected by the gyro sensor 30. In the gyro vibrometer 1 having this configuration, the gyro sensor 30 can efficiently convert the displacement caused by the vibration of the membrane 20 into angular velocity.

Second Embodiment
The gyro vibrometer 2 according to the second embodiment of the present disclosure will be described below with appropriate reference to the drawings.

In the second embodiment, for configurations common to or similar to those of the already described embodiments, the same reference numerals are used, and illustrations and descriptions may be omitted. For configurations corresponding to (similar to) those of the already described embodiments, even if a different reference numeral is used, unless otherwise specified, the configurations are the same as those of the already described embodiments.

Figures 8, 9 and 10 show an outline of the gyro vibrometer 2 according to the second embodiment. Figure 8 is a top view of the gyro vibrometer 2 according to this embodiment, showing the external shape of the gyro vibrometer 2 as viewed from the positive Z-axis direction. Figure 9 shows the internal structure of the gyro vibrometer 2 according to this embodiment. Figure 10 is a plan view of the gyro vibrometer 2 as viewed from the surface cut along line A-A in Figure 9, showing the arrangement of the support body 10 of the gyro vibrometer 2 and the pressing mechanism 70.

The gyro vibrometer 2 of the second embodiment differs from the gyro vibrometer 1 of the first embodiment in that it further includes a pressing mechanism 70 attached to the support 10 and having a contact portion 71 capable of contacting the membrane 20 and a moving mechanism 72 capable of displacing the contact portion 71.

The pressing mechanism 70 can reduce vibration in the region of the membrane 20 with which the contact portion 71 is in contact. The pressing mechanism 70 is attached to the support 10 as shown in FIG. 9. The gyro vibrometer 2 of this embodiment has a first pressing mechanism 70a and a second pressing mechanism 70b as the pressing mechanism 70 as shown in FIG. 9. Hereinafter, the first pressing mechanism 70a and the second pressing mechanism 70b are also simply referred to as the "pressing mechanism 70". In this embodiment, the pressing mechanism 70 is attached to the wall 14 of the support 10. The pressing mechanism 70 may be attached to the bottom 13 of the support 10. In this embodiment, most of the pressing mechanism 70 is located within the recess 11 of the support 10, and a part of the pressing mechanism 70 extends to the outside through a hole formed in the wall 14 of the support 10. The pressing mechanism 70 may be located entirely inside the recess 11 of the support 10, or outside the recess 11 of the support 10. In this embodiment, the pressing mechanism 70 is attached to be able to slide on the inner surface of the wall portion 14 of the support body 10 .

In addition, in this embodiment, the pressing mechanism 70 is attached to the support 10 so that the contact portion 71 (a collective term for the contact portion 71a and the contact portion 71b) can contact the surface of the membrane 20 facing the support 10. The pressing mechanism 70 may be attached to the support 10 so that the contact portion 71 can contact the surface of the membrane 20 opposite to the surface facing the support 10. In this embodiment, the pressing mechanism 70 is attached to the support 10 so that the contact portion 71 faces the membrane 20.

The gyro vibrometer 2 may have only the first pressing mechanism 70a as the pressing mechanism 70. The gyro vibrometer 2 may have three or more pressing mechanisms 70. In this embodiment, the first pressing mechanism 70a and the second pressing mechanism 70b are arranged so that the distances between the center of the membrane 20 and the contact portions 71a and 71b are different. In this embodiment, the second pressing mechanism 70b is arranged so as to be able to slide on the inner surface of the first pressing mechanism 70a. In this embodiment, the first pressing mechanism 70a and the second pressing mechanism 70b can contact the membrane 20 at the same time.

As shown in FIG. 10, the gyro vibrometer 2 includes a support 10, a pressing mechanism 70, and a moving mechanism 72 for moving the pressing mechanism 70 so that the position of the contact portion 71 can be displaced. In this embodiment, the pressing mechanism 70 may have a cylindrical shape. In FIG. 10, the pressing mechanism 70 has a cylindrical shape that fits along the wall portion 14 of the support 10. The pressing mechanism 70 is not limited to a cylindrical shape, and may be a square or polygonal tubular shape. The pressing mechanism 70 may also be formed as an integral part. Here, "integral" means that a plurality of members are not joined together and are formed as one member. In FIG. 10, as an example, the pressing mechanism 70 is formed as an integral part with the contact portion 71. The pressing mechanism 70 may also be formed by combining the contact portion 71 and the moving mechanism 72 with an adhesive or the like after manufacturing them as individual members. For example, a resin material such as an epoxy resin or a metal material such as solder can be used as the adhesive or the like.

The pressing mechanism 70 has a contact portion 71 that can contact the membrane 20. Furthermore, by contacting the membrane 20, the contact portion 71 can reduce vibration in the area of the membrane 20 that is in contact with the contact portion 71.

In this embodiment, the contact portion 71 is displaceable parallel to the wall portion 14 of the support 10. Also, in this embodiment, the distance between the contact portion 71 and the bottom portion 13 of the support 10 is displaceable. Also, in this embodiment, the contact portion 71 is located on a surface of the pressing mechanism 70 that faces the membrane 20. Also, in this embodiment, the contact portion 71 is arranged so as to be displaceable via the moving mechanism 72.

In this embodiment, the contact portion 71 has a cylindrical shape. The contact portion 71 has a cavity in the center of the membrane 20. In this embodiment, the contact surface of the contact portion 71 with the membrane 20 is annular. The contact surface of the contact portion 71 with the membrane 20 may be a square or other polygonal shape. In this embodiment, the contact surface of the contact portion 71 with the membrane 20 is flat. The contact surface of the contact portion 71 with the membrane 20 may be a convex curved surface or another shape.

The contact portion 71 is not particularly limited, but from the viewpoint of being less likely to deform in response to the vibration of the membrane 20, it may be formed, for example, from a resin material such as epoxy resin or polylactic acid resin, or from a metal.

The pressing mechanism 70 has a moving mechanism 72 capable of displacing the contact portion 71. In particular, in this embodiment, the moving mechanism 72 can displace the contact portion 71 in the Z-axis direction. In addition, the moving mechanism 72 can maintain the contact surface of the contact portion 71 with the membrane 20 in a state in which it is in contact with the membrane 20.

The moving mechanism 72 is disposed on the support 10. In particular, in this embodiment, the moving mechanism 72 is disposed inside a hole formed in the wall 14 of the support 10, and the contact portion 71 can be manually displaced in the Z-axis direction by displacing the inside of the hole formed in the wall 14 in the Z-axis direction. In this case, a mechanism for fixing the moving mechanism 72 may be provided by forming a notch or the like that can mesh with the shape of the moving mechanism 72 in the hole formed in the wall 14. In addition, the moving mechanism 72 may have a spring or the like to facilitate the displacement of the contact portion 71 in one direction.

The moving mechanism 72 may further include a motor or the like, so that it is electrically displaced. In this case, the moving mechanism 72 may be controlled by a control board 60. In this case, the moving mechanism 72 and the control board 60 may be connected by a conductor 61. In another form, the moving mechanism 72 may include a mechanism for controlling itself, or may include a mechanism for wirelessly connecting to an external device or the like, and may be controlled by the external device or the like.

The moving mechanism 72 may be formed of the same material as the contact portion 71, or may be formed of a different material. The moving mechanism 72 is not particularly limited, and may be formed of, for example, a resin material such as an epoxy resin or a polylactic acid resin, or a metal.

The gyro vibrometer 2 of this embodiment has the above-mentioned configuration, and is therefore capable of detecting multiple frequency bands with high accuracy. Specifically, one of the factors that determine the frequency bands that the gyro vibrometer 2 can detect is the region in which the membrane 20 can vibrate. When the contact portion 71 of the pressing mechanism 70 contacts the membrane 20, the gyro vibrometer 2 of this embodiment reduces the vibration of the region in contact with the contact portion of the membrane 20. Therefore, compared to when the contact portion 71 is not in contact with the membrane 20, the region in which the membrane 20 can vibrate freely changes. Therefore, the gyro vibrometer 2 of this embodiment can change the vibration characteristics of the membrane 20, and therefore can switch the detectable frequency bands. For the reasons described above, the gyro vibrometer 2 of this embodiment can detect multiple frequency bands with high accuracy.

The pressing mechanism 70 of this embodiment can also be applied to a vibrometer that detects vibrations using a mechanism other than that of this embodiment. For example, as shown in FIG. 11, the pressing mechanism 70 can also be applied to a gyro type vibrometer in which one side of the gyro sensor 30 is fixed to the membrane 20.

In addition, the pressing mechanism 70 of this embodiment has a first pressing mechanism 70a and a second pressing mechanism 70b, and the second pressing mechanism 70b is arranged such that the distance between the center of the membrane 20 and the contact portion 71 is different from that of the first pressing mechanism 70a. The gyro vibrometer 2 having this configuration can accurately detect three or more frequency bands with one gyro vibrometer 2.

In addition, in the gyro vibrometer 2 of this embodiment, the contact portion 71a of the first pressing mechanism 70a and the contact portion 71b of the second pressing mechanism 70b can simultaneously contact the membrane 20. The gyro vibrometer 2 having this configuration can more firmly reduce the vibration of the membrane 20, and can reduce unnecessary vibration in the area where the contact portion 71 of the membrane 20 is in contact.

In this embodiment, the first pressing mechanism 70a has a cylindrical shape, and the contact portion 71a of the first pressing mechanism 70a has an annular contact surface that can contact the membrane 20. In the gyro vibrometer 2 having this configuration, when the contact portion 71a contacts the membrane 20, the vibrating area of the membrane 20 becomes circular. As a result, when the membrane 20 vibrates with the contact portion 71 in contact with the membrane 20, the force applied between the contact portion 71 and the membrane 20 can be uniformly distributed, reducing the risk of damage to the membrane 20.

In this embodiment, the second pressing mechanism 70b has a cylindrical shape and is arranged to be able to slide on the inner surface of the first pressing mechanism 70a. In the gyro vibrometer 2 having this configuration, the first pressing mechanism 70a and the second pressing mechanism 70b can be individually displaced, so that the first pressing mechanism 70a and the second pressing mechanism 70b can be brought into contact with each other in accordance with the shape of the membrane 20, etc. This allows the first pressing mechanism 70a and the second pressing mechanism 70b to more effectively reduce the vibration of the membrane 20.

In this embodiment, the contact portion 71 of the pressing mechanism 70 may have a convex curved contact surface. The gyro vibrometer 2 having this configuration can improve the degree of contact between the membrane 20 and the object when detecting vibration of the object with the contact portion 71 in contact with the membrane 20, thereby improving sensitivity.

Third Embodiment
Hereinafter, a gyro vibrometer 3 according to a third embodiment of the present disclosure will be described with reference to the drawings as appropriate.

In the third embodiment, for configurations common to or similar to those of the embodiments already described, the same reference numerals are used, and illustrations and descriptions may be omitted. For configurations corresponding to (similar to) those of the embodiments already described, even if a different reference numeral is used, unless otherwise specified, the configurations are the same as those of the embodiments already described.

Figures 12 and 13 show an outline of the gyro vibrometer 3 according to the third embodiment. The external shape of the gyro vibrometer 3 as viewed from the positive Z-axis direction is the same as that shown in Figure 1, and is therefore omitted. Figure 12 shows the internal structure of the gyro vibrometer 3 according to this embodiment. Figure 13 is a plan view of the gyro vibrometer 3 as viewed from the plane cut along line A-A shown in Figure 12, and shows the arrangement of the support body 10 of the gyro vibrometer 3 and the operating unit 74.

The gyro vibrometer 3 of the third embodiment is different from the gyro vibrometer 2 of the second embodiment in the structure of the moving mechanism 72. In this embodiment, the moving mechanism 72 has a slide portion 73 and an operating portion 74, as shown in Fig. 12. The slide portion 73 is arranged so that one surface of the slide portion 73 and one surface of the contact portion 71 can slide. The operating portion 74 is attached to the bottom 13 of the support 10.

The slide portion 73 can displace the first contact portion 71a and the second contact portion 71b to contact the membrane 20. The slide portion 73 is arranged so as to be displaceable in the X-axis direction. In this embodiment, the slide portion 73 is arranged in the recess 11 of the support 10 as shown in FIG. 12. A part of the slide portion 73 may be located outside the recess 11 of the support 10. One surface of the slide portion 73 is in contact with one surface of the first contact portion 71a and the second contact portion 71b. In this embodiment, the slide portion 73 has two surfaces, a surface parallel to the XY plane and a surface having a predetermined angle inclined in the negative direction of the Z axis with respect to the surface parallel to the XY plane, as a surface facing the positive direction of the Z axis, as shown in FIG. The surface of the slide portion 73 facing the Z axis direction is arranged so as to be displaceable in the X-axis direction while in contact with one surface of the first contact portion 71a and the second contact portion 71b. The shape of the slide portion 73 is not limited to that of the present embodiment, and may be, for example, a curved surface or a trapezoidal shape. The slide portion 73 may be made of, for example, resin, metal, ceramic, or the like.

A user can displace the slide portion 73 via the operation unit 74. In this embodiment, a user can displace the slide portion 73 in the X-axis direction via the operation unit 74. For example, a part of the operation unit 74 is arranged in the recess 11 of the support 10. A part of the operation unit 74 is arranged inside a hole formed in the bottom 13 of the support 10. A part of the operation unit 74 is located outside the bottom 13 with respect to the recess 11 of the support 10. In addition, the operation unit 74 is arranged so as to be displaceable in the X-axis direction with respect to the bottom 13 of the support 10. A user can displace the operation unit 74 in the X-axis direction by applying a force in the X-axis direction to the part of the operation unit 74 located outside the bottom 13. The operation unit 74 may be formed integrally with the slide portion 73, or may be formed by combining the operation unit 74 and the slide portion 73 with an adhesive or the like after manufacturing them as separate members. For example, a resin material such as an epoxy resin or a metal material such as a solder can be used as the adhesive or the like. The operation portion 74 may be made of, for example, resin, metal, ceramic, or the like.

In the gyro vibrometer 3 of this embodiment, the user can displace the first contact portion 71a, or the first contact portion 71a and the second contact portion 71b, in the positive direction of the Z axis by displacing the slide portion 73 in the positive direction of the X axis via the operation unit 74, and can contact the membrane 20. In addition, when a mechanism for applying a force to the first contact portion 71a and the second contact portion 71b in the negative direction of the Z axis is provided, the user can displace the slide portion 73 in the negative direction of the X axis via the operation unit 74. This can displace the second contact portion 71b, or the first contact portion 71a and the second contact portion 71b, in the negative direction of the Z axis and separate them from the membrane 20. The mechanism for applying a force to the first contact portion 71a and the second contact portion 71b in the negative direction of the Z axis may be configured, for example, by arranging an elastic body such as a spring between the support 10 and the first contact portion 71a and the second contact portion 71b.

In the gyro vibrometer 3 of this embodiment, the moving mechanism 72 can be displaced in the X-axis direction, which is different from the Z-axis direction, which is the displacement direction of the first contact portion 71a and the second contact portion 71b. Furthermore, in the gyro vibrometer 3, the moving mechanism 72 can displace the first contact portion 71a and the second contact portion 71b in the Z-axis direction as the moving mechanism 72 is displaced in the X-axis direction. By having the above-mentioned structure, the gyro vibrometer 3 of this embodiment can operate multiple contact portions 71 with one moving mechanism 72 and can bring the multiple contact portions 71 into contact with the membrane 20 with uniform pressure.

Fourth Embodiment
Hereinafter, the gyro vibrometer 4 according to the fourth embodiment of the present disclosure will be described with appropriate reference to the drawings.

In the fourth embodiment, for configurations common to or similar to those of the embodiments already described, the same reference numerals are used, and illustrations and explanations may be omitted. For configurations corresponding to (similar to) those of the embodiments already described, even if a different reference numeral is used, unless otherwise specified, the configurations are the same as those of the embodiments already described.

Figures 14 and 15 show an outline of the gyro vibrometer 4 according to the fourth embodiment. The external shape of the gyro vibrometer 4 as viewed from the positive Z-axis direction is the same as that shown in Figure 1, and is therefore omitted. Figure 14 shows the internal structure of the gyro vibrometer 4 according to this embodiment. Figure 15 is a plan view of the gyro vibrometer 4 as viewed from the surface cut along line A-A shown in Figure 14, and shows the arrangement of the support body 10 and contact portion 71 of the gyro vibrometer 4.

Compared to the gyro vibrometer 3 of the third embodiment, the gyro vibrometer 4 of the fourth embodiment differs mainly in the structure and number of the contact portion 71 and the position of the moving mechanism 72.

The gyro vibrometer 4 may be configured to have at least one pressing mechanism 70. In this embodiment, the gyro vibrometer 4 has one pressing mechanism 70. The pressing mechanism 70 may have a first surface facing the membrane 20 and a second surface located on the opposite side of the first surface. In the first to third embodiments, the pressing mechanism 70 is cylindrical, but in this embodiment, as shown in FIG. 15, the pressing mechanism 70 has two beam-shaped members at the bottom of the cylinder, each of which is crossed in a cross shape. In addition, as shown in FIG. 14, the pressing mechanism 70 has a convex portion in the center that is convex on the negative Z-axis direction side. The pressing mechanism 70 has a contact portion 71 that can contact the membrane 20. In FIG. 14, the first surface facing the membrane 20 corresponds to the contact portion 71.

14, the moving mechanism 72 is located closer to the center of the gyro vibrometer 4 than the moving mechanism 72 of the third embodiment. The moving mechanism 72 of this embodiment is arranged so as to be displaceable in the X-axis direction with a surface of the slide portion 73 located in the positive direction of the Z axis in contact with a surface of the protrusion of the pressing mechanism 70 located in the negative direction (the second surface of the pressing mechanism 70).

14, the operation unit 74 is located near the center of the gyro vibrometer 4, compared to the operation unit 74 of the third embodiment. A part of the operation unit 74 of this embodiment is disposed inside a hole formed in the battery 62. In this embodiment, a part of the operation unit 74 is located outside the battery 62, on the side opposite the support 10.

In the gyro vibrometer 4 of this embodiment, when the user displaces the slide portion 73 in the positive direction of the X-axis via the operation unit 74, the slide portion 73 applies force to the convex portion located at the center of the pressing mechanism 70, and the entire pressing mechanism 70 is displaced in the positive direction of the Z-axis. This allows one surface of the contact portion 71 to come into contact with the membrane 20.

In the gyro vibrometer 4 of this embodiment, the moving mechanism 72 can displace the contact portion 71 by applying force to the center of the surface on the negative side of the Z axis of the pressing mechanism 70. Since the gyro vibrometer 4 of this embodiment has the structure described above, it is possible to apply force to the center of the pressing mechanism 70 to bring one surface of the contact portion 71 into contact with the membrane 20, thereby reducing unevenness in pressure on the membrane 20.

Fifth Embodiment
Hereinafter, a gyro vibrometer 5 according to a fifth embodiment of the present disclosure will be described with reference to the drawings as appropriate.

In the fifth embodiment, for configurations common to or similar to those of the embodiments already described, the same reference numerals are used, and illustrations and explanations may be omitted. For configurations corresponding to (similar to) those of the embodiments already described, even if a different reference numeral is used, unless otherwise specified, the configurations are the same as those of the embodiments already described.

Figure 16 shows an outline of the gyro vibrometer 5 according to the fifth embodiment. The external shape of the gyro vibrometer 5 as viewed from the positive Z-axis direction is the same as that shown in Figure 1, and the arrangement of the support 10 and pressing mechanism 70 of the gyro vibrometer 5 is the same as that shown in Figure 15, so they are omitted here. Figure 16 shows the internal structure of the gyro vibrometer 5 according to this embodiment.

The gyro vibrometer 5 of the fifth embodiment differs from the gyro vibrometer 4 of the fourth embodiment mainly in the structure of the moving mechanism 72.

The moving mechanism 72 has a support portion 75 and a pressing control portion 76.

The support portion 75 supports the pressing mechanism 70. In this embodiment, the support portion 75 is connected to the center of the pressing mechanism 70. The support portion 75 may be formed integrally with the pressing mechanism 70, or may be formed by manufacturing each member and then combining them with an adhesive or the like. The adhesive or the like may be, for example, a resin material such as epoxy resin, or a metal material such as solder. In this embodiment, the support portion 75 is cylindrical. The support portion 75 is not limited to a cylindrical shape, and may be, for example, a prismatic shape such as a triangular prism or a square prism. The support portion 75 may be made of, for example, a resin, a metal, a ceramic, or the like.

The pressing control unit 76 can control the pressing mechanism 70 via the support unit 75. In this embodiment, the pressing control unit 76 displaces the support unit 75 in the Z-axis direction to displace the pressing mechanism 70 in the positive direction of the Z-axis, thereby causing one surface of the contact unit 71 to contact the membrane 20. The pressing control unit 76 may also be capable of controlling the contact state (e.g., contact pressure, etc.) of the contact unit 71 with the membrane 20 via the support unit 75. In this embodiment, the pressing control unit 76 is arranged to penetrate the bottom 13 of the support 10. In this embodiment, the pressing control unit 76 is arranged to penetrate the battery 62. The pressing control unit 76 is arranged to penetrate the bottom 13 of the support 10 and the battery 62, so that it can function as a part that a user holds in his/her hand when using the gyro vibrometer 5. The pressing control unit 76 may be arranged on the bottom 13 of the support 10, or may be arranged other than the bottom 13 of the support 10. Moreover, the press control unit 76 in this embodiment has a button 77. In this embodiment, the user can control the press control unit 76 via the button 77. The press control unit 76 does not have to have the button 77, and may be connected, for example, to an external device or the like by wire or wirelessly, allowing the user to control the press control unit 76 via the external device or the like. Furthermore, in this embodiment, the press control unit 76 is electronically controlled. In this embodiment, the press control unit 76 is connected to the battery 62 via a conductor 61c.

The internal structure of the pressing control unit 76 is not specifically shown, but may be configured by combining parts such as gears and an electric motor. The pressing control unit 76 may have a control board for detecting a signal when the button 77 is pressed and electronically controlling the pressing control unit 76. The form of the button 77 for the user to control the pressing control unit 76 via the button 77 is not specifically shown, but may be, for example, a membrane switch or a mechanical switch. In addition, the method of switching the contact state of the contact unit 71 with the membrane 20 by the button 77 is not specifically shown, but may be, for example, a momentary method or an alternate method.

In the gyro vibrometer 5 of this embodiment, the moving mechanism 72 is displaceable in the Z-axis direction parallel to the displacement direction of the contact portion 71, and the contact portion 71 can be displaced in accordance with the displacement in the Z-axis direction. Since the gyro vibrometer 5 of this embodiment has the structure described above, when a user wishes to displace the contact portion 71, the user can displace the moving mechanism 72 in the same direction as the desired displacement, making it easier to displace the contact portion 71.

In the gyro vibrometer 5 of this embodiment, the moving mechanism 72 applies a force in the Z-axis direction to the surface of the pressing mechanism 70 on the negative side of the Z-axis, thereby displacing the contact portion 71. By having the above-described structure, the gyro vibrometer 5 of this embodiment can more precisely control the contact state (e.g., contact pressure) of the contact portion 71 with the membrane 20.

In the gyro vibrometer 5 of this embodiment, the moving mechanism 72 has a support part 75 extending from the surface on the negative side of the Z axis of the pressing mechanism 70, and the contact part 71 can be displaced by displacing the support part 75. Since the gyro vibrometer 5 of this embodiment has the structure described above, the contact part 71 can be controlled via the support part 75, improving the freedom of design of the gyro vibrometer 5.

The gyro vibrometer 5 of this embodiment can displace the support portion 75 in the Z-axis direction, which is parallel to the direction in which the contact portion 71 is displaced. By having the above-described structure, the gyro vibrometer 5 of this embodiment can more precisely control the contact state (e.g., contact pressure) of the contact portion 71 with the membrane 20.

The invention according to the present disclosure has been described above based on the drawings and examples. However, the invention according to the present disclosure is not limited to the above-mentioned embodiments. In other words, the invention according to the present disclosure can be modified in various ways within the scope of the present disclosure, and embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the invention according to the present disclosure. In other words, it should be noted that a person skilled in the art can easily make various modifications or corrections based on the present disclosure. It should also be noted that these modifications or corrections are included in the scope of the present disclosure.

The gyroscopic vibrometer according to the present disclosure can be applied to various electronic devices. Examples of electronic devices include electronic stethoscopes, electronic stethoscope systems, manufacturing facility monitoring systems, crime prevention systems, disaster detection systems, bone conduction microphones, etc. Examples of electronic vibrometers include hammering inspections and internal defect inspections of manufactured products, water pipe inspections, and authenticity investigations.

Reference Signs List 1 to 5: gyro vibrometer 10: support 11: recess 12: opening 13: bottom 14: wall 20: membrane 21: edge 22: cover 30: gyro sensor 31: first end 32: second end 40: first fixed portion 50: second fixed portion 60: control board 61a, 61b: conducting wire 62: battery 70: pressing mechanism 70a: first pressing mechanism 70b: second pressing mechanism 71, 71a, 71b: contact portion 72, 72a, 72b: moving mechanism 73: sliding portion 74: operating portion 75: support portion 76: pressing control portion 77: button

Claims (20)

A support;
a membrane having an edge, the edge being disposed on the support;
a gyro sensor disposed on the support side of the membrane and having a first end and a second end opposed to each other;
a first fixing portion disposed on the film and fixing the first end of the gyro sensor;
a second fixing portion extending from the second end of the gyro sensor and fixing the second end of the gyro sensor;
A gyro vibrometer, wherein the gyro sensor is fixed to the first fixed portion and the second fixed portion such that either the first end or the second end is displaceable relative to the other. A control board that is disposed on the support and controls the gyro sensor;
A conductor is provided to connect the gyro sensor and the control board,
The gyro vibrometer according to claim 1 , wherein the second fixed portion includes the conducting wire. A gyroscopic vibrometer as described in claim 1 or 2, wherein the second fixed portion is flexible. A gyroscopic vibrometer as described in any one of claims 1 to 3, wherein the first fixed portion is arranged at a position where the displacement per unit time of the membrane is maximum when the membrane vibrates. A gyro vibrometer as described in any one of claims 1 to 4, wherein the first fixed portion is arranged in the center of the membrane. A gyro vibrometer as described in any one of claims 1 to 5, wherein the second fixing portion fixes the second end of the gyro sensor while maintaining the second end floating relative to the membrane. A gyro type vibrometer as described in any one of claims 1 to 6, wherein the gyro sensor is arranged so that a virtual straight line connecting the first fixed part and the second fixed part intersects with a rotation axis of an angular velocity that can be detected by the gyro sensor. A gyroscopic vibrometer as described in any one of claims 1 to 7, having at least one pressing mechanism attached to the support and having a contact portion capable of contacting the membrane and a moving mechanism capable of displacing the contact portion. The at least one pressing mechanism includes a first pressing mechanism and a second pressing mechanism,
9. The gyro vibrometer according to claim 8, wherein the second pressing mechanism is disposed such that a distance between a center portion of the membrane and a contact portion is different from that of the first pressing mechanism. The gyro vibrometer of claim 9, wherein the contact portion of the first pressing mechanism and the contact portion of the second pressing mechanism are capable of contacting the membrane simultaneously. The first pressing mechanism has a cylindrical shape,
11. The gyro vibrometer according to claim 9, wherein the contact portion of the first pressing mechanism has an annular contact surface capable of coming into contact with the membrane. The gyro vibrometer according to any one of claims 9 to 11, wherein the second pressing mechanism has a cylindrical shape and is arranged so as to be slidable on the inner surface of the first pressing mechanism. A gyro vibrometer as described in any one of claims 8 to 12, wherein the contact portion of the pressing mechanism has a convex curved contact surface. A gyroscopic vibrometer as described in any one of claims 8 to 13, wherein the moving mechanism is capable of being displaced in a direction different from the displacement direction of the contact portion, and is capable of displacing the contact portion in accordance with the displacement in the different direction. A gyroscopic vibrometer as described in any one of claims 8 to 13, wherein the moving mechanism is displaceable parallel to the displacement direction of the contact portion and can displace the contact portion in accordance with the displacement in the parallel direction. A gyro vibrometer as described in any one of claims 8 to 15, wherein the pressing mechanism has a first surface facing the membrane and a second surface located opposite the first surface. A gyroscopic vibrometer as described in claim 16, wherein the moving mechanism can displace the contact portion by applying a force in a direction in which the contact portion is displaced relative to the second surface. A gyroscopic vibrometer as described in claim 16 or 17, wherein the moving mechanism has a support portion extending from the second surface, and the contact portion can be displaced by displacing the support portion. A gyroscopic vibrometer as described in claim 18, wherein the support portion can be displaced parallel to the direction of displacement of the contact portion. A gyro vibrometer as described in any one of claims 16 to 19, wherein the moving mechanism can displace the contact portion by applying a force to the center of the second surface.

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