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JP7550252B2 - Transferable sheet adhesive material - Google Patents
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JP7550252B2 - Transferable sheet adhesive material - Google Patents

Transferable sheet adhesive material Download PDF

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JP7550252B2
JP7550252B2 JP2023003344A JP2023003344A JP7550252B2 JP 7550252 B2 JP7550252 B2 JP 7550252B2 JP 2023003344 A JP2023003344 A JP 2023003344A JP 2023003344 A JP2023003344 A JP 2023003344A JP 7550252 B2 JP7550252 B2 JP 7550252B2
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mass
bonding material
copper particles
bonding
parts
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JP2024099412A (en
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健太朗 三好
弘 五十嵐
克則 高田
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Nippon Sanso Holdings Corp
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Priority to JP2023003344A priority Critical patent/JP7550252B2/en
Priority to PCT/JP2023/038371 priority patent/WO2024150502A1/en
Priority to CN202380081200.1A priority patent/CN120359100A/en
Priority to KR1020257016864A priority patent/KR20250135768A/en
Priority to TW112142341A priority patent/TW202428825A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • B22F1/054Nanosized particles
    • B22F1/0545Dispersions or suspensions of nanosized particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • B22F1/054Nanosized particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B22F1/107Metallic powder containing lubricating or binding agents; Metallic powder containing organic material containing organic material comprising solvents, e.g. for slip casting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/08Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools with one or more parts not made from powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00Metallic composition of the powder or its coating
    • B22F2301/10Copper

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Conductive Materials (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Powder Metallurgy (AREA)
  • Laminated Bodies (AREA)

Description

本発明は、転写型シート状接合材に関する。 The present invention relates to a transferable sheet-like bonding material.

従来、電子部品の接合材として、半田の材料が広く用いられていた。しかしながら、半田の材料は、耐熱性に乏しいという問題があった。そのため、例えば、150℃以上の高温での使用が見込まれるSiC素子を用いたパワーデバイスでは、接合材として半田の材料の使用が困難であった。 Conventionally, solder materials have been widely used as a bonding material for electronic components. However, solder materials have a problem in that they have poor heat resistance. For example, it has been difficult to use solder materials as a bonding material in power devices using SiC elements that are expected to be used at high temperatures of 150°C or more.

そこで、焼結型接合材として、銀粒子を用いた接合材が提案されている。また、コストやイオンマイグレーションの観点で銅粒子が期待され、銅粒子を用いた転写型シート状接合材の開発が進められている。 As a result, a bonding material using silver particles has been proposed as a sintered bonding material. In addition, copper particles are promising from the standpoint of cost and ion migration, and development of a transferable sheet-type bonding material using copper particles is underway.

転写型シート状接合材は、銅粒子、還元剤、樹脂、及び溶媒を少なくとも含むペーストを、離型PETフィルム等の樹脂基板上に塗布し、乾燥させて形成される。転写型シート状接合材による2つの部材(第1部材及び第2部材)の接合は、以下のようにして行う。まず、所定の転写条件でシート状接合材を第1部材に転写した後、樹脂基板を剥離する。次いで、第1部材上に転写したシート状接合材を第2部材と接触させて、所定の接合条件でシート状接合材を介して第1部材と第2部材とを接合する。 The transfer type sheet-like bonding material is formed by applying a paste containing at least copper particles, a reducing agent, a resin, and a solvent onto a resin substrate such as a release PET film, and then drying the paste. The bonding of two members (a first member and a second member) using the transfer type sheet-like bonding material is performed as follows. First, the sheet-like bonding material is transferred to the first member under specified transfer conditions, and then the resin substrate is peeled off. Next, the sheet-like bonding material transferred onto the first member is brought into contact with the second member, and the first member and the second member are bonded via the sheet-like bonding material under specified bonding conditions.

特許文献1には、キャッピング剤としてのトリエタノールアミンで表面がコーティングされた銅粒子(D10;100nm以上、D90;2000nm以下)と、活性剤としてのジカルボン酸と、分散剤と、結合剤としてのエポキシメタクリレートウレタンと、有機溶媒としてのテルピネオールと、を含むペーストをPETフィルム上に塗布し、乾燥させて得たシート状接合材が記載されている。特許文献1では、このシート状接合材を、転写温度200~225℃、加圧力5MPa、転写時間1~10秒の転写条件で、Auメッキされたシリコンダイに転写できることが記載されている。 Patent Document 1 describes a sheet-like bonding material obtained by applying a paste containing copper particles (D10: 100 nm or more, D90: 2000 nm or less) whose surfaces are coated with triethanolamine as a capping agent, dicarboxylic acid as an activator, a dispersant, epoxy methacrylate urethane as a binder, and terpineol as an organic solvent onto a PET film and drying the paste. Patent Document 1 describes that this sheet-like bonding material can be transferred to an Au-plated silicon die under transfer conditions of a transfer temperature of 200 to 225°C, a pressure of 5 MPa, and a transfer time of 1 to 10 seconds.

特表2021-529258号公報Special Publication No. 2021-529258

しかしながら、本発明者らの検討によると、特許文献1に記載のエポキシメタクリレートウレタンという樹脂は存在しないが、いずれにしても既存のシート状接合材においては、シート状接合材(ペースト乾燥膜)に含まれる樹脂成分に起因して、乾燥膜にひび割れが入ってしまうことが判明した。 However, according to the inventors' investigations, although the epoxy methacrylate urethane resin described in Patent Document 1 does not exist, it was found that in any case, in existing sheet-like bonding materials, cracks occur in the dried film due to the resin components contained in the sheet-like bonding material (paste dried film).

また、特許文献1では、転写温度が200℃以上であるため、転写時に銅が焼結して、銅粒子の表面活性が損なわれるため、その後の接合時における銅の焼結及び被接合材への原子拡散を損なう場合があり、焼結性や原子拡散(接合性)が不安定になりがちな課題がある。銅粒子の焼結が進行しない緩やかな転写条件下で転写を行うと、シート状接合材を被転写材の全面に転写できない、又は、樹脂基板上にペースト乾燥膜(転写型シート状接合材)の残渣が残ってしまうといった問題がある。 In addition, in Patent Document 1, the transfer temperature is 200°C or higher, so copper sinters during transfer and the surface activity of the copper particles is impaired, which may impair the sintering of copper and atomic diffusion into the joined material during subsequent joining, resulting in a problem that sinterability and atomic diffusion (joinability) tend to become unstable. If transfer is performed under gentle transfer conditions that do not allow sintering of copper particles, there are problems such as the sheet-shaped joining material not being able to be transferred to the entire surface of the transferred material, or residues of the paste dried film (transfer-type sheet-shaped joining material) remaining on the resin substrate.

また、特許文献1のシート状接合材では、接合温度250℃以下での低温接合が可能ではあるが、十分な接合強度を確保することが難しいとの課題もある。 In addition, although the sheet-shaped bonding material in Patent Document 1 allows for low-temperature bonding at a bonding temperature of 250°C or less, there is also the issue that it is difficult to ensure sufficient bonding strength.

上記課題に鑑み、本発明は、(I)ひび割れが十分に抑制され、(II)銅粒子の焼結が進行しない緩やかな転写条件下であっても優れた転写性が得られ、かつ、(III)250℃以下の低温接合であっても十分な接合強度を確保できる、転写型シート状接合材を提供することを目的とする。 In view of the above problems, the present invention aims to provide a transferable sheet-like bonding material that (I) sufficiently suppresses cracking, (II) provides excellent transferability even under gentle transfer conditions where sintering of copper particles does not progress, and (III) ensures sufficient bonding strength even at low-temperature bonding of 250°C or less.

上記課題を解決すべく、本発明者らが鋭意検討したところ、銅粒子と、還元剤と、樹脂及び任意で可塑剤を含む有機材料と、溶媒と、を含むペーストを樹脂基板上に塗布、乾燥してなる転写型シート状接合材において、当該転写型シート状接合材のガラス転移点を最適化することにより、上記(I)~(III)の課題を解決することができるとの知見を得た。 In order to solve the above problems, the inventors conducted extensive research and discovered that the above problems (I) to (III) can be solved by optimizing the glass transition point of a transfer type sheet-like bonding material obtained by applying a paste containing copper particles, a reducing agent, an organic material containing a resin and optionally a plasticizer, and a solvent onto a resin substrate and drying the paste.

上記の知見に基づき完成された本発明の要旨構成は、以下のとおりである。
[1]銅粒子と、還元剤と、樹脂及び任意で可塑剤を含む有機材料と、溶媒と、を含むペーストを樹脂基板上に塗布、乾燥してなり、
-35℃以上25℃以下のガラス転移点を有することを特徴とする転写型シート状接合材。
The present invention, which has been completed based on the above findings, has the following essential features.
[1] A paste containing copper particles, a reducing agent, an organic material containing a resin and optionally a plasticizer, and a solvent is applied onto a resin substrate and dried;
A transferable sheet-like bonding material having a glass transition temperature of -35°C or higher and 25°C or lower.

[2]前記樹脂がアクリル樹脂からなる、上記[1]に記載の転写型シート状接合材。 [2] The transferable sheet-like bonding material described in [1] above, in which the resin is an acrylic resin.

[3]前記樹脂の含有量が、銅粒子100質量部に対して1.0質量部以上5.0質量部以下である、上記[1]又は[2]に記載の転写型シート状接合材。 [3] The transferable sheet-like bonding material according to [1] or [2] above, in which the resin content is 1.0 parts by mass or more and 5.0 parts by mass or less per 100 parts by mass of copper particles.

[4]前記可塑剤が、ブチルフタリルブチルグリコレート、フタル酸ジメチル、フタル酸ジオクチル、及びフタル酸ジイソデシルからなる群から選択される一種以上からなる、上記[1]~[3]のいずれか一項に記載の転写型シート状接合 [4] The transfer type sheet-like bonding material according to any one of [1] to [3] above, wherein the plasticizer is one or more selected from the group consisting of butyl phthalyl butyl glycolate, dimethyl phthalate, dioctyl phthalate, and diisodecyl phthalate.

[5]前記可塑剤の含有量が、前記樹脂100質量部に対して10質量部以上50質量部以下である、上記[1]~[4]のいずれか一項に記載の転写型シート状接合材。 [5] The transferable sheet-like bonding material according to any one of [1] to [4] above, in which the content of the plasticizer is 10 parts by mass or more and 50 parts by mass or less per 100 parts by mass of the resin.

[6]前記還元剤がトリエタノールアミンからなる、上記[1]~[5]のいずれか一項に記載の転写型シート状接合材。 [6] The transferable sheet-like bonding material according to any one of [1] to [5] above, wherein the reducing agent is triethanolamine.

[7]前記還元剤の含有量が、銅粒子100質量部に対して3質量部以上9質量部以下である、上記[1]~[6]のいずれか一項に記載の転写型シート状接合材。 [7] The transferable sheet-like bonding material according to any one of [1] to [6] above, in which the content of the reducing agent is 3 parts by mass or more and 9 parts by mass or less per 100 parts by mass of copper particles.

[8]前記銅粒子の平均粒子径が70nm以上300nm以下である、上記[1]~[7]のいずれか一項に記載の転写型シート状接合 [8] The transfer type sheet-like bonding material according to any one of [1] to [7] above, wherein the average particle diameter of the copper particles is 70 nm or more and 300 nm or less.

本発明の転写型シート状接合材は、(I)ひび割れが十分に抑制され、(II)銅粒子の焼結が進行しない緩やかな転写条件下であっても優れた転写性が得られ、かつ、(III)250℃以下の低温接合であっても十分な接合強度を確保できる。 The transferable sheet-like bonding material of the present invention (I) sufficiently suppresses cracking, (II) provides excellent transferability even under gentle transfer conditions where sintering of copper particles does not progress, and (III) ensures sufficient bonding strength even at low temperatures of 250°C or less.

[転写型シート状接合材]
本発明の一実施形態による転写型シート状接合材は、銅粒子と、還元剤と、樹脂及び任意で可塑剤を含む有機材料と、溶媒と、を含むペーストを樹脂基板上に塗布、乾燥してなり、-35℃以上25℃以下のガラス転移点を有することを特徴とする。
[Transfer-type sheet-like bonding material]
The transferable sheet-like bonding material according to one embodiment of the present invention is obtained by applying a paste containing copper particles, a reducing agent, an organic material containing a resin and optionally a plasticizer, and a solvent onto a resin substrate and drying the paste, and is characterized by having a glass transition point of -35°C or higher and 25°C or lower.

(銅粒子)
銅粒子は、銅を主成分とする。銅粒子は、銅粒子100質量%に対し銅元素を95質量%以上100質量%以下含むことが好ましく、97質量%以上含むことがさらに好ましい。銅元素を95質量%以上含むと、接合材の耐熱性が優れ、接合力がさらに優れる。
(Copper particles)
The copper particles are mainly composed of copper. The copper particles preferably contain 95% by mass or more and 100% by mass or less of copper element relative to 100% by mass of the copper particles, and more preferably contain 97% by mass or more. When the copper particle contains 95% by mass or more of copper element, the bonding material has excellent heat resistance and further excellent bonding strength.

銅粒子の平均粒子径は300nm以下であることが好ましい。銅粒子の平均粒子径が300nm以下であることにより、250℃以下の低温接合であっても十分に高い接合強度を確保できる。銅粒子の平均粒子径は150nm以下がより好ましい。また、銅粒子の平均粒子径は5nm以上が好ましい。銅粒子の平均粒子径が5nm以上であると、銅微粒子の入手が容易となる。銅粒子の平均粒子径は70nm以上であることがより好ましい。銅粒子の平均粒子径が70nm以上であることにより、250℃以下の低温接合であっても十分に高い接合強度を確保できる。 The average particle diameter of the copper particles is preferably 300 nm or less. By having an average particle diameter of the copper particles of 300 nm or less, a sufficiently high bonding strength can be ensured even at low-temperature bonding of 250°C or less. The average particle diameter of the copper particles is more preferably 150 nm or less. Furthermore, the average particle diameter of the copper particles is preferably 5 nm or more. When the average particle diameter of the copper particles is 5 nm or more, copper fine particles are easily available. The average particle diameter of the copper particles is more preferably 70 nm or more. By having an average particle diameter of the copper particles of 70 nm or more, a sufficiently high bonding strength can be ensured even at low-temperature bonding of 250°C or less.

銅粒子の形状(形態)は、特に限定されない。銅粒子の形状としては、球状(球体)、楕円状(楕円体)、板状等が挙げられ、これらの中でも、球状や楕円状が好ましく、球状がより好ましい。 The shape (form) of the copper particles is not particularly limited. Examples of the shape of the copper particles include spherical (sphere), ellipsoid (ellipsoid), plate-like, etc., and among these, spherical and ellipsoidal shapes are preferred, with spherical shapes being more preferred.

銅粒子の平均粒子径は、走査型電子顕微鏡(SEM)を使用して倍率:10000倍で10視野観察し、10視野において以下の選定基準(1)~(5)によって選定された全ての銅粒子について、各銅粒子の粒子径を測定し、そのD50を求めることにより、特定することができる。なお、楕円など真円ではない粒子については、長径を粒子径とする。なお、銅粒子の粒度分布も、上記の測定対象とした全ての銅粒子の粒子径によって特定される。ここで、シート状接合材における銅粒子の平均粒子径及び粒度分布を求める際には、シートの最表面部を観察する。シート作製前の粉末状態では、粉末をカーボンテープの上にスパチュラでのせ、余分な粉末をエアダスターで除去し、テープ表面を観察する。
(1)粒子の一部が画像の視野の外にはみだしている粒子は測定しない。
(2)輪郭がはっきりしており、孤立して存在している粒子は測定する。
(3)平均的な粒子形状から外れている場合でも、独立しており、単独粒子として測定が可能な粒子は測定する。
(4)粒子同士に重なりがあるが、両者の境界が明瞭で、粒子全体の形状も判断可能な粒子は、それぞれの粒子を単独粒子として測定する。
(5)重なり合っている粒子で、境界がはっきりせず、粒子の全形も判らない粒子は、粒子の形状が判断できないものとして測定しない。
The average particle size of the copper particles can be determined by observing 10 fields of view at a magnification of 10,000 times using a scanning electron microscope (SEM), measuring the particle size of each copper particle for all copper particles selected according to the following selection criteria (1) to (5) in the 10 fields of view, and determining the D50. For particles that are not perfectly round, such as ellipses, the major axis is taken as the particle size. The particle size distribution of the copper particles is also determined by the particle sizes of all the copper particles that are the subject of the above measurement. Here, when determining the average particle size and particle size distribution of the copper particles in the sheet-like bonding material, the outermost surface of the sheet is observed. In the powder state before the sheet is produced, the powder is placed on a carbon tape with a spatula, excess powder is removed with an air duster, and the tape surface is observed.
(1) Particles with any part lying outside the field of view of the image will not be measured.
(2) Particles that have clear contours and exist in isolation are measured.
(3) Even if a particle shape deviates from the average particle shape, it is measured if it is independent and can be measured as a single particle.
(4) When particles overlap each other but the boundaries between them are clear and the overall shape of the particle can be determined, each particle is measured as a single particle.
(5) Particles that overlap each other, have unclear boundaries, and whose overall shape cannot be determined are not measured as their shape cannot be determined.

銅粒子としては、保護剤、分散剤などを必要としないものを用いることが好ましい。このような銅粒子としては、特許第4304221号公報に記載された製造方法によって得られる金属超微粉が例示される。ただし、銅粒子はこの例示に限定されない。 It is preferable to use copper particles that do not require protective agents, dispersants, etc. An example of such copper particles is ultrafine metal powder obtained by the manufacturing method described in Japanese Patent No. 4304221. However, the copper particles are not limited to this example.

銅粒子は、表面に炭酸銅を含む被膜を有することが好ましい。銅粒子が表面に炭酸銅を含む被膜を有することで、銅粒子の焼結温度を、従来に比べて低く抑えながら接合力を高めることができる。炭酸銅を含む被膜は、亜酸化銅をさらに含んでもよい。 It is preferable that the copper particles have a coating containing copper carbonate on the surface. By having the copper particles have a coating containing copper carbonate on the surface, the sintering temperature of the copper particles can be kept lower than before while increasing the bonding strength. The coating containing copper carbonate may further contain cuprous oxide.

銅粒子は、有機保護膜で被覆されていないものを用いることが好ましい。銅粒子が有機保護膜に被覆されている場合、有機保護膜を分解させないと銅粒子の焼結が進行しないため、有機保護膜の分解温度以上の接合温度を必要とし、250℃以下の低温接合ができない場合がある。また、有機保護膜の分解ガスが接合層にボイドを形成したり、接合層にクラックが発生し、信頼性を低下させるリスクとなる。 It is preferable to use copper particles that are not coated with an organic protective film. If the copper particles are coated with an organic protective film, sintering of the copper particles will not proceed unless the organic protective film is decomposed, so a bonding temperature above the decomposition temperature of the organic protective film is required, and low-temperature bonding at 250°C or below may not be possible. In addition, the decomposition gas of the organic protective film may form voids in the bonding layer or cause cracks in the bonding layer, posing a risk of reducing reliability.

銅粒子の比表面積に対する質量酸素濃度の割合は、空気中の酸素との反応性を低くして、再酸化の影響を低減する観点から、0.1質量%・g/m以上であることが好ましく、0.2質量%・g/m以上であることがより好ましい。他方で、銅粒子の比表面積に対する質量酸素濃度の割合は、接合時に酸化膜を除去しやすくして、接合力をより高める観点から、1.2質量%・g/m以下であることが好ましく、0.5質量%・g/m以下であることがより好ましい。 The ratio of the mass oxygen concentration to the specific surface area of the copper particles is preferably 0.1 mass% g/m 2 or more, more preferably 0.2 mass% g/m 2 or more, from the viewpoint of reducing the reactivity with oxygen in the air and reducing the effect of reoxidation. On the other hand, the ratio of the mass oxygen concentration to the specific surface area of the copper particles is preferably 1.2 mass% g/m 2 or less, more preferably 0.5 mass% g/m 2 or less , from the viewpoint of making it easier to remove the oxide film during bonding and further increasing the bonding strength.

銅粒子の比表面積に対する質量炭素濃度の割合は、ボイド、クラックの発生を抑制して、接合力をより高める観点から、0.3質量%・g/m以下であることが好ましく、0.1質量%・g/m以下であることがより好ましく、0.05質量%・g/m以下であることがさらに好ましい。銅粒子の比表面積に対する質量炭素濃度の割合は、0.008質量%・g/m以上であることが好ましい。 From the viewpoint of suppressing the occurrence of voids and cracks and further increasing the bonding strength, the ratio of the mass carbon concentration to the specific surface area of the copper particles is preferably 0.3 mass% g/ m2 or less, more preferably 0.1 mass% g/ m2 or less, and even more preferably 0.05 mass% g/ m2 or less. The ratio of the mass carbon concentration to the specific surface area of the copper particles is preferably 0.008 mass% g/ m2 or more.

銅粒子の比表面積に対する質量酸素濃度の割合は、それぞれ測定された比表面積と質量酸素濃度から算出できる。比表面積は、窒素ガスのBET吸着装置(例えば、株式会社マウンテック社製「MACSORB HM-1201」)を使用して測定できる。質量酸素濃度は、酸素窒素分析装置(例えば、LECO社製「TC600」)を使用して測定できる。 The ratio of mass oxygen concentration to the specific surface area of copper particles can be calculated from the measured specific surface area and mass oxygen concentration. The specific surface area can be measured using a nitrogen gas BET adsorption device (e.g., MACSORB HM-1201 manufactured by Mountec Co., Ltd.). The mass oxygen concentration can be measured using an oxygen-nitrogen analyzer (e.g., TC600 manufactured by LECO Corporation).

銅粒子の比表面積に対する質量炭素濃度の割合は、それぞれ測定された比表面積と質量炭素濃度から算出できる。比表面積は、窒素ガスのBET吸着装置(例えば、株式会社マウンテック社製「MACSORB HM-1201」)を使用して測定できる。質量炭素濃度は、炭素硫黄分析装置(例えば、株式会社堀場製作所製「EMIA-920V」)を使用して測定できる。 The ratio of the mass carbon concentration to the specific surface area of the copper particles can be calculated from the measured specific surface area and mass carbon concentration. The specific surface area can be measured using a nitrogen gas BET adsorption device (e.g., MACSORB HM-1201 manufactured by Mountec Co., Ltd.). The mass carbon concentration can be measured using a carbon-sulfur analyzer (e.g., EMIA-920V manufactured by Horiba, Ltd.).

シート状接合材における「銅粒子の含有量」は、ペーストにおける銅粒子の含有量と同等であり、例えばシートを窒素雰囲気下で1000℃程度まで加熱し、加熱後の重量から把握することができる。 The "copper particle content" in the sheet-shaped bonding material is equivalent to the copper particle content in the paste, and can be determined, for example, by heating the sheet to about 1000°C in a nitrogen atmosphere and determining its weight after heating.

(還元剤)
還元剤は、接合時に銅粒子の表面に不可避的に存在する酸化膜を還元する化合物である。接合時、還元剤により酸化膜が除去されることで銅粒子(純銅)同士が接触して焼結が進行し、拡散接合が進行する。
(Reducing Agent)
The reducing agent is a compound that reduces the oxide film that inevitably exists on the surface of the copper particles during bonding. During bonding, the oxide film is removed by the reducing agent, causing the copper particles (pure copper) to come into contact with each other, and sintering progresses, leading to diffusion bonding.

本実施形態において、還元剤は、トリエタノールアミンからなるものとすることが好ましい。トリエタノールアミンは、酸化膜の除去効果が高く、また高沸点かつ低揮発性であるため、転写時にも抜けにくく、経時安定性が高いため、接合前の保管安定性に優れる。 In this embodiment, the reducing agent is preferably triethanolamine. Triethanolamine is highly effective at removing oxide films, and because it has a high boiling point and low volatility, it is less likely to come off during transfer, and because it has high stability over time, it has excellent storage stability before bonding.

本実施形態において、還元剤の含有量は、銅粒子100質量部に対して3質量部以上9質量部以下であることが好ましい。還元剤の含有量が3質量部以上であれば、還元剤の量が十分であり、250℃以下の低温接合であっても銅粒子の焼結が十分となり、十分に高い接合強度を確保できる。また、還元剤の含有量が9質量部以下であれば、転写時及び接合時に還元剤の染み出しが生じにくく、被接合材と同一形状での転写及び接合が実現できる。また、分解ガス成分が増えることなく、接合層にボイドやクラックが入りにくい。 In this embodiment, the content of the reducing agent is preferably 3 parts by mass or more and 9 parts by mass or less per 100 parts by mass of copper particles. If the content of the reducing agent is 3 parts by mass or more, the amount of reducing agent is sufficient, and even at low-temperature bonding at 250°C or less, the copper particles are sufficiently sintered, and a sufficiently high bonding strength can be ensured. Furthermore, if the content of the reducing agent is 9 parts by mass or less, the reducing agent is less likely to seep out during transfer and bonding, and transfer and bonding in the same shape as the materials to be bonded can be achieved. Furthermore, there is no increase in decomposition gas components, and voids and cracks are less likely to occur in the bonding layer.

なお、シート状接合材中における還元剤の含有量は、ペーストにおける還元剤の含有量と同等である。 The reducing agent content in the sheet-like bonding material is the same as the reducing agent content in the paste.

(有機材料)
本実施形態において、有機材料は樹脂及び任意で可塑剤を含む。
(Organic Materials)
In this embodiment, the organic material includes a resin and optionally a plasticizer.

<樹脂>
樹脂は、転写型接合シートを第1部材に転写させる際の接着材として機能する。また、銅粒子を分散させる分散剤としての機能もあるとなお良い。
<Resin>
The resin functions as an adhesive when the transfer-type bonding sheet is transferred to the first member, and preferably also functions as a dispersant for dispersing the copper particles.

樹脂は、分解性の高いバインダーであるアクリル樹脂や脂肪族ポリカーボネートなどの樹脂であることが好ましい。特に、樹脂がアクリル樹脂からなることが好ましい。アクリル樹脂は、接着機能があるため、転写性に優れるからである。具体的には、ポリメタクリル酸アルキルエステル、ポリメタクリル酸アルキル、及びメタクリル酸エステル系共重合物から選択される一種以上を用いることができる。 The resin is preferably a resin such as an acrylic resin or an aliphatic polycarbonate, which is a highly degradable binder. In particular, it is preferable that the resin is an acrylic resin. This is because acrylic resin has an adhesive function and therefore has excellent transferability. Specifically, one or more types selected from poly(alkyl methacrylate), poly(alkyl methacrylate), and methacrylic acid ester copolymers can be used.

本実施形態において、樹脂の含有量は、銅粒子100質量部に対して1.0質量部以上5.0質量部以下であることが好ましい。樹脂の含有量が1.0質量部未満の場合、ペースト乾燥膜にひび割れが生じやすく、また、銅粒子の焼結が進行しない緩やかな転写条件下では優れた転写性が得られにくい。また、樹脂の含有量が5.0質量部を超えると、バインダー中の分解性成分や未分解物が接合層にボイドを形成し、被接合材との密着性が損なわれるため、250℃以下の低温接合では十分な接合強度を確保できない。 In this embodiment, the resin content is preferably 1.0 part by mass or more and 5.0 parts by mass or less per 100 parts by mass of copper particles. If the resin content is less than 1.0 part by mass, cracks are likely to occur in the paste dried film, and excellent transferability is difficult to obtain under gentle transfer conditions in which sintering of the copper particles does not progress. Furthermore, if the resin content exceeds 5.0 parts by mass, decomposable components and undecomposed substances in the binder form voids in the bonding layer, impairing adhesion with the bonded materials, and sufficient bonding strength cannot be ensured at low temperatures of 250°C or less.

なお、シート状接合材中における樹脂の含有量は、ペーストにおける樹脂の含有量と同等である。 The resin content in the sheet-shaped bonding material is the same as the resin content in the paste.

<可塑剤>
可塑剤は、シート状接合材のガラス転移点を下げ、シートに柔軟性を付与するとともに、銅粒子を含む塗布膜の乾燥収縮を抑える役割を果たす。
<Plasticizer>
The plasticizer lowers the glass transition point of the sheet-like bonding material, imparts flexibility to the sheet, and also plays a role in suppressing drying shrinkage of the coating film containing copper particles.

可塑剤は、フタル酸ジメチル、フタル酸ジエチル、フタル酸ジアリル、フタル酸ジブチル、フタル酸ジイソブチル、フタル酸ジノルマルヘキシル、フタル酸ビス(2エチルヘキシル)、フタル酸ジオクチル、フタル酸ジノルマルオクチル、フタル酸ジイソノニル、フタル酸ジイソデシル、フタル酸ジノニル、フタル酸ビスブチルベンジル、及びブチルフタリルブチルグリコレートから選択される一種以上を用いることができる。特に、可塑剤は、ブチルフタリルブチルグリコレート、フタル酸ジメチル、フタル酸ジオクチル、及びフタル酸ジイソデシルからなる群から選択される一種以上からなることが好ましい。 The plasticizer may be one or more selected from the group consisting of dimethyl phthalate, diethyl phthalate, diallyl phthalate, dibutyl phthalate, diisobutyl phthalate, di-n-hexyl phthalate, bis(2-ethylhexyl) phthalate, di-octyl phthalate, di-isononyl phthalate, di-isodecyl phthalate, di-nonyl phthalate, bis-butyl benzyl phthalate, and butyl phthalyl butyl glycolate. In particular, the plasticizer is preferably one or more selected from the group consisting of butyl phthalyl butyl glycolate, dimethyl phthalate, di-octyl phthalate, and di-isodecyl phthalate.

本実施形態において、可塑剤の含有量は、樹脂100質量部に対して10質量部以上50質量部以下であることが好ましい。可塑剤の含有量が10質量部未満の場合、可塑効果が発揮されにくいため、ペースト乾燥膜にひび割れが生じやすく、また、銅粒子の焼結が進行しない緩やかな転写条件下では優れた転写性が得られにくい。また、転写時に銅粒子が焼結する可能性があるため、250℃以下の低温接合では十分な接合強度を確保できない。また、可塑剤の含有量が50質量部を超えると、ペースト中の銅粒子、バインダー、及び還元剤の分散不良が生じやすいため、銅粒子の焼結が進行しない緩やかな転写条件下では優れた転写性が得られにくく、また、250℃以下の低温接合では十分な接合強度を確保できない。 In this embodiment, the content of the plasticizer is preferably 10 parts by mass or more and 50 parts by mass or less per 100 parts by mass of the resin. If the content of the plasticizer is less than 10 parts by mass, the plasticizing effect is not easily exerted, so that the paste dried film is likely to crack, and excellent transferability is difficult to obtain under gentle transfer conditions in which sintering of the copper particles does not proceed. In addition, since the copper particles may sinter during transfer, sufficient bonding strength cannot be ensured at low temperatures of 250°C or less. In addition, if the content of the plasticizer exceeds 50 parts by mass, poor dispersion of the copper particles, binder, and reducing agent in the paste is likely to occur, so that excellent transferability is difficult to obtain under gentle transfer conditions in which sintering of the copper particles does not proceed, and sufficient bonding strength cannot be ensured at low temperatures of 250°C or less.

なお、シート状接合材中における可塑剤の含有量は、ペーストにおける可塑剤の含有量と同等である。 The plasticizer content in the sheet-like bonding material is the same as the plasticizer content in the paste.

<転写型シート状接合材のガラス転移点>
本実施形態の転写型シート状接合材は、-35℃以上25℃以下のガラス転移点を有することが重要である。転写型シート状接合材のガラス転移点を25℃以下とすることで、柔軟な転写型シート状接合材を得ることができ、(I)ひび割れが十分に抑制され、(II)銅粒子の焼結が進行しない緩やかな転写条件下であっても優れた転写性が得られ、かつ、(III)250℃以下の低温接合であっても十分な接合強度を確保できる。この観点から、転写型シート状接合材のガラス転移点は10℃以下であることが好ましい。他方で、転写型シート状接合材のガラス転移点が低すぎると、シート状接合材を樹脂基板から転写ができなくなる場合がある。よって、転写型シート状接合材のガラス転移点は-35℃以上とし、好ましくは-20℃以上とする。
<Glass transition temperature of transfer type sheet-like bonding material>
It is important that the transfer type sheet-like bonding material of this embodiment has a glass transition point of -35 ° C or more and 25 ° C or less. By setting the glass transition point of the transfer type sheet-like bonding material to 25 ° C or less, a flexible transfer type sheet-like bonding material can be obtained, (I) cracking is sufficiently suppressed, (II) excellent transferability can be obtained even under gentle transfer conditions where sintering of copper particles does not progress, and (III) sufficient bonding strength can be ensured even at low temperature bonding of 250 ° C or less. From this viewpoint, the glass transition point of the transfer type sheet-like bonding material is preferably 10 ° C or less. On the other hand, if the glass transition point of the transfer type sheet-like bonding material is too low, the sheet-like bonding material may not be able to be transferred from the resin substrate. Therefore, the glass transition point of the transfer type sheet-like bonding material is -35 ° C or more, preferably -20 ° C or more.

転写型シート状接合材のガラス転移点は、主に樹脂の種類と、可塑剤の種類及び含有量とによって、制御することができる。 The glass transition point of the transferable sheet-like adhesive material can be controlled mainly by the type of resin and the type and content of plasticizer.

転写型シート状接合材のガラス転移点は、樹脂基板からペースト乾燥膜(転写型シート状接合材)を剥離し、得られた粉末を示差走査熱量測定に供することよって、特定することができる。例えば、島津製作所製の示差走査熱量計(DSC60)を用いて、ペースト乾燥粉末(70℃、60分乾燥品)を20mg装置に入れ、測定範囲-50℃から150℃(昇温速度:10℃/分)、窒素雰囲気下(流量50mL/分)の条件で測定して得られるDSCサーモグラフにおいて、ガラス転移によってベースラインが下にシフトした際の、元のベースラインとの変位の中点をガラス転移点として算出することができる。 The glass transition point of the transfer-type sheet-like bonding material can be determined by peeling off the paste-dried film (transfer-type sheet-like bonding material) from the resin substrate and subjecting the resulting powder to differential scanning calorimetry. For example, a Shimadzu Corporation differential scanning calorimeter (DSC60) is used, and 20 mg of the paste-dried powder (dried for 60 minutes at 70°C) is placed in the device, and measurements are taken under conditions of a measurement range of -50°C to 150°C (heating rate: 10°C/min) in a nitrogen atmosphere (flow rate 50 mL/min). In the DSC thermograph obtained, the glass transition point can be calculated as the midpoint of the displacement from the original baseline when the baseline shifts downward due to the glass transition.

(溶媒)
溶媒は、200℃程度の沸点を持ち、揮発性の低いものが望ましい。ペースト塗布中に溶媒が蒸発して金属濃度が変わると、塗布膜の厚みムラが生じるからである。また、溶媒は、用いる樹脂を溶解できるものである必要がある。これらの観点から、例えば、テルピネオールなどのテルペン系溶媒を用いることができる。
(solvent)
The solvent should have a boiling point of about 200°C and low volatility. If the solvent evaporates during paste application and the metal concentration changes, the thickness of the coating film will become uneven. The solvent must also be capable of dissolving the resin used. From these perspectives, for example, a terpene-based solvent such as terpineol can be used.

(シート状)
本実施形態の接合材は、シート状である。ここで、接合材の厚さは、特に限定されず、例えば10μm以上1mm未満とすることができる。
(Sheet form)
The bonding material of the present embodiment is in a sheet form. The thickness of the bonding material is not particularly limited, and may be, for example, 10 μm or more and less than 1 mm.

また、接合材の形状(厚さ方向から平面視した際の形状)は、特に限定されるものではなく、被接合部材の接合面の形状等に応じて、適宜選択することができ、例えば、矩形や円形等が挙げられる。 The shape of the joining material (when viewed in a planar view from the thickness direction) is not particularly limited and can be appropriately selected depending on the shape of the joining surfaces of the members to be joined, and examples include rectangular and circular shapes.

[転写型シート状接合材の製造方法]
本実施形態の転写型シート状接合材は、銅粒子と、還元剤と、樹脂及び任意で可塑剤を含む有機材料と、溶媒と、を含むペーストを樹脂基板上に塗布、乾燥することにより、作製することができる。
[Method of manufacturing transfer type sheet-like bonding material]
The transfer type sheet-like bonding material of this embodiment can be produced by applying a paste containing copper particles, a reducing agent, an organic material containing a resin and optionally a plasticizer, and a solvent onto a resin substrate and drying it.

ペーストの作製方法は特に限定されず、各成分を、自公転式ミキサー、乳鉢、ミル攪拌、スターラー攪拌等を用いる方法で混合することにより作製することができる。樹脂基板上へのペーストの塗布・乾燥方法も特に限定されず、例えば、アプリケーターを用いて樹脂基板上にペーストを塗布し、熱風オーブンにて塗布膜を乾燥させることで、ペースト乾燥膜を得ることができる。乾燥条件は、50~110℃(雰囲気温度)で乾燥時間10~90分とすることができる。 The method for producing the paste is not particularly limited, and the paste can be produced by mixing the components using a planetary mixer, a mortar, mill stirring, stirrer stirring, etc. The method for applying and drying the paste onto a resin substrate is also not particularly limited, and for example, a paste dried film can be obtained by applying the paste onto a resin substrate using an applicator and drying the applied film in a hot air oven. Drying conditions can be 50 to 110°C (ambient temperature) and a drying time of 10 to 90 minutes.

樹脂基板は特に限定されず、例えば、離型PETフィルム、シリコンフィルム、フッ素樹脂フィルム等を挙げることができる。樹脂基板の厚さは、離型性を考慮して50~200μm程度とすることができる。 The resin substrate is not particularly limited, and examples include a release PET film, a silicone film, and a fluororesin film. The thickness of the resin substrate can be about 50 to 200 μm, taking into account releasability.

転写型シート状接合材による2つの部材(第1部材及び第2部材)の接合は、以下の転写及び接合の2工程を経て行われる。 The joining of two members (a first member and a second member) using a transfer-type sheet-like joining material is carried out through the following two steps of transfer and joining.

(転写)
まず、シート状接合材を第1部材と接合させた後、樹脂基板を剥離する。すなわち、第1部材にシート状接合材を転写する。樹脂基板上に形成された転写型シート状接合材を第1部材に転写する際の条件は特に限定されないが、本実施形態では、転写温度150℃以下、加圧力10MPa以下、転写時間1分以下という、銅粒子の焼結が進行しない緩やかな転写条件下であっても優れた転写性が得られる。転写条件としては、転写温度は50~150℃、加圧力は1~10MPa、転写時間は10秒~1分の範囲内とすることができる。転写の際の雰囲気は、窒素(N)等の不活性雰囲気とすることが好ましい。
(Transcription)
First, the sheet-shaped bonding material is bonded to the first member, and then the resin substrate is peeled off. That is, the sheet-shaped bonding material is transferred to the first member. The conditions for transferring the transfer-type sheet-shaped bonding material formed on the resin substrate to the first member are not particularly limited, but in this embodiment, excellent transferability can be obtained even under gentle transfer conditions in which sintering of copper particles does not progress, such as a transfer temperature of 150° C. or less, a pressure of 10 MPa or less, and a transfer time of 1 minute or less. The transfer conditions can be in the range of a transfer temperature of 50 to 150° C., a pressure of 1 to 10 MPa, and a transfer time of 10 seconds to 1 minute. The atmosphere during transfer is preferably an inert atmosphere such as nitrogen (N 2 ).

(接合)
次いで、第1部材上に転写したシート状接合材を第2部材と接触させて、所定の接合条件でシート状接合材を介して第1部材と第2部材とを接合する。接合条件は特に限定されないが、本実施形態では、250℃以下の低温接合であっても十分な接合強度を確保できる。接合条件としては、接合温度は200~250℃、加圧力は1~40MPa、転写時間は1~60分の範囲内とすることができる。接合の際の雰囲気は、窒素(N)等の不活性雰囲気とすることが好ましい。
(Joining)
Next, the sheet-like bonding material transferred onto the first member is brought into contact with the second member, and the first member and the second member are bonded via the sheet-like bonding material under predetermined bonding conditions. The bonding conditions are not particularly limited, but in this embodiment, sufficient bonding strength can be ensured even at low temperatures of 250°C or less. The bonding conditions can be in the range of a bonding temperature of 200 to 250°C, a pressure of 1 to 40 MPa, and a transfer time of 1 to 60 minutes. The bonding atmosphere is preferably an inert atmosphere such as nitrogen (N 2 ).

[転写型シート状接合材の製造]
(試験例No.1)
大陽日酸製銅粒子(粒子径110nm品;D10;39nm、D50;112nm、D90;310nm)40g、還元剤としてのトリエタノールアミン3.2g、アクリルバインダー(共栄社化学株式会社製、オリコックスKC-500)1.78g、及び溶媒としてのテルピネオール12.2gを、自公転式ミキサーにて混合し、ペーストを得た。なお、銅粒子の表層は亜酸化銅で被覆されており、銅粒子の比表面積に対する質量酸素濃度の割合は、0.25質量%・g/mであり、質量炭素濃度の割合は、0.03質量%・g/mである。
[Production of transfer type sheet-like bonding material]
(Test Example No. 1)
A paste was obtained by mixing 40 g of Taiyo Nippon Sanso copper particles (particle size 110 nm; D10; 39 nm, D50; 112 nm, D90; 310 nm), 3.2 g of triethanolamine as a reducing agent, 1.78 g of acrylic binder (Oricox KC-500, manufactured by Kyoeisha Chemical Co., Ltd.), and 12.2 g of terpineol as a solvent in a planetary mixer. The surface layer of the copper particles was coated with cuprous oxide, and the ratio of the mass oxygen concentration to the specific surface area of the copper particles was 0.25 mass% g/ m2 , and the mass carbon concentration was 0.03 mass% g/ m2 .

次いで、作製したペーストを、厚さ100μmの離形PETフィルム上にアプリケーターを用いて、塗布膜200μmの厚さで塗布し、熱風オーブンにて70℃60分の条件で塗布膜を乾燥させてテルピネオールを除去し、ペースト乾燥膜(転写型シート状接合材)を得た。得られた転写型シート状接合材の配合と、既述の方法で測定した転写型シート状接合材のガラス転移点を表1に示す。 The paste thus prepared was then applied to a 100 μm-thick release PET film using an applicator to form a coating film of 200 μm thickness, and the coating film was dried in a hot air oven at 70°C for 60 minutes to remove the terpineol, yielding a paste-dried film (transfer-type sheet-like bonding material). The composition of the resulting transfer-type sheet-like bonding material and the glass transition point of the transfer-type sheet-like bonding material measured by the method described above are shown in Table 1.

(試験例No.2~26)
銅粒子の含有量は40gのまま固定し、銅粒子の種類、還元剤の種類及び含有量、アクリルバインダーの種類及び含有量、並びに、可塑剤の種類及び含有量を、表1に示すものに変更して、試験例No.1と同様にしてペーストを得た。なお、テルピネオールの含有量は、ペースト中の銅粒子の濃度が70質量%となるように設定した。次いで、試験例No.1と同様にして、ペースト乾燥膜(転写型シート状接合材)を得た。得られた転写型シート状接合材の配合と、既述の方法で測定した有機材料のガラス転移点を表1に示す。
(Test Examples No. 2 to 26)
The content of copper particles was fixed at 40 g, and the type of copper particles, the type and content of reducing agent, the type and content of acrylic binder, and the type and content of plasticizer were changed to those shown in Table 1, and a paste was obtained in the same manner as in Test Example No. 1. The content of terpineol was set so that the concentration of copper particles in the paste was 70 mass%. Next, a paste dried film (transfer type sheet-like bonding material) was obtained in the same manner as in Test Example No. 1. The composition of the obtained transfer type sheet-like bonding material and the glass transition point of the organic material measured by the above-mentioned method are shown in Table 1.

[ペースト乾燥膜のひび割れの評価]
各試験例において、ペースト乾燥膜(転写型シート状接合材)をマイクロスコープにて倍率20倍で10視野観察した。10視野全てでひび割れがない場合を「優」、1視野でもひび割れがある場合を「劣」として、表1の「ペースト乾燥膜耐ひび割れ性」の欄に示した。なお、乾燥膜にひび割れのある「劣」の場合には、ひび割れパターンやその程度を制御することができないため、接合後の接合サンプルのせん断強度にばらつきが生じることから、以降の転写及び接合の試験は実施しなかった。
[Evaluation of cracks in dried paste film]
In each test example, the paste dried film (transfer type sheet-like bonding material) was observed in 10 fields of view at a magnification of 20 times using a microscope. The cases where there were no cracks in all 10 fields of view were rated as "excellent," and the cases where there were cracks in even one field of view were rated as "poor," and these were shown in the "Crack Resistance of Paste Dried Film" column in Table 1. In the case of "poor" where the dried film had cracks, the crack pattern and degree could not be controlled, and therefore the shear strength of the bonded sample after bonding varied, so the subsequent transfer and bonding tests were not performed.

[転写性の評価]
各試験例において、転写型シート状接合材上にAuメッキが施されたSiC(4mm角、厚さ350μm)をマウントし、転写温度(雰囲気温度)150℃、加圧力10MPa、転写時間30秒、N雰囲気下の転写条件で、SiCのAuメッキ面に転写型シート状接合材を転写させた。シート状接合材をSiCの全面に転写でき、かつ、離型PETフィルム上にペースト乾燥膜(転写型シート状接合材)の残渣がない場合を「優」、シート状接合材をSiCの全面に転写できない、又は、離型PETフィルム上にペースト乾燥膜(転写型シート状接合材)の残渣がある場合を「劣」として、表1の「転写性」の欄に示した。なお、転写性が「劣」の場合には、接合後の接合サンプルのせん断強度にばらつきが生じることから、以降の接合の試験は実施しなかった。
[Evaluation of transferability]
In each test example, SiC (4 mm square, 350 μm thick) plated with Au was mounted on the transfer type sheet-shaped bonding material, and the transfer type sheet-shaped bonding material was transferred to the Au-plated surface of SiC under the following transfer conditions: transfer temperature (atmosphere temperature) 150 ° C., pressure 10 MPa, transfer time 30 seconds, and N2 atmosphere. The case where the sheet-shaped bonding material can be transferred to the entire surface of SiC and there is no residue of the paste dry film (transfer type sheet-shaped bonding material) on the release PET film is rated as "excellent", and the case where the sheet-shaped bonding material cannot be transferred to the entire surface of SiC or there is a residue of the paste dry film (transfer type sheet-shaped bonding material) on the release PET film is rated as "poor", and is shown in the "transferability" column of Table 1. In addition, when the transferability is "poor", the shear strength of the bonded sample after bonding varies, so subsequent bonding tests were not performed.

[接合品せん断強度の評価]
各試験例において、SiC上に転写した転写型シート状接合材と、無酸素銅板C1020(20mm角、厚さ2mm)とを接触させて、加圧接合装置にて、接合温度(雰囲気温度)250℃、加圧力10MPa、接合時間5分、N雰囲気下の接合条件にて、シート状接合材を介してSiCと無酸素銅板とを接合して、接合品を製造した。接合品のせん断強度は、ボンドテスター(デイジ社製、4000Plus)を用いて、ツール高さ100μm、ツール速度200μm/sにて測定し、表1に示した。50MPa以上のせん断強度が良好である。
[Evaluation of shear strength of bonded products]
In each test example, the transfer type sheet-like bonding material transferred onto the SiC was brought into contact with an oxygen-free copper plate C1020 (20 mm square, 2 mm thick), and the SiC and the oxygen-free copper plate were bonded to each other via the sheet-like bonding material in a pressure bonding device under the following bonding conditions: bonding temperature (atmospheric temperature) 250 ° C, pressure 10 MPa, bonding time 5 minutes, and N2 atmosphere. The bonded product was manufactured. The shear strength of the bonded product was measured using a bond tester (manufactured by Daige, 4000Plus) at a tool height of 100 μm and a tool speed of 200 μm/s, and is shown in Table 1. A shear strength of 50 MPa or more is good.

[接合後の接合層の染み出しの評価]
各試験例において、接合品におけるSiCの外周部をマイクロスコープ(ホーザン株式会社製、L-KIT504)にて20倍の倍率で観察し、SiCの外周部周辺での液状の染み出しの有無を確認し、表1に示した。
[Evaluation of bleeding of bonding layer after bonding]
In each test example, the outer periphery of the SiC in the bonded product was observed at 20x magnification using a microscope (L-KIT504, manufactured by Hozan Corporation) to check for the presence or absence of liquid seepage around the outer periphery of the SiC. The results are shown in Table 1.

Figure 0007550252000001
Figure 0007550252000001

※1
110nm品(D10;39nm、D50;112nm、D90;310nm)
300nm品(D10;52nm、D50;298nm、D90;652nm)
70nm品(D10;24nm、D50; 72nm、D90;284nm)
100nm品(D10;34nm、D50;101nm、D90;308nm)
400nm品(D10;66nm、D50;403nm、D90;811nm)
50nm品(D10;15nm、D50; 51nm、D90;194nm)
※2:銅粒子100質量部に対する還元剤含有量(質量部)
※3:銅粒子100質量部に対するアクリルバインダー中のアクリル樹脂含有量(質量部)
※4:アクリル樹脂100質量部に対する可塑剤含有量(質量部)
*1
110nm product (D10; 39nm, D50; 112nm, D90; 310nm)
300 nm products (D10; 52 nm, D50; 298 nm, D90; 652 nm)
70nm product (D10; 24nm, D50; 72nm, D90; 284nm)
100nm product (D10; 34nm, D50; 101nm, D90; 308nm)
400nm product (D10; 66nm, D50; 403nm, D90; 811nm)
50nm product (D10; 15nm, D50; 51nm, D90; 194nm)
*2: Reducing agent content (parts by mass) per 100 parts by mass of copper particles
*3: Acrylic resin content (parts by mass) in the acrylic binder per 100 parts by mass of copper particles
*4: Plasticizer content (parts by mass) per 100 parts by mass of acrylic resin

表1から明らかなように、転写型シート状接合材のガラス転移点が-35℃以上25℃以下の範囲外となる比較例では、乾燥膜にひび割れが観察されたのに対して、転写型シート状接合材のガラス転移点が-35℃以上25℃以下の範囲内となる発明例では、乾燥膜にひび割れが発生せず、銅粒子の焼結が進行しない緩やかな転写条件下であっても優れた転写性が得られ、かつ、250℃の低温接合であっても十分な接合強度を確保できた。特に、アクリルバインダーの含有量、還元剤の含有量、及び銅粒子の平均粒子径を最適化した一部の発明例においては、50MPa以上の高いせん断強度が得られた。 As is clear from Table 1, in the comparative examples in which the glass transition point of the transfer-type sheet-like bonding material was outside the range of -35°C or more and 25°C or less, cracks were observed in the dried film, whereas in the invention examples in which the glass transition point of the transfer-type sheet-like bonding material was within the range of -35°C or more and 25°C or less, no cracks occurred in the dried film, excellent transferability was obtained even under gentle transfer conditions in which sintering of the copper particles did not progress, and sufficient bonding strength was ensured even at a low temperature of 250°C. In particular, in some of the invention examples in which the acrylic binder content, reducing agent content, and average particle size of the copper particles were optimized, a high shear strength of 50 MPa or more was obtained.

本発明の転写型シート状接合材は、電子部品を接合する用途で産業上利用可能である。具体的には、パワーデバイスと呼ばれる電子デバイス内のような、半田等の接合材の使用が困難な高温環境において、基盤、素子等の部品の接合用途が例示される。 The transferable sheet-like bonding material of the present invention can be used industrially for bonding electronic components. Specifically, it can be used to bond components such as circuit boards and elements in high-temperature environments where it is difficult to use bonding materials such as solder, such as in electronic devices called power devices.

Claims (8)

銅粒子と、前記銅粒子の表面に不可避的に存在する酸化膜を還元する還元剤と、樹脂及び任意で可塑剤を含む有機材料と、溶媒と、を含むペーストを樹脂基板上に塗布、乾燥してなり、
-35℃以上25℃以下のガラス転移点を有することを特徴とする転写型シート状接合材。
A paste including copper particles, a reducing agent for reducing an oxide film inevitably present on the surface of the copper particles , an organic material including a resin and optionally a plasticizer, and a solvent is applied onto a resin substrate, and then dried;
A transferable sheet-like bonding material having a glass transition temperature of -35°C or higher and 25°C or lower.
前記樹脂がアクリル樹脂からなる、請求項1に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1, wherein the resin is an acrylic resin. 前記樹脂の含有量が、銅粒子100質量部に対して1.0質量部以上5.0質量部以下である、請求項1又は2に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1 or 2, wherein the content of the resin is 1.0 parts by mass or more and 5.0 parts by mass or less per 100 parts by mass of copper particles. 前記可塑剤が、ブチルフタリルブチルグリコレート、フタル酸ジメチル、フタル酸ジオクチル、及びフタル酸ジイソデシルからなる群から選択される一種以上からなる、請求項1又は2に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1 or 2, wherein the plasticizer is one or more selected from the group consisting of butylphthalyl butyl glycolate, dimethyl phthalate, dioctyl phthalate, and diisodecyl phthalate. 前記可塑剤の含有量が、前記樹脂100質量部に対して10質量部以上50質量部以下である、請求項1又は2に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1 or 2, wherein the content of the plasticizer is 10 parts by mass or more and 50 parts by mass or less per 100 parts by mass of the resin. 前記還元剤がトリエタノールアミンからなる、請求項1又は2に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1 or 2, wherein the reducing agent is triethanolamine. 前記還元剤の含有量が、銅粒子100質量部に対して3質量部以上9質量部以下である、請求項1又は2に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1 or 2, wherein the content of the reducing agent is 3 parts by mass or more and 9 parts by mass or less per 100 parts by mass of copper particles. 前記銅粒子の平均粒子径が70nm以上300nm以下である、請求項1又は2に記載の転写型シート状接合材。 The transferable sheet-like bonding material according to claim 1 or 2, wherein the average particle diameter of the copper particles is 70 nm or more and 300 nm or less.
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