JP7550564B2 - Processing Equipment - Google Patents

Description

The present invention relates to a processing device.

When setting processing conditions for a processing device equipped with a touch panel, an operator operates the touch panel to input the processing conditions. In doing so, the operator inputs predetermined information (numeric values, character strings, etc.) to the processing device by touching input keys included in an input section (numeric keypad, keyboard, etc.) displayed on the touch panel. For example, Patent Document 1 discloses a processing device equipped with an operation panel on which digit setting keys for setting digits of numeric values are arranged.

JP 2001-84015 A

However, in conventional processing devices, when the input keys displayed on the touch panel are closely spaced and densely arranged, and when the number to be entered has many digits, the operator may enter incorrect information. If incorrect information is entered on the touch panel, the processing device may process the workpiece under unintended processing conditions, which may result in processing defects. In addition, since the processing conditions of the processing device are set from the decimal point to 10 or more digits, if multiple digit setting keys are always displayed, as in the processing device of Patent Document 1, the number keys for entering numerical values become smaller, which causes a problem of reduced operability when entering values.

The present invention has been made in consideration of the above, and its purpose is to provide a processing device that can prevent an increase in the area in which numeric keys are displayed and can prevent input errors when inputting multiple digits.

In order to solve the above-mentioned problems and achieve the object, the processing device of the present invention is a processing device having a holding table for holding a workpiece, a processing unit for processing the workpiece held on the holding table, an operation panel into which processing conditions are input, and a control unit for controlling the operation panel, wherein the control unit displays a plurality of input fields corresponding to a plurality of items included in the processing conditions on the operation panel, and when one of the plurality of input fields is selected, a numeric key is displayed, and when the numeric key is selected, a plurality of different digit number keys each having a different digit corresponding to the numerical value input by the numeric key are displayed, and when the different digit number key is selected, the numerical value of the selected different digit number key is input into the one input field, and the control unit has a range setting unit which sets a range of numerical values that can be input into each of the plurality of input fields, and displays only the different digit number keys that fall within the range set by the range setting unit .

In the processing device, the different digit number key may be selected by a flick operation from the number key.

The processing device may further include a digit memory unit that stores the multiple input fields in association with digits of numerical values previously input into the multiple input fields, and when an input field is selected, the control unit may display only the different digit number keys corresponding to the digits stored in the digit memory unit.

The processing device of the present invention has the effect of preventing the numeric keys used to input numerical values from becoming smaller, reducing the ease of input, and improving the ease of inputting multiple digits.

FIG. 1 is a perspective view showing an example of the configuration of a processing device according to an embodiment. FIG. 2 is a diagram illustrating an example of a functional configuration of the processing device according to the embodiment. FIG. 3 is a diagram showing an example of display of device data according to the embodiment. FIG. 4 is a diagram for explaining an example of input processing for an input field according to the embodiment. FIG. 5 is a diagram for explaining another example of input processing for an input field according to the embodiment. FIG. 6 is a diagram for explaining another example of input processing for an input field according to the embodiment. FIG. 7 is a flowchart illustrating an example of a processing procedure related to an input process of the processing device according to the embodiment. FIG. 8 is a diagram illustrating an example of digit data according to the embodiment. FIG. 9 is a diagram for explaining a modified example of input processing for an input field according to the embodiment. FIG. 10 is a perspective view that illustrates a configuration example of a processing device according to a first modified example of the embodiment. FIG. 11 is a perspective view that illustrates a configuration example of a processing device according to a second modification of the embodiment.

The following describes in detail an embodiment of the present invention with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. The components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. The configurations described below can be combined as appropriate. Various omissions, substitutions, or modifications of the configuration can be made without departing from the spirit of the present invention.

[Embodiment]
A processing device 1 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of the configuration of the processing device 1 according to the embodiment. Fig. 2 is a diagram showing an example of the functional configuration of the processing device 1 according to the embodiment.

As shown in FIG. 1, the processing device 1 according to the embodiment includes a main body 2, which is a box-shaped housing. As shown in FIG. 1, the processing device 1 includes a chuck table 10, a processing unit 20, a touch panel 30, and a control unit 40. The control unit 40 is electrically connected to the chuck table 10, the processing unit 20, and the touch panel 30.

The workpiece 100 to be processed by the processing device 1 is, for example, a disk-shaped semiconductor wafer or optical device wafer with a substrate 101 made of silicon, sapphire, gallium arsenide, or the like. The workpiece 100 is configured by supporting the substrate 101 in an opening of an annular frame 102 via an adhesive tape 103.

The chuck table 10 holds the workpiece 100 on the holding surface 11. The chuck table 10 is connected to a suction source (not shown) and holds the workpiece 100 by suction using the negative pressure supplied from the suction source. The chuck table 10 can be moved along the X-axis direction by an X-axis moving means 22 (described later) and can be rotated around the Z-axis by a rotary drive source (not shown).

In this embodiment, as shown in FIG. 2, the processing device 1 further includes an imaging unit 12, a driving means 14, and a Z-axis moving means 15. The control unit 40 is electrically connected to the imaging unit 12, the driving means 14, and the Z-axis moving means 15.

As shown in Figs. 1 and 2, the imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 images the surface of the workpiece 100 held on the holding surface of the chuck table 10. The imaging unit 12 is integrated by being attached to and supported by a part of the housing for the processing unit 20, and is provided so as to be movable in the Z-axis direction by a Z-axis moving means 15 such as a ball screw, a nut, a pulse motor, etc. The imaging unit 12 may be provided with, for example, a light source that irradiates illumination light onto the surface of the workpiece 100 held on the holding surface of the chuck table 10.

The processing unit 20 processes the workpiece 100 held on the chuck table 10. The processing unit 20 is, for example, a pair of cutting means, each having a cutting blade. The cutting blades of the pair of cutting means face each other in the Y-axis direction, and both rotate around the Y-axis. The processing unit 20 performs cutting processing on the workpiece 100 using the rotating cutting blades. The processing unit 20 can be moved along the Y-axis direction by the Y-axis moving means 27, and can be moved along the Z-axis direction by the Z-axis moving means 15. The Y-axis moving means 27, which moves the imaging unit 12 and the processing unit 20 in the Y-axis direction relative to the holding surface of the chuck table 10, is composed of a ball screw, a nut, a pulse motor, etc., and constitutes the driving means 14 together with the X-axis moving means 22.

The processing device 1 processes the workpiece 100 held on the chuck table 10 by moving the chuck table 10 and the processing unit 20 relative to each other using the X-axis movement means 22, the Y-axis movement means 27, and the Z-axis movement means 15.

The processing unit 20 provided in the processing device 1 is not limited to a cutting unit that cuts the workpiece 100 with a cutting blade. Alternatively, the processing unit 20 may be, for example, a grinding unit that grinds a similar workpiece 100 with a grinding wheel or the like, a polishing unit that polishes a similar workpiece 100 with a polishing pad or the like, or a laser processing unit that irradiates a laser beam onto a similar workpiece 100 to perform laser processing.

As shown in FIG. 1, the touch panel 30 is installed on the main body 2 with the display surface facing outward. The touch panel 30 is disposed in a location on the housing of the processing device 1 that is easy to see and operate. Under the control of the control unit 40, the touch panel 30 displays an image of the surface of the workpiece 100 captured by the imaging unit 12 and various information required for processing, and also accepts input operations and the like required for processing from the operator. In this embodiment, the touch panel 30 is an example of an operation panel.

As shown in FIG. 2, the touch panel 30 has a display unit 31 that displays various information related to the processing device 1, and an input unit 32 that accepts various operation inputs related to the processing device 1 from an operator, such as input of processing condition settings. The display unit 31 has a display device such as a liquid crystal display or an organic EL display. The input unit 32 has a touch screen that specifies the contact position or coordinates of an object on the display surface of the display device.

In this embodiment, the touch panel 30 is described as an example of an output unit that outputs information, but is not limited to this. For example, the output unit may be realized by an electronic device such as a speaker or a communication device.

As shown in FIG. 2, the processing device 1 includes a storage 50. The storage 50 stores programs that realize functions such as various processes executed by the control unit 40, and data used in the processes by such programs. The storage 50 is electrically connected to the control unit 40. The storage 50 can be realized by a HDD (Hard Disk Drive), a semiconductor memory, or the like. The storage 50 may also be used as a temporary work area when the processor included in the control unit 40 executes instructions written in the control program.

In this embodiment, the processing device 1 is described as having a storage 50, but is not limited to this. For example, the storage 50 can be a storage device that can be accessed by a processing device 1, such as a computer and electronic device external to the processing device 1, or another processing device 1.

The storage 50 can store various data such as device data 500 and digit data 510. The device data 500 includes, for example, data for displaying an input field in which the operator can set the processing conditions for the workpiece 100. The device data 500 is prepared for each type of device. For example, the device type is managed by the device number. The device data 500 is displayed on the touch panel 30 as, for example, a device data screen having multiple input fields. The device data 500 is linked to the input fields and the numerical values or default values entered in the input fields. When a device number is specified, the control unit 40 inputs the values of each setting item linked to the device number into the input fields.

The digit data 510 includes data that links an input field such as the device data 500 with multiple numerical digits previously input into the input field. The digit data 510 includes data that indicates the range of numerical values that can be input into the input field. The storage 50 that stores the digit data 510 functions as a digit storage unit. In addition, in this embodiment, the digit data 510 is described as being separate data from the device data 500, but is not limited to this. The digit data 510 may be included in the device data 500.

In this embodiment, the processing device 1 will be described as inputting numerical values into input fields indicated by the device data 500, but the present invention is not limited to this. The processing device 1 can be applied to the process in which an operator inputs numerical values into multiple input fields such as alignment data, cleaning data, transport data, and kerf check data.

The control unit 40 controls each mechanism (X-axis movement means 22, Y-axis movement means 27, Z-axis movement means 15) that drives the processing device 1. The control unit 40 controls each part of the processing device 1 and realizes processing by the processing device 1. The control unit 40 controls each part of the processing device 1, including the chuck table 10 and the processing unit 20, according to processing conditions input and set by an operator, for example, and realizes processing of the workpiece 100.

The control unit 40 includes an arithmetic processing device such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input/output interface device. The control unit 40 is a computer that can use these devices to execute control programs and the like for controlling each of the above-mentioned components in accordance with a series of processing steps performed by the processing device 1.

The control unit 40 controls the overall operation of the processing device 1 according to the processing conditions set by the operator via the input unit 32 of the touch panel 30. The control unit 40 includes a display control unit 41 and a range setting unit 42. The control unit 40 executes a program to realize the functions, actions, etc. of each unit.

The display control unit 41 controls the display of the display unit 31 of the touch panel 30. The display control unit 41 displays on the touch panel 30 a plurality of input fields corresponding to a plurality of items included in the processing conditions of the device of the workpiece 100. When one of the plurality of input fields is selected, the display control unit 41 displays a numeric keypad. The display control unit 41 detects a gesture based on the contact detected by the input unit 32, the position on the touch panel 30 where the contact was detected, a change in the position where the contact was detected, and the like. A gesture is an operation performed by the operator on the touch panel 30. The display control unit 41 detects gestures such as touch, tap, long touch, release, and flick, for example.

When the numeric key is selected by a first gesture, the display control unit 41 inputs the number indicated by the numeric key into an input field. The first gesture includes, for example, gestures such as touching and tapping. When the numeric key is selected by a second gesture, the display control unit 41 displays multiple number keys with different digits, each of which changes the number input by the numeric key to a different digit. The second gesture includes, for example, gestures such as long touching and flicking. For example, when the numeric key "1" is selected, the display control unit 41 displays number keys with different digits, such as "0.1", "0.01", "10", and "100".

The display control unit 41 may display the different digit number key by a first gesture. In this case, when the number key is selected by a first gesture including a touch, a tap, a long touch, a flick, or the like, the different digit number key is displayed near the selected number key.

Next, when the operator performs a second gesture of sliding his/her touch onto the different digit number key while touching the touch panel 30 and then releasing his/her touch on the different digit number key, the display control unit 41 inputs the numerical value of the different digit number key into the input field. When the operator performs a second gesture of releasing his/her touch on the number key without sliding his/her touch onto the different digit number key, the display control unit 41 inputs the numerical value of the number key into the input field.

When the different digit number key is selected, the display control unit 41 inputs the numeric value of the selected different digit number key into the one input field. The display control unit 41 detects that the different digit number key has been selected by a flick operation from a number key to the different digit number key. This allows the processing device 1 to allow the operator to select the different digit number key by successive operations from the number key to the different digit number key, thereby improving the operability of the different digit number key. As a result, the processing device 1 does not need to constantly display the different digit number key, so the size of the number keys does not become small and input errors of numbers can be prevented.

The range setting unit 42 sets a range of numbers that can be entered into each of the multiple input fields. For example, when the range setting unit 42 sets a range of numbers that can be entered into an input field, it links information indicating the range of numbers to the item of the input field in the device data 500. For example, if numbers from 1 to 5000 can be entered into an input field, the range setting unit 42 links information indicating that a range from 1 to 5000 can be entered into the input field to the input field. Then, the display control unit 41 displays only the different digit number keys that indicate numbers that fall within the range set by the range setting unit 42 near the number keys.

A configuration example of the processing device 1 according to this embodiment has been described above. Note that the above configuration described using Figures 1 and 2 is merely an example, and the configuration of the processing device 1 according to this embodiment is not limited to this example. The functional configuration of the processing device 1 according to this embodiment can be flexibly modified according to the specifications and operation.

(Example of input processing in an input field)
Next, an example of input processing executed by the processing device 1 according to the embodiment will be described. Fig. 3 is a diagram showing a display example of device data 500 according to the embodiment. Fig. 4 is a diagram for explaining an example of input processing for an input field according to the embodiment. Figs. 5 and 6 are diagrams for explaining another example of input processing for an input field according to the embodiment.

The device data 500 shown in FIG. 3 is displayed on the display unit 31 of the touch panel 30 as a device data screen under the control of the control unit 40. The device data 500 has a plurality of input fields 501. The plurality of input fields 501 are configured to allow numerical values to be input by the operator. In the example shown in FIG. 3, the device data 500 has a plurality of input fields 501 corresponding to a plurality of items such as spindle speed, blade height, feed rate, index, workpiece shape and size, and thickness. The control unit 40 controls the display unit 31 of the touch panel 30 so as to display an input key section 600 for allowing the operator to input numerical values near the device data 500. The control unit 40 may display the input key section 600 when any of the plurality of input fields 501 is selected by the operator, or may display the input key section 600 at all times.

The input key section 600 has a plurality of numeric keys 610 and a plurality of operation keys 620. The plurality of numeric keys 610 are keys from "0" to "9" that allow the operator to input numerical values. The plurality of operation keys 620 are keys that allow the operator to select commands such as confirm, move, delete, shift, etc.

In the example shown in FIG. 3, the input field 501 corresponding to the tape in the tape thickness item of the device data 500 is selected by the operator. In this case, the control unit 40 controls the display unit 31 of the touch panel 30 to display the input key section 600 together with the device data 500, and to display the input field 501 in the selected state.

In scene 1001 shown in FIG. 4, the control unit 40 displays the device data 500 and the input key section 600 (not shown) on the display section 31. The operator touches the touch panel 30 with his finger at the position of the number key "9" 610. Then, as shown in scene 1002, the operator immediately removes his finger from the position of the number key "9" 610. In this case, the control unit 40 detects the touch operation on the number key "9" 610 via the touch panel 30. The control unit 40 recognizes that the number key "9" 610 has been selected, inputs the number indicated by the number key "9" 610 into the input field 501, and updates the display of the device data 500. As a result, the processing device 1 displays the device data 500 to the operator, in which the number "9" has been input into the input field 501 corresponding to the tape in the item of the thickness of the workpiece 100.

In scene 1001 shown in FIG. 5, as shown in FIG. 4, the control unit 40 displays device data 500 and input key section 600 (not shown) on the display section 31. The operator keeps his/her finger in contact with the position of the number key "9" 610 on the touch panel 30 for a predetermined time or more. The predetermined time includes, for example, a time set for determining whether or not to display the different digit number key 630. When the control unit 40 detects a long touch operation on the number key "9" 610 via the input section 32, it controls the display section 31 to display multiple different digit number keys 630 as shown in scene 1010. Note that the control unit 40 may control the display section 31 to display multiple different digit number keys 630 when it detects a touch operation on the number key "9" 610 via the input section 32.

In the example shown in FIG. 5, the control unit 40 displays multiple different digit number keys 630 on both sides of the "9" number key 610. The multiple different digit number keys 630 are, for example, keys that are different digits from the "9" number key 610. The multiple different digit number keys 630 include, for example, four keys with different decimal places, "0.9", "0.09", "0.009", and "0.0009", and four keys with different integer places, "90", "900", "9000", and "90000". The different digit number keys 630, "0.9", "0.09", "0.009", and "0.0009", are superimposed on the "8", "5", and "2" number keys 610 and are displayed in a row along the number keys 610. The different digit number keys 630 for "90", "900", "9000", and "90000" are superimposed on the number keys 610 for "+/-", ".", and "0", and are displayed in a row along the number keys 610. Multiple different digit number keys 630 may be set in advance for each input field 501, or a range of numbers that can be entered may be set for each input field 501 by the range setting unit 42.

Next, in scene 1011, the operator slides the finger pointing at the "9" number key 610 to the "9000" different digit number key 630 while keeping the finger in contact with the touch panel 30. Then, in scene 1012, the operator removes the finger that was in contact with the "9000" different digit number key 630 from the touch panel 30. The control unit 40 detects the series of operations by the operator from scene 1011 to scene 1012 as a flick operation to the "9000" different digit number key 630 via the input unit 32. In this case, the control unit 40 recognizes that the "9000" different digit number key 630 has been selected, inputs the number indicated by the "9000" different digit number key 630 into the input field 501, and updates the display of the device data 500. As a result, the processing device 1 displays to the operator the device data 500 in which the numerical value "9000" has been entered in the input field 501 corresponding to the tape in the item for the thickness of the workpiece 100. Similarly, the processing device 1 can display multiple different digit number keys 630 for the number keys 610 from "1" to "8".

For example, when the operator inputs "7500" into the input field 501, the operator first taps the number key "7" 610 to input the number "7" into the input field 501. The operator then performs a long touch operation on the number key "5" 610, and when the different digit number key "500" 630 is displayed, the operator performs a flick operation on the different digit number key "500" 630 to input the number "7500" into the input field 501. This allows the operator to input the four-digit number "7500" into the input field 501 by two operations, a tap operation and a long touch operation followed by a flick operation. That is, when inputting "7500" into the input field 501, the processing device 1 can reduce the number of operations to two, rather than four, operations on the number keys "7", "5", "0", and "0". This can improve the efficiency of the input work.

For example, when an operator inputs "0.0125" into input field 501, first, the operator performs a long tap operation on number key "1" 610, and when different digit number key "0.01" 630 is displayed, the operator performs a flick operation on different digit number key "0.01" 630 to input the numerical value "0.01" into input field 501. The operator then performs a tap operation on number key "2" 610, and a tap operation on number key "5" 610 to input the numerical value "0.0125" into input field 501. In this way, the operator can input "0.0125" with four decimal places into input field 501 by a total of three operations, including a long touch followed by a flick operation and two tap operations. In other words, when inputting "0.0125" into the input field 501, the processing device 1 can reduce the number of operations required to input the number keys 610 ".", "0", "1", "2", and "5" from five operations to three operations, thereby improving the efficiency of input operations.

As described above, when a number with multiple digits is input into the input field 501, the processing device 1 can reduce the number of times the number keys 610 are operated by displaying the different digit number keys 630, thereby suppressing erroneous input. For example, when the number keys 610 displayed on the touch panel 30 are closely spaced and arranged closely together, the processing device 1 can reduce the number of times the number keys 610 are operated to suppress erroneous input. As a result, even when a large number of digits are to be input, the processing device 1 can reduce the number of operations compared to operating only the number keys 610 multiple times, thereby suppressing erroneous input and improving operability. Furthermore, the processing device 1 can display the different digit number keys 630 by overlapping them with the number keys 610, even when the number keys 610 displayed on the display unit 31 are closely spaced and arranged closely together.

In addition, the processing device 1 does not always display multiple different digit number keys 630 on the input key section 600, but displays them when the number key 610 is selected by continuously touching it for a predetermined period of time or more, and allows the operator to select them by a flick operation. As a result, the processing device 1 does not need to reduce the size of the keys to be displayed, which further reduces erroneous input by the operator.

In the present embodiment, the processing device 1 has been described as displaying multiple different digit number keys 630 to the left and right, but this is not limited to the above. For example, the processing device 1 may be configured to display multiple different digit number keys 630 either above, below, left, right, or diagonally from the number key 610, as long as the different digit number keys 630 are displayed in a position adjacent to the number key 610. For example, the processing device 1 may be configured to display the different digit number keys 630 so that they overlap a portion of the number key 610 selected by the operator.

For example, assume that the range setting unit 42 of the processing device 1 sets the range of numbers that can be input to the input field 501 as 1 to 5000. In this case, the processing device 1 can limit the number of keys of the different digit number keys 630.

In scene 1101 shown in FIG. 6, the control unit 40 displays device data 500 and input key section 600 (not shown) on the display section 31. The operator keeps his/her finger in contact with the position of the number key "5" 610 on the touch panel 30 for a predetermined time or more. When the control unit 40 detects a long touch operation on the number key "5" 610 via the input section 32, it specifies the different digit number keys 630 to be displayed based on the range of numbers that can be entered in the input field 501. For example, the control unit 40 specifies three different digit number keys 630, "50", "500", and "5000", which are within the range of 1 to 5000. The control unit 40 controls the display section 31 so that the three different digit number keys 630, "50", "500", and "5000", are displayed surrounding the number key "5" 610, as shown in scene 1102.

For example, the input field 501 for the tape thickness has an input range set by the range setting unit 42 to 0.01 to 5.00 mm. In this case, when the processing device 1 detects that the number key 310 for "9" has been selected for a predetermined period of time or more, it can display two different digit number keys 630 for "0.09" and "0.9" that fall within the range around the number key 310 for "9". As a result, the processing device 1 can allow the operator to select the different digit number key 630 for a digit that can be input into the input field 501, thereby further reducing erroneous input into the input field 501.

(Input processing of input fields)
Next, an example of a processing procedure for input processing executed by the processing device 1 according to the embodiment will be described. Fig. 7 is a flowchart showing an example of a processing procedure for input processing of the processing device 1 according to the embodiment. The processing procedure shown in Fig. 7 is realized by the control unit 40 of the processing device 1 executing a program. The processing procedure shown in Fig. 7 is executed when the device data 500 is displayed.

As shown in FIG. 7, the control unit 40 of the processing device 1 causes the touch panel 30 to display the device data 500 (step 2001). The control unit 40 controls the display unit 31 of the touch panel 30 to display, for example, the device data 500 having a plurality of input fields 501. As a result, the display unit 31 displays a device data screen having a plurality of input fields 501. When the processing of step 2001 is completed, the control unit 40 advances the processing to step 2002.

The control unit 40 determines whether the input field 501 has been selected (step 2002). For example, the control unit 40 determines that the input field 501 has been selected when the contact position of the object on the display surface provided by the input section 32 of the touch panel 30 is the position of the input field 501 on the device data screen. If the control unit 40 determines that the input field 501 has not been selected (No in step 2002), the process proceeds to step 2015, which will be described later. On the other hand, if the control unit 40 determines that the input field 501 has been selected (Yes in step 2002), the process proceeds to step 2003.

The control unit 40 displays the numeric keys 610 on the touch panel 30 (step 2003). For example, the control unit 40 displays the input key section 600 described above, thereby displaying the multiple numeric keys 610 in an operable manner. When the process of step 2003 ends, the control unit 40 advances the process to step 2004.

The control unit 40 determines whether the numeric key 610 has been selected for a predetermined period of time or more (step 2004). For example, the control unit 40 determines that the numeric key 610 has been selected when the contact position of an object on the display surface provided by the input unit 32 of the touch panel 30 continues to be at the position of the numeric key 610 for a predetermined period of time or more. If the control unit 40 determines that the numeric key 610 has been selected for a predetermined period of time or more (Yes in step 2004), the process proceeds to step 2005.

The control unit 40 identifies the different digit number key 630 corresponding to the number key 610 (step 2005). For example, if the range setting unit 42 has not set a range of numbers that can be entered into the corresponding input field 501, the control unit 40 identifies multiple different digit number keys 630 that are predefined for the number keys 610. For example, if the range setting unit 42 has set a range of numbers that can be entered into the corresponding input field 501, the control unit 40 identifies the different digit number key 630 that falls within the range. When the process of step 2005 ends, the control unit 40 advances the process to step 2006.

The control unit 40 displays the different digit number keys 630 near the number keys 610 (2006). For example, the control unit 40 controls the display unit 31 so that multiple different digit number keys 630 are displayed near the number key 610 selected by the operator. When the process of step 2006 ends, the control unit 40 advances the process to step 2007.

The control unit 40 determines whether or not a confirmation operation of the different digit number key 630 has been detected (step 2007). For example, when the control unit 40 detects a flick operation on the different digit number key 630 via the input unit 32, it determines that a confirmation operation of the different digit number key 630 has been detected. When the control unit 40 determines that a confirmation operation of the different digit number key 630 has been detected (Yes in step 2007), it proceeds to step 2008.

The control unit 40 inputs the numerical value of the different digit number key 630 into the input field 501 (step 2008). For example, the control unit 40 identifies the numerical value of the different digit number key 630 for which the confirmation operation was detected, inputs the numerical value into the input field 501, and updates the display content of the display unit 31. When the process of step 2008 is completed, the control unit 40 advances the process to step 2013, which will be described later.

If the control unit 40 determines that the confirmation operation of the different digit number key 630 has not been detected (No in step 2007), the process proceeds to step 2009. The control unit 40 determines whether the deletion condition of the different digit number key 630 is satisfied (step 2009). The deletion condition of the different digit number key 630 includes, for example, detecting any of the following operations: the operator's finger is removed from the touch panel 30, another number key 610 is selected, another input field 501 is selected, etc. If the control unit 40 detects any of these operations, it determines that the deletion condition of the different digit number key 630 is satisfied. If the control unit 40 determines that the deletion condition of the different digit number key 630 is not satisfied (No in step 2009), the process returns to step 2007 already described and continues. If the control unit 40 determines that the deletion condition of the different digit number key 630 is satisfied (Yes in step 2009), the process proceeds to step 2010.

The control unit 40 erases the displayed different digit number keys 630 (step 2010). For example, the control unit 40 controls the display section 31 to erase the multiple different digit number keys 630 displayed near the number key 610 selected by the operator. As a result, the display section 31 erases the multiple different digit number keys 630, and only the number key 610 is displayed. When the process of step 2010 is completed, the control unit 40 advances the process to step 2013, which will be described later.

If the control unit 40 determines that the numeric key 610 has not been selected for a predetermined time or longer (No in step 2004), the process proceeds to step 2011. The control unit 40 determines whether or not a confirmation operation of the numeric key 610 has been detected (step 2011). For example, the control unit 40 determines that a confirmation operation of the numeric key 610 has been detected when a touch operation on the numeric key 610 is detected via the input unit 32. If the control unit 40 determines that a confirmation operation of the numeric key 610 has not been detected (No in step 2011), the process proceeds to step 2013 described below.

If the control unit 40 determines that a confirmation operation of the numeric key 610 has been detected (Yes in step 2011), the control unit 40 proceeds to step 2012. The control unit 40 inputs the value of the numeric key 610 into the input field 501 (step 2012). For example, the control unit 40 identifies the value of the numeric key 610 for which a confirmation operation has been detected, inputs the value into the input field 501, and updates the display content of the display unit 31. When the control unit 40 completes the process of step 2012, the process proceeds to step 2013.

The control unit 40 determines whether the deletion condition for the numeric keys 610 is met (step 2013). The deletion condition for the numeric keys 610 includes, for example, detecting any of the following operations: the operator's finger is removed from the touch panel 30, the selection of the input field 501 is deselected, etc. If the control unit 40 detects any of these operations, it determines that the deletion condition for the numeric keys 610 is met. If the control unit 40 determines that the deletion condition for the numeric keys 610 is not met (No in step 2013), it advances the process to step 2015, which will be described later. If the control unit 40 determines that the deletion condition for the numeric keys 610 is met (Yes in step 2013), it advances the process to step 2014.

The control unit 40 erases the numeric keys 610 displayed on the touch panel 30 (step 2014). For example, the control unit 40 erases the plurality of numeric keys 610 by causing the display unit 31 to erase the input key section 600 described above. When the process of step 2014 ends, the control unit 40 advances the process to step 2015.

The control unit 40 determines whether or not to erase the device data 500 (step 2015). For example, the control unit 40 determines to erase the device data 500 when it detects a save operation, an end operation, etc. of the device data 500 via the input unit 32. When the control unit 40 determines not to erase the device data 500 (No in step 2015), it returns the process to step 2002 already described and continues the process. When the control unit 40 determines to erase the device data 500 (Yes in step 2015), it advances the process to step 2016.

The control unit 40 saves the input value in the input field 501 and erases the device data 500 (step 2016). For example, the control unit 40 stores the device data 500 reflecting the numerical value entered in the input field 501 in the storage 50, and controls the touch panel 30 to erase the displayed device data 500. This causes the display unit 31 to erase the device data screen that was being displayed. When the process of step 2016 ends, the control unit 40 ends the process procedure shown in FIG. 7.

(Modification of input processing)
Next, an example will be described in which the number of displayed different digit number keys 630 is changed based on a numerical value previously input in the input field 501. Fig. 8 is a diagram showing an example of digit data 510 according to the embodiment. Fig. 9 is a diagram for explaining a modified example of input processing for an input field according to the embodiment.

8, the digit data 510 is data that links the digit information 511 corresponding to each of the multiple input fields 501 with the input field 501. The storage 50 that stores the digit data 510 functions as a digit storage unit. The digit data 510 is updated by the control unit 40, for example, when the input value of the input field 501 is changed. The digit data 510 has multiple digit information 511. The digit information 511 includes information indicating the number of digits or the numerical value of the past numerical value input into the input field 501. For example, the digit information 511 includes information indicating "20" the first time and "22" the second time. In this case, the digit information 511 indicates that it is highly likely that a two-digit numerical value will be input into the input field 501. For example, the digit information 511 includes information indicating "three digits" the first time and "two digits" the second time. In this case, the digit information 511 indicates that it is highly likely that a three-digit to two-digit numerical value will be input into the input field 501. The digit data 510 stores the digits of the input value for any number of times, for example the most recent three times, and is updated every time the input value is updated, making it possible to display only the digits that correspond to the most recent three inputs.

In scene 1201 shown in FIG. 9, the control unit 40 displays device data 500 and input key section 600 (not shown) on the display section 31. The operator keeps his/her finger in contact with the position of the "5" number key 610 on the touch panel 30 for a predetermined time or more. When the control unit 40 detects a long touch operation on the "5" number key 610 via the input section 32, it extracts digit information 511 corresponding to the input field 501 from the digit data 510. In this case, the digit information 511 indicates "3 digits" the first time and "2 digits" the second time. The control unit 40 specifies the different digit number key 630 to be displayed based on the extracted digit information 511. For example, the control unit 40 specifies two different digit number keys 630, "50" and "500", which are three digits or less. As shown in scene 1202, the control unit 40 controls the display unit 31 so that the two different digit number keys 630, "50" and "500", are positioned to the left and above the number key 610, "5".

This allows the processing device 1 to display only the different digit number keys 630 that are within the range that can be entered into the input field 501 and that correspond to the digit information 511 that indicates the past input results of the input field 501. As a result, by displaying only the different digit number keys 630 that correspond to the number of digits previously entered into the input field 501, the processing device 1 prevents the wrong different digit number keys 630 from being selected, and further suppresses erroneous input into the input field 501.

The above-mentioned modified input process can be realized by adding or replacing step 2005 of the processing procedure shown in FIG. 7 with a process for identifying the different digit number key 630 to be displayed based on the digit information 511.

The processing device 1 of the above-described embodiment can combine the technical ideas of the input process and the modified examples.

[Modification (1)]
A processing device 1 according to a modified example (1) of the above embodiment will be described below. Fig. 10 is a perspective view showing a schematic configuration example of the processing device 1 according to the modified example (1) of the embodiment. In the following embodiments, the same parts are given the same reference numerals to avoid repetitive explanation. In the example shown in Fig. 10, the processing device 1 omits the main body 2 described above in order to simplify the explanation.

As shown in FIG. 10, the processing device 1 according to the modified embodiment (1) is a laser processing device that irradiates a laser beam onto a workpiece 100. The processing device 1 basically includes a chuck table 10, a processing unit 20, a touch panel 30, and a control unit 40. The processing device 1 further includes an imaging unit 12, a driving means 14, and a Z-axis moving means 15. The processing unit 20 has a laser irradiation unit 5 instead of the cutting blade described above.

The laser irradiation unit 5 includes, for example, an oscillator, an intensity adjustment unit (attenuator), a polarization direction setting unit, a mirror element, a focusing lens, etc. The laser irradiation unit 5 is controlled by the control unit 40.

The processing device 1 processes the workpiece 100, which is divided by streets that are the planned division lines, along the streets. The processing device 1, for example, irradiates the workpiece 100 with a laser beam of a wavelength that is transparent to the workpiece 100, and continuously forms modified layers (degraded regions) along the streets inside the workpiece 100. Furthermore, the processing device 1 may have a function of dividing the workpiece 100 by applying an external force along the streets whose strength has been reduced by the formation of the modified layer. The processing device 1 also irradiates the workpiece 100 with a laser beam of a wavelength that is absorbed by the workpiece 100, and forms cutting grooves along the streets on the surface of the workpiece 100. The cutting grooves may be deep enough to half-cut the workpiece 100, or deep enough to fully cut it.

A configuration example of the processing device 1 according to the modified example (1) of this embodiment has been described above. Note that the above configuration described using FIG. 10 is merely an example, and the configuration of the processing device 1 according to the modified example (1) of this embodiment is not limited to this example. The functional configuration of the processing device 1 according to the modified example (1) of this embodiment can be flexibly modified according to the specifications and operation.

The processing device 1 shown in FIG. 10 displays the above-mentioned input key section 600 on the touch panel 30. For example, an operator keeps his/her finger in contact with the position of the number key "8" 610 on the touch panel 30 for a predetermined period of time or more. When the control unit 40 detects a long touch operation on the number key "8" 610 via the input section 32, it controls the touch panel 30 to display multiple different digit number keys 630.

The multiple different digit number keys 630 are, for example, keys with different digits from the "8" number key 610. The multiple different digit number keys 630 include, for example, four keys with different decimal places, "0.8", "0.08", "0.008", and "0.0008", and four keys with different integer digits, "80", "800", "8000", and "80000".

When the processing device 1 detects a flick operation from the "8" number key 610 to the "800" different digit number key 630, it inputs the number indicated by the "800" different digit number key 630 into the input field 501 and updates the display of the device data 500. As a result, the processing device 1 displays to the operator the device data 500 in which the number "800" has been input into the input field 501 corresponding to the tape in the item for the thickness of the workpiece 100.

In this way, the processing device 1 according to the modified example (1) can contribute to preventing erroneous input because, like the above-described embodiment, the operator does not need to operate the numeric keys 610 multiple times to input data into the input field 501. As a result, even when a large number of digits are to be input, the processing device 1 can reduce the number of operations compared to operating the numeric keys 610 multiple times, thereby suppressing erroneous input and improving operability.

[Modification (2)]
A processing device 1 according to a modified example (2) of the above embodiment will be described below. Fig. 11 is a perspective view showing a schematic configuration example of the processing device 1 according to the modified example (2) of the embodiment. In the following embodiments, the same parts are given the same reference numerals to avoid repetitive explanation. In the example shown in Fig. 11, the processing device 1 omits the main body 2 described above in order to simplify the explanation.

As shown in FIG. 11, the processing device 1 according to the modified example (2) of the embodiment is a grinding device that grinds the workpiece 100 stored in the cassettes 91 and 92. The processing device 1 basically includes a chuck table 10, a processing unit 20, a touch panel 30, and a control unit 40. The processing unit 20 has a grinding unit instead of the cutting blade, laser irradiation unit, etc. described above.

The processing unit 20 includes, for example, a grinding wheel 25 having grinding wheels 21 arranged in a ring shape, a spindle 23, and a servo motor 24. The grinding wheel 25 is attached to the lower end of the spindle 23 and rotates with the rotation of the spindle 23. The spindle 23 supports the grinding wheel 25 so that it can rotate around a rotation axis (not shown) that is roughly parallel to the Z-axis direction that is parallel to the vertical direction. The servo motor 24 functions as a rotation drive source that supplies rotational power to the spindle 23.

The processing device 1 rotates a grinding wheel 25, which has grinding stones 21 arranged in a ring shape, and presses the grinding wheel 25 against a disk-shaped workpiece 100, such as a semiconductor wafer, held on a chuck table 10 using a feed mechanism, thereby grinding the workpiece 100.

A configuration example of the processing device 1 according to the modified example (2) of this embodiment has been described above. Note that the above configuration described using FIG. 11 is merely an example, and the configuration of the processing device 1 according to the modified example (2) of this embodiment is not limited to this example. The functional configuration of the processing device 1 according to the modified example (2) of this embodiment can be flexibly modified according to the specifications and operation.

The processing device 1 shown in FIG. 11 displays the above-mentioned input key section 600 on the touch panel 30. For example, an operator keeps his/her finger in contact with the position of the numeric key "1" 610 on the touch panel 30 for a predetermined period of time or more. When the control unit 40 detects a long touch operation on the numeric key "1" 610 via the input section 32, it controls the touch panel 30 to display multiple different digit numeric keys 630.

The multiple different digit number keys 630 are, for example, keys with different digits from the "1" number key 610. The multiple different digit number keys 630 include, for example, four keys with different decimal places, "0.1", "0.01", "0.001", and "0.0001", and four keys with different integer digits, "10", "100", "1000", and "10000".

When the processing device 1 detects a flick operation from the "1" number key 610 to the "10000" different digit number key 630, it inputs the number indicated by the "10000" different digit number key 630 into the input field 501 and updates the display of the device data 500. As a result, the processing device 1 displays to the operator the device data 500 in which the number "10000" has been input into the input field 501 corresponding to the tape in the item for the thickness of the workpiece 100.

In this way, the processing device 1 according to the modified example (2), like the above-described embodiment, does not require the operator to operate the numeric keys 610 multiple times to input data into the input field 501, and therefore can contribute to preventing erroneous input. As a result, even when a large number of digits are to be input, the processing device 1 can reduce the number of operations compared to operating the numeric keys 610 multiple times, thereby suppressing erroneous input and improving operability.

The technical concept of the processing device 1 of the above-described embodiment can be applied to the modified examples (1) and (2) of the embodiment.

In the above-described embodiment, modified example (1) and modified example (2), the processing device 1 displays the different digit number key 630 around the number key 610 when the operator touches the number key 610 for a long time, but the present invention is not limited to this. For example, the processing device 1 may be configured to display the different digit number key 630 around the number key 610 when the operator touches the number key 610. In this case, when the operator releases his/her finger, contact object, etc. on the number key 610, the processing device 1 inputs the numerical value indicated by the number key 610 into the input field 501. Also, when the operator performs a flick operation of moving the finger, contact object, etc. on the different digit number key 630 while touching the touch panel 30, and releases the contact on the different digit number key 630, the processing device 1 inputs the different digit numerical value indicated by the different digit number key 630 into the input field 501.

REFERENCE SIGNS LIST 1 Processing device 10 Chuck table 12 Imaging unit 20 Processing unit 30 Touch panel (operation panel)
31 Display section 32 Input section 40 Control unit 41 Display control section 42 Range setting section 50 Storage 100 Workpiece 500 Device data 501 Input field 510 Digit data 511 Digit information

Claims (3)

A holding table for holding the workpiece;
a processing unit for processing a workpiece held on the holding table;
An operation panel into which processing conditions are input;
A control unit that controls the operation panel,
The control unit
displaying, on the operation panel, a plurality of input fields corresponding to a plurality of items included in the processing conditions;
When one of the plurality of input fields is selected, a numeric keypad is displayed;
When the numeric key is selected, a plurality of different digit number keys are displayed, each of which is a different digit of the value input by the numeric key;
When the different digit key is selected,
Enter the number of the selected different digit key into the corresponding input field;
The control unit
a range setting unit that sets a range of values that can be input into each of the plurality of input fields;
The processing device is characterized in that only the different digit number keys that fall within the range set by the range setting unit are displayed . The processing device according to claim 1 , wherein the different digit number key is selected by a flick operation from the number keys. The input unit further includes a digit storage unit that stores the input fields and digits of numerical values previously input into the input fields in association with each other,
2. The processing device according to claim 1, wherein the control unit, when one input field is selected, displays only the different digit number keys corresponding to the digit stored in the digit memory section.

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