JP7550720B2 - Gas dissolving liquid supply device - Google Patents

Description

The present invention relates to a gas dissolving liquid supply device that supplies a gas dissolving liquid, and in particular to a technology for increasing the concentration of the gas dissolving liquid.

Ozonated water has traditionally been used to clean electronic components such as semiconductor devices and liquid crystal displays. Ozonated water is produced by dissolving ozone gas in ultrapure water and is supplied to points of use (such as semiconductor device factories and electronic component factories).

In conventional ozone water production devices, for example, ozone water produced by dissolving ozone gas in ultrapure water is stored in a gas-liquid separator, and the ozone water is pumped from the gas-liquid separator to a point of use by a pump installed downstream of the gas-liquid separator (see, for example, Patent Document 1).

JP 2019-155221 A

However, conventional devices are provided with only one gas-liquid separator, and a pump (a pump that delivers ozone water to the point of use) is provided downstream of the gas-liquid separator, making it difficult to increase the pressure in the gas-liquid separator and to produce highly concentrated ozone water. In addition, when the pump is an air-driven pump, it is difficult to suppress fluctuations in the delivery pressure of the ozone water due to the effects of pump pulsation.

The present invention has been made in consideration of the above problems, and aims to provide a gas solution supply device that can increase the concentration of the gas solution and suppress fluctuations in the delivery pressure of the gas solution.

The gas dissolving liquid supply device of the present invention includes a first gas-liquid separator for storing gas dissolving liquid, a second gas-liquid separator provided downstream of the first gas-liquid separator for storing gas dissolving liquid to be supplied to a point of use, an intermediate line provided between the first gas-liquid separator and the second gas-liquid separator, a boost pump provided in the intermediate line for increasing the pressure of the gas dissolving liquid supplied from the first gas-liquid separator to the second gas-liquid separator, a gas supply line for supplying gas that is a raw material for the gas dissolving liquid, and a gas dissolving unit provided in the intermediate line for dissolving gas supplied from the gas supply line in the gas dissolving liquid supplied from the first gas-liquid separator.

According to this configuration, since a boost pump is provided in front of the second gas-liquid separator, the pressure in the second gas-liquid separator can be increased, making it possible to increase the concentration of the gas-dissolved liquid. In addition, since the second gas-liquid separator is provided in the rear of the boost pump, a damping effect is obtained, making it possible to suppress fluctuations in the delivery pressure of the gas-dissolved liquid supplied from the second gas-liquid separator to the use point.

In addition, in the gas solution supply device of the present invention, a circulation supply line may be provided to the first gas-liquid separation section to circulate and supply unused gas solution at the point of use.

With this configuration, unused gas solution at the point of use can be reused, and the amount of gas used as the raw material for the gas solution can be reduced. In this case, the first gas-liquid separator to which unused gas solution at the point of use is supplied is provided in front of the boost pump, eliminating the need for a pump to increase the pressure of the unused gas solution.

In addition, in the gas solution supply device of the present invention, the first gas-liquid separator may be provided with a liquid supply line through which the liquid that is the raw material for the gas solution is supplied, and the liquid supply line may be provided with a second gas dissolving section that dissolves undissolved excess gas discharged from the second gas-liquid separator in the liquid that is the raw material for the gas solution.

With this configuration, the undissolved excess gas discharged from the second gas-liquid separator can be reused, and the amount of gas used as the raw material for the gas-dissolved liquid can be reduced.

The gas solution supply device of the present invention includes a first valve provided in a liquid supply line that supplies the liquid that is the raw material of the gas solution, a second valve provided in a gas solution supply line that supplies the gas solution to a use point, a third valve provided in an exhaust line from the first gas-liquid separator to an exhaust port, a fourth valve provided in a drainage line branched off from the exhaust line, and a control unit that controls the opening and closing of the first valve, the second valve, the third valve, and the fourth valve. When the gas solution is supplied to the use point, the control unit may control the first valve, the second valve, and the third valve to be open and the fourth valve to be closed, and when the first gas-liquid separator and the second gas-liquid separator are cleaned, the control unit may control the second valve and the third valve to be closed and the first valve and the fourth valve to be opened.

With this configuration, the gas solution can be supplied to the use point by opening the first, second, and third valves and closing the fourth valve, and the first and second gas-liquid separators can be cleaned by closing the second and third valves and opening the first and fourth valves.

The method of the present invention is a method carried out by a gas dissolving liquid supplying device, the gas dissolving liquid supplying device comprising a first gas-liquid separator for storing gas dissolving liquid, a second gas-liquid separator provided downstream of the first gas-liquid separator for storing gas dissolving liquid to be supplied to a point of use, an intermediate line provided between the first gas-liquid separator and the second gas-liquid separator, and a boost pump provided in the intermediate line for increasing the pressure of the gas dissolving liquid supplied from the first gas-liquid separator to the second gas-liquid separator, the method including the steps of: supplying a gas that is a raw material for the gas dissolving liquid to the intermediate line; and dissolving the supplied gas in the gas dissolving liquid supplied from the first gas-liquid separator.

In this method, as in the above device, a boost pump is provided before the second gas-liquid separator, so that the pressure in the second gas-liquid separator can be increased, enabling the concentration of the gas-dissolved liquid to be increased. In addition, since the second gas-liquid separator is provided after the boost pump, a damping effect is obtained, making it possible to suppress fluctuations in the delivery pressure of the gas-dissolved liquid supplied from the second gas-liquid separator to the use point.

In the method of the present invention, the gas solution supply device includes a first valve provided in a liquid supply line that supplies the liquid that is the raw material of the gas solution, a second valve provided in a gas solution supply line that supplies the gas solution to a use point, a third valve provided in an exhaust line from the first gas-liquid separator to an exhaust port, and a fourth valve provided in a drainage line that branches off from the exhaust line. The method may include opening the first valve, the second valve, and the third valve and closing the fourth valve when the gas solution is to be supplied to the use point, and closing the second valve and the third valve and opening the first valve and the fourth valve when the first gas-liquid separator and the second gas-liquid separator are to be cleaned.

According to this method, the gas solution can be supplied to the point of use by opening the first, second, and third valves and closing the fourth valve, and the first and second gas-liquid separators can be cleaned by closing the second and third valves and opening the first and fourth valves.

According to the present invention, it is possible to increase the concentration of the gas-dissolved liquid and suppress fluctuations in the discharge pressure of the gas-dissolved liquid.

1 is an explanatory diagram showing a configuration of a gas solution supplying device (ozone water supplying device) in a first embodiment of the present invention; FIG. 11 is an explanatory diagram showing the configuration of a gas solution supplying device (ozone water supplying device) in a second embodiment of the present invention. FIG. 13 is an explanatory diagram showing the configuration of a gas solution supplying device (ozone water supplying device) in a third embodiment of the present invention. FIG. 13 is an explanatory diagram showing the configuration of a gas solution supplying device (ozone water supplying device) in a fourth embodiment of the present invention. FIG. 11 is a diagram showing the configuration of a modified example of the gas solution supplying device (ozone water supplying device) of the first embodiment. FIG. 13 is a diagram showing the configuration of a modified example of the gas solution supplying device (ozone water supplying device) of the second embodiment. FIG. 13 is a diagram showing the configuration of a modified example of the gas solution supplying device (ozone water supplying device) of the third embodiment. FIG. 13 is a diagram showing the configuration of a modified example of the gas solution supplying device (ozone water supplying device) of the fourth embodiment. FIG. 13 is a diagram showing another example of a gas solution supplying device (ozone water supplying device).

The following describes a gas dissolving liquid supplying device according to an embodiment of the present invention with reference to the drawings. In this embodiment, an ozone water supplying device used for producing ozone water, etc. is illustrated.

(First embodiment)
The configuration of an ozone water supplying apparatus according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is an explanatory diagram showing the configuration of an ozone water supplying apparatus according to the present embodiment. As shown in Fig. 1, an ozone water supplying apparatus 1 includes a gas supplying line 2 through which ozone gas, which is a raw material for ozone water, is supplied, and a liquid supplying line 3 through which pure water (DIW), which is a raw material for ozone water, is supplied.

A first gas (e.g., oxygen gas) and a second gas (e.g., carbon dioxide gas, nitrogen gas, or a mixture of carbon dioxide gas and nitrogen gas) that are raw materials for ozone gas are supplied to the gas supply line 2. A gas flow regulator 4 and an ozonizer 5 are provided in the gas supply line 2. The gas flow regulator 4 adjusts the flow rates of the first gas and the second gas, respectively. The ozonizer 5 generates ozone gas from the raw material gas (mixture of the first gas and the second gas) by electrical discharge.

Pure water is supplied to the liquid supply line 3, the flow rate of the pure water is adjusted by a flow control valve 6, and the flow rate of the pure water is measured by a flow sensor 7. The liquid supply line 3 is connected to a first gas-liquid separator 8. A circulation supply line 9 is connected to the first gas-liquid separator 8, which circulates and supplies unused ozone water at the point of use.

The circulation supply line 9 is provided with a flow sensor 10 that measures the flow rate of unused ozone water at the use point, and a pressure adjustment valve 11 that adjusts the pressure of the unused ozone water at the use point.

The first gas-liquid separator 8 stores unused ozone water and is provided with a water level sensor 12 for measuring the water level of the ozone water. The first gas-liquid separator 8 is provided with an exhaust line 13 for discharging undissolved ozone gas. The exhaust line 13 is provided with an ozone gas decomposer 14 for decomposing the ozone gas and a pressure regulating valve 15 for adjusting the pressure of the exhausted ozone gas.

A second gas-liquid separator 16 is provided downstream of the first gas-liquid separator 8 to store the ozone water to be supplied to the use point, and the first gas-liquid separator 8 and the second gas-liquid separator 16 are connected by an intermediate line 17.

The intermediate line 17 is equipped with a boost pump 18 that increases the pressure of the ozone water supplied from the first gas-liquid separator 8 to the second gas-liquid separator 16, a flow rate sensor 19 that measures the flow rate of the ozone water supplied to the second gas-liquid separator 16, and a gas dissolving nozzle 20 that dissolves the ozone gas supplied from the gas supply line 2 in the ozone water supplied from the first gas-liquid separator 8. The ozone water from the gas dissolving nozzle 20 may be introduced from the top of the second gas-liquid separator 16. The ozone water from the gas dissolving nozzle 20 may also be introduced from the bottom of the second gas-liquid separator 16. In that case, it is preferable that the gas dissolving nozzle 20 is installed at the bottom of the second gas-liquid separator 16.

The boost pump 18 may be, for example, a centrifugal pump, a bellows pump, or a diaphragm pump. The portion of the boost pump 18 that comes into contact with the ozone water or ozone gas is made of a material (such as fluororesin) that is resistant to the ozone water or ozone gas.

For example, an ejector or an aspirator can be used as the gas dissolving nozzle 20. The ejector or aspirator can dissolve ozone gas in pure water by utilizing the Venturi effect. When an ejector or an aspirator is used, regular replacement is not required and the dissolution rate is improved compared to an ozone dissolving tank using a hollow fiber membrane. The gas dissolving nozzle 20 is preferably provided in the rear stage of the boost pump 18. If the gas dissolving nozzle 20 is provided in the front stage of the boost pump 18, gas-liquid mixed water is supplied to the boost pump 18, which results in a decrease in the water delivery and boosting performance of the boost pump 18, and a decrease in the flow rate and pressure of the ozone water supplied.

The second gas-liquid separator 16 is provided with a water level sensor 21 for measuring the water level of the ozone water. The second gas-liquid separator 16 is also provided with a discharge line 22 for discharging undissolved ozone gas. The discharge line 22 is provided with a pressure adjustment valve 23 for adjusting the pressure of the ozone gas discharged from the second gas-liquid separator 16. In this embodiment, the discharge line 22 from the second gas-liquid separator 16 is connected to the exhaust line 13 from the first gas-liquid separator 8.

The second gas-liquid separator 16 is provided with an ozone water supply line 24 for supplying ozone water to the point of use. The ozone water supply line 24 is provided with a flow rate sensor 25 for measuring the flow rate of the ozone water supplied to the point of use, and a pressure sensor 26 for measuring the pressure of the ozone water supplied to the point of use.

The ozone water supply line 24 and the liquid supply line 3 are provided with delivery lines 27 that branch off from the ozone water supply line 24 and the liquid supply line 3, respectively, and the delivery line 27 is connected to the circulation supply line 9. The delivery line 27 is provided with an ozone water concentration meter 28 that measures the concentration of the ozone water. The ozone water concentration meter 28 has a switching valve that can be used to measure both the zero point of the DIW and the concentration of the ozone water.

In the ozone water supply device 1 of this embodiment, pressure control is performed by the pressure adjustment valve 11 of the circulation supply line 9 so that the value of the pressure sensor 26 of the ozone water supply line 24 is constant. In addition, pressure control is performed by the boost pump 18 of the intermediate line 17 so that the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 19 of the intermediate line 17 are the same. Alternatively, flow control is performed by the flow adjustment valve 6 of the liquid supply line 3 so that the difference between the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 10 of the circulation supply line 9 is the same as the value of the flow sensor 7 of the liquid supply line 3. Furthermore, based on the value of the ozone water concentration meter 28 of the delivery line 27, the gas flow rate of the gas supply line 2 is adjusted by the regulator 4, and the gas concentration of the gas supply line 2 is adjusted by the ozonizer 5 (the power discharged by the ozonizer 5 is adjusted), and the gas flow rate and gas concentration (ozone gas supply amount) are controlled.

According to the ozone water supply device 1 of the first embodiment, since the boost pump 18 is provided in front of the second gas-liquid separator 16, the pressure of the second gas-liquid separator 16 can be increased, and the concentration of the ozone water can be increased. In addition, since the second gas-liquid separator 16 is provided in the rear of the boost pump 18, a damper effect is obtained, and it is possible to suppress fluctuations in the delivery pressure of the ozone water supplied from the second gas-liquid separator 16 to the use point.

In addition, in this embodiment, unused ozone water at the point of use can be reused, and the amount of ozone gas and DIW used as raw materials for ozone water can be reduced. In this case, the first gas-liquid separator 8 to which unused ozone water at the point of use is supplied is provided upstream of the boost pump 18, eliminating the need for a pump to increase the pressure of the unused ozone water.

Second Embodiment
Next, an ozone water supplying apparatus 1 according to a second embodiment of the present invention will be described. Here, the differences between the ozone water supplying apparatus 1 according to the second embodiment and the first embodiment will be mainly described. Unless otherwise specified, the configuration and operation of this embodiment are the same as those of the first embodiment.

Figure 2 is an explanatory diagram showing the configuration of the ozone water supply device 1 of this embodiment. As shown in Figure 2, in this embodiment, a second gas dissolving nozzle 29 is provided in the liquid supply line 3, and the second gas dissolving nozzle 29 is connected to the discharge line 22 from the second gas-liquid separator 16. The second gas dissolving nozzle 29 dissolves undissolved excess ozone gas discharged from the second gas-liquid separator 16 in the pure water supplied to the liquid supply line 3. The first gas-liquid separator 8 is supplied with ozone water from the liquid supply line 3. The ozone water from the gas dissolving nozzle 29 may be introduced from the upper part of the first gas-liquid separator 8. The ozone water from the gas dissolving nozzle 29 may also be introduced from the lower part of the first gas-liquid separator 8. In that case, it is preferable that the gas dissolving nozzle 29 is installed at the lower part of the first gas-liquid separator 8.

In the ozone water supply device 1 of this embodiment, as in the first embodiment, pressure control is performed by the pressure adjustment valve 11 of the circulation supply line 9 so that the value of the pressure sensor 26 of the ozone water supply line 24 is constant. In addition, flow control is performed by the boost pump 18 of the intermediate line 17 so that the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 19 of the intermediate line 17 are the same. Alternatively, flow control is performed by the flow adjustment valve 6 of the liquid supply line 3 so that the difference between the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 10 of the circulation supply line 9 is the same as the value of the flow sensor 7 of the liquid supply line 3. Furthermore, based on the value of the ozone water concentration meter 28 of the delivery line 27, the gas flow rate of the gas supply line 2 is adjusted by the regulator 4, and the gas concentration of the gas supply line 2 is adjusted by the ozonizer 5 (the power discharged by the ozonizer 5 is adjusted), and the gas flow rate and gas concentration (ozone gas supply amount) are controlled.

The ozone water supply device 1 of the second embodiment achieves the same effects as the first embodiment.

In addition, in this embodiment, the undissolved excess ozone gas discharged from the second gas-liquid separator 16 can be reused, and the amount of ozone gas used as a raw material for ozone water can be further reduced. In addition, in this embodiment, it is possible to produce ozone water with a higher concentration than in the first practical embodiment.

Third Embodiment
Next, an ozone water supplying apparatus 1 according to a third embodiment of the present invention will be described. Here, the differences between the ozone water supplying apparatus 1 according to the third embodiment and the second embodiment will be mainly described. Unless otherwise specified, the configuration and operation of this embodiment are the same as those of the second embodiment.

Figure 3 is an explanatory diagram showing the configuration of the ozone water supply device 1 of this embodiment. As shown in Figure 3, in this embodiment, there is no circulation supply line 9 that circulates unused ozone water at the point of use and supplies it to the first gas-liquid separator 8. Therefore, compared to the first and second embodiments, the pressure of the first gas-liquid separator 8 can be made higher, making it possible to increase the concentration of the ozone water.

In the ozone water supply device 1 of this embodiment, pressure control is performed by the pressure adjustment valve 11 of the circulation supply line 9 so that the value of the flow sensor 25 or pressure sensor 26 of the ozone water supply line 24 is constant. In addition, flow control is performed by the boost pump 18 of the intermediate line 17 so that the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 19 of the intermediate line 17 are the same, and flow control is performed by the flow adjustment valve 6 of the liquid supply line 3 so that the value of the flow sensor 7 of the liquid supply line 3 is also the same. Furthermore, based on the value of the ozone water concentration meter 28 of the delivery line 27, the gas flow rate of the gas supply line 2 is adjusted by the regulator 4, and the gas concentration of the gas supply line 2 is adjusted by the ozonizer 5 (the power discharged by the ozonizer 5 is adjusted), and the gas flow rate and gas concentration (ozone gas supply amount) are controlled.

The ozone water supply device 1 of the third embodiment achieves the same effects as the second embodiment.

In this embodiment, since the circulation supply line 9 is not provided, unused ozone water cannot be reused at the point of use, but it is possible to achieve an even higher concentration than in the second practical embodiment.

(Fourth embodiment)
Next, an ozone water supplying apparatus 1 according to a fourth embodiment of the present invention will be described. Here, the differences between the ozone water supplying apparatus 1 according to the fourth embodiment and the first embodiment will be mainly described. Unless otherwise specified, the configuration and operation of this embodiment are the same as those of the first embodiment.

Figure 4 is an explanatory diagram showing the configuration of the ozone water supplying device 1 of this embodiment. As shown in Figure 4, in this embodiment, the liquid supply line 3 is connected to a boost pump 18, not to the first gas-liquid separator 8. In addition, an ozone water supply line 30, through which ozone water is supplied from the first gas-liquid separator 8, merges with the liquid supply line 3. Furthermore, an exhaust line 22 from the second gas-liquid separator 16 is connected to a circulation supply line 9, not to an exhaust line 13.

The ozone water supply device 1 of the fourth embodiment achieves the same effects as the first embodiment.

(Internal cleaning of gas-liquid separator)
The ozone water supplying apparatus 1 can be provided with a function for cleaning the insides of the gas-liquid separators 8 and 16. Hereinafter, an example (modification) of the ozone water supplying apparatus 1 provided with a function for cleaning the gas-liquid separator will be described.

(Variation 1)
5 is a diagram showing the configuration of a modified example (modified example 1) of the ozone water supplying apparatus 1 of the first embodiment. As shown in FIG. 5, in this modified example 1, a valve 31 is provided in the liquid supply line 3 to which pure water is supplied, and a valve 32 is provided in the ozone water supply line 24 to supply ozone water to the use point. A valve 33 is provided in the circulation supply line 9 to return unused ozone water at the use point to the ozone water supplying apparatus 1. Furthermore, a valve 34 is provided in the exhaust line 13 from the first gas-liquid separator 8 to the exhaust port, and a valve 35 is provided in the drainage line 130 branched from the exhaust line 13. The exhaust line 13 is further provided with a valve 36 with a function of adjusting the opening degree. These valves 31 to 36 can be controlled to open and close by a control unit (not shown) provided in the ozone water supplying apparatus 1.

In this first modified example, when ozone water is supplied to a point of use, valves 32, 33, 34, and 36 are opened, and valve 35 is closed. Valve 31 is controlled to open and close according to the water level of first gas-liquid separator 8 detected by water level sensor 12. Specifically, when the water level of first gas-liquid separator 8 is high, valve 31 is closed, and when the water level of first gas-liquid separator 8 is low, valve 31 is opened.

On the other hand, when the supply of ozone water to the use point is stopped and the gas-liquid separators 8 and 16 are cleaned, valves 31 and 35 are opened, valve 36 is narrowed, and valves 32, 33, and 34 are closed. At this time, the water level sensors 12 and 21 are set to a state in which the water level alarm function is deactivated. In addition, the supply of ozone gas from the gas supply line 2 is also stopped.

When pure water is supplied from the liquid supply line 3, the valve 31 is opened and the opening of the valve 36 is narrowed to gradually release the gas in the first gas-liquid separator 8, and the first gas-liquid separator 8 is filled with pure water. Because the valve 32 is closed and the valve 40 inside the ozone water concentration meter 28 is also closed, the water level in the second gas-liquid separator 16 gradually rises, and the second gas-liquid separator 16 is eventually filled with pure water. In this way, the insides of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be washed with pure water.

Also, because the valve 32 is closed, the pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the exhaust line 13. It is then discharged to the drain from the drainage line 130 branching off from the exhaust line 13.

In this case, valve 34 is closed and valve 35 is open, so that the pure water from the first gas-liquid separator 8 is discharged to the drain through the drain line 130 branching off from the exhaust line 13. If an ozone decomposer (not shown) is provided in the drain line 130, the supply of ozone gas is not stopped, so that the inside of the gas-liquid separators 8 and 16 can be cleaned using ozone water (which has a stronger cleaning power than pure water) instead of pure water.

According to the first variant, by controlling the opening and closing of valves 31 to 36 as described above, ozone water can be supplied to the point of use, and the inside of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be cleaned with pure water.

(Variation 2)
Next, a modified example (Modified Example 2) of the ozone water supplying device 1 of the second embodiment will be described. Here, the differences between Modified Example 2 and Modified Example 1 will be mainly described. Unless otherwise specified, the configuration and operation of Modified Example 2 are the same as those of Modified Example 1.

Figure 6 is a diagram showing the configuration of the ozone water supply device 1 of the second modified example. The pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the first gas-liquid separator 8 via the nozzle 29. The valve 36 is opened, and the pure water from the first gas-liquid separator 8 is discharged to the drain from the drainage line 130 branching off from the exhaust line 13.

In this variant, similar to variant 1, by controlling the opening and closing of valves 31 to 36, ozone water can be supplied to the point of use, and the inside of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be cleaned with pure water.

(Variation 3)
Next, a modified example (Modified Example 3) of the ozone water supplying apparatus 1 of the third embodiment will be described. Here, the differences between Modified Example 3 and Modified Example 1 will be mainly described. Unless otherwise specified, the configuration and operation of Modified Example 3 are the same as those of Modified Example 1.

Figure 7 is a diagram showing the configuration of the ozone water supplying device 1 of the modified example 3. The ozone water supplying device 1 of the modified example 3 does not have a circulation supply line 9, and therefore does not have a valve 33 provided on the circulation supply line 9. The pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the first gas-liquid separator 8 via the nozzle 29. The valve 36 is opened, and the pure water from the first gas-liquid separator 8 is discharged to the drain from the drainage line 130 branching off from the exhaust line 13.

In this manner, variant 3 also allows ozone water to be supplied to the use point by controlling the opening and closing of valves 31, 32, 34, 35, and 36 in the same manner as variant 1, and allows the insides of the first gas-liquid separator 8 and the second gas-liquid separator 16 to be cleaned with pure water.

(Variation 4)
Next, a modified example (Modified Example 4) of the ozone water supplying apparatus 1 of the fourth embodiment will be described. Here, the differences between Modified Example 4 and Modified Example 1 will be mainly described. Unless otherwise specified, the configuration and operation of Modified Example 4 are the same as those of Modified Example 1.

Figure 8 is a diagram showing the configuration of the ozone water supplying device 1 of variant 4. As shown in Figure 8, in variant 4, the exhaust line 13 is not provided with a valve 36 with a function for adjusting the opening degree. On the other hand, in variant 4, a valve 37 is provided in the ozone water supply line 30 from the first gas-liquid separator 8.

In this fourth modification, when ozone water is supplied to a use point, valves 32, 33, 34, and 37 are opened, and valve 35 is closed. Valve 31 is controlled to open and close according to the water level of first gas-liquid separator 8 detected by water level sensor 12. Specifically, when the water level of first gas-liquid separator 8 is high, valve 31 is closed, and when the water level of first gas-liquid separator 8 is low, valve 31 is opened.

On the other hand, when the supply of ozone water to the use point is stopped and the gas-liquid separators 8 and 16 are cleaned, valves 31 and 35 are opened and valves 32, 33, 34 and 37 are closed by opening and closing control. At this time, the water level sensors 12 and 21 are set to a state in which the water level alarm function is deactivated. In addition, the supply of ozone gas from the gas supply line 2 is also stopped.

When pure water is supplied from the liquid supply line 3, the water level in the second gas-liquid separator 16 gradually rises because valves 32 and 37 are closed, and the second gas-liquid separator 16 is eventually filled with pure water. In this way, the inside of the second gas-liquid separator 16 can be washed with pure water.

Also, because valves 32 and 37 are closed, the pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the circulation supply line 9. At this time, because valve 33 is closed, the pure water sent to the circulation supply line 9 is supplied to the first gas-liquid separator 8. And because valve 37 is closed, the water level in the first gas-liquid separator 8 also gradually rises, and eventually the first gas-liquid separator 8 is filled with pure water. In this way, the inside of the first gas-liquid separator 8 can be washed with pure water.

In this case, valve 34 is closed and valve 35 is open, so that the pure water from the first gas-liquid separator 8 is discharged to the drain through the drainage line 130 branching off from the exhaust line 13.

Also in variant 4, by controlling the opening and closing of valves 31 to 35 and 37 as described above, ozone water can be supplied to the use point, and the inside of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be cleaned with pure water.

(Other examples)
Fig. 9 shows another example of the ozone water supplying device 1. In the example of Fig. 9, the first gas-liquid separator 8 is not provided, and a valve 39 is provided on a supply line 38 that supplies the ozone water generated by the gas dissolving nozzle 20 to the second gas-liquid separator 16. In addition, an exhaust line 13 is provided to the second gas-liquid separator 16.

In the example of FIG. 9, when ozone water is supplied to a use point, valves 32, 34, and 39 are opened, and valve 35 is closed. Valve 31 is controlled to open and close according to the water level of second gas-liquid separator 16 detected by water level sensor 21. Specifically, when the water level of second gas-liquid separator 16 is high, valve 31 is closed, and when the water level of second gas-liquid separator 16 is low, valve 31 is opened.

On the other hand, when the supply of ozone water to the use point is stopped and the second gas-liquid separator 16 is cleaned, valves 31, 35, and 39 are opened and valves 32 and 34 are closed by opening and closing control. At this time, the water level sensor 21 is set to a state in which the water level high alarm function is deactivated. In addition, the supply of ozone gas from the gas supply line 2 is also stopped.

When pure water is supplied from the liquid supply line 3, the water level in the second gas-liquid separator 16 gradually rises because the valve 32 is closed, and the second gas-liquid separator 16 is eventually filled with pure water. In this way, the inside of the second gas-liquid separator 16 can be washed with pure water.

In this case, valve 34 is closed and valve 35 is open, so that the pure water from the second gas-liquid separator 16 is discharged to the drain through the drainage line 130 branching off from the exhaust line 13.

In the example of Figure 9, by controlling the opening and closing of valves 31, 32, 34, 35, and 39 as described above, ozone water can be supplied to the use point and the inside of the second gas-liquid separator 16 can be cleaned with pure water.

The above describes the embodiments of the present invention by way of example, but the scope of the present invention is not limited to these, and can be modified and altered according to the purpose within the scope of the claims.

As described above, the gas solution supply device of the present invention has the effect of being able to increase the concentration of the gas solution and suppressing fluctuations in the delivery pressure of the gas solution, and is useful for producing ozone water, etc.

1 Ozone water supply device 2 Gas supply line 3 Liquid supply line 4 Gas flow regulator 5 Ozonizer
6 Flow rate control valve 7 Flow rate sensor 8 First gas-liquid separator 9 Circulation supply line 10 Flow rate sensor 11 Pressure control valve 12 Water level sensor 13 Exhaust line 14 Ozone gas decomposer 15 Pressure control valve 16 Second gas-liquid separator 17 Intermediate line 18 Boost pump 19 Flow rate sensor 20 Gas dissolving nozzle 21 Water level sensor 22 Exhaust line 23 Pressure control valve 24 Ozone water supply line 25 Flow rate sensor 26 Pressure sensor 27 Delivery line 28 Ozone water concentration meter 29 Second gas dissolving nozzle 30 Ozone water supply line 31-37 Valves 38 Supply line 39 Valve 40 Valve

Claims (4)

a first gas-liquid separator in which the gas-dissolved liquid is stored;
a second gas-liquid separator provided downstream of the first gas-liquid separator and configured to store the gas-dissolved liquid to be supplied to the point of use;
an intermediate line provided between the first gas-liquid separator and the second gas-liquid separator;
a booster pump provided in the intermediate line for increasing a pressure of the gas-dissolved liquid supplied from the first gas-liquid separator to the second gas-liquid separator;
a gas supply line for supplying a gas serving as a raw material for the gas solution;
a gas dissolving unit provided in the intermediate line and configured to dissolve the gas supplied from the gas supply line in a gas dissolving liquid supplied from the first gas-liquid separator;
a first valve provided in a liquid supply line for supplying a liquid that is a raw material for the gas solution;
a second valve provided in a gas solution supply line that supplies the gas solution to a point of use;
a third valve provided in an exhaust line from the first gas-liquid separator to an exhaust port;
A fourth valve provided in a drain line branched off from the exhaust line;
a control unit that controls opening and closing of the first valve, the second valve, the third valve, and the fourth valve;
Equipped with
The control unit is
When the gas solution is to be supplied to the point of use, the first valve, the second valve, and the third valve are opened and the fourth valve is closed;
When the first gas-liquid separator and the second gas-liquid separator are cleaned, the second valve and the third valve are closed and the first valve and the fourth valve are opened.
A gas dissolving liquid supply device comprising: The gas solution supply device according to claim 1, wherein the first gas-liquid separation section is provided with a circulation supply line that circulates and supplies unused gas solution at the point of use. The first gas-liquid separator is provided with a liquid supply line through which a liquid serving as a raw material for the gas-dissolved liquid is supplied,
3. The gas-dissolved liquid supply device according to claim 1, wherein the liquid supply line is provided with a second gas dissolving section that dissolves undissolved excess gas discharged from the second gas-liquid separator in the liquid that is a raw material for the gas-dissolved liquid. 1. A method carried out in a gas dissolution supply apparatus, comprising:
The gas dissolving liquid supply device includes:
a first gas-liquid separator in which the gas-dissolved liquid is stored;
a second gas-liquid separator provided downstream of the first gas-liquid separator and configured to store the gas-dissolved liquid to be supplied to the point of use;
an intermediate line provided between the first gas-liquid separator and the second gas-liquid separator;
a booster pump provided in the intermediate line for increasing a pressure of the gas-dissolved liquid supplied from the first gas-liquid separator to the second gas-liquid separator;
a first valve provided in a liquid supply line for supplying a liquid that is a raw material for the gas solution;
a second valve provided in a gas solution supply line that supplies the gas solution to a point of use;
a third valve provided in an exhaust line from the first gas-liquid separator to an exhaust port;
A fourth valve provided in a drain line branched off from the exhaust line;
Equipped with
The method comprises:
supplying a gas serving as a raw material for the gas solution to the intermediate line;
dissolving the supplied gas in a gas dissolving liquid supplied from the first gas-liquid separator;
Including,
When the gas solution is to be supplied to the point of use, the first valve, the second valve, and the third valve are opened and the fourth valve is closed;
When cleaning the first gas-liquid separator and the second gas-liquid separator, the second valve and the third valve are closed and the first valve and the fourth valve are opened.
A method comprising: