JP7552045B2 - Conductive composition, conductor and laminate - Google Patents

Description

The present invention relates to a conductive composition, as well as a conductor and a laminate using the same.

In the pattern formation technology of photolithography using a charged particle beam, the trajectory of the charged particle beam is bent due to the charge-up of the substrate, making it difficult to obtain a desired pattern. For this reason, a technology is known in which a conductive composition containing a conductive polymer is applied to the surface of a resist layer to form a coating film and provide an antistatic function.

In general, a base is added to a conductive composition to appropriately control the pH for the purpose of improving the conductivity and the coatability.
For example, Patent Document 1 describes a conductive composition containing a conductive polymer having an acidic group and a quaternary ammonium salt as a basic compound. Examples and comparative examples show that a quaternary ammonium salt in which an alkyl group having 3 or more carbon atoms is bonded to a nitrogen atom, such as tetrabutylammonium hydroxide (TBAH), has superior coatability compared to a quaternary ammonium salt in which an alkyl group having 2 or less carbon atoms is bonded to a nitrogen atom, such as tetraethylammonium hydroxide (TEAH).

JP 2017-171940 A

Conductive polymers having acidic groups may aggregate due to interaction between the amines and acids contained in the molecular chains, resulting in the formation of foreign matter in the conductive composition. If the conductive composition contains foreign matter, problems such as line breaks may easily occur after drawing with an electron beam. Therefore, the conductive composition is filtered before being applied onto the resist layer.
According to the findings of the inventors, a conductive composition containing a conductive polymer having an acidic group and a quaternary ammonium salt in which an alkyl group having 3 or more carbon atoms is bonded to a nitrogen atom, as described in the examples of Patent Document 1, has poor filter-passing properties in the filtration step, and has a problem in productivity.
The present invention relates to a conductive composition capable of improving filterability (filterability) in a filtration process,
The present invention also provides a conductor and a laminate using the same.

The present invention has the following aspects.
[1] A conductive material (A) having an acidic group and a basic compound represented by the following formula (I):
B).

In formula (I), R ₄₁ and R ₄₂ each independently represent a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms, and X represents a hydrophilic functional group having a molecular weight of 15 to 5,000.
)
[2] The conductive composition according to [1], wherein the conductive substance (A) is a conductive polymer (a) having a repeating unit represented by the following formula (1):

In formula (1), R ₁ to R ₄ each independently represent a hydrogen atom, a linear or branched alkyl group having 1 to 24 carbon atoms, a linear or branched alkoxy group having 1 to 24 carbon atoms, an acidic group, a hydroxyl group, a nitro group, or a halogen atom; at least one of R ₁ to R ₄ is an acidic group or a salt thereof, and the acidic group is a sulfonic acid group or a carboxy group.
)
[3] The conductive composition according to [1] or [2], wherein the hydrophilic functional group is a monovalent group containing one or more selected from the group consisting of a hydroxyl group, a nitrile group, an imino group, an amide group, a carbonyl group, a sulfonyl group, a tetrahydrofurfuryl group, a polyoxyalkylene structure, a pyrrolidone structure, a morpholine structure, a dioxane structure, and a halogen atom.
[4] The conductive composition according to any one of [1] to [3], wherein R ₄₁ and R ₄₂ each independently represent a hydrogen atom, a methyl group, an ethyl group, a propyl group, or a butyl group.
[5] A conductor comprising a substrate and a coating film formed by applying the conductive composition according to any one of [1] to [4] onto at least one surface of the substrate.
[6] A laminate comprising a substrate, a resist layer formed on at least one surface of the substrate, and a coating film formed by applying the conductive composition according to any one of [1] to [4] onto the resist layer.

According to the present invention, there is obtained a conductive composition capable of improving filterability in a filtration step, and a conductor and a laminate using the same.

The present invention will be described in detail below. The following embodiments are merely examples for explaining the present invention, and are not intended to limit the present invention to these embodiments.
It is possible to implement the present invention in various ways without departing from the spirit of the present invention.

As used herein, the following terms have the following meanings:
"Conductive" means having a surface resistance of 1 x 10 ¹¹ Ω/□ or less. The surface resistance is determined from the potential difference between electrodes when a constant current is passed through them.
The term "electrical conductor" refers to a product that includes a part having the above-mentioned electrical conductivity.
"Soluble" means that 0.1 g or more of the sample dissolves uniformly in 10 g of solvent (liquid temperature 25° C.) in at least one solvent selected from simple water, water containing at least one of a base and a basic salt, water containing an acid, and a mixture of water and a water-soluble organic solvent. "Uniformly dissolved" means that the sample is dispersed in the solution and does not precipitate, and the concentration is the same in every part of the solution.
The term "water-soluble" refers to the ability to dissolve in water with respect to the above solubility.
The "mass average molecular weight" is the mass average molecular weight (calculated as sodium polystyrene sulfonate) measured by gel permeation chromatography (GPC). The mass average molecular weight is sometimes referred to as "Mw".

<Conductive Composition>
The conductive composition of the present embodiment comprises a conductive substance (A) having an acidic group and a basic compound (B).
It is preferable that the composition further contains a solvent (C).

[Conductive substance (A)]
Examples of the conductive substance (A) include a conductive polymer (a) having an acidic group, an ionic liquid having an acidic group, and an ionic polymer having an acidic group. These may be used alone or in combination. .
The acidic group of the conductive substance (A) is preferably at least one type selected from the group consisting of a sulfonic acid group and a carboxy group.
From the viewpoint of electrical conductivity and solubility, the electrically conductive substance (A) is preferably an electrically conductive polymer (a).

[Conductive polymer (a)]
The conductive polymer (a) may be a known one. For example, from the viewpoint of excellent conductivity,
Polypyrroles, polythiophenes, and polyanilines are preferred.
Specifically, JP-A-61-197633, JP-A-63-39916, JP-A-1-301714, JP-A-5-504153, JP-A-5-503953, JP-A-4-32848, JP-A-4-328181, JP-A-6-145
No. 386, JP-A-6-56987, JP-A-5-226238, JP-A-5
-178989, JP 6-293828, JP 7-118524, JP 6-32845, JP 6-87949, JP 6-256516
No. 1, JP 7-41756, JP 7-48436, JP 4-268
From the viewpoint of solubility, the conductive polymers disclosed in US Pat. No. 331 are preferred.

Specific examples of the conductive polymer (a) include phenylenevinylene, vinylene, thienylene, pyrrolylene, phenylene, iminophenylene, in which the α- or β-position of the bond is substituted with at least one group selected from the group consisting of a sulfonic acid group and a carboxy group.
Examples of the conductive polymer include a π-conjugated conductive polymer containing at least one group selected from the group consisting of isothianaphthene, furylene, and carbazolylene as a repeating unit of the conductive polymer.
In addition, when the π-conjugated conductive polymer contains at least one group selected from the group consisting of iminophenylene and galvanolylene as a repeating unit, examples of the conductive polymer include a conductive polymer having at least one group selected from the group consisting of a sulfonic acid group and a carboxy group on a nitrogen atom of the repeating unit, or a conductive polymer having an alkyl group substituted with at least one group selected from the group consisting of a sulfonic acid group and a carboxy group, or an alkyl group containing an ether bond, on a nitrogen atom of the repeating unit.
Among these, from the viewpoints of electrical conductivity and solubility, a conductive polymer containing, as a repeating unit of the conductive polymer, at least one group selected from the group consisting of thienylene, pyrrolylene, iminophenylene, phenylenevinylene, carbazolylene, and isothianaphthene, in which the β-position of a bond is substituted with at least one group selected from the group consisting of a sulfonic acid group and a carboxy group, is preferred.

The conductive polymer (a) according to the present embodiment is represented by the following formula (1) from the viewpoints of conductivity and solubility.
It is preferable that the monomer unit has a repeating unit represented by the following formula:

In formula (1), R ₁ to R ₄ each independently represent a hydrogen atom, a linear or branched alkyl group having 1 to 24 carbon atoms, a linear or branched alkoxy group having 1 to 24 carbon atoms, an acidic group, a hydroxyl group, a nitro group, or a halogen atom (i.e., -F, -Cl, -Br, or I).
and at least one of R ₁ to R ₄ is an acidic group or a salt thereof; the acidic group is a sulfonic acid group or a carboxy group.
Here, the sulfonic acid group and the carboxy group are each in an acid state (i.e., —SO ₃ H,
and —COOH), and may be contained in an ionic state (i.e., —SO ₃ ⁻ and —CO
O ⁻ ).
Moreover, the term "salt" refers to at least one salt selected from the group consisting of alkali metal salts, alkaline earth metal salts, ammonium salts, and substituted ammonium salts.
As the repeating unit represented by the formula (1), from the viewpoint of ease of production, a repeating unit in which any one of R ₁ to R ₄ is a linear or branched alkoxy group having 1 to 4 carbon atoms, any one of the remaining groups is a sulfonic acid group, and the remaining group is a hydrogen atom is preferable.
From the viewpoints of conductivity and solubility, the conductive polymer (a) preferably contains at least one repeating unit selected from the group consisting of repeating units represented by the following formulas (4) to (6).

In the formulas (4) to (6), X represents a sulfur atom or -NH-.
R ₅ to R ₁₅ each independently represent a hydrogen atom, a halogen atom, —SO ₃ H, or —R ₁₆ SO ₃ H.
, -OCH ₃ , -CH ₃ , -C ₂ H ₅ , -F, -Cl, -Br, -I, -N(R ₁₇ ) ₂
, -NHCOR ₁₇ , -OH, -O-, -SR ₁₇ , -OR ₁₇ , -OCOR ₁₇ , -N
It represents O ₂ , —COOH, —R ₁₆ COOH, —COOR ₁₇ , —COR ₁₇ , —CHO or —CN.
Here, R ₁₆ represents an alkylene group having 1 to 24 carbon atoms, an arylene group having 1 to 24 carbon atoms, or an aralkylene group having 1 to 24 carbon atoms.
R ₁₇ is an alkyl group having 1 to 24 carbon atoms, an aryl group having 1 to 24 carbon atoms, or
Represents an aralkyl group of 24.
However, R ₅ to R ₆ in formula (4), R ₇ to R ₁₀ in formula (5), and R ₁₁ to R ₁ in formula (6)
In each of _{the above formulae} , at least one of the groups is selected from the group consisting of -SO ₃ H, -R ₁₆ SO ₃ H, -CO
It is a group selected from the group consisting of OH, —R ₁₆ COOH, or alkali metal, ammonium, and substituted ammonium salts thereof.

In the conductive polymer (a), the content of sulfonic acid groups and carboxy groups relative to the total number of aromatic rings (total number of moles) in the polymer is preferably 50 mol % or more, more preferably 70 mol % or more, even more preferably 90 mol % or more, and most preferably 100 mol %.
If the content of the conductive polymer is 50 mol % or more, the solubility becomes very good, which is preferable.
The content refers to a value calculated from the monomer charge ratio during the production of the conductive polymer (a).

In the conductive polymer (a), the substituent on the aromatic ring of the repeating unit other than the sulfonic acid group or the carboxy group is preferably an electron-donating group from the viewpoint of imparting reactivity to the monomer. Specifically, an alkyl group having 1 to 24 carbon atoms, an alkoxy group having 1 to 24 carbon atoms, a halogen group (-F, -Cl, -Br or I), etc. are preferred. Among these, from the viewpoint of electron-donating property,
An alkoxy group having 1 to 24 carbon atoms is most preferred.

In the conductive polymer (a) according to this embodiment, from the viewpoint of solubility, among the combinations of repeating units described above, a polymer having the structural formula of the following formula (7) is preferable, and among the polymers having the structural formula of formula (7), poly(2-sulfo-5-methoxy-1,4-iminophenylene) is particularly preferable.

In formula (7), R ₁₈ to R ₃₃ each independently represent a hydrogen atom, a linear or branched alkyl group having 1 to 4 carbon atoms, a linear or branched alkoxy group having 1 to 4 carbon atoms, an acidic group, a hydroxyl group, a nitro group, or a halogen (i.e., -F, -Cl, -Br, or I ₎ ;
At least one group of R ₃₃ is an acidic group. Furthermore, n represents the degree of polymerization. In this embodiment, n is preferably an integer of 5 to 2500. The acidic groups of R ₁₈ to R ₃₃ are
The same applies to the acidic group.

From the viewpoint of improving electrical conductivity, it is desirable that at least a part of the acidic groups contained in the conductive polymer (a) according to this embodiment is in a free acid form.
The weight average molecular weight (Mw) of the conductive polymer (a) is, in terms of sodium polystyrene sulfonate measured by gel permeation chromatography (hereinafter referred to as "GPC"),
From the viewpoints of electrical conductivity, solubility and film-forming property, it is preferably 2,000 to 1,000,000, and more preferably 30
It is more preferable that the molecular weight is 0 to 800,000, further preferably 5,000 to 500,000, and particularly preferably 10,000 to 100,000.
When the weight average molecular weight of the conductive polymer (a) is less than 2000, the solubility is excellent, but the conductivity and coatability may be insufficient.
On the other hand, if the mass average molecular weight is more than 1,000,000, the electrical conductivity is excellent, but the solubility may be insufficient.
Here, "coatability" refers to the property of forming a uniform film without repelling or the like, and can be evaluated by a method such as spin coating on glass.

The method for producing the conductive polymer (a) can be a known method, and is not particularly limited as long as it has the effect of the present invention.
Specifically, examples of the method include a method of polymerizing a polymerizable monomer having the repeating unit described above by various synthesis methods such as a chemical oxidation method, an electrolytic oxidation method, etc. As such a method, for example, the synthesis methods proposed by the present inventors and described in JP-A-7-196791 and JP-A-7-324132 can be applied.

In the conductive composition of this embodiment, the content of the conductive polymer (a) is preferably 0.01 to 50 mass % relative to the total mass (100 mass %) of the conductive composition, and more preferably 0.
It is more preferable that the content is 0.5 to 20% by mass.

More specific examples of the π-conjugated conductive polymer used as the conductive polymer (a) include:
The polythiophenes include polythiophene, poly(3-methylthiophene), poly(3
-ethylthiophene), poly(3-propylthiophene), poly(3-butylthiophene), poly(3-hexylthiophene), poly(3-heptylthiophene), poly(3-octylthiophene), poly(3-decylthiophene), poly(3-dodecylthiophene)
, poly(3-octadecylthiophene), poly(3-bromothiophene), poly(3-chlorothiophene), poly(3-iodothiophene), poly(3-cyanothiophene), poly(3-phenylthiophene), poly(3,4-dimethylthiophene), poly(3,4-
dibutylthiophene), poly(3-hydroxythiophene), poly(3-methoxythiophene), poly(3-ethoxythiophene), poly(3-butoxythiophene), poly(3
-hexyloxythiophene), poly(3-heptyloxythiophene), poly(3-octyloxythiophene), poly(3-decyloxythiophene), poly(3-dodecyloxythiophene), poly(3-octadecyloxythiophene), poly(3,4-dihydroxythiophene), poly(3,4-dimethoxythiophene), poly(3,4-diethoxythiophene), poly(3,4-dipropoxythiophene), poly(3,4-dibutoxythiophene), poly(3,4-dihexyloxythiophene), poly(3,4-diheptyloxythiophene), poly(3,4-dioctyloxythiophene), poly(3,4
-didecyloxythiophene), poly(3,4-didodecyloxythiophene), poly(
3,4-ethylenedioxythiophene), poly(3,4-propylenedioxythiophene), poly(3,4-butenedioxythiophene), poly(3-methyl-4-methoxythiophene), poly(3-methyl-4-ethoxythiophene), poly(3-carboxythiophene), poly(3-methyl-4-carboxythiophene), poly(3-methyl-4-carboxyethylthiophene), and poly(3-methyl-4-carboxybutylthiophene).
Examples include:

Examples of polypyrroles include polypyrrole, poly(N-methylpyrrole), poly(3-methylpyrrole), poly(3-ethylpyrrole), poly(3-n-propylpyrrole), poly(3-butylpyrrole), poly(3-octylpyrrole), poly(3-decylpyrrole), poly(3-dodecylpyrrole), poly(3,4-dimethylpyrrole), and poly(3,4
-dibutylpyrrole), poly(3-carboxypyrrole), poly(3-methyl-4-carboxypyrrole), poly(3-methyl-4-carboxyethylpyrrole), poly(3-methyl-4-carboxybutylpyrrole), poly(3-hydroxypyrrole), poly(3-
methoxypyrrole), poly(3-ethoxypyrrole), poly(3-butoxypyrrole),
Examples include poly(3-hexyloxypyrrole), poly(3-methyl-4-hexyloxypyrrole), and poly(3-methyl-4-hexyloxypyrrole).

Examples of polyanilines include polyaniline, poly(2-methylaniline), poly(3-isobutylaniline), poly(2-anilinesulfonic acid), poly(3-anilinesulfonic acid), and poly(2-aminoanisole-4-sulfonic acid).

[Ionic Liquid]
The ionic liquid used as the conductive substance (A) is an organic compound salt such as an imidazolium salt, a pyridinium salt, an ammonium salt, or a phosphonium salt, which is liquid at room temperature, and preferably an ionic liquid which is liquid at room temperature.
Examples of the ionic liquid that is an imidazolium salt include 1,3-dimethylimidazolium methyl sulfate, 1-ethyl-3-methylimidazolium bis(pentafluoroethylsulfonyl)imide, 1-ethyl-3-methylimidazolium bis(trifluoroethylsulfonyl)imide, and 1-ethyl-3-methylimidazolium bromide.
1-ethyl-3-methylimidazolium chloride, 1-ethyl-3-methylimidazolium nitrate, 1-ethyl-3-methylimidazolium hexafluorophosphate, 1-ethyl-3-methylimidazolium chloride, 1-ethyl-3-methylimidazolium nitrate, 1-ethyl-3-methylimidazolium hexafluorophosphate, 1-ethyl-3-methylimidazolium tetrafluoroborate, 1-ethyl 1-butyl-3-methylimidazolium tosylate, 1-ethyl-3-methylimidazolium trifluoromethanesulfonate, 1-n-butyl-3-methylimidazolium trifluoromethanesulfonate, 1-butyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide, 1-butyl-3-methylimidazolium bromide, 1-butyl-3-methylimidazolium chloride, 1-butyl-3-methylimidazolium
Hexafluorophosphate, 1-butyl-3-methylimidazolium 2-(2-methoxyethoxy)ethyl sulfate, 1-butyl-3-methylimidazolium methyl sulfate, 1-butyl-3-methylimidazolium tetrafluoroborate, 1-hexyl-3-methylimidazolium chloride, 1-hexyl-3-methylimidazolium hexafluorophosphate, 1-hexyl-3-methylimidazolium tetrafluoroborate, 1-methyl-3-octylimidazolium chloride, 1-methyl-3
-octylimidazolium tetrafluoroborate, 1,2-dimethyl-3-propyloctylimidazolium tris(trifluoromethylsulfonyl)methide, 1-butyl-2,3-dimethylimidazolium chloride, 1-butyl-2,3-dimethylimidazolium hexafluorophosphate, 1-butyl-2,3-dimethylimidazolium tetrafluoroborate, 1-methyl-3-(3,3,4,4,5,5,6,6,7,
7,8,8,8-tridecafluorooctyl)imidazolium hexafluorophosphate, and 1-butyl-3-(3,3,4,4,5,5,6,6,7,7,8,8,8-
tridecafluorooctyl) imidazolium hexafluorophosphate and the like.

Examples of the ionic liquid that is a pyridinium salt include 3-methyl-1-propylpyridinium bis(trifluoromethylsulfonyl)imide, 1-butyl-3-methylpyridinium bis(trifluoromethylsulfonyl)imide, 1-propyl-3-methylpyridinium trifluoromethanesulfonate, and 1-butyl-3-methylpyridinium.
Trifluoromethanesulfonate, 1-butyl-4-methylpyridinium bromide, 1
-Butyl-4-methylpyridinium chloride, 1-Butyl-4-methylpyridinium
hexafluorophosphate and 1-butyl-4-methylpyridinium tetrafluoroborate.

Examples of ionic liquids that are ammonium salts include tetrabutylammonium heptadecafluorooctanesulfonate, tetrabutylammonium nonafluorobutanesulfonate, tetrapentylammonium methanesulfonate, tetrapentylammonium thiocyanate, and methyl-tri-n-butylammonium methylsulfate.

Examples of ionic liquids that are phosphonium salts include tetrabutylphosphonium methanesulfonate, tetrabutylphosphonium p-toluenesulfonate, trihexyltetradecylphosphonium bis(trifluoroethylsulfonyl)imide, trihexyltetradecylphosphonium bis(2,4,4-trimethylpentyl)phosphinate, trihexyltetradecylphosphonium bromide, trihexyltetradecylphosphonium chloride, trihexyltetradecylphosphonium decanoate, trihexyltetradecylphosphonium hexafluorophosphinate, triethyltetradecylphosphonium tetrafluoroborate, and tributylmethylphosphonium tosylate.

[Ionic polymer]
As the ionic polymer (hereinafter, also referred to as an ionic polymer compound) used as the conductive material (A), there can be mentioned those described in JP-B-49-23828, JP-B-49-23827, and JP-B-47-23828.
Anionic polymer compounds as described in JP-B-55-734 and JP-A-55-8937.
0-54672, JP-B-59-14735, JP-B-57-18175, JP-B-57-181
Ionene type polymers having a dissociative group in the main chain, as seen in JP-B-53-13223, JP-B-57-15376, JP-A-53-45231, etc.
No. 55-145783, No. 55-65950, No. 55-67746, No. 57-
Examples of suitable polymers include cationic pendant polymers having cationic dissociable groups in the side chains, as described in Japanese Patent Publications Nos. 11342, 57-19735 and 58-56858.

<Basic Compound (B)>
The basic compound (B) is a compound represented by the following formula (I).
In formula (I), R ₄₁ and R ₄₂ are each independently a hydrogen atom or a linear or branched alkyl group having ₁ to 8 carbon atoms.
It is preferable that _{R 1} and R ₄₂ are each independently a hydrogen atom, a methyl group, an ethyl group, a propyl group, or a butyl group. The propyl group is preferably an n-propyl group. The butyl group is preferably an n-propyl group.
The -butyl group is preferred.
In formula (I), X is a hydrophilic functional group having a molecular weight of 15 to 5000. Examples of the hydrophilic functional group include a hydroxyl group, a nitrile group, an imino group, an amide group, a carbonyl group, a sulfonyl group, a tetrahydrofurfuryl group, a polyoxyalkylene structure, a pyrrolidone structure, a morpholine structure,
A monovalent group containing at least one selected from the group consisting of a dioxane structure and a halogen atom is preferred.
Among these, X is preferably a hydroxyl group, a nitrile group, a tetrahydrofurfuryl group, a polyoxyalkylene group, a pyrrolidone group, a morpholine group, or a functional group having a dioxane structure, because they have high affinity with the conductive substance (A) and the polymer compound (D), are smooth, and have little effect on laminates such as resists.
The molecular weight of X is preferably from 15 to 4,000, more preferably from 26 to 4,000, and even more preferably from 26 to 3,000, from the viewpoint of surface smoothness of the coating film.
In addition, when X contains a polymer chain, the molecular weight of X is the mass average molecular weight of the basic compound (B) (
The total of the formula weights of R ₄₁ and R ₄₂ and the atomic weight of N is subtracted from the molecular weight (Mw).

The use of the compound represented by formula (I) as a basic compound for adjusting the pH of the conductive composition improves filterability. The reason for this is believed to be that the compound represented by formula (I) has little steric hindrance, and therefore the lone electron pair of the nitrogen atom acts efficiently on the acidic group in the conductive material (A), making it difficult for the conductive material (A) to become lumpy.
In addition, since the basic compound (B) has a hydrophilic functional group (X), it has little effect on laminates such as resists applied to a substrate.

Specifically, the following compounds are preferred as the basic compound (B).
1-aminomethanol, 2-aminomethanol, 1-methylaminomethanol, 2-methylaminomethanol, 1-dimethylaminomethanol, 2-dimethylaminomethanol, 1-ethylaminomethanol, 2-ethylaminomethanol, 1-diethylaminomethanol, 2-diethylaminomethanol, 1-propylaminomethanol, 2-propylaminomethanol, 1-dipropylaminomethanol, 2-dipropylaminomethanol, 1-butylaminomethanol, 2-butylaminomethanol, 1-dibutylaminomethanol, 2-dibutylaminomethanol, 1-pentylaminomethanol, 2-pentylaminomethanol, 1-dipentylaminomethanol, 2-dipentylaminomethanol, 1-hexylaminomethanol, 2-hexylaminomethanol, 1-dihexylaminomethanol, 2-dihexylaminomethanol, 1-ethylmethylaminomethanol,
1-methylpropylaminomethanol, 1-methylbutylaminomethanol, 1-methylpentylaminomethanol, 1-methylhexylaminomethanol, 1-ethylpropylaminomethanol, 1-ethylbutylaminomethanol, 1-ethylpentylaminomethanol, 1-ethylhexylaminomethanol, 1-propylbutylaminomethanol,
1-propylpentylaminomethanol, 1-propylhexylaminomethanol, 1-
Butylpentylaminomethanol, 1-butylhexylaminomethanol, 1-pentylhexylaminomethanol, 1-aminoethanol, 2-aminoethanol, 1-methylaminoethanol, 2-methylaminoethanol, 1-dimethylaminoethanol, 2-
Dimethylaminoethanol, 1-ethylaminoethanol, 2-ethylaminoethanol, 1-diethylaminoethanol, 2-diethylaminoethanol, 1-propylaminoethanol, 2-propylaminoethanol, 1-dipropylaminoethanol, 2-dipropylaminoethanol, 1-butylaminoethanol, 2-butylaminoethanol, 1-dibutylaminoethanol, 2-dibutylaminoethanol, 1-pentylaminoethanol, 2-pentylaminoethanol, 1-dipentylaminoethanol, 2-dipentylaminoethanol, 1-hexylaminoethanol, 2-hexylaminoethanol, 1-dihexylaminoethanol, 2-dihexylaminoethanol, 1-ethylmethylaminoethanol, 1-methylpropylaminoethanol, 1-methylbutylaminoethanol, 1-methylpentylaminoethanol, 1-methylhexylaminoethanol, 1-ethylpropylaminoethanol, 1-ethylbutylaminoethanol, 1-
Ethylpentylaminoethanol, 1-ethylhexylaminoethanol, 1-propylbutylaminoethanol, 1-propylpentylaminoethanol, 1-propylhexylaminoethanol, 1-butylpentylaminoethanol, 1-butylhexylaminoethanol, 1-pentylhexylaminoethanol, 1-aminopropanol, 2-aminopropanol, 1-methylaminopropanol, 2-methylaminopropanol, 1
-Dimethylaminopropanol, 2-Dimethylaminopropanol, 1-Ethylaminopropanol, 2-Ethylaminopropanol, 1-Diethylaminopropanol, 2-Diethylaminopropanol, 1-Propylaminopropanol, 2-Propylaminopropanol, 1-Dipropylaminopropanol, 2-Dipropylaminopropanol, 1
-butylaminopropanol, 2-butylaminopropanol, 1-dibutylaminopropanol, 2-dibutylaminopropanol, 1-pentylaminopropanol, 2-pentylaminopropanol, 1-dipentylaminopropanol, 2-dipentylaminopropanol, 1-hexylaminopropanol, 2-hexylaminopropanol, 1
-dihexylaminopropanol, 2-dihexylaminopropanol, 1-ethylmethylaminopropanol, 1-methylpropylaminopropanol, 1-methylbutylaminopropanol, 1-methylpentylaminopropanol, 1-methylhexylaminopropanol, 1-ethylpropylaminopropanol, 1-ethylbutylaminopropanol, 1-ethylpentylaminopropanol, 1-ethylhexylaminopropanol, 1-propylbutylaminopropanol, 1-propylpentylaminopropanol,
1-Propylhexylaminopropanol, 1-Butylpentylaminopropanol, 1
-Butylhexylaminopropanol, 1-pentylhexylaminopropanol, 1-
Aminobutanol, 2-aminobutanol, 1-methylaminobutanol, 2-methylaminobutanol, 1-dimethylaminobutanol, 2-dimethylaminobutanol, 1-
Ethylaminobutanol, 2-ethylaminobutanol, 1-diethylaminobutanol, 2-diethylaminobutanol, 1-propylaminobutanol, 2-propylaminobutanol, 1-dipropylaminobutanol, 2-dipropylaminobutanol, 1-
Butylaminobutanol, 2-butylaminobutanol, 1-dibutylaminobutanol, 2-dibutylaminobutanol, 1-pentylaminobutanol, 2-pentylaminobutanol, 1-dipentylaminobutanol, 2-dipentylaminobutanol, 1-
hexyl aminobutanol, 2-hexyl aminobutanol, 1-dihexyl aminobutanol, 2-dihexyl aminobutanol, 1-ethylmethyl aminobutanol, 1-methylpropyl aminobutanol, 1-methylbutyl aminobutanol, 1-methylpentyl aminobutanol, 1-methylhexyl aminobutanol, 1-ethylpropyl aminobutanol, 1-ethylbutyl aminobutanol, 1-ethylpentyl aminobutanol, 1-ethylhexyl aminobutanol, 1-propylbutyl aminobutanol, 1-propylpentyl aminobutanol, 1-propylhexyl aminobutanol, 1-butylpentyl aminobutanol, 1-butylhexyl aminobutanol, 1-pentylhexyl aminobutanol, 1-aminopentanol, 2-aminopentanol, 1-methylaminopentanol, 2-methylaminopentanol, 1-dimethylaminopentanol,
2-Dimethylaminopentanol, 1-Ethylaminopentanol, 2-Ethylaminopentanol, 1-Diethylaminopentanol, 2-Diethylaminopentanol, 1-
Propylaminopentanol, 2-propylaminopentanol, 1-dipropylaminopentanol, 2-dipropylaminopentanol, 1-butylaminopentanol, 2
-butylaminopentanol, 1-dibutylaminopentanol, 2-dibutylaminopentanol, 1-pentylaminopentanol, 2-pentylaminopentanol, 1-
Dipentylaminopentanol, 2-dipentylaminopentanol, 1-hexylaminopentanol, 2-hexylaminopentanol, 1-dihexylaminopentanol, 2-dihexylaminopentanol, 1-ethylmethylaminopentanol, 1-methylpropylaminopentanol, 1-methylbutylaminopentanol, 1-methylpentylaminopentanol, 1-methylhexylaminopentanol, 1-ethylpropylaminopentanol, 1-ethylbutylaminopentanol, 1-ethylpentylamino Pentanol, 1-ethylhexylaminopentanol, 1-propylbutylaminopentanol, 1-propylpentylaminopentanol, 1-propylhexylaminopentanol, 1-butylpentylaminopentanol, 1-butylhexylaminopentanol, 1-pentylhexylaminopentanol, 1-aminohexanol, 2-aminohexanol, 1-methylaminohexanol, 2-methylaminohexanol, 1-dimethylaminohexanol, 2-dimethylaminohexanol, 1-ethylaminohexanol , 2-ethylaminohexanol, 1-diethylaminohexanol, 2-diethylaminohexanol, 1-propylaminohexanol, 2-propylaminohexanol, 1-dipropylaminohexanol, 2-dipropylaminohexanol, 1-butylaminohexanol, 2-butylaminohexanol, 1-dibutylaminohexanol, 2-dibutylaminohexanol, 1-pentylaminohexanol, 2-pentylaminohexanol, 1-dipentylaminohexanol, 2-dipentylaminohexanol Sanol, 1-hexylaminohexanol, 2-hexylaminohexanol, 1-dihexylaminohexanol, 2-dihexylaminohexanol, 1-ethylmethylaminohexanol, 1-methylpropylaminohexanol, 1-methylbutylaminohexanol, 1-methylpentylaminohexanol, 1-methylhexylaminohexanol, 1-ethylpropylaminohexanol, 1-ethylbutylaminohexanol, 1-ethylpentylaminohexanol, 1-ethylhexylaminohexanol, 1
-propylbutylaminohexanol, 1-propylpentylaminohexanol, 1-
propylhexyl aminohexanol, 1-butylpentyl aminohexanol, 1-butylhexyl aminohexanol, 1-pentylhexyl aminohexanol, polyethylene glycol amine, polyethylene glycol aminomethyl, polyethylene glycol aminodimethyl, polyethylene glycol aminoethyl, polyethylene glycol aminodiethyl, polyethylene glycol aminopropyl, polyethylene glycol aminodipropyl, polyethylene glycol aminobutyl, polyethylene glycol aminodibutyl, polyethylene glycol methyl ether amine, polyethylene glycol methyl ether aminomethyl, polyethylene glycol methyl ether aminodimethyl, polyethylene glycol methyl ether aminoethyl, polyethylene glycol methyl ether aminodiethyl, polyethylene glycol methyl ether aminopropyl, polyethylene glycol methyl ether aminodipropyl, polyethylene glycol methyl ether aminobutyl, polyethylene glycol methyl ether aminodibutyl, polyethylene glycol ethyl ether amine, polyethylene glycol ethyl ether aminomethyl, polyethylene glycol ethyl ether aminodimethyl, polyethylene glycol ethyl ether aminoethyl, polyethylene glycol ethyl ether aminodiethyl, polyethylene glycol ethyl ether aminopropyl, polyethylene glycol ethyl ether aminodipropyl, polyethylene glycol ethyl ether aminobutyl, polyethylene glycol ethyl ether aminodibutyl, polyethylene glycol propyl ether amine,
Polyethylene glycol propyl ether aminomethyl, polyethylene glycol propyl ether aminodimethyl, polyethylene glycol propyl ether aminoethyl, polyethylene glycol propyl ether aminodiethyl, polyethylene glycol propyl ether aminopropyl, polyethylene glycol propyl ether aminodipropyl, polyethylene glycol propyl ether aminobutyl, polyethylene glycol propyl ether aminodibutyl, polyethylene glycol butyl ether amine, polyethylene glycol butyl ether aminomethyl, polyethylene glycol butyl ether aminodimethyl, polyethylene glycol butyl ether aminoethyl, polyethylene glycol butyl ether aminodiethyl, polyethylene glycol butyl ether aminopropyl, polyethylene glycol butyl ether aminodipropyl, polyethylene glycol butyl ether aminobutyl, polyethylene glycol butyl ether aminodibutyl, aminopropylpyrrolidone, methyl a

aminopropyl pyrrolidone, dimethylaminopropyl pyrrolidone, ethylaminopropyl pyrrolidone, diethylaminopropyl pyrrolidone, propylaminopropyl pyrrolidone, dipropylaminopropyl pyrrolidone, butylaminopropyl pyrrolidone, dibutylaminopropyl pyrrolidone, tetrahydrofurfurylamine, tetrahydrofurfurylaminomethyl, tetrahydrofurfurylaminodimethyl, tetrahydrofurfurylaminoethyl,
Tetrahydrofurfurylaminodiethyl, tetrahydrofurfurylaminopropyl, tetrahydrofurfurylaminodipropyl, tetrahydrofurfurylaminobutyl, tetrahydrofurfurylaminodibutyl, aminoethylmorpholine, methylaminomorpholine, dimethylaminomorpholine, ethylaminomorpholine, diethylaminomorpholine, propylaminomorpholine, dipropylaminomorpholine, butylaminomorpholine, dibutylaminomorpholine.
The basic compound (B) may be used alone or in combination of two or more kinds in any desired ratio.

The content of the basic compound (B) in the conductive composition is preferably an amount that results in a degree of neutralization of 5 to 95 mol %, more preferably 10 to 90 mol %, and even more preferably 20 to 80 mol %.
It is.
The degree of neutralization is the number of moles (1
This means the ratio of the number of moles of the basic compound (B) to the total amount of the basic compound (B) (00 mol%).
When the content of the basic compound (B) is within the above range, it efficiently interacts with the acidic groups in the conductive composition.
In addition, when the content of the basic compound (B) is equal to or more than the lower limit of the above range, the solvent resistance can be sufficiently improved when an antistatic film is formed using the conductive composition.
The performance (conductivity, etc.) of the antistatic film can be well maintained.

[Solvent (C)]
The solvent (C) is not particularly limited as long as it can dissolve the conductive material (A) and the surfactant (B) and can provide the effects of the present invention. For example, water or a mixture of water and a water-soluble organic solvent is preferably used.
Examples of the water-soluble organic solvent include alcohols such as methanol, ethanol, isopropyl alcohol, propyl alcohol, and butanol; ketones such as acetone and ethyl isobutyl ketone; ethylene glycols such as ethylene glycol and ethylene glycol methyl ether; propylene glycols such as propylene glycol, propylene glycol methyl ether, propylene glycol ethyl ether, propylene glycol butyl ether, and propylene glycol propyl ether; amides such as dimethylformamide and dimethylacetamide; and pyrrolidones such as N-methylpyrrolidone and N-ethylpyrrolidone.
When a mixture of water and a water-soluble organic solvent is used as the solvent (C), the mass ratio of water/water-soluble organic solvent is preferably from 1/100 to 100/1, and more preferably from 2/100 to 100/2.
The amount of the solvent (C) used is preferably 2 to 10,000 parts by mass, and more preferably 50 to 10,000 parts by mass, per part by mass of the conductive material (A).

[Polymer compound (D)]
In the conductive composition of the present embodiment, a polymer compound (D) can be contained for the purpose of improving the coating strength and surface smoothness. The polymer compound (E) is a surfactant (B). Does not include.
Specifically, polyvinyl alcohol derivatives such as polyvinyl formal and polyvinyl butyral; polyacrylamides such as polyacrylamide, poly(N-t-butylacrylamide), and polyacrylamide methylpropane sulfonic acid; polyvinylpyrrolidones; polyacrylic Acids; Water-soluble alkyd resins; Water-soluble melamine resins; Water-soluble urea resins; Water-soluble phenolic resins; Water-soluble epoxy resins; Water-soluble polybutadiene resins; Water-soluble acrylic resins; Water-soluble urethane resins; Water-soluble acrylic-styrene copolymer resins ; Water-soluble vinyl acetate acrylic copolymer resin; Water-soluble polyester resin; Water-soluble styrene-maleic acid copolymer resin;
Water-soluble fluororesins; and copolymers thereof.

Furthermore, the conductive composition of the present embodiment may contain various additives, such as pigments, defoamers, ultraviolet absorbers, antioxidants, heat resistance improvers, leveling agents, sagging prevention agents, matting agents, and preservatives, as necessary.

[Conductor and laminate]
An electric conductor according to one embodiment of the present invention includes a substrate and a coating formed by applying the conductive composition to at least one surface of the substrate.
In the present specification, the conductor includes, in particular, a substrate and at least one of the substrate.
When the conductive composition is applied to one surface of the substrate, the conductive composition is applied to the resist layer to form a coating film.

The method for applying the conductive composition to the substrate is not particularly limited as long as the effects of the present invention are achieved, but examples of the method include spin coating, spray coating, dip coating, roll coating, gravure coating, reverse coating, roll brushing, air knife coating, and curtain coating.
The substrate is not particularly limited as long as it has the effects of the present invention. Examples of the substrate include molded products and films of various polymer compounds such as polyester resins such as PET and PBT, polyolefin resins such as polyethylene and polypropylene, vinyl chloride, nylon, polystyrene, polycarbonate, epoxy resins, fluororesins, polysulfone, polyimide, polyurethane, phenolic resins, silicone resins, and synthetic paper; substrates made of paper, iron, glass, quartz glass, various wafers such as silicon, aluminum, copper, zinc, nickel, stainless steel, and the like; and substrates whose surfaces are coated with various paints, photosensitive resins, resists, and the like.

The step of applying the conductive composition to the substrate may be carried out before or during the manufacturing process of the substrate, such as uniaxial stretching, biaxial stretching, molding, or embossing, or may be carried out on the substrate after these processing steps have been completed.
In addition, since the conductive composition of the present embodiment has good coatability, it is possible to form a coating film by applying an additional coat of the conductive composition on the above-mentioned substrate coated with various paints or photosensitive materials.

The conductor of the present embodiment can be produced by applying the conductive composition to at least one surface of the substrate, drying to form a coating film, and then leaving the composition at room temperature (20°C to 30°C) for 1 to 60 minutes or by subjecting the composition to a heat treatment.
The heating temperature when the heat treatment is performed is preferably in the range of 40° C. to 250° C., and more preferably in the range of 60° C. to 200° C., from the viewpoint of electrical conductivity. Moreover, the treatment time is preferably within 1 hour, and more preferably within 30 minutes, from the viewpoint of stability.

The conductive composition of the present embodiment can form a conductor having an insoluble or peelable soluble coating film (i.e., a conductive polymer film) by heating after forming the conductor.
This has the advantage that it is possible to apply the antistatic film both as a permanent antistatic film and as a temporary antistatic film for process purposes.
That is, one aspect of the method for producing a conductor of the present embodiment includes applying the conductive composition onto at least one surface of the substrate;
drying the applied conductive composition to form a coating film; and leaving the coating film at room temperature (25° C. to 30° C.) for 1 to 60 minutes or subjecting the coating film to a heat treatment,
In the manufacturing method, the heating temperature in the heat treatment is 40° C. to 250° C., and the heat treatment time is 1 hour or less.

The method for producing the laminate of the present embodiment includes the steps of: applying the conductive composition onto a chemically amplified resist layer of a substrate having a chemically amplified resist layer on at least one surface of the substrate;
drying the applied conductive composition to form a coating film; and drying the coating film at room temperature (2
5°C to 30°C) for 1 to 60 minutes or heat treatment;
The heating temperature in the heat treatment is 40° C. to 250° C.,
In the production method, the heat treatment time is within 1 hour.

The resist layer may be a layer made of a positive or negative chemically amplified resist.
The positive-type chemically amplified resist is not particularly limited as long as it has sensitivity to electron beams, and any known resist can be used. Typically, a resist containing an acid generator that generates acid upon irradiation with electron beams and a polymer containing a structural unit having an acid decomposable group is used.
The negative type chemically amplified resist is not particularly limited as long as it has sensitivity to electron beams, and known resists can be used. Typically, resists containing an acid generator that generates acid upon irradiation with electron beams, a polymer that is soluble in a developer, and a crosslinking agent are used.

The resist layer can be formed by a known method. For example, a solution of a positive or negative chemically amplified resist in an organic solvent is applied to one surface of a substrate, and then heated (prebaked) as necessary to form a positive or negative resist layer.

One aspect of the laminate of this embodiment is a mask blank comprising a chemically amplified resist layer on at least one surface of a substrate, and a layer formed from the conductive composition of this embodiment on the chemically amplified resist layer.
The method of forming a resist pattern using the mask blank of this embodiment can prevent charge-up during electron beam lithography.

Specific applications of the conductive composition of the present embodiment and the conductor using the same include various antistatic agents, antistatic agents for electron beam lithography, capacitors, batteries, EMI shields,
Chemical sensors, display elements, nonlinear materials, anticorrosive agents, adhesives, fibers, antistatic paints, anticorrosive paints, electrochemical paints, plating primers, electrochemical protection, packaging materials, magnetic cards, magnetic tapes, magnetic disks, photographic films, printing materials, release films, heat seal tapes and films, ICs
Examples include trays, IC carrier tapes, cover tapes, batteries, etc.
Among these, the conductive composition of the present embodiment can provide a coating film that has little effect on the substrate, and therefore can be suitably used as an antistatic agent.

The present invention will now be described in more detail with reference to examples, but the following examples are not intended to limit the scope of the present invention.

<Method for evaluating filterability>
Using a pressure filtration device, 10 g of the conductive composition was passed through a filter at a constant pressure of 0.02 MPa. The filter was an ultra-high molecular weight polyethylene filter (product name: PCM filter, manufactured by Entegris, product number CWMX04700, diameter 47 mm, particle size removal 2
The amount of filtration (amount of liquid passing) was measured 5 minutes after the start of the liquid passing, and the filtration flow rate (unit: g/min) was calculated. A higher filtration flow rate indicates better filter permeability (
Excellent filterability.

The components used in each of the examples and comparative examples are as follows.
<Conductive substance (A)>
a-1: Polymethoxyaniline sulfonic acid. The conductive polymer (
a-1), Mw 10,000.
<Basic Compound (B)>
b-1: Polyethylene glycol methyl ether amine (Tokyo Chemical Industry Co., Ltd., Mw
500), in formula (I), R ₄₁ and R ₄₂ are both hydrogen atoms, X is -O(C ₂ H ₄
O) a- _CH3 .
b-2: Jeffamine 1000 (product name, manufactured by Tomoe Engineering Co., Ltd., Mw 1000),
In the formula (I), R ₄₁ and R ₄₂ are both hydrogen atoms, and X is -(C ₂ H ₄ O)a-(CH(C
H ₃ ) CH ₂ O) b-CH ₃ , the molar ratio of a:b being 9:1.
b-3: Aminopropylpyrrolidone (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 124)
).
b-4: Monomethylaminoethanol (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 75)
.
b-5: N-acetylethylenediamine (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 10
2).
b-6: Tetrahydrofurfurylamine (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 10
1).
b-7: 4-(2-aminoethyl)morpholine (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 130).
b-8: 3-aminopropionitrile (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 70)
.
b-9: 2-diethylaminoethanol (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 11
7).
b-10: 2-(diisopropylamino)ethanol (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 145).
b-11: 2-Dimethylaminoethanol (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 8
9).
b-12: 2-aminoethanol (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 61).
b-13: 2-(isopropylamino)ethanol (Tokyo Chemical Industry Co., Ltd., molecular weight (
Formula weight) 103).
b-14 (Comparative Example): Tetrabutylammonium hydroxide (Tokyo Chemical Industry Co., Ltd., molecular weight (formula weight) 259).
<Solvent (C)>
c-1: Ultrapure water.
c-2: Isopropyl alcohol.
<High molecular compound (D)>
d-1: Water-soluble polymer (d-1) produced in Production Example 2 below. A polyvinylpyrrolidone derivative having an alkylthio group having 12 carbon atoms as a terminal hydrophobic group, Mw 4,400.

(Production Example 1: Production of Conductive Polymer (a-1))
1 mol of 3-aminoanisole-4-sulfonic acid was dissolved in 300 mL of an aqueous acetonitrile solution of 4 mol/L pyridine (water/acetonitrile=3:7) at 0°C to obtain a monomer solution. Separately, 1 mol of ammonium peroxodisulfate was dissolved in 1 L of an aqueous acetonitrile solution (water/acetonitrile=3:7) to obtain an oxidizing agent solution. Next, while cooling the oxidizing agent solution to 5°C, the monomer solution was added dropwise. After completion of the dropwise addition, the mixture was further stirred at 25°C for 12 hours to obtain a reaction mixture containing a conductive polymer. Then, the conductive polymer was filtered out from the reaction mixture using a centrifugal filter. The obtained conductive polymer was washed with methanol and then dried to obtain 185 g of a powdered conductive polymer (a-1). The Mw of the obtained conductive polymer (a-1) was 10,000.

(Production Example 2: Production of Water-Soluble Polymer (d-1))
55 g of N-vinylpyrrolidone as a vinyl monomer, 1 g of azobisisobutyronitrile as a polymerization initiator, and 0.16 g of n-dodecyl mercaptan as a chain transfer agent for introducing a terminal hydrophobic group were stirred and dissolved in 100 ml of isopropyl alcohol as a solvent to obtain a reaction solution. Then, the reaction solution was dropped at a dropping rate of 1 ml/min into isopropyl alcohol that had been heated to 80°C in advance, and dropwise polymerization was performed. The dropwise polymerization was performed while keeping the temperature of isopropyl alcohol at 80°C. After the dropwise addition, the mixture was further aged at 80°C for 2 hours and then allowed to cool. Then, the mixture was concentrated under reduced pressure, and the resulting reaction product was redissolved in a small amount of acetone. The acetone solution of the reaction product was dropped into excess n-hexane to obtain a white precipitate, which was filtered off, washed with n-hexane, and then dried to obtain 45 g of a water-soluble polymer (d-1
) was obtained.

(Examples 1 to 13, Comparative Example 1)
A conductive composition was prepared by mixing the conductive substance (A), the basic compound (B), the solvent (C), and the polymer compound (D) according to the formulation shown in Table 1. The amount of the basic compound (B) used was adjusted so that the degree of neutralization was 50 mol%.
The conductive substance (A), the basic compound (B), and the solvent (C) relative to the total mass of the conductive composition
The contents are shown in the table.
The filterability of the obtained conductive composition was evaluated by the method described above, and the results are shown in the table.

Examples 1 to 13, which used the conductive polymer (a-1) and the basic compound (B) represented by the formula (I), showed improved filterability compared to Comparative Example 1, which used a quaternary amine as the basic compound.

Claims (5)

A conductive substance (A) having an acidic group;
A basic compound (B) represented by the following formula (I),
Including,
The conductive substance (A) is a conductive polymer (a) having a repeating unit represented by the following formula (1) :
The content of the conductive polymer (a) is 0.01 to 50 mass% based on the total mass of the conductive composition,
In the conductive polymer (a), the content of acidic groups relative to the total number of aromatic rings (total number of moles) in the polymer is 50 mol % or more,
The conductive composition , wherein the content of the basic compound (B) is an amount such that the degree of neutralization of the acidic groups of the conductive polymer (a) is 5 to 95 mol % .

In formula (I), R ₄₁ and R ₄₂ each independently represent a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms;
X is a hydrophilic functional group having a molecular weight of 15 to 5000;
The hydrophilic functional group is a monovalent group containing at least one selected from the group consisting of a nitrile group, an imino group, an amide group, a carbonyl group, a sulfonyl group, a tetrahydrofurfuryl group, a polyoxyalkylene structure, a pyrrolidone structure, a morpholine structure, a dioxane structure, and a halogen atom.

(In formula (1), R ₁ to R ₄ each independently represent a hydrogen atom, a linear or branched alkyl group having 1 to 24 carbon atoms, a linear or branched alkoxy group having 1 to 24 carbon atoms, an acidic group, a hydroxyl group, a nitro group, or a halogen atom; and at least one of R ₁ to R ₄ is an acidic group or a salt thereof;
The acidic group is a sulfonic acid group or a carboxy group. The conductive composition of claim 1 , wherein the conductive composition further comprises a water-soluble polymer comprising an alkylthio group . The conductive composition according to claim 1 or 2 , wherein R ₄₁ and R ₄₂ each independently represent a hydrogen atom, a methyl group, an ethyl group, a propyl group, or a butyl group. A conductor comprising a substrate and a coating formed by applying the conductive composition according to any one of claims 1 to 3 onto at least one surface of the substrate. A laminate comprising a substrate, a resist layer formed on at least one surface of the substrate, and a coating film formed by applying the conductive composition according to any one of claims 1 to 3 onto the resist layer.