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JP7553052B2 - Cutting circumferential surface measuring device and cutting workpiece measuring method - Google Patents
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JP7553052B2 - Cutting circumferential surface measuring device and cutting workpiece measuring method - Google Patents

Cutting circumferential surface measuring device and cutting workpiece measuring method Download PDF

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JP7553052B2
JP7553052B2 JP2020217148A JP2020217148A JP7553052B2 JP 7553052 B2 JP7553052 B2 JP 7553052B2 JP 2020217148 A JP2020217148 A JP 2020217148A JP 2020217148 A JP2020217148 A JP 2020217148A JP 7553052 B2 JP7553052 B2 JP 7553052B2
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workpiece
measurement
cutting
circumferential surface
measuring
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JP2022102427A (en
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一朗 吉田
絢子 北風
賢次 野口
尊一 中谷
一彦 三宮
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Citizen Machinery Co Ltd
Citizen Watch Co Ltd
Hosei University
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Citizen Watch Co Ltd
Hosei University
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特許法第30条第2項適用 (1)刊行物名:2020年度精密工学会春季大会講演論文集CD-ROM 発行者名:公益社団法人精密工学会 発行日:令和2年3月1日Article 30, paragraph 2 of the Patent Act applies (1) Publication name: Proceedings of the 2020 Japan Society for Precision Engineering Spring Meeting CD-ROM Publisher: Japan Society for Precision Engineering Publication date: March 1, 2020

本発明は、切削円周面測定装置および被切削物測定方法に関する。 The present invention relates to a cutting circumference surface measuring device and a cutting workpiece measuring method.

従来、円筒体の検査方法として、円筒体の軸方向にわたって、円筒体の軸に対する一円周上の半径方向の変位量の最大値である円周振れを測定することにより凹凸を検出するものであって、円筒体の表面を軸方向にスパイラル状に走査するものが知られている(例えば、特許文献1参照)。 A conventional method for inspecting a cylinder is to detect irregularities by measuring the circumferential runout, which is the maximum value of the radial displacement on one circumference relative to the axis of the cylinder, along the axial direction of the cylinder, and to scan the surface of the cylinder in a spiral manner in the axial direction (see, for example, Patent Document 1).

特開2005-292539号公報(特に、請求項3)JP 2005-292539 A (particularly, claim 3)

上述した円筒体の検査方法により、低周波振動切削加工により円周面に複数の凸状微細部が周期的に分散して残存した被切削物を検知しようとすると、走査経路上に凹部しか存在しなかった場合に正しい被切削物の表面形状を測定できない虞がある。 When attempting to detect a workpiece that has multiple convex fine features periodically distributed on its circumferential surface due to low-frequency vibration cutting using the above-mentioned cylindrical body inspection method, there is a risk that the surface shape of the workpiece cannot be measured correctly if only concave features are present on the scanning path.

そこで、本発明は、前述したような従来技術の問題を解決するものであって、すなわち、本発明の目的は、複数の凸状微細部が周期的に分散して残存した被切削物の表面形状を正確に測定する切削円周面測定装置および被切削物測定方法を提供することである。 The present invention solves the problems of the prior art as described above. In other words, the object of the present invention is to provide a cutting circumferential surface measuring device and a cutting workpiece measuring method that can accurately measure the surface shape of a cutting workpiece on which multiple convex fine parts remain distributed periodically.

本発明は、第1に、低周波振動切削加工により複数の凸状微細部が円周面に周期的に分散して残存した被切削物の表面形状を測定する切削円周面測定装置であって、前記被切削物の円周面に沿って前記被切削物の表面形状を測定する測定プローブと、前記被切削物の軸心を中心に前記被切削物または前記測定プローブの少なくとも一方を回転させる被切削物回転手段と、前記測定プローブまたは前記被切削物の少なくとも一方を前記被切削物の軸心と平行に直線移動させる測定点移動手段と、前記被切削物の凸状微細部の1つを前記被切削物に対する測定開始点として検出する測定開始点検出手段と、前記被切削物の凸状微細部が相互に連なる配列方向を前記被切削物に対する測定方向として特定する測定方向特定手段と、前記被切削物回転手段および前記測定点移動手段を制御して前記測定プローブを前記測定開始点から前記測定方向に移動させる駆動制御手段とを備えていることを特徴とする。 First, the present invention is a cut circumferential surface measuring device that measures the surface shape of a workpiece that has been left with multiple convex fine parts periodically distributed on the circumferential surface by low-frequency vibration cutting, and is characterized by comprising a measurement probe that measures the surface shape of the workpiece along the circumferential surface of the workpiece, a workpiece rotation means that rotates at least one of the workpiece or the measurement probe around the axis of the workpiece, a measurement point moving means that moves at least one of the measurement probe or the workpiece linearly parallel to the axis of the workpiece, a measurement start point detection means that detects one of the convex fine parts of the workpiece as a measurement start point for the workpiece, a measurement direction specifying means that specifies the arrangement direction in which the convex fine parts of the workpiece are connected to each other as the measurement direction for the workpiece, and a drive control means that controls the workpiece rotation means and the measurement point moving means to move the measurement probe from the measurement start point to the measurement direction.

第2に、前記測定開始点検出手段が、前記被切削物の円周面の所定領域内を前記測定プローブで複数回異なる測定経路で走査して前記被切削物の凸状微細部を特定することを特徴とする。 Secondly, the measurement start point detection means is characterized in that it scans a predetermined area of the circumferential surface of the workpiece with the measurement probe multiple times along different measurement paths to identify the convex fine portion of the workpiece.

第3に、前記測定方向特定手段が、前記測定プローブを前記被切削物の円周面に沿って走査させた結果に基づいて前記測定方向を特定することを特徴とする。 Thirdly, the measurement direction determination means determines the measurement direction based on the results of scanning the measurement probe along the circumferential surface of the workpiece.

第4に、低周波振動切削加工により円周面に複数の凸状微細部が周期的に分散して残存した被切削物の円周面に沿って前記被切削物の表面形状を測定する測定プローブと、前記被切削物の軸心を中心に前記被切削物または前記測定プローブの少なくとも一方を回転させる被切削物回転手段と、前記を測定プローブまたは前記被切削物の少なくとも一方を前記被切削物の軸心と平行に直線移動させる測定点移動手段と、前記被切削物に対する測定開始点として検出する測定開始点検出手段と、前記被切削物に対する測定方向として特定する測定方向特定手段と、前記被切削物回転手段および前記測定点移動手段を制御する駆動制御手段とを備えて前記被切削物の表面形状を測定する切削円周面測定装置を用いた被切削物測定方法であって、前記測定方向特定手段が前記被切削物の凸状微細部が相互に連なる配列方向を前記被切削物の表面形状の測定方向として特定する測定方向特定ステップと、前記測定開始点検出手段が前記被切削物の凸状微細部の1つを前記被切削物の表面形状の測定開始点として検出する測定開始点特定ステップと、前記駆動制御手段が前記測定プローブを前記測定開始点から前記測定方向に移動させる測定ステップとを備えていることを特徴とする。 Fourthly, a measurement probe that measures the surface shape of a cut object along the circumferential surface of the cut object on which a plurality of convex fine parts are periodically distributed and left on the circumferential surface by low-frequency vibration cutting processing, a workpiece rotation means that rotates at least one of the workpiece or the measurement probe around the axis of the cut object, a measurement point movement means that linearly moves at least one of the measurement probe or the cut object parallel to the axis of the cut object, a measurement start point detection means that detects the measurement start point for the cut object, a measurement direction identification means that identifies the measurement direction for the cut object, the workpiece rotation means, and A method for measuring a cut object using a cutting circumferential surface measuring device that is equipped with a drive control means for controlling the measurement point moving means and measures the surface shape of the cut object, the method comprising a measurement direction specifying step in which the measurement direction specifying means specifies the arrangement direction in which the convex fine parts of the cut object are connected to each other as the measurement direction of the surface shape of the cut object, a measurement start point specifying step in which the measurement start point detection means detects one of the convex fine parts of the cut object as the measurement start point of the surface shape of the cut object, and a measurement step in which the drive control means moves the measurement probe from the measurement start point in the measurement direction.

本発明は、以下の効果を奏することができる。
(1)被切削物の凸状微細部の1つを被切削物に対する測定開始点として検出する測定開始点検出手段と、被切削物の凸状微細部が相互に連なる配列方向を被切削物に対する測定方向として特定する測定方向特定手段と、被切削物回転手段および測定点移動手段を制御して測定プローブを測定開始点から測定方向に移動させる駆動制御手段とを備えていることにより、測定プローブが確実に被切削物の凸状微細部を通過するため、低周波振動切削加工により複数の凸状微細部が周期的に分散して残存した被切削物の表面形状を正確に測定することができる。
The present invention can achieve the following effects.
(1) By comprising a measurement start point detection means for detecting one of the convex fine portions of the workpiece as the measurement start point for the workpiece, a measurement direction identification means for identifying the arrangement direction in which the convex fine portions of the workpiece are connected to each other as the measurement direction for the workpiece, and a drive control means for controlling the workpiece rotation means and the measurement point moving means to move the measurement probe from the measurement start point in the measurement direction, the measurement probe reliably passes through the convex fine portions of the workpiece, and the surface shape of the workpiece left with multiple convex fine portions periodically dispersed by low-frequency vibration cutting processing can be accurately measured.

(2)測定開始点検出手段が、被切削物の円周面の所定領域内を測定プローブで複数回異なる測定経路で走査して被切削物の凸状微細部を特定することにより、測定開始点となる被切削物の凸状微細部が測定対象の被切削物を走査して特定されるため、より正確に被切削物の表面形状を測定することができる。 (2) The measurement start point detection means scans a specified area on the circumferential surface of the workpiece with the measurement probe multiple times along different measurement paths to identify the convex fine part of the workpiece, and the convex fine part of the workpiece that serves as the measurement start point is identified by scanning the workpiece to be measured, allowing the surface shape of the workpiece to be measured more accurately.

(3)測定方向特定手段が、測定プローブを被切削物の円周面に沿って走査させた結果に基づいて測定方向を特定することにより、実際に測定する被切削物に即して測定方向が特定されるため、より正確に被切削物の表面形状を測定することができる。 (3) The measurement direction determination means determines the measurement direction based on the results of scanning the measurement probe along the circumferential surface of the workpiece, and therefore the measurement direction is determined in accordance with the workpiece actually being measured, making it possible to measure the surface shape of the workpiece more accurately.

(4)測定方向特定手段が被切削物の凸状微細部が相互に連なる配列方向を被切削物の表面形状の測定方向として特定する測定方向特定ステップと、測定開始点検出手段が被切削物の凸状微細部の1つを被切削物の表面形状の測定開始点として検出する測定開始点特定ステップと、駆動制御手段が測定プローブを測定開始点から測定方向に移動させる測定ステップとを備えていることにより、測定プローブが確実に被切削物の凸状微細部を通過するため、低周波振動切削加工により複数の凸状微細部が周期的に分散して残存した被切削物の表面形状を正確に測定することができる。 (4) The method includes a measurement direction determination step in which the measurement direction determination means determines the arrangement direction in which the convex fine parts of the workpiece are connected to each other as the measurement direction of the surface shape of the workpiece, a measurement start point determination step in which the measurement start point detection means detects one of the convex fine parts of the workpiece as the measurement start point of the surface shape of the workpiece, and a measurement step in which the drive control means moves the measurement probe from the measurement start point in the measurement direction. This ensures that the measurement probe passes through the convex fine parts of the workpiece, and therefore makes it possible to accurately measure the surface shape of the workpiece in which multiple convex fine parts are periodically distributed and left by the low-frequency vibration cutting process.

本発明の一実施例である切削円周面測定装置による測定対象物である被切削物の斜視図。1 is a perspective view of a workpiece that is an object to be measured by a cut circumferential surface measuring device according to an embodiment of the present invention; 図1Aの部分拡大図。FIG. 1B is a partially enlarged view of FIG. 図1Bの線図で示した図。A diagrammatic representation of FIG. 1B. 図1Bの展開図。Exploded view of FIG. 1B. 本発明の一実施例である切削円周面測定装置の斜視模式図。1 is a schematic perspective view of a cutting circumferential surface measuring device according to an embodiment of the present invention; 測定方向の特定手順を示すフローチャート。11 is a flowchart showing a procedure for identifying a measurement direction. 被切削物の表面形状の3次元データを画像化した結果を示す図。FIG. 13 is a diagram showing the result of imaging three-dimensional data of the surface shape of the workpiece. 図4Aに対して凸状微細部を抽出した状態を示す図。FIG. 4B is a diagram showing a state in which a convex fine portion is extracted from FIG. 4A . 図4Bに対して測定方向の候補を特定した状態を示す図。FIG. 4C is a diagram showing a state in which candidates for the measurement direction are identified with respect to FIG. 4B . 表面形状の測定手順を示すフローチャート。4 is a flowchart showing a procedure for measuring a surface shape. 測定開始点を特定するための測定プローブの測定経路を示す図。FIG. 4 is a diagram showing a measurement path of a measurement probe for identifying a measurement start point. 測定プローブの測定結果を示す図。FIG. 4 is a diagram showing the measurement results of a measurement probe. 測定プローブの測定方向を示す図。FIG. 4 is a diagram showing the measurement direction of a measurement probe.

本発明は、低周波振動切削加工により複数の凸状微細部が円周面に周期的に分散して残存した被切削物の表面形状を測定する切削円周面測定装置であって、被切削物の円周面に沿って被切削物の表面形状を測定する測定プローブと、被切削物の軸心を中心に被切削物または測定プローブの少なくとも一方を回転させる被切削物回転手段と、測定プローブまたは被切削物の少なくとも一方を被切削物の軸心と平行に直線移動させる測定点移動手段と、被切削物の凸状微細部の1つを被切削物に対する測定開始点として検出する測定開始点検出手段と、被切削物の凸状微細部が相互に連なる配列方向を被切削物に対する測定方向として特定する測定方向特定手段と、被切削物回転手段および測定点移動手段を制御して測定プローブを測定開始点から測定方向に移動させる駆動制御手段とを備え、複数の凸状微細部が周期的に分散して残存した被切削物の表面形状を正確に測定するものであれば、その具体的な実施態様は、如何なるものであっても構わない。 The present invention is a cutting circumferential surface measuring device that measures the surface shape of a workpiece in which multiple convex fine parts are periodically distributed on the circumferential surface by low-frequency vibration cutting, and includes a measurement probe that measures the surface shape of the workpiece along the circumferential surface of the workpiece, a workpiece rotation means that rotates at least one of the workpiece or the measurement probe around the axis of the workpiece, a measurement point moving means that moves at least one of the measurement probe or the workpiece linearly parallel to the axis of the workpiece, a measurement start point detection means that detects one of the convex fine parts of the workpiece as the measurement start point for the workpiece, a measurement direction specifying means that specifies the arrangement direction in which the convex fine parts of the workpiece are connected to each other as the measurement direction for the workpiece, and a drive control means that controls the workpiece rotation means and the measurement point moving means to move the measurement probe from the measurement start point in the measurement direction, and the specific embodiment may be any as long as it accurately measures the surface shape of a workpiece in which multiple convex fine parts are periodically distributed and remain.

例えば、切削円周面測定装置の測定する被切削物の円周面に残存する凸状微細部が被切削物の円周面に少なくとも2個以上残存していれば、被切削物の表面形状は切削円周面測定装置により測定可能であるが、凸状微細部が被切削物の円周面に無数(数え切れないほど多い程度)に残存していれば、切削円周面測定装置が多くの凸状微細部に基づいて測定方向を特定できるため、被切削物の表面形状を切削円周面測定装置により正確に測定することができる。 For example, if there are at least two or more convex fine portions remaining on the circumferential surface of the workpiece to be measured by the cut circumferential surface measuring device, the surface shape of the workpiece can be measured by the cut circumferential surface measuring device. However, if an infinite number of convex fine portions remain on the circumferential surface of the workpiece (to the point where they cannot be counted), the cut circumferential surface measuring device can identify the measurement direction based on the many convex fine portions, and the surface shape of the workpiece can be accurately measured by the cut circumferential surface measuring device.

例えば、切削円周面測定装置が測定する被切削物は、円周面を有していれば、円柱状の被切削物、円筒状の被切削物、円錐体状の被切削物、円錐台状の被切削物等、如何なる形状であってもよい。 For example, the workpiece measured by the cutting circumferential surface measuring device may be of any shape, such as a cylindrical workpiece, a cylindrical workpiece, a conical workpiece, or a truncated cone-shaped workpiece, as long as it has a circumferential surface.

例えば、切削円周面測定装置が測定する被切削物の表面形状は、表面性状、表面粗さ、平面度、真直度、円筒度、真円度等、如何なるものであってもよい。 For example, the surface shape of the workpiece measured by the cutting circumferential surface measuring device may be anything, such as surface properties, surface roughness, flatness, straightness, cylindricity, roundness, etc.

例えば、測定プローブは、被切削物に接触して被切削物の表面形状を測定するものであってもよいし、非接触で被切削物の表面形状を測定するものであってもよい。 For example, the measurement probe may be one that contacts the workpiece to measure the surface shape of the workpiece, or one that measures the surface shape of the workpiece without contact.

例えば、測定点移動手段は、測定プローブを被切削物の軸心と平行に直線移動させるものであってもよいし、被切削物を被切削物の軸心と平行に直線移動させるものであってもよいし、測定プローブおよび被切削物を被切削物の軸心と平行に直線移動させるものであってもよい。 For example, the measurement point moving means may be one that moves the measurement probe linearly parallel to the axis of the workpiece, or one that moves the workpiece linearly parallel to the axis of the workpiece, or one that moves the measurement probe and the workpiece linearly parallel to the axis of the workpiece.

例えば、回転手段は、被加工物の軸心を中心に被加工物を回転させるものであってもよいし、被加工物の軸心を中心に測定プローブを回転させるものであってもよいし、被加工物の軸心を中心に被加工物および測定プローブを回転させるものであってもよい。 For example, the rotating means may rotate the workpiece around its axis, may rotate the measuring probe around its axis, or may rotate the workpiece and the measuring probe around its axis.

以下、図1乃至図6Dに基づいて、本発明の一実施例である切削円周面測定装置および切削円周面測定装置による切削円周面測定方法について説明する。 The following describes an embodiment of the cut circumferential surface measuring device and a cut circumferential surface measuring method using the cut circumferential surface measuring device, based on Figures 1 to 6D.

<1.被切削物の形状>
まず、図1A乃至図1Dに基づき、本発明の一実施例である切削円周面測定装置による測定対象物である被切削物について説明する。
図1Aは本発明の一実施例である切削円周面測定装置による測定対象物である被切削物の斜視図であり、図1Bは図1Aの部分拡大図であり、図1Cは図1Bを線図で示した図であり、図1Dは図1Bの展開図である。
<1. Shape of the workpiece>
First, a workpiece to be cut, which is an object to be measured by a cut circumferential surface measuring device according to one embodiment of the present invention, will be described with reference to FIGS. 1A to 1D.
FIG. 1A is a perspective view of a workpiece to be cut, which is an object to be measured by a cutting circumferential surface measuring device according to one embodiment of the present invention, FIG. 1B is a partially enlarged view of FIG. 1A, FIG. 1C is a line diagram of FIG. 1B, and FIG. 1D is a development view of FIG. 1B.

切削円周面測定装置による測定対象物である被切削物Wは、丸棒を低周波振動切削加工で加工したものである。 The workpiece W, which is the object to be measured by the cutting circumferential surface measuring device, is a round bar machined using low-frequency vibration cutting.

ここで、低周波振動切削加工とは、被切削物または切削工具の少なくともいずれか一方を切削方向に振動させつつ、被切削物を把持する主軸の回転を切削方向の振動と同期させて行う加工である。
このような低周波振動切削加工を被切削物Wに行うと、図1Bおよび図1Cに示すような切削経路Lを切削工具が通過するため、被切削物Wの加工済み部分の円周面は、図1B、図1C、図1Dに示すように島状にも見える無数の凸状微細部Tと、切削工具の通過により凸状微細部Tの相互間に形成された凹部Vが周期的に分散して残存する。
なお、図1Bおよび図1Dにおいて、色が白い箇所は高さが高く、色が黒い箇所は高さが低くなっている。
Here, low-frequency vibration cutting is a process in which at least one of the workpiece or the cutting tool is vibrated in the cutting direction while the rotation of the spindle that grips the workpiece is synchronized with the vibration in the cutting direction.
When such low-frequency vibration cutting is performed on a workpiece W, the cutting tool passes through a cutting path L as shown in Figures 1B and 1C, so that the circumferential surface of the machined portion of the workpiece W is left with countless convex fine portions T that look like islands, as shown in Figures 1B, 1C, and 1D, and recesses V that are formed between the convex fine portions T by the passage of the cutting tool, which are periodically distributed.
In addition, in Figs. 1B and 1D, the white parts are high in height, and the black parts are low in height.

<2.切削円周面測定装置の概要>
次に、図2に基づき、切削円周面測定装置100の概要について説明する。
図2は、本発明の一実施例である切削円周面測定装置の斜視模式図である。
2. Overview of cutting circumference surface measuring device
Next, an overview of the cut circumferential surface measuring device 100 will be described with reference to FIG.
FIG. 2 is a schematic perspective view of a cut circumferential surface measuring device according to an embodiment of the present invention.

被切削物Wの表面形状を測定する切削円周面測定装置100は、水平が保たれた床面Fに載置されて表面が水平な基台110と、円周面を有する被切削物Wを保持する被切削物保持部材120と、被切削物Wの表面形状を測定する測定プローブ130と、この測定プローブ130を支持する支持アーム140と、測定プローブ130を移動させるプローブ移動機構(測定点移動手段)150と、コントローラー160とを有している。 The cutting circumferential surface measuring device 100 for measuring the surface shape of the workpiece W includes a base 110 with a horizontal surface that is placed on a floor surface F that is kept level, a workpiece holding member 120 for holding the workpiece W having a circumferential surface, a measuring probe 130 for measuring the surface shape of the workpiece W, a support arm 140 for supporting the measuring probe 130, a probe movement mechanism (measurement point movement means) 150 for moving the measuring probe 130, and a controller 160.

被切削物保持部材120は、基台110に載置される角柱状のベース121と、このベース121の上部に取り付けられるチャック122と、ベース121に内蔵されてチャック122を回転させるモーター(被切削物回転手段)123とを有している。
チャック122は、水平方向に伸びて被切削物Wを回転自在に把持する。
したがって、被切削物Wの軸心Zは水平方向に向かって伸び、被切削物Wは軸心Zを中心に回転する。
The workpiece holding member 120 has a rectangular columnar base 121 placed on the base 110, a chuck 122 attached to the upper part of the base 121, and a motor (workpiece rotation means) 123 built into the base 121 and rotating the chuck 122.
The chuck 122 extends horizontally and rotatably holds the workpiece W.
Therefore, the axis Z of the workpiece W extends in the horizontal direction, and the workpiece W rotates around the axis Z.

測定プローブ130は、被切削物Wの円周面と対向する接触式のプローブである。 The measurement probe 130 is a contact type probe that faces the circumferential surface of the workpiece W.

支持アーム140は、基台110から鉛直方向に伸びる直立部141と、この直立部141から水平方向に伸びる水平部142とから構成されている。 The support arm 140 is composed of an upright portion 141 that extends vertically from the base 110, and a horizontal portion 142 that extends horizontally from the upright portion 141.

プローブ移動機構150は、支持アーム140の水平部142に取り付けられており、水平方向に移動自在となっている。
また、プローブ移動機構150には、測定プローブ130の先端が鉛直下方を向くように取り付けられている。
したがって、測定プローブ130は、被切削物Wの円周面に沿って被切削物Wの軸心Zと平行に直線移動することができる。
The probe moving mechanism 150 is attached to the horizontal portion 142 of the support arm 140 and is movable in the horizontal direction.
Furthermore, the measurement probe 130 is attached to the probe moving mechanism 150 so that the tip of the measurement probe 130 faces vertically downward.
Therefore, the measurement probe 130 can move linearly parallel to the axis Z of the workpiece W along the circumferential surface of the workpiece W.

コントローラー160は、モーター123とプローブ移動機構150とを制御する駆動制御部(駆動制御手段)161と、CPU等の演算部162と、測定プローブ130による被切削物Wの表面形状の測定結果や演算部162による演算結果を記憶する記憶部163とを有している。
演算部162は、被切削物Wに対する測定方向として特定する測定方向特定手段162aと、被切削物Wに対する測定開始点として検出する測定開始点検出手段162bとを有している。
The controller 160 has a drive control unit (drive control means) 161 that controls the motor 123 and the probe moving mechanism 150, a calculation unit 162 such as a CPU, and a memory unit 163 that stores the measurement results of the surface shape of the workpiece W by the measurement probe 130 and the calculation results by the calculation unit 162.
The calculation unit 162 has a measurement direction specifying means 162a that specifies the measurement direction for the workpiece W, and a measurement start point detecting means 162b that detects the measurement start point for the workpiece W.

切削円周面測定装置100が以上のように構成されていることにより、切削円周面測定装置100は、被切削物Wの表面の表面形状を長手方向および周方向だけでなく、螺旋方向に計測が可能になっている。 Because the cutting circumferential surface measuring device 100 is configured as described above, the cutting circumferential surface measuring device 100 is capable of measuring the surface shape of the surface of the workpiece W not only in the longitudinal and circumferential directions, but also in the spiral direction.

<3.切削円周面測定方法>
次に、図3乃至図6Cに基づき、切削円周面測定装置100による切削円周面測定方法について説明する。
<3. Cutting Circumferential Surface Measurement Method>
Next, a method for measuring a cut circumferential surface using the cut circumferential surface measuring device 100 will be described with reference to FIGS. 3 to 6C.

<3.1.測定方向の特定>
まず、図3乃至図4Cに基づき、切削円周面測定装置100が事前に行う測定方向の特定について説明する。
図3は測定方向の特定手順を示すフローチャートであり、図4Aは被切削物の表面形状の3次元データを画像化した結果を示す図であり、図4Bは図4Aに対して凸状微細部を抽出した状態を示す図であり、図4Cは図4Bに対して測定方向の候補を特定した状態を示す図である。
<3.1. Identifying the measurement direction>
First, the specification of the measurement direction performed in advance by the cut circumferential surface measuring device 100 will be described with reference to Figs. 3 to 4C.
Figure 3 is a flowchart showing the procedure for identifying the measurement direction, Figure 4A is a diagram showing the result of imaging three-dimensional data of the surface shape of the workpiece, Figure 4B is a diagram showing the state in which convex fine parts have been extracted from Figure 4A, and Figure 4C is a diagram showing the state in which candidate measurement directions have been identified from Figure 4B.

(ステップS10)
切削円周面測定装置100は、まず、測定対象となる被切削物の表面形状の3次元データを読み込む。
この3次元データは、測定対象となる被切削物に対する加工条件と同条件による加工シミュレーションに基づくシミュレーションデータであり、少なくとも送り方向(被切削物の長手方向)位置、位相(回転角)、高さの3つを含む。
図4Aは、測定対象となる被切削物の表面形状の3次元データを画像化したものであり、位相を横軸、送り方向位置を縦軸に取り、高さを色の違いで表現した図であり、色が白い点ほど高さが高く、色が黒い点ほど高さが低くなっている。
(Step S10)
The cut circumferential surface measuring device 100 first reads three-dimensional data of the surface shape of the workpiece to be measured.
This three-dimensional data is simulation data based on a machining simulation under the same conditions as the machining conditions for the workpiece to be measured, and includes at least three items: position in the feed direction (longitudinal direction of the workpiece), phase (rotation angle), and height.
FIG. 4A is an image of the three-dimensional data of the surface shape of the workpiece to be measured, in which the horizontal axis represents the phase and the vertical axis represents the feed direction position, and height is represented by different colors, with whiter points representing higher heights and blacker points representing lower heights.

(ステップS11)
そして、切削円周面測定装置100の演算手段162は、ステップS10で読み込んだ3次元データから、島状の凸状微細部Tを抽出する。
具体的には、ステップS10で読み込んだ3次元データに対して自己相関関数やウェーブレット解析を適用したり、ステップS10で読み込んだ3次元データを画像データ化した図4Aに示すような画像データに対して、2値化や数値微分やデジタルフィルタを適用したり、ウェーブレット解析をしたり、パターン認識等の画像処理技術・画像認識技術を適用したりして、図4Bに示すような無数の島状にも見える凸状微細部Tを抽出する。
凸状微細部Tは、図4Bに示すように、頂点の一帯を含むエリアとなっている。
(Step S11)
Then, the calculation means 162 of the cut circumferential surface measuring device 100 extracts island-shaped convex fine portions T from the three-dimensional data read in step S10.
Specifically, an autocorrelation function or wavelet analysis is applied to the three-dimensional data read in step S10, and the three-dimensional data read in step S10 is converted into image data as shown in FIG. 4A, and then binarization, numerical differentiation, or a digital filter is applied to the image data, wavelet analysis is performed, or image processing techniques and image recognition techniques such as pattern recognition are applied to extract convex fine parts T that appear like countless islands as shown in FIG. 4B.
As shown in FIG. 4B, the convex fine portion T is an area including a region of the apex.

(ステップS12)
そして、切削円周面測定装置100の測定方向特定手段162aは、ステップS11で処理した画像データから、画像認識により被切削物の凸状微細部Tが相互に連なる配列方向d1~d4を被切削物に対する測定方向の候補として特定する。

具体的には、図4Aのように画像化される3次元データであれば、測定方向の候補として、図4Cに示すように、送り方向と概ね平行に伸びる方向(d1)、斜めに伸びる方向(d2、d4)、周(位相)方向と概ね平行に伸びる方向(d3)が存在する。
(Step S12)
Then, the measurement direction identifying means 162a of the cut circumferential surface measuring device 100 identifies the arrangement directions d1 to d4 in which the convex fine portions T of the cut workpiece are connected to each other as candidate measurement directions for the cut workpiece through image recognition from the image data processed in step S11.

Specifically, for three-dimensional data imaged as shown in FIG. 4A, the possible measurement directions are a direction (d1) extending roughly parallel to the feed direction, diagonal directions (d2, d4), and a direction (d3) extending roughly parallel to the circumferential (phase) direction, as shown in FIG. 4C.

<3.2.表面形状の測定>
次に、図5乃至図6Cに基づき、被切削物の表面形状の測定について説明する。
図5は表面形状の測定手順を示すフローチャートであり、図6Aは測定開始点を特定するための測定プローブの測定経路を示す図であり、図6Bは測定プローブの測定結果を示す図であり、図6Cは測定プローブの測定方向を示す図である。
<3.2. Measurement of surface shape>
Next, measurement of the surface shape of the workpiece will be described with reference to Figs. 5 to 6C.
FIG. 5 is a flowchart showing the procedure for measuring the surface shape, FIG. 6A is a diagram showing the measurement path of the measurement probe for identifying the measurement starting point, FIG. 6B is a diagram showing the measurement results of the measurement probe, and FIG. 6C is a diagram showing the measurement direction of the measurement probe.

(ステップS20)
まず、切削円周面測定装置100の駆動制御部161は、モーター123またはプローブ移動機構150の少なくとも一方を制御して、図6Aに示すように、被切削物Wの円周面の所定の測定開始点検索領域A内を測定プローブ130で複数回異なる測定経路Sで走査する。
(Step S20)
First, the drive control unit 161 of the cut circumferential surface measuring device 100 controls at least one of the motor 123 or the probe moving mechanism 150 to scan a predetermined measurement start point search area A of the circumferential surface of the workpiece W with the measurement probe 130 multiple times along different measurement paths S, as shown in Figure 6A.

(ステップS21)
そして、切削円周面測定装置100の測定開始点検出手段162bは、図6Bのような測定プローブ130による測定結果から、最も高い点(被切削物Wの凸状微細部Tの頂点近傍)を測定開始点Pと特定する。
(Step S21)
Then, the measurement start point detection means 162b of the cut circumferential surface measuring device 100 identifies the highest point (near the apex of the convex fine portion T of the workpiece W) as the measurement start point P from the measurement results by the measuring probe 130 as shown in Figure 6B.

(ステップS22)
そして、ステップS12により特定された測定方向の候補(d1、d2、d3、d4)のうちユーザーにより設定された方向を測定方向として、測定開始点Pから測定プローブ130による走査を行い、被切削物Wの表面形状の測定を行う。
この測定開始点Pから測定方向に向けた測定プローブ130による走査の回数は、1回に限らず、複数回行っても良い。
また、測定開始点Pを僅かにずらして測定方向に測定プローブ130を走査させることを繰り返した結果を測定結果としても良い。
(Step S22)
Then, the direction set by the user from among the candidate measurement directions (d1, d2, d3, d4) identified in step S12 is used as the measurement direction, and scanning is performed with the measurement probe 130 from the measurement starting point P to measure the surface shape of the workpiece W.
The number of scans by the measurement probe 130 from the measurement start point P in the measurement direction is not limited to one, but may be multiple.
Moreover, the measurement start point P may be shifted slightly and the measurement probe 130 may be repeatedly scanned in the measurement direction, and the result may be used as the measurement result.

なお、d1方向を測定方向として選択した場合の被切削物Wの表面形状の測定結果によれば、低周波振動切削加工による送り条件が適切であるか否かが確認できる。
また、d2方向、d3方向、d4方向を測定方向として選択した場合の被切削物Wの表面形状の測定結果によれば、低周波振動切削加工による振動条件が適切であるか否かが確認できる。
In addition, based on the measurement results of the surface shape of the workpiece W when the d1 direction is selected as the measurement direction, it is possible to confirm whether the feed conditions in the low-frequency vibration cutting process are appropriate.
Furthermore, based on the measurement results of the surface shape of the workpiece W when the d2 direction, d3 direction, and d4 direction are selected as the measurement directions, it is possible to confirm whether the vibration conditions for low-frequency vibration cutting are appropriate.

<4.本実施例の切削円周面測定装置が奏する効果>
以上説明したように、本発明の一実施例である切削円周面測定装置100によれば、被切削物Wの凸状微細部Tの1つを被切削物に対する測定開始点Pとして検出する測定開始点検出手段162bと、被切削物Wの凸状微細部Tの周期的に連なる方向を被切削物に対する測定方向として特定する測定方向特定手段162aと、被切削物回転手段であるモーター123および測定点移動手段であるプローブ移動機構150とを制御して測定プローブ130を測定開始点Pから測定方向に移動させる駆動制御手段である駆動制御部161を備えていることにより、測定プローブ130が確実に被切削物Wの凸状微細部Tを通過するため、低周波振動切削加工により無数の凸状微細部Tが周期的に分散して残存した被切削物Wの表面形状を正確に測定することができる。
なお、被切削物Wの表面形状の測定結果とシミュレーションデータとを比較した場合に、凸状微細部の間隔のズレや相違を確認することで、工作機械の主軸の回転数と切削工具の振動数の位相ズレ・同期ズレの有無を検出して、そのズレ量を推定することもできる。
4. Effects of the Cutting Circumferential Surface Measuring Device of the Present Embodiment
As described above, according to the cutting circumferential surface measuring device 100 which is one embodiment of the present invention, it is equipped with a measurement start point detection means 162b which detects one of the convex fine portions T of the workpiece W as the measurement start point P for the workpiece, a measurement direction identification means 162a which identifies the direction in which the convex fine portions T of the workpiece W are periodically connected as the measurement direction for the workpiece, and a drive control unit 161 which is a drive control means which controls the motor 123 which is the workpiece rotation means and the probe moving mechanism 150 which is the measurement point moving means to move the measurement probe 130 from the measurement start point P in the measurement direction, so that the measurement probe 130 reliably passes through the convex fine portions T of the workpiece W, and therefore it is possible to accurately measure the surface shape of the workpiece W in which countless convex fine portions T are periodically dispersed and left by the low-frequency vibration cutting process.
Furthermore, when comparing the measurement results of the surface shape of the workpiece W with the simulation data, it is possible to check for discrepancies or differences in the spacing of the convex fine features, thereby detecting the presence or absence of a phase shift or synchronization shift between the rotation speed of the spindle of the machine tool and the vibration frequency of the cutting tool, and estimating the amount of discrepancy.

また、測定開始点検出手段162bが、被切削物Wの円周面の所定の測定開始点検索領域A内を測定プローブ130で複数回異なる測定経路Sで走査して被切削物Wの凸状微細部Tを特定することにより、測定開始点Pとなる被切削物Wの凸状微細部Tが測定対象の被切削物Wを走査して特定されるため、より正確に被切削物Wの表面形状を測定することができる。 In addition, the measurement start point detection means 162b scans a predetermined measurement start point search area A on the circumferential surface of the workpiece W with the measurement probe 130 multiple times along different measurement paths S to identify the convex fine part T of the workpiece W, and the convex fine part T of the workpiece W that is the measurement start point P is identified by scanning the workpiece W to be measured, so that the surface shape of the workpiece W can be measured more accurately.

<5.変形例>
以上、本発明の実施例について説明したが、本発明は、上記の実施例に限定されるものではない。
5. Modifications
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments.

例えば、本実施例において、切削円周面測定装置は、測定プローブを1本のみ有していたが、切削円周面測定装置が有する測定プローブの本数は1本に限定されるものではなく、切削円周面測定装置は、測定プローブを複数有していてもよい。
なお、切削円周面測定装置が測定プローブを複数有することにより、複数の点を同時に測定可能となるため、単位時間あたりの測定点数が増加し、より測定データを高密度化することができる。
加えて、測定プローブのそれぞれが独立に移動自在である場合、複数の測定方向を同時に測定することができる。
また、複数の測定プローブは被加工物に接触して被加工物の表面形状を測定するものと非接触で被加工物の表面形状を測定するものの一方のみで構成されてもよいし、両方を用いて構成されてもよい。
さらに、複数の測定プローブの先端形状や材質をそれぞれ異なる形状とすることができるため、粗さ測定に用いる先端半径の小さい測定プローブ、うねり・形状測定に用いる先端半径の大きい測定プローブ、円盤形、ナイフエッジ形、楔形、円柱形、先端の曲がった鉤形など特殊測定に用いる当該測定に見合う特殊な先端形状の測定プローブなどを併用することができる。
For example, in this embodiment, the cut circumferential surface measuring device has only one measuring probe, but the number of measuring probes that the cut circumferential surface measuring device has is not limited to one, and the cut circumferential surface measuring device may have multiple measuring probes.
Furthermore, since the cut circumference surface measuring device has multiple measurement probes, multiple points can be measured simultaneously, increasing the number of measurement points per unit time and enabling measurement data to be obtained at a higher density.
In addition, if each of the measurement probes is independently movable, multiple measurement directions can be measured simultaneously.
In addition, the multiple measurement probes may be configured using only one of a probe that contacts the workpiece to measure the surface shape of the workpiece and a probe that measures the surface shape of the workpiece without contacting the workpiece, or a probe that uses both.
Furthermore, since the tip shapes and materials of multiple measurement probes can be different, it is possible to use in combination measurement probes with a small tip radius for roughness measurement, measurement probes with a large tip radius for waviness/shape measurement, and measurement probes with special tip shapes suitable for special measurements such as disk-shaped, knife-edge-shaped, wedge-shaped, cylindrical, or hook-shaped with a curved tip.

例えば、本実施例において、被切削物Wは中実の丸棒を低周波振動切削加工したものであったが、被切削物Wはこれに限定されるものではなく、例えば、中空の丸棒を低周波振動切削加工したものであってもよい。 For example, in this embodiment, the workpiece W is a solid round bar that has been subjected to low-frequency vibration cutting, but the workpiece W is not limited to this and may be, for example, a hollow round bar that has been subjected to low-frequency vibration cutting.

例えば、本実施例において、測定方向の候補を特定する際に、加工シミュレーションに基づくシミュレーションデータを用いていたが、測定プローブを測定対象である被切削物の円周面に沿って走査させた結果に基づいて測定方向の候補を特定してもよい。
この場合、実際に測定する被切削物に即して測定方向が特定されるため、より正確に被切削物の表面形状を測定することができる。
For example, in this embodiment, when identifying candidate measurement directions, simulation data based on a machining simulation was used, but candidate measurement directions may also be identified based on the results of scanning a measurement probe along the circumferential surface of the workpiece to be measured.
In this case, since the measurement direction is specified in accordance with the workpiece to be actually measured, the surface shape of the workpiece can be measured more accurately.

例えば、本実施例のステップS20において、測定経路SをZ送り方向位置を一定にしたまま位相のみを変化させた経路(図6Aにおける横方向)としていたが、測定経路Sはこれに限定されるものではなく、測定開始点検索領域A内において、位相を一定にしてZ方向送り位置を変化させる経路(図6Aにおける縦方向)としたり、測定経路Sおよび位相をそれぞれ変化させた経路(図6Aにおける斜め方向)としたりしてもよい。 For example, in step S20 of this embodiment, the measurement path S is a path in which only the phase is changed while the Z feed direction position is kept constant (horizontal direction in FIG. 6A), but the measurement path S is not limited to this, and may be a path in which the Z feed position is changed while the phase is kept constant within the measurement start point search area A (vertical direction in FIG. 6A), or a path in which both the measurement path S and the phase are changed (diagonal direction in FIG. 6A).

100 ・・・ 切削円周面測定装置
110 ・・・ 基台
120 ・・・ 被切削物保持部材
121 ・・・ ベース
122 ・・・ チャック
123 ・・・ モーター(被切削物回転手段)
130 ・・・ 測定プローブ
140 ・・・ 支持アーム
141 ・・・ 直立部
142 ・・・ 水平部
150 ・・・ プローブ移動機構(測定点移動手段)
160 ・・・ コントローラー
161 ・・・ 駆動制御部(駆動制御手段)
162 ・・・ 演算部
162a・・・ 測定方向特定手段
162b・・・ 測定開始点検出手段
163 ・・・ 記憶部

F ・・・ 床面
Z ・・・ 被切削物の軸心

W ・・・ 被切削物
T ・・・ 凸状微細部
V ・・・ 凹部
P ・・・ 測定開始点
L ・・・ 切削経路
S ・・・ 測定経路
A ・・・ 測定開始点検索領域
100: Cutting circumferential surface measuring device 110: Base 120: Cutting object holding member 121: Base 122: Chuck 123: Motor (cutting object rotating means)
130: Measuring probe 140: Support arm 141: Upright portion 142: Horizontal portion 150: Probe moving mechanism (measurement point moving means)
160: Controller 161: Drive control unit (drive control means)
162: Calculation section 162a: Measurement direction specification means 162b: Measurement start point detection means 163: Storage section

F: Floor surface Z: Axis of the workpiece

W: Workpiece T: Convex fine part V: Concave part P: Measurement start point L: Cutting path S: Measurement path A: Measurement start point search area

Claims (4)

複数の凸状微細部が円周面に周期的に分散して残存した被切削物の表面形状を測定する切削円周面測定装置であって、
前記被切削物の円周面に沿って前記被切削物の表面形状を測定する測定プローブと、
前記被切削物の軸心を中心に前記被切削物または前記測定プローブの少なくとも一方を回転させる被切削物回転手段と、
前記測定プローブまたは前記被切削物の少なくとも一方を前記被切削物の軸心と平行に直線移動させる測定点移動手段と、
前記被切削物の凸状微細部の1つを前記被切削物に対する測定開始点として検出する測定開始点検出手段と、
前記被切削物の凸状微細部が相互に連なる配列方向を前記被切削物に対する測定方向として特定する測定方向特定手段と、
前記被切削物回転手段および前記測定点移動手段を制御して前記測定プローブを前記測定開始点から前記測定方向に移動させる駆動制御手段とを備えている、切削円周面測定装置。
A cutting circumferential surface measuring device for measuring the surface shape of a cutting workpiece having a plurality of convex fine portions periodically distributed and remaining on the circumferential surface,
a measurement probe for measuring a surface shape of the workpiece along a circumferential surface of the workpiece;
a workpiece rotating means for rotating at least one of the workpiece or the measurement probe around an axis of the workpiece;
a measurement point moving means for linearly moving at least one of the measurement probe and the workpiece parallel to an axis of the workpiece;
a measurement start point detection means for detecting one of the convex fine portions of the workpiece as a measurement start point for the workpiece;
A measurement direction specifying means for specifying an arrangement direction in which the convex fine portions of the workpiece are connected to each other as a measurement direction for the workpiece;
a drive control means for controlling the workpiece rotating means and the measurement point moving means to move the measurement probe from the measurement start point in the measurement direction,
前記測定開始点検出手段が、前記被切削物の円周面の所定領域内を前記測定プローブで複数回異なる測定経路で走査して前記被切削物の凸状微細部を特定する、請求項1に記載の切削円周面測定装置。 The cutting circumferential surface measuring device according to claim 1, wherein the measurement start point detection means scans a predetermined area of the circumferential surface of the workpiece with the measurement probe multiple times along different measurement paths to identify the convex fine portion of the workpiece. 前記測定方向特定手段が、前記測定プローブを前記被切削物の円周面に沿って走査させた結果に基づいて前記測定方向を特定する、請求項1または請求項2に記載の切削円周面測定装置。 The cutting circumferential surface measuring device according to claim 1 or 2, wherein the measurement direction determining means determines the measurement direction based on the results of scanning the measurement probe along the circumferential surface of the workpiece. 低周波振動切削加工により円周面に複数の凸状微細部が周期的に分散して残存した被切削物の円周面に沿って前記被切削物の表面形状を測定する測定プローブと、前記被切削物の軸心を中心に前記被切削物または前記測定プローブの少なくとも一方を回転させる被切削物回転手段と、前記を測定プローブまたは前記被切削物の少なくとも一方を前記被切削物の軸心と平行に直線移動させる測定点移動手段と、前記被切削物に対する測定開始点として検出する測定開始点検出手段と、前記被切削物に対する測定方向として特定する測定方向特定手段と、前記被切削物回転手段および前記測定点移動手段を制御する駆動制御手段とを備えて前記被切削物の表面形状を測定する切削円周面測定装置を用いた被切削物測定方法であって、
前記測定方向特定手段が前記被切削物の凸状微細部が相互に連なる配列方向を前記被切削物の表面形状の測定方向として特定する測定方向特定ステップと、
前記測定開始点検出手段が前記被切削物の凸状微細部の1つを前記被切削物の表面形状の測定開始点として検出する測定開始点特定ステップと、
前記駆動制御手段が前記測定プローブを前記測定開始点から前記測定方向に移動させる測定ステップとを備えている、被切削物測定方法。
A cutting workpiece measuring method using a cutting circumferential surface measuring device that includes a measuring probe that measures a surface shape of a cutting workpiece along a circumferential surface of the cutting workpiece on which a plurality of convex fine portions are periodically distributed and left on the circumferential surface by low-frequency vibration cutting, a cutting workpiece rotating means that rotates at least one of the cutting workpiece or the measuring probe around the axis of the cutting workpiece, a measuring point moving means that moves at least one of the measuring probe or the cutting workpiece linearly parallel to the axis of the cutting workpiece, a measuring start point detecting means that detects the measuring start point for the cutting workpiece, a measuring direction specifying means that specifies the measuring direction for the cutting workpiece, and a drive control means that controls the cutting workpiece rotating means and the measuring point moving means,
a measurement direction specifying step in which the measurement direction specifying means specifies an arrangement direction in which the convex fine portions of the workpiece are connected to each other as a measurement direction of the surface shape of the workpiece;
a measurement start point specifying step in which the measurement start point detecting means detects one of the convex fine portions of the workpiece as a measurement start point of the surface shape of the workpiece;
and a measuring step in which the drive control means moves the measuring probe from the measurement start point in the measurement direction.
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JP2011056605A (en) 2009-09-08 2011-03-24 Tohoku Univ Stitching machining method
JP2017177267A (en) 2016-03-29 2017-10-05 シチズン時計株式会社 Machine tool and control device therefor

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