JP7558740B2 - Air Shower Equipment - Google Patents

Description

The present invention relates to an air shower device that blows air onto objects to be treated in an air shower room.

Conventionally, in clean rooms in facilities for semiconductor manufacturing, medical treatment, food manufacturing and processing, etc., where it is required to prevent the intrusion or leakage of dust particles and microorganisms, air shower devices are installed at the entrances and exits to remove fine particles adhering to clothing.

Conventionally, there is known an air shower device in which a plenum box is arranged inside the side walls that sandwich the air shower room, taking in air sent out from a fan and directing it to an air filter (Patent Document 1). The plenum box has multiple components, including the side walls, a ceiling plate, a bottom plate, a filter installation wall, and a fan support, which are connected to each other with rivets or screws, etc., and assembled.

JP 2001-70902 A

At the points where the components of the plenum box are connected to each other, it is necessary to form bent ends for rivets or screws. Then, gaps between the ends must be sealed with a sealant to prevent air from leaking through the box. However, the work of providing such sealant increases the number of steps required to assemble the air shower device. There is also the problem that air leaks during use in areas where the sealant is insufficient (poor sealing). In particular, when there are many components with complex shapes, more steps are required and the problem of air leakage becomes more pronounced.

The present invention aims to provide an air shower device that reduces the amount of work required to attach an air filter to a wall member that surrounds an air shower room, in which the air filter is placed inside the wall member.

One aspect of the present invention is an air shower apparatus for blowing air onto an object to be treated in an air shower room, comprising:
a plurality of wall members which form an outer frame of the air shower apparatus and are connected to each other to surround the air shower room, at least a first wall member among the wall members having an outer wall which forms the outer frame, and an inner wall which is disposed at a distance from the outer wall to form a dust removal chamber between the outer wall and the inner wall and to partition the dust removal chamber and the air shower room;
an air filter disposed in the dust removal chamber and configured to capture fine particles in the air;
a fan that is disposed in the dust removal chamber and takes in air from within the air shower chamber through an air intake port provided in the inner wall, passes the air through the air filter, and sends the air into the air shower chamber through an air outlet provided in the inner wall;
a filter fixing member attached to a wall surface of the wall facing the dust removal chamber, the filter fixing member having an air introduction section having an introduction wall section that forms an introduction space for introducing air between the wall surface and the air introduction section, and an air guide section that guides air in the introduction space to the air filter and has an induction wall section that forms an induction space that is open downstream in the air flow direction, the air filter being attached to the opening;
The filter fixing member is characterized in that the air introduction portion and the air guide portion are integrally formed.

The filter fixing member is preferably a foamed resin molded body.

It is preferable that the device further includes a circumferential reinforcing member that covers the end face of the opening end so as to be sandwiched between the downstream opening end of the guide wall and the air filter.

The introduction wall portion is formed so that air flows along the wall surface within the introduction space,
The guide wall portion is preferably formed so that air flows within the guide space in a normal direction to the wall surface.

The fan is disposed to blow air toward the introduction space,
The introduction wall preferably has an inclined wall extending at an angle with respect to the wall surface so as to approach the wall surface as the air advances in a flow direction within the introduction space.

the filter fixing member is attached to the wall surface of the outer wall such that the air filter is disposed opposite the air outlet,
With regard to the length in the normal direction of the wall surface, it is preferable that the distance between the wall surface and the air filter is equal to or less than half the length of the end portion of the introduction wall portion on the side where the fan is disposed.

Another aspect of the present invention is a method for manufacturing an air shower apparatus for blowing air onto an object to be treated in an air shower room, comprising the steps of:
Assembling the air shower apparatus body;
attaching the filter fixing member to the wall surface of the first wall member of the air shower apparatus body;
and attaching the air filter to the filter fixing member.
The air shower apparatus main body comprises the plurality of wall members and the fan, and preferably the reinforcing member, of the above-mentioned one aspect, but does not comprise the air filter and the filter fixing member of the above-mentioned one aspect.

The air shower device described above reduces the labor required to attach the air filter to the wall member.

FIG. 2 is an exploded perspective view of the air shower device. FIG. 2 is a diagram illustrating the configuration of an air shower device. 13 is a front view showing the filter fixing member as viewed from the downstream side in the airflow direction. FIG. 13 is a rear view showing the filter fixing member as viewed from the upstream side in the airflow direction. FIG. 4 is a cross-sectional view taken along line AA in FIG. 3.

The air shower apparatus of the present invention will be described in detail below.
Fig. 1 is an exploded perspective view of the air shower apparatus of the present embodiment, and Fig. 2 is a diagram for explaining the configuration of the air shower apparatus of the present embodiment.
The air shower apparatus 10 of this embodiment is an apparatus that blows air onto a user, who is the object to be treated, who enters an air shower room 24, to remove particles and smaller fine particles adhering to the user's clothing and hair. The air shower apparatus 1 is installed, for example, at the entrance to a clean room in a facility where semiconductor manufacturing, medical care, food manufacturing and processing, etc. are carried out. The air shower apparatus 10 is set upright on an installation surface.

The air shower device 10 comprises three wall members, an air filter 30, a circulation fan 23, a filter fixing member 28, and door sections 20 and 21.

The three wall members form the outer frame of the air shower device 10 and are connected to each other to surround the air shower room 24 from the sides and above, and have a first side wall portion 11 (first wall member), a second side wall portion 16, and a ceiling wall portion 18. The air shower room 24 is surrounded by the first side wall portion 11 (first wall member), the second side wall portion 16, the ceiling wall portion 18, the installation surface, and the doors 20 and 21.

The first side wall 11 is a hollow member having an outer wall 11a forming the outer frame of the air shower device 10, an inner wall 11b arranged at a distance from the outer wall 11a to form a dust removal chamber 11c between the outer wall 11a and the inner wall 11b and to separate the dust removal chamber 11c and the air shower chamber 24, and a pair of side walls 11d and 11e connecting the outer wall 11a and the inner wall 11b. In addition to the dust removal chamber 11c, an upper space 11h is formed between the outer wall 11a and the inner wall 11b, and a partition plate 11f is arranged to separate the dust removal chamber 11c and the upper space 11h. In addition, a partition plate 11g is arranged between the outer wall 11a and the inner wall 11b to separate the dust removal chamber 11c into upper and lower two chambers, an upstream dust removal chamber 11c1 and a downstream dust removal chamber 11c2.
The door portion 20 is located in one of the two openings (the front side of FIG. 1 ) formed by the first side wall portion 14, the second side wall portion 16, and the ceiling wall portion 18, and the door portion 21 is located in the other of the two openings (the back side of FIG. 1 ).

An air intake 26 is provided on the inner wall 11b of the first side wall portion 11 to draw in the air sprayed into the air shower chamber 24 through the punker louver 34 that constitutes the air outlet, and a pre-filter 27 is arranged in the upstream dust removal chamber 11c1 to remove some of the fine particles in the air drawn in from the air intake 26.

The downstream dust removal chamber 11c2 of the first side wall portion 14 further includes a filter fixing member 28, a circulation fan 23, and an air filter 30 that purifies the air introduced between the filter fixing member 28 and the outer wall 11a using the circulation fan 23.

The circulation fan 23 is connected to the filter fixing member 28 in the upstream dust removal chamber 11c1 with a gasket or rubber flange sandwiched between the filter fixing member 28 and the circulation fan 23. That is, the height position of the partition plate 11g is located between the filter fixing member 28 and the circulation fan 23. The circulation fan 23 takes in air from the air shower chamber 24 through the intake port 26, passes the air through the air filter 30, and sends it into the air shower chamber 24 from the outlet. The inner wall 11b of the first side wall portion 14 is provided with a punker louver 34 that constitutes multiple outlets. The circulation fan 23 draws in air from the upstream dust removal chamber 11c1 and introduces the air to the filter fixing member 28. Since the cross section of the outlet is narrowed, the pressure in the downstream dust removal chamber 11c2 of the first side wall portion 14 is high. Therefore, air is forcefully ejected from the punker louver 34.

The air filter 30 is a high-performance air filter such as a HEPA filter (High Efficiency Particulate Air Filter). The high-performance air filter has a collection efficiency of 95% to 99.99% by the counting method (JIS B 9927, JIS Z 8901 13 types 0.3 μm DOP) for target particles with a particle size of 1 μm or less, and a collection efficiency of 99% or more by the following measurement method for a target particle size of 2.5 μm. That is, air dust particles with a particle size of 2.5 μm are made to flow through the air filter 30, the number of particles that have passed through is counted, and the number is multiplied by the density of the air dust particles, 3 g/cm ^3, to obtain the mass of the transmitted particles. Furthermore, the mass of the particles that have passed through the air filter 30 is obtained from the particle concentration before passing through. The collection efficiency (%) is calculated from the ratio of these two masses. The air filter 30 may be made of, for example, glass fiber paper made from fine glass fibers, charged nonwoven fabric made by electrorel processing fine synthetic fibers, or a PTFE (polytetrafluoroethylene) membrane made by stretching a PTFE resin membrane, which is pleated using a separator, ribbon (hot melt resin) or embossing, and fixed to a resin or metal filter frame with a sealant such as urethane resin.

The second side wall portion 16 is disposed opposite the first side wall portion 14 with the air shower chamber 24 interposed therebetween.
The ceiling wall portion 18 connects the upper ends of the first side wall portion 14 and the second side wall portion 16 to each other.
The ceiling wall portion 18 forms a ceiling surface of the air shower room 24. An illumination lamp 19 is provided on the ceiling surface of the air shower room 24 of the ceiling wall portion 18.
The second side wall portion 16 and the ceiling wall portion 18 are hollow members similar to the first side wall portion 11 .
The first side wall 11, the second side wall 16, and the ceiling wall 18 are members made of, for example, a bonded steel plate. The first side wall 14, the second side wall 16, the ceiling wall 18, and the door sections 20 and 21 are provided with connecting sections to enable assembly.
The door sections 20 and 21 are opening and closing types through which users can enter and exit.

In such an air shower device 10, when a user opens the door 20 and enters the air shower room 24, the user closes the door 20. A switch (not shown) is activated, and the circulation fan 23 is operated. This causes air to be sprayed from the puncture louver 34. Fine particles that have fallen off the user's clothes or hair are sucked in through the air intake 26. Some of the fine particles contained in the air are removed by the pre-filter 27 and introduced into the space between the filter fixing member 28 and the outer wall 11a via the circulation fan 23. The fine particles in the introduced air are filtered by the air filter 30, and clean air is sprayed from the puncture louver 34. During the air spray, the user is exposed to the sprayed air while changing the direction of the air in the air shower room 24 as necessary. In this way, fine particles attached to the user's clothes or hair are removed. Each air spray continues for several tens of seconds, for example 20 seconds, at a wind speed of 25 m/s or more. The operation of the air shower device 10 is the same as that of known air shower devices. For example, after a user opens door 20 and enters the room, doors 20 and 21 are locked, and the user cannot open door 21 and leave the room unless he or she takes an air shower.

(Filter fixing member)
Next, the filter fixing member 28 will be described.
Fig. 3 is a front view of the filter fixing member 28 as viewed from the downstream side of the airflow direction Y (see Fig. 5). Fig. 4 is a rear view of the filter fixing member 28 as viewed from the upstream side of the airflow direction Y. Fig. 5 is a cross-sectional view taken along line A-A in Fig. 3.

The filter fixing member 28 is attached to the wall surface of the outer wall 11a facing the downstream dust removal chamber 11c2. The filter fixing member 28 has an air introduction section 51 and an air guide section 55.

The air introduction section 51 has an introduction wall section 53 that forms an introduction space 52 (see Figures 4 and 5) for introducing air between the outer wall 11a and the introduction wall section 53. In the illustrated example, the introduction space 52 is a space having a substantially triangular prism shape with the depth direction in Figure 5 as the height direction, and the introduction wall section 53 has a shape that contacts the top surface, bottom surface, and one side surface of the triangular prism.

The air guide section 55 has a guide wall section 57 that guides the air in the introduction space 52 to the air filter 30 and forms an open guide space 56 downstream in the air flow direction. In the illustrated example, the guide space 56 is a space having a substantially rectangular prism shape with the Y direction in FIG. 5 as the height direction, and the guide wall section 57 has a U-shape in cross section perpendicular to the Y direction that contacts three of the four sides of the rectangular prism on the upstream side in the Y direction, and has a rectangular shape that contacts the four sides of the rectangular prism on the downstream side in the Y direction. The air filter 30 is attached to the opening end 58 of the open guide wall section 57. The opening end 58 is a rectangular part when viewed in the Y direction that surrounds the opening. The opening end 58 is connected to the inclined wall section 54 (described later) of the introduction wall section 53 at an end located on one of the four sides of the rectangular opening end 58.

The end 60 (see Figures 4 and 5) of the guide wall 57 on the opposite side of the airflow direction Y from the opening end 58 has the above-mentioned U-shape that opens toward the introduction space 52 so that the guide space 56 communicates with the introduction space 52, and the filter fixing member 28 forms a connecting wall 70 that is connected to the side portions 54a, 54b (described later) of the introduction wall 53 so that both ends of the U-shape are extended. That is, the filter fixing member 28 has a U-shaped connecting wall 70 on the wall surface side of the outer wall 11a, in which the guide wall 57 and the introduction wall 53 are connected to surround the guide space 56 and the introduction space 52. A plurality of metal fittings 61 that are fastened to the outer wall 11a with bolts and nuts are attached to the end of this connecting wall 70 on the outer wall 11a side. The metal fittings 61 are fastened to the outer wall 11a with bolts and nuts, so that the filter fixing member 28 is attached to the outer wall 11a.

The filter fixing member 28 is a member in which the air introduction section 51 and the air guide section 55 are integrally formed. Therefore, unlike the above-mentioned plenum box, there is no need to form bent ends for driving rivets or screws in the parts of the components that are connected to each other, and the work of driving rivets or screws can be omitted. Furthermore, with the filter fixing member 28, there are no gaps between the components as with the above-mentioned plenum box, so there is no need to seal with a sealant, and the work of providing a sealant can be omitted. Therefore, the labor required to fix the air filter 30 to the outer wall 11a can be significantly reduced. Furthermore, since the filter fixing member 28 does not have gaps that can be sealed with a sealant, there is no air leakage during use due to poor sealing, as with the above-mentioned plenum box.

The filter fixing member 28 is preferably a resin molded body, and particularly preferably a foamed resin molded body. Such a filter fixing member 28 is lightweight, so when assembling the air shower device 10, it is easy to carry the filter fixing member 28 into the cavity of the wall member 11 and attach it to the outer wall 11a while supporting it so that it does not slip off. In addition, the filter fixing member 28 can be easily manufactured as a one-piece molded product, reducing costs. Preferred foamed resins include polystyrene, polyurethane, and polyolefins such as polyethylene and polypropylene.

It is preferable that the air shower device 10 further includes a reinforcing member 63 (see Figs. 3 and 5). The reinforcing member 63 is a rectangular member that covers the end face of the opening end 38 (the face facing the downstream side in the Y direction in Fig. 5) so as to be sandwiched between the opening end 58 and the air filter 30. It is preferable that the reinforcing member 63 is a flat-shaped member extending along a plane perpendicular to the Y direction as shown in Fig. 5, but it is also preferable that, for example, in the portion located on three sides of the rectangular reinforcing member 63 excluding the side on the side of the inclined wall portion 54, the portion extends further upstream in the Y direction from the outer peripheral end of the flat shape along the guide wall portion 57, so that the cross section perpendicular to the circumferential direction of the reinforcing member 63 has an L-shape. By interposing such a reinforcing member 63 between the air filter 30 and the filter fixing member 28, the pressing force of the air filter 30 can be received by the entire end surface of the filter fixing member 28 when the air filter 30 is attached to the filter fixing member 28, and the strength of the filter fixing member 28 can be ensured, particularly when the filter fixing member 28 is a foamed resin molded body. Therefore, when a pressing member arranged on the downstream side of the air filter 30 is fastened to the open end 58 of the filter fixing member 28 with a bolt and a nut (not shown) so that the air filter 30 moves upstream in order to press the air filter 30 against the filter fixing member 28, damage to the filter fixing member 28, such as the occurrence of cracks in the guide wall portion 57 originating from a bolt fixing hole 58a (see FIG. 3) to which a bolt provided in the guide wall portion 57 extending in the Y direction is fixed, can be suppressed. From this point of view, the reinforcing member 63 is preferably a metal member such as stainless steel. The holding member 81 is made up of two linearly extending members with an L-shaped cross section arranged parallel to each other, each having a through hole 81a (see FIG. 3) at both ends through which a bolt passes. The pressure on the air filter 30 is adjusted by adjusting the amount of tightening of the nut on the bolt fixed to the bolt fixing hole 58a. The nut is arranged downstream in the Y direction from the portion of the holding member 81 through which the bolt passes. The vertical position of the holding member 81 shown in FIG. 5 is offset from the vertical position of the bolt fixing hole 58a.

The introduction wall 53 is preferably used when the air flows in the introduction space 52 along the wall surface of the outer wall 11a (X direction in FIG. 5), and the guide wall 57 is preferably used when the air flows in the guide space 56 in the normal direction of the wall surface of the outer wall 11a (Y direction in FIG. 5). The introduction wall 53 and the guide wall 57 have complex shapes to form such an air flow, but as described above, the air introduction section 51 and the air guide section 55 are integrally formed, so there is no gap between the walls 53 and 57, and no sealant is required.

As described above, the circulation fan 23 is arranged to blow air toward the introduction space 52. The introduction wall portion 53 has an inclined wall portion 54 that extends at an angle relative to the wall surface of the outer wall 11a so as to approach the wall surface of the outer wall 11a as the air flows in the introduction space 52. Since the air flow path is smoothly narrowed in this way, the resistance of the air sent from the circulation fan 23 is small, and the flow rate of the air blown out from the punker louvers 34, 35 can be increased. In addition, since the size of the opening of the introduction space 52 on the circulation fan 23 side can be secured, a relatively large circulation fan 23 with a large air volume can be used, which contributes to increasing the flow rate of the air blown out from the punker louvers 34, 35. On the other hand, the introduction wall portion 53 has side portions 54a, 54b of a substantially triangular shape on both sides of the inclined wall portion 54 in the depth direction of FIG. 5, and has a complex shape, but the filter fixing member 28 is a member in which the air introduction portion 51 and the air guide portion 55 are integrally formed, so there is no need to provide a sealant.

As described above, the filter fixing member 28 is attached to the wall surface of the outer wall 11a so that the air filter 30 is disposed opposite the puncture louver 34. With respect to the length in the normal direction of the wall surface, it is more preferable that the distance d (see FIG. 5) between the end of the filter fixing member 28 on the wall surface side and the air filter 30 is less than half the length D (see FIG. 5) of the end of the introduction wall portion 53 on the side where the circulation fan 23 is disposed, and it is preferable that D/10≦d≦D is satisfied. In this way, the short distance d makes it easier to ensure the strength of the introduction wall portion 57, which is particularly effective when the filter fixing member 28 is a foamed resin molded body. In addition, when the interval (width of the wall member 11) between the outer wall 11a and the inner wall 11b is shortened to save space, the air filter 30 can be prevented from contacting the puncture louver 34. The above interval is preferably 150 to 350 mm, for example, 200 mm.

(Manufacturing method of air shower device)
Next, a method for manufacturing the air shower apparatus will be described.
The method of manufacturing the air shower apparatus includes the steps of assembling the air shower apparatus body, attaching the filter fixing member to the wall surface of the first wall member of the air shower apparatus body, and attaching the air filter to the filter fixing member.

The air shower device body includes a plurality of wall members and a fan. In other words, the air shower device body refers to the part of the air shower device excluding the filter fixing member and the air filter. The air shower device is a device that blows air onto an object to be treated in an air shower room.
The multiple wall members form an outer frame of the air shower apparatus and are connected to each other to surround the air shower chamber. The first wall member among the wall members has an outer wall forming the outer frame and an inner wall arranged at a distance from the outer wall to form a dust removal chamber between the outer wall and the inner wall and to separate the dust removal chamber and the air shower chamber. The multiple wall members have, for example, the first side wall portion 11 (first wall member), the second side wall portion 16, and the ceiling wall portion 18 described above.
The fan is disposed in the dust removal chamber and takes in air from within the air shower chamber through an air intake provided on the inner wall, passes the air through an air filter, and sends the air into the air shower chamber through an air outlet provided on the inner wall. The fan may be, for example, the circulation fan 23 described above.

In the step of assembling the air shower device body, multiple wall members are connected to each other to surround the air shower room.

The filter fixing member is a member attached to the wall surface of the wall facing the dust removal chamber. The filter fixing member has an air introduction section having an introduction wall section that forms an introduction space for introducing air between the filter fixing member and the wall surface, and an air guide section that guides the air in the introduction space to the air filter and has a guide wall section that forms an introduction space that opens downstream in the air flow direction, and the air filter is attached to the opening. The filter fixing member is a member in which the air introduction section and the air guide section are integrally formed. The filter fixing member is, for example, the filter fixing member 28 described above. The above-mentioned multiple metal fittings 61 are attached to the above-mentioned connection wall section 70 of the filter fixing member.
The step of attaching the filter fixing member to the wall surface of the first wall member of the air shower apparatus body (e.g., the outer wall 11a) is specifically performed by fastening the metal fittings 61 to the outer wall 11a with bolts and nuts. The filter fixing member 28, the metal fittings 61, and the bolts and nuts (not shown) constitute a filter fixing member attachment set.
It is preferable to provide the above-mentioned reinforcing member 63 on the downstream side in the Y direction of the filter fixing member.

The air filter is disposed in the dust chamber 11c and serves to collect fine particles in the air. The air filter is, for example, the air filter 30 described above.
In the step of attaching the air filter to the filter fixing member, the air filter 30 is attached to the open end 58 of the filter fixing member 28, for example, using the pressing member 81, bolts, and nuts described above. According to one embodiment, as shown in FIG. 5, the inclined wall portion 54 of the filter fixing member 28 preferably has a thick portion 54c formed to be thick so that the Y-direction length increases as it advances in the X-direction. The operation of pressing the pressing member 81 and the air filter 30 against the filter fixing member 28 using bolts and nuts while maintaining the state in which they are arranged in a predetermined position relative to the filter fixing member 28 must be performed, for example, while pressing the air filter 30 against the outer wall 11a so that it does not shift downward due to its own weight. It is difficult to maintain the pressing member 81 in a predetermined position while pressing it, and further to attach the bolts and nuts to the pressing member 81. In such an operation, even if care is taken, the air filter 30 may shift downward due to its own weight. If the air filter 30 is displaced downward, the corners of the frame of the air filter 30 come into contact with the inclined wall of the filter fixing member 28, and the inclined wall may be dented or have holes, which may cause damage, particularly when the filter fixing member 28 is a foamed resin molded body. Since the inclined wall 54 has the thick wall portion 54c, for example, the upper end of the thick wall portion 54c can be used as a base for the air filter 30, and the air filter 30 can be supported from below by the thick wall portion 54c. Therefore, when the air filter 30 is pressed, it is not necessary to press the air filter 30 against the outer wall 11a so as not to displace downward, and the air filter 30 can be easily pressed against the filter fixing member 28. Also, when the filter fixing member 28 is a foamed resin molded body, the inclined wall portion 54 is prevented from being easily damaged by contact with the air filter 30. From this viewpoint, the position of the upper end of the thick portion 54c is preferably aligned with the position of the lower end of the air filter 30 at the mounting position of the air filter 30 (the position of the air filter 30 shown in Figs. 3 and 5), and more preferably has a flat surface in the horizontal direction. The thick portion 54c may be provided in at least a part of the area of the inclined wall portion 54 in the depth direction in Fig. 5, but from the viewpoint of suppressing damage to the filter fixing member 28, it is preferably provided in more than half of the area of the inclined wall portion 54 in the depth direction in Fig. 5, and more preferably in the entire area. Here, for example, when the air filter 30 is attached to the plenum box, in order to support the air filter 30 from below until the attachment to the filter fixing member 28 is completed, a work such as welding a base (not shown) on which the air filter 30 is placed to the outer wall 11a is required, which is a large work burden. The filter fixing member 28, the pressing member 81, the bolts and the nuts constitute a filter fixing set. Furthermore, the filter fixing member 28, the metal fitting 61, the bolts and nuts for fastening the metal fitting 61, and the pressing member 81, and the bolts and nuts for fastening the pressing member 81 constitute a filter fixing member set.

As described above, the filter fixing member is attached to the first wall member, and then the air filter is attached to the filter fixing member. After that, the above-mentioned partition plates 11f, 11g are provided inside the first wall member, and the side wall 11d of the first wall member is closed, whereby the air shower device body is assembled and the air shower device is manufactured.

The filter fixing member 28 can be used not only in air shower devices configured to blow air onto a person as the object to be treated, but also in air shower devices configured to blow air onto an object as the object to be treated. This type of air shower device has a relatively small air shower room and is also called a pass box.

The dust removal chamber 11c is not limited to the above-mentioned embodiment, and may be formed, for example, by a space that communicates with the internal cavity of the ceiling wall portion 18. In this case, it is preferable that the ceiling wall portion 18 is provided with a punker louver (not shown) having multiple outlets for spraying the clean air from the inside into the air shower room 24.

The air shower device of the present invention has been described in detail above, but the present invention is not limited to the above embodiment, and various improvements and modifications may be made without departing from the spirit of the present invention.

10 Air shower device 11 Wall member 11a Outer wall 11b Inner wall 11c Dust removal chamber 11c1 Upstream dust removal chamber 11c2 Downstream dust removal chamber 11d, 11e Side wall 11f, 11g Partition plate 11h Upper space 14 First side wall portion (first wall member)
Reference Signs List 16 Second side wall portion 18 Ceiling wall portion 20, 21 Door portion 23 Circulation fan 24 Air shower room 26 Air intake port 27 Pre-filter 28 Filter fixing member 30 Air filter 34 Punker louver 40 Connection portion 51 Air introduction portion 52 Introduction space 53 Introduction wall portion 54 Inclined wall portions 54a, 54b Side portion 54c Thick portion 55 Air induction portion 56 Induction space 57 Induction wall portion 58 Open end 58a Bolt fixing hole 60 End portion 61 Metal fitting 63 Reinforcement member 70 Connection wall portion

Claims (5)

An air shower device for blowing air onto an object to be treated in an air shower room,
a plurality of wall members which form an outer frame of the air shower apparatus and are connected to each other to surround the air shower room, at least a first wall member among the wall members having an outer wall which forms the outer frame, and an inner wall which is disposed at a distance from the outer wall to form a dust removal chamber between the outer wall and the inner wall and to partition the dust removal chamber and the air shower room;
an air filter disposed in the dust removal chamber and configured to capture fine particles in the air;
a fan that is disposed in the dust removal chamber and takes in air from within the air shower chamber through an air intake port provided in the inner wall, passes the air through the air filter, and sends the air into the air shower chamber through an air outlet provided in the inner wall;
a filter fixing member attached to a wall surface of the outer wall facing the dust removal chamber, the filter fixing member having an air introduction section having an introduction wall portion forming an introduction space for introducing air between the wall surface and the filter, and an air guide section having an introduction wall portion that guides air in the introduction space to the air filter and forms an introduction space that is open downstream in the air flow direction, the air filter being attached to the opening;
the filter fixing member is a member in which the air introduction portion and the air guide portion are integrally formed,
13. An air shower apparatus, wherein the filter fixing member is a foamed resin molding . 2. The air shower apparatus according to claim 1 , further comprising a circumferential reinforcing member that covers an end face of the downstream opening end of the guide wall and is sandwiched between the air filter and the downstream opening end of the guide wall. the introduction wall portion is formed so that air flows within the introduction space along the wall surface of the outer wall ,
3. The air shower apparatus according to claim 1, wherein the guide wall portion is formed so that air flows through the guide space in a direction normal to the wall surface of the outer wall. The fan is disposed to blow air toward the introduction space,
4. The air shower apparatus according to claim 3 , wherein the introduction wall portion has an inclined wall portion extending at an angle with respect to the wall surface so as to approach the wall surface as the air advances in a flow direction within the introduction space. the filter fixing member is attached to the wall surface of the outer wall such that the air filter is disposed opposite the air outlet,
5. The air shower apparatus according to claim 4, wherein a distance between an end of said filter fixing member on the wall surface side and said air filter in a normal direction of said wall surface is equal to or less than a length of an end of said introduction wall portion on a side where said fan is disposed.

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