JP7562730B2 - Driving device, exposure device, exposure method, and article manufacturing method - Google Patents

Description

The present invention relates to a drive device, an exposure device, an exposure method, and a method for manufacturing an article.

In the manufacturing process of semiconductor devices, liquid crystal display devices, and the like, exposure apparatuses having multiple optical elements are sometimes used. Patent Document 1 discloses a method of reducing aberration by adjusting the position of optical elements using a fluid.

JP 2000-357651 A

Here, even if the adjustment of the optical elements to reduce aberration is performed under the same conditions, the same amount of aberration change may not be obtained because the members that adjust the optical elements may undergo unintended deformation when adjusting the optical elements.

The present invention aims to provide a drive device that is advantageous for adjusting optical elements.

In order to achieve the above-mentioned object, one aspect of the present invention provides a driving device that applies a force to a holding member that holds an optical element to move or deform the optical element, comprising a base portion , a deformation portion, and a pressure adjustment portion that adjusts the pressure in a space surrounded by the deformation portion and the base portion, wherein the deformation portion has a portion that deforms when the pressure adjustment portion adjusts the pressure in the space, and the deformed portion includes a contact region that is an area that applies a force to the holding member by deforming, and a non-contact region that does not contact the holding member, and the rigidity in the contact region in the direction in which the force is applied to the holding member is higher than the rigidity in the same direction in at least a portion of the non- contact region.

Further objects and other aspects of the present invention will become apparent from the embodiments described below with reference to the drawings.

The present invention provides a driving device that is advantageous for adjusting optical elements.

1 is a schematic diagram showing the configuration of an exposure apparatus in a first embodiment. This is an example in which the aberration of the projection optical system is adjusted by a driving device. FIG. 2 is a diagram showing the internal configuration of a projection optical system in the first embodiment. FIG. 2 is a diagram illustrating an example of the configuration of a drive device according to the first embodiment. FIG. 2 is a diagram showing an example of the internal configuration of a projection optical system in the first embodiment. 5 is a flowchart for performing an exposure process in the first embodiment. FIG. 13 is a diagram showing a configuration of a drive device according to a second embodiment. FIG. 13 is a diagram showing the internal configuration of a projection optical system according to a third embodiment. 10 is a flowchart of a method for manufacturing an article in a fourth embodiment.

Below, an embodiment of the present invention will be described with reference to the drawings. Note that the following embodiment does not limit the invention according to the claims. Although the embodiment describes multiple features, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined in any manner. Furthermore, in the drawings, the same reference numbers are used for the same or similar configurations, and duplicate explanations will be omitted.

In addition, in this specification and drawings, directions are basically indicated by an XYZ coordinate system in which the vertical direction is the Z axis and the horizontal plane perpendicular to the vertical direction is the XY plane, with each axis being orthogonal to each other. However, if an XYZ coordinate system is shown in each drawing, that coordinate system takes precedence.

The specific configurations of each embodiment are described below.

First Embodiment
1 is a schematic diagram showing the configuration of an exposure apparatus 1 in this embodiment. In this embodiment, the exposure apparatus 1 is a projection exposure apparatus that exposes a pattern of an original (mask, reticle) onto a substrate via a projection optical system by a step-and-repeat method or a step-and-scan method. Note that, although an example of a projection exposure apparatus will be described in this embodiment, any apparatus that adjusts aberration by adjusting optical elements may be used, and there is no particular limitation on the type of apparatus.

The exposure apparatus 1 has an illumination optical system 12 that irradiates light, a projection optical system 15, a reticle stage 14 that holds a reticle 13, a stage 17 that can move in the XY directions while holding a substrate 16, and a control unit 11. The reticle 13 is an original plate on which a pattern (e.g., a circuit pattern) to be transferred is formed of chrome on the surface of, for example, quartz glass. The substrate 16 is, for example, single crystal silicon, and has a photosensitive material (resist) applied to its surface. The control unit 11 is part of a drive device described below, and controls the drive of the drive device. The control unit 11 may also control each part of the exposure apparatus 1.

In the exposure apparatus 1, exposure light from a light source (not shown) passes through an illumination optical system 12 and illuminates a reticle 13 held on a reticle stage 14. The light that passes through the reticle 13 passes through a projection optical system 15 and is irradiated onto a substrate 16. At this time, light from the pattern formed on the reticle 13 is imaged on the surface of the substrate 16. The exposure apparatus 1 exposes a shot area on the substrate 16 in this manner, and performs similar exposure on each of the multiple shot areas.

Figure 2 shows an example of adjusting the aberration of the projection optical system 15 by a driving device. A plurality of optical elements (lenses) are provided inside the lens barrel 103 of the projection optical system 15. Light from the illumination optical system 12 is incident on the optical elements. Figure 2(a) is a diagram of one of the plurality of optical elements provided in the projection optical system 15 as viewed from the object surface side of the projection optical system. At least one optical element 101 of the plurality of optical elements provided in the projection optical system 15 is held by a holding member 102. The holding member 102 has a holding portion 102a that holds the optical element 101, and an elastic hinge 120. The elastic hinge 120 has a hinge portion 104 and a convex portion 105.

The optical characteristics of each of the optical elements included in the projection optical system 15 may change due to factors such as the absorption of heat by the exposure light. This change in optical characteristics causes aberration in the projection optical system 15. The projection optical system 15 has a driving device 110 for changing the generated aberration, and the control unit 11 controls the driving device 110 to move at least one of the optical elements included in the projection optical system 15, so that the optical element 101 is moved in a direction (X-axis direction or Y-axis direction) perpendicular to the optical axis (Z-axis direction) of the projection optical system 15. Note that the aberration of the projection optical system 15 also changes due to the deformation of the optical element 101, so the control unit 11 may control the optical element 101 to be deformed by applying a force from the driving device 110. Since the aberration of the projection optical system 15 changes due to the movement or deformation of the optical element 101, the control unit 11 controls the amount of movement or deformation of the optical element 101 by the driving device 110 so as to reduce the aberration of the projection optical system 15.

The driving device 110 has a deformation part 106, a base part 107, a flow path 108, and a pressure adjustment part 109. The space formed by the deformation part 106 and the base part 107 is connected to the pressure adjustment part 109 by the flow path 108. The pressure adjustment part 109 pressurizes or depressurizes the space formed by the deformation part 106 and the base part 107 by supplying or recovering a fluid. The deformation part 106 has a part that deforms when the pressure adjustment part 109 adjusts the pressure of the space. The deformation part 106 is also called a diaphragm. When the space formed by the deformation part 106 and the base part 107 is pressurized by the pressure adjustment part 109, the deformed part of the deformation part 106 deforms in the +Y direction centered on the center of the longitudinal direction of the deformation part 106 in the X-axis direction. This is synonymous with the part of the deformation part 106 that deforms deforms so that the space expands. Here, when pressurized, the pressure in the space becomes higher than atmospheric pressure. Depending on the shape of the deformation section 106, the center of the deformation in the X-axis direction of the deformation section 106 may not be the center of deformation, and the deformed portion of the deformation section 106 may deform in the +Y direction around a region near the center of the X-axis direction of the deformation section 106. On the other hand, when the space formed by the deformation section 106 and the base section 107 is depressurized by the pressure adjustment section 109, the deformed portion of the deformation section 106 deforms in the -Y direction around the center or a region near the center of the X-axis direction of the deformation section 106. This is synonymous with the deformation of the deformed portion of the deformation section 106 deforming so that the space contracts. Here, in the example of FIG. 2, the pressure adjustment section 109 is provided on the outside of the lens barrel 103, but the position of the pressure adjustment section 109 is not particularly limited.

When the deforming portion of the deformation unit 106 is deformed in the +Y direction due to pressure from the pressure adjustment unit 109, the deformation unit 106 comes into contact with the convex portion 105 of the elastic hinge 120 and pushes the elastic hinge 120 in the +Y direction. When the elastic hinge 120 is pushed in the +Y direction, the optical element 101 held by the holding unit 102a is deformed or moves in the +Y direction. As described above, the control unit 11 controls the driving device 110 to move or deform the optical element 101, which changes the aberration of the projection optical system 15.

Here, by providing a convex portion 105 on the elastic hinge 120 and contacting the convex portion 105 with the deformation portion 106, the reproducibility when the deformation portion 106 applies a force to the elastic hinge 120 can be improved. For example, if the elastic hinge 120 does not have the convex portion 105 and the hinge portion 104 and the deformation portion 106 are in direct contact with each other, the contact area between the hinge portion 104 and the deformation portion 106 when the deformation portion 106 applies a force becomes large. As a result, the flatness and surface roughness of the hinge portion 104 and the deformation portion 106 respectively affect the direction in which the force is applied. In order to reduce this effect, the convex portion 105 is provided on the elastic hinge 120, reducing the area of contact between the deformation portion 106 and the elastic hinge 120, thereby reducing the effect of the flatness and surface roughness of the contacting members, and reducing the variation in the direction in which the force from the deformation portion 106 is applied. By reducing the variation in the direction in which the force from the deformation portion 106 is applied, the variation in the amount of movement or deformation of the optical element 101 can be reduced. Note that if reproducibility can be complemented by another method, it is not necessary to provide the protrusion 105 on the elastic hinge 120. In addition, it is preferable that the protrusion 105 is made of a material that does not easily deform when a force is applied from the deformation portion 106, such as ceramics, iron, or stainless steel.

2B is an enlarged view of the first region 1000 shown in FIG. 2A. When the deforming portion of the deformation portion 106 deforms in the +Y direction and comes into contact with the convex portion 105, and the holding member 102 is pressed in the +Y direction, the reaction force from the convex portion 105 may cause the deformation portion 106 to deform unintentionally in the -Y direction as shown in FIG. 2B. When the deformation portion 106 deforms due to the reaction force, the concave surface of the deformation portion 106 comes into contact with the convex surface of the convex portion 105, and the contact position between the deformation portion 106 and the convex portion 105 shifts from the expected position, and the direction in which the deformation portion 106 applies force to the holding member 102 shifts. As a result, the actual movement or deformation amount of the optical element 101 differs from the desired movement or deformation amount of the optical element 101.

Figure 3 is a diagram showing the internal configuration of the projection optical system 15 in this embodiment. The control unit 11 in this embodiment controls the amount by which the optical element 101 is moved or deformed by driving the driving device 210 so as to reduce the aberration of the projection optical system 15. Note that in this embodiment, an example is shown in which the control unit 11, which is part of the driving device 210, controls the driving device 210, but the driving device 210 may be controlled by an external control device. In addition, the portion of the deformation unit 206 that deforms is deformed by pressure adjustment (fluid movement) by the pressure adjustment unit 109.

The deforming portion of the deformation unit 206 of the driving device 210 of this embodiment has a contact area that contacts the holding member 102 to apply force to the holding member 102, and a non-contact area that does not contact the holding member 102. The rigidity of the contact area in the direction in which force is applied to the holding member 102 (Y-axis direction) is higher than the rigidity of at least a portion of the non-contact area that does not contact the holding member 102 in the direction in which force is applied to the holding member 102. Here, the contact area where the deformation unit 206 contacts the holding member 102 is also the area where the deformation unit 206 presses the holding member 102. The non-contact area where the deformation unit 206 does not contact the holding member 102 is also the area where the deformation unit does not press the holding member 102.

3A is a diagram of one of the optical elements included in the projection optical system 15 in this embodiment, viewed from the object surface side of the projection optical system. In the example of FIG. 3A, the thickness of the central part of the deformation part 206 in this embodiment, which is the contact area that contacts the holding member 102, is thick in the direction in which force is applied to the holding member 102 (Y-axis direction), and the thickness becomes thinner as it moves away from the central part. In other words, the thickness of the deformation part 206 becomes thinner the greater the distance from the contact area that contacts the holding member 102. In other words, the thickness of the end part, which is the non-contact area of the deformation part 206 that does not contact the holding member 102, is thin. The thick area of the deformation part 206 is difficult to deform and has high rigidity, and the thin area of the deformation part 206 is easier to deform and has low rigidity than the thick area. As a result, the rigidity of the contact area of the deformation part 206 that contacts the holding member 102 is higher than the rigidity of at least a part of the non-contact area of the deformation part 206 that does not contact the holding member 102. In this embodiment, the rigidity of the contact area refers to the rigidity of the portion including the thickness of the contact area in the Y-axis direction. In this embodiment, the rigidity of the non-contact area refers to the rigidity of the portion including the thickness of the non-contact area in the Y-axis direction.

In this embodiment, an example is shown in which the rigidity of the contact area of the deformation section 206 that contacts the holding member 102 is higher than the rigidity of at least a portion of the non-contact area of the deformation section 206 that does not contact the holding member 102. However, this example is equivalent to saying that the average value of the rigidity of the contact area of the deformation section 206 that contacts the holding member 102 is higher than the average value of the rigidity of the non-contact area of the deformation section 206 that does not contact the holding member 102.

The high rigidity of the contact area of the deformation portion 206 in contact with the holding member 102 can reduce the amount of deformation of the deformation portion 206 due to the reaction force from the holding member 102 when the deformation portion 206 presses the holding member 102. In addition, the reduction in the amount of deformation of the deformation portion 206 due to the reaction force from the holding member 102 reduces the contact area between the deformation portion 206 and the holding member 102, improving the reproducibility when the deformation portion 206 presses the holding member 102. The contact length (longitudinal length of the contact area) between the deformation portion 206 and the holding member 102 is preferably 1% or less of the longitudinal length of the deformation portion 206. In the example of FIG. 3(a), the length of the deformation portion 206 along the X direction is the longitudinal direction, and the distance between the two points where the deformation portion 206 and the base portion 107 are connected is the longitudinal length of the deformation portion 206. When this length is, for example, 100 mm, it is preferable that the contact area between the deformation portion 206 and the holding member 102 is 1% or less of 100 mm, that is, the contact is made over a length of 1 mm or less.

This allows the optical element 101 to be moved or deformed by a desired amount, and the aberration of the projection optical system 15 to be changed by a desired amount. In other words, by adjusting the optical element 101 with the driving device 210, unintended deformation of the deformation portion can be reduced, and a desired amount of aberration change or an amount of aberration change close to the desired amount of aberration change can be obtained. This is synonymous with improving the reproducibility of the amount of aberration change when adjusting the optical element 101 with the driving device 210. Here, in the example of FIG. 3, the pressure adjustment unit 109 is provided on the outside of the lens barrel 103, but the position of the pressure adjustment unit 109 is not particularly limited.

Figure 3(b) is a diagram of the driving device 210 shown in Figure 3(a) when viewed from the -X direction side. The deformation portion 206 is composed of a thin plate portion and a convex portion. The convex portion is provided based on the contact area of the thin plate portion that contacts the holding member 102. In this embodiment, the thin plate portion and the convex portion of the deformation portion 206 are integrated. This convex shape is an arch shape along the X-axis direction as shown in Figure 3(a). Also, the examples of Figures 3(a) and 3(b) are examples in which the convex portion is flat. Here, for example, if a fixing portion for fixing the deformation portion 206 is provided around the thin plate portion, the fixing portion is not included in the deformation portion 206.

The material of the deformation portion 206 is, for example, iron or stainless steel. Iron and stainless steel have good workability and are materials that can be relatively easily processed to form a convex portion in a part of the thin plate portion. In addition, since the deformation portion 206 is a member that is deformed every time the optical element 101 is adjusted, it is preferable that the material is highly durable, and iron and stainless steel are members with good durability, so they are suitable as materials for the deformation portion 206. In addition, in this embodiment, an example is shown in which the deformation portion 206 is configured such that the thin plate portion and the convex portion are integrated, but the thin plate portion and the convex portion may be separate members and the thin plate portion and the convex portion may be joined to form the deformation portion 206. When the thin plate portion and the convex portion are separate members, the thin plate portion may be formed of a material such as spring steel, for example.

The thickness of the thin plate portion of the deformation portion 206 affects the amount of deformation and durability of the deformation portion 206. The thicker the thin plate portion of the deformation portion 206, the smaller the amount of deformation of the deformation portion 206, but the better the durability. On the other hand, the thinner the thin plate portion of the deformation portion 206, the larger the amount of deformation of the deformation portion 206, but the worse the durability. The amount of deformation and durability of the deformation portion 206 are affected not only by the thickness but also by the area of the deformation portion 206. Therefore, it is preferable that the deformation portion 206 is designed taking into consideration the amount of deformation and durability. In addition, it is preferable that the thickness (length along the Y direction) of the contact area of the deformation portion 206 that contacts the holding member 102 is 3 mm or more.

The volume of the space formed by the deformation section 206 and the base section 107 also affects the accuracy of deformation of the deformation section 206, that is, the accuracy of moving or deforming the optical element 101. If the accuracy of moving or deforming the optical element 101 is a priority, it is advantageous to make the volume smaller. This is because a smaller volume of the space improves the responsiveness when the pressure is increased or decreased by the pressure adjustment section 109. On the other hand, if the volume is small, the temperature change when the pressure is changed will be large according to the gas state equation. If a temperature change occurs due to a pressure change, the optical tube 103 may be thermally deformed, causing an unexpected change in the optical characteristics. Therefore, it is preferable that the deformation section 206 and the base section 107 are designed taking into consideration the above-mentioned accuracy and temperature change.

Here, the shape of the deformation portion 206 is not limited to the example shown in FIG. 3. FIG. 4 is a diagram showing an example of the configuration of the driving device 210 in this embodiment. In the example shown in FIG. 4(a), the deformation portion 206 has a convex portion in the contact area of the thin plate portion that contacts the holding member 102, and the convex shape is an arch shape along the Z axis direction. The example shown in FIG. 4(b) is a diagram showing the driving device 210 as viewed from the object surface side of the projection optical system, and the deformation portion 206 has a convex portion in the contact area of the thin plate portion that contacts the holding member 102, and the convex shape is a rectangular shape. FIG. 4(c) is a diagram showing the driving device 210 shown in FIG. 4(b) as viewed from the -X direction side. Note that the examples shown in FIG. 4(a), FIG. 4(b), and FIG. 4(c) are examples in which the convex portion is flat. FIG. 4(d) is a diagram of the driving device 210 when viewed from the +Y direction side, where the deformation portion 206 is circular (spherical) and the base portion 107 is annular in shape that follows the outer periphery of the deformation portion 206. The deformation portion 206 is formed so that its thickness along the Y axis direction increases the closer it is to the center of the circle. By making it into the shape shown in FIG. 4(d), the durability of the deformation portion 206 is improved.

Figure 5 is a diagram showing an example of the internal configuration of the projection optical system 15 in this embodiment. In the example of Figure 5, the driving device 210 (deformation unit 206) of this embodiment is provided in four locations on the +X direction side, -X direction side, +Y direction side, and -Y direction side of the optical element 101. This makes it possible to move or deform the same optical element 101 in the +X direction side, -X direction side, +Y direction side, and -Y direction side by driving the driving device 210, which is advantageous for adjusting the aberration of the projection optical system 15.

In this embodiment, an example in which four elastic hinges 120 are arranged at a distance from each other is shown, but the arrangement of the elastic hinges 120 is not limited to this example. For example, the elastic hinge may be an annular member that surrounds the holding member 102. In this case, the annular elastic hinge is subjected to forces in the +X direction, -X direction, +Y direction, and -Y direction from four drive devices 210 arranged at a distance from each other. In addition, in this embodiment, an example in which four drive devices 210 are arranged at equal intervals and forces are applied to the holding member 102 in the +X direction, -X direction, +Y direction, and -Y direction is shown. However, the arrangement of the drive devices 210 does not have to be at equal intervals, the number is not limited to four, and the direction in which the force is applied to the holding member 102 is not particularly limited. In other words, it is sufficient that the optical element 101 has at least four deformation sections 206 and can move in at least two directions on a plane perpendicular to the optical axis passing through the optical element 101 due to deformation of the deformation sections 206.

Figure 6 is a flowchart when performing the exposure process in this embodiment. First, the control unit 11 or an external control device drives the driving device 210 to deform the deformation unit 206 and control it to apply force to the holding member 102 to move or deform the optical element 101 (S110, adjustment process). Note that the rigidity of the contact area of the deformation unit 206 that contacts the holding member 102 that holds the optical element 101 is higher than the rigidity of at least a part of the non-contact area that does not contact the holding member 102. After that, the exposure device 1 performs the exposure process (S120, exposure process). Note that the adjustment of the optical element 101 may be a control (open control) that drives the driving device 210 by a predetermined amount based on data acquired in advance. Alternatively, the adjustment may be a control (FB control) that detects the amount of movement or deformation of the target or optical element 101 provided on the holding member 102 by a sensor and drives the driving device 210 based on the result detected by the sensor, and is not particularly limited.

This embodiment may also be applied to an Alvarez lens, which is a pair of lenses made up of two optical elements and has a space between the two optical elements. When the Alvarez lens is made up of a first optical element and a second optical element, a force is applied to the holding member 102 holding at least one of the first optical element and the second optical element by the deformation of the deforming portion of the driving device 210. The optical element held by the holding member 102 to which the force is applied by the driving device 210 moves or deforms. This makes it possible to change the aberration caused by the first optical element and the second optical element.

The deforming portion of the deformation unit 206 of this embodiment has a thickness in the contact area of the deforming portion that contacts the holding member 102 that is thicker than the thickness of at least a portion of the non-contact area of the deforming portion that does not contact the holding member 102. As a result, the rigidity of the deformation unit 206 of the driving device 210 of this embodiment in the contact area of the deformation unit 206 that contacts the holding member 102 is higher than the rigidity of at least a portion of the non-contact area of the deformation unit 206 that does not contact the holding member 102. Therefore, the driving device 210 having the deformation unit 206 of this embodiment can adjust the optical element 101 by the desired amount of movement or deformation while reducing the error in the adjustment amount due to the reaction force from the holding member 102 when adjusting the optical element 101. Therefore, the driving device 210 of this embodiment is advantageous for adjusting the optical element 101.

Second Embodiment
The present embodiment differs from the first embodiment in the configuration for increasing the rigidity of a contact region of a deforming portion of the deforming portion that contacts the holding member 102. In the deforming portion 306 of the present embodiment, the rigidity of the material in the contact region of the deforming portion 306 that contacts the holding member 102 is made higher than the rigidity of the material of at least a portion of the non-contact region of the deforming portion 306 that does not contact the holding member 102.

Figure 7 is a diagram showing the configuration of the driving device 310 in this embodiment. The deformation portion 306 of the driving device 310 is formed of at least two or more materials. The contact area (area 320) of the deformation portion 306 that contacts the holding member 102 is formed of a material with high rigidity. Examples of the material with high rigidity include ceramics, iron, and stainless steel. The non-contact areas (areas 330 and 340) of the deformation portion 306 that do not contact the holding member 102 are formed of a material with a lower rigidity than the rigidity of the material of the contact area of the deformation portion 306 that contacts the holding member 102. As a result, even if the thickness of the deformation portion 306 in the Y-axis direction is uniform, unintended deformation of the deformation portion 306 due to a reaction force from the holding member 102 can be reduced when the contact area of the deformation portion 306 that contacts the holding member 102 applies a force to the holding member 102.

The low-rigidity material is, for example, aluminum or an aluminum alloy. However, the material is not limited to this example. For example, if ceramics is used as the high-rigidity material, iron, stainless steel, aluminum, or an aluminum alloy, which has a lower rigidity than ceramics, may be used as the low-rigidity material. And, if iron or stainless steel is used as the high-rigidity material, aluminum or an aluminum alloy, which has a lower rigidity than iron or stainless steel, may be used as the low-rigidity material.

With this configuration, as in the first embodiment, the rigidity of the contact area of the deformation portion 306 that contacts the holding member 102 is high, so that the amount of deformation of the deformation portion 306 due to the reaction force from the holding member 102 when the deformation portion 306 presses the holding member 102 can be reduced. This improves the reproducibility of the amount of aberration change when the optical element 101 is adjusted by the driving device 310. Therefore, the driving device 310 having the deformation portion 306 of this embodiment can adjust the optical element 101 by the desired amount of movement or deformation while reducing the error in the amount of adjustment due to the reaction force from the holding member 102 in adjusting the optical element 101. Therefore, the driving device 310 of this embodiment is advantageous for adjusting the optical element 101. In addition, in this embodiment, an example in which the thickness of the deformation portion 306 in the Y-axis direction is uniform has been described. However, the first embodiment and this embodiment may be combined to adjust the thickness and material in the Y-axis direction of the contact area that contacts the holding member 102, so that the rigidity of the contact area is higher than the rigidity of the non-contact area.

Third Embodiment
In addition to the features of the first embodiment, this embodiment is characterized in that the shape of the deformation portion 506 is designed taking into consideration the change in shape of the deformation portion 506 (the part that deforms of the deformation portion 506) when it comes into contact with the holding member 102 and deforms.

When the optical element 101 is moved or deformed significantly under the control of the control unit 11, the force with which the deformation unit 506 presses the holding member 102 increases, and the reaction force becomes larger. When the reaction force from the holding member 102 acting on the deformation unit 506 becomes large, the deformation unit 506 may undergo unintended deformation, even if the thickness of the contact area that contacts the holding member 102 is increased to increase rigidity as in the first embodiment. Specifically, the reaction force from the holding member 102 may cause the deformation unit 506 to undergo unintended deformation in the -Y direction as shown in FIG. 2(b).

In this embodiment, the shape of the deformation portion 506 is designed taking into consideration the change in shape of the deformation portion 506 when it comes into contact with the holding member 102 and deforms. Ideally, the amount of deformation caused by the deformation portion 506 receiving a reaction force from the holding member 102 when the deformation portion 506 comes into contact with the holding member 102 is preferably equal to the thickness of the contact area of the deformation portion 506 that comes into contact with the holding member 102. Specifically, at a position where the thickness of the contact area of the deformation portion 506 that comes into contact with the holding member 102 is increased by 3 mm, it is preferable that the deformation is caused by 3 mm of reaction force from the holding member 102.

However, for example, when the optical element 101 is moved 1 mm in the +Y direction, the force with which the deformation portion 506 presses the holding member 102 is different from when it is moved 3 mm, and therefore the reaction force it receives from the holding member 102 is also different. In other words, since the amount of reaction force received differs depending on the amount by which the optical element 101 is moved or deformed, the amount of deformation by which the deformation portion 506 deforms as a result of receiving a reaction force from the holding member 102 cannot always be made the same as the amount by which the contact area of the deformation portion 506 that comes into contact with the holding member 102 is increased.

Therefore, in this embodiment, an example is shown in which the shape change of the deformation portion 506 when it comes into contact with the holding member 102 and deforms (when a force is applied to the holding member 102) is considered based on an intermediate deformation amount that is an intermediate value between the maximum deformation amount and the minimum deformation amount of the deformation portion 506. Note that in this embodiment, an example is shown in which the shape change of the deformation portion 506 is considered based on an intermediate deformation amount that is an intermediate value between the maximum deformation amount and the minimum deformation amount of the deformation portion 506, but the state in which the shape change is considered is not limited to the intermediate deformation amount. For example, the shape change of the deformation portion 506 may be considered based on the amount that moves or deforms the optical element 101 most frequently, that is, the deformation amount of the deformation portion 506 (the part of the deformation portion 506 that deforms) that is most frequently used.

Figure 8 is a diagram showing the internal configuration of the projection optical system 15 in this embodiment. The deformation portion 506 of the driving device 510 in the example of Figure 8 has a maximum deformation amount of 5 mm and a minimum deformation amount of 1 mm at the position where force is applied to the holding member 102. Figure 8 (a) is an example in which the deformation portion 506 is not deformed. Figure 8 (b) is an example in which the control unit 11 controls the pressure adjustment unit 109 to adjust the pressure in the space formed by the deformation portion 506 and the base portion 107 in order to move the optical element 101 in the +Y direction by an intermediate deformation amount of 3 mm from the state of Figure 8 (a). As a result, the space formed by the deformation portion 506 and the base portion 107 expands as shown in Figure 8 (b), and the deformation portion 506 pushes the holding member 102 in the +Y direction. At this time, the deformation portion 506 receives a reaction force from the holding member 102 and deforms. In this embodiment, when the deformation portion 506 is deformed to an intermediate deformation amount as shown in FIG. 8(b), the contact area of the deformation portion 506 that comes into contact with the elastic hinge is deformed in the -Y direction by an amount corresponding to the increased thickness in order to increase the rigidity of the deformation portion 506.

In other words, the above example shows a deformation portion 506 in which the thickness of the contact area of the deformation portion 506 that contacts the retaining member 102 when the contact area is maximum is smaller than the thickness of the contact area of the deformation portion 506 that contacts the retaining member 102 when the contact area is not maximum.

In this embodiment, the deformation portion 506 is designed taking into consideration the change in shape of the deformation portion 506. At this time, the parts of the design of the deformation portion 506 that are changed taking into consideration the change in shape are, for example, the thickness of the deformation portion 506 and the material of the deformation portion 506. The thickness of the deformation portion 506 may be determined taking into consideration the change in shape of the deformation portion 506, the material may be determined, or both the thickness and the material may be determined.

According to this embodiment, a deformation portion 506 can be used that takes into account shape changes, which is even more advantageous for adjusting the optical element 101.

Fourth Embodiment
The present embodiment is characterized in that an article is manufactured using the above-described drive device.

Figure 9 is a flowchart of a method for manufacturing an article in this embodiment. An adjustment step (S210) is performed to move or deform the optical element 101 using the driving device described above.

In addition, this adjustment process is performed by applying a force to the holding member 102 that holds the optical element 101 by the deforming portion of the deformation part deforming, thereby moving or deforming the optical element 101. Here, in the deforming portion of the deformation part, the rigidity of the contact area that contacts the holding member 102 to apply a force to the holding member 102 is higher than the rigidity of at least a portion of the non-contact area that does not contact the holding member 102. Note that the rigidity is the rigidity in the direction in which the force is applied to the holding member 102.

After the adjustment process, a formation process (S220) is performed to form a pattern on the substrate, and a manufacturing process (S230) is performed to manufacture an article from the substrate on which the pattern has been formed in the formation process.

Items manufactured using this manufacturing method include, for example, semiconductor IC elements, liquid crystal display elements, color filters, MEMS, etc.

The formation process involves, for example, forming a pattern on a substrate (such as a silicon wafer or glass plate) coated with a photosensitive material by exposing the substrate to light using an exposure device (lithography device).

The manufacturing process includes, for example, developing a substrate (photosensitive material) on which a pattern has been formed, etching the developed substrate, removing the resist, dicing, bonding, and packaging. This manufacturing method makes it possible to manufacture higher quality articles than ever before.

The disclosure of this specification includes the following drive device, exposure device, exposure method, and method for manufacturing an article.

[Item 1]
A driving device that applies a force to a holding member that holds an optical element to move or deform the optical element,
A base portion;
a deformation portion that applies a force to the holding member by deformation;
a pressure adjusting portion that adjusts a pressure in a space surrounded by the deformation portion and the base portion,
the deformation portion has a portion that is deformed by the pressure adjustment portion adjusting the pressure in the space,
In the deformed portion,
a rigidity in a direction in which a force is applied to the holding member in a contact region that contacts the holding member to apply a force to the holding member is higher than a rigidity in the same direction in at least a part of a non-contact region that does not contact the holding member;
A drive device characterized by:

[Item 2]
2. The drive device according to item 1, wherein the thickness of the contact region is greater than the thickness of at least a portion of the non-contact region.

[Item 3]
3. The drive device according to claim 1, wherein the deformable portion comprises a thin plate portion and a convex portion, and at least a part of the convex portion applies a force to the holding member.

[Item 4]
4. The drive device according to claim 3, wherein the convex portion has a flat plate shape.

[Item 5]
5. The drive device according to any one of claims 1 to 4, wherein the thickness of the deformed portion becomes thinner as the distance from the contact area increases.

[Item 6]
The driving device according to any one of items 1 to 5, wherein the deformation section moves the optical element in a direction perpendicular to an optical axis passing through the optical element by deformation.

[Item 7]
A driving device described in any one of items 1 to 6, characterized in that when the deformation portion is in contact with the retaining member, the thickness of the contact area of the deformation portion in contact with the retaining member when the contact area is maximum is smaller than the thickness of the contact area of the deformation portion in contact with the retaining member when the contact area is not maximum.

[Item 8]
The driving device according to any one of items 1 to 7, wherein the deformation section moves or deforms the optical element when the pressure in the space becomes higher than atmospheric pressure.

[Item 9]
The driving device according to any one of items 1 to 8, wherein the deformation portion is a diaphragm.

[Item 10]
A driving device described in any one of items 1 to 9, characterized in that the longitudinal length of the contact area when the deformation portion applies a force to the holding member is 1% or less of the longitudinal length of the deformation portion.

[Item 11]
The deformation portion has at least four or more.
The driving device according to any one of items 1 to 10, characterized in that the multiple deformation portions are each arranged at a position capable of applying a force to the holding member that holds the same optical element.

[Item 12]
The driving device described in item 11, characterized in that the deformation of the deforming portions of the multiple deformation sections can apply force to the holding member in at least two directions on a plane perpendicular to an optical axis passing through the optical element.

[Item 13]
13. The drive device according to any one of items 1 to 12, wherein the material of the contact region is less prone to deformation than the material of the non-contact region.

[Item 14]
14. The drive device according to item 13, wherein the material of the contact area is ceramic, iron or stainless steel.

[Item 15]
an illumination optical system that irradiates light;
a holding member for holding an optical element onto which light from the illumination optical system is incident;
a driving device having a deformation section that deforms to apply a force to the holding member to deform or move the optical element,
In the deforming portion of the deformation portion,
a rigidity in a direction in which a force is applied to the holding member in a contact region that contacts the holding member to apply a force to the holding member is higher than a rigidity in the same direction in at least a part of a non-contact region that does not contact the holding member;
An exposure apparatus comprising:

[Item 16]
The exposure apparatus described in item 15, characterized in that the deformation of the deformable portion applies force to the holding member that holds at least one of a first optical element and a second optical element having a space between the first optical element and the second optical element, thereby changing the aberration caused by the first optical element and the second optical element.

[Item 17]
an adjustment process in which a deformation section having a deforming portion, the rigidity of which in a contact region that contacts a holding member for applying a force to the holding member that holds an optical element is higher than the rigidity in the said direction in at least a portion of a non-contact region that does not contact the holding member, is deformed by pressure adjustment, and the optical element is moved or deformed by applying a force to the holding member;
an exposure step of exposing a substrate using the optical element moved or deformed in the adjustment step.

[Item 18]
an adjustment process in which a deformation section having a deforming portion, the rigidity of which in a contact region that contacts a holding member for applying a force to the holding member that holds an optical element is higher than the rigidity in the said direction in at least a portion of a non-contact region that does not contact the holding member, is deformed by pressure adjustment, and the optical element is moved or deformed by applying a force to the holding member;
a forming step of forming a pattern on a substrate using the optical element moved or deformed in the adjusting step;
a manufacturing process for manufacturing an article from the substrate on which the pattern is formed in the forming process;
A method for producing an article, comprising the steps of:

The invention is not limited to the above-described embodiment, and various modifications and variations are possible without departing from the spirit and scope of the invention. Therefore, the following claims are appended to disclose the scope of the invention.

Claims (18)

A driving device that applies a force to a holding member that holds an optical element to move or deform the optical element,
A base portion;
A deformation portion;
a pressure adjusting section that adjusts a pressure in a space surrounded by the deformation section and the base section,
the deformation portion has a portion that is deformed by the pressure adjustment portion adjusting the pressure in the space,
the deformable portion includes a contact region that applies a force to the holding member by deformation, and a non-contact region that does not contact the holding member,
The rigidity of the contact area in a direction in which the force is applied to the holding member is higher than the rigidity of at least a portion of the non-contact area in the same direction .
A drive device characterized by: The drive device according to claim 1, characterized in that the thickness of the contact area is greater than the thickness of at least a portion of the non-contact area. The drive device according to claim 1, characterized in that the deformable portion is composed of a thin plate portion and a convex portion, and at least a portion of the convex portion applies a force to the holding member. The drive device according to claim 3, characterized in that the convex portion is flat. The drive device according to claim 1, characterized in that the thickness of the deformed portion becomes thinner as the distance from the contact area increases. The driving device according to claim 1, characterized in that the deformation unit moves the optical element in a direction perpendicular to an optical axis passing through the optical element by deformation. The drive device according to claim 1, characterized in that, when the deformation portion is in contact with the holding member, the thickness of the contact area of the deformation portion in contact with the holding member when the contact area is maximum is smaller than the thickness of the contact area of the deformation portion in contact with the holding member when the contact area is not maximum. The drive device according to claim 1, characterized in that the deformation section moves or deforms the optical element when the pressure in the space becomes higher than atmospheric pressure. The drive device according to claim 1, characterized in that the deformation part is a diaphragm. The drive device according to claim 1, characterized in that the length of the contact area in the longitudinal direction when the deformation part applies a force to the holding member is 1% or less of the longitudinal length of the deformation part. The deformation portion has at least four or more.
2. The driving device according to claim 1, wherein the plurality of deformation sections are arranged at positions capable of applying a force to the holding member that holds the same optical element. The drive device according to claim 11, characterized in that the deformation of the deforming parts of the plurality of deformation parts can apply a force to the holding member in at least two directions on a plane perpendicular to the optical axis passing through the optical element. The drive device according to claim 1, characterized in that the material of the contact area is less prone to deformation than the material of the non-contact area. The drive device according to claim 13, characterized in that the material of the contact area is ceramic, iron, or stainless steel. an illumination optical system that irradiates light;
a holding member for holding an optical element onto which light from the illumination optical system is incident;
a driving device having a deformation section that applies a force to the holding member by deformation to deform or move the optical element,
The deformable portion of the deformation portion includes a contact region that applies a force to the holding member by deformation, and a non-contact region that does not contact the holding member ,
The rigidity of the contact area in a direction in which the force is applied to the holding member is higher than the rigidity of at least a portion of the non-contact area in the same direction .
An exposure apparatus comprising: The exposure apparatus according to claim 15, characterized in that the deformation of the deformable portion applies a force to the holding member that holds at least one of a first optical element and a second optical element having a space between the first optical element and the second optical element, thereby changing the aberration caused by the first optical element and the second optical element. an adjusting step in which a deforming portion having a deforming portion is deformed by pressure adjustment, and a force is applied to a holding member that holds an optical element, thereby moving or deforming the optical element;
an exposure step of exposing a substrate to light using the optical element moved or deformed in the adjustment step ,
the deformable portion includes a contact region that applies a force to the holding member by deformation, and a non-contact region that does not contact the holding member,
The rigidity of the contact area in a direction in which the force is applied to the holding member is higher than the rigidity of at least a portion of the non-contact area in the same direction.
13. An exposure method comprising: an adjusting step in which a deforming portion having a deforming portion is deformed by pressure adjustment, and a force is applied to a holding member that holds an optical element, thereby moving or deforming the optical element;
a forming step of forming a pattern on a substrate using the optical element moved or deformed in the adjusting step;
a manufacturing process for manufacturing an article from the substrate on which the pattern is formed in the forming process;
having
the deformable portion includes a contact region that applies a force to the holding member by deformation, and a non-contact region that does not contact the holding member,
The rigidity of the contact area in a direction in which the force is applied to the holding member is higher than the rigidity of at least a portion of the non-contact area in the same direction.
A method for producing an article.

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