JP7564046B2 - Dust removal device ejection section and dust removal head - Google Patents

Description

The present invention relates to a dust removal device that removes dust from precision objects such as exposure masks and substrates, and to an ejection section that ejects gas to be blown onto the object.

Conventionally, this type of dust removal device ejection part ejects air (gas) from a slit that spans almost the entire length of the dust removal device (see Patent Document 1).

Patent No. 3975205

However, in order to increase the flow rate of the ejected air, the width of the slit is often made very narrow, for example 0.1 mm. For this reason, in the dust removal device ejection part described in Patent Document 1, it is difficult to form slits of a uniform width over the entire longitudinal length of the ejection part by machining or the like. In response to this, it is also possible to form the slits in multiple parts in the longitudinal direction of the ejection part. However, in that case, there will be areas between the slits that do not eject air, and the air flow between the slits will be weakened. Therefore, it is difficult to eject air uniformly in the longitudinal direction of the ejection part.

The present invention has been made to solve the above problems, and its main objective is to provide an ejection part for a dust removal device that can easily eject gas uniformly in the longitudinal direction of the ejection part.

The first means for solving the above problem is to
A dust remover jetting unit for use in a dust remover for removing dust from a target for dust removal, which jets out gas to be blown onto the target for dust removal,
A first member formed of metal in a rectangular plate shape having a short side direction and a long side direction;
a second member made of a metal having a certain thickness and formed in a rectangular plate shape corresponding to the shape of the first member, and having a plurality of notches formed adjacent to each other over the entire length in the longitudinal direction and opening at one end in the lateral direction;
a third member made of metal and formed into a rectangular plate shape corresponding to the shape of the first member, the third member having a through hole formed therein;
The first member and the third member are joined together with the second member sandwiched therebetween,
a flow passage that communicates the through hole and the plurality of notches is formed in the third member,
The plurality of cutouts have inclined portions formed within a predetermined range from the open end, the lengths of the cutouts in the longitudinal direction becoming longer as they approach the open end.

According to the above configuration, the dust removal device ejection section is used in a dust removal device that removes dust from a target for dust removal, and ejects gas to be blown onto the target for dust removal. The first member is made of metal and formed into a rectangular plate shape having a short side direction and a long side direction. The second member is made of metal with a certain thickness and formed into a rectangular plate shape corresponding to the shape of the first member, and has a plurality of notches that open at one end in the short side direction and are adjacent to each other over the entire length in the long side direction. The third member is made of metal and formed into a rectangular plate shape corresponding to the shape of the first member, and has through holes formed therein. The first member and the third member are joined together with the second member sandwiched between them.

Therefore, when the first member, the second member, and the third member are joined together, slits can be formed by the spaces inside the notches partitioned by the first member, the second member, and the third member. In detail, multiple adjacent slits can be formed by multiple adjacent notches over the entire length in the longitudinal direction. The third member has a flow path that connects the through hole and the multiple notches. Therefore, by supplying gas from the through hole of the third member to the inside of the ejection part, gas can be supplied to the multiple notches (i.e., slits) through the flow path, and the gas can be ejected from the slits. Here, the width of the multiple slits is determined by the constant thickness of the second member. Therefore, it is not necessary to form the slits by machining or the like, and it is easy to form multiple slits of uniform width over the entire length of the ejection part.

Furthermore, in the plurality of notches, a sloped portion is formed within a predetermined range from the opening end, which increases the length of the notch in the longitudinal direction as it approaches the opening end. This makes it easier to shorten the distance between the opening ends of adjacent slits, and makes it easier to shorten the length of the portion between the slits from which gas is not ejected. Moreover, as the gas flows along the sloped portion, the gas ejected from the slits tends to spread in the longitudinal direction. This makes it possible to prevent the flow of gas between the slits from weakening, and makes it easier to eject gas uniformly in the longitudinal direction of the ejection portion.

In the second method, in the second member, the boundary portion between the notches is formed symmetrically with respect to a center line that defines the center of the second member in the longitudinal direction, and half-split portions that are shaped by splitting the boundary portion in half are formed at both ends of the second member in the longitudinal direction.

According to the above configuration, in the second member, the boundary portion between the notches is formed symmetrically with respect to a center line that defines the center of the second member in the longitudinal direction. Therefore, gas can be easily ejected from adjacent slits symmetrically with respect to the center line, and gas can be easily ejected more uniformly in the longitudinal direction of the ejection portion. Furthermore, half-split portions that are halved in shape are formed at both ends of the second member in the longitudinal direction. Therefore, when multiple dust removal device ejection portions are connected in the longitudinal direction, a single boundary portion can be formed by connecting the half-split portions at the ends of the ejection portions. Therefore, even when multiple dust removal device ejection portions are connected in the longitudinal direction, gas can be easily ejected uniformly across the multiple ejection portions.

In the third method, the end of the flow path on the side of the opening end is located before the inclined portion. With this configuration, the gas flowing through the flow path flows into the part of the notch that is before the inclined portion. Therefore, the entire inclined portion can be used to make it easier for the gas to flow along the inclined portion.

In the fourth method, the thickness of the second member is 0.1 to 0.3 mm. This configuration makes it easier to form a slit with a uniform width of 0.1 to 0.3 mm over the entire longitudinal length of the ejection section.

In the fifth method, the thickness of the third member is 0.8 to 1.2 mm, and the depth of the flow path in the thickness direction of the third member is 0.4 to 0.6 mm.

According to the above configuration, the thickness of the third member is 0.8 to 1.2 mm, so the depth of the through hole as a gas passage in the thickness direction of the third member can be ensured to be 0.8 to 1.2 mm. In addition, in the thickness direction of the third member, the depth of the flow path is 0.4 to 0.6 mm, and the width of the slit is 0.1 to 0.3 mm. Therefore, the depth of the gas passage in the thickness direction of the third member can be gradually reduced from the through hole to the flow path to the slit. Therefore, the flow rate of the gas ejected from the slit can be increased while suppressing the pressure loss of the gas.

In the sixth aspect, the distance between the open ends of adjacent notches in the longitudinal direction is 0.5 mm or less. This configuration makes it easier to further shorten the length of the portion between the slits that does not blow out gas.

In the seventh aspect, the first member, the second member, and the third member are diffusion bonded. With this configuration, compared to bonding the first member, the second member, and the third member with an adhesive or the like, it becomes easier to accurately determine the distance between the first member and the third member, i.e., the width of the slit, based on the thickness of the second member.

In the eighth embodiment, the third member has a plurality of through holes, and the flow path connects each of the through holes to an equal number of the notches.

According to the above configuration, the third member has a plurality of the through holes. Therefore, even if the number of notches (slits) is increased, i.e., even if the longitudinal length of the ejection portion is increased, it becomes easier to supply the required amount of gas from the plurality of through holes to the plurality of slits via the flow path. Furthermore, the flow path connects each of the plurality of through holes to the same number of notches. Therefore, it is possible to suppress differences in the amount of gas supplied to each notch (slit).

The ninth aspect of the present invention is a dust removal head comprising the dust removal device ejection part described in the eighth aspect and a main body to which the dust removal device ejection part is attached, and the main body is formed with a supply chamber to which the gas is supplied, a first communication passage that connects the supply chamber to the outside, and a second communication passage that connects the supply chamber to each of the multiple through holes.

According to the above configuration, the dust removal head includes the dust removal device jetting part described in the eighth means and a main body to which the dust removal device jetting part is attached. The main body is formed with a supply chamber to which the gas is supplied and a first communication passage that connects the supply chamber to the outside. Therefore, gas can be supplied from the outside of the dust removal head to the supply chamber through the first communication passage. The main body is formed with a second communication passage that connects the supply chamber to each of the multiple through holes. Therefore, gas can be supplied from the supply chamber to the multiple through holes of the dust removal device jetting part and thus to the notch (slit) through the second communication passage. Furthermore, since gas is supplied from the first communication passage to the multiple second communication passages through the supply chamber, the number of first communication passages for supplying gas to the multiple second communication passages can be reduced. Moreover, it is easier to supply gas evenly to the multiple second communication passages compared to the case where gas is supplied to the multiple second passages through a branch passage branched off from the first communication passage.

In the tenth means, the main body is formed in a rectangular parallelepiped shape, and a predetermined plane is formed on the bottom of the main body, which extends over the entire length of the main body in the longitudinal direction and forms a predetermined angle with the bottom surface of the main body, and the dust removal device ejection part is attached to the predetermined plane so that the gas is ejected from the notch parallel to the predetermined plane.

According to the above configuration, the main body is formed in a rectangular parallelepiped shape, and a predetermined plane is formed on the bottom of the main body, which extends over the entire length of the main body in the longitudinal direction and forms a predetermined angle with the bottom surface of the main body. Therefore, by cutting the bottom of the rectangular parallelepiped main body, it is possible to easily form the predetermined plane that extends over the entire length of the main body in the longitudinal direction. Furthermore, the predetermined angle that the predetermined plane forms with the bottom surface of the main body can be easily adjusted when forming the predetermined plane.

The dust removal device outlet is attached to the specified plane so that the gas is ejected from the notch (slit) parallel to the specified plane. Therefore, the gas ejection angle relative to the bottom surface of the main body can be easily adjusted by adjusting the specified angle without changing the configuration of the dust removal device outlet itself.

In an eleventh means, the predetermined angle is 15 to 45°. With this configuration, when gas is ejected from the dust removal device ejection section and blown onto the target of dust removal, the air between the bottom of the dust removal head and the target of dust removal is drawn in the direction of the horizontal component of the speed of the gas ejected from the slit due to negative pressure and the viscosity of the air, as confirmed by experiments and simulations by the present inventors. This makes it possible to prevent dust removed from the target of dust removal from scattering in the opposite direction to the horizontal component of the speed of the gas ejected from the slit, and to prevent the removed dust from reattaching to the target of dust removal.

In the twelfth means, the predetermined angle is 25 to 35°. With this configuration, when gas is ejected from the dust removal device ejection section and blown onto the target for dust removal, the air between the bottom of the dust removal head and the target for dust removal is significantly drawn in the direction of the horizontal component of the speed of the gas ejected from the slit due to negative pressure and the viscosity of the air, as confirmed by experiments and simulations by the present inventors.

In the thirteenth means, the second communication passage opens on the specified plane, the through hole faces the opening end of the second communication passage on the specified plane, a storage groove for storing a seal member is formed around the opening end of the second communication passage on the specified plane, and the seal member stored in the storage groove seals between the main body and the dust removal device ejection part.

According to the above configuration, the second communication passage is open on the specified plane, and the through hole faces the opening end of the second communication passage on the specified plane. Therefore, the second communication passage and the through hole can be connected. Here, a storage groove for storing a seal member is formed around the opening end of the second communication passage on the specified plane, and the seal member stored in the storage groove seals between the main body and the dust removal device ejection part. According to this configuration, since the storage groove for storing the seal member is formed on the specified plane of the main body, it is not necessary to form the storage groove in the dust removal device ejection part. Therefore, the ejection part can be formed thin, such as a thin plate, and the configuration of the ejection part can be simplified.

FIG. FIG. FIG. FIG. FIG. FIG. 4 is a perspective view showing a connected state of the supply block. FIG. FIG. 5 is an enlarged perspective view of part A in FIG. 4 . FIG. 2 is a bottom perspective view of the feedblock and ejector plate. FIG. 4 is an exploded perspective view showing the upper surface side of the ejection plate. FIG. 4 is an exploded perspective view showing the lower surface side of the ejection plate. FIG. FIG. 4 is a vertical cross-sectional perspective view of two first dust removal heads. FIG. 13 is a side view showing the angle of the ejection plate relative to the photomask. Longitudinal cross-section of two secondary dust removal heads.

Below, an embodiment of a dust removal device that removes dust from a photomask used in an exposure device will be described with reference to the drawings. The dust removal device ejects air (gas) onto the top surface of the photomask to remove dust, and then sucks up the removed dust and discharges it into a duct.

As shown in FIG. 1, the dust removal device 10 includes a dust removal head assembly 20, a hood 11, handles 12A and 12B, etc.

A hood 11 is attached to the dust removal head assembly 20. The hood 11 is formed in a bottomed rectangular tubular shape (rectangular tubular shape) having a pair of long sides 11a, a pair of short sides 11b, and an upper base 11c. A first opening 11d, which is an opening on the upper side of the hood 11, is connected to a duct 18. The duct 18 is connected to a suction device (not shown), and sucks in air from within the hood 11, and in turn sucks in air from a second opening, which is an opening on the lower side of the hood 11.

Figure 2 is a perspective view of the dust head assembly 20. The dust head assembly 20 includes two first dust heads 21, two second dust heads 40, two first joint blocks 50, two second joint blocks 60, a connecting plate 20a, etc.

The two first dust removal heads 21 are arranged parallel to each other and facing each other. The two first dust removal heads 21 are attached to the pair of long sides 11a (see FIG. 1), respectively. The first dust removal head 21 (dust removal head) has six (multiple) supply blocks 22. The six supply blocks 22 are lined up in the longitudinal direction (predetermined direction) of the first dust removal head 21 (dust removal device 10) and connected to each other. The length of the first dust removal head 21 in the longitudinal direction is, for example, 600 to 800 mm. The six supply blocks 22 form a main body, which is divided into six supply blocks 22 (main body components).

The two second dust removal heads 40 are arranged parallel to each other and facing each other. The two second dust removal heads 40 are attached to the pair of short side surfaces 11b (see FIG. 1), respectively. The second dust removal heads 40 are formed to be shorter than the length of the first dust removal head 21 in the longitudinal direction.

A first joint block 50 or a second joint block 60 is provided between the first dust removal head 21 and the second dust removal head 40. The connecting plate 20a is a rectangular frame-shaped plate material, and connects the two first dust removal heads 21, the two second dust removal heads 40, the two first joint blocks 50, and the two second joint blocks 60 in a rectangular frame shape.

The first joint block 50 is provided with a first port 51 to which clean air (clean dry air) at high pressure (predetermined pressure) is supplied. The second joint block 60 is provided with a second port 61 to which clean air (clean dry air) at high pressure (predetermined pressure) is supplied. The first port 51 and the second port 61 are supplied with air at an equal flow rate. The first port 51 and the second port 61 are provided at one end of the longitudinal direction of the dust removal device 10.

As shown in Figures 3 and 4, each supply chamber 23 is formed inside each supply block 22. The supply chamber 23 is formed as a rectangular prism-shaped space and extends in the longitudinal direction of the first dust removal head 21. Adjacent supply chambers 23 communicate with each other. The supply chamber 23 of the supply block 22 at one end in the longitudinal direction of the first dust removal head 21 communicates with the first port 51 via a joint passage 52 formed inside the first joint block 50. The supply chamber 23 of the supply block 22 at the other end in the longitudinal direction of the first dust removal head 21 communicates with a joint passage 62 formed inside the second joint block 60.

The second dust removal head 40 includes a supply block 42. A supply chamber 43 is formed inside the supply block 42. The supply chamber 43 is connected to a joint flow path 62. The joint flow paths 52, 62 that supply air from the first port 51 to the second dust removal head 40 through each supply chamber 23 of the first dust removal head 21 constitute a first supply flow path. The joint flow path 62 that directly supplies air from the second port 61 to the other first dust removal head 21 and the other second dust removal head 40 constitutes a second supply flow path. The flow path area of the supply chambers 23, 43 is larger than the flow path area of the first supply flow path and the flow path area of the second supply flow path. In the longitudinal direction of the first dust removal head 21, the end opposite the first port 51 and the end opposite the second port 61 are closed by other members.

Figure 5 is a perspective view of the supply block 22.

The supply block 22 is formed in a rectangular parallelepiped shape. A triangular groove 29 with a right-angled triangular cross section is formed in the lower base (bottom) of the supply block 22. The triangular groove 29 is formed over the entire length of the supply block 22 in the longitudinal direction (predetermined direction). Two openings 33 are formed in the bottom surface 29a (predetermined plane), which is the bottom surface with the larger area of the triangular groove 29 (see Figure 9). Storage grooves 34 for storing sealing members such as O-rings are formed around the two openings 30 in the lower base of the supply block 22.

A first communication passage 24 is formed at both longitudinal ends of the supply block 22, connecting the supply chamber 23 to the outside in the longitudinal direction. Two openings 30 are formed in the upper base (bottom) of the supply block 22. Storage grooves 31 for storing sealing members such as O-rings are formed around the two openings 30 in the upper base of the supply block 22.

The supply block 22 is formed with a communication passage 25 that connects the supply chamber 23 to each of the two openings 30. The supply block 22 is formed with a communication passage 27 that extends parallel to the communication passage 25. The supply block 22 is formed with a communication passage 26 that connects the communication passage 25 to the communication passage 27. The supply block 22 is formed with a communication passage 28 that connects the communication passage 27 to the opening 33. In the longitudinal direction of the supply block 22, the communication passages 25, 27, and 28 have the same length. The flow path area of the communication passage 26 is smaller than the flow path area of the communication passage 25 and the flow path area of the communication passage 27.

The two openings 30 are covered by the connecting plate 20a. A seal member stored in the storage groove 31 seals the gap between the upper bottom of the supply block 22 and the connecting plate 20a. The connecting passages 25 to 28 form a second connecting passage. That is, the second connecting passage extends from the supply chamber 23 to the side opposite the opening 33, then turns back to the opening 33 side and connects to the opening 33. In the second connecting passage, the flow path surface area of the connecting passage 26, which is the turning back part, is smaller than the flow path area of the other parts. The second connecting passage opens to the bottom surface 29a.

In the longitudinal direction of the supply block 22, a first engagement portion 35 communicating with the supply chamber 23 is provided at one end of the supply block 22, and a second engagement portion 36 communicating with the supply chamber 23 and engaging with the first engagement portion 35 of the adjacent supply block 22 is provided at the other end of the supply block 22. The first engagement portion 35 and the second engagement portion 36 are formed as annular recesses.

As shown in FIG. 6, adjacent supply blocks 22 are connected via a connecting ring 37. As shown in FIG. 7, the connecting ring 37 has a rectangular cylindrical (annular) ring body 37b. An annular protrusion 37a is provided on the outer peripheral edge of the ring body 37b. The protrusion 37a is provided in the center of the ring body 37b in the central axis direction.

8 is an enlarged perspective view of part A in FIG. 4. The connecting ring 37 is fitted to the inner circumferential surfaces of the two first communication passages 24, the first engagement portion 35, and the second engagement portion 36. That is, the first engagement portion 35 and the second engagement portion 36 are engaged via the connecting ring 37. The first engagement portion 35 and the second engagement portion 36 are isolated by the protrusion 37a of the connecting ring 37. The first engagement portion 35 and the second engagement portion 36 each house a seal member 38 such as an O-ring. The gap between the first engagement portion 35 (supply block 22) and the ring body 37b of the connecting ring 37 is sealed by the seal member 38. The gap between the second engagement portion 36 (supply block 22) and the ring body 37b of the connecting ring 37 is sealed by the seal member 38. The seal member 38 is compressed in the radial direction of the connecting ring 37. Therefore, even if there is variation in the relative longitudinal positions of adjacent supply blocks 22, the seal member 38 can stably seal between the first engagement portion 35 and the connecting ring 37, and between the second engagement portion 36 and the connecting ring 37.

Figure 9 is a perspective view showing the lower part of the supply block 22 and the ejection plate 70. The ejection plate 70 is attached to the bottom surface 29a. A sealing member stored in the storage groove 34 seals the gap between the bottom surface 29a (the lower bottom part of the supply block 22) and the ejection plate 70. The ejection plate 70 ejects air to be blown onto the photomask.

Figure 10 is an exploded perspective view showing the upper surface side of the ejection plate 70, and Figure 11 is an exploded perspective view showing the lower surface side of the ejection plate 70. The ejection plate 70 (ejection part, ejection part for dust removal device) includes a first plate 71, a second plate 72, a third plate 80, etc.

The first plate 71 (first member) is formed, for example, from stainless steel (metal) of a certain thickness in the shape of a rectangular plate having a short side and a long side. The thickness of the first plate 71 is, for example, 0.3 to 0.7 mm, preferably 0.4 to 0.6 mm, and in this embodiment, 0.5 mm. The first plate 71 is formed by rolling, and the thickness tolerance is ±5 μm. Two screw holes 71a aligned in the short side direction are formed at both ends and the center of the first plate 71 in the long side direction. The screw holes 71a are formed by etching the first plate 71.

The second plate 72 (second member) is formed, for example, from stainless steel (metal) of a certain thickness in the shape of a rectangular plate having a short side and a long side. The shape of the second plate 72 corresponds to the shape of the first plate 71. The thickness of the second plate 72 is preferably, for example, 0.1 to 0.3 mm, and is 0.1 mm in this embodiment. The second plate 72 is formed by rolling, and the thickness tolerance is ±5 μm. Two screw holes 72a aligned in the short side direction are formed at both ends and the center of the second plate 72 in the long side direction.

The second plate 72 has a number of notches 73 that open at one end in the short side direction and are adjacent (side by side) over the entire length in the long side direction. The notches 73 are formed in a rectangular shape. In the multiple notches 73, an inclined portion 73b is formed in a predetermined range in the short side direction of the second plate 72 from the opening end 73a, which increases the length of the notches 73 in the long side direction as it approaches the opening end 73a. In other words, the multiple notches 73 have a shape that widens on the opening end 73a side. The screw holes 72a and notches 73 are formed by etching the second plate 72.

In the second plate 72, each boundary 74 between the notches 73 is formed line-symmetrically with respect to a center line C that defines the center of the second plate 72 in the longitudinal direction. In other words, each boundary 74 has a shape line-symmetrical with respect to its center line C. In the longitudinal direction of the second plate 72, the width of the tip of each boundary 74, i.e., the distance between the opening ends 73a of adjacent notches 73, is preferably 0.5 mm or less, and in this embodiment is 0.4 mm.

At both ends of the second plate 72 in the longitudinal direction of the second plate 72, a half-split portion 74h, which is a shape obtained by splitting the boundary portion 74 in half, is formed. When two second plates 72 are adjacent to each other in the longitudinal direction of the second plate 72, one boundary portion 74 is formed by the two half-split portions 74h (adjacent half-split portions 74h).

The third plate 80 (third member) is formed, for example, from stainless steel (metal) of a certain thickness in the shape of a rectangular plate having a short side and a long side. The shape of the third plate 80 corresponds to the shape of the first plate 71. The thickness of the third plate 80 is preferably, for example, 0.8 to 1.2 mm, and is 1.0 mm in this embodiment. The third plate 80 is formed by rolling, and the thickness tolerance is ±5 μm. Two screw holes 80a aligned in the short side direction are formed at both ends and the center of the third plate 80 in the long side direction.

The third plate 80 has two (multiple) through holes 81. The through holes 81 (inlet ports) are formed in a rectangular shape and extend between the screw holes 80a in the longitudinal direction of the third plate 80. The screw holes 80a are formed by etching the third plate 80.

The third plate 80 is formed with a plurality of grooves 82 extending from the through hole 81 toward the open end 73a of the notch 73 in the short direction of the third plate 80. The depth of the grooves 82 is preferably 0.4 to 0.6 mm, and is 0.5 mm in this embodiment. The grooves 82 are formed by half-etching the third plate 80. The grooves 82 communicate with the through hole 81. When the ejection plate 70 is in an assembled state, each groove 82 forms a flow path that communicates the through hole 81 with each notch 73. The end 82a of the groove 82 on the side of the open end 73a is located in front of the inclined portion 73b of the notch 73 (see FIG. 12). The flow path areas of the communication parts with the through hole 81 are equal to each other in the plurality of grooves 82.

The third plate 80 is formed with a number of grooves 83 similar to the groove 82. The grooves 83 are connected to both ends of the through hole 81 in the longitudinal direction of the third plate 80. Each groove 83 is connected to two notches 73 (see FIG. 12). The other configuration of the groove 83 is the same as that of the groove 82. The two through holes 81 are each connected to ten (the same number) of notches 73 by a number of grooves 82, 83 (flow paths).

The first plate 71, the second plate 72, and the third plate 80 are made of the same material (e.g., SUS304). The first plate 71, the second plate 72, and the third plate 80 are diffusion bonded with the second plate 72 sandwiched between the first plate 71 and the third plate 80. The diffusion bonding is performed by, for example, applying a predetermined pressure to the first plate 71, the second plate 72, and the third plate 80 in the thickness direction and heating them to 800 to 900°C in a vacuum furnace. When the first plate 71, the second plate 72, and the third plate 80 are bonded together, each slit is formed by the space inside each notch 73 partitioned by the first plate 71, the second plate 72, and the third plate 80. The width of the slit in the thickness direction of the first plate 71, the second plate 72, and the third plate 80 is determined by the thickness of the second plate 72 and is 0.1 mm.

Figure 13 is a vertical cross-sectional perspective view of the two first dust removal heads 21. Note that the long side surface 11a on the near side is not shown.

The second communication passages, which are formed by the communication passages 25 to 28, respectively connect the supply chamber 23 to the multiple through holes 81 in the ejection plate 70. That is, the through holes 81 face the open ends of the second communication passages in the bottom surface 29a of the supply block 22 (see FIG. 9). In the longitudinal direction of the supply block 22 (first dust removal head 21), the length of the second communication passage is equal to the length of the through holes 81.

Each supply block 22 is fitted with an ejection plate 70. That is, the main body made up of six (multiple) supply blocks 22 has six (multiple) ejection plates 70 attached in a line in the longitudinal direction of the main body. The supply chamber 23 extends in the longitudinal direction of the main body along the multiple ejection plates 70.

The first dust heads 21 are attached to a pair of long sides 11a so that the air ejected from the slits in the ejection plate 70 of the two first dust heads 21 is directed downward and inwardly of the hood 11.

Figure 14 is a side view showing the angle of the ejection plate 70 with respect to the photomask M. The bottom surface 29a of the supply block 22 forms a first angle θ1 with respect to the bottom surface 29b of the supply block 22. The ejection plate 70 is attached to the bottom surface 29a so that the first plate 71, the second plate 72, and the third plate 80 are parallel to the bottom surface 29a. Therefore, air is ejected from the slits of the ejection plate 70 parallel to the bottom surface 29a, and the angle between the traveling direction (arrow D1) of the gas ejected from the slits of the ejection plate 70 (first dust removal head 21) and the upper surface of the photomask M is the first angle θ1. The first angle θ1 is preferably 15 to 45°, more preferably 25 to 35°, and is 30° in this embodiment.

The distance h1 between the opening end of the slit in the ejection plate 70 of the first dust removal head 21 and the top surface of the photomask M is preferably 5 to 20 mm, and in this embodiment it is 7.0 mm.

Figure 15 shows vertical cross sections of two second dust removal heads 40. The supply block 42 has a configuration similar to that of the supply block 22. Inside the supply block 42, a supply chamber 43 and communication passages 45-48 are formed corresponding to the supply chamber 23 and communication passages 25-28 of the supply block 22. The supply chamber 43 of one supply block 42 is connected to the joint flow passage 62 of the second joint block 60 via the opening 62a. The flow passage area of the supply chamber 43 is larger than the flow passage area of the opening 62a.

A jet plate 90 is attached to the supply block 42. The jet plate 90 has a configuration similar to that of the jet plate 70, and is similar to the jet plate 70 cut in half in the longitudinal direction.

The second dust heads 40 are attached to a pair of short sides 11b so that the air ejected from the slits in the ejection plate 90 of the two second dust heads 40 is directed downward and inwardly of the hood 11.

The bottom surface 49a of the supply block 42 forms a second angle θ2 with respect to the bottom surface 49b of the supply block 42. The ejection plate 90 is attached to the bottom surface 49a. Therefore, air is ejected from the slits of the ejection plate 90 parallel to the bottom surface 49a. The second angle θ2 is set equal to the first angle θ1.

The height of the bottom surface 49b of the supply block 42 is equal to the height of the bottom surface 29b of the supply block 22. Therefore, the distance h2 (not shown) between the opening end of the slit in the ejection plate 90 of the second dust removal head 40 and the upper surface of the photomask M is equal to the distance h1.

The upper surface of the photomask M is placed opposite the lower surface of the dust removal device 10 having the above-mentioned configuration, and the photomask M is moved relatively in the short direction of the dust removal device 10. As a result, dust adhering to the upper surface of the photomask M is removed by air ejected from the slits of the ejection plates 70, 90, and the dust is sucked in by the duct 18 connected to the upper part of the hood 11.

At this time, the two ejection plates 70 and the two ejection plates 90 eject air from all four directions toward the top surface of the photomask M. In particular, the inventors have confirmed through experiments and simulations that, because the first angle θ1 and the second angle θ2 are set to 15 to 45°, the air between the bottom of the dust removal heads 21 and 40 and the photomask M is drawn in the direction of the horizontal component of the speed of the air ejected from the slit due to negative pressure and air viscosity. In other words, the dust removed from the top surface of the photomask M is prevented from leaking out from below the dust removal device 10. It has also been confirmed through experiments and simulations by the inventors that, in conventional dust removal devices, a considerable amount of dust removed from the top surface of the photomask M leaks out from below the dust removal device.

The present embodiment described above has the following advantages:

The width of the multiple slits in the ejection plate 70 is determined by the constant thickness of the second plate 72. Therefore, there is no need to form the slits by machining or the like, and it is easy to form multiple slits of uniform width over the entire longitudinal length of the ejection plate 70.

- In the plurality of notches 73, a sloped portion 73b is formed within a predetermined range from the opening end 73a, which increases the length of the notches 73 in the longitudinal direction as it approaches the opening end 73a. This makes it easier to shorten the distance between the opening ends 73a of adjacent slits, and makes it easier to shorten the length of the portion between the slits from which air is not ejected. Furthermore, as the air flows along the sloped portion 73b, the air ejected from the slits tends to spread in the longitudinal direction. This makes it possible to prevent the air flow between the slits from weakening, and makes it easier to eject air uniformly in the longitudinal direction of the ejection plate 70.

- In the second plate 72, the boundary portion 74, which is the portion between the notches 73, is formed symmetrically with respect to the center line C that defines the center of the second plate 72 in the longitudinal direction. Therefore, it becomes easier to eject air symmetrically from adjacent slits with respect to the center line C, and it becomes easier to eject air more uniformly in the longitudinal direction of the ejection plate 70. Furthermore, half-split portions 74h, which are halved portions of the boundary portion 74, are formed at both ends of the second plate 72 in the longitudinal direction. Therefore, when multiple ejection plates 70 are connected in the longitudinal direction, it is possible to form one boundary portion 74 by connecting the half-split portions 74h at the ends of the ejection plates 70 together. Therefore, even when multiple ejection plates 70 are connected in the longitudinal direction, it becomes easier to eject air uniformly across the multiple ejection plates 70.

The end 82a of the groove 82 (flow path) on the side of the opening end 73a of the notch 73 is located before the inclined portion 73b. With this configuration, the air flowing through the flow path flows into the part of the notch 73 that is before the inclined portion 73b. Therefore, it is easy to make the air flow along the inclined portion 73b by utilizing the entire inclined portion 73b.

- The thickness of the second plate 72 is 0.1 to 0.3 mm. This configuration makes it easier to form slits of a uniform width of 0.1 to 0.3 mm along the entire longitudinal length of the ejection plate 70.

- The thickness of the third plate 80 is 0.8 to 1.2 mm, so the depth of the through hole 81 as the air passage in the thickness direction of the third plate 80 can be secured to be 0.8 to 1.2 mm. In addition, in the thickness direction of the third plate 80, the depth of the flow path is 0.4 to 0.6 mm, and the width of the slit is 0.1 to 0.3 mm. Therefore, the depth of the air passage in the thickness direction of the third plate 80 can be gradually made shallower from the through hole 81 to the flow path to the slit. Therefore, the flow speed of the air ejected from the slit can be increased while suppressing the pressure loss of the air.

- In the longitudinal direction of the ejection plate 70, the distance between the opening ends 73a of adjacent notches 73 is 0.5 mm or less. This configuration makes it easier to further shorten the length of the portion between the slits that does not eject air.

- The first plate 71, the second plate 72, and the third plate 80 are diffusion bonded. With this configuration, it is easier to accurately determine the distance between the first plate 71 and the third plate 80, i.e., the width of the slit, by the thickness of the second plate 72, compared to when the first plate 71, the second plate 72, and the third plate 80 are bonded with an adhesive or the like.

- Multiple through holes 81 are formed in the third plate 80. Therefore, even if the number of notches 73 (slits) increases, i.e., even if the longitudinal length of the ejection plate 70 increases, it becomes easier to supply the required amount of air from the multiple through holes 81 to the multiple slits via the flow paths. Furthermore, the flow paths connect the multiple through holes 81 to the same number of notches 73. Therefore, it is possible to prevent differences in the amount of air supplied to each notch 73 (slit).

The first dust removal head 21 includes a jet plate 70 and a supply block 22 to which the jet plate 70 is attached. The supply block 22 is formed with a supply chamber 23 to which air is supplied and a first communication passage 24 that connects the supply chamber 23 to the outside. Therefore, air can be supplied to the supply chamber 23 from the outside of the first dust removal head 21 through the first communication passage 24. The supply block 22 is formed with a second communication passage that connects the supply chamber 23 to each of the multiple through holes 81. Therefore, air can be supplied from the supply chamber 23 through the second communication passage to the multiple through holes 81 of the jet plate 70, and further to the notch 73 (slit). Furthermore, since air is supplied from the first communication passage 24 to the multiple second communication passages through the supply chamber 23, the number of first communication passages 24 for supplying air to the multiple second communication passages can be reduced. Moreover, compared to when air is supplied to multiple second passages through a branch path branching off from the first communication passage 24, it is easier to supply air evenly to multiple second communication passages.

- The supply block 22 is formed in a rectangular parallelepiped shape, and a bottom surface 29a is formed at the bottom of the supply block 22, which extends over the entire length of the supply block 22 in the longitudinal direction and forms a first angle θ1 (a predetermined angle) with respect to the bottom surface 29b of the supply block 22. Therefore, by cutting or otherwise processing the bottom of the rectangular parallelepiped supply block 22, the bottom surface 29a can be easily formed to extend over the entire length of the supply block 22 in the longitudinal direction. Furthermore, the first angle θ1 that the bottom surface 29a forms with respect to the bottom surface 29b of the supply block 22 can be easily adjusted when forming the bottom surface 29a.

The ejection plate 70 is attached to the bottom surface 29a so that air is ejected from the slits parallel to the bottom surface 29a. Therefore, the ejection angle of the air relative to the bottom surface of the supply block 22 can be easily adjusted by adjusting the first angle θ1 without changing the configuration of the ejection plate 70 itself.

- The first angle θ1 is 15 to 45°. With this configuration, when air is ejected from the ejection plate 70 and blown onto the photomask M, the inventors have confirmed through experiments and simulations that the air between the bottom of the first dust removal head 21 and the photomask M is drawn in the direction of the horizontal component of the speed of the air ejected from the slit due to negative pressure and the viscosity of the air. This makes it possible to prevent the dust removed from the photomask M from scattering in the opposite direction to the horizontal component of the speed of the air ejected from the slit, and to prevent the removed dust from re-adhering to the photomask M.

The first angle θ1 is 25 to 35°. With this configuration, when air is ejected from the ejection plate 70 and blown onto the photomask M, the air between the bottom of the first dust removal head 21 and the photomask M is significantly drawn in the direction of the horizontal component of the speed of the air ejected from the slit due to negative pressure and the viscosity of the air, as confirmed by experiments and simulations by the present inventors.

The second communication passage opens to the bottom surface 29a, and the through hole 81 faces the open end of the second communication passage on the bottom surface 29a. Therefore, the second communication passage and the through hole 81 can be connected. Here, a storage groove 34 for storing a seal member is formed around the open end of the second communication passage on the bottom surface 29a, and the gap between the supply block 22 and the ejection plate 70 is sealed by the seal member stored in the storage groove 34. With this configuration, since the storage groove 34 for storing the seal member is formed on the bottom surface 29a of the supply block 22, it is not necessary to form the storage groove 34 in the ejection plate 70. Therefore, the ejection plate 70 can be formed thin, such as a thin plate, and the configuration of the ejection plate 70 can be simplified.

- The ejection plate 70 is formed with a plurality of through holes 81, a plurality of slits extending in a predetermined direction (the longitudinal direction of the ejection plate 70) and adjacent to each other in the predetermined direction, and a flow path that connects each of the plurality of through holes 81 to the same number of slits. Therefore, by supplying air to the inside of the ejection plate 70 from the plurality of through holes 81, air can be supplied to the plurality of slits through the flow path, and air can be ejected from the plurality of slits. Therefore, it is not necessary to form slits over the entire length in the predetermined direction in the first dust removal head 21, and it is easy to form each slit with a uniform width. Furthermore, the ejection plate 70 is formed with a plurality of through holes 81. Therefore, even if the number of slits is increased, that is, even if the length of the ejection plate 70 in the predetermined direction is increased, it is easy to supply the required amount of air from the plurality of through holes 81 to the plurality of slits through the flow path. Moreover, the flow path connects each of the plurality of through holes 81 to the same number of slits. Therefore, it is possible to suppress the occurrence of differences in the amount of air supplied to each slit.

・The supply block 22 to which the ejection plate 70 is attached is formed with a supply chamber 23 to which air is supplied and a first communication passage 24 that connects the supply chamber 23 to the outside. Therefore, air can be supplied to the supply chamber 23 from the outside of the first dust removal head 21 through the first communication passage 24. The supply block 22 is formed with a second communication passage that connects the supply chamber 23 to each of the multiple through holes 81. Therefore, air can be supplied from the supply chamber 23 to the multiple through holes 81 of the ejection plate 70 through the second communication passage, and thus to the slits. Furthermore, since air is supplied from the first communication passage 24 to the multiple second communication passages through the supply chamber 23, the number of first communication passages 24 for supplying air to the multiple second communication passages can be reduced. Moreover, it is easier to supply air evenly to the multiple second communication passages compared to the case where air is supplied to the multiple second passages through a branch path branched off from the first communication passage 24. This makes it easier to blow air uniformly in the specified direction in which the slits of the first dust removal head 21 extend.

- A plurality of ejection plates 70 are attached to the supply block 22 in a line in a predetermined direction, the supply chamber 23 extends in a predetermined direction along the plurality of ejection plates 70, and the second communication passage connects the supply chamber 23 to the plurality of through holes 81 of the plurality of ejection plates 70. According to this configuration, by attaching the plurality of ejection plates 70 in a line in a predetermined direction, a first dust removal head 21 having a long length in the predetermined direction can be realized. Furthermore, compared to the case where a first dust removal head 21 having a long length in a predetermined direction is realized with a single ejection plate 70, it is easy to eject air uniformly over the entire length of the predetermined direction in each ejection plate 70, so that it is easy to eject air uniformly over the entire length of the first dust removal head 21 in the predetermined direction. Moreover, air can be introduced from a common supply chamber 23 extending in a predetermined direction along the plurality of ejection plates 70 to the plurality of through holes 81 of the plurality of ejection plates 70, so that air can be supplied to the supply chamber 23 through a single first communication passage 24.

The storage grooves 34 are formed in a line in a predetermined direction corresponding to each of the multiple ejection plates 70, and the gap between the supply block 22 and each ejection plate 70 is sealed by a sealing member stored in each storage groove 34. With this configuration, the gap between each ejection plate 70 and the supply block 22 can be stably sealed by the sealing member, compared to a case in which a single sealing member is used to seal between an ejection plate 70 that is long in a predetermined direction and the supply block 22.

The main body is divided into supply blocks 22 corresponding to the multiple ejection plates 70, respectively. Therefore, the main body can be divided into multiple supply blocks 22, and the length of the main body in a predetermined direction can be increased by increasing the number of supply blocks 22. In addition, in the predetermined direction, a first engagement portion 35 communicating with the supply chamber 23 is provided at one end of the supply block 22, and a second engagement portion 36 communicating with the supply chamber 23 and engaging with the first engagement portion 35 is provided at the other end of the supply block 22. Therefore, by engaging the first engagement portion 35 with the second engagement portion 36, adjacent supply blocks 22 can be connected and the supply chambers 23 of adjacent supply blocks 22 can be communicated with each other.

- In a specified direction, the length of the second communication passage is equal to the length of the through hole 81. This configuration makes it easier for air to flow uniformly in a specified direction from the supply chamber 23 to the through hole 81.

The second communication passage extends from the supply chamber 23 in the direction opposite the through hole 81, then turns back toward the through hole 81 and connects to the through hole 81. This configuration makes it easier to lengthen the length of the second communication passage from the supply chamber 23 to the through hole 81, making it possible to make the air flow rate in a specified direction closer to uniform as the air flows through the second communication passage.

In the second communication passage, the flow passage surface area of the turn-back portion (communication passage 26) is smaller than the flow passage area of the other portions. With this configuration, the flow passage is narrowed once at the turn-back portion of the second communication passage, thereby reducing the variation in the air flow rate in a specified direction.

The hood 11 is formed in a rectangular tube shape with a pair of long sides 11a and a pair of short sides 11b, and the first opening 11d on the upper side is connected to a duct 18 that draws in air, and air is drawn in from the second opening on the lower side. Therefore, dust removed from the photomask M by air ejected from the first dust removal head 21 can be sucked in from the second opening and discharged from the first opening 11d to the duct 18.

- The first dust heads 21 are attached to a pair of long sides 11a so that the air ejected from the slits of the two first dust heads 21 is directed downward inside the hood 11. This allows the air ejected from the two first dust heads 21 to collide on the downward inside of the hood 11, and prevents the air ejected from the first dust heads 21 from leaking out from below the hood 11 to the outside. In particular, when the first angle θ1 is 15 to 45 (25 to 35) degrees and the top surface of the photomask M and the bottom surface 29b of the supply block 22 are arranged parallel to each other, the air between the bottom of the first dust head 21 and the photomask M can be drawn in the direction of the horizontal component of the speed of the air ejected from the slits by the negative pressure and the viscosity of the air.

- The second dust heads 40 are attached to a pair of short sides 11b so that the air ejected from the slits of the two second dust heads 40 is directed downward and inwardly of the hood 11. This prevents the air ejected from the first dust head 21 attached to the long side 11a from leaking out from below the short side 11b to the outside of the hood 11 after removing dust adhering to the photomask M.

When viewed from a direction parallel to the long side 11a, the first angle θ1, which is the angle between the direction of air ejected from the slits of the two first dust heads 21 and the top surface of the photomask M, is 15 to 45°, and when viewed from a direction parallel to the short side 11b, the second angle θ2, which is the angle between the direction of air ejected from the slits of the two second dust heads 40 and the top surface of the photomask M, is 15 to 45°. With this configuration, the air between the bottoms of the dust heads 21, 40 and the photomask M can be drawn in the direction of the horizontal component of the speed of the air ejected from the slits due to negative pressure and the viscosity of the air.

The first angle θ1 is 25 to 35°, and the second angle θ2 is 25 to 35°. This configuration significantly reduces the effect of the air between the bottom of the dust removal head 21, 40 and the photomask M being drawn in the direction of the horizontal component of the speed of the air ejected from the slit due to negative pressure and air viscosity.

The distance h1 between the opening ends of the slits of the two first dust removal heads 21 and the upper surface of the photomask M, and the distance h2 between the opening ends of the slits of the two second dust removal heads 40 and the upper surface of the photomask M, are 5 to 20 mm. The inventors of the present application have confirmed through experiments and simulations that such a configuration provides the above-mentioned effects.

- The first port 51 and the second port 61, which respectively supply air to the two first dust removal heads 21, are provided at one end of the dust removal device 10 in a predetermined direction. Therefore, the first port 51 and the second port 61 can be arranged together at one end of the dust removal device 10 in a predetermined direction. The first supply flow path supplies air from the first port 51 to one second dust removal head 40 through the supply chamber 23 of one first dust removal head 21. Therefore, by using the supply chamber 23 of the first dust removal head 21, air can be supplied to the second dust removal head 40 arranged at the end of the dust removal device 10 on the opposite side to the first port 51 in the predetermined direction. In addition, the second supply flow path can directly supply air from the second port 61 to the other first dust removal head 21 and the other second dust removal head 40.

The dust removal device 10 supplies air at an equal flow rate to the first port 51 and the second port 61. This configuration makes it easier to supply air at an equal flow rate to the multiple slits of the multiple ejection plates 70, and can prevent differences in the amount of air supplied to each slit.

The flow passage area of the supply chamber 23 is larger than the flow passage area of the first supply passage and the flow passage area of the second supply passage. With this configuration, the air supplied to the first supply passage and the second supply passage can be diffused once in the supply chamber 23, making it easier to supply an equal flow rate of air from the supply chamber 23 to the multiple second communication passages.

- The first plate 71, the second plate 72, and the third plate 80 are diffusion-bonded, so that the boundary portion 74 of the second plate 72 is bonded to the first plate 71 and the third plate 80, thereby stabilizing the width of each slit.

The above embodiment can be modified as follows. The same parts as those in the above embodiment are designated by the same reference numerals and will not be described.

- Distances h1 and h2 can also be set between 2 and 30 mm.

-The first angle θ1 and the second angle θ2 can also be set between 10 and 50°.

-The two second dust removal heads 40 can also be omitted.

- The first engaging portion 35 and the second engaging portion 36 can also be formed to directly engage with each other. For example, the first engaging portion 35 can be formed as an annular convex portion, the second engaging portion 36 can be formed as an annular concave portion, and the first engaging portion 35 and the second engaging portion 36 can be fitted together.

-Instead of forming the storage groove 34 in the supply block 22, the storage groove can also be formed in the ejection plate 70.

- A bottom surface 29a (predetermined plane) can also be formed over the entire bottom of the supply block 22.

- In the longitudinal direction of the ejection plate 70, the distance between the opening ends 73a of adjacent notches 73 can be set to 0.5 to 1.0 mm.

- The thickness of the second plate 72 can also be set to 0.05 to 0.5 mm.

- The end 82a on the side of the opening end 73a of the notch 73 in the groove 82 (flow path) can also be positioned further back than the inclined portion 73b.

-The boundary portion 74 may have a shape that is not line symmetric.

- It is also possible to adopt a configuration in which the bottom surface 29a and the direction in which air is ejected from the slits in the ejection plate 70 are not parallel.

- The first plate 71, the second plate 72, and the third plate 80 can also be made of an aluminum alloy or a copper alloy.

- The first plate 71, the second plate 72, and the third plate 80 can also be joined by welding or with an adhesive.

- It is also possible to adopt a configuration that includes a first supply flow path that supplies air to one of the first dust removal heads 21, a second supply flow path that supplies air to the other first dust removal head 21, a third supply flow path that supplies air to one of the second dust removal heads 40, and a fourth supply flow path that supplies air to the other second dust removal head 40. Then, air is supplied at an equal flow rate to the first supply flow path and the second supply flow path, and air is supplied at an equal flow rate to the third supply flow path and the fourth supply flow path. With this configuration, it becomes easier to supply air at an equal flow rate to the two first dust removal heads 21, and it is possible to suppress the occurrence of a difference in the amount of air ejected from the slits of the two first dust removal heads 21. In addition, it becomes easier to supply air at an equal flow rate to the two second dust removal heads 40, and it is possible to suppress the occurrence of a difference in the amount of air ejected from the slits of the two second dust removal heads 40.

- Nitrogen, oxygen, argon, etc. can also be used as the gas sprayed by the spray plates 70, 90.

-Liquid crystal substrates, wafers, glass substrates, etc. can also be used for dust removal.

The above modifications can also be implemented in combination.

10...dust removal device, 20...dust removal head assembly, 21...first dust removal head (dust removal head), 22...supply block, 23...supply chamber, 24...first communication passage, 25...communication passage, 26...communication passage, 27...communication passage, 28...communication passage, 40...second dust removal head (dust removal head), 42...supply block, 43...supply chamber, 45...communication passage, 46...communication passage, 47...communication passage, 48...communication passage, 62a...opening, 70...ejection plate (ejection part), 71...first plate (first member), 72...second plate (second member), 73...notch, 73a...opening end, 73b...inclined portion, 74...boundary portion, 80...third plate (third member), 81...through hole (inlet), 82...groove (flow passage), 83...groove (flow passage), 90...ejection plate (ejection part).

Claims (13)

A dust remover nozzle for removing dust from a target for dust removal, the dust remover nozzle ejecting gas to be blown onto the target for dust removal,
A first member formed of metal in a rectangular plate shape having a short side direction and a long side direction;
a second member made of a metal having a certain thickness and formed in a rectangular plate shape corresponding to the shape of the first member, and having a plurality of notches formed adjacent to each other over the entire length in the longitudinal direction and opening at one end in the lateral direction;
a third member made of metal and formed into a rectangular plate shape corresponding to the shape of the first member, the third member having a through hole formed therein;
The first member and the third member are joined together with the second member sandwiched therebetween,
a flow passage that communicates the through hole and the plurality of cutouts is formed in the third member,
The ejection portion for a dust removal device, wherein an inclined portion is formed in each of the plurality of cutouts within a predetermined range from an open end, the length of the cutout being increased in the longitudinal direction as it approaches the open end. In the second member, a boundary portion between the notches is formed symmetrically with respect to a center line that defines a center of the second member in the longitudinal direction,
The ejection part for a dust remover according to claim 1 , wherein a half portion having a shape obtained by splitting the boundary portion in half is formed at both ends of the second member in the longitudinal direction. The ejection part for a dust removal device according to claim 1 or 2, wherein the end of the flow passage on the side of the opening end is located before the inclined portion. The ejection part for a dust remover according to any one of claims 1 to 3, wherein the thickness of the second member is 0.1 to 0.3 mm. The thickness of the third member is 0.8 to 1.2 mm.
The ejection portion for a dust remover according to claim 4, wherein the depth of the flow passage in the thickness direction of the third member is 0.4 to 0.6 mm. The dust removal device ejection section according to any one of claims 1 to 5, wherein the distance between the open ends of adjacent notches in the longitudinal direction is 0.5 mm or less. The dust removal device ejection part according to any one of claims 1 to 6, wherein the first member, the second member, and the third member are diffusion bonded. The third member has a plurality of through holes formed therein,
The ejection part for a dust remover according to any one of claims 1 to 7, wherein the flow path connects a plurality of the through holes to an equal number of the notches. The dust remover jetting part according to claim 8,
A dust removal head comprising: a main body to which the dust removal device ejection part is attached;
The dust removal head has a supply chamber to which the gas is supplied, a first communication passage connecting the supply chamber to the outside, and a second communication passage connecting the supply chamber to each of the multiple through holes, formed in the main body. The main body is formed in a rectangular parallelepiped shape,
A predetermined plane is formed on the bottom of the main body, the predetermined plane extending over the entire length of the main body in the longitudinal direction and forming a predetermined angle with respect to the bottom surface of the main body;
The dust removal head according to claim 9 , wherein the dust removal device jetting part is attached to the predetermined plane so that the gas is jetted from the notch parallel to the predetermined plane. The dust removal head according to claim 10, wherein the predetermined angle is 15 to 45°. The dust removal head according to claim 10 or 11, wherein the predetermined angle is 25 to 35°. The second communication passage is open to the predetermined plane,
the through hole faces an open end of the second communication passage in the predetermined plane,
a housing groove for housing a seal member is formed around an open end of the second communication passage in the predetermined plane,
The dust removal head according to any one of claims 10 to 12, wherein the seal member housed in the housing groove seals between the main body and the dust removal device ejection part.

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