JP7566514B2 - Imaging device and imaging method - Google Patents

Description

The present invention relates to an imaging device and an imaging method.

The workpiece may, for example, have a bonding wire bonded to a connection site. Wire bonding is an example of a process that uses such bonding wire. Wire bonding is a method of electrically connecting a circuit pattern on a board to other electronic components, or to electrodes on a semiconductor package, using a wire (diameter 10 to several hundred micrometers) made of metal such as gold, copper, or aluminum.

Figure 8 shows a state in which a pad 2 of an IC chip 1 is electrically connected to a pad 3 of another electronic component via a wire 4. In electronic components that have been wire-bonded, a visual inspection of the wires 4 may be performed to inspect the bonding condition. Specifically, each wire is accurately recognized, and, for example, the shape of the wires 4 and the contact between the wires are inspected, as well as the height of the wires 4 as shown in Figure 9 and wire bending as shown in Figure 10.

Conventionally, there is a method for inspecting bonding wires, as described in Patent Document 1, in which the height of the wire is calculated from the blur width of an image of the wire. In this case, the optical means is focused on an arbitrary point on the object to be inspected, the height position of this point in the Z direction is set as a reference value, an image of the wire when the wire is focused is captured by a camera, and the height of the wire is calculated from the blur width of the imaged wire.

The wire recognition method described in Patent Document 2 uses a wire height image to recognize the position of one connection point (start point) of the wire and the position of the other connection point (end point) of the wire, and extracts the wire area between them as the wire. In Patent Document 2, a distance image can be obtained and displayed in 3D as shown in Figure 11. This makes it possible to grasp the three-dimensional structure of the target workpiece and to easily understand (grasp) any abnormalities in the loop shape of the wire.

That is, in Patent Document 2, since height information can be obtained as a surface from a distance image, the wire area can be recognized as a surface, the wire area can be stably separated from the area other than the wire, and the trajectory of the wire can be easily extracted. In addition, since the connection surface area to which the wire is connected is identified and the area to be bonded is specified, there is no need to recognize the tip of the wire. Therefore, even if the bonding position of the wire is shifted relative to the connection surface of the chip, etc. (even if it is different for each wire), the trajectory of the wire can be easily extracted without being affected. When extracting the wire to be detected, the wire to be detected is the one that connects one connection surface area of the wire to be detected and the other connection surface area of the wire to be detected. Therefore, things other than the wire to be detected (for example, other wires different from the wire to be detected and foreign objects, etc.) can be excluded from the recognition of the wire to be detected. This makes it possible to identify the wire to be detected.

Japanese Patent Application Publication No. 5-160233 JP 2016-157720 A

In Patent Document 1, the ball to be inspected is identified, and an image is acquired by focusing on the ball to be inspected and erasing the shadow of the wire corresponding to the ball. In other words, the image is not in focus on parts other than the ball to be inspected (for example, balls not being inspected and the wires corresponding to them). For this reason, if there are multiple balls to be inspected, an image must be acquired for each ball using the method described in Patent Document 1, which is time-consuming and labor-intensive, especially when there are a large number of balls or when the wires are densely packed. Moreover, in the method of Patent Document 1, because the shadow of the wire is erased, inspection of the wire, such as inspection of the wire loop shape, cannot be performed simultaneously. For this reason, if wire inspection is desired, a separate inspection of the wire must be performed, which is time-consuming and labor-intensive.

In addition, in the wire inspection methods described in Patent Documents 1 and 2, when it is desired to enlarge and check the loop shape of a particular wire, the operator must search for the position of the wire, which takes a lot of time. In particular, when distance images are used as in Patent Document 2, it is necessary to store distance images of the entire workpiece, which requires a large storage capacity.

In view of the above, the present invention aims to provide an imaging device and imaging method that can improve confirmation work, shorten the work required for operation, reduce image storage capacity, and improve processing speed.

The imaging device of the present invention is an imaging device that includes an image creation means, a recipe setting means, an image processing means, and an image display means, and that images a workpiece. The image creation means is a means for creating display image data of the workpiece, and includes an imaging means for capturing an image of the workpiece, and a distance image creation means for creating a distance image from multiple images captured by the imaging means with different focuses. The recipe setting means is a means for setting a recipe based on the display image data created by the image creation means, and includes an image creation setting means for setting conditions for capturing images with the imaging means, an image processing setting means for setting items related to the handling of images, a display range setting means for setting which range of the entire image is to be the target for image output, and a recipe storage means for storing the set recipe. The image processing means performs image processing based on the image data created by the image creation means and the recipe set by the recipe setting means, and the image display means displays the entire image and/or images of each processing target for each workpiece in response to a user's instruction. Here, the recipe refers to the imaging conditions of the imaging means and the image processing conditions given to the image processing means. In addition, imaging conditions include lighting settings, number of images taken, focal plane movement pitch, etc., and image processing conditions include display range and pass/fail judgment conditions, etc.

According to the imaging device of the present invention, the image creation means can create display image data of the workpiece, the recipe setting means can set a recipe based on the display image data created by the image creation means, and image processing can be performed based on the image data created by the image creation means and the recipe set by the recipe setting means. In addition, the image display means can display images of each processing target.

For this reason, the imaging device of the present invention can perform image processing based on the image data created by the image creation means and the recipe set by the recipe setting means, and can image the area to be imaged under optimal imaging conditions.

The display means preferably includes a three-dimensional display means for displaying the image data as a three-dimensional image. In this way, the three-dimensional display means allows the three-dimensional structure of the imaged area to be grasped, making observation or examination easier.

The image display means may include a processing result list display means for displaying the test results, a display direction instruction means for allowing the user to specify the display direction of the image display range, and a magnification rate change means for allowing the user to specify the display magnification rate of the image display range.

By configuring it in this way, the inspection results detected by the processing result list display means can be displayed on the image display means, making it easy to check the inspection results. In addition, the display direction instruction means allows the user to specify the display direction of the image display range, and the magnification rate change means allows the user to specify the display magnification rate of the image display range.

At least one of the display direction and the display magnification ratio used in one image output display may be inherited in the next image output display. By configuring in this way, it is possible to display an image under optimal conditions for the imaging area.

The image creation means may include an all-focus image creation means for collecting in-focus parts from a plurality of images to create a pseudo image in which the entire image is in focus. The image processing means may also include a position correction means for correcting the setting start point and inclination when the display range is set by the display range setting means. In the case of position correction, the all-focus image created by the all-focus image creation means can be used to correct the position when cutting out a portion corresponding to the display range from the obtained image (correction based on a characteristic shape on the workpiece or an alignment mark such as a pattern for positioning (a registration mark)).

The image processing means may include an image cropping means for cropping out an image area at a corrected position when the position correction means performs position correction, or an image area set by the display range setting means when the position correction means does not perform position correction, from the original image to obtain independent image data.

By configuring it in this way, it is possible to cut out the image area within the display range where position correction has been performed or where position correction is not required from the original image, and the display range can be displayed accurately.

It may also be equipped with a processing result storage means for storing and saving the cropped image data for each display range. In this way, with a processing result storage means, the cropped image data can be stored and saved, making it highly convenient.

The subject to be imaged may be a bonding wire bonded to the connection site.

The system is equipped with an inspection means that inspects each object from the captured image data, and can display the object in 3D. In this case, inspection means checking whether the object meets certain standards, whether it is suitable or not, and whether there are any abnormalities.

The device may be provided with a pass/fail judgment means for setting pass/fail judgment criteria for each test object and calculating the pass/fail result for each test object. In this way, a device equipped with a pass/fail judgment means can automatically make pass/fail judgments, and is easy to use.

The imaging method of the present invention includes an image creation step, a recipe setting step, an image processing step, and an image display step, and is an imaging method for imaging a workpiece, the image creation step being a step of creating display image data of the workpiece, an imaging step of imaging an image of the workpiece, and a distance image creation step of creating a distance image from a plurality of images with different focuses captured in the imaging step, the recipe setting step being a step of setting a recipe based on the display image data created in the image creation step, and including an image creation setting step for setting conditions for imaging in the imaging step, an image processing setting step for setting items related to image handling, a display range setting step for setting which range of the overall image is to be the target for image output, and a recipe storage step for storing the set recipe, the image processing step being an inspection step for performing an inspection based on the image data created in the image creation step and the recipe set in the recipe setting step, and the image display step being a step of displaying the overall image and/or the image of each processing target for each workpiece in response to a user's instruction.

According to the imaging method of the present invention, in the image creation process, it is possible to create display image data of the workpiece, and in the recipe setting process, it is possible to set a recipe based on the display image data created by the image creation means, and it is possible to perform image processing based on the image data created in the image creation process and the recipe set in the recipe setting process. In addition, in the image display process, it is possible to display images of each processing target.

Therefore, the imaging device of the present invention can perform image processing based on the image data created in the image creation process and the recipe set in the recipe setting process, and can image the area to be imaged under optimal imaging conditions.

In the present invention, the workpiece to be inspected can be inspected without being mistaken for another workpiece, and without being disturbed by other workpieces. For this reason, the bonding wire bonded to the connection part is the most suitable workpiece.

1 is a block diagram showing an imaging device of the present invention; 3A to 3C are process diagrams of the imaging method of the present invention. FIG. 11 is a flowchart of a recipe setting process for the imaging apparatus of the present invention. FIG. 4 is a continuation of the flowchart shown in FIG. 3 . FIG. 2 is a flow chart showing steps from an image creation process to a part of an image processing process of the imaging device of the present invention. FIG. 6 is a flowchart of image processing steps subsequent to those in FIG. 5 . FIG. 2 is a flow chart showing a part of an image display process of the imaging device of the present invention. FIG. 8 is a flowchart of an image display process subsequent to the process shown in FIG. 7 . 1 is a fully focused image of an electronic component and wires to which wire bonding is applied. 1 is a distance image of an electronic component and wires to which wire bonding is applied. 1 is a 3D display image of an electronic component and wires to which wire bonding is applied. FIG. 1 is a perspective view of an electronic component to which wire bonding is applied. FIG. 1 is a simplified diagram showing the wire height being inspected. FIG. 1 is a simplified diagram showing inspection of wire bending. FIG. 3 is a 3D display diagram of a distance image.

The following describes an embodiment of the present invention with reference to Figures 1 to 11.

Figure 1 is a block diagram showing the overall configuration of an imaging device according to the present invention. The imaging device 100 inspects bonding wires 14 (hereinafter sometimes simply referred to as wires 14) as multiple workpieces 40 bonded to connection sites (pads 12 of an IC chip 11) as shown in Figure 9 etc. As shown in Figure 1, the imaging device 100 includes an image creation means 20, a recipe setting means 21, an image processing means 22, and an image display means 23.

The image creation means 20 is a means for creating image data for display of the workpiece 40, and includes an imaging means 25 for capturing an image of the workpiece 40, and a distance image creation means 26 for creating a distance image 17 (see FIG. 10) from multiple images captured by the imaging means 25 with different focal points. In this embodiment, the image creation means 27 includes an all-focus image creation means 27 for collecting in-focus areas from multiple images to artificially create an image (all-focus image 16 (see FIG. 9)) in which the entire image is in focus.

The imaging means 25 can be composed of, for example, a CCD camera or a CMOS camera, and can move the focal plane of an image focused on a part of the object to be photographed (imaged object). In this case, a plurality of wires 14 and an IC chip 11 are imaged as the object to be photographed (imaged object). The distance image creation means, for example, stores relative distance information at the time when the degree of focus is maximized for each pixel at the same time as imaging, and creates a distance image 17 from the imaging means 25 to the object to be photographed, as shown in FIG. 10. Here, the distance image 17 is an image expressed by brightness (grayscale) according to the distance from the imaging means 25, and the height information of the object photographed can be obtained from the distance image 17, for example, a high object is expressed in a light color, and a low object is expressed in a dark color. In that case, an object close to the imaging means 25 is closer to white, and an object far from the imaging means 25 is closer to black. In other words, the distance image 17 is relative distance information at the time when the degree of focus for each pixel is maximized simultaneously with the image capture means 25, and is an image expressed by brightness according to the distance from the image capture means 25.

The all-focus image 16 (see FIG. 9) created by the all-focus image creation means 27 is created based on multiple image data with different focuses. Here, the all-focus image 16 is created by continuously changing the distance between the imaging system and the object (scanning the camera in the vertical direction, which is the Z direction) to capture multiple images with different focuses. The focus is then evaluated for each local region, and the all-focus image 16 is reconstructed from a combination of local images that are in focus. As a result, all pixels of the all-focus image 16 are in focus. In other words, the all-focus image 16 is an image in which the focus is evaluated for each local region, reconstructed from a combination of local images that are in focus, and in focus for all pixels.

The recipe setting means 21 is a means for setting a recipe based on the display image data created by the image creation means 20, and includes an image creation setting means 28 for setting the conditions for capturing images by the imaging means 25, an image processing setting means 29 for setting the image handling, a display range setting means 30 for setting which range of the overall image is to be the target for image output, and a recipe storage means 31 for storing the set recipe.

In other words, in the first step of recipe setting using the recipe setting means 21, an image of the workpiece 40 is taken using the image creation means 20 (focusing method), and from the result, at least one of the distance image 17 and the all-focus image 16 is displayed on the image display means 23, allowing the user to input for recipe setting (display range setting, etc.). Attaching the all-focus image 16 as a texture has the advantages of improving realism and enhancing understanding, and allowing the user to recognize the location from color information even if there is no change in height. Therefore, if the user specifies its use, the all-focus image 16 can be created by the image creation means 20 and used by the recipe setting means 21.

In the second stage of recipe setting by the recipe setting means 21, the image (obtained in the first stage) is displayed while the user inputs necessary information. The necessary information includes the imaging conditions (lighting settings, number of images taken, focal plane movement pitch, etc.) to be provided to the image creation means 20, and the image processing conditions (display range, pass/fail judgment conditions) to be provided to the image processing means 22.

The image processing means 22 performs image processing based on the image data created by the image creation means 20 and the recipe set by the recipe setting means 21, and includes a position correction means 32, an image extraction means 33, a pass/fail determination means 34, and a processing result storage means 35.

When processing an image, the display range is cut out from the image data, and when determining the portion to be cut out as the display range, the position correction means 32 corrects the cut-out start point (set start point) and inclination by, for example, matching characteristic parts within the image so that the intended part is cut out with high accuracy.

The image cropping means 33 is a means for cropping out the image area at the corrected position from the original image when the position correction means 32 performs position correction, or cropping out the image area at the completed position when position correction is not performed, so that the cropped image can be handled as independent image data.

The pass/fail judgment means 34 sets pass/fail judgment criteria for each inspection object and calculates the pass/fail result for each inspection object. In other words, a threshold value is determined and the pass/fail of the inspection item is judged based on this threshold value. The processing result storage means 35 is a means for storing (saving) the cut-out image for each display range, and when an inspection is carried out, it is stored together with the inspection results. Here, inspection means checking whether something is pass/fail or there is an abnormality against a certain criterion.

The image display means 23 displays an overall image for each workpiece and/or an image of each processing target according to a user's instruction, and includes a three-dimensional display means 36 that displays image data as a three-dimensional image, a processing result list display means (processing result display means) 37 that displays the inspection results, a display direction instruction means 38 that allows the user to specify the display direction of the image display range, and a magnification rate change means 39 that allows the user to specify the display magnification rate of the image display range.

The processing result list display means 37 is a means for displaying inspection images and result lists for each work (product), and the three-dimensional display means 36 can display image data of the processing object (bonding wire, etc.) specified by the user as a three-dimensional image.

The display direction instruction means 38 is a means by which the user can specify the display direction of the image display range, and methods of specifying the direction include input using a mouse (including a trackball) or keyboard, etc.

The magnification ratio changing means 39 is a means by which the user can specify the display magnification ratio of the image display range, and in this case, the method of specifying the magnification ratio can be input using a mouse (including a trackball), a keyboard, etc.

In this case, the display method and magnification rate instructed (changed) on one screen are configured to be maintained (inherited) on the next screen. By configuring it to be maintained (inherited) in this way, it is possible to provide a function for comparing and observing each imaging unit (inspection unit) with the same field of view. This is effective for comparing posture states and detecting movement states, etc.

As mentioned above, the imaging device includes an inspection function. That is, each inspection object can be inspected from the three-dimensional shape data captured by the imaging means 25, and the three-dimensional shape can be displayed by the image display means 23. Also, the pass/fail judgment means 34 can calculate the pass/fail result for each treatment object according to the set pass/fail judgment criteria.

Specifically, if the object to be inspected is a bonding wire 16, it is possible to determine whether the measurement data satisfies criteria such as upper and lower limits for height, width, radius, and diameter.

A computer is basically composed of input means with an input function, output means with an output function, memory means with a storage function, calculation means with a calculation function, and control means with a control function. The input function is for reading information from the outside into the computer, and the read data and programs are converted into signals in a format suitable for the computer system. The output function is for displaying calculation results and stored data to the outside. The memory means is for storing and saving programs, data, processing results, etc. The calculation function is for processing data by calculating and comparing according to program instructions. The control function is for decoding program instructions and issuing instructions to each means, and this control function oversees all of the computer's means.

Input means include a keyboard, mouse, tablet, microphone, joystick, scanner, capture board, etc. Output means include a monitor, speaker, printer, etc. Storage means include memory, hard disk, CD/CD-R, PD/MO, etc. Calculation means include a CPU, etc., and control means include a CPU, motherboard, etc.
Therefore, the means other than the camera of the imaging means can be configured by a single publicly known and publicly used existing computer.

The imaging method using the imaging device described above involves the steps shown in FIG. 2. That is, this imaging method includes an image creation step 41, a recipe setting step 42, an image processing step 43, and an image display step 44.

The image creation process 41 is a process for creating image data for displaying the workpiece 40, and includes an imaging process 45 for capturing an image of the workpiece 40, a distance image creation process 46 for creating a distance image 17 from multiple images captured in the imaging process 45 with different focal points, and an all-focus image creation process 47.

The recipe setting process 42 is a process for setting a recipe based on the display image data created in the image creation process 41, and includes an image creation setting process 48 for setting the conditions for capturing images in the image capture process 45, an image processing setting process 49 for setting the image handling, a display range setting process 50 for setting which range of the overall image is to be targeted for image output, and a recipe storage process 51 for storing the set recipe.

The image processing process 43 is a process for performing an inspection based on the image data created in the image creation process and the recipe set in the recipe setting process, and includes a position correction process 52, an image extraction process 53, a pass/fail determination process 54, and a processing result storage process 55.

The position correction process 52 is a process performed by the position correction means 32, the image extraction process 53 is a process performed by the image extraction means 33, the pass/fail determination process 54 is a process performed by the pass/fail determination means 34, and the processing result storage process 55 is a process performed by the processing result storage means 35.

The image cutting out process 53 is a means for cutting out the image area at the corrected position from the original image when the position is corrected by the position correction means 32, or the image area at the completed position when the position is not corrected, so that the image area can be handled as independent image data.

The pass/fail judgment process 54 sets pass/fail judgment criteria for each inspection object and calculates the pass/fail result for each inspection object. In other words, a threshold value is determined, and the pass/fail of the inspection item is judged based on this threshold value. The processing result storage means 35 is a means for storing (saving) the cut-out image for each display range, and when an inspection is performed, it is stored together with the inspection result.

The image display process 44 displays an overall image for each workpiece and/or an image of each processing target according to a user's instruction, and includes a three-dimensional display process 56 that displays image data as a three-dimensional image, a processing result list display process (processing result display process) 57 that displays the inspection results, a display direction instruction process 58 that allows the user to specify the display direction of the image display range, and a magnification rate change process 59 that allows the user to specify the display magnification rate of the image display range.

Next, each step will be described in detail according to the flowcharts shown in Figures 3 to 8. First, the recipe creation step 42 will be described using Figures 3 and 4. First, the image creation setting step 41 is performed (step S1). In this image creation setting step 41, the imaging conditions (illumination settings, number of imaging attempts, focal plane movement pitch, etc.) are given. In this case, the imaging step 45 is performed for the imaging target (step S2). Next, the process proceeds to step S3, where the distance image creation step 46 is performed, and then the process proceeds to step S4. In step S4, it is determined whether or not to perform the all-focus image creation step 47. If it is determined in step S4 that the all-focus image creation step 47 is to be performed, the process proceeds to step S5, where the all-focus image creation step 47 is performed, and then the process proceeds to step S6. Also, if it is determined in step S4 that the all-focus image creation step 47 is not to be performed, the process proceeds to step S6. In step S6, it is determined whether or not to retake the image. If the image is to be retaken, the process returns to step S1. Also, in step S6, the process proceeds to A in Figure 4 without retaking the image. The purpose of retaking an image is to change the shooting conditions.

From A in FIG. 4, the process moves to step S9, where image processing setting step 49 is performed. From step S9, the process moves to step S10, where display range setting step 49 is performed. From step S10, the process moves to step S11, where an identification symbol linking step is performed for the processing object. Here, the linking step refers to associating (linking) the inspection object (wire 14, etc.) with an identification symbol that is preset, automatically generated, or set by manual input. Using this identification symbol as a key, the processing results in FIGS. 5 and 6, which will be described later, are saved, and images displayed in the processing in FIGS. 7 and 8, which will be described later, are read out.

After the linking process in step S11 is completed, the process proceeds to step S12, where the recipe storage process 51 is performed. This completes the recipe setting process 42. The contents stored in the recipe storage process 51 include, for example, the imaging conditions, image processing setting conditions, and display range conditions. The imaging conditions include the lighting conditions, number of images taken, sensitivity settings, number of images taken, and focal plane movement pitch, while the image processing setting conditions include pass/fail judgment conditions, and the display range conditions include the image display range and association (linking) information with identification symbols representing each display range.

Next, the processing steps will be explained using Figures 5 and 6. First, the imaging step 45 is performed (step S15), and then the distance image creation step 46 is performed (step S16). That is, an image of the workpiece (product, etc.) is captured using the focusing method, and the distance image 17 is created. Then, the process proceeds to step S17, where it is determined whether to perform the all-focus image creation step 47.

If it is determined in step S17 that the all-in-focus image creation process 47 is to be performed, the process proceeds to step S18, and if it is determined that the all-in-focus image creation process 47 is not to be performed, the process proceeds to step S20. In step S18, it is determined whether or not to perform the position correction process 52. If it is determined in step S18 that the position correction process 52 is to be performed, the process proceeds to step S19, where the position correction process 52 is performed, and the image extraction process of step S20 is performed. In other words, a portion corresponding to the display range is extracted from the obtained image.

If the position correction step 52 is not performed, the all-focus image creation step 47 is not essential. If the position correction is performed, the all-focus image created by the all-focus image creation means can be used to correct the position when cutting out the portion corresponding to the display range from the obtained image (correction based on the characteristic shape on the workpiece or alignment marks such as alignment patterns (register marks)).

In the image extraction process, image information is extracted according to the display range. The image to be extracted may be just the distance image, but if an all-in-focus image is being created, the distance image of that area is extracted.

When the image extraction process 53 is completed, the process proceeds to step S21 in FIG. 6 to determine whether or not to perform the pass/fail judgment process 54. If the pass/fail judgment process is to be performed, the process proceeds to step S22 to perform the pass/fail judgment process 54. If it is determined in step S21 that the pass/fail judgment process 54 is not to be performed, the process proceeds to step S23. In this case, if a pass/fail judgment is specified, the judgment result is calculated according to the judgment criteria stored in the recipe storage means 31 of the recipe setting means 21.

When pass/fail determination step 54 is completed, the process proceeds to step S23, where processing result storage step 55 is performed. In processing result storage step 55, pass/fail determination results, cropped distance images, cropped all-focus images, etc. can be stored in correspondence with different symbols assigned to each processing target.

In principle, the recipes created in the recipe setting step 42 are used as the imaging and processing conditions used in each step. However, pre-stored default settings and the like are also included in the settings made by this recipe setting means.

Next, the image display process will be described with reference to Figs. 7 and 8. First, as shown in Fig. 7, a processing result list display process 57 is performed in step S25. In this case, the processing results related to the target work specified by the user are called from the processing result storage means 35 and displayed. Then, the process proceeds to step S26, where a 3D display process 56 is performed. In this case, of the displayed processing results, the processing target corresponding to the identification symbol specified by the user is displayed in three dimensions.

The image display process 44 also includes a display direction instruction process 58 and a magnification rate change process 59 as shown in FIG. 2, and these processes will be described with reference to FIG. 8. First, a determination is made as to whether or not to perform the display direction instruction process of step S27. If the display direction instruction process is to be performed in step S27, the process proceeds to step S28 where the display direction instruction process is performed. That is, the display direction for the processing target is instructed and changed. Thereafter, the process proceeds to step S29. If the display direction instruction process 58 is not to be performed in step S27, the process proceeds to step S30.

In step S29, it is determined whether or not to perform the magnification ratio change process 59. If it is determined in step S29 that it should be performed, the process proceeds to step S31, where the magnification ratio change process 59 is performed. If it is determined in step S29 that the magnification ratio change process 59 should not be performed, the process ends.

In step S30, it is also determined whether or not to perform the magnification ratio change process 59. If it is determined in step S30 that it should be performed, the process proceeds to step S31, where the magnification ratio change process 59 is performed. If the magnification ratio change process 59 is not to be performed in step S30, the process ends. That is, there are cases where both the display direction instruction process 58 and the magnification ratio change process 59 are performed, cases where either the display direction instruction process 58 or the magnification ratio change process 59 is performed, or cases where neither process is performed.

When the display direction or magnification is changed, the changed settings are maintained for the display of the next processing target. Display direction and magnification can be specified using the pointer, direct input, buttons (soft keys, hard keys), etc.

If there are still processing objects (wires, etc.) to be processed, it is preferable to repeat the 3D display process (including display direction indication process 58 and/or magnification rate change process 59) for the next processing object. It is also possible to select and display the processing object (wires, etc.) from the processing result list, or to directly input an identification symbol and display it.

Next, a specific example (method of maintaining the display direction) using Figs. 9 to 11 is shown. As shown in Fig. 9, wires 14 as multiple workpieces 40 bonded to connection sites (pads 12 of an IC chip 11) are inspected, and Fig. 9 shows an all-focus image 16. In this case, as shown in the distance image 17 in Fig. 10, there are nine wires 14, indicated as A, B, C, D, E, F, G, H, I, J, and J.

In Figure 10, the image output area W3 of C is shown. Therefore, the image output range of A is W1, and the image output range of B is W2. In addition, the image output range of D is W4, the image output range of E is W5, the image output range of H is W6, the image output range of T is W7, the image output range of T is W8, and the image output range of R is W9.

That is, in this imaging device, first, an identification symbol such as I, B, C, D, E, F, G, H, I, I, or I is attached to each wire 14. Next, an image of each wire 14 is acquired by the imaging means 25. In this case, multiple actual images with different focuses in the vertical direction are acquired. As a result, multiple image data with different focuses are stored. Then, an all-focus image 16 is created from the stored image data, and a distance image 17 is created based on this all-focus image 16 (step S3).

After that, the image output areas W are registered. That is, the image output areas W (W1, W2, W3, W4, W5, W6, W7, W8, W9) for the wires 14 A, B, C, D, E, F, G, H, I, J, and R are registered.

If there is any misalignment of the wire 14 in the registered image output area W, this misalignment is corrected (modified). Then, the identification symbol of the work (wire 14) is linked to the registered image output area W. That is, the wire 14 of A is set as the image output area W1, the wire 14 of B is set as the image output area W2, the wire 14 of C is set as the image output area W3, the wire 14 of D is set as the image output area W4, the wire 14 of E is set as the image output area W5, the wire 14 of H is set as the image output area W6, the wire 14 of T is set as the image output area W7, the wire 14 of H is set as the image output area W8, and the wire 14 of R is set as the image output area W9.

After that, the distance image 17 is displayed in 3D. In this example, the wire 14 for "Ha" in the image output area W3 is displayed in 3D. When the distance image 17 is displayed in 3D, as shown in step S8 of FIG. 4, the identification symbol is switched and displayed in 3D. That is, for example, the image output area W1 for the "I" symbol → the image output area W2 for the "R" symbol → the image output area W3 for the "Ha" symbol → the image output area W4 for the "D" symbol → the image output area W5 for the "E" symbol → the image output area W6 for the "H" symbol → the image output area W7 for the "T" symbol → the image output area W8 for the "H" symbol → the image output area W9 for the "R" symbol.

In this imaging device, for example, two alignment marks, a and b, are provided on the chip 11, and the first position 1st of the image output area W3, c, is determined by these alignment marks a and b, and two alignment marks, c and d, are provided in the image 17, and the second position 2nd of the image output area W3, c, is determined by these alignment marks c and d.

Then, for example, the data is cut out so that the left side is the first position 1st and the right side is the second position 2nd. By setting it up like this, the viewer can display each data from the same direction (maintaining the display direction). Also, the magnification can be maintained (inherited) on the next screen.

In the imaging device of the present invention, each workpiece 40 (wire 14) can be displayed in 3D (three-dimensional display), so that the three-dimensional structure of the target workpiece 40 (wire 14) can be grasped. Moreover, when inspecting a desired workpiece, the identification symbol (workpiece number, etc.) of the desired workpiece 40 (wire 14) can be selected, and the workpiece 40 (wire 14) can be inspected. In addition, since it is only necessary to register the image output area W for each workpiece 40 (wire 14), the registered range can be limited and the image can be saved. Therefore, the three-dimensional structure of the inspected workpiece 40 (wire 14) can be grasped, and it is easy to grasp the abnormality of the loop shape of the workpiece 40 (wire 14). Moreover, since the registered range can be limited and the image can be saved, the data capacity of the image can be reduced, and the processing speed can be increased, so that the three-dimensional display of the workpiece 40 (wire 14) can be performed quickly. In addition, the identification symbol of the wire can be linked to the registered image output area W. This allows the workpiece 40 (wire 14) to be inspected to be inspected without being mistaken for another workpiece 40 (wire 14) and without being obstructed by the other workpiece 40 (wire 14).

Therefore, in the imaging device of the present invention, image processing can be performed based on image data created by the image creation means 20 and the recipe set by the recipe setting means 21, and the imaging part to be imaged can be imaged under optimal imaging conditions. Therefore, in the present invention, the workpiece 40 to be inspected can be inspected without being mistaken for another workpiece 40, and without being obstructed by another workpiece 40. Therefore, the bonding wire 14 bonded to the connection part is optimal as the workpiece 40.

If the display means is equipped with a three-dimensional display means 36 that displays image data as a three-dimensional image, the three-dimensional structure of the imaged area can be grasped, making observation or examination easier.

The image display means 23 is also configured to include a processing result list display means 37 that displays the test results, a display direction instruction means 38 that allows the user to specify the display direction of the image display range, and a magnification rate change means 39 that allows the user to specify the display magnification rate of the image display range, so that the test results detected by the processing result list display means 37 can be displayed on the image display means 23, making it easy to check the test results. The display direction instruction means 38 also allows the user to specify the display direction of the image display range, and the magnification rate change means 39 also allows the user to specify the display magnification rate of the image display range.

By configuring the system so that at least one of the display direction and display magnification ratio used in one image output display is inherited in the next image output display, images can be displayed under optimal conditions for the imaging area.

As the imaging device 100, the image creation means 20 is preferably equipped with an all-focus image creation means 27 that collects in-focus parts from multiple images to create a pseudo image in which the entire image is in focus, and the image processing means 22 is preferably equipped with a position correction means 32 that corrects the setting start point and inclination when the display range is set by the display range setting means 30. When correcting the position, the all-focus image 16 created by the all-focus image creation means 27 can be used to correct the position when cutting out a part corresponding to the display range from the obtained image (correction based on a characteristic shape on the work or an alignment mark such as a registration mark).

When equipped with a position correction means 32, the image area within the display range where position correction has been performed or where position correction is not required can be cut out from the original image, and the display range can be displayed accurately.

The device may be equipped with a processing result storage means 35 that stores and saves the cut-out image data for each display range. In this way, the device equipped with the processing result storage means 35 can store and save the cut-out image data, which is very convenient.

It is equipped with a pass/fail judgment means 34 that sets pass/fail judgment criteria for each test object and calculates the pass/fail result for each test object, making it possible to automatically make pass/fail judgments and providing excellent workability.

Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment and various modifications are possible. For example, in the above embodiment, the imaging direction of the imaging means 25 is such that the imaging means 25 is positioned above the imaging object and moves up and down. However, the imaging means 25 may be positioned horizontally relative to the imaging object and move horizontally. Also, the imaging means 25 may be fixed and the imaging object may approach or move away from the imaging means 25. Note that, as in the embodiment, the display direction, or observed direction, of each workpiece is the same, but the display direction, or observed direction, of each workpiece may be different. In this case, even if all the observation directions of the workpieces 40 are different, there may be a group of the same direction and a group of different directions. In other words, the part to be observed may differ depending on the arrangement position of the workpiece 40, and such a case can be accommodated.

In addition, when displaying identification symbols in 3D while switching them, the switching order of the identification symbols is not limited to I → Ro → Ha → Ni → Ho → He → To → Chi → Ri. Furthermore, the identification symbols are not limited to the I-Ro-Ha order of Katakana, but may be in the I-Ro-Ha order of Hiragana, Arabic numerals, Roman numerals, the alphabet, etc. The number of wires 14 as the work to be inspected is not limited to nine.

In the above embodiment, the workpiece 40 is a bonding wire 14, but it is not limited to such a bonding wire 14. Therefore, it may be a linear object such as an electric wire, cable, wire rope, or hose, or it may be a non-linear object such as various electronic components arranged on a substrate.

20 Image creation means 21 Recipe setting means 22 Image processing means 23 Image display means 25 Imaging means 26 Distance image creation means 27 All-focus image creation means 28 Image creation setting means 29 Image processing setting means 30 Display range setting means 31 Recipe storage means 32 Position correction means 33 Image extraction means 34 Pass/fail judgment means 35 Processing result storage means 36 Three-dimensional display means 37 Processing result list display means 38 Display direction instruction means 39 Magnification rate change means 40 Bonding wire 41 Image creation process 42 Recipe setting process 43 Image processing process 44 Image display process 45 Imaging process 46 Distance image creation process 47 All-focus image creation process 48 Image creation setting process 49 Image processing setting process 50 Display range setting process 51 Recipe storage process 52 Position correction process 53 Image extraction process 54 Pass/fail judgment process 55 Processing result storage process 56 Three-dimensional display process 57 Processing result list display step 58 Display direction instruction step 59 Magnification rate change step

Claims (5)

An imaging device that captures an image of a workpiece, the imaging device comprising an image creation means, a recipe setting means, an image processing means, and an image display means,
The image creation means is a means for creating image data for displaying a workpiece, and includes an imaging means for capturing an image of the workpiece, a distance image creation means for creating a distance image from a plurality of images captured by the imaging means with different focal points, and an all-focus image creation means for collecting in-focus parts from the plurality of images to create a pseudo image in which the entire image is in focus ,
The recipe setting means, based on the display image data created by the image creating means,
a recipe setting means, comprising an image creation setting means for setting conditions for imaging by the imaging means, an image processing setting means for setting items related to image handling, a display range setting means for setting which range of the entire image is to be the subject of image output, and a recipe storage means for storing the set recipe;
The image processing means performs image processing based on the image data created by the image creation means and the recipe set by the recipe setting means , and includes a position correction means for correcting a setting start point and an inclination when the display range setting means sets the display range, and an image cutting means for cutting out an image area at a corrected position when the position correction means performs position correction, or an image area set by the display range setting means when the position correction means does not perform position correction, from an original image to obtain independent image data;
The image display means is for selecting a workpiece having a desired identification symbol from among workpieces having an identification symbol attached thereto, and for displaying a three-dimensional image, and the image display means includes a processing result list display means for displaying inspection results, a display direction designating means for enabling a user to designate a display direction of an image display range, and a magnification rate changing means for enabling a user to designate a display magnification rate of the image display range, and at least one of the display direction and the display magnification rate used in one image output display is inherited in the next image output display,
The recipe setting means is capable of a linking process of linking a registered image output area with an identification code of a workpiece,
11. An imaging device, wherein the imaging target is a bonding wire bonded to a connection portion . The imaging device according to claim 1, further comprising a processing result storage means for storing and saving the cropped image data for each display range. The imaging device according to claim 1, characterized in that it is provided with an inspection means for inspecting each inspection object from the captured data, and displays the inspection object in three dimensions. The imaging device according to claim 1, further comprising a pass/fail determination means for determining whether or not a pass/fail result is calculated for each test object by setting pass/fail criteria for each test object. An imaging method for imaging a workpiece, comprising an image creation step, a recipe setting step, an image processing step, and an image display step,
The image creation process is a process for creating image data for displaying a workpiece, and includes an imaging process for capturing an image of the workpiece, a distance image creation process for creating a distance image from a plurality of images captured in the imaging process with different focal points , and an all-focus image creation process for collecting in-focus portions from the plurality of images to pseudo-create an image in which the entire image is in focus .
The recipe setting step is a step of setting a recipe based on the display image data created in the image creating step, and includes an image creation setting step of setting conditions for capturing images in the image capturing step, an image processing setting step of setting items related to image handling, a display range setting step of setting which range of the entire image is to be the target of image output, and a recipe storage step of storing the set recipe,
The image processing step includes an inspection step for performing an inspection based on the image data created in the image creation step and the recipe set in the recipe setting step, a position correction step for correcting a setting start point and an inclination when setting a display range in the display range setting step, and an image extraction step for extracting an image area at a corrected position when the position correction is performed in the position correction step, or an image area set in the display range setting step when the position correction is not performed in the position correction step, from an original image to obtain independent image data ,
The image display step is for selecting a workpiece having a desired identification symbol from among workpieces having an identification symbol and displaying a three-dimensional image, and the image display step includes a processing result list display step for displaying inspection results, a display direction designation step for enabling a user to designate a display direction of an image display range, and a magnification ratio change step for enabling a user to designate a display magnification ratio of the image display range, and at least one of the display direction and the display magnification ratio used in one image output display is inherited in the next image output display,
The recipe storage step includes a linking step of linking a registered image output area with an identification code of a workpiece,
4. An imaging method according to claim 1, wherein the imaging target is a bonding wire bonded to a connection portion .

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