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JP7570816B2 - Weyl antiferromagnetic powder and thermoelectric conversion element using same - Google Patents
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JP7570816B2 - Weyl antiferromagnetic powder and thermoelectric conversion element using same - Google Patents

Weyl antiferromagnetic powder and thermoelectric conversion element using same Download PDF

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JP7570816B2
JP7570816B2 JP2020044763A JP2020044763A JP7570816B2 JP 7570816 B2 JP7570816 B2 JP 7570816B2 JP 2020044763 A JP2020044763 A JP 2020044763A JP 2020044763 A JP2020044763 A JP 2020044763A JP 7570816 B2 JP7570816 B2 JP 7570816B2
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知 中辻
友也 肥後
王高 佐藤
哲也 松浦
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本発明は、高い保持力を有するワイル反強磁性体粉末、およびそれを用いた熱電変換素子に関する。 The present invention relates to a Weyl antiferromagnetic powder with high coercivity and a thermoelectric conversion element using the same.

近年、異常ネルンスト効果を利用した熱電変換素子の研究が進められている。異常ネルンスト効果は、自発的に磁化している磁性体に磁化と直交する向きの熱流を付与したとき、磁化と熱流の双方に垂直な方向の起電力が生じる現象である。異常ネルンスト効果を利用すると熱流と直角方向に電流が取り出せるため、ゼーベック効果を利用する場合とは異なり、薄くシート化した熱電変換デバイスが構築できるといったメリットが得られる。例えば特許文献1にはFePt膜を用いた熱電発電デバイスが示されている。 In recent years, research has been conducted into thermoelectric conversion elements that utilize the anomalous Nernst effect. The anomalous Nernst effect is a phenomenon in which, when a heat flow perpendicular to the magnetization is applied to a spontaneously magnetized magnetic material, an electromotive force is generated in a direction perpendicular to both the magnetization and the heat flow. The anomalous Nernst effect allows current to be extracted perpendicular to the heat flow, which is an advantage over the Seebeck effect in that it allows the construction of a thin sheet-like thermoelectric conversion device. For example, Patent Document 1 shows a thermoelectric generation device that uses an FePt film.

異常ネルンスト効果は磁性体の自発磁化に基づく現象であることから、その磁性体には強磁性体が必要になるというのが常識であった。ところが、Mn3Snなど一部の金属間化合物では、反強磁性体であるにもかかわらず異常ネルンスト効果を生じることが発見された。特許文献2には、Mn3Snの単結晶をブリッジマン法で作製し、Mn3Sn結晶の[0 1 -1 0]方向と平行に熱流を、a軸[2 -1 -1 0]方向と平行に外部磁場を付与して、単位温度当たりの起電力を測定した例が示されている。それによると、外部磁場を変化させたときの起電力にヒステリシスが観測され、外部磁場がゼロでも電圧が発生する異常ネルンスト効果が確認されている。 Since the anomalous Nernst effect is a phenomenon based on the spontaneous magnetization of a magnetic material, it was commonly believed that the magnetic material required a ferromagnetic material. However, it was discovered that some intermetallic compounds, such as Mn 3 Sn, produce the anomalous Nernst effect even though they are antiferromagnetic. Patent Document 2 shows an example in which a single crystal of Mn 3 Sn was produced by the Bridgman method, a heat flow was applied parallel to the [0 1 -1 0] direction of the Mn 3 Sn crystal, and an external magnetic field was applied parallel to the a-axis [2 -1 -1 0] direction, and the electromotive force per unit temperature was measured. According to this, hysteresis was observed in the electromotive force when the external magnetic field was changed, and the anomalous Nernst effect was confirmed in which a voltage was generated even when the external magnetic field was zero.

特開2014-72256号公報JP 2014-72256 A 特開2017-84854号公報JP 2017-84854 A

特許文献2に開示されるMn3Snの単結晶を用いた異常ネルンスト効果は、スピンが互いに反対向きに揃う「反強磁性体」によるものである。そのため、スピンが同じ向きに揃う「強磁性体」を用いた熱電変換デバイスよりも「漏れ磁場」を格段に抑制できるという。しかしながら、引用文献2に示されている手法によって得られる熱電変換素子は保磁力が小さいため、熱電変換デバイスの実用化を図るためには保磁力向上の改善が望まれる。 The anomalous Nernst effect using a single crystal of Mn 3 Sn disclosed in Patent Document 2 is due to an "antiferromagnetic material" in which the spins are aligned in opposite directions. Therefore, it is said that the "leakage magnetic field" can be suppressed significantly more than in a thermoelectric conversion device using a "ferromagnetic material" in which the spins are aligned in the same direction. However, since the thermoelectric conversion element obtained by the method shown in Patent Document 2 has a small coercive force, it is desired to improve the coercive force in order to put the thermoelectric conversion device into practical use.

本発明は、保磁力の大きい熱電変換素子を得るために有用な実用性の高い技術を提供することを目的とする。 The present invention aims to provide a highly practical technology that is useful for obtaining thermoelectric conversion elements with high coercive force.

磁性によって創出されるワイル点をバンド構造に持つ磁性体を、「ワイル磁性体」と言う。例えばMn3Snのように、反強磁性体であるワイル磁性体を、とくに「ワイル反強磁性体」と呼ぶ。 A magnetic material that has a band structure with Weyl points created by magnetism is called a "Weyl magnet." A Weyl magnet that is an antiferromagnetic material, such as Mn 3 Sn, is called a "Weyl antiferromagnet."

上記目的を達成するため、本発明では、ワイル反強磁性体を主成分とする粒子で構成される粉末であって、レーザー回折・散乱法による体積基準の粒度分布において、累積50%粒子径D50が1~150μm、累積90%粒子径D90が250μm以下であるワイル反強磁性体粉末が提供される。 In order to achieve the above object, the present invention provides a powder composed of particles mainly composed of a Weyl antiferromagnet, which has a cumulative 50% particle diameter D50 of 1 to 150 μm and a cumulative 90% particle diameter D90 of 250 μm or less in a volume-based particle size distribution measured by a laser diffraction/scattering method.

ワイル反強磁性体としては、組成式がMn3X(ただしXは金属元素)で表され、結晶構造がD019構造の規則格子である金属間化合物の1種以上を適用することができる。上記の元素Xとしては例えばSn、Ge、Ga、Pt、Ir、Rhから選ばれる1種以上の元素を挙げることができる。より具体的には、Mn3Sn、Mn3Ge、Mn3Ga、Mn3Pt、Mn3Ir、Mn3Rhなどが例示できる。 As the Weyl antiferromagnet, one or more intermetallic compounds whose composition formula is Mn3X (where X is a metal element) and whose crystal structure is a regular lattice of the D019 structure can be applied. The element X can be, for example, one or more elements selected from Sn, Ge, Ga, Pt, Ir, and Rh. More specifically, Mn3Sn , Mn3Ge , Mn3Ga , Mn3Pt , Mn3Ir , Mn3Rh , etc. can be exemplified.

また、本発明では上記のワイル反強磁性体粉末を用いた熱電変換素子が提供される。 The present invention also provides a thermoelectric conversion element using the above-mentioned Weyl antiferromagnetic powder.

本発明によれば、保磁力の大きい熱電変換素子を得ることが可能となる。その熱電変換素子に用いる磁性材料は粉末であるため、工業的な実施化が容易である。 According to the present invention, it is possible to obtain a thermoelectric conversion element with a large coercive force. Since the magnetic material used in the thermoelectric conversion element is in the form of a powder, it is easy to put into industrial use.

Mn3Sn合金インゴットの外観を示す図面代用写真。1 is a photograph showing the appearance of a Mn 3 Sn alloy ingot. Mn3Sn合金インゴットの高さ方向1/2位置付近のサンプルから作製した粉末試料についてのX線回折パターン。1 shows an X-ray diffraction pattern of a powder specimen prepared from a sample located approximately halfway along the height of an Mn 3 Sn alloy ingot. 金属Mn、Mn酸化物およびMn-Sn系金属間化合物の純物質についての照合用X線回折パターン。Reference X-ray diffraction patterns for pure materials of metallic Mn, Mn oxides and Mn-Sn intermetallic compounds. 実施例1~3で用いたMn3Sn結晶粉末の粒度分布曲線。3 shows particle size distribution curves of the Mn 3 Sn crystal powders used in Examples 1 to 3. 実施例1の粉末を用いた焼成体の磁化曲線。4 is a magnetization curve of a sintered body using the powder of Example 1. 実施例2の粉末を用いた焼成体の磁化曲線。4 is a magnetization curve of a sintered body using the powder of Example 2. 実施例1~3のネルンスト効果測定用試料について、電力測定用の端子、温度測定用のプローブ取り付け位置と、熱流、磁場の付与方向を模式的に示した図。FIG. 2 is a schematic diagram showing the positions of terminals for power measurement and probes for temperature measurement, as well as the directions of heat flow and magnetic field application, for the Nernst effect measurement samples of Examples 1 to 3. 実施例2の粉末を用いた焼成体について、外部磁場とネルンスト係数SANEの磁場反転成分ΔSANEとの関係を表すグラフ。1 is a graph showing the relationship between the external magnetic field and the magnetic field reversal component ΔS ANE of the Nernst coefficient S ANE for a sintered body using the powder of Example 2. ガスアトマイズ法による粉末作製装置の構成を模式的に示した図。FIG. 1 is a schematic diagram showing the configuration of a powder production apparatus using a gas atomization method. 実施例3の粉末を用いた焼成体の磁化曲線。4 is a magnetization curve of a sintered body using the powder of Example 3. 実施例3の粉末を用いた焼成体について、外部磁場とネルンスト係数SANEの磁場反転成分ΔSANEとの関係を表すグラフ。1 is a graph showing the relationship between the external magnetic field and the magnetic field reversal component ΔS ANE of the Nernst coefficient S ANE for a sintered body using the powder of Example 3. 比較例1の粉砕物試料を用いた焼成体の磁化曲線。4 shows the magnetization curve of a sintered body using the ground sample of Comparative Example 1. 比較例1のインゴットから切り出した多結晶体について、外部磁場とネルンスト係数SANEの磁場反転成分ΔSANEとの関係を表すグラフ。1 is a graph showing the relationship between the external magnetic field and the magnetic field reversal component ΔS ANE of the Nernst coefficient S ANE for a polycrystalline body cut from the ingot of Comparative Example 1. 比較例2の単結晶体の磁化曲線。Magnetization curve of the single crystal of Comparative Example 2. 比較例2の単結晶体について、外部磁場とネルンスト係数SANEの磁場反転成分ΔSANEとの関係を表すグラフ。1 is a graph showing the relationship between the external magnetic field and the magnetic field reversal component ΔS ANE of the Nernst coefficient S ANE for the single crystal of Comparative Example 2.

発明者らは研究の結果、ワイル反強磁性体の粉末を用いると保磁力の高い熱電変換素子が得られることを見い出した。また、粉末の平均粒子径が小さく、かつ粗大な粒子の存在割合が少ない粒度分布の粉末であることが、保磁力の向上に極めて有効であることがわかった。レーザー回折・散乱法による体積基準の粒度分布において、累積50%粒子径D50が1~150μm、累積90%粒子径D90が250μm以下であるワイル反強磁性体粉末を用いて構成した熱電変換素子では、ワイル反強磁性体の単結晶を用いて構成した熱電変換素子と比べ、保磁力の顕著な向上効果が認められる。特に、累積50%粒子径D50が1~30μm、累積90%粒子径D90が50μm以下である微細なワイル反強磁性体粉末を用いると、一層優れた保持力の向上効果が得られる。 As a result of research, the inventors have found that a thermoelectric conversion element with high coercivity can be obtained by using powder of a Weyl antiferromagnetic material. It has also been found that a powder with a small average particle size and a particle size distribution with a small proportion of coarse particles is extremely effective in improving the coercivity. In a thermoelectric conversion element formed using a Weyl antiferromagnetic material powder having a cumulative 50% particle size D 50 of 1 to 150 μm and a cumulative 90% particle size D 90 of 250 μm or less in a volume-based particle size distribution measured by a laser diffraction/scattering method, a remarkable improvement in coercivity is observed compared to a thermoelectric conversion element formed using a single crystal of a Weyl antiferromagnetic material. In particular, when a fine Weyl antiferromagnetic material powder having a cumulative 50% particle size D 50 of 1 to 30 μm and a cumulative 90% particle size D 90 of 50 μm or less is used, an even more excellent improvement in coercivity can be obtained.

粉末の作製方法としては、溶製したワイル反強磁性体のインゴットを粉砕して微粉化する手法が比較的簡単である。粉砕された粉体についてメッシュフィルタなどによる分級操作を加えることによって、累積50%粒子径D50が1~150μm、累積90%粒子径D90が250μm以下の粒度分布に調整されたワイル反強磁性体粉末を得ることができる。より微細な粉末の作製方法としては、例えば、ワイル反強磁性体の化学組成に調整された溶融金属の液滴に真空中で不活性ガスを吹き付けることによって、溶融金属を直接的に微細な粒子として凝固させるガスアトマイズ法を適用することができる。この方法によれば、累積50%粒子径D50が1~30μm、累積90%粒子径D90が50μm以下である微細なワイル磁性体粉末を作製することができる。 A relatively simple method for producing the powder is to pulverize an ingot of the Weyl antiferromagnet into fine powder. By classifying the pulverized powder using a mesh filter or the like, it is possible to obtain a Weyl antiferromagnet powder with a particle size distribution adjusted to a cumulative 50% particle size D 50 of 1 to 150 μm and a cumulative 90% particle size D 90 of 250 μm or less. As a method for producing finer powder, for example, a gas atomization method can be applied in which an inert gas is blown in a vacuum onto droplets of molten metal adjusted to the chemical composition of the Weyl antiferromagnet, and the molten metal is directly solidified as fine particles. This method makes it possible to produce a fine Weyl magnet powder with a cumulative 50% particle size D 50 of 1 to 30 μm and a cumulative 90% particle size D 90 of 50 μm or less.

粉末によって熱電変換素子を構成するためには、粉末粒子同士の接触状態が維持されるように導体を形成する必要がある。導体を形成する方法としては、圧粉体を融点より低温域で焼成する手法や、粉末を含有する導電塗料を塗布して導電膜を形成する手法などがある。 To create a thermoelectric conversion element using powder, it is necessary to form a conductor so that the powder particles maintain contact with each other. Methods for forming a conductor include firing a compressed powder at a temperature lower than the melting point, and applying a conductive paint containing powder to form a conductive film.

ワイル反強磁性体としては、例えば組成式がMn3X(ただしXは金属元素)で表され、結晶構造がD019構造の規則格子である金属間化合物を適用することができる。Mnと元素Xのモル比は、化学量論的には3:1であるが、実際にはD019結晶構造が維持できる範囲で厳密な化学量論比からの若干の変動があり得る。本明細書において組成式Mn3Xと表記される化合物には、前記の変動の範囲のものが含まれる。 As the Weyl antiferromagnet, for example, an intermetallic compound whose composition formula is Mn3X (where X is a metal element) and whose crystal structure is a regular lattice of the D019 structure can be applied. The molar ratio of Mn to element X is stoichiometrically 3:1, but in reality, there may be some variation from the strict stoichiometric ratio within the range in which the D019 crystal structure can be maintained. In this specification, the compound represented by the composition formula Mn3X includes those within the above-mentioned range of variation.

組成式Mn3Xで表されるワイル反強磁性体としては、Mn3Sn、Mn3Ge、Mn3Ga、Mn3Pt、Mn3Ir、Mn3Rhなどの金属間化合物を挙げることができる。これらのうちの1種を単独で用いてもよいし、2種以上を混合して用いてもよい。2種以上のワイル反強磁性体の金属間化合物を混合して用いる場合には、例えばそれぞれの金属間化合物を主成分とする粒子で構成される粉末を作製し、各粉末をブレンドする方法が想定される。 Examples of the Weyl antiferromagnet represented by the composition formula Mn3X include intermetallic compounds such as Mn3Sn , Mn3Ge, Mn3Ga , Mn3Pt , Mn3Ir , and Mn3Rh . One of these may be used alone, or two or more may be mixed and used. When two or more intermetallic compounds of Weyl antiferromagnets are mixed and used, a method of preparing powders composed of particles mainly composed of each intermetallic compound and blending the powders is envisaged.

本発明のワイル反強磁性体粉末を構成する粒子は、目的とする熱電変換素子の使用温度域において反強磁性を呈し、かつその温度域で異常ネルンスト効果を発現する熱電変換素子が構築可能である限り、ワイル反強磁性を示す金属間化合物相の他に、異相が含まれていても構わない。すなわち、本発明ではワイル反強磁性体を主成分とする粒子で構成される粉末が対象となる。粒子中に占める、主成分であるワイル反強磁性を示す金属間化合物相(組成式Mn3Xで表される物質)の割合は、50質量%以上であることが望ましい。とくに、主成分であるワイル反強磁性を示す金属間化合物相を除いた残部は、不可避的不純物であることがより好ましい。 The particles constituting the Weyl antiferromagnet powder of the present invention may contain a different phase in addition to the intermetallic compound phase exhibiting Weyl antiferromagnetism, as long as it is possible to construct a thermoelectric conversion element that exhibits antiferromagnetism in the intended temperature range of the thermoelectric conversion element and that exhibits the anomalous Nernst effect in that temperature range. That is, the present invention targets powders composed of particles mainly composed of Weyl antiferromagnets. The proportion of the main component intermetallic compound phase exhibiting Weyl antiferromagnetism (substance represented by the composition formula Mn3X ) in the particles is preferably 50 mass% or more. In particular, it is more preferable that the remainder excluding the main component intermetallic compound phase exhibiting Weyl antiferromagnetism is unavoidable impurities.

一般にMn-X系合金(ここでXは化合物Mn3Xを形成しうる金属元素を意味する。)では、Mn3X組成に近い一定の組成範囲において化合物Mn3Xが単相で安定に存在する。例えばMn-Sn系合金の場合、Mn:Snのモル比が3.02:0.98から3.15:0.85の範囲でMn3Snが単相として安定に存在することが確認されている。ただし、実際にMn-X系合金のインゴットを溶製する場合には、化合物Mn3Xが単相で存在しうる範囲の仕込み組成で溶製しても、凝固過程でMn3X相以外の異相が生成してインゴットの一部に混入する場合がある。したがって、製造方法に応じて、Mn3Xが単相で安定に存在する組成範囲の粉末粒子が得られるように、原料の配合(仕込み組成)を調整することが、化合物Mn3Xを主成分とし、残部が不可避的不純物からなる粉末、すなわち実質的にMn3X単相で構成される粉末を得るうえで効果的である。 In general, in Mn-X alloys (where X means a metal element capable of forming the compound Mn 3 X), the compound Mn 3 X exists stably in a single phase in a certain composition range close to the Mn 3 X composition. For example, in the case of Mn-Sn alloys, it has been confirmed that Mn 3 Sn exists stably as a single phase when the molar ratio of Mn:Sn is in the range of 3.02:0.98 to 3.15:0.85. However, when actually producing an ingot of an Mn-X alloy, even if the alloy is produced with a feed composition within the range in which the compound Mn 3 X can exist as a single phase, a different phase other than the Mn 3 X phase may be generated during the solidification process and may be mixed into part of the ingot. Therefore, adjusting the raw material composition (feed composition) depending on the production method so as to obtain powder particles within a composition range in which Mn 3 X exists stably in a single phase is effective in obtaining a powder consisting mainly of the compound Mn 3 X with the remainder consisting of unavoidable impurities, i.e., a powder substantially composed of a single phase of Mn 3 X.

熱電変換素子の使用温度域としては、Mn3Xの種類に応じて、例えば-270℃から680℃の範囲を想定することができる。Mn3Snの場合、-223℃(50K)から157℃(430K)の範囲であれば異常ネルンスト効果が発現するとされる。 The operating temperature range of the thermoelectric conversion element can be assumed to be, for example, from −270° C. to 680° C. depending on the type of Mn 3 X. In the case of Mn 3 Sn, the anomalous Nernst effect is said to be manifested in the range of −223° C. (50 K) to 157° C. (430 K).

以下、Mn3Sn系のワイル反強磁性体粉末を用いて、磁化およびネルンスト効果を調べた実験例を示す。 Hereinafter, an experimental example will be given in which magnetization and the Nernst effect were examined using Mn 3 Sn-based Weyl antiferromagnetic powder.

[実施例1]
(Mn3Sn合金インゴットの作製)
原料である金属Mnと金属Snを、モル比においてMn:Sn=3.07:0.93となるように秤量して50mlサイズのアルミナるつぼに入れた。原料の総質量は約120gである。このるつぼを電気炉に装入し、Arガス雰囲気下において、常温から1200℃まで5時間かけて昇温したのち、1200℃で24時間保持し、その後、常温付近まで5時間かけて冷却するヒートパターンにて原料の溶解および凝固の処理を行い、Mn3Sn合金のインゴットを得た。図1に、インゴットの外観写真を例示する。
[Example 1]
(Preparation of Mn3Sn alloy ingot)
The raw materials, metallic Mn and metallic Sn, were weighed out so that the molar ratio was Mn:Sn = 3.07:0.93, and placed in a 50 ml alumina crucible. The total mass of the raw materials was about 120 g. The crucible was placed in an electric furnace, and in an Ar gas atmosphere, the temperature was raised from room temperature to 1200°C over 5 hours, and then the temperature was held at 1200°C for 24 hours, and then the temperature was cooled to around room temperature over 5 hours. The raw materials were melted and solidified using a heat pattern to obtain an ingot of Mn 3 Sn alloy. Figure 1 shows an example of an external view of the ingot.

得られたインゴットの、高さ方向(凝固時の鉛直方向)頂部付近、頂部から高さ方向1/4位置付近、頂部から高さ方向1/2位置付近、底部付近の4箇所に高さ位置からサンプルを切り出した。いずれもインゴット凝固時の鉛直方向に見たインゴット水平方向における採取位置は、中央部である。それぞれのサンプルを粉砕してX線回折用の粉末試料を得た。各位置の粉末試料について、X線回折装置(リガク社製;Smartlab)により、Cu-Kα、管電圧40kV、管電流100mAの条件でX線回折パターンを測定した。 Samples were cut from the resulting ingot at four height positions: near the top of the height direction (vertical direction at solidification), near 1/4 position in the height direction from the top, near 1/2 position in the height direction from the top, and near the bottom. In all cases, the sampling position in the horizontal direction of the ingot as viewed in the vertical direction at the time of solidification was the center. Each sample was crushed to obtain a powder sample for X-ray diffraction. The X-ray diffraction pattern of the powder sample at each position was measured using an X-ray diffractometer (Rigaku Corporation; Smartlab) under conditions of Cu-Kα, tube voltage of 40 kV, and tube current of 100 mA.

図2に、高さ方向1/2位置付近のサンプルから作製した粉末試料についてのX線回折パターンを例示する。図3に、金属Mn、Mn酸化物およびMn-Sn系金属間化合物の純物質についての照合用X線回折パターンを示す。インゴットの頂部付近に微量のMnOが観測された以外、不純物のピークは見られなかった。また、インゴットの種々の部位から切り出したサンプルをSEM(走査型電子顕微鏡)に付属のEDX(エネルギー分散型X線分析装置)によって分析したところ、微量のMn3Sn2相が検出された。それ以外の部分の平均組成はモル比においてMn:Sn=3.03:0.97であった。以上の分析結果から、上述の溶製方法によって、Mn3Sn相と微量の異相からなるインゴットを作製できることが確認された。インゴット中の異相は、Mn3Sn相のワイル反強磁性によってもたらされる物理的性質を阻害しない程度に微量であると考えられる。したがって、この方法で得られるインゴットを以下において「Mn3Sn結晶のインゴット」と呼ぶことがある。また、そのインゴットに由来する粉末を「Mn3Sn結晶粉末」と呼ぶことがある。 FIG. 2 shows an example of an X-ray diffraction pattern for a powder sample prepared from a sample near the 1/2 position in the height direction. FIG. 3 shows a reference X-ray diffraction pattern for pure materials of metal Mn, Mn oxide, and Mn-Sn intermetallic compounds. No impurity peaks were observed except for a small amount of MnO observed near the top of the ingot. In addition, when samples cut from various parts of the ingot were analyzed by an EDX (energy dispersive X-ray analyzer) attached to an SEM (scanning electron microscope), a small amount of Mn 3 Sn 2 phase was detected. The average composition of the other parts was Mn:Sn = 3.03: 0.97 in molar ratio. From the above analysis results, it was confirmed that the above-mentioned melting method can produce an ingot consisting of Mn 3 Sn phase and a small amount of a different phase. It is considered that the amount of the different phase in the ingot is small enough not to inhibit the physical properties brought about by the Weyl antiferromagnetism of the Mn 3 Sn phase. Therefore, the ingot obtained by this method may be referred to hereinafter as an "ingot of Mn 3 Sn crystals."Furthermore, the powder derived from the ingot may be referred to as an "Mn 3 Sn crystal powder."

(粉末の作製)
上述の方法によって作製したMn3Sn結晶のインゴット(質量約200g)を、袋内に設置したアンビル上で砕いて5mm程度の小片とした。袋内の小片197gを回収し、ハンマーミル(三庄インダストリー社製;ハンマークラッシャーNH-34S、スクリーン目開き:0.7mm)で粉砕し、Mn3Sn結晶の粗粉末163gを得た。上記の小片化から粉砕までの操作はすべて窒素雰囲気下で行った。その窒素雰囲気中の酸素濃度は、高濃度酸素濃度計(イチネンジコー社製;オキシーメディ、型番ОXY-1-M)による測定で0.2%以下であった。
(Preparation of Powder)
The Mn 3 Sn crystal ingot (mass: about 200 g) produced by the above method was crushed on an anvil placed in a bag to make small pieces of about 5 mm. 197 g of the small pieces were collected from the bag and crushed with a hammer mill (manufactured by Sansho Industry Co., Ltd.; hammer crusher NH-34S, screen opening: 0.7 mm) to obtain 163 g of coarse powder of Mn 3 Sn crystal. All the operations from the above-mentioned crushing to the crushing were carried out under a nitrogen atmosphere. The oxygen concentration in the nitrogen atmosphere was 0.2% or less as measured by a high-concentration oxygen concentration meter (manufactured by Ichi-Nenjiko Co., Ltd.; Oxy-medi, model number OXY-1-M).

このMn3Sn結晶粉末について、乾式レーザー回折式粒度分布測定装置HELOS&RODOS(株式会社日本レーザー製)により焦点距離200mmのレンズを用いてレーザー回折・散乱法による体積基準の粒度分布を測定した。図4に粒度分布曲線を示す(後述の実施例2、3において同じ。)。本例で得られた粉末の累積10%粒子径D10は27.3μm、累積50%粒子径D50は100.7μm、累積90%粒子径D90は227.7μmであった。 The volumetric particle size distribution of this Mn3Sn crystal powder was measured by a laser diffraction/scattering method using a dry laser diffraction particle size distribution analyzer HELOS&RODOS (manufactured by Nippon Laser Co., Ltd.) with a lens having a focal length of 200 mm. The particle size distribution curve is shown in Figure 4 (the same applies to Examples 2 and 3 described below). The powder obtained in this example had a cumulative 10% particle size D10 of 27.3 μm, a cumulative 50% particle size D50 of 100.7 μm, and a cumulative 90% particle size D90 of 227.7 μm.

(粉末を用いた焼成体の作製)
上記のMn3Sn結晶粉末3gを内径10mmの円筒形グラファイトセルのシリンダー中で上下のピストンにより4.5kNの荷重を付与した状態として、約1Paの真空雰囲気下で放電プラズマ焼結装置により加熱することによって、直径10mm、高さ約7mmの円柱形状の焼成体を得た。加熱温度は500℃、加熱保持時間は30分とし、加熱保持中は4.5kNの荷重付与を維持した。
(Preparation of sintered body using powder)
3 g of the above Mn3Sn crystal powder was placed in a cylinder of a cylindrical graphite cell with an inner diameter of 10 mm, and a load of 4.5 kN was applied by upper and lower pistons, and the powder was heated in a discharge plasma sintering apparatus in a vacuum atmosphere of about 1 Pa to obtain a cylindrical sintered body with a diameter of 10 mm and a height of about 7 mm. The heating temperature was 500°C, the heating holding time was 30 minutes, and the load of 4.5 kN was maintained during the heating holding time.

(磁気特性の測定)
上記の焼成体から、1辺の長さが2mmの立方体試料を複数切り出し、その試料を用いてSQUID(Super Quantum Interference Device)磁束計により以下の方法で300Kにおける磁気特性を測定した。すなわち、試料の温度を300Kとし、SQUID磁束計に付属の超伝導マグネットにより最大磁場3T(30000Oe)を印可した後、3Tから-3T、-3Tから3Tの磁場掃引過程において、各測定点で磁場を固定し、磁化(μB/f.u.)を測定した。図5に、その磁化曲線を示す。保磁力は約0.25T(2500Oe)であった。
(Measurement of magnetic properties)
From the sintered body, multiple cubic samples with sides of 2 mm were cut out, and the magnetic properties of the samples were measured at 300 K using a SQUID (Super Quantum Interference Device) magnetometer by the following method. That is, the temperature of the sample was set to 300 K, a maximum magnetic field of 3 T (30,000 Oe) was applied using a superconducting magnet attached to the SQUID magnetometer, and then the magnetic field was fixed at each measurement point during the magnetic field sweep process from 3 T to -3 T and from -3 T to 3 T, and the magnetization (μ B /fu) was measured. The magnetization curve is shown in Figure 5. The coercive force was approximately 0.25 T (2,500 Oe).

[実施例2]
実施例1と同じ手法で作製したMn3Sn合金のインゴットを使用して、粉末を作製した。本例では、実施例1と同様の手法で砕いた5mm程度の小片をサンプルミル(協立理工株式会社製;SK-M10型)に投入し、窒素雰囲気下で30秒間粉砕することにより、実施例1よりも平均粒子径の小さい粉末を作製した。上記の小片化から粉砕までの操作はすべて窒素雰囲気下で行った。その窒素雰囲気中の酸素濃度は実施例1と同様に0.2%以下であった。本例で得られた粉末の累積10%粒子径D10は9.6μm、累積50%粒子径D50は50.1μm、累積90%粒子径D90は165.1μmであった。その粒度分布曲線を図4中に示してある。
[Example 2]
Powder was prepared using an ingot of Mn 3 Sn alloy prepared in the same manner as in Example 1. In this example, small pieces of about 5 mm crushed in the same manner as in Example 1 were put into a sample mill (SK-M10 type manufactured by Kyoritsu Riko Co., Ltd.) and crushed for 30 seconds in a nitrogen atmosphere to prepare a powder with a smaller average particle size than that of Example 1. All operations from the above-mentioned crushing to crushing were performed in a nitrogen atmosphere. The oxygen concentration in the nitrogen atmosphere was 0.2% or less, as in Example 1. The cumulative 10% particle size D 10 of the powder obtained in this example was 9.6 μm, the cumulative 50% particle size D 50 was 50.1 μm, and the cumulative 90% particle size D 90 was 165.1 μm. The particle size distribution curve is shown in FIG. 4.

この粉末を使用して、実施例1と同様の方法で焼成体を作製した。その焼成体から、1辺の長さが2mmの立方体試料を複数切り出し、実施例1と同様の方法で磁気特性の測定を行った。図6に、その磁化曲線を示す。 Using this powder, a sintered body was produced in the same manner as in Example 1. From the sintered body, several cubic samples with a side length of 2 mm were cut out, and the magnetic properties were measured in the same manner as in Example 1. The magnetization curve is shown in Figure 6.

(ネルンスト効果の測定)
上記の焼成体から1.5mm×1.5mm×7mmの直方体試料を切り出した。この試料に、起電力測定用の端子および温度測定用プローブを取り付け、Quantum Design社製、物理特性測定システムPPMS装置内で試料長手方向に熱流を生じさせながら、磁場を付与し、熱電変換素子としての起電力を測定した。図7に、起電力測定用の端子、温度測定用のプローブ取り付け位置と、熱流、磁場の付与方向を模式的に示す。試料1の対向する側面中央位置にそれぞれ起電力測定端子2a、2bを導電性エポキシ接着剤で取り付け、電圧計で両端子間に生じる電圧(V)を測定できるようにした。この電圧は異常ネルンスト効果によって生じるものであるので、VANEと表示する。試料1の上面に長手方向5mmの間隔をあけて2箇所に温度測定用プローブを導電性エポキシ接着剤で取り付け、2箇所の温度T1(K)、T2(K)の温度差ΔTをモニターできるようにした。試料1の長手方向の一方の端面側を抵抗ヒーター加熱し、他方の端面側を熱浴に接続することによって長手方向の一方の端面側を抵抗ヒーターで加熱し、他方の端面側を熱浴に接続して冷却することによって試料長手方向の温度勾配を形成した。図中の黒塗り矢印(符号4)が試料中の熱流方向を表す。温度T1およびT2が安定した後、試料に磁場を付与し、電圧VANE(V)を測定した。図中の白抜き矢印(符号5)が磁場の方向を表す。磁場は3Tから-3T、-3Tから3Tの間で掃引した。下記(1)式によりネルンスト係数SANE(μV/K)を求めた。
ANE(μV/K)=VANE(V)/1.5(mm)/[(T1-T2)(K)/5.0(mm)] …(1)
(Measurement of the Nernst effect)
A rectangular parallelepiped sample of 1.5 mm x 1.5 mm x 7 mm was cut out from the above-mentioned fired body. A terminal for measuring electromotive force and a probe for measuring temperature were attached to this sample, and a magnetic field was applied while a heat flow was generated in the longitudinal direction of the sample in a physical property measurement system PPMS device manufactured by Quantum Design, and the electromotive force as a thermoelectric conversion element was measured. Figure 7 shows the attachment positions of the terminal for measuring electromotive force and the probe for measuring temperature, and the directions of the heat flow and magnetic field. Electromotive force measurement terminals 2a and 2b were attached to the center positions of the opposing sides of sample 1 with conductive epoxy adhesive, respectively, so that the voltage (V) generated between both terminals could be measured with a voltmeter. This voltage is generated by the anomalous Nernst effect, so it is indicated as V ANE . Two temperature measurement probes were attached to the top surface of sample 1 at two points with a longitudinal interval of 5 mm with conductive epoxy adhesive, so that the temperature difference ΔT between the temperatures T 1 (K) and T 2 (K) at the two points could be monitored. One end face of the sample 1 in the longitudinal direction was heated by a resistance heater, and the other end face was connected to a heat bath, so that one end face in the longitudinal direction was heated by a resistance heater, and the other end face was connected to a heat bath and cooled, forming a temperature gradient in the longitudinal direction of the sample. The black arrow (4) in the figure indicates the direction of heat flow in the sample. After the temperatures T1 and T2 were stabilized, a magnetic field was applied to the sample, and the voltage V ANE (V) was measured. The white arrow (5) in the figure indicates the direction of the magnetic field. The magnetic field was swept between 3T and -3T, and between -3T and 3T. The Nernst coefficient S ANE (μV/K) was calculated using the following formula (1).
S ANE (μV/K) = V ANE (V) / 1.5 (mm) / [(T 1 - T 2 ) (K) / 5.0 (mm)] ... (1)

図8に、ネルンスト係数ΔSANEの測定結果を示す。ここでは磁場によるネルンスト係数SANEの反転磁場を明瞭に示すために、グラフ縦軸の値に、ネルンスト係数SANEの磁場反転成分をゼロ磁場でのネルンスト係数SANE(約0.3μV/K)で規格化した値ΔSANEを採用している(後述の図11、13、15において同様。)。
図8からわかるように、ゼロ磁場でもネルンスト効果が発生している。すなわち、異常ネルンスト効果が発現し、温度差のみで起電力が生じている。Mn3Snは反強磁性体であるにもかかわらず、異常ネルンスト効果が発現するのは、当該物質がワイル磁性体であることに起因して仮想磁場が創出されることによるものであると考えられる。本例のワイル反強磁性体粉末を用いた熱電変換素子の保磁力は約0.25T(2500Oe)である。これは、一般的な電子機器の内部や、自動車のエンジン周辺などでの使用に耐え得る実用的な保磁力であると評価される。
The measurement results of the Nernst coefficient ΔS ANE are shown in Fig. 8. In order to clearly show the reversal magnetic field of the Nernst coefficient S ANE due to the magnetic field, the value ΔS ANE obtained by normalizing the magnetic field reversal component of the Nernst coefficient S ANE by the Nernst coefficient S ANE at zero magnetic field (about 0.3 µV/K) is used as the value on the vertical axis of the graph (similarly in Figs. 11, 13, and 15 described later).
As can be seen from FIG. 8, the Nernst effect occurs even in zero magnetic field. In other words, the anomalous Nernst effect is manifested, and an electromotive force is generated by temperature difference alone. Although Mn 3 Sn is an antiferromagnetic material, the anomalous Nernst effect is manifested, which is believed to be due to the creation of a virtual magnetic field caused by the material being a Weyl magnet. The coercive force of the thermoelectric conversion element using the Weyl antiferromagnetic powder of this example is approximately 0.25 T (2500 Oe). This is evaluated as a practical coercive force that can withstand use inside general electronic devices and around automobile engines.

[実施例3]
(粉末の作製)
本例ではガスアトマイズ法によりMn3Sn合金の溶湯から直接的に粉末を作製した。図9に、ガスアトマイズ法による粉末作製装置の構成を模式的に示す。以下のようにして粉末を作製した。原料である金属Mnと金属Snを、モル比においてMn:Sn=3.07:0.93となるように秤量して、底部に穴のあるCPるつぼ(多孔質アルミナ)に入れ高周波誘導加熱装置にセットする。チャンバーを真空排気したのち、Arガス雰囲気とする。るつぼの底部の穴はストッパーロッドにより塞いでおく。高周波誘導加熱によって原料を溶解し、1450℃で40分保持した後、ストッパーロッドを上昇させ、るつぼ底部の穴からチャンバー内の下部空間へ溶融合金を滴下させる。下部空間に出た溶融金属にArガスを吹き付けることによって液滴を微粒子化するとともに急冷凝固させ、合金粉末(アトマイズ粉)を得る。
[Example 3]
(Preparation of Powder)
In this example, powder was produced directly from the molten Mn 3 Sn alloy by the gas atomization method. Figure 9 shows a schematic diagram of the configuration of a powder production apparatus using the gas atomization method. The powder was produced as follows. The raw materials, metal Mn and metal Sn, were weighed out so that the molar ratio was Mn:Sn = 3.07:0.93, and placed in a CP crucible (porous alumina) with a hole at the bottom and set in a high-frequency induction heating device. The chamber was evacuated and then filled with Ar gas. The hole at the bottom of the crucible was closed with a stopper rod. The raw materials were melted by high-frequency induction heating and held at 1450°C for 40 minutes, after which the stopper rod was raised and the molten alloy was dropped from the hole at the bottom of the crucible into the lower space in the chamber. Ar gas was sprayed onto the molten metal that had appeared in the lower space to turn the droplets into fine particles and rapidly cool and solidify, obtaining an alloy powder (atomized powder).

得られた合金粉末について上記と同様にX線回折およびEDX分析を行った結果、この粉末はほぼMn3Sn単相からなる粒子で構成され、平均組成はモル比においてMn:Sn=3.02:0.98であった。したがって、この粉末も上記と同様に「Mn3Sn結晶粉末」と呼ぶことができる。このMn3Sn結晶粉末について実施例1に示した方法で粒度分布を測定した。粒度分布曲線は図4中に示してある。本例で得られた粉末の累積10%粒子径D10は4.8μm、累積50%粒子径D50は15.2μm、累積90%粒子径D90は31.9μmであった。 The obtained alloy powder was subjected to X-ray diffraction and EDX analysis in the same manner as above, and the powder was found to be composed of particles consisting of almost a single phase of Mn 3 Sn, with an average composition of Mn:Sn=3.02:0.98 in molar ratio. Therefore, this powder can also be called "Mn 3 Sn crystal powder" as above. The particle size distribution of this Mn 3 Sn crystal powder was measured by the method shown in Example 1. The particle size distribution curve is shown in Figure 4. The cumulative 10% particle diameter D 10 of the powder obtained in this example was 4.8 μm, the cumulative 50% particle diameter D 50 was 15.2 μm, and the cumulative 90% particle diameter D 90 was 31.9 μm.

この粉末を使用して、実施例1と同様の方法で焼成体を作製した。その焼成体から、1辺の長さが2mmの立方体試料を複数切り出し、実施例1と同様の方法で磁気特性の測定を行った。図10に、その磁化曲線を示す。また、上記の焼成体から1.5mm×1.5mm×7mmの直方体試料を切り出し、実施例2と同様の方法でネルンスト効果の測定を行った。図11に、ネルンスト係数ΔSANEの測定結果を示す。本例のワイル反強磁性体粉末を用いた熱電変換素子の保磁力は約0.5T(5000Oe)であり、実施例1、2のものより、高い保磁力を呈した。アトマイズ法によるワイル反強磁性体粉末の微細化は、その粉末を用いた熱電変換素子の保磁力向上に極めて有効であることがわかった。このように微細化したワイル反強磁性体を用いると保磁力が向上するメカニズムについては現時点で十分に解明されていないが、粒子径が単磁区となるサイズに近づくことによって磁壁のピン止めの寄与が大きくなるのではないかと推察される。 Using this powder, a sintered body was produced in the same manner as in Example 1. A number of cubic samples with a side length of 2 mm were cut out from the sintered body, and the magnetic properties were measured in the same manner as in Example 1. FIG. 10 shows the magnetization curve. In addition, a rectangular parallelepiped sample of 1.5 mm x 1.5 mm x 7 mm was cut out from the above sintered body, and the Nernst effect was measured in the same manner as in Example 2. FIG. 11 shows the measurement results of the Nernst coefficient ΔS ANE . The coercive force of the thermoelectric conversion element using the Weyl antiferromagnetic powder of this example was about 0.5 T (5000 Oe), which was higher than those of Examples 1 and 2. It was found that the fineness of the Weyl antiferromagnetic powder by the atomization method is extremely effective in improving the coercive force of the thermoelectric conversion element using the powder. The mechanism by which the coercive force is improved by using such a finely-refined Weyl antiferromagnetic material has not been fully elucidated at present, but it is speculated that the contribution of pinning the domain wall increases as the particle diameter approaches the size of a single magnetic domain.

[比較例1]
実施例1と同じ手法で作製したMn3Sn合金のインゴットを使用して、粉末を作製した。本例では、実施例1と同様の手法で砕いた5mm程度の小片をアルミナ製乳鉢で手粉砕した。得られた粉砕物を目開き200μmの篩で篩い分けした。篩上に質量割合で68%の粉砕物が残った。この粉砕物試料について実施例1と同様に乾式レーザー回折式粒度分布測定装置による粒度分布測定を試みたが、試料の粒子径が粗大であるため焦点距離200mmのレンズによる測定ではレンジオーバーとなり、粒度分布の測定はできなかった。
[Comparative Example 1]
Powder was prepared using an ingot of Mn 3 Sn alloy prepared in the same manner as in Example 1. In this example, small pieces of about 5 mm crushed in the same manner as in Example 1 were manually crushed in an alumina mortar. The crushed material obtained was sieved through a sieve with a mesh size of 200 μm. 68% of the crushed material remained on the sieve in terms of mass percentage. For this crushed material sample, a particle size distribution measurement was attempted using a dry laser diffraction particle size distribution measurement device as in Example 1, but since the particle diameter of the sample was coarse, the measurement range was exceeded by a lens with a focal length of 200 mm, and the particle size distribution could not be measured.

上記の粉砕物試料を使用して、実施例1と同様の方法で焼成体を作製した。その焼成体から、1辺の長さが2mmの立方体試料を複数切り出し、実施例1と同様の方法で磁気特性の測定を行った。図12に、その磁化曲線を示す。また、上記のインゴットから直接、1.5mm×1.5mm×7mmの直方体試料(多結晶体)を切り出した。その際、インゴット中の引け巣などの欠陥が見られない部位から、試料長手方向がインゴット凝固時の水平方向に一致するように直方体試料を採取した。この直方体試料を用いて実施例1と同様の方法でネルンスト効果を調べた。図13に、ネルンスト係数ΔSANEの測定結果を示す。本例のワイル反強磁性体を用いた熱電変換素子の保磁力は約0.05T(500Oe)であり、ワイル反強磁性体の粉末を用いた実施例のものと比べ、保磁力は著しく低かった。このような低い保磁力では、永久磁石や磁気部品近傍の磁場によって消磁されてしまう恐れがあり、信頼性の高い熱電変換素子を構築することは難しい。 Using the above pulverized sample, a sintered body was produced in the same manner as in Example 1. From the sintered body, a number of cubic samples with a side length of 2 mm were cut out, and the magnetic properties were measured in the same manner as in Example 1. The magnetization curve is shown in FIG. 12. In addition, a rectangular parallelepiped sample (polycrystalline body) of 1.5 mm x 1.5 mm x 7 mm was cut out directly from the above ingot. At that time, the rectangular parallelepiped sample was taken from a portion of the ingot where defects such as shrinkage cavities were not observed, so that the longitudinal direction of the sample coincided with the horizontal direction at the time of solidification of the ingot. The Nernst effect was investigated using this rectangular parallelepiped sample in the same manner as in Example 1. FIG. 13 shows the measurement result of the Nernst coefficient ΔS ANE . The coercive force of the thermoelectric conversion element using the Weyl antiferromagnet of this example was about 0.05 T (500 Oe), which was significantly lower than that of the example using the powder of the Weyl antiferromagnet. With such a low coercive force, there is a risk that the material will be demagnetized by the magnetic field near the permanent magnet or magnetic components, making it difficult to construct a highly reliable thermoelectric conversion element.

[比較例2]
実施例1と同じ手法で作製したMn3Sn合金のインゴットを溶融させ、ブリッジマン法によりMn3Snの単結晶を作製した。ブリッジマン炉の最高温度は1080℃とし、試料は1.5mm/hの速度で移動させた。得られた単結晶体についてICP-AESによる組成分析を行った結果、モル比においてMn:Sn=3.06:0.94であった。
[Comparative Example 2]
An ingot of Mn 3 Sn alloy prepared by the same method as in Example 1 was melted, and a single crystal of Mn 3 Sn was prepared by the Bridgman process. The maximum temperature of the Bridgman furnace was 1080°C, and the sample was moved at a speed of 1.5 mm/h. The composition of the obtained single crystal was analyzed by ICP-AES, and the molar ratio was Mn:Sn=3.06:0.94.

この単結晶体から1辺の長さが2mmの立方体試料を複数切り出し、実施例1と同様の方法で磁気測定を行った。その際、外部磁場の印加方向がMn3Sn結晶の[2 -1 -1 0]方向に一致するようにした。図14に、その磁化曲線を示す。また、上記の単結晶体から、1.5mm×1.5mm×7mmの直方体試料を切り出し、実施例1と同様の方法でネルンスト効果を調べた。その際、熱流の方向(直方体試料の長手方向)がMn3Sn結晶の[0 1 -1 0]方向、外部磁場の印加方向がMn3Sn結晶の[2 -1 -1 0]方向にそれぞれ一致するようにした。図15に、ネルンスト係数ΔSANEの測定結果を示す。本例のワイル反強磁性体単結晶体を用いた熱電変換素子の保磁力は0.01T(100Oe)未満であった。
り、ワイル反強磁性体の粉末を用いた実施例のものと比べ、保磁力は著しく低かった。
From this single crystal, a number of cubic samples with a side length of 2 mm were cut out, and magnetic measurements were performed in the same manner as in Example 1. At that time, the direction of application of the external magnetic field was made to coincide with the [2-1-10] direction of the Mn 3 Sn crystal. FIG. 14 shows the magnetization curve. Also, from the above single crystal, a rectangular parallelepiped sample of 1.5 mm×1.5 mm×7 mm was cut out, and the Nernst effect was examined in the same manner as in Example 1. At that time, the direction of the heat flow (the longitudinal direction of the rectangular parallelepiped sample) was made to coincide with the [0 1-10] direction of the Mn 3 Sn crystal, and the direction of application of the external magnetic field was made to coincide with the [2-1-10] direction of the Mn 3 Sn crystal. FIG. 15 shows the measurement results of the Nernst coefficient ΔS ANE . The coercive force of the thermoelectric conversion element using the Weyl antiferromagnetic single crystal of this example was less than 0.01 T (100 Oe).
The coercive force was significantly lower than that of the example using the Weyl antiferromagnetic powder.

Figure 0007570816000001
Figure 0007570816000001

1 ネルンスト効果測定用試料
2a、2b 起電力測定端子
31、32 測温位置
4 試料中の熱流方向
5 磁場の方向
1 Nernst effect measurement sample 2a, 2b Electromotive force measurement terminals 31, 32 Temperature measurement position 4 Heat flow direction in sample 5 Magnetic field direction

Claims (5)

ワイル反強磁性体を主成分とする粒子で構成される粉末であって、レーザー回折・散乱法による体積基準の粒度分布において、累積50%粒子径D50が1~150μm、累積90%粒子径D90が250μm以下であるワイル反強磁性体粉末。 A powder composed of particles mainly composed of a Weyl antiferromagnetic material, in which, in a volume-based particle size distribution measured by a laser diffraction/scattering method, a cumulative 50% particle diameter D 50 is 1 to 150 μm and a cumulative 90% particle diameter D 90 is 250 μm or less. 前記ワイル反強磁性体は、組成式Mn3X、ただしXは金属元素、で表されるD019構造の金属間化合物である、請求項1に記載のワイル反強磁性体粉末。 2. The Weyl antiferromagnetic powder according to claim 1, wherein the Weyl antiferromagnetic material is an intermetallic compound having a D019 structure represented by a composition formula Mn3X , where X is a metal element. 前記ワイル反強磁性体は、化学式Mn3Xで表される化合物、ただしXはSn、Ge、Ga、Pt、Ir、Rhから選ばれる1種以上の元素、である請求項1に記載のワイル反強磁性体粉末。 2. The Weyl antiferromagnetic powder according to claim 1, wherein the Weyl antiferromagnetic material is a compound represented by the chemical formula Mn3X , where X is one or more elements selected from the group consisting of Sn, Ge, Ga, Pt, Ir and Rh. 前記ワイル反強磁性体は、Mn3Sn、Mn3Ge、Mn3Ga、Mn3Pt、Mn3Ir、Mn3Rhから選ばれる1種以上の化合物である、請求項1に記載のワイル反強磁性体粉末。 2. The Weyl antiferromagnetic powder according to claim 1, wherein the Weyl antiferromagnetic material is one or more compounds selected from the group consisting of Mn3Sn , Mn3Ge , Mn3Ga , Mn3Pt , Mn3Ir , and Mn3Rh . 請求項1~4のいずれか1項に記載のワイル反強磁性体粉末を用いた熱電変換素子。 A thermoelectric conversion element using the Weyl antiferromagnetic powder according to any one of claims 1 to 4.
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