JP7578633B2

JP7578633B2 - Waveguide Switch

Info

Publication number: JP7578633B2
Application number: JP2022015582A
Authority: JP
Inventors: 健一渡邉
Original assignee: Anritsu Corp
Current assignee: Anritsu Corp
Priority date: 2022-02-03
Filing date: 2022-02-03
Publication date: 2024-11-06
Anticipated expiration: 2042-02-03
Also published as: JP2023113310A

Description

本発明は、導波管スイッチに関し、特に、金属壁で囲まれた導波路を有する導波管の伝搬経路を切り替えるための導波管スイッチに関する。 The present invention relates to a waveguide switch, and in particular to a waveguide switch for switching the propagation path of a waveguide having a waveguide surrounded by a metal wall.

今後更なる増大が予想されるモバイルトラフィックに対応するため、数十Ｇｂｐｓ級の伝送速度を実現することが可能なミリ波・テラヘルツ波帯を無線通信に利用することが強く求められており、例えばＩＥＥＥ８０２．１５．３ｄでは、２５２～３２５ＧＨｚの使用が検討されている。 To cope with the expected increase in mobile traffic in the future, there is a strong demand for the use of millimeter and terahertz wave bands for wireless communication, which can achieve transmission speeds of several tens of Gbps. For example, the use of 252 to 325 GHz is being considered for IEEE 802.15.3d.

例えば、ＷＲ－３帯域（２２０～３２５ＧＨｚ）の電磁波を伝搬させる伝搬経路としては、内寸が０．８６４ｍｍ×０．４３２ｍｍの方形導波管が用いられる。このような方形導波管を用いた各種装置では、電磁波の伝搬経路を切り替えるための導波管スイッチが必要になる。導波管スイッチは、互いに対向する方形導波管同士をスライドさせて伝搬経路を切り替えるようになっているので、これらの方形導波管の接合部には隙間が設けられている。しかしながら、この隙間からは電磁波が漏洩し、一方の方形導波管から他方の方形導波管への透過特性を悪化させる。 For example, a rectangular waveguide with inner dimensions of 0.864 mm x 0.432 mm is used as a propagation path for electromagnetic waves in the WR-3 band (220-325 GHz). In various devices using such rectangular waveguides, a waveguide switch is required to switch the propagation path of the electromagnetic waves. The waveguide switch switches the propagation path by sliding the opposing rectangular waveguides against each other, so a gap is provided at the joint between these rectangular waveguides. However, electromagnetic waves leak from this gap, deteriorating the transmission characteristics from one rectangular waveguide to the other.

このため、従来、導波管スイッチの導波管開口にチョーク溝を設けて隙間からの漏洩を防ぐ工夫がなされている（例えば、特許文献１参照）。特許文献１に開示された導波管スイッチには、導波管開口の周囲に管内波長λｇの１／４の深さの矩形枠状に連続した複数のチョーク溝が、導波管開口の中心位置に対して互いに同心に設けられている。 For this reason, conventionally, choke grooves have been provided in the waveguide opening of a waveguide switch to prevent leakage from the gap (see, for example, Patent Document 1). The waveguide switch disclosed in Patent Document 1 has multiple choke grooves arranged in a continuous rectangular frame shape with a depth of 1/4 of the guide wavelength λg around the periphery of the waveguide opening, concentric with each other with respect to the center position of the waveguide opening.

特許第６１８５４５５号公報Patent No. 6185455

特許文献１に開示された従来の導波管スイッチにおいては、チョーク溝は方形導波管の導波管開口の形状に沿った矩形枠状の形状をしている。しかしながら、このような矩形枠状のチョーク溝を方形導波管の導波管開口の周囲に設けると、チョーク溝の四隅による不要な共振が発生し、透過特性Ｓ_２１にスパイクが出やすくなるなど周波数特性劣化の原因となる。 In the conventional waveguide switch disclosed in Patent Document 1, the choke groove has a rectangular frame shape that matches the shape of the waveguide opening of the rectangular waveguide. However, if such a rectangular frame-shaped choke groove is provided around the waveguide opening of the rectangular waveguide, unnecessary resonance occurs at the four corners of the choke groove, which causes deterioration of frequency characteristics such as spikes becoming more likely to appear in the transmission characteristic _S21 .

本発明は、このような従来の課題を解決するためになされたものであって、不要な共振による周波数特性劣化を抑制することができる導波管スイッチを提供することを目的とする。 The present invention has been made to solve these problems in the past, and aims to provide a waveguide switch that can suppress deterioration of frequency characteristics caused by unnecessary resonance.

上記課題を解決するために、本発明に係る導波管スイッチは、少なくとも１つの導波路がそれぞれ形成された２つの導波管の端面が、所定の隙間を開けて平行に対向する導波管スイッチであって、各前記導波路は、方形導波路と、前記２つの導波管のいずれかの前記端面に開口する円形導波路と、前記方形導波路と前記円形導波路を接続する方形円形変換導波路と、を含み、前記方形円形変換導波路の断面寸法は、前記方形円形変換導波路と前記方形導波路との方形導波路境界において前記方形導波路の断面寸法に等しく、前記方形円形変換導波路と前記円形導波路との円形導波路境界において前記円形導波路の断面寸法に等しく、前記方形導波路境界から前記円形導波路境界に向かって連続的に変化する構成である。 In order to solve the above problems, the waveguide switch according to the present invention is a waveguide switch in which the end faces of two waveguides, each having at least one waveguide formed therein, face each other in parallel with a predetermined gap therebetween, and each of the waveguides includes a rectangular waveguide, a circular waveguide that opens into the end face of one of the two waveguides, and a rectangular-circular conversion waveguide that connects the rectangular waveguide and the circular waveguide, and the cross-sectional dimensions of the rectangular-circular conversion waveguide are equal to the cross-sectional dimensions of the rectangular waveguide at the rectangular waveguide boundary between the rectangular-circular conversion waveguide and the rectangular waveguide, and are equal to the cross-sectional dimensions of the circular waveguide at the circular waveguide boundary between the rectangular-circular conversion waveguide and the circular waveguide, and are configured to change continuously from the rectangular waveguide boundary to the circular waveguide boundary.

つまり、本発明に係る導波管スイッチは、互いに平行に対向する導波管の端面にそれぞれ開口する導波路の開口の形状を円形にした構造である。この構成により、本発明に係る導波管スイッチは、不要な共振による周波数特性劣化を抑制することができる。また、本発明に係る導波管スイッチは、対向する２つの導波管間の隙間が広がっても周波数特性が劣化しにくく、透過周波数帯域を広くすることができる。 In other words, the waveguide switch according to the present invention has a structure in which the openings of the waveguides that open on the end faces of the parallel waveguides facing each other are circular in shape. With this configuration, the waveguide switch according to the present invention can suppress deterioration of frequency characteristics due to unnecessary resonance. Furthermore, the waveguide switch according to the present invention is less likely to experience deterioration in frequency characteristics even if the gap between the two facing waveguides widens, and can widen the transmission frequency band.

また、本発明に係る導波管スイッチにおいては、前記２つの導波管の少なくとも一方の前記端面において、前記円形導波路の円形の開口の周囲を囲む位置に、少なくとも１重の円形枠状のチョーク溝が設けられた構成であってもよい。 In addition, the waveguide switch according to the present invention may be configured such that at least one circular frame-shaped choke groove is provided in the end face of at least one of the two waveguides at a position surrounding the circular opening of the circular waveguide.

この構成により、本発明に係る導波管スイッチは、２つの導波管の端面の少なくとも一方において、円形導波路の円形の開口の周囲を囲む位置に少なくとも１重の円形枠状のチョーク溝が設けられた場合には、不要な共振による特性劣化を防ぎ、２つの導波管の端面間の隙間からの電磁波漏洩を効果的に抑制することができる。 With this configuration, the waveguide switch of the present invention can prevent characteristic degradation due to unnecessary resonance and effectively suppress electromagnetic wave leakage from the gap between the end faces of the two waveguides when at least one circular frame-shaped choke groove is provided in a position surrounding the circular opening of the circular waveguide on at least one of the end faces of the two waveguides.

また、本発明に係る導波管スイッチは、ベース部と、前記ベース部に固定され、金属壁で囲まれた少なくとも１つの導波路が第１の端面から第２の端面まで貫通して形成された第１の固定導波管ブロックと、前記ベース部に固定され、前記第１の固定導波管ブロックの前記第２の端面に平行な第３の端面を有し、金属壁で囲まれた少なくとも１つの導波路が前記第３の端面から第４の端面まで貫通して形成された第２の固定導波管ブロックと、前記第１の固定導波管ブロックの前記第２の端面に所定の隙間を開けて平行に対向する第５の端面と、前記第２の固定導波管ブロックの前記第３の端面に所定の隙間を開けて平行に対向する第６の端面とを有し、金属壁で囲まれた複数の導波路が、前記第５の端面から前記第６の端面まで貫通して形成され、前記第１の固定導波管ブロックの前記第２の端面及び前記第２の固定導波管ブロックの前記第３の端面に対して平行にスライド移動可能な状態で前記ベース部に支持された可動導波管ブロックと、前記ベース部に設けられ、前記可動導波管ブロックをスライド移動させる駆動装置と、を有し、前記可動導波管ブロックは、前記第１の固定導波管ブロック及び前記第２の固定導波管ブロックに対してスライド移動し、異なる複数の位置で、前記可動導波管ブロックの前記複数の導波路のいずれかが、前記第１の固定導波管ブロックの少なくとも１つの導波路のいずれかと前記第２の固定導波管ブロックの少なくとも１つの導波路のいずれかとの間を選択的に接続し、前記第１の固定導波管ブロックの前記少なくとも１つの導波路は、前記第１の端面に開口する第１の方形導波路と、前記第２の端面に開口する第１の円形導波路と、前記第１の方形導波路と前記第１の円形導波路を接続する第１の方形円形変換導波路と、を含み、前記第２の固定導波管ブロックの前記少なくとも１つの導波路は、前記第４の端面に開口する第２の方形導波路と、前記第３の端面に開口する第２の円形導波路と、前記第２の方形導波路と前記第２の円形導波路を接続する第２の方形円形変換導波路と、を含み、前記可動導波管ブロックの各前記導波路は、第３の方形導波路と、前記第５の端面に開口する第３の円形導波路と、前記第６の端面に開口する第４の円形導波路と、前記第３の方形導波路と前記第３の円形導波路を接続する第３の方形円形変換導波路と、前記第３の方形導波路と前記第４の円形導波路を接続する第４の方形円形変換導波路と、を含み、前記第１の方形円形変換導波路の断面寸法は、前記第１の方形円形変換導波路と前記第１の方形導波路との第１の方形導波路境界において前記第１の方形導波路の断面寸法に等しく、前記第１の方形円形変換導波路と前記第１の円形導波路との第１の円形導波路境界において前記第１の円形導波路の断面寸法に等しく、前記第１の方形導波路境界から前記第１の円形導波路境界に向かって連続的に変化し、前記第２の方形円形変換導波路の断面寸法は、前記第２の方形円形変換導波路と前記第２の方形導波路との第２の方形導波路境界において前記第２の方形導波路の断面寸法に等しく、前記第２の方形円形変換導波路と前記第２の円形導波路との第２の円形導波路境界において前記第２の円形導波路の断面寸法に等しく、前記第２の方形導波路境界から前記第２の円形導波路境界に向かって連続的に変化し、前記第３の方形円形変換導波路の断面寸法は、前記第３の方形円形変換導波路と前記第３の方形導波路との第３の方形導波路境界において前記第３の方形導波路の断面寸法に等しく、前記第３の方形円形変換導波路と前記第３の円形導波路との第３の円形導波路境界において前記第３の円形導波路の断面寸法に等しく、前記第３の方形導波路境界から前記第３の円形導波路境界に向かって連続的に変化し、前記第４の方形円形変換導波路の断面寸法は、前記第４の方形円形変換導波路と前記第３の方形導波路との第４の方形導波路境界において前記第３の方形導波路の断面寸法に等しく、前記第４の方形円形変換導波路と前記第４の円形導波路との第４の円形導波路境界において前記第４の円形導波路の断面寸法に等しく、前記第４の方形導波路境界から前記第４の円形導波路境界に向かって連続的に変化する構成である。 The waveguide switch according to the present invention includes a base portion, a first fixed waveguide block fixed to the base portion and having at least one waveguide surrounded by a metal wall penetrating from a first end face to a second end face, a second fixed waveguide block fixed to the base portion and having a third end face parallel to the second end face of the first fixed waveguide block, and having at least one waveguide surrounded by a metal wall penetrating from the third end face to a fourth end face, and a movable waveguide block having a fifth end face facing in parallel with a predetermined gap between the fifth end face and the third end face of the second fixed waveguide block, and a sixth end face facing in parallel with a predetermined gap between the fifth end face and the third end face of the second fixed waveguide block, a plurality of waveguides surrounded by a metal wall are formed penetrating from the fifth end face to the sixth end face, the movable waveguide block being supported on the base portion in a state capable of sliding in parallel with the second end face of the first fixed waveguide block and the third end face of the second fixed waveguide block, and a driving device provided on the base portion for sliding the movable waveguide block, the movable waveguide block slidingly moving relative to the first fixed waveguide block and the second fixed waveguide block, and at a plurality of different positions, any of the plurality of waveguides of the movable waveguide block selectively connects any of at least one waveguide of the first fixed waveguide block and any of at least one waveguide of the second fixed waveguide block, the at least one waveguide of the second fixed waveguide block includes a first rectangular waveguide opening at the first end face, a first circular waveguide opening at the second end face, and a first rectangular-circular conversion waveguide connecting the first rectangular waveguide and the first circular waveguide, the at least one waveguide of the second fixed waveguide block includes a second rectangular waveguide opening at the fourth end face, a second circular waveguide opening at the third end face, and a second rectangular-circular conversion waveguide connecting the second rectangular waveguide and the second circular waveguide, and the at least one waveguide of the second fixed waveguide block includes a second rectangular waveguide opening at the fourth end face, a second circular waveguide opening at the third end face, and a second rectangular-circular conversion waveguide connecting the second rectangular waveguide and the second circular waveguide, each of the waveguides includes a third rectangular waveguide, a third circular waveguide opening at the fifth end face, a fourth circular waveguide opening at the sixth end face, a third rectangular-circular conversion waveguide connecting the third rectangular waveguide and the third circular waveguide, and a fourth rectangular-circular conversion waveguide connecting the third rectangular waveguide and the fourth circular waveguide, and a cross-sectional dimension of the first rectangular-circular conversion waveguide is 1/100 of that of the first rectangular waveguide at a first rectangular waveguide boundary between the first rectangular-circular conversion waveguide and the first rectangular waveguide. a cross-sectional dimension of the second rectangular-circular conversion waveguide that is equal to a cross-sectional dimension of the first circular waveguide at a first circular waveguide boundary between the first rectangular-circular conversion waveguide and the first circular waveguide and that changes continuously from the first rectangular waveguide boundary to the first circular waveguide boundary; a cross-sectional dimension of the second rectangular-circular conversion waveguide that is equal to a cross-sectional dimension of the second rectangular waveguide at a second rectangular waveguide boundary between the second rectangular-circular conversion waveguide and the second rectangular waveguide; The cross-sectional dimension of the third rectangular-circular conversion waveguide is equal to the cross-sectional dimension of the second circular waveguide at the circular waveguide boundary and changes continuously from the second rectangular waveguide boundary to the second circular waveguide boundary, the cross-sectional dimension of the third rectangular-circular conversion waveguide is equal to the cross-sectional dimension of the third rectangular waveguide at the third rectangular waveguide boundary between the third rectangular-circular conversion waveguide and the third rectangular waveguide, the cross-sectional dimension of the third circular waveguide is equal to the cross-sectional dimension of the third rectangular waveguide at the third circular waveguide boundary between the third rectangular-circular conversion waveguide and the third circular waveguide, The cross-sectional dimension of the fourth square-circular conversion waveguide is equal to the cross-sectional dimension of the third square waveguide at the fourth square waveguide boundary between the fourth square-circular conversion waveguide and the third square waveguide, and is equal to the cross-sectional dimension of the fourth circular waveguide at the fourth circular waveguide boundary between the fourth square-circular conversion waveguide and the fourth circular waveguide, and is configured to change continuously from the fourth square waveguide boundary to the fourth circular waveguide boundary.

つまり、本発明に係る導波管スイッチは、上記の導波管スイッチの構成を可動部（可動導波管ブロック）、第１の固定導波管ブロック、及び第２の固定導波管ブロックに用いた構造である。この構成により、本発明に係る導波管スイッチは、不要な共振による周波数特性劣化を抑制し、第１の固定導波管ブロックと可動導波管ブロックの間の隙間と、第２の固定導波管ブロックと可動導波管ブロックの間の隙間における意図しない電磁波の漏洩を抑えることができる。 In other words, the waveguide switch according to the present invention has a structure in which the configuration of the above-mentioned waveguide switch is used in the movable section (movable waveguide block), the first fixed waveguide block, and the second fixed waveguide block. With this configuration, the waveguide switch according to the present invention can suppress deterioration of frequency characteristics due to unnecessary resonance, and can suppress unintended leakage of electromagnetic waves in the gap between the first fixed waveguide block and the movable waveguide block, and in the gap between the second fixed waveguide block and the movable waveguide block.

また、本発明に係る導波管スイッチは、第１の固定導波管ブロックと可動導波管ブロックの間の隙間と、第２の固定導波管ブロックと可動導波管ブロックの間の隙間を従来よりも広げても周波数特性が劣化しにくく、透過周波数帯域を広くすることができる。また、本発明に係る導波管スイッチは、第１の固定導波管ブロックと可動導波管ブロックの間の隙間と、第２の固定導波管ブロックと可動導波管ブロックの間の隙間を従来よりも広く取れるため、機械加工精度が緩和され、経年変化への耐性も高くなる。 In addition, the waveguide switch according to the present invention is less likely to degrade in frequency characteristics even if the gap between the first fixed waveguide block and the movable waveguide block and the gap between the second fixed waveguide block and the movable waveguide block are made wider than in the past, and the transmission frequency band can be made wider.In addition, the waveguide switch according to the present invention can have a wider gap between the first fixed waveguide block and the movable waveguide block and the gap between the second fixed waveguide block and the movable waveguide block than in the past, which relaxes the machining precision and increases resistance to aging.

また、本発明に係る導波管スイッチにおいては、前記第１の固定導波管ブロックの前記第２の端面と、前記可動導波管ブロックの前記第５の端面との少なくとも一方において、各前記導波路の円形の開口の周囲を囲む位置に、少なくとも１重の円形枠状のチョーク溝が設けられているとともに、前記第２の固定導波管ブロックの前記第３の端面と、前記可動導波管ブロックの前記第６の端面との少なくとも一方において、各前記導波路の円形の開口の周囲を囲む位置に、少なくとも１重の円形枠状のチョーク溝が設けられている構成であってもよい。 In addition, in the waveguide switch according to the present invention, at least one of the second end face of the first fixed waveguide block and the fifth end face of the movable waveguide block may have at least one circular frame-shaped choke groove at a position surrounding the periphery of the circular opening of each of the waveguides, and at least one of the third end face of the second fixed waveguide block and the sixth end face of the movable waveguide block may have at least one circular frame-shaped choke groove at a position surrounding the periphery of the circular opening of each of the waveguides.

この構成により、本発明に係る導波管スイッチは、第１の固定導波管ブロックと可動導波管ブロックの間の隙間と、第２の固定導波管ブロックと可動導波管ブロックの間の隙間に漏洩する電力を更に抑制することができる。 With this configuration, the waveguide switch of the present invention can further suppress power leakage into the gap between the first fixed waveguide block and the movable waveguide block and into the gap between the second fixed waveguide block and the movable waveguide block.

本発明は、不要な共振による周波数特性劣化を抑制することができる導波管スイッチを提供するものである。 The present invention provides a waveguide switch that can suppress deterioration of frequency characteristics caused by unnecessary resonance.

本発明の第１の実施形態に係る導波管スイッチの構造を示す斜視図である。1 is a perspective view showing a structure of a waveguide switch according to a first embodiment of the present invention; 本発明の第１の実施形態に係る導波管スイッチの導波路の開口の中心を含む断面を示す図であって、（ａ）はＹＺ断面を示しており、（ｂ）はＸＺ断面を示している。1A and 1B are diagrams showing cross sections including the center of an opening of a waveguide of a waveguide switch according to a first embodiment of the present invention, in which (a) shows a YZ cross section and (b) shows an XZ cross section. 本発明の第１の実施形態に係る導波管スイッチにおけるチョーク構造を示す拡大正面図である。FIG. 2 is an enlarged front view showing a choke structure in the waveguide switch according to the first embodiment of the present invention. 本発明の第１の実施形態に係る導波管スイッチの２つの導波管の端面間の隙間における電界の面内分布のシミュレーション結果を示すグラフである。5 is a graph showing a simulation result of an in-plane distribution of an electric field in a gap between end faces of two waveguides in the waveguide switch according to the first embodiment of the present invention. 本発明の第１の実施形態に係る導波管スイッチ（チョーク溝なし）の透過特性のシミュレーション結果を示すグラフである。5 is a graph showing a simulation result of the transmission characteristics of the waveguide switch (without a choke groove) according to the first embodiment of the present invention. 本発明の第１の実施形態に係る導波管スイッチ（チョーク溝あり）の透過特性のシミュレーション結果を示すグラフである。5 is a graph showing a simulation result of the transmission characteristics of the waveguide switch (with choke grooves) according to the first embodiment of the present invention. 本発明の第２の実施形態に係る導波管スイッチの分解斜視図である。FIG. 11 is an exploded perspective view of a waveguide switch according to a second embodiment of the present invention. 本発明の第２の実施形態に係る導波管スイッチの側面図である。FIG. 11 is a side view of a waveguide switch according to a second embodiment of the present invention. 本発明の第２の実施形態に係る導波管スイッチの平面図である。FIG. 11 is a plan view of a waveguide switch according to a second embodiment of the present invention. 本発明の第２の実施形態に係る導波管スイッチの動作説明図（その１）である。11A to 11C are diagrams illustrating the operation of the waveguide switch according to the second embodiment of the present invention; 本発明の第２の実施形態に係る導波管スイッチの動作説明図（その２）である。13A to 13C are diagrams illustrating the operation of the waveguide switch according to the second embodiment of the present invention (part 2).

以下、本発明に係る導波管スイッチの実施形態について、図面を用いて説明する。一般に、導波管スイッチなどの可動部の周りには隙間が必要であるが、機械加工精度の制約から、許容される隙間の大きさには下限がある。また、可動部を支持している機構の摺動部の摩耗などによって隙間が広がることもある。使用周波数が高い（波長が短い）ほど、同じ大きさの隙間でも波長に対して実質的に広くなるため、電磁波の漏洩が増加することになる。本発明に係る導波管スイッチは、このような可動部の周りの隙間における電磁波の漏洩を抑制するものである。 Below, an embodiment of a waveguide switch according to the present invention will be described with reference to the drawings. Generally, a gap is necessary around a moving part such as a waveguide switch, but due to restrictions on machining precision, there is a lower limit to the allowable size of the gap. The gap may also widen due to wear of the sliding parts of the mechanism supporting the moving part. The higher the frequency used (the shorter the wavelength), the wider the gap will be compared to the wavelength even if the gap is the same size, resulting in increased leakage of electromagnetic waves. The waveguide switch according to the present invention suppresses leakage of electromagnetic waves in such gaps around moving parts.

（第１の実施形態）
図１は、本発明の第１の実施形態に係る導波管スイッチ１を４分の１に分割して示している。導波管スイッチ１は、２つの導波管１０，２０の端面１０ｂ，２０ａが、所定の隙間ｇを開けて平行に対向する構造である。導波管１０には導波路１１が形成され、導波管２０には導波路２１が形成されている。なお、後述する第１の固定導波管ブロック４０や可動導波管ブロック６０のように、導波管１０，２０には複数の導波路が形成されていてもよい。 (First embodiment)
1 shows a waveguide switch 1 according to a first embodiment of the present invention, divided into quarters. The waveguide switch 1 has a structure in which end faces 10b, 20a of two waveguides 10, 20 face each other in parallel with a predetermined gap g therebetween. A waveguide 11 is formed in the waveguide 10, and a waveguide 21 is formed in the waveguide 20. Note that the waveguides 10, 20 may have a plurality of waveguides formed therein, as in a first fixed waveguide block 40 and a movable waveguide block 60 described later.

２つの導波管１０，２０は、例えば、真鍮、アルミニウム、銅、金などの導電性材料により形成される。これらの導電性材料のうち、アルミニウムは、加工がしやすくコストが安い上に表面粗さを小さくできるため、特に好ましい。 The two waveguides 10, 20 are formed from a conductive material such as brass, aluminum, copper, or gold. Of these conductive materials, aluminum is particularly preferred because it is easy to process, is inexpensive, and has a small surface roughness.

図２（ａ）及び（ｂ）に示すように、導波管１０の導波路１１は、端面１０ａに開口する方形導波路１２と、端面１０ｂに開口する円形導波路１３と、方形導波路１２と円形導波路１３を接続する方形円形変換導波路１４と、を含む。方形導波路１２、円形導波路１３、及び方形円形変換導波路１４は、同一の導電性材料により一体形成されていてもよい。同様に、導波管２０の導波路２１は、端面２０ｂに開口する方形導波路２２と、端面２０ａに開口する円形導波路２３と、方形導波路２２と円形導波路２３を接続する方形円形変換導波路２４と、を含む。方形導波路２２、円形導波路２３、及び方形円形変換導波路２４は、同一の導電性材料により一体形成されていてもよい。なお、図２（ａ）及び（ｂ）では、後述するチョーク溝２５の図示を省略している。 2(a) and (b), the waveguide 11 of the waveguide 10 includes a rectangular waveguide 12 opening at the end face 10a, a circular waveguide 13 opening at the end face 10b, and a rectangular-circular conversion waveguide 14 connecting the rectangular waveguide 12 and the circular waveguide 13. The rectangular waveguide 12, the circular waveguide 13, and the rectangular-circular conversion waveguide 14 may be integrally formed from the same conductive material. Similarly, the waveguide 21 of the waveguide 20 includes a rectangular waveguide 22 opening at the end face 20b, a circular waveguide 23 opening at the end face 20a, and a rectangular-circular conversion waveguide 24 connecting the rectangular waveguide 22 and the circular waveguide 23. The rectangular waveguide 22, the circular waveguide 23, and the rectangular-circular conversion waveguide 24 may be integrally formed from the same conductive material. Note that the choke groove 25, which will be described later, is not shown in Figures 2(a) and (b).

方形導波路１２，２２のＺ方向に垂直な断面の形状、方形導波路１２の端面１０ａにおける開口の形状、方形導波路２２の端面２０ｂにおける開口の形状は、いずれも長方形（正方形の場合を含む）である。また、円形導波路１３，２３のＺ方向に垂直な断面の形状、円形導波路１３の端面１０ｂにおける開口の形状、円形導波路２３の端面２０ａにおける開口の形状は、いずれも円形である。 The cross-sectional shapes perpendicular to the Z direction of the rectangular waveguides 12 and 22, the shape of the opening at the end face 10a of the rectangular waveguide 12, and the shape of the opening at the end face 20b of the rectangular waveguide 22 are all rectangular (including the case where it is square). In addition, the cross-sectional shapes perpendicular to the Z direction of the circular waveguides 13 and 23, the shape of the opening at the end face 10b of the circular waveguide 13, and the shape of the opening at the end face 20a of the circular waveguide 23 are all circular.

方形円形変換導波路１４の断面寸法は、方形円形変換導波路１４と方形導波路１２との方形導波路境界ＳＢ１において方形導波路１２の断面寸法に等しく、方形円形変換導波路１４と円形導波路１３との円形導波路境界ＣＢ１において円形導波路１３の断面寸法に等しく、方形導波路境界ＳＢ１から円形導波路境界ＣＢ１に向かって連続的に変化している。同様に、方形円形変換導波路２４の断面寸法は、方形円形変換導波路２４と方形導波路２２との方形導波路境界ＳＢ２において方形導波路２２の断面寸法に等しく、方形円形変換導波路２４と円形導波路２３との円形導波路境界ＣＢ２において円形導波路２３の断面寸法に等しく、方形導波路境界ＳＢ２から円形導波路境界ＣＢ２に向かって連続的に変化している。 The cross-sectional dimension of the rectangular circular conversion waveguide 14 is equal to the cross-sectional dimension of the rectangular waveguide 12 at the rectangular waveguide boundary SB1 between the rectangular circular conversion waveguide 14 and the rectangular waveguide 12, and is equal to the cross-sectional dimension of the circular waveguide 13 at the circular waveguide boundary CB1 between the rectangular circular conversion waveguide 14 and the circular waveguide 13, and changes continuously from the rectangular waveguide boundary SB1 to the circular waveguide boundary CB1. Similarly, the cross-sectional dimension of the rectangular circular conversion waveguide 24 is equal to the cross-sectional dimension of the rectangular waveguide 22 at the rectangular waveguide boundary SB2 between the rectangular circular conversion waveguide 24 and the rectangular waveguide 22, and is equal to the cross-sectional dimension of the circular waveguide 23 at the circular waveguide boundary CB2 between the rectangular circular conversion waveguide 24 and the circular waveguide 23, and changes continuously from the rectangular waveguide boundary SB2 to the circular waveguide boundary CB2.

例えば、方形導波路１２，２２は、断面寸法が０．８６４ｍｍ×０．４３２ｍｍであり、ＷＲ－３帯域（２２０～３２５ＧＨｚ）を透過帯域とするＷＲ－３導波管を構成する。また、円形導波路１３，２３は、Ｚ方向の長さが例えば１ｍｍであり、断面寸法が直径１．１ｍｍである。また、方形円形変換導波路１４，２４は、Ｚ方向の長さが例えば２．５ｍｍであり、断面寸法が、方形導波路１２，２２との方形導波路境界ＳＢ１，ＳＢ２において０．８６４ｍｍ×０．４３２ｍｍであり、円形導波路１３，２３との円形導波路境界ＣＢ１，ＣＢ２において直径１．１ｍｍである。つまり、方形円形変換導波路１４，２４は、ＸＹ平面に平行な断面の面積が、方形導波路１２，２２との方形導波路境界ＳＢ１，ＳＢ２から円形導波路１３，２３との円形導波路境界ＣＢ１，ＣＢ２に向かって連続的に増加するように構成されている。 For example, the rectangular waveguides 12 and 22 have cross-sectional dimensions of 0.864 mm x 0.432 mm, constituting a WR-3 waveguide with a transmission band in the WR-3 band (220 to 325 GHz). The circular waveguides 13 and 23 have a length in the Z direction of, for example, 1 mm, and a cross-sectional dimension of 1.1 mm in diameter. The rectangular-circular conversion waveguides 14 and 24 have a length in the Z direction of, for example, 2.5 mm, and a cross-sectional dimension of 0.864 mm x 0.432 mm at the rectangular waveguide boundaries SB1 and SB2 with the rectangular waveguides 12 and 22, and a diameter of 1.1 mm at the circular waveguide boundaries CB1 and CB2 with the circular waveguides 13 and 23. In other words, the rectangular-circular conversion waveguides 14 and 24 are configured so that the area of the cross section parallel to the XY plane increases continuously from the rectangular waveguide boundaries SB1 and SB2 with the rectangular waveguides 12 and 22 to the circular waveguide boundaries CB1 and CB2 with the circular waveguides 13 and 23.

図１に示すように、導波管１０の端面１０ｂ又は導波管２０の端面２０ａのいずれか一方又は両方には、円形導波路１３，２３の円形の開口の周囲を囲む位置に、端面１０ｂ，２０ａ間の隙間ｇからの電磁波漏洩を防止するための少なくとも１重の円形枠状のチョーク溝２５が設けられていてもよい。以下では、主に、チョーク溝２５が導波管２０の端面２０ａに設けられた例について説明する。 As shown in FIG. 1, either or both of the end face 10b of the waveguide 10 and the end face 20a of the waveguide 20 may be provided with at least one circular frame-shaped choke groove 25 in a position surrounding the periphery of the circular opening of the circular waveguide 13, 23 to prevent electromagnetic wave leakage from the gap g between the end faces 10b, 20a. Below, we will mainly explain an example in which the choke groove 25 is provided on the end face 20a of the waveguide 20.

図３は、導波管２０の端面２０ａに設けられた２重のチョーク溝２５を、円形導波路２３の開口に近いものから順に符号２５－１，２５－２を付して示す図である。各チョーク溝２５－１，２５－２は、所定幅と所定深さを有する円形枠状に連続した溝であり、円形導波路２３の開口の中心位置に対して互いに同心に設けられている。各チョーク溝２５－１，２５－２の内壁面は、端面２０ａに対して垂直である。 Figure 3 shows the double choke grooves 25 provided on the end face 20a of the waveguide 20, labeled 25-1, 25-2 in order of proximity to the opening of the circular waveguide 23. Each choke groove 25-1, 25-2 is a continuous groove in the shape of a circular frame with a predetermined width and depth, and is provided concentrically with respect to the center position of the opening of the circular waveguide 23. The inner wall surface of each choke groove 25-1, 25-2 is perpendicular to the end face 20a.

導波管スイッチ１の使用帯域を２２０～３２５ＧＨｚ（ＷＲ－３帯域）とした場合の各チョーク溝２５の寸法の一例を以下に示す。チョーク溝２５－１の深さは０．１８５ｍｍ、チョーク溝２５－２の深さは０．１３ｍｍである。チョーク溝２５－１の幅は０．１６５ｍｍ、チョーク溝２５－２の幅は０．５３５ｍｍである。チョーク溝２５－１の外径及び内径は、それぞれ１．８９ｍｍ及び１．５６ｍｍである。チョーク溝２５－２の外径及び内径は、それぞれ３．６４ｍｍ及び２．５７ｍｍである。 An example of the dimensions of each choke groove 25 when the operating band of the waveguide switch 1 is 220 to 325 GHz (WR-3 band) is shown below. The depth of choke groove 25-1 is 0.185 mm, and the depth of choke groove 25-2 is 0.13 mm. The width of choke groove 25-1 is 0.165 mm, and the width of choke groove 25-2 is 0.535 mm. The outer diameter and inner diameter of choke groove 25-1 are 1.89 mm and 1.56 mm, respectively. The outer diameter and inner diameter of choke groove 25-2 are 3.64 mm and 2.57 mm, respectively.

図４は、図２及び図３に示した構造において、２２０ＧＨｚにおける端面１０ｂ，２０ａ間の隙間ｇの電界の面内分布のシミュレーション結果を、チョーク溝２５の４分の１を含む範囲で示している。この図は、黒く見える部分の電界が強いことを示している。ここで、隙間ｇは０．０５ｍｍとしている。なお、図４では、シミュレーション結果の画像に、方形導波路２２と円形導波路２３の開口の位置をそれぞれ示す長方形及び円を重ね合わせて図示している。 Figure 4 shows the results of a simulation of the in-plane distribution of the electric field in the gap g between the end faces 10b and 20a at 220 GHz in the structure shown in Figures 2 and 3, covering a range including one-quarter of the choke groove 25. This figure shows that the electric field is strong in the black areas. Here, the gap g is set to 0.05 mm. Note that in Figure 4, a rectangle and a circle indicating the positions of the openings of the rectangular waveguide 22 and the circular waveguide 23, respectively, are superimposed on the image of the simulation results.

図４より、円形導波路２３の開口の範囲において、電界がほぼ均一に強くなっているとともに、放射状に対称になっていることが分かる。これは、円形導波路１３の開口から前方に放射されて円形導波路２３の開口に入射する電力（あるいは、円形導波路２３の開口から前方に放射されて円形導波路１３の開口に入射する電力）が通常の方形導波管同士が対向する場合と比較して大きくなり、隙間ｇに漏洩する電力が小さくなるためである。 From Figure 4, it can be seen that the electric field is almost uniformly strong and radially symmetrical within the range of the opening of the circular waveguide 23. This is because the power radiated forward from the opening of the circular waveguide 13 and incident on the opening of the circular waveguide 23 (or the power radiated forward from the opening of the circular waveguide 23 and incident on the opening of the circular waveguide 13) is larger than when normal rectangular waveguides face each other, and the power leaking into the gap g is smaller.

図５は、図２に示した構造において、端面１０ｂ及び端面２０ａのいずれにもチョーク溝２５が設けられていない場合に、導波管１０から導波管２０に向かって電磁波が入射する場合の、導波路１１と導波路２１の間の透過特性Ｓ_２１のシミュレーション結果を示している。ここでは、端面１０ｂ，２０ａ間の隙間ｇを０．０５ｍｍ、０．１ｍｍ、０．２ｍｍの３とおりに変化させている。 Fig. 5 shows the results of a simulation of the transmission characteristic S21 between the waveguide 11 and the waveguide 21 when an electromagnetic wave is incident from the waveguide 10 toward the waveguide 20 in the structure shown in Fig. ₂ in which the choke groove 25 is not provided on either the end face 10b or the end face 20a. Here, the gap g between the end faces 10b and 20a is changed to three values: 0.05 mm, 0.1 mm, and 0.2 mm.

図５に示すように、隙間ｇが０．０５ｍｍの場合には、ＷＲ－３帯域（２２０～３２５ＧＨｚ）を含む広い周波数範囲にわたって、透過特性Ｓ_２１が－０．４ｄＢよりも高く（０ｄＢに近く）なることが確認できた。また、隙間ｇが０．１ｍｍの場合には、ＷＲ－３帯域を含む広い周波数範囲にわたって、－０．６ｄＢよりも高い良好な値を示すことが確認できた。また、隙間ｇが０．２ｍｍの場合には、ＷＲ－３帯域を含む広い周波数範囲にわたって、透過特性Ｓ_２１が－１．１ｄＢよりも高い値を示すことが確認できた。 As shown in Fig. 5, when the gap g is 0.05 mm, it was confirmed that the transmission characteristic _S21 is higher than -0.4 dB (close to 0 dB) over a wide frequency range including the WR-3 band (220 to 325 GHz). Also, when the gap g is 0.1 mm, it was confirmed that a good value higher than -0.6 dB was shown over a wide frequency range including the WR-3 band. Also, when the gap g is 0.2 mm, it was confirmed that the transmission characteristic _S21 is higher than -1.1 dB over a wide frequency range including the WR-3 band.

図６は、図２及び図３に示した構造において、導波管１０から導波管２０に向かって電磁波が入射する場合の、導波路１１と導波路２１の間の透過特性Ｓ_２１のシミュレーション結果を示している。ここでも、端面１０ｂ，２０ａ間の隙間ｇを０．０５ｍｍ、０．１ｍｍ、０．２ｍｍの３とおりに変化させている。また、チョーク溝２５は、端面１０ｂ及び端面２０ａのいずれか一方のみに設けられているとしている。 6 shows the results of a simulation of the transmission characteristic _S21 between the waveguide 11 and the waveguide 21 when an electromagnetic wave is incident from the waveguide 10 toward the waveguide 20 in the structure shown in Fig. 2 and Fig. 3. Here again, the gap g between the end faces 10b and 20a is changed to three values: 0.05 mm, 0.1 mm, and 0.2 mm. Also, the choke groove 25 is provided in only one of the end faces 10b and 20a.

図６に示すように、隙間ｇが０．０５ｍｍの場合には、ＷＲ－３帯域（２２０～３２５ＧＨｚ）を含む広い周波数範囲にわたって、透過特性Ｓ_２１が－０．０５ｄＢよりも高く（０ｄＢに近く）なることが確認できた。また、隙間ｇが０．１ｍｍの場合には、ＷＲ－３帯域を含む広い周波数範囲にわたって、－０．１５ｄＢよりも高い良好な値を示すことが確認できた。また、隙間ｇが０．２ｍｍの場合には、ＷＲ－３帯域を含む広い周波数範囲にわたって、透過特性Ｓ_２１が－０．３ｄＢよりも高い値を示すことが確認できた。 As shown in Fig. 6, when the gap g is 0.05 mm, it was confirmed that the transmission characteristic _S21 is higher than -0.05 dB (close to 0 dB) over a wide frequency range including the WR-3 band (220 to 325 GHz). Also, when the gap g is 0.1 mm, it was confirmed that a good value higher than -0.15 dB was shown over a wide frequency range including the WR-3 band. Also, when the gap g is 0.2 mm, it was confirmed that the transmission characteristic _S21 is higher than -0.3 dB over a wide frequency range including the WR-3 band.

図５及び図６に示したシミュレーション結果から、チョーク溝２５がない構成の導波管スイッチ１の透過特性Ｓ_２１よりも、チョーク溝２５がある構成の導波管スイッチ１の透過特性Ｓ_２１が更に良好になることが分かる。なお、いずれの場合も、導波管２０から導波管１０に向かって電磁波が入射する場合の透過特性Ｓ_１２は、導波管１０から導波管２０に向かって電磁波が入射する場合の透過特性Ｓ_２１と同様であった。 5 and 6, it can be seen that the transmission characteristic _S21 of the waveguide switch 1 having the choke groove 25 is better than the transmission characteristic _S21 of the waveguide switch 1 having the choke groove 25. In either case, the transmission characteristic _S12 when an electromagnetic wave is incident from the waveguide 20 toward the waveguide 10 is similar to the transmission characteristic _S21 when an electromagnetic wave is incident from the waveguide 10 toward the waveguide 20.

なお、上記の説明では、円形導波路１３，２３の端面１０ｂ，２０ａに開口する部分の形状と、円形導波路１３，２３の断面の形状が円形であるとしたが、本発明はこれに限定されず、これらが楕円形であってもよい。円形導波路１３，２３の端面１０ｂ，２０ａに開口する部分の形状が楕円形である場合、チョーク溝２５の形状も楕円形の開口に合わせて楕円形枠状になっていてもよい。 In the above description, the shape of the portion opening at the end faces 10b, 20a of the circular waveguides 13, 23 and the cross-sectional shape of the circular waveguides 13, 23 are circular, but the present invention is not limited to this, and these may be elliptical. If the shape of the portion opening at the end faces 10b, 20a of the circular waveguides 13, 23 is elliptical, the shape of the choke groove 25 may also be an elliptical frame to match the elliptical opening.

なお、導波路１１，２１の端面１０ｂ，２０ａに開口する部分の形状が従来のような長方形である場合には、チョーク溝２５の形状が円形枠状又は楕円形枠状であると、導波路１１，２１の開口の角とチョーク溝２５との距離が近くなりすぎ、チョーク溝２５の作製が困難になってしまう。これに対して、本発明は、チョーク溝２５の形状を円形枠状又は楕円形枠状にするとともに、導波路１１，２１の端面１０ｂ，２０ａに開口する部分の形状を円形又は楕円形とすることで、導波路１１，２１の開口とチョーク溝２５との距離を、チョーク溝２５の作製を容易にする適切な距離に保つことができる。 In addition, if the shape of the portion opening on the end faces 10b, 20a of the waveguides 11, 21 is rectangular as in the conventional case, and the shape of the choke groove 25 is a circular frame or an elliptical frame, the distance between the corner of the opening of the waveguides 11, 21 and the choke groove 25 becomes too close, making it difficult to fabricate the choke groove 25. In contrast, in the present invention, the shape of the choke groove 25 is a circular frame or an elliptical frame, and the shape of the portion opening on the end faces 10b, 20a of the waveguides 11, 21 is a circular or elliptical shape, so that the distance between the opening of the waveguides 11, 21 and the choke groove 25 can be kept at an appropriate distance that makes it easy to fabricate the choke groove 25.

以上説明したように、本実施形態に係る導波管スイッチ１は、互いに平行に対向する導波管１０，２０の端面１０ｂ，２０ａにそれぞれ開口する導波路１１，２１の開口の形状を円形にすることによって、不要な共振による周波数特性劣化を抑制することができる。また、本実施形態に係る導波管スイッチ１は、対向する２つの導波管１０，２０間の隙間ｇが広がっても周波数特性が劣化しにくく、透過周波数帯域を広くすることができる。 As described above, the waveguide switch 1 according to this embodiment can suppress deterioration of frequency characteristics due to unnecessary resonance by making the opening shapes of the waveguides 11 and 21, which open to the end faces 10b and 20a of the waveguides 10 and 20 that face each other in parallel, circular. Furthermore, the waveguide switch 1 according to this embodiment is less likely to deteriorate in frequency characteristics even if the gap g between the two facing waveguides 10 and 20 widens, and can widen the transmission frequency band.

また、本実施形態に係る導波管スイッチ１は、互いに平行に対向する導波管１０，２０の端面１０ｂ，２０ａにそれぞれ開口する円形導波路１３，２３の周囲を囲むチョーク溝２５を円形枠状にすることによって不要な共振による特性劣化を防ぎ、２つの導波管１０，２０の端面１０ｂ，２０ａ間の隙間ｇからの電磁波漏洩を効果的に抑制することができる。 In addition, the waveguide switch 1 according to this embodiment prevents deterioration of characteristics due to unnecessary resonance by forming the choke groove 25 surrounding the periphery of the circular waveguides 13, 23 that open into the end faces 10b, 20a of the waveguides 10, 20 that face each other in parallel into a circular frame shape, and can effectively suppress electromagnetic wave leakage from the gap g between the end faces 10b, 20a of the two waveguides 10, 20.

（第２の実施形態）
以下、第１の実施形態に係る導波管スイッチ１の構成を含む本発明の第２の実施形態に係る導波管スイッチ２の構成について説明する。 Second Embodiment
Hereinafter, a configuration of the waveguide switch 2 according to the second embodiment of the present invention, which includes the configuration of the waveguide switch 1 according to the first embodiment, will be described.

図７は、第２の実施形態の導波管スイッチ２の分解斜視図、図８は側面図、図９は平面図である。なお、これらの図には各部の方向が分かりやすいように、Ｘ、Ｙ、Ｚの直交軸を示している。 Figure 7 is an exploded perspective view of the waveguide switch 2 of the second embodiment, Figure 8 is a side view, and Figure 9 is a plan view. Note that these figures show orthogonal axes X, Y, and Z to make it easier to understand the directions of each part.

これらの図に示しているように、導波管スイッチ２は、ベース部３１、第１の固定導波管ブロック４０、第２の固定導波管ブロック５０、可動導波管ブロック６０、及び駆動装置７０を有している。第１の固定導波管ブロック４０、第２の固定導波管ブロック５０、及び可動導波管ブロック６０は、図１等に示したＷＲ－３帯域を透過帯域とする導波管１０又は導波管２０に相当する。 As shown in these figures, the waveguide switch 2 has a base portion 31, a first fixed waveguide block 40, a second fixed waveguide block 50, a movable waveguide block 60, and a drive unit 70. The first fixed waveguide block 40, the second fixed waveguide block 50, and the movable waveguide block 60 correspond to the waveguide 10 or the waveguide 20 shown in FIG. 1 etc., which has a transmission band in the WR-3 band.

ベース部３１は外形が矩形の板状に形成され、その上面３１ａの一端側には第１の固定導波管ブロック４０が固定され、他端側には第２の固定導波管ブロック５０が固定されている。 The base portion 31 is formed into a rectangular plate-like shape, with a first fixed waveguide block 40 fixed to one end of its upper surface 31a, and a second fixed waveguide block 50 fixed to the other end.

第１の固定導波管ブロック４０は直方体状に形成され、金属壁で囲まれた所定口径の少なくとも１つ（この例では３つ）の導波路４１，４２，４３が、第１の端面４０ａからその反対側の第２の端面４０ｂまで貫通するように形成されている。ここで、導波路４１～４３は、ベース部３１の上面３１ａから同一の高さで、第１の端面４０ａ及び第２の端面４０ｂに直交する向きで、所定間隔をあけて平行に形成されている。 The first fixed waveguide block 40 is formed in a rectangular parallelepiped shape, and at least one (three in this example) waveguide 41, 42, 43 of a predetermined diameter surrounded by a metal wall is formed to penetrate from a first end face 40a to a second end face 40b on the opposite side. Here, the waveguides 41 to 43 are formed at the same height from the upper surface 31a of the base portion 31, in a direction perpendicular to the first end face 40a and the second end face 40b, and parallel with a predetermined distance between them.

これらの導波路４１～４３の口径及び高さは、後述する第２の固定導波管ブロック５０の導波路５１と同一である。導波路４２は、導波路５１の中心を通過する線上に形成されている。また、他の２つの導波路４１，４３は、それらの開口の中心位置を通る延長線が導波路５１の開口の中心位置を通る延長線を対称に挟むように配置される。 The apertures and heights of these waveguides 41 to 43 are the same as those of the waveguide 51 of the second fixed waveguide block 50 described below. The waveguide 42 is formed on a line passing through the center of the waveguide 51. The other two waveguides 41 and 43 are arranged so that the extension lines passing through the center positions of their apertures symmetrically sandwich the extension line passing through the center position of the aperture of the waveguide 51.

第１の固定導波管ブロック４０の導波路４１は、第１の端面４０ａに開口する第１の方形導波路４１ａと、第２の端面４０ｂに開口する第１の円形導波路４１ｂと、第１の方形導波路４１ａと第１の円形導波路４１ｂを接続する第１の方形円形変換導波路４１ｃと、を含む。 The waveguide 41 of the first fixed waveguide block 40 includes a first rectangular waveguide 41a that opens to the first end face 40a, a first circular waveguide 41b that opens to the second end face 40b, and a first square-circular conversion waveguide 41c that connects the first rectangular waveguide 41a and the first circular waveguide 41b.

第１の方形円形変換導波路４１ｃの断面寸法は、第１の方形円形変換導波路４１ｃと第１の方形導波路４１ａとの第１の方形導波路境界ＳＢ４１において第１の方形導波路４１ａの断面寸法に等しく、第１の方形円形変換導波路４１ｃと第１の円形導波路４１ｂとの第１の円形導波路境界ＣＢ４１において第１の円形導波路４１ｂの断面寸法に等しい。また、第１の方形円形変換導波路４１ｃの断面寸法は、第１の方形導波路境界ＳＢ４１から第１の円形導波路境界ＣＢ４１に向かって連続的に変化している。 The cross-sectional dimension of the first square-circular conversion waveguide 41c is equal to the cross-sectional dimension of the first square waveguide 41a at the first square waveguide boundary SB41 between the first square-circular conversion waveguide 41c and the first square waveguide 41a, and is equal to the cross-sectional dimension of the first circular waveguide 41b at the first circular waveguide boundary CB41 between the first square-circular conversion waveguide 41c and the first circular waveguide 41b. In addition, the cross-sectional dimension of the first square-circular conversion waveguide 41c changes continuously from the first square waveguide boundary SB41 to the first circular waveguide boundary CB41.

第１の固定導波管ブロック４０の導波路４２は、第１の端面４０ａに開口する第１の方形導波路４２ａと、第２の端面４０ｂに開口する第１の円形導波路４２ｂと、第１の方形導波路４２ａと第１の円形導波路４２ｂを接続する第１の方形円形変換導波路４２ｃと、を含む。 The waveguide 42 of the first fixed waveguide block 40 includes a first rectangular waveguide 42a that opens to the first end face 40a, a first circular waveguide 42b that opens to the second end face 40b, and a first square-circular conversion waveguide 42c that connects the first rectangular waveguide 42a and the first circular waveguide 42b.

第１の方形円形変換導波路４２ｃの断面寸法は、第１の方形円形変換導波路４２ｃと第１の方形導波路４２ａとの第１の方形導波路境界ＳＢ４２において第１の方形導波路４２ａの断面寸法に等しく、第１の方形円形変換導波路４２ｃと第１の円形導波路４２ｂとの第１の円形導波路境界ＣＢ４２において第１の円形導波路４２ｂの断面寸法に等しい。また、第１の方形円形変換導波路４２ｃの断面寸法は、第１の方形導波路境界ＳＢ４２から第１の円形導波路境界ＣＢ４２に向かって連続的に変化している。 The cross-sectional dimension of the first square-circular conversion waveguide 42c is equal to the cross-sectional dimension of the first square waveguide 42a at the first square waveguide boundary SB42 between the first square-circular conversion waveguide 42c and the first square waveguide 42a, and is equal to the cross-sectional dimension of the first circular waveguide 42b at the first circular waveguide boundary CB42 between the first square-circular conversion waveguide 42c and the first circular waveguide 42b. The cross-sectional dimension of the first square-circular conversion waveguide 42c changes continuously from the first square waveguide boundary SB42 to the first circular waveguide boundary CB42.

第１の固定導波管ブロック４０の導波路４３は、第１の端面４０ａに開口する第１の方形導波路４３ａと、第２の端面４０ｂに開口する第１の円形導波路４３ｂと、第１の方形導波路４３ａと第１の円形導波路４３ｂを接続する第１の方形円形変換導波路４３ｃと、を含む。 The waveguide 43 of the first fixed waveguide block 40 includes a first rectangular waveguide 43a that opens to the first end face 40a, a first circular waveguide 43b that opens to the second end face 40b, and a first square-circular conversion waveguide 43c that connects the first rectangular waveguide 43a and the first circular waveguide 43b.

第１の方形円形変換導波路４３ｃの断面寸法は、第１の方形円形変換導波路４３ｃと第１の方形導波路４３ａとの第１の方形導波路境界ＳＢ４３において第１の方形導波路４３ａの断面寸法に等しく、第１の方形円形変換導波路４３ｃと第１の円形導波路４３ｂとの第１の円形導波路境界ＣＢ４３において第１の円形導波路４３ｂの断面寸法に等しい。また、第１の方形円形変換導波路４３ｃの断面寸法は、第１の方形導波路境界ＳＢ４３から第１の円形導波路境界ＣＢ４３に向かって連続的に変化している。 The cross-sectional dimension of the first square-circular conversion waveguide 43c is equal to the cross-sectional dimension of the first square waveguide 43a at the first square waveguide boundary SB43 between the first square-circular conversion waveguide 43c and the first square waveguide 43a, and is equal to the cross-sectional dimension of the first circular waveguide 43b at the first circular waveguide boundary CB43 between the first square-circular conversion waveguide 43c and the first circular waveguide 43b. In addition, the cross-sectional dimension of the first square-circular conversion waveguide 43c changes continuously from the first square waveguide boundary SB43 to the first circular waveguide boundary CB43.

一方、第２の固定導波管ブロック５０は、第１の固定導波管ブロック４０と外形が同等の直方体状に形成され、第１の固定導波管ブロック４０の第２の端面４０ｂに、第３の端面５０ａを所定距離開けて平行に対向させた状態でベース部３１に固定されており、金属壁で囲まれた少なくとも１つ（この例では１つ）の導波路５１が第３の端面５０ａからその反対側の第４の端面５０ｂまで貫通するように形成されている。この導波路５１の口径及び高さは、第１の固定導波管ブロック４０の導波路４１～４３と同一である。また、導波路５１は、第３の端面５０ａ及び第４の端面５０ｂに直交する向きで、導波路４２の中心を通過する線上に形成されている。 On the other hand, the second fixed waveguide block 50 is formed in a rectangular parallelepiped shape with the same external shape as the first fixed waveguide block 40, and is fixed to the base portion 31 with the third end face 50a facing the second end face 40b of the first fixed waveguide block 40 in parallel with a predetermined distance therebetween, and at least one (in this example, one) waveguide 51 surrounded by a metal wall is formed to penetrate from the third end face 50a to the fourth end face 50b on the opposite side. The aperture and height of this waveguide 51 are the same as those of the waveguides 41 to 43 of the first fixed waveguide block 40. The waveguide 51 is formed on a line passing through the center of the waveguide 42 in a direction perpendicular to the third end face 50a and the fourth end face 50b.

第２の固定導波管ブロック５０の導波路５１は、第４の端面５０ｂに開口する第２の方形導波路５１ａと、第３の端面５０ａに開口する第２の円形導波路５１ｂと、第２の方形導波路５１ａと第２の円形導波路５１ｂを接続する第２の方形円形変換導波路５１ｃと、を含む。 The waveguide 51 of the second fixed waveguide block 50 includes a second rectangular waveguide 51a that opens to the fourth end face 50b, a second circular waveguide 51b that opens to the third end face 50a, and a second rectangular-circular conversion waveguide 51c that connects the second rectangular waveguide 51a and the second circular waveguide 51b.

第２の方形円形変換導波路５１ｃの断面寸法は、第２の方形円形変換導波路５１ｃと第２の方形導波路５１ａとの第２の方形導波路境界ＳＢ５１において第２の方形導波路５１ａの断面寸法に等しく、第２の方形円形変換導波路５１ｃと第２の円形導波路５１ｂとの第２の円形導波路境界ＣＢ５１において第２の円形導波路５１ｂの断面寸法に等しい。また、第２の方形円形変換導波路５１ｃの断面寸法は、第２の方形導波路境界ＳＢ５１から第２の円形導波路境界ＣＢ５１に向かって連続的に変化している。 The cross-sectional dimension of the second square-circular conversion waveguide 51c is equal to the cross-sectional dimension of the second square waveguide 51a at the second square waveguide boundary SB51 between the second square-circular conversion waveguide 51c and the second square waveguide 51a, and is equal to the cross-sectional dimension of the second circular waveguide 51b at the second circular waveguide boundary CB51 between the second square-circular conversion waveguide 51c and the second circular waveguide 51b. In addition, the cross-sectional dimension of the second square-circular conversion waveguide 51c changes continuously from the second square waveguide boundary SB51 to the second circular waveguide boundary CB51.

ベース部３１の上面３１ａで、第１の固定導波管ブロック４０の第２の端面４０ｂと第２の固定導波管ブロック５０の第３の端面５０ａの間には、第２の端面４０ｂ及び第３の端面５０ａに対して平行にスライド移動可能な状態で可動導波管ブロック６０が支持されている。可動導波管ブロック６０は、第１の固定導波管ブロック４０の第２の端面４０ｂと第２の固定導波管ブロック５０の第３の端面５０ａとの距離より僅か（例えば２００μｍ）に短い長さと、第１及び第２の固定導波管ブロック４０，５０の高さとほぼ同じ高さの直方体状に形成され、金属壁で囲まれた複数（この例では、第１の固定導波管ブロック４０に形成された導波路４１～４３の数に対応した３つ）の導波路６１，６２，６３が、第５の端面６０ａから第６の端面６０ｂまで貫通するように形成されている。ここで、第５の端面６０ａは、第１の固定導波管ブロック４０の第２の端面４０ｂに対して隙間ｇ（例えばｇ＝１００μｍ）を開けて平行に対向し、第６の端面６０ｂは、第２の固定導波管ブロック５０の第３の端面５０ａに対して隙間ｇ（例えばｇ＝１００μｍ）を開けて平行に対向している。 A movable waveguide block 60 is supported on the upper surface 31a of the base portion 31 between the second end face 40b of the first fixed waveguide block 40 and the third end face 50a of the second fixed waveguide block 50 in a state in which it can slide parallel to the second end face 40b and the third end face 50a. The movable waveguide block 60 is formed in a rectangular parallelepiped shape with a length slightly shorter (for example, 200 μm) than the distance between the second end face 40b of the first fixed waveguide block 40 and the third end face 50a of the second fixed waveguide block 50 and a height approximately equal to the height of the first and second fixed waveguide blocks 40, 50, and multiple waveguides 61, 62, 63 (in this example, three corresponding to the number of waveguides 41 to 43 formed in the first fixed waveguide block 40) surrounded by metal walls are formed to penetrate from the fifth end face 60a to the sixth end face 60b. Here, the fifth end face 60a faces parallel to the second end face 40b of the first fixed waveguide block 40 with a gap g (e.g., g = 100 μm), and the sixth end face 60b faces parallel to the third end face 50a of the second fixed waveguide block 50 with a gap g (e.g., g = 100 μm).

可動導波管ブロック６０の導波路６１～６３の口径及び高さは、第１の固定導波管ブロック４０の導波路４１～４３及び第２の固定導波管ブロック５０の導波路５１と同一である。導波路６２は、第５の端面６０ａ及び第６の端面６０ｂに直交する向きで形成されている。また、他の２つの導波路６１，６３は、第５の端面６０ａ及び第６の端面６０ｂに対して斜めに形成されている。金属壁で囲まれたこれら複数の導波路６１～６３は、内部に共振板や誘電体共振器を配置するなどの公知の方法で、ミリ波帯内で異なる通過帯域特性が付与されている。 The diameter and height of the waveguides 61-63 of the movable waveguide block 60 are the same as those of the waveguides 41-43 of the first fixed waveguide block 40 and the waveguide 51 of the second fixed waveguide block 50. The waveguide 62 is formed in a direction perpendicular to the fifth end face 60a and the sixth end face 60b. The other two waveguides 61, 63 are formed at an angle to the fifth end face 60a and the sixth end face 60b. These multiple waveguides 61-63, surrounded by metal walls, are given different passband characteristics within the millimeter wave band by a known method such as placing a resonator plate or a dielectric resonator inside.

可動導波管ブロック６０の導波路６１は、第３の方形導波路６１ａと、第５の端面６０ａに開口する第３の円形導波路６１ｂと、第６の端面６０ｂに開口する第４の円形導波路６１ｃと、第３の方形導波路６１ａと第３の円形導波路６１ｂを接続する第３の方形円形変換導波路６１ｄと、第３の方形導波路６１ａと第４の円形導波路６１ｃを接続する第４の方形円形変換導波路６１ｅと、を含む。 The waveguide 61 of the movable waveguide block 60 includes a third rectangular waveguide 61a, a third circular waveguide 61b opening at the fifth end face 60a, a fourth circular waveguide 61c opening at the sixth end face 60b, a third square-circular conversion waveguide 61d connecting the third rectangular waveguide 61a and the third circular waveguide 61b, and a fourth square-circular conversion waveguide 61e connecting the third rectangular waveguide 61a and the fourth circular waveguide 61c.

第３の方形円形変換導波路６１ｄの断面寸法は、第３の方形円形変換導波路６１ｄと第３の方形導波路６１ａとの第３の方形導波路境界ＳＢ６１ｄにおいて第３の方形導波路６１ａの断面寸法に等しく、第３の方形円形変換導波路６１ｄと第３の円形導波路６１ｂとの第３の円形導波路境界ＣＢ６１ｄにおいて第３の円形導波路６１ｂの断面寸法に等しい。また、第３の方形円形変換導波路６１ｄの断面寸法は、第３の方形導波路境界ＳＢ６１ｄから第３の円形導波路境界ＣＢ６１ｄに向かって連続的に変化している。 The cross-sectional dimension of the third square-circular conversion waveguide 61d is equal to the cross-sectional dimension of the third square waveguide 61a at the third square waveguide boundary SB61d between the third square-circular conversion waveguide 61d and the third square waveguide 61a, and is equal to the cross-sectional dimension of the third circular waveguide 61b at the third circular waveguide boundary CB61d between the third square-circular conversion waveguide 61d and the third circular waveguide 61b. The cross-sectional dimension of the third square-circular conversion waveguide 61d changes continuously from the third square waveguide boundary SB61d to the third circular waveguide boundary CB61d.

第４の方形円形変換導波路６１ｅの断面寸法は、第４の方形円形変換導波路６１ｅと第３の方形導波路６１ａとの第４の方形導波路境界ＳＢ６１ｅにおいて第３の方形導波路６１ａの断面寸法に等しく、第４の方形円形変換導波路６１ｅと第４の円形導波路６１ｃとの第４の円形導波路境界ＣＢ６１ｅにおいて第４の円形導波路６１ｃの断面寸法に等しい。また、第４の方形円形変換導波路６１ｅの断面寸法は、第４の方形導波路境界ＳＢ６１ｅから第４の円形導波路境界ＣＢ６１ｅに向かって連続的に変化している。 The cross-sectional dimension of the fourth square-circular conversion waveguide 61e is equal to the cross-sectional dimension of the third square waveguide 61a at the fourth square waveguide boundary SB61e between the fourth square-circular conversion waveguide 61e and the third square waveguide 61a, and is equal to the cross-sectional dimension of the fourth circular waveguide 61c at the fourth circular waveguide boundary CB61e between the fourth square-circular conversion waveguide 61e and the fourth circular waveguide 61c. In addition, the cross-sectional dimension of the fourth square-circular conversion waveguide 61e changes continuously from the fourth square waveguide boundary SB61e to the fourth circular waveguide boundary CB61e.

可動導波管ブロック６０の導波路６２は、第３の方形導波路６２ａと、第５の端面６０ａに開口する第３の円形導波路６２ｂと、第６の端面６０ｂに開口する第４の円形導波路６２ｃと、第３の方形導波路６２ａと第３の円形導波路６２ｂを接続する第３の方形円形変換導波路６２ｄと、第３の方形導波路６２ａと第４の円形導波路６２ｃを接続する第４の方形円形変換導波路６２ｅと、を含む。 The waveguide 62 of the movable waveguide block 60 includes a third rectangular waveguide 62a, a third circular waveguide 62b opening at the fifth end face 60a, a fourth circular waveguide 62c opening at the sixth end face 60b, a third square-circular conversion waveguide 62d connecting the third rectangular waveguide 62a and the third circular waveguide 62b, and a fourth square-circular conversion waveguide 62e connecting the third rectangular waveguide 62a and the fourth circular waveguide 62c.

第３の方形円形変換導波路６２ｄの断面寸法は、第３の方形円形変換導波路６２ｄと第３の方形導波路６２ａとの第３の方形導波路境界ＳＢ６２ｄにおいて第３の方形導波路６２ａの断面寸法に等しく、第３の方形円形変換導波路６２ｄと第３の円形導波路６２ｂとの第３の円形導波路境界ＣＢ６２ｄにおいて第３の円形導波路６２ｂの断面寸法に等しい。また、第３の方形円形変換導波路６２ｄの断面寸法は、第３の方形導波路境界ＳＢ６２ｄから第３の円形導波路境界ＣＢ６２ｄに向かって連続的に変化している。 The cross-sectional dimension of the third square-circular conversion waveguide 62d is equal to the cross-sectional dimension of the third square waveguide 62a at the third square waveguide boundary SB62d between the third square-circular conversion waveguide 62d and the third square waveguide 62a, and is equal to the cross-sectional dimension of the third circular waveguide 62b at the third circular waveguide boundary CB62d between the third square-circular conversion waveguide 62d and the third circular waveguide 62b. The cross-sectional dimension of the third square-circular conversion waveguide 62d changes continuously from the third square waveguide boundary SB62d to the third circular waveguide boundary CB62d.

第４の方形円形変換導波路６２ｅの断面寸法は、第４の方形円形変換導波路６２ｅと第３の方形導波路６２ａとの第４の方形導波路境界ＳＢ６２ｅにおいて第３の方形導波路６２ａの断面寸法に等しく、第４の方形円形変換導波路６２ｅと第４の円形導波路６２ｃとの第４の円形導波路境界ＣＢ６２ｅにおいて第４の円形導波路６２ｃの断面寸法に等しい。また、第４の方形円形変換導波路６２ｅの断面寸法は、第４の方形導波路境界ＳＢ６２ｅから第４の円形導波路境界ＣＢ６２ｅに向かって連続的に変化している。 The cross-sectional dimension of the fourth square-circular conversion waveguide 62e is equal to the cross-sectional dimension of the third square waveguide 62a at the fourth square waveguide boundary SB62e between the fourth square-circular conversion waveguide 62e and the third square waveguide 62a, and is equal to the cross-sectional dimension of the fourth circular waveguide 62c at the fourth circular waveguide boundary CB62e between the fourth square-circular conversion waveguide 62e and the fourth circular waveguide 62c. In addition, the cross-sectional dimension of the fourth square-circular conversion waveguide 62e changes continuously from the fourth square waveguide boundary SB62e to the fourth circular waveguide boundary CB62e.

可動導波管ブロック６０の導波路６３は、第３の方形導波路６３ａと、第５の端面６０ａに開口する第３の円形導波路６３ｂと、第６の端面６０ｂに開口する第４の円形導波路６３ｃと、第３の方形導波路６３ａと第３の円形導波路６３ｂを接続する第３の方形円形変換導波路６３ｄと、第３の方形導波路６３ａと第４の円形導波路６３ｃを接続する第４の方形円形変換導波路６３ｅと、を含む。 The waveguide 63 of the movable waveguide block 60 includes a third rectangular waveguide 63a, a third circular waveguide 63b opening at the fifth end face 60a, a fourth circular waveguide 63c opening at the sixth end face 60b, a third square-circular conversion waveguide 63d connecting the third rectangular waveguide 63a and the third circular waveguide 63b, and a fourth square-circular conversion waveguide 63e connecting the third rectangular waveguide 63a and the fourth circular waveguide 63c.

第３の方形円形変換導波路６３ｄの断面寸法は、第３の方形円形変換導波路６３ｄと第３の方形導波路６３ａとの第３の方形導波路境界ＳＢ６３ｄにおいて第３の方形導波路６３ａの断面寸法に等しく、第３の方形円形変換導波路６３ｄと第３の円形導波路６３ｂとの第３の円形導波路境界ＣＢ６３ｄにおいて第３の円形導波路６３ｂの断面寸法に等しい。また、第３の方形円形変換導波路６３ｄの断面寸法は、第３の方形導波路境界ＳＢ６３ｄから第３の円形導波路境界ＣＢ６３ｄに向かって連続的に変化している。 The cross-sectional dimension of the third square-circular conversion waveguide 63d is equal to the cross-sectional dimension of the third square waveguide 63a at the third square waveguide boundary SB63d between the third square-circular conversion waveguide 63d and the third square waveguide 63a, and is equal to the cross-sectional dimension of the third circular waveguide 63b at the third circular waveguide boundary CB63d between the third square-circular conversion waveguide 63d and the third circular waveguide 63b. The cross-sectional dimension of the third square-circular conversion waveguide 63d changes continuously from the third square waveguide boundary SB63d to the third circular waveguide boundary CB63d.

第４の方形円形変換導波路６３ｅの断面寸法は、第４の方形円形変換導波路６３ｅと第３の方形導波路６３ａとの第４の方形導波路境界ＳＢ６３ｅにおいて第３の方形導波路６３ａの断面寸法に等しく、第４の方形円形変換導波路６３ｅと第４の円形導波路６３ｃとの第４の円形導波路境界ＣＢ６３ｅにおいて第４の円形導波路６３ｃの断面寸法に等しい。また、第４の方形円形変換導波路６３ｅの断面寸法は、第４の方形導波路境界ＳＢ６３ｅから第４の円形導波路境界ＣＢ６３ｅに向かって連続的に変化している。 The cross-sectional dimension of the fourth square-circular conversion waveguide 63e is equal to the cross-sectional dimension of the third square waveguide 63a at the fourth square waveguide boundary SB63e between the fourth square-circular conversion waveguide 63e and the third square waveguide 63a, and is equal to the cross-sectional dimension of the fourth circular waveguide 63c at the fourth circular waveguide boundary CB63e between the fourth square-circular conversion waveguide 63e and the fourth circular waveguide 63c. In addition, the cross-sectional dimension of the fourth square-circular conversion waveguide 63e changes continuously from the fourth square waveguide boundary SB63e to the fourth circular waveguide boundary CB63e.

図９に示した位置（以下、「中立位置」という）において、中央の導波路６２の第５の端面６０ａ側の開口は、第１の固定導波管ブロック４０の導波路４２の第２の端面４０ｂ側の開口と同心に並び、中央の導波路６２の第６の端面６０ｂ側の開口は、第２の固定導波管ブロック５０の導波路５１の第３の端面５０ａ側の開口と同心に並ぶ。したがって、図９の中立位置では、第１の固定導波管ブロック４０の導波路４２と第２の固定導波管ブロック５０の導波路５１の間が、可動導波管ブロック６０の導波路６２を介して接続される。 9 (hereinafter referred to as the "neutral position"), the opening on the fifth end face 60a side of the central waveguide 62 is aligned concentrically with the opening on the second end face 40b side of the waveguide 42 of the first fixed waveguide block 40, and the opening on the sixth end face 60b side of the central waveguide 62 is aligned concentrically with the opening on the third end face 50a side of the waveguide 51 of the second fixed waveguide block 50. Therefore, in the neutral position of FIG. 9, the waveguide 42 of the first fixed waveguide block 40 and the waveguide 51 of the second fixed waveguide block 50 are connected via the waveguide 62 of the movable waveguide block 60.

また、中立位置において、第５の端面６０ａ側の導波路６１，６３の開口位置は、第１の固定導波管ブロック４０の導波路４１，４３の開口位置からそれぞれ外側にＬだけ離間し、第６の端面６０ｂ側の導波路６１，６３の開口位置は、第２の固定導波管ブロック５０の導波路５１の開口位置から両側にそれぞれＬだけ離間するように設けられている。 In addition, in the neutral position, the opening positions of the waveguides 61 and 63 on the fifth end face 60a side are spaced outward by L from the opening positions of the waveguides 41 and 43 of the first fixed waveguide block 40, and the opening positions of the waveguides 61 and 63 on the sixth end face 60b side are spaced L on both sides from the opening position of the waveguide 51 of the second fixed waveguide block 50.

したがって、図１０に示すように、中立位置から可動導波管ブロック６０を幅方向（Ｘ方向）に－Ｌだけスライド移動させた第１の位置では、第１の固定導波管ブロック４０の第２の端面４０ｂ側の導波路４１の開口位置と可動導波管ブロック６０の第５の端面６０ａ側の一方の導波路６１の開口位置とが一致し、第２の固定導波管ブロック５０の第３の端面５０ａ側の導波路５１の開口位置と可動導波管ブロック６０の第６の端面６０ｂ側の導波路６１の開口位置とが一致して、第１の固定導波管ブロック４０の導波路４１と第２の固定導波管ブロック５０の導波路５１の間が、導波路６１を介して接続される。 Therefore, as shown in FIG. 10, in the first position obtained by sliding the movable waveguide block 60 from the neutral position in the width direction (X direction) by -L, the opening position of the waveguide 41 on the second end face 40b side of the first fixed waveguide block 40 coincides with the opening position of one of the waveguides 61 on the fifth end face 60a side of the movable waveguide block 60, and the opening position of the waveguide 51 on the third end face 50a side of the second fixed waveguide block 50 coincides with the opening position of the waveguide 61 on the sixth end face 60b side of the movable waveguide block 60, so that the waveguide 41 of the first fixed waveguide block 40 and the waveguide 51 of the second fixed waveguide block 50 are connected via the waveguide 61.

また、図１１に示すように、中立位置から可動導波管ブロック６０を幅方向にＬだけスライド移動させた第２の位置では、第１の固定導波管ブロック４０の第２の端面４０ｂ側の導波路４３の開口位置と可動導波管ブロック６０の第５の端面６０ａ側の導波路６３の開口位置とが一致し、第２の固定導波管ブロック５０の第３の端面５０ａ側の導波路５１の開口位置と可動導波管ブロック６０の第６の端面６０ｂ側の導波路６３の開口位置とが一致して、第１の固定導波管ブロック４０の導波路４３と、第２の固定導波管ブロック５０の導波路５１の間が、導波路６３を介して接続される。 Also, as shown in FIG. 11, in the second position obtained by sliding the movable waveguide block 60 from the neutral position in the width direction by L, the opening position of the waveguide 43 on the second end face 40b side of the first fixed waveguide block 40 coincides with the opening position of the waveguide 63 on the fifth end face 60a side of the movable waveguide block 60, and the opening position of the waveguide 51 on the third end face 50a side of the second fixed waveguide block 50 coincides with the opening position of the waveguide 63 on the sixth end face 60b side of the movable waveguide block 60, so that the waveguide 43 of the first fixed waveguide block 40 and the waveguide 51 of the second fixed waveguide block 50 are connected via the waveguide 63.

このようにして、可動導波管ブロック６０は、第１の固定導波管ブロック４０及び第２の固定導波管ブロック５０に対してスライド移動し、異なる複数の位置（中立位置、第１の位置、及び第２の位置）で、導波路６１～６３のいずれかが、第１の固定導波管ブロック４０の導波路４１～４３のいずれかと、第２の固定導波管ブロック５０の導波路５１とを選択的に接続させる。 In this way, the movable waveguide block 60 slides relative to the first fixed waveguide block 40 and the second fixed waveguide block 50, and at different positions (neutral position, first position, and second position), any one of the waveguides 61 to 63 selectively connects any one of the waveguides 41 to 43 of the first fixed waveguide block 40 to the waveguide 51 of the second fixed waveguide block 50.

なお、この例では、第１の固定導波管ブロック４０の導波路４２の中心を通る線の延長線上に第２の固定導波管ブロック５０の導波路５１が位置し、中立位置において可動導波管ブロック６０の３つの導波路６１～６３もその延長線に対して線対称となる構造となっている。一方、第２の固定導波管ブロック５０の導波路５１が、第１の固定導波管ブロック４０の導波路４２の中心を通る線の延長線上にない非対称な構造も可能であり、その場合、可動導波管ブロック６０の３つの導波路６１～６３も非対称な配置となる。 In this example, the waveguide 51 of the second fixed waveguide block 50 is located on an extension of a line passing through the center of the waveguide 42 of the first fixed waveguide block 40, and the three waveguides 61 to 63 of the movable waveguide block 60 are also structured to be linearly symmetrical with respect to that extension in the neutral position. On the other hand, an asymmetrical structure in which the waveguide 51 of the second fixed waveguide block 50 is not on an extension of a line passing through the center of the waveguide 42 of the first fixed waveguide block 40 is also possible, in which case the three waveguides 61 to 63 of the movable waveguide block 60 are also arranged asymmetrically.

可動導波管ブロック６０は、ベース部３１に設けられた駆動装置７０によってスライド移動可能に支持されている。この駆動装置７０の構造は任意であるが、例えば、ベース部３１の下面側から可動導波管ブロック６０を支持する支持部材に対し、ステッピングモータの回転運動を直進運動に変換して伝達する構造になっている。この場合、可動導波管ブロック６０の位置と移動距離をセンサやエンコーダ等で検出して、少なくとも図９の中立位置、図１０の第１の位置、及び図１１の第２の位置に選択的に移動できるように制御すればよい。 The movable waveguide block 60 is supported by a driving device 70 provided on the base portion 31 so that it can slide. The structure of this driving device 70 is arbitrary, but for example, it is structured to convert the rotational motion of a stepping motor into linear motion and transmit it to a support member that supports the movable waveguide block 60 from the underside of the base portion 31. In this case, the position and movement distance of the movable waveguide block 60 can be detected by a sensor, encoder, etc., and it can be controlled so that it can be selectively moved to at least the neutral position in FIG. 9, the first position in FIG. 10, and the second position in FIG. 11.

第１の固定導波管ブロック４０の第２の端面４０ｂと、可動導波管ブロック６０の第５の端面６０ａとの少なくとも一方において、導波路４１～４３又は導波路６１～６３の円形又は楕円形の開口の周囲を囲む位置には、図３に示したような少なくとも１重の円形枠状又は楕円形枠状のチョーク溝２５が設けられている。同様に、第２の固定導波管ブロック５０の第３の端面５０ａと、可動導波管ブロック６０の第６の端面６０ｂとの少なくとも一方において、導波路５１又は導波路６１～６３の円形又は楕円形の開口の周囲を囲む位置には、図３に示したような少なくとも１重の円形枠状又は楕円形枠状のチョーク溝２５が設けられている。 At least one of the second end face 40b of the first fixed waveguide block 40 and the fifth end face 60a of the movable waveguide block 60 has at least one circular or elliptical frame-shaped choke groove 25 as shown in FIG. 3 at a position surrounding the circular or elliptical opening of the waveguide 41-43 or the waveguide 61-63. Similarly, at least one of the third end face 50a of the second fixed waveguide block 50 and the sixth end face 60b of the movable waveguide block 60 has at least one circular or elliptical frame-shaped choke groove 25 as shown in FIG. 3 at a position surrounding the circular or elliptical opening of the waveguide 51 or the waveguide 61-63.

例えば、第１の固定導波管ブロック４０の第２の端面４０ｂ側における導波路４１～４３の円形又は楕円形の開口の周囲を囲む位置と、第２の固定導波管ブロック５０の第３の端面５０ａ側における導波路５１の円形又は楕円形の開口の周囲を囲む位置に、少なくとも１重の円形枠状又は楕円形枠状のチョーク溝２５が設けられてもよい。 For example, at least one circular or elliptical frame-shaped choke groove 25 may be provided at a position surrounding the circular or elliptical opening of the waveguides 41 to 43 on the second end face 40b side of the first fixed waveguide block 40, and at a position surrounding the circular or elliptical opening of the waveguide 51 on the third end face 50a side of the second fixed waveguide block 50.

以上説明したように、本実施形態に係る導波管スイッチ２は、第１の実施形態の導波管スイッチ１の構成を可動部（可動導波管ブロック６０）、第１の固定導波管ブロック４０、及び第２の固定導波管ブロック５０に用いた構造である。この構成により、本実施形態に係る導波管スイッチ２は、不要な共振による周波数特性劣化を抑制し、第１の固定導波管ブロック４０と可動導波管ブロック６０の間の隙間と、第２の固定導波管ブロック５０と可動導波管ブロック６０の間の隙間における意図しない電磁波の漏洩を抑えることができる。 As described above, the waveguide switch 2 according to this embodiment has a structure in which the configuration of the waveguide switch 1 according to the first embodiment is used for the movable part (movable waveguide block 60), the first fixed waveguide block 40, and the second fixed waveguide block 50. With this configuration, the waveguide switch 2 according to this embodiment can suppress deterioration of frequency characteristics due to unnecessary resonance, and can suppress unintended leakage of electromagnetic waves in the gap between the first fixed waveguide block 40 and the movable waveguide block 60 and the gap between the second fixed waveguide block 50 and the movable waveguide block 60.

また、本実施形態に係る導波管スイッチ２は、第１の固定導波管ブロック４０と可動導波管ブロック６０の間の隙間と、第２の固定導波管ブロック５０と可動導波管ブロック６０の間の隙間を従来よりも広げても周波数特性が劣化しにくく、透過周波数帯域を広くすることができる。また、本実施形態に係る導波管スイッチ２は、第１の固定導波管ブロック４０と可動導波管ブロック６０の間の隙間と、第２の固定導波管ブロック５０と可動導波管ブロック６０の間の隙間を従来よりも広く取れるため、機械加工精度が緩和され、経年変化への耐性も高くなる。 In addition, in the waveguide switch 2 according to this embodiment, even if the gap between the first fixed waveguide block 40 and the movable waveguide block 60 and the gap between the second fixed waveguide block 50 and the movable waveguide block 60 are made wider than in the past, the frequency characteristics are not easily deteriorated and the transmission frequency band can be widened. In addition, in the waveguide switch 2 according to this embodiment, the gap between the first fixed waveguide block 40 and the movable waveguide block 60 and the gap between the second fixed waveguide block 50 and the movable waveguide block 60 can be made wider than in the past, so that the machining precision is relaxed and the resistance to aging is also increased.

また、本実施形態に係る導波管スイッチ２は、第１の固定導波管ブロック４０の第２の端面４０ｂと、可動導波管ブロック６０の第５の端面６０ａとの少なくとも一方において、導波路４１～４３又は導波路６１～６３の円形又は楕円形の開口の周囲を囲む位置に、少なくとも１重の円形枠状又は楕円形枠状のチョーク溝２５が設けられた構造である。同様に、第２の固定導波管ブロック５０の第３の端面５０ａと、可動導波管ブロック６０の第６の端面６０ｂとの少なくとも一方において、導波路５１又は導波路６１～６３の円形又は楕円形の開口の周囲を囲む位置に、少なくとも１重の円形枠状又は楕円形枠状のチョーク溝２５が設けられた構造である。この構成により、本実施形態に係る導波管スイッチ２は、第１の固定導波管ブロック４０と可動導波管ブロック６０の間の隙間と、第２の固定導波管ブロック５０と可動導波管ブロック６０の間の隙間に漏洩する電力を更に抑制することができる。 The waveguide switch 2 according to this embodiment has a structure in which at least one circular or elliptical frame-shaped choke groove 25 is provided at a position surrounding the periphery of the circular or elliptical opening of the waveguides 41 to 43 or the waveguides 61 to 63 on at least one of the second end face 40b of the first fixed waveguide block 40 and the fifth end face 60a of the movable waveguide block 60. Similarly, at least one circular or elliptical frame-shaped choke groove 25 is provided at a position surrounding the periphery of the circular or elliptical opening of the waveguide 51 or the waveguides 61 to 63 on at least one of the third end face 50a of the second fixed waveguide block 50 and the sixth end face 60b of the movable waveguide block 60. With this configuration, the waveguide switch 2 according to this embodiment can further suppress power leakage into the gap between the first fixed waveguide block 40 and the movable waveguide block 60, and into the gap between the second fixed waveguide block 50 and the movable waveguide block 60.

１，２導波管スイッチ
１０，２０導波管
１０ａ，１０ｂ，２０ａ，２０ｂ端面
１１，２１導波路
１２，２２方形導波路
１３，２３円形導波路
１４，２４方形円形変換導波路
２５，２５－１，２５－２チョーク溝
３１ベース部
４０第１の固定導波管ブロック
４０ａ第１の端面
４０ｂ第２の端面
４１，４２，４３導波路
４１ａ，４２ａ，４３ａ第１の方形導波路
４１ｂ，４２ｂ，４３ｂ第１の円形導波路
４１ｃ，４２ｃ，４３ｃ第１の方形円形変換導波路
５０第２の固定導波管ブロック
５０ａ第３の端面
５０ｂ第４の端面
５１導波路
５１ａ第２の方形導波路
５１ｂ第２の円形導波路
５１ｃ第２の方形円形変換導波路
６０可動導波管ブロック
６０ａ第５の端面
６０ｂ第６の端面
６１，６２，６３導波路
６１ａ，６２ａ，６３ａ第３の方形導波路
６１ｂ，６２ｂ，６３ｂ第３の円形導波路
６１ｃ，６２ｃ，６３ｃ第４の円形導波路
６１ｄ，６２ｄ，６３ｄ第３の方形円形変換導波路
６１ｅ，６２ｅ，６３ｅ第４の方形円形変換導波路
７０駆動装置
ＳＢ１，ＳＢ２方形導波路境界
ＳＢ４１，ＳＢ４２，ＳＢ４３第１の方形導波路境界
ＳＢ５１第２の方形導波路境界
ＳＢ６１ｄ，ＳＢ６２ｄ，ＳＢ６３ｄ第３の方形導波路境界
ＳＢ６１ｅ，ＳＢ６２ｅ，ＳＢ６３ｅ第４の方形導波路境界
ＣＢ１，ＣＢ２円形導波路境界
ＣＢ４１，ＣＢ４２，ＣＢ４３第１の円形導波路境界
ＣＢ５１第２の円形導波路境界
ＣＢ６１ｄ，ＣＢ６２ｄ，ＣＢ６３ｄ第３の円形導波路境界
ＣＢ６１ｅ，ＣＢ６２ｅ，ＣＢ６３ｅ第４の円形導波路境界 1, 2 Waveguide switch 10, 20 Waveguide 10a, 10b, 20a, 20b End face 11, 21 Waveguide 12, 22 Rectangular waveguide 13, 23 Circular waveguide 14, 24 Rectangular-circular conversion waveguide 25, 25-1, 25-2 Choke groove 31 Base portion 40 First fixed waveguide block 40a First end face 40b Second end face 41, 42, 43 Waveguide 41a, 42a, 43a First rectangular waveguide 41b, 42b, 43b First circular waveguide 41c, 42c, 43c First rectangular-circular conversion waveguide 50 Second fixed waveguide block 50a Third end face 50b Fourth end face 51 Waveguide 51a Second rectangular waveguide 51b Second circular waveguide 51c Second rectangular-circular conversion waveguide 60 Movable waveguide block 60a Fifth end face 60b Sixth end face 61, 62, 63 Waveguide 61a, 62a, 63a Third rectangular waveguide 61b, 62b, 63b Third circular waveguide 61c, 62c, 63c Fourth circular waveguide 61d, 62d, 63d Third rectangular-circular conversion waveguide 61e, 62e, 63e Fourth rectangular-circular conversion waveguide 70 Drive unit SB1, SB2 Rectangular waveguide boundary SB41, SB42, SB43 First rectangular waveguide boundary SB51 Second rectangular waveguide boundary SB61d, SB62d, SB63d Third rectangular waveguide boundary SB61e, SB62e, SB63e Fourth rectangular waveguide boundary CB1, CB2 Circular waveguide boundary CB41, CB42, CB43 First circular waveguide boundary CB51 Second circular waveguide boundary CB61d, CB62d, CB63d Third circular waveguide boundary CB61e, CB62e, CB63e Fourth circular waveguide boundary

Claims

A waveguide switch (1) in which end faces (10b, 20a) of two waveguides (10, 20), each having at least one waveguide (11, 21) formed therein, face each other in parallel with a predetermined gap therebetween,
Each of the waveguides includes a rectangular waveguide (12, 22), a circular waveguide (13, 23) that opens into the end face of either of the two waveguides, and a rectangular-circular conversion waveguide (14, 24) that connects the rectangular waveguide and the circular waveguide,
A waveguide switch characterized in that a cross-sectional dimension of the rectangular-circular conversion waveguide is equal to a cross-sectional dimension of the rectangular waveguide at a rectangular waveguide boundary (SB1, SB2) between the rectangular-circular conversion waveguide and the rectangular waveguide, and is equal to a cross-sectional dimension of the circular waveguide at a circular waveguide boundary (CB1, CB2) between the rectangular-circular conversion waveguide and the circular waveguide, and changes continuously from the rectangular waveguide boundary to the circular waveguide boundary.

The waveguide switch according to claim 1, characterized in that at least one circular frame-shaped choke groove (25) is provided in the end face of at least one of the two waveguides at a position surrounding the periphery of the circular opening of the circular waveguide.

A base portion (31);
a first fixed waveguide block (40) fixed to the base portion and having at least one waveguide (41, 42, 43) surrounded by a metal wall formed to penetrate from a first end face (40a) to a second end face (40b);
a second fixed waveguide block (50) fixed to the base portion, having a third end face (50a) parallel to the second end face of the first fixed waveguide block, and at least one waveguide (51) surrounded by a metal wall formed to penetrate from the third end face to a fourth end face (50b);
a movable waveguide block (60) having a fifth end face (60a) facing in parallel to the second end face of the first fixed waveguide block with a predetermined gap therebetween and a sixth end face (60b) facing in parallel to the third end face of the second fixed waveguide block with a predetermined gap therebetween, in which a plurality of waveguides (61, 62, 63) surrounded by metal walls are formed penetrating from the fifth end face to the sixth end face, and which is supported by the base portion in a state capable of sliding in parallel to the second end face of the first fixed waveguide block and the third end face of the second fixed waveguide block;
a drive unit (70) provided on the base portion for slidingly moving the movable waveguide block,
the movable waveguide block is slidably moved relative to the first fixed waveguide block and the second fixed waveguide block, and at a plurality of different positions, any of the plurality of waveguides of the movable waveguide block selectively connects any of at least one waveguide of the first fixed waveguide block and any of at least one waveguide of the second fixed waveguide block;
the at least one waveguide of the first fixed waveguide block includes a first rectangular waveguide (41a, 42a, 43a) opening at the first end face, a first circular waveguide (41b, 42b, 43b) opening at the second end face, and a first rectangular-circular conversion waveguide (41c, 42c, 43c) connecting the first rectangular waveguide and the first circular waveguide;
the at least one waveguide of the second fixed waveguide block includes a second rectangular waveguide (51a) opening at the fourth end face, a second circular waveguide (51b) opening at the third end face, and a second rectangular-circular conversion waveguide (51c) connecting the second rectangular waveguide and the second circular waveguide;
each of the waveguides of the movable waveguide block includes a third rectangular waveguide (61a, 62a, 63a), a third circular waveguide (61b, 62b, 63b) opening at the fifth end face, a fourth circular waveguide (61c, 62c, 63c) opening at the sixth end face, a third rectangular-circular conversion waveguide (61d, 62d, 63d) connecting the third rectangular waveguide and the third circular waveguide, and a fourth rectangular-circular conversion waveguide (61e, 62e, 63e) connecting the third rectangular waveguide and the fourth circular waveguide,
a cross-sectional dimension of the first rectangular-circular conversion waveguide is equal to a cross-sectional dimension of the first rectangular waveguide at a first rectangular waveguide boundary (SB41, SB42, SB43) between the first rectangular-circular conversion waveguide and the first rectangular waveguide, is equal to a cross-sectional dimension of the first circular waveguide at a first circular waveguide boundary (CB41, CB42, CB43) between the first rectangular-circular conversion waveguide and the first circular waveguide, and changes continuously from the first rectangular waveguide boundary to the first circular waveguide boundary;
A cross-sectional dimension of the second rectangular-circular conversion waveguide is equal to a cross-sectional dimension of the second rectangular waveguide at a second rectangular waveguide boundary (SB51) between the second rectangular-circular conversion waveguide and the second rectangular waveguide, is equal to a cross-sectional dimension of the second circular waveguide at a second circular waveguide boundary (CB51) between the second rectangular-circular conversion waveguide and the second circular waveguide, and changes continuously from the second rectangular waveguide boundary to the second circular waveguide boundary;
a cross-sectional dimension of the third rectangular-circular conversion waveguide is equal to a cross-sectional dimension of the third rectangular waveguide at a third rectangular waveguide boundary (SB61d, SB62d, SB63d) between the third rectangular-circular conversion waveguide and the third rectangular waveguide, and is equal to a cross-sectional dimension of the third circular waveguide at a third circular waveguide boundary (CB61d, CB62d, CB63d) between the third rectangular-circular conversion waveguide and the third circular waveguide, and changes continuously from the third rectangular waveguide boundary to the third circular waveguide boundary;
A waveguide switch characterized in that a cross-sectional dimension of the fourth square-circular conversion waveguide is equal to a cross-sectional dimension of the third square waveguide at a fourth rectangular waveguide boundary (SB61e, SB62e, SB63e) between the fourth square-circular conversion waveguide and the third square waveguide, is equal to a cross-sectional dimension of the fourth circular waveguide at a fourth circular waveguide boundary (CB61e, CB62e, CB63e) between the fourth square-circular conversion waveguide and the fourth circular waveguide, and changes continuously from the fourth square waveguide boundary to the fourth circular waveguide boundary.

At least one of the second end face of the first fixed waveguide block and the fifth end face of the movable waveguide block is provided with at least one circular frame-shaped choke groove (25) at a position surrounding the periphery of the circular opening of each of the waveguides;
4. The waveguide switch according to claim 3, wherein at least one circular frame-shaped choke groove (25) is provided at a position surrounding a periphery of a circular opening of each of the waveguides on at least one of the third end face of the second fixed waveguide block and the sixth end face of the movable waveguide block.