JP7584082B2 - Head unit, actuator and mounting system - Google Patents

Description

The present disclosure generally relates to a head unit, an actuator, and a mounting system, and more specifically, to a head unit capable of linear movement and rotation, an actuator used in the head unit, and a mounting system including the head unit.

The actuator described in Patent Document 1 includes a rotary motor (rotor drive unit), a spline member, a linear motor, and an output unit (mounting unit). The rotary motor has a rotary mover that rotates around one axis. The spline member has a first member that receives a rotational force from the rotary mover and rotates around the axis, and a second member that moves back and forth on the axis and receives a rotational force from the first member and rotates around the axis. The linear motor has a linear mover that receives a rotational force from the second member and rotates around the axis, and a linear stator that provides a driving force along the axial direction to the linear mover. The linear mover penetrates the linear stator in the axial direction and rotates around the axis relative to the linear stator. The output unit is provided at one end of the linear mover and is driven by the rotary motor and the linear motor. A capture unit that captures an object is fixed to the output unit.

JP 2019-075896 A

The present disclosure aims to provide a head unit, actuator, and mounting system that can improve the accuracy of position control of the capture unit.

A head unit according to one aspect of the present disclosure includes a linear shaft, a rotor shaft, a capture unit, a linear drive unit, a rotor drive unit, a linear coupling unit, and a rotor coupling unit. The axis of the linear shaft is along a first direction and a second direction. The second direction is an opposite direction to the first direction. The rotor shaft is aligned in the second direction with respect to the linear shaft. The axis of the rotor shaft is along the first direction and the second direction. The capture unit is provided at an end of the rotor shaft in the second direction and captures an object. The linear drive unit applies a linear driving force to the linear shaft that moves the linear shaft together with the rotor shaft in the first direction and the second direction. The rotor drive unit applies a rotational driving force to the rotor shaft that rotates the rotor shaft relative to the linear shaft. The linear coupling unit is coupled to the linear shaft. The rotor coupling unit is rotatable with respect to the linear coupling unit and is coupled to the rotor shaft. The rotor coupling unit has a shape that can accommodate a part of the linear coupling unit.
A head unit according to one aspect of the present disclosure includes a linear shaft, a rotor shaft, a capture unit, a linear drive unit, a rotor drive unit, a linear connection unit, a rotor connection unit, and a bearing. The axis of the linear shaft is along a first direction and a second direction. The second direction is an opposite direction to the first direction. The rotor shaft is aligned in the second direction with respect to the linear shaft. The axis of the rotor shaft is along the first direction and the second direction. The capture unit is provided at an end of the rotor shaft in the second direction and captures an object. The linear drive unit applies a linear drive force to the linear shaft that moves the linear shaft together with the rotor shaft in the first direction and the second direction. The rotor drive unit applies a rotational drive force to the rotor shaft that rotates the rotor shaft relative to the linear shaft. The linear connection unit is connected to the linear shaft. The rotor connection unit is rotatable relative to the linear connection unit and is connected to the rotor shaft. The bearing is disposed between the linear connection unit and the rotor connection unit in a direction perpendicular to the first direction.
A head unit according to one aspect of the present disclosure includes a linear shaft, a rotor shaft, a capture unit, a linear drive unit, a rotor drive unit, a linear coupling unit, and a rotor coupling unit. The axis of the linear shaft is along a first direction and a second direction. The second direction is opposite to the first direction. The rotor shaft is aligned in the second direction with respect to the linear shaft. The axis of the rotor shaft is along the first direction and the second direction. The capture unit is provided at an end of the rotor shaft in the second direction and captures an object. The linear drive unit applies a linear driving force to the linear shaft that moves the linear shaft together with the rotor shaft in the first direction and the second direction. The rotor drive unit applies a rotational driving force to the rotor shaft that rotates the rotor shaft relative to the linear shaft. The linear coupling unit is coupled to the linear shaft. The rotor coupling unit is rotatable with respect to the linear coupling unit and is coupled to the rotor shaft. The rotor driving unit includes a rotor that is concentrically disposed with the rotor shaft and connected to the rotor shaft, and a stator that imparts the rotational driving force to the rotor shaft via the rotor. The stator has a cylindrical shape that is aligned in the first direction, and the rotor is disposed inside the stator.
A head unit according to one aspect of the present disclosure includes a linear shaft, a rotor shaft, a capture unit, a linear drive unit, a rotor drive unit, a linear coupling unit, a rotor coupling unit, and a regulating member. The axis of the linear shaft is along a first direction and a second direction. The second direction is an opposite direction to the first direction. The rotor shaft is aligned in the second direction with respect to the linear shaft. The axis of the rotor shaft is along the first direction and the second direction. The capture unit is provided at an end of the rotor shaft in the second direction and captures an object. The linear drive unit applies a linear driving force to the linear shaft that moves the linear shaft together with the rotor shaft in the first direction and the second direction. The rotor drive unit applies a rotational driving force to the rotor shaft that rotates the rotor shaft relative to the linear shaft. The linear coupling unit is coupled to the linear shaft. The rotor coupling unit is rotatable with respect to the linear coupling unit and is coupled to the rotor shaft. The regulating member is aligned with the linear coupling portion in the first direction and regulates the movement direction of the linear shaft in the first direction and the second direction.

An actuator according to an aspect of the present disclosure includes a linear shaft, a rotor shaft, a linear drive unit, a rotor drive unit, a linear coupling unit, and a rotor coupling unit. The axis of the linear shaft is along a first direction and a second direction. The second direction is an opposite direction to the first direction. The rotor shaft is aligned in the second direction with respect to the linear shaft. The axis of the rotor shaft is along the first direction and the second direction. The rotor shaft has an attachment unit at an end in the second direction. A capture unit for capturing an object can be attached to the attachment unit. The linear drive unit applies a linear drive force to the linear shaft that moves the linear shaft together with the rotor shaft in the first direction and the second direction. The rotor drive unit applies a rotational drive force to the rotor shaft that rotates the rotor shaft relative to the linear shaft. The linear coupling unit is coupled to the linear shaft. The rotor coupling unit is rotatable with respect to the linear coupling unit and is coupled to the rotor shaft. The rotor coupling unit has a shape that can accommodate a part of the linear coupling unit.

The mounting system according to one aspect of the present disclosure includes the head unit and a holding device. The holding device holds a mounting member on which the object captured by the capture unit is mounted.

The present disclosure has the advantage of being able to improve the accuracy of position control of the capture unit.

FIG. 1 is a front view of an actuator according to an embodiment. FIG. 2 is a front view of the actuator, in which the housing is omitted. FIG. 3 is a cross-sectional view of the actuator taken along a region X1 in FIG. FIG. 4 is a cross-sectional view of the actuator taken along a region X2 in FIG. FIG. 5 is an exploded perspective view of a main part of the actuator. FIG. 6 is an exploded perspective view of another main part of the actuator. FIG. 7 is a cross-sectional view of the actuator taken along line VII-VII of FIG. FIG. 8 is a plan view of a mounting system including the actuator. FIG. 9 is a front view of the mounting system taken along the line IX-IX in FIG. FIG. 10 is a side view of a main part of the mounting system. FIG. 11 is a cross-sectional view of a main part of a mounting system according to the first modification.

(Embodiment)
The actuator, head unit, and mounting system according to the embodiment will be described below with reference to the drawings. However, the following embodiment is merely one of various embodiments of the present disclosure. The following embodiment can be modified in various ways depending on the design, etc., as long as the object of the present disclosure can be achieved. In addition, each figure described in the following embodiment is a schematic diagram, and the ratio of the size and thickness of each component in the figure does not necessarily reflect the actual dimensional ratio. In addition, in FIG. 1 and the like, the arrow representing the first direction D1 and the arrow representing the second direction D2 are merely illustrated for the purpose of explanation and do not have any substance.

(overview)
As shown in FIG. 1, the actuator 1 has an attachment portion 52. A capture portion 10a (see FIG. 10) can be attached to the attachment portion 52. The capture portion 10a is a portion that executes an operation on an object 102b (see FIG. 9). The above operation is an operation to capture the object 102b. The actuator 1 moves the rotor shaft 5 having the attachment portion 52 linearly in the axial direction of the rotor shaft 5 and also rotates the rotor shaft 5, thereby moving the attachment portion 52 to a desired position and setting the rotation angle of the attachment portion 52 to a desired rotation angle. Thereafter, the operation is executed by the capture portion 10a.

The actuator 1 is used in the head unit 10 (see FIG. 10). That is, the head unit 10 includes the actuator 1. The head unit 10 further includes a capture unit 10a (see FIG. 10). The capture unit 10a is provided on the mounting unit 52 and captures the target object 102b. That is, the mounting unit 52 operates to capture the target object 102b via the capture unit 10a. In this embodiment, the capture unit 10a is removably attached to the mounting unit 52, but the capture unit 10a may not be removable from the mounting unit 52. Furthermore, the capture unit 10a may be a part or the entirety of the mounting unit 52.

The capture unit 10a captures the target object 102b, for example, by adsorbing the target object 102b. More specifically, the capture unit 10a vacuum-adsorbs the target object 102b.

The target object 102b in this embodiment is an electronic component. The head unit 10 mounts the target object 102b (electronic component) on a mounting member 111 (see FIG. 9). The mounting member 111 in this embodiment is a substrate. More specifically, the mounting member 111 is a printed wiring board.

The actuator 1 includes a scale 73 (see FIG. 4) and a rotation sensor 74 (see FIG. 4). The rotation sensor 74 reads information about the rotation angle of the mounting portion 52 from the scale 73. Specifically, the rotation sensor 74 reads the rotation angle of the rotor shaft 5 having the mounting portion 52. The actuator 1 is used together with a control device, and the control device uses the reading result of the rotation sensor 74 to control the rotation angle of the mounting portion 52.

The actuator 1 further includes a linear scale 47 (see Figures 2 and 3) and a position sensor 46 (see Figure 3). The position sensor 46 reads information about the position of the mounting portion 52 from the linear scale 47. Specifically, the position sensor 46 reads information about the positions of the linear shaft 2 (described later), which moves in the first direction D1 and the second direction D2 together with the mounting portion 52. The control device uses the information read by the position sensor 46 to control the positions of the mounting portion 52 in the first direction D1 and the second direction D2.

The head unit 10 is used in the mounting system 100. That is, the mounting system 100 includes the head unit 10. The mounting system 100 further includes a holding device 101 (see FIG. 9). The holding device 101 holds a mounting member 111. The target object 102b captured by the capture unit 10a is mounted on the mounting member 111.

3 and 4, the actuator 1 of this embodiment includes a linear shaft 2, a rotor shaft 5, a linear drive unit 3, a rotor drive unit 6, a linear coupling unit 82, and a rotor coupling unit 83. The axis of the linear shaft 2 is along the first direction D1 and the second direction D2. The second direction D2 is opposite to the first direction D1. The rotor shaft 5 is aligned in the second direction D2 with respect to the linear shaft 2. The axis of the rotor shaft 5 is along the first direction D1 and the second direction D2. The rotor shaft 5 has an attachment unit 52 at an end in the second direction D2. A capture unit 10a that captures an object 102b can be attached to the attachment unit 52. The linear drive unit 3 applies a linear drive force to the linear shaft 2 that moves the linear shaft 2 together with the rotor shaft 5 in the first direction D1 and the second direction D2. The rotor drive unit 6 applies a rotational drive force to the rotor shaft 5 that rotates the rotor shaft 5 relative to the linear shaft 2. The linear coupling part 82 is coupled to the linear shaft 2. The rotor coupling part 83 is rotatable relative to the linear coupling part 82 and is coupled to the rotor shaft 5.

According to the actuator 1 of this embodiment, when the rotor shaft 5 rotates due to the rotational driving force applied from the rotor drive unit 6, the linear shaft 2 can be prevented from rotating. Therefore, the position of the attachment portion 52 (and the capture portion 10a) can be controlled with high precision.

For example, if the linear shaft 2 rotates, the position sensor 46 needs to detect the position of the linear shaft 2, which both moves in the first direction D1 and the second direction D2 and rotates. Such position detection is more difficult than detecting the position of a linear shaft 2 that does not rotate, and so there is a possibility that the detection accuracy will decrease. In this embodiment, the detection accuracy is improved by suppressing the rotation of the linear shaft 2, thereby improving the accuracy of the position control of the attachment portion 52 (and the capture portion 10a).

(detail)
(1) Actuator As described above, the actuator 1 includes the linear shaft 2, the rotor shaft 5, the linear drive unit 3, the rotor drive unit 6, the linear coupling unit 82, and the rotor coupling unit 83. As shown in Fig. 3, the actuator 1 includes two bearings (first bearing 81), a regulating member 41, a first substrate 42, a first outer cylinder 441, a second outer cylinder 442, a cover 45 (see Fig. 4), a position sensor 46, a linear scale 47, two bushes 48, and two fastening members F1 and F2. As shown in Fig. 4, the actuator 1 includes a spline nut 71, a guide member 72, a scale 73 (rotary scale), a rotation sensor 74, a second substrate 75, a second bearing 76, a third bearing 77, a shim 78, a return member 79, and a housing 9.

1, 3, and 4, the housing 9 has a length in a first direction D1. The housing 9 has a first block 91, a second block 92, a third block 93, and a fourth block 94. The first block 91, the second block 92, the third block 93, and the fourth block 94 are arranged in this order in the second direction D2.

The first block 91 is formed in a box shape with one end open in the second direction D2. The first block 91 houses a portion of the linear shaft 2 including one end 21 (see FIG. 2) in the first direction D1.

The second block 92 connects the first block 91 and the third block 93. The second block 92 holds a first outer cylinder portion 441 that houses a portion of the linear shaft 2.

The third block 93 connects the second block 92 and the fourth block 94. The third block 93 is formed in a cylindrical shape. The third block 93 accommodates a portion of the rotor shaft 5.

The fourth block 94 is formed in a box shape. The fourth block 94 has an opening at one end in the first direction D1 and at one end in the second direction D2. The fourth block 94 houses a part of the rotor shaft 5. A portion of the rotor shaft 5 including the mounting portion 52 protrudes from the opening at the one end of the fourth block 94 in the second direction D2.

2 and 3, the linear shaft 2 has a cylindrical shape. The linear shaft 2 is held by a regulating member 41 or the like so as to be movable in a first direction D1 and a second direction D2.

A linear scale 47 is attached to one end 21 of the linear shaft 2 in the first direction D1. One end 22 of the linear shaft 2 in the second direction D2 is connected to a linear coupling part 82. The linear coupling part 82 is aligned with the linear shaft 2 in the second direction D2.

The linear shaft 2 has a magnet unit U1 and a pillar portion 26. The pillar portion 26 includes one end portion 21 of the linear shaft 2 in the first direction D1. The magnet unit U1 includes one end portion 22 of the linear shaft 2 in the second direction D2. The pillar portion 26 is connected to the magnet unit U1. The pillar portion 26 is aligned with the magnet unit U1 in the first direction D1.

The magnet unit U1 has multiple (12 in FIG. 3) permanent magnets 23 and an inner cylinder portion 25.

The multiple permanent magnets 23 are aligned in the first direction D1. The inner cylinder portion 25 has a cylindrical shape. The inner cylinder portion 25 houses the multiple permanent magnets 23.

The multiple permanent magnets 23 are arranged so that the poles (south pole or north pole) of the ends of adjacent magnets are the same. For example, the south poles of a first permanent magnet, which is one of the multiple permanent magnets 23, and the second permanent magnet adjacent to the first permanent magnet face each other, and the north poles of the second permanent magnet and the third permanent magnet adjacent to the second permanent magnet face each other.

As shown in FIG. 5, the column portion 26 is cylindrical in shape. The column portion 26 has a plurality of grooves 261 (four; only two are shown in FIG. 5) on its side surface. The plurality of grooves 261 extend in the first direction D1.

As shown in FIG. 3, the linear coupling part 82 is coupled to one end 22 of the linear shaft 2 in the second direction D2. That is, the linear coupling part 82 is coupled to the magnet unit U1. The linear coupling part 82 is aligned with the magnet unit U1 in the second direction D2. The linear coupling part 82 has a columnar (more specifically, cylindrical) shape. The linear coupling part 82 is coupled to two first bearings 81.

(4) Linear Driving Unit As shown in Fig. 3, the linear driving unit 3 includes a plurality of coils 31 (12 coils in Fig. 3). The plurality of coils 31 are arranged in the first direction D1. The linear shaft 2 passes through the inside of the plurality of coils 31.

As an example, a plurality of sets (four sets in FIG. 3) of coils 31 are arranged in the first direction D1, with three coils 31 for the U, V and W phases forming one set. The plurality of coils 31 are housed in the first outer cylinder portion 441.

The multiple permanent magnets 23 of the linear shaft 2 are arranged inside the linear drive unit 3. The multiple coils 31 can be supplied with an excitation current from an external power source. When an excitation current flows through the multiple coils 31, the linear shaft 2 is driven in the first direction D1 or the second direction D2 due to electromagnetic interaction between the multiple coils 31 and the multiple permanent magnets 23. In other words, the multiple coils 31 and the multiple permanent magnets 23 form a linear motor.

(5) Restricting Member The restricting member 41 is arranged in the first direction D1 with respect to the linear coupling portion 82. The restricting member 41 restricts the movement direction of the linear shaft 2 to the first direction D1 and the second direction D2.

As shown in FIG. 5, the restricting member 41 has a tubular portion 411 and a flange portion 412. The tubular portion 411 has a cylindrical shape. The flange portion 412 protrudes outward from the tubular portion 411 in the radial direction of the tubular portion 411.

The cylindrical portion 411 has multiple (four in FIG. 5) protrusions 413 protruding from its inner surface. The multiple protrusions 413 extend in the first direction D1. The multiple protrusions 413 correspond one-to-one to the multiple grooves 261 of the column portion 26. The column portion 26 is arranged inside the cylindrical portion 411 so that the protrusions 413 corresponding to the multiple grooves 261 are inserted. This restricts the movement direction of the linear shaft 2 to the first direction D1 and the second direction D2. This also suppresses rotation of the linear shaft 2.

(6) First Board, Position Sensor, and Linear Scale As shown in Fig. 3, the first board 42 is accommodated in a first block 91 of the housing 9. The first board 42 is fixed to a second block 92. The actuator 1 includes a plurality of electronic components mounted on the first board 42. For example, the actuator 1 includes a position sensor 46 mounted on the first board 42 as a part of the plurality of electronic components. The position sensor 46 detects the position of the linear shaft 2. As a result, information regarding the position of the linear shaft 2 in the first direction D1 and the second direction D2 is output from the position sensor 46. A control device outside the actuator 1 controls the current supplied to the plurality of coils 31 of the linear drive unit 3 based on the information output from the position sensor 46, thereby controlling the position of the attachment unit 52.

The linear scale 47 is held by the linear shaft 2. The linear scale 47 moves together with the linear shaft 2 in the first direction D1 and the second direction D2. The position sensor 46 is disposed in a position opposite the linear scale 47.

The linear scale 47 and the position sensor 46 constitute a linear encoder. That is, the actuator 1 is equipped with a linear encoder, and the linear encoder has a linear scale 47 and a position sensor 46. The linear encoder outputs an electrical signal that includes information regarding the position of the linear shaft 2 in the first direction D1 and the second direction D2.

As an example, the linear encoder is a photoelectric linear encoder. The linear scale 47 includes a plurality of slits formed side by side in the first direction D1. The position sensor 46 includes a light-emitting element and a light-receiving element, and light emitted from the light-emitting element and passing through the slits is received by the light-receiving element. The position sensor 46 outputs an electrical signal according to the amount of light received by the light-receiving element as information regarding the position of the linear shaft 2. A control device external to the actuator 1 calculates the position of the linear shaft 2 in the first direction D1 and the second direction D2 based on the electrical signal output from the light-receiving element.

(7) First outer cylinder portion, second outer cylinder portion, and cover As shown in Fig. 3, the first outer cylinder portion 441 has a cylindrical shape. The first outer cylinder portion 441 houses the magnet unit U1 of the linear shaft 2. Furthermore, the first outer cylinder portion 441 houses the two first bearings 81, the linear coupling portion 82, the rotor coupling portion 83, and a part of the rotor shaft 5.

The second outer cylinder portion 442 (see FIG. 4) is cylindrical in shape. The second outer cylinder portion 442 accommodates a portion of the rotor shaft 5.

The cover 45 (see FIG. 4) covers one end of the second outer cylinder portion 442 in the second direction D2. The cover 45 has a cylindrical shape when viewed from the second direction D2. The rotor shaft 5 passes through the inside of the cover 45.

(8) Bushings As shown in Fig. 3, the two bushings 48 are cylindrical. The two bushings 48 are housed in the first outer cylinder portion 441. The two bushings 48 are aligned in the first direction D1. The linear drive unit 3 is sandwiched between the two bushings 48.

4, the rotor shaft 5 has a cylindrical shape. The rotor shaft 5 is held by a guide member 72 or the like so as to be movable in the first direction D1 and the second direction D2 and to be rotatable about the central axis of the rotor shaft 5.

One end 51 of the rotor shaft 5 in the first direction D1 is held by two first bearings 81 via a rotor connecting portion 83. One end of the rotor shaft 5 in the second direction D2 is provided with an attachment portion 52 (see FIG. 1). The attachment portion 52 is exposed to the outside of the housing 9. The attachment portion 52 is formed in a structure that allows the capture portion 10a (see FIG. 10) to be attached and detached.

As shown in FIG. 6, the rotor shaft 5 has a cylindrical shape. The rotor shaft 5 has multiple grooves 53 (four; only three are shown in FIG. 6) on its side surface. The multiple grooves 53 extend in the first direction D1.

(10) Guide Member As shown in Fig. 6, the guide member 72 has a cylindrical shape. The guide member 72 has a plurality of protrusions 721 (four in Fig. 6) protruding from its inner surface. The protrusions 721 extend in the first direction D1. The protrusions 721 correspond one-to-one to the grooves 53 of the rotor shaft 5.

The rotor shaft 5 is arranged inside the guide member 72 so that the protrusions 721 are inserted into the corresponding grooves 53. In other words, the protrusions 721 and the grooves 53 are fitted together. This restricts the movement direction of the rotor shaft 5 to the first direction D1 and the second direction D2.

In addition, the guide member 72 and the rotor shaft 5 are connected by the engagement of the multiple protrusions 721 and the multiple grooves 53, so that the guide member 72 can rotate together with the rotor shaft 5. In other words, when the guide member 72 receives a rotational driving force from the rotor drive unit 6 and rotates, the rotor shaft 5 also rotates.

(11) Rotor Driving Unit As shown in Fig. 4, the rotor driving unit 6 is a rotary motor. For example, a servo motor or a stepping motor can be adopted as the rotor driving unit 6. The rotor driving unit 6 is accommodated in the fourth block 94 of the housing 9.

The rotor drive unit 6 has a rotor 61 and a stator 62. The stator 62 is shaped like a cylinder along the first direction D1. The rotor 61 is shaped like a cylinder concentric with the stator 62. The rotor 61 is disposed inside the stator 62. The rotor shaft 5 is disposed inside the rotor 61. That is, the rotor 61 is disposed concentric with the rotor shaft 5. The rotor 61 is connected to the rotor shaft 5. More specifically, the rotor 61 is connected to the rotor shaft 5 via a spline nut 71 and a guide member 72. The stator 62 provides a rotational driving force to the rotor shaft 5 via the rotor 61.

As an example, the stator 62 has a coil, and the rotor 61 has a permanent magnet. The rotor 61 rotates due to electromagnetic interaction with the stator 62.

4, the spline nut 71 is formed in a cylindrical shape along the first direction D1, and has the rotor shaft 5 disposed therein. The spline nut 71, the guide member 72, the scale 73, and the rotor 61 are fixed to one another.

The spline nut 71 has a first cylindrical portion 711 and a second cylindrical portion 712. The first cylindrical portion 711 and the second cylindrical portion 712 are formed into a cylindrical shape that is concentric with each other. The first cylindrical portion 711 is aligned with the second cylindrical portion 712 in the first direction D1. The first cylindrical portion 711 and the second cylindrical portion 712 are connected together. One end of the first cylindrical portion 711 in the first direction D1 passes through the inside of the cover 45.

The outer diameter of the first cylindrical portion 711 is smaller than the outer diameter of the second cylindrical portion 712. The inner diameter of the first cylindrical portion 711 is smaller than the inner diameter of the second cylindrical portion 712.

The first cylindrical portion 711 is accommodated in the fourth block 94 of the housing 9. A scale 73 is attached to the first cylindrical portion 711. The shape of the scale 73 when viewed from the first direction D1 is annular, and the first cylindrical portion 711 is passed through the inside of the scale 73. The scale 73 can rotate together with the spline nut 71.

The first cylindrical portion 711 is passed through the inside of the rotor 61 of the rotor drive unit 6. The spline nut 71 can rotate together with the rotor 61.

The rotor shaft 5 passes through the inside of the first cylindrical portion 711. The guide member 72 passes through the inside of the second cylindrical portion 712. The guide member 72 is rotatable together with the spline nut 71. The rotor shaft 5 passes through the inside of the guide member 72. In other words, the guide member 72 is disposed between the rotor shaft 5 and the spline nut 71.

In this way, the rotor shaft 5 passes through the inside of the spline nut 71. The rotor 61 applies a rotational driving force to the rotor shaft 5 via the spline nut 71 and the guide member 72. This causes the rotor 61, spline nut 71, guide member 72, rotor shaft 5, and scale 73 to rotate together.

The second bearing 76 is held in the third block 93 of the housing 9. The second bearing 76 has an annular shape when viewed from the first direction D1. The second bearing 76 is disposed inside the third block 93. The scale 73 is disposed inside the second bearing 76, and the spline nut 71 is disposed inside the scale 73. The second bearing 76 connects the scale 73 to the housing 9 so that it can rotate relative to the housing 9 together with the spline nut 71, the guide member 72, and the rotor shaft 5.

The third bearing 77 is held in the fourth block 94 of the housing 9. When viewed from the first direction D1, the third bearing 77 has an annular shape. The third bearing 77 is disposed inside the fourth block 94. A spline nut 71 is disposed inside the third bearing 77. The third bearing 77 connects the spline nut 71 to the housing 9 so that the spline nut 71 can rotate relative to the housing 9 together with the scale 73, the guide member 72, and the rotor shaft 5.

The rotor shaft 5 rotates by receiving a rotational driving force from the rotor drive unit 6 via the spline nut 71 (and the guide member 72). More specifically, the rotor shaft 5 also rotates as the rotor 61 rotates relative to the stator 62.

The rotor shaft 5 also moves in a first direction D1 and a second direction D2 relative to the spline nut 71. While the rotor shaft 5 can rotate and move in the first direction D1 or the second direction D2 simultaneously, it can also only rotate, or only move in the first direction D1 or only move in the second direction D2. The guide member 72 restricts the movement direction of the rotor shaft 5 to the first direction D1 and the second direction D2.

The guide member 72 and the rotor 61 are aligned in the first direction D1. More specifically, the direction in which the rotor 61 is located as viewed from the guide member 72 is the first direction D1, and the direction in which the guide member 72 is located as viewed from the rotor 61 is the second direction D2. Because the guide member 72 and the rotor 61 are aligned in the first direction D1, the dimensions of the actuator 1 as viewed from the first direction D1 can be made smaller than when they are aligned in a direction perpendicular to the first direction D1.

4, the scale 73 has an annular scale body 731 when viewed from the first direction D1. The scale 73 is rotatable together with the rotor shaft 5.

The rotation sensor 74 is mounted on the second board 75. The rotation sensor 74 and the second board 75 are housed in the fourth block 94 of the housing 9. The rotation sensor 74 is disposed in a position facing the scale 73.

The scale 73 and the rotation sensor 74 constitute a rotary encoder. That is, the actuator 1 is equipped with a rotary encoder, and the rotary encoder has the scale 73 and the rotation sensor 74. The rotary encoder outputs an electrical signal that includes information regarding the rotation angle of the rotor 61 (i.e., the rotation angle of the rotor shaft 5).

As an example, the rotary encoder is a photoelectric rotary encoder. The scale body 731 includes a number of slits formed in a line around the circumference of the scale body 731. The rotation sensor 74 includes a light-emitting element and a light-receiving element, and light emitted from the light-emitting element and passing through the slits is received by the light-receiving element. The rotation sensor 74 outputs an electrical signal according to the amount of light received by the light-receiving element as information relating to the rotation angle of the rotor 61. A control device external to the actuator 1 calculates the rotation angle of the rotor 61 based on the electrical signal output from the light-receiving element.

In this way, the scale 73 presents information regarding the rotation angle of the rotor 61 relative to the stator 62 to the rotation sensor 74. The scale 73 can rotate integrally with the spline nut 71. More specifically, the scale 73 can be fixed to the spline nut 71. In this embodiment, the scale 73 is fixed to the spline nut 71 in advance.

The control device external to the actuator 1 controls the current supplied to the rotor drive unit 6 based on the information output from the rotation sensor 74, thereby controlling the rotation angle of the mounting unit 52.

(14) Shim and Returning Member As shown in Fig. 4, the shim 78 is fixed to the inside of the second outer cylinder portion 442. The shape of the shim 78 when viewed from the first direction D1 is annular. The rotor shaft 5 passes through the inside of the shim 78. The shim 78 is aligned with the spline nut 71 in the first direction D1. The shim 78 is a support member that supports a returning member 79.

The return member 79 is disposed between the spline nut 71 and the rotor connection portion 83. The return member 79 generates a force that moves the linear shaft 2 in the first direction D1. More specifically, the return member 79 is sandwiched between a connection unit 8 (described later) including two first bearings 81, and a shim 78. The return member 79 applies a force in the first direction D1 to the connection unit 8. This causes the linear shaft 2 to move in the first direction D1. The return member 79 is, for example, a compression coil spring.

The connecting unit 8 can move in the first direction D1 and the second direction D2 together with the linear shaft 2 and the rotor shaft 5.

The linear shaft 2 receives a linear driving force from the linear drive unit 3 and can move in the second direction D2 while compressing the return member 79. When the linear driving force is subsequently lost, the linear shaft 2 moves in the first direction D1 due to the return force of the return member 79.

(15) Coupling Unit As shown in Fig. 3 and Fig. 7, the actuator 1 includes a coupling unit 8. The linear shaft 2 is coupled to the rotor shaft 5 via the coupling unit 8.

The connecting unit 8 has two first bearings 81, a linear connecting portion 82, and a rotor connecting portion 83. The rotor connecting portion 83 is connected to the linear connecting portion 82 via the two first bearings 81.

The two first bearings 81 are disposed between the linear coupling part 82 and the rotor coupling part 83 in a direction perpendicular to the first direction D1. More specifically, the two first bearings 81 are disposed inside the rotor coupling part 83, and the linear coupling part 82 is disposed inside the two first bearings 81. In other words, the rotor coupling part 83 is shaped like a cylinder along the first direction D1, and at least a portion of the linear coupling part 82 is located inside the rotor coupling part 83.

The two first bearings 81 are aligned in the first direction D1. In the following, the two first bearings 81 may be distinguished from one another by referring to one as the first bearing 81A and the other as the first bearing 81B. The direction in which the first bearing 81A is located as viewed from the first bearing 81B is the first direction D1. The two first bearings 81 have the same configuration. The configurations of the second bearing 76 and third bearing 77 described above are the same as the configuration of the first bearing 81.

The first bearing 81 includes an inner ring 811, an outer ring 812, and a plurality of rolling elements 813 (six in FIG. 7). The inner ring 811 has a tubular (more specifically, cylindrical) shape along the first direction D1. The outer ring 812 has a tubular (more specifically, cylindrical) shape along the first direction D1. More specifically, the outer ring 812 has a cylindrical shape concentric with the inner ring 811. The diameter of the inner ring 811 is smaller than the diameter of the outer ring 812. The inner ring 811 is disposed inside the outer ring 812.

The inner ring 811 is connected to the linear coupling 82. The linear coupling 82 is passed through the inside of the inner ring 811. The inner ring 811 of the first bearing 81B is connected to the linear coupling 82 by a fastening member F1 (bolt).

The outer ring 812 is connected to the rotor coupling 83. The outer ring 812, the rotor coupling 83, and the rotor shaft 5 are all rotatable relative to the inner ring 811, the linear coupling 82, and the linear shaft 2.

The multiple rolling elements 813 are disposed between the inner ring 811 and the outer ring 812 in a direction perpendicular to the first direction D1. An example of each rolling element 813 is a bearing ball (steel ball) or a "roller." In this embodiment, each rolling element 813 is a bearing ball.

Since multiple (two) first bearings 81 are provided, the movement of the linear shaft 2 in the first direction D1 and the second direction D2 is more likely to be stable than when only one first bearing 81 is provided. In other words, the possibility of the linear shaft 2 moving obliquely relative to the first direction D1 and the second direction D2 can be reduced. In addition, compared to when only one first bearing 81 is provided, the deviation of the positions of the axial centers of the linear shaft 2 and the rotor shaft 5 can be reduced.

The rotor connection part 83 has a cylindrical shape along the first direction D1. The two first bearings 81 are sandwiched between the linear connection part 82 and the rotor connection part 83. More specifically, the two first bearings 81 are housed in the rotor connection part 83, and the linear connection part 82 is inserted inside the two first bearings 81.

The rotor connection part 83 is connected to one end 51 of the rotor shaft 5 in the first direction D1. The rotor connection part 83 is connected to the rotor shaft 5 by a fastening member F2 (bolt).

(16) Operation When the coil 31 of the linear drive unit 3 is excited, the linear shaft 2, the connecting unit 8, and the rotor shaft 5 (see FIG. 3) move in the first direction D1 or the second direction D2. At this time, the positions of the linear drive unit 3, the scale 73, the rotation sensor 74, the rotor drive unit 6, the spline nut 71, the guide member 72, etc. (see FIG. 4) do not change in the first direction D1 or the second direction D2.

When the rotor 61 of the rotor drive unit 6 rotates due to electromagnetic interaction with the stator 62, the spline nut 71 connected to the rotor 61 rotates. At this time, the scale 73, guide member 72, rotor shaft 5, rotor connection unit 83, and the outer rings 812 of each of the two first bearings 81 also rotate together with the spline nut 71. On the other hand, the rotation sensor 74, linear shaft 2, linear connection unit 82, and the inner rings 811 of each of the two first bearings 81 do not rotate.

(17) Mounting System and Head Unit Next, the mounting system 100 and the head unit 10 will be described with reference to Fig. 8 to Fig. 10. Note that the arrows representing the X-axis, Y-axis, and Z-axis in Fig. 8 to Fig. 10 are merely illustrated for the purpose of explanation and do not have any substance. The X-axis, Y-axis, and Z-axis are mutually orthogonal.

In this embodiment, the negative direction of the Z axis coincides with the vertical direction (downward), but this is not intended to limit the directions of the mounting system 100, head unit 10, and actuator 1 when in use. Also, in Figures 8 to 10, the actuator 1 of the head unit 10 is illustrated in an abstract manner compared to Figures 1 to 7.

The head unit 10 includes multiple (eight in FIG. 8) actuators 1, multiple (eight; only four are shown in FIG. 10) capture units 10a, and a board recognition camera 10b. The mounting system 100 includes multiple (two in FIG. 8) head units 10, a holding device 101, multiple (two in FIG. 8) component supply devices 102, multiple (two in FIG. 8) X-axis beams 103, multiple (two in FIG. 8) Y-axis beams 104, multiple (two in FIG. 8) component recognition cameras 105, and a cart 106.

Each component supply device 102 includes multiple tape feeders 102a. The multiple tape feeders 102a are aligned in the X-axis direction. Each of the multiple tape feeders 102a transports an object 102b (electronic component) to a predetermined set position by feeding a tape (carrier tape 102c) holding the object 102b. Here, tape feeding refers to the operation of unfolding the tape, which is the opposite of the operation of winding the tape onto the tape reel 102d.

The holding device 101 holds the mounting member 111 (substrate). The holding device 101 also functions as a transport device that transports the mounting member 111 to a specified work position. The head unit 10 captures the target object 102b present at the set position and mounts it on the mounting member 111 present at the work position. The holding device 101 then transports the mounting member 111 away.

The two Y-axis beams 104 are arranged on the positive and negative sides (both sides) of the X-axis with respect to the working position where the mounting member 111 is set. Each Y-axis beam 104 has a length in the Y-axis direction.

The two X-axis beams 103 are arranged on the positive and negative sides (both sides) of the Y-axis with respect to the working position. Each X-axis beam 103 has a length in the X-axis direction. Each X-axis beam 103 is connected to two Y-axis beams 104. The two X-axis beams 103 correspond one-to-one with the two head units 10. Each X-axis beam 103 holds a corresponding head unit 10.

The two Y-axis beams 104 transport the two X-axis beams 103 individually in the Y-axis direction. As a result, the two Y-axis beams 104 transport the two head units 10 individually in the Y-axis direction. The two X-axis beams 103 transport the corresponding head units 10 in the X-axis direction. As a result, the head units 10 are transported to the vicinity of the desired tape feeder 102a among the multiple tape feeders 102a.

The board recognition camera 10b captures an image of a mark provided on the mounting member 111 (board) to recognize the position of the mounting member 111. The board recognition camera 10b also moves above the set position of the tape feeder 102a to recognize the state of the carrier tape 102c near the set position.

The component recognition camera 105 captures the object 102b captured by the head unit 10 and recognizes the posture of the object 102b. When mounting the object 102b on the mounting member 111, the mounting position of the object 102b is corrected based on the recognition result of the object 102b by the component recognition camera 105 and the recognition result of the position of the mounting member 111 by the board recognition camera 10b.

The carriage 106 is fixed to the holding device 101. The carriage 106 holds a plurality of tape feeders 102a and a plurality of tape reels 102d. Each tape reel 102d has a carrier tape 102c wound around it. A portion of each carrier tape 102c is unfolded and held by the corresponding tape feeder 102a.

As shown in Figures 9 and 10, each of the multiple capture units 10a of each head unit 10 is a suction nozzle that adsorbs an object 102b. The multiple capture units 10a correspond one-to-one to the multiple actuators 1. Each capture unit 10a is attached to the mounting unit 52 of the corresponding actuator 1.

Each head unit 10 is transported to the vicinity of the tape feeder 102a (directly above the set position) by the X-axis beam 103 and the Y-axis beam 104. Then, in each of the multiple actuators 1 of the head unit 10, the attachment portion 52 and the capture portion 10a are moved in the Z-axis direction (first direction D1 and second direction D2) by the linear driving force of the linear drive portion 3. This allows the capture portion 10a to approach the object 102b present at the set position and capture the object 102b.

The head unit 10 is then transported by the X-axis beam 103 and the Y-axis beam 104 to the vicinity (directly above) of the mounting member 111. After that, in each of the multiple actuators 1 of the head unit 10, the attachment portion 52 and the capture portion 10a are rotated around a central axis parallel to the Z-axis by the rotor driving force of the rotor drive unit 6. This causes the rotation angle of the capture portion 10a to be set to a rotation angle suitable for mounting the target object 102b on the mounting member 111. Furthermore, the attachment portion 52 and the capture portion 10a are moved in the Z-axis direction (first direction D1 and second direction D2) by the linear driving force of the linear drive unit 3. This causes the target object 102b to be mounted on the mounting member 111.

(advantage)
Next, advantages of employing the configuration of the actuator 1 according to this embodiment will be described.

If the positions of the linear shaft 2 and the rotor shaft 5 are reversed from those in this embodiment, and the linear shaft 2 is provided with an attachment portion 52, when the rotor shaft 5 rotates, the linear shaft 2 and the attachment portion 52 will also rotate together. In this case, the position sensor 46 needs to detect the position of the linear shaft 2 that moves and rotates in both the first direction D1 and the second direction D2. Since such position detection is more difficult than detecting the position of the linear shaft 2 that moves only in the first direction D1 and the second direction D2, there is a possibility that the detection accuracy will decrease. For example, when using a linear scale 47 including multiple slits aligned in the first direction D1 as in this embodiment, when the linear shaft 2 rotates, it is difficult for the position sensor 46 to detect the position. In contrast, in this embodiment, the linear shaft 2 does not rotate when the rotor shaft 5 rotates, so the decrease in the accuracy of the position detection of the linear shaft 2 can be suppressed.

In addition, in this embodiment, multiple (two) first bearings 81 are provided. Therefore, compared to when there is only one first bearing 81, the movement direction of the linear shaft 2 is more easily restricted to the first direction D1 and the second direction D2, and the movement of the linear shaft 2 can be stabilized. This improves the accuracy of position control of the attachment portion 52 (and the capture portion 10a).

The multiple (two) first bearings 81 are sandwiched between the linear coupling portion 82 and the rotor coupling portion 83. For example, if some of the first bearings 81 are arranged to contact the column portion 26 of the linear shaft 2, and if the other configurations and dimensions of the actuator 1 are the same as those of the embodiment, the multiple first bearings 81 will interfere with the linear drive portion 3 when the linear shaft 2 moves in the second direction D2. In order to avoid this interference, it is necessary to increase the length of the actuator 1 by the length of the first bearings 81. This may result in a decrease in the accuracy of the position control of the mounting portion 52. In contrast, in this embodiment, the multiple first bearings 81 are provided between the linear coupling portion 82 and the rotor coupling portion 83, so that the length of the actuator 1 may be shortened. This may improve the accuracy of the position control of the mounting portion 52.

(Variation 1)
An actuator 1A according to the first modification will be described below with reference to Fig. 11. Configurations similar to those in the embodiment will be given the same reference numerals and descriptions thereof will be omitted.

The guide member 72 and the rotor 61 of this modified example 1 are aligned in a direction perpendicular to the first direction D1. In this respect, the actuator 1A of this modified example 1 differs from the actuator 1 of the embodiment.

The rotor 61 is formed in a cylindrical shape, and the second cylindrical portion 712 of the spline nut 71 is passed through the inside of the rotor 61. The guide member 72 is passed through the inside of the spline nut 71. The rotor shaft 5 is passed through the inside of the guide member 72. The rotational force of the rotor 61 is transmitted to the rotor shaft 5 via the spline nut 71 and the guide member 72.

In the above-described embodiment, the rotor shaft 5 has a first region around which the guide member 72 is arranged and a second region around which the rotor 61 is arranged, and the first region and the second region are arranged side by side in the first direction D1. In contrast, in the present modified example 1, the first region and the second region are aligned in the first direction D1. Therefore, in the present modified example 1, the length of the rotor shaft 5 in the first direction D1 can be shortened compared to the embodiment. That is, the length of the actuator 1 in the first direction D1 can be shortened. Specifically, in the present modified example 1, the length of the rotor shaft 5 in the first direction D1 can be shortened compared to the embodiment by the length of the rotor 61.

(Other Modifications)
Other modified examples of the embodiment are listed below. The following modified examples may be implemented in appropriate combination. The following modified examples may also be implemented in appropriate combination with the above-mentioned modified example 1.

The number of first bearings 81 is not limited to two, but may be one or three or more.

In the embodiment, at least a portion of the linear coupling portion 82 is disposed inside the rotor coupling portion 83. Alternatively, the linear coupling portion 82 may be formed in a cylindrical shape along the first direction D1, and at least a portion of the rotor coupling portion 83 may be disposed inside the linear coupling portion 82.

It is not essential that the linear coupling part 82 and the rotor coupling part 83 are coupled via one or more first bearings 81. For example, the rotor coupling part 83 may be configured to be rotatable relative to the linear coupling part 82 by being externally circumscribed by lubricating oil relative to the linear coupling part 82.

The inner ring 811 of one or more of the first bearings 81 may be embedded in the linear coupling 82. Also, a part of the linear coupling 82 may function as the inner ring 811.

The outer ring 812 of one or more of the first bearings 81 may be embedded in the rotor coupling portion 83. Also, a part of the rotor coupling portion 83 may function as the outer ring 812.

The linear coupling part 82 being coupled to the linear shaft 2 includes the case where the linear coupling part 82 is part of the linear shaft 2. In other words, the linear coupling part 82 may be part of the linear shaft 2.

The rotor connection part 83 being connected to the rotor shaft 5 includes the case where the rotor connection part 83 is part of the rotor shaft 5. In other words, the rotor connection part 83 may be part of the rotor shaft 5.

The linear encoder including the linear scale 47 and the position sensor 46 is not limited to a photoelectric linear encoder, but may be, for example, a magnetic linear encoder.

The rotary encoder including the scale 73 and the rotation sensor 74 is not limited to a photoelectric rotary encoder, but may be, for example, a magnetic rotary encoder.

The actuator 1 may not have at least one of the position sensor 46 and the rotation sensor 74. For example, the position and rotation angle of the mounting portion 52 may be read by a position sensor and a rotation sensor external to the actuator 1.

The scale 73 and the spline nut 71 may be formed from a single member.

The return member 79 is not limited to a spring such as a compression coil spring. The return member 79 may be, for example, an air spring, a cylinder, or a damper.

The capture unit 10a is not limited to a configuration that adsorbs the target object 102b, but may be configured to capture the target object 102b by pinching (picking) it like a robot hand, for example.

(summary)
The above-described embodiments and the like disclose the following aspects.

The head unit (10) according to the first aspect includes a linear shaft (2), a rotor shaft (5), a capture unit (10a), a linear drive unit (3), a rotor drive unit (6), a linear connection unit (82), and a rotor connection unit (83). The axis of the linear shaft (2) is along a first direction (D1) and a second direction (D2). The second direction (D2) is opposite to the first direction (D1). The rotor shaft (5) is aligned in the second direction (D2) with respect to the linear shaft (2). The axis of the rotor shaft (5) is along the first direction (D1) and the second direction (D2). The capture unit (10a) is provided at the end of the rotor shaft (5) in the second direction (D2) and captures an object (102b). The linear drive (3) provides a linear drive force to the linear shaft (2) that moves the linear shaft (2) together with the rotor shaft (5) in a first direction (D1) and a second direction (D2). The rotor drive (6) provides a rotational drive force to the rotor shaft (5) that rotates the rotor shaft (5) relative to the linear shaft (2). The linear coupling (82) is coupled to the linear shaft (2). The rotor coupling (83) is rotatable relative to the linear coupling (82) and is coupled to the rotor shaft (5).

According to the above configuration, when the rotor shaft (5) rotates by the rotational driving force applied from the rotor drive unit (6), the linear shaft (2) can be prevented from rotating. Therefore, the position of the capture unit (10a) can be controlled with high precision.

The head unit (10) according to the second aspect further includes a bearing (first bearing 81) in the first aspect. The bearing (first bearing 81) is disposed between the linear coupling portion (82) and the rotor coupling portion (83) in a direction perpendicular to the first direction (D1).

The above configuration allows the rotor connection part (83) to rotate easily relative to the linear connection part (82), stabilizing the operation of the head unit (10).

The head unit (10) according to the third aspect includes a plurality of bearings (first bearings 81) in the second aspect. The plurality of bearings (first bearings 81) are aligned in the first direction (D1).

With the above configuration, compared to when there is only one bearing (first bearing 81), the movement direction of the linear shaft (2) is more easily restricted to the first direction (D1) and the second direction (D2), and the movement of the linear shaft (2) can be stabilized.

In addition, in the head unit (10) according to the fourth aspect, in the third aspect, the multiple bearings (first bearings 81) are sandwiched between the linear coupling portion (82) and the rotor coupling portion (83).

With the above configuration, multiple bearings (first bearings 81) can be arranged between the rotor connection part (83) and the linear connection part (82). This allows the length of the head unit (10) to be shortened.

In the head unit (10) according to the fifth aspect, in any one of the first to fourth aspects, the rotor connection part (83) has a cylindrical shape along the first direction (D1). At least a portion of the linear connection part (82) is located inside the rotor connection part (83).

The above configuration allows the length of the head unit (10) in the first direction (D1) to be shortened.

In addition, in the head unit (10) according to the sixth aspect, in any one of the first to fifth aspects, the rotor drive unit (6) has a rotor (61) and a stator (62). The rotor (61) is arranged concentrically with the rotor shaft (5) and is connected to the rotor shaft (5). The stator (62) applies a rotational driving force to the rotor shaft (5) via the rotor (61). The shape of the stator (62) is cylindrical along the first direction (D1), and the rotor (61) is arranged inside the stator (62).

With the above configuration, the rotor (61) and the rotor shaft (5) are arranged concentrically, so that the dimensions of the head unit (10) in the direction perpendicular to the first direction (D1) can be reduced.

The head unit (10) according to the seventh aspect is the sixth aspect, further comprising a spline nut (71) and a guide member (72). The spline nut (71) is formed in a cylindrical shape along the first direction (D1), and the rotor shaft (5) is disposed inside. The guide member (72) is disposed between the rotor shaft (5) and the spline nut (71) and regulates the movement direction of the rotor shaft (5) to the first direction (D1) and the second direction (D2). The rotor shaft (5) rotates by receiving a rotational driving force from the rotor drive unit (6) via the spline nut (71). The rotor shaft (5) moves in the first direction (D1) and the second direction (D2) relative to the spline nut (71). The guide member (72) and the rotor (61) are aligned in the first direction (D1).

With the above configuration, the guide member (72) and the rotor (61) are aligned in the first direction (D1), so the dimensions of the head unit (10) in a direction perpendicular to the first direction (D1) can be reduced.

In addition, the head unit (10) according to the eighth aspect is the sixth aspect, further comprising a spline nut (71) and a guide member (72). The spline nut (71) is formed in a cylindrical shape along the first direction (D1), and the rotor shaft (5) is disposed inside. The guide member (72) is disposed between the rotor shaft (5) and the spline nut (71) and regulates the movement direction of the rotor shaft (5) to the first direction (D1) and the second direction (D2). The rotor shaft (5) rotates by receiving a rotational driving force from the rotor drive unit (6) via the spline nut (71). The rotor shaft (5) moves in the first direction (D1) and the second direction (D2) relative to the spline nut (71). The guide member (72) and the rotor (61) are aligned in a direction perpendicular to the first direction (D1).

According to the above configuration, the guide member (72) and the rotor (61) are aligned in a direction perpendicular to the first direction (D1), so the dimensions of the head unit (10) in the first direction (D1) can be reduced.

The head unit (10) according to the ninth aspect is the seventh or eighth aspect, and further includes a scale (73). The scale (73) presents information regarding the rotation angle of the rotor (61) relative to the stator (62) to the rotation sensor (74). The scale (73) is rotatable integrally with the spline nut (71).

The above configuration allows the rotation angle of the rotor (61) to be measured.

The head unit (10) according to the tenth aspect is any one of the seventh to ninth aspects, and further includes a return member (79). The return member (79) is disposed between the spline nut (71) and the rotor connection portion (83), and generates a force that moves the linear shaft (2) in the first direction (D1).

According to the above configuration, after the linear shaft (2) moves in the second direction (D2), the force generated by the return member (79) can move the linear shaft (2) in the first direction (D1).

The head unit (10) according to the eleventh aspect is any one of the first to tenth aspects, and further includes a regulating member (41). The regulating member (41) is aligned with the linear coupling portion (82) in the first direction (D1) and regulates the movement direction of the linear shaft (2) to the first direction (D1) and the second direction (D2).

The above configuration makes it easier to stabilize the direction of movement of the linear shaft (2).

Configurations other than the first aspect are not essential to the head unit (10) and may be omitted as appropriate.

The actuator (1, 1A) according to the twelfth aspect includes a linear shaft (2), a rotor shaft (5), a linear drive unit (3), a rotor drive unit (6), a linear connection unit (82), and a rotor connection unit (83). The axis of the linear shaft (2) is along the first direction (D1) and the second direction (D2). The second direction (D2) is opposite to the first direction (D1). The rotor shaft (5) is aligned in the second direction (D2) with respect to the linear shaft (2). The axis of the rotor shaft (5) is along the first direction (D1) and the second direction (D2). The rotor shaft (5) has an attachment unit (52) at an end in the second direction (D2). A capture unit (10a) for capturing an object (102b) can be attached to the attachment unit (52). The linear drive (3) provides a linear drive force to the linear shaft (2) that moves the linear shaft (2) together with the rotor shaft (5) in a first direction (D1) and a second direction (D2). The rotor drive (6) provides a rotational drive force to the rotor shaft (5) that rotates the rotor shaft (5) relative to the linear shaft (2). The linear coupling (82) is coupled to the linear shaft (2). The rotor coupling (83) is rotatable relative to the linear coupling (82) and is coupled to the rotor shaft (5).

The above configuration allows the position of the capture section (10a) to be controlled with high precision.

The mounting system (100) according to the thirteenth aspect includes a head unit (10) according to any one of the first to eleventh aspects, and a holding device (101). The holding device (101) holds a mounting member (111) on which an object (102b) captured by the capture unit (10a) is mounted.

The above configuration allows the position of the capture section (10a) to be controlled with high precision.

Reference Signs List 1, 1A Actuator 2 Linear shaft 3 Linear drive unit 5 Rotor shaft 6 Rotor drive unit 10 Head unit 10a Capture unit 41 Regulating member 52 Mounting unit 61 Rotor 62 Stator 71 Spline nut 72 Guide member 73 Scale 74 Rotation sensor 79 Return member 81 First bearing (bearing)
82 Linear coupling portion 83 Rotor coupling portion 100 Mounting system 101 Holding device 102b Target object 111 Mounting member D1 First direction D2 Second direction

Claims (13)

a linear shaft having an axis along a first direction and a second direction opposite to the first direction;
a rotor shaft aligned in the second direction with respect to the linear shaft and having an axis aligned along the first direction and the second direction;
a capture portion provided at an end portion of the rotor shaft in the second direction and configured to capture an object;
a linear drive unit that applies a linear drive force to the linear shaft to move the linear shaft together with the rotor shaft in the first direction and the second direction;
a rotor drive unit that applies a rotational driving force to the rotor shaft to rotate the rotor shaft relative to the linear shaft;
a linear coupling portion coupled to the linear shaft;
a rotor coupling portion rotatable relative to the linear coupling portion and coupled to the rotor shaft;
The rotor coupling portion has a shape capable of accommodating a portion of the linear coupling portion.
Head unit. the rotor coupling portion holds a bearing inside the rotor coupling portion ;
The bearing is disposed between the linear coupling portion and the rotor coupling portion in a direction perpendicular to the first direction.
The head unit according to claim 1 . a linear shaft having an axis along a first direction and a second direction opposite to the first direction;
a rotor shaft aligned in the second direction with respect to the linear shaft and having an axis aligned along the first direction and the second direction;
a capture portion provided at an end portion of the rotor shaft in the second direction and configured to capture an object;
a linear drive unit that applies a linear drive force to the linear shaft to move the linear shaft together with the rotor shaft in the first direction and the second direction;
a rotor drive unit that applies a rotational driving force to the rotor shaft to rotate the rotor shaft relative to the linear shaft;
a linear coupling portion coupled to the linear shaft;
a rotor coupling portion rotatable relative to the linear coupling portion and coupled to the rotor shaft;
a bearing disposed between the linear coupling portion and the rotor coupling portion in a direction perpendicular to the first direction.
Head unit. A plurality of the bearings are provided,
The plurality of bearings are aligned in the first direction.
The head unit according to claim 2 or 3. The plurality of bearings are sandwiched between the linear coupling portion and the rotor coupling portion.
The head unit according to claim 4. a linear shaft having an axis along a first direction and a second direction opposite to the first direction;
a rotor shaft aligned in the second direction with respect to the linear shaft and having an axis aligned along the first direction and the second direction;
a capture portion provided at an end portion of the rotor shaft in the second direction and configured to capture an object;
a linear drive unit that applies a linear drive force to the linear shaft to move the linear shaft together with the rotor shaft in the first direction and the second direction;
a rotor drive unit that applies a rotational driving force to the rotor shaft to rotate the rotor shaft relative to the linear shaft;
a linear coupling portion coupled to the linear shaft;
a rotor coupling portion rotatable relative to the linear coupling portion and coupled to the rotor shaft;
the rotor driving unit includes a rotor that is concentrically disposed with the rotor shaft and connected to the rotor shaft, and a stator that provides the rotational driving force to the rotor shaft via the rotor,
The stator has a cylindrical shape along the first direction, and the rotor is disposed inside the stator.
Head unit. a spline nut formed in a cylindrical shape along the first direction and having the rotor shaft disposed therein;
a guide member disposed between the rotor shaft and the spline nut and configured to restrict a moving direction of the rotor shaft to the first direction and the second direction,
the rotor shaft receives the rotational driving force from the rotor driving portion via the spline nut and rotates;
the rotor shaft moves in the first direction and the second direction relative to the spline nut,
The guide member and the rotor are aligned in the first direction.
The head unit according to claim 6. a spline nut formed in a cylindrical shape along the first direction and having the rotor shaft disposed therein;
a guide member disposed between the rotor shaft and the spline nut and configured to restrict a moving direction of the rotor shaft to the first direction and the second direction,
the rotor shaft receives the rotational driving force from the rotor driving portion via the spline nut and rotates;
the rotor shaft moves in the first direction and the second direction relative to the spline nut,
The guide member and the rotor are aligned in a direction perpendicular to the first direction.
The head unit according to claim 6. a scale for providing a rotation sensor with information regarding an angle of rotation of the rotor relative to the stator;
The scale is rotatable integrally with the spline nut.
9. A head unit according to claim 7 or 8. a return member disposed between the spline nut and the rotor connection portion and configured to generate a force that moves the linear shaft in the first direction;
The head unit according to any one of claims 7 to 9. a linear shaft having an axis along a first direction and a second direction opposite to the first direction;
a rotor shaft aligned in the second direction with respect to the linear shaft and having an axis aligned along the first direction and the second direction;
a capture portion provided at an end portion of the rotor shaft in the second direction and configured to capture an object;
a linear drive unit that applies a linear drive force to the linear shaft to move the linear shaft together with the rotor shaft in the first direction and the second direction;
a rotor drive unit that applies a rotational driving force to the rotor shaft to rotate the rotor shaft relative to the linear shaft;
a linear coupling portion coupled to the linear shaft;
a rotor coupling portion rotatable relative to the linear coupling portion and coupled to the rotor shaft;
a regulating member arranged in the first direction with respect to the linear coupling portion and regulating a moving direction of the linear shaft in the first direction and the second direction,
Head unit. a linear shaft having an axis along a first direction and a second direction opposite to the first direction;
a rotor shaft aligned in the second direction with respect to the linear shaft, with an axis extending along the first direction and the second direction, and having an attachment portion at an end in the second direction to which a capture portion for capturing an object can be attached;
a linear drive unit that applies a linear drive force to the linear shaft to move the linear shaft together with the rotor shaft in the first direction and the second direction;
a rotor drive unit that applies a rotational driving force to the rotor shaft to rotate the rotor shaft relative to the linear shaft;
a linear coupling portion coupled to the linear shaft;
a rotor coupling portion rotatable relative to the linear coupling portion and coupled to the rotor shaft;
The rotor coupling portion has a shape capable of accommodating a portion of the linear coupling portion.
Actuator. A head unit according to any one of claims 1 to 11,
and a holding device for holding a mounting member on which the object captured by the capture unit is to be mounted.
Implementation system.

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