JP7587461B2 - 3D shape measuring device - Google Patents

Description

The present invention relates to a three-dimensional shape measuring device that optically measures the three-dimensional shape of a measurement object.

Three-dimensional shape measuring devices are used to measure the three-dimensional shape of a measurement object. In the shape measuring device of Patent Document 1, as an example of a three-dimensional shape measuring device, a measurement object placed on a stage is sequentially irradiated with multiple measurement light beams having multiple patterns from a light projecting unit from a position diagonally above the measurement object. When each measurement light beam is irradiated, the measurement object is imaged by a light receiving unit arranged above the stage. This results in the acquisition of multiple images onto which the measurement light patterns are projected. Based on the multiple acquired images, data indicating the three-dimensional shape of the measurement object is generated by a triangulation method.

The stage is configured so that the mounting surface on which the object to be measured is placed can move in the X and Y directions parallel to the mounting surface and can rotate around an axis perpendicular to the mounting surface. This allows the user to measure the shape of a desired part of the object to be measured by moving or rotating the mounting surface while the object to be measured is placed on the stage.

JP 2014-055814 A

In shape measurement methods using triangulation, it is not possible to measure the shape of blind spots on the surface of the object being measured, i.e., parts of the surface of the object being measured that cannot be irradiated with measurement light and parts of the surface of the object being measured that cannot be imaged.

In the shape measuring device described above, the object to be measured on the stage is located below the light projecting unit and the light receiving unit. Therefore, the portion of the object to be measured that faces downward is in a blind spot. Therefore, even if the object to be measured on the stage is moved or rotated, certain parts of the surface of the object to be measured cannot be removed from the blind spot. In this case, the parts of the object to be measured that can be used to measure its shape are limited.

It is therefore conceivable to provide the above-mentioned shape measuring device with an adjustment device for adjusting the position or orientation of the measurement object on the stage. However, if adjusting the position or orientation of the measurement object causes a change in the size of the measurement object in a planar view, the user must set the area to be imaged by the light receiving unit each time the position or orientation of the measurement object is adjusted. This type of setting work is cumbersome.

The object of the present invention is to provide a three-dimensional shape measuring device that can measure the shape over a wide range on the surface of an object to be measured without requiring complicated setup work.

(1) A three-dimensional shape measuring device according to the present invention is a three-dimensional shape measuring device that generates three-dimensional shape data indicating the three-dimensional shape of a measurement object, and includes a rotation unit including a holding section that holds the measurement object and a rotation drive section that rotates the holding section to a first rotation angle and a second rotation angle around a rotation axis extending in the X-axis direction, an imaging section that has an optical axis extending in the Z-axis direction perpendicular to the X-axis and captures an image of the measurement object held by the holding section to generate image data for generating three-dimensional shape data indicating an image of the measurement object, a translation drive section that moves the rotation unit relative to the imaging section in the Y-axis direction perpendicular to the X-axis and Z-axis so that the imaging field of view of the imaging section moves sequentially, and a rotation drive section that rotates the measurement object at the first rotation angle. The device includes a setting unit that sets a plurality of first measurement regions aligned in the Y-axis direction based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the object is rotated, and sets a plurality of second measurement regions aligned in the Y-axis direction based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is rotated to a second rotation angle; and a control unit that controls the translation drive unit, the rotation drive unit, and the imaging unit to rotate the measurement object to the first rotation angle, sequentially move the imaging field of the imaging unit to the plurality of first measurement regions to image the measurement object, and subsequently rotate the measurement object to the second rotation angle, sequentially move the imaging field of the imaging unit to the plurality of second measurement regions to image the measurement object.

In the three-dimensional shape measuring device, a plurality of first measurement areas arranged in the Y-axis direction are set based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is rotated to the first rotation angle. Also, a plurality of second measurement areas arranged in the Y-axis direction are set based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is rotated to the second rotation angle. In this case, the user does not need to perform a cumbersome setting operation according to the shape of the measurement object for each of the first rotation angle and the second rotation angle. Thereafter, with the measurement object at the first rotation angle, the imaging field of the imaging unit is moved sequentially to the plurality of first measurement areas, and the measurement object is imaged. Also, with the measurement object at the second rotation angle, the imaging field of the imaging unit is moved sequentially to the plurality of second measurement areas, and the measurement object is imaged. Based on the plurality of image data generated in this way, three-dimensional shape data corresponding to the first rotation angle and three-dimensional shape data corresponding to the second rotation angle can be generated. As a result, it becomes possible to measure the shape over a wide range on the surface of the measurement object without the need for a cumbersome setting operation.

(2) The three-dimensional shape measuring device may further include a memory unit that stores a setting that associates a first rotation angle with a plurality of first measurement regions and a setting that associates a second rotation angle with a plurality of second measurement regions, both set by the setting unit, and the control unit may control the translation drive unit, the rotation drive unit, and the imaging unit based on the settings stored in the memory unit.

In this case, based on the settings stored in the memory unit, a portion of the object to be measured at the first rotation angle is appropriately imaged, and a portion of the object to be measured at the second rotation angle is appropriately imaged.

(3) The three-dimensional shape measuring device may further include a detection unit that detects the presence area of the measurement object in the Y-axis direction at each of the first rotation angle and the second rotation angle, and the setting unit may automatically set the number of first measurement areas and the number of second measurement areas aligned in the Y-axis direction that are necessary to image the entire presence area based on the width of the presence area detected by the detection unit.

In this case, multiple first measurement areas corresponding to the first rotation angle and multiple second measurement areas corresponding to the second rotation angle are appropriately set based on the detection result by the detection unit, without requiring any setting work by the user.

(4) The three-dimensional shape measuring device may further include a display unit that displays a setting screen for adjusting the multiple first measurement areas and multiple second measurement areas that are set based on the area of the object to be measured detected by the detection unit, and the setting unit may be configured to be able to expand or reduce the number of first measurement areas and second measurement areas extending in the Y-axis direction on the setting screen in response to an instruction from the user. In this case, the user can perform shape measurement on a desired part of the object to be measured.

(5) The control unit controls the imaging unit, the translation drive unit, and the rotation drive unit so as to move the measurement object relative to the imaging unit in the X-axis direction and the Y-axis direction and capture the image multiple times at each of the first and second rotation angles to generate a map image in which the entire measurement object is captured; the display unit displays the map image on the setting screen and displays the multiple first measurement areas and the multiple second measurement areas set by the setting unit superimposed on the map image; and the three-dimensional shape measuring device may further include a data generation unit that generates multiple three-dimensional shape data corresponding to the multiple first measurement areas and the multiple second measurement areas, respectively, and combines the generated multiple three-dimensional shape data to generate three-dimensional shape data for the entire measurement object.

In this case, the user can easily grasp the positional relationship between the measurement object at the first rotation angle and the multiple first measurement areas by visually viewing the map image corresponding to the first rotation angle. Also, the user can easily grasp the positional relationship between the measurement object at the second rotation angle and the multiple second measurement areas by visually viewing the map image corresponding to the second rotation angle.

Furthermore, according to the above configuration, multiple three-dimensional shape data corresponding to multiple first measurement areas and multiple second measurement areas are generated and synthesized, making it possible to measure the shape over a wide range on the surface of the measurement object.

(6) The imaging unit includes a first optical system that images light at a first magnification, a first camera that receives the light imaged by the first optical system, a second optical system that images light at a second magnification lower than the first magnification, and a second camera that receives the light imaged by the second optical system, and the map image is generated by imaging the entire object to be measured at the second magnification, and the data generation unit may generate three-dimensional shape data based on multiple image data generated by imaging the multiple first measurement areas and the multiple second measurement areas at the first magnification.

The imaging area of the imaging unit corresponding to the second magnification is larger than the imaging area of the imaging unit corresponding to the first magnification. Therefore, when imaging at the second magnification so as to cover the entire measurement object, the number of imaging times can be reduced compared to when imaging at the first magnification so as to cover the entire measurement object. According to the above configuration, since the map image is generated by imaging the measurement object at the second magnification, the time required to generate the map image can be shortened.

In addition, to generate three-dimensional shape data, the multiple first measurement regions and the multiple second measurement regions are imaged at a first magnification. In this case, the desired portion of the measurement object can be measured with higher resolution than when the multiple first measurement regions and the multiple second measurement regions are imaged at a second magnification.

(7) The rotation drive unit is configured to be capable of sequentially rotating the holding unit to a plurality of different rotation angles including a first rotation angle and a second rotation angle, the setting unit is configured to be capable of setting a plurality of measurement areas arranged in the Y-axis direction based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is at each of the plurality of different rotation angles, and the control unit controls the translation drive unit, the rotation drive unit, and the imaging unit to rotate the measurement object to each of the plurality of different rotation angles and sequentially move the imaging field of the imaging unit to the plurality of measurement areas corresponding to the rotation angles to image the measurement object, and the three-dimensional shape measuring device controls the translation drive unit, the rotation drive unit, and the imaging unit to rotate the measurement object to each of the plurality of different rotation angles and sequentially move the imaging field of the imaging unit to the plurality of measurement areas corresponding to the rotation angles to image the measurement object, The apparatus further includes a detection unit that detects the presence area of the measurement object in the Y-axis direction as the width of the measurement object, a display unit that displays a setting screen for adjusting the measurement area set for each rotation angle based on the presence area of the measurement object detected by the detection unit, and an operation unit for selecting whether the measurement object is box-shaped or axially shaped, and when the box shape is selected by the operation unit, the display unit may display a first setting screen as the setting screen for making settings related to the measurement of the box-shaped measurement object, and when the axial shape is selected by the operation unit, a second setting screen as the setting screen for making settings related to the measurement of the axially shaped measurement object.

In this case, with the measurement object at each of a number of different rotation angles, a number of measurement areas aligned in the Y-axis direction are set based on the detection results of the detection unit. A setting screen for adjusting the set measurement areas is displayed on the display unit. When the user selects either a box shape or an axis shape, a setting screen corresponding to each shape is displayed on the display device. This allows the user to adjust the measurement areas using a first setting screen suitable for the box shape when making settings related to the measurement of a box-shaped measurement object. Also, when making settings related to the measurement of an axis-shaped measurement object, the user can adjust the measurement areas using a second setting screen suitable for the axis shape.

(8) The operation unit is configured to be able to select a plurality of different discrete rotation angles when a first setting screen is displayed on the display unit by selecting a box shape with the operation unit, and the display unit may display, on the first setting screen, a plurality of measurement areas detected and set by the detection unit superimposed on an image of the measurement object captured at each of the plurality of different rotation angles selected by the operation unit.

In this case, the measurement object can be imaged at multiple different rotation angles selected by the operation unit. In addition, the user can easily grasp the measurement area corresponding to each of the multiple different rotation angles by visually checking the first setting screen.

(9) When the display unit displays the second setting screen by selecting an axis shape with the operation unit, the display unit may display, on the second setting screen, an image of the object to be measured captured by the imaging unit at a specific rotation angle among a plurality of different rotation angles, and the setting unit may receive designation of the specific rotation angle from the user.

In this case, when an axis shape is selected, an image of the object to be measured captured at a rotation angle specified by the user is displayed on the second setting screen.

(10) When a box shape is selected by the operation unit, the setting unit may set a plurality of different rotation angles at an angle pitch that is an integer multiple of a predetermined angle. In this case, the measurement object is rotated by the rotation unit at a predetermined angle pitch, and an image of the measurement object is captured at each rotation.

(11) When an axial shape is selected by the operation unit, the setting unit may automatically set the pitch of multiple different rotation angles required to measure the entire circumference of an axially shaped measurement object when the measurement object is rotated based on the diameter of the measurement object, and the control unit may control the rotation drive unit to rotate the measurement object at the pitch of the rotation angle set by the setting unit. In this case, the pitch of the rotation angle required to measure the entire circumference of an axially shaped measurement object is set without the need for complicated setting work.

(12) When an axial shape is selected by the operation unit, the setting unit receives an input of a rotation angle pitch for rotating the axially shaped measurement object from the user, and the rotation angle pitch may be limited to a value required to measure the entire circumference of the measurement object when the measurement object is rotated. In this case, the user can set multiple different rotation angles at a desired pitch. Furthermore, according to the above configuration, the rotation angle pitch is limited to a value required to measure the entire circumference of the measurement object, thereby preventing erroneous settings.

(13) The three-dimensional shape measuring device may further include a data acquisition unit that acquires three-dimensional shape data corresponding to a plurality of first measurement regions, and the setting unit may be configured to be capable of setting a plurality of second measurement regions aligned in the Y-axis direction based on the plurality of three-dimensional shape data corresponding to the plurality of first measurement regions acquired by the data acquisition unit.

In this case, multiple second measurement areas corresponding to the second rotation angle are set based on the three-dimensional shape data of the measurement object when it is at the first rotation angle. Therefore, in order to set multiple second measurement areas corresponding to the second rotation angle, it is not necessary to perform an operation such as imaging the measurement object while it is rotated to the second rotation angle in advance.

(14) The three-dimensional shape measuring device further includes a vertical drive unit for changing the relative distance between the rotation unit and the imaging unit in the Z-axis direction, and the control unit controls the translation drive unit, the vertical drive unit, the rotation drive unit, and the imaging unit to capture images of the first measurement areas and the second measurement areas multiple times while changing the relative distance at each of the first and second rotation angles to generate multiple image data, and the data generation unit generates multiple three-dimensional shape data corresponding to the first measurement areas and the second measurement areas based on the multiple image data generated by capturing images of the first measurement areas and the second measurement areas multiple times while changing the relative distance, and may generate three-dimensional shape data of the measurement object by synthesizing the multiple generated three-dimensional shape data. In this case, the shape of the measurement object can be measured with high accuracy over a wide range in the Z-axis direction.

(15) The three-dimensional shape measuring device further includes a stage on which the rotation unit is attached, and a projector that irradiates a pattern light having a periodic pattern onto the upper surface of the stage from an obliquely upward position multiple times while shifting the phase, and the imaging unit is provided above the stage so that the optical axis coincides with the Z axis, and the pattern light is irradiated from the projector onto a measurement object held by the rotation unit, and the measurement object is imaged multiple times by receiving the pattern light reflected from the measurement object, and multiple image data showing an image of the measurement object are generated, and the projectors are arranged in the X-axis direction and The stage may include first and second light-projecting devices arranged symmetrically across a virtual plane perpendicular to the X-axis direction, each of the first and second light-projecting devices having an optical axis perpendicular to the Y-axis and tilted at a predetermined angle with respect to the X-axis and Z-axis, and emitting a pattern light along the optical axis of the light-projecting device toward the optical axis of the imaging unit, and the rotation unit may be arranged to be positioned outside the space where the irradiation area of the pattern light by the first light-projecting device, the irradiation area of the pattern light by the second light-projecting device, and the imaging area of the imaging unit overlap when the stage is in a predetermined reference position with respect to the imaging unit.

The space where the area irradiated with the pattern light by the first light-projecting device, the area irradiated with the pattern light by the second light-projecting device, and the imaging area of the imaging unit overlap is called the measurement space. According to the above configuration, by placing the measurement object in the measurement space, the measurement object is irradiated with the pattern light along two different directions. This makes it possible to expand the area on the surface of the measurement object that is irradiated with the pattern light.

In addition, with the above configuration, the rotation unit is not located in the measurement space when the stage is in the reference position. Therefore, by arranging the stage and the imaging unit to have a predetermined positional relationship, the measurable range of the measurement object is prevented from being limited by the rotation unit. Therefore, it is possible to generate three-dimensional shape data with high accuracy over a wide range of the surface of the measurement object placed in the measurement space.

The present invention makes it possible to measure the shape over a wider area of the surface of the object to be measured without the need for complicated setup work.

1 is a block diagram showing a configuration of a shape measuring device according to an embodiment of the present invention. FIG. 2 is a schematic diagram showing a configuration of a measurement unit of the shape measuring device of FIG. 1 . FIG. 2 is an external perspective view of a measurement unit of the shape measuring apparatus of FIG. 1 . 4A to 4C are diagrams for explaining the configuration of a rotation unit and the attachment and detachment of the rotation unit to a stage. FIG. 4 is an external perspective view for explaining details of the configuration of a holding portion. FIG. 4 is an external perspective view for explaining details of the configuration of a holding portion. FIG. 4 is an external perspective view for explaining details of the configuration of a holding portion. 2 is a diagram for explaining a preferred movable stroke range in the Z direction of the stage in FIG. 1 . FIG. 2 is a diagram for explaining a preferred movable stroke range in the Z direction of the stage in FIG. 1 . FIG. 2 is a diagram for explaining a preferred movable stroke range in the Z direction of the stage in FIG. 1 . FIG. FIG. 1 is a diagram for explaining the principle of a triangulation method. 11 is a diagram for explaining an example of generating a plurality of pieces of three-dimensional shape data by moving the top surface of the stage in the XY directions. FIG. 13 is a diagram for explaining an example of generating a plurality of pieces of three-dimensional shape data by moving the top surface of the stage in the Z direction. FIG. 11 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by rotating a measurement object around a rotation axis using a rotation unit. FIG. FIG. 11 is a diagram for explaining a first calibration function. FIG. 11 is a diagram for explaining a second calibration function. 13A to 13C are diagrams for explaining an example of a case where three-dimensional shape data is corrected using only the deviation of the rotation axis at the position of the second marker. FIG. 11 is a diagram for explaining a third calibration function. 4 is a flowchart showing a procedure for measuring the shape of a measurement object using the shape measuring device of FIG. 1 . 4 is a flowchart showing a procedure for measuring the shape of a measurement object using the shape measuring device of FIG. 1 . 10 is a flowchart showing a procedure for setting a measurement area for performing shape measurement of a measurement object involving rotation. 13 is a diagram showing an example of a basic measurement screen displayed on the display unit when the power supply of the shape measuring device is turned on in a state in which the rotation unit is not attached to the stage; FIG. 23 is a diagram showing an example of a region setting screen displayed on a display unit when the region setting button in FIG. 22 is operated. FIG. FIG. 13 is a diagram showing an example of a basic measurement screen displayed on the display unit with a rotation unit attached to the stage. 25 is a diagram for explaining the operation of the shape measuring device executed in response to the operation of the box portion button in FIG. 24 . FIG. FIG. 25 is a diagram showing an example of a region setting screen displayed on the display unit when the box portion button in FIG. 24 is operated. FIG. 25 is a diagram showing an example of a region setting screen displayed on the display unit when the box circumference button in FIG. 24 is operated. FIG. 25 is a diagram showing an example of a region setting screen displayed on the display unit by operating the axis button in FIG. 24 . 25 is a diagram showing an example of a sub-display area displayed on the display unit when the rotation detail button in FIG. 24 is operated. FIG. FIG. 29 is a diagram showing an example of a sub-display area displayed on the display unit when the edit button in FIGS. 26 to 28 is operated. FIG. 31 is a diagram showing an example of a region setting screen displayed on the display unit when a check mark is placed in the first calibration checkbox in FIG. 30 . FIG. 31 is a diagram showing an example of a region setting screen displayed on the display unit when a check mark is placed in the second calibration checkbox in FIG. 30 . FIG. 33 is a diagram showing an example of a region setting screen that is displayed on the display unit when a marker inversion checkbox in FIG. 32 is checked. 13 is a diagram showing an example of a region setting screen displayed on the display unit in a state in which new measurement regions for a first marker and a second marker have been set. FIG. FIG. 1 is an external perspective view showing an example of shape measurement of a measurement object using a rotation unit. FIG. 36 is a diagram showing an example of a three-dimensional shape image based on all three-dimensional shape data obtained by the shape measurement of FIG. 35 . 37 is a diagram in which the three-dimensional shape image corresponding to the upper surface of the stage is removed from the three-dimensional shape image in FIG. 36 . FIG. 2 is a block diagram showing the functional configuration of a CPU in FIG. 1 . 10 is a flowchart showing an example of a shape measurement process executed by a CPU. 10 is a flowchart showing an example of a shape measurement process executed by a CPU. 10 is a flowchart showing an example of a measurement area setting process executed by a CPU. 10 is a flowchart showing an example of a measurement area setting process executed by a CPU. 13 is a diagram showing an example of a region setting screen capable of receiving a request for whether or not to set a measurement range of a measurement object in the Z direction; FIG. 13 is a diagram showing an example of a region setting screen for setting a measurement range in the Z direction of the measurement object. FIG. 11 is a diagram for explaining a function of determining whether or not an object to be measured interferes with a stage. FIG. 13A and 13B are diagrams illustrating an example of the configuration of a rotation unit according to another embodiment.

The following describes a three-dimensional shape measuring device according to one embodiment of the present invention with reference to the drawings. In the following description, the three-dimensional shape measuring device will be abbreviated to shape measuring device.

[1] Configuration of the shape measuring device Fig. 1 is a block diagram showing the configuration of a shape measuring device according to one embodiment of the present invention. Fig. 2 is a schematic diagram showing the configuration of a measurement unit of the shape measuring device 500 shown in Fig. 1. Fig. 3 is a perspective view showing the appearance of the measurement unit of the shape measuring device 500 shown in Fig. 1.

As shown in FIG. 1, the shape measuring device 500 includes a measuring unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400. The measuring unit 100 is, for example, a microscope, and includes multiple light projecting units 110A, 110B, a light receiving unit 120, an illumination light output unit 130, a stage 140, a control board 150, and a rotation unit 190. As shown in FIG. 2, each of the light projecting units 110A, 110B includes a measurement light source 111, a pattern generating unit 112, multiple lenses 113, 114, 115, an aperture 116, and multiple folding mirrors 117, 118. The light receiving unit 120 includes multiple cameras 121A, 121B, multiple lenses 122, 123A, 123B, a half mirror 124, and an aperture 125A, 125B.

In the measurement unit 100, a measurement space 101 in which the shape of the measurement object S can be measured is determined based on the positional relationship between the light projecting units 110A, 110B and the light receiving unit 120. In Figures 2 and 3, the measurement space 101 is indicated by a dashed line. A part of the upper surface 141s of the stage 140 is located in the measurement space 101. The measurement object S is placed in the measurement space 101 by placing the measurement object S on the upper surface 141s of the stage 140, or by holding the measurement object S by the rotation unit 190 described below.

2 and 3, two mutually orthogonal directions on the upper surface 141s of the stage 140 are defined as the X direction and the Y direction, and are indicated by the arrows X and Y, respectively. The X direction is parallel to the front-to-rear direction of the measurement unit 100, and the Y direction is parallel to the left-to-right direction of the measurement unit 100. The direction perpendicular to the upper surface 141s of the stage 140 is defined as the Z direction, and is indicated by the arrow Z.

As shown in FIG. 3, the stage 140 is mounted on a base 990. A support 991 is provided so as to extend upward from the base 990. An optical system support 992 is attached to the upper end of the support 991. The optical system support 992 supports the light receiving unit 120 so as to be located above the stage 140. The optical system support 992 also supports the two light projecting units 110A and 110B so as to be located diagonally above the stage 140. The two light projecting units 110A and 110B are arranged so as to be aligned in the X direction. More specifically, the two light projecting units 110A and 110B are arranged symmetrically across a plane that includes the optical axis ROA of the light receiving unit 120 and is perpendicular to the X direction. The two light projecting units 110A and 110B and the light receiving unit 120 are housed in the head casing 160 (FIGS. 8 to 10) described later while being supported by the optical system support 992.

The measurement light source 111 of each light projector 110A, 110B is, for example, a halogen lamp that emits white light. The measurement light source 111 may be another light source, such as a white LED (light-emitting diode) that emits white light.

2 and 3, the light emitted from the measurement light source 111 is appropriately focused by the lens 113, reflected by the folding mirror 117, and enters the pattern generation unit 112. The pattern generation unit 112 is, for example, a DMD (digital micromirror device). The pattern generation unit 112 may be a transmissive LCD (liquid crystal display), a reflective LCD, an LCOS (liquid crystal on silicon) or a mask. The pattern generation unit 112 generates a light beam (hereinafter referred to as pattern light) having a predetermined shape measurement pattern and a predetermined intensity (brightness) from the incident light, and emits the generated pattern light from the pattern emission surface 112S (FIG. 3).

The pattern light emitted by the pattern generating unit 112 is magnified by the multiple lenses 114, 115 and the aperture 116, then reflected by the bending mirror 118 and irradiated onto the measurement target S on the stage 140. In this embodiment, the multiple lenses 114, 115 and the aperture 116 form a double-telecentric optical system TT (Figure 3).

In the light receiving unit 120, the pattern light reflected by the measurement target S above the stage 140 is incident on the lens 122 of the light receiving unit 120. A part of the pattern light incident on the lens 122 passes through the half mirror 124, is collected and imaged by the lens 123A and the aperture 125A, and is received by the camera 121A. The rest of the pattern light incident on the lens 122 is reflected by the half mirror 124, is collected and imaged by the multiple lenses 123B and the aperture 125B of the light receiving unit 120, and is received by the camera 121B.

In the light receiving unit 120 according to this embodiment, the lenses 122 and 123A and the aperture 125A form one double-telecentric optical system corresponding to the camera 121A. The lenses 122 and 123B and the aperture 125B form another double-telecentric optical system corresponding to the camera 121B.

Each of the cameras 121A and 121B is, for example, a CCD (charge-coupled device) camera including an image sensor 121a and a lens. The image sensor 121a is, for example, a monochrome CCD (charge-coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal-oxide semiconductor) image sensor. An analog electrical signal (hereinafter referred to as a light-receiving signal) corresponding to the amount of light received is output from each pixel of the image sensor 121a to the control board 150 (Figure 1).

In this example, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement object S in a time-division manner. With this configuration, a color image of the measurement object S can be captured by the light receiving unit 120 using a monochrome CCD.

The magnification of lens 123A is lower than that of lens 123B. Alternatively, the magnification of the lens of camera 121A is lower than that of the lens of camera 121B. Therefore, camera 121A is used as a low-magnification camera, and camera 121B is used as a high-magnification camera. The user can select either the low-magnification camera or the high-magnification camera as the camera to be used for observing and measuring the shape of the measurement object S, for example, by operating the operation unit 250 described below.

An A/D converter (analog/digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the control board 150. The light receiving signals output from the cameras 121A and 121B are sampled at a fixed sampling period by the A/D converter of the control board 150 under the control of the control unit 300 and converted into digital signals. The digital signals output from the A/D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a working memory 230, a storage device 240, and an operation unit 250. The operation unit 250 also includes a keyboard and a pointing device. A mouse, a joystick, or the like is used as the pointing device.

The ROM 220 stores the system program. The working memory 230 is made up of a RAM (random access memory) and is used to process various types of data. The storage device 240 is made up of a hard disk or the like. The storage device 240 stores a shape measurement program for measuring the shape of the measurement object S. The storage device 240 is also used to save various types of data related to the shape measurement of the measurement object S.

The CPU 210 executes the shape measurement program stored in the storage device 240. As a result, the CPU 210 generates image data based on pixel data provided by the control board 150. The CPU 210 also performs various processes on the generated image data using the work memory 230, and displays an image based on the image data on the display unit 400. Furthermore, the CPU 210 provides drive pulses to a stage drive unit 146 and a rotation drive unit 192, which will be described later. Specific functions that are achieved by the CPU 210 executing the shape measurement program will be described later. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescence) panel.

The stage 140 includes an XY stage 141 and a Z stage 142. The XY stage 141 has an upper surface 141s, and has an X-direction movement mechanism and a Y-direction movement mechanism. The X-direction movement mechanism is a mechanism for moving the upper surface 141s in the X direction. The Y-direction movement mechanism is a mechanism for moving the upper surface 141s in the Y direction. The Z stage 142 has a Z-direction movement mechanism for moving the upper surface 141s in the Z direction. The stage 140 may include a θ stage or a tilt stage. The θ stage is a stage having a mechanism that can rotate around an axis perpendicular to the upper surface 141s, for example. The tilt stage is a stage having a mechanism that can tilt with respect to an axis parallel to the upper surface 141s.

Here, a plane located at the focus of the light receiving unit 120 and perpendicular to the optical axis ROA of the light receiving unit 120 is called the focal plane of the light receiving unit 120. As shown in Figures 2 and 3, the relative positional relationship between the light projecting units 110A and 110B, the light receiving unit 120, and the stage 140 is set so that the optical axis TOA1 of the light projecting unit 110A directed from the light projecting unit 110A toward the top surface 141s of the stage 140, the optical axis TOA2 of the light projecting unit 110B directed from the light projecting unit 110B toward the top surface 141s of the stage 140, and the optical axis ROA of the light receiving unit 120 directed from the top surface 141s of the stage 140 to the light receiving unit 120 intersect with each other on the focal plane of the light receiving unit 120.

The plane that includes the focal point of light-projecting unit 110A and is parallel to the XY directions is called the focal plane of light-projecting unit 110A, and the plane that includes the focal point of light-projecting unit 110B and is parallel to the XY directions is called the focal plane of light-projecting unit 110B. In this case, each of light-projecting units 110A and 110B is configured so that the focal plane of light-projecting unit 110A and the focal plane of light-projecting unit 110B intersect at a position that includes the focal point of light-receiving unit 120.

With the above-mentioned configuration, in the measurement unit 100, a space is formed where the area irradiated with the measurement light by the light projector 110A, the area irradiated with the measurement light by the light projector 110B, and the imaging area (imaging field of view) of the light receiver 120 overlap. The overlapping space of these three areas is the measurement space 101. The size of the measurement space 101 differs depending on the camera magnification (high magnification or low magnification) selected by the user. The size of the measurement space 101 when low magnification is selected is larger than the size of the measurement space 101 when high magnification is selected.

Stepping motors are used for the X-direction movement mechanism, Y-direction movement mechanism, and Z-direction movement mechanism of the stage 140. As shown in FIG. 1, the measurement unit 100 includes a stage operation unit 145 and a stage drive unit 146 as components associated with the stage 140. The X-direction movement mechanism, Y-direction movement mechanism, and Z-direction movement mechanism of the stage 140 are driven by the stage operation unit 145 or the stage drive unit 146 in FIG. 1.

The user can manually operate the stage operation unit 145 to move the upper surface 141s of the stage 140 in the X-direction, Y-direction, or Z-direction relative to the light receiving unit 120. The stage driving unit 146 moves the upper surface 141s of the stage 140 in the X-direction, Y-direction, or Z-direction relative to the light receiving unit 120 by supplying current to each stepping motor of the stage 140 based on a driving pulse provided by the PC 200.

An encoder is attached to the stepping motor used in each of the X-direction movement mechanism, Y-direction movement mechanism, and Z-direction movement mechanism of the stage 140. The output signal of each encoder is provided to, for example, the CPU 210. The CPU 210 can calculate the amount of change in the X-direction position (X position), Y-direction position (Y position), or Z-direction position (Z position) of the upper surface 141s of the stage 140 based on the signal provided from each encoder of the stage 140.

In the stage 140, a reference position in the XY direction is previously determined for the XY stage 141. The reference position is, for example, the position of the XY stage 141 when the center of the upper surface 141s is located on the optical axis ROA of the light receiving unit 120. The reference position may be determined so that the entire measurement space 101 overlaps the upper surface 141s of the stage 140 in a planar view. Therefore, as long as the measurement space 101 is located on the upper surface 141s of the stage 140, the reference position may be the position of the XY stage 141 when the part other than the center of the upper surface 141s is located on the optical axis ROA of the light receiving unit 120.

As shown in Figures 2 and 3, the XY stage 141 according to this embodiment has a rectangular plate shape extending in the X direction. A rotation unit 190 is provided at the end of the XY stage 141 in the X direction. The rotation unit 190 is configured so that it can be attached to and detached from the stage 140.

Figure 4 is a diagram for explaining the configuration of the rotation unit 190 and the attachment and detachment of the rotation unit 190 to the stage 140. Figure 4(a) shows a plan view of the rotation unit 190. Figure 4(b) shows a plan view of the XY stage 141. Figure 4(c) shows a plan view of the XY stage 141 to which the rotation unit 190 is attached.

As shown in FIG. 4(a), the rotation unit 190 includes a holding portion 191 and a rotation drive portion 192. The rotation drive portion 192 has a configuration in which a stepping motor sm and a power supply portion pp are housed in a casing having a substantially rectangular parallelepiped shape. The stepping motor sm is used to rotate the holding portion 191. The power supply portion pp supplies power to the stepping motor sm. The casing of the rotation drive portion 192 has two end faces es1, es2 that face each other in the longitudinal direction, and two side faces ss1, ss2 that face each other in the lateral direction.

The holding unit 191 is a chuck configured to hold the measurement object S by clamping it between a pair of holding pieces 92, 93 (FIGS. 5 to 7) described below, and is provided so as to protrude a predetermined distance from the side surface ss1. The holding unit 191 is supported by a stepping motor sm of the rotation drive unit 192 so as to be rotatable around a rotation axis perpendicular to the side surface ss1. The holding unit 191 will be described in detail later. The other side surface ss2 of the rotation drive unit 192 is provided with a holding dial 195 for adjusting the distance between the pair of holding pieces 92, 93 (FIGS. 5 to 7) described below.

The lower ends of both end faces es1 and es2 of the rotation drive unit 192 are provided with mounting parts 199 for mounting the rotation unit 190 on the XY stage 141. The mounting parts 199 are formed with through holes into which screws can be inserted. The rotation drive unit 192 is also provided with a cable 193 that extends outward from the power supply unit pp inside the casing through one end face es2. A connector 194 is provided at the tip of the cable 193. The cable 193 and the connector 194 are used to supply power to the power supply unit pp from a rotation unit board (described later) provided inside the XY stage 141, and to exchange signals between the rotation unit board and the power supply unit pp.

As shown in FIG. 4(b), the upper surface 141s of the XY stage 141 has a rectangular shape extending in the X direction. Two screw holes 141h corresponding to the two mounting portions 199 of the rotation unit 190 are formed at one end of the upper surface 141s in the X direction. In this example, the XY stage 141 is in the reference position. In this case, the outer edge of the measurement space 101 surrounds the center of the upper surface 141s of the XY stage 141 in a plan view.

A control board (hereafter referred to as the rotation unit board) is provided inside the XY stage 141 to supply power to the power supply unit pp of the rotation unit 190 and to control the operation of the rotation drive unit 192. A connector 141c is provided on one side of the XY stage 141 facing forward of the measurement unit 100 to electrically connect the rotation unit board and the rotation unit 190.

As shown in FIG. 4(c), the rotation unit 190 is attached to the XY stage 141. During this attachment, the two mounting parts 199 of the rotation unit 190 are positioned on the two screw holes 141h of the XY stage 141. In addition, screws are attached to the screw holes 141h through the through holes of each mounting part 199. This fixes the rotation unit 190 to a predetermined position on the upper surface 141s of the XY stage 141. With the XY stage 141 in the reference position, the rotation unit 190 is located in a space outside the measurement space 101. In this case, since the rotation unit 190 is not located in the measurement space 101, the measurable range of the measurement target S is prevented from being limited by the rotation unit 190.

When the rotation unit 190 is attached to the XY stage 141, the connector 194 on the cable 193 is connected to the connector 141c on the XY stage 141. This allows power to be supplied from the XY stage 141 to the rotation unit 190. The rotation drive unit 192 of the rotation unit 190 is controlled by the CPU 210 via the rotation unit board on the XY stage 141.

An encoder is attached to the stepping motor sm of the rotation drive unit 192. The output signal of the encoder is provided to the CPU 210 by electrically connecting the rotation unit 190 and the XY stage 141. The CPU 210 can calculate the angular position (rotation angle) in the rotation direction of the holding unit 191 based on the signal provided from the encoder of the rotation unit 190.

Here, the details of the holding portion 191 will be described. Figures 5 to 7 are external perspective views for explaining the details of the configuration of the holding portion 191. As shown in Figure 5, the holding portion 191 includes a rotating support shaft 91, a pair of holding pieces 92, 93, and an opening and closing mechanism (not shown).

The rotating support shaft 91 is connected to a stepping motor sm of the rotating drive unit 192 and is supported so as to be rotatable around the central axis of the rotating support shaft 91. The pair of holding pieces 92, 93 each have a semi-cylindrical shape and are provided so as to sandwich the tip portion of the rotating support shaft 91 and form a single cylinder with the pair of holding pieces 92, 93. As shown by the hollow arrow in FIG. 5, the opening and closing mechanism (not shown) changes the distance between the pair of holding pieces 92, 93 in response to the user's operation of the holding dial 195 (FIG. 4(a)). As a result, as shown in FIG. 6, the holding unit 191 is configured to be able to hold (grasp) the measurement object S by sandwiching a part of the measurement object S between the pair of holding pieces 92, 93.

A plurality of holes 92h, 93h are formed in the end faces 92e, 93e located at the tip of each holding piece 92, 93. Rod-shaped members 94 can be inserted into these holes 92h, 93h. By selectively inserting a predetermined number of rod-shaped members 94 into the holes 92h, 93h of the holding pieces 92, 93, it is also possible to hold the measurement object S using the rod-shaped members 94, as shown in FIG. 7.

By placing the measurement object S held by the holding unit 191 in the measurement space 101, the three-dimensional shape of the upward-facing portion of the measurement object S located in the measurement space 101 can be measured.

According to the above-described configuration of the holding unit 191, the measurement object S is held in a cantilever manner, so that the portion of the measurement object S held by the holding unit 191 is reduced. Therefore, by rotating the measurement object S within the measurement space 101, the three-dimensional shape of a wider area of the surface of the measurement object S can be measured.

The range of the stage 140 that can be moved up and down by the Z-direction movement mechanism (hereinafter referred to as the movable stroke range) is preferably determined based on, for example, the positional relationship between the stage 140 and the light receiving unit 120. Figures 8 to 10 are diagrams for explaining the preferred movable stroke range in the Z direction of the stage 140 in Figure 1.

Schematic front views of the measurement unit 100 are shown in Figs. 8 to 10. In Figs. 8 to 10, the head casing 160 housing the light projectors 110A, 110B and the light receiver 120 is indicated by a two-dot chain line, and the focal plane 120F of the light receiver 120 is indicated by a thick dotted line. Furthermore, the rotation axis RA passing through the center of the rotation support shaft 91 (Figs. 5 to 7) in the rotation unit 190 is indicated by a dashed line. In this example, the lens 122 (Fig. 2) of the light receiver 120 is located at the lower end of the head casing 160. In this example, the rotation axis RA extends parallel to the X direction when the rotation unit 190 is attached to the stage 140.

As shown in FIG. 8, the stage 140 is preferably configured to be positionable at a height position p1 where at least the upper surface 141s is located on the focal plane 120F of the light receiving unit 120. In this case, the rotation unit 190 is preferably designed so that the Z-direction dimension (height) dh is smaller than the working distance WD from the lens 122 of the light receiving unit 120 to the focal plane 120F.

Next, as shown in FIG. 9, the stage 140 is preferably configured so that, with the rotation unit 190 attached, it can be positioned at a height position p2 where at least the rotation axis RA of the rotation unit 190 is located on the focal plane 120F of the light receiving unit 120. To realize the positions shown in the examples of FIG. 8 and FIG. 9, the movable stroke range RM in the Z direction of the stage 140 in FIG. 1 must be determined so that the focal plane 120F of the light receiving unit 120 can be adjusted between the upper surface 141s and the rotation axis RA in the Z direction.

Here, the distance from the top surface 141s to the rotation axis RA in the Z direction is defined as the reference distance RD. In this case, as shown in FIG. 10, it is more preferable that the stage 140 is configured so that it can be positioned at a height position p3 when the focal plane 120F is positioned at a height position that is twice the reference distance RD above the top surface 141s with the rotation unit 190 attached.

This configuration allows shape measurements to be performed over a wide range for the measurement object S that does not interfere with the top surface 141s during rotation about the rotation axis RA. Therefore, it is preferable that the movable stroke range RM in the Z direction of the stage 140 in FIG. 1 be determined so that the focal plane 120F of the light receiving unit 120 can be adjusted between the top surface 141s and a height position that is twice the reference distance RD above the top surface 141s.

As shown in FIG. 1, the control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projectors 110A and 110B, the light receiver 120, and the control board 150 based on commands from the CPU 210 of the PC 200.

The illumination light source 320 includes three LEDs that emit, for example, red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, light of any color can be generated from the illumination light source 320. The light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light-guiding member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the illumination light output unit 130 is not provided in the measurement unit 100.

The illumination light output unit 130 in FIG. 2 has a circular ring shape and is disposed above the stage 140 so as to surround the light receiving unit 120. This allows illumination light to be irradiated from the illumination light output unit 130 onto the measurement object S so as not to create a shadow.

[2] Three-dimensional shape data showing the three-dimensional shape of the measurement object (1) Measurement of the shape of the measurement object by triangulation method In the measurement unit 100, the shape of the measurement object S is measured by triangulation method. Fig. 11 is a diagram for explaining the principle of the triangulation method. As shown in Fig. 11, for example, an angle γ between the optical axis of the light beam emitted from the light projector 110A and the optical axis of the reflected light incident on the light receiver 120 (the optical axis of the light receiver 120) is set in advance. The angle γ is greater than 0 degrees and less than 90 degrees.

When the measurement object S is not placed on the stage 140, the light emitted from the light-projecting unit 110A is reflected by point O on the upper surface 141s of the stage 140 and enters the light-receiving unit 120. On the other hand, when the measurement object S is placed on the stage 140, the light emitted from the light-projecting unit 110A is reflected by point A on the surface of the measurement object S and enters the light-receiving unit 120.

If the distance in the X direction between points O and A is d, then the height h of point A of the measurement object S relative to the upper surface 141s of the stage 140 is given by h = d ÷ tan(γ). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between points O and A in the X direction based on the pixel data of the measurement object S provided by the control board 150. The CPU 210 also calculates the height h of point A on the surface of the measurement object S based on the measured distance d. The three-dimensional shape of the measurement object S is measured by calculating the heights of all points on the surface of the measurement object S.

During shape measurement using the triangulation method, in order to irradiate all points on the surface of the measurement target S with light, pattern light having various patterns is sequentially emitted from the light-projecting units 110A and 110B in FIG. 1 toward the stage 140. For example, striped pattern light having a linear cross section parallel to the Y direction and aligned in the X direction is emitted multiple times from each of the light-projecting units 110A and 110B while its spatial phase is changed. Also, code-shaped pattern light having a linear cross section parallel to the Y direction and with bright and dark parts aligned in the X direction is emitted multiple times from each of the light-projecting units 110A and 110B while its bright and dark parts are changed into a gray code.

In the CPU 210 (FIG. 1), three-dimensional shape data representing the three-dimensional shape of the measurement object S is generated based on image data of the measurement object S onto which a predetermined pattern light is projected. The three-dimensional shape data includes position data on the surface of the measurement object S. In the measurement unit 100, a three-dimensional coordinate system (hereinafter referred to as the device coordinate system) having a unique positional relationship with the light receiving unit 120 is defined. In this example, the device coordinate system includes an X-axis, a Y-axis, and a Z-axis parallel to the X-direction, the Y-direction, and the Z-direction. The position data represents, for example, coordinates in the device coordinate system. In the following description, the image of the measurement object S displayed based on the three-dimensional shape data is referred to as a three-dimensional shape image.

(2) Synthesis of Multiple 3D Shape Data in the XY Directions When the measurement object S is placed on the upper surface 141s of the stage 140 and does not fit within the measurement space 101 in the XY directions, the pattern light is irradiated onto only a portion of the upper surface of the measurement object S. Therefore, it is not possible to obtain 3D shape data over a wide range of the surface of the measurement object S.

Therefore, if the top surface of the measurement object S does not fit within the measurement space 101 in the XY direction, multiple parts of the measurement object S may be imaged by moving the top surface 141s of the stage 140 in the XY direction relative to the light receiving unit 120. In this case, multiple three-dimensional shape data corresponding to multiple parts of the measurement object S can be obtained, and the obtained multiple three-dimensional shape data can be synthesized.

Figure 12 is a diagram for explaining an example of generating multiple three-dimensional shape data by moving the upper surface 141s of the stage 140 in the XY direction. For example, as shown in Figure 12 (a), the user places the measurement object S on the stage 140. After the position and orientation of the measurement object S are adjusted on the stage 140, an image is captured using pattern light to generate the first three-dimensional shape data. An example of a three-dimensional shape image obtained in this way is shown in Figure 12 (e). Note that in the three-dimensional shape images shown in Figures 12 (e) to (h) and Figures 13 (c), (d), and Figures 14 (d) to (f) described later, the dotted lines virtually represent the overall outer shape of the measurement object S.

As shown in FIG. 12(a), in this example, when the first three-dimensional shape data is generated, only a portion of the measurement object S in the XY direction is placed in the measurement space 101. Therefore, the three-dimensional shape image shown in FIG. 12(e) is missing multiple portions of the top surface of the measurement object S in the XY direction.

Therefore, as shown in Figs. 12(b) to (d), the upper surface 141s of the stage 140 is moved in the XY direction so that the multiple parts of the measurement object S that are not represented by the first three-dimensional shape data are sequentially placed in the measurement space 101. In addition, each time each part of the measurement space 101 is placed in the measurement space 101, an image is captured using pattern light, and the second to fourth three-dimensional shape data are generated. Three-dimensional shape images corresponding to the second to fourth three-dimensional shape data, respectively, are shown in Figs. 12(f) to (h). In this way, the movement of the stage 140 in the XY direction and the image capture of the measurement object S are repeated, and multiple three-dimensional shape data corresponding to multiple parts of the upper surface of the measurement object S are generated. The multiple generated three-dimensional shape data are synthesized to generate three-dimensional shape data covering a wide range of the surface of the measurement object S. In the following description, the synthesis for expanding the target range of the shape measurement of the measurement object S in the XY direction is called planar direction synthesis.

(3) Combination of Multiple 3D Shape Data in the Z Direction When the measurement object S is placed on the upper surface 141s of the stage 140, if the upper surface of the measurement object S in the Z direction does not fall within the measurement space 101 (within the range of the depth of field of the light receiving unit 120), the light receiving unit 120 will only focus on a portion of the upper surface of the measurement object S. Therefore, it is not possible to obtain 3D shape data over a wide range of the surface of the measurement object S.

Therefore, if the top surface of the measurement object S does not fit within the measurement space 101 in the Z direction, multiple parts of the measurement object S may be imaged by moving the top surface 141s of the stage 140 in the Z direction relative to the light receiving unit 120. In this case, multiple three-dimensional shape data corresponding to multiple parts of the measurement object S can be obtained, and the obtained multiple three-dimensional shape data can be synthesized.

Figure 13 is a diagram for explaining an example of generating multiple three-dimensional shape data by moving the top surface 141s of the stage 140 in the Z direction. For example, as shown in Figure 13(a), a user places the measurement target S on the stage 140, and an image is captured using pattern light to generate the first three-dimensional shape data. An example of a three-dimensional shape image obtained in this way is shown in Figure 13(c).

As shown in FIG. 13(a), in this example, when the first three-dimensional shape data is generated, only a portion of the top surface of the measurement object S in the Z direction is placed within the measurement space 101. Therefore, the three-dimensional shape image shown in FIG. 13(c) is missing the topmost portion of the measurement object S in the Z direction.

As shown in FIG. 13(b), the upper surface 141s of the stage 140 is moved in the Z direction so that the portion of the measurement object S not represented in the first three-dimensional shape data is placed in the measurement space 101. In addition, imaging is performed using pattern light, and second three-dimensional shape data is generated. The three-dimensional shape image corresponding to the second three-dimensional shape data is shown in FIG. 13(d).

In this manner, by repeatedly moving the stage 140 in the Z direction and capturing images of the measurement object S, multiple pieces of three-dimensional shape data are generated, each corresponding to multiple parts of the measurement object S. By synthesizing the multiple generated three-dimensional shape data, three-dimensional shape data covering a wide range of the surface of the measurement object S is generated. In the following description, synthesis for expanding the target range for shape measurement of the measurement object S in the Z direction is referred to as height direction synthesis.

(4) Synthesis of Multiple Three-Dimensional Shape Data in the Rotational Direction Even when the measurement object S held by the rotation unit 190 is placed in the measurement space 101, the pattern light reflected by the portion of the measurement object S that does not face the direction of the light receiving unit 120 does not enter the light receiving unit 120. Therefore, when measuring the shape of the measurement object S held by the rotation unit 190, the measurement object S may be rotated around the rotation axis RA to capture images of multiple portions of the measurement object S. In this case, multiple three-dimensional shape data corresponding to the multiple portions of the measurement object S are acquired, and the acquired multiple three-dimensional shape data can be synthesized.

Figure 14 is a diagram for explaining an example of generating multiple three-dimensional shape data by rotating the measurement object S around the rotation axis RA using the rotation unit 190. For example, as shown in Figure 14 (a), the user attaches the measurement object S to the holder 191 of the rotation unit 190. In Figures 14 (a) to (c), the holder 191 that holds the measurement object S is shown diagrammatically by a two-dot chain line.

With the measurement object S held by the rotation unit 190, the measurement object S is aligned so that it is positioned within the measurement space 101. Furthermore, an image is captured using pattern light to generate the first three-dimensional shape data. An example of the three-dimensional shape image thus obtained is shown in FIG. 14(d).

The measurement object S used in this example has a generally cylindrical shape extending in one direction, and one end of the measurement object S is held by the holding portion 191 so that the axis of the measurement object S coincides with the rotation axis RA. In addition, a black dot is added to the end of the measurement object S in this example so that the rotation state of the measurement object S can be easily understood.

As shown in FIG. 14(a), when the first three-dimensional shape data is generated, only a portion of the outer circumferential surface of the measurement object S that faces the light receiving unit 120 is imaged by the light receiving unit 120. Therefore, the three-dimensional shape image shown in FIG. 14(d) is missing a relatively wide area of the outer circumferential surface of the measurement object S.

As shown in Figures 14(b) and (c), the rotation unit 190 rotates the measurement object S at angular intervals (predetermined angular pitch) that are integer multiples of a predetermined angle so that multiple portions of the outer circumferential surface of the measurement object S that are not represented by the first three-dimensional shape data are sequentially directed toward the light receiving unit 120. In addition, each time the measurement object S rotates by a predetermined angle, an image is captured using pattern light, and the second and third three-dimensional shape data are generated. Three-dimensional shape images corresponding to the second and third three-dimensional shape data, respectively, are shown in Figures 14(e) and (f).

In this way, by repeatedly rotating the measurement object S through a predetermined angle and capturing an image of the measurement object S, multiple pieces of three-dimensional shape data corresponding to multiple parts of the outer peripheral surface of the measurement object S are generated. By synthesizing the multiple generated three-dimensional shape data, three-dimensional shape data covering a wide range of the surface of the measurement object S (in this example, the entire outer peripheral surface) is generated. In the following explanation, the synthesis for expanding the target range for shape measurement of the measurement object S in the rotation direction based on the rotation axis RA is called rotational direction synthesis.

[3] Calibration function when performing rotational direction synthesis (1) Overview of the calibration function As described above, when performing rotational direction synthesis, the measurement object S rotates at a predetermined angular pitch from a predetermined angular position (hereinafter referred to as the reference angular position) with the rotation axis RA as a reference. In addition, three-dimensional shape data of the measurement object S is generated when it is at the reference angular position, and three-dimensional shape data of the measurement object S is generated each time it is rotated at the predetermined angular pitch.

If the rotation axis RA of the rotation unit 190 deviates from the design position defined in the device coordinate system due to changes in the temperature environment or use of the measurement section 100 over time, accurate three-dimensional shape data cannot be obtained. Therefore, the shape measuring device 500 according to this embodiment has first, second and third calibration functions to offset the deviation (amount of deviation and direction of deviation) of the generated three-dimensional shape data relative to the device coordinate system when measuring the shape of the measurement target S using rotational direction synthesis. The first, second and third calibration functions will be described in order.

(2) First Calibration Function FIG. 15 is a diagram for explaining the first calibration function. FIG. 15(a) shows a side view of the holding part 191 of the rotation unit 190 as seen in the Y direction. As shown in FIG. 15(a), in the holding part 191, a part of the rotation support shaft 91 located between the rotation drive part 192 and the holding pieces 92, 93 is used as a first marker M1 for the first calibration function. This first marker M1 has a cylindrical outer peripheral surface and is provided so that its center is located on the rotation axis RA of the rotation unit 190. The dimensions of the outer peripheral surface of the first marker M1 are known and are stored, for example, in the storage device 240 of FIG. 1.

In FIG. 15(a), it is assumed that the rotation axis RA of the rotation unit 190 is shifted parallel to the ideal rotation axis DRA (hereafter referred to as the design rotation axis) that should exist in the device coordinate system according to the design. In this case, in order to obtain accurate three-dimensional shape data for the measurement target S, it is necessary to calculate the deviation sv between the design rotation axis DRA and the rotation axis RA.

Therefore, in the first calibration function, when measuring the shape of the rotating measurement object S, the shape of the outer peripheral surface of the first marker M1 is measured together with the measurement object S. For example, when the measurement object S rotates around the rotation axis RA from the reference angle position at a pitch of 120°, three-dimensional shape data is generated that indicates the outer peripheral surface of the first marker M1 together with the measurement object S at each of the angular positions of 0°, 120°, and 240°.

The three-dimensional shape data of the first marker M1 corresponding to each of the above three angles has an arc shape, for example, in the Q-Q cross section (YZ plane perpendicular to the X direction) passing through the first marker M1 in FIG. 15(a). As described above, the dimensions of the outer peripheral surface of the first marker M1 are known. Therefore, as shown by the thick solid line in FIG. 15(b), the center CM1 of the first marker M1 in the YZ plane can be calculated based on the three-dimensional shape data of the arc shape showing a part of the outer peripheral surface of the first marker M1. Note that the circle shown by the dashed line in FIG. 15(b) represents the three-dimensional shape data of the first marker M1 that should originally be generated based on the design rotation axis DRA.

The center of the first marker M1 is located on the rotation axis RA. Therefore, in the first calibration function, calculating the center of the first marker M1 in a specific YZ plane is equivalent to calculating the position of the rotation axis RA in the specific YZ plane.

The center CM1 of the first marker M1 on the three-dimensional shape data should essentially overlap with the design rotation axis DRA in the YZ plane. However, if the actual rotation axis RA is offset from the design rotation axis DRA as described above, the center CM1 of the first marker M1 on the three-dimensional shape data will not overlap with the design rotation axis DRA. Therefore, the deviation sv between the center CM1 of the first marker M1 on the three-dimensional shape data and the design rotation axis DRA is calculated.

In this case, as shown in FIG. 15(c), the three-dimensional shape data of the first marker M1 corresponding to each of the multiple angular positions can be corrected to offset the deviation sv calculated at that angular position, thereby making it possible to obtain accurate three-dimensional shape data. In other words, the three-dimensional shape data of the first marker M1 generated at each angular position can be corrected so that the center CM1 of the first marker M1 on the three-dimensional shape data coincides with the design rotation axis DRA, thereby making it possible to obtain accurate three-dimensional shape data.

Therefore, the three-dimensional shape data of the measurement object S generated together with the three-dimensional shape data of the first marker M1 is corrected so that the deviation sv calculated at each angular position is offset. This makes it possible to obtain accurate three-dimensional shape data for the measurement object S. As a result, when three-dimensional shape data generated at multiple angular positions is synthesized, it becomes possible to perform accurate shape measurement of the measurement object S over a wide range.

(3) Second Calibration Function Figure 16 is a diagram for explaining the second calibration function. Figure 16(a) shows a side view of the holding portion 191 of the rotation unit 190 as seen in the Y direction. In the example of Figure 16(a), the rotation axis RA of the rotation unit 190 is tilted and deviated from the design rotation axis DRA. In this case, the deviation sv between the design rotation axis DRA and the rotation axis RA varies depending on the position in the X direction. Therefore, even if the three-dimensional shape data of the first marker M1 and the measurement object S is corrected by the first calibration function, accurate three-dimensional shape data cannot be obtained depending on the part of the measurement object S.

Therefore, in the second calibration function, a second marker M2 is used so that accurate three-dimensional shape data can be obtained even if the actual rotation axis RA is inclined relative to the design rotation axis DRA. As shown in the speech bubble in FIG. 16(b), the second marker M2 is composed of a large diameter portion M2a and a small diameter portion M2b. The large diameter portion M2a and the small diameter portion M2b each have a cylindrical shape and are integrally molded so as to be aligned along the axis.

A magnet is built into the large diameter portion M2a. In addition, the end face of the large diameter portion M2a is provided with adhesive or an adhesive sheet to give it adhesiveness. With this configuration, the second marker M2 can be attached and detached to a desired position on the measurement object S, which is made of a ferromagnetic material, by magnetic force, and can be attached and detached to a desired position on the measurement object S, which is made of a non-magnetic material, by adhesive force.

In the second calibration function, for example, a second marker M2 is attached to the portion of the measurement object S that is farthest from the first marker M1. The dimensions of the outer circumferential surface of the large diameter portion M2a and the small diameter portion M2b of the second marker M2 are known and are stored, for example, in the storage device 240 of FIG. 1.

In this state, when measuring the shape of the rotating measurement object S, the measurement object S is rotated to a number of predetermined angular positions. In addition, at each of the multiple angular positions, the shape of the outer circumferential surface of the first marker M1 and the second marker M2 is measured together with the measurement object S. At this time, the deviation sv between the design rotation axis DRA and the rotation axis RA is obtained, for example, in the cross section of line Q1-Q1 passing through the first marker M1 in FIG. 16(b) by the method described in the first calibration function.

The second marker M2 is used to determine the deviation sv between the design rotation axis DRA and the rotation axis RA in, for example, the Q2-Q2 line cross section passing through the second marker M2 in FIG. 16(b). Specifically, for the second marker M2, three-dimensional shape data of a plurality of arc shapes corresponding to a plurality of predetermined angular positions is generated so that the entire circumference of the large diameter portion M2a (or small diameter portion M2b) is covered in the Q2-Q2 line cross section. After that, the three-dimensional shape data of the plurality of arc shapes is synthesized so that it matches the known dimensions of the large diameter portion M2a (or small diameter portion M2b) at each of the plurality of angular positions.

In this case, as shown in FIG. 16(c), it is possible to calculate the center CM2 of the second marker M2 when the second marker M2 is located at each of a number of angular positions on the Q2-Q2 line cross section. This makes it possible to calculate the position of the rotation center of the second marker M2, i.e., the rotation axis RA, on the Q2-Q2 line cross section. Then, the deviation sv between the calculated rotation axis RA and the design rotation axis DRA is calculated.

In this way, the deviation sv at the position of the Q1-Q1 line cross section and the deviation sv at the position of the Q2-Q2 line cross section, which are spaced apart from each other in the X direction, are calculated. This makes it possible to properly calculate the correction amount of the measurement object S located between the first marker M1 and the second marker M2 based on the two calculated deviations sv. Therefore, more accurate three-dimensional shape data can be obtained for the measurement object S. As a result, when three-dimensional shape data generated at multiple angular positions is synthesized, it becomes possible to perform more accurate shape measurement of the measurement object S over a wide range.

As described above, the second calibration function calculates the deviation sv of the rotation axis at the position of the second marker M2 in the X direction. Therefore, depending on the shape of the measurement object S, the three-dimensional shape data may be corrected using only the deviation sv of the rotation axis at the position of the second marker M2. In this embodiment, the configuration function for correcting the three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2 is included in the second calibration function.

When correcting the three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2, the second marker M2 may be positioned so as to be located between the measurement object S and the holding unit 191 in the X direction.

Figure 17 is a diagram for explaining an example of a case where three-dimensional shape data is corrected using only the deviation sv of the rotation axis at the position of the second marker M2. As shown in Figure 17, in this example, the small diameter portion M2b of the second marker M2 is held by the holding portion 191. In addition, a measurement object S, for example, having a disk shape, is attached to the end face of the large diameter portion M2a of the second marker M2. The measurement object S in Figure 17 does not have a longitudinal shape that extends in one direction. Therefore, even when three-dimensional shape data is corrected based only on the deviation sv calculated at the position of the second marker M2 adjacent to the measurement object S in the X direction, three-dimensional shape data with relatively high accuracy can be obtained.

(4) Third Calibration Function In the third calibration function, calibration tools corresponding to the above-mentioned first marker M1 and second marker M2 are not used. In the third calibration function, when measuring the shape of the rotated measurement target S, the deviation sv between the rotation axis RA and the design rotation axis DRA is calculated based on a plurality of three-dimensional shape data generated for the measurement target S at a plurality of predetermined angular positions.

Figure 18 is a diagram for explaining the third calibration function. Figure 18 (a) shows a cross section perpendicular to the X direction of the measurement object S held by the rotation unit 190. In the third calibration function, multiple angular positions are set so that three-dimensional shape data of overlapping parts in the rotation direction of the measurement object S is generated. Then, as shown by the white arrow in Figure 18 (a), the surface of the measurement object S is imaged at multiple angular positions, and multiple three-dimensional shape data corresponding to the multiple angular positions are generated. In Figure 18 (a), some (three) of the multiple three-dimensional shape data corresponding to the multiple angular positions are shown in a balloon as data DAa, DAb, and DAc. Data DAa, DAb, and DAc are shown by dotted lines, solid lines, and dashed lines, respectively. Between data DAa and DAb, the part within the dotted line frame is an overlapping part indicating a common part in the measurement object S. Between data DAb and DAc, the part within the dashed line frame is an overlapping part. These overlapping areas can be identified by detecting specific shapes (surfaces or irregularities) from the generated 3D shape data.

Next, assuming that the center of rotation of the measurement target S is located on the design rotation axis DRA, for example, multiple three-dimensional shape data corresponding to multiple angular positions are placed on a virtual plane perpendicular to the X direction. In this case, if the deviation sv between the rotation axis RA and the design rotation axis DRA is large, a large deviation will occur between the overlapping portion of one of the two adjacent data and the overlapping portion of the other data, as shown in Figure 18(b).

Therefore, a convergence calculation is performed to find the true rotation axis RA of the measurement object S based on multiple three-dimensional shape data corresponding to multiple angular positions so that the deviation between the overlapping parts of each two adjacent data is minimized. The multiple three-dimensional shape data are corrected based on the deviation between the calculated rotation axis RA and the design rotation axis DRA. This makes it possible to obtain accurate three-dimensional shape data for the measurement object S, as shown in FIG. 18(c). As a result, when three-dimensional shape data generated at multiple angular positions is synthesized, it becomes possible to perform shape measurement of the measurement object S over a wide range while reducing the decrease in measurement accuracy. Note that, in FIGS. 18(b) and (c), only data DAa, DAb, and DAc are shown among the multiple three-dimensional shape data corresponding to the multiple angular positions in FIG. 18(a).

[4] Shape measurement procedure of measurement object S using shape measuring device 500 Figures 19 and 20 are flowcharts showing the shape measurement procedure of measurement object S using shape measuring device 500 of Figure 1. In an initial state, the power supply of shape measuring device 500 is on. In addition, in shape measuring device 500, illumination light is irradiated from illumination light output unit 130 toward upper surface 141s of stage 140, except when imaging for shape measurement using pattern light is performed. At this time, an image based on image data acquired in real time by light receiving unit 120 (hereinafter referred to as a live image) is displayed on display unit 400 of Figure 1.

First, the user determines whether or not the rotation unit 190 is necessary to measure the shape of the desired portion of the measurement object S (step S1). If the rotation unit 190 is necessary, the user determines whether or not the rotation unit 190 is attached to the stage 140 (step S2). If the rotation unit 190 is not attached to the stage 140, the user attaches the rotation unit 190 to the stage 140 (step S3).

With the rotation unit 190 attached to the stage 140 in step S2 or step S3, the user attaches the measurement object S to the holder 191 of the rotation unit 190 so that at least a portion of the measurement object S is located in the measurement space 101 (step S4). This allows the measurement object S to be held rotatably around the rotation axis RA. Next, the user adjusts the position of the focal plane 120F of the light receiving unit 120 relative to the measurement object S (step S5). Specifically, the user adjusts the height of the upper surface 141s of the stage 140 so that the focal plane 120F of the light receiving unit 120 is aligned with the measurement object S by operating the stage operation unit 145 or operation unit 250 in FIG. 1 while visually checking the live image.

Next, the user sets the area (hereinafter referred to as the measurement area) to be imaged by the light receiving unit 120 within a surface (e.g., a horizontal plane) on the stage 140 perpendicular to the Z direction (step S6). As a result, even if the entire top surface of the measurement target S does not fit within the measurement space 101, multiple measurement areas are set and three-dimensional shape data for those measurement areas is generated, making it possible to perform planar direction synthesis.

The measurement area is set by the user by operating a region setting screen displayed on the display unit 400, which will be described later. When setting the measurement area, the Z-direction imaging range may be determined in order to perform the above-mentioned height direction synthesis in the Z direction. Details of setting the measurement area will be described later.

If the rotation unit 190 is not required in step S1 above, the user places the measurement object S on the stage 140 so that at least a portion of the measurement object S is located in the measurement space 101 (step S11). Next, the user adjusts the position of the focal plane 120F of the light receiving unit 120 relative to the measurement object S (step S12) and sets the measurement area (step S13), similar to steps S5 and S6 above.

Then, the user operates the operation unit 250 to command the start of imaging using pattern light for the set measurement area (step S7). As a result, the set measurement area is irradiated with pattern light and an image is taken. In addition, three-dimensional shape data for the measurement area is generated.

Next, the user confirms the three-dimensional shape data generated in step S7 as the shape measurement result of the measurement object S (step S21), and determines whether the three-dimensional shape data has any missing parts (step S22). If the three-dimensional shape data has no missing parts, the user saves the three-dimensional shape data in the working memory 230 or storage device 240 in FIG. 1, and analyzes the shape of the measurement object S based on the three-dimensional shape data (step S23). This completes the series of operations.

If there is a missing part in the three-dimensional shape data in step S22, the user adds a measurement area so that the part of the measurement target S corresponding to the missing part in the three-dimensional shape data is imaged (step S24). Next, the user operates the operation unit 250 to command the start of imaging using pattern light for the additionally set measurement area (step S25). This generates three-dimensional shape data indicating the shape of the additionally set measurement area. The user also operates the operation unit 250 to combine the three-dimensional shape data generated by the operation of step S25 with the three-dimensional shape data generated by the operation of step S7 (step S26). This operation of step S26 may be omitted if it is performed automatically by the CPU 210. The user then proceeds with the operation of step S23 above.

In the shape measuring device 500 according to this embodiment, the CPU 210 in FIG. 1 is configured to be able to set the measurement area in one of three modes when measuring the shape of the measurement object S that involves rotation by the rotation unit 190. These three modes are called the first box-shaped area setting mode, the second box-shaped area setting mode, and the axis-shaped area setting mode.

The first box-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while rotating a box-shaped measurement object S 360° around the rotation axis RA. The second box-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while rotating a box-shaped measurement object S within a predetermined angle range (e.g., 180°) around the rotation axis RA. The axial-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while placing an axial-shaped measurement object S extending along the rotation axis RA and rotating it 360° around the rotation axis RA.

Here, the procedure for setting the measurement area in step S6 above will be described in detail. FIG. 21 is a flowchart showing the procedure for setting the measurement area for performing shape measurement of the measurement target S involving rotation. The user performs the following setting tasks by operating the area setting screen, which will be described later, using the operation unit 250.

The user selects one of the first box-shaped area setting mode, the second box-shaped area setting mode, and the axis-shaped area setting mode as the mode of the CPU 210 for setting the measurement area (step S31).

Specifically, this selection is performed as follows. First, the user subjectively determines whether the shape of the measurement object S belongs to a box shape or an axis shape. If the user then determines that the shape of the measurement object S belongs to an axis shape, the user selects the axis shape region setting mode.

On the other hand, if the user determines that the shape of the measurement object S belongs to a box shape, the user further determines the portion of the measurement object S to be measured. Then, if the user wishes to measure the shape of the measurement object S over the entire circumference (360°) around the rotation axis RA, the user selects the first box-shaped area setting mode. On the other hand, if the user wishes to measure the shape of the measurement object S over a partial range (e.g., 180°) around the rotation axis RA, the user selects the second box-shaped area setting mode.

Next, the user issues a command to start provisional setting of the measurement area (step S32). In this case, in response to the command to provisionally set the measurement area, the CPU 210 sets a provisional measurement area for the current measurement object S. As a result, an image showing the positional relationship between the measurement object S and the measurement area in a plan view (hereinafter referred to as the area setting map image) is displayed on the display unit 400.

The user then checks the provisionally set measurement area while visually checking the area setting map image displayed on the display unit 400 (step S33). The user also determines whether the measurement area shown in the area setting map image is appropriate (step S34). If the measurement area is not appropriate, the user corrects the measurement area (step S35).

If the measurement area is appropriate in step S34 or if the measurement area is corrected in step S35, the user determines whether or not to use the marker calibration function (the first or second calibration function described above) (step S36). If the marker calibration function is not used, the measurement area set at the time of step S36 is set as the correct setting area. This completes the setting of the measurement area.

On the other hand, in step S36, if the marker-based calibration function is to be used, the user selects at least one of the first marker M1 and the second marker M2 as the marker for the calibration function (step S37). Here, if the second marker M2 is selected, the user attaches the second marker M2 to the measurement target S. After that, the user modifies the measurement area so that the marker selected in step S37 is imaged by the light receiving unit 120 (step S38). This completes the setting of the measurement area.

The procedure for setting the measurement area in step S13 above, i.e., the procedure for setting the measurement area when measuring the shape of the measurement object S without rotation, is the same as the setting procedure in steps S32 to S35 in FIG. 21, except that steps S31 and S36 to S38 are omitted.

[5] Various Screens Displayed on the Display Unit 400 (1) Measurement Basic Screen Displayed in Initial State Fig. 22 is a diagram showing an example of a measurement basic screen displayed on the display unit 400 when the power supply of the shape measuring device 500 is turned on in a state in which the rotation unit 190 is not attached to the stage 140. As shown in Fig. 22, the measurement basic screen 401 includes a main display area 410 and a sub-display area 420 arranged side by side. In the measurement basic screen 401, a live image is displayed in the main display area 410. As a result, for example, when the measurement target S is placed on the stage 140 so as to be located in the measurement space 101, an object image SI showing the surface state of the measurement target S is displayed in the main display area 410.

22, a horizontal movement operation window 411 for moving the top surface 141s of the stage 140 in the XY directions is displayed superimposed on the live image. In the horizontal movement operation window 411, a plurality of movement buttons 412 (eight in this example) for moving the top surface 141s of the stage 140 in a plurality of different directions are displayed. This allows the user to operate the pointer on the basic measurement screen 401 using the operation unit 250 in FIG. 1, and click, for example, one of the plurality of movement buttons 412. This allows the top surface 141s of the stage 140 to be moved relatively in the XY directions with respect to the measurement space 101, and the imaging area of the light receiving unit 120 to be moved.

In the basic measurement screen 401 of FIG. 22, a sub-display area 420 displays multiple buttons and images related to measuring the shape of the measurement target S. Specifically, the sub-display area 420 of the basic measurement screen 401 displays an area setting button 421, an edit button 422, an area clear button 423, a field of view confirmation image 424, a measurement start button 425, and an upper surface removal button 429.

The area setting button 421 is a button that allows the user to command the setting of a measurement area. For example, the user operates the area setting button 421 when setting the measurement area in step S13 above. This causes the display unit 400 to display an area setting screen 402 in FIG. 23 (described later) instead of the basic measurement screen 401 in FIG. 22.

The edit button 422 is a button that allows the user to modify the measurement area settings. For example, the user can modify and add to the measurement area settings by operating the edit button 422 while setting the measurement area in step S13 above. Even when the edit button 422 is operated by the user, the area setting screen 402 in FIG. 23 (described later) is displayed on the display unit 400 instead of the basic measurement screen 401 in FIG. 22. The area clear button 423 is a button that allows the user to reset the measurement area settings.

The view confirmation image 424 is an image that indicates where the imaging area (imaging field of view) of the light receiving unit 120 is located, for example, on the top surface 141s of the stage 140. In the view confirmation image 424, a rectangular indicator indicating the current imaging area of the light receiving unit 120 is superimposed on a plan view of the top surface 141s of the stage 140. In addition, after the measurement area is set, the view confirmation image 424 displays an indicator indicating the imaging area of the light receiving unit 120 and an indicator indicating the set measurement area in a manner that is distinguishable from the indicator of the imaging area. In the view confirmation image 424 of FIG. 22, the indicator indicating the current imaging area of the light receiving unit 120 is shown by a solid line. In addition, the indicator indicating the measurement area currently set is shown by a dotted line.

The measurement start button 425 is a button for the user to command the start of imaging of the measurement object S using pattern light, for example, in step S7 above, in order to obtain three-dimensional shape data of the measurement object S. When the user operates the measurement start button 425 after setting the measurement area, the set measurement area is imaged and three-dimensional shape data of the measurement object S is generated. The top surface removal button 429 is a button for the user to command that the three-dimensional shape data of the top surface 141s of the stage 140 should be removed from the measurement results. Note that the basic measurement screen 401 in FIG. 22 also displays a magnification switching button (not shown). This allows the user to operate the magnification switching button to observe the surface condition of the measurement object S based on the live image displayed at the desired magnification.

(2) Region setting screen for performing shape measurement of the measurement target S without rotation Fig. 23 is a diagram showing an example of a region setting screen displayed on the display unit 400 by operating the region setting button 421 in Fig. 22. As shown in Fig. 23, the region setting screen 402 includes a main display region 410 and a sub-display region 420, similar to the basic measurement screen 401.

When the area setting button 421 in FIG. 22 is operated, the entire measurement object S placed on the stage 140, for example, is automatically imaged by the light receiving unit 120. At this time, if the entire measurement object S does not fit within the imaging area of the light receiving unit 120, the upper surface 141s of the stage 140 is moved in the XY directions relative to the light receiving unit 120, and imaging is repeated multiple times. Based on the image of the measurement object S obtained by imaging, the area where the measurement object S exists (hereinafter referred to as the existence area) is detected within a surface (e.g. a horizontal plane) on the stage 140 perpendicular to the Z direction. The detected existence area is then provisionally set as a temporary measurement area.

In the area setting screen 402 of FIG. 23, an area setting map image is displayed in the main display area 410. Here, the measurement area is set so that at least a portion of the area of the measurement space 101 that the light receiving unit 120 can image at one time is defined as a unit area, and one or more unit areas are lined up on the stage 140. Therefore, in the area setting map image, as shown by dotted lines in FIG. 23, indicators indicating the unit areas that make up the measurement area are displayed as unit area frames MM together with the object image SI. In the example of FIG. 23, four unit area frames MM are displayed so as to cover the entire object image SI.

Furthermore, in the area setting screen 402 of FIG. 23, a message is displayed in the sub-display area 420 to adjust the position and size of the measurement area on the area setting map image. In addition, an exclude button 426, an OK button 427, and a cancel button 428 are displayed. The user can adjust the position and size of each unit area frame MM on the area setting map image by operating the pointer on the area setting screen 402. The user can also add a unit area frame MM. In this way, the user can easily expand or reduce the measurement area in the X and Y directions on the area setting map image.

The exclusion button 426 is a button that allows the user to specify an area in the area setting map image that is determined to be unnecessary for shape measurement as an exclusion area. After operating the exclusion button 426, the user can specify one of the multiple unit area frames MM on the area setting map image to exclude the portion of that unit area frame MM from the measurement area.

The OK button 427 is a button that allows the user to indicate that setting of the measurement area using the area setting map image is complete. When the user operates the OK button 427, the information of the measurement area set at the time of operating the OK button 427 is stored as regular setting information in the working memory 230 or storage device 240 in FIG. 1. The display unit 400 redisplays the basic measurement screen 401 in FIG. 22 that was displayed immediately before, in place of the area setting screen 402 in FIG. 23.

The cancel button 428 is a button that allows the user to reset the information of the measurement area set on the currently displayed area setting screen 402 while displaying the basic measurement screen 401 of FIG. 22 on the display unit 400.

(3) Basic measurement screen displayed when rotation unit 190 is connected With the basic measurement screen 401 of Fig. 22 displayed on the display unit 400, the user attaches the rotation unit 190 to the stage 140 by performing the operation of step S3 described above. In this case, the basic measurement screen 401 changes from the display state of Fig. 22. Fig. 24 is a diagram showing an example of the basic measurement screen 401 displayed on the display unit 400 with the rotation unit 190 attached to the stage 140.

As shown in FIG. 24, when the rotation unit 190 is connected to the stage 140, a rotation operation window 413 is superimposed on the live image in addition to the horizontal movement operation window 411 of FIG. 22 in the main display area 410.

In the rotation operation window 413, an origin button 414, a forward rotation button 415, and a reverse rotation button 416 are displayed. The origin button 414 is a button for returning the angular position of the holding portion 191 of the rotation unit 190 to a reference angular position in the direction of rotation around the rotation axis RA.

The forward rotation button 415 is a button for rotating the holding part 191 of the rotation unit 190 in one direction around the rotation axis RA, and the reverse rotation button 416 is a button for rotating the holding part 191 of the rotation unit 190 in the reverse direction around the rotation axis RA. With the measurement object S held at the tip of the holding part 191, the user can operate the pointer on the basic measurement screen 401 using the operation unit 250 in FIG. 1 and click, for example, either the forward rotation button 415 or the reverse rotation button 416. This allows the measurement object S to be rotated in the desired direction around the rotation axis RA on the stage 140.

The rotation operation window 413 further displays a holding part mark 417, a reference attitude mark 418, and a number of measurement angle position marks 419. The holding part mark 417 is a circular mark that shows the outline of the holding part 191 as seen in the X direction. The reference attitude mark 418 shows an angular position (hereinafter referred to as the reference attitude position) facing a specific surface of the measurement object S held by the holding part 191, and the reference attitude position is set by the CPU 210 or the user according to a predetermined method. For example, the reference attitude position may be the angular position of the measurement object S when the measurement object S is imaged with the widest area by the light receiving unit 120 as the measurement object S rotates around the rotation axis RA.

When measuring the shape of the measurement object S involving rotation, multiple angular positions to be imaged by the light receiving unit 120 are set as measurement angular positions in order to measure the shape of multiple portions of the measurement object S around the rotation axis RA. The measurement angular position mark 419 indicates the measurement angular position currently set, and is placed on the circle of the holding unit mark 417. In the example of FIG. 24, multiple measurement angular position marks 419 are lined up on the circle of the holding unit mark 417 at angular intervals of 45° with the center of the holding unit mark 417 as the reference.

When the rotation unit 190 is connected to the stage 140, the sub-display area 420 displays a number of other buttons in addition to the various buttons (421-425, 429) and view confirmation image 424 shown in FIG. 22. Specifically, the sub-display area 420 further displays a rotation on button 431, a rotation off button 432, a box full circumference button 434, a box portion button 435, an axis button 436, and a rotation details button 437.

The rotation on button 431 is operated by the user to perform shape measurement of the measurement object S involving rotation, i.e., shape measurement using the rotation function of the rotation unit 190. When the user operates the rotation on button 431, the operation of the box circumference button 434, box portion button 435, axis button 436, and rotation details button 437 described below becomes effective, enabling various settings for planar direction synthesis and rotational direction synthesis. Note that at this time, the operation of the area setting button 421 is disabled.

The rotation off button 432 is operated by the user to perform shape measurement of the measurement object S without rotation, i.e., shape measurement without using the rotation function of the rotation unit 190. When the user operates the rotation off button 432, the operation of the box circumference button 434, box portion button 435, axis button 436, and rotation details button 437 described below is disabled, and various settings for rotational direction synthesis become impossible. Note that at this time, the operation of the area setting button 421 is enabled. This allows various settings for planar direction synthesis.

The box circumference button 434 is a button that is operated when the user selects the first box-shaped area setting mode as the mode of the CPU 210 for setting the measurement area in the operation of step S31 described above. The box portion button 435 is a button that is operated when the user selects the second box-shaped area setting mode as the mode of the CPU 210 for setting the measurement area. The axis button 436 is a button that is operated when the user selects the axis-shaped area setting mode as the mode of the CPU 210 for setting the measurement area. The rotation details button 437 is a button that is operated when the user wants to set the measurement area in detail regardless of the mode predetermined by the CPU 210.

In addition, in the field of view confirmation image 424 in FIG. 24, an index indicating the measurement area set at the current angular position of the measurement target S is superimposed on the plan view of the top surface 141s of the stage 140 together with a rectangular index indicating the current imaging area of the light receiving unit 120.

With the rotation on button 431 operated, any one of the box circumference button 434, box portion button 435, axis button 436, and rotation details button 437 is operated. This causes the area setting screen corresponding to the operated button to be displayed on the display unit 400. Below, we will explain the area setting screen that is displayed on the display unit 400 when each button (434, 435, 436, 437) for setting the measurement area is operated.

(4) Area setting screen for performing shape measurement of the measurement target S with rotation In this embodiment, it is assumed that a plurality of measurement angle positions are stored in the storage device 240 as default information for each measurement area setting mode. When the box portion button 435 in Fig. 24 is operated, that is, when the user selects the second box-shaped area setting mode as the measurement area setting mode, a plurality of measurement angle positions corresponding to that mode are read out from the storage device 240 and set. Note that the plurality of measurement angle positions may be set by designation by the user.

In this example, 0° (reference angle position), 45°, 90°, 135°, and 180° are set as the measurement angle positions. In this case, the presence area of the measurement target object S at each measurement angle position is detected, and an area consisting of one or more unit areas is provisionally set as a provisional measurement area at that measurement angle position so as to cover the detected presence area. This setting content, i.e., the measurement area associated with each measurement angle position, is stored, for example, in either the working memory 230 or the storage device 240.

Figure 25 is a diagram for explaining the operation of the shape measuring device 500 that is executed in response to the operation of the box portion button 435 in Figure 24. Figures 25(a) to (e) show external views (end views) of the measurement target S in the X direction when it is in the angular positions of 0°, 45°, 90°, 135°, and 180°, respectively. In Figures 25(a) to (e), the portion of the surface of the measurement target S that is the subject of shape measurement is shown by a thick solid line.

For example, as shown in FIG. 25(a), first, the measurement object S is positioned at a measurement angle position of 0°. Then, similar to the example of FIG. 23, the entire measurement object S is automatically imaged by the light receiving unit 120. FIG. 25(f) shows an example of an image of the measurement object S imaged in the state of FIG. 25(a). An existence region is detected based on the image of the measurement object S that has been imaged. Then, an area that includes the detected existence region and is composed of one or more unit regions is provisionally set as a provisional measurement region that corresponds to the measurement angle position of 0°.

Next, as shown in FIG. 25(b), the measurement object S is rotated around the rotation axis RA and positioned at a measurement angle position of 45°. The entire measurement object S is then automatically imaged by the light receiving unit 120. FIG. 25(g) shows an example of an image of the measurement object S imaged in the state of FIG. 25(b). An existence region is detected based on the image of the measurement object S that has been imaged. Then, an area that includes the detected existence region and is composed of one or more unit regions is provisionally set as a provisional measurement region corresponding to the measurement angle position of 45°.

Then, the rotation, positioning and imaging of the measurement object S are repeated to detect the presence area. Figures 25(h), (i) and (j) show images of the measurement object S captured at measurement angle positions of 90°, 135° and 180°, respectively. An area including the presence area detected at each measurement angle position and consisting of one or more unit areas is provisionally set as a provisional measurement area corresponding to that measurement angle position. A plurality of provisional measurement areas corresponding to the plurality of measurement angle positions set in this way are displayed on the display unit 400.

Figure 26 is a diagram showing an example of a region setting screen displayed on the display unit 400 by operating the box portion button 435 in Figure 24. In the region setting screen 403 in Figure 26, a region setting map image corresponding to each of a plurality of measurement angle positions (0°, 45°, 90°, 135°, and 180°) is displayed in the main display area 410.

In addition, in the area setting screen 403 of FIG. 26, an angle position list 441 is displayed in the sub-display area 420 together with an edit button 422, an OK button 427, and a cancel button 428. The angle position list 441 shows a number of measurement angle positions that are currently set. The user selects a desired measurement angle position from the multiple measurement angle positions displayed in the angle position list 441, and operates the edit button 422. This allows the user to easily expand or reduce the measurement area in the X and Y directions on the area setting map image that corresponds to the selected measurement angle position, similar to the example of FIG. 23.

When rotating a box-shaped measurement object S, the range of the existence area in the Y direction is likely to change significantly at multiple measurement angle positions. Therefore, the measurement area editing function described above is very effective for setting the measurement area for a box-shaped measurement object S.

When the OK button 427 is operated on the area setting screen 403 in FIG. 26, the setting of the measurement area is considered to be complete, and the basic measurement screen 401 in FIG. 24 is redisplayed on the display unit 400. On the other hand, when the cancel button 428 is operated, the information about the measurement area set on the area setting screen 403 is reset, and the basic measurement screen 401 in FIG. 24 is redisplayed on the display unit 400.

When the box circumference button 434 in FIG. 24 is operated, that is, when the user selects the first box-shaped area setting mode as the measurement area setting mode, multiple measurement angle positions corresponding to that mode are read from the storage device 240 and set. Note that the multiple measurement angle positions may be set by the user's specification.

In this example, 0° (reference angle position), 45°, 90°, 135°, 180°, 225°, 270°, and 315° are set as the multiple measurement angle positions. In this case, similar to when the box portion button 435 in FIG. 24 is operated, the presence area of the measurement target object S at each measurement angle position is detected, and an area including the detected presence area and consisting of one or more unit areas is provisionally set as a provisional measurement area at that measurement angle position. A plurality of provisional measurement areas corresponding to the multiple set measurement angle positions are displayed on the display unit 400.

Figure 27 is a diagram showing an example of a region setting screen displayed on the display unit 400 when the box circumference button 434 in Figure 24 is operated. In the region setting screen 404 in Figure 27, a region setting map image corresponding to each of a plurality of measurement angle positions (0°, 45°, 90°, 135°, 180°, 225°, 270°, and 315°) is displayed in the main display area 410.

In addition, in the area setting screen 404 of FIG. 27, similar to the area setting screen 403 of FIG. 26, an edit button 422, an OK button 427, a cancel button 428, and an angle position list 441 are displayed in the sub-display area 420. This allows the user to modify the measurement area settings, issue a command to complete the settings, or issue a command to reset the settings by operating the various buttons (422, 427, 428) and the angle position list 441. Operating the OK button 427 or the cancel button 428 redisplays the basic measurement screen 401 of FIG. 24 on the display unit 400.

When the axis button 436 in FIG. 24 is operated, that is, when the user selects the axis shape area setting mode as the measurement area setting mode, multiple measurement angle positions corresponding to that mode are read from the storage device 240 and set. Note that the multiple measurement angle positions may be set by the user's specification.

In this example, the measurement angle positions are set to 0° (reference angle position), 45°, 90°, 135°, 180°, 225°, 270°, and 315°. Here, when a measurement object S having an axial shape extending in one direction is arranged to extend along a rotation axis RA and rotated around the rotation axis RA, the distance between the outer circumferential surface of the measurement object S and the rotation axis RA is kept substantially constant. Therefore, the existence regions corresponding to the multiple measurement angle positions are considered to be substantially common.

Therefore, when the axis button 436 in FIG. 24 is operated, only the presence area of the measurement target object S when it is at one of the multiple measurement angle positions is detected. Then, an area that includes the detected presence area and is composed of one or more unit areas is provisionally set as a provisional measurement area for all measurement angle positions. The provisional measurement area common to the multiple measurement angle positions is displayed on the display unit 400.

28 is a diagram showing an example of a region setting screen displayed on the display unit 400 by operating the axis button 436 in FIG. 24. In the region setting screen 405 in FIG. 28, a region setting map image corresponding to one measurement angle position (for example, 0°) is displayed in the main display area 410. In addition, in the region setting screen 405 in FIG. 28, an edit button 422, an OK button 427, and a cancel button 428 are displayed in the sub-display area 420. This allows the user to modify the measurement region setting, issue a completion command for the setting, or issue a reset command for the setting by operating the various buttons (422, 427, 428) and the angle position list 441. By operating the OK button 427 or the cancel button 428, the basic measurement screen 401 in FIG. 24 is redisplayed on the display unit 400.

As described above, when the user selects the axis shape area setting mode, the existence area is not detected for all of the multiple measurement angle positions. This reduces the time required to detect the existence area. In addition, in this case, since only one area setting map image corresponding to one measurement angle position is displayed on the display unit 400, the user does not need to check multiple area setting map images. Furthermore, there is no need to adjust the measurement area for each of the multiple measurement angle positions. As a result, the work and time required to set the measurement area can be reduced.

When the user selects the axis shape region setting mode, the user may be able to specify to the CPU 210 a measurement angle position to be displayed by operating the operation unit 250. In this case, the CPU 210 accepts the user's specification of a measurement angle position.

When the Rotation Details button 437 in FIG. 24 is operated, the display mode of the secondary display area 420 changes. FIG. 29 is a diagram showing an example of the secondary display area 420 displayed on the display unit 400 by operating the Rotation Details button 437 in FIG. 24. As shown in FIG. 29, when the Rotation Details button 437 is operated on the basic measurement screen 401 in FIG. 24, the secondary display area 420 displays a reference posture input frame 451, a reference posture registration button 452, an angle condition setting section 453, an angle pitch setting section 454, a measurement count setting section 455, an excluded angle input frame 456, and a synthesis required/unnecessary check box 457, etc.

The reference attitude input frame 451 is configured to allow the user to input a desired angular position. The reference attitude registration button 452 is operated by the user to register the angular position input into the reference attitude input frame 451 as the reference attitude position. By operating the reference attitude registration button 452, the angular position input into the reference attitude input frame 451 is stored as the reference attitude position in the working memory 230 or the storage device 240.

The angle condition setting section 453 is configured to be operable by the user to set how to determine multiple measurement angle positions. Specifically, the angle condition setting section 453 is configured with a pull-down button that allows the user to select a desired setting method from multiple types of setting methods.

The angle pitch setting section 454 is configured so that it can be operated by the user to set the angle interval at which multiple measurement angle positions are set. Specifically, the angle pitch setting section 454 is configured with a pull-down button that allows the user to select a desired angle from multiple types of angles. The measurement count setting section 455 is configured so that it can be operated by the user to set how many times three-dimensional shape data should be generated at the angle interval set in the angle pitch setting section 454. The excluded angle input frame 456 is configured so that the user can input a measurement angle position for which it is not necessary to generate three-dimensional shape data.

The synthesis necessity checkbox 457 is configured to allow the user to select whether or not to synthesize multiple pieces of three-dimensional shape data after multiple pieces of three-dimensional shape data are generated while rotating the measurement object S multiple times at set angle intervals.

When the user wants to combine multiple pieces of three-dimensional shape data, the user checks the combination checkbox 457. This causes multiple pieces of three-dimensional shape data generated at multiple measurement angle positions during shape measurement of the measurement object S to be combined. On the other hand, when the user does not want to combine multiple pieces of three-dimensional shape data, the user does not check the combination checkbox 457. This causes multiple pieces of three-dimensional shape data generated at multiple measurement angle positions during shape measurement of the measurement object S to not be combined. As described above, when the user operates the rotation details button 437 in FIG. 24, the user can make detailed settings for the shape measurement of the measurement object S by further operating the various input frames, buttons, and setting sections shown in FIG. 29.

(5) Correction and Addition of Settings, etc. When the edit button 422 in Figs. 26 to 28 is operated, the display mode of the sub-display area 420 changes. Fig. 30 is a diagram showing an example of the sub-display area 420 displayed on the display unit 400 by operating the edit button 422 in Figs. 26 to 28. As shown in Fig. 30, when the edit button 422 is operated on the area setting screens 402 to 405 in Figs. 26 to 28, a message to adjust the position and size of the measurement area on the area setting map image is displayed in the sub-display area 420, similar to the example in Fig. 23. In addition, an exclude button 426, an OK button 427, and a cancel button 428 are displayed. In addition, a first calibration check box 463 and a second calibration check box 464 are displayed.

The first calibration check box 463 is a check box for setting whether or not to use the first configuration function using the first marker M1 in FIG. 15(a). On the other hand, the second calibration check box 464 is a check box for setting whether or not to use the second configuration function using the second marker M2 in FIG. 16(b).

If the user wishes to use the first configuration function using the first marker M1 in the operation of step S36 above, the user checks the first calibration checkbox 463 in FIG. 30. In this case, it is necessary to set a measurement area so that shape measurement is also performed on the first marker M1. Here, since the first marker M1 is part of the rotation support shaft 91, the presence area of the first marker M1 on the stage 140 is known. Therefore, when the first calibration checkbox 463 is checked, a new measurement area is set to cover the presence area of the first marker M1 in addition to the measurement area currently set.

Figure 31 is a diagram showing an example of a region setting screen displayed on the display unit 400 when the first calibration checkbox 463 in Figure 30 is checked. In the region setting screen 406 in Figure 31, a region setting map image corresponding to a specific measurement angle position (e.g., 0°) is displayed in the main display area 410.

In the area setting map image, the measurement area for generating three-dimensional shape data of the measurement object S is indicated by a plurality of unit area frames MM. Furthermore, in the area setting map image, the measurement area for generating three-dimensional shape data of the first marker M1 is indicated by a plurality of unit area frames MMa.

In FIG. 31, the image of the holding unit 191 and the first marker M1 are indicated by a two-dot chain line. In addition, the image portion of the first marker M1 is hatched so that the position of the first marker M1 can be easily understood.

Here, the unit area frame MMa added corresponding to the first marker M1 is displayed in a manner different from the unit area frame MM (in this example, a thick dashed dotted line) so that it can be distinguished from the unit area frame MM corresponding to the measurement object S. This allows the user to easily understand that a new measurement area has been set in order to use the first calibration function using the first marker M1.

If the user wishes to use the second configuration function using the second marker M2, the user checks the second calibration checkbox 464 in FIG. 30. In this case, it is necessary to set a measurement area so that shape measurement is also performed on the second marker M2. Here, the second marker M2 is attached by the user to the measurement object S in the above-mentioned operation of step S37. Therefore, the user needs to set a new measurement area to cover the presence area of the second marker M2 according to the position of the second marker M2 attached to the measurement object S.

Figure 32 is a diagram showing an example of a region setting screen displayed on the display unit 400 by checking the second calibration checkbox 464 in Figure 30. In the region setting screen 407 in Figure 32, similar to the example of the region setting screen 406 in Figure 31, a region setting map image corresponding to a specific measurement angle position (e.g., 0°) is displayed in the main display area 410.

Furthermore, in the area setting map image, the measurement area for generating three-dimensional shape data of the measurement target S is indicated by a plurality of unit area frames MM, and a marker image M2i for specifying the position of the second marker M2 is displayed. In this state, the user places the marker image M2i at a position on the area setting map image that corresponds to the actual position of the second marker M2, for example, by dragging the marker image M2i.

In the secondary display area 420, a marker inversion checkbox 465, an OK button 427, and a cancel button 428 are displayed. Here, in the shape measuring device 500 according to this embodiment, the basic orientation of the second marker M2 to be attached to the measurement object S when using the second calibration function is determined in advance. For example, the basic orientation of the second marker M2 to be attached to the measurement object S is an orientation in which the axis of the second marker M2 is parallel or nearly parallel to the rotation axis RA and the large diameter portion M2a and the small diameter portion M2b are arranged in this order away from the rotation unit 190. On the other hand, as shown in the example of FIG. 17, the second marker M2 can also be attached to the rotation unit 190 in an inverted orientation in which the basic orientation is inverted in the X direction.

The marker inversion checkbox 465 is a checkbox for setting whether or not the orientation of the second marker M2 is to be inverted in the X direction. FIG. 33 is a diagram showing an example of a region setting screen displayed on the display unit 400 by checking the marker inversion checkbox 465 in FIG. 32. As shown in FIG. 33, by checking the marker inversion checkbox 465 in the region setting screen 407, the orientation of the marker image M2i is inverted left-right relative to the display example in FIG. 32.

After the position and orientation of the marker image M2i is adjusted on the area setting map image as described above, the OK button 427 is operated. This sets a new measurement area so that the area corresponding to the marker image M2i is covered.

Figure 34 is a diagram showing an example of a region setting screen displayed on the display unit 400 in a state in which new measurement regions for the first marker M1 and the second marker M2 have been set. In the region setting screen 408 of Figure 34, the measurement region for generating three-dimensional shape data of the object image SI is shown by a plurality of unit region frames MM in the region setting map image displayed in the main display area 410. In addition, the measurement region for generating three-dimensional shape data of the first marker M1 is shown by a plurality of unit region frames MMa. Furthermore, the measurement region for generating three-dimensional shape data of the second marker M2 is shown by a plurality of unit region frames MMb. This allows the user to easily understand that a new measurement region has been set in order to use the first and second calibration functions using the first marker M1 and the second marker M2.

In the example of FIG. 34, the unit area frame MMa corresponding to the first marker M1, the unit area frame MMb corresponding to the second marker M2, and the unit area frame MM corresponding to the measurement object S are displayed in different, mutually distinguishable manners. This allows the user to easily understand the purpose set for each part of the measurement area.

[6] Top surface removal function Now, assume that the top surface removal button 429 in Figures 22 and 29 is operated as described above, that is, the user issues a command to remove the three-dimensional shape data of the top surface 141s of the stage 140 from the measurement results. In this case, in the shape measuring device 500, a three-dimensional shape image of the measurement object S is displayed on the display unit 400 in a state in which the three-dimensional shape data corresponding to the top surface 141s has been removed from all three-dimensional shape data obtained by imaging the measurement object S (top surface removal function). A specific example of this will be described.

Figure 35 is an external perspective view showing an example of shape measurement of a measurement object S using a rotation unit 190. As shown in Figure 35, in this example, the shape of the measurement object S held by the holding portion 191 using two rod-shaped members 94 is measured while being rotated. In this case, when the upper surface 141s of the stage 140 is positioned within the measurement space 101, three-dimensional shape data indicating the shape of the upper surface 141s is generated together with three-dimensional shape data indicating the shape of the measurement object S.

Figure 36 is a diagram showing an example of a three-dimensional shape image based on all three-dimensional shape data obtained by the shape measurement of Figure 35. In the three-dimensional shape images of Figure 36 and Figure 37 described below, the position (height) in the Z direction is represented by hatching and dot patterns. In the three-dimensional shape image of Figure 36, the part indicated by the hollow arrow represents the upper surface 141s of the stage 140. In this way, when a three-dimensional shape image of the stage 140 is displayed in addition to the measurement object S, it is difficult for the user to grasp the shape of the measurement object S.

As shown in FIG. 36, the three-dimensional shape data corresponding to the top surface 141s of the stage 140 indicates a planar shape having a certain degree of continuous expansion. This three-dimensional shape data can be identified by extracting a data group of a plane having a continuous expansion, and based on whether or not the normal direction of the extracted plane at each measurement angle position is upward and the position in the Z direction is at the position of the designed top surface 141s.

Figure 37 is a diagram in which the three-dimensional shape image corresponding to the upper surface 141s of the stage 140 has been removed from the three-dimensional shape image of Figure 36. The three-dimensional shape image of Figure 37 allows the user to easily and accurately grasp the three-dimensional shape of the measurement target S. Note that the display ranges in the Z direction are different between the three-dimensional shape images of Figures 36 and 37.

[7] Functional configuration of CPU 210 in PC 200 Fig. 38 is a block diagram showing the functional configuration of CPU 210 in Fig. 1. As shown in Fig. 38, CPU 210 includes movement control unit 21a, rotation control unit 21b, imaging control unit 21c, area setting unit 21d, setting screen presentation unit 21e, rotation angle setting unit 21f, three-dimensional shape data generation unit 21g, data synthesis unit 21h, data correction unit 21i, attachment/detachment determination unit 21j, and display control unit 21k. These components are realized by CPU 210 executing a shape measurement program stored in storage device 240. Note that some or all of the above-mentioned multiple components included in CPU 210 may be realized by hardware such as electronic circuits.

The movement control unit 21a controls the stage driving unit 146 so that the position of the upper surface 141s of the stage 140 moves relative to the light receiving unit 120. In other words, the movement control unit 21a adjusts the relative position of the measurement space 101 with respect to the measurement object S by moving the upper surface 141s of the stage 140 with the measurement object S placed on the stage 140. The rotation control unit 21b controls the rotation unit 190 so that the measurement object S rotates sequentially to multiple predetermined measurement angle positions during shape measurement of the measurement object S involving rotation.

The imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S placed on the stage 140 is imaged at low magnification in order to detect the presence area of the measurement object S. The imaging control unit 21c also controls the light projecting units 110A, 110B and the light receiving unit 120 so that the measurement area set by the area setting unit 21d described later is imaged when the measurement object S is at each measurement angle position.

The area setting unit 21d detects the presence area of the measurement object S when the measurement object S is placed on the stage 140 or when the measurement object S held by the rotation unit 190 is at each measurement angle position. The area setting unit 21d also sets the measurement area based on the detection result of the presence area. Furthermore, the area setting unit 21d modifies the set measurement area based on the operation of the operation unit 250 by the user.

The setting screen presentation unit 21e displays an area setting map image on the display unit 400 when the measurement area is set by the area setting unit 21d. In addition, the setting screen presentation unit 21e superimposes unit area frames MM, MMa, MMb on the image of the measurement object S in the area setting map image so that the set measurement area can be identified.

The rotation angle setting unit 21f sets multiple measurement angle positions when a shape measurement of the measurement object S involving rotation is performed. Here, the multiple measurement angle positions corresponding to the first box-shaped area setting mode, the second box-shaped area setting mode, and the shaft-shaped area setting mode, respectively, are stored in the storage device 240 as, for example, default information, as described above.

In this case, when measuring the shape of the measurement target S involving rotation, the rotation angle setting unit 21f sets multiple measurement angle positions by reading multiple measurement angle positions stored in the storage device 240 according to the selected area setting mode. When the user uses the operation unit 250 to operate, for example, the angle pitch setting unit 454 in FIG. 29 to specify a specific angle position, the rotation angle setting unit 21f may set the specified angle position as the measurement angle position.

The three-dimensional shape data generator 21g generates three-dimensional shape data indicating the shape of the measurement target S based on a plurality of image data generated by irradiating the measurement area with pattern light and imaging the measurement area. The three-dimensional shape data generator 21g also generates three-dimensional shape data indicating the shape of the first marker M1 based on a plurality of image data generated by imaging the first marker M1 located in the measurement area. The three-dimensional shape data generator 21g also generates three-dimensional shape data indicating the shape of the second marker M2 based on a plurality of image data generated by imaging the second marker M2 located in the measurement area.

The data synthesis unit 21h performs the above-mentioned planar direction synthesis when three-dimensional shape data of multiple parts of the surface of the measurement object S arranged in the XY direction are generated separately. Also, when three-dimensional shape data of multiple parts of the surface of the measurement object S arranged around the rotation axis RA are generated separately, the data synthesis unit 21h performs the above-mentioned rotation direction synthesis in response to a synthesis instruction from the user. Furthermore, the data synthesis unit 21h synthesizes the three-dimensional shape data generated by planar direction synthesis and the three-dimensional shape data generated by rotation direction synthesis. Also, the data synthesis unit 21h can perform the above-mentioned height direction synthesis when multiple three-dimensional shape data are generated separately in a common measurement area, for example, by imaging the surface of the measurement object S at multiple positions in the Z direction.

When shape measurement of the measurement object S involving rotation is performed, the data correction unit 21i performs a correction process of the three-dimensional shape data according to one of the first to third calibration functions described above, depending on whether the first marker M1 and the second marker M2 are used. Specifically, in the correction process according to the first calibration function, the data correction unit 21i corrects multiple pieces of three-dimensional shape data of the measurement object S corresponding to multiple measurement angle positions, based on the three-dimensional shape data of the first marker M1 and its dimensions.

In addition, in the correction process according to the second calibration function, the data correction unit 21i corrects the multiple three-dimensional shape data of the measurement object S corresponding to the multiple measurement angle positions based on the three-dimensional shape data of the first marker M1 and the second marker M2 and their dimensions. In the correction process according to the second calibration function, if the three-dimensional shape data of the first marker M1 does not exist, the data correction unit 21i corrects the multiple three-dimensional shape data of the measurement object S corresponding to the multiple measurement angle positions based on the three-dimensional shape data of the second marker M2 and its dimensions.

Furthermore, in a correction process according to the third calibration function, the data correction unit 21i corrects multiple pieces of three-dimensional shape data of the measurement object S that correspond to multiple measurement angle positions, based on the overlapping relationship of the three-dimensional shape data of the measurement object S at multiple measurement angle positions.

The attachment/detachment determination unit 21j determines whether the rotation unit 190 is attached to the stage 140. Specifically, the attachment/detachment determination unit 21j determines that the rotation unit 190 is attached to the stage 140 when the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are connected. The attachment/detachment determination unit 21j determines that the rotation unit 190 is not attached to the stage 140 when the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are not connected. Whether the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are connected can be easily determined based on whether electrical signals can be exchanged between the attachment/detachment determination unit 21j and the rotation unit 190.

The display control unit 21k causes the display unit 400 to display a live image of the measurement object S and a three-dimensional shape image of the measurement object S, as well as various setting screens such as the basic measurement screen 401 and area setting screens 402 to 408.

In particular, when the rotation unit 190 is attached to the stage 140, the display control unit 21k causes the display unit 400 to display a horizontal movement operation window 411 and a rotation operation window 413. Furthermore, in this case, the display control unit 21k causes the display unit 400 to display an image for making various settings related to the shape measurement of the measurement target S that involves rotation.

When the rotation unit 190 is not attached to the stage 140, the display control unit 21k causes the display unit 400 to display the horizontal movement operation window 411, but does not cause the display unit 400 to display the rotation operation window 413. In this case, the display control unit 21k also causes the display unit 400 to display an image for making various settings related to the shape measurement of the measurement target S that does not involve rotation.

[8] Shape measurement processing Figures 39 and 40 are flow charts showing an example of shape measurement processing executed by the CPU 210. The shape measurement processing in Figures 39 and 40 is repeatedly performed at a predetermined cycle by the CPU 210 of the PC 200 executing a shape measurement program stored in the storage device 240 while the power supply of the shape measuring device 500 is on. Note that in the initial state, it is assumed that illumination light is irradiated from the illumination light output unit 130 toward the stage 140, and the light receiving unit 120 is capturing an image of the upper surface 141s of the stage 140.

First, as shown in the example of FIG. 22, the display control unit 21k causes the display unit 400 to display a basic measurement screen 401 including a live image and a measurement start button 425, etc., in a state in which the rotation unit 190 cannot be operated (step S101). Therefore, the basic measurement screen 401 displayed in step S101 includes a horizontal movement operation window 411 (FIG. 22) for operating the stage 140, but does not include a rotation operation window 413 (FIG. 24) for operating the rotation unit 190.

Next, the attachment/detachment determination unit 21j determines whether or not the rotation unit 190 is attached to the stage 140 (step S102). If the rotation unit 190 is not attached to the stage 140, the attachment/detachment determination unit 21j advances the process to step S105, which will be described later. On the other hand, if the rotation unit 190 is attached to the stage 140, the display control unit 21k causes the display unit 400 to display the basic measurement screen 401 in a state in which the rotation unit 190 can be operated, as shown in the example of FIG. 24 (step S103). Note that, when making the determination in step S102, the display control unit 21k may cause the display unit 400 to display a message or an indicator indicating whether or not the rotation unit 190 is attached to the stage 140, depending on the determination result.

Next, the attachment/detachment determination unit 21j determines whether the rotation unit 190 is detached or not while the basic measurement screen 401 (FIG. 24) on which the rotation unit 190 can be operated is displayed on the display unit 400 (step S104). If the rotation unit 190 is detached, the attachment/detachment determination unit 21j returns the process to step S101. On the other hand, if the rotation unit 190 is not detached, the movement control unit 21a and the rotation control unit 21b accept a command to adjust the position of the stage 140, etc. (step S105). The position adjustment of the stage 140, etc. is instructed, for example, by the user using the operation unit 250 to operate the horizontal movement operation window 411 (FIGS. 22 and 24) or the rotation operation window 413 (FIG. 24). At this time, the movement control unit 21a moves the upper surface 141s of the stage 140 in the X direction, Y direction, and Z direction in response to the command to adjust the position of the stage 140. Furthermore, the rotation control unit 21b rotates the holding portion 191 of the rotation unit 190 in response to a rotation command for the rotation unit 190 from the user. This allows, for example, the focal position of the light receiving unit 120 to be adjusted.

Then, a measurement area setting process is performed based on the user's operation of the operation unit 250 (step S106). In the measurement area setting process, in shape measurement of the measurement object S involving rotation, multiple measurement angle positions are set and one or more measurement areas are set for each measurement angle position. In addition, in shape measurement of the measurement object S not involving rotation, one or more measurement areas are set. The measurement area setting process executed by the CPU 210 will be described in detail later.

Next, when a measurement area for shape measurement of the measurement object S involving rotation is set, the data synthesis unit 21h receives an instruction as to whether or not to synthesize multiple three-dimensional shape data acquired at multiple measurement angle positions (step S107). This reception is performed, for example, based on whether or not the synthesis necessity check box 457 in FIG. 29 is checked by the user. When measuring the shape of the measurement object S without rotation, the processing of step S107 is skipped. Note that, for example, the basic measurement screen 401 in FIG. 22 or FIG. 24 may be provided with a synthesis necessity input section for specifying whether or not to perform planar direction synthesis and whether or not to perform rotation direction synthesis. In this case, the data synthesis unit 21h may receive an input from the synthesis necessity input section in step S107.

Next, the data correction unit 21i receives an instruction as to whether or not three-dimensional shape data showing the upper surface 141s of the stage 140 is required from the three-dimensional shape data generated by the shape measurement of the measurement target S (step S108). This reception is performed based on, for example, whether or not the upper surface removal button 429 in FIG. 22 or FIG. 24 has been operated by the user.

Next, the imaging control unit 21c determines whether or not a command to start imaging the measurement object S using pattern light has been received (step S109). This reception is performed, for example, based on whether the measurement start button 425 in FIG. 22 or FIG. 24 has been operated by the user. If the command to start imaging has not been received, the imaging control unit 21c determines whether or not a command to return to the initial state has been received (step S112). This determination is performed, for example, based on whether the area clear button 423 in FIG. 22 or FIG. 24 has been operated by the user. If a command to return to the initial state has been received, the imaging control unit 21c returns the process to step S101. If a command to return to the initial state has not been received, the imaging control unit 21c advances the process to step S111, which will be described later.

On the other hand, when a command to start imaging is received, imaging is performed using pattern light for the set measurement area, and three-dimensional shape data is generated based on multiple image data obtained by imaging (step S110).

Specifically, when multiple measurement angle positions are set, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S rotates sequentially around the rotation axis RA to the multiple measurement angle positions set. The movement control unit 21a also controls the stage drive unit 146 so that the set measurement area of the measurement object S placed on the stage 140 or the measurement object S held by the rotation unit 190 is imaged. The imaging control unit 21c also controls the light projectors 110A and 110B and the light receiver 120 so that the set measurement area is imaged. Furthermore, the three-dimensional shape data generation unit 21g generates three-dimensional shape data of the measurement area based on multiple image data obtained by imaging. At this time, the display control unit 21k causes the display unit 400 to display a three-dimensional shape image based on the generated three-dimensional shape data.

When the data synthesis unit 21h is instructed to synthesize multiple pieces of three-dimensional shape data in step S107, the data synthesis unit 21h synthesizes multiple pieces of three-dimensional shape data corresponding to multiple measurement angle positions (rotational direction synthesis). On the other hand, when the data synthesis unit 21h is not instructed to synthesize multiple pieces of three-dimensional shape data in step S107, the data synthesis unit 21h does not synthesize multiple pieces of three-dimensional shape data corresponding to multiple measurement angle positions.

The data correction unit 21i also corrects each of the multiple pieces of three-dimensional shape data before synthesis according to the calibration function enabled in steps S236 and S237 of the measurement area setting process described below. Furthermore, when it is instructed in step S108 that the three-dimensional shape data representing the upper surface 141s is unnecessary, the data correction unit 21i removes the three-dimensional shape data representing the upper surface 141s of the stage 140 from all the generated three-dimensional shape data.

Next, the area setting unit 21d determines whether or not there is a command to reset the measurement area by the user operating the operation unit 250 (step S111). If there is a reset command, the area setting unit 21d returns the process to step S106. On the other hand, if there is no reset command, the area setting unit 21d ends the series of shape measurement processes. At this time, the three-dimensional shape data generating unit 21g stores the generated three-dimensional shape data in the storage device 240 together with various setting information (e.g., multiple measurement angle positions and multiple measurement areas, etc.).

The measurement area setting process included in the shape measurement process will now be described in detail. Note that the measurement area setting process described below corresponds to the shape measurement of the measurement object S that involves rotation by the rotation unit 190. Figures 41 and 42 are flowcharts showing an example of the measurement area setting process executed by the CPU 210.

As shown in FIG. 41, first, the region setting unit 21d determines whether the first or second box-shaped region setting mode has been selected as the mode for setting the measurement region (step S201). This determination is made based on whether the user has operated, for example, the box circumference button 434 or the box portion button 435 in FIG. 24 in the operation of step S31 described above.

When the first or second box-shaped area setting mode is selected, the rotation angle setting unit 21f reads from the storage device 240 a plurality of measurement angle positions corresponding to the selected box-shaped area setting mode (step S202). The plurality of measurement angle positions are defined at intervals of an integer multiple of a predetermined angle (e.g., 30°, 45°, or 90°). In other words, the plurality of measurement angle positions are defined at a predetermined angle pitch. The above reading process corresponds to a process of setting the plurality of measurement angle positions. The rotation angle setting unit 21f may set the plurality of measurement angle positions based on information specified by the user operating the angle condition setting unit 453 and the angle pitch setting unit 454 in FIG. 29, etc.

Next, the low-magnification camera captures an image of the entire measurement object S at each measurement angle position (step S203). At this time, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S rotates sequentially to the set measurement angle positions. The image capture control unit 21c also controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S is captured by the low-magnification camera while the measurement object S is at each measurement angle position. Furthermore, when the entire measurement object S is not captured at once, the movement control unit 21a moves the upper surface 141s of the stage 140 in the XY direction so that the uncaptured portion of the measurement object S moves sequentially into the image capture area of the light receiving unit 120.

Then, the area setting unit 21d detects an existence area corresponding to each measurement angle position based on the image data obtained by imaging in step S203 (step S204). Here, imaging of the measurement object S in step S203 is performed in order to detect the existence area of the measurement object S in the subsequent step S204. Therefore, basically, the entire measurement object S needs to be imaged.

As described above, in step S203, the measurement object S is imaged by the low-magnification camera. The imaging area of the low-magnification camera 121A is larger than the imaging area of the high-magnification camera 121B. Therefore, when the entire measurement object S is imaged by the low-magnification camera, the number of times images are taken can be reduced compared to when the entire measurement object S is imaged by the high-magnification camera. Therefore, the time required to detect the presence area can be shortened.

After the process of step S204, the area setting unit 21d provisionally sets an area including the existence area of each detected measurement angle position as the measurement area of that measurement angle position (step S205). Then, the setting screen presenting unit 21e generates an area setting map image based on the multiple image data obtained in step S204 and the measurement areas of each set measurement angle position, and displays it on the display unit 400 (step S206). At this time, the setting screen presenting unit 21e superimposes one or more unit area frames MM on the image of the measurement object S in the area setting map image so that the set measurement area can be identified.

Next, the area setting unit 21d judges whether or not the setting of the measurement area has been completed (step S207). This judgment is made, for example, based on whether or not the measurement start button 425 in FIG. 24 has been operated by the user. When the setting of the measurement area is completed, the measurement area setting process ends. On the other hand, if the setting of the measurement area is not completed, the area setting unit 21d judges whether or not there is an instruction to modify the measurement area (step S231). This judgment is made, for example, based on whether or not there is an instruction from the user to change, add, or delete the measurement area on the area setting screens 403 to 405 in FIG. 26 to FIG. 28.

If there is no command to modify the measurement area in step S231, the area setting unit 21d advances the process to step S233, which will be described later. On the other hand, if there is a command to modify the measurement area in step S231, the area setting unit 21d accepts the modification and modifies the already-set measurement area in accordance with the accepted content (step S232).

Next, the data correction unit 21i determines whether there is a command to use either the first marker M1 or the second marker M2 to calibrate the three-dimensional shape data (step S233). If there is a command to use a marker, the data correction unit 21i determines the type of marker to use (step S234). The data correction unit 21i makes the determinations in steps S233 and S234 based on, for example, which of the first calibration checkbox 463 and the second calibration checkbox 464 in FIG. 30 has been checked by the user.

Next, the data correction unit 21i adds a new measurement area setting according to the marker to be used (step S235), and activates a calibration function according to the marker to be used (step S236). After that, the data correction unit 21i returns the process to step S207. In step S236, if the marker to be used is the first marker M1, the first calibration function is activated. On the other hand, if the marker to be used is the second marker M2, the second calibration function is activated. If there is no command to use a marker in step S233, the data correction unit 21i activates the third calibration function (step S237), and returns the process to step S207.

If the first or second box-shaped region setting mode is not selected in step S201, the region setting unit 21d determines whether or not the axis-shaped region setting mode is selected as the mode for setting the measurement region (step S211). This determination is made based on, for example, whether the axis button 436 in FIG. 24 is operated by the user.

When the shaft shape region setting mode is selected, the rotation angle setting unit 21f reads multiple measurement angle positions corresponding to the shaft shape region setting mode from the storage device 240 (step S212). This reading process corresponds to the setting process of multiple measurement angle positions, similar to the process of step S202. Note that the rotation angle setting unit 21f may set multiple measurement angle positions based on conditions specified by the user operating the angle condition setting unit 453 and the angle pitch setting unit 454 in FIG. 29. At this time, the angle pitch that can be set by the angle pitch setting unit 454 may be limited to a value required to measure the entire circumference of the measurement object S when the measurement object S is rotated, for example. This prevents an inappropriate angle pitch from being set.

Next, the low-magnification camera captures an image of the entire measurement object S at one of the multiple measurement angle positions (step S213). At this time, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S is held at one of the multiple measurement angle positions. The image capture control unit 21c also controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S is captured by the low-magnification camera while the measurement object S is at one measurement angle position. Furthermore, when the entire measurement object S is not captured at once, the movement control unit 21a moves the upper surface 141s of the stage 140 in the XY direction so that the uncaptured portion of the measurement object S moves sequentially into the image capture area of the light receiving unit 120.

Then, the area setting unit 21d detects an existence area corresponding to one measurement angle position based on the image data obtained by the imaging in step S213 (step S214), and the process proceeds to step S205. In the above step S213, the measurement target S is imaged by a low-magnification camera, similar to the process in step S203. This makes it possible to shorten the time required to detect the existence area.

If the axis shape region setting mode is not selected in step S211, the region setting unit 21d determines whether or not a command to set details of the measurement region has been received (step S221). This determination is made based on, for example, whether the rotation detail button 437 in FIG. 24 has been operated by the user.

When a command to set details of the measurement area is received, the area setting unit 21d accepts the setting of the measurement area (step S222). Here, for example, the conditions specified by the user operating the angle condition setting unit 453 and the angle pitch setting unit 454 in FIG. 29 are accepted. After that, the area setting unit 21d advances the process to step S207.

In addition, in the measurement area setting process corresponding to the shape measurement of the measurement object S that does not involve rotation, after the presence area of the measurement object S is detected, the same processes as steps S205 to S207, S231, and S232 described above are performed.

[9] Effects (1) In the shape measuring device 500 according to the present embodiment, when a measurement region is set for performing shape measurement of the measurement object S accompanied by rotation, a presence region of the measurement object S corresponding to each of a plurality of measurement angle positions set at least in the Y direction is detected. In other words, a width of the measurement object S extending at least in the Y direction when the measurement object S at each of the set measurement angle positions is viewed from the light receiving unit 120 is detected.

In addition, multiple measurement areas to be imaged by the light receiving unit 120 for each measurement angle position are set based on the detection result of the presence area at least in the Y direction of the measurement angle position. In this case, the user does not need to perform a cumbersome setting operation according to the shape of the measurement object S for each measurement angle position. After that, the measurement object S is rotated sequentially to the multiple measurement angle positions that have been set. With the measurement object S in each measurement angle position, the imaging area of the light receiving unit 120 is moved sequentially to multiple measurement areas at least in the Y direction, and the measurement object S is imaged. Based on the multiple image data generated in this way, three-dimensional shape data corresponding to each measurement angle position can be generated. As a result, it becomes possible to measure the shape over a wide range on the surface of the measurement object S without the need for a cumbersome setting operation.

(2) In the shape measuring device 500 according to this embodiment, the measurement object S is placed on the upper surface 141s of the stage 140, and the measurement object S is irradiated with pattern light. Alternatively, the measurement object S is held by the rotation unit 190, and the measurement object S is rotated around a rotation axis RA that intersects with the optical axis ROA of the light receiving unit 120, and the pattern light is irradiated onto the measurement object S. The measurement object S irradiated with the pattern light is imaged by the light receiving unit 120. Three-dimensional shape data of the measurement object S is generated based on multiple image data obtained by imaging.

In this case, the user can place the measurement object S on the top surface of the stage or rotate the measurement object S using a rotation unit so that the pattern light is incident on the shape of the desired portion of the measurement object S. As a result, it becomes possible to measure the shape over a wide range on the surface of the measurement object S.

(3) In the shape measuring device 500 according to this embodiment, in order to perform shape measurement of the measurement object S involving rotation, for example, a first configuration function using the first marker M1 is set to be used. In this case, the first marker M1 and the measurement object S are imaged. Based on the image data obtained by the imaging, three-dimensional shape data of the first marker M1 and three-dimensional shape data of the measurement object S are generated. Based on the three-dimensional shape data of the first marker M1 and the dimensions of the first marker M1, a correction process of the three-dimensional shape data according to the first calibration function is performed.

In this case, the three-dimensional shape data of the first marker M1 is generated while the measurement object S is held by the holding unit 191, so when the rotational state of the holding unit 191 changes as a result of the holding unit 191 holding the measurement object S, the rotational state of the first marker M1 also changes in the same manner as the holding unit 191. Therefore, the three-dimensional shape data of the first marker M1 is more suitable for correcting the three-dimensional shape data of the measurement object S compared to when the three-dimensional shape data is generated while the measurement object S is not held by the holding unit 191. As a result, it becomes possible to measure the shape with high accuracy over a wide range on the surface of the measurement object S.

The first marker M1 constitutes a part of the holding unit 191. Therefore, in order to calibrate the shape measuring device 500, it is not necessary to attach a calibration tool to the holding unit 191 and to replace the calibration tool attached to the holding unit 191 with the measurement target S. Therefore, the time required for the calibration work of the shape measuring device 500 is reduced.

(4) In addition, in the shape measuring device 500, the second configuration function using the second marker M2 is set to be used to perform shape measurement of the measurement object S involving rotation. In this case, the second marker M2 and the measurement object S are imaged, and three-dimensional shape data of the second marker M2 and three-dimensional shape data of the measurement object S obtained by the image capture are generated. Based on the three-dimensional shape data of the second marker M2 and the dimensions of the second marker M2, correction processing of the three-dimensional shape data according to the second calibration function is performed. According to the second calibration function, the measurement accuracy of the measurement object S is improved by using the three-dimensional shape data of the first marker M1 and the second marker M2.

Furthermore, in the shape measuring device 500, in order to perform shape measurement of the measurement object S involving rotation, a third configuration function is set to be used that does not use the first marker M1 and the second marker M2. In this case, correction processing of the three-dimensional shape data according to the third calibration function is performed based on the three-dimensional shape data of the measurement object S. According to the third calibration function, since it is not necessary to capture images of the first marker M1 and the second marker M2, it is possible to shorten the time required to measure the measurement object S.

(5) The user can select one of the first to third calibration functions by checking or not checking, for example, the first calibration checkbox 463 or the second calibration checkbox 464 in FIG. 31. Therefore, the user can easily select the desired calibration function depending on the purpose of the shape measurement, improving the convenience of measuring the shape of the measurement target S.

[10] Other embodiments (1) In the shape measurement process according to the above-described embodiments, the area setting unit 21d may set a measurement range of the measurement object S in the Z direction when setting a measurement area of the measurement object S. In addition, height direction synthesis may be performed when the set imaging range in the Z direction exceeds the range of the measurement space 101 in the Z direction (the range of the depth of field of the light receiving unit 120).

In this case, the area setting screen is displayed on the display unit 400 so that it can accept, for example, whether or not it is necessary to set a measurement range for the measurement object S in the Z direction. FIG. 43 is a diagram showing an example of an area setting screen that can accept, for example, whether or not it is necessary to set a measurement range for the measurement object S in the Z direction. In the area setting screen 404 of FIG. 43, a height range button 471 is displayed in the secondary display area 420 with an area setting map image displayed in the primary display area 410.

When the user wishes to set the measurement range in the Z direction, the user operates the height range button 471. This causes the display unit 400 to display an area setting screen for setting the measurement range in the Z direction of the measurement object S. Figure 44 shows an example of an area setting screen for setting the measurement range in the Z direction of the measurement object S.

In the area setting screen 409 in FIG. 44, various images and operation windows are displayed for setting the measurement range of the specified measurement angle position (0° in this example) by operating the angle position list 441 in the secondary display area 420.

Specifically, the main display area 410 displays an area setting map image IMa of the measurement angle position specified by the angle position list 441, and an area setting map image IMb of a measurement angle position shifted by 90° from the specified measurement angle position. In addition, an upper limit mark 472 and a lower limit mark 473 indicating the upper limit and lower limit positions of the measurement range in the Z direction, respectively, are superimposed on the area setting map image IMb and are slidable up and down. This allows the user to set the measurement range in the Z direction at the specified measurement angle position by sliding the upper limit mark 472 and the lower limit mark 473 up and down while visually checking the image of the measurement target S displayed in the area setting map image IMb.

The main display area 410 also displays a range setting window 481 for specifying the measurement range in the Z direction numerically or for issuing a command to perform automatic setting. The range setting window 481 displays an upper limit input section 482 and a lower limit input section 483 for the user to numerically input the upper limit and lower limit positions of the measurement range in the Z direction, respectively. The range setting window 481 also displays a width input section 484 and a center input section 485 for the user to numerically input the size (vertical width) of the measurement range in the Z direction and its center position, respectively. The range setting window 481 also displays an automatic setting button 486 for issuing a command to automatically set the measurement range in the Z direction for each of all measurement angle positions.

This allows the user to set the measurement range by inputting numerical values into the upper limit input section 482 and the lower limit input section 483, instead of operating the upper limit mark 472 and the lower limit mark 473. Alternatively, the user can set the measurement range by inputting numerical values into the width input section 484 and the center input section 485. Alternatively, the user can set the Z-direction measurement range for all measurement angle positions by operating the automatic setting button 486.

When the automatic setting button 486 is operated, the area setting unit 21d may set the measurement range for each measurement angle position as follows. For example, when setting a Z-direction measurement range for one measurement angle position, the area setting unit 21d reads an area setting map image for a measurement angle position shifted by 90° from the one measurement angle position. The area setting unit 21d also detects the Z-direction range in which the measurement target S exists from the read area setting map image, and sets the detected range as the Z-direction range for the one measurement angle position.

Alternatively, the area setting unit 21d can set the measurement range for each measurement angle position as follows. For example, the rotation control unit 21b moves the rotation unit 190 sequentially to multiple measurement angle positions. Then, the imaging control unit 21c causes the light receiving unit 120 to capture images of multiple parts of the measurement object S while it is at each measurement angle position, and moves the stage 140 in the Z direction so that the focal plane 120F of the light receiving unit 120 is aligned with each of the multiple parts of the measurement object S facing upward. Then, the area setting unit 21d sets the measurement range based on the movement range of the stage 140 in the Z direction.

In this case, when the measurement range exceeds the range of the measurement space 101 (the range of the depth of field of the light receiving unit 120), the imaging control unit 21c may determine multiple positions of the upper surface 141s in the Z direction so that multiple parts of the measurement object S are included within the range of the measurement space 101.

Alternatively, the area setting unit 21d can set the measurement range for each measurement angle position as follows. For example, the rotation control unit 21b moves the rotation unit 190 sequentially to a plurality of measurement angle positions. Then, the imaging control unit 21c uses pattern light to image the measurement object S while the measurement object S is at each measurement angle position, and detects the position of the upper end of the measurement object S in the Z direction by generating three-dimensional shape data. Then, the area setting unit 21d sets the measurement range based on the generated three-dimensional shape data of the measurement object S. Note that when imaging the measurement object S to set the measurement range in the Z direction, it is preferable to use pattern light with low resolution as a so-called rough measurement, thereby reducing the number of times the pattern light is irradiated.

In the manner described above, the measurement range in the Z direction of the measurement object S is set. As a result, when the measurement range set at any measurement angle position exceeds the measurement space 101, the CPU 210 can generate three-dimensional shape data multiple times while changing the position of the stage 140 in the Z direction at that measurement angle position. In addition, by performing height direction synthesis using the multiple generated three-dimensional shape data, it becomes possible to measure the shape over a wider range on the surface of the measurement object.

(2) In the shape measurement process according to the above embodiment, in order to detect the presence area of the measurement object S corresponding to each measurement angle position when measuring the shape of the measurement object S involving rotation, the measurement object S at each measurement angle position is imaged using illumination light, but the present invention is not limited to this.

To detect the presence area of the measurement object S corresponding to each measurement angle position, the CPU 210 may perform the following process. For example, in step S204, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S is held at a representative angle position that is a part of the multiple measurement angle positions (e.g., 0° and 180°). The imaging control unit 21c also controls the light projecting units 110A and 110B and the light receiving unit 120 so that multiple image data are generated by imaging the measurement object S while irradiating it with pattern light when the measurement object S is at each representative angle position. The three-dimensional shape data generating unit 21g generates three-dimensional shape data corresponding to each representative angle position based on the multiple image data generated when the measurement object S is at each representative angle position.

In this case, by combining the three-dimensional shape data corresponding to one representative angular position of 0° with the three-dimensional shape data corresponding to the other representative angular position of 180°, it is possible to grasp almost the entire shape of the measurement object S. Therefore, the area setting unit 21d detects the existence area of the measurement object S corresponding to the multiple measurement angular positions based on the generated three-dimensional shape data. According to the above processing, it is not necessary to capture an image of the measurement object at each of the multiple angular positions in order to detect the existence area for the multiple measurement angular positions.

The three-dimensional shape data generated to detect the presence area does not require high measurement accuracy. Therefore, when generating three-dimensional shape data to detect the presence area, it is preferable to use a pattern light with lower resolution and reduce the number of times the pattern light is irradiated compared to when generating three-dimensional shape data to obtain the shape of the measurement target S.

(3) In the shape measurement process according to the above embodiment, the data synthesis unit 21h receives an instruction as to whether or not to synthesize three-dimensional shape data for multiple measurement angle positions in the process of step S107, but the present invention is not limited to this.

In step S107, the data synthesis unit 21h may accept that only a portion of the multiple three-dimensional shape data for the multiple measurement angle positions is to be synthesized. In this case, for example, in the secondary display area 420 of FIG. 29, instead of the synthesis necessity check box 457, an input unit or the like may be provided for selecting the measurement angle positions at which the three-dimensional shape data should be synthesized from among the multiple measurement angle positions.

When it is accepted that only multiple pieces of three-dimensional shape data acquired at some of the multiple measurement angle positions are to be combined, the data combination unit 21h may combine only some of the multiple pieces of three-dimensional shape data in accordance with the accepted information.

A data synthesis command section may be displayed on the display section 400 to instruct whether or not to synthesize in the rotational direction at least some of the three-dimensional shape data aligned in the rotational direction. Specifically, a check box or the like for individually specifying the three-dimensional shape data to be synthesized may be displayed as the data synthesis command section in the sub-display area 420 of the area setting screens 403 to 405 in Figures 26 to 28. This allows the user to obtain three-dimensional shape data in the desired manner for the shape of the measurement target S.

(4) In the above embodiment, the rotation angle setting unit 21f reads multiple measurement angle positions that are predetermined for each mode from the storage device 240 in the processing of step S212, and sets the multiple measurement angle positions, but the present invention is not limited to this.

In the process of step S212, instead of reading multiple predetermined measurement angle positions, the rotation angle setting unit 21f may set multiple measurement angle positions in the following manner.

For example, when the axial region setting mode is selected in step S211, the rotation angle setting unit 21f first adjusts the Z-direction position of the stage 140 so that the focal plane 120F of the light receiving unit 120 coincides with the highest part of the measurement object S. Next, the rotation angle setting unit 21f calculates the radial size (actual dimension) of the measurement object S based on the rotation axis RA based on the Z-direction position of the stage 140 when the focal plane 120F of the light receiving unit 120 is located on the surface of the measurement object S and the working distance WD (FIG. 8) of the light receiving unit 120.

In this case, it becomes possible to grasp the size of the measurement area set on the outer peripheral surface of the measurement object S based on the calculated size. As a result, when the measurement object S is imaged by the light receiving unit 120 while rotating around the rotation axis RA, the rotation angle setting unit 21f may set multiple measurement angle positions so that two consecutive measurement areas in the rotation direction partially overlap each other. Alternatively, the rotation angle setting unit 21f may present the user with a measurement angle position where two consecutive measurement areas in the rotation direction partially overlap each other, and cause the display unit 400 to display a message or the like that guides the user to set the measurement angle position.

According to the above method for setting the measurement angle position, the measurement area is appropriately set so as to cover the entire surface of the measurement object S in the rotation direction of the measurement object S held by the rotation unit 190.

(5) The shape measuring device 500 according to the above embodiment may have a so-called autofocus function. For example, when the light receiving unit 120 captures the measurement object S, the position of the upper surface 141s in the Z direction may be adjusted so that the focal plane 120F of the light receiving unit 120 is located on at least a part of the measurement object S. Alternatively, the position of the lens 122 in the light receiving unit 120 may be adjusted.

(6) In the shape measurement process according to the above embodiment, the user sets the measurement area by checking the area setting map image, but the present invention is not limited to this. In the shape measurement process, for example, the shape of the measurement target S may be measured without generating an area setting map image at the command of the user.

Specifically, with the rotation unit 190 attached to the stage 140, the user operates the operation unit 250 to instruct measurement of the shape of the measurement target S without checking the area setting map image. In this case, the CPU 210 captures images using pattern light at each of a number of predetermined measurement angle positions, and generates three-dimensional shape data.

The CPU 210 then sets one measurement area corresponding to each measurement angle position, generates three-dimensional shape data for that one measurement area, and estimates (detects) the area in which the measurement object S exists from the generated three-dimensional shape data, while setting a new measurement area as necessary. At this time, the new measurement area is set so that a portion of it overlaps with the one measurement area. The CPU 210 then generates three-dimensional shape data for the new measurement area, estimates (detects) the area in which the measurement object S exists, and further sets the new measurement area.

In this way, the CPU 210 may alternately generate three-dimensional shape data, estimate the area in which the measurement object S exists, and set the measurement area for each measurement angle position, thereby performing shape measurement over the entire circumference of the measurement object S.

(7) In the shape measuring device 500 according to the above embodiment, information regarding the measurement angle position and measurement area set during shape measurement of the measurement object S may be stored in the storage device 240 as setting information together with the three-dimensional shape data of the measurement object S. In this case, for example, by reading out the setting information stored in the storage device 240 according to the measurement object S, the measurement angle position and measurement area may be set based on the read setting information.

In this way, because the shape measuring device 500 has the function of saving and reading out the setting information, when sequentially measuring the shapes of multiple measurement objects S having the same shape, the user does not need to repeatedly set the measurement angle position and measurement area.

(8) In the process of step S203 of the shape measurement process according to the above embodiment, the measurement object S is imaged by a low-magnification camera at multiple measurement angle positions. At this time, based on the image data of the measurement object S imaged at each measurement angle position, it may be determined whether or not the measurement object S and the stage 140 will interfere when the measurement object S is at another measurement angle position. Furthermore, for other measurement angle positions where it is determined that the measurement object S and the stage 140 will interfere, imaging of the measurement object S may be skipped, and a message or indicator indicating that the measurement object S and the stage 140 will interfere may be displayed on the display unit 400.

Figure 45 is a diagram for explaining the interference determination function between the measurement object S and the stage 140. For example, the region setting map image of Figure 45(a) is generated by capturing an image of the measurement object S at one measurement angle position. In this case, as shown by the dashed line RAi in Figure 45(a), the position of the rotation axis RA on the region setting map image is known. Therefore, by determining the distance di1 between one end of the object image SI and the dashed line RAi in the direction perpendicular to the rotation axis RA on the region setting map image, it is possible to determine the radius at which one end of the measurement object S rotates.

Figure 45(b) shows a side view of the rotation unit 190 in the X direction corresponding to the area setting map image in Figure 45(a). If it is possible to determine the radius at which one end of the measurement object S rotates as described above, then it is possible to determine the angle range rθ in which one end of the measurement object S interferes with the stage 140 based on the determined radius d1 and the actual dimensions of the rotation unit 190 and the stage 140, as shown in Figure 45(b).

(9) In the shape measuring device 500 according to the above embodiment, the rotation unit 190 has a configuration in which the holding portion 191 protrudes from the side surface ss1 of the casing of the rotation drive portion 192, but the present invention is not limited to this.

Figure 46 is a diagram showing an example of the configuration of a rotation unit 190 according to another embodiment. As shown in Figure 46 (a), the rotation unit 190 of this example includes a fixed holding member 810 and a rotating holding member 820 in addition to a holding unit 191 and a rotation drive unit 192. The fixed holding member 810 is composed of two support members 811 and a connecting unit 812. The connecting unit 812 is provided so as to extend horizontally. The two support members 811 are provided so as to extend upward from both ends of the connecting unit 812. The connecting unit 812 connects the lower ends of the two support members 811 and is configured so as to be able to be installed on the upper surface 141s of the stage 140.

The rotating holding member 820 is provided between the two support pillars 811 of the fixed holding member 810. The rotating holding member 820 is composed of two support pillars 821 and a connecting portion 822. One end of each of the support pillars 821 is supported rotatably around a predetermined rotation axis 830 relative to one of the support pillars 811 of the fixed holding member 810. One end of each of the other support pillars 821 is supported rotatably around a predetermined rotation axis 830 relative to the other support pillar 811 of the fixed holding member 810. The other ends of the two support pillars 821 are connected by a connecting portion 822. The rotation drive unit 192 is attached to the connecting portion 822.

According to the above configuration, with the fixed holding member 810 fixed on the stage 140, as shown in FIG. 46(b), the rotating holding member 820 can be rotated relative to the fixed holding member 810. This improves the degree of freedom of the adjustable posture of the measurement object S held by the holding portion 191.

(10) In the measurement unit 100 according to the above embodiment, in order to adjust the positional relationship between the upper surface 141s of the stage 140 and the light receiving unit 120, the stage driving unit 146 moves the upper surface 141s of the stage 140 relative to the light receiving unit 120. The present invention is not limited to this.

For example, the measurement unit 100 may have a configuration in which the optical system support 992 is movably supported with respect to the upper surface 141s of the stage 140 in order to adjust the positional relationship between the upper surface 141s of the stage 140 and the light receiving unit 120. The measurement unit 100 may also have a drive unit that moves the optical system support 992.

(11) In the shape measuring device 500 according to the above embodiment, the first marker M1 and the second marker M2 used in the first and second calibration functions each have a cylindrical outer circumferential surface, but the present invention is not limited to this.

The first marker M1 and the second marker M2 may be shaft members having a regular polygonal cross section. In this case, it is preferable that the number of vertices of the regular polygon representing the cross section of the shaft member is greater than four.

(12) In the shape measuring device 500 according to the above embodiment, the measurement object S is irradiated with pattern light multiple times, and the measurement object S is imaged. Three-dimensional shape data is generated based on the multiple image data obtained by imaging. However, the present invention is not limited to the above example.

The three-dimensional shape data may be generated based on image data obtained by other imaging methods instead of imaging involving irradiation with pattern light. For example, the three-dimensional shape data may be generated by a stereo method by imaging the measurement object S with multiple light receiving units 120 or by imaging the measurement object S from multiple positions.

(13) In the shape measuring device 500 according to the above embodiment, a stage 140 is provided for placing the measurement object S and for supporting the rotation unit 190, but the present invention is not limited to this. If shape measurement can be performed on the measurement object S held by the rotation unit 190, the stage 140 does not need to be provided. In this case, the rotation unit 190 is attached to, for example, the base 990 in FIG. 3.

(14) Although the shape measuring device 500 according to the above embodiment has the first, second, and third calibration functions, the present invention is not limited to this. The shape measuring device 500 may not have at least some of the first, second, and third calibration functions.

(15) In the shape measurement process according to the above embodiment, when measuring the shape of the measurement target S involving rotation by the rotation unit 190, multiple measurement angle positions are set by the measurement area setting process, but the present invention is not limited to this.

When measuring the shape of the measurement object S involving rotation by the rotation unit 190, it may be possible to set, for example, one measurement angle position specified by the user in the measurement area setting process.

In this case, the user operates the operation unit 250 to specify, for example, one measurement angle position and to give the CPU 210 a command for shape measurement corresponding to the one measurement angle position. The CPU 210 then controls each component of the shape measuring device 500 in response to the command for shape measurement corresponding to the one measurement angle position, so that three-dimensional shape data corresponding to the specified one angle position is generated. This allows the user to obtain three-dimensional shape data for the shape of the measurement target S in the desired manner.

(16) In the shape measuring device 500 according to the above embodiment, when a measurement area is set for performing shape measurement of the measurement object S involving rotation, the presence area is detected based on an image of the measurement object S obtained by imaging, but the present invention is not limited to this. The presence area may be detected based on the acquired dimensional information, for example, by the CPU 210 acquiring dimensional information (e.g., CAD data, etc.) of the measurement object S previously stored in the storage device 240, or input dimensional information.

(17) In the above embodiment, when setting a measurement area for performing shape measurement of the measurement object S involving rotation, the presence area of the measurement object S at each measurement angle position is detected. In addition, multiple measurement areas corresponding to each measurement angle position are set based on the presence area of the measurement object S. The present invention is not limited to this example.

In the shape measuring device 500 according to the above embodiment, when setting a measurement area for performing shape measurement of the measurement object S involving rotation, the width of the measurement object S in the X direction and Y direction at each measurement angle position may be detected. In this case, multiple measurement areas corresponding to each measurement angle position may be set based on the detected width.

[11] Correspondence between each component of the claims and each element of the embodiment The following describes an example of the correspondence between each component of the claims and each element of the embodiment. In the above embodiment, the shape measuring device 500 is an example of a three-dimensional shape measuring device, the holding unit 191 is an example of a holding unit, the rotation axis RA is an example of a rotation axis, the rotation drive unit 192 is an example of a rotation drive unit, and the rotation unit 190 is an example of a rotation unit.

In addition, the light receiving unit 120 and the CPU 210 are examples of an imaging unit, a detection unit, and a data acquisition unit, the XY stage 141 and the stage driving unit 146 are examples of a translation driving unit, the CPU 210 is an example of a setting unit and a control unit, any one of the ROM 220, the working memory 230, and the storage device 240 is an example of a storage unit, and the display unit 400 is an example of a display unit.

Furthermore, the three-dimensional shape data generation unit 21g and the data synthesis unit 21h of the CPU 210 are examples of a data generation unit, the lens 123B is an example of a first optical system, the camera 121B is an example of a first camera, the lens 123A is an example of a second optical system, and the camera 121A is an example of a second camera.

The light receiving unit 120 and CPU 210 are examples of a detection unit, the operation unit 250 is an example of an operation unit, the Z stage 142 and stage drive unit 146 are examples of a vertical drive unit, the stage 140 is an example of a stage, the top surface 141s of the stage 140 is an example of a top surface, the light projecting units 110A and 110B are examples of projectors, the light projecting unit 110A is an example of a first light projecting device, the light projecting unit 110B is an example of a second light projecting device, and the measurement space 101 is an example of a space where the irradiation area of the pattern light by the first light projecting device, the irradiation area of the pattern light by the second light projecting device, and the imaging area of the imaging unit overlap.

Various other elements having the configuration or function described in the claims may also be used as components of the claims.

21a...movement control unit, 21b...rotation control unit, 21c...imaging control unit, 21d...area setting unit, 21e...setting screen presentation unit, 21f...rotation angle setting unit, 21g...three-dimensional shape data generation unit, 21h...data synthesis unit, 21i...data correction unit, 21j...attachment/detachment determination unit, 21k...display control unit, 91...rotation support shaft, 92, 93...holding piece, 92e, 93e, es1, es2...end surface, 92h, 93h...hole, 94...rod-shaped member, 100...measurement unit, 101... measurement space, 110A, 110B... light projection unit, 111... measurement light source, 112... pattern generation unit, 112S... pattern emission surface, 113, 114, 115, 122, 123A, 123B... lenses, 116, 125A, 125B... aperture, 117, 118... mirror, 120... light receiving unit, 120F... focal plane, 121a... imaging element, 121A, 121B... camera, 124... half mirror, 130... illumination light output unit, 140... Stage, 141...XY stage, 141c, 194...connector, 141h...screw hole, 141s...upper surface, 142...Z stage, 145...stage operation unit, 146...stage drive unit, 150, 310...control board, 160...head casing, 190...rotation unit, 191...holding unit, 192...rotation drive unit, 193...cable, 195...holding dial, 199...mounting unit, 200...PC, 210...CPU, 220...RO M, 230...working memory, 240...storage device, 250...operation unit, 300...control unit, 320...illumination light source, 400...display unit, 401...basic measurement screen, 402-409...area setting screen, 410...main display area, 411...horizontal movement operation window, 412...movement button, 413...rotation operation window, 414...origin button, 415...forward rotation button, 416...reverse rotation button, 417...holding unit mark, 418...reference attitude mark , 419... measurement angle position mark, 420... secondary display area, 421... area setting button, 422... edit button, 423... area clear button, 424... field of view confirmation image, 425... measurement start button, 426... exclusion button, 427... OK button, 428... cancel button, 429... upper surface removal button, 431... rotation on button, 432... rotation off button, 434... box circumference button, 435... box part button, 436... axis button, 4 37...rotation details button, 441...angle position list, 451...reference attitude input frame, 452...reference attitude registration button, 453...angle condition setting section, 454...angle pitch setting section, 455...measurement count setting section, 456...exclusion angle input frame, 457...combination necessity check box, 463...first calibration check box, 464...second calibration check box, 465...marker inversion check box, 471...range button, 472...upper limit marker line, 473 ... lower limit mark, 481 ... range setting window, 482 ... upper limit input section, 483 ... lower limit input section, 484 ... width input section, 485 ... center input section, 486 ... automatic setting button, 500 ... shape measuring device, 810 ... fixed holding member, 811, 821 ... support section, 812, 822 ... connecting section, 820 ... rotating holding member, 830, RA ... rotating axis, 990 ... base, 991 ... support, 992 ... optical system support, DRA ... design rotating axis, IMa, IMb...area setting map image, M1...first marker, M2...second marker, M2a...large diameter part, M2b...small diameter part, M2i...marker image, MM, MMa, MMb...unit area frame, pp...power supply part, rθ...angle range, RD...reference distance, RM...movable stroke range, ROA, TOA1, TOA2...optical axis, S...measurement object, SI...object image, sm...stepping motor, ss1, ss2...side surface, sv...deviation, WD...operating distance

Claims (15)

A three-dimensional shape measuring apparatus that generates three-dimensional shape data indicating a three-dimensional shape of a measurement object,
a rotation unit including a holder that holds the measurement object and a rotation drive unit that rotates the holder around a rotation axis extending in the X-axis direction to a first rotation angle and a second rotation angle;
an imaging unit having an optical axis extending in a Z-axis direction perpendicular to the X-axis, imaging the measurement object held by the holding unit and generating image data for generating three-dimensional shape data indicating an image of the measurement object;
a translation drive unit that moves the rotation unit relative to the imaging unit in a Y-axis direction perpendicular to the X-axis and the Z-axis so that an imaging field of view of the imaging unit moves sequentially;
a setting unit that sets a plurality of first measurement regions aligned in the Y-axis direction based on a width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is rotated at the first rotation angle, and sets a plurality of second measurement regions aligned in the Y-axis direction based on a width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is rotated at the second rotation angle;
and a control unit that controls the translation drive unit, the rotation drive unit, and the imaging unit so as to rotate the measurement object to the first rotation angle, sequentially move the imaging field of view of the imaging unit to the multiple first measurement regions to image the measurement object, and subsequently rotate the measurement object to the second rotation angle, and sequentially move the imaging field of view of the imaging unit to the multiple second measurement regions to image the measurement object. A storage unit is further provided for storing a setting in which the first rotation angle is associated with the plurality of first measurement areas and a setting in which the second rotation angle is associated with the plurality of second measurement areas, the setting being set by the setting unit;
The three-dimensional shape measuring apparatus according to claim 1 , wherein the control unit controls the translation drive unit, the rotation drive unit, and the imaging unit based on settings stored in the storage unit. a detection unit that detects an area in which the measurement object is present in the Y-axis direction at each of the first rotation angle and the second rotation angle,
A three-dimensional shape measuring device as described in claim 1 or 2, wherein the setting unit automatically sets the number of first measurement regions and the number of second measurement regions aligned in the Y-axis direction required to image the entire existence area based on the width of the existence area detected by the detection unit. A display unit that displays a setting screen for adjusting the first measurement areas and the second measurement areas that are set based on the presence area of the measurement object detected by the detection unit,
The three-dimensional shape measuring device of claim 3, wherein the setting unit is configured to accept instructions from a user and expand or reduce the number of the first measurement areas and the second measurement areas extending in the Y-axis direction on the setting screen. the control unit controls the imaging unit, the translation drive unit, and the rotation drive unit so as to move the measurement object relative to the imaging unit in the X-axis direction and the Y-axis direction and capture the image a plurality of times at each of the first rotation angle and the second rotation angle, thereby generating a map image in which the entire measurement object is captured;
The display unit displays the map image on the setting screen, and displays the first measurement areas and the second measurement areas set by the setting unit so as to be superimposed on the map image,
The three-dimensional shape measuring device of claim 4, further comprising a data generation unit that generates a plurality of three-dimensional shape data corresponding to the plurality of first measurement areas and the plurality of second measurement areas, respectively, and synthesizes the generated plurality of three-dimensional shape data to generate three-dimensional shape data of the entire object to be measured. The imaging unit includes:
a first optical system for imaging light at a first magnification;
a first camera that receives light imaged by the first optical system;
a second optical system that images light at a second magnification that is lower than the first magnification;
a second camera that receives light imaged by the second optical system,
the map image is generated by capturing an image of the entire measurement object at the second magnification;
The three-dimensional shape measuring device of claim 5, wherein the data generation unit generates the three-dimensional shape data based on a plurality of image data generated by imaging the plurality of first measurement areas and the plurality of second measurement areas at the first magnification. the rotation drive unit is configured to be able to sequentially rotate the holding unit to a plurality of different rotation angles including the first rotation angle and the second rotation angle,
the setting unit is configured to be able to set a plurality of measurement regions aligned in the Y-axis direction based on a width of the measurement object extending in the Y-axis direction as seen from the imaging unit when the measurement object is at each of the plurality of different rotation angles;
the control unit controls the translation drive unit, the rotation drive unit, and the imaging unit so as to rotate the measurement object to each of the plurality of different rotation angles and sequentially move an imaging field of view of the imaging unit to the plurality of measurement regions corresponding to the rotation angles to capture an image of the measurement object;
The three-dimensional shape measuring device is
a detection unit that detects an area in which the measurement object is present in the Y-axis direction at each of the plurality of different rotation angles as a width of the measurement object;
a display unit that displays a setting screen for adjusting a measurement area set for each rotation angle based on a presence area of the measurement target detected by the detection unit; and
Further, an operation unit is provided for selecting whether the measurement object is box-shaped or shaft-shaped,
A three-dimensional shape measuring device as described in claim 1 or 2, wherein the display unit displays a first setting screen as the setting screen for making settings related to the measurement of a box-shaped measurement object when a box shape is selected by the operation unit, and displays a second setting screen as the setting screen for making settings related to the measurement of an axially shaped measurement object when an axial shape is selected by the operation unit. the operation unit is configured to be able to select the plurality of different rotation angles, which are discrete, in a state in which the first setting screen is displayed on the display unit by selecting a box shape by the operation unit,
The three-dimensional shape measuring device of claim 7, wherein the display unit displays, on the first setting screen, the multiple measurement areas detected and set by the detection unit superimposed on an image of the measurement object captured at each of the multiple different rotation angles selected by the operation unit. When the second setting screen is displayed by selecting an axis shape by the operation unit, the display unit displays, on the second setting screen, an image of the measurement object captured by the imaging unit at a specific rotation angle among the plurality of different rotation angles;
9. The three-dimensional shape measuring apparatus according to claim 7, wherein the setting unit receives a designation of the specific rotation angle from a user. The three-dimensional shape measuring device according to any one of claims 7 to 9, wherein the setting unit sets the multiple different rotation angles at an angle pitch that is an integer multiple of a predetermined angle when a box shape is selected by the operation unit. the setting unit, when an axial shape is selected by the operation unit, automatically sets a pitch of the plurality of different rotation angles required to measure an entire circumference of the axially shaped measurement object when the measurement object is rotated based on a diameter of the measurement object;
The three-dimensional shape measuring device according to any one of claims 7 to 10, wherein the control unit controls the rotation drive unit so as to rotate the object to be measured at a pitch of the rotation angle set by the setting unit. The three-dimensional shape measuring device according to any one of claims 7 to 11, wherein the setting unit receives input of a rotation angle pitch for rotating the measurement object of the axial shape from the user when the axial shape is selected by the operation unit, and the rotation angle pitch is limited to a value required to measure the entire circumference of the measurement object when the measurement object is rotated. a data acquisition unit that acquires three-dimensional shape data corresponding to the first measurement regions,
A three-dimensional shape measuring device as described in claim 1 or 2, wherein the setting unit is configured to be able to set multiple second measurement areas aligned in the Y-axis direction based on multiple three-dimensional shape data corresponding to the multiple first measurement areas acquired by the data acquisition unit. a vertical drive unit for changing a relative distance between the rotation unit and the imaging unit in the Z-axis direction,
the control unit controls the translation drive unit, the vertical drive unit, the rotation drive unit, and the imaging unit to capture images of the first measurement areas and the second measurement areas a plurality of times while changing the relative distance at each of the first rotation angle and the second rotation angle, thereby generating a plurality of image data;
The three-dimensional shape measuring device of claim 5 or 6, wherein the data generation unit generates a plurality of three-dimensional shape data corresponding to the plurality of first measurement areas and the plurality of second measurement areas based on a plurality of image data generated by imaging the plurality of first measurement areas and the plurality of second measurement areas multiple times while changing the relative distance, and synthesizes the generated plurality of three-dimensional shape data to generate three-dimensional shape data of the measurement object. a stage to which the rotation unit is attached;
a projector that projects a pattern light having a periodic pattern onto the upper surface of the stage from an obliquely upward position a plurality of times while shifting the phase of the pattern light;
the imaging unit is provided above the stage such that an optical axis thereof coincides with the Z-axis, and a pattern light is irradiated from the projector onto the measurement object held by the rotation unit, and the measurement object is imaged a plurality of times by receiving the pattern light reflected from the measurement object, thereby generating a plurality of image data representing an image of the measurement object;
the projector includes first and second light-projecting devices aligned in the X-axis direction and symmetrically disposed with respect to a virtual plane perpendicular to the X-axis direction,
each of the first and second light-projecting devices has an optical axis that is perpendicular to the Y axis and inclined at a predetermined angle with respect to the X axis and the Z axis, and emits a pattern light along the optical axis of the light-projecting device toward the optical axis of the imaging unit;
A three-dimensional shape measuring device as described in any one of claims 1 to 14, wherein the rotation unit is arranged to be positioned at a position outside the space where the area irradiated with pattern light by the first light-projecting device, the area irradiated with pattern light by the second light-projecting device, and the imaging area of the imaging unit overlap when the stage is in a predetermined reference position relative to the imaging unit.

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