JP7591475B2 - Temperature chamber for measuring electrical characteristics, electrical characteristics measuring device, and electrical characteristics measuring method - Google Patents

Description

The present invention relates to a temperature bath for measuring electrical properties that is used to obtain data related to the electrical properties of a material. The present invention also relates to an electrical property measuring device and an electrical property measuring method.

The S-parameter method is known as one of the methods for evaluating electrical properties such as the permittivity and permeability of a material.
A typical S-parameter method involves arranging two antennas facing each other, placing a sample between them, irradiating electromagnetic waves, measuring the S-parameters of the material from the reflection/absorption characteristics of the electromagnetic waves, and evaluating the dielectric constant characteristics, etc. of the sample based on the S-parameters.
Patent Document 1 discloses a measuring device that uses the S-parameter method.

Patent No. 6590257

In measuring S parameters, a sample is often placed in a room temperature environment and irradiated with electromagnetic waves, but there is a demand to evaluate electrical characteristics in high-temperature and low-temperature environments.
One possible method is to place the device in a high-temperature or low-temperature chamber and measure the S-parameters, but it is generally difficult to expose an antenna or the like to a high-temperature or low-temperature environment.
The present invention is devised to solve the above-mentioned problems of the prior art, and provides a temperature bath for measuring electrical characteristics, an electrical characteristics measuring device, and an electrical characteristics measuring method that are capable of evaluating electrical characteristics in high-temperature environments, low-temperature environments, etc.

An aspect for solving the above-mentioned problems is a temperature bath for measuring electrical characteristics, in which a sample is placed inside and electromagnetic waves are irradiated onto the sample to obtain data related to the electrical properties of the sample, the temperature bath for measuring electrical characteristics has a space-forming member that forms a storage space covering the sample, the space-forming member has a first opening for supplying gas to the storage space and one or more second openings through which electromagnetic waves pass, and the first opening and the second opening are positioned such that a center line of the first opening and a center line of the second opening intersect or intersect when viewed from one side.
A specific aspect for solving the above-mentioned problems is a temperature bath for measuring electrical characteristics, in which a sample is placed inside and electromagnetic waves are irradiated onto the sample to obtain data related to the electrical properties of the sample, the temperature bath for measuring electrical characteristics has a space-forming member that forms a storage space covering the sample, the space-forming member has a first opening that supplies gas to the storage space and one or more second openings that allow electromagnetic waves irradiated in the space outside the space-forming member to pass through, the first opening and the second opening are positioned so that a center line of the first opening and a center line of the second opening intersect or intersect when viewed from one side, and a path is formed for discharging part or all of the gas supplied to the storage space from the first opening to the outside.

In the above aspect, it is desirable that the space forming member has a plurality of surfaces, the first opening is provided on at least one of the surfaces, the second opening is provided on the other surface, and the first surface on which the first opening is provided or a virtual extension of the first surface intersects with the second surface on which the second opening is provided or a virtual extension of the second surface.

In the above aspect, it is desirable that the first surface or a virtual extension of the first surface and the second surface or a virtual extension of the second surface are in a perpendicular relationship.

In each of the above aspects, it is desirable that the sample support member is foil-shaped and/or plate-shaped and supports a planar sample, the second opening is located in a position facing the main surface of the sample, and the first opening is located in a position facing an edge of the sample.

In each of the above aspects, it is desirable that some or all of the gas supplied to the storage space from the first opening is discharged to the outside from the second opening.

In each of the above aspects, it is preferable that the space forming member has a third opening, and the sample is inserted into the storage space through the third opening.

In each of the above aspects, it is desirable that a sealing member made of a material that easily transmits electromagnetic waves is attached to the second opening.

In each of the above aspects, it is desirable to have a gas supply unit that supplies temperature-adjusted gas, and to be able to adjust the environment within the space-forming member by supplying the gas from the gas supply unit to the space-forming member.

An embodiment of the electrical characteristic measuring device is characterized by having any one of the above-mentioned temperature chambers for measuring electrical characteristics, an electromagnetic wave irradiation device that irradiates electromagnetic waves, and an electromagnetic wave receiving device that receives the electromagnetic waves.

Another aspect for solving a similar problem is an electrical property measurement method in which electromagnetic waves are irradiated onto a foil-shaped and/or plate-shaped sample to obtain data related to the electrical properties of the sample, the electrical property measurement method being characterized in that gas adjusted to a predetermined temperature is supplied from a direction opposite to an edge of the sample, the sample is placed in a gas ventilated environment, and in that state, electromagnetic waves are irradiated onto a main surface of the sample to obtain data related to the electrical properties of the sample.
Another aspect for solving a similar problem is an electrical characteristic measuring method in which electromagnetic waves are irradiated onto a foil-shaped and/or plate-shaped sample to obtain data related to the electrical characteristics of the sample, the electrical characteristic measuring method being characterized in that the sample is placed in a space-forming member having an opening that allows the electromagnetic waves to pass through, gas adjusted to a predetermined temperature is supplied into the space-forming member from a direction facing an edge of the sample, the sample is placed in a gas-ventilated environment, and in this state, the electromagnetic waves are irradiated onto a main surface of the sample from a space outside the space-forming member to obtain data related to the electrical characteristics of the sample, and some or all of the gas supplied into the space-forming member is discharged to the outside of the space-forming member.

The present invention makes it possible to evaluate the electrical properties of samples in high-temperature and low-temperature environments.

1 is a perspective view of an electrical characteristic measuring apparatus according to an embodiment of the present invention. FIG. 2 is a perspective view of a temperature bath for measuring electrical characteristics according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of the electrical characteristic measuring device of FIG. 1 . 2A is a plan cross-sectional view showing the layout of the electrical characteristic measuring device shown in FIG. 1 , and FIG. 2B is a plan cross-sectional view showing the layout of an electrical characteristic measuring device according to another embodiment of the present invention. 13A, 13B, and 13C are a perspective view and a plan sectional view of a space forming member of a temperature chamber for measuring electrical characteristics according to another embodiment of the present invention. 11A and 11B are front views of a space forming member of a temperature chamber for measuring electrical characteristics according to still another embodiment of the present invention, in which (a) shows a state in which the second opening is closed, and (b) shows a state in which the second opening is open. FIG. 11 is a cross-sectional view of a space forming member of a temperature chamber for measuring electrical characteristics according to still another embodiment of the present invention. 5A and 5B are explanatory diagrams illustrating the relationship of center lines, in which FIG. 5A shows a state in which center lines intersect, and FIG. 5B shows a state in which center lines intersect when viewed from one side. FIG. 11 is a perspective view of a space forming member of a temperature chamber for measuring electrical characteristics according to still another embodiment of the present invention. 10A is a cross-sectional view taken along line AA of the space forming member of FIG. 9 with a sample placed therein, and FIG. 10B is a cross-sectional view taken along line BB of FIG. 13A, 13B, and 13C are a perspective view and a plan sectional view of a space forming member of a temperature chamber for measuring electrical characteristics according to another embodiment of the present invention. 11A and 11B are perspective views of a space forming member of a temperature chamber for measuring electrical characteristics according to still another embodiment of the present invention, in which (a) shows a state in which the opening/closing door is closed, and (b) shows a state in which the opening/closing door is open.

Hereinafter, an embodiment of the present invention will be described. An electrical characteristic measuring apparatus 1 of the present embodiment is an apparatus for measuring S-parameters. S-parameters are one type of data related to the electrical characteristics of a material. By measuring the S-parameters, data related to the electrical characteristics of the material is obtained.
The electrical characteristic measuring device 1 of this embodiment includes an electrical characteristic measuring temperature chamber 2, a transmitting antenna 5 that irradiates microwave electromagnetic waves, and a receiving antenna 6 that receives microwave electromagnetic waves.
The transmitting antenna 5 and the receiving antenna 6 are both well-known horn lens antennas.

The electrical characteristic measuring temperature chamber 2 has a space forming member 10, a sample supporting member 11, a base member 12 and a gas supply device (gas supply section) 13, as shown in FIGS.
The space forming member 10 has a main body portion 20 and legs 18 .

It is desirable that the space forming member 10 be made of a material that is difficult for electromagnetic waves to pass through.

The main body 20 employed in this embodiment is a rectangular box as shown in Fig. 2, and has a top wall 21, a bottom wall 22, a front wall 25, a back wall 26, and left and right side walls 27, 28. The front wall (second surface) 25, the back wall (second surface) 26, and the left and right side walls 27, 28 are in direct contact with the top wall (first surface) 21 at an angle of 90 degrees. Therefore, the wall surface of the top wall 21 is perpendicular to the wall surfaces of the front wall 25, the back wall 26, and the left and right side walls 27, 28.
An accommodation space 30 is formed inside the space forming member 10 by the above-mentioned multiple wall surfaces.

A connecting pipe 31 is attached to the top wall 21 (first surface). The connecting pipe 31 penetrates the top wall 21 and connects the storage space 30 to the outside. The opening of the connecting pipe 31 serves as a first opening 33 for introducing gas into the storage space 30. In this embodiment, the first opening 33 opens above the space forming member 10. A center line (hereinafter referred to as the first center line) 100 that passes through the center of the first opening 33 and intersects the opening surface perpendicularly coincides with the center line of the storage space 30.

The front wall 25 (second surface) and the rear wall 26 (second surface) are provided with second openings 40, 41 for passing electromagnetic waves. The second openings 40, 41 are located above and spaced apart from the bottom wall 22.
In this embodiment, the second openings 40 and 41 are both round holes, but the shape of the holes is not limited thereto. For example, they may be elliptical, rectangular or other polygonal, or may be an irregular shape.
In this embodiment, the second openings 40, 41 are provided on a surface different from the first opening 33. The surface on which the first opening 33 is provided (the top wall 21) intersects at an angle of 90 degrees with the surfaces on which the second openings 40, 41 are provided (the front wall 25 and the back wall 26).

The two second openings 40, 41 are provided on opposing surfaces. A center line 200a passing through the center of the second opening 40 and perpendicularly intersecting the opening surface coincides with a center line 200b passing through the center of the second opening 41 and perpendicularly intersecting the opening surface. Hereinafter, these center lines 200a, 200b will be referred to as second center lines 200.
In this embodiment, the second openings 40, 41 are provided in the front wall 25 and the rear wall 26, respectively, so that the center lines 200a and 200b are aligned, but this is not limiting. For example, the second openings 40, 41 may be provided in the front wall 25 and the rear wall 26 so that a portion of an opening surface virtually extending from the opening surface of the second opening 40 along the center line 200a and a portion of an opening surface virtually extending from the opening surface of the second opening 41 along the center line 200b overlap with each other.
Further, a first center line 100 passing through the center of the first opening 33 and a second center line 200 passing through the centers of the second openings 40, 41 intersect at an angle of 90 degrees as shown in FIG. 8(a).
In this embodiment, the first center line 100 and the second center line 200 intersect with each other, but the present invention is not limited to this. For example, the first center line 100 and the second center line 200 may intersect with each other when viewed from one side, as in the YZ plane in FIG. 8B.
As in the Y-Z plane in Fig. 8(a), the intersection angle A where the first center line 100 and the second center line 200 intersect is preferably close to 90 degrees. Furthermore, in the case where the first center line 100 and the second center line 200 intersect when viewed from one surface, the intersection angle A when viewed from a surface onto which the first center line 100 and the second center line 200 intersect (for example, the Y-Z plane in Fig. 8(b)) is projected is preferably close to 90 degrees. In other words, it is preferably perpendicular or close to that. For example, the intersection angle A is preferably within ±30 degrees of 90 degrees.
Furthermore, it is desirable that the first opening 33 is provided in the top wall 21 (first surface) and the second openings 40, 41 are provided in the front wall 25 and the back wall 26, respectively, so that a locus (beam-shaped) obtained by virtually extending the first opening 33 along the first center line 100 and a locus (beam-shaped) obtained by virtually extending the second openings 40, 41 along the second center line 200 (center lines 200a, 200b) at least partially overlap.

The bottom wall 22 is provided with a third slit-shaped opening 43 .
The third opening 43 is located directly below the first opening 33 and intersects with the first center line 100 .
As described above, the third opening 43 is slit-shaped and elongated, and extends parallel to the front wall 25 and the rear wall 26 as shown in FIG.
In this embodiment, the shape of the third opening 43 is rectangular, but is not limited to this. For example, the shape of the third opening 43 may be a square or an elongated hole.

The legs 18 have pillars 45 hanging down from the four corners of the main body 20.

The sample support member 11 has a base portion 50 and a support portion 51. The support portion 51 can hold a foil-like or thin plate-like sample 300. In Fig. 2, the circular portion in the center of the support portion 51 is the sample 300. The sample 300 is, for example, a foil formed into a predetermined shape, and has a main surface 301 with a side portion 302 around the main surface.
The support portion 51 is plate-shaped and has an opening 53 for mounting the sample 300 thereon.
The support portion 51 has a front shape of, for example, a rectangle, and has an upper side 55, a lower side 56, and vertical sides 57 and 58 based on the position shown in FIG.
The thickness t (FIG. 3) of the support portion 51 is large enough to pass through the slit-shaped third opening 43 described above.
The thickness t of the support portion 51 is close to the size of the short side of the third opening 43. Therefore, the support portion 51 can pass through the third opening 43 only when its front and back surfaces face the front wall 25 (second surface) and back wall 26 (second surface) of the main body 20.
The support part 51 regulates the mounting position and the mounting attitude of the sample 300, and supports the sample 300 in a specific attitude. That is, the support part 51 supports the foil-like or thin plate-like planar sample 300 in an attitude in which a surface (principal surface 301) perpendicular to the thickness direction of the sample 300 is perpendicular to the Y axis.

The base member 12 is a tray-shaped member.

The gas supply device (gas supply section) 13 has an air conditioning device (not shown) built therein, and supplies air adjusted to a desired temperature to the space forming member 10 .
The gas supply device 13 employed in this embodiment includes a cooler and a heater as air conditioners, and also includes a blower (not shown).
The gas supply device 13 employed in this embodiment adjusts the temperature by heating or cooling dry air, and supplies low-humidity air to the space forming member 10 .
The gas supply device (gas supply unit) 13 may adjust the humidity in addition to the temperature.
The connection pipe 31 of the space forming member 10 and the gas supply device (gas supply section) 13 are connected by a duct 52 .

As shown in Figures 1, 3, and 4(a), a transmitting antenna 5 and a receiving antenna 6 are arranged facing each other at a distance, and a space-forming member 10 of the electrical characteristic measurement temperature chamber 2 is installed between them.
The transmitting antenna 5 and the receiving antenna 6 are oriented such that their center lines coincide with the second center line 200 .
A sample 300 supported by a sample support member 11 is placed in the space forming member 10 .

The sample 300, attached to the support portion 51, is inserted into the accommodation space 30 through the slit-shaped third opening 43 provided in the bottom wall 22. As described above, the support portion 51 can pass through the third opening 43 only when its front and back surfaces face the front wall 25 (second surface) and back wall 26 (second surface) of the main body portion 20.
Therefore, the orientation of the sample support member 11 and the sample 300 is restricted to the orientation of the third opening 43 .

Here, the third opening 43 extends parallel to the front wall 25 and the rear wall 26. The second openings 40, 41 are provided in the front wall 25 and the rear wall 26.
Therefore, the front and back surfaces of the sample support member 11 face the front wall 25 and the back wall 26. The sample 300 is attached to the support portion 51 of the sample support member 11, and the main surface 301 of the sample 300 faces the front wall 25 and the back wall 26. In addition, the second openings 40, 41 are provided in the front wall 25 and the back wall 26, so the second openings 40, 41 face the main surface 301 of the sample 300.

As described above, the third opening 43 is located directly below the first opening 33 , and the opening plane of the third opening 43 intersects with the first center line 100 .
Therefore, the upper edge 55 of the support portion 51 of the sample support member 11 and the sample 300 are positioned directly below the first opening 33, and the third opening 43 faces the lower edge 56 of the support portion 51 of the sample support member 11 and the edge portion 302 of the sample 300.

Next, the functions of the electrical characteristic measuring apparatus 1 will be described.
In preparation for measuring the S parameters, a sample 300 is placed in the accommodation space 30 of the space forming member 10 .
As shown in FIG. 2, a sample 300 is held by the support portion 51 of the sample support member 11 , and the sample support member 11 is placed on the base member 12 .
In this state, the space forming member 10 is placed over the sample support member 11 and the sample 300. As a result, the sample support member 11 and the sample 300 enter the accommodation space 30 through the third opening 43.

In the electrical characteristic measuring device 1 of this embodiment, the connection pipe 31 of the space forming member 10 and the gas supply device (gas supply section) 13 are connected by a duct 52, and temperature-adjusted air is supplied from the gas supply device 13 to the storage space 30 of the space forming member 10 from the first opening 33, and excess gas is mainly released to the outside from the second openings 40, 41.

As described above, the sample 300 is disposed at a position directly below the first opening 33, and the third opening 43 faces the side portion 302 of the sample 300. The first opening 33 also faces the side portion 302 of the sample 300.
3, the air blown out from the first opening 33 into the housing space 30 flows parallel to the main surface 301. Therefore, the dynamic pressure of the air is not easily applied to the sample 300, and the sample 300 is not easily shaken.
In addition, since the sample 300 is surrounded by gas whose temperature is adjusted by the gas supply device (gas supply section) 13, the temperature of the sample 300 becomes familiar with the temperature of the gas and is adjusted to approximately the same temperature as the gas temperature.

In addition, since the excess gas is released to the outside from the second openings 40 and 41, outside air is less likely to enter from the second openings 40 and 41.
The second openings 40, 41 are located above and away from the bottom wall 22. Therefore, for example, when the storage space 30 is adjusted to a low-temperature environment, cold air is expected to remain between the bottom wall 22 and the second openings 40, 41, preventing outside air from entering.

Under this environment, the S parameters are measured. That is, a microwave is irradiated from the transmitting antenna 5 to the sample 300, and the microwave that passes through is received by the receiving antenna 6.
According to this embodiment, the sample 300 can be placed in a desired environment and the S parameters can be measured.
Furthermore, according to this embodiment, since the transmitting antenna 5 and the receiving antenna 6 are located outside the electrical characteristic measurement temperature chamber 2, it is possible to avoid exposing the antennas to high temperature or low temperature environments.
Furthermore, according to this embodiment, since the second openings 40 and 41 are open, it is possible to measure S parameters without being affected by radio wave attenuation even in a desired environment.

In addition, since the storage space 30 tends to have a positive pressure and excess gas is constantly released from the second openings 40, 41, outside air is unlikely to enter from the second openings 40, 41. Therefore, for example, even if the storage space 30 is adjusted to a low-temperature environment, condensation or frost is unlikely to occur.
In addition, in this embodiment, low-humidity air obtained by adjusting the temperature of dry air is supplied to the space forming member 10, so that even if the storage space 30 is adjusted to a high-temperature environment and the discharged gas is cooled by outside air, steam is unlikely to be generated.

The electrical characteristic measuring device 1 described above is used for a method called transmission measurement, and has a planar layout in which the transmitting antenna 5 and the receiving antenna 6 are arranged facing each other at a distance from each other, with the space forming member 10 of the electrical characteristic measuring temperature chamber 2 being placed between them, as shown in Fig. 4(a). Therefore, two second openings 40, 41 are provided. However, the present invention is not limited to this configuration, and the number of second openings can be changed depending on the application.
In the modified examples described below, the same members are given the same numbers and duplicated descriptions are omitted.
In addition to the above measurement method, there is also a method called oblique incidence reflection measurement. When the present invention is applied to oblique incidence reflection measurement, the transmitting antenna 5 and the receiving antenna 6 are arranged in a fan shape with respect to the sample 300, as shown in FIG.
The space forming member 70 used for oblique incidence reflection measurement has the second opening 40 only in the front wall 25. That is, the space forming member 70 does not have the second opening 41.

Although the space forming members 10 and 70 described above are both rectangular parallelepipeds, the shape of the space forming member is arbitrary. In the modified examples described below, the same members are given the same numbers and duplicated descriptions are omitted.
5A is cylindrical and has a top wall 21. In the space forming member 71, the connecting pipe 31 is attached to the top wall 21, and second openings 40, 41 are provided on a side surface 80 of the cylindrical member.
In the space forming member 71 as well, the second openings 40, 41 are provided on a surface different from the surface on which the first opening 33 is provided. The surface on which the first opening 33 is provided (the top wall 21) intersects with the surface on which the second openings 40, 41 are provided (the side surface 80) at an angle of 90 degrees.
In addition, the first center line 100 and the second center line 200 intersect at an angle of 90 degrees. The opening surface of the third opening 43 intersects with the first center line 100.

5B is a polygonal prism having a top wall 21. Specifically, the space forming member 72 is a hexagonal prism. Even in the space forming member 72, the second openings 40, 41 are provided on a surface different from the surface on which the first opening 33 is provided. The surface on which the first opening 33 is provided (top wall 21) intersects at an angle of 90 degrees with the surfaces on which the second openings 40, 41 are provided (front wall 25, back wall 26).
In addition, the first center line 100 and the second center line 200 intersect at an angle of 90 degrees. The opening surface of the third opening 43 intersects with the first center line 100.

A space forming member 73 shown in FIG. 5C has an inclined wall 81 between the top wall 21 and the front wall 25 etc., and the top wall 21 and the front wall 25 etc. do not directly intersect with each other.
However, since the top wall 21 is in a horizontal position and the front wall 25 is in a nearly vertical position, the imaginary extension plane 82 of the top wall 21 and the imaginary extension plane 83 of the front wall 25 intersect at an angle of 90 degrees.
In addition, the first center line 100 and the second center line 200 intersect at an angle of 90 degrees. The opening surface of the third opening 43 intersects with the first center line 100.

The space forming members 71, 72, and 73 shown in FIG. 5 may also be in a relationship in which the first center line 100 and the second center line 200 intersect when viewed from one side, as in the Y-Z plane in FIG. 8(b).

The volume of the space forming member is arbitrary, and can be manufactured to an appropriate size according to the size of the sample 300. By manufacturing the size of the space forming member according to the size of the sample 300, the amount of gas supply required for environmental adjustment of the storage space 30 can be reduced.

The positions and sizes of the second openings 40 and 41 can be appropriately designed according to the beam width and incident angle of the electromagnetic waves.
From the standpoint of preventing the intrusion of outside air, it is desirable that the positions and sizes of the second openings 40, 41 be small.
Moreover, the space forming member does not have to have the second opening 41 as described above.

In the embodiment described above, the second openings 40, 41 are always in an open state, but the second openings 40, 41 may be capable of being closed.
In the space forming member 75 shown in FIG. 6, the second openings 40, 41 are provided with opening/closing means 85 such as a door or a shutter.
The space forming member 75 adjusts the temperature and the like within the accommodation space 30 by closing the opening/closing means 85, and irradiates the sample with electromagnetic waves by opening the opening/closing means 85.

In the above-described embodiments, the first opening 33 is provided on the top surface side, but the first opening 33 may be provided on another surface. For example, the first opening 33 may be provided on the side walls 27 and 28.
In addition, in the space forming member 73 shown in FIG. 5C, the first opening 33 may be provided in the inclined wall 81.

9 and 10, a space forming member 77 is provided with a first opening 33 in a side wall 27. For ease of illustration, the base member 12 is omitted in Fig. 10(a).
1, the space forming member 77 has a main body 20 in the shape of a rectangular parallelepiped box, and has a top wall 21, a bottom wall 22, a front wall 25, a back wall 26, and left and right side walls 27, 28. An accommodation space 30 is formed inside the space forming member 77 by the above-mentioned multiple wall surfaces.
The side wall 27 in which the first opening 33 is provided and the front wall 25 and rear wall 26 in which the second openings 40, 41 are provided are perpendicular to each other.

In the space forming member 77, a connecting pipe 31 is attached to the side wall 27 (first surface). The connecting pipe 31 penetrates the side wall 27 and connects the storage space 30 to the outside. The opening of the connecting pipe 31 is the first opening 33 that introduces gas into the storage space 30. In this embodiment, the first opening 33 opens to the side surface of the space forming member 77.

In this embodiment as well, second openings 40, 41 are provided in the front wall 25 (second surface) and the rear wall 26 (second surface).
In this embodiment as well, the second openings 40, 41 are provided on a surface different from the first opening 33. The surface on which the first opening 33 is provided (the side wall 27) intersects at an angle of 90 degrees with the surfaces on which the second openings 40, 41 are provided (the front wall 25 and the rear wall 26).

In this embodiment as well, a first center line 100 passing through the center of the first opening 33 and a second center line 200 passing through the centers of the second openings 40, 41 intersect at an angle of 90 degrees as shown in FIG.
In this embodiment, the first center line 100 and the second center line 200 intersect with each other, but this is not limited to this. For example, the first center line 100 and the second center line 200 may intersect with each other when viewed from one side, as in the YZ plane in Figure 8 (b) described above.

In this embodiment, temperature-controlled gas is supplied to the storage space 30 of the space-forming member 77 through the first opening 33 provided in the side wall 27, and excess gas is mainly released to the outside through the second openings 40 and 41.

The sample 300 is placed at a position directly beside the first opening 33. The first opening 33 faces a side portion 302 of the sample 300.
The air blown out from the first opening 33 into the housing space 30 flows parallel to the main surface 301 of the sample 300. Therefore, the dynamic pressure of the air is not easily applied to the sample 300, and the sample 300 is not easily shaken.
Furthermore, since the sample 300 is surrounded by temperature-adjusted gas, the temperature of the sample 300 becomes familiar with the temperature of the gas and is adjusted to be approximately the same as the temperature of the gas.

As described above, the shape of the space forming member is arbitrary, and therefore the position at which the first opening 33 is provided can also be changed according to the shape of the space forming member.
11A is a cylindrical member having a top wall 21. In the space forming member 61, the connecting pipe 31 (first opening 33) and the second openings 40, 41 are provided on a side surface 80 of the cylindrical member.
In the space forming member 61 as well, a first center line 100 passing through the center of the first opening 33 and a second center line 200 passing through the centers of the second openings 40, 41 intersect at an angle of 90 degrees.

The space forming member 62 shown in FIG. 11( b ) is in the shape of a polygonal prism having a top wall 21 .
In the space forming member 62, the connecting pipe 31 (first opening 33) is provided on one of the side surfaces 80. In the space forming member 62 as well, the second openings 40, 41 are provided on a surface different from the surface on which the first opening 33 is provided.
In the space forming member 62, a first center line 100 passing through the center of the first opening 33 and a second center line 200 passing through the centers of the second openings 40, 41 intersect at an angle of 60 degrees.
As for the space forming members 61 and 62 shown in Figures 11(a) and (b), the first center line 100 and the second center line 200 may be in a relationship in which they intersect when viewed from one side, as in the YZ plane in Figure 8(b).

11(c) has an inclined wall 81 between the top wall 21 and the front wall 25, etc., and the connecting pipe 31 (first opening 33) is provided in the inclined wall 81. The second openings 40, 41 are provided in the front wall 25 and the back wall 26.
In the space forming member 63, a first center line 100 passing through the center of the first opening 33 and a second center line 200 passing through the centers of the second openings 40, 41 intersect when viewed from the direction of arrow A.

In the embodiment described above, the sample 300 is placed in the storage space 30 by covering the sample 300 with the space-forming member, but the sample 300 may be placed in the storage space 30 by opening one of the faces of the space-forming member.
A space forming member 79 shown in FIG. 12 has a structure that allows any one of the faces of the space forming member to be opened.
A space forming member 79 shown in FIG. 12 is the same as the space forming member 77 shown in FIGS.

12(b), in this embodiment, the entire top wall 21, the entire front wall 25, and a part of the bottom wall 22 are integrated and independent from other parts (hereinafter referred to as the housing part 98) to form the opening/closing door 78. That is, the opening/closing door 78 has a top plate part 89 that forms the top wall 21, and a vertical wall part 90 that is installed perpendicular to one side of the top plate part 89 and forms the front wall 25, and a bottom plate part 91 that forms a part of the bottom wall 22 is provided at the lower side of the vertical wall part 90. The bottom wall 22 on the housing part 98 side is largely cut out.
The depth w of the bottom plate portion 91 is smaller than the depth W of the cutout portion 93 of the bottom wall 22 of the housing portion 98, and when the opening/closing door 78 is closed, a gap equivalent to the third opening 43 is formed between the bottom wall 22 of the housing portion 98 and the bottom plate portion 91 of the opening/closing door 78.
One side of the opening/closing door 78 is connected to the upper edge of the rear wall 26 of the housing part 98 via a hinge 99, and the opening/closing door 78 can be flipped up to open the top surface, the front surface, and part of the bottom surface of the storage space 30.

A screw shaft 96 with a knob 95 is attached to the vertical wall portion 90 of the opening/closing door 78. A screw hole 97 is provided in the end face of the bottom wall 22 of the housing portion 98.
By closing the opening/closing door 78 and engaging the screw shaft 96 with the screw hole 97 , the opening/closing door 78 can be fixed to the housing part 98 .

In this embodiment, the opening and closing door 78 is opened, and the sample support member 11 holding the sample 300 is placed in the space forming member 79. The sample support member 11 is placed on the base member 12, and the sample 300 enters the storage space 30.
In this embodiment, the opening/closing door 78 has a bottom plate portion 91 that constitutes a part of the bottom wall 22, and by opening the opening/closing door 78, an area from the side portion of the bottom wall 22 to the third opening 43 becomes open. Therefore, with the space forming member 79 fixed to the base member 12, the sample 300 can be placed in the accommodation space 30.

The opening/closing door 78 of the space forming member 79 shown in Figure 12 opens three of the space forming member 79, namely the top wall 21, the front wall 25, and a part of the bottom wall 22, but it may also open only the front wall 25 or the back wall 26, and a part of the bottom.
Also, only any one of the top wall 21, the front wall 25, the back wall 26, and the left and right side walls 27, 28 may be opened or closed.
The space forming member 79 is configured to assume a raised position when the opening/closing door 78 is opened, as shown in FIG. 12(b), but the opening/closing direction of the opening/closing door is not limited, and the door may open to the left or right.

The opening and closing door 78 can also be used in other embodiments. For example, an opening and closing door 78 as shown in FIG. 12 can be used, and the first opening 33 can be formed by attaching the connecting pipe 31 to the top plate portion 89 of the opening and closing door.

In the embodiment described above, the excess gas is exhausted from the second openings 40, 41. However, an exhaust port 87 may be provided in another portion, such as the space forming member 76 shown in FIG.
7, the second openings 40, 41 may be sealed with a sealing member 88 made of a material that easily transmits electromagnetic waves. The sealing member 88 may be provided in either one of the second openings 40 and 41.

In the embodiment described above, the gas supply device 13 supplies temperature-adjusted gas unilaterally to the space forming member , and excess gas is released to the outside from the space forming member .
According to this configuration, even if outside air enters the storage space 30, the gas does not return to the gas supply device 13, so frost is unlikely to form on the cooler of the gas supply device 13, and interruptions to defrosting are unlikely to occur. Another advantage is that there is no humidification due to melting of frost.
However, the present invention does not deny the adoption of a configuration in which gas is circulated between the gas supply device 13 and the space forming member.
The gas supply device 13 and the space forming member may be integrated together.

In the embodiment described above, the bottom wall 22 of the main body 20 has the third opening 43 for inserting the sample 300, and the third opening 43 is shaped like a slit to regulate the attitude of the sample support member 11. Therefore, when the sample 300 is inserted into the main body 20 with the sample 300 attached to the sample support member 11, the main surface 301 of the sample 300 necessarily faces the second openings 40, 41.
In this embodiment, the attitude of the sample 300 is regulated by the third opening 43. That is, in this embodiment, the third opening 43 serves as an attitude regulating means for regulating the attitude of the sample 300.
The position restriction means is not limited to the one utilizing the third opening 43 .
For example, the base member 12 may have a mark or an engagement portion to limit the position and posture at which the space forming member and the sample support member 11 are placed. In this case, it is also recommended to adopt a configuration in which the main surface 301 of the sample 300 necessarily faces the second openings 40 and 41 by installing the space forming member and the sample support member 11 at a specific position and in a specific posture.

In the embodiment described above, the space forming member has the legs 18 , but the space forming member does not necessarily have to have the legs 18 .
Furthermore, although the main body 20 has the bottom wall 22, the bottom wall 22 need not necessarily be provided. In other words, the main body 20 may have a shape that is concave downward.

In the embodiment described above, the two second openings 40, 41 have the same shape, but the two second openings 40, 41 may have different shapes. For example, one second opening may be circular and the other may be rectangular.
In the embodiment described above, the center line of the second opening 40 and the center line of the second opening 41 coincide with each other, but they may be different from each other.

The space-forming member may be covered with insulating material.

1 Electrical characteristic measuring device 2 Temperature chamber for measuring electrical characteristics 5 Transmitting antenna (electromagnetic wave irradiation device)
6 Receiving antenna (electromagnetic wave receiving device)
10, 61, 62, 63 Space forming member 70, 71, 72, 73, 75, 76, 77, 79 Space forming member 11 Sample support member 13 Gas supply device 21 Top wall (first surface)
22 Bottom wall 25 Front wall (second surface)
26 Back wall (2nd surface)
27 Side wall 28 Side wall 30 Storage space 31 Connection tube 33 First opening 40 Second opening 41 Second opening 43 Third opening 85 Opening/closing means 87 Exhaust port 88 Closing member 100 First center line 200 Second center line 300 Sample 301 Main surface 302 Side portion

Claims (10)

A temperature chamber for measuring electrical characteristics in which a sample is placed and electromagnetic waves are irradiated onto the sample to obtain data relating to the electrical characteristics of the sample,
a space forming member that forms a storage space that covers the sample,
the space forming member has a first opening for supplying a gas to the accommodation space and one or more second openings for passing an electromagnetic wave irradiated in a space outside the space forming member ;
The first opening and the second opening are in a positional relationship in which a center line of the first opening and a center line of the second opening intersect with each other or intersect with each other when viewed from one side,
2. A temperature chamber for measuring electrical characteristics, comprising: a passage formed for discharging to the outside a part or all of the gas supplied from the first opening to the accommodation space . The temperature bath for measuring electrical characteristics according to claim 1, characterized in that the space forming member has a plurality of surfaces, the first opening is provided on at least one of the surfaces, the second opening is provided on the other surface, and the first surface on which the first opening is provided or a virtual extension of the first surface intersects with the second surface on which the second opening is provided or a virtual extension of the second surface. The temperature bath for measuring electrical characteristics according to claim 2, characterized in that the first surface or a virtual extension of the first surface and the second surface or a virtual extension of the second surface are in a perpendicular relationship. A sample support member is provided, the sample support member being in the form of a foil and/or a plate and configured to support a planar sample;
4. A temperature chamber for measuring electrical characteristics as described in any one of claims 1 to 3, characterized in that the second opening is located at a position facing a main surface of the sample, and the first opening is located at a position facing a side of the sample. A temperature chamber for measuring electrical characteristics according to any one of claims 1 to 4, characterized in that a part or all of the gas supplied to the storage space from the first opening is discharged to the outside from the second opening. 6. The temperature chamber for measuring electrical characteristics according to claim 1, wherein the space forming member has a third opening, and the sample is inserted into the storage space through the third opening. A temperature chamber for measuring electrical characteristics according to any one of claims 1 to 6, characterized in that a sealing member made of a material that easily transmits electromagnetic waves is attached to the second opening. A temperature chamber for measuring electrical characteristics according to any one of claims 1 to 7, characterized in that it has a gas supply unit that supplies temperature-adjusted gas, and is capable of adjusting the environment within the space-forming member by supplying the gas from the gas supply unit to the space-forming member. An electrical characteristic measuring device comprising an electrical characteristic measuring temperature chamber according to any one of claims 1 to 8, an electromagnetic wave irradiating device for irradiating electromagnetic waves, and an electromagnetic wave receiving device for receiving electromagnetic waves. 1. An electrical characteristic measuring method for irradiating a foil-like and/or plate-like sample with electromagnetic waves to obtain data relating to electrical characteristics of the sample, comprising:
The sample is placed in a space forming member having an opening through which the electromagnetic wave passes;
supplying a gas adjusted to a predetermined temperature into the space forming member from a direction facing the side of the sample, and placing the sample in a ventilated environment of the gas;
In this state, the electromagnetic wave is irradiated onto the main surface of the sample from the space outside the space forming member to obtain data related to the electrical characteristics of the sample ;
The electrical characteristic measuring method according to claim 1, wherein a part or all of the gas supplied into the space forming member is discharged to the outside of the space forming member .

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