JP7609833B2 - 熱処理システム - Google Patents
熱処理システム Download PDFInfo
- Publication number
- JP7609833B2 JP7609833B2 JP2022146363A JP2022146363A JP7609833B2 JP 7609833 B2 JP7609833 B2 JP 7609833B2 JP 2022146363 A JP2022146363 A JP 2022146363A JP 2022146363 A JP2022146363 A JP 2022146363A JP 7609833 B2 JP7609833 B2 JP 7609833B2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- transport
- heat treatment
- main body
- sagger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path
- F27B9/26—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path on or in trucks, sleds, or containers
- F27B9/262—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path on or in trucks, sleds, or containers on or in trucks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
- F27B9/021—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces having two or more parallel tracks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
- F27B9/045—Furnaces with controlled atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
- F27B9/38—Arrangements of devices for charging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D25/00—Devices or methods for removing incrustations, e.g. slag, metal deposits, dust; Devices or methods for preventing the adherence of slag
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens or the like for the charge within the furnace
- F27D5/0068—Containers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Tunnel Furnaces (AREA)
- Furnace Charging Or Discharging (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
2:匣鉢
10:熱処理炉
30:搬出搬送装置
32:搬送ローラ
34:本体搬送装置
36:蓋搬送装置
38:搬入搬送装置
40:被処理物供給装置
42:被処理物回収装置
44:本体清掃装置
46:本体割れ検知装置
50:蓋外し装置
52:蓋清掃装置
54:蓋割れ検知装置
56:蓋回収装置
58:蓋供給装置
60:蓋保管庫
62:蓋整列装置
64:蓋取付け装置
Claims (9)
- 匣鉢本体と前記匣鉢本体に取付可能な蓋とを備える匣鉢に収容される被処理物を熱処理する熱処理炉であって、搬入口と搬出口とを備え、前記搬入口から前記搬出口に匣鉢を搬送する間に前記匣鉢に収容された被処理物を熱処理する、熱処理炉と、
前記熱処理炉の前記搬出口から搬出された前記匣鉢から前記蓋を取り外す蓋外し装置と、
前記蓋外し装置で前記蓋が外された前記匣鉢本体を搬送する本体搬送装置と、
前記蓋外し装置で外された前記蓋を搬送する蓋搬送装置と、
前記本体搬送装置の搬送経路上に設けられ、前記熱処理炉で熱処理された前記被処理物を前記匣鉢本体から回収する回収装置と、
前記本体搬送装置の搬送経路上であって、前記回収装置の下流に設けられ、前記被処理物が収容されていない前記匣鉢本体に、熱処理前の前記被処理物を供給する供給装置と、
前記本体搬送装置で搬送され、前記供給装置で熱処理前の前記被処理物が供給された前記匣鉢本体に、前記蓋搬送装置で搬送された前記蓋を取り付ける蓋取付け装置と、
を備えており、
前記蓋搬送装置の搬送経路は、前記本体搬送装置の搬送経路と平行であると共に、前記熱処理炉と前記本体搬送装置の搬送経路との間に配置されており、
前記蓋が前記蓋搬送装置の搬送経路の蓋外し装置側の入口から蓋取付け装置側の出口まで搬送される搬送時間は、前記匣鉢本体が前記本体搬送装置の搬送経路の蓋外し装置側の入口から蓋取付け装置側の出口まで搬送される搬送時間より短くされている、熱処理システム。 - 前記匣鉢本体が前記本体搬送装置の搬送経路の蓋外し装置側の入口から蓋取付け装置側の出口まで搬送される搬送時間は、前記蓋が前記蓋搬送装置の搬送経路の蓋外し装置側の入口から蓋取付け装置側の出口まで搬送される搬送時間の1.1~5.0倍である、請求項1に記載の熱処理システム。
- 前記蓋搬送装置の搬送経路の蓋取付け装置側の出口近傍に設けられ、前記蓋を整列させる蓋整列機構をさらに備えている、請求項1に記載の熱処理システム。
- 前記蓋搬送装置の搬送経路に設けられ、前記蓋を清掃する清掃装置をさらに備えている、請求項1に記載の熱処理システム。
- 前記蓋搬送装置の搬送経路に設けられ、前記蓋の不良を検査する蓋検査装置をさらに備えている、請求項1に記載の熱処理システム。
- 前記蓋搬送装置の搬送経路であって、前記蓋検査装置の下流に設けられ、前記蓋検査装置で不良と判定された蓋を回収する蓋回収装置をさらに備えている、請求項5に記載の熱処理システム。
- 前記蓋搬送装置の搬送経路に設けられ、前記蓋搬送装置の搬送経路に蓋を供給する蓋供給装置をさらに備えている、請求項6に記載の熱処理システム。
- 前記蓋供給装置から供給される蓋を保管する蓋保管部をさらに備えている、請求項7に記載の熱処理システム。
- 前記本体搬送装置の搬送経路を覆う第1フードと、
前記蓋搬送装置の搬送経路を覆う第2フードと、をさらに備えており、
前記蓋搬送装置の搬送面から前記第2フードまでの高さは、前記本体搬送装置の搬送面から前記第1フードまでの高さより小さくされている、請求項1~8のいずれか一項に記載の熱処理システム。
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022146363A JP7609833B2 (ja) | 2022-09-14 | 2022-09-14 | 熱処理システム |
| CN202311105944.0A CN117704798A (zh) | 2022-09-14 | 2023-08-30 | 热处理系统 |
| US18/460,780 US12553666B2 (en) | 2022-09-14 | 2023-09-05 | Heat treatment system |
| DE102023124627.5A DE102023124627A1 (de) | 2022-09-14 | 2023-09-12 | Wärmebehandlungsanlage |
| JP2024224424A JP2025031827A (ja) | 2022-09-14 | 2024-12-19 | 熱処理システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022146363A JP7609833B2 (ja) | 2022-09-14 | 2022-09-14 | 熱処理システム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024224424A Division JP2025031827A (ja) | 2022-09-14 | 2024-12-19 | 熱処理システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024041508A JP2024041508A (ja) | 2024-03-27 |
| JP7609833B2 true JP7609833B2 (ja) | 2025-01-07 |
Family
ID=90054743
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022146363A Active JP7609833B2 (ja) | 2022-09-14 | 2022-09-14 | 熱処理システム |
| JP2024224424A Pending JP2025031827A (ja) | 2022-09-14 | 2024-12-19 | 熱処理システム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024224424A Pending JP2025031827A (ja) | 2022-09-14 | 2024-12-19 | 熱処理システム |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12553666B2 (ja) |
| JP (2) | JP7609833B2 (ja) |
| CN (1) | CN117704798A (ja) |
| DE (1) | DE102023124627A1 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7745030B1 (ja) | 2024-04-04 | 2025-09-26 | ノリタケ株式会社 | 焼成冷却システム |
| EP4686901A1 (de) * | 2024-07-30 | 2026-02-04 | Riedhammer Gmbh | Ofensystem zur wärmebehandlung von produkten und verfahren zum betreiben eines solchen ofensystems |
| JP7691568B1 (ja) * | 2024-10-24 | 2025-06-11 | ノリタケ株式会社 | 熱処理システム |
| JP7691567B1 (ja) * | 2024-10-24 | 2025-06-11 | ノリタケ株式会社 | 熱処理システム |
| JP7759464B1 (ja) * | 2024-10-24 | 2025-10-23 | ノリタケ株式会社 | 熱処理システム |
| JP7836445B1 (ja) * | 2025-03-19 | 2026-03-26 | ノリタケ株式会社 | 清掃装置、および、それを用いた熱処理システム |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005026513A (ja) | 2003-07-03 | 2005-01-27 | Tokyo Electron Ltd | 処理装置 |
| JP2008145095A (ja) | 2006-05-01 | 2008-06-26 | Ibiden Co Ltd | 焼成用治具組立装置、焼成用治具分解装置、循環装置、セラミック成形体の焼成方法、及び、ハニカム構造体の製造方法 |
| WO2019138887A1 (ja) | 2018-01-11 | 2019-07-18 | 日本碍子株式会社 | 熱処理炉 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3330986B2 (ja) * | 1992-11-17 | 2002-10-07 | 住友化学工業株式会社 | 粉体の充填および回収装置 |
| JPH08313161A (ja) * | 1995-05-19 | 1996-11-29 | Murata Mfg Co Ltd | 連続式熱処理炉および被処理物収納容器 |
| JP3882214B2 (ja) * | 1995-10-05 | 2007-02-14 | 株式会社村田製作所 | 焼成装置 |
| CN110709339B (zh) * | 2017-04-13 | 2022-06-21 | 理查德S.伯恩斯公司 | 处理碎屑的系统和方法 |
| JP7047563B2 (ja) | 2018-04-18 | 2022-04-05 | 住友金属鉱山株式会社 | 焼成装置 |
| JP7041302B1 (ja) | 2021-03-26 | 2022-03-23 | 株式会社ノリタケカンパニーリミテド | 連続焼成システム |
-
2022
- 2022-09-14 JP JP2022146363A patent/JP7609833B2/ja active Active
-
2023
- 2023-08-30 CN CN202311105944.0A patent/CN117704798A/zh active Pending
- 2023-09-05 US US18/460,780 patent/US12553666B2/en active Active
- 2023-09-12 DE DE102023124627.5A patent/DE102023124627A1/de active Pending
-
2024
- 2024-12-19 JP JP2024224424A patent/JP2025031827A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005026513A (ja) | 2003-07-03 | 2005-01-27 | Tokyo Electron Ltd | 処理装置 |
| JP2008145095A (ja) | 2006-05-01 | 2008-06-26 | Ibiden Co Ltd | 焼成用治具組立装置、焼成用治具分解装置、循環装置、セラミック成形体の焼成方法、及び、ハニカム構造体の製造方法 |
| WO2019138887A1 (ja) | 2018-01-11 | 2019-07-18 | 日本碍子株式会社 | 熱処理炉 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102023124627A1 (de) | 2024-03-14 |
| JP2024041508A (ja) | 2024-03-27 |
| JP2025031827A (ja) | 2025-03-07 |
| CN117704798A (zh) | 2024-03-15 |
| US12553666B2 (en) | 2026-02-17 |
| US20240085111A1 (en) | 2024-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7609833B2 (ja) | 熱処理システム | |
| JP4801711B2 (ja) | カセットから炉へのウエーハ移送用のシステム及び方法 | |
| JP7621319B2 (ja) | 熱処理システム | |
| KR101295791B1 (ko) | 기판 처리 설비 및 기판 처리 방법 | |
| CN101840844B (zh) | 衬底处理装置 | |
| CN220738688U (zh) | 清洗系统 | |
| JP2025023117A (ja) | 熱処理システム | |
| JP3248129B2 (ja) | 基板搬送処理装置 | |
| CN1246895C (zh) | 升降式基板处理装置及具备其的基板处理系统 | |
| CN104617012A (zh) | 基板处理装置 | |
| KR101391064B1 (ko) | 이온 공급 장치 및 이것을 구비한 피처리체의 처리 시스템 | |
| JP7610552B2 (ja) | 熱処理システム | |
| JP3656329B2 (ja) | 金属材料マクロ組織試験装置 | |
| JP2001060610A (ja) | 基板搬送装置、処理装置、基板の処理システム、搬送方法、収納装置および収容ボックス | |
| JP3202875B2 (ja) | 把持具と保持具のずれ測定装置及び位置合わせ方法、ずれ測定用治具、把持具と保持具のずれ診断方法、及び、洗浄装置と洗浄方法 | |
| JP4791379B2 (ja) | 基板処理装置、基板搬送方法、制御プログラムおよびコンピュータ読取可能な記憶媒体 | |
| CN112153815B (zh) | 烘烤设备 | |
| TWM577841U (zh) | Tower heating furnace and automatic processing device including tower heating furnace | |
| JP2006060075A (ja) | 剥離装置、剥離方法、ガラス基板、及び、フラットパネルディスプレイ | |
| CN118202446A (zh) | 基板处理装置 | |
| JP2026046928A (ja) | ウエット処理装置、及び、ウエット処理方法 | |
| CN121848296A (zh) | 一种结构更简单的喷砂设备 | |
| JPH10189683A (ja) | キャリア載置装置および基板処理装置 | |
| JP2003343980A (ja) | 溶湯監視装置およびそれを備えた真空溶解装置 | |
| JP2010283178A (ja) | 半導体製造装置及び半導体製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20240417 |
|
| A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20240513 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240625 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20240806 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20241004 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20241126 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20241219 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7609833 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |