JP7615558B2 - Inspection fixtures and inspection equipment - Google Patents

Description

The present invention relates to an inspection tool equipped with contacts and an inspection device using the same.

There is a known probe card that includes a support member having upper and lower support holes that position and support the upper and lower parts of a wire probe, and a flexible guide film that supports the middle part of the wire probe by bending it in one direction (see, for example, Patent Document 1). The lower support hole of this support member is formed in the first and second bottom plates that are laminated together.

Patent document 1 states that if the guide film is too flexible, the elasticity of the wire probe may stretch the guide film, causing it to bend up and down. Therefore, the technology described in patent document 1 applies a reinforcing film to the surface of the guide film to suppress bending caused by the expansion and contraction of the guide film.

JP 2012-103125 A

However, in Patent Document 1, the force that bends the guide film up and down is also applied to the first and second bottom plates, which have lower support holes through which the wire probes are inserted, in the same way as the guide film. Therefore, there is a risk that stress will be applied to the first and second bottom plates.

The object of the present invention is to provide an inspection tool and an inspection device that can easily reduce the stress applied to the support part that supports the contacts.

An inspection jig according to one embodiment of the present invention includes a rod-shaped contactor, a first support portion supporting one end of the contactor, a second support portion supporting the other end of the contactor, and a spacing member that keeps the first support portion and the second support portion spaced apart from each other. The first support portion includes a support plate having a through hole through which the contactor is inserted, and a reinforcing plate having a bending strength greater than that of the support plate is disposed on the surface of the support plate facing the second support portion.

An inspection device according to one embodiment of the present invention includes the above-mentioned inspection tool and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected.

An inspection jig and inspection device configured in this way makes it easier to reduce the stress applied to the support part that supports the contacts.

1 is a conceptual diagram illustrating an example of the configuration of an inspection device 1 that uses an inspection jig 3 according to an embodiment of the present invention. 2 is a plan view of the inspection jig 3 shown in FIG. 1 as viewed from the tip side of the contact Pr. 3 is an end view of the inspection jig 3 shown in FIG. 2 taken along line III-III. 4 is an end view of the inspection jig 3 shown in FIG. 2 taken along line IV-IV. 5 is a plan view of the reinforcing plate 5 shown in FIGS. 3 and 4 as viewed from the Z direction. FIG. 6 is a plan view showing a modified example of the reinforcing plate 5 shown in FIG. 5. 1 is an explanatory diagram showing an example of a state in which the inspection jig 3 is abutted against the substrate 100. FIG. 11 is an explanatory diagram conceptually showing the behavior of the plate PL when the contact Pr is pressed in. FIG. 1 is an enlarged explanatory view of a through hole PLH and a contact Pr formed in a plate PL. FIG. 11 is an explanatory diagram conceptually showing the behavior of the plate PL when the pressing load of the contact Pr is released. FIG. 1 is an enlarged explanatory view of a through hole PLH and a contact Pr formed in a plate PL. FIG. 13 is an enlarged end view showing the vicinity of a through hole B2H of a first support plate B2. FIG. FIG. 4 is an end view showing a modified example of the inspection jig 3 shown in FIG. 3 . 13 is an enlarged end view showing the vicinity of a through hole B2H of a reinforcing plate B2a. FIG. A cross-sectional view showing an example of a lubricating layer 33 formed on a plate PL.

The following describes an embodiment of the present invention with reference to the drawings. Note that components with the same reference numerals in each drawing are the same, and their description will be omitted. XYZ orthogonal coordinate axes are written as appropriate to indicate the orientation of each drawing. The inspection device 1 shown in FIG. 1 is a device for inspecting a substrate 100, which is an example of an object to be inspected.

The substrate 100 may be any of a variety of substrates, such as a printed wiring board, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or plasma display, a semiconductor substrate, and a package substrate or film carrier for a semiconductor package. Note that the object to be inspected is not limited to a substrate, and may be, for example, an electronic component such as a semiconductor element (IC: Integrated Circuit), or any other object that can be subjected to electrical inspection.

The inspection device 1 shown in FIG. 1 includes inspection units 4U and 4D, a substrate fixing device 6, and an inspection processing unit 8. The substrate fixing device 6 is configured to fix the substrate 100 to be inspected at a predetermined position. The inspection units 4U and 4D include inspection fixtures 3U and 3D. The inspection units 4U and 4D are capable of moving the inspection fixtures 3U and 3D in three mutually orthogonal axis directions of X, Y, and Z by a drive mechanism (not shown), and further capable of rotating the inspection fixtures 3U and 3D around the Z axis.

The inspection unit 4U is located above the substrate 100 fixed to the substrate fixing device 6. The inspection unit 4D is located below the substrate 100 fixed to the substrate fixing device 6. The inspection units 4U and 4D are configured to be able to detachably mount the inspection jigs 3U and 3D for inspecting the circuit pattern formed on the substrate 100. Hereinafter, the inspection units 4U and 4D are collectively referred to as the inspection unit 4.

Each of the inspection jigs 3U and 3D includes a plurality of contacts Pr, a support member 31 that holds the tips of the plurality of contacts Pr toward the substrate 100, and a base plate 321. The base plate 321 is provided with electrodes that contact and are conductive with the rear ends of the contacts Pr. The inspection units 4U and 4D include connection circuits (not shown) that electrically connect the rear ends of the contacts Pr to the inspection processing unit 8 via the electrodes of the base plate 321 and switch the connection.

The contact Pr has a generally rod-like shape. The support member 31 has a plurality of through holes formed therein that support the contact Pr. Each through hole is arranged to correspond to the position of an inspection point set on the wiring pattern of the board 100 to be inspected. This allows the tip of the contact Pr to come into contact with the inspection point of the board 100. The inspection point may be, for example, a wiring pattern, a pad, a solder bump, a connection terminal, a through hole, a via, etc.

The inspection jigs 3U and 3D are configured in the same way, except that they are attached to the inspection units 4U and 4D upside down. Hereinafter, the inspection jigs 3U and 3D are collectively referred to as the inspection jig 3. The inspection jig 3 is replaceable depending on the substrate 100 to be inspected.

The inspection processing unit 8 includes, for example, a power supply circuit, a voltmeter, an ammeter, and a microcomputer. The inspection processing unit 8 controls a drive mechanism (not shown) to move and position the inspection units 4U and 4D, and brings the tip of each contact Pr into contact with each inspection point on the board 100. This electrically connects each inspection point to the inspection processing unit 8. In this state, the inspection processing unit 8 supplies an inspection current or voltage to each inspection point on the board 100 via each contact Pr of the inspection jig 3, and performs an inspection of the board 100, such as for breaks or shorts in the circuit pattern, based on the voltage signal or current signal obtained from each contact Pr. Alternatively, the inspection processing unit 8 may measure the impedance of the inspection target based on the voltage signal or current signal obtained from each contact Pr by supplying an AC current or voltage to each inspection point.

Referring to Figures 2, 3, and 4, the support member 31 includes a first support portion 311 that supports the rear end side of the contact Pr, a second support portion 312 that supports the tip end side of the contact Pr, a spacing member 7 that keeps the first support portion 311 and the second support portion 312 spaced apart from each other, a spacer S, and a reinforcing plate 5.

The first support section 311 is constructed by stacking a first support plate B2 and second support plates C1, D, E1, E2 in the Z direction. The second support plates C1, D, E1, E2 are stacked in this order starting from the side closest to the second support section 312. The first support plate B2 is stacked on the second support plate C1. In other words, of the multiple support plates B2, C1, D, E1, E2 that constitute the first support section 311, the support plate closest to the second support section 312 is the first support plate B2 (opposing support plate).

The second support plate may be composed of three or less or five or more support plates. Alternatively, the first support portion 311 may be composed of a single support plate.

The first support plate B2 has through holes B2H formed therein for supporting each contact Pr.

The second support plates C1, D, E1, and E2 have through holes C1H, DH, E1H, and E2H formed therein to support each contact Pr.

The rear end side of the contact Pr is inserted through the through holes B2H, C1H, DH, E1H, and E2H. This allows the rear end side of the contact Pr to be supported by the first support portion 311.

The reinforcing plate 5 is disposed on the surface of the first support plate B2 facing the second support portion 312. Referring to FIG. 5, the reinforcing plate 5 is a substantially rectangular plate-like member. The reinforcing plate 5 has two substantially rectangular openings 5C that are elongated in the Y direction. The two openings 5C are opened so that, in a plan view, each opening includes an area that includes the multiple through holes B2H of the first support plate B2.

The inspection jig 3 may include a reinforcing plate 5a shown in FIG. 6 instead of the reinforcing plate 5. Instead of the two openings 5C, the reinforcing plate 5a has a plurality of through holes 5H formed therein that correspond one-to-one to the plurality of through holes B2H of the first support plate B2. A contact Pr may be inserted into each of the through holes 5H. The inner diameter of the through holes 5H is larger than that of the through holes B2H.

Referring to Figures 3 and 4, a spacer S having a substantially rectangular frame shape is laminated on the outer periphery of the reinforcing plate 5.

The second support section 312 is constructed by stacking support plates A, A2, and A3. The support plates A, A2, and A3 are stacked in this order from the side farthest from the first support section 311. The support plates A and A2 are formed with through holes AH and A2H for supporting each contact Pr. The support plate A3 is formed with a through hole A3H for supporting each contact Pr.

The second support portion 312 may be composed of two or less or four or more support plates.

The tip side of the contact Pr is inserted through the through holes AH, A2H, and A3H. This allows the tip side of the contact Pr to be supported by the second support portion 312.

A roughly rectangular tubular spacing member 7 extends from the outer periphery of the support plate A3. The support plate A3 and the spacing member 7 are integrally formed. As a result, the support plate A3 and the spacing member 7 form a spacing block B. Note that the support plate A3 and the spacing member 7 may be separate bodies.

The end face of the spacing member 7 is attached to the surface of the spacer S facing the second support portion 312. This causes the first support plate B2 and the support plate A3, i.e., the first support portion 311 and the second support portion 312, to be held apart by a distance equal to the length of the spacing member 7 in the Z direction plus the thickness of the spacer S and the thickness of the reinforcing plate 5. The support plates A, A2, A3, reinforcing plate 5, the first support plate B2, and the second support plates C1, D, E1, E2 are held in parallel.

The spacer S is a member for finely adjusting the distance between the first support portion 311 and the second support portion 312, and the inspection jig 3 does not necessarily need to include the spacer S.

The spacing member 7 is not limited to a rectangular tubular member. Any spacing member that can keep the first support portion 311 and the second support portion 312 apart from each other may be used. For example, a rod-shaped support may be used as the spacing member.

Through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H are provided perpendicular to each plate so that one and the same contact Pr can be inserted through them. The positions of the corresponding through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H are shifted in the X direction relative to the perpendicular direction (Z direction) of the support plates A, A2, and A3, the first support plate B2, and the second support plates C1, D, E1, and E2 so that the contact Pr is inclined relative to the perpendicular direction (Z direction).

As a result, each contact Pr is supported at an incline in the same direction in the X direction with respect to the Z direction. The tip of each contact Pr protrudes from the support plate A when not in contact with the substrate 100. Hereinafter, through holes AH, A2H, A3H, B2H, C1H, DH, E1H, E2H, and 5H will be collectively referred to as through holes H. Note that through holes H may penetrate each plate at an incline with respect to the perpendicular direction.

Referring to FIG. 2, when the inspection jig 3 is viewed from the support plate A side, the multiple through holes H are distributed in a first region P1 and a second region P2 that extend in a generally rectangular shape elongated in the Y direction. The X direction corresponds to an example of the first direction, and the Y direction corresponds to an example of the second direction.

The through holes H are arranged at equal intervals in the first region P1 and the second region P2. The first region P1 and the second region P2 are separated by a distance greater than the interval between the through holes H in the same region.

In the example shown in FIG. 2, the through holes H are arranged in five zigzag rows in the X direction (first direction) and eleven zigzag rows in the Y direction (second direction) in the first region P1. Similarly, the through holes H are arranged in five zigzag rows in the X direction (first direction) and eleven zigzag rows in the Y direction (second direction) in the second region P2.

That is, in the first region P1 and the second region P2 in which the through holes H are arranged at equal intervals, the number of rows of the through holes H corresponding to the X direction (first direction) is smaller than the number of rows of the through holes H corresponding to the Y direction (second direction). Note that the through holes H are not limited to being arranged in a zigzag pattern, but may be arranged linearly in the X direction and Y direction, i.e., in a lattice pattern. Also, although an example in which there are two regions in which the through holes H are arranged at equal intervals has been shown, there may be one such region, or three or more such regions.

As described above, the position of each through hole H is shifted in the X direction with respect to the direction of the perpendicular line (Z direction), so the direction of shift of the through holes H is along the X direction (first direction) in which the number of rows of the through holes H is small.

When the inspection jig 3 is brought into contact with the substrate 100 to inspect the substrate 100, the tip of each contact Pr is pressed into the second support portion 312, as shown in FIG. 7. At this time, since each contact Pr is supported at an incline in the same direction in the X direction, it bends in the X direction to absorb the amount of pressing of the contact Pr.

Here, the inclination of the contact Pr is determined by the direction of the misalignment of the through holes H, and since the direction of the misalignment of the through holes H is along the X direction (first direction) in which the number of rows of the through holes H is small, the inclination direction of the contact Pr and the bending direction of the contact Pr are also the X direction in which the number of rows of the through holes H is small.

When the contacts Pr bend, there is an increased risk of contact between adjacent contacts Pr in the bending direction. However, in the inspection jig 3, each contact Pr bends along the X direction (first direction) in which the number of rows of through holes H is small, so the risk of contact between the contacts Pr is reduced compared to when the contacts Pr bend along the Y direction (second direction) in which the number of rows of through holes H is large.

The direction of the offset of the through holes H does not necessarily have to be along the first direction in which the number of rows of the through holes H is small.

Referring to Figures 3 and 7, the support plates A, A2, A3, the spacing member 7, the spacer S, the first support plate B2, and the second support plates C1, D, E1, E2 are made of an insulating material, for example, a resin material. The reinforcing plates 5, 5a have a higher bending strength than the first support plate B2 and the second support plates C1, D, E1, E2. The reinforcing plates 5, 5a can be made of a material such as ceramics or fine ceramics.

The bending strength of the reinforcing plates 5, 5a, and B2a can be evaluated, for example, in accordance with JIS R 1601 "Test method for bending strength at room temperature of fine ceramics" or ISO 14704. The bending strength of the first support plate B2 and the second support plates C1, D, E1, and E2 can be evaluated, for example, in accordance with JIS K 7171 "Plastics - Determination of bending properties" or ISO 178. The bending strength of each plate is evaluated as follows. When assembled into the inspection jig, two points sandwiching the through hole through which the contact is expected to pass through the support plate, where the laminate of the support plate and the reinforcing plate faces the spacing member, are set as external supports, and the approximate center of the two external supports is set as the load point. If the plate shape is such that an opening larger than the indenter of the load measuring instrument is approximately in the center of the two external supports and the load of the load measuring instrument cannot be applied, the point where the load can be applied to the plate near the approximately center of the two external supports can be used as the load point. Measure the stroke of the load measuring instrument when a specified load that does not destroy the plate is applied to the load point. The smaller the stroke, the stronger the bending strength can be evaluated to be. The specified load can be any value and is not bound by the measurement conditions in the above standard. Regardless of the regulations in the above standard regarding the shape, dimensions, surface roughness, etc. of the test piece, it is sufficient to evaluate the bending strength with the shape and dimensions of the plate as they are, without processing it. Regardless of the regulations in the above standard regarding the number of test pieces, only one plate can be used to evaluate the bending strength.

The bending strength of the reinforcing plates 5 and 5a is stronger than that of the first support plate B2 and the second support plates C1, D, E1, and E2, which are the support parts that support the contacts. As a result, the reinforcing plates 5 and 5a reduce the deflection of the first support plate B2 and the second support plates C1, D, E1, and E2, and the stress applied to the support parts that support the contacts can be reduced.

The mechanism by which stress is applied to the support part that supports the contacts in an inspection jig that does not have a reinforcing plate 5, 5a will be explained below.

Specifically, as shown in FIG. 8, when the inspection jig is brought into contact with the inspection object and the contact Pr is pushed in and bent, the bent contact Pr pushes and bends the plate PL. More specifically, as shown in FIG. 9, the bent contact Pr hits and gets caught on the opening edge of the through hole PLH of the plate PL, and strongly presses the plate PL.

In this state, when the inspection jig is separated from the inspection object and the contact Pr tries to return to its original position, the plate PL is pulled by the contact Pr and bends in the opposite direction, as shown in FIG. 10. More specifically, the bent contact Pr is pressed firmly against the inner wall of the through hole PLH. This generates a large frictional force between the contact Pr and the through hole PLH, and as the contact Pr returns to its original position, the contact Pr pulls the plate PL, causing the plate PL to bend in the opposite direction, as shown in FIG. 11. In this way, as the plate PL bends, stress is applied to the plate PL, which is the support that supports the contact Pr.

On the other hand, the inspection jig 3 is equipped with reinforcing plates 5, 5a that have a stronger bending strength than the first support plate B2 and the second support plate C1, D, E1, E2, so that the deflection of the first support plate B2 and the second support plate C1, D, E1, E2 is suppressed by the reinforcing plates 5, 5a. As a result, the deflection of the first support plate B2 and the second support plate C1, D, E1, E2 is reduced, making it easier to reduce the stress applied to the first support plate B2 and the second support plate C1, D, E1, E2, which are the support parts that support the contact Pr.

The first support plate B2 is softer in hardness than the second support plates C1, D, E1, and E2. The hardness of the first support plate B2 and the second support plates C1, D, E1, and E2 can be measured using various indices, such as Vickers hardness, Brinell hardness, Nouveau hardness, Rockwell hardness, superficial hardness, Mayer hardness, durometer hardness, Barcol hardness, monotron hardness, Shore hardness, and Mohs hardness. The hardness of the first support plate B2 and the second support plates C1, D, E1, and E2 can be evaluated, for example, according to JIS Z 2244 "Vickers hardness test - test method" or ISO 6507.

Although FIG. 12 shows an example in which a reinforcing plate 5a is used, a reinforcing plate 5 may also be used. When the contact Pr is bent, the load applied to the first support portion 311 due to the bending is mostly applied to the opening edge portion H1 of the through hole B2H of the first support plate B2. Therefore, the frictional force of the contact Pr is the largest in the through hole B2H among the through holes B2H, C1H, DH, E1H, and E2H. Therefore, by making the hardness of the first support plate B2 softer than that of the second support plates C1, D, E1, and E2, the risk of the contact Pr being damaged can be reduced.

In addition, the second support plates C1, D, E1, and E2 have a greater bending strength than the first support plate B2. As described above, the first support plate B2 is softer than the second support plates C1, D, E1, and E2, which reduces the risk of damaging the contact Pr. On the other hand, soft materials generally have a weak bending strength.

Therefore, by combining a first support plate B2 that is softer in hardness than the second support plates C1, D, E1, and E2 with second support plates C1, D, E1, and E2 that have a stronger bending strength than the first support plate B2, it is possible to ensure the bending strength of the entire first support portion 311 while reducing the risk of damage to the contact Pr.

In addition, the opening edges H1, H2 of the through hole B2H of the first support plate B2 are chamfered. This increases the smoothness of the opening edges H1, H2, reducing the risk of the contact Pr being damaged by friction with the opening edges H1, H2. The chamfering can be a rounded surface with rounded corners, an angular surface with beveled corners, or various other chamfer shapes. As shown in FIG. 12, the through hole H of each support plate may have a large diameter portion and a small diameter portion connected to each other. In this case, it is preferable that the opening edge of the small diameter portion of the through hole H be chamfered.

In addition, since the contact Pr bends on the second support portion 312 side of the first support plate B2, the friction between the opening edge H1 on the second support portion 312 side and the contact Pr is greater than the friction between the opening edge H2 on the second support plate C1 side and the contact Pr. Therefore, although FIG. 12 shows an example in which both opening edges H1 and H2 are chamfered, only the opening edge H1 on the second support portion 312 side, which has greater friction with the contact Pr, may be chamfered.

Alternatively, the opening edges H1, H2 of the through hole B2H of the first support plate B2 do not have to be chamfered.

The positions of the through holes H of each support plate do not necessarily have to be offset, and the contact Pr is not limited to being supported at an angle. The second support plates C1, D, E1, and E2 are not limited to being stronger in bending strength than the first support plate B2, and the first support plate B2 is not limited to being softer in hardness than the second support plates C1, D, E1, and E2.

In addition, the support member 31 may be configured not to include the reinforcing plate 5, and the first support plate B2 may function as the reinforcing plate.

As shown in Figures 13 and 14, the support member 31a of the inspection jig 3a has a reinforcing plate B2a instead of the reinforcing plates 5 and 5a. The reinforcing plate B2a has the same shape as the first support plate B2. In addition, the reinforcing plate B2a is made of the same material as the reinforcing plates 5 and 5a, or has the same bending strength as the reinforcing plates 5 and 5a.

The first support portion 311a of the support member 31a does not include a first support plate B2, and is configured by stacking second support plates C1, D, E1, and E2 (one or more support plates) in the Z direction. In this case, the second support plate C1 corresponds to the opposing support plate that is closest to the second support portion 312 among the one or more support plates.

In the inspection jig 3a, the reinforcing plate B2a reduces the deflection of the second support plates C1, D, E1, and E2, and the stress applied to the support portion supporting the contact Pr can be reduced. Moreover, instead of the reinforcing plate 5 or the reinforcing plate 5a and the first support plate B2 in the inspection jig 3, the inspection jig 3a only needs to be equipped with the reinforcing plate B2a. Therefore, the configuration of the inspection jig 3a can be simplified.

The reinforcing plate B2a has a shape similar to that of the first support plate B2. Therefore, like the inspection jig 3, the inspection jig 3a can deflect each contact Pr in the X direction by tilting each contact Pr in the same direction in the X direction. Also, like the inspection jig 3, the inspection jig 3a deflects each contact Pr along the X direction (first direction) in which the number of rows of through holes H is small, reducing the risk of contact between the contacts Pr.

In the above example, the first support portion 311a is provided with four second support plates C1, D, E1, and E2 as support plates, but the first support portion 311a may have only one support plate or five or more support plates. When the first support portion 311a has only one support plate, that support plate corresponds to the opposing support plate.

As with the first support plate B2, the opening edges H1, H2 of the through hole B2H of the reinforcing plate B2a are chamfered, reducing the risk of the contact Pr being damaged by friction with the opening edges H1, H2. Of the opening edges H1, H2 of the reinforcing plate B2a, only the opening edge H1 on the second support part 312 side, which has greater friction with the contact Pr, may be chamfered.

Alternatively, the opening edges H1 and H2 of the through hole B2H of the reinforcing plate B2a do not have to be chamfered.

In addition, it is preferable that a lubricating layer 33, for example a coating layer, is formed on the inner surface of each through hole H of each support plate or reinforcing plate 5a, B2a in the inspection jig 3, 3a in order to reduce friction. In FIG. 15, each support plate or reinforcing plate 5a, B2a is shown as plate PL, and the through hole H is shown in more detail. The inner surface of the through hole H of the plate PL includes chamfered opening edge portions H1, H2 (chamfered portion) and a through hole main portion H3, which is the portion of the inner surface of the through hole H excluding the opening edge portions H1, H2. In the plate PL, for example, a large diameter portion H4, which is coaxial with the through hole H and has a diameter larger than the through hole H, is connected to the through hole H.

As shown in FIG. 15, the lubricating layer 33 may be formed on the entire surface of the plate PL, including the inner surface of each through hole H. However, since the contact Pr does not come into contact with any part other than the inner surface of each through hole H, the lubricating layer 33 does not have to be formed on any part other than the inner surface of each through hole H.

The slip layer 33 may be formed on at least one of the inner surfaces of each through hole H, the through hole body portion H3 and the opening edge portion H1.

The thickness of the lubricating layer 33 is, for example, about 1 μm. The coefficient of friction of the lubricating layer 33 with respect to the contact Pr is smaller than the coefficient of friction of the base portion 34 of the lubricating layer 33 on the plate PL. The lubricating layer 33 can be formed by, for example, vapor deposition of a material with a small coefficient of friction. The magnitude of the coefficient of friction can be compared by either comparing the kinetic friction coefficients with each other or comparing the static friction coefficients with each other.

The material of the lubricating layer 33 may be, for example, a paraxylylene-based polymer, and preferably is an insulating material with a low coefficient of friction, such as Parylene (registered trademark), fluorine, polyester, or acrylic.

In this way, by forming a lubricating layer 33 on the inner surface of the through hole H, friction between the through hole H and the contact Pr can be reduced.

The contact Pr bends on the side of the first support plate B2 or the second support portion 312 of the reinforcing plate 5a, B2a. Therefore, the contact pressure between the contact Pr and the through hole B2H of the first support plate B2, the through hole B2H of the reinforcing plate B2a, or the through hole 5H of the reinforcing plate 5a tends to be greater than the contact pressure between the contact Pr and other through holes H, and friction is likely to occur.

Therefore, the sliding layer 33 needs to be formed at least on the inner surface of the through hole B2H of the first support plate B2, the through hole B2H of the reinforcing plate B2a, or the through hole 5H of the reinforcing plate 5a.

That is, an inspection jig according to one embodiment of the present invention comprises a rod-shaped contactor, a first support portion supporting one end side of the contactor, a second support portion supporting the other end side of the contactor, and a spacing member that keeps the first support portion and the second support portion spaced apart from each other, the first support portion comprising a support plate having a through hole through which the contactor is inserted, and a reinforcing plate having a bending strength greater than that of the support plate is disposed on the surface of the support plate facing the second support portion.

With this configuration, a reinforcing plate with a bending strength greater than that of the support plate is disposed on the surface of the support plate facing the second support portion, so the reinforcing plate reduces the deflection of the support plate. As a result, it becomes easier to reduce the stress applied to the support plate, which is the support portion that supports the contacts.

The first support portion includes a plurality of stacked support plates, the plurality of support plates including a first support plate that is the support plate closest to the second support portion, and a second support plate that is a support plate other than the first support plate, and it is preferable that the reinforcing plate is disposed on the surface of the first support plate facing the second support portion.

According to this configuration, the first support section is formed by stacking multiple support plates. Since the contactor bends significantly between the first support section and the second support section, the first support plate, which is the support plate closest to the second support section among the multiple support plates in the first support section, is most susceptible to the force caused by the bending of the contactor. A reinforcing plate is disposed on this first support plate, which is most susceptible to the force caused by the bending of the contactor. In this way, by reinforcing the support plate, which is most susceptible to the force caused by the bending of the contactor, it becomes easier to reduce the stress applied to the support section.

It is also preferable that the first support plate has a lower hardness than the second support plate.

The contactor bends significantly between the first support portion and the second support portion, so when the contactor bends, the friction between the contactor and the through hole in the first support plate is greater than the friction between the contactor and the through hole in the second support plate. Therefore, by making the hardness of the first support plate, which has greater friction, softer than that of the second support plate, it becomes easier to reduce the risk of damaging the contactor.

It is also preferable that the second support plate has a greater bending strength than the first support plate.

Soft materials generally tend to have weak bending strength. Therefore, by combining a first support plate with a soft hardness and a second support plate with a strong bending strength, it becomes easier to reduce the risk of damaging the contacts while ensuring the bending strength of the entire first support section.

In addition, it is preferable that the through holes of the first support plate and the through holes of the second support plate, which correspond to each other so that the same contacts can be inserted, are positioned such that the positions of the through holes of the first support plate and the through holes of the second support plate are offset from each other in the direction of the perpendicular line so that the contacts are inclined with respect to the perpendicular line of the first and second support plates.

With this configuration, the through holes in the first and second support plates make it easy to support the contacts at an angle.

Furthermore, the first and second support plates are formed with a plurality of the through holes, the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and in a plurality of rows corresponding to a second direction intersecting the first direction, and in a region in which the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the shift is preferably along the first direction.

According to this configuration, the direction of the misalignment of the through holes is along the first direction in which the number of rows of through holes is small. Since the contacts are inclined along the first direction, which is the direction of the misalignment of the through holes, the contacts bend along the first direction. Therefore, the contacts bend in the direction in which the number of rows of through holes is small, i.e., the number of rows of contacts is small, so there is a reduced risk of contact between the contacts compared to when the contacts bend along the second direction in which the number of rows is large.

It is also preferable that the opening edge of the through hole of the first support plate on the side of the second support part is chamfered.

With this configuration, the opening edge on the second support side, which is prone to friction with the bent contact, is chamfered to increase smoothness, making it easy to reduce the risk of the contact being damaged by friction with the opening edge.

It is also preferable that the first and second support plates have a plurality of through holes, and the reinforcing plate has an opening that is open to include within it an area that includes the plurality of through holes of the first support plate.

With this configuration, there is no need to drill through holes in the reinforcing plate for the number of contacts, making it easier to create the reinforcing plate.

In addition, a sliding layer is formed on the inner surface of the through hole of the first support plate to reduce friction, and it is preferable that the friction coefficient of the sliding layer with respect to the contact is smaller than the friction coefficient of the base portion of the sliding layer on the first support plate.

This configuration reduces friction between the contact inserted into the through hole and the inner surface of the through hole.

The opening edge of the through hole of the first support plate on the side of the second support part is chamfered, and a slip layer is formed on at least one of the through hole body part and the chamfered part, which is the part of the inner surface of the through hole including the chamfered part, excluding the chamfered part, and the chamfered part, to reduce friction, and it is preferable that the friction coefficient of the slip layer with respect to the contact is smaller than the friction coefficient of the base part of the slip layer in the first support plate.

This configuration reduces friction between the contact and at least one of the through-hole body and the chamfered portion inside the through-hole.

It is also preferable that the one or more support plates have a plurality of the through holes formed therein, and the reinforcing plate has a plurality of through holes formed therein that correspond one-to-one to the plurality of through holes of the opposing support plate, which is the support plate among the one or more support plates that is closest to the second support portion.

With this configuration, the area where the through holes are formed in the support plate can also be reinforced with the reinforcing plate, improving the effect of reducing stress on the support part that supports the contact.

In addition, it is preferable that the through holes of the reinforcing plate and the through holes of the opposing support plate, which correspond to each other so that the same contacts can be inserted, are offset from each other in the direction of the perpendicular line so that the contacts are inclined relative to the perpendicular line between the reinforcing plate and the opposing support plate.

This configuration makes it easy to support the contacts at an angle using the through holes in the reinforcing plate and the opposing support plate.

Furthermore, it is preferable that the through holes of the reinforcing plate and the opposing support plate are arranged in multiple rows corresponding to a predetermined first direction and in multiple rows corresponding to a second direction intersecting the first direction, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the misalignment is along the first direction.

According to this configuration, the direction of the misalignment of the through holes is along the first direction in which the number of rows of through holes is small. Since the contacts are inclined along the first direction, which is the direction of the misalignment of the through holes, the contacts bend along the first direction. Therefore, the contacts bend in the direction in which the number of rows of through holes is small, i.e., the number of rows of contacts is small, so there is a reduced risk of contact between the contacts compared to when the contacts bend along the second direction in which the number of rows is large.

It is also preferable that the opening edge of the through hole of the reinforcing plate on the second support part side is chamfered.

With this configuration, the opening edge on the second support side, which is prone to friction with the bent contact, is chamfered to increase smoothness, making it easy to reduce the risk of the contact being damaged by friction with the opening edge.

In addition, a sliding layer is formed on the inner surface of the through hole of the reinforcing plate to reduce friction, and it is preferable that the friction coefficient of the sliding layer with respect to the contact is smaller than the friction coefficient of the base portion of the sliding layer on the reinforcing plate.

This configuration reduces friction between the contact inserted into the through hole and the inner surface of the through hole.

The opening edge of the through hole of the reinforcing plate on the side of the second support part is chamfered, and a slip layer for reducing friction is formed on at least one of the through hole main body part and the chamfered part, which are the parts of the inner surface including the chamfered part of the through hole excluding the chamfered part, and the slip layer has a smaller friction coefficient with respect to the contact than the friction coefficient of the base part of the slip layer in the reinforcing plate.

This configuration reduces friction between the contact and at least one of the through-hole body and the chamfered portion inside the through-hole.

An inspection device according to one embodiment of the present invention includes the above-mentioned inspection tool and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected.

This configuration makes it easier to reduce the stress applied to the support part that supports the contacts in the inspection jig used for inspection.

Reference Signs List 1 Inspection device 3, 3a, 3U, 3D Inspection jig 4, 4U, 4D Inspection section 5, 5a, B2a Reinforcement plate 5C Opening 6 Substrate fixing device 7 Spacing member 8 Inspection processing section 31, 31a Support member 100 Substrate (inspection object)
311, 311a First support portion 312 Second support portion 321 Base plate A, A2, A3 Support plate H, 5H, AH, A2H, A3H, B2H, C1H, DH, E1H, E2H Through hole B Separator block B2 First support plate (support plate, opposing support plate)
C1 Second support plate (support plate, opposing support plate)
D, E1, E2 Second support plate (support plate)
H1, H2 Opening edge (chamfered part)
P1 First region P2 Second region PL Plate PLH Through hole Pr Contact S Spacer

Claims (15)

A rod-shaped contact;
A first support portion that supports one end side of the contact;
A second support portion that supports the other end side of the contact;
a spacing member that keeps the first support portion and the second support portion apart from each other,
the first support portion includes a support plate having a through hole through which the contact is inserted ,
The first support portion includes a plurality of the support plates stacked together,
The plurality of support plates include a first support plate that is the support plate closest to the second support portion, and a second support plate that is the support plate other than the first support plate,
a reinforcing plate having a bending strength greater than that of the support plate is disposed on a surface of the first support plate facing the second support portion,
The first support plate has a hardness lower than that of the second support plate. A rod-shaped contact;
A first support portion that supports one end side of the contact;
A second support portion that supports the other end side of the contact;
a spacing member that keeps the first support portion and the second support portion apart from each other,
the first support portion includes a support plate having a through hole through which the contact is inserted ,
The first support portion includes a plurality of the support plates stacked together,
The plurality of support plates include a first support plate that is the support plate closest to the second support portion, and a second support plate that is the support plate other than the first support plate,
a reinforcing plate having a bending strength greater than that of the support plate is disposed on a surface of the first support plate facing the second support portion,
The second support plate has a bending strength greater than that of the first support plate. 3. An inspection jig as described in claim 1 or 2, wherein the through holes of the first support plate and the through holes of the second support plate correspond to each other so that the same contact can be inserted therethrough, and the positions of the through holes of the first support plate and the through holes of the second support plate are offset relative to the direction of the perpendicular line so that the contact is inclined relative to the perpendicular line of the first and second support plates. The first and second support plates are formed with a plurality of the through holes,
the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and in a plurality of rows corresponding to a second direction intersecting the first direction, and in a region in which the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is smaller than the number of rows corresponding to the second direction;
The inspection tool according to claim 3 , wherein the direction of the deviation is along the first direction. The inspection jig according to any one of claims 1 to 4 , wherein an opening edge portion of the through hole of the first support plate on the side of the second support portion is chamfered. The first and second support plates are formed with a plurality of the through holes,
The inspection jig according to claim 1 or 2 , wherein the reinforcing plate has an opening formed therein, the opening being open so as to include within a region including the plurality of through holes of the first support plate. A slip layer is formed on the inner surface of the through hole of the first support plate to reduce friction,
7. An inspection jig according to claim 1, wherein the coefficient of friction of the sliding layer with respect to the contact is smaller than the coefficient of friction of a base portion of the sliding layer on the first support plate. An opening edge portion of the through hole of the first support plate on the second support portion side is a chamfered portion,
A slip layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which is a portion of the inner surface including the chamfered portion of the through hole excluding the chamfered portion,
8. The inspection jig according to claim 7 , wherein the coefficient of friction of the sliding layer with respect to the contact is smaller than the coefficient of friction of a base portion of the sliding layer on the first support plate. The support plate has a plurality of through holes formed therein,
The inspection jig according to any one of claims 1 to 5 , wherein the reinforcing plate is formed with a plurality of through holes that correspond one-to-one to the plurality of through holes of the first support plate. The inspection jig described in claim 9, wherein the through holes of the reinforcing plate and the through holes of the first support plate correspond to each other so that the same contact is inserted therethrough, and the positions of the through holes of the reinforcing plate and the through holes of the first support plate are offset relative to the direction of the perpendicular line so that the contact is inclined relative to the perpendicular line of the reinforcing plate and the first support plate . the plurality of through holes of the reinforcing plate and the first support plate are arranged in a plurality of rows corresponding to a predetermined first direction and in a plurality of rows corresponding to a second direction intersecting the first direction, the number of rows corresponding to the first direction being less than the number of rows corresponding to the second direction,
The inspection tool according to claim 10 , wherein the direction of the deviation is along the first direction. The inspection jig according to any one of claims 9 to 11 , wherein an opening edge portion of the through hole of the reinforcing plate on the second support portion side is chamfered. A slip layer is formed on the inner surface of the through hole of the reinforcing plate to reduce friction,
13. The inspection jig according to claim 9, wherein the coefficient of friction of the sliding layer with respect to the contact is smaller than the coefficient of friction of a base portion of the sliding layer in the reinforcing plate. An opening edge portion of the through hole of the reinforcing plate on the second support portion side is a chamfered portion,
A slip layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which is a portion of the inner surface including the chamfered portion of the through hole excluding the chamfered portion,
13. The inspection jig according to claim 12 , wherein the coefficient of friction of the sliding layer with respect to the contact is smaller than the coefficient of friction of a base portion of the sliding layer on the reinforcing plate. An inspection tool according to any one of claims 1 to 14 ,
and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by bringing the contactor into contact with an inspection point provided on the object to be inspected.

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