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JP7624616B2 - Temporary placement stage and parts mounting device - Google Patents
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JP7624616B2 - Temporary placement stage and parts mounting device - Google Patents

Temporary placement stage and parts mounting device Download PDF

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JP7624616B2
JP7624616B2 JP2021002533A JP2021002533A JP7624616B2 JP 7624616 B2 JP7624616 B2 JP 7624616B2 JP 2021002533 A JP2021002533 A JP 2021002533A JP 2021002533 A JP2021002533 A JP 2021002533A JP 7624616 B2 JP7624616 B2 JP 7624616B2
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temporary placement
component
upper member
placement stage
plate
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JP2022107875A (en
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一憲 金井
康夫 奥
健一 市川
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Panasonic Intellectual Property Management Co Ltd
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Description

本発明は、部品搭載装置等に備えられる仮置きステージおよび部品搭載装置に関する。 The present invention relates to a temporary placement stage provided in a component mounting device and the component mounting device.

従来、基板に部品を搭載する部品搭載装置が知られており、種々の実装基板の製造に用いられている。このような部品搭載装置の中でも、特に、基板に対する部品搭載に高い精度が要求されるものでは、部品供給部から取り出した部品を一旦仮置きステージに仮置きして認識カメラで認識し、その後に部品を改めてピックアップして基板に搭載するようにしている(例えば、下記の特許文献1参照)。 Conventionally, component mounting devices that mount components on a board are known and are used in the manufacture of various types of mounted boards. Among such component mounting devices, those that require particularly high precision in mounting components on a board temporarily place components taken from a component supply unit on a temporary placement stage and recognize them with a recognition camera, and then pick up the components again and mount them on the board (see, for example, Patent Document 1 below).

仮置きステージに仮置きした部品を認識カメラで認識する際には、通常、部品を上方から照明し、その照明光のもとで部品の外形を認識している。このとき部品を仮置きステージ上に真空吸着することで、認識カメラによる認識の間および搭載ヘッドによる部品ピックアップの際に部品が位置ずれしないようにしている。 When a part temporarily placed on the temporary placement stage is recognized by a recognition camera, the part is usually illuminated from above and its outline recognized under that illumination light. At this time, the part is vacuum-adsorbed onto the temporary placement stage to prevent the part from shifting position while being recognized by the recognition camera or when the mounting head picks up the part.

特開2015-119134号公報JP 2015-119134 A

しかしながら、上記のように、部品を上方から照明した場合には照明光が部品の表面で乱反射等して部品の外形を認識しにくい場合があり、そのために部品の認識エラーが生じたり部品の中心をピックアップすることができずにピックアップミスが生じたりする場合があるという問題点があった。 However, as mentioned above, when a part is illuminated from above, the illumination light may be diffused on the surface of the part, making it difficult to recognize the outer shape of the part. This can lead to part recognition errors or pickup errors due to the inability to pick up the center of the part.

そこで本発明は、載置された部品の位置ずれを防止しつつ、部品の外形を明瞭に認識できる仮置きステージおよび部品搭載装置を提供することを目的とする。 The present invention aims to provide a temporary placement stage and component mounting device that can prevent misalignment of the placed component while allowing the external shape of the component to be clearly recognized.

本発明の仮置きステージは、基板に搭載される部品が仮置きされる仮置きステージであって、通気性を有して上面に部品が載置される上部部材と、前記上部部材の下側に配置され、厚み方向に貫通した複数の吸引孔を有する板状部材と、前記板状部材の下方から前記吸引孔と前記上部部材を通じて空気を吸引することで前記上部部材に載置された部品を前記上部部材の上面に吸着させる吸引部と、前記上部部材に下方から光を照射する光源部と、前記板状部材の下側に配置され、厚み方向に貫通した領域形成孔を有し、前記領域形成孔により前記上部部材を区画する区画部材と、を備える。 The temporary placement stage of the present invention is a temporary placement stage on which components to be mounted on a substrate are temporarily placed, and comprises: an upper member which is breathable and has an upper surface on which components are placed; a plate-shaped member arranged on the underside of the upper member and having a plurality of suction holes penetrating in the thickness direction; a suction section which sucks air from below the plate-shaped member through the suction holes and the upper member, thereby adsorbing the components placed on the upper member to the upper surface of the upper member; a light source section which irradiates light onto the upper member from below; and a partition member arranged on the underside of the plate-shaped member, having area forming holes penetrating in the thickness direction, and partitioning the upper member by means of the area forming holes .

本発明の部品搭載装置は、請求項1から14のいずれかに記載の仮置きステージと、前記仮置きステージに仮置きされた部品を基板に搭載する搭載ヘッドとを備えた。 A component mounting device of the present invention includes a temporary placement stage as recited in any one of claims 1 to 14 , and a mounting head that mounts a component temporarily placed on the temporary placement stage onto a substrate.

本発明によれば、載置された部品の位置ずれを防止しつつ、部品の外形を明瞭に認識できる。 The present invention makes it possible to clearly recognize the external shape of a part while preventing the part from shifting out of position.

本発明の一実施の形態の部品搭載装置の平面図FIG. 1 is a plan view of a component mounting device according to an embodiment of the present invention; 本発明の一実施の形態の部品搭載装置の仮置きステージを搭載ヘッドとともに示す斜視図FIG. 1 is a perspective view showing a temporary placement stage of a component mounting apparatus according to an embodiment of the present invention together with a mounting head; 本発明の一実施の形態の部品搭載装置の仮置きステージの正面断面図FIG. 1 is a front cross-sectional view of a temporary placement stage of a component mounting apparatus according to an embodiment of the present invention. 本発明の一実施の形態の部品搭載装置の仮置きステージの分解斜視図FIG. 1 is an exploded perspective view of a temporary placement stage of a component mounting apparatus according to an embodiment of the present invention. 本発明の一実施の形態の部品搭載装置の仮置きステージが備えるチャンバの他の実施例の正面断面図FIG. 13 is a front cross-sectional view of another embodiment of the chamber provided in the temporary placement stage of the component mounting apparatus according to the embodiment of the present invention. 本発明の一実施の形態の部品搭載装置の仮置きステージが備える板状部材の吸引孔と(a)区画部材の領域形成孔との関係を示す図(b)8ノズル搭載ヘッドとの関係を示す図(c)16ノズル搭載ヘッドとの関係を示す図FIG. 1A shows a relationship between a suction hole of a plate-shaped member provided on a temporary placement stage of a component mounting apparatus according to an embodiment of the present invention and an area forming hole of a partitioning member; FIG. 1B shows a relationship between the suction hole of the plate-shaped member and an 8-nozzle mounting head; FIG. 1C shows a relationship between the suction hole of the plate-shaped member and an area forming hole of a partitioning member; 本発明の一実施の形態の部品搭載装置の構成を示すブロック図FIG. 1 is a block diagram showing a configuration of a component mounting device according to an embodiment of the present invention. 本発明の一実施の形態の部品搭載方法のフロー図FIG. 1 is a flow diagram of a component mounting method according to an embodiment of the present invention. 本発明の一実施の形態の部品再吸着方法のフロー図FIG. 2 is a flow chart of a component re-suction method according to an embodiment of the present invention. (a)(b)(c)本発明の一実施の形態の部品搭載装置による部品搭載工程の説明図1A, 1B, and 1C are explanatory diagrams of a component mounting process using a component mounting device according to an embodiment of the present invention. (a)(b)(c)本発明の一実施の形態の部品搭載装置による部品搭載工程の説明図1A, 1B, and 1C are explanatory diagrams of a component mounting process using a component mounting device according to an embodiment of the present invention.

以下に図面を用いて、本発明の一実施の形態を詳細に説明する。以下で述べる構成、形状等は説明のための例示であって、部品搭載装置、仮置きステージ、搭載ヘッドの仕様に応じ、適宜変更が可能である。以下では、全ての図面において対応する要素には同一符号を付し、重複する説明を省略する。図1、及び後述する一部では、水平面内で互いに直交する2軸として、基板搬送方向のX軸(図1における左右方向)、基板搬送方向に直交するY軸(図1における上下方向)が示される。図2、及び後述する一部では、水平面と直交する高さ方向としてZ軸(図2における上下方向)が示される。 An embodiment of the present invention will be described in detail below with reference to the drawings. The configurations, shapes, etc. described below are examples for explanatory purposes and can be modified as appropriate depending on the specifications of the component mounting device, temporary placement stage, and mounting head. In the following, the same reference numerals are used for corresponding elements in all drawings, and duplicated explanations will be omitted. In FIG. 1 and in some parts described below, the X-axis in the substrate transport direction (left-right direction in FIG. 1) and the Y-axis perpendicular to the substrate transport direction (up-down direction in FIG. 1) are shown as two axes that are perpendicular to each other in the horizontal plane. In FIG. 2 and in some parts described below, the Z-axis (up-down direction in FIG. 2) is shown as the height direction perpendicular to the horizontal plane.

まず図1を参照して、部品搭載装置1の構成を説明する。部品搭載装置1において、基台1aの中央には、基板搬送部2がX軸に沿って設置されている。基板搬送部2は、上流から搬入された基板3をX軸に沿って搬送し、以下に説明する搭載ヘッドによる搭載作業位置に位置決めして保持する。また、基板搬送部2は、部品搭載作業が完了した基板3を下流に搬出する。基板搬送部2の両側(Y軸の前後方向)には、それぞれ部品供給部4が設置されている。 First, the configuration of the component mounting device 1 will be described with reference to Figure 1. In the component mounting device 1, a board transport unit 2 is installed along the X-axis at the center of the base 1a. The board transport unit 2 transports the board 3 carried in from upstream along the X-axis, and positions and holds it at a mounting work position by the mounting head, which will be described below. The board transport unit 2 also carries the board 3 downstream after the component mounting work has been completed. A component supply unit 4 is installed on both sides of the board transport unit 2 (front and rear directions of the Y-axis).

部品供給部4には、それぞれテープフィーダ5がX軸に沿って装着されている。テープフィーダ5は、部品を格納するポケットが形成されたキャリアテープを部品供給部4の外から基板搬送部2に向かう方向(テープ送り方向)にピッチ送りすることにより、搭載ヘッドが部品をピックアップする部品取出し位置に部品を供給する。また、前側の部品供給部4には、仮置きユニット6が装着されている。仮置きユニット6は、基板3に搭載される部品が仮置きされる仮置きステージ7と、真空源8を備えている。真空源8は、真空ポンプや真空エジェクタなどを含んで構成されており、仮置きステージ7に負圧を供給する(空気を吸引する)。仮置きステージ7の詳細は、後述する。 A tape feeder 5 is attached to each component supply unit 4 along the X-axis. The tape feeder 5 feeds a carrier tape, on which pockets for storing components are formed, in a pitch direction from outside the component supply unit 4 toward the board transport unit 2 (tape feed direction) to supply components to a component removal position where the mounting head picks up the components. In addition, a temporary placement unit 6 is attached to the front component supply unit 4. The temporary placement unit 6 includes a temporary placement stage 7 on which components to be mounted on the board 3 are temporarily placed, and a vacuum source 8. The vacuum source 8 is composed of a vacuum pump, a vacuum ejector, etc., and supplies negative pressure to the temporary placement stage 7 (sucks in air). Details of the temporary placement stage 7 will be described later.

テープフィーダ5および仮置きユニット6が部品供給部4に装着されると、部品搭載装置1が備える制御装置40(図7参照)にそれぞれ電気的に接続される。また、テープフィーダ5および仮置きユニット6には、部品供給部4を介して電力、圧縮空気がそれぞれ供給される。 When the tape feeder 5 and the temporary placement unit 6 are attached to the component supply unit 4, they are each electrically connected to the control device 40 (see FIG. 7) provided in the component mounting device 1. In addition, the tape feeder 5 and the temporary placement unit 6 are each supplied with electricity and compressed air via the component supply unit 4.

図1において、基台1aの上面のX軸における両端部には、リニア駆動機構を備えたY軸テーブル9が配置されている。Y軸テーブル9には、同様にリニア機構を備えたビーム10がY軸に沿って移動自在に結合されている。ビーム10には、搭載ヘッド11がX軸に沿って移動自在に装着されている。搭載ヘッド11は、部品を保持して昇降し、鉛直軸(Z軸)回りに回転可能な複数(ここでは8つ)のノズル駆動ユニット11aを備えている。ノズル駆動ユニット11aのそれぞれの下端部には、部品を吸着して保持する吸着ノズル11b(図2参照)が装着されている。 In FIG. 1, a Y-axis table 9 equipped with a linear drive mechanism is disposed on both ends of the X-axis on the top surface of the base 1a. A beam 10 similarly equipped with a linear mechanism is connected to the Y-axis table 9 so as to be freely movable along the Y-axis. A mounting head 11 is attached to the beam 10 so as to be freely movable along the X-axis. The mounting head 11 is equipped with multiple (eight in this case) nozzle drive units 11a that can hold a component and move up and down, and rotate around a vertical axis (Z-axis). A suction nozzle 11b (see FIG. 2) that suctions and holds the component is attached to the bottom end of each nozzle drive unit 11a.

なお、搭載ヘッド11は、ノズル駆動ユニット11aの数と装着可能な吸着ノズル11bの種類が異なる複数の種類が予め用意されており、基板3に搭載する部品のサイズなどに応じてビーム10に装着する搭載ヘッド11が交換される。以下、ノズル駆動ユニット11aを8つ有し、8本の吸着ノズル11bを装着することができる搭載ヘッド11を「8ノズル搭載ヘッド」などと称する。 Note that multiple types of mounting heads 11 are prepared in advance, each with a different number of nozzle drive units 11a and different types of suction nozzles 11b that can be attached, and the mounting head 11 attached to the beam 10 is changed depending on the size of the component to be mounted on the board 3. Hereinafter, a mounting head 11 that has eight nozzle drive units 11a and can be equipped with eight suction nozzles 11b will be referred to as an "8-nozzle mounting head", etc.

図1において、Y軸テーブル9およびビーム10は、搭載ヘッド11をX軸およびY軸に沿って移動させるXYユニット12を構成する。XYユニット12および搭載ヘッド11は、部品供給部4から部品を取り出して基板3の部品搭載位置に搭載する部品搭載作業を実行する部品搭載機構を構成する。部品搭載作業において搭載ヘッド11は、部品供給部4の上方に移動し、各吸着ノズル11bで所定の部品をそれぞれピックアップし、基板3の上方に移動し、各吸着ノズル11bが保持する部品を所定の方向に回転させ、それぞれの部品搭載位置に搭載する一連のターンを繰り返す。 In FIG. 1, the Y-axis table 9 and beam 10 constitute an XY unit 12 that moves the mounting head 11 along the X-axis and Y-axis. The XY unit 12 and mounting head 11 constitute a component mounting mechanism that performs a component mounting operation of picking up components from the component supply unit 4 and mounting them at component mounting positions on the board 3. In the component mounting operation, the mounting head 11 moves above the component supply unit 4, picks up specific components with each suction nozzle 11b, moves above the board 3, rotates the components held by each suction nozzle 11b in a specific direction, and repeats a series of turns to mount the components at their respective component mounting positions.

図1において、ビーム10には、ビーム10の下面側に位置して搭載ヘッド11とともに一体的に移動するヘッドカメラ13が搭載されている。搭載ヘッド11が移動することにより、ヘッドカメラ13は基板搬送部2の搭載作業位置に位置決めされた基板3の上方に移動して、基板3に設けられた基板マーク(図示せず)を撮像して基板3の位置を認識する。また、高い部品搭載精度が要求される部品の場合、搭載ヘッド11の各吸着ノズル11bがピックアップした部品を仮置きステージ7に仮置きし、ヘッドカメラ13を仮置きステージ7の上方に移動させて、仮置きされた部品を撮像して部品の外形、および上面形状を認識する。 In FIG. 1, the beam 10 is equipped with a head camera 13 that is positioned on the underside of the beam 10 and moves integrally with the mounting head 11. As the mounting head 11 moves, the head camera 13 moves above the board 3 positioned at the mounting operation position of the board transport unit 2, and captures an image of a board mark (not shown) provided on the board 3 to recognize the position of the board 3. In addition, in the case of components that require high component mounting accuracy, each suction nozzle 11b of the mounting head 11 temporarily places the picked-up component on the temporary placement stage 7, and the head camera 13 moves above the temporary placement stage 7 to capture an image of the temporarily placed component and recognize the outer shape and top surface shape of the component.

部品供給部4と基板搬送部2との間には、部品認識カメラ14が設置されている。部品認識カメラ14は、部品供給部4から部品を取り出した搭載ヘッド11が部品認識カメラ14の上方に位置した際に、吸着ノズル11bに保持された部品を下方から撮像する。搭載ヘッド11による部品の基板3への部品搭載作業では、ヘッドカメラ13による基板3の認識結果、仮置きステージ7に仮置きして認識した部品の外形、および上面形状、および部品認識カメラ14による部品の認識結果(ノズルと部品の位置ずれ)を加味して部品搭載位置の補正が行われる。 A component recognition camera 14 is installed between the component supply unit 4 and the board transport unit 2. When the mounting head 11, which has taken a component from the component supply unit 4, is positioned above the component recognition camera 14, the component recognition camera 14 captures an image of the component held by the suction nozzle 11b from below. When the mounting head 11 mounts the component on the board 3, the component mounting position is corrected taking into account the recognition result of the board 3 by the head camera 13, the outer shape and top surface shape of the component recognized by temporarily placing it on the temporary placement stage 7, and the recognition result of the component by the component recognition camera 14 (positional misalignment between the nozzle and the component).

次に図2~図4を参照して、仮置きユニット6が備える仮置きステージ7の構成について詳細について説明する。図2、図3において、仮置きステージ7は、箱状のチャンバ21と、チャンバ21の下方に位置する光源部22とが上下方向(Z軸に沿う方向)に延びた複数の脚部23によって支持された構成となっている。光源部22は、上方のチャンバ21に向けて光22aを照射する発光部24を備えている。発光部24は、LEDなどの光源を備えて構成されており、ひとつの光源から成っていてもよいし、複数の光源から成っていてもよい。光源部22の上方であってチャンバ21との間には、光源部22から照射された光22aを透過して、チャンバ21側に拡散させる拡散部材25が配置されている。 Next, the configuration of the temporary placement stage 7 provided in the temporary placement unit 6 will be described in detail with reference to Figures 2 to 4. In Figures 2 and 3, the temporary placement stage 7 is configured such that a box-shaped chamber 21 and a light source section 22 located below the chamber 21 are supported by a plurality of legs 23 extending in the vertical direction (the direction along the Z axis). The light source section 22 is equipped with a light emitting section 24 that irradiates light 22a toward the chamber 21 above. The light emitting section 24 is equipped with a light source such as an LED, and may be composed of one light source or multiple light sources. A diffusion member 25 is disposed above the light source section 22 and between it and the chamber 21, which transmits the light 22a irradiated from the light source section 22 and diffuses it toward the chamber 21.

図3、図4において、チャンバ21は、上部部材26、板状部材27、区画部材28、光透過部材29および保持体30を備えている。上部部材26の上面は部品Dが載置される部品載置面となっている。上部部材26は、厚さが薄い(例えば厚さが1~2mm程度)シート状の部材から成り、光透過性および光拡散性を有するとともに通気性を有する材料、例えば、光拡散性を有する樹脂材料等から成る多孔質材料から構成されている。ここで、上部部材26が薄いシート状に形成されているのは、上部部材26の厚み方向の光の透過性を良好にするためと、通気性を確保して部品Dの保持力を確保するためである。 In Figures 3 and 4, the chamber 21 comprises an upper member 26, a plate-like member 27, a partition member 28, a light-transmitting member 29, and a holder 30. The upper surface of the upper member 26 is a component mounting surface on which the component D is placed. The upper member 26 is made of a thin (e.g., about 1 to 2 mm) sheet-like member, and is made of a material that is light-transmitting and light-diffusing and also has air permeability, for example, a porous material made of a light-diffusing resin material. Here, the upper member 26 is formed in a thin sheet shape in order to improve the light transmittance in the thickness direction of the upper member 26 and to ensure air permeability and the holding force of the component D.

板状部材27は、光透過性を有するアクリルなどの樹脂材料等からなる板状の部材から成る。板状部材27は上部部材26の下面側に接触して設けられており、上部部材26を下方から支持する。板状部材27は、上部部材26に載置(仮置き)される部品Dの位置に対応して、厚み方向に貫通した複数の吸引孔27Hを有している。 The plate-like member 27 is made of a plate-like member made of a resin material such as acrylic that has optical transparency. The plate-like member 27 is provided in contact with the lower surface side of the upper member 26, and supports the upper member 26 from below. The plate-like member 27 has a plurality of suction holes 27H that penetrate in the thickness direction and correspond to the positions of the parts D that are placed (temporarily placed) on the upper member 26.

図3、図4において、区画部材28は板状の部材から成る。区画部材28は板状部材27の下面側に接触して設けられており、上部部材26および板状部材27を下方から支持して平板形状に保持する。このため区画部材28の厚みは上部部材26よりも大きく(例えば3mm程度)、曲げ変形しにくい剛性を有している。区画部材28は厚み方向に貫通した複数の領域形成孔28Hを有している。区画部材28は、板状部材27に接触した状態で、上部部材26および板状部材27を複数の領域に区画する。 In Figures 3 and 4, the partitioning member 28 is made of a plate-like member. The partitioning member 28 is provided in contact with the underside of the plate-like member 27, and supports the upper member 26 and the plate-like member 27 from below, maintaining them in a flat plate shape. For this reason, the thickness of the partitioning member 28 is greater than that of the upper member 26 (for example, about 3 mm), and the partitioning member 28 has a rigidity that makes it difficult to bend and deform. The partitioning member 28 has multiple region-forming holes 28H that penetrate in the thickness direction. When in contact with the plate-like member 27, the partitioning member 28 divides the upper member 26 and the plate-like member 27 into multiple regions.

図3、図4において、保持体30は、上方に開口した上方開口部31と下方に開口した下方開口部32を有しており、下面には光透過部材29を備えている。光透過部材29はガラスや透明の樹脂材料等から成る板状の部材であり、下方開口部32を閉止するように設けられている。保持体30の上方開口部31からやや下方に位置した部分には、上方開口部31の内方に向けて張り出した張出縁30Fが設けられている。 In Figures 3 and 4, the holder 30 has an upper opening 31 that opens upward and a lower opening 32 that opens downward, and is provided with a light-transmitting member 29 on its underside. The light-transmitting member 29 is a plate-shaped member made of glass, a transparent resin material, or the like, and is provided to close the lower opening 32. A protruding edge 30F that protrudes inward from the upper opening 31 is provided in a portion of the holder 30 located slightly below the upper opening 31.

この張出縁30Fに区画部材28の周辺部を載置させ、その上に板状部材27、上部部材26を重ねて載置させることで、上部部材26、板状部材27および区画部材28を上方開口部31に取り付けることができる。なお、上部部材26、板状部材27および区画部材28は、予め積層して相互に固定した状態で、張出縁30Fに取り付けるようにしてもよい。このように、上部部材26、板状部材27および区画部材28は積層されて、保持体30の上部に保持される。なお、板状部材27が上部部材26より厚く、硬くて、上部部材26を平板形状に保持できる場合は、区画部材28を省くこともできる。 The peripheral portion of the partition member 28 is placed on this overhanging edge 30F, and the plate-like member 27 and upper member 26 are then placed on top of it, so that the upper member 26, plate-like member 27 and partition member 28 can be attached to the upper opening 31. The upper member 26, plate-like member 27 and partition member 28 may be attached to the overhanging edge 30F in a state where they are previously stacked and fixed to each other. In this way, the upper member 26, plate-like member 27 and partition member 28 are stacked and held on the top of the holder 30. If the plate-like member 27 is thicker and harder than the upper member 26 and can hold the upper member 26 in a flat plate shape, the partition member 28 can be omitted.

図3において、保持体30に上部部材26、板状部材27、区画部材28および光透過部材29が取り付けられた状態では、チャンバ21の内部には中空の内部空間30Pが形成される。チャンバ21の内部空間30Pは、上部部材26、板状部材27および区画部材28を介して上部部材26の上面側と連通した状態となっている。保持体30の側壁には、外部から内部空間30Pに通じる吸引流路30Sが形成されている。保持体30の外面に吸引流路30Sが開口する位置には、真空源8に通じる吸引管路33が接続されている。このように、チャンバ21の内部空間30Pは、吸引流路30Sと吸引管路33を介して、真空源8に連通している。 In FIG. 3, when the upper member 26, the plate-like member 27, the partition member 28, and the light-transmitting member 29 are attached to the holder 30, a hollow internal space 30P is formed inside the chamber 21. The internal space 30P of the chamber 21 is in communication with the upper surface side of the upper member 26 via the upper member 26, the plate-like member 27, and the partition member 28. A suction flow path 30S that leads from the outside to the internal space 30P is formed in the side wall of the holder 30. A suction pipe 33 that leads to the vacuum source 8 is connected to the position where the suction flow path 30S opens on the outer surface of the holder 30. In this way, the internal space 30P of the chamber 21 is in communication with the vacuum source 8 via the suction flow path 30S and the suction pipe 33.

真空源8を作動させて空気を吸引する状態とすると、真空源8は吸引管路33を介してチャンバ21内(内部空間30P内)の空気を吸引する。このためチャンバ21内は負圧となり、上部部材26の上面側の空気が通気性のある上部部材26を通じて(上部部材26を構成する多孔質材の細孔を通じて)チャンバ21内に吸引される。これにより上部部材26の上面に吸着力が発生し、上部部材26の上面側に部品Dが載置されているときには、その部品Dが上部部材26の上面に吸着保持される。さらに、板状部材27の吸引孔27Hで上部部材26を通じて空気を吸引する領域を制限することで、効率的に部品Dを上部部材26の上面に吸着保持することができる。 When the vacuum source 8 is operated to suck in air, the vacuum source 8 sucks in air in the chamber 21 (inside the internal space 30P) through the suction line 33. This creates a negative pressure in the chamber 21, and the air on the upper side of the upper member 26 is sucked into the chamber 21 through the breathable upper member 26 (through the pores of the porous material that makes up the upper member 26). This generates an adsorption force on the upper surface of the upper member 26, and when a part D is placed on the upper side of the upper member 26, the part D is adsorbed and held on the upper surface of the upper member 26. Furthermore, by limiting the area where air is sucked through the upper member 26 with the suction holes 27H of the plate-shaped member 27, the part D can be efficiently adsorbed and held on the upper surface of the upper member 26.

このように、保持体30と光透過部材29は、板状部材27の下方から吸引孔27Hと上部部材26を通じて空気を吸引することで上部部材26に載置された部品Dを上部部材26の上面に吸着させる吸引部を構成する。すなわち、吸引部は、上部部材26および板状部材27を保持して閉じた空間(内部空間30P)を形成する保持体30を備え、空間内の空気が吸引されることで上部部材26の上面に吸着力を発生させる。 In this way, the holder 30 and the light-transmitting member 29 form a suction section that sucks air from below the plate-like member 27 through the suction holes 27H and the upper member 26, thereby adsorbing the component D placed on the upper member 26 to the upper surface of the upper member 26. That is, the suction section includes the holder 30 that holds the upper member 26 and the plate-like member 27 to form a closed space (internal space 30P), and generates an adsorption force on the upper surface of the upper member 26 by sucking in the air within the space.

図3において、上部部材26の上面に部品Dを吸着保持している状態で、光源部22の発光部24から上方に向けて光22aを照射すると、照射された光22aは拡散部材25を通過して拡散されてチャンバ21の光透過部材29に到達する。光透過部材29に到達した光22aは、光透過部材29、区画部材28の領域形成孔28Hおよび板状部材27を通過して上部部材26に到達する。上部部材26に到達した光22aは、上部部材26を透過し、または上部部材26中で拡散されながら上部部材26の上面に到達する。上部部材26の上面に到達した光22aは、部品Dがない場所は上空に照射され、部品Dがある場所は仮置きされた部品Dによって遮られる。 In FIG. 3, when light 22a is irradiated upward from the light emitting section 24 of the light source section 22 while a part D is held by suction on the upper surface of the upper member 26, the irradiated light 22a passes through the diffusion member 25 and is diffused to reach the light transmitting member 29 of the chamber 21. The light 22a that reaches the light transmitting member 29 passes through the light transmitting member 29, the area forming hole 28H of the partition member 28, and the plate-shaped member 27 to reach the upper member 26. The light 22a that reaches the upper member 26 passes through the upper member 26 or is diffused within the upper member 26 before reaching the upper surface of the upper member 26. The light 22a that reaches the upper surface of the upper member 26 is irradiated into the sky in places where there is no part D, and is blocked by the temporarily placed part D in places where there is part D.

この状態で、ヘッドカメラ13により上方から上部部材26を撮像することで、仮置きされた部品Dの外形を高精度に認識することができる(図11(a)参照)。なお、ヘッドカメラ13の撮像画像における部品Dと上部部材26とのコントラスト(明暗の差)は、上部部材26の透過率、拡散部材25の透過率、発光部24の配置、光22aの輝度、照射角度、拡散部材25の位置などによって調整される。すなわち、仮置きステージ7に仮置きする部品Dの各位置における光22aの照度が同程度(均一)となるように調整される。 In this state, the head camera 13 captures an image of the upper member 26 from above, allowing the external shape of the temporarily placed part D to be recognized with high accuracy (see FIG. 11(a)). The contrast (difference in light and dark) between the part D and the upper member 26 in the image captured by the head camera 13 is adjusted by the transmittance of the upper member 26, the transmittance of the diffusion member 25, the arrangement of the light-emitting unit 24, the brightness of the light 22a, the irradiation angle, the position of the diffusion member 25, etc. In other words, the illuminance of the light 22a at each position of the part D temporarily placed on the temporary placement stage 7 is adjusted to be approximately the same (uniform).

このように、保持体30は、上部部材26が取り付けられる上方開口部31と、上方開口部31の下方に形成された下方開口部32と、下方開口部32を閉止する位置に光源部22から照射される光22aを透過させて上部部材26に到達させる光透過部材29と、を有している。また、仮置きステージ7には、光源部22と上部部材26との間に、光源部22から照射された光22aを上部部材26側に拡散させる拡散部材25が配置されている。また、上部部材26も、光源部22から照射された光22aを上面側に拡散させる。 Thus, the holder 30 has an upper opening 31 to which the upper member 26 is attached, a lower opening 32 formed below the upper opening 31, and a light-transmitting member 29 that transmits the light 22a irradiated from the light source unit 22 to reach the upper member 26 at a position that closes the lower opening 32. In addition, the temporary placement stage 7 has a diffusing member 25 disposed between the light source unit 22 and the upper member 26 that diffuses the light 22a irradiated from the light source unit 22 toward the upper member 26. The upper member 26 also diffuses the light 22a irradiated from the light source unit 22 toward the upper surface side.

次に図5を参照して、仮置きステージ7を構成するチャンバの他の実施例について説明する。他の実施例のチャンバ34は、保持体35への上部部材26、板状部材27、区画部材28、光透過部材29の設置方法が、図3に示すチャンバ21とは異なっている。すなわち、上部部材26、板状部材27、区画部材28は、保持体35の上方に開口した上方開口部36の上面に重ねて設置される。また、光透過部材29は、保持体35の下方に開口した下方開口部37の下面に当接して設置される。これにより、チャンバ34の内部に中空の内部空間35Pが形成される。内部空間35Pは、保持体35の側壁に形成された吸引流路35Sと吸引管路33を通じて真空源8により吸引される。 Next, referring to FIG. 5, another embodiment of the chamber constituting the temporary placement stage 7 will be described. In the chamber 34 of the other embodiment, the method of installing the upper member 26, the plate-like member 27, the partition member 28, and the light-transmitting member 29 on the holder 35 is different from that of the chamber 21 shown in FIG. 3. That is, the upper member 26, the plate-like member 27, and the partition member 28 are installed in layers on the upper surface of the upper opening 36 that opens upward from the holder 35. The light-transmitting member 29 is installed in contact with the lower surface of the lower opening 37 that opens downward from the holder 35. This forms a hollow internal space 35P inside the chamber 34. The internal space 35P is sucked by the vacuum source 8 through the suction flow path 35S and the suction pipe 33 formed in the side wall of the holder 35.

次に図6(a)~図6(c)を参照して、上部部材26、板状部材27の吸引孔27H、区画部材28の領域形成孔28Hの関係について説明する。図6(b)は、8ノズル搭載ヘッド(ノズル駆動ユニット11aを8つ有する搭載ヘッド11)の吸着ノズル11b(ノズル駆動ユニット11a)と吸引孔27Haの位置関係を示している。図6(c)は、16ノズル搭載ヘッド(ノズル駆動ユニット11aを16つ有する搭載ヘッド11)の吸着ノズル11b(ノズル駆動ユニット11a)と吸引孔27Hbの位置関係を示している。 Next, the relationship between the upper member 26, the suction holes 27H of the plate-like member 27, and the area forming holes 28H of the partition member 28 will be described with reference to Figures 6(a) to 6(c). Figure 6(b) shows the positional relationship between the suction nozzles 11b (nozzle drive units 11a) and the suction holes 27Ha of an 8-nozzle mounting head (mounting head 11 having eight nozzle drive units 11a). Figure 6(c) shows the positional relationship between the suction nozzles 11b (nozzle drive units 11a) and the suction holes 27Hb of a 16-nozzle mounting head (mounting head 11 having 16 nozzle drive units 11a).

図6(a)において、板状部材27には、8ノズル搭載ヘッドの8本の吸着ノズル11bにそれぞれ対応する8個の吸引孔27Haと、16ノズル搭載ヘッドの16本の吸着ノズル11bにそれぞれ対応する16個の吸引孔27Hbが形成されている。また、区画部材28の複数(ここでは8つ)の領域形成孔28Hは、その中に吸引孔27Ha、吸引孔27Hbが位置するように形成されている。この例では、一つの領域形成孔28Hの中に、1個の吸引孔27Haと2個の吸引孔27Hbが位置している。すなわち、複数の吸引孔27H(27Ha、27Hb)は、領域形成孔28Hの内側に位置するよう板状部材27に形成される。 In FIG. 6(a), eight suction holes 27Ha corresponding to the eight suction nozzles 11b of the eight-nozzle head and sixteen suction holes 27Hb corresponding to the sixteen suction nozzles 11b of the sixteen-nozzle head are formed in the plate-like member 27. In addition, the multiple (eight in this example) area-forming holes 28H in the partition member 28 are formed so that the suction holes 27Ha and suction holes 27Hb are located therein. In this example, one area-forming hole 28H has one suction hole 27Ha and two suction holes 27Hb located therein. In other words, the multiple suction holes 27H (27Ha, 27Hb) are formed in the plate-like member 27 so as to be located inside the area-forming holes 28H.

図6(b)において、8本の吸着ノズル11bがそれぞれ部品Dを保持した8ノズル搭載ヘッドを仮置きステージ7の上方に位置合わせし、8本の吸着ノズル11bを同時に下降させることで、一度に8個の部品Dを吸引孔27Haの位置で上部部材26に載置(仮置き)することができる(図10参照)。図6(c)において、16本の吸着ノズル11bがそれぞれ部品Dを保持した16ノズル搭載ヘッドを仮置きステージ7の上方に位置合わせし、16本の吸着ノズル11bを同時に下降させることで、一度に16個の部品Dを吸引孔27Hbの位置で上部部材26に載置(仮置き)することができる。このように、上部部材26に載置される部品Dは、区画部材28によって区画された領域に載置される。 In FIG. 6(b), an 8-nozzle mounting head with eight suction nozzles 11b each holding a component D is aligned above the temporary placement stage 7, and the eight suction nozzles 11b are lowered simultaneously, allowing eight components D to be placed (temporarily placed) on the upper member 26 at the suction holes 27Ha at one time (see FIG. 10). In FIG. 6(c), a 16-nozzle mounting head with 16 suction nozzles 11b each holding a component D is aligned above the temporary placement stage 7, and the 16 suction nozzles 11b are lowered simultaneously, allowing sixteen components D to be placed (temporarily placed) on the upper member 26 at the suction holes 27Hb at one time. In this way, the components D placed on the upper member 26 are placed in an area partitioned by the partition member 28.

また、仮置きステージ7に仮置きした部品Dをヘッドカメラ13で撮像した後に吸着ノズル11bで再吸着する際も、搭載ヘッド11(8ノズル搭載ヘッド、16ノズル搭載ヘッド)を仮置きステージ7の上方に位置合わせし、全ての吸着ノズル11bを同時に昇降させることで、一度に全ての部品Dを再吸着(同時再吸着)することができる(図11参照)。 In addition, when a component D temporarily placed on the temporary placement stage 7 is imaged by the head camera 13 and then re-adsorbed by the suction nozzles 11b, the mounting head 11 (8-nozzle mounting head, 16-nozzle mounting head) is positioned above the temporary placement stage 7, and all of the suction nozzles 11b are raised and lowered simultaneously, so that all of the components D can be re-adsorbed at once (simultaneous re-adsorption) (see FIG. 11).

なお、ヘッドカメラ13による仮置きされた部品Dの撮像結果より、同時再吸着すると吸着ノズル11bに対する部品Dの位置が適切でない(再吸着する吸着ノズル11bに対する仮置きされた部品Dの位置ずれが大きい)部品Dがある場合は、個別に搭載ヘッド11の位置を補正してから吸着ノズル11bで再吸着する個別再吸着が実行される。なお、個別再吸着では、吸着ノズル11b毎に順番に再吸着する他、仮置きされた部品Dの位置ずれ傾向が近い部品群毎に同時に再吸着するようにしてもよい。 When the imaging results of the temporarily placed components D taken by the head camera 13 show that the position of the components D relative to the suction nozzle 11b is inappropriate when simultaneously re-picking up the components D (the positional deviation of the temporarily placed components D relative to the suction nozzle 11b to be re-picked up is large), individual re-picking up is performed in which the position of the mounting head 11 is individually corrected and then the components D are re-picked up by the suction nozzle 11b. In the individual re-picking up, in addition to re-picking up the components D in order for each suction nozzle 11b, it is also possible to simultaneously re-pick up a group of components that have similar tendencies for misalignment of the temporarily placed components D.

また、上部部材26に載置(仮置き)する前に部品認識カメラ14によって複数の吸着ノズル11bのそれぞれに保持された部品Dを撮像した結果より、吸着ノズル11bに対する部品Dの位置が適切でない(吸着ノズル11bに対する部品Dの位置ずれが大きい)部品Dがある場合には、個別に上部部材26における同時再吸着が可能な位置に載置(仮置き)するようにしても良い。また、上部部材26に載置(仮置き)する前に部品認識カメラ14によって複数の吸着ノズル11bのそれぞれに保持された部品Dを撮像した結果より、吸着ノズル11bに吸着された部品Dの吸着状態が良くない(部品立ち等)場合には、個別に上部部材26における同時再吸着が可能になるよう載置(仮置き)するようにしても良い。 In addition, if the component D held by each of the multiple suction nozzles 11b is imaged by the component recognition camera 14 before being placed (temporarily placed) on the upper member 26 and there is a component D whose position relative to the suction nozzle 11b is inappropriate (the positional deviation of the component D relative to the suction nozzle 11b is large), the component D may be placed (temporarily placed) individually at a position where simultaneous re-suction is possible on the upper member 26. In addition, if the component D held by each of the multiple suction nozzles 11b is imaged by the component recognition camera 14 before being placed (temporarily placed) on the upper member 26 and there is a component D whose position relative to the suction nozzle 11b is inappropriate (the component is standing, etc.), the component D may be placed (temporarily placed) individually so that simultaneous re-suction is possible on the upper member 26.

このように、複数の吸引孔27H(27Ha、27Hb)は、上部部材26に部品Dを載置する機器である搭載ヘッド11の形状(構成)に対応して板状部材27に形成されている。また、複数の吸引孔27Hは、異なる機器に対応して板状部材27に形成される。この例では、1枚の板状部材27に、異なる機器(8ノズル搭載ヘッド、16ノズル搭載ヘッド)に対応する複数の吸引孔27Haと複数の27Hbが形成されている。また、区画部材28は、領域形成孔28Hの数を異なるものに変更可能である。なお、領域形成孔28Hの大きさは、部品Dを下方から照らす光22aを遮らないように、仮置きステージ7に仮置きする部品Dの外形よりも大きいことが望ましい。 In this way, the multiple suction holes 27H (27Ha, 27Hb) are formed in the plate-like member 27 in correspondence with the shape (configuration) of the mounting head 11, which is the device that places the component D on the upper member 26. Also, the multiple suction holes 27H are formed in the plate-like member 27 in correspondence with different devices. In this example, multiple suction holes 27Ha and multiple suction holes 27Hb corresponding to different devices (8-nozzle mounting head, 16-nozzle mounting head) are formed in one plate-like member 27. Also, the partition member 28 can have a different number of area forming holes 28H. Note that it is desirable that the size of the area forming holes 28H is larger than the outer shape of the component D to be temporarily placed on the temporary placement stage 7 so as not to block the light 22a that illuminates the component D from below.

上記説明したように、基板3に搭載される部品Dが仮置きされる仮置きステージ7は、通気性を有して上面に部品Dが載置される上部部材26と、上部部材26の下側に配置され、厚み方向に貫通した複数の吸引孔27Hを有する板状部材27と、板状部材27の下方から吸引孔27Hと上部部材26を通じて空気を吸引することで上部部材26に載置された部品Dを上部部材26の上面に吸着させる吸引部(保持体30、光透過部材29)と、上部部材26に下方から光22aを照射する光源部22と、を備えている。これによって、載置された部品Dの位置ずれを防止しつつ、部品Dの外形を明瞭に認識できる。 As described above, the temporary placement stage 7 on which the component D to be mounted on the board 3 is temporarily placed includes an upper member 26 that is breathable and on which the component D is placed, a plate-like member 27 that is disposed below the upper member 26 and has a plurality of suction holes 27H penetrating in the thickness direction, a suction section (holding body 30, light-transmitting member 29) that sucks air from below the plate-like member 27 through the suction holes 27H and the upper member 26 to adsorb the component D placed on the upper member 26 to the upper surface of the upper member 26, and a light source section 22 that irradiates the upper member 26 with light 22a from below. This makes it possible to clearly recognize the external shape of the component D while preventing the placed component D from shifting out of position.

さらに、板状部材27の下側に配置され、厚み方向に貫通した領域形成孔28Hを有し、領域形成孔28Hにより上部部材26を区画する区画部材28を、備えることで、吸引部による吸引や吸着ノズル11bが部品Dを載置する際の衝撃による上部部材26のたわみや、変形を防止することができる。このように、仮置きユニット6が装着された部品搭載装置1は、仮置きステージ7と、仮置きステージ7に仮置きされた部品Dを基板3に搭載する搭載ヘッド11とを備えている。なお、部品搭載装置1は、基台1a上に、仮置きステージ7を備える構成であってもよい。 Furthermore, by providing a partition member 28 that is disposed below the plate-like member 27 and has an area forming hole 28H penetrating in the thickness direction, and that partitions the upper member 26 with the area forming hole 28H, it is possible to prevent bending or deformation of the upper member 26 due to suction by the suction part or impact when the suction nozzle 11b places the component D. In this way, the component mounting device 1 to which the temporary placement unit 6 is attached includes a temporary placement stage 7 and a mounting head 11 that mounts the component D temporarily placed on the temporary placement stage 7 onto the substrate 3. Note that the component mounting device 1 may also be configured to include a temporary placement stage 7 on the base 1a.

次に図7を参照して、部品搭載装置1の制御系の構成について説明する。部品搭載装置1は、制御装置40、基板搬送部2、テープフィーダ5、仮置きユニット6、搭載ヘッド11、XYユニット12、ヘッドカメラ13、部品認識カメラ14を備えている。制御装置40は、記憶部41、実装動作処理部42、位置ずれ計測処理部43を備えている。記憶部41は記憶装置であり、実装データ44、位置ずれデータ45などを記憶している。実装データ44には、基板3に搭載される部品Dの部品種やサイズ、基板3における部品搭載位置の座標などの各種情報が、生産する実装基板の基板種ごとに記憶されている。 Next, the configuration of the control system of the component mounting device 1 will be described with reference to FIG. 7. The component mounting device 1 includes a control device 40, a board transport unit 2, a tape feeder 5, a temporary placement unit 6, a mounting head 11, an XY unit 12, a head camera 13, and a component recognition camera 14. The control device 40 includes a memory unit 41, a mounting operation processing unit 42, and a positional deviation measurement processing unit 43. The memory unit 41 is a storage device, and stores mounting data 44, positional deviation data 45, and the like. The mounting data 44 stores various information such as the component type and size of the component D to be mounted on the board 3, and the coordinates of the component mounting position on the board 3, for each board type of mounting board to be produced.

実装動作処理部42は、実装データ44に基づいて、基板搬送部2、テープフィーダ5、搭載ヘッド11、XYユニット12、ヘッドカメラ13、部品認識カメラ14を制御して、部品Dを基板3の部品搭載位置に搭載する部品搭載作業を実行させる。部品搭載作業において実装動作処理部42は、位置ずれデータ45に基づいて、吸着ノズル11bが保持している部品Dの位置ずれ量を補正して基板3に搭載させる。位置ずれ計測処理部43は、仮置きユニット6、搭載ヘッド11、XYユニット12、ヘッドカメラ13を制御して、吸着ノズル11bが保持した部品Dを仮置きステージ7に仮置きして部品Dの位置ずれ量を認識し、位置ずれデータ45として記憶部41に記憶させる。 The mounting operation processing unit 42 controls the board transport unit 2, tape feeder 5, mounting head 11, XY unit 12, head camera 13, and component recognition camera 14 based on the mounting data 44 to perform a component mounting operation in which the component D is mounted at a component mounting position on the board 3. In the component mounting operation, the mounting operation processing unit 42 corrects the amount of misalignment of the component D held by the suction nozzle 11b based on the misalignment data 45 and mounts it on the board 3. The misalignment measurement processing unit 43 controls the temporary placement unit 6, mounting head 11, XY unit 12, and head camera 13 to temporarily place the component D held by the suction nozzle 11b on the temporary placement stage 7, recognize the amount of misalignment of the component D, and store it in the memory unit 41 as misalignment data 45.

次に図8、図9のフローに沿って、図10、図11を参照しながら、部品搭載装置1による部品搭載方法について説明する。まず、実装動作処理部42は、基板搬送部2に基板3を搬入させて搭載作業位置に保持させる(ST1:基板搬入工程)。次いで実装動作処理部42は、搭載ヘッド11の各吸着ノズル11bによりテープフィーダ5から部品Dをピックアップさせて保持させる(ST2:部品吸着工程)。以下、搭載ヘッド11は8ノズル搭載ヘッドの例で説明する。すなわち、搭載ヘッド11の8本の吸着ノズル11bは、それぞれ部品Dを保持している。次いで位置ずれ計測処理部43は、真空源8を作動させる(ST3:真空源オン工程)(図10(a)の矢印a)。 Next, the component mounting method by the component mounting device 1 will be described with reference to Figs. 10 and 11 along with the flow of Figs. 8 and 9. First, the mounting operation processing unit 42 causes the board transport unit 2 to carry in the board 3 and hold it at the mounting work position (ST1: board carrying process). Next, the mounting operation processing unit 42 causes each suction nozzle 11b of the mounting head 11 to pick up and hold a component D from the tape feeder 5 (ST2: component suction process). Below, the mounting head 11 will be described using an example of an eight-nozzle mounting head. That is, each of the eight suction nozzles 11b of the mounting head 11 holds a component D. Next, the position deviation measurement processing unit 43 activates the vacuum source 8 (ST3: vacuum source on process) (arrow a in Fig. 10(a)).

次いで位置ずれ計測処理部43は、搭載ヘッド11を仮置きステージ7の上方に移動させる(図10(a))。次いで位置ずれ計測処理部43は、8本の吸着ノズル11bを同時に下降させて保持した部品Dの下面を上部部材26の上面に当接させる(図10(b)の矢印b)。次いで位置ずれ計測処理部43は、全ての吸着ノズル11bの真空吸引を停止させ、8本の吸着ノズル11bを同時に上昇させる(図10(c)の矢印c)。これにより、8個の部品Dが上部部材26の上面に載置(仮置き)される(ST4:部品仮置き工程)。 Then, the misalignment measurement processing unit 43 moves the mounting head 11 above the temporary placement stage 7 (FIG. 10(a)). Next, the misalignment measurement processing unit 43 simultaneously lowers the eight suction nozzles 11b to bring the bottom surfaces of the held components D into contact with the top surface of the upper member 26 (arrow b in FIG. 10(b)). Next, the misalignment measurement processing unit 43 stops the vacuum suction of all suction nozzles 11b and simultaneously raises the eight suction nozzles 11b (arrow c in FIG. 10(c)). As a result, the eight components D are placed (temporarily placed) on the top surface of the upper member 26 (ST4: Temporary component placement process).

図8において、次いで位置ずれ計測処理部43は、光源部22の発光部24から光22aを照射させる(ST5:光源オン工程)(図11(a))。次いで位置ずれ計測処理部43は、ヘッドカメラ13を移動させて(図11(a)の矢印d)、上部部材26に仮置きされた部品Dを撮像させる(ST6:撮像工程)。位置ずれ計測処理部43は、撮像画像を認識処理し、8個の部品DのそれぞれのXY方向の位置ずれ量、回転ずれ量を算出し、位置ずれデータ45として記憶部41に記憶させる。次いで位置ずれ計測処理部43は、発光部24からの光22aの照射を停止させる(ST7:光源オフ工程)。 In FIG. 8, the misalignment measurement processing unit 43 then irradiates light 22a from the light-emitting unit 24 of the light source unit 22 (ST5: light source on step) (FIG. 11(a)). Next, the misalignment measurement processing unit 43 moves the head camera 13 (arrow d in FIG. 11(a)) to capture an image of the part D temporarily placed on the upper member 26 (ST6: image capture step). The misalignment measurement processing unit 43 recognizes and processes the captured image, calculates the amount of misalignment in the XY directions and the amount of rotational misalignment for each of the eight parts D, and stores the calculated data in the memory unit 41 as misalignment data 45. Next, the misalignment measurement processing unit 43 stops irradiating light 22a from the light-emitting unit 24 (ST7: light source off step).

次いで位置ずれ計測処理部43は、部品Dを上部部材26に仮置きさせたときと同じ位置に搭載ヘッド11を移動させる。次いで位置ずれ計測処理部43は、8本の吸着ノズル11bに仮置きされた部品Dを再吸着させる(ST8:部品再吸着工程)。 Next, the positional deviation measurement processing unit 43 moves the mounting head 11 to the same position as when the component D was temporarily placed on the upper member 26. Next, the positional deviation measurement processing unit 43 re-adsorbs the component D that was temporarily placed on the eight suction nozzles 11b (ST8: component re-adsorption process).

図9において、部品再吸着工程(ST8)では、まず、位置ずれ計測処理部43は、撮像工程(ST6)により撮像された仮置きされた部品Dの撮像結果より、同時再吸着が可能か否かを判断する(ST21:同時再吸着可否判断工程)。再吸着する吸着ノズル11bに対する仮置きされた部品Dの位置ずれが小さい場合、位置ずれ計測処理部43は同時吸着可能と判断し(ST21においてYes)、仮置きされた部品Dを8本の吸着ノズル11bで同時に再吸着させる(ST22:同時再吸着工程)。 In FIG. 9, in the component re-adsorption process (ST8), first, the positional deviation measurement processing unit 43 determines whether simultaneous re-adsorption is possible based on the image of the temporarily placed components D captured in the imaging process (ST6) (ST21: simultaneous re-adsorption feasibility determination process). If the positional deviation of the temporarily placed components D relative to the suction nozzles 11b that will re-adsorb them is small, the positional deviation measurement processing unit 43 determines that simultaneous adsorption is possible (Yes in ST21), and the temporarily placed components D are simultaneously re-adsorbed by the eight suction nozzles 11b (ST22: simultaneous re-adsorption process).

すなわち、位置ずれ計測処理部43は、8本の吸着ノズル11bを同時に下降させる(図11(b)の矢印e)。吸着ノズル11bの下端が部品Dの上面に当接すると、次いで位置ずれ計測処理部43は、全ての吸着ノズル11bの真空吸引を始動させる。次いで位置ずれ計測処理部43は、8本の吸着ノズル11bを同時に上昇させる(図11(c)の矢印f)。 That is, the misalignment measurement processing unit 43 simultaneously lowers the eight suction nozzles 11b (arrow e in FIG. 11(b)). When the lower ends of the suction nozzles 11b come into contact with the upper surface of the component D, the misalignment measurement processing unit 43 then starts vacuum suction with all of the suction nozzles 11b. The misalignment measurement processing unit 43 then simultaneously raises the eight suction nozzles 11b (arrow f in FIG. 11(c)).

図9において、再吸着する吸着ノズル11bに対する仮置きされた部品Dの位置ずれが大きな部品Dがある場合、位置ずれ計測処理部43は同時吸着不可と判断し(ST21においてNo)、仮置きされた部品Dを個別に、または位置ずれ傾向が近い部品群毎に吸着ノズル11bで再吸着させる(ST23:個別再吸着工程)。これにより、8本の吸着ノズル11bに部品Dが再吸着される(ST22、ST23)。 In FIG. 9, if there is a temporarily placed component D with a large positional deviation relative to the suction nozzle 11b that will re-pick up the temporarily placed component D, the positional deviation measurement processing unit 43 determines that simultaneous pickup is not possible (No in ST21), and re-pickups the temporarily placed component D individually or for each group of components with similar tendency for positional deviation to the suction nozzle 11b (ST23: Individual re-pickup process). As a result, the component D is re-pickup to the eight suction nozzles 11b (ST22, ST23).

図8において、次いで位置ずれ計測処理部43は、真空源8を停止させる(ST9:真空源オフ工程)。このように、部品仮置き工程(ST4)から部品再吸着工程(ST8)は、真空源8を作動させ状態で実行される。そのため、仮置きステージ7の上部部材26における部品Dの吸着力は、上部部材26に搭載された部品Dの位置ずれを防止でき、かつ、吸着ノズル11bが部品Dを保持する吸着力より弱くなるように調整されている。 In FIG. 8, the positional deviation measurement processing unit 43 then stops the vacuum source 8 (ST9: vacuum source off process). In this way, the temporary component placement process (ST4) through the component re-suction process (ST8) are performed with the vacuum source 8 operating. Therefore, the suction force of the component D on the upper member 26 of the temporary placement stage 7 is adjusted to prevent the component D mounted on the upper member 26 from shifting out of position, and to be weaker than the suction force with which the suction nozzle 11b holds the component D.

なお、上部部材26の部品Dが載置されていない状態で上部部材26から空気を吸引していると、ゴミやほこりが上部部材26の上面に付着してしまうおそれがある。そのため、真空源オン工程(ST3)から部品仮置き工程(ST4)までの時間、および部品再吸着工程(ST8)から真空源オフ工程(ST9)までの時間は、短い方が望ましい。 If air is sucked from the upper member 26 without a component D placed on the upper member 26, there is a risk that dirt and dust may adhere to the upper surface of the upper member 26. Therefore, it is desirable to shorten the time from the vacuum source on step (ST3) to the component temporary placement step (ST4) and the time from the component re-adsorption step (ST8) to the vacuum source off step (ST9).

なお、上述の例では真空源オン(ST3)と光源オン(ST5)は、それぞれ別の工程で行っているが、必ずしも別の工程で行う必要はない。例えば、部品仮置き工程(ST4)の前に、同時に真空源オンと光源オンを行うようにしても良い。また同様に、光源オフ(ST7)と真空源オフ(ST9)は、必ずしも別の工程で行う必要はなく、部品再吸着工程(ST8)の後に、同時に光源オフと真空源オフを行うようにしても良い。 In the above example, turning on the vacuum source (ST3) and turning on the light source (ST5) are performed in separate processes, but they do not necessarily have to be performed in separate processes. For example, the vacuum source and light source may be turned on at the same time before the part temporary placement process (ST4). Similarly, turning off the light source (ST7) and turning off the vacuum source (ST9) do not necessarily have to be performed in separate processes, and the light source and vacuum source may be turned off at the same time after the part re-adsorption process (ST8).

次いで実装動作処理部42は、搭載ヘッド11が再吸着した部品Dを基板3の部品搭載位置に搭載させる(ST10:部品搭載工程)。部品搭載工程(ST10)では、実装動作処理部42は、位置ずれデータ45に基づいて、各部品Dの位置ずれ量を補正して基板3に搭載させる。全ての部品Dが基板3に搭載されるまで(ST11においてNo)、部品吸着工程(ST2)から部品搭載工程(ST10)が繰り返し実行される。全ての部品Dが基板3に搭載されると(ST11においてYes)、実装動作処理部42は、基板搬送部2に基板3を搬出させる(ST12:基板搬出工程)。 Then, the mounting operation processing unit 42 mounts the component D re-adsorbed by the mounting head 11 at the component mounting position on the board 3 (ST10: component mounting process). In the component mounting process (ST10), the mounting operation processing unit 42 corrects the amount of positional deviation of each component D based on the positional deviation data 45 and mounts the component D on the board 3. The component pickup process (ST2) to the component mounting process (ST10) are repeated until all components D are mounted on the board 3 (No in ST11). When all components D are mounted on the board 3 (Yes in ST11), the mounting operation processing unit 42 causes the board transport unit 2 to unload the board 3 (ST12: board unloading process).

このように、仮置きステージ7を備える部品搭載装置1は、搭載された部品Dの位置ずれを防止しつつ、部品Dの外形を明瞭に認識して位置ずれ量を計測し、計測した位置ずれ量により吸着ノズル11bの位置、回転角度を補正して部品Dを基板3に搭載することで、高い搭載精度が実現できる。 In this way, the component mounting device 1 equipped with the temporary placement stage 7 can prevent misalignment of the mounted component D, clearly recognize the external shape of the component D, measure the amount of misalignment, and correct the position and rotation angle of the suction nozzle 11b based on the measured amount of misalignment to mount the component D on the board 3, thereby achieving high mounting accuracy.

本発明の仮置きステージおよび部品搭載装置は、載置された部品の位置ずれを防止しつつ、部品の外形を明瞭に認識できるという効果を有し、部品を基板に搭載する分野において有用である。 The temporary placement stage and component mounting device of the present invention have the effect of preventing misalignment of the mounted component while allowing the external shape of the component to be clearly recognized, and are useful in fields where components are mounted on substrates.

1 部品搭載装置
3 基板
7 仮置きステージ
11 搭載ヘッド
22 光源部
22a 光
25 拡散部材
26 上部部材
27 板状部材
27H、27Ha、27Hb 吸引孔
28 区画部材
28H 領域形成孔
29 光透過部材(吸引部)
30、35 保持体(吸引部)
30P、35P 内部空間(閉じた空間)
31、36 上方開口部
32、37 下方開口部
D 部品
REFERENCE SIGNS LIST 1 component mounting device 3 substrate 7 temporary placement stage 11 mounting head 22 light source section 22a light 25 diffusion member 26 upper member 27 plate-like member 27H, 27Ha, 27Hb suction hole 28 partition member 28H area forming hole 29 light-transmitting member (suction section)
30, 35 Holding body (suction part)
30P, 35P Internal space (closed space)
31, 36 Upper opening 32, 37 Lower opening D Parts

Claims (15)

基板に搭載される部品が仮置きされる仮置きステージであって、
通気性を有して上面に部品が載置される上部部材と、
前記上部部材の下側に配置され、厚み方向に貫通した複数の吸引孔を有する板状部材と、
前記板状部材の下方から前記吸引孔と前記上部部材を通じて空気を吸引することで前記上部部材に載置された部品を前記上部部材の上面に吸着させる吸引部と、
前記上部部材に下方から光を照射する光源部と、
前記板状部材の下側に配置され、厚み方向に貫通した領域形成孔を有し、前記領域形成孔により前記上部部材を区画する区画部材と、を備える、仮置きステージ。
A temporary placement stage on which components to be mounted on a substrate are temporarily placed,
an upper member having air permeability and on whose upper surface a component is placed;
a plate-like member disposed below the upper member and having a plurality of suction holes penetrating therethrough in a thickness direction;
a suction unit that sucks air from below the plate-like member through the suction hole and the upper member to adsorb a component placed on the upper member onto an upper surface of the upper member;
A light source unit that irradiates light onto the upper member from below;
a partition member disposed below the plate-like member, the partition member having an area forming hole penetrating in a thickness direction, the partition member partitioning the upper member by the area forming hole ;
前記複数の吸引孔は、前記領域形成孔の内側に位置するよう前記板状部材に形成される、請求項に記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the plurality of suction holes are formed in the plate-like member so as to be positioned inside the region forming hole. 前記上部部材に載置される部品は、前記区画部材によって区画された領域に載置される、請求項またはに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the component to be placed on the upper member is placed in an area defined by the partition member. 前記区画部材は、前記領域形成孔の数を異なるものに変更可能な、請求項からのいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the partition member has a changeable number of the area forming holes. 前記吸引部は、前記上部部材および前記板状部材を保持して閉じた空間を形成する保持体を備え、前記空間内の空気が吸引されることで前記上部部材の上面に吸着力を発生させる、請求項1からのいずれかに記載の仮置きステージ。 5. The temporary placement stage according to claim 1, wherein the suction section includes a holder that holds the upper member and the plate-like member to form a closed space, and an adhesive force is generated on an upper surface of the upper member by sucking in air from within the space. 前記保持体は、前記上部部材が取り付けられる上方開口部と、前記上方開口部の下方に形成された下方開口部と、前記下方開口部を閉止する位置に前記光源部から照射される光を透過させて前記上部部材に到達させる光透過部材と、を有する、請求項に記載の仮置きステージ。 6. The temporary placement stage according to claim 5, wherein the holder has an upper opening to which the upper member is attached, a lower opening formed below the upper opening, and a light-transmitting member that transmits light irradiated from the light source unit to a position that closes the lower opening and allows the light to reach the upper member. 前記上部部材、前記板状部材および前記区画部材は積層されて、前記保持体の上部に保持される、請求項を引用する請求項に記載の仮置きステージ。 The temporary placement stage according to claim 5 , wherein the upper member, the plate-like member and the partition member are stacked and held on the upper part of the holder. 前記複数の吸引孔は、前記上部部材に部品を載置する機器の形状に対応して前記板状部材に形成される、請求項1からのいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the plurality of suction holes are formed in the plate-like member in accordance with a shape of a device on which a component is to be placed on the upper member. 前記複数の吸引孔は、異なる前記機器に対応して前記板状部材に形成される、請求項に記載の仮置きステージ。 The temporary placement stage according to claim 8 , wherein the plurality of suction holes are formed in the plate-like member corresponding to different pieces of equipment. 前記光源部と前記上部部材との間に配置され、前記光源部から照射された光を上部部材側に拡散させる拡散部材を、さらに備えた、請求項1からのいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , further comprising a diffusion member disposed between the light source unit and the upper member, the diffusion member diffusing the light emitted from the light source unit toward the upper member. 前記上部部材は、多孔質材から成ることで通気性を有する、請求項1から10のいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the upper member is made of a porous material and has air permeability. 前記上部部材は、前記光源部から照射された光を上面側に拡散させる、請求項1から11のいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the upper member diffuses the light emitted from the light source unit toward an upper surface thereof. 前記板状部材は、前記上部部材より厚い、請求項1から12のいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the plate-like member is thicker than the upper member. 前記板状部材は、前記上部部材より硬い、請求項1から13のいずれかに記載の仮置きステージ。 The temporary placement stage according to claim 1 , wherein the plate-like member is harder than the upper member. 請求項1から14のいずれかに記載の仮置きステージと、前記仮置きステージに仮置きされた部品を基板に搭載する搭載ヘッドとを備えた、部品搭載装置。 15. A component mounting device comprising: the temporary placement stage according to claim 1; and a mounting head that mounts the component temporarily placed on the temporary placement stage onto a substrate.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002337034A (en) 2001-05-11 2002-11-26 Tokyo Seimitsu Co Ltd Plane emission type suction table
WO2019065394A1 (en) 2017-09-29 2019-04-04 株式会社新川 Mounting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002337034A (en) 2001-05-11 2002-11-26 Tokyo Seimitsu Co Ltd Plane emission type suction table
WO2019065394A1 (en) 2017-09-29 2019-04-04 株式会社新川 Mounting device

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