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JP7626063B2 - Magnetic core and method for manufacturing the same - Google Patents
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JP7626063B2 - Magnetic core and method for manufacturing the same - Google Patents

Magnetic core and method for manufacturing the same Download PDF

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JP7626063B2
JP7626063B2 JP2021502187A JP2021502187A JP7626063B2 JP 7626063 B2 JP7626063 B2 JP 7626063B2 JP 2021502187 A JP2021502187 A JP 2021502187A JP 2021502187 A JP2021502187 A JP 2021502187A JP 7626063 B2 JP7626063 B2 JP 7626063B2
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magnetic core
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JPWO2020175367A1 (en
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敏男 三原
和則 西村
徳和 小湯原
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Proterial Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/20Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H01F1/22Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
    • H01F1/24Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/33Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials mixtures of metallic and non-metallic particles; metallic particles having oxide skin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Soft Magnetic Materials (AREA)

Description

本発明は磁心および磁心の製造方法に関する。 The present invention relates to a magnetic core and a method for manufacturing a magnetic core.

従来から、家電機器、産業機器、車両など多種多様な用途において、インダクタ、トランス、チョーク等のコイル部品が用いられ、コイル部品は、磁心に敷設されたコイルで構成されていて、かかる磁心には、磁気特性、形状自由度、価格に優れるフェライトが広く用いられている。Coil components such as inductors, transformers and chokes have traditionally been used in a wide variety of applications, including home appliances, industrial equipment and vehicles. Coil components consist of a coil placed around a magnetic core, and ferrite, which has excellent magnetic properties, freedom of shape and cost, is widely used for such magnetic cores.

また、近年、電子機器等の電源装置の小型化が進み、更に多様な環境下でも使用可能であることが求められるようになった。その結果、小型・低背であって、130℃を超える高温の環境下で、かつ大電流に対しても使用可能なコイル部品の要求が強くなっている。この様なコイル部品には、フェライトと比較してキュリー温度が高くて飽和磁束密度も大きい金属系の軟磁性材料を使用した磁心の採用が進んでいる。金属系の軟磁性材料としては、例えばFe-Si系、Fe-Ni系、Fe-Si-Al系、Fe-Cr-Al系合金などの磁性粒子が用いられている。In recent years, power supply devices for electronic devices and the like have become smaller, and there is a demand for them to be usable in an even more diverse range of environments. As a result, there is a growing demand for coil components that are small and low-profile, and can be used in high-temperature environments exceeding 130°C, and with large currents. For such coil components, magnetic cores using metallic soft magnetic materials that have a higher Curie temperature and a higher saturation magnetic flux density than ferrite are increasingly being used. As metallic soft magnetic materials, magnetic particles such as Fe-Si, Fe-Ni, Fe-Si-Al, and Fe-Cr-Al alloys are used.

一般に焼結により製造されるフェライト磁心や、金属系の軟磁性材料を用いた圧粉磁心は微細な隙間や空孔を備えた多孔質となり易いことが知られている。特許文献1ではフェライト磁心の微細な隙間に接着剤が染み込むのを防ぐように、磁心の表面にガラス層を設けることが記載されている。また特許文献2には、金属系の軟磁性材料を用いた圧粉磁心の空孔部分に浸透防止材料を充填して、接着剤等の浸透を防止することが記載されている。It is known that ferrite cores, which are generally manufactured by sintering, and powder cores using metallic soft magnetic materials tend to be porous with fine gaps and pores. Patent Document 1 describes providing a glass layer on the surface of the magnetic core to prevent adhesive from seeping into the fine gaps in the ferrite core. Patent Document 2 describes filling the pores in a powder core using a metallic soft magnetic material with a permeation prevention material to prevent the permeation of adhesives, etc.

特開2011-014730号公報JP 2011-014730 A 特開2013-045926号公報JP 2013-045926 A

特許文献1や特許文献2では、多孔質の磁心に対して封孔処理を行うことで接着剤の浸透を抑制する。しかしながら、磁心の形状は複雑で、成形時の密度差等から空孔の存在量の偏りが生じ易く、またガラス層等の浸透防止用材料による皮膜の形成状態や充填状態もまた異なり易い。そのため、浸透抑止の効果が十分に得られない場合があった。そもそも封孔処理後の磁心が十分な浸透抑止性能を有するかの判断は容易ではなく、実際に接着剤等を塗布して浸透状態を確認するしかなかった。In Patent Documents 1 and 2, the penetration of adhesive is suppressed by performing a pore-sealing process on the porous magnetic core. However, the shape of the magnetic core is complex, and the amount of pores present is likely to be uneven due to density differences during molding, and the formation and filling conditions of the coating made of permeation prevention materials such as glass layers are also likely to vary. As a result, there are cases where the permeation prevention effect is not fully achieved. In the first place, it is not easy to determine whether a magnetic core after pore-sealing has sufficient permeation prevention performance, and the only option is to actually apply adhesive or the like to check the permeation state.

そこで本発明では、浸透抑止性能の優れた磁心を提供することを目的とする。 Therefore, the present invention aims to provide a magnetic core with excellent permeation prevention performance.

本発明の一形態によれば、表面の少なくとも一部にシリカ質皮膜で被覆された被覆面を有し、前記被覆面における山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下の磁心を提供できる。これによれば、浸透抑止性能の優れた磁心を提供することができる。 According to one embodiment of the present invention, there is provided a magnetic core having a coated surface, at least a part of which is coated with a siliceous film, and the arithmetic mean curve (Spc: ISO25178) of the peaks of the coated surface is 37000 mm -1 or less. This makes it possible to provide a magnetic core with excellent permeation suppression performance.

本発明の一形態においては、前記磁心が、Fe-M(MはFeよりも酸化し易い金属)系合金の磁性粒子どうしが前記磁性粒子由来の酸化物を介して結合した構造を有するのが好ましい。In one embodiment of the present invention, it is preferable that the magnetic core has a structure in which magnetic particles of an Fe-M (M is a metal that oxidizes more easily than Fe) alloy are bonded together via oxides derived from the magnetic particles.

本発明の一形態においては、前記シリカ質皮膜がシロキサン結合(-Si-O-Si-結合)を含むのが好ましい。In one embodiment of the present invention, it is preferable that the siliceous coating contains siloxane bonds (-Si-O-Si- bonds).

本発明の一形態おいては、前記酸化物は前記Mを含み、前記酸化物に含まれるMがAl又はCrの少なくとも一方であるのが好ましい。In one embodiment of the present invention, the oxide contains M, and it is preferable that the M contained in the oxide is at least one of Al and Cr.

本発明の一形態おいては、前記被覆面に形成された電極を有するのが好ましい。In one embodiment of the present invention, it is preferable to have an electrode formed on the coated surface.

本発明の別の形態によれば、磁心の少なくとも一部をシリカ質皮膜で被覆し、山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下である被覆面を形成する工程と、前記被覆面に電極を形成する工程と、を備える磁心の製造方法を提供することができる。これによれば、浸透抑止性能の優れた被覆面の上に電極を形成することができ、磁心の信頼性や歩留まりの向上が期待できる。 According to another aspect of the present invention, there is provided a method for manufacturing a magnetic core, comprising the steps of: coating at least a part of a magnetic core with a siliceous coating to form a coating surface having an arithmetic mean peak curvature (Spc: ISO25178) of 37000 mm -1 or less; and forming an electrode on the coating surface. This allows the electrode to be formed on a coating surface with excellent permeation suppression performance, and is expected to improve the reliability and yield of the magnetic core.

本発明の別の形態おいては、前記磁心が、Fe-M(MはFeよりも酸化し易い金属)系合金の磁性粒子どうしが前記磁性粒子由来の酸化物を介して結合した構造を有することが好ましい。In another embodiment of the present invention, it is preferable that the magnetic core has a structure in which magnetic particles of an Fe-M (M is a metal that oxidizes more easily than Fe) alloy are bonded together via oxides derived from the magnetic particles.

本発明の別の形態おいては、前記シリカ質皮膜がシロキサン結合(-Si-O-Si-結合)を含むことが好ましい。In another embodiment of the present invention, it is preferable that the siliceous coating contains siloxane bonds (-Si-O-Si- bonds).

本発明の別の形態おいては、前記酸化物は前記Mを含み、前記酸化物に含まれるMがAl又はCrの少なくとも一方であることが好ましい。In another embodiment of the present invention, the oxide contains the M, and it is preferable that the M contained in the oxide is at least one of Al and Cr.

本発明の別の形態おいては、前記シリカ質皮膜は、磁心の表面にシリカ質皮膜形成用処理液を塗布し硬化させる工程を1回以上行って形成するのが好ましい。In another embodiment of the present invention, the siliceous coating is preferably formed by carrying out a process of applying a treatment liquid for forming a siliceous coating to the surface of the magnetic core and hardening the liquid at least once.

本発明によれば、浸透抑止性能が優れた磁心を提供することができ、磁心の信頼性や歩留まりの向上に寄与することができる。また、本発明よれば、浸透抑止性能の優れた被覆面の上に電極を形成することができ、磁心の信頼性や歩留まりの向上に寄与することができる。According to the present invention, it is possible to provide a magnetic core with excellent permeation prevention performance, which can contribute to improving the reliability and yield of the magnetic core. Furthermore, according to the present invention, it is possible to form an electrode on a coating surface with excellent permeation prevention performance, which can contribute to improving the reliability and yield of the magnetic core.

シリカ質皮膜で被覆された被覆面の山頂点の算術平均曲(Spc:ISO25178)と浸透抑止性能との関係を説明するためのグラフである。1 is a graph for explaining the relationship between the arithmetic mean curve (Spc: ISO25178) of the peaks of a surface coated with a siliceous film and the permeation prevention performance. シリカ質皮膜が被覆されていない磁心の表面を拡大したSEM画像である。1 is an enlarged SEM image of the surface of a magnetic core that is not covered with a siliceous coating. シリカ質皮膜で被覆された磁心の被覆面を拡大したSEM画像である。1 is an enlarged SEM image of the coating surface of a magnetic core coated with a siliceous film.

以下、本発明の実施形態について具体的に説明するが、本発明はこれに限定されるものではない。 The following describes in detail an embodiment of the present invention, but the present invention is not limited to this.

本実施形態の磁心は、Ni系フェライト等のセラミック系の軟磁性材料や、前述の金属系の軟磁性材料の磁性粒子が用いられた多孔質なものであり、その表面の少なくとも一部をシリカ質皮膜で被覆したものである。その被覆面における山頂点の算術平均曲(Spc:ISO25178)を37000mm-1以下とすることで、被覆面の表面がなだらかな形状となり、それに相応して被覆面の上に塗布される接着剤等の浸透が抑制された浸透抑止性能が向上した磁心とすることができる。被覆面の表面の性状を立体的に評価する山頂点の算術平均曲(Spc:ISO25178)は国際標準化機構のISO25178に規定され、後述するレーザー顕微鏡等の計測機器によって容易に計測可能である。 The magnetic core of this embodiment is a porous core made of ceramic soft magnetic material such as Ni-based ferrite or magnetic particles of the above-mentioned metal-based soft magnetic material, and at least a part of the surface is coated with a siliceous film. By setting the arithmetic mean curve (Spc: ISO25178) of the peaks on the coated surface to 37000 mm -1 or less, the surface of the coated surface becomes a gentle shape, and accordingly, the permeation of adhesives and the like applied on the coated surface is suppressed, thereby improving the permeation suppression performance of the magnetic core. The arithmetic mean curve (Spc: ISO25178) of the peaks, which three-dimensionally evaluates the surface properties of the coated surface, is specified in ISO25178 of the International Organization for Standardization, and can be easily measured by measuring instruments such as a laser microscope described later.

ISO25178には立体的な面粗さのパラメータとして、他にも算術平均高さSa、最大高さSz、アスペクト比Str、展開面積比Sdrなどがあるが、その内、表面の少なくとも一部がシリカ質皮膜で被覆された被覆面を有する磁心において、被覆面を山頂点の算術平均曲Spcで規定される特有の表面プロファイルとすることにより、浸透抑止性能に優れた磁心を提供できるとの知見を得た。 ISO 25178 also includes other parameters of three-dimensional surface roughness, such as arithmetic mean height Sa, maximum height Sz, aspect ratio Str, and developed area ratio Sdr. Of these, it has been discovered that for magnetic cores having a coated surface, at least a portion of which is coated with a silica coating, by giving the coated surface a unique surface profile defined by the arithmetic mean curve Spc of the peaks, it is possible to provide a magnetic core with excellent permeation prevention performance.

本実施形態の磁心は、空孔率が5~25%である多孔質のものを用いることができる。金属系の軟磁性材料としては、例えばFeと、Feよりも酸化しやすい元素Mを含有する軟磁性合金の磁性粒子とするのが好ましい。磁心の軟磁性材料の第1の態様として、Fe、M(Al及びCr)の和を100質量%として、Alを3質量%以上且つ16.0質量%以下、Crを3質量%以上且つ7.0質量%以下で含み、残部がFe及び不可避不純物である軟磁性合金であるのが好ましい。The magnetic core of this embodiment may be porous with a porosity of 5 to 25%. The metallic soft magnetic material is preferably magnetic particles of a soft magnetic alloy containing, for example, Fe and an element M that is more easily oxidized than Fe. As a first aspect of the soft magnetic material of the magnetic core, it is preferable that the sum of Fe and M (Al and Cr) is 100 mass%, and that the soft magnetic alloy contains 3 mass% or more and 16.0 mass% or less of Al, 3 mass% or more and 7.0 mass% or less of Cr, and the remainder is Fe and unavoidable impurities.

また、磁心の軟磁性材料の第2の態様としては、Fe、M(AlまたはCr)、Siの和を100質量%として、Mを1.5質量%以上且つ8質量%以下、Siを1質量%超え且つ7質量%以下で含み、残部がFe及び不可避不純物である軟磁性合金であるのが好ましい。In addition, a second embodiment of the soft magnetic material of the magnetic core is preferably a soft magnetic alloy containing 1.5% by mass or more and 8% by mass or less of M, more than 1% by mass or more and 7% by mass or less of Si, with the sum of Fe, M (Al or Cr) and Si being 100% by mass, and the remainder being Fe and unavoidable impurities.

なお上記した第1の態様や第2の態様において、CやMn、P、S、O、Ni、Nなどを不可避不純物として含みうる。これらの不可避不純物の含有量は、それぞれ、C≦0.05質量%、Mn≦1質量%、P≦0.02質量%、S≦0.02質量%、O≦0.5質量%、Ni≦0.5質量%、N≦0.1質量%であることが好ましい。前記第1の態様では、Siについても、不可避的不純物として0.5質量%以下で含まれる場合がある。In the first and second aspects described above, C, Mn, P, S, O, Ni, N, etc. may be contained as inevitable impurities. The contents of these inevitable impurities are preferably C≦0.05% by mass, Mn≦1% by mass, P≦0.02% by mass, S≦0.02% by mass, O≦0.5% by mass, Ni≦0.5% by mass, and N≦0.1% by mass. In the first aspect, Si may also be contained as an inevitable impurity at 0.5% by mass or less.

軟磁性合金の磁性粒子の形態も特に限定するものではないが、例えば、流動性等の観点からは、所定組成に調整された溶湯から、比較的球状の粒子が得られやすいアトマイズ法による磁性粒子を用いることが好ましい。ガスアトマイズ、水アトマイズ等のアトマイズ法は、展性や延性が高く、粉砕しにくい合金の磁性粒子作製に好適である。The shape of the magnetic particles of the soft magnetic alloy is not particularly limited, but from the standpoint of fluidity, for example, it is preferable to use magnetic particles produced by the atomization method, which makes it easier to obtain relatively spherical particles from molten metal adjusted to a specified composition. Atomization methods such as gas atomization and water atomization are suitable for producing magnetic particles of alloys that are highly malleable and ductile and difficult to crush.

また磁性粒子の平均粒径(ここでは、累積粒度分布におけるメジアン径D50を用いる)は、これを限定するものではないが、例えば、1μm以上、100μm以下の平均粒径を有するものを用いることができる。なお磁性粒子を成形金型に充填した際に、粒子径の大きな粒子どうしが隣り合うと、その粒間に大きな隙間が形成されて充填率が上がらず、加圧成形により得られる成形体の密度が上がらない傾向にある。このため、磁性粒子を分級し、粒子径の大きな粒子を除くことが好ましい。分級の方法としては、ふるい分け分級などの乾式分級を用いることができ、少なくとも32μmアンダーの(すなわち、目開き32μmの篩を通過した)磁性粒子を得ることが好ましい。平均粒径を小さくすることで、磁心の強度、磁心損失、高周波特性が改善されるので、平均粒径(メジアン径D50)は、さらに好ましくは15μm以下である。一方、平均粒径が小さい場合は透磁率が低くなるため、平均粒径(メジアン径D50)は、より好ましくは5μm以上である。 The average particle size of the magnetic particles (here, the median diameter D50 in the cumulative particle size distribution is used) is not limited to this, but for example, those having an average particle size of 1 μm or more and 100 μm or less can be used. When magnetic particles are filled into a molding die, if particles with large particle sizes are adjacent to each other, large gaps are formed between the particles, and the filling rate does not increase, and the density of the molded body obtained by pressure molding tends not to increase. For this reason, it is preferable to classify the magnetic particles and remove particles with large particle sizes. As a classification method, dry classification such as sieving classification can be used, and it is preferable to obtain magnetic particles at least under 32 μm (i.e., passed through a sieve with an opening of 32 μm). By reducing the average particle size, the strength, core loss, and high frequency characteristics of the magnetic core are improved, so the average particle size (median diameter D50) is more preferably 15 μm or less. On the other hand, if the average particle size is small, the magnetic permeability decreases, so the average particle size (median diameter D50) is more preferably 5 μm or more.

磁性粒子はバインダと混合し、造粒によって顆粒とすることが好ましい。それにより磁心に成形する際に、金型内での流動性や充填性を向上できるし、加圧成形の際に磁性粒子同士を結着させ、成形後のハンドリングに耐える強度を成形体に付与することも出来る。バインダの種類は特に限定されないが、例えば、ポリエチレンやポリビニルアルコール、アクリル樹脂などの有機バインダを使用できる。熱処理後も残存する無機系バインダの併用も可能である。It is preferable to mix the magnetic particles with a binder and form them into granules by granulation. This improves the fluidity and filling properties in the mold when forming the magnetic core, and also bonds the magnetic particles together during pressure molding, giving the molded body strength that can withstand handling after molding. There are no particular restrictions on the type of binder, but organic binders such as polyethylene, polyvinyl alcohol, and acrylic resins can be used. It is also possible to use inorganic binders that remain after heat treatment.

バインダの添加量は、磁性粒子間にバインダが十分に行きわたり、成形体の強度を十分に確保できる程度であればよいが、バインダの添加量が多過ぎると、成形体の密度や強度が低下する傾向にある。かかる観点から、バインダの添加量は、磁性粒子100重量部に対して、0.2~10重量部にすることが好ましく、0.5~3.0重量部にすることがより好ましい。The amount of binder added should be sufficient so that the binder is distributed sufficiently between the magnetic particles and the strength of the molded body is sufficient, but if too much binder is added, the density and strength of the molded body tend to decrease. From this perspective, the amount of binder added is preferably 0.2 to 10 parts by weight, and more preferably 0.5 to 3.0 parts by weight, per 100 parts by weight of magnetic particles.

磁性粒子とバインダとの混合方法は、特に限定されるものではなく、従来から知られている混合方法や混合機を用いることができる。また、造粒方法としては、例えば転動造粒や噴霧乾燥造粒などの湿式造粒方法を採用できる。中でもスプレードライヤーを用いた噴霧乾燥造粒が好ましく、これによれば顆粒の形状が球形に近付き、また加熱空気に曝される時間が短く、大量の顆粒を得ることができる。The method for mixing the magnetic particles and the binder is not particularly limited, and any conventionally known mixing method or mixer can be used. As the granulation method, for example, wet granulation methods such as rolling granulation and spray-drying granulation can be used. Among these, spray-drying granulation using a spray dryer is preferred, as this makes the shape of the granules closer to spherical, and the time of exposure to heated air is short, making it possible to obtain a large amount of granules.

得られる顆粒は、嵩密度:1.5~2.5×10kg/m、平均粒径(D50):60~150μmであることが好ましい。このような顆粒によれば、成形時の流動性に優れるとともに、磁性粒子間の隙間が小さくなって金型内への充填性が増し、その結果、成形体が高密度になって透磁率の高い磁心が得られる。所望の大きさの顆粒径を得るために、振動篩などによる分級が使用できる。 The resulting granules preferably have a bulk density of 1.5 to 2.5 x 10 kg/m and an average particle size (D50) of 60 to 150 μm. Such granules have excellent flowability during molding, and the gaps between the magnetic particles are small, improving the filling ability into the mold, resulting in a compact with a high density and a magnetic core with high magnetic permeability. In order to obtain the desired granule size, classification using a vibrating sieve or the like can be used.

また、加圧成形時の顆粒と成形金型との摩擦を低減させるために、ステアリン酸やステアリン酸塩などの潤滑剤を添加することが好ましい。潤滑剤の添加量は、磁性粒子100重量部に対して0.1~2.0重量部とすることが好ましい。潤滑剤は、金型に塗布することも可能である。 In addition, to reduce friction between the granules and the molding die during pressure molding, it is preferable to add a lubricant such as stearic acid or a stearate salt. The amount of lubricant added is preferably 0.1 to 2.0 parts by weight per 100 parts by weight of magnetic particles. The lubricant can also be applied to the die.

磁性粒子の顆粒は加圧成形に供される。加圧成形では、油圧プレスやサーボプレスといったプレス機械と成形金型を用いて、トロイダル形状や直方体形状などの所定形状に混合粉を成形する。この加圧成形は、室温成形でもよいし、バインダの材質によっては、バインダが消失しない程度であって、バインダが軟化するガラス転移温度付近まで顆粒を加熱して行う温間成形でもよい。加圧成形により得られた成形体における磁性粒子は、互いに点接触あるいは面接触し、部分的に空隙を介して隣接する。成形体の密度は5.6×10kg/m以上が好ましい。 The magnetic particle granules are subjected to pressure molding. In the pressure molding, a press machine such as a hydraulic press or a servo press and a molding die are used to mold the mixed powder into a predetermined shape such as a toroidal shape or a rectangular parallelepiped shape. This pressure molding may be room temperature molding, or depending on the binder material, it may be warm molding in which the granules are heated to a temperature close to the glass transition temperature at which the binder softens, so long as the binder does not disappear. The magnetic particles in the compact obtained by pressure molding are in point contact or surface contact with each other and are adjacent to each other partially via gaps. The density of the compact is preferably 5.6 x 103 kg/m3 or more .

成形体に対する熱処理として650℃以上900℃以下の温度で焼鈍が実施される。焼鈍は、大気中、または酸素と不活性ガスとの混合気体中、あるいは水蒸気を含む雰囲気中など、酸素を含む雰囲気中で行われ、中でも大気中での熱処理が簡便で好ましい。酸化物は、熱処理時の磁性粒子と酸素との反応により得られ、磁性粒子の自然酸化を超える酸化反応によって生成される。かかる酸化物が生成されることにより、優れた絶縁性や耐食性を有して、多数の磁性粒子間の粒界として堅固に結合された高強度の磁心が得られる。また、加圧成形で導入された応力歪を緩和して良好な磁気特性が得られる。Annealing is performed at a temperature of 650°C to 900°C as heat treatment for the compact. Annealing is performed in an oxygen-containing atmosphere, such as in air, a mixture of oxygen and an inert gas, or an atmosphere containing water vapor, among which heat treatment in air is simple and preferable. Oxides are obtained by the reaction between the magnetic particles and oxygen during heat treatment, and are produced by an oxidation reaction that exceeds the natural oxidation of the magnetic particles. The production of such oxides results in a high-strength magnetic core that has excellent insulation and corrosion resistance and is firmly bonded as grain boundaries between a large number of magnetic particles. In addition, the stress distortion introduced by pressure molding is alleviated, resulting in good magnetic properties.

軟磁性合金を構成するM元素のAlやCrは、Feや他の非鉄金属と比較してO(酸素)との親和力が大きい。そのため、熱処理時には、大気中のOやバインダに含まれるOが磁性粒子の表面近傍のAlやCrと優先的に結合し、化学的に安定なAl酸化物やCr酸化物、あるいは他の非鉄金属との複合酸化物として磁性粒子の表面に生成される。M元素を含む酸化物が磁性粒子の表面に生成されることにより、耐食性に優れるとともに、磁性粒子の絶縁性が高められ、渦電流損失を低減して磁心の比抵抗を向上できる。なお、CrよりもAlのほうがOとの親和力が大きいため、M元素としてAlとCrを含む場合、形成される酸化物の程度はAl酸化物が優位となり、Cr酸化物は抑えられる傾向がある。そして磁心の表面は磁性粒子の酸化物で覆われたものとなる。 The M elements Al and Cr that make up the soft magnetic alloy have a greater affinity with O (oxygen) than Fe and other non-ferrous metals. Therefore, during heat treatment, O in the air and O contained in the binder preferentially bind to Al and Cr near the surface of the magnetic particles, and are formed on the surface of the magnetic particles as chemically stable Al oxides, Cr oxides, or composite oxides with other non-ferrous metals. By forming oxides containing M elements on the surfaces of the magnetic particles, the corrosion resistance is excellent, the insulation of the magnetic particles is improved, and the eddy current loss can be reduced to improve the resistivity of the magnetic core. Since Al has a greater affinity with O than Cr, when Al and Cr are included as M elements, the degree of oxide formed tends to be dominated by Al oxides, and Cr oxides are suppressed. The surface of the magnetic core is then covered with oxides of the magnetic particles.

熱処理を経て得られた磁心において、占積率(相対密度)は75~95%の範囲内であることが好ましい。このような磁心の空孔率は5%~25%となる。なお占積率(相対密度)は、磁心の密度をその寸法および質量から算出し、得られた磁心の密度を、磁性粒子の真密度で除して算出する。磁性粒子の真密度は、同組成で溶解して作製したインゴットの密度を用いればよい。In the magnetic core obtained after heat treatment, it is preferable that the space factor (relative density) is in the range of 75 to 95%. The porosity of such a magnetic core is 5% to 25%. The space factor (relative density) is calculated by calculating the density of the magnetic core from its dimensions and mass, and dividing the density of the obtained magnetic core by the true density of the magnetic particles. The true density of the magnetic particles can be calculated by the density of an ingot produced by melting the same composition.

次いで、得られた磁心の表面にシリカ質皮膜を形成する。シリカ質皮膜は3つのOとSiがシロキサン結合(-Si-O-Si-)した主鎖を有する分子構造を有する。シリカ質皮膜は(-Si-O-Si-)で示される結合を有していれば良く、また(-Si-O-)で示される結合が繰り返して連続に結合していても良い。このようなシリカ質皮膜を磁心の表面に形成する方法としては、アルコキシシランオリゴマーのゾルを加水分解により縮合反応させてゲル化するゾル-ゲル法を用いた低温法が好ましい。シリカ質皮膜は、アルコキシシランオリゴマー溶液とコロイダルシリカを含むシリカ質皮膜形成用処理液の液中に磁心を浸漬し、またはシリカ質皮膜形成用処理液を磁心に噴霧した後、硬化処理を行うことにより形成するのが好ましい。シリカ質皮膜形成用処理液の溶媒は、アルコール系溶媒、グリコールエーテル系溶媒など、親水性の有機溶媒が好ましい。シリカ質皮膜自体が耐熱性に優れ、高強度であり、また磁心の表面の全体を覆うことで耐食性を向上することが出来る。Next, a siliceous film is formed on the surface of the obtained magnetic core. The siliceous film has a molecular structure having a main chain in which three O and Si are siloxane-bonded (-Si-O-Si-). The siliceous film may have a bond represented by (-Si-O-Si-), and may have a continuous bond represented by (-Si-O-) repeated. A low-temperature method using a sol-gel method in which an alkoxysilane oligomer sol is gelled by hydrolysis through a condensation reaction is preferably used as a method for forming such a siliceous film on the surface of the magnetic core. The siliceous film is preferably formed by immersing the magnetic core in a siliceous film forming treatment liquid containing an alkoxysilane oligomer solution and colloidal silica, or by spraying the siliceous film forming treatment liquid on the magnetic core and then subjecting it to a hardening treatment. The solvent for the siliceous film forming treatment liquid is preferably a hydrophilic organic solvent such as an alcohol-based solvent or a glycol ether-based solvent. The siliceous film itself has excellent heat resistance and high strength, and can improve corrosion resistance by covering the entire surface of the magnetic core.

前述の通り、磁性粒子の酸化物によって磁心の表面は酸化物の皮膜で覆われた状態であり、この皮膜には磁性粒子由来の金属元素とOが結びついた状態と、金属元素と水酸基(OH)とが結びついた状態とが存在している。磁心表面の水酸基や酸化物とシリカ質皮膜中の水酸基とが共有結合やイオン結合等の化学結合することで、磁性粒子とシリカ質皮膜との接着力を高めることができ、もって磁心とシリカ質皮膜とが密着させることができる。As mentioned above, the surface of the magnetic core is covered with an oxide film due to the oxides of the magnetic particles, and this film contains a state in which metal elements derived from the magnetic particles are bonded to O, and a state in which metal elements are bonded to hydroxyl groups (OH). The hydroxyl groups or oxides on the surface of the magnetic core are chemically bonded, such as by covalent bonds or ionic bonds, to the hydroxyl groups in the siliceous film, thereby increasing the adhesive strength between the magnetic particles and the siliceous film, thereby enabling the magnetic core and the siliceous film to adhere closely to each other.

また、磁心の表面の磁性粒子間の隙間を通じてシリカ質皮膜形成用処理液が及んだ磁心内部の空孔にもシリカ質皮膜が形成される。シリカ質皮膜によって磁心内部の空孔が埋まるとともに、磁心表面(被覆面)ではシリカ質皮膜の形成によってなだらかな形状となる。つまり、被覆面の状態を山頂点の算術平均曲(Spc:ISO25178)で定量化することで磁心の封孔状態を容易に確認することが可能となる。被覆面における山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下であれば、浸透抑止性能が優れた磁心とすることができる。なお、磁心をシリカ質皮膜形成用処理液に浸漬させた状態で脱泡処理し、真空状態を解除する真空含侵法などの処理を行うことで、一層磁心にシリカ質皮膜形成用処理液を含浸させることが出来る。 In addition, a siliceous film is also formed on the voids inside the magnetic core that are reached by the siliceous film forming treatment liquid through the gaps between the magnetic particles on the surface of the magnetic core. The voids inside the magnetic core are filled with the siliceous film, and the surface (coated surface) of the magnetic core is given a gentle shape by the formation of the siliceous film. In other words, the state of the coated surface can be quantified by the arithmetic mean curve of the peaks (Spc: ISO25178) to easily check the sealing state of the magnetic core. If the arithmetic mean curve of the peaks (Spc: ISO25178) on the coated surface is 37000 mm -1 or less, the magnetic core can have excellent permeation suppression performance. In addition, by performing a process such as a vacuum impregnation method in which the magnetic core is immersed in the siliceous film forming treatment liquid and degassed, and the vacuum state is released, the magnetic core can be impregnated with the siliceous film forming treatment liquid in one layer.

磁心へのシリカ質皮膜形成用処理液の塗布方法は、例えば、ディップスピンコート法、ディップコート法、スプレーコート法などの公知の方法に従って行えば良く、特に限定されない。なお、シリカ質皮膜形成用処理液の粘度によっては100~200℃の温度に調整して塗布しても良い。硬化処理は、例えば、室温で硬化させても良いが、40~200℃程度の温度下におくことで硬化を促進しても良い。磁心の表面に形成するシリカ質皮膜の膜厚は、0.5~10μm程度の膜厚とすることが好ましい。シリカ質皮膜の膜厚は、磁心表面へのシリカ質皮膜形成用処理液の塗布と硬化を繰り返すことで調整可能である。膜厚が厚くなるに従って、皮膜内の残留応力で皮膜の表面側にひびが生じ易くなる。硬化速度を緩やかにすることによってひび発生を抑制することは出来るが、生産性を考慮すれば膜厚は5μm以下であるのが好ましく、より好ましくは3μm以下である。The method of applying the siliceous film forming treatment liquid to the magnetic core may be performed according to a known method such as dip spin coating, dip coating, or spray coating, and is not particularly limited. Depending on the viscosity of the siliceous film forming treatment liquid, the temperature may be adjusted to 100 to 200 ° C. before application. The hardening treatment may be performed, for example, at room temperature, but hardening may be accelerated by placing the solution at a temperature of about 40 to 200 ° C. The thickness of the siliceous film formed on the surface of the magnetic core is preferably about 0.5 to 10 μm. The thickness of the siliceous film can be adjusted by repeatedly applying the siliceous film forming treatment liquid to the magnetic core surface and hardening it. As the film thickness increases, residual stress in the film makes it more likely that cracks will occur on the surface side of the film. Although the occurrence of cracks can be suppressed by slowing down the hardening speed, the film thickness is preferably 5 μm or less, more preferably 3 μm or less, in consideration of productivity.

磁心の被覆層の上に、電極を形成して、電極を備える磁心を構成することができる。シリカ質皮膜で被覆され、山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下とされた被覆層は、浸透抑止性能が優れ、安定して電極を形成することができる。電極材料としては、Ag、Cu、Al等(その合金も含む)の導電性材料を用いることができる。また、電極の形成方法としては、例えばSPCC、銅合金、Ni合金、ステンレス等の金属端子を接着固定する方法や、スパッタリング法、イオンプレーティング法、あるいは導体ペーストを用いた印刷法、転写法、ディップ法などの方法で膜状に電極を形成しても良い。 An electrode can be formed on the coating layer of the magnetic core to form a magnetic core equipped with an electrode. A coating layer coated with a siliceous film and having an arithmetic mean curve of the peak (Spc: ISO25178) of 37000 mm -1 or less has excellent permeation suppression performance and can stably form an electrode. Conductive materials such as Ag, Cu, Al, etc. (including alloys thereof) can be used as the electrode material. In addition, as a method for forming an electrode, for example, a method of bonding and fixing a metal terminal such as SPCC, copper alloy, Ni alloy, stainless steel, etc., a sputtering method, an ion plating method, or a printing method, a transfer method, a dipping method, etc. using a conductive paste may be used to form an electrode in a film shape.

磁性粒子として、Alを5質量%、Crを4質量%、残部をFeとするFeAlCrアトマイズ粉末(平均粒径D50≒10μm)を準備した。バインダとしてPVA(株式会社クラレ製ポバールPVA-205)水溶液、溶媒としてイオン交換水を使用し、それらを撹拌装置に投入し、攪拌混合してスラリーとした。アトマイズ粉末100重量部に対して、PVA固形分は0.75重量部、スラリー濃度が80wt%となるよう、バインダとイオン交換水の配合比を調整した。スラリーをスプレードライヤー装置で噴霧乾燥した。スプレードライヤー装置内部でスラリーを噴霧し、240℃の熱風でスラリーを瞬時に乾燥させて、装置下部から粒状になった顆粒を回収した。得られた顆粒の粗大粒を除去するため、100メッシュのふるいを通し、ふるい通し後の顆粒の平均粒径は60μm~80μmの範囲内とした。上記の各造粒方法によって得られた顆粒に、顆粒100重量部に対して0.4重量部の割合でステアリン酸亜鉛を添加し、混合機にて混合して成形用の顆粒を得た。As magnetic particles, FeAlCr atomized powder (average particle size D50 ≒ 10 μm) containing 5% Al, 4% Cr, and the remainder Fe was prepared. A PVA (Poval PVA-205 manufactured by Kuraray Co., Ltd.) aqueous solution was used as the binder, and ion-exchanged water was used as the solvent. These were put into a stirring device and stirred and mixed to form a slurry. The blending ratio of the binder and ion-exchanged water was adjusted so that the PVA solid content was 0.75 parts by weight and the slurry concentration was 80 wt% for 100 parts by weight of the atomized powder. The slurry was spray-dried using a spray dryer device. The slurry was sprayed inside the spray dryer device, instantly dried with hot air at 240°C, and the granules that had become granular were collected from the bottom of the device. In order to remove coarse particles from the obtained granules, they were passed through a 100-mesh sieve, and the average particle size of the granules after sieving was set to be within the range of 60 μm to 80 μm. Zinc stearate was added to the granules obtained by each of the above granulation methods in a ratio of 0.4 parts by weight per 100 parts by weight of the granules, and mixed in a mixer to obtain granules for molding.

上記で得られた顆粒を金型に充填し、油圧プレス機を用いて5.8g/cm、6.3g/cmの成形密度が得られるように室温にて成形した。成形体の形状は円柱状で、外径φ7.2mm、厚さ2mmとした。 The granules obtained above were filled into a mold and molded at room temperature using a hydraulic press to obtain a molding density of 5.8 g/cm 3 and 6.3 g/cm 3. The molded body had a cylindrical shape with an outer diameter of φ7.2 mm and a thickness of 2 mm.

得られた成形体を750℃×1時間、大気中で熱処理を施して試料A、試料Bの磁心とした。そして磁心の寸法および重量から密度を算出した。The obtained compacts were heat-treated in air at 750°C for 1 hour to produce the magnetic cores of Sample A and Sample B. The density was then calculated from the dimensions and weight of the magnetic cores.

次に、円柱状の磁心をステンレス製のメッシュ籠に収めてシリカ質皮膜形成用処理液に1分間浸漬した。液温は23℃であった。シリカ質皮膜形成用処理液には、奥野製薬工業株式会社製Protector Sシリーズの封孔剤を使用した。浸漬中は籠を揺動させて磁心表面に付着した気泡を取り除いた。その後、磁心を遠心脱水機に投入し、8.4m/sの周速で付着した余剰の封孔剤を取り除き、70℃の熱風で乾燥し硬化させた。浸漬から乾燥のコート処理工程を1~3回繰り返す。70℃の熱風乾燥においても縮合反応が進みシリカ質皮膜が形成されるが、未反応の部分が残るため、コート処理した後、120℃×20分の条件で再度硬化処理を実施して、磁心の表面の全面をシリカ質皮膜で覆った。Next, the cylindrical magnetic core was placed in a stainless steel mesh cage and immersed in the treatment liquid for forming a siliceous film for one minute. The liquid temperature was 23°C. The treatment liquid for forming a siliceous film was a sealant from the Protector S series manufactured by Okuno Chemical Industries Co., Ltd. During immersion, the cage was swung to remove air bubbles attached to the magnetic core surface. The magnetic core was then placed in a centrifugal dehydrator, and the excess sealant attached at a peripheral speed of 8.4 m/s was removed, and the core was dried and hardened with hot air at 70°C. The coating process from immersion to drying was repeated 1 to 3 times. The condensation reaction also progresses in the hot air drying at 70°C, forming a siliceous film, but since unreacted portions remain, after the coating process, a hardening process was carried out again under the conditions of 120°C x 20 minutes, and the entire surface of the magnetic core was covered with a siliceous film.

得られた磁心について表面粗さを測定した。表面粗さ測定は、株式会社キーエンス製レーザー顕微鏡VK-X120を用いた。倍率は100倍で、評価領域は145μm×109μmの領域とし、断面曲線のレベリング(傾斜調整)、平滑化処理を行い、視野の異なる5つの評価領域における平均の山頂点の算術平均曲(Spc:ISO25178)を得た。またシリカ質皮膜が未形成の磁心についても同様にして山頂点の算術平均曲(Spc:ISO25178)を得た。図2はコート処理を行っていない試料Aの表面を1000倍で観察したSEM画像であり、図3はコート処理を2回行った試料Aの表面を1000倍で観察したSEM画像である。The surface roughness of the obtained magnetic core was measured. The surface roughness was measured using a laser microscope VK-X120 manufactured by Keyence Corporation. The magnification was 100 times, the evaluation area was 145 μm × 109 μm, and the cross-sectional curve was leveled (tilt adjustment) and smoothed to obtain the arithmetic mean curve (Spc: ISO25178) of the average peak in five evaluation areas with different fields of view. The arithmetic mean curve (Spc: ISO25178) of the peak was also obtained in the same manner for a magnetic core without a siliceous coating. Figure 2 is an SEM image of the surface of sample A that was not coated at 1000 times, and Figure 3 is an SEM image of the surface of sample A that was coated twice at 1000 times.

磁心の封孔性を確認するのに、インク吸収テストを採用した。テストインクはarcotest製表面エネルギー値評価ペン(レンジ38mN/m)を用いた。磁心の表面にテストインクを塗布し、その経過を動画で撮影した。塗布時から2秒経過後の静止画にてテストインクとそれ以外の領域をコンピュータで二値化処理し、観察面にてインクが吸収された割合から封孔性を判断した。インク吸収が3割以内の場合は良判定し、3割超の場合は否判定とした。An ink absorption test was used to confirm the pore sealing ability of the magnetic core. The test ink used was an arcotest surface energy evaluation pen (range 38 mN/m). The test ink was applied to the surface of the magnetic core, and the process was recorded as a video. A still image taken 2 seconds after application was binarized by computer for the test ink and other areas, and the pore sealing ability was judged from the proportion of ink absorbed on the observation surface. If the ink absorption was less than 30%, it was judged as good, and if it was more than 30%, it was judged as bad.

磁心のシリカ質皮膜の被覆面について山頂点の算術平均曲(Spc:ISO25178)の測定結果と、インク吸収テストの結果を纏めて表1及び図1に示す。なお表中、インク吸収テストで良判定を○、否判定を×として示している。The measurement results of the arithmetic mean curve of the peaks (Spc: ISO25178) for the coating surface of the siliceous film on the magnetic core and the results of the ink absorption test are summarized in Table 1 and Figure 1. In the table, a good result in the ink absorption test is indicated by ○, and a bad result is indicated by ×.

Figure 0007626063000001
Figure 0007626063000001

図1に示すように、シリカ質皮膜で被覆された磁心の表面において山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下であると、インク吸収テストで良判定が得られるが、37000mm-1超だと否判定となって、容易に磁心の浸透抑止性能を評価することが出来ることがわかる。したがって、シリカ質皮膜で被覆された被覆面の山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下である磁心を用いることにより、浸透抑止性能の優れた磁心とすることができる。

As shown in Figure 1, when the arithmetic mean curvature (Spc: ISO25178) of the peaks on the surface of a magnetic core coated with a siliceous film is 37000 mm -1 or less, a good result is obtained in the ink absorption test, but when it exceeds 37000 mm -1 , a bad result is obtained, and it can be seen that the permeation suppression performance of the magnetic core can be easily evaluated. Therefore, by using a magnetic core in which the arithmetic mean curvature (Spc: ISO25178) of the peaks of the coating surface coated with a siliceous film is 37000 mm -1 or less, a magnetic core with excellent permeation suppression performance can be obtained.

Claims (12)

表面の少なくとも一部にシリカ質皮膜で被覆された被覆面を有し、
前記被覆面における山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下であり、
Feと、Feよりも酸化しやすい元素Mを含有する軟磁性合金の磁性粒子どうしが前記磁性粒子由来の酸化物を介して結合した構造を有し、
前記磁性粒子間に、前記表面に開口し、かつ前記シリカ質皮膜で埋められた空孔を備える、磁心。
A coating surface is provided on at least a portion of the surface thereof, the coating surface being coated with a siliceous coating.
The arithmetic mean curvature (Spc: ISO25178) of the peaks of the coated surface is 37000 mm -1 or less,
The soft magnetic alloy has a structure in which magnetic particles of the soft magnetic alloy containing Fe and an element M which is more easily oxidized than Fe are bonded to each other via an oxide derived from the magnetic particles,
A magnetic core comprising voids between said magnetic particles, said voids being open to said surface and filled with said siliceous coating.
請求項1に記載の磁心であって、前記シリカ質皮膜がシロキサン結合(-Si-O-Si-結合)を含む、磁心。 The magnetic core according to claim 1, wherein the siliceous coating contains siloxane bonds (-Si-O-Si- bonds). 請求項1または2に記載の磁心であって、前記酸化物は前記Mを含み、前記酸化物に含まれるMがAl又はCrの少なくとも一方である、磁心。 The magnetic core according to claim 1 or 2, wherein the oxide contains the M, and the M contained in the oxide is at least one of Al and Cr. 請求項1~3のいずれかに記載の磁心であって、前記シリカ質皮膜が表面の全面を被覆している、磁心。 A magnetic core according to any one of claims 1 to 3, in which the siliceous coating covers the entire surface. 請求項1~4のいずれかに記載の磁心であって、前記シリカ質皮膜の膜厚は10μm以下である、磁心。 A magnetic core according to any one of claims 1 to 4, wherein the thickness of the siliceous coating is 10 μm or less. 請求項1~5のいずれかに記載の磁心であって、前記被覆面に形成された電極を有する、磁心。 A magnetic core according to any one of claims 1 to 5, having an electrode formed on the coating surface. 磁心の少なくとも一部をシリカ質皮膜で被覆し、山頂点の算術平均曲(Spc:ISO25178)が37000mm-1以下である被覆面を形成する工程と、
前記被覆面に電極を形成する工程と、を備え、
前記磁心が、Feと、Feよりも酸化しやすい元素Mを含有する軟磁性合金の磁性粒子どうしが前記磁性粒子由来の酸化物を介して結合した構造を有し、
前記磁性粒子間に、前記磁心の表面に開口し、かつ前記シリカ質皮膜で埋められた空孔を備える磁心の製造方法。
A step of coating at least a portion of the magnetic core with a siliceous coating to form a coating surface having an arithmetic mean peak curvature (Spc: ISO25178) of 37000 mm -1 or less;
forming an electrode on the coated surface;
the magnetic core has a structure in which magnetic particles of a soft magnetic alloy containing Fe and an element M that is more easily oxidized than Fe are bonded together via an oxide derived from the magnetic particles,
A method for manufacturing a magnetic core comprising the steps of: forming a magnetic core having voids between the magnetic particles, the voids opening to the surface of the magnetic core and filled with the siliceous coating;
前記シリカ質皮膜がシロキサン結合(-Si-O-Si-結合)を含む、請求項7に記載の磁心の製造方法。 The method for manufacturing a magnetic core according to claim 7, wherein the siliceous coating contains siloxane bonds (-Si-O-Si- bonds). 前記酸化物は前記Mを含み、前記酸化物に含まれるMがAl又はCrの少なくとも一方である、請求項7または8に記載の磁心の製造方法。 The method for manufacturing a magnetic core according to claim 7 or 8, wherein the oxide contains the M, and the M contained in the oxide is at least one of Al and Cr. 前記シリカ質皮膜が磁心の表面の全面を被覆している、請求項7~9のいずれかに記載の磁心の製造方法。 The method for manufacturing a magnetic core according to any one of claims 7 to 9, wherein the siliceous coating covers the entire surface of the magnetic core. 前記シリカ質皮膜の膜厚は10μm以下である、請求項7~10のいずれかに記載の磁心の製造方法。 The method for manufacturing a magnetic core according to any one of claims 7 to 10, wherein the thickness of the siliceous coating is 10 μm or less. 前記シリカ質皮膜は、磁心の表面にシリカ質皮膜形成用処理液を塗布し硬化させる工程を1回以上行って形成する、請求項7~11のいずれかに記載の磁心の製造方法。 The method for manufacturing a magnetic core according to any one of claims 7 to 11, wherein the siliceous coating is formed by applying a siliceous coating forming treatment liquid to the surface of the magnetic core and curing the liquid at least once.
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