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JP7626644B2 - Solar cell inspection method, solar cell manufacturing method, and solar cell inspection device - Google Patents
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JP7626644B2 - Solar cell inspection method, solar cell manufacturing method, and solar cell inspection device - Google Patents

Solar cell inspection method, solar cell manufacturing method, and solar cell inspection device Download PDF

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JP7626644B2
JP7626644B2 JP2021054774A JP2021054774A JP7626644B2 JP 7626644 B2 JP7626644 B2 JP 7626644B2 JP 2021054774 A JP2021054774 A JP 2021054774A JP 2021054774 A JP2021054774 A JP 2021054774A JP 7626644 B2 JP7626644 B2 JP 7626644B2
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訓太 吉河
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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本発明は、太陽電池検査方法、太陽電池製造方法及び太陽電池検査装置に関する。 The present invention relates to a solar cell inspection method, a solar cell manufacturing method, and a solar cell inspection device.

太陽電池が幅広く利用されているが、太陽電池に美観が要求される場合も少なくない。太陽電池の表面に微細な傷がある場合、光の反射等によって美観が損なわれる場合がある。太陽電池の表面には、光の入射率を向上するためにテクスチャと呼ばれる微細な凹凸が形成されることも多い。表面にテクスチャが形成された太陽電池の表面の小さな傷は、太陽電池の表面を撮影した可視光画像の画像処理では容易に判別できない。 Solar cells are widely used, but there are many cases where aesthetics are required for solar cells. If there are fine scratches on the surface of a solar cell, the aesthetics may be marred by light reflection, etc. On the surface of a solar cell, fine irregularities called texture are often formed to improve the light incidence rate. Small scratches on the surface of a solar cell with texture formed on its surface cannot be easily identified by image processing of visible light images taken of the surface of the solar cell.

太陽電池に光を照射してキャリアを励起させ、キャリアが再結合する際に発する光(フォトルミネッセンス)を撮影することによって太陽電池の欠陥を検査する方法が知られている(例えば特許文献1参照)。通常のフォトルミネッセンス画像では、太陽電池の内部の傷も輝度低下として現れるため、美観に影響する表面の傷と、美観に影響しない内部の傷とを判別することはできない。 A method is known for inspecting defects in solar cells by irradiating the solar cell with light to excite carriers and photographing the light (photoluminescence) emitted when the carriers recombine (see, for example, Patent Document 1). In normal photoluminescence images, scratches inside the solar cell also appear as reduced brightness, making it impossible to distinguish between surface scratches that affect the aesthetic appearance and internal scratches that do not affect the aesthetic appearance.

特開2017-219458号公報JP 2017-219458 A

上述のような現状に鑑みて、本発明は、太陽電池の表面の傷を正確に検知できる太陽電池検査方法及び太陽電池検査装置、並びに美観に優れる太陽電池が得られる太陽電池製造方法を提供することを課題とする。 In view of the current situation as described above, the present invention aims to provide a solar cell inspection method and solar cell inspection device that can accurately detect scratches on the surface of a solar cell, as well as a solar cell manufacturing method that can produce solar cells with excellent aesthetic appearance.

本発明の一態様に係る太陽電池検査方法は、太陽電池にそのバンドギャップの半分以下の波長の短波長測定光を照射することによりフォトルミネッセンスの短波長フォトルミネッセンス画像を撮影する工程と、前記短波長フォトルミネッセンス画像に基づいて前記太陽電池の受光面の傷を検出する工程と、を備える。 A solar cell inspection method according to one aspect of the present invention includes a step of taking a short-wavelength photoluminescence image of photoluminescence by irradiating a solar cell with short-wavelength measurement light having a wavelength equal to or less than half the band gap of the solar cell, and a step of detecting scratches on the light-receiving surface of the solar cell based on the short-wavelength photoluminescence image.

上述の太陽電池検査方法は、前記太陽電池に前記短波長測定光よりも前記バンドギャップに近い波長の長波長測定光を照射することによりフォトルミネッセンスの長波長フォトルミネッセンス画像を撮影する工程をさらに備え、前記傷を検出する工程において、前記短波長フォトルミネッセンス画像を前記長波長フォトルミネッセンス画像と比較することによって、前記受光面の傷を検出してもよい。 The above-mentioned solar cell inspection method may further include a step of capturing a long-wavelength photoluminescence image of photoluminescence by irradiating the solar cell with long-wavelength measurement light having a wavelength closer to the band gap than the short-wavelength measurement light, and in the step of detecting the flaw, the short-wavelength photoluminescence image may be compared with the long-wavelength photoluminescence image to detect the flaw on the light-receiving surface.

上述の太陽電池検査方法において、前記短波長測定光と前記長波長測定光との照度を異ならせてもよい。 In the solar cell inspection method described above, the illuminance of the short wavelength measurement light and the illuminance of the long wavelength measurement light may be made different.

本発明の一態様に係る太陽電池製造方法は、上述の太陽電池検査方法を実行する工程と、前記太陽電池検査方法の検査結果に基づいて、前記太陽電池を選別する工程と、を備える。 A solar cell manufacturing method according to one aspect of the present invention includes a step of performing the solar cell inspection method described above, and a step of selecting the solar cells based on the inspection results of the solar cell inspection method.

本発明の一態様に係る太陽電池検査装置は、太陽電池の受光面の傷を検査する太陽電池検査装置であって、前記太陽電池に第1波長の短波長測定光を照射する短波長光源と、前記太陽電池に前記第1波長よりも長い第2波長の長波長測定光を照射する長波長光源と、前記短波長測定光又は前記長波長測定光が照射された直後の前記太陽電池のフォトルミネッセンス画像を撮影する撮像部と、前記撮像部が撮影した前記フォトルミネッセンス画像を画像処理することにより、前記太陽電池の受光面の傷を検出する画像処理部と、を備える。 A solar cell inspection device according to one aspect of the present invention is a solar cell inspection device that inspects the light receiving surface of a solar cell for scratches, and includes a short-wavelength light source that irradiates the solar cell with short-wavelength measurement light of a first wavelength, a long-wavelength light source that irradiates the solar cell with long-wavelength measurement light of a second wavelength longer than the first wavelength, an imaging unit that captures a photoluminescence image of the solar cell immediately after it is irradiated with the short-wavelength measurement light or the long-wavelength measurement light, and an image processing unit that detects scratches on the light receiving surface of the solar cell by image processing the photoluminescence image captured by the imaging unit.

本発明によれば、太陽電池の表面の傷を正確に検知できる。 The present invention makes it possible to accurately detect scratches on the surface of solar cells.

本発明の一実施形態に係る太陽電池検査装置の構成を示す模式図である。1 is a schematic diagram showing a configuration of a solar cell inspection device according to an embodiment of the present invention. 本発明の一実施形態に係る太陽電池検査方法の手順を示すフローチャートである。1 is a flowchart showing the steps of a solar cell inspection method according to an embodiment of the present invention. 本発明の一実施形態に係る太陽電池製造方法の手順を示すフローチャートである。1 is a flowchart showing the steps of a solar cell manufacturing method according to one embodiment of the present invention.

以下、本発明の実施形態について図面を参照しながら説明する。図1は、本発明の一実施形態に係る太陽電池検査装置1の構成を示す模式図である。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing the configuration of a solar cell inspection device 1 according to one embodiment of the present invention.

太陽電池検査装置1は、太陽電池Sの受光面の傷を検出する装置である。太陽電池検査装置1は、太陽電池Sを搬送する搬送装置10と、太陽電池Sに第1波長の短波長測定光を照射する短波長光源20と、太陽電池Sに第1波長よりも長い第2波長の長波長測定光を照射する長波長光源30と、短波長測定光又は長波長測定光が照射された直後の太陽電池Sのフォトルミネッセンスの画像を撮影する撮像部40と、搬送装置10、短波長光源20、長波長光源30及び撮像部40を制御する撮影制御部50と、撮像部40が撮影したフォトルミネッセンス画像を画像処理することにより、太陽電池Sの受光面の傷を検出する画像処理部60と、を備える。 The solar cell inspection device 1 is a device that detects scratches on the light receiving surface of a solar cell S. The solar cell inspection device 1 includes a transport device 10 that transports the solar cell S, a short-wavelength light source 20 that irradiates the solar cell S with short-wavelength measurement light of a first wavelength, a long-wavelength light source 30 that irradiates the solar cell S with long-wavelength measurement light of a second wavelength longer than the first wavelength, an imaging unit 40 that captures a photoluminescence image of the solar cell S immediately after it is irradiated with the short-wavelength measurement light or the long-wavelength measurement light, an imaging control unit 50 that controls the transport device 10, the short-wavelength light source 20, the long-wavelength light source 30, and the imaging unit 40, and an image processing unit 60 that detects scratches on the light receiving surface of the solar cell S by image processing the photoluminescence image captured by the imaging unit 40.

搬送装置10は、例えばベルトコンベア等によって構成され得る。搬送装置10は、太陽電池Sを、短波長光源20及び長波長光源30により短波長測定光及び長波長測定光を照射して撮像部40によりフォトルミネッセンスの画像を撮影できる位置に太陽電池Sを配置する。搬送装置10は、太陽電池Sの位置を確認するセンサ等を有してもよい。 The transport device 10 may be configured, for example, by a belt conveyor. The transport device 10 positions the solar cell S at a position where the solar cell S can be irradiated with short-wavelength measurement light and long-wavelength measurement light by the short-wavelength light source 20 and long-wavelength light source 30 and a photoluminescence image can be captured by the imaging unit 40. The transport device 10 may have a sensor or the like that confirms the position of the solar cell S.

短波長光源20は、太陽電池Sにそのバンドギャップの半分以下の波長の短波長測定光を照射する。なお、通常、バンドギャップの単位はエネルギ量[eV]であるのに対し、波長の単位は長さ[nm]であり、次元が異なるが、波長λ[nm]の光のフォトンエネルギE[eV]は、プランク定数h、光速度c[m/s]を用いて、E[eV]=h・c/λと表すことができる。つまり、短波長光源20は、フォトンエネルギがバンドギャップの半分以下となる波長の短波長測定光を照射する。 The short-wavelength light source 20 irradiates the solar cell S with short-wavelength measurement light having a wavelength less than half the band gap. Note that, while the unit of band gap is usually energy [eV], the unit of wavelength is length [nm], so although they are different dimensions, the photon energy E [eV] of light with a wavelength λ [nm] can be expressed as E [eV] = h·c/λ using Planck's constant h and the speed of light c [m/s]. In other words, the short-wavelength light source 20 irradiates short-wavelength measurement light with a wavelength in which the photon energy is less than half the band gap.

このように波長が短い短波長測定光は、太陽電池Sの受光面に付近で吸収され、深部までは到達しない。このため、短波長測定光を照射する場合、受光面の近傍の低深度領域にしかキャリアが生成されないので、キャリアが再結合するまでの太陽電池Sの内部での面方向の移動量が小さくなる。したがって、フォトルミネッセンス画像において、太陽電池Sの受光面の傷に起因するキャリアの減少が周囲のキャリアで希釈されず、明確な輝度低下として現れる。 Short-wavelength measurement light, which has such a short wavelength, is absorbed near the light-receiving surface of the solar cell S and does not reach deep inside. For this reason, when short-wavelength measurement light is irradiated, carriers are generated only in the low-depth region near the light-receiving surface, so the amount of movement in the surface direction inside the solar cell S until the carriers recombine is small. Therefore, in the photoluminescence image, the reduction in carriers caused by scratches on the light-receiving surface of the solar cell S is not diluted by the surrounding carriers and appears as a clear decrease in brightness.

短波長測定光の波長の下限としては、太陽電池Sのバンドギャップの10%が好ましく、20%がより好ましい。一方、短波長測定光の波長の上限としては、太陽電池Sのバンドギャップの50%が好ましく、40%がより好ましい。短波長測定光の波長を前記下限以上とすることによって、短波長光源20が不必要に高価となることを防止できる。また、短波長測定光の波長を前記上限以下とすることによって、短波長測定光が太陽電池Sの深部においてキャリアを励起しないようにできるので、太陽電池Sの受光面の傷だけを選択的に検出できる。なお、測定光の波長は、個々の太陽電池Sのバンドギャップの値に応じて定める必要はなく、例えば設計値、平均値等の代表値に応じて選定することができる。 The lower limit of the wavelength of the short-wavelength measurement light is preferably 10% of the band gap of the solar cell S, more preferably 20%. On the other hand, the upper limit of the wavelength of the short-wavelength measurement light is preferably 50% of the band gap of the solar cell S, more preferably 40%. By setting the wavelength of the short-wavelength measurement light to the lower limit or more, it is possible to prevent the short-wavelength light source 20 from becoming unnecessarily expensive. In addition, by setting the wavelength of the short-wavelength measurement light to the upper limit or less, it is possible to prevent the short-wavelength measurement light from exciting carriers deep inside the solar cell S, so that only scratches on the light-receiving surface of the solar cell S can be selectively detected. Note that the wavelength of the measurement light does not need to be determined according to the band gap value of each solar cell S, and can be selected according to a representative value such as a design value or an average value.

長波長光源30は、太陽電池Sに、短波長測定光よりも太陽電池Sのバンドギャップに近い波長の長波長測定光を照射する。長波長測定光の波長の下限としては、太陽電池Sのバンドギャップの75%が好ましく、80%がより好ましい。一方、長波長測定光の波長の上限としては、太陽電池Sのバンドギャップの90%が好ましく、95%がより好ましい。長波長測定光の波長を前記下限以上とすることによって、太陽電池Sの受光面の傷以外の欠陥によるフォトルミネッセンスの輝度低下の確認を容易にできる。また、長波長測定光の波長を前記上限以下とすることによって、十分なキャリアを生成するために長波長光源30に要求される出力を抑制できる。 The long-wavelength light source 30 irradiates the solar cell S with long-wavelength measurement light having a wavelength closer to the band gap of the solar cell S than the short-wavelength measurement light. The lower limit of the wavelength of the long-wavelength measurement light is preferably 75% of the band gap of the solar cell S, and more preferably 80%. On the other hand, the upper limit of the wavelength of the long-wavelength measurement light is preferably 90% of the band gap of the solar cell S, and more preferably 95%. By setting the wavelength of the long-wavelength measurement light to the lower limit or more, it is easy to check for a decrease in the brightness of photoluminescence due to defects other than scratches on the light-receiving surface of the solar cell S. In addition, by setting the wavelength of the long-wavelength measurement light to the upper limit or less, the output required of the long-wavelength light source 30 to generate sufficient carriers can be suppressed.

長波長測定光は、短波長測定光と照度が異なってもよい。長波長測定光と短波長測定光との太陽電池Sの受光面における照度を異ならせることによって、短波長測定光と長波長測定光との間のキャリア生成効率、キャリアライフタイム等の差に起因するフォトルミネッセンス強度の差を補償し、画像処理部60による画像解析を容易にできる。 The long-wavelength measurement light may have a different illuminance from the short-wavelength measurement light. By making the illuminance of the long-wavelength measurement light and the short-wavelength measurement light different at the light-receiving surface of the solar cell S, the difference in photoluminescence intensity caused by the difference in carrier generation efficiency, carrier lifetime, etc. between the short-wavelength measurement light and the long-wavelength measurement light can be compensated for, making it easier to perform image analysis by the image processing unit 60.

撮像部40は、太陽電池Sにおいて、短波長測定光又は長波長測定光によって励起されたキャリアが再結合して基底状態に戻る際に発する光であるフォトルミネッセンスを撮影して、太陽電池Sの2次元位置毎のフォトルミネッセンスの輝度を示すフォトルミネッセンス画像を取得する。撮像部40は、例えばCCD、CMOS等の2次元撮像素子を有する構成とされ得る。 The imaging unit 40 captures photoluminescence, which is light emitted when carriers excited by short-wavelength measurement light or long-wavelength measurement light recombine and return to the ground state in the solar cell S, and obtains a photoluminescence image that shows the brightness of the photoluminescence for each two-dimensional position on the solar cell S. The imaging unit 40 may be configured to have a two-dimensional imaging element such as a CCD or CMOS.

撮影制御部50は、搬送装置10と同期して、短波長光源20による短波長光の照射及び撮像部40によるフォトルミネッセンス画像(短波長フォトルミネッセンス画像)の撮影、並びに長波長光源30による長波長光の照射及び撮像部40によるフォトルミネッセンス画像(長波長フォトルミネッセンス画像)の撮影を行うよう、搬送装置10、短波長光源20、長波長光源30及び撮像部40の動作タイミングを制御する。 The imaging control unit 50 controls the operation timing of the transport device 10, the short-wavelength light source 20, the long-wavelength light source 30, and the imaging unit 40 so that, in synchronization with the transport device 10, the short-wavelength light source 20 irradiates short-wavelength light and the imaging unit 40 captures a photoluminescence image (short-wavelength photoluminescence image), and the long-wavelength light source 30 irradiates long-wavelength light and the imaging unit 40 captures a photoluminescence image (long-wavelength photoluminescence image).

撮影制御部50は、例えばメモリ、CPU、入出力インターフェイス等を備えるコンピュータ装置に適切な制御プログラムを実行させることによって実現できる。 The imaging control unit 50 can be realized, for example, by having a computer device equipped with a memory, a CPU, an input/output interface, etc. execute an appropriate control program.

画像処理部60は、画像処理技術を用いて、撮像部40が撮影した短波長フォトルミネッセンス画像に基いて、好ましくは短波長フォトルミネッセンス画像と長波長フォトルミネッセンス画像を比較することによって、太陽電池Sの受光面の傷を検出する。 The image processing unit 60 uses image processing techniques to detect scratches on the light receiving surface of the solar cell S based on the short wavelength photoluminescence image captured by the imaging unit 40, preferably by comparing the short wavelength photoluminescence image with the long wavelength photoluminescence image.

画像処理部60は、撮影制御部50と同様のコンピュータ装置に適切な画像処理プログラムを実行させることによって実現できる。画像処理部60は、撮影制御部50と同一のコンピュータ装置によって実現されてもよい。撮影制御部50は及び画像処理部60は、その機能において類別されるものであって、物理構成及びプログラム構成によって明確に区別できるものでなくてもよい。 The image processing unit 60 can be realized by executing an appropriate image processing program on a computer device similar to the imaging control unit 50. The image processing unit 60 may be realized by the same computer device as the imaging control unit 50. The imaging control unit 50 and the image processing unit 60 are classified according to their functions, and do not have to be clearly distinguishable according to their physical configuration and program configuration.

太陽電池Sの受光面の傷は、フォトルミネッセンス画像上に輝度の変化を生じさせる。通常、受光面の傷は、全体としてはフォトルミネッセンス画像の輝度低下をもたらすため、画像処理部60は、短波長フォトルミネッセンス画像において輝度が低い領域を傷がある領域として検出するよう構成され得る。短波長フォトルミネッセンスの輝度変化は、微細な傷でも比較的大きく現出するため、太陽電池Sの受光面の傷を通常の可視光画像として撮影するよりも容易且つ正確に検出することができる。 Scratches on the light receiving surface of the solar cell S cause a change in brightness in the photoluminescence image. Typically, scratches on the light receiving surface result in a decrease in the brightness of the photoluminescence image as a whole, so the image processing unit 60 can be configured to detect areas of low brightness in the short wavelength photoluminescence image as areas containing scratches. Since even minute scratches appear with a relatively large change in brightness in short wavelength photoluminescence, scratches on the light receiving surface of the solar cell S can be detected more easily and accurately than by capturing an ordinary visible light image.

太陽電池Sが全面に均一なフォトルミネッセンスを生じさせる場合、画像処理部60は、他の領域と輝度が異なる領域を抽出してもよい。また、太陽電池Sの構造により、フォトルミネッセンスがパターン状となる場合には、傷のない太陽電池Sにおいて撮影される基準となるフォトルミネッセンス画像との差分が大きい領域を抽出してもよい。 When the solar cell S produces uniform photoluminescence over the entire surface, the image processing unit 60 may extract areas whose brightness differs from other areas. Also, when the photoluminescence is patterned due to the structure of the solar cell S, the image processing unit 60 may extract areas whose brightness differs greatly from a reference photoluminescence image captured of an undamaged solar cell S.

また、画像処理部60は、短波長フォトルミネッセンス画像と長波長フォトルミネッセンス画像とを比較して、短波長フォトルミネッセンス画像の長波長フォトルミネッセンス画像よりも輝度が低い領域を傷がある領域として検出してもよい。フォトルミネッセンスの輝度は、受光面に傷がある領域だけでなく、深部や裏面に欠陥がある領域においても低下する。長波長フォトルミネッセンス画像における欠陥に対する輝度減少の感度は太陽電池Sの厚み方向に略均等であるが、短波長フォトルミネッセンス画像における欠陥に対する輝度減少の感度は、上述のように受光面側で大きく、裏面側で小さくなる。このため、長波長フォトルミネッセンス画像と比較して短波長フォトルミネッセンス画像における輝度の低下が大きい領域は、太陽電池Sの受光面に欠陥、つまり傷があると判断することができる。 The image processing unit 60 may also compare the short-wavelength photoluminescence image with the long-wavelength photoluminescence image, and detect areas in which the short-wavelength photoluminescence image has a lower brightness than the long-wavelength photoluminescence image as areas with scratches. The brightness of the photoluminescence decreases not only in areas where there are scratches on the light-receiving surface, but also in areas where there are defects deep inside or on the back surface. The sensitivity of the brightness reduction to defects in the long-wavelength photoluminescence image is approximately uniform in the thickness direction of the solar cell S, but the sensitivity of the brightness reduction to defects in the short-wavelength photoluminescence image is greater on the light-receiving surface side and smaller on the back surface side, as described above. For this reason, areas where the brightness reduction in the short-wavelength photoluminescence image is greater than that in the long-wavelength photoluminescence image can be determined to have a defect, i.e., a scratch, on the light-receiving surface of the solar cell S.

また、画像処理部60は、短波長フォトルミネッセンス画像及び長波長フォトルミネッセンス画像の少なくとも一方を用いて、太陽電池Sの光電変換効率を推定してもよい。短波長測定光と長波長測定光との照度が異なる場合、短波長フォトルミネッセンス画像及び長波長フォトルミネッセンス画像からそれぞれの照度における光電変換効率の推定値を算出することで、照度と光電変換効率との関係を表す関数を導出し、任意の照度における光電変換効率を推定可能とできる。 The image processing unit 60 may also estimate the photoelectric conversion efficiency of the solar cell S using at least one of the short-wavelength photoluminescence image and the long-wavelength photoluminescence image. When the illuminance of the short-wavelength measurement light and the long-wavelength measurement light differs, an estimate of the photoelectric conversion efficiency at each illuminance can be calculated from the short-wavelength photoluminescence image and the long-wavelength photoluminescence image, thereby deriving a function that represents the relationship between illuminance and photoelectric conversion efficiency, making it possible to estimate the photoelectric conversion efficiency at any illuminance.

太陽電池検査装置1を用いて行うことができる本発明に係る太陽電池検査方法の一実施形態は、図2に示すように、太陽電池Sにそのバンドギャップの半分以下の波長の短波長測定光を照射することによりフォトルミネッセンスの短波長フォトルミネッセンス画像を得る工程(ステップS01:短波長撮影工程)と、太陽電池Sに短波長測定光よりもバンドギャップに近い波長の長波長測定光を照射することによりフォトルミネッセンスの長波長フォトルミネッセンス画像を撮影する工程(ステップS02:長波長撮影工程)と、短波長フォトルミネッセンス画像及び長波長フォトルミネッセンス画像に基づいて太陽電池Sの受光面の傷を検出する工程(ステップS03:傷検出工程)と、を備える。 As shown in FIG. 2, one embodiment of the solar cell inspection method according to the present invention, which can be performed using the solar cell inspection device 1, includes a step of obtaining a short-wavelength photoluminescence image of the photoluminescence by irradiating the solar cell S with short-wavelength measurement light having a wavelength equal to or less than half the band gap of the solar cell (step S01: short-wavelength photographing step), a step of photographing a long-wavelength photoluminescence image of the photoluminescence by irradiating the solar cell S with long-wavelength measurement light having a wavelength closer to the band gap than the short-wavelength measurement light (step S02: long-wavelength photographing step), and a step of detecting scratches on the light-receiving surface of the solar cell S based on the short-wavelength photoluminescence image and the long-wavelength photoluminescence image (step S03: scratch detection step).

ステップS01の短波長撮影工程では、短波長光源20により太陽電池Sに短波長測定光を照射し、撮像部40により短波長フォトルミネッセンス画像を撮影する。 In the short-wavelength photographing process of step S01, the short-wavelength light source 20 irradiates the solar cell S with short-wavelength measurement light, and the imaging unit 40 photographs a short-wavelength photoluminescence image.

ステップS02の長波長撮影工程では、長波長光源30により太陽電池Sに長波長測定光を照射し、撮像部40により長波長フォトルミネッセンス画像を撮影する。長波長撮影工程と短波長撮影工程とは順番を入れ換えてもよい。 In the long-wavelength photographing process of step S02, the long-wavelength light source 30 irradiates the solar cell S with long-wavelength measurement light, and the imaging unit 40 captures a long-wavelength photoluminescence image. The order of the long-wavelength photographing process and the short-wavelength photographing process may be reversed.

ステップS03の傷検出工程では、画像処理部60によって、短波長フォトルミネッセンス画像及び長波長フォトルミネッセンス画像を画像処理することにより、短波長フォトルミネッセンス画像において輝度が低下している領域を抽出する。 In the scratch detection process of step S03, the image processing unit 60 processes the short-wavelength photoluminescence image and the long-wavelength photoluminescence image to extract areas of reduced brightness in the short-wavelength photoluminescence image.

さらに、本発明に係る太陽電池製造方法の一実施形態は、図3に示すように、太陽電池Sを形成する工程(ステップS11:太陽電池形成工程)と、図2の太陽電池検査方法を実行する工程(ステップS12:太陽電池検査工程)と、太陽電池検査方法の検査結果に基づいて太陽電池を選別する工程(ステップS13:太陽電池選別工程)と、選別した太陽電池を製品化する工程(ステップS14:太陽電池製品化工程)と、を備える。 Furthermore, as shown in FIG. 3, one embodiment of the solar cell manufacturing method according to the present invention includes a step of forming a solar cell S (step S11: solar cell formation step), a step of performing the solar cell inspection method of FIG. 2 (step S12: solar cell inspection step), a step of selecting solar cells based on the inspection results of the solar cell inspection method (step S13: solar cell selection step), and a step of manufacturing the selected solar cells (step S14: solar cell manufacturing step).

ステップS11の太陽電池形成工程では、公知の方法により、太陽電池Sを形成する。例として、半導体基板の表裏に異なる導電型を有する半導体層を積層することによって光電変換構造を形成することで、太陽電池Sが得られる。 In step S11, the solar cell formation process, the solar cell S is formed by a known method. For example, the solar cell S is obtained by forming a photoelectric conversion structure by stacking semiconductor layers having different conductivity types on the front and back of a semiconductor substrate.

ステップS12の太陽電池検査工程では、上述の太陽電池検査方法により、太陽電池Sの受光面の傷と考えられる領域を抽出する。 In the solar cell inspection process of step S12, the above-mentioned solar cell inspection method is used to extract areas that are thought to be scratches on the light receiving surface of the solar cell S.

ステップS13の太陽電池選別工程では、太陽電池検査工程の検査結果に基づいて、太陽電池Sを選別する。例として、検出された傷と考えられる領域の面積、長径等を指標として、太陽電池Sを順位付け又はランク分けしたり、不良品を特定して除外したりすることが考えられる。 In the solar cell sorting process in step S13, the solar cells S are sorted based on the inspection results of the solar cell inspection process. For example, the solar cells S may be ranked or sorted based on the area, major axis, etc. of the area that is believed to be a detected scratch, or defective products may be identified and removed.

ステップS14の太陽電池製品化工程では、選別された太陽電池Sを製品化する。ここでいう製品化とは、太陽電池Sにさらなる加工を行ったり、太陽電池Sを電子機器に組み込んだりすることによって最終製品とすることに加えて、所定のトレイに配置したり、包装又はラベリングを行ったりすることによって、中間製品として太陽電池Sを利用するものに引き渡し可能な状態とすることを含む。 In the solar cell manufacturing process in step S14, the selected solar cells S are manufactured into a product. Manufacturing here includes not only further processing the solar cells S and incorporating the solar cells S into electronic devices to turn them into final products, but also arranging the solar cells S on a specified tray, packaging, or labeling them to make them ready to be handed over to those who will use them as intermediate products.

以上の工程を備える図3の太陽電池製造方法は、太陽電池検査工程において図2の太陽電池検査方法により太陽電池Sの表面の傷を正確に検知できるので、美観に優れる太陽電池Sを製造できる。 The solar cell manufacturing method of FIG. 3, which includes the above steps, can accurately detect scratches on the surface of the solar cell S using the solar cell inspection method of FIG. 2 in the solar cell inspection step, making it possible to manufacture solar cells S with excellent aesthetics.

以上、本発明の実施形態について説明したが、本発明は上述した実施形態に限定されることなく、種々の変更及び変形が可能である。例として、本発明においては、長波長フォトルミネッセンス画像の撮影を必須としない。つまり、本発明に係る太陽電池検査方法では、短波長フォトルミネッセンス画像のみに基づいて太陽電池の受光面の傷を検出してもよく、本発明に係る太陽電池検査装置は長波長光源を有しなくてもよい。また、本発明にかかる太陽電池検査装置において、搬送装置は必須ではなく、ロボット等で太陽電池を配置する装置であってもよい。 Although the embodiments of the present invention have been described above, the present invention is not limited to the above-mentioned embodiments, and various modifications and variations are possible. For example, the present invention does not require the capture of long-wavelength photoluminescence images. In other words, the solar cell inspection method of the present invention may detect scratches on the light-receiving surface of a solar cell based only on short-wavelength photoluminescence images, and the solar cell inspection device of the present invention may not have a long-wavelength light source. Also, in the solar cell inspection device of the present invention, a transport device is not required, and the device may be one that positions solar cells using a robot or the like.

1 太陽電池検査装置
10 搬送装置
20 短波長光源
30 長波長光源
40 撮像部
50 撮影制御部
60 画像処理部
S 太陽電池
Reference Signs List 1 Solar cell inspection device 10 Conveying device 20 Short wavelength light source 30 Long wavelength light source 40 Imaging unit 50 Photography control unit 60 Image processing unit S Solar cell

Claims (3)

太陽電池にそのバンドギャップに相当する波長の半分以下の波長の短波長測定光を照射することによりフォトルミネッセンスの短波長フォトルミネッセンス画像を撮影する工程と、
前記太陽電池に、前記短波長測定光と照度が異なり、前記短波長測定光よりも前記バンドギャップに相当する波長に近い波長の長波長測定光を照射することによりフォトルミネッセンスの長波長フォトルミネッセンス画像を撮影する工程と、
前記短波長フォトルミネッセンス画像を前記長波長フォトルミネッセンス画像と比較することによって、前記太陽電池の受光面の傷を検出する工程と、
前記短波長フォトルミネッセンス画像及び前記長波長フォトルミネッセンス画像からそれぞれの照度における光電変換効率の推定値を算出し、照度と光電変換効率との関係を表す関数を導出する工程と
を備える、太陽電池検査方法。
A step of taking a short-wavelength photoluminescence image of photoluminescence by irradiating the solar cell with short-wavelength measurement light having a wavelength equal to or less than half the wavelength corresponding to the band gap of the solar cell;
a step of capturing a long-wavelength photoluminescence image of photoluminescence by irradiating the solar cell with long-wavelength measurement light having an illuminance different from that of the short-wavelength measurement light and a wavelength closer to the wavelength corresponding to the band gap than the short-wavelength measurement light;
detecting flaws on the light receiving surface of the solar cell by comparing the short wavelength photoluminescence image with the long wavelength photoluminescence image ;
calculating an estimated value of photoelectric conversion efficiency at each illuminance from the short-wavelength photoluminescence image and the long-wavelength photoluminescence image, and deriving a function representing a relationship between illuminance and photoelectric conversion efficiency;
A solar cell inspection method comprising:
請求項1に記載の太陽電池検査方法を実行する工程と、
前記太陽電池検査方法の検査結果に基づいて、前記太陽電池を選別する工程と、
を備える、太陽電池製造方法。
A step of carrying out the solar cell inspection method according to claim 1 ;
sorting the solar cells based on an inspection result of the solar cell inspection method;
A solar cell manufacturing method comprising:
太陽電池の受光面の傷を検査する太陽電池検査装置であって、
前記太陽電池に第1波長の短波長測定光を照射する短波長光源と、
前記太陽電池に前記第1波長よりも長い第2波長の長波長測定光を照射する長波長光源と、
前記短波長測定光が照射された直後の前記太陽電池の短波長フォトルミネッセンス画像及び前記長波長測定光が照射された直後の前記太陽電池の長波長フォトルミネッセンス画像を撮影する撮像部と、
前記撮像部が撮影した前記短波長フォトルミネッセンス画像及び前記長波長フォトルミネッセンス画像を画像処理し、前記短波長フォトルミネッセンス画像と前記長波長フォトルミネッセンス画像を比較することによって前記太陽電池の受光面の傷を検出すると共に、前記短波長フォトルミネッセンス画像及び前記長波長フォトルミネッセンス画像からそれぞれの照度における光電変換効率の推定値を算出して照度と光電変換効率との関係を表す関数を導出する画像処理部と、
を備える太陽電池検査装置。
A solar cell inspection device for inspecting a light receiving surface of a solar cell for scratches, comprising:
a short wavelength light source that irradiates the solar cell with a short wavelength measurement light having a first wavelength;
a long-wavelength light source that irradiates the solar cell with long-wavelength measurement light having a second wavelength that is longer than the first wavelength;
an imaging unit that captures a short-wavelength photoluminescence image of the solar cell immediately after the short-wavelength measurement light is irradiated and a long-wavelength photoluminescence image of the solar cell immediately after the long-wavelength measurement light is irradiated ;
an image processing unit that performs image processing on the short wavelength photoluminescence image and the long wavelength photoluminescence image captured by the imaging unit , detects scratches on the light receiving surface of the solar cell by comparing the short wavelength photoluminescence image with the long wavelength photoluminescence image , and calculates an estimate of photoelectric conversion efficiency at each illuminance from the short wavelength photoluminescence image and the long wavelength photoluminescence image to derive a function that represents the relationship between illuminance and photoelectric conversion efficiency ;
A solar cell inspection device comprising:
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