JP7628843B2 - Diaphragm-type pressure detection device and its manufacturing method - Google Patents

Description

The present invention relates to a diaphragm-type pressure detection device having a vacuum chamber in which a getter is placed, and a method for manufacturing the same.

As disclosed in Patent Document 1, the diaphragm-type pressure detection device comprises a housing in which a vacuum chamber and a space into which the fluid to be detected flows, and a sensor element provided with a diaphragm that deforms in response to the pressure difference between the air pressure in the vacuum chamber and the pressure of the fluid that has flowed into the space. The sensor element detects the pressure difference by detecting the deformation of the diaphragm. In order to improve the degree of vacuum, a getter that adsorbs residual gas in the vacuum chamber is disposed in the vacuum chamber. This getter is activated by heating after the vacuum chamber is formed, and adsorbs residual gas remaining in the vacuum chamber.

JP 2006-3234 A

When the getter in the vacuum chamber of the diaphragm-type pressure detection device described in Patent Document 1 is heated, the entire diaphragm-type pressure detection device is heated. However, in the case of such heating, the diaphragm of the sensor element is also heated, and there is a risk that the diaphragm may be deformed or damaged. In order to prevent deformation and damage to the diaphragm, it is possible to keep the heating temperature low, but in that case, there is a risk that the getter may not be heated sufficiently. As such, there is room for improvement in conventional getter heating.

The present invention was made in consideration of the above points, and aims to appropriately heat the getter in the vacuum chamber of a diaphragm-type pressure detection device.

In order to solve the above problem, the diaphragm-type pressure detection device according to the first aspect of the present invention is a diaphragm-type pressure detection device for detecting the pressure of a fluid, comprising: a non-translucent housing body and a translucent window provided in the housing body, a housing in which a vacuum chamber and a space into which the fluid flows are formed; a sensor element housed in the housing that has a diaphragm that deforms in response to a pressure difference between the air pressure in the vacuum chamber and the pressure of the fluid that has flowed into the space, and detects the pressure difference by detecting the deformation of the diaphragm; and a getter that is disposed in the vacuum chamber and is activated by heating, and is disposed opposite the window so that light irradiated from outside the housing through the window can reach the vacuum chamber. The getter alone, or a combination of the getter and another member provided in the diaphragm-type pressure detection device, is configured to cover the entire window to block light that has passed through the window toward the sensor element.

The combination of the getter and other members of the diaphragm-type pressure detection device may be configured to cover the entire window, and the other members may be a support member that supports the getter.

When viewed in the thickness direction of the window, the getter may be larger than the window, and the getter may cover the entire window with its edge in contact with the inner wall surface that constitutes the vacuum chamber of the housing body.

The getter may have a surface that contacts the surface of the light-transmitting portion facing the vacuum chamber.

The housing may include a housing body having a first through hole and a second through hole, a penetrating member penetrating the housing body through the first through hole, a hermetic seal that seals between the penetrating member and the inner wall of the first through hole, and the window provided in the second through hole, and the window and the hermetic seal may be made of the same material.

To solve the above problem, a method for manufacturing a vacuum device according to a second aspect of the present invention includes a first step of manufacturing the diaphragm-type pressure detection device, and a second step of irradiating the getter with heating light through the window of the diaphragm-type pressure detection device to heat and activate the getter.

The housing may include a housing body having a first through hole and a second through hole, a penetrating member penetrating the housing body through the first through hole, a hermetic seal that seals between the penetrating member and the inner wall of the first through hole, and a window provided in the second through hole, and the first step may include a step of forming the hermetic seal and the light-transmitting portion at the same time using the same material when forming the housing.

According to the present invention, light for heating the getter in the vacuum chamber can be irradiated to the getter through a window, and this light can be prevented from reaching the sensor element, so the getter in the vacuum chamber can be heated without heating the sensor element. Therefore, according to the present invention, the getter in the vacuum chamber of the diaphragm-type pressure detection device can be appropriately heated.

FIG. 1 is a cross-sectional view showing the structure of a diaphragm type pressure detection device according to an embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view of a sensor element of the diaphragm type pressure detection device. FIG. 3 is a flowchart of a method for manufacturing the pressure detection device. FIG. 4 is a diagram showing the relationship between the window and the getter according to the modified example.

The diaphragm-type pressure detection device 10 according to an embodiment of the present invention will be described below with reference to the drawings. In FIG. 1 and other figures, an up-down direction is set, but this is a direction set to facilitate understanding of the embodiment, and may differ from the actual up-down direction depending on the installation state of the diaphragm-type pressure detection device 10. Below, the diaphragm-type pressure detection device 10 may also be simply referred to as the pressure detection device 10.

As shown in FIG. 1, a pressure detection device 10 according to an embodiment of the present invention includes a housing 20, a baffle 30, a sensor element support portion 40, a sensor element 50, a getter 60, and a getter support member 70. This pressure detection device 10 is configured as a pressure sensor of a diaphragm vacuum gauge that measures, for example, the air pressure in a vacuum chamber of a semiconductor manufacturing device or the like, that is, the pressure of a process gas generated in the vacuum chamber.

The housing 20 includes a lower housing member 21, an intermediate housing member 22, and an upper housing member 23, and houses the above-mentioned members 30 to 70. Inside the housing 20, a communication passage R1 that communicates with the outside of the housing 20, i.e., the inside of the vacuum chamber, and a communication space R2 that communicates with the communication passage R1 and into which the process gas in the vacuum chamber flows through the communication passage R1 are formed. Inside the housing 20, a vacuum chamber R3 is also formed in which a vacuum pressure is sealed to be compared with the pressure of the process gas that has flowed into the communication space R2. The housing 20 includes a housing body 20S made of a metal such as Kovar or Inconel and is non-translucent. The housing body 20S is the majority of the housing 20, excluding the window 23W, hermetic seals 23E to 23F, and electrodes 23M to 23N, which will be described later. Here, the lower housing member 21, the intermediate housing member 22, and the main body 23A of the upper housing member 23 (described below) constitute the housing main body 20S of the housing 20. The lower housing member 21, the intermediate housing member 22, and the main body 23A of the upper housing member 23 (described below) may be formed from different materials.

The lower housing member 21 has a funnel shape that defines the communication passage R1 and the communication space R2. A cylindrical intermediate housing member 22 is joined to the lower housing member 21 by welding or the like, sandwiching the peripheral portion of a disk-shaped metal sheet 41 (described later) of the sensor element support portion 40. A disk-shaped upper housing member 23 is joined to the intermediate housing member 22 by welding or the like. The upper housing member 23 defines the vacuum chamber R3 together with the intermediate housing member 22. The structure of the upper housing member 23 will be described in detail later.

The baffle 30 is fixed to the lower housing member 21 by a fixing member (not shown) or the like, and redirects the flow of gas flowing from the vacuum chamber through the communication passage R1 into the upper communication space R2 toward the outer periphery of the housing 20. This prevents the gas in the vacuum chamber from flowing directly into the through hole 40A (described below) of the sensor element support part 40 located above the communication passage R1 and directly hitting the sensor element 50.

The sensor element support part 40 supports the sensor element 50. The sensor element support part 40 includes a disk-shaped thin metal plate 41 and a base 42 to which the sensor element 50 is fixed.

As described above, the metal sheet 41 has its peripheral portion joined to the lower housing member 21 and the intermediate housing member 22, and is supported by the housing 20. The base 42 includes a first disk 42A and a second disk 42B. The first disk 42A and the second disk 42B are welded together while sandwiching the metal sheet 41 from above and below. In this way, the base 42 is fixed to the metal sheet 41.

The sensor element support 40, together with the lower housing member 21, defines the communication space R2. A through hole 40A is formed in the center of the sensor element support 40, which passes through the base 42 and the thin metal plate 41 in the vertical direction and guides the process gas in the communication space R2 to the sensor element 50.

The sensor element 50 detects the pressure of the process gas in the communication space R2, i.e., the air pressure in the vacuum chamber. The sensor element 50 is fixed in close contact with the base 42 so as to cover the through-hole 40A. The sensor element 50, together with the sensor element support 40, the intermediate housing member 22, and the upper housing member 23, defines the vacuum chamber R3.

As shown in FIG. 2, the sensor element 50 has a spacer 51 made of a rectangular thin plate, a diaphragm 52 that is joined to the spacer 51 and deforms in response to the application of pressure, and a sensor base 53 that is joined to the diaphragm 52 to form a vacuum capacity chamber 50A. The sensor base 53 has a through hole 53A that connects the vacuum chamber R3 and the capacity chamber 50A. This allows the vacuum chamber R3 and the capacity chamber 50A to maintain the same degree of vacuum. In FIG. 1, the spacer 51 and the diaphragm 52 are depicted as a single unit. A fixed electrode 54 is formed in the recess of the sensor base 53 that constitutes the capacity chamber 50A, and a movable electrode 55 that faces the fixed electrode 54 is formed on the diaphragm 52. The diaphragm 52 deforms due to the pressure difference between the air pressure in the capacity chamber 50A, i.e., the air pressure in the vacuum chamber R3, and the process gas led to the through hole 40A, i.e., the pressure of the process gas flowing into the communication space R2. When the diaphragm 51 deforms, the distance between the fixed electrode 54 and the movable electrode 55 changes. The sensor element 50 detects the change in capacitance caused by this change in distance to detect the pressure difference. By detecting this pressure difference, the pressure of the process gas that has flowed into the ream space R2, i.e., the air pressure inside the vacuum chamber, is detected. The sensor element 50 may be, for example, a type of element that detects the deformation of the diaphragm using a piezoelectric element or the like.

The getter 60 is activated by being heated, and adsorbs residual gas remaining in the vacuum chamber R3. This adsorption improves the degree of vacuum in the vacuum chamber R3. An example of such a getter 60 is a non-evaporable getter. The getter 60 is supported by a metallic, non-transparent getter support member 70 that is attached to the underside of the upper housing member 23 of the housing 20 by welding or the like (not shown). Here, the getter 60 is cylindrical, but may be of other shapes. The shape of the getter support member 70 is also arbitrary.

Here, the upper housing member 23 will be described in detail. The upper housing member 23 includes a main body 23A, hermetic seals 23E and 23F, electrodes 23M and 23N, and a window 23W.

The main body 23A is formed in a disk shape, and a getter support member 70 that supports the getter 60 is fixed to its underside. Through holes 23B to 23D are formed in the main body 23A. Electrodes 23M and 23N pass through the through holes 23B and 23C, respectively. In other words, the electrodes 23M and 23N penetrate the main body 23A. The gap between the electrode 23M and the inner wall of the through hole 23B is sealed by a hermetic seal 23E. The electrode 23M is fixed to the main body 23A by the hermetic seal 23E. The gap between the electrode 23N and the inner wall of the through hole 23C is sealed by a hermetic seal 23F. The electrode 23N is fixed to the main body 23A by the hermetic seal 23F.

One end of the electrodes 23M and 23N is electrically connected to the sensor element 50. The electrodes 23M and 23N transmit an electrical signal indicating the pressure difference detected by the sensor element 50 from the sensor element 50 to the outside of the housing 20. The electrode 23M includes a lead pin 23MA that transmits the electrical signal, and a cylindrical metallic shield 23MB through which the lead pin 23MA passes. The electrode 23M also includes a hermetic seal 23MC that seals between the lead pin 23MA and the shield 23MB and fixes the lead pin 23MA to the shield 23MB. Similarly, the electrode 23N includes a lead pin 23NA, a shield 23NB, and a hermetic seal 23NC (not shown).

The window 23W is plate-shaped and translucent, and is disposed within the through-hole 23C, blocking the through-hole 23C. While the window 23W is translucent, the housing body 20S of the housing 20, such as the main body 23A, is non-translucent as described above. Therefore, the window 23W functions as a window that allows the getter 60 to be seen from outside the housing 20. In other words, the getter 60 is disposed at a position where light (such as light L described below) that is irradiated from the outside of the housing 20 through the window 23W into the inside of the vacuum chamber R3 reaches it. The lower surface of the window 23W, i.e., the surface on the vacuum chamber R3 side, is in contact with the upper surface of the getter 60, so that the getter 60 faces the window 23W.

The window 23W faces the sensor element 50 with a gap therebetween, and the getter 60 is disposed between the window 23W and the sensor element 50. Therefore, light passing through the window 23W normally travels toward the sensor element 50. When viewed from the thickness direction (vertical direction) of the window 23W, the getter 60 has an outer shape smaller than that of the window 23W, but in combination with the non-transparent getter support member 70, it covers the entire window 23W from the vacuum chamber R3 side. As a result, light (particularly light L described below) passing through the window toward the sensor element 50 is blocked by the combination of the getter 60 and the getter support member 70.

The window 23W and the hermetic seals 23E, 23F, 23MC, and 23NC are made of the same material. They are made of hard glass, such as Kovar glass or borosilicate glass, for example.

The getter 60 is heated and activated by light L irradiated through the window 23W from the light source LS arranged outside the housing 20. The light source LS is depicted as a block in FIG. 1. The light L from the light source LS may be light that can pass through the window 23W and heat the getter 60. If the window 23W is made of Kovar glass, Kovar glass transmits wavelengths in the range of 500 to 2000 nm well. In this case, the light L may be any of laser light having a wavelength in the range of 1030 to 1070 nm when the light source LS is a fiber laser, laser light having a wavelength in the range of 800 to 1000 nm when the light source LS is a semiconductor laser, and infrared light having a wavelength of 780 nm when the light source LS is an infrared lamp.

As described above, in the pressure detection device 10 according to the present embodiment, the housing 20 forming the vacuum chamber R3 is provided with a light-transmitting window 23W. Furthermore, the getter 60 arranged in the vacuum chamber R3 is arranged facing the window 23W so that light irradiated from the outside of the housing 20 through the window 23W can reach the getter 60. This allows the light L from the light source LS, which is the heating light, to be irradiated to the getter 60 through the window 23W to heat the getter 60. Furthermore, the combination of the getter 60 and the getter support member 70 covers the window 23W, and the light transmitted through the window 23W toward the sensor element 50 is blocked by the combination, so that even if the irradiation position of the light L from the light source LS is shifted, the light L is prevented from reaching the sensor element 50 and heating the sensor element 50. In this way, with the structure of the pressure detection device 10 of this embodiment, the getter 60 in the vacuum chamber R3 can be heated in a manner that prevents the sensor element 50 from being heated, so that the thermal effects (deformation or damage) on the diaphragm 52 can be prevented, and the getter 60 can be appropriately heated and activated.

One possible method for heating the getter is to house the getter in a getter canister that communicates with the vacuum chamber, and heat the getter canister to heat the getter while minimizing the thermal impact on the vacuum chamber. However, this method requires a greater distance between the getter and the vacuum chamber, which increases the size of the pressure detection device 10 as a whole. In this embodiment, a window 23W is provided in the housing 20, and the getter 60 in the vacuum chamber R3 is heated through the window 23W, which prevents the pressure detection device 10 from becoming larger. From this perspective, this embodiment allows the getter 60 to be heated appropriately.

Furthermore, in the above embodiment, even if the degree of vacuum in the vacuum chamber R3 decreases, the getter 60 can be reactivated by irradiating the getter 60 with light L from outside the housing 20 through the window 23W. This makes it possible to improve the degree of vacuum in the vacuum chamber R3 without disassembling the pressure detection device 10.

Furthermore, in the above embodiment, the top surface of the getter 60 is in contact with the surface of the window 23W facing the vacuum chamber R3, so that the light L transmitted through the window 23W is directly incident on the getter 60, effectively heating the getter 60.

In addition, in this embodiment, the window 23W of the upper housing member 23 and the hermetic seals 23E and 23F are formed from the same material, so the window 23W can be formed without increasing the number of types of material compared to when the window 23W is not formed.

Next, a method for manufacturing the pressure detection device 10 will be described. As shown in FIG. 3, in this manufacturing method, first, the upper housing member 23 is formed (step S11). Specifically, instead of the hermetic seals 23E to 23NC and the window 23W, the upper housing member 23 is prepared in which a compression molded body of powder such as glass that is the material for these seals is arranged. The compression molded body may be pre-sintered. Then, by heating this upper housing member 23, each compression molded body is sintered to form each hermetic seal 23E, 23F, 23MC, and 23NC and the window 23W. The hermetic seal 23E, etc. and the window 23W are fused to the main body 23A, etc. of the upper housing member 23, and the upper housing member 23 is completed. Note that step S11 and each of the following steps may include other processes such as heat treatment and plating as appropriate.

Then, the getter support member 70 supporting the getter 60 is attached to the main body 23A of the upper housing member 23 (step S12).

Then, in the pressure detection device 10, the peripheral portion of the sensor element support portion 40, more specifically the peripheral portion of the metal sheet 41, is sandwiched between the intermediate housing member 22 and the lower housing member 21 to which the baffle 30 is attached, and these are welded and joined to form a unit A (step S13). Step S13 may be performed before or after step S11 or S12, or in parallel with steps S11 and S12.

Then, the upper housing member 23 is joined by welding or the like to the unit A formed in step S13 while placing the sensor element 50 (step S14). The sensor element 50 is electrically connected to the electrodes 23M and 23N of the upper housing member 23 via contact springs (not shown). Step S14 forms the pressure detection device 10 having a chamber prior to becoming the vacuum chamber R3 (hereinafter, this chamber is also referred to as chamber R3).

After step S14, gas is exhausted from the chamber R3 defined by the intermediate housing member 22, the upper housing member 23, the sensor element support portion 40, and the sensor element 50 to form a vacuum chamber R3 (step S15). For example, an exhaust port (not shown) is provided in the intermediate housing member, and gas in the chamber R3 is exhausted from this exhaust port, and then the exhaust port is sealed by projection welding or the like. This allows the chamber R3 to become a vacuum chamber R3. Note that the vacuum chamber R3 may be formed by performing step S14 in a vacuum atmosphere. In this case, the exhaust port is not necessary.

Then, the getter 60 is heated by irradiating it with heating light L through the window 23W of the upper housing member 23 (step S16). This heating activates the getter 60, which then adsorbs the residual gas remaining in the vacuum chamber R3. This adsorption improves the degree of vacuum in the vacuum chamber R3. In step S16, it is preferable to irradiate the heating light L from the thickness direction of the window 23W. This makes it possible to reduce the angle of incidence of the light L with respect to the window 23W, thereby reducing (including eliminating) the reflectance of the light L at the window 23W, and allowing the getter 60 to be appropriately heated.

As described above, in the method for manufacturing the pressure detection device 10 according to this embodiment, after manufacturing the vacuum device 10 in a state before activating the getter 60 (see steps S11 to S15), the getter 60 is irradiated with heating light L through the window 23W of the housing 20 of the vacuum device 10, and the getter 60 is heated and activated (step S16). This allows the getter 60 to be heated in a pinpoint manner, and also avoids heating the sensor element 50. This allows the getter 60 to be appropriately heated and activated.

In addition, according to the above manufacturing method, the window 23W of the upper housing member 23 and the hermetic seals 23E and 23F are made of the same material and are formed at the same time using the same firing process, so there is no increase in the number of steps in the manufacturing method compared to when the window 23W is not formed, and the window 23W can be easily formed.

As described above, the pressure detection device 10 and the manufacturing method for the pressure detection device 10 according to this embodiment have been described, but these may be modified as appropriate.

As shown in FIG. 4, the getter 60 may be formed larger than the window 23W when viewed from the thickness direction, and may be shaped to cover the entire window 23W from the vacuum chamber R3 side. In this case, the getter 60 may cover the entire window 23W with its edge in contact with the lower surface of the main body 23A of the upper housing member 23, that is, the inner wall surface constituting the vacuum chamber R3 of the housing main body 20S. As a result, since there is no gap between the getter 60 and the housing main body 20S, all of the light passing through the window 23W is blocked. In FIG. 4, the getter 60 faces the window 23W with a gap therebetween, but the getter 60 and the window 23W may face each other in a state of contact. As another modified example, the getter 60 may have the same shape as the window 23W when viewed from the thickness direction of the window 23W. In other words, the outline of the getter 60 when viewed from the thickness direction may coincide with the outline of the window 23W.

The getter 60 may be directly fixed to the main body 23A with an adhesive or the like. For example, in the case of FIG. 4, the getter support member 70 may be omitted, and the getter 60 and the window 23W may be brought into contact with each other, and the two may be directly fixed with a light-transmitting adhesive or the like. In the case of FIG. 4, the edge of the getter 60 may be brought into contact with the main body 23A, and the two may be directly fixed with an adhesive or the like.

In the pressure detection device 10, the getter 60 alone or the combination of the getter 60 with another member may be configured to cover the entire window 23W to block light transmitted through the window 23W toward the sensor element 50, and the specific embodiment is not limited to the above. The other member is the getter support member 70 in the above, but it may be another light blocking member that does not support the getter 60 and is provided in the pressure detection device 10. In addition, there may be a gap between the getter 60 and the inner wall surface of the vacuum chamber R3, or the getter support member 70 may have a gap such as a through hole, and light transmitted through the window 23W in a direction other than the sensor element 50 may leak into the vacuum chamber R3 from the gap.

The shape and material of each member of the pressure detection device 10 can be changed as appropriate. For example, the cross section of the housing 20 may be polygonal instead of annular. The window 23W may not be circular. The window 23W may be provided in the intermediate housing member 22 or the like. In this case, the position of the getter 60 is also set to match the position of the window 23W. The window 23W may be configured, for example, in a manner that blocks a through hole provided in the non-translucent housing main body 20S of the housing 20. The number of electrodes provided in the upper housing member 23, such as the electrode 23M, may be three or more. The electrode 23M penetrating the main body 23A of the upper housing member 23 may be changed to another penetrating member. The penetrating member may be, for example, a member that passes through a through hole provided in the main body 23A, penetrates the main body 23A, and is hermetically sealed between the inner wall of the through hole and the through hole. The detection target of the pressure detection device 10 may be the pressure of a fluid.

The through holes described above, such as through holes 23B to 23D, may penetrate the member in which they are provided, such as main body 23A, and may be surrounded 360 degrees by the member or may be a notched hole.

Although the present invention has been described above with reference to the embodiments and modifications, the present invention is not limited to the above-mentioned embodiments and modifications. For example, the present invention includes various modifications to the above-mentioned embodiments and modifications that can be understood by a person skilled in the art within the scope of the technical concept of the present invention. The configurations listed in the above-mentioned embodiments and modifications can be combined as appropriate within a range that does not cause inconsistencies.

10...pressure detection device, 20...housing, 21...lower housing member, 22...middle housing member, 23...upper housing member, 23A...main body, 23B-23D...through hole, 23E, 23F...hermetic seal, 23M, 23N...electrodes, 23W...window, 30...baffle, 40...sensor element support, 40A...through hole, 50...sensor element, 52...diaphragm, 60...getter, 70...getter support member, LS...light source, L...light, R1...communication path, R2...communication space, R3...vacuum chamber.

Claims (7)

A diaphragm-type pressure detection device for detecting a pressure of a fluid, comprising:
a housing having a non-light-transmitting housing body and a light-transmitting window provided in the housing body, the housing having a vacuum chamber and a space into which the fluid flows formed therein;
a sensor element accommodated in the housing, the sensor element including a diaphragm that deforms in response to a pressure difference between the air pressure in the vacuum chamber and the pressure of the fluid that has flowed into the space, the sensor element detecting the pressure difference by detecting the deformation of the diaphragm;
a getter that is disposed within the vacuum chamber and is activated by being heated by heating light , the getter being disposed opposite the window so that the heating light that is irradiated from the outside of the housing through the window can reach the inside of the vacuum chamber,
The getter alone or a combination of the getter and another member included in the diaphragm-type pressure detection device is configured to cover the entire window, thereby blocking the heating light that passes through the window from the outside of the housing toward the sensor element .
Diaphragm type pressure detection device. A combination of the getter and other members of the diaphragm-type pressure detection device is configured to cover the entire window,
The other member is a support member that supports the getter.
2. The diaphragm type pressure sensing device according to claim 1. When viewed in a thickness direction of the window, the getter is larger than the window,
the getter covers the entire window with its edge in contact with an inner wall surface of the housing body that constitutes the vacuum chamber;
2. The diaphragm type pressure sensing device according to claim 1. the getter has a surface in contact with the vacuum chamber side surface of the window;
4. A diaphragm type pressure measuring device according to claim 1. the housing includes a housing main body in which a first through hole and a second through hole are formed, a penetrating member penetrating the housing main body through the first through hole, a hermetic seal that seals between the penetrating member and an inner wall of the first through hole, and the window provided in the second through hole;
the window and the hermetic seal are formed of the same material;
5. The diaphragm type pressure detection device according to claim 1. A first step of manufacturing a diaphragm-type pressure detection device according to any one of claims 1 to 5;
a second step of irradiating the getter with the heating light through the window of the diaphragm-type pressure detection device to heat and activate the getter;
A method for manufacturing a diaphragm type pressure detection device having the above structure. the housing includes a housing main body in which a first through hole and a second through hole are formed, a penetrating member penetrating the housing main body through the first through hole, a hermetic seal that seals between the penetrating member and an inner wall of the first through hole, and a window provided in the second through hole;
the first step includes forming the hermetic seal and the window at the same time from the same material when forming the housing;
A method for manufacturing the diaphragm type pressure detection device according to claim 6.

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