JP7638772B2 - Drive unit, shock absorbing unit - Google Patents

Description

The present invention relates to a technology for driving an object in a vacuum environment.

There is a known driving device that moves the table or stage on which the workpiece is placed to a desired position when processing the workpiece. Patent Document 1 discloses a device that uses a linear motor to drive the stage in the X-axis and Y-axis directions that are perpendicular to each other.

Japanese Patent Application Publication No. 5-57558

When a stage drive device such as the one described above is applied to equipment that performs fine processing or treatment in a vacuum environment, such as semiconductor manufacturing equipment, not only is precise positioning of the stage required, but it is also necessary that the stage moving within the vacuum chamber does not adversely affect the vacuum environment. For example, if the moving stage malfunctions and collides with another part, causing the fine particles to fly off and contaminate the vacuum environment, it will be necessary to immediately stop the equipment, discard all semiconductor wafers being processed, and reset the vacuum environment of the vacuum chamber, which is time-consuming and laborious, resulting in significant economic losses.

The present invention was made in consideration of these circumstances, and its purpose is to provide a drive device that can reduce the adverse effects on the vacuum environment when the driven object collides.

To solve the above problems, a driving device according to one embodiment of the present invention includes a driving object that is driven in a vacuum environment, a shock absorbing member that absorbs shock caused by a collision with the driving object, and a housing member that houses the shock absorbing member in a manner that isolates it from the vacuum environment.

According to this aspect, the shock absorbing member that absorbs the shock when the driven object collides is isolated from the vacuum environment by the housing member, so that contamination of the vacuum environment due to fine particles, etc., that are scattered from the shock absorbing member when absorbing the shock can be prevented.

Another aspect of the present invention is a shock absorbing device. This device includes a shock absorbing member that absorbs shock caused by a collision with a driven object that is driven in a vacuum environment, and a housing member that houses the shock absorbing member in a manner that isolates it from the vacuum environment.

In addition, any combination of the above components, and any conversion of the present invention between a method, device, system, recording medium, computer program, etc., are also valid aspects of the present invention.

The driving device of the present invention can reduce the adverse effects on the vacuum environment when a driven object collides.

FIG. 2 is a perspective view showing a first configuration example of a stage device. FIG. 2 is a schematic cross-sectional view of an air actuator. FIG. 2 is a cross-sectional view of a servo valve. FIG. 13 is a perspective view showing a second configuration example of the stage device. FIG. 13 is a perspective view of a Y-axis guide and a Y-axis slider of a stage device in a second configuration example. 4 is a cross-sectional view of the stage device taken along a plane perpendicular to the Y-axis direction. FIG. 7 is a cross-sectional view taken along line AA in FIG. 6. FIG. 11 is a cross-sectional view showing a third configuration example of the stage device. 1 is a diagram showing a schematic configuration of an impact absorbing device. 1A and 1B are diagrams showing a first study example of an impact absorbing member. 11A and 11B are diagrams illustrating a second study example of the impact absorbing member. 13A and 13B are diagrams illustrating a third study example of the impact absorbing member.

Below, the embodiments for carrying out the present invention will be described in detail with reference to the drawings. In the description and drawings, the same or equivalent components, members, and processes are given the same reference numerals, and duplicated descriptions are omitted as appropriate. The scale and shape of each part shown in the drawings are set for convenience in order to facilitate the explanation, and should not be interpreted as being limiting unless otherwise specified. The embodiments are illustrative and do not limit the scope of the present invention in any way. All features and combinations thereof described in the embodiments are not necessarily essential to the invention.

Figure 1 is a perspective view showing a first configuration example of a stage device 100 according to an embodiment of the driving device of the present invention. The stage device 100 mainly includes a base plate 102, a vibration isolation table 104, a vibration isolation device 106, a table 20 on which a processing object such as a semiconductor wafer is placed, one X-axis air actuator 120 extending along the X-axis, and two Y-axis air actuators 130A and 130B extending along the Y-axis (hereinafter collectively referred to as Y-axis air actuator 130). The base plate 102 is supported by the vibration isolation table 104. The X-axis air actuator 120 and the Y-axis air actuators 130A and 130B form an H-shape when viewed from above. The vibration isolation device 106 absorbs the force caused by the movement of the X-axis air actuator 120 and the Y-axis air actuators 130A and 130B and vibrations from the floor, thereby suppressing vibrations of the base plate 102.

The X-axis air actuator 120 and the Y-axis air actuator 130 are fluid actuators that use air, which is a gas, as the working fluid to drive the table 20, which is the driving target, along the X-axis and Y-axis, respectively. The X-axis air actuator 120 has a guide (square shaft) 122, a slider 124, and a servo valve 126 (not shown). Similarly, the Y-axis air actuators 130A and 130B have a guide 132, a slider 134, and a servo valve 136, respectively. Both ends of the X-axis guide 122 are supported by the sliders 134 of the Y-axis air actuators 130A and 130B, respectively. The slider 124 moves in the X-axis direction along the guide 122. The X-axis air actuator 120 moves in the Y-axis direction along the guide 132 in conjunction with the movement of the slider 134. In this way, the stage device 100 moves the table 20 together with the slider 124 in the XY plane. The table 20, the X-axis air actuator 120, and the Y-axis air actuators 130A and 130B are placed in a vacuum environment surrounded by a vacuum chamber 108 whose interior is a vacuum.

Here, vacuum refers to a state of space filled with gas at a pressure lower than normal atmospheric pressure. Vacuums are classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), high vacuum (0.1 Pa to 10 ⁻⁵ Pa), ultra-high vacuum (10 ⁻⁵ Pa or less), etc., depending on the pressure range. The stage device 100 of this embodiment may be used in any of the above vacuum environments. However, since the impact absorbing device described below can effectively prevent contamination of the vacuum environment, this embodiment is particularly suitable for the stage device 100 that operates in a vacuum environment of a low pressure range where a higher degree of cleanliness is required for the vacuum chamber 108.

The X-axis air actuator 120 constitutes a first drive unit including an X-axis guide 122 as a first guide extending in the X-axis direction as a first direction, and an X-axis slider 124 as a first slider that can move along the X-axis guide 122 by air pressure. Similarly, the Y-axis air actuator 130 constitutes a second drive unit including a Y-axis guide 132 as a second guide extending in the Y-axis direction as a second direction intersecting with the X-axis direction, and a Y-axis slider 134 as a second slider that can move along the Y-axis guide 132 by air pressure. In the above configuration, the table 20 as a driven object is installed on the X-axis slider 124 as the first slider of the first drive unit, and the X-axis air actuator 120 as the first drive unit is installed on the Y-axis slider 134 as the second slider of the second drive unit. In the illustrated example, the X-axis direction as the first direction and the Y-axis direction as the second direction are perpendicular to each other, but the intersection angle between the two axes can be designed arbitrarily. In addition, the servo valves 126 and 136 constitute a drive pressure generating unit that supplies air at a pressure commanded by the controller 200 (Figure 2) to the sliders 124 and 134.

Position sensor 140 measures the position of table 20 in the X-axis direction. Position sensor 142 measures the position of table 20 in the Y-axis direction. By differentiating the measured positions in the X-axis and Y-axis directions with respect to time, the velocities in the X-axis and Y-axis directions can be obtained. By differentiating the velocities in the X-axis and Y-axis directions with respect to time, the accelerations in the X-axis and Y-axis directions can be obtained.

Figure 2 is a schematic cross-sectional view of the air actuator. Specifically, it shows a schematic longitudinal cross-section of the X-axis guide 122 at the center in the Y-axis direction.

A hydrostatic bearing is formed between the guide 122 and the slider 124, and the slider 124 floats from the guide 122 and can move in the X-axis direction without contact due to the air pressure constantly supplied between the outer circumferential surface of the guide 122 and the inner circumferential surface of the slider 124. Specifically, an air pad 170 provided on the inner circumferential surface of the slider 124 (or the outer circumferential surface of the guide 122) ejects compressed gas supplied from an air supply system (not shown) into the gap between the outer circumferential surface of the guide 122 and the inner circumferential surface of the slider 124. As shown in the figure, the air pads 170 are provided at positions sandwiching the servo chamber 150 provided at the center of the slider 124 in the X-axis direction from both sides, and suppress the rotation of the slider 124 around the Y-axis direction. Although not shown in the figure, the table 20 is fixed to the surface on the +Z side of the slider 124 and moves along the X-axis together with the slider 124.

Exhaust grooves 172, 174, and 176 for differential exhaust are formed to surround the air pad 170 provided to surround the servo chamber 150 of the slider 124 from both sides (left and right sides in FIG. 2). The exhaust groove 172 is open to the atmosphere. The exhaust groove 172 may be connected to an exhaust pump (not shown). The exhaust grooves 174 and 176 are connected to exhaust pumps (not shown) for setting the pressure in the exhaust groove to a low vacuum pressure level and a medium vacuum pressure level, respectively, and exhaust the compressed gas supplied from the air pad 170 and the servo chamber 150 to the outside. By preventing the compressed gas from leaking out from the gap between the guide 122 and the slider 124, the stage device 100 can be used even in a vacuum environment.

The slider 124 has an internal space, the servo chamber 150. The servo chamber 150 is divided into a positive servo chamber 152 and a negative servo chamber 154 by a pressure plate 123 fixed to the guide 122.

The X-axis air actuator 120 is equipped with a positive servo valve 126P and a negative servo valve 126N arranged on the positive and negative sides of the X-axis, respectively. The slider 124 is driven by the positive servo valve 126P and the negative servo valve 126N. The positive servo valve 126P and the negative servo valve 126N control the supply and exhaust volume of the positive servo chamber 152 and the negative servo chamber 154 depending on the position of the spool, which will be described later. The positive servo valve 126P communicates with the positive servo chamber 152 via the positive piping 128P. The negative servo valve 126N communicates with the negative servo chamber 154 via the negative piping 128N.

The X-axis air actuator 120 controls the positive servo valve 126P and the negative servo valve 126N to generate a pressure difference between the positive servo chamber 152 and the negative servo chamber 154. This pressure difference controls the speed and acceleration of the slider 124 relative to the guide 122.

The positive side servo valve 126P and the negative side servo valve 126N are connected to a pump 146 as an air supply source via a positive side air supply pipe 144P and a negative side air supply pipe 144N, respectively. In addition, the positive side servo valve 126P and the negative side servo valve 126N exhaust air outside the vacuum chamber 108 via a positive side air exhaust pipe 148P and a negative side air exhaust pipe 148N, respectively.

Air from the pump 146 is supplied to the positive servo chamber 152 via the positive air supply pipe 144P, the positive servo valve 126P, and the positive piping 128P. That is, the positive air supply pipe 144P, the positive servo valve 126P, and the positive piping 128P form a positive air supply flow path. Similarly, air from the pump 146 is supplied to the negative servo chamber 154 via the negative air supply pipe 144N, the negative servo valve 126N, and the negative piping 128N. That is, the negative air supply pipe 144N, the negative servo valve 126N, and the negative piping 128N form a negative air supply flow path.

Air in the positive servo chamber 152 is discharged to the outside via the positive piping 128P, the positive servo valve 126P, and the positive air exhaust pipe 148P. That is, the positive piping 128P, the positive servo valve 126P, and the positive air exhaust pipe 148P form a positive air exhaust flow path. Similarly, air in the negative servo chamber 154 is discharged to the outside via the negative piping 128N, the negative servo valve 126N, and the negative air exhaust pipe 148N. That is, the negative piping 128N, the negative servo valve 126N, and the negative air exhaust pipe 148N form a negative air exhaust flow path.

The stage device 100 includes a controller 200 that controls the positive servo valve 126P and the negative servo valve 126N. The above description has been given using the X-axis air actuator 120 as an example, but the Y-axis air actuator 130 can be configured in a similar manner. The controller 200 controls the positive servo valves and negative servo valves of all the air actuators 120, 130A, and 130B.

Figure 3 is a cross-sectional view of the servo valve. Here, since the positive side servo valve 126P and the negative side servo valve 126N have the same configuration, they will be collectively referred to as servo valve 126. Furthermore, the terms "positive side" and "negative side" and the symbols "N" and "P" will be omitted when describing the configuration of each part of the servo valve 126.

The servo valve 126 includes a body 160, a spool 162 disposed within the body 160, a motor 164, and a position sensor 166. The servo valve 126 is a three-way valve that includes three ports 168A, 168B, and 168C. The servo valve 126 switches the connection destination of the port 168C between the port 168A and the port 168B depending on the position of the spool 162. The spool 162 is disposed in a flow path extending along the Z axis inside the body 160, and is movable along the Z axis. The position of the spool 162 changes depending on the drive amount of the motor 164. The position sensor 166 measures the position of the spool 162.

Two ports 168A, 168B aligned along the Z axis are provided on one side of the main body 160. Port 168A on the +Z side is connected to the air exhaust pipe 148, and port 168B on the -Z side is connected to the air supply pipe 144. Port 168A may be connected to the air supply pipe 144, and port 168B may be connected to the air exhaust pipe 148. Port 168C provided on the other side of the main body 160 is connected to the piping 128.

The measurement results of the position sensor 166 are supplied to the amplifier unit AU of the controller 200. The controller 200 detects the position of the spool 162 based on the measurement results acquired by the amplifier unit AU, and controls the motor 164 based on the position. The controller 200 drives the motor 164 to control the position of the spool 162, so that air supplied from the pump 146 is supplied to the servo chamber 150 through the servo valve 126, or air in the servo chamber 150 is exhausted to the outside through the servo valve 126. In FIG. 3, the servo valve 126 is arranged so that the spool 162 moves along the Z axis, but the arrangement direction of the servo valve 126 is not limited to this.

Figure 4 is a perspective view showing a second configuration example of the stage device 100. Figure 5 is a perspective view of the Y-axis guide 16 and the Y-axis slider 18 of the stage device 100 of Figure 4. For ease of explanation, as shown in the figure, an XYZ Cartesian coordinate system is defined in which the direction in which the X-axis guide 12 (described later) extends is the X-axis direction, the direction in which the Y-axis guide 16 (described later) extends that is perpendicular to the X-axis direction is the Y-axis direction, and the direction perpendicular to both is the Z-axis direction. The stage device 100 is called a stack-type XY stage, and positions the driven object in the X-axis direction (first direction) and the Y-axis direction (second direction perpendicular to the first direction).

The stage device 100 is a stack type stage device. The stage device 100 comprises an X-axis guide 12 (first guide), an X-axis slider 14 (first slider), a Y-axis guide 16 (second guide), a Y-axis slider 18 (second slider), and a table 20 as a driven object. The X-axis guide 12 and the X-axis slider 14 are the upper axis guide and the upper axis slider, respectively, and the Y-axis guide 16 and the Y-axis slider 18 are the lower axis guide and the lower axis slider, respectively. In other words, the Y-axis guide 16 and the Y-axis slider 18 are disposed below the X-axis guide 12 and the X-axis slider 14.

The X-axis guide 12 is an elongated member that is long in the X-axis direction. The X-axis guide 12 has a concave cross section perpendicular to the X-axis direction, although this is not limited thereto. The X-axis slider 14 has a rectangular parallelepiped shape, although this is not limited thereto, and is housed inside the X-axis guide 12. The X-axis slider 14 moves in the X-axis direction while being guided by the X-axis guide 12. For example, the X-axis slider 14 forms an air slide together with the X-axis guide 12, and is floated relative to the X-axis guide 12 by compressed gas supplied between them, and moves along the X-axis guide 12 without contacting the X-axis guide 12.

The Y-axis slider 18 supports the X-axis guide 12 from below. The Y-axis slider 18 moves in the Y-axis direction while being guided by the Y-axis guide 16. Therefore, the X-axis guide 12 supported by the Y-axis slider 18, and therefore the X-axis slider 14, move in the Y-axis direction as the Y-axis slider 18 moves in the Y-axis direction.

The table 20 is fixed to the X-axis slider 14. An object to be processed or processed, such as a semiconductor wafer, is placed on the table 20. By moving the X-axis slider 14 in the X-axis direction and moving the Y-axis slider 18 in the Y-axis direction, the table 20 as the driven object can be moved in the X-axis and Y-axis directions and positioned in the X-axis and Y-axis directions.

Figure 6 is a cross-sectional view of the stage device 100 cut along a plane perpendicular to the Y-axis direction. Figure 6 shows a cross section cut along a plane passing through the connecting portion 35 of the Y-axis slider 18. The table 20 is not shown in Figure 6.

The Y-axis guide 16 is a box-shaped member with an opening in the center of the top surface in the X-axis direction. The Y-axis guide 16 includes a bottom wall 22, a first side wall 24, a second side wall 26, a first top wall 28, and a second top wall 30.

The bottom wall 22 is a plate member having a rectangular shape in a plan view. The first side wall 24 and the second side wall 26 are vertical walls that are long in the Y-axis direction. The first side wall 24 stands on one end (the left end in FIG. 6) of the bottom wall 22 in the X-axis direction, and the second side wall 26 stands on the other end (the right end in FIG. 6). The first side wall 24 and the second side wall 26 face each other in the X-axis direction.

The first upper wall 28 and the second upper wall 30 are rectangular plate members that are long in the Y-axis direction in a plan view. The first upper wall 28 and the second upper wall 30 are fixed to the upper ends of the first side wall 24 and the second side wall 26 so as to extend from the upper ends of the first side wall 24 and the second side wall 26 toward each other.

The Y-axis slider 18 is housed inside the Y-axis guide 16. The Y-axis slider 18 includes a first slider portion 32 and a second slider portion 34 spaced apart from each other in the X-axis direction, and two connecting portions 35 connecting the first slider portion 32 and the second slider portion 34. The number of connecting portions 35 is not particularly limited.

In the following, the two slider sections 32, 34 will be described with the side closer to the center of the Y-axis slider 18 in the X-axis direction (i.e., the side closer to the connecting section 35) as the inside of the two slider sections 32, 34, and the side farther away (i.e., the side opposite the connecting section 35) as the outside of the two slider sections 32, 34.

The first slider portion 32 includes a rectangular parallelepiped first main body portion 66 and a first support leg portion 68 fixed to the upper surface of the first main body portion 66. The outer portion of the first main body portion 66 in the X-axis direction (the left side portion in FIG. 6 ) is stored in a space surrounded by the bottom wall 22, the first side wall 24, and the first top wall 28.

The bottom surface 66a, outer side surface 66b, and top surface 66c of the first main body portion 66, which face the bottom wall 22, the first side wall 24, and the first top wall 28, are provided with a lower surface air pad 36, a side surface air pad 38, and an upper surface air pad 40. The air pads (restraint members) 36-40 eject compressed gas supplied from an air supply system (not shown) into the gap between the first main body portion 66 and the Y-axis guide 16. This forms a high-pressure gas layer in the gap, causing the air pads 36-40 and the first main body portion 66 to float from the Y-axis guide 16. The air pads 36-40 may be provided on the opposing surface of the Y-axis guide 16 facing the first main body portion 66, instead of the outer peripheral surface of the first main body portion 66. In any case, the first main body portion 66 is restrained from moving up and down and outward in the X-axis direction relative to the Y-axis guide 16 by the compressed gas ejected from the air pads 36-40.

A first air servo chamber 42 for driving the first slider portion 32 is formed on the outer side surface 66b of the first main body portion 66, as described below.

The second slider portion 34 includes a rectangular parallelepiped second main body portion 70 and a second support leg portion 72 fixed to the upper surface of the second main body portion 70. The outer portion of the second main body portion 70 in the X-axis direction (the right side portion in FIG. 6 ) is stored in a space surrounded by the bottom wall 22, the second side wall 26, and the second upper wall 30.

The bottom surface 70a, outer side surface 70b, and top surface 70c of the second main body 70 facing the bottom wall 22, second side wall 26, and second top wall 30 are provided with a lower air pad 46, a side air pad 48, and an upper air pad 50. The air pads (restraint members) 46-50 eject compressed gas supplied from an air supply system (not shown) into the gap between the second main body 70 and the Y-axis guide 16. This forms a high-pressure gas layer in the gap, causing the air pads 46-50 and the second main body 70 to float from the Y-axis guide 16. The air pads 46-50 may be provided on the opposing surface of the Y-axis guide 16 facing the second main body 70, instead of the outer peripheral surface of the second main body 70. In any case, the second main body 70 is restrained from moving up and down and outward in the X-axis direction relative to the Y-axis guide 16 by the compressed gas ejected from the air pads 46-50.

A second air servo chamber 52 for driving the second slider portion 34 is formed on the outer side surface 70b of the second main body portion 70 as described below.

Exhaust grooves 54, 56, and 58 for differential exhaust are formed on the outer peripheral surface of the first main body portion 66 of the first slider portion 32 so as to surround the air pads 36-40 and the first air servo chamber 42. The exhaust groove 54 is open to the atmosphere. The exhaust groove 54 may be connected to an exhaust pump (not shown). The exhaust grooves 56 and 58 are each connected to an exhaust pump (not shown) for setting the pressure in the exhaust groove to a low vacuum pressure level and a medium vacuum pressure level, and exhaust the compressed gas supplied from the air pads 36-40 of the first main body portion 66 and the first air servo chamber 42 to the outside.

Exhaust grooves 60, 62, and 64 for differential exhaust are formed on the outer peripheral surface of the second main body portion 70 of the second slider portion 34 so as to surround the air pads 46-50 and the second air servo chamber 52. The exhaust grooves 60, 62, and 64 are configured in the same manner as the exhaust grooves 54, 56, and 58 of the first main body portion 66. By preventing compressed gas from leaking out from the gap between the Y-axis guide 16 and the Y-axis slider 18, the stage device 100 can be used even in a vacuum environment.

The first support leg 68 is placed on and fixed to a portion 66d of the upper surface 66c of the first main body 66, which protrudes inward in the X-axis direction (right side in FIG. 6) from the first upper wall 28. The second support leg 72 is placed on and fixed to a portion 70d of the upper surface 70c of the second main body 70, which protrudes inward in the X-axis direction (left side in FIG. 6) from the second upper wall 30. The first support leg 68 and the second support leg 72 support the X-axis guide 12.

The movable range R of the center of gravity G of the X-axis slider 14, which moves as the X-axis slider 14 moves, falls between the center in the X-axis direction of the first support leg 68 that supports the X-axis guide 12 and the center in the X-axis direction of the second support leg 72. In other words, the X-axis guide 12 is supported at two support positions, the center in the X-axis direction of the first support leg 68 and the center in the X-axis direction of the second support leg 72, and the movable range R of the center of gravity G of the X-axis slider 14 falls between these two support positions.

The lower air pad 36, the upper air pad 40, and the first support leg 68 are arranged so that the center of the lower air pad 36 is located between the center of the upper air pad 40 and the center of the first support leg 68 in the X-axis direction (in other words, the support position that supports the X-axis guide 12, or in other words, the position where the load of the X-axis guide 12 is applied). More specifically, the lower air pad 36, the upper air pad 40, and the first support leg 68 are arranged so that, from the inside to the outside in the X-axis direction, the center of the first support leg 68 in the X-axis direction, the center of the lower air pad 36 in the X-axis direction, and the center of the upper air pad 40 in the X-axis direction are aligned in that order.

The lower air pad 46, the upper air pad 50, and the second support leg 72 are arranged so that the center of the lower air pad 46 is located between the center of the upper air pad 50 and the center of the second support leg 72 in the X-axis direction (in other words, the support position that supports the X-axis guide 12, or further in other words the position where the load of the X-axis guide 12 is applied). More specifically, the lower air pad 46, the upper air pad 50, and the second support leg 72 are arranged so that, from the inside to the outside in the X-axis direction, the center of the second support leg 72 in the X-axis direction, the center of the lower air pad 46 in the X-axis direction, and the center of the upper air pad 50 in the X-axis direction are aligned in that order.

The connecting portion 35 is not particularly limited, but in the illustrated example, it is a rod member extending in the X-axis direction and has a rectangular cross section perpendicular to the X-axis direction. The sum of the cross-sectional areas perpendicular to the X-axis direction of the two connecting portions 35 is smaller than the cross-sectional areas perpendicular to the X-axis direction of the first main body portion 66 and the second main body portion 70. This allows the Y-axis slider 18 to be lighter than when the Y-axis slider 18 is formed as one large slider portion, i.e., when the Y-axis slider 18 is formed as one large rectangular parallelepiped member.

The connecting portion 35 connects the first slider portion 32 and the second slider portion 34 so that the distance between them in the X-axis direction does not change. In the illustrated example, the connecting portion 35 has end faces 35a, 35b in the X-axis direction directly connected to the inner end faces 66e, 70e of the main body portions 66, 70. Note that the connecting portion 35 may be connected to the inner end faces 66e, 70e of the main body portions 66, 70 via, for example, elastic hinges so that the main body portions 66, 70 can be slightly displaced in the Z-axis direction relative to the connecting portion 35.

Figure 7 is a cross-sectional view taken along line A-A in Figure 6. The principle by which the Y-axis slider 18 moves relative to the Y-axis guide 16 will be described with reference to Figure 7. The stage device 100 further includes a first partition 74 and a second partition 76. Figure 7 exaggerates the gaps between the Y-axis guide 16 and the slider sections 32, 34 and between the partitions 74, 76 and the air servo chambers 42, 52. In reality, these gaps are on the order of a few microns, for example.

The first partition 74 is fixed to the Y-axis guide 16 and divides the first air servo chamber 42 into two air servo chambers 42a and 42b in the Y-axis direction. The two air servo chambers 42a and 42b are connected to air supply systems 80a and 80b, respectively, to allow compressed gas to flow in and out. The air supply systems 80a and 80b include servo valves 82a and 82b and compressed gas supply sources 84a and 84b, respectively.

The second partition 76 is fixed to the Y-axis guide 16 and divides the second air servo chamber 52 into two air servo chambers 52a and 52b in the Y-axis direction. The two air servo chambers 52a and 52b are connected to air supply systems 86a and 86b, respectively, to allow compressed gas to flow in and out. The air supply systems 86a and 86b include servo valves 88a and 88b and compressed gas supply sources 90a and 90b, respectively.

When compressed gas is supplied to the air pads 36-40, 46-50, the Y-axis slider 18 floats slightly relative to the Y-axis guide 16 as described above. In this state, for example, when compressed gas is supplied to the air servo chambers 42a, 52a and compressed gas is discharged from the air servo chambers 42b, 52b, the partitions 74, 76 act as pistons, and the slider sections 32, 34 and therefore the Y-axis slider 18 move downward in the figure. In this way, by controlling the supply and discharge of compressed gas, the Y-axis slider 18 can be moved to any position relative to the Y-axis guide 16.

Figure 8 is a cross-sectional view showing a third configuration example of the stage device 100. Figure 8 corresponds to Figure 6. In this configuration example, the Y-axis slider 18 does not have an air servo chamber. Instead, the stage device 100 has a linear motor 92. In other words, the Y-axis slider 18 is driven by the linear motor 92 rather than an air servo. The linear motor 92 includes a magnet 94 fixed to the Y-axis slider 18 and a plurality of electromagnets 96 fixed to the Y-axis guide 16 so as to be aligned in the Y-axis direction. In this example, the magnet 94 is fixed to the connecting portion 35, but this is not limited thereto, and the magnet 94 may be fixed to at least one of the first slider portion 32 and the second slider portion 34, for example.

Next, we will explain the shock absorbing device 300 used in the stage device 100 shown above in the three configuration examples. The shock absorbing device 300 absorbs shock during a collision caused by malfunction of the table 20, which is the driven object of the stage device 100, and the structure that is driven in the X-axis or Y-axis direction integrally with it. In the stage device 100 of this embodiment, which drives the driven object by levitating it with compressed gas in a low-pressure vacuum environment, once the driven object reaches a high speed it cannot be easily stopped, so a shock absorbing device 300 is provided to absorb shock from an unexpected collision that may occur in such a case.

In the first configuration example of FIG. 1, the table 20 and the X-axis slider 124 move together in the X-axis direction, and there is a risk of them colliding with the Y-axis slider 134 at both ends of the X-axis guide 122 that constitutes the movement path. Therefore, a shock absorbing device 300 is provided on the surface 301 of the Y-axis slider 134 with which the table 20 or the X-axis slider 124 may collide, thereby absorbing the shock caused by the accidental collision. Also, in the first configuration example of FIG. 1, the table 20, the X-axis slider 124, the X-axis guide 122, and the Y-axis slider 134 move together in the Y-axis direction, and there is a risk of the Y-axis slider 134 colliding with both ends of the Y-axis guide 132 that constitutes the movement path. Therefore, a shock absorbing device 300 is provided on the surface 302 at both ends of the Y-axis guide 132 with which the Y-axis slider 134 may collide, thereby absorbing the shock caused by the accidental collision. The shock absorbing device 300 may be provided on the end faces of the table 20, X-axis slider 124, and Y-axis slider 134 on the side of impact, instead of on the surfaces 301 and 302 on the side of impact.

In the second and third configuration examples of Figures 4 to 8, as shown in Figures 4, 6, and 8, the table 20 and the X-axis slider 14 move together in the X-axis direction, and there is a risk that the X-axis slider 14 will collide with the inner walls 13 at both ends of the X-axis guide 12 that constitute the movement path. Therefore, by providing a shock absorbing device 300 on the inner wall 13 of the X-axis guide 12 with which the X-axis slider 14 may collide, the shock caused by the accidental collision is absorbed. Also, in the second and third configuration examples, as shown in Figures 4, 5, and 7, the table 20, the X-axis slider 14, the X-axis guide 12, and the Y-axis slider 18 move together in the Y-axis direction, and there is a risk that the Y-axis slider 18 will collide with the inner walls 17 at both ends of the Y-axis guide 16 that constitute the movement path. Therefore, by providing a shock absorbing device 300 on the inner wall 17 of the Y-axis guide 16 with which the Y-axis slider 18 may collide, the shock caused by the accidental collision is absorbed. The shock absorbing device 300 may be provided on the end faces of the X-axis slider 14 and Y-axis slider 18 on the side of impact, instead of the inner walls 13 and 17 on the side of impact.

9 is a schematic diagram showing the configuration of the shock absorbing device 300. The shock absorbing device 300 includes a shock absorbing member 310 that absorbs shock caused by a collision with a driven object, and a housing member 320 that houses the shock absorbing member 310 in a manner that isolates it from the external vacuum environment. The shock absorbing member 310 can be made of various types of shock absorbing materials or shock absorbing devices that absorb shock, and specific examples of these will be described later. The housing member 320 is an airtight member that blocks the flow of gas between the inside where the shock absorbing member 310 is housed and the outside, which is a vacuum environment. The housing member 320 includes a main body 321 that houses the shock absorbing member 310, a shock absorbing member 322 that is provided on the surface that the driven object collides with and applies shock to, a bellows 323 with a bellows structure that is provided between the main body 321 and the shock absorbing member 322, and an extraction section 324 that can extract the shock absorbing member 310 to the outside. The buffer member 322 is provided on the end face of the storage member 320 on the side where the impact is applied (the left side in FIG. 9), and the removal section 324 is provided on the end face of the storage member 320 opposite the side where the impact is applied (the right side in FIG. 9), with the bellows 323 and the main body 321 arranged side by side between both end faces in the direction in which the impact is applied (the left-right direction in FIG. 9).

The shock applied when the driven object collides with the housing member 320 is primarily mitigated by the buffer member 322 and the bellows 323. That is, small shocks can be absorbed by the elastic deformation of the buffer member 322, which is made of an elastic material such as rubber, and the contraction of the bellows 323. Large shocks that cannot be absorbed by the buffer member 322 and the bellows 323 are absorbed by the shock absorbing member 310 housed inside the main body 321. When a large shock is applied to the shock absorbing member 310, deformation or damage occurs, and at that time, contaminating elements such as fine particles may be scattered from the shock absorbing member 310 or the inner wall of the main body 321 of the housing member 320 that comes into contact with it. However, the housing member 320, which is an airtight member, keeps these contaminating elements inside, so it is possible to prevent the vacuum chamber 108 from contaminating the external vacuum environment.

Next, we will explain examples of the shock absorbing member 310 studied by the inventor. Figure 10 shows a first example of the shock absorbing member 310 using an elastically deforming member 311 such as rubber, Figure 11 shows a second example of the shock absorbing member 310 using a plastically deforming member 312 such as metal, and Figure 12 shows a third example of the shock absorbing member 310 using a fluid damper 313 that utilizes fluid resistance such as an oil damper.

In FIG. 10(A), which shows a schematic configuration of a shock absorbing device 300 according to a first examined example, a rubber elastically deforming member 311 serving as a shock absorbing member 310 is housed inside a main body 321 of a housing member 320. Large shocks that cannot be fully absorbed by the buffer member 322 or bellows 323 are absorbed by the elastically deforming member 311 elastically deforming (elastically contracting) inside the housing member 320 in the direction in which the shock is applied (the left-right direction in FIG. 10(A)).

Figure 10 (B) shows a schematic diagram of the relationship between the elastic displacement (stroke) of the elastic deformation member 311 and the shock load absorbed. In a range where the stroke is relatively small, the shock load increases linearly with respect to the stroke, whereas in a range where the stroke is relatively large, the shock load increases nonlinearly with respect to the stroke. When the shock applied to the elastic deformation member 311 is large, the elastic deformation occurs in a nonlinear region, resulting in a large shock load for a small stroke. The shock load, which changes sharply with respect to the stroke in this manner, is applied to each part (surfaces 301, 302, inner walls 13, 17, etc.) of the stage device 100 to which the shock absorbing device 300 is attached, and therefore there is a risk of damage to the stage device 100.

On the other hand, the rubber elastically deforming member 311 is less likely to generate contaminating elements such as fine particles inside the housing member 320 when it elastically deforms. Therefore, there is less risk of contaminating elements leaking out of the housing member 320, so it is possible to use a less expensive housing member 320 with lower airtightness performance compared to the second and third examples discussed below. In addition, since the rubber elastically deforming member 311 is less likely to break even if it is elastically deformed, there is no need to provide a removal section 324 (Figure 9) for replacement.

The elastic deformation member 311 according to the first study example described above can be adopted to reduce the cost of the stage device 100, since the risk of damaging the stage device 100 is low if the stroke remains in the linear region. For example, if the table 20 is driven at a relatively low speed, the impact upon collision is small and the stroke falls within the linear region, so there is no problem in using the elastic deformation member 311. On the other hand, in applications requiring a smaller stage device 100, the width of the linear region is reduced by the miniaturization of the elastic deformation member 311, so that even a short stroke results in elastic deformation in the nonlinear region. In such applications, it is preferable to use the shock absorbing member 310 according to the second or third study example described below.

In FIG. 11A, which shows a schematic configuration of the shock absorbing device 300 according to the second study example, a metal plastic deformation member 312 as a shock absorbing member 310 is housed inside a main body 321 of a housing member 320. The plastic deformation member 312 is a cylindrical member that absorbs shock by plastic deformation. A metal columnar insertion member 314 is inserted into one end (the left side in FIG. 11A) of the cylindrical plastic deformation member 312. The end of the insertion member 314 that is not inserted into the plastic deformation member 312 is fixed to the housing member 320 by a screw or the like. In the above configuration, the axis of the cylindrical plastic deformation member 312 and the axis of the columnar insertion member 314 coincide with each other and face the direction in which the shock is applied (the left-right direction in FIG. 11A).

Large impacts that cannot be absorbed by the buffer member 322 or the bellows 323 are absorbed by the plastic deformation of the plastic deformation member 312 inside the housing member 320. Specifically, when the driven object collides with the housing member 320, the impact causes the insertion member 314 to move in a direction approaching the plastic deformation member 312 (to the right in FIG. 11A), and the amount of insertion of the insertion member 314 into the plastic deformation member 312 increases. At this time, the force exerted by the insertion member 314 plastically deforms the cylindrical plastic deformation member 312 so as to expand in the radial direction, absorbing the impact. In other words, when the plastic deformation member 312 moves relative to the insertion member 314 inside the housing member 320 in the leftward direction in FIG. 11A, it absorbs the impact by plastically deforming so as to turn up at the outer periphery of the insertion member 314.

Figure 11 (B) shows a schematic diagram of the relationship between the insertion amount (stroke) of the insert member 314 into the plastic deformation member 312 and the shock load absorbed. Except for a narrow range where the stroke is near 0, the shock load is approximately constant even if the stroke changes. This is because the change in stroke is merely a difference in the position where the plastic deformation member 312 expands or turns up, and the amount of shock load absorbed by the plastic deformation does not change significantly. In this way, even if a large shock is applied to the shock absorbing device 300, the plastic deformation member 312, which plastically deforms while sequentially changing its position, distributes the shock load applied to each part of the stage device 100 over time so that it does not become excessive, thereby preventing damage to the stage device 100. This is in contrast to Figure 10 (B) of the first study example, in which the shock load increases nonlinearly with respect to the stroke.

The plastic deformation member 312 according to the second study example described above has a low risk of damaging the stage device 100 even when a large impact is applied, and therefore has a wider range of uses than the elastic deformation member 311 according to the first study example, which is limited to low-speed driving applications. On the other hand, unlike the rubber elastic deformation member 311, the metal plastic deformation member 312 generates contaminant elements such as metal particles inside the housing member 320 when plastically deforming. However, the housing member 320, which is an airtight member, keeps these contaminant elements inside, so that the vacuum chamber 108 can prevent contamination of the external vacuum environment. In this way, by combining the plastic deformation member 312 with excellent shock absorbing performance and the housing member 320 with excellent airtight performance, a general-purpose shock absorbing device 300 suitable for the stage device 100 used in a vacuum environment can be realized.

In addition, a contact prevention space 331 is provided around the plastic deformation member 312 inside the main body 321 so that the cylindrical plastic deformation member 312 does not come into contact with the inner wall of the housing member 320 when it expands radially or plastically deforms so as to be turned up. The contact prevention space 331 ensures that the plastic deformation of the plastic deformation member 312 to absorb impact is not impeded, and impact can be absorbed reliably, and damage to the inner wall of the housing member 320, etc., caused by contact with the plastically deformed plastic deformation member 312 can be prevented.

In addition, the plastically deformable member 312 after plastic deformation loses its shock absorbing ability and must be replaced. For this purpose, an openable and closable removal section 324 is provided at a position facing the end of the plastically deformable member 312 on the side where the insert member 314 is not inserted (the right side in FIG. 11(A)). The replacement work is completed by opening the removal section 324, removing the used plastically deformable member 312 by pulling it out from the insert member 314, and inserting a new plastically deformable member 312 into the existing insert member 314, and then closing the removal section 324. However, since the replacement work of the plastically deformable member 312 requires opening the vacuum chamber 108, it is accompanied by stopping the device and resetting the vacuum environment after the replacement work. Since performing unnecessary replacement work leads to a large economic loss, the timing of the replacement work must be carefully determined.

On the other hand, it is not possible to visually determine from the outside whether the plastic deformation member 312 covered by the storage member 320 in the vacuum chamber 108 has been used (plastically deformed). Therefore, a plastic deformation detection unit 332 that detects the plastic deformation of the plastic deformation member 312 inside the storage member 320 is provided in the contact prevention space 331 inside the main body 321. The plastic deformation detection unit 332 is composed of any type of sensor that can directly or indirectly detect the plastic deformation member 312 that has been plastically deformed around the insertion member 314 in a non-contact or contact manner. For example, the plastic deformation detection unit 332 can be composed of one or more optical sensors, electromagnetic sensors, mechanical sensors, thermal sensors, chemical sensors, etc., used alone or in combination.

The plastic deformation detection unit 332 transmits the detection result to an alarm unit 333 (plastic deformation alarm unit) outside the vacuum chamber 108 using any wired or wireless communication means. The alarm unit 333 notifies the user of the detection result of the plastic deformation detection unit 332. Since the user can know in a timely manner that the plastic deformation member 312 has been plastically deformed (used), the user can replace the plastic deformation member 312 only when necessary.

In the example of FIG. 11(A), the cylindrical plastic deformation member 312 is provided on the side of the housing member 320 where no impact is applied (right side), and the columnar insertion member 314 is provided on the side of the housing member 320 where impact is applied (left side). However, the cylindrical plastic deformation member 312 may be provided on the side of the housing member 320 where impact is applied (left side), and the columnar insertion member 314 may be provided on the side of the housing member 320 where no impact is applied (right side). Also, without providing the insertion member 314, the plastic deformation member 312 may absorb impact by plastically deforming in a direction intersecting the direction of impact application due to shear stress generated in the plastic deformation member 312 of any long shape such as a cylindrical, columnar, or rod shape.

12, which shows a schematic configuration of the shock absorbing device 300 according to the third study example, a fluid damper 313 as a shock absorbing member 310 is accommodated inside the body 321 of the accommodation member 320. The fluid damper 313 is an oil damper that absorbs shock using the fluid resistance of oil, and includes a cylinder 315 that is long in the direction in which the shock is applied (left and right direction in FIG. 12) and is filled with oil, a piston 316 that can move in the direction in which the shock is applied inside the cylinder 315, and a piston rod 317 that is long in the direction in which the shock is applied, one end (right end in FIG. 12) of which is fixed to the piston 316 and the other end (left end in FIG. 12) of which is in contact with the inner wall of the accommodation member 320. The inside of the cylinder 315 is divided by the piston 316 into a first chamber 318A on the buffer member 322 side (left side in FIG. 12) and a second chamber 318B on the removal section 324 side (right side in FIG. 12). In addition, the oil filled inside the cylinder 315 can flow between the first chamber 318A and the second chamber 318B via various flow path elements 319 provided in the piston 316.

Large impacts that cannot be absorbed by the buffer member 322 and bellows 323 are absorbed by the contraction of the fluid damper 313. Specifically, when the driven object collides with the storage member 320, the piston rod 317 and the piston 316 move together in the direction of the impact (to the right in FIG. 12). At this time, the piston 316 receives hydraulic resistance from the compressed oil in the second chamber 318B and stops gently. If the piston 316 decelerates rapidly, the large kinetic energy lost there is instantly applied to each part of the stage device 100, which may damage the stage device 100. However, the oil moves from the second chamber 318B to the first chamber 318A through flow path elements 319 such as orifices, valves, and ports provided in the piston 316, preventing the hydraulic pressure in the second chamber 318B from becoming excessive, and allowing the piston 316 to decelerate gently.

The relationship between the contraction amount (stroke) of the fluid damper 313 and the shock load absorbed can be designed by combining various flow path elements 319, and for example, the relationship shown in FIG. 11(B) of the second study example can be realized. Therefore, as in the second study example, even if a large shock is applied to the shock absorbing device 300, the shock load applied to each part of the stage device 100 is dispersed over time so as not to be excessive, and damage to the stage device 100 can be prevented.

The fluid damper 313 according to the third study example described above has a low risk of damaging the stage device 100 even when a large impact is applied, and therefore has a wider range of uses than the elastic deformation member 311 according to the first study example, which is limited to low-speed driving applications. On the other hand, the fluid damper 313 may cause oil to leak from the cylinder 315 into the housing member 320. However, the housing member 320, which is an airtight member, keeps the oil, which is a contaminant, inside, and therefore can prevent the vacuum chamber 108 from contaminating the external vacuum environment. In this way, by combining the fluid damper 313, which has excellent shock absorbing performance, and the housing member 320, which has excellent airtight performance, a general-purpose shock absorbing device 300 suitable for the stage device 100 used in a vacuum environment can be realized.

In addition, an oil storage space 334 is provided around the cylinder 315 inside the main body 321 to store oil leaked from the cylinder 315 and prevent it from leaking into the vacuum environment. Therefore, if the amount of leaked oil is small, the shock absorbing device 300 may be operated as is. On the other hand, if the amount of leaked oil is large, maintenance work such as cleaning the oil storage space 334 and replacing the fluid damper 313 is required. For this reason, an openable and closable removal part 324 is provided in a position facing the end of the fluid damper 313 (the right end in FIG. 12). Maintenance work is completed by simply opening the removal part 324, cleaning the oil storage space 334, replacing the fluid damper 313, and then closing the removal part 324. However, since these maintenance works need to be performed by opening the vacuum chamber 108, they involve stopping the device and re-setting up the vacuum environment after the replacement work. Since performing unnecessary maintenance work leads to significant economic losses, the timing of performing the maintenance work must be carefully determined.

On the other hand, the amount of oil leaking from the fluid damper 313 covered by the storage member 320 inside the vacuum chamber 108 cannot be seen from the outside. Therefore, an oil leakage detection unit 335 that detects the amount of oil leaking from the fluid damper 313 inside the storage member 320 is provided in the oil storage space 334 inside the main body 321. The oil leakage detection unit 335 is composed of any type of sensor that can directly or indirectly detect the amount of oil leaking into the oil storage space 334 in a non-contact or contact manner. For example, the oil leakage detection unit 335 can be composed of one or more optical sensors, electromagnetic sensors, thermal sensors, chemical sensors, etc., used alone or in combination.

The oil leakage detection unit 335 transmits the detection result to an alarm unit 336 (oil leakage alarm unit) outside the vacuum chamber 108 using any wired or wireless communication means. The alarm unit 336 notifies the user of the detection result of the oil leakage detection unit 335. Since the user can know in a timely manner whether or not there is an oil leakage from the fluid damper 313 and the amount of leaked oil, maintenance work on the fluid damper 313 can be performed only when necessary.

In the example of Figure 12, an oil damper that absorbs shock using hydraulic pressure has been described, but an air damper that absorbs shock using air pressure may also be used. The shock absorption performance of air dampers is often inferior to that of oil dampers, but air dampers are excellent at preventing contamination of the vacuum environment because they do not generate contaminating elements such as oil. Therefore, air dampers are suitable for cases such as low-speed driving where the expected shock is small, or when using an inexpensive housing member 320 with low airtightness performance.

The present invention has been described above based on the embodiments. The embodiments are merely examples, and it will be understood by those skilled in the art that various modifications are possible in the combination of each component and each processing process, and that such modifications are also within the scope of the present invention.

The stage device of this embodiment may be incorporated as a component of equipment or devices used in clean environments such as clean rooms and vacuum chambers. For example, the stage device of this embodiment is suitable for precisely controlling the position of a table on which a semiconductor wafer or the like to be processed is placed in semiconductor manufacturing equipment such as exposure equipment, ion implantation equipment, heat treatment equipment, etching equipment, sputtering equipment, and inspection equipment.

The functional configuration of each device described in the embodiments can be realized by hardware resources or software resources, or by the cooperation of hardware and software resources. Processors, ROM, RAM, and other LSIs can be used as hardware resources. Programs such as operating systems and applications can be used as software resources.

12 X-axis guide, 14 X-axis slider, 16 Y-axis guide, 18 Y-axis slider, 20 table, 100 stage device, 108 vacuum chamber, 120 X-axis air actuator, 122 X-axis guide, 124 X-axis slider, 130 Y-axis air actuator, 132 Y-axis guide, 134 Y-axis slider, 300 shock absorbing device, 310 shock absorbing member, 311 elastic deformation member, 312 plastic deformation member, 313 fluid damper, 314 insertion member, 320 storage member, 321 main body, 322 cushioning member, 323 bellows, 324 removal section, 331 contact prevention space, 332 plastic deformation detection section, 333 notification section, 334 oil storage space, 335 oil leakage detection section, 336 notification section.

Claims (18)

A driven object driven in a vacuum environment;
a shock absorbing member that absorbs shock caused by a collision with the driven object;
a housing member that is placed in the vacuum environment and houses the shock absorbing member therein in a manner that isolates the shock absorbing member from the external vacuum environment. The drive device according to claim 1, wherein the shock absorbing member includes a plastic deformation member that absorbs shock by plastic deformation. The plastic deformation member is cylindrical,
The impact absorbing member further includes an insertion member that is inserted into at least one end of the cylindrical plastic deformation member,
The drive device according to claim 2, wherein when the driven object collides with the accommodating member, the plastic deformation member, which moves relatively inside the accommodating member so that the insertion amount of the insertion member increases, absorbs impact by plastically deforming on the outer periphery of the insertion member. The drive device according to claim 2 or 3, wherein the housing member further comprises a contact prevention space that prevents the plastically deformed member from contacting the inner wall. The drive device according to any one of claims 2 to 4, further comprising a plastic deformation detection unit that detects the plastic deformation of the plastic deformation member inside the housing member. The drive device according to claim 5, further comprising a plastic deformation notification unit that notifies a user of the detection result of the plastic deformation detection unit. The drive unit according to claim 1, wherein the shock absorbing member includes an oil damper that absorbs shock using hydraulic pressure. The drive device according to claim 7, wherein the housing member further comprises an oil storage space that stores oil leaking from the oil damper and prevents it from leaking into the vacuum environment. The drive device according to claim 7 or 8, further comprising an oil leakage detector that detects oil leakage from the oil damper inside the housing member. The drive device according to claim 9, further comprising an oil leakage notification unit that notifies a user of the detection result of the oil leakage detection unit. The drive device according to any one of claims 1 to 10, wherein the housing member further comprises a removal section that allows the shock absorbing member to be removed to the outside. The drive device according to claim 11, wherein the removal section is provided on the side of the storage member opposite the side on which the driven object collides. a first driving unit including a first guide extending in a first direction and a first slider on which the driven object is installed, the driven object being movable along the first guide by air pressure; and a second driving unit including a second guide extending in a second direction intersecting the first direction and a second slider on which the first driving unit is installed, the second guide being movable along the second guide by air pressure;
The drive unit according to claim 1 , wherein the shock absorbing member and the housing member are provided at an end of at least one of the first guide or the second guide. Further comprising a drive unit including a guide extending in one direction and a slider on which the driven object is placed and which can be moved along the guide by a linear motor;
The drive unit according to claim 1 , wherein the shock absorbing member and the housing member are provided at least at one end of the guide. A drive device according to any one of claims 1 to 14, wherein the housing member is an airtight member that blocks the flow of gas between the interior in which the shock absorbing member is housed and the exterior, which is the vacuum environment. A drive device according to any one of claims 1 to 15, wherein the housing member has a bellows structure. The drive device according to any one of claims 1 to 16, further comprising a vacuum chamber having a vacuum inside for housing the driven object. a shock absorbing member that absorbs shock caused by a collision with a driven object driven in a vacuum environment;
a housing member that is placed in the vacuum environment and houses the shock absorbing member therein in a manner that isolates the shock absorbing member from the external vacuum environment.

Images