JP7640245B2 - Polyamic acid, polyamic acid solution, polyimide, polyimide film, laminate, flexible device, and method for producing polyimide film - Google Patents
Polyamic acid, polyamic acid solution, polyimide, polyimide film, laminate, flexible device, and method for producing polyimide film Download PDFInfo
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- JP7640245B2 JP7640245B2 JP2020177534A JP2020177534A JP7640245B2 JP 7640245 B2 JP7640245 B2 JP 7640245B2 JP 2020177534 A JP2020177534 A JP 2020177534A JP 2020177534 A JP2020177534 A JP 2020177534A JP 7640245 B2 JP7640245 B2 JP 7640245B2
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- Prior art keywords
- polyimide film
- mol
- polyamic acid
- tetracarboxylic dianhydride
- polyimide
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- 229920001721 polyimide Polymers 0.000 title claims description 125
- 229920005575 poly(amic acid) Polymers 0.000 title claims description 85
- 239000004642 Polyimide Substances 0.000 title claims description 42
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000243 solution Substances 0.000 title 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 58
- 125000006158 tetracarboxylic acid group Chemical group 0.000 claims description 47
- 150000004985 diamines Chemical class 0.000 claims description 44
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 claims description 31
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 24
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 22
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 claims description 19
- 238000002834 transmittance Methods 0.000 claims description 14
- 239000003960 organic solvent Substances 0.000 claims description 10
- 230000009477 glass transition Effects 0.000 claims description 9
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- 238000006068 polycondensation reaction Methods 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 239000010408 film Substances 0.000 description 24
- 239000011521 glass Substances 0.000 description 16
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 13
- 239000002904 solvent Substances 0.000 description 13
- 238000006116 polymerization reaction Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 239000006087 Silane Coupling Agent Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000018044 dehydration Effects 0.000 description 8
- 238000006297 dehydration reaction Methods 0.000 description 8
- -1 tetracarboxylic anhydride Chemical class 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 125000006159 dianhydride group Chemical group 0.000 description 5
- 238000006798 ring closing metathesis reaction Methods 0.000 description 5
- 239000000178 monomer Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- 150000000000 tetracarboxylic acids Chemical class 0.000 description 3
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- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- ZHBXLZQQVCDGPA-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)sulfonyl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(S(=O)(=O)C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 ZHBXLZQQVCDGPA-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
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- 125000003277 amino group Chemical group 0.000 description 2
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- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 2
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- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000005453 ketone based solvent Substances 0.000 description 2
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- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000003457 sulfones Chemical class 0.000 description 2
- LJMPOXUWPWEILS-GUCUJZIJSA-N (3ar,4as,7ar,8as)-3a,4,4a,7a,8,8a-hexahydrofuro[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1[C@@H]2C(=O)OC(=O)[C@@H]2C[C@@H]2C(=O)OC(=O)[C@@H]21 LJMPOXUWPWEILS-GUCUJZIJSA-N 0.000 description 1
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 1
- MQQRFOXFIPBFOV-UHFFFAOYSA-N 1,2-dimethylcyclobutane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1(C)C(C(O)=O)C(C(O)=O)C1(C)C(O)=O MQQRFOXFIPBFOV-UHFFFAOYSA-N 0.000 description 1
- SBHHKGFHJWTZJN-UHFFFAOYSA-N 1,3-dimethylcyclobutane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1(C)C(C(O)=O)C(C)(C(O)=O)C1C(O)=O SBHHKGFHJWTZJN-UHFFFAOYSA-N 0.000 description 1
- WNXJIVFYUVYPPR-UHFFFAOYSA-N 1,3-dioxolane Chemical compound C1COCO1 WNXJIVFYUVYPPR-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 1
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 1
- MSTZGVRUOMBULC-UHFFFAOYSA-N 2-amino-4-[2-(3-amino-4-hydroxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phenol Chemical compound C1=C(O)C(N)=CC(C(C=2C=C(N)C(O)=CC=2)(C(F)(F)F)C(F)(F)F)=C1 MSTZGVRUOMBULC-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- LJGHYPLBDBRCRZ-UHFFFAOYSA-N 3-(3-aminophenyl)sulfonylaniline Chemical compound NC1=CC=CC(S(=O)(=O)C=2C=C(N)C=CC=2)=C1 LJGHYPLBDBRCRZ-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- HYTCSCBDAFJMIP-UHFFFAOYSA-N 3-ethyl-1,1-dimethylurea Chemical compound CCNC(=O)N(C)C HYTCSCBDAFJMIP-UHFFFAOYSA-N 0.000 description 1
- JASHGAIOBWYPBI-UHFFFAOYSA-N 3a,4a,7a,7b-tetrahydrodifuro[5,4-a:5',4'-d]furan-1,3,5,7-tetrone Chemical compound O=C1OC(=O)C2C1C1C(=O)OC(=O)C1O2 JASHGAIOBWYPBI-UHFFFAOYSA-N 0.000 description 1
- FYYYKXFEKMGYLZ-UHFFFAOYSA-N 4-(1,3-dioxo-2-benzofuran-5-yl)-2-benzofuran-1,3-dione Chemical compound C=1C=C2C(=O)OC(=O)C2=CC=1C1=CC=CC2=C1C(=O)OC2=O FYYYKXFEKMGYLZ-UHFFFAOYSA-N 0.000 description 1
- YARZEPAVWOMMHZ-UHFFFAOYSA-N 4-(3,4-dicarboxy-4-phenylcyclohexa-1,5-dien-1-yl)phthalic acid Chemical compound OC(=O)C1C=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)C=CC1(C(O)=O)C1=CC=CC=C1 YARZEPAVWOMMHZ-UHFFFAOYSA-N 0.000 description 1
- QNLCDRXVEPWSBQ-UHFFFAOYSA-N 4-(4,5-dicarboxy-5-phenylcyclohexa-1,3-dien-1-yl)phthalic acid Chemical compound OC(=O)C1=CC=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)CC1(C(O)=O)C1=CC=CC=C1 QNLCDRXVEPWSBQ-UHFFFAOYSA-N 0.000 description 1
- IFYXKXOINSPAJQ-UHFFFAOYSA-N 4-(4-aminophenyl)-5,5-bis(trifluoromethyl)cyclohexa-1,3-dien-1-amine Chemical compound FC(F)(F)C1(C(F)(F)F)CC(N)=CC=C1C1=CC=C(N)C=C1 IFYXKXOINSPAJQ-UHFFFAOYSA-N 0.000 description 1
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- DZIHTWJGPDVSGE-UHFFFAOYSA-N 4-[(4-aminocyclohexyl)methyl]cyclohexan-1-amine Chemical compound C1CC(N)CCC1CC1CCC(N)CC1 DZIHTWJGPDVSGE-UHFFFAOYSA-N 0.000 description 1
- KMKWGXGSGPYISJ-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=CC(N)=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=C(N)C=C1 KMKWGXGSGPYISJ-UHFFFAOYSA-N 0.000 description 1
- HYDATEKARGDBKU-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]phenoxy]aniline Chemical group C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 HYDATEKARGDBKU-UHFFFAOYSA-N 0.000 description 1
- XPAQFJJCWGSXGJ-UHFFFAOYSA-N 4-amino-n-(4-aminophenyl)benzamide Chemical compound C1=CC(N)=CC=C1NC(=O)C1=CC=C(N)C=C1 XPAQFJJCWGSXGJ-UHFFFAOYSA-N 0.000 description 1
- YGYCECQIOXZODZ-UHFFFAOYSA-N 4415-87-6 Chemical compound O=C1OC(=O)C2C1C1C(=O)OC(=O)C12 YGYCECQIOXZODZ-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 description 1
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- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- XQBSPQLKNWMPMG-UHFFFAOYSA-N bicyclo[2.2.2]octane-2,3,5,6-tetracarboxylic acid Chemical compound C1CC2C(C(O)=O)C(C(=O)O)C1C(C(O)=O)C2C(O)=O XQBSPQLKNWMPMG-UHFFFAOYSA-N 0.000 description 1
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- WOSVXXBNNCUXMT-UHFFFAOYSA-N cyclopentane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1CC(C(O)=O)C(C(O)=O)C1C(O)=O WOSVXXBNNCUXMT-UHFFFAOYSA-N 0.000 description 1
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- GNOIPBMMFNIUFM-UHFFFAOYSA-N hexamethylphosphoric triamide Chemical compound CN(C)P(=O)(N(C)C)N(C)C GNOIPBMMFNIUFM-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Laminated Bodies (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
本発明は、ポリアミド酸、ポリアミド酸溶液、ポリイミド、およびポリイミド膜に関する。さらに、本発明はポリイミド膜を備える積層体およびフレキシブルデバイスに関する。 The present invention relates to polyamic acid, a polyamic acid solution, a polyimide, and a polyimide film. Furthermore, the present invention relates to a laminate and a flexible device that include a polyimide film.
ディスプレイやタッチパネル等の電子デバイスにおいて、デバイスの薄型化、軽量化、およびフレキシブル化が要求されており、従来のガラス基板に代えてプラスチックフィルム基板の利用が検討されている。 In electronic devices such as displays and touch panels, there is a demand for devices to be thinner, lighter, and more flexible, and the use of plastic film substrates instead of conventional glass substrates is being considered.
これらの電子デバイスの製造プロセスでは、基板上に、薄膜トランジスタや透明電極等の電子素子が設けられる。電子素子の形成は高温プロセスを要するため、プラスチックフィルム基板には高温プロセスに適応可能な耐熱性が要求される。また、電子デバイスの薄膜化・フレキシブル化の要求とともに有機材料の透明化・低位相差化が求められている。 In the manufacturing process of these electronic devices, electronic elements such as thin-film transistors and transparent electrodes are provided on a substrate. Since the formation of electronic elements requires high-temperature processes, the plastic film substrate must have heat resistance suitable for high-temperature processes. In addition to the demand for thinner and more flexible electronic devices, there is also a demand for organic materials to be more transparent and have lower retardation.
透明性・耐熱性が高く、低熱膨張性を示すプラスチック材料として、剛直な構造のモノマーを用いたポリイミドが知られている(特許文献1)。特許文献2には、フルオレン構造を導入することで高透明性および低熱膨張係数のポリイミド膜が得られることが記載されている。 Polyimides made from monomers with rigid structures are known as plastic materials that are highly transparent, heat resistant, and have low thermal expansion (Patent Document 1). Patent Document 2 describes how the introduction of a fluorene structure makes it possible to obtain a polyimide film with high transparency and a low thermal expansion coefficient.
分子設計により吸収波長を短波長化して透明化を図ったポリイミドは、可視光透過率が高いものの、膜状に成形するとヘイズが大きく、ディスプレイ等の基板材料としての適性に劣る場合があった。また、一般に、ポリイミドは透明性と熱膨張係数との間にトレードオフの関係があり、透明性を高めると熱膨張係数が大きくなる傾向がある。特許文献2では、フルオレン構造の導入により、ポリイミドの透明性を維持しつつ厚み位相差を1000nmまで低下させた例が示されているが、フレキシブル電子デバイス用基板としての実用には、さらなる低熱膨張性および高耐熱性が要求される。上記実情に鑑みて、本発明は、高耐熱性(高ガラス転移温度)、低位相差および高透明性を有するポリイミド、およびポリイミドの形成に用いるポリアミド酸およびそれから得られるポリイミドの提供を目的とする。 Polyimides that have been designed to have a shorter absorption wavelength and thus be transparent by molecular design have a high visible light transmittance, but when molded into a film, they have a large haze and may be less suitable as substrate materials for displays and the like. In addition, polyimides generally have a trade-off relationship between transparency and thermal expansion coefficient, and the thermal expansion coefficient tends to increase as the transparency is increased. Patent Document 2 shows an example in which the thickness retardation of polyimide is reduced to 1000 nm while maintaining its transparency by introducing a fluorene structure, but further low thermal expansion and high heat resistance are required for practical use as a substrate for flexible electronic devices. In view of the above circumstances, the present invention aims to provide a polyimide having high heat resistance (high glass transition temperature), low retardation, and high transparency, as well as a polyamic acid used to form the polyimide and a polyimide obtained therefrom.
本発明者らは、鋭意検討の結果、下記手段により上記課題を解決できることを見出した。 As a result of intensive research, the inventors have found that the above problems can be solved by the following means.
本発明のポリアミド酸は、ジアミンとテトラカルボン酸二無水物の重付加反応物であり、ジアミン成分として、2,2’-ビストリフルオロメチルベンジジンを含み、テトラカルボン酸二無水物成分として、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、および9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物を含む。テトラカルボン酸無水物全量に対する9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物の量は、10mol%以上であり、10mol%以上98mol%以下である。 The polyamic acid of the present invention is a polyaddition reaction product of diamine and tetracarboxylic dianhydride, and contains 2,2'-bistrifluoromethylbenzidine as the diamine component, and 3,3',4,4'-biphenyltetracarboxylic dianhydride and 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride as the tetracarboxylic dianhydride components. The amount of 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride relative to the total amount of tetracarboxylic anhydride is 10 mol% or more, and is 10 mol% or more and 98 mol% or less.
テトラカルボン酸無水物成分として、さらにピロメリット酸無水物を含んでいてもよい。テトラカルボン酸無水物全量に対するピロメリット酸無水物の量は、例えば1mol%以上80mol%以下である。 The tetracarboxylic acid anhydride component may further contain pyromellitic anhydride. The amount of pyromellitic anhydride relative to the total amount of tetracarboxylic acid anhydride is, for example, 1 mol % or more and 80 mol % or less.
上記のポリアミド酸をイミド化することによりポリイミドが得られる。すなわちジアミンとテトラカルボン酸二無水物の重縮合反応物であるポリイミドであって、前記ジアミンが、2,2’-ビストリフルオロメチルベンジジンを含み、前記テトラカルボン酸二無水物が、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、および9,9’-(3,4'-ジカルボキシフェニル)フルオレン酸二無水物を含み、テトラカルボン酸無水物全量に対する9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物の量が10mol%以上98mol%以下である、ポリイミドである。 A polyimide can be obtained by imidizing the above polyamic acid. That is, the polyimide is a polycondensation reaction product of a diamine and a tetracarboxylic dianhydride, in which the diamine contains 2,2'-bistrifluoromethylbenzidine, the tetracarboxylic dianhydride contains 3,3',4,4'-biphenyltetracarboxylic dianhydride and 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride, and the amount of 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride relative to the total amount of tetracarboxylic dianhydride is 10 mol% or more and 98 mol% or less.
また上記ポリイミドは、テトラトラカルボン酸無水物として、さらにピロメリット酸無水物を含み、テトラカルボン酸無水物全量に対するピロメリット酸無水物の量が1mol%以上80mol%以下であってもよい。 The polyimide may further contain pyromellitic anhydride as the tetracarboxylic anhydride, and the amount of pyromellitic anhydride relative to the total amount of tetracarboxylic anhydride may be 1 mol % or more and 80 mol % or less.
ポリイミドはポリイミド膜として形成されてもよい。例えば、ポリアミド酸と有機溶媒とを含有するポリアミド酸溶液を基材に塗布して、基材上に膜状のポリアミド酸が設けられた積層体を形成し、積層体を加熱してポリアミド酸をイミド化することによりポリイミド膜として形成してもよい。積層体の加熱最高温度は、例えば380℃以上500℃以下であることが好ましい。この温度範囲での加熱時間は、5分以上60分以下が好ましい。また、基材からポリイミド膜を剥離する際にレーザー照射を行ってもよい。 The polyimide may be formed as a polyimide film. For example, a polyamic acid solution containing polyamic acid and an organic solvent may be applied to a substrate to form a laminate in which a film of polyamic acid is provided on the substrate, and the laminate is heated to imidize the polyamic acid to form a polyimide film. The maximum heating temperature of the laminate is preferably, for example, 380°C or higher and 500°C or lower. The heating time within this temperature range is preferably 5 minutes or higher and 60 minutes or lower. Laser irradiation may also be performed when peeling off the polyimide film from the substrate.
ポリイミド膜は、ガラス転移温度が350℃以上であり、100~350℃における昇温時熱膨張係数が100ppm/K以下であることが好ましく、波長450nmの光透過率が75%以上であり、ヘイズが1.2%以下であることがより好ましい。 The polyimide film preferably has a glass transition temperature of 350°C or higher, a thermal expansion coefficient at elevated temperatures between 100 and 350°C of 100 ppm/K or less, a light transmittance of 75% or more at a wavelength of 450 nm, and a haze of 1.2% or less.
本発明の一実施形態は、基材上に上記のポリイミド膜が設けられた積層体である。本発明の一実施形態は、上記のポリイミド膜上に電子素子を備えるフレキシブルデバイスである。
One embodiment of the present invention is a laminate having the above-mentioned polyimide film provided on a substrate.One embodiment of the present invention is a flexible device having an electronic element on the above-mentioned polyimide film.
本発明のポリイミド膜は、熱安定性、低位相差および高透明性に優れ、フレキシブルデバイス用基板等に好適である。 The polyimide film of the present invention has excellent thermal stability, low retardation and high transparency, making it suitable for use as a substrate for flexible devices, etc.
テトラカルボン酸二無水物とジアミンの重付加反応によりポリアミド酸が得られ、ポリアミド酸の脱水閉環反応によりポリイミドが得られる。すなわち、ポリイミドはテトラカルボン酸二無水物とジアミンの重縮合反応物である。本発明のポリアミド酸およびポリイミドは、ジアミン成分として、2,2’-ビストリフルオロメチルベンジジン(以下、TFMBと称することがある)を含み、テトラカルボン酸二無水物成分として、3,3,4,4-ビフェニルテトラカルボン酸二無水物(以下、BPDAと称することがある)および9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物(以下、BPAFと称することがある)を含む。ポリアミド酸およびポリイミドは、テトラカルボン酸二無水物成分として、さらにピロメリット酸無水物(以下、PMDAと称することがある)を含んでいてもよい。 Polyamic acid is obtained by a polyaddition reaction of tetracarboxylic dianhydride and diamine, and polyimide is obtained by a dehydration ring-closing reaction of polyamic acid. That is, polyimide is a polycondensation reaction product of tetracarboxylic dianhydride and diamine. The polyamic acid and polyimide of the present invention contain 2,2'-bistrifluoromethylbenzidine (hereinafter sometimes referred to as TFMB) as a diamine component, and 3,3,4,4-biphenyltetracarboxylic dianhydride (hereinafter sometimes referred to as BPDA) and 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride (hereinafter sometimes referred to as BPAF) as tetracarboxylic dianhydride components. The polyamic acid and polyimide may further contain pyromellitic anhydride (hereinafter sometimes referred to as PMDA) as a tetracarboxylic dianhydride component.
(テトラカルボン酸二無水物成分)
テトラカルボン酸二無水物成分としてBPDAを含有するポリイミドは、BPDAが剛直な構造を有するため、低熱膨張性を示す。ポリアミド酸およびポリイミドにおけるテトラカルボン酸二無水物成分全量100mol%に対するBPDAの割合は、10mol%以上90mol%以下が望ましく、15mol%以上80mol%以下が好ましく、20mol%以上70mol%以下がより好ましく、20mol%以上60mol%以下がさらに好ましい。
(Tetracarboxylic acid dianhydride component)
Polyimides containing BPDA as a tetracarboxylic dianhydride component exhibit low thermal expansion because BPDA has a rigid structure. The ratio of BPDA to the total amount (100 mol%) of the tetracarboxylic dianhydride components in the polyamic acid and polyimide is desirably 10 mol% to 90 mol%, preferably 15 mol% to 80 mol%, more preferably 20 mol% to 70 mol%, and even more preferably 20 mol% to 60 mol%.
テトラカルボン酸二無水物成分として、BPDAに加えてPMDAを含むことにより、ポリイミドがさらに高耐熱性および低熱膨張性を示す傾向がある。ポリアミド酸およびポリイミドにおけるテトラカルボン酸二無水物成分全量100mol%に対するPMDAの割合は、1mol%以上80mol%以下が好ましく、5mol%以上60mol%以下がより好ましい。PMDAの割合が5mol%以上であればポリイミド膜が低熱膨張性を示し、60mol%以下であればポリイミド膜が高い透明性を示す傾向がある。ポリイミド膜が高い透明性を発現するためには、PMDAの割合は、BPDAの割合よりも少ないことが好ましい。 By including PMDA in addition to BPDA as a tetracarboxylic dianhydride component, the polyimide tends to exhibit even higher heat resistance and lower thermal expansion. The ratio of PMDA to the total amount of 100 mol% of the tetracarboxylic dianhydride components in the polyamic acid and polyimide is preferably 1 mol% to 80 mol%, and more preferably 5 mol% to 60 mol%. If the ratio of PMDA is 5 mol% or more, the polyimide film tends to exhibit low thermal expansion, and if it is 60 mol% or less, the polyimide film tends to exhibit high transparency. In order for the polyimide film to exhibit high transparency, it is preferable that the ratio of PMDA is less than the ratio of BPDA.
BPDAおよびPMDAは剛直な構造を有するため、テトラカルボン酸二無水物成分としてBPDAおよびPMDAのみを含むポリアミド酸からポリイミド膜を作製すると、結晶化等に起因する白濁が生じやすい。テトラカルボン酸二無水物として、BPDA(およびPMDA)に加えてBPAFを含有することにより、白濁が抑制される傾向があり、透明性に優れるポリイミド膜が得られる。ポリアミド酸およびポリイミドにおけるテトラカルボン酸二無水物成分全量100mol%に対するBPAFの割合は、10mol%以上98mol%以下が望ましく、10mol%以上90mol%以下が好ましく、15mol%以上80mol%以下がより好ましく、15mol%以上60mol%以下が更に好ましい。BPAFの割合が10mol%以上であればポリイミドの結晶化が抑制され、これに伴ってポリイミド膜の白濁が抑制される傾向がある。結晶化が抑制されることにより、加熱時の相転移に起因する寸法変化が生じ難く、ポリイミド膜の熱膨張係数が小さくなる傾向がある。BPAFの割合が80mol%以下であれば低熱膨張特性を維持できる。 BPDA and PMDA have a rigid structure, so when a polyimide film is produced from a polyamic acid containing only BPDA and PMDA as the tetracarboxylic dianhydride component, cloudiness due to crystallization and the like tends to occur. By containing BPAF in addition to BPDA (and PMDA) as the tetracarboxylic dianhydride, cloudiness tends to be suppressed, and a polyimide film with excellent transparency is obtained. The ratio of BPAF to the total amount of tetracarboxylic dianhydride components in the polyamic acid and polyimide is desirably 10 mol% to 98 mol%, preferably 10 mol% to 90 mol%, more preferably 15 mol% to 80 mol%, and even more preferably 15 mol% to 60 mol%. If the ratio of BPAF is 10 mol% or more, crystallization of the polyimide is suppressed, and cloudiness of the polyimide film tends to be suppressed accordingly. By suppressing crystallization, dimensional changes due to phase transition during heating are less likely to occur, and the thermal expansion coefficient of the polyimide film tends to be smaller. If the BPAF ratio is 80 mol% or less, low thermal expansion characteristics can be maintained.
高透明性と低熱膨張性とを両立させる観点から、ポリアミド酸およびポリイミドにおけるテトラカルボン酸二無水物成分全量100mol%に対するPMDAとBPDAとBPAFの合計は、90mol%以上が好ましく、92%mol以上がより好ましく、95mol%以上がさらに好ましい。 From the viewpoint of achieving both high transparency and low thermal expansion, the total amount of PMDA, BPDA and BPAF relative to the total amount of tetracarboxylic dianhydride components in the polyamic acid and polyimide (100 mol%) is preferably 90 mol% or more, more preferably 92 mol% or more, and even more preferably 95 mol% or more.
ポリアミド酸およびポリイミドは、テトラカルボン酸二無水物成分としてPMDA、BPDAおよびBPAF以外の成分を含んでいてもよい。他のテトラカルボン酸二無水物としては、3,3’,4,4’-ベンゾフェノンテトラカルボン酸二無水物、2,3,3’,4’-ビフェニルテトラカルボン酸二無水物、3,3’,4,4’-ジフェニルスルホンテトラカルボン酸二無水物、1,4,5,8-ナフタレンテトラカルボン酸二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、1,2,5,6-ナフタレンテトラカルボン酸二無水物、4,4’-オキシジフタル酸無水物、9,9’-ビス[4-(3,4-ジカルボキシフェノキシ)フェニル]フルオレン二無水物、3,3’,4,4’-ビフェニルエーテルテトラカルボン酸二無水物、2,3,5,6-ピリジンテトラカルボン酸二無水物、3,4,9,10-ペリレンテトラカルボン酸二無水物、4,4’-スルホニルジフタル酸二無水物、パラテルフェニル-3,4,3’,4’-テトラカルボン酸二無水物、メタテルフェニル-3,3’,4,4’-テトラカルボン酸二無水物、3,3’,4,4’-ジフェニルエーテルテトラカルボン酸二無水物、(1S,2R,4S,5R)-シクロヘキサンテトラカルボン酸二無水物(シス、シス、シス-1,2,4,5-シクロヘキサンテトラカルボン酸二無水物)、(1S,2S,4R,5R)-シクロヘキサンテトラカルボン酸二無水物、(1R,2S,4S,5R)-シクロヘキサンテトラカルボン酸二無水物、ビシクロ[2.2.2]オクタン-2,3,5,6-テトラカルボン酸二無水物、ビシクロ[2.2.2]オクト-7-エン-2,3,5,6-テトラカルボン酸二無水物、5-(ジオキソテトラヒドロフリル-3-メチル-3-シクロヘキセン-1,2-ジカルボン酸無水物、4-(2,5-ジオキソテトラヒドロフラン-3-イル)-テトラリン-1,2-ジカルボン酸無水物、テトラヒドロフラン-2,3,4,5-テトラカルボン酸二無水物、ビシクロ-3,3’,4,4’-テトラカルボン酸二無水物、1,2,3,4-シクロペンタンテトラカルボン酸二無水物、1,2,3,4-シクロブタンテトラカルボン酸二無水物、1,3-ジメチル-1,2,3,4-シクロブタンテトラカルボン酸二無水物、1,4-ジメチル-1,2,3,4-シクロブタンテトラカルボン酸二無水物、等が挙げられる。 Polyamic acid and polyimide may contain components other than PMDA, BPDA and BPAF as tetracarboxylic dianhydride components. Other tetracarboxylic dianhydrides include 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 2,3,3',4'-biphenyl tetracarboxylic dianhydride, 3,3',4,4'-diphenylsulfone tetracarboxylic dianhydride, 1,4,5,8-naphthalene tetracarboxylic dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 1,2,5,6-naphthalene tetracarboxylic dianhydride, 4,4'-oxydiphthalic anhydride, 9,9'-bis[4-(3,4-dicarboxyphenoxy)phenyl]fluoro. terphenyl-3,4,3',4'-tetracarboxylic dianhydride, 3,3',4,4'-diphenyl ether tetracarboxylic dianhydride, 2,3,5,6-pyridine tetracarboxylic dianhydride, 3,4,9,10-perylene tetracarboxylic dianhydride, 4,4'-sulfonyldiphthalic dianhydride, p-terphenyl-3,4,3',4'-tetracarboxylic dianhydride, m-terphenyl-3,3',4,4'-tetracarboxylic dianhydride, 3,3',4,4'-diphenyl ether tetracarboxylic dianhydride, (1S,2R,4S,5R)-cyclohexane tetracarboxylic dianhydride Water (cis,cis,cis-1,2,4,5-cyclohexanetetracarboxylic dianhydride), (1S,2S,4R,5R)-cyclohexanetetracarboxylic dianhydride, (1R,2S,4S,5R)-cyclohexanetetracarboxylic dianhydride, bicyclo[2.2.2]octane-2,3,5,6-tetracarboxylic dianhydride, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, 5-(dioxotetrahydrofuryl-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, 4-(2 ,5-dioxotetrahydrofuran-3-yl)-tetralin-1,2-dicarboxylic anhydride, tetrahydrofuran-2,3,4,5-tetracarboxylic dianhydride, bicyclo-3,3',4,4'-tetracarboxylic dianhydride, 1,2,3,4-cyclopentane tetracarboxylic dianhydride, 1,2,3,4-cyclobutane tetracarboxylic dianhydride, 1,3-dimethyl-1,2,3,4-cyclobutane tetracarboxylic dianhydride, 1,4-dimethyl-1,2,3,4-cyclobutane tetracarboxylic dianhydride, etc.
(ジアミン成分)
ジアミン成分としてTFMBを含有するポリイミド膜は、高透明性および低線膨張係数を示す傾向がある。高い透明性と低熱膨張性とを両立させる観点から、ポリアミド酸およびポリイミドにおけるジアミン成分全量100mol%に対するTFMBの量は、90mol%以上が好ましく、95mol%以上がより好ましく、99mol%以上がさらに好ましい。
(Diamine component)
A polyimide film containing TFMB as a diamine component tends to exhibit high transparency and a low linear expansion coefficient. From the viewpoint of achieving both high transparency and low thermal expansion, the amount of TFMB relative to 100 mol% of the total amount of the diamine components in the polyamic acid and polyimide is preferably 90 mol% or more, more preferably 95 mol% or more, and even more preferably 99 mol% or more.
ポリアミド酸およびポリイミドは、ジアミン成分としてTFMB以外の成分を含んでいてもよい。TFMB以外のジアミンとしては、4,4’-ジアミノベンズアニリド、p-フェニレンジアミン、m-フェニレンジアミン、3,4’-ジアミノジフェニルエーテル、4,4’-ジアミノジフェニルエーテル、4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノジフェニルスルホン、9,9’-(4-アミノフェニル)フルオレン、9,9’-(4-アミノ-3-メチルフェニル)フルオレン、1,4’-ビス(4-アミノフェノキシ)ベンゼン、2,2’-ビス(4-アミノフェノキシフェニル)プロパン、4,4’-ビス(4-アミノフェノキシ)ビフェニル、4,4’-メチレンビス(シクロへキサンアミン)、3,3-ジアミノー4,4-ジヒドロキシジフェニルスルホン、2,2-ビス(3-アミノ4-ヒドロキシフェニル)ヘキサフルオロプロパン、等が挙げられる。 Polyamic acid and polyimide may contain components other than TFMB as diamine components. Examples of diamines other than TFMB include 4,4'-diaminobenzanilide, p-phenylenediamine, m-phenylenediamine, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl sulfone, 3,3'-diaminodiphenyl sulfone, 9,9'-(4-aminophenyl)fluorene, 9,9'-(4-amino-3-methylphenyl)fluorene, 1,4'-bis(4-aminophenoxy)benzene, 2,2'-bis(4-aminophenoxyphenyl)propane, 4,4'-bis(4-aminophenoxy)biphenyl, 4,4'-methylenebis(cyclohexaneamine), 3,3-diamino-4,4-dihydroxydiphenyl sulfone, 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, and the like.
ジアミン成分として、シリコーンジアミン等の屈曲性ジアミンを含むと、ポリイミド膜の線膨張係数が大きくなる傾向がある。そのため、ポリアミド酸およびポリイミドにおけるジアミン成分全量100mol%に対する屈曲性ジアミンの量は、5mol%以下が好ましく、1mol%以下がさらに好ましく、0.5mol%以下が特に好ましい。熱膨張係数低減の観点においては、屈曲性ジアミンを含まないことが好ましい。 When a flexible diamine such as silicone diamine is included as the diamine component, the linear expansion coefficient of the polyimide film tends to be large. Therefore, the amount of flexible diamine relative to the total amount of diamine components in the polyamic acid and polyimide (100 mol%) is preferably 5 mol% or less, more preferably 1 mol% or less, and particularly preferably 0.5 mol% or less. From the viewpoint of reducing the thermal expansion coefficient, it is preferable not to include a flexible diamine.
(ポリアミド酸およびポリアミド酸溶液)
本発明のポリアミド酸は、公知の一般的な方法により合成できる。例えば、有機溶媒中でジアミンとテトラカルボン酸二無水物とを反応させることにより、ポリアミド酸溶液が得られる。ポリアミド酸の重合に使用する有機溶媒は、モノマー成分としてのテトラカルボン酸二無水物およびジアミンを溶解し、かつ重付加により生成するポリアミド酸を溶解するものが好ましい。有機溶媒としては、テトラメチル尿素、N,N-ジメチルエチルウレア等のウレア系溶媒;ジメチルスルホキシド、ジフェニルスルホン、テトラメチルスルホン等のスルホン系溶媒;N,N-ジメチルアセトアミド、N,N-ジメチルホルムアミド、N,N’-ジエチルアセトアミド、N-メチル-2-ピロリドン、ヘキサメチルリン酸トリアミド等のアミド系溶媒;γ-ブチロラクトン等のエステル系溶媒;クロロホルム、塩化メチレン等のハロゲン化アルキル系溶媒;ベンゼン、トルエン等の芳香族炭化水素系溶媒;フェノール、クレゾール等のフェノール系溶媒;シクロペンタノン等のケトン系溶媒;テトラヒドロフラン、1,3-ジオキソラン、1,4-ジオキサン、ジメチルエーテル、ジエチルエーテル、p-クレゾールメチルエーテル等のエーテル系溶媒が挙げられる。通常、これらの溶媒は単独で用いるが、必要に応じて2種以上を適宜組み合わせて用いてもよい。ポリアミド酸の溶解性および反応性を高めるために、有機溶媒は、アミド系溶媒、ケトン系溶媒、エステル系溶媒およびエーテル系溶媒からなる群から選択されることが好ましく、特にN,N-ジメチルアセトアミド、N,N-ジメチルホルムアミド、N,N’-ジエチルアセトアミド、N-メチル-2-ピロリドン等のアミド系溶媒が好ましい。
(Polyamic Acid and Polyamic Acid Solution)
The polyamic acid of the present invention can be synthesized by a known general method. For example, a polyamic acid solution can be obtained by reacting a diamine with a tetracarboxylic dianhydride in an organic solvent. The organic solvent used for the polymerization of the polyamic acid is preferably one that dissolves the tetracarboxylic dianhydride and diamine as monomer components and dissolves the polyamic acid produced by polyaddition. Examples of the organic solvent include urea-based solvents such as tetramethylurea and N,N-dimethylethylurea; sulfone-based solvents such as dimethyl sulfoxide, diphenyl sulfone, and tetramethyl sulfone; amide-based solvents such as N,N-dimethylacetamide, N,N-dimethylformamide, N,N'-diethylacetamide, N-methyl-2-pyrrolidone, and hexamethylphosphoric acid triamide; ester-based solvents such as γ-butyrolactone; halogenated alkyl solvents such as chloroform and methylene chloride; aromatic hydrocarbon-based solvents such as benzene and toluene; phenol-based solvents such as phenol and cresol; ketone-based solvents such as cyclopentanone; and ether-based solvents such as tetrahydrofuran, 1,3-dioxolane, 1,4-dioxane, dimethyl ether, diethyl ether, and p-cresol methyl ether. Usually, these solvents are used alone, but two or more of them may be used in appropriate combination as necessary. In order to enhance the solubility and reactivity of the polyamic acid, the organic solvent is preferably selected from the group consisting of amide solvents, ketone solvents, ester solvents, and ether solvents, and in particular, amide solvents such as N,N-dimethylacetamide, N,N-dimethylformamide, N,N'-diethylacetamide, and N-methyl-2-pyrrolidone are preferred.
ジアミン成分全量のモル数と、テトラカルボン酸二無水物成分全量のモル数との比を調整することにより、ポリアミド酸の分子量を調整できる。ポリアミド酸の合成に用いるモノマー成分には、ジアミンおよびテトラカルボン酸二無水物以外が含まれていてもよい。例えば、分子量の調整等を目的として、一官能のアミンや一官能の酸無水物を用いてもよい。 The molecular weight of the polyamic acid can be adjusted by adjusting the ratio of the number of moles of the total amount of diamine components to the number of moles of the total amount of tetracarboxylic dianhydride components. The monomer components used in the synthesis of polyamic acid may contain other monomers than diamines and tetracarboxylic dianhydrides. For example, monofunctional amines or monofunctional acid anhydrides may be used for the purpose of adjusting the molecular weight, etc.
ジアミンとテトラカルボン酸二無水物との重付加によるポリアミド酸の合成は、アルゴン、窒素等の不活性雰囲気中で実施することが好ましい。不活性雰囲気中で、有機溶媒中にジアミンおよびテトラカルボン酸二無水物を溶解させ、混合することにより、重合が進行する。ジアミンおよびテトラカルボン酸二無水物の添加順序は特に限定されない。例えば、ジアミンを有機溶媒中に溶解またはスラリー状に分散させて、ジアミン溶液とし、テトラカルボン酸二無水物をジアミン溶液中に添加すればよい。テトラカルボン酸二無水物は、固体の状態で添加してもよく、有機溶媒に溶解、またはスラリー状に分散させた状態で添加してもよい。 The synthesis of polyamic acid by polyaddition of diamine and tetracarboxylic dianhydride is preferably carried out in an inert atmosphere such as argon or nitrogen. In an inert atmosphere, the diamine and tetracarboxylic dianhydride are dissolved in an organic solvent and mixed, whereby polymerization proceeds. The order of addition of the diamine and tetracarboxylic dianhydride is not particularly limited. For example, the diamine may be dissolved or dispersed in a slurry in an organic solvent to form a diamine solution, and the tetracarboxylic dianhydride may be added to the diamine solution. The tetracarboxylic dianhydride may be added in a solid state, or may be added dissolved in an organic solvent or dispersed in a slurry state.
反応の温度条件は特に限定されない。解重合によるポリアミド酸の分子量低下を抑制する観点から、反応温度は80℃以下が好ましい。重合反応を適度に進行させる観点から、反応温度は0~50℃がより好ましい。反応時間は10分~30時間の範囲で任意に設定すればよい。 The reaction temperature conditions are not particularly limited. From the viewpoint of suppressing the decrease in molecular weight of the polyamic acid due to depolymerization, the reaction temperature is preferably 80°C or less. From the viewpoint of allowing the polymerization reaction to proceed moderately, the reaction temperature is more preferably 0 to 50°C. The reaction time may be set arbitrarily within the range of 10 minutes to 30 hours.
有機溶媒中でジアミンとテトラカルボン酸二無水物とを反応させることにより、ポリアミド酸溶液が得られる。ポリアミド酸溶液に溶媒を添加して、ポリアミド酸の濃度(溶液の固形分濃度)を調整してもよい。ポリアミド酸溶液には、ポリアミド酸の脱水閉環によるイミド化の促進や、イミド化の抑制による溶液保管性(ポットライフ)向上等を目的とした添加剤が含まれていてもよい。 A polyamic acid solution is obtained by reacting a diamine with a tetracarboxylic dianhydride in an organic solvent. A solvent may be added to the polyamic acid solution to adjust the concentration of the polyamic acid (solids concentration of the solution). The polyamic acid solution may contain additives for the purposes of promoting imidization by dehydration ring closure of the polyamic acid, or improving the storage stability (pot life) of the solution by suppressing imidization.
ポリアミド酸およびポリイミドに加工特性や各種機能性を付与するために、様々な有機または無機の低分子または高分子化合物を配合してもよい。例えば、ポリアミド酸溶液は、染料、界面活性剤、レベリング剤、可塑剤、微粒子、増感剤、シランカップリング剤等を含んでいてもよい。微粒子は、有機微粒子および無機微粒子のいずれでもよく、多孔質や中空構造であってもよい。 In order to impart processing properties and various functionalities to the polyamic acid and polyimide, various organic or inorganic low-molecular or high-molecular compounds may be blended. For example, the polyamic acid solution may contain dyes, surfactants, leveling agents, plasticizers, fine particles, sensitizers, silane coupling agents, etc. The fine particles may be either organic or inorganic fine particles, and may have a porous or hollow structure.
ポリアミド酸溶液にシランカップリング剤を配合することにより、ポリアミド酸の塗膜および脱水閉環により生成するポリイミド膜と基材との密着性が向上する傾向がある。シランカップリング剤の配合量は、ポリアミド酸100重量部に対して1.0重量部以下が好ましく、0.5重量部以下がより好ましく、0.1重量部以下がさらに好ましい。基材との密着性向上等を目的として、シランカップリング剤を配合する場合の配合量は、ポリアミド酸100重量部に対して0.01重量部以上であってもよい。シランカップリング剤は、ポリアミド酸溶液に添加してもよく、ポリアミド酸の重合反応前または重合反応中の溶液に添加してもよい。例えば、アミノ基を有するシランカップリング剤を用いることにより、ポリアミド酸の末端にシランカップリング剤に由来する構造を導入できる。ポリアミド酸の重合系にアミノ基を有するシランカップリング剤を添加する場合は、ポリアミド酸の分子量を高く保つために、ポリアミド酸(テトラカルボン酸二無水物とジアミンの合計)100重量部に対するシランカップリング剤の配合割合を1.0重量部以下とすることが好ましい。 By adding a silane coupling agent to the polyamic acid solution, the adhesion between the polyimide film formed by the dehydration ring closure and the substrate tends to be improved. The amount of the silane coupling agent is preferably 1.0 part by weight or less, more preferably 0.5 parts by weight or less, and even more preferably 0.1 parts by weight or less, per 100 parts by weight of polyamic acid. When the silane coupling agent is added for the purpose of improving the adhesion to the substrate, the amount may be 0.01 parts by weight or more per 100 parts by weight of polyamic acid. The silane coupling agent may be added to the polyamic acid solution, or may be added to the solution before or during the polymerization reaction of the polyamic acid. For example, by using a silane coupling agent having an amino group, a structure derived from the silane coupling agent can be introduced to the end of the polyamic acid. When adding a silane coupling agent having an amino group to the polymerization system of polyamic acid, in order to maintain a high molecular weight of the polyamic acid, it is preferable to set the mixing ratio of the silane coupling agent to 100 parts by weight of polyamic acid (total of tetracarboxylic dianhydride and diamine) to 1.0 part by weight or less.
(ポリイミドおよびポリイミド膜)
上記のポリアミド酸およびポリアミド酸溶液は、そのまま、製品や部材を作製するための材料として用いてもよく、バインダー樹脂や添加剤等を配合して、樹脂組成物を調製してもよい。耐熱性および機械特性に優れることから、ポリアミド酸を脱水閉環によりイミド化し、ポリイミドとして実用することが好ましい。脱水閉環は、共沸溶媒を用いた共沸法、熱的手法または化学的手法により行われる。溶液の状態でイミド化を行う場合は、イミド化剤および/または脱水触媒をポリアミド酸溶液に添加して、化学的イミド化を行うことが好ましい。ポリアミド酸溶液から溶媒を除去して膜状のポリアミド酸を形成し、膜状のポリアミド酸をイミド化する場合は、熱イミド化が好ましい。例えば、ガラス、シリコンウエハー、銅板やアルミ板等の金属板、PET(ポリエチレンテレフタレート)等のフィルム基材に、ポリアミド酸溶液を塗布して塗膜を形成した後、熱処理を行えばよい。
(Polyimide and polyimide films)
The polyamic acid and polyamic acid solution may be used as they are as materials for producing products or components, or may be mixed with binder resins, additives, etc. to prepare a resin composition. Since the polyamic acid has excellent heat resistance and mechanical properties, it is preferable to imidize the polyamic acid by dehydration ring closure and use it as a polyimide. The dehydration ring closure is performed by an azeotropic method using an azeotropic solvent, a thermal method, or a chemical method. When imidization is performed in a solution state, it is preferable to add an imidizing agent and/or a dehydration catalyst to the polyamic acid solution to perform chemical imidization. When the solvent is removed from the polyamic acid solution to form a film-like polyamic acid and the film-like polyamic acid is imidized, thermal imidization is preferable. For example, a polyamic acid solution may be applied to a film substrate such as glass, a silicon wafer, a metal plate such as a copper plate or an aluminum plate, or a film substrate such as PET (polyethylene terephthalate) to form a coating film, and then heat treatment may be performed.
ポリアミド酸溶液の基材への塗布は、グラビアコート法、スピンコート法、シルクスクリーン法、ディップコート法、バーコート法、ナイフコート法、ロールコート法、ダイコート法等の公知の方法により行い得る。イミド化の際の加熱温度および加熱時間は、適宜決定すればよい。加熱温度は、例えば80℃~500℃の範囲内である。 The polyamic acid solution can be applied to the substrate by known methods such as gravure coating, spin coating, silk screen, dip coating, bar coating, knife coating, roll coating, and die coating. The heating temperature and heating time during imidization can be appropriately determined. The heating temperature is, for example, within the range of 80°C to 500°C.
本発明のポリイミドは、透明性および熱寸法安定性に優れるため、ガラス代替用途の透明基板として使用可能であり、TFT基板材料、透明電極基板材料、印刷物、カラーフィルター、フレキシブルディスプレイ部材、反射防止膜、ホログラム、建築材料、構造物等への利用が期待される。特に、本発明のポリイミド膜は、熱寸法安定性に優れるため、TFT基板や電極基板等の電子デバイス透明基板として好適に用いられる。電子デバイスとしては、液晶表示装置、有機ELおよび電子ペーパー等の画像表示装置、タッチパネル、太陽電池等が挙げられる。これらの用途において、ポリイミド膜の厚みは、1~200μm程度であり、5~100μm程度が好ましい。 The polyimide of the present invention has excellent transparency and thermal dimensional stability, and can be used as a transparent substrate to replace glass, and is expected to be used in TFT substrate materials, transparent electrode substrate materials, printed matter, color filters, flexible display components, anti-reflection films, holograms, building materials, structures, etc. In particular, the polyimide film of the present invention has excellent thermal dimensional stability, and is therefore suitable for use as a transparent substrate for electronic devices such as TFT substrates and electrode substrates. Examples of electronic devices include image display devices such as liquid crystal displays, organic EL and electronic paper, touch panels, solar cells, etc. In these applications, the thickness of the polyimide film is about 1 to 200 μm, and preferably about 5 to 100 μm.
電子デバイスの製造プロセスでは、基板上に、薄膜トランジスタや透明電極等の電子素子が設けられる。フィルム基板上への素子の形成プロセスは、バッチタイプとロール・トゥ・ロールタイプに分けられる。ロール・トゥ・ロールプロセスでは、長尺のフィルム基板を搬送しながら、フィルム基板上に電子素子が順次設けられる。バッチプロセスでは、無アルカリガラス等の剛性基材上にフィルム基板を形成して積層体を形成し、積層体のフィルム基板上に電子素子を設けた後、フィルム基板から基材を剥離する。本発明のポリイミド膜はいずれのプロセスにも適用可能である。バッチプロセスは、現行のガラス基板用の設備を利用することができるため、コスト面で優位である。以下では、ガラス基材上にポリイミド膜が設けられた積層体を経由するポリイミド膜の製造方法の一例について説明する。 In the manufacturing process of electronic devices, electronic elements such as thin film transistors and transparent electrodes are provided on a substrate. The process of forming elements on a film substrate is divided into a batch type and a roll-to-roll type. In the roll-to-roll process, electronic elements are sequentially provided on a long film substrate while the film substrate is being transported. In the batch process, a film substrate is formed on a rigid substrate such as alkali-free glass to form a laminate, and electronic elements are provided on the film substrate of the laminate, after which the substrate is peeled off from the film substrate. The polyimide film of the present invention can be applied to either process. The batch process is advantageous in terms of cost because it can utilize existing equipment for glass substrates. Below, an example of a method for manufacturing a polyimide film via a laminate in which a polyimide film is provided on a glass substrate is described.
まず、基材にポリアミド酸溶液を塗布してポリアミド酸溶液の塗膜を形成し、基材と塗膜との積層体を40~200℃の温度で3~120分加熱することにより溶媒を乾燥してポリアミド酸膜を得る。例えば、50℃にて30分、続いて100℃にて30分のように、2段階以上の設定温度で乾燥を行ってもよい。この基材とポリアミド酸膜との積層体を加熱することにより、ポリアミド酸の脱水閉環によるイミド化を行う。イミド化のための加熱は、例えば温度200~500℃で行われ、加熱時間は例えば3分~300分である。イミド化のための加熱は、低温から徐々に高温にして、最高温度まで昇温することが好ましい。昇温速度は2~10℃/分が好ましく、4~10℃/分がより好ましい。加熱最高温度は380~500℃が好ましく、400~480℃がより好ましい。加熱最高温度が380℃以上であれば、十分にイミド化が進行し、高温プロセスに適応可能なポリイミドフィルムが得られる。加熱最高温度が500℃以下であれば、ポリイミドの熱劣化や着色を抑制できる。最高温度での加熱時間は、例えば、5分以上であり、380℃以上の温度での加熱時間は、5~60分が好ましい。加熱最高温度に到達するまでに任意の温度で任意の時間保持してもよい。 First, a polyamic acid solution is applied to a substrate to form a coating of the polyamic acid solution, and the substrate and coating are heated at a temperature of 40 to 200°C for 3 to 120 minutes to dry the solvent and obtain a polyamic acid film. For example, drying may be performed at two or more set temperatures, such as 30 minutes at 50°C and then 30 minutes at 100°C. By heating this substrate and polyamic acid film laminate, imidization is performed by dehydration ring closure of the polyamic acid. Heating for imidization is performed at a temperature of, for example, 200 to 500°C, and the heating time is, for example, 3 to 300 minutes. Heating for imidization is preferably performed by gradually increasing the temperature from a low temperature to the maximum temperature. The heating rate is preferably 2 to 10°C/min, more preferably 4 to 10°C/min. The maximum heating temperature is preferably 380 to 500°C, more preferably 400 to 480°C. If the maximum heating temperature is 380°C or higher, imidization proceeds sufficiently and a polyimide film that can be adapted to high-temperature processes is obtained. If the maximum heating temperature is 500°C or less, thermal degradation and coloration of the polyimide can be suppressed. The heating time at the maximum temperature is, for example, 5 minutes or more, and the heating time at a temperature of 380°C or more is preferably 5 to 60 minutes. Any temperature may be held for any time until the maximum heating temperature is reached.
イミド化は、空気下、減圧下、または窒素等の不活性ガス中のいずれで行ってもよい。透明性の高いポリイミド膜を得るためには、減圧下、または窒素等の不活性ガス中での加熱が好ましい。加熱装置としては、熱風オーブン、赤外オーブン、真空オーブン、イナートオーブン、ホットプレート等の公知の装置が用いられる。加熱時間の短縮や特性発現のために、イミド化剤や脱水触媒を添加したポリアミド酸溶液を上記のような方法で加熱してイミド化してもよい。 Imidization may be carried out in air, under reduced pressure, or in an inert gas such as nitrogen. To obtain a highly transparent polyimide film, heating under reduced pressure or in an inert gas such as nitrogen is preferred. Known heating devices such as hot air ovens, infrared ovens, vacuum ovens, inert ovens, and hot plates can be used. To shorten the heating time and to develop characteristics, a polyamic acid solution to which an imidizing agent or a dehydration catalyst has been added may be heated by the above-mentioned method to perform imidization.
バッチタイプのデバイス作製プロセスにおいては、基材と基材上に形成したポリイミド膜との界面に応力が残留すると、基材とポリイミド膜との積層体に反りが生じ、積層体上への素子の形成プロセスに支障をきたす場合がある。そのため、基材とポリイミド膜との積層体の界面の応力(内部応力)は小さいことが好ましい。具体的には、内部応力は、-30MPa以上70MPa以下が好ましく、-20MPa以上65MPa以下がより好ましい。内部応力は、ガラス板上にポリイミド膜を形成し、ポリイミド膜の形成前後のガラス板の反り(曲率半径)の変化に基づいて算出される。 In a batch-type device manufacturing process, if stress remains at the interface between the substrate and the polyimide film formed on the substrate, warping may occur in the laminate of the substrate and the polyimide film, which may interfere with the process of forming elements on the laminate. Therefore, it is preferable that the stress (internal stress) at the interface of the laminate of the substrate and the polyimide film is small. Specifically, the internal stress is preferably -30 MPa or more and 70 MPa or less, and more preferably -20 MPa or more and 65 MPa or less. The internal stress is calculated by forming a polyimide film on a glass plate and based on the change in warp (radius of curvature) of the glass plate before and after the formation of the polyimide film.
バッチプロセスにより基板上に電子素子を形成する場合は、ガラス等の基材上にポリイミド膜が設けられた積層体上に素子を形成した後、ポリイミド膜から基材を剥離することが好ましい。基材から剥離後のポリイミド膜上に素子を形成してもよい。 When forming electronic elements on a substrate by a batch process, it is preferable to form the elements on a laminate in which a polyimide film is provided on a substrate such as glass, and then peel the substrate from the polyimide film. Elements may be formed on the polyimide film after it has been peeled off from the substrate.
基材からポリイミド膜を剥離する方法は特に限定されない。例えば、手で引き剥がしてもよく、駆動ロール、ロボット等の剥離装置を用いてもよい。基材とポリイミド膜との密着性を低下させることにより剥離を行ってもよい。例えば、剥離層を設けた基材上にポリイミド膜を形成してもよい。多数の溝を有する基板上に酸化シリコン膜を形成し、エッチング液を浸潤させることにより剥離を促進してもよい。レーザー光の照射より剥離を行ってもよい。 The method for peeling the polyimide film from the substrate is not particularly limited. For example, it may be peeled off by hand, or a peeling device such as a drive roll or a robot may be used. Peeling may be performed by reducing the adhesion between the substrate and the polyimide film. For example, a polyimide film may be formed on a substrate provided with a peeling layer. A silicon oxide film may be formed on a substrate having a large number of grooves, and peeling may be promoted by infiltrating an etching solution. Peeling may also be performed by irradiation with laser light.
レーザー照射により基材とポリイミドを剥離する場合は、ポリイミド膜にレーザー光を吸収させる必要があるため、ポリイミド膜のカットオフ波長(透過率が0.1%以下となる波長)は、剥離に使用するレーザー光の波長よりも長波長であることが求められる。例えば、波長308nmのXeClエキシマレーザーを用いる場合は、ポリイミド膜のカットオフ波長は310nm以上が好ましく、320nm以上がより好ましい。波長355nmの固体UVレーザーを用いる場合は、ポリイミド膜のカットオフ波長は360nm以上が好ましく、365nm以上がより好ましい。 When peeling the substrate and polyimide by laser irradiation, the polyimide film must absorb the laser light, so the cutoff wavelength of the polyimide film (the wavelength at which the transmittance is 0.1% or less) must be longer than the wavelength of the laser light used for peeling. For example, when using a XeCl excimer laser with a wavelength of 308 nm, the cutoff wavelength of the polyimide film is preferably 310 nm or more, and more preferably 320 nm or more. When using a solid-state UV laser with a wavelength of 355 nm, the cutoff wavelength of the polyimide film is preferably 360 nm or more, and more preferably 365 nm or more.
一般的にポリイミドは短波長側の光を吸収しやすく、カットオフ波長が長波長側に移動すると可視光の吸収に起因して膜が黄色に着色する場合がある。本発明のポリイミドは、テトラカルボン酸二無水物成分におけるPMDAの比率を高めると、カットオフ波長が長波長側に移動する傾向がある。カットオフ波長が可視光領域に及ばない範囲で、テトラカルボン酸二無水物成分としてPMDAを含めることにより、透明性および熱寸法安定性に加えて、UVレーザーによる剥離プロセスに適した紫外線吸収特性を持たせることができる。ポリイミド膜のカットオフ波長は390nm以下が好ましく、385nm以下がより好ましく、380nm以下がさらに好ましい。 Generally, polyimides tend to absorb light on the short wavelength side, and when the cutoff wavelength shifts to the long wavelength side, the film may become yellow due to the absorption of visible light. In the polyimide of the present invention, when the ratio of PMDA in the tetracarboxylic dianhydride component is increased, the cutoff wavelength tends to shift to the long wavelength side. By including PMDA as a tetracarboxylic dianhydride component within a range where the cutoff wavelength does not reach the visible light region, it is possible to provide ultraviolet absorption characteristics suitable for a peeling process using a UV laser in addition to transparency and thermal dimensional stability. The cutoff wavelength of the polyimide film is preferably 390 nm or less, more preferably 385 nm or less, and even more preferably 380 nm or less.
透明フレキシブル基板用途において、ポリイミド膜は可視光の全波長領域で透過率が高いことが要求される。透明フレキシブル基板用のポリイミド膜は、波長450nmにおける光透過率が75%以上であることが好ましく、80%以上であることがより好ましい。本発明のポリイミドは、膜厚が10μmのフィルムを形成した際の光透過率が上記範囲であることが好ましい。 When used for transparent flexible substrates, polyimide films are required to have high transmittance over the entire wavelength range of visible light. Polyimide films for transparent flexible substrates preferably have a light transmittance of 75% or more at a wavelength of 450 nm, and more preferably 80% or more. The polyimide of the present invention preferably has a light transmittance in the above range when formed into a film with a thickness of 10 μm.
ポリイミド膜の透明性は、例えば、JIS K7105-1981に従った全光線透過率およびヘイズによって評価することもできる。ポリイミド膜の全光線透過率は、80%以上が好ましく、85%以上がより好ましい。また、450nmの光透過率が75%以上であることが好ましく、80%以上であることがより好ましい。ポリイミド膜のヘイズは、1.2%以下が好ましく、1.0%以下がより好ましく、0.8%以下がさらに好ましい。本発明のポリイミドは、膜厚が10μmのフィルムを形成した際の全光線透過率およびヘイズが上記範囲であることが好ましい。前述のように、テトラカルボン酸に無水物成分としてBPAFを含むことにより、ポリイミド膜のヘイズが低減する傾向がある。 The transparency of the polyimide film can also be evaluated, for example, by the total light transmittance and haze according to JIS K7105-1981. The total light transmittance of the polyimide film is preferably 80% or more, more preferably 85% or more. The light transmittance at 450 nm is preferably 75% or more, more preferably 80% or more. The haze of the polyimide film is preferably 1.2% or less, more preferably 1.0% or less, and even more preferably 0.8% or less. The polyimide of the present invention preferably has a total light transmittance and haze in the above ranges when a film having a thickness of 10 μm is formed. As described above, the haze of the polyimide film tends to be reduced by including BPAF as an anhydride component in the tetracarboxylic acid.
高温プロセスに適用するために、ポリイミド膜は、ガラス転移温度が高いことが好ましい。具体的には、ポリイミド膜のガラス転移温度は380℃以上が好ましく、400℃以上がより好ましい。ポリイミド膜のガラス転移温度は、動的粘弾性測定による損失正接が最大となる温度であり、後述の実施例に記載の方法により測定される。ポリイミド膜は、昇温時の熱膨張係数(CTE)が小さいことが好ましい。ポリイミド膜のCTEは、-50~100ppm/Kが好ましく、-30~90ppm/Kがさらに好ましく、-20~80ppm/Kが特に好ましい。CTEは、60ppm/K以下、50ppm/K以下、40ppm/K以下または30ppm/K以下であってもよく、-10ppm/K以上または0ppm/K以上であってもよい。CTEは、ポリイミド膜を昇温速度10℃/分で加熱した際の、100~350℃の範囲での単位温度あたりの試料の歪み量であり、熱機械分析(TMA)により、後述の実施例に記載の方法により測定される。 In order to apply to high-temperature processes, it is preferable that the polyimide film has a high glass transition temperature. Specifically, the glass transition temperature of the polyimide film is preferably 380°C or higher, and more preferably 400°C or higher. The glass transition temperature of the polyimide film is the temperature at which the loss tangent by dynamic viscoelasticity measurement is maximum, and is measured by the method described in the Examples below. It is preferable that the polyimide film has a small coefficient of thermal expansion (CTE) when heated. The CTE of the polyimide film is preferably -50 to 100 ppm/K, more preferably -30 to 90 ppm/K, and particularly preferably -20 to 80 ppm/K. The CTE may be 60 ppm/K or less, 50 ppm/K or less, 40 ppm/K or less, or 30 ppm/K or less, or may be -10 ppm/K or more, or 0 ppm/K or more. CTE is the amount of distortion of a sample per unit temperature in the range of 100 to 350°C when the polyimide film is heated at a heating rate of 10°C/min, and is measured by thermomechanical analysis (TMA) using the method described in the Examples below.
厚み方向位相差は低い方が好ましい。ポリイミドは、膜厚が10μmのフィルムの550nmにおける厚み方向位相差(Rth)は500nm以下が好ましく、300nm以下がさらに好ましく、200nm以下が特に好ましい。 A low thickness direction retardation is preferable. For polyimide, the thickness direction retardation (Rth) at 550 nm for a film having a thickness of 10 μm is preferably 500 nm or less, more preferably 300 nm or less, and particularly preferably 200 nm or less.
[評価方法]
材料特性値等は以下の評価法により測定した。
[Evaluation method]
The material properties and the like were measured by the following evaluation methods.
<内部応力(Internal stress)>
あらかじめ反り量を計測したコーニング製の無アルカリガラス(厚み0.7mm、100mm×100mm)上に、実施例および比較例と同様の方法でポリイミド膜を形成し、ガラス上に厚み10μmのポリイミド膜を備える積層体を得た。積層体をデシケーター内で10分間静置した後、薄膜応力測定装置(テンコール製)「FLX-2320-S」)にセットし、25℃の窒素雰囲気下で積層体の反り量を測定した。反り量の値から25℃におけるガラス基板とポリイミド膜の間に生じた応力を算出した。
<Internal stress>
A polyimide film was formed on Corning alkali-free glass (thickness 0.7 mm, 100 mm x 100 mm) whose warpage had been measured in advance, in the same manner as in the Examples and Comparative Examples, to obtain a laminate having a 10 μm-thick polyimide film on the glass. The laminate was left to stand in a desiccator for 10 minutes, and then set in a thin film stress measurement device (manufactured by Tencor, "FLX-2320-S"), and the warpage of the laminate was measured in a nitrogen atmosphere at 25°C. The stress generated between the glass substrate and the polyimide film at 25°C was calculated from the warpage value.
<ポリイミド膜の光透過率およびYI>
日本分光製紫外可視近赤外分光光度計(V-650)を用いて、ポリイミド膜の200~800nmにおける光透過率を測定した。透過率をXYZ表色系で表し、JIS K7373に記載の方法によってYIを算出した。
<Light transmittance and YI of polyimide film>
The light transmittance of the polyimide film was measured in the range of 200 to 800 nm using a JASCO ultraviolet-visible-near infrared spectrophotometer (V-650). The transmittance was expressed in the XYZ color system, and YI was calculated according to the method described in JIS K7373.
<ポリイミド膜のヘイズ>
日本電色工業製積分球式ヘイズメーター300Aを用い、JIS K7105-1981記載の方法により測定した。
<Haze of polyimide film>
The haze was measured by the method described in JIS K7105-1981 using an integrating sphere type haze meter 300A manufactured by Nippon Denshoku Industries Co., Ltd.
<ポリイミドの複屈折>
シンテック社製位相差計:OPTIPROにて、測定波長550nmにおける厚み方向位相差(Rth)の値を測定した。
<Birefringence of Polyimide>
The thickness direction retardation (Rth) value was measured at a measurement wavelength of 550 nm using a retardation meter: OPTIPRO manufactured by Shintech Co., Ltd.
<ポリイミド膜のガラス転移温度(Tg)>
Tgの測定は、日立ハイテクサイエンス社製TMA/SS7100を用いて(サンプルサイズ 幅3mm、長さ10mm、膜厚を測定し、フィルムの断面積を算出)、荷重98.0mNとし、10℃/minで10℃から450℃まで昇温させた。昇温過程における試料の歪の変化量の変曲点をガラス転移温度とした。
<Glass transition temperature (Tg) of polyimide film>
The Tg was measured using a Hitachi High-Tech Science TMA/SS7100 (sample size: width 3 mm, length 10 mm, film thickness was measured, and cross-sectional area of the film was calculated) with a load of 98.0 mN and the temperature was raised from 10° C. to 450° C. at 10° C./min. The inflection point of the change in the strain of the sample during the temperature rise process was taken as the glass transition temperature.
<ポリイミド膜の熱膨張係数(CTE)>
線熱膨張係数の測定は、日立ハイテクサイエンス社製TMA/SS7100を用いて(サンプルサイズ 幅3mm、長さ10mm、膜厚を測定し、フィルムの断面積を算出)、荷重29.4mNとし、10℃/minで10℃から400℃まで一旦昇温させた後、40℃/minで降温させたときの、降温時の100~350℃における単位温度あたりの試料の歪の変化量から線膨張係数を求めた。
<Coefficient of Thermal Expansion (CTE) of Polyimide Film>
The linear thermal expansion coefficient was measured using a Hitachi High-Tech Science TMA/SS7100 (sample size: width 3 mm, length 10 mm; film thickness was measured and the cross-sectional area of the film was calculated) with a load of 29.4 mN. The sample was heated from 10° C. to 400° C. at 10° C./min, and then cooled at 40° C./min. The linear expansion coefficient was calculated from the change in strain of the sample per unit temperature from 100 to 350° C. during cooling.
[ポリアミド酸の合成]
下記の製造例1~4により、ポリアミド酸溶液1~4を得た。各製造例において用いた試薬の略称は以下の通りである。
NMP:1-メチル-2-ピロリドン
BPDA:3,3'-4,4'-ビフェニルテトラカルボン酸二無水物
PMDA:ピロメリット酸二無水物
BPAF:9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物
TFMB:2,2-ビス(トリフルオロメチル)ベンジジン
[Synthesis of polyamic acid]
Polyamic acid solutions 1 to 4 were obtained according to the following Production Examples 1 to 4. The abbreviations of the reagents used in each Production Example are as follows.
NMP: 1-methyl-2-pyrrolidone BPDA: 3,3'-4,4'-biphenyltetracarboxylic dianhydride PMDA: pyromellitic dianhydride BPAF: 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride TFMB: 2,2-bis(trifluoromethyl)benzidine
(実施例1)
ステンレス製撹拌棒を備えた撹拌機および窒素導入管を装着した1Lのガラス製セパラブルフラスコに、N-メチル-2-ピロリドン(以下、NMPと称する)425.00g、およびTFMB39.0gを仕込み、撹拌して溶解させた後、溶液を撹拌しながら、BPDA13.6g、PMDA11.2g、およびBPAF11.2gを順に加えて24時間撹拌し、ポリアミド酸溶液を得た。この反応溶液におけるジアミン成分およびテトラカルボン酸二無水物成分の仕込み濃度は、反応溶液全量に対して15.0重量%であった。
Example 1
In a 1 L glass separable flask equipped with a stirrer equipped with a stainless steel stirring rod and a nitrogen inlet tube, 425.00 g of N-methyl-2-pyrrolidone (hereinafter referred to as NMP) and 39.0 g of TFMB were charged and dissolved by stirring, and then 13.6 g of BPDA, 11.2 g of PMDA, and 11.2 g of BPAF were added in that order while stirring the solution, and the mixture was stirred for 24 hours to obtain a polyamic acid solution. The charged concentrations of the diamine component and tetracarboxylic dianhydride component in this reaction solution were 15.0 wt % relative to the total amount of the reaction solution.
(実施例2)
ジアミンの仕込み量をTFMB38.9gに変更し、酸二無水物の仕込み量をBPDA14.4g、PMDA10.6g、およびBPAF11.1gに変更して、実施例1と同様にして重合を行い、ポリアミド酸溶液を得た。
Example 2
The amount of the diamine charged was changed to 38.9 g of TFMB, and the amounts of the acid dianhydrides charged were changed to 14.4 g of BPDA, 10.6 g of PMDA, and 11.1 g of BPAF, and polymerization was carried out in the same manner as in Example 1 to obtain a polyamic acid solution.
(実施例3)
ジアミンの仕込み量をTFMB38.0gに変更し、酸二無水物の仕込み量をBPDA20.9g、PMDA5.2g、およびBPAF10.9gに変更して、実施例1と同様にして重合を行い、ポリアミド酸溶液を得た。
Example 3
The amount of the diamine charged was changed to 38.0 g of TFMB, and the amounts of the acid dianhydrides charged were changed to 20.9 g of BPDA, 5.2 g of PMDA, and 10.9 g of BPAF, and polymerization was carried out in the same manner as in Example 1 to obtain a polyamic acid solution.
(実施例4)
ジアミンの仕込み量をTFMB39.9gに変更し、酸二無水物の仕込み量をBPDA7.4g、PMDA16.3g、およびBPAF11.4gに変更して、実施例1と同様にして重合を行い、ポリアミド酸溶液を得た。
Example 4
The amount of the diamine charged was changed to 39.9 g of TFMB, and the amounts of the acid dianhydrides charged were changed to 7.4 g of BPDA, 16.3 g of PMDA, and 11.4 g of BPAF, and polymerization was carried out in the same manner as in Example 1 to obtain a polyamic acid solution.
(比較例1)
ジアミンの仕込み量をTFMB37.1gに変更し、酸二無水物の仕込み量をBPDA27.3gおよびBPAF10.6gに変更して、実施例1と同様にして重合を行い、ポリアミド酸溶液を得た。
(Comparative Example 1)
The amount of the diamine charged was changed to 37.1 g of TFMB, and the amounts of the acid dianhydrides charged were changed to 27.3 g of BPDA and 10.6 g of BPAF, and polymerization was carried out in the same manner as in Example 1 to obtain a polyamic acid solution.
(比較例2)
ジアミンの仕込み量をTFMB41.0gに変更し、酸二無水物の仕込み量をPMDA22.3gおよびBPAF11.7gに変更して、実施例1と同様にして重合を行い、ポリアミド酸溶液を得た。
(Comparative Example 2)
The amount of the diamine charged was changed to 41.0 g of TFMB, and the amounts of the acid dianhydrides charged were changed to 22.3 g of PMDA and 11.7 g of BPAF, and polymerization was carried out in the same manner as in Example 1 to obtain a polyamic acid solution.
[ポリイミド膜の作製]
上記の実施例および比較例で得られたポリアミド酸溶液のそれぞれに、NMPを加えてポリアミド酸濃度が10.0重量%となるように希釈した。スピンコーターを用いて、150mm×150mmの正方形の無アルカリガラス板(コーニング製 イーグルXG、厚さ0.7mm)上に、乾燥後の厚みが10μmになるようにポリアミド酸溶液を塗布し、熱風オーブン内で80℃にて30分乾燥してポリアミド酸膜を形成した。窒素雰囲気下で20℃から350℃まで5℃/分で昇温した後、350℃で30分間保持し、さらに420℃まで5℃/分で昇温した後、420℃で30分間加熱してイミド化を行い、厚みが10μmのポリイミド膜とガラスとの積層体を得た。得られた積層体のガラス基材からポリイミド膜を剥離して、特性の評価を行った。
[Preparation of polyimide film]
Each of the polyamic acid solutions obtained in the above examples and comparative examples was diluted with NMP to a polyamic acid concentration of 10.0 wt%. A polyamic acid solution was applied to a square alkali-free glass plate (Corning Eagle XG, thickness 0.7 mm) of 150 mm x 150 mm using a spin coater so that the thickness after drying was 10 μm, and dried in a hot air oven at 80 ° C. for 30 minutes to form a polyamic acid film. After heating from 20 ° C. to 350 ° C. at 5 ° C. / min under a nitrogen atmosphere, it was held at 350 ° C. for 30 minutes, and further heated to 420 ° C. at 5 ° C. / min, and then heated at 420 ° C. for 30 minutes to perform imidization, and a laminate of a polyimide film and glass with a thickness of 10 μm was obtained. The polyimide film was peeled off from the glass substrate of the obtained laminate, and the properties were evaluated.
テトラカルボン酸二無水物成分としてPMDAを含まない比較例1のポリイミド膜は、ガラス転移温度が低く、CTEが大きく熱寸法安定性が劣っていた。 The polyimide film of Comparative Example 1, which did not contain PMDA as a tetracarboxylic dianhydride component, had a low glass transition temperature, a large CTE, and poor thermal dimensional stability.
テトラカルボン酸二無水物成分としてBPDAを含まない比較例2のポリイミド膜は、YIが高く透明性が劣っており、Rthが大きく劣っていた。 The polyimide film of Comparative Example 2, which did not contain BPDA as a tetracarboxylic dianhydride component, had a high YI, poor transparency, and a significantly poor Rth.
実施例1、実施例3および実施例4では、テトラカルボン酸二無水物のPMDAの比率が高いほど、Rthが大きくなる傾向がみられた。一方、PMDAを含まない比較例1では、実施例1、3に比べてCTEの大幅な増加およびTgの低下がみられた。これらの結果から、テトラカルボン酸二無水物として、BPDAとPMDAに加えて、BPAFを含めることにより、ポリマーの分子内および/または分子間の相互作用に変化が生じ、高透明性および熱寸法安定性を発揮すると考えられる。 In Examples 1, 3, and 4, the higher the ratio of PMDA in the tetracarboxylic dianhydride, the greater the tendency for Rth to be. On the other hand, in Comparative Example 1, which did not contain PMDA, a significant increase in CTE and decrease in Tg were observed compared to Examples 1 and 3. From these results, it is believed that the inclusion of BPAF in addition to BPDA and PMDA as the tetracarboxylic dianhydride causes changes in the intramolecular and/or intermolecular interactions of the polymer, resulting in high transparency and thermal dimensional stability.
Claims (12)
前記ジアミンが、2,2’-ビストリフルオロメチルベンジジンを含み、シリコーンジアミンを含まず、
前記テトラカルボン酸二無水物が、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、ピロメリット酸無水物および9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物を含み、
前記テトラカルボン酸二無水物全量に対する前記9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物の量が15mol%以上60mol%以下であり、
前記テトラカルボン酸二無水物全量に対する前記ピロメリット酸無水物の量が20mol%以上40mol%以下であり、
前記テトラカルボン酸二無水物全量に対する前記3,3’,4,4’-ビフェニルテトラカルボン酸二無水物の量が20mol%以上60mol%以下であり、
前記ジアミン全量に対する前記2,2’-ビストリフルオロメチルベンジジンの量が90mol%以上である、ポリアミド酸。 A polyamic acid which is a polyaddition reaction product of a diamine and a tetracarboxylic dianhydride,
the diamine comprises 2,2'-bistrifluoromethylbenzidine and does not comprise a silicone diamine;
The tetracarboxylic dianhydride includes 3,3',4,4'-biphenyltetracarboxylic dianhydride, pyromellitic anhydride, and 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride;
the amount of the 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride relative to the total amount of the tetracarboxylic dianhydride is 15 mol % or more and 60 mol % or less;
The amount of the pyromellitic anhydride relative to the total amount of the tetracarboxylic dianhydride is 20 mol % or more and 40 mol % or less,
the amount of the 3,3',4,4'-biphenyltetracarboxylic dianhydride relative to the total amount of the tetracarboxylic dianhydride is 20 mol % or more and 60 mol % or less;
The amount of the 2,2'-bistrifluoromethylbenzidine relative to the total amount of the diamines is 90 mol % or more .
前記ジアミンが、2,2’-ビストリフルオロメチルベンジジンを含み、シリコーンジアミンを含まず、
前記テトラカルボン酸二無水物が、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、ピロメリット酸無水物および9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物を含み、
前記テトラカルボン酸二無水物全量に対する前記9,9’-(3,4’-ジカルボキシフェニル)フルオレン酸二無水物の量が15mol%以上60mol%以下であり、
前記テトラカルボン酸二無水物全量に対する前記ピロメリット酸無水物の量が20mol%以上40mol%以下であり、
前記テトラカルボン酸二無水物全量に対する前記3,3’,4,4’-ビフェニルテトラカルボン酸二無水物の量が20mol%以上60mol%以下であり、
前記ジアミン全量に対する前記2,2’-ビストリフルオロメチルベンジジンの量が90mol%以上である、ポリイミド。 A polyimide which is a polycondensation reaction product of a diamine and a tetracarboxylic dianhydride,
the diamine comprises 2,2'-bistrifluoromethylbenzidine and does not comprise a silicone diamine;
The tetracarboxylic dianhydride includes 3,3',4,4'-biphenyltetracarboxylic dianhydride, pyromellitic anhydride, and 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride;
the amount of the 9,9'-(3,4'-dicarboxyphenyl)fluorene dianhydride relative to the total amount of the tetracarboxylic dianhydride is 15 mol % or more and 60 mol % or less;
The amount of the pyromellitic anhydride relative to the total amount of the tetracarboxylic dianhydride is 20 mol % or more and 40 mol % or less,
the amount of the 3,3',4,4'-biphenyltetracarboxylic dianhydride relative to the total amount of the tetracarboxylic dianhydride is 20 mol % or more and 60 mol % or less;
The amount of the 2,2'-bistrifluoromethylbenzidine relative to the total amount of the diamines is 90 mol % or more .
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