JP7651504B2 - Panel storage container - Google Patents

Description

This disclosure relates to a panel storage container.

In manufacturing processes that handle panels such as glass substrates for liquid crystal panels, panel storage containers that store multiple panels are used when transferring rectangular panels from a manufacturing device to another manufacturing device for a different process, and when temporarily storing the panels. For example, Patent Document 1 describes a panel storage container that includes a container body that stores multiple panels and a panel support means that supports the panels. The panel support means includes a central support member that supports the center of the panel, and the central support member is supported by fitting the base end of the central support member into a circular hole-shaped fitting recess provided in the support.

JP 2019-31297 A

In the panel storage container described in Patent Document 1, a gap may occur between the base end and the fitting recess due to dimensional tolerances, etc. If this gap is large, the central support member may tilt when it is fixed to the support column using a bolt or the like. For example, if the central support member tilts in the vertical direction, the distance between two central support members adjacent to each other in the vertical direction becomes smaller than the design value. When a panel is carried between these two central support members, or when a panel is carried out from between these two central support members, the panel may interfere with the central support member, causing damage to the panel.

This disclosure provides a panel storage container that can prevent damage to panels.

A panel storage container according to one aspect of the present disclosure includes a container body for storing a plurality of panels arranged in a first direction, and a panel support section provided inside the container body and supporting the plurality of panels. The panel support section includes a shaft extending in a second direction intersecting the first direction for supporting one of the plurality of panels. The shaft has an end in the second direction. The container body includes a support for fixing the shaft. The support has a first member and a second member for clamping the end in a third direction intersecting the first and second directions. The first member is provided with a first groove that is recessed in a direction away from the second member in the third direction and extends in the second direction. The second member is provided with a second groove that is recessed in a direction away from the first member in the third direction and extends in the second direction. The shaft is fixed by clamping the end in the third direction between the first member and the second member with the end accommodated in the first groove and the second groove.

In this panel storage container, the shaft is fixed by clamping the end in the third direction between the first and second members while the end is housed in the first and second grooves. When the end is clamped between the first and second members, even if the force with which the first member presses the end in the third direction and the force with which the second member presses the end in the third direction are not uniform over the entire end, the end may tilt in the third direction, but tilting of the end in the first direction is suppressed. Therefore, tilting of the shaft in the first direction can be suppressed. As a result, when a panel is transported to or removed from this panel storage container, the possibility of the panel interfering with the shaft can be reduced, and damage to the panel can be suppressed.

In some embodiments, the inner circumferential surface of the first groove may include a first inclined surface and a second inclined surface that are inclined so as to move away from each other in the first direction as the inner circumferential surface approaches the second member in the third direction, and the end portion may be in contact with the first inclined surface and the second inclined surface while being clamped in the third direction by the first member and the second member. When the end portion is clamped in the third direction by the first member and the second member, the first member presses the end portion in the third direction. At this time, since the end portion is in contact with the first inclined surface and the second inclined surface, the end portion receives a force from the first inclined surface in a direction perpendicular to the first inclined surface, and receives a force from the second inclined surface in a direction perpendicular to the second inclined surface. Since the first inclined surface and the second inclined surface are inclined so as to move away from each other in the first direction as the inner circumferential surface approaches the second member in the third direction, the component of the force in the first direction that the end portion receives from the first inclined surface and the component of the force in the first direction that the end portion receives from the second inclined surface are in opposite directions. Therefore, the movement of the end in the first direction is restricted, so the end can be prevented from tilting in the first direction, and the shaft can be prevented from tilting in the first direction. As a result, damage to the panel can be prevented.

In some embodiments, the inner circumferential surface of the first groove may include a first side surface and a second side surface facing each other in the first direction, and the end portion may be in contact with the first side surface and the second side surface while being sandwiched in the third direction by the first member and the second member. In this case, the end portion is sandwiched between the first side surface and the second side surface in the first direction. Therefore, since the movement of the end portion in the first direction is restricted, the end portion can be prevented from tilting in the first direction, and the shaft can be prevented from tilting in the first direction. As a result, damage to the panel can be prevented.

In some embodiments, the inner circumferential surface of the first groove may include a bottom portion that is farthest from the second member in the third direction, and the end portion may be in contact with the bottom portion while being clamped in the third direction by the first member and the second member. In this case, the force with which the first member presses the end portion in the third direction acts from the bottom portion to the end portion with almost no decomposition. As a result, the maximum static friction force in the first direction is increased, and the end portion is prevented from moving in the first direction. Therefore, the end portion can be prevented from tilting in the first direction, and the shaft can be prevented from tilting in the first direction. As a result, damage to the panel can be prevented.

In some embodiments, the first groove may have a shape that follows the end portion. In this case, when the end portion is clamped in the third direction by the first member and the second member, the gap between the inner peripheral surface of the first groove and the outer peripheral surface of the end portion can be made small. This makes it possible to prevent the end portion from tilting in the first direction, and therefore to prevent the shaft from tilting in the first direction. As a result, damage to the panel can be suppressed.

In some embodiments, the first member may be spaced apart from the second member with the end portion being clamped in the third direction by the first member and the second member. For example, if the first member and the second member are in contact in the third direction with the end portion being clamped in the third direction by the first member and the second member, the first member and the second member cannot be brought closer together in the third direction. In such a case, the clamping force of the first member and the second member may not be sufficiently applied to the end portion. According to the above configuration, since the first member and the second member are spaced apart, a sufficient clamping force can be applied to the end portion without interference between the first member and the second member in the third direction.

In some embodiments, the first member may have a protrusion that protrudes from the inner circumferential surface of the first groove in a direction intersecting the second direction, and a recess in which the protrusion is housed may be provided at the end. With this configuration, even if a force is applied to the shaft in the second direction, the protrusion interferes with the recess, restricting movement of the shaft in the second direction. This reduces the possibility of the shaft falling off the support.

In some embodiments, the first member may have a first conductive member having a first groove and a first body portion that holds the first conductive member. The second member may have a second conductive member having a second groove and a second body portion that holds the second conductive member. The resistance value of the first conductive member may be greater than the resistance value of the shaft and the resistance value of the first body portion. The resistance value of the second conductive member may be greater than the resistance value of the shaft and the resistance value of the second body portion. In this case, the end of the shaft is sandwiched in the third direction by the first member and the second member while being accommodated in the first groove provided in the first conductive member and the second groove provided in the second conductive member. That is, the shaft is fixed to the support via the first conductive member and the second conductive member. Therefore, the resistance value of the path from the shaft to the first body portion and the second body portion is larger than that in a configuration in which the shaft is directly fixed to the support without the first conductive member and the second conductive member. This makes it possible to suppress the occurrence of electrostatic discharge when a charged panel is placed on the shaft. On the other hand, since the first conductive member and the second conductive member are conductive, current can flow from the panel placed on the shaft through the shaft, the first conductive member, and the first main body, or through the shaft, the second conductive member, and the second main body. This makes it possible to neutralize the panel. As a result, it is possible to neutralize the panel while suppressing the occurrence of electrostatic discharge.

This disclosure makes it possible to prevent damage to the panel.

FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. FIG. 2 is a cross-sectional view taken along line II-II of FIG. FIG. 3 is a diagram for explaining a manner in which the shaft is fixed to the support. FIG. 4 is an exploded perspective view of the support and post shown in FIG. FIG. 5 is a cross-sectional view taken along line VV in FIG. 6(a), 6(b), and 6(c) are diagrams showing modified examples of the support columns. FIG. 7 shows another modified example of the support pillar.

Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated descriptions are omitted. Each figure shows an XYZ coordinate system. The Y-axis direction is a direction that intersects (here, perpendicular to) the X-axis direction and the Z-axis direction. The Z-axis direction is a direction that intersects (here, perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction; third direction), the Y-axis direction is the front-back direction (depth direction; second direction), and the Z-axis direction is the up-down direction (height direction; first direction). For convenience of description, the terms "front", "rear", "up", "down", "left", and "right" are used, but are not limited to these directions.

A panel storage container according to one embodiment will be described with reference to FIG. 1. FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. The panel storage container 1 shown in FIG. 1 is a container for storing a plurality of panels. The panel storage container 1 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panel has a rectangular shape. Examples of panel sizes include 510 mm x 515 mm and 600 mm x 600 mm. The number of panels that can be stored in the panel storage container 1 is determined arbitrarily, and may be, for example, 6, 12, 16, or 24.

The panel storage container 1 is used, for example, in a manufacturing device that manufactures electronic component assemblies. Electronic component assemblies are manufactured through a process that involves mounting a large number of electronic components on a large carrier panel, such as a glass plate or a stainless steel plate, sealing these electronic components with epoxy resin or the like, peeling the sealed electronic components from the carrier panel in panel form, and cutting out the panel-form electronic components individually. The panel storage container 1 is used to transport panels between these processes.

The panel storage container 1 comprises a container body 2 and a lid body 3.

The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 stores multiple panels. Specifically, the container body 2 stores multiple panels arranged in the vertical direction. The panels are inserted into and removed from the container body 2 via the opening 2a. Details of the container body 2 will be described later.

The lid body 3 is a member for closing the opening 2a of the container body 2. The lid body 3 airtightly closes the opening 2a of the container body 2 via a sealing member such as a gasket. The lid body 3 is detachably attached to the flange 25 that defines the opening 2a. The lid body 3 includes a lid body 31 and a locking mechanism 32. The lid body 31 is the main body of the lid body 3. The lid body 31 is a rectangular plate material. The lid body 31 is made of a metal material such as aluminum or magnesium alloy. The lid body 31 may be made of a thermoplastic resin such as polycarbonate resin. A keyhole 33 is provided on the front of the lid body 31. A key (not shown) is inserted into the keyhole 33.

The locking mechanism 32 locks or unlocks the lid body 3 by operating a key inserted in the keyhole 33. The locking mechanism 32 is equipped with a latch (not shown). With the lid body 3 attached to the flange 25, the latch is inserted into the locking hole 25h provided in the flange 25 by operating the key, thereby locking the lid body 3. With the lid body 3 locked, the latch is pulled out of the locking hole 25h by operating the key, thereby unlocking the lid body 3.

The container body 2 and the lid 3 are constructed by combining multiple parts molded from metal or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these may be used as the resins contained in the molding material of the resin material.

Conductive materials and various antistatic agents may be added to these resins. The conductive materials may be, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. As the antistatic agent, anionic, cationic, and nonionic antistatic agents may be used. Benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine ultraviolet absorbers may be added. Glass fibers or carbon fibers that improve rigidity may also be selectively added.

Next, the container body 2 will be described in detail. The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, a flange 25, a frame 26, a base portion 27, and a side plate 28.

The top plate 21, bottom plate 22, side walls 23, and rear wall 24 are rectangular plate materials. The top plate 21 and bottom plate 22 face each other in the up-down direction and are arranged approximately parallel. The pair of side walls 23 face each other in the left-right direction and are arranged approximately parallel. The rear wall 24 connects the rear end of the top plate 21 to the rear end of the bottom plate 22, and also connects the rear ends of the pair of side walls 23. The storage space 20 is defined by the top plate 21, bottom plate 22, the pair of side walls 23, and rear wall 24.

The top plate 21, bottom plate 22, and side walls 23 are made of, for example, a metal material such as aluminum or stainless steel. The rear wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be viewed from outside the container body 2. A portion of the rear wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, polyvinyl chloride resin, and cycloolefin polymer.

The flange 25 is a rectangular frame body that is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. The flange 25 is made of, for example, the above-mentioned resin material or a metal material such as aluminum or stainless steel. The upper and lower frame portions of the flange 25 each have two locking holes 25h that are spaced apart in the left-right direction. The locking holes 25h in the upper frame portion and the locking holes 25h in the lower frame portion are provided in positions that face each other in the up-down direction.

The frame body 26 is used to fix the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24. The frame body 26, except for the conductive member 66c and the conductive member 67c described below, is made of a metal material such as aluminum or stainless steel. The frame body 26 is provided on the front surface of the rear wall 24. The frame body 26 has a frame portion 26a (see FIG. 2), a support 26b (see FIG. 2), and a pair of support columns 26c (see FIG. 2). The frame portion 26a is a rectangular member and is provided along the periphery of the rear wall 24.

The pillar 26b and the pair of pillars 26c are columnar members extending in the up-down direction. The one pillar 26c, the pillar 26b, and the other pillar 26c are arranged in that order in the left-right direction and are disposed approximately parallel to each other. The pillar 26b and the pair of pillars 26c extend from the upper frame portion to the lower frame portion of the frame portion 26a. The pillar 26b is provided in the center of the frame body 26 in the left-right direction, and the pair of pillars 26c are provided near both ends of the frame body 26 in the left-right direction.

The support pillar 26b is a member for fixing the shaft 61a, which will be described later. The specific configuration of the support pillar 26b will be described later. The support pillar 26c is a member for fixing the shaft 62a, which will be described later. The support pillar 26c has multiple fitting holes for attaching the shaft 62a. These fitting holes are recessed from the front surface of the support pillar 26c toward the rear.

The pedestal portion 27 is the base of the container body 2. The pedestal portion 27 is made of a metal material such as aluminum or stainless steel. The pedestal portion 27 is provided on the underside of the bottom plate 22. The pedestal portion 27 is made by combining multiple columnar support members.

The side plate 28 is a member for attaching the support body 65 described below. The side plate 28 is a plate-shaped member extending in the vertical direction. The side plate 28 is made of a metal material such as aluminum or stainless steel. The side plate 28 is provided on the outer surface of the side wall 23. In this embodiment, two side plates 28 are provided on each side wall 23. The two side plates 28 are arranged in the front-rear direction and are disposed approximately parallel to each other. One side plate 28 is provided near the center of the side wall 23 in the front-rear direction, and the other side plate 28 is provided near the front end of the side wall 23 in the front-rear direction.

Cover members are provided at the corners of the container body 2 to prevent particles from entering the storage space 20.

Next, the configuration inside the storage space 20 will be described with reference to FIG. 2. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. As shown in FIG. 2, the panel storage container 1 further includes a panel support portion 60. The panel support portion 60 is a portion for supporting multiple panels. The panel support portion 60 is provided inside the container body 2 (storage space 20). The panel support portion 60 includes multiple support portions 61, multiple support portions 62, multiple stoppers 63, and multiple stoppers 64.

The number of support parts 61, support parts 62, stoppers 63, and stoppers 64 varies depending on the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel support part 60 includes one support part 61, two support parts 62, two stoppers 63, and two stoppers 64 per panel. In other words, one support part 61, two support parts 62, two stoppers 63, and two stoppers 64 form a storage tier that stores one panel.

The support portion 61 is a portion for supporting the center portion of the panel in the left-right direction. The support portion 61 has a shaft 61a. The shaft 61a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The shaft 61a is used to support one panel. The shaft 61a has an end portion 61b and an end portion 61c, which are both ends in the extension direction (front-rear direction) of the shaft 61a. The shaft 61a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The end portion 61b of the shaft 61a is fixed to the support 26b. The manner in which the shaft 61a is fixed will be described later.

The end 61b is provided with a recess 61d (see Figures 3 and 4). The recess 61d has a shape that can accommodate the protrusion 66j described below. In this embodiment, the recess 61d has a cylindrical shape with a portion missing.

The support portion 62 is a portion for supporting both ends of the panel in the left-right direction. The support portion 62 has a shaft 62a, multiple elastic bodies 62b, and multiple supports 65. The shaft 62a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The shaft 62a is used to support one panel. The shaft 62a has an end 62c and an end 62d, which are both ends in the extension direction (front-rear direction) of the shaft 62a. The end 62c of the shaft 62a is fitted into a fitting hole in the support 26c and fixed to the support 26c by a screw.

The shaft 62a is made of, for example, a material with high bending rigidity. Examples of materials that the shaft 62a is made of include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The length of the shaft 62a in the front-rear direction is slightly longer than the length of the panel in the front-rear direction, and is longer than the length of the shaft 61a in the front-rear direction. The shaft 61a and the pair of shafts 62a are arranged in the left-right direction. The shaft 61a is disposed between the pair of shafts 62a.

The elastic body 62b is an annular (e.g., annular) member provided around the axis of the shaft 62a to surround the shaft 62a. The elastic body 62b is provided along the surface of the shaft 62a. The elastic body 62b is provided to suppress panel slippage and improve the positioning accuracy of the panel. From the viewpoint of preventing panel slippage, the elastic body 62b may have higher friction (frictional force) than the shaft 62a. From the viewpoint of preventing damage to the panel, the elastic body 62b may have higher elasticity (cushioning properties) than the shaft 62a. The elastic body 62b is made of, for example, a rubber material. Examples of rubber materials include EPDM (ethylene propylene diene rubber), silicone rubber, and fluororubber. The multiple elastic bodies 62b are arranged at regular intervals in the extension direction of the shaft 62a.

The support 65 is a member for holding (supporting) the shaft 62a and supporting the left-right ends of the panel. The tip of the support 65 is provided with an insertion hole that penetrates the support 65 in the front-rear direction, and the shaft 62a passes through the insertion hole. The support 65 has an inclined surface that slopes downward from the base end of the support 65 to the tip.

The base end portion of the support 65 abuts against the inner surface of the side wall 23, and the side plate 28, side wall 23, and support 65 are positioned by a knock pin (not shown). In this state, a screw is inserted from the outside of the side plate 28 into an insertion hole provided in the side plate 28, and the screw is screwed into a screw hole provided in the base end portion of the support 65. As a result, the support 65 is fixed to the side plate 28 with the side wall 23 sandwiched between the support 65 and the side plate 28.

The stopper 63 is a member that prevents the panel from popping out and determines the position of the front end of the panel. The stopper 63 is made of, for example, the resin material described above. The stopper 63 is provided at the end 62d of the shaft 62a. For example, the stopper 63 is attached to the shaft 62a by fitting the end 62d of the shaft 62a into a mounting hole provided in the stopper 63. The stopper 63 has a disk-shaped locking piece 63a with an outer diameter larger than the outer diameter of the elastic body 62b. The locking piece 63a has an inclined surface that slopes backward from the outer periphery toward the center.

The stopper 64 is a member for determining the position of the rear end of the panel. The stopper 64 is made of, for example, the resin material described above. The stopper 64 is provided at the end 62c of the shaft 62a. The stopper 64 has a block shape. The stopper 64 has an insertion hole for inserting the shaft 62a in the front-rear direction. With the shaft 62a inserted into the insertion hole of the stopper 64, the rear surface of the stopper 64 abuts against the front surface of the support 26c, and the stopper 64 is fixed to the support 26c by a screw. The stopper 64 has an inclined surface that slopes forward from the top surface downward.

The stopper 63, the stopper 64, and the support 65 define the placement position where the panel is placed. Specifically, the stoppers 63, 64 define the placement position of the panel in the front-rear direction, and the four supports 65 provided on the left and right define the placement position of the panel in the left-right direction. For example, the robot carries the panel into the storage space 20 and places the panel on one of the storage stages. At this time, the position of the panel may be slightly shifted due to an error or the like. For example, even if the front end of the panel rides up on the inclined surface of the locking piece 63a of the stopper 63, the panel is guided to the placement position along the inclined surface by the panel's own weight. Similarly, even if the rear end of the panel rides up on the inclined surface of the stopper 64, the panel is guided to the placement position along the inclined surface by the panel's own weight. Similarly, even if the side end of the panel rides up on the inclined surface of the support 65, the panel is guided to the placement position along the inclined surface by the panel's own weight.

Next, the manner in which the shaft 61a is fixed will be described with reference to Figures 3 to 5. Figure 3 is a diagram for explaining the manner in which the shaft is fixed to the support. Figure 4 is an exploded perspective view of the support portion and support shown in Figure 2. Figure 5 is a cross-sectional view taken along line V-V in Figure 3.

As shown in Figures 3 and 4, the support 26b includes a rear block 66 (first member) and a clamping plate 67 (second member). The rear block 66 and the clamping plate 67 are members for clamping the end 61b of the shaft 61a in the left-right direction.

The rear block 66 is a member that extends in the vertical direction. The rear block 66 extends from the upper frame portion to the lower frame portion of the frame portion 26a. The rear block 66 includes a main body portion 66a (first main body portion) and a plurality of conductive members 66c (first conductive members). Among the side surfaces in the left-right direction of the main body portion 66a, the side surface 66s that faces the clamping plate 67 is provided with a plurality of recesses 66b. The main body portion 66a holds the conductive members 66c by fitting the conductive members 66c into the recesses 66b. The number of recesses 66b and conductive members 66c is changed according to the number of shafts 61a provided in the panel storage container 1.

The recess 66b is a portion that holds the conductive member 66c. The recess 66b is a groove that extends in the front-rear direction and penetrates the main body portion 66a in the front-rear direction. The recess 66b has a shape that allows the conductive member 66c to be fitted into it, and has a U-shape that opens toward the clamping plate 67.

The conductive member 66c is a member that electrically connects the shaft 61a and the main body portion 66a. The conductive member 66c is fitted into the recess 66b and extends in the front-rear direction over the entire length of the recess 66b. The conductive member 66c is made of, for example, a resin material having conductivity. Such a resin material contains a conductive substance such as carbon. The resistance value of the conductive member 66c is greater than the resistance value of the shaft 61a and the resistance value of the main body portion 66a. The resistance value of the conductive member 66c is, for example, 10 ⁴ to 10 ⁹ Ω.

The conductive member 66c is provided with a groove 66d (first groove). The groove 66d is used to accommodate the shaft 61a. The groove 66d is recessed in a direction away from the clamping plate 67 in the left-right direction. The groove 66d extends in the front-rear direction from the front end of the conductive member 66c to the rear end of the conductive member 66c. As shown in FIG. 5, the groove 66d has a shape that follows the outer circumferential surface of the end 61b of the shaft 61a. Specifically, the groove 66d has a U-shape when viewed from the front-rear direction. The length of the groove 66d in the up-down direction becomes shorter as it moves away from the clamping plate 67 in the left-right direction. The inner circumferential surface of the groove 66d includes a side surface 66e (first side surface), a side surface 66f (second side surface), an inclined surface 66g (first inclined surface), an inclined surface 66h (second inclined surface), and a bottom surface 66i (bottom).

The side surface 66e and the side surface 66f face each other in the vertical direction. The side surface 66e and the side surface 66f are approximately parallel to each other and are surfaces that are substantially perpendicular to the vertical direction. The inclined surfaces 66g and 66h are inclined so as to move away from each other in the vertical direction as they approach the clamping plate 67. The bottom surface 66i is the inner peripheral surface of the groove 66d that is furthest from the clamping plate 67 in the left-right direction. The bottom surface 66i is a surface that is substantially perpendicular to the left-right direction. The side surface 66e, the inclined surface 66g, the bottom surface 66i, the inclined surface 66h, and the side surface 66f are connected in that order. The end portion 61b is in contact with the side surface 66e, the side surface 66f, the inclined surface 66g, the inclined surface 66h, and the bottom surface 66i while being sandwiched in the left-right direction between the rear block 66 and the clamping plate 67.

The conductive member 66c has a protrusion 66j provided on the inner peripheral surface of the groove 66d. The protrusion 66j is a portion for restricting movement of the shaft 61a in the front-rear direction. The protrusion 66j protrudes from the inner peripheral surface of the groove 66d in a direction intersecting the front-rear direction. In this embodiment, the protrusion 66j is provided near the center of the conductive member 66c in the front-rear direction, and protrudes from the bottom surface 66i toward the clamping plate 67. The protrusion 66j has a shape that can fit into the recess 61d.

The conductive member 66c has flanges 66t provided on both the front and rear ends. The flanges 66t are provided to prevent the conductive member 66c from falling off the main body 66a. The side surface 66s located between two vertically adjacent grooves 66d has a screw hole into which a fastening member such as a bolt can be screwed.

The clamping plate 67 is a member that extends in the vertical direction. The clamping plate 67 extends from the upper frame portion to the lower frame portion of the frame portion 26a. The clamping plate 67 includes a main body portion 67a (second main body portion) and a plurality of conductive members 67c (second conductive members). Among the side surfaces in the left-right direction of the main body portion 67a, the side surface 67s facing the rear block 66 is provided with a plurality of recesses 67b. The main body portion 67a holds the conductive members 67c by fitting the conductive members 67c into the recesses 67b. The recesses 67b face the recesses 66b in the left-right direction, and the number of recesses 67b is equal to the number of recesses 66b. The number of conductive members 67c is equal to the number of conductive members 66c.

The recess 67b is a portion that holds the conductive member 67c. The recess 67b is a groove that extends in the front-rear direction and penetrates the main body portion 67a in the front-rear direction. The recess 67b has a shape that allows the conductive member 67c to be fitted into it, and has a U-shape that opens toward the rear block 66.

The conductive member 67c is a member that electrically connects the shaft 61a and the main body portion 67a. The conductive member 67c is fitted into the recess 67b and extends in the front-rear direction over the entire length of the recess 67b. The conductive member 67c is made of, for example, a resin material having conductivity. Such a resin material contains a conductive substance such as carbon. The resistance value of the conductive member 67c is greater than the resistance value of the shaft 61a and the resistance value of the main body portion 67a. The resistance value of the conductive member 67c is, for example, 10 ⁴ to 10 ⁹ Ω. The constituent material of the conductive member 67c may be the same as the constituent material of the conductive member 66c.

The conductive member 67c is provided with a groove 67d (second groove). The groove 67d is used to accommodate the shaft 61a. The groove 67d is recessed in a direction away from the rear block 66 in the left-right direction. The groove 67d extends in the front-rear direction from the front end of the conductive member 67c to the rear end of the conductive member 67c. The groove 67d has a shape that follows the outer circumferential surface of the end 61b of the shaft 61a. Specifically, the groove 67d has a U-shape (arc-shaped) when viewed from the front-rear direction. The length of the groove 67d in the up-down direction becomes shorter as it moves away from the rear block 66 in the left-right direction. The sum of the depth of the groove 66d (the distance from the side surface 66s to the bottom surface 66i in the left-right direction) and the depth of the groove 67d (the distance from the side surface 67s to the bottom of the groove 67d in the left-right direction) is smaller than the length (diameter) of the end 61b in the left-right direction. The end 61b is held in the left-right direction between the rear block 66 and the clamping plate 67 and is in contact with the entire inner surface of the groove 67d.

The conductive member 67c has flanges 67t provided on both the front and rear ends. The flanges 67t are provided to prevent the conductive member 67c from falling off the main body 67a. A through hole that penetrates the clamping plate 67 in the left-right direction is provided on the side surface 67s located between two adjacent grooves 67d in the vertical direction.

Each conductive member 66c is fitted into the recess 66b of the main body 66a, and each conductive member 67c is fitted into the recess 67b of the main body 67a. The rear block 66 and the clamping plate 67 are then arranged so that the grooves 66d and 67d face each other in the left-right direction. The protrusion 66j is accommodated in the recess 61d, and the end 61b of the shaft 61a is arranged between the rear block 66 and the clamping plate 67 so that the end 61b is accommodated in the grooves 66d and 67d. At this time, the rear block 66 and the clamping plate 67 are separated in the left-right direction. In this state, a fastening member such as a bolt is inserted through the through hole of the clamping plate 67 and screwed into the screw hole of the rear block 66. As a result, a clamping force acts in the left-right direction on end 61b between rear block 66 and clamping plate 67, and the outer circumferential surface of end 61b is pressed against the inner circumferential surface of groove 66d and the inner circumferential surface of groove 67d. Specifically, end 61b is pressed against bottom surface 66i, inclined surface 66g, and inclined surface 66h. At this time, end 61b is also in contact with side surface 66e and side surface 66f. In this way, shaft 61a is fixed to support 26b.

Next, the action and effect of the panel storage container 1 will be described. As described above, the robot carries the panel into the storage space 20 and places the panel on one of the storage levels. At this time, the panel is carried into the upper part of the placement position (shaft 61a and pair of shafts 62a) and is lowered to the placement position. Therefore, if the shaft 61a is tilted in the vertical direction and the end 61c is lower than the designed height, the robot or the panel may interfere with the end 61c when the panel is carried into the storage level below the shaft 61a, and the panel may be damaged. Similarly, when the panel stored in the panel storage container 1 is carried out by the robot, the panel placed on the placement position is lifted upward by the robot and then carried out from the storage space 20 to the outside of the panel storage container 1. Therefore, if the shaft 61a is tilted vertically and the end 61c is lower than the designed height, there is a risk that the robot or the panel will interfere with the end 61c when the panel is removed from the storage level below the shaft 61a, causing damage to the panel.

On the other hand, in the panel storage container 1, the end 61b is held in the grooves 66d and 67d, and the rear block 66 and the clamping plate 67 clamp the end 61b in the left-right direction, thereby fixing the shaft 61a. For example, when the rear block 66 and the clamping plate 67 clamp the end 61b, the force with which the rear block 66 presses the end 61b and the force with which the clamping plate 67 presses the end 61b may not be uniform over the entire end 61b. In such a case, the end 61b may tilt in the left-right direction, but the end 61b is prevented from tilting in the up-down direction. Therefore, the shaft 61a can be prevented from tilting in the up-down direction. As a result, when the panel is transported to the panel storage container 1 or when the panel is removed from the panel storage container 1, the possibility of the panel interfering with the shaft 61a can be reduced, and damage to the panel can be prevented.

The groove 66d has a shape that follows the outer peripheral surface of the end 61b. Therefore, when the end 61b is clamped in the left-right direction between the rear block 66 and the clamping plate 67, the gap between the inner peripheral surface of the groove 66d and the outer peripheral surface of the end 61b can be made small. This makes it possible to prevent the end 61b from tilting in the vertical direction, and therefore to prevent the shaft 61a from tilting in the vertical direction. As a result, damage to the panel can be suppressed.

Specifically, the end 61b is in contact with the side 66e, the side 66f, the inclined surface 66g, the inclined surface 66h, and the bottom surface 66i while being sandwiched in the left-right direction by the rear block 66 and the clamping plate 67. Here, when the rear block 66 and the clamping plate 67 sandwich the end 61b in the left-right direction, the rear block 66 presses the end 61b in the left-right direction. At this time, since the end 61b is in contact with the inclined surface 66g and the inclined surface 66h, the end 61b receives a force from the inclined surface 66g in a direction perpendicular to the inclined surface 66g, and receives a force from the inclined surface 66h in a direction perpendicular to the inclined surface 66h. Since the inclined surfaces 66g and 66h are inclined so as to move away from each other in the up-down direction as they approach the clamping plate 67 in the left-right direction, the component of the force in the up-down direction that the end 61b receives from the inclined surface 66g and the component of the force in the up-down direction that the end 61b receives from the inclined surface 66h are in opposite directions to each other. Therefore, the movement of the end 61b in the vertical direction is restricted, so that the end 61b can be prevented from tilting in the vertical direction, and the shaft 61a can be prevented from tilting in the vertical direction. As a result, damage to the panel can be prevented.

As described above, the end 61b is in contact with the side surfaces 66e and 66f while being clamped in the left-right direction by the rear block 66 and the clamping plate 67. In other words, the end 61b is clamped in the up-down direction between the side surfaces 66e and 66f. Therefore, the movement of the end 61b in the up-down direction is restricted, so that the end 61b can be prevented from tilting in the up-down direction, and the shaft 61a can be prevented from tilting in the up-down direction. As a result, damage to the panel can be prevented.

As described above, the end 61b is in contact with the bottom surface 66i while being clamped in the left-right direction by the rear block 66 and the clamping plate 67. With this configuration, the force with which the rear block 66 presses the end 61b in the left-right direction acts on the end 61b from the bottom surface 66i with almost no disintegration. Therefore, the maximum static friction force acting in the up-down direction from the bottom surface 66i on the end 61b is increased, so that the end 61b is prevented from moving in the up-down direction. Therefore, the end 61b can be prevented from tilting in the up-down direction, and the shaft 61a can be prevented from tilting in the up-down direction. As a result, damage to the panel can be prevented.

For example, if the end 61b is clamped in the left-right direction by the rear block 66 and the clamping plate 67 and the rear block 66 and the clamping plate 67 are in contact in the left-right direction, the rear block 66 and the clamping plate 67 cannot be brought any closer in the left-right direction. In such a case, the clamping force of the rear block 66 and the clamping plate 67 may not be sufficient to act on the end 61b. On the other hand, in the panel storage container 1, the rear block 66 and the clamping plate 67 are spaced apart, so that the rear block 66 and the clamping plate 67 do not interfere with each other in the left-right direction, and sufficient clamping force can be applied to the end 61b.

With the end 61b being clamped in the left-right direction between the rear block 66 and the clamping plate 67, the convex portion 66j is housed in the concave portion 61d. Therefore, even if a force in the front-rear direction is applied to the shaft 61a, the convex portion 66j interferes with the concave portion 61d, restricting the movement of the shaft 61a in the front-rear direction. This reduces the possibility that the shaft 61a will fall off the support 26b.

The shaft 61a and the main body parts 66a, 67a are made of a material having electrical conductivity. The main body parts 66a, 67a are electrically connected to the earth of an external device via a positioning part provided on the bottom surface of the container body 2. For example, if the shaft 61a is fixed directly to the main body parts 66a, 67a without the conductive members 66c, 67c, and a panel stored in the panel storage container is charged, there is a risk of electrostatic discharge (ESD) occurring when the panel comes into contact with the shaft. On the other hand, if the shaft 61a and the main body parts 66a, 67a are made of a material with low electrical conductivity to suppress the occurrence of electrostatic discharge, there is a risk that the panel will not be de-ionized.

In contrast, in the panel storage container 1, the end 61b is sandwiched in the left-right direction by the rear block 66 and the clamping plate 67 while being accommodated in the groove 66d provided in the conductive member 66c and the groove 67d provided in the conductive member 67c. In other words, the shaft 61a is fixed to the main body parts 66a and 67a via the conductive members 66c and 67c. Therefore, the resistance value of the path from the shaft 61a to the main body parts 66a and 67a is larger than in a configuration in which the shaft 61a is directly fixed to the main body parts 66a and 67a without the conductive members 66c and 67c. This makes it possible to suppress the occurrence of electrostatic discharge when a charged panel is placed on the shaft 61a. On the other hand, because the conductive members 66c and 67c are conductive, current can flow from the panel placed on the shaft 61a through the shaft 61a, the conductive member 66c, and the main body 66a, or through the shaft 61a, the conductive member 67c, and the main body 67a. This makes it possible to neutralize the panel. As a result, it is possible to neutralize the panel while suppressing the occurrence of electrostatic discharge.

Note that the panel storage container according to this disclosure is not limited to the above embodiment.

In the above embodiment, the rear block 66 having the conductive member 66c has a protrusion 66j, but the clamping plate 67 having the conductive member 67c may have a protrusion that protrudes from the inner peripheral surface of the groove 67d in a direction that intersects with the front-rear direction.

The shape of the conductive member 66c is not limited to the shape of the above embodiment. Modified examples of the conductive member 66c (support 26b) are described with reference to (a) to (c) of Figure 6.

(First Modification)
6A is a diagram showing a first modified example of the support pillar 26b. The support pillar 26b according to the first modified example differs from the support pillar 26b according to the above embodiment mainly in the shape of the inner circumferential surface of the groove 66d.

6A, in the support 26b according to the first modified example, the groove 66d has a U-shape when viewed from the front-rear direction, which is different from the groove 66d according to the above embodiment. Specifically, the inner peripheral surface of the groove 66d includes a side surface 66n, a side surface 66p, an inclined surface 66k, and an inclined surface 66m. The side surfaces 66n and 66p face each other in the vertical direction. The side surfaces 66n and 66p are approximately parallel to each other and are substantially perpendicular to the vertical direction. The vertical separation distance between the side surfaces 66n and 66p is greater than the vertical length (diameter) of the end portion 61b. The inclined surfaces 66k and 66m are inclined so as to move away from each other in the vertical direction as they approach the clamping plate 67.

The side surface 66n, the inclined surface 66k, the inclined surface 66m, and the side surface 66p are connected in that order. When the end portion 61b is held in the left-right direction between the rear block 66 and the clamping plate 67, it is in contact with the inclined surface 66k and the inclined surface 66m, but is not in contact with the side surface 66n and the side surface 66p.

The panel storage container having the support pillars 26b according to the first modified example also has the same configuration as the panel storage container 1 according to the above embodiment, and thus has the same effects as the panel storage container 1 according to the above embodiment. Furthermore, in the panel storage container having the support pillars 26b according to the first modified example, the vertical separation distance between the side surface 66n and the side surface 66p is greater than the diameter of the end portion 61b. Therefore, the end portion 61b can be easily accommodated in the groove 66d.

The end 61b is in contact with the inclined surfaces 66k and 66m while being clamped in the left-right direction between the rear block 66 and the clamping plate 67. In this configuration, as with the inclined surfaces 66g and 66h of the panel storage container 1, the movement of the end 61b in the up-down direction is restricted, so that the end 61b can be prevented from tilting in the up-down direction, and the shaft 61a can be prevented from tilting in the up-down direction. As a result, damage to the panel can be prevented.

(Second Modification)
6B is a diagram showing a second modified example of the support pillar 26b. The support pillar 26b according to the second modified example differs from the support pillar 26b according to the above embodiment mainly in the shape of the inner circumferential surface of the groove 66d.

As shown in FIG. 6B, in the support 26b according to the second modified example, the groove 66d has an arc shape along the outer circumferential surface of the end 61b when viewed from the front-rear direction. In other words, the inner circumferential surface of the groove 66d is formed by connecting the side surface 66e, the inclined surface 66g, the bottom surface 66i, the inclined surface 66h, and the side surface 66f of the groove 66d in the above embodiment in an arc shape. The radius of the inner circumferential surface of the groove 66d is substantially equal to the radius of the end 61b. The end 61b is in contact with the entire inner circumferential surface of the groove 66d when it is clamped in the left-right direction between the rear block 66 and the clamping plate 67.

The panel storage container having the support 26b according to the second modified example also has the same effect as the panel storage container 1 according to the above embodiment with respect to the configuration common to the panel storage container 1 according to the above embodiment. Furthermore, in the panel storage container having the support 26b according to the second modified example, the end 61b is in contact with the entire inner surface of the groove 66d when it is clamped in the left-right direction by the rear block 66 and the clamping plate 67. Therefore, there is almost no gap between the inner surface of the groove 66d and the outer surface of the end 61b. This makes it possible to further suppress the end 61b from tilting in the vertical direction, and further suppress the shaft 61a from tilting in the vertical direction. As a result, damage to the panel can be suppressed.

(Third Modification)
6C is a diagram showing a third modified example of the support pillar 26b. The support pillar 26b according to the third modified example differs from the support pillar 26b according to the above embodiment mainly in the shape of the inner circumferential surface of the groove 66d.

As shown in FIG. 6(c), in the support 26b according to the third modified example, the groove 66d has an arc shape when viewed from the front-rear direction. The radius of the inner peripheral surface of the groove 66d is larger than the radius of the end portion 61b. The inner peripheral surface of the groove 66d includes a bottom portion 66r. The bottom portion 66r is the part of the inner peripheral surface of the groove 66d that is furthest from the clamping plate 67 in the left-right direction. The end portion 61b is in contact with the bottom portion 66r when it is sandwiched in the left-right direction between the rear block 66 and the clamping plate 67.

The panel storage container having the support 26b according to the third modified example also has the same effect as the panel storage container 1 according to the above-described embodiment with respect to the configuration common to the panel storage container 1 according to the above-described embodiment. Furthermore, in the panel storage container having the support 26b according to the third modified example, the radius of the inner peripheral surface of the groove 66d is larger than the radius of the end 61b, so the vertical length of the opening of the groove 66d is larger than the diameter of the end 61b. Therefore, the end 61b can be easily accommodated in the groove 66d.

(Fourth Modification)
The rear block 66 may not include the conductive member 66c, and the clamping plate 67 may not include the conductive member 67c. A fourth modified example of the support pillar 26b will be described with reference to Fig. 7. Fig. 7 is a diagram showing the fourth modified example of the support pillar.

As shown in FIG. 7, the pillar 26b according to the fourth modified example differs from the pillar 26b according to the above embodiment mainly in that the rear block 66 does not include a conductive member 66c, the clamping plate 67 does not include a conductive member 67c, a groove 66d is provided in the rear block 66 instead of the recess 66b, and a groove 67d is provided in the clamping plate 67 instead of the recess 67b.

In the support 26b according to the fourth modification, the shape of the inner peripheral surface of the groove 66d provided in the rear block 66 may be any of the inner peripheral surfaces of the groove 66d in the above embodiment, the first modification, the second modification, and the third modification. Here, the shape of the inner peripheral surface of the groove 66d in the second modification is used as the shape of the inner peripheral surface of the groove 66d. The rear block 66 has a protrusion 66j provided on the inner peripheral surface of the groove 66d. The shape of the protrusion 66j is the same as the shape of the protrusion 66j according to the above embodiment. Instead of the rear block 66 having the protrusion 66j, the clamping plate 67 may have a protrusion that protrudes from the inner peripheral surface of the groove 67d in a direction intersecting the front-rear direction.

In addition, instead of the support pillar 26b being equipped with the conductive members 66c, 67c, the support part 61 further includes an elastic body 61e. The elastic body 61e is an annular (e.g., annular) member provided on the outer circumferential surface of the shaft 61a. The elastic body 61e is provided to suppress slippage of the panel and improve the positioning accuracy of the panel. The constituent material and arrangement of the elastic body 61e are the same as those of the elastic body 62b, so a detailed description is omitted.

In the panel storage container having the support 26b according to the fourth modified example, the same effect as that of the panel storage container 1 according to the above embodiment is achieved with respect to the configuration common to the panel storage container 1 according to the above embodiment. Furthermore, in the panel storage container having the support 26b according to the fourth modified example, the groove 66d is provided in the rear block 66, and the groove 67d is provided in the clamping plate 67. Therefore, even if the end 61b is made of a metal material, the inner peripheral surface of the groove 66d and the inner peripheral surface of the groove 67d are suppressed from being deformed when the rear block 66 and the clamping plate 67 clamp the end 61b. Therefore, since the inner peripheral surface of the groove 66d and the inner peripheral surface of the groove 67d are unlikely to be uneven, when the rear block 66 and the clamping plate 67 clamp the end 61b, a uniform force is easily applied to the entire end 61b. As a result, the end 61b can be prevented from tilting in the vertical direction, and damage to the panel can be prevented.

1...panel storage container, 2...container body, 26b...post, 60...panel support, 61a...shaft, 61b...end, 61d...recess, 66...rear block (first member), 66a...main body (first main body), 66c...conductive member (first conductive member), 66d...groove (first groove), 66e...side (first side), 66f...side (second side), 66g...inclined surface (first inclined surface), 66h...inclined surface (second inclined surface), 66i...bottom, 66j...projection, 67...clamping plate (second member), 67a...main body (second main body), 67c...conductive member (second conductive member), 67d...groove (second groove).

Claims (8)

a container body for storing a plurality of panels arranged in a first direction;
a panel support portion provided inside the container body and supporting the plurality of panels;
Equipped with
the panel support portion includes a shaft extending in a second direction intersecting the first direction for supporting one panel of the plurality of panels;
The shaft has an end in the second direction,
The container body includes a support for fixing the shaft,
the support pillar has a first member and a second member that sandwich the end portion in a third direction that intersects the first direction and the second direction,
The first member has a first groove recessed in a direction away from the second member in the third direction and extending in the second direction,
The second member has a second groove recessed in a direction away from the first member in the third direction and extending in the second direction,
The shaft is fixed by clamping the end in the third direction between the first member and the second member with the end accommodated in the first groove and the second groove. an inner circumferential surface of the first groove includes a first inclined surface and a second inclined surface that are inclined so as to move away from each other in the first direction as the first inclined surface approaches the second member in the third direction;
The panel storage container according to claim 1 , wherein the end portion is in contact with the first inclined surface and the second inclined surface while being sandwiched in the third direction between the first member and the second member. an inner circumferential surface of the first groove includes a first side surface and a second side surface facing each other in the first direction,
The panel storage container according to claim 1 or 2, wherein the end portion is in contact with the first side surface and the second side surface while being clamped in the third direction by the first member and the second member. an inner circumferential surface of the first groove includes a bottom portion that is farthest from the second member in the third direction,
The panel storage container according to any one of claims 1 to 3, wherein the end portion is in contact with the bottom portion while being clamped in the third direction by the first member and the second member. The panel storage container according to any one of claims 1 to 4, wherein the first groove has a shape that follows the edge. The panel storage container according to any one of claims 1 to 5, wherein the first member is separated from the second member with the end portion being sandwiched between the first member and the second member in the third direction. the first member has a protrusion protruding from an inner circumferential surface of the first groove in a direction intersecting the second direction,
The panel storage container according to any one of claims 1 to 6, wherein the end portion is provided with a recess for accommodating the protrusion. the first member includes a first conductive member having the first groove and a first body portion that holds the first conductive member,
the second member includes a second conductive member having the second groove and a second body portion that holds the second conductive member,
a resistance value of the first conductive member is greater than a resistance value of the shaft and a resistance value of the first body portion;
The panel storage container according to any one of claims 1 to 7, wherein a resistance value of the second conductive member is greater than a resistance value of the shaft and a resistance value of the second main body portion.

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