JP7654288B2 - Vertical vibration device, vertical vibration method, component supply device, component supply method, and screen printing device - Google Patents

Description

The present invention relates to a vertical vibration device, a vertical vibration method, a part supply device, a part supply method, and a screen printing device.

Conventionally, there have been part supply devices that supply parts by jumping them.

Japanese Patent Application Publication No. 07-153765 Japanese Patent Application Publication No. 09-275109 International Publication No. 2019/130951

Conventional parts supply devices are unable to supply parts stably because the vertical vibrations are unstable and the jumps of the parts are not uniform.

An embodiment of the present invention provides a vertical vibration device that provides stable vertical vibration.

The vertical vibration device of the present invention is
With the base,
Plate and
a vibration absorbing part attached between the base and the plate to absorb vibrations;
a plurality of vibrators for vibrating a plurality of points on the outer periphery of the plate from positions outside the plate;
The vibration direction of the plurality of vibrators is vertical with respect to the plate, the plurality of vibrators are fixed at outer positions away from the sides of the plate, and a plurality of distributors are provided for transmitting the vibration of the plurality of vibrators to the plate.

According to the present invention, the vertical vibration of the plate is uniform.

1 is a perspective view of a vertical vibration device 100 according to a first embodiment. FIG. 1 is a front view of a vertical vibration device 100 according to a first embodiment. FIG. 1 is a side view of a vertical vibration device 100 according to a first embodiment. FIG. FIG. 1 is an explanatory diagram of standing wave vibration. FIG. 2 is an explanatory diagram of standing wave vibration and deflection in the first embodiment. 4A to 4C are explanatory diagrams of vertical vibration and flexure in the first embodiment. 4A to 4C are explanatory diagrams of vertical vibration in the first embodiment. FIG. 2 is a diagram showing a workpiece 900 according to the first embodiment. 1A to 1C are diagrams illustrating a vertical vibration method and a component supply method according to the first embodiment. 1A to 1C are diagrams illustrating a vertical vibration method and a component supply method according to the first embodiment. 1A to 1C are diagrams illustrating a vertical vibration method and a component supply method according to the first embodiment. FIG. 9 is a diagram showing a workpiece 900 and a part 901 according to the first embodiment. 1A to 1C are diagrams showing an example of the plate 20 of the first embodiment. FIG. 13 is a diagram showing a modified example of the frame 90 of the first embodiment. 13A and 13B are diagrams showing a modified example of the plate 20 of the first embodiment. 11A to 11C are diagrams showing modified examples of the arrangement of the vibration absorbing portion 11 in the first embodiment. 13 is a diagram showing a bottom plate 92 of the first embodiment. FIG. 2 is a diagram showing a frame 90 and a bottom plate 92 according to the first embodiment. FIG. 13A and 13B are diagrams showing modified examples of the frame 90 and the bottom plate 92 of the first embodiment. 13A and 13B are diagrams showing a modified example of the plate 20 of the first embodiment. 13A and 13B are diagrams showing modified examples of the frame 90 and the bottom plate 92 of the first embodiment. 13A and 13B are diagrams showing modified examples of the frame 90 and the bottom plate 92 of the first embodiment. FIG. 13 is a diagram showing a modified example of the distributor 47 of the first embodiment. FIG. 13 is a diagram showing a modified example of the distributor 47 of the first embodiment. 1 is a diagram showing a modified example of the vertical vibration device 100 of the first embodiment. FIG. 1 is a diagram showing a modified example of the vertical vibration device 100 of the first embodiment. FIG. 13A and 13B are diagrams showing a modified example of the plate 20 of the first embodiment. FIG. 11 is a perspective view of a work holding device 910 according to a second embodiment. FIG. 11 is a front view of a work holding device 910 according to a second embodiment. FIG. 11 is a side view of a work holding device 910 according to a second embodiment. 13 is a diagram showing an adsorption surface 19 of a plate 20 according to a second embodiment. FIG. FIG. 11 is a front view of a screen printing apparatus 700 according to a third embodiment. FIG. 13 is a perspective view of a table unit 710 of a screen printing apparatus 700 according to a third embodiment. FIG. 11 is a perspective view of a screen plate unit 720 of a screen printing apparatus 700 according to a third embodiment. FIG. 11 is a perspective view of a squeegee unit 730 of a screen printing apparatus 700 according to a third embodiment.

In the first embodiment, a vertical vibration device 100 will be described.
Furthermore, in the first embodiment, a component supplying device 200 will be described.

Embodiment 1.
FIG. 1 is a perspective view of a vertical vibration device 100 and a component supply device 200 according to the first embodiment.
FIG. 2 is a front view of the vertical vibration device 100 and the component supply device 200 according to the first embodiment.
FIG. 3 is a side view of the vertical vibration device 100 and the component supply device 200 according to the first embodiment.
In the figure, X indicates the left-right direction.
In the figure, Y indicates the front-rear direction.
In the figure, Z indicates the up-down direction.

<<<<Configuration of the vertical vibration device 100>>>
The vertical vibration device 100 has a base 10 , a plate 20 , a frame 90 , a vibration unit 40 , and a controller 80 .
The vertical vibration device 100 vibrates the plate 20 up and down in the YZ plane, and vibrates the plate 20 up and down in a standing wave manner in the XZ plane.

<<<Configuration of component supply device 200>>>
The component supplying device 200 has a vertical vibration device 100 and a workpiece holding device 910 that holds a workpiece 900 .
The component supplying device 200 is a device that jumps a component 901 and supplies the component 901 to a workpiece 900 .

<<<<Description of Base 10>>>
The base 10 has a rectangular plate shape.
The base 10 is a flat metal plate having a horizontal surface.
The base 10 is a base for the vertical vibration device 100 .
The base 10 is a part of the housing of the vertical vibration device 100 and does not vibrate.

<<<<Explanation of Plate 20>>>
The plate 20 has a rectangular plate shape.
The plate 20 is desirably made of a material that allows sound waves to pass through easily, preferably metal.
The material of the plate 20 is preferably aluminum, titanium, or stainless steel.
The material of the plate 20 is preferably aluminum or titanium, and is most preferably aluminum.
Plate 20 is preferably rectangular, preferably square.
The plate 20 has a front surface 21 on the top surface, a back surface 22 on the bottom surface, and four sides 23 (side surfaces).
The front surface 21 and the back surface 22 are parallel rectangular planes of the same shape.
The side 23 is a surface between the front surface 21 and the back surface 22 of the plate 20 .
The side 23 is a plane perpendicular to the front surface 21 and the back surface 22 of the plate 20 .
The plate 20 has a number of screw holes around the periphery of the surface 21 for fastening the screws 25 thereto.
A total of four screw holes are provided in the center of the left and right sides of the plate 20.
Hereinafter, the positions of the screw holes will be referred to as fixing points 24.

<<<<Explanation of vibration absorbing part 11>>>
As shown in FIGS. 2 and 3, the vertical vibration device 100 has four vibration absorbing parts 11.
The lower portions of four vibration absorbing parts 11 are fixed to the four corners of the upper surface of the base 10 .
The upper portions of four vibration absorbing parts 11 are fixed to the four corners of the rear surface 22 of the plate 20 .
The base 10 has four fixed shafts 12 on the upper surface at four corners.
The plate 20 has four fixed shafts 13 on the back surface 22 at four corners.
The vibration absorbing part 11 fixes the fixed shaft 12 and the fixed shaft 13 together.
A specific example of the vibration absorbing portion 11 is a coupling member or a joint member that connects the plate 20 and the base 10 .
The vibration absorbing portion 11 absorbs the vibration of the plate 20 and prevents the vibration of the plate 20 from being transmitted to the base 10 .
The vibration absorbing portion 11 ensures free vibration of the plate 20 relative to the base 10 .
The vibration absorbing section 11 mounts a plate 20 on a base 10 in a vibrable manner.
An ideal vibration absorbing portion 11 generates no resistance to the vibration of the plate 20 .
The left-right position of the vertical axis passing through the centers of the vibration absorbing portion 11, the fixed shaft 12 and the fixed shaft 13 is the same as the position of the screw 25 (fixing point 24).
A suitable example of the vibration absorbing portion 11 is a coupling (shaft joint) manufactured by Miki Pulley Co., Ltd.
The vertical vibration device 100 does not use the transmission function of a coupling (shaft joint).
The vertical vibration device 100 utilizes the mounting error tolerance function and vibration absorption function of a coupling (shaft joint).
In order to absorb up and down vibrations, it is desirable to use a coupling (shaft joint) that, within its mounting error tolerance, allows greater end play (axial displacement) than eccentricity (parallel displacement) and angular deviation (angular displacement).
Couplings (shaft joints) include ultra-high rigid couplings that do not absorb the misalignment between the fixed shafts 12 and 13, but only absorb end play (axial displacement), and flexible couplings that absorb the misalignment between the fixed shafts 12 and 13 and end play (axial displacement).
By using a rigid coupling rather than a flexible coupling, vibrations in the front-back and left-right directions can be suppressed, and the plate 20 can be vibrated only in the up-down direction.

The vibration absorbing portion 11 has the following functions.
1. Absorption of vertical vibrations (1) When all vertical vibrations of the plate 20 are absorbed, free vibration is provided.
"The vertical absorption width of the vibration absorbing portion 11 > the maximum vibration width of the plate 20 → free vibration"
(2) When not all of the vertical vibrations of the plate 20 are absorbed, the vibration amplitude at four points of the plate 20 is restricted to the vertical absorption amplitude of the vibration absorbing portion 11. This eliminates variation in the vibration amplitude at the four points and makes the vibration amplitude uniform.
"The vertical absorption width of the vibration absorbing portion 11 < the maximum vibration width of the plate 20 → restricted vibration"
2. The misalignment between the fixed shaft 12 and the fixed shaft 13 is absorbed (to absorb dimensional errors and assembly errors).
3. When the plate 20 vibrates without being deformed, the plate 20 vibrates up and down at least by the absorption width of the vibration absorbing portion 11.

<<<<Explanation of box 90>>>
The frame 90 is a fence or wall fixed to the surface 21 of the plate 20 .
The frame 90 has a square or rectangular shape in a plan view.
The frame 90 is fixed to the surface 21 of the plate 20 along all four sides thereof.
The frame 90 does not have a bottom plate.
The frame 90 exposes the surface 21 of the plate 20 at a bottom surface 95 .
The frame 90 is formed of four hexahedral rod- or plate-shaped wall panels.
As shown in FIG. 2, the wall panels of the frame 90 are provided inside the plate 20 and spaced a length W from the sides 23 on the outer periphery of the plate 20 in the front-rear and left-right directions.
As shown in FIG. 2, the wall plate of the frame 90 is located inside the position of the screw 25 (fixing point 24) in the left-right direction.

<<<<Explanation of parts storage 91>>>
The parts reservoir 91 is formed by the inner surface of the frame 90 and the surface 21 of the plate 20 .
The part storage 91 is a hexahedral space with an open top.
The parts storage 91 is a place where a plurality of parts 901 are stored.
The part storage 91 is a location to which the part 901 is jumped.

<<<<Explanation of Part 901>>>
A large number of parts 901 are stored randomly in a parts storage 91 .
The component 901 jumps only in the vertical direction in the component storage 91 as the plate 20 vibrates only vertically.
The part 901 is in the form of a sphere, a granule, or a powder.
A suitable example of the component 901 is a solder ball or a metal ball.

<<<<Explanation of vibration unit 40>>>
The vibration units 40 are fixed to the plate 20 in opposing centers on the left and right sides.
The vibration unit 40 includes a vibrator 41 and a distributor 47 .
The vibration unit 40 vibrates the opposing sides of the plate 20 up and down.
The vibration unit 40 vibrates the fixing point 24 where the screw 25 is located up and down.
The multiple vibrators vibrate multiple points on the outer periphery of the plate 20, causing the plate 20 to vibrate up and down relative to the surface 21 (horizontal plane).
The multiple vibrators vibrate multiple sides 23 of the plate 20 at the same frequency.
The multiple vibrators simultaneously generate traveling waves 60 of the same frequency, the same wavelength, and the same amplitude at multiple locations on the outer periphery of the plate 20, causing the plate 20 to vibrate with a standing wave and to vibrate up and down.

<<<<Description of Vibrators 41, 42>>>
The vertical vibration device 100 has two vibrators, a vibrator 41 and a vibrator 42 .
The two vibrators, vibrator 41 and vibrator 42, have the same specifications.
The two vibrators, vibrator 41 and vibrator 42, are vibrators driven by air pressure.
The two vibrators, vibrator 41 and vibrator 42, are a pair of vibrators fixed at opposing positions on plate 20.

As a vibrator driven by air pressure, the following vibrator can be used.
(1) Turbine vibrator (2) Roller vibrator (3) Ball vibrator (4) Piston vibrator

The vibrators (1), (2), and (3) mentioned above are quiet and can operate at high speed.
In particular, a turbine vibrator, which has stable operation, is most suitable.
Piston vibrators have the drawback of being noisy and slow in operation.

<<<<Description of Distributor 47>>>
The vibration unit 40 has a distributor 47 .
The distributor 47 is a vibration transmission plate that transmits the vibration of the vibrator to the plate 20 .
The distributor 47 secures each of the multiple vibrators to the plate 20 .
The distributor 47 transmits the vibration of the vibrator to the plate 20 from the outside of the plate 20 .
The distributor 47 is fixed to the base 10 by screws 25 inserted into the screw holes in the plate 20 .
The distributor 47 is fixed to the plate 20 at fixing points 24 provided on the periphery of the plate 20 .
The distributor 47 transmits the vibrations of the vibrators 41 and 42 to the side 23 of the plate 20 .
The distributor 47 secures the vibrator 41 and the vibrator 42 to the side 23 of the plate 20 .

The distributor 47 is a metal fitting bent into an L shape.
The distributor 47 has a horizontal portion 48 and a vertical portion 49 .
The horizontal portion 48 and the vertical portion 49 have the same width in the front-rear direction.
The horizontal portion 48 is a plate mounted parallel to the surface 21 .
The horizontal portion 48 is fixed to the plate 20 .
The horizontal portion 48 transmits the vibration of the vertical portion 49 to the plate 20 .
The horizontal portion 48 is fixed to the fixing portion 24 (screw hole) of the plate 20 by a screw 25 .

As shown in FIG. 2, the horizontal portion 48 protrudes outward from the side 23 on the outer periphery of the plate 20 by a length Q.
The plate 20 has fixing points 24 (screw holes) to which the distributor 47 is fixed.

The vertical portion 49 is a plate that is perpendicular to the surface 21 (horizontal plane).
The vertical portion 49 fixes the vibrator at the top and bottom.
The vertical portion 49 is disposed outside the plate 20 and away from the plate 20 .
The vertical portion 49 fixes the bottom surface of the vibrator 41 or the vibrator 42 .
The vertical portion 49 fixes the vibrator 41 and the vibrator 42 so that the rotations of the vibrator 41 and the vibrator 42 are opposite to each other.
In FIG. 2, vibrator 41 rotates clockwise and vibrator 42 rotates counterclockwise.

The widths of the horizontal portion 48 and the vertical portion 49 in the front-rear direction do not have to be the same.
The width of the horizontal portion 48 in the front-to-rear direction is preferably more than twice but less than ten times, and more preferably five times, the width of the vertical portion 49 in the front-to-rear direction.
The front-to-rear width of the horizontal portion 48 is less than half and more than one-eighth of the front-to-rear width of the plate 20, and is preferably one-fifth.
By increasing the width of the horizontal portion 48 , the vibrations of the vibrators 41 and 42 are transmitted to a wide range of the side 23 of the plate 20 .

The left and right side distributors 47 position the vibrators 41, 42 at outer positions away from the opposing left and right sides 23 of the plate 20.
The multiple distributors 47 on both the left and right sides fix the multiple vibrators 41 , 42 with the vibration direction of the multiple vibrators 41 , 42 perpendicular to the surface 21 of the plate 20 .

<<<<Explanation of left-right vibration>>>
The vibrator vibrates in 360 degrees on the vibration plane.
2, the vibration powers of the vibrators 41 and 42 in the left-right direction are generated simultaneously with the same magnitude and in the opposite directions, so that they cancel each other out. As a result, no vibration is generated in the left-right direction of the plate 20.
Leftward force of vibrator 41 (-Px) = rightward force of vibrator 42 (+Px)
Rightward force of vibrator 41 (+Px) = leftward force of vibrator 42 (-Px)

<<<<Explanation of vertical vibration>>>>
As shown in FIG. 3, the vibrator is fixed at a vertical portion 49 perpendicular to the horizontal.
The vibrator has a vibration surface having a central axis of rotation J, and the vibrator vibrates in 360 degrees on the vibration surface.
In FIG. 3, the vibration plane of the vibrator is a plane perpendicular to the central axis of rotation J and is a vertical plane.

As shown in FIG. 3, the vibration surfaces of the vibrators 41 and 42 are attached to the distributor 47 so as to be perpendicular to the front surface 21 (rear surface 22).
The vibration of the vibrator 42 occurs only in the vertical direction (Z direction) perpendicular to the horizontal direction.

<<<<Description of Controller 80>>>
The controller 80 controls the vibrations of the vibrators 41 and 42 .
The controller 80 causes the vibrator to vibrate at a frequency of 10 Hz or more and 800 Hz or less.
The controller 80 causes the multiple vibrators to vibrate simultaneously with the same frequency, wavelength and amplitude.
The controller 80 has an air compressor 81 , an air pipe 82 , a regulator 83 , and a processor 84 .

The air compressor 81 generates compressed air.
The air pipe 82 is connected to an air compressor 81 and supplies compressed air.
The air pipe 82 branches into a Y shape midway and is connected to the vibrator 41 and the vibrator 42 .

The regulator 83 is a control device that controls the pressure of the compressed air.
The regulator 83 determines the vibration frequency of the vibrators 41 and 42 by controlling the pressure of the compressed air.

The processor 84 includes a central processing unit and a program.
The processor 84 may be implemented as an integrated circuit, a circuit board, or the like.
The processor 84 controls the operation of the vertical vibration device 100 via signal line 88 .
The processor 84 is connected to the air compressor 81 and controls the on/off operation and operating time of the air compressor 81 .

<<<<Explanation of vibration>>>>
The vertical vibration method in the vertical vibration device 100 will be described.

<Initial setup steps>
The worker turns on the power switch of the vertical vibration device 100 .
The worker has a correspondence table between the pressure of the compressed air and the vibration frequencies of the vibrators 41 and 42 .
The operator refers to the correspondence table and uses regulator 83 to set the compressed air pressure corresponding to the vibration frequencies of vibrators 41 and 42 .
The worker sets a pressure corresponding to any audible frequency between 10 Hz and 800 Hz.

<Traveling wave generation step>
Since the air pipe 82 branches into a Y shape and is connected to the vibrator 41 and the vibrator 42, air of the same pressure is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate at the same frequency.
The vibration frequencies of the vibrators 41 and 42 are preferably in the audible range.
The vibrators 41 and 42 are fixed to the left and right sides 23 of the plate 20 and apply a sinusoidal traveling wave 60 to the left and right sides 23 of the plate 20 .
The vibrators 41 and 42 simultaneously generate traveling waves 60 with the same amplitude, the same wavelength and the same frequency.

<Synchronization step>
Even if vibration is started in an asynchronous state in which the phases of vibrators 41 and 42 are out of phase with each other, the phases of vibrators 41 and 42 will match in a short time due to the synchronization phenomenon, and the vibrations of vibrators 41 and 42 will be synchronized.

<Vibration step>
When traveling waves 60 are generated in opposite directions at the same time with the same amplitude, wavelength, and frequency, the traveling waves 60 from the left and right sides overlap on the plate 20, generating a standing wave.
A standing wave is a wave that does not move in position over time.
The plate 20 vibrates up and down due to the standing wave at the same vibration frequency as the vibrators 41 and 42 .
The plate 20 vibrates up and down due to the standing wave at the same vibration frequency as the vibrators 41 and 42 .

<<<<Explanation of standing wave vibration>>>
Hereinafter, the vertical vibration caused by standing wave vibration will be described with reference to FIG.
As mentioned above, standing waves generate vibrations only in the Z direction.
The vibration in the Z direction is a vibration in the up and down direction, and the vibration in the Z direction causes the plate 20 to vibrate up and down.
FIG. 4 is a schematic diagram of the up-and-down vibration when the plate 20 is viewed from the front.
In order to easily explain the standing wave vibration, it is assumed in FIG. 4 that the vertical position of the fulcrum 26 is fixed and that the fulcrum 26 does not vibrate up and down.

The plate 20 vibrates with the fixing points 24 (screw holes) acting as fulcrums 26 .
In FIG. 4 , the fulcrum 26 refers to a point which is the center of the plate 20 in the vertical direction and also the center of the fixing point 24 .

(a) When a downward force is applied to both the left and right sides of plate 20 by vibrators 41 and 42, an upward force is generated in the center of plate 20 via fulcrum 26.

(b) When vibrators 41 and 42 apply even greater downward force to both the left and right sides of plate 20, the center of plate 20 rises.

(c) When the downward force on both the left and right sides of plate 20 by vibrators 41 and 42 weakens, the center of plate 20 descends.

(d) When an upward force is applied to both the left and right sides of plate 20 by vibrators 41 and 42, a downward force is generated at the center of plate 20 via fulcrum 26.

(e) When vibrators 41 and 42 apply even greater upward force to both the left and right sides of plate 20, the center of plate 20 descends.

(f) When the upward force on both the left and right sides of plate 20 by vibrators 41 and 42 weakens, the center of plate 20 rises.

<Flapping phenomenon>
By repeating the operations (a) to (f), which correspond to one cycle, the plate 20 vibrates up and down at the same frequency as the vibration frequency of the vibrators 41 and 42.
The plate 20 vibrates as if it is flapping between the left and right fulcrums 26, and this phenomenon is hereinafter referred to as the flapping phenomenon. This vibration is also called standing wave vibration.
The flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down around the fulcrum 26 by supplying air to vibrators fixed to the left and right sides of the plate 20 .
In order to facilitate the flapping phenomenon, it is desirable that the center of the fixing positions of the vibrators 41 and 42 (the center of the rotation axis J) be on a straight line with the positions of the two fixing points 24. In other words, it is desirable that the center of the fixing positions of the multiple vibrators (the center of the rotation axis J) be on an extension line of a line connecting the opposing fixing points 24 on the opposing sides of the plate 20.
Even if the fixing positions of the vibrators 41 and 42 and the positions of the two fixing points 24 are not on a straight line but are offset from each other, the flapping phenomenon occurs as long as the plate 20 is securely fixed to the base 10.
Since an increase in the thickness of the plate 20 may hinder the flapping phenomenon, it is preferable that the thickness of the plate 20 is thin. It is preferable that the thickness of the plate 20 is larger than the diameter of the screw hole of the fixing portion 24 and less than twice the diameter of the screw hole of the fixing portion 24.

<<<<Explanation of up-down vibration and flapping vibration>>>>
The vertical vibration and bending vibration of the vertical vibration device 100 will be described with reference to FIG.
In FIG. 4, in order to explain the standing wave vibration, the vertical position of the fulcrum 26 is fixed and the fulcrum 26 does not vibrate up and down. However, in the plate 20 of FIG. 5, the position of the fulcrum 26 is not fixed and the fulcrum 26 vibrates up and down.

Point E is the uppermost point of the fulcrum 26 .
Point C is the lowest point of the fulcrum 26 .
Points F and D are midpoints between the highest point E and the lowest point C.

The vertical vibration of the vertical vibration device 100 will be described with reference to FIG.
FIG. 5 is a diagram showing flapping vibration at the center of the front and rear of the plate 20.
FIG. 5 is a vibration diagram seen from the line LL in FIG.

(a) When no upward or downward force is applied to vibrators 41 and 42, plate 20 is in a flat state and is in position H.

(b) When a downward force is applied to both the left and right sides of plate 20 by vibrators 41 and 42, the center of plate 20 rises, fulcrum 26 lowers, and the entire plate 20 descends from position H.

(c) When no upward or downward force is applied to vibrators 41 and 42, the state is the same as (a) above.

(d) When an upward force is applied to both the left and right sides of plate 20 by vibrators 41 and 42, the center of plate 20 descends, fulcrum 26 rises, and the entire plate 20 rises from position H.

The position of the fulcrum 26 is not fixed, and the plate 20 is free to vibrate up and down, so that the fulcrum 26 vibrates up and down by a length Uz.
The plate 20 as a whole vibrates up and down in the XZ plane, and also performs standing wave vibration in which the center of the left and right sides curves up and down in the XZ plane.
The vibrators 41 and 42 vibrate the plate 20 in the up-down direction so that the up-down vibration distance Mz at the left-right center of the front-rear center of the plate 20 (the center of the plate 20) is a positive value.

"The vertical vibration distance Mz of the center of the front and rear of the plate 20
<Up-down vibration distance Uz between both left and right ends (fulcrum 26) of the center of the front and rear of the plate 20>
The vibrators 41 and 42 vibrate the plate 20 in the up-down direction so that the up-down vibration distance Mz of the center of the plate 20 takes a positive value.

The bending phenomenon of the vertical vibration device 100 will be described with reference to FIG.
FIG. 6 is a diagram of the vibrations as seen from the left side of the plate 20.
FIG. 6 is a vibration diagram taken along the line K--K in FIG.

(a) When no upward or downward force is applied to vibrators 41 and 42, plate 20 is in a flat state and is in position H.

(b) When a downward force is applied to both the left and right sides of plate 20 by vibrators 41 and 42, the entire plate 20 descends from position H and both the front and rear ends bend downward, causing both ends to lower further.

(c) As the plate 20 begins to rise, it begins to return to its original bending state.

(d) When no vertical force is applied to the vibrators 41 and 42, the state is the same as (a) above. That is, there is no bending, and the plate 20 is at position H and returns to a flat state.

(e) When an upward force is applied to both the left and right sides of plate 20 by vibrators 41 and 42, the entire plate 20 rises from position H and both the front and rear ends bend upward, causing both ends to rise further.

(f) As the plate 20 begins to descend, it begins to return to its original bending state.

The position of the fulcrum 26 is not fixed, and the plate 20 vibrates freely, so that the fulcrum 26 vibrates up and down by a length Uz.
The plate 20 as a whole vibrates up and down in the YZ plane, and at the same time, both the front and rear ends bend up and down in the YZ plane, causing a bending phenomenon in which the plate 20 curves.

"The vertical vibration distance Mz of the center of the plate 20 (center of the plate 20)
<Up-down vibration distance Uz of both ends (fulcrum 26) of the center of the front and rear of the plate 20 <Up-down vibration distance Nz of both ends (corners of the plate 20) of the front and rear of the plate 20
The multiple vibrators 41, 42 vibrate the front, rear, left and right ends of the plate 20 more violently than the central portion of the plate 20 by flapping vibration and bending vibration.

<Up and Down Vibration of Parts Storage 91>
Hereinafter, a vertical vibration method using the vertical vibration device 100 will be described with reference to FIG.
The width J of the parts storage 91 inside the frame 90 is shorter than the distance S between the fulcrums 26.
The width J of the parts storage 91 inside the frame 90 is shorter than the lateral width T between the left and right sides 23 of the plate 20 .
The width J of the parts storage 91 is preferably 50% to 90% of the left-right width T of the plate 20, and from the viewpoint of effective use of the plate 20, it is more preferable that it is 80% to 90%.
As shown in FIG. 7, the fulcrum 26 vibrates up and down by a vertical vibration distance Uz.
The deflection of the plate 20 in the vertical direction is represented as E.
The vertical vibration distance Uz of the fulcrum 26 is absorbed by the vibration absorbing portion 11 .
The fulcrum 26 vibrates up and down within a range that can be absorbed by the vibration absorbing section 11 .
The vertical vibration distance Uz is the smaller value of the amplitude value during free vibration of the plate 20 due to the flapping phenomenon and the allowable value of the end play (axial displacement) of the vibration absorbing portion 11 .
As shown in FIG. 7, since the fulcrum 26 is a fixed portion, the deflection of the plate 20 is large in the vicinity of the fulcrum 26, i.e., the side 23 of the plate 20.
Conversely, the central portion of the plate 20 experiences less deflection of the plate 20 than the vicinity of the fulcrum 26 and the sides 23 of the plate 20 .
The central portion of the plate 20 is a portion where the amplitude of vibration in the vertical direction is approximately uniform, and the deflection of the plate 20 is smaller than that of the left and right ends of the plate 20 .
The vertical vibration device 100 has a parts reservoir 91 disposed in the center of the plate 20 .
In the vertical vibration device 100, the size of the parts reservoir 91 is made smaller than the size of the plate 20.
It is desirable for the ratio of the width J of the parts storage 91 to the left-right width T of the plate 20 to be small in order to achieve a uniform jump.
The vertical vibration device 100 makes the part 901 jump at the center of the plate 20 .
In the central portion of the plate 20, the deflection of the plate 20 is small, and the amplitude of the vibration of the plate 20 in the vertical direction is approximately uniform.
Since the parts storage 91 is mounted in a range where the vibration amplitude of the plate 20 in the vertical direction is approximately uniform, the parts 901 in the parts storage 91 jump uniformly.

As shown in FIGS. 4, 5 and 6, since the frame 90 is fixed to the central portion of the plate 20, the plate 20 inside the frame 90 does not bend or bends very little.
Only the peripheral portion of the plate 20 bends due to the flapping vibration and bending vibration, and the bottom surface 95 of the frame 90 (the central portion of the plate 20) does not bend and vibrates up and down while remaining flat.
The frame 90 has a function of preventing the bottom surface 95 (the central portion of the plate 20 ) from curving in the part reservoir 91 .
Even if the plate 20 does not bend at all (deflection E=0), the plate 20 vibrates in the vertical direction at least by the vertical vibration distance Uz, so that the part 901 jumps.

<<<<Examples of standing wave vibration>>>
Below, specific examples of standing wave vibration will be described.
The plate 20 is an aluminum plate having a square shape with each side measuring approximately 0.5 m.
The sound speed V of aluminum is 6320 [m/s]. However, the temperature of aluminum is assumed to be constant and the change in sound speed due to temperature is not considered.
As the vibrator 41 and the vibrator 42, an air vibrator manufactured by Exen Co., Ltd. and having the following specifications is used.
When the air pressure is 0.2 to 0.6 MPa, an air vibrator having a vibration frequency f of 119 Hz to 414 Hz is preferable. Alternatively, when the air pressure is 0.3 to 0.6 MPa, an air vibrator having a vibration frequency f of 110 Hz to 290 Hz is preferable.

In this example, it is assumed that an air vibrator having the following vibration frequency f when the air pressure is as follows is used.
Vibration frequency f when air pressure is 0.5 MPa: 216.5 Hz
Vibration frequency f when air pressure is 0.4 MPa: 206.6 Hz
Vibration frequency f when air pressure is 0.3 MPa: 177.3 Hz
Vibration frequency f when air pressure is 0.2 MPa: 133.0 Hz

The wavelength can be calculated using the following formula:
Wavelength λ [m] = Sound velocity V [m/s] / Vibration frequency f [Hz]
The wavelength of the traveling wave 60 is calculated as follows:
When air pressure is 0.5MPa:
Wavelength λ [m] = 6320 [m/s] / 216.5 [Hz] = 29.19 m
When air pressure is 0.4 MPa:
Wavelength λ [m] = 6320 [m/s] / 206.6 [Hz] = 30.59 m
When air pressure is 0.3 MPa:
Wavelength λ [m] = 6320 [m/s] / 177.3 [Hz] = 35.65 m
When air pressure is 0.2MPa:
Wavelength λ [m] = 6320 [m/s] / 133.0 [Hz] = 47.52 m

The traveling wave 60 generated by the vibrator 41 and the vibrator 42 can be expressed by the following formula.
R(x,t)=Ax・sin2π((t/T)−(x/λ))
L(x,t)=Ax・sin2π((t/T)+(x/λ))
x [m]: location of the plate in the X direction t [s]: time R(x, t): displacement [m] of the traveling wave 60 in the Z direction at location x [m] and time t [s]
L(x, t): Displacement [m] of the traveling wave 60 in the Z direction at location x [m] and time t [s]
Ax: Amplitude of the traveling wave 60 [m]
T: Period of traveling wave 60 [s]
λ: wavelength of the traveling wave 60 [m]

The standing wave 70 generated by the superposition of the traveling waves 60 generated by the vibrators 41 and 42 can be expressed by the following equation representing a sine standing wave.
z(x,t)
=R(x,t)+L(x,t)
=2Ax・sin(2π(t/T))・cos(2π(x/λ))
x [m]: location of the plate in the X direction t [s]: time z (x, t): displacement [m] of the standing wave 70 in the Z direction at location x [m] and time t [s]
Ax: Amplitude of the traveling wave 60 [m]
T: Period of traveling wave 60 [s]
λ: wavelength of the traveling wave 60 [m]

cos(2π(x/λ)) represents the amplitude of the standing wave 70.
A location x where the amplitude of the standing wave 70 is 0, that is, where cos(2π(x/λ)) is 0, is called a “node.”
The location x where the amplitude of the standing wave 70 is maximum, that is, where the absolute value of cos(2π(x/λ)) is 1, is called an "antinode."

In order to vibrate the plate 20 up and down, it is sufficient to prevent nodes of the standing wave from being generated at any location x in the left-right direction between the fulcrums 26.
Since nodes of a standing wave occur every half wavelength, if the distance between the supports 26 is less than half the wavelength of the standing wave, it is possible to ensure that no nodes of the standing wave exist at any location x in the left-right direction of the plate 20.
If the "node" of the standing wave 70 is positioned at the fixed point 24 and the fixed point 24 is held (screwed) in place, the "node" becomes the fulcrum for flapping.

If the distance between the supports 26 is greater than half the wavelength of the standing wave, a node will be generated in the plate 20.
Therefore, the distance between the fixing points 24 in the left-right direction of the plate 20 must be less than the following length.
Half wavelength when air pressure is 0.5 MPa: wavelength λ [m]/2 = 14.56 m
Half wavelength when air pressure is 0.4 MPa: wavelength λ [m]/2 = 15.29 m
Half wavelength when air pressure is 0.3 MPa: wavelength λ [m]/2 = 17.82 m
Half wavelength when air pressure is 0.2 MPa: wavelength λ [m]/2 = 23.766 m
As described above, the frequency and wavelength of the standing wave are determined by the air pressure of the vibrators 41 and 42, and the maximum length of the plate 20 is also determined.
The multiple vibrators 41 and 42 generate traveling waves whose half wavelength is greater than the left-right size of the plate, and vibrate the plate 20 with standing waves that do not generate "nodes."

<<<Summary>>>
The vertical vibration device 100 of this embodiment generates traveling waves 60 with the same amplitude, wavelength and frequency from the left and right sides of the plate 20 simultaneously by the vibrators 41 and 42, which are audible frequency vibration sources. As a result, standing waves are generated in the plate 20 by the superposition of traveling waves in opposite directions.

The vertical vibration generating process of the vertical vibration device 100 of this embodiment generates traveling waves 60 from the left and right sides of the plate 20 at the same frequency simultaneously from an audible frequency vibration source on the plate 20. The plate 20 vibrates due to a standing wave, but vibrates in the vertical direction due to the vibration action of the standing wave. The traveling waves 60 are generated from the vibration of the vertical components of the vibration, and an audible frequency vibration source that vibrates up and down to generate the traveling waves 60 is not necessary.
The traveling wave 60 is also generated from the vibration of the front-rear component of the vibration, but since the front-rear length of the plate 20 is large, no standing wave vibration in the front-rear direction is generated in the plate 20.

The vertical vibration device 100 can change the audible frequency during excitation by the controller 80. The audible frequency is in the range of 10 Hz to 20,000 Hz, but the audible frequency used in this embodiment is set to the range of 10 Hz to 800 Hz.
The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source as a vibration source.
Depending on the required frequency range, the vibration sources of the vibration unit 40, such as the vibrator 41 and the vibrator 42, can be appropriately replaced with other sonic vibration sources such as a voice coil motor type vibration source, an electromagnetic vibration source, or a piezoelectric vibration source.
The controller 80 may have an arbitrary waveform generator or a bipolar power supply as a control part. The controller 80 can be replaced with an arbitrary waveform generator or a bipolar power supply as a control part corresponding to the sonic vibration source in order to vibrate the vibration source at an arbitrary frequency.

The vibration unit 40 includes a pair of vibrators attached to the outer central portions of two opposing sides of the plate 20, and vibrates the plate 20 up and down.
The vibration unit 40 generates traveling waves of the same amplitude, wavelength and frequency simultaneously using a pair of vibrators attached to the outer central parts of two opposing sides of the plate 20, thereby vibrating the plate 20 with standing waves.
In the vertical vibration device 100 of this embodiment, the vibrator 41 and the vibrator 42 are fixed to the outside of the plate 20 with a length Q between them.
The vibrator 41 and the vibrator 42 may not overlap the plate 20 in a plan view.

The vertical vibration device 100 of this embodiment does not vibrate the entire plate 20 uniformly up and down.
In the vertical vibration device 100 of this embodiment, the plate 20 has free ends that can vibrate freely in all directions.
The amplitude is smallest at the left-right central portion of the plate 20, and the amplitude increases from the left-right central portion toward the left-right periphery of the plate 20.
The reason that the amplitude increases toward the left and right periphery is that both the left and right ends of the plate 20 are not fixed, and standing waves are generated in the plate 20.
Furthermore, the amplitude is smallest at the front-rear central portion of the plate 20, and the amplitude increases from the front-rear central portion toward the periphery in the front-rear direction of the plate 20.
The reason that the amplitude increases toward the periphery in the front-to-rear direction is that both the front and rear ends of the plate 20 are not fixed.

In the vertical vibration device 100 of this embodiment, the vibrator 41, the vibrator 42 and the two fixing points 24 are arranged on a straight line.
The fixing positions of the vibrator 41 and the vibrator 42 are outside the two fixing points 24 .
The fixing positions of the vibrator 41 and the vibrator 42 are not inside the two fixing points 24 .
The plate 20 vibrates left and right and up and down due to a flapping phenomenon centered between the two fixed points 24 (supports 26).
The plate 20 vibrates up and down in the front and rear due to a bending phenomenon centered on the two fixing points 24 (supports 26).

<<<<Description of Work 900>>>
As shown in FIG. 8, the workpiece 900 is a rectangular plate.
The workpiece 900 is a flat circuit board on which an electric circuit is formed.
A plurality of electrodes 903 are formed and arranged on the surface of the workpiece 900 .
The surface of the workpiece 900 is flat and free of irregularities.
A conductive adhesive 902 is printed on an electrode 903 of a workpiece 900 by a screen printing device.
The workpiece 900 is a metal plate such as a copper plate, an iron plate, or an aluminum plate, a ceramic plate, a substrate, a resin plate, a glass plate, or the like.
A suitable example of the workpiece 900 is a printed wiring board or a semiconductor wafer on which an electric circuit has already been formed. The workpiece 900 may also be an arrangement board for arranging components 901.
Suitable examples of the conductive adhesive 902 include solder flux, solder paste, or a conductive adhesive.

<<<<Configuration of work holding device 910>>>
The workpiece holding device 910 is a device that holds the workpiece 900 .
The workpiece holding device 910 is a device for mounting a part 901 on a workpiece 900 .
The workpiece holding device 910 holds the workpiece 900 with the surface of the workpiece 900 on which the adhesive 902 is disposed facing down.
The workpiece holding device 910 holds the workpiece 900 by suction from above.
The workpiece holding device 910 has a cylinder that moves the workpiece 900 up and down.
The cylinder moves the rod up and down, causing the plate 20 to move up and down.

<<<<Operation of component supplying method of component supplying device 200>>>
The component supply device 200 transmits the vibrations of the multiple vibrators 41, 42 to the plate 20, causing the plate 20 to vibrate, by using multiple distributors 47, which have multiple vibrators 41, 42 fixed at outer positions away from the side 23 of the plate 20 with the vibration direction being up and down relative to the surface 21 of the plate 20.

<Work transport step>
As shown in FIG. 9, a workpiece holding device 910 holds a workpiece 900 with the surface coated with adhesive 902 facing down.
The workpiece holding device 910 lowers the workpiece 900 toward the part storage 91 .
The vertical vibration device 100 uses multiple vibrators 41, 42 fixed with their vibration directions vertically relative to the surface 21 of the plate 20 to generate traveling waves 60 of the same frequency, wavelength, and amplitude simultaneously at multiple locations on the outer periphery of the plate 20, thereby vibrating the plate 20 vertically.

<Parts supply step>
As shown in FIG. 10, a workpiece holding device 910 holds a workpiece 900, the underside of which is coated with adhesive 902, above a plate 20 for a certain period of time.
The up-and-down vibration device 100 makes the part 901 jump on the plate 20 to adhere the part 901 to the adhesive 902 , and adheres the part 901 to the lower surface of the workpiece 900 .
The component 901 is attached only by the adhesive strength of the adhesive 902 .

The component supplying device 200 does not attract the component 901 to the workpiece 900 by magnetic force.
In the component supply device 200, the workpiece 900 does not have a suction hole for sucking the component 901, and the component 901 is not adsorbed to the workpiece 900 by suction force.
The component supply device 200 does not acquire the component 901 through a mask.

<Work removal step>
As shown in FIG. 11, the workpiece holding device 910 lifts the workpiece 900 from the part storage 91 after a certain period of time has elapsed.

As shown in FIG. 12, the workpiece 900 holds the component 901 on the bottom surface of the workpiece 900 only by the adhesive force of the adhesive 902 .
Any excess part 901 attached, such as part 901x in FIG. 12, is removed by a repair device (not shown).
A repair device (not shown) supplies components 901 to adhesive 902 to which no components 901 have been attached, such as adhesive 902x in FIG.

<<<Features of component supply device 200>>>
The component supplying device 200 has a vertical vibration device 100 and a workpiece holding device 910 .
The vertical vibration device 100 makes the part 901 jump.
The vertical vibration device 100 includes a base 10 , a plate 20 , a vibration absorbing portion 11 , a plurality of vibrators 41 , 42 , and a plurality of distributors 47 .
The vertical vibration device 100 has a frame 90 fixed onto a plate 20 .
The frame 90 forms a parts reservoir 91 for storing parts 901 .
The size of the component reservoir 91 in a plan view is smaller than the size of the plate 20 .
The bottom surface 95 of the parts reservoir 91 is formed with projections and recesses.
The vibration absorbing part 11 is attached between the base 10 and the plate 20 and absorbs vibrations.

The plurality of vibrators 41 and 42 vibrate the outer periphery of the plate 20 at a plurality of locations from positions outside the plate 20 .
The multiple vibrators 41, 42 simultaneously generate traveling waves 60 of the same frequency, same wavelength and same amplitude at multiple points on the outer periphery of the plate 20, and vibrate the plate 20 up and down while the vibrations are absorbed by a vibration absorbing part attached to the plate.
The multiple distributors 47 fix the multiple vibrators 41, 42 at outer positions away from the side 23 of the plate 20 with the vibration direction of the multiple vibrators 41, 42 vertically relative to the plate 20, and transmit the vibration of the multiple vibrators 41, 42 to the plate 20.

The workpiece holding device 910 holds a workpiece 900 having an adhesive 902 applied to its lower surface.
The work holding device 910 positions the workpiece 900 at a height that is less than the jump height of the part 901 .
The vertical vibration device 100 causes the part 901 to jump, bringing the part 901 into contact with the adhesive 902 and adhering the part 901 to the lower surface of the workpiece 900 .

<<<Comparison>>>

Comparative Example 1
<The vibration surface is arranged parallel to the left and right sides 23>
In the configuration of FIG. 1, when the vibration surfaces of the vibrators 41, 42 are arranged parallel to the surfaces of the left and right sides 23 (when the vertical portions 49 and the vibration surfaces are parallel), the plate 20 vibrates in a 360-degree direction and does not vibrate only up and down.

Comparative Example 2
<Attached directly to rear surface 22, attached directly to front surface 21>
When the vibrator is directly attached just below the back surface 22 of the plate 20, or when the vibrator is directly attached just above the front surface 21 of the plate 20, standing wave vibration is less likely to occur compared to when the vibrator is separated from the plate 20. Or, no standing wave vibration occurs.

Comparative Example 3
<Attached directly to side 23>
When the vibrator is directly attached to the side 23 of the plate 20 without the distributor 47, the flapping phenomenon is less likely to occur than when the vibration is propagated by the distributor 47. The flapping phenomenon occurs reliably because the distributor 47 is attached to the vibrator at a distance of length Q outside the fulcrum 26. Theoretically, the larger the length Q, the greater the flapping phenomenon that occurs with the same vibration power.

Comparative Example 4
<Ultrasonic transducer>
When the plate 20 is vibrated by a plurality of ultrasonic vibrators, vertical vibrations with nodes occur in the plate 20, and the plate 20 cannot be vibrated vertically uniformly.
According to this embodiment, the plate 20 vibrates up and down without nodes due to standing waves, so that the plate 20 can be vibrated up and down uniformly.
In the case of an air vibrator with a vibration frequency f of 110 Hz or more and 290 Hz or less, the distance between the fixing points 24 in the left-right direction of the plate 20 may be within 10 m to 25 m, and a sufficiently large plate 20 can be used.
On the other hand, when the plate 20 is vibrated by ultrasonic waves having a vibration frequency f of 20,000 Hz or 50,000 Hz, the distance between the fixing points 24 in the left-right direction of the plate 20 must be less than 0.158 m or less than 0.063 m. If the distance is more than 0.158 m or more than 0.063 m, nodes will occur in the plate 20 and the plate 20 will not be able to vibrate uniformly up and down.
Half wavelength [m] = Wavelength λ [m] ÷ 2 = Sound speed V [m/s] / Vibration frequency f [Hz] ÷ 2
Half wavelength [m] = 6320 [m/s] / 20000 [Hz] ÷ 2 = 0.158 m
Half wavelength [m] = 6320 [m/s] / 50000 [Hz] ÷ 2 = 0.0632 m

When an ultrasonic transducer is used for vibration, the following problems arise:
1. The plate 20 cannot be made large.
The plate 20 becomes small.
The size of the plate 20 can only be about 10 x 10 cm.
2. Nodal control is possible. Nodal points occur in the plate 20, and the entire plate 20 does not vibrate in the same way.
3. The part 901 on the plate 20 does not vibrate evenly. The vibration of the part 901 is blocked at the nodes.
4. The price will be expensive.
The plate 20 vibrating in a standing wave manner by the vibration unit 40 solves the above items 1, 2, 3, and 4.

<<<Effects of First Embodiment>>>
According to this embodiment, a pair of vibrators 42 are disposed at an angle at opposing positions on the outer side of the plate 20 away from the plate 20, so that up and down vibrations can be generated in the plate 20.
According to this embodiment, by generating the traveling waves 60 simultaneously at the same frequency, a standing wave is generated and the plate 20 vibrates in the vertical direction.
According to this embodiment, a bending phenomenon occurs centered on fixed point 24, and the end of plate 20 flexes and vibrates in the vertical direction, but the bottom surface 95 of frame 90 (the central part of plate 20) does not curve but vibrates vertically while remaining flat, so that parts 901 in part reservoir 91 jump evenly.

<<<Vibration measurement example>>>
FIG. 13 shows an example of vibration measurement using the embodiment of the vertical vibration device 100.
1A shows the configuration and measurement points according to an embodiment of the vertical vibration device 100.
1B shows the sizes and specifications of members according to an embodiment of the vertical vibration device 100. In this embodiment, a flexible coupling is used as the vibration absorbing portion 11.
The measurement points are as follows.
Parts storage 91, first row (center row) 5 locations = 1, 2, 3, 4, 5
Five locations on the second inner row of the parts storage 91 (between the center row and the previous row) = 6, 7, 8, 9, 10
Five locations on the third row inside the parts storage area 91 (previous row) = 11, 12, 13, 14, 15
Four places on the left side of plate 20 = 1, 2, 3, 4
Five locations on the front of plate 20 = 5, 6, 7, 8, 9
Vertical vibrations were measured at 15 locations on the inside.
Left-right vibrations were measured at four locations on the left side.
At five points on the front, forward and backward vibrations were measured.
4C shows the measurement results at the measurement points of the embodiment of the vertical vibration device 100.
When both vibrators 41 and 42 are vibrated at 0.3 MPa, 0.4 MPa, or 0.5 MPa, the vertical vibration amplitude of the insides 1 to 15 of the part reservoir 91 is 132 to 210 μm. On the other hand, the maximum horizontal vibration amplitude of the left and front sides of the plate 20 is 4 to 6 μm.
The amplitude of the vertical vibration is more than 30 times that of the horizontal vibration.

4D is a comparative example, showing the measurement results when only the vibrator 41 of the vertical vibration device 100 is vibrated and the vibrator 42 is not vibrated.
When vibrator 41 alone is vibrated at 0.4 MPa and 0.5 MPa, the vertical vibration amplitude of insides 1 to 15 of part reservoir 91 is 54 to 200 μm. On the other hand, the maximum horizontal vibration amplitude of left and front sides of plate 20 is 9.6 to 33 μm.

(e) shows the measurement results at the measurement points on the first, second, and third inner rows.
When vibrated at 0.3 MPa, the vertical vibration amplitudes of the first, second and third rows inside component holder 91 are all approximately 130 to 170 μm, and the vertical vibration amplitudes of each row are approximately the same.
When vibrated at 0.4 MPa, the vertical vibration amplitudes of the first, second and third rows inside component holder 91 are all approximately 150 to 190 μm, and the vertical vibration amplitudes of each row are approximately the same.
When vibrated at 0.5 MPa, the vertical vibration amplitudes of the first, second and third rows inside component holder 91 are all approximately 150 to 210 μm, and the vertical vibration amplitudes of each row are approximately the same.

<<<<Example of changes>>>
●Change example 1.
<Frame 90 and plate 20 are the same size>
14, the size of the frame 90 in FIG. 1 is made the same as the size of the plate 20 in a plan view.
The plate 20 and the frame 90 are integrally molded.
The plate 20 and the frame 90 form a box shape without a lid.
Even if the size of the frame 90 is made the same as that of the plate 20, the frame 90 prevents the plate 20 from bending, thereby suppressing flapping vibration, and the bottom surface 95 vibrates up and down while maintaining a horizontal plane.

●Change example 2.
<Plate 20 is rectangular>
FIG. 15 shows the vertical vibration device 100 of FIG. 1, in which the shape of the plate 20 is changed from square to rectangular.
The length of the short side of the plate 20 is the same as the length of the frame 90 in the front-rear direction.
Therefore, bending vibration is reduced.
The length of the long side of the plate 20 is longer than the length of the frame 90 in the left-right direction.
If the left-right length of the plate 20 is longer than the left-right length of the frame 90, flapping vibration occurs.

●Change example 3.
<Position of vibration absorbing part 11>
16 shows a vertical vibration device 100 in FIG. 15, in which the position of the vibration absorbing portion 11 is changed from the corner of the plate 20 to under the corner of the frame 90. In FIG.
Since the position of the vibration absorbing portion 11 has been changed from the corner of the plate 20 to under the corner of the frame 90, the end portion of the plate 20 is completely free to vibrate, and flapping vibration is generated without being restrained by the vibration absorbing portion 11.
The position of the vibration absorbing section 11 of the vertical vibration device 100 in Fig. 1 may be changed from the corner of the plate 20 to under the corner of the frame 90. The end of the plate 20 becomes completely free to vibrate, and flapping vibration that is not restrained by the vibration absorbing section 11 occurs.

●Change example 4.
<Unevenness on bottom surface 95 of parts storage 91>
As shown in FIG. 17, a bottom plate 92 having an uneven surface may be fixed to the plate 20 at the bottom of a parts reservoir 91 .
The bottom plate 92 is a rectangular metal plate or a rectangular resin plate.
The bottom plate 92 is fixed over its entirety to the front surface 21 of the plate 20 .
The projections and recesses on the bottom plate 92 are formed by sandblasting or etching.
The unevenness of the bottom plate 92 prevents the component 901 from slipping on the bottom surface and prevents the component 901 from jumping diagonally.
The unevenness of the bottom plate 92 promotes the jumping of the part 901 only in the vertical direction.
It is preferable to prepare a plurality of types of bottom plates 92 having projections and recesses suitable for the type and size of component 901, and to replace the bottom plate 92 most suitable for component 901 for use.
It is also possible to form projections and recesses on the entire surface 21 of the plate 20 without using the bottom plate 92 .
Alternatively, the unevenness may be formed only on the portion of the plate 20 that will become the bottom surface 95 of the parts reservoir 91 .

●Change example 5.
<Parts storage 91 with bottom plate 92>
As shown in FIG. 18, a parts storage 91 may be formed of a frame 90 having a bottom plate 92 .
The bottom plate 92 and the frame 90 are integrally molded.
The bottom plate 92 and the frame 90 form a box shape without a lid.
The bottom plate 92 is fixed over its entirety to the front surface 21 of the plate 20 .
The bottom plate 92 prevents the plate 20 from sagging in the center, so that the bottom plate 92 vibrates up and down while maintaining a horizontal plane.

●Change example 6.
<Parts storage 91 with gap 93>
As shown in FIG. 19, a parts reservoir 91 may be formed by a frame 90 having a raised bottom plate 92 raised above the surface 21 of the plate 20 .
The bottom plate 92 and the frame 90 are integrally molded.
There is a gap 93 between the bottom plate 92 and the plate 20 .
Even if the center of the plate 20 is warped, the gap 93 prevents the bottom plate 92 from warping.
Even if the center of the plate 20 is warped, the bottom plate 92 does not deform and vibrates up and down while maintaining a horizontal plane.

●Change example 7.
<Plate 20 with holes 97>
As shown in FIG. 20, a hole 97 may be formed in the center of the plate 20 .
The hole 97 is a rectangular hole that penetrates the plate 20 .
The hole 97 has a size equal to or smaller than the size of the component reservoir 91 in a plan view.
The bottom surface of the frame 90 overlaps the edge of the hole 97 .
The parts storage 91 is a frame 90 having a bottom plate 92 .
The bottom plate 92 and the frame 90 are integrally molded.
Since there is no central portion of the plate 20, the bottom plate 92 does not sag.
Even if the plate 20 flutters, the bottom plate 92 does not deform and vibrates up and down while maintaining a horizontal plane.

●Change example 8.
<Parts storage 91 with inclination 94>
As shown in FIG. 21, a slope 94 may be formed around the periphery of a parts reservoir 91 .
The slope 94 serves to gather the components 901 in the center.
The part 901 jumps more in the center of the part reservoir 91 than on the periphery.
The location where the inclination 94 is formed may be changed according to the component suction area of the workpiece 900 .

●Change example 9.
<Parts storage 91 with recess 96>
As shown in FIG. 22, recesses 96 may be formed in a plurality of locations in the parts reservoir 91.
The recess 96 has the function of collecting the component 901 within the recess 96 .
The parts 901 jump in large numbers in the part of the parts storage 91 where the recesses 96 are located.
The position where the recess 96 is formed may be changed in accordance with the position of the component suction area of the workpiece 900 .

●Change example 10.
<Distributor 47>
The distributor 47 in FIG. 23( a ) has a vertical portion 49 , a horizontal portion 48 , and a fixed portion 46 .
The vertical portion 49, the horizontal portion 48 and the fixed portion 46 are each a flat plate.
The vertical portion 49 is perpendicular to the surface of the plate 20 .
The vertical portion 49 is disposed outside the plate 20 , away from the plate 20 , and secures the vibrator against the surface 21 of the plate 20 .
The horizontal portion 48 is parallel to the surface of the plate 20 .
The horizontal portion 48 is perpendicular to the vertical portion 49 and transmits the vibration of the vertical portion 49 to the plate 20 .
The fixing portion 46 is perpendicular to the horizontal portion 48 and is fixed to the side 23 of the plate 20 .
The fixing portion 46 has a fixing point 24 at which it is fixed to the plate 20 .
Since the fixing portion 46 is fixed to the side 23 of the plate 20, the traveling wave 60 can enter the plate 20 from the left and right end faces, and the entire plate 20 vibrates as a standing wave.

The vertical vibration device 100 has a vibrator 41 and a vibrator 42 fixed to the side 23 of the plate 20 .
The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the back surface 22 of the plate 20 .
Therefore, the traveling waves 60 are generated from both lateral ends of the plate 20, and the entire lateral area of the plate 20 vibrates up and down.

A case in which multiple pairs of vibrators are provided will be described with reference to FIG.
23B shows a case where a plurality of vibrators are attached to one distributor 47 on the right side 23. By attaching a plurality of vibrators to the distributor 47 on the left side 23 as well, a plurality of pairs of vibrators are formed.
The controller operates the pairs of vibrators simultaneously or by switching between the pairs of vibrators.

The distributor 47 in Figure 23 (b) fixes the vibrator 42 and the vibrator 44 to both sides of the vertical portion 49.

In the case of FIG. 23B, when the controller 80 activates the vibrator 42 and the vibrator 44 simultaneously, the added vibration of the vibrator 42 and the vibrator 44 is transmitted to the plate 20.
The controller 80 may cause the rotation directions of the vibrators 42 and 44 to be the same or opposite.
The controller 80 may switch between the vibrator 42 and the vibrator 44 and operate only one of them.

●Change example 11.
<Installation of vibration unit 40>
The vertical vibration device 100 shown in FIG. 24 has the vibration unit 40 attached in a different manner from the configuration shown in FIG.
1A shows a distributor 47 having a vibrator 41 and a vibrator 42 attached to the outside thereof.
13B shows the vibration unit 40 of FIG. 13A mounted upside down.
1C shows a distributor 47 with a different shape and a vibration unit 40 attached thereto.
The distributor 47 is a hollow pipe with a rectangular cross section.
One surface of the distributor 47 is fixed to the side 23, and the other surface is fixed to the vibrator 41 or 42.

●Example change 12.
<Position and number of vibration units 40, and shape of frame 90>
The vertical vibration device 100 may have an even number of vibrators, which is greater than two.
As shown in FIG. 25, a vibrator 41, a vibrator 42, a vibrator 43 and a vibrator 44 may be attached to the plate 20.
1A, the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrators 41 and 43 are fixed to the same side 23, and the vibrators 42 and 44 are fixed to the other side 23.
Standing waves are generated in parallel. Bending is less likely to occur.
1B, the vibrator 41 faces the vibrator 42, and the vibrator 43 faces the vibrator 44. In FIG.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to the respective sides 23.
If the controller 80 operates the four vibrators simultaneously, the standing waves are generated in quadrature.
The controller 80 may switch between the two opposing vibrators to operate them.
1C, the vibrator 41 faces the vibrator 42, and the vibrator 43 faces the vibrator 44. The plate 20 also forms a cylindrical frame 90 in the center.
The vibrator 41, the vibrator 42, the vibrator 43 and the vibrator 44 are fixed to each corner of the plate 20, respectively.
If the controller 80 operates the four vibrators simultaneously, the standing waves are generated perpendicular to each other, and the bending phenomenon is less likely to occur.
The controller 80 may switch between the two opposing vibrators to operate them.
1(d) shows a cylindrical frame 90 formed in the center of a circular plate 20.
The shape of the frame 90 in plan view may be a pentagon, hexagon, octagon, or other polygonal hole, or may be an ellipse, a mountain shape, a trapezoid, a parallelogram, or other shape.
The presence of the frame 90 eliminates the curvature of the central portion of the plate 20, and reduces the curvature of the central portion of the plate 20 in the up and down directions.
The vibration state of the plate 20 can be adjusted by changing the size of the frame 90 .
The smaller the size of the frame 90, the more likely it is that the standing wave vibration, vertical vibration, and bending vibration described above will occur.
Conversely, the larger the size of the frame 90, the more the standing wave vibration, vertical vibration, and bending vibration described above are reduced.

●Example of change 13.
<Planar shape of plate 20>
The planar shape of the plate 20 is not limited to a rectangle.
The shape of the plate 20 in a plan view may be a regular polygon, a circle, an ellipse, or any other shape.
FIG. 26 is a diagram showing the planar shape of the plate 20. As shown in FIG.
1A shows a case where the planar shape of the plate 20 is a cross shape.
4B shows a case where the planar shape of the plate 20 is circular.
1C shows a case where the planar shape of the plate 20 is an elongated rectangle with rounded corners.
4D shows a case where the planar shape of the plate 20 is elliptical.
Although not shown, the planar shape of the plate 20 may be trapezoidal, cloud-shaped, mountain-shaped, irregular, or other shape.

●Change example 14.
<Cross-sectional shape of plate 20>
The upper surface or the lower surface of the plate 20 is not limited to being flat.
The upper or lower surface of the plate 20 may be a curved surface, a combination of multiple flat surfaces, or a combination of a curved surface and a flat surface.
FIG. 27 is a diagram showing a cross-sectional shape of the plate 20 in the Z direction.
The cross-sectional shape of the plate 20 is not limited to a rectangular shape.
6(a), 6(c) and 6(e) show cases where the central lower portion of the plate 20 is recessed upward.
4A shows the case where the surface is recessed into a concave shape.
FIG. 1B shows a case where a V-shaped depression is formed.
FIG. 1C shows an example in which the recess is formed in an arc shape.
6(b), 6(d) and 6(f) show cases where the central upper portion of the plate 20 bulges downward.
4B shows the case where the projection bulges outward.
FIG. 1D shows the case where the bulge is V-shaped.
4(f) shows the case where the curved portion bulges out in an arc shape.
9G shows a case where the central portion of the plate 20 is concavely shaped with recesses on the upper and lower sides. When the central portion of the plate 20 is concavely shaped with recesses on the lower side, the components 901 gather at the center and jump near the center.
9H shows a case where the central portion of the plate 20 has a convex shape bulging upward and downward. When the central portion of the plate 20 has a convex shape bulging upward, the components 901 gather at the periphery and jump around near the periphery.
Although not shown, the cross-sectional shape of the plate 20 may be uneven, wavy, or of other shapes.

The plate 20 does not have to be in a plate shape.
Although not shown, the plate 20 may be box-shaped, dish-shaped, dome-shaped, frame-shaped, or other shapes.

Embodiment 2.
In the second embodiment, differences from the first embodiment will be described.
In the second embodiment, a configuration in which a vibration unit 40 is mounted on a workpiece holding device 910 will be described.

FIG. 28 is a perspective view of a work holding device 910 according to the second embodiment.
FIG. 29 is a front view of a work holding device 910 according to the second embodiment.
FIG. 30 is a side view of a work holding device 910 according to the second embodiment.
In the figure, X indicates the left-right direction.
In the figure, Y indicates the front-rear direction.
In the figure, Z indicates the up-down direction.

<<<Configuration of work holding device 910>>>
The workpiece holding device 910 is a device for receiving a part 901 on the workpiece 900 .
The workpiece holding device 910 has a base 10 , a plate 20 , a vibration absorbing section 11 , a vibration unit 40 , a distributor 47 , and a controller 80 .
The workpiece holding device 910 vibrates the plate 20 up and down in a standing wave manner in the XZ plane.

<<<<Description of Work 900>>>
The workpiece 900 is the same as that in the first embodiment.

<<<<Description of Base 10>>>
The base 10 has a rectangular plate shape.
Two rods 31 are fixed to the upper surface of the base 10 .
The base 10 and the members below the base 10 move up and down as the two rods 31 move up and down.

<<<<Description of Cylinder 30>>>
The cylinder 30 is fixed to a housing of a workpiece transport device (not shown).
The cylinder 30 places the base 10 on the plate 20 and moves the base 10 in the vertical direction.
The cylinder 30 moves the rod 31 up and down, thereby moving the base 10 up and down.
The cylinder 30 positions the plate 20 of the workpiece holding device 910 below the base 10 and moves the plate 20 in the vertical direction.
The workpiece transport device moves the cylinder 30 and transports the workpiece 900 .

<<<<Explanation of Plate 20>>>
The plate 20 has a front surface 21 on the top surface, a back surface 22 on the bottom surface, and four sides 23 (side surfaces).
The rear surface 22 is an adsorption surface 19 that adsorbs the workpiece 900 .

<<<<Description of Controller 80>>>
The controller 80 includes an aspirator 85 .
The suction device 85 sucks air from the suction grooves formed on the suction surface 19 via an air pipe 86 .

<<<<Description of the adsorption surface 19 (full-surface adsorption type)>>>
FIG. 31 is a diagram of the suction surface 19 on the rear surface 22 of the plate 20.
The adsorption surface 19 has a rectangular shape.
The suction surface 19 has the same size as the workpiece 900 .
The suction surface 19 suctions the entire upper surface of the workpiece 900 .
The suction surface 19 has a suction groove 28 .
The suction groove 28 is formed over the entire surface of the suction surface 19 .
The circumferential grooves of the suction grooves 28 are formed along the four sides of the suction surface 19 in parallel with the four sides.
The peripheral groove of the suction surface 19 is formed continuously to the outer edge of the suction surface 19 .
The suction groove 28 is connected to a suction port 29 formed in the side 23 .
The air in the suction groove 28 is sucked through the suction port 29 and the air pipe 86 .
The suction surface 19 continues to suction the entire surface of the workpiece 900 even if the plate 20 vibrates.

The suction surface 19 has a plurality of types of independent suction grooves 28 that are adapted to the shape of the workpiece, and a plurality of suction ports 29 that correspond to the suction grooves 28 .
The suction surface 19 has three types of individual suction grooves 28, which are used to correspond to three different sizes of workpieces 900.
Outer groove: outer rectangular frame-shaped suction groove 28
Inner groove: inner rectangular frame-shaped suction groove 28
Center groove: central suction groove 28 in the shape of a grid

When the plate 20 and the workpiece 900 are the same size, suction is performed by the outer groove, the inner groove, and the center groove.
When the size of the workpiece 900 is smaller than the outer circumference of the outer groove, suction is performed by the inner groove and the middle groove.
When the size of the workpiece 900 is smaller than the outer periphery of the inner groove, suction is performed only through the middle groove.
Regardless of the size of the workpiece 900, the controller 80 uses all of the suction grooves 28 on the inside of the workpiece 900 to suck the entire surface of the workpiece 900.

<<<<Features of the workpiece holding device 910>>>
The workpiece holding device 910 has a plate 20 and a plurality of vibrators 41 and 42 that vibrate a plurality of points on the outer periphery of the plate 20 from positions outside the plate 20 .
The work holding device 910 has a plurality of vibrators 41, 42 whose vibration directions are up and down relative to the plate 20, the vibrators 41, 42 are fixed at outer positions away from the side 23 of the plate 20, and have a plurality of distributors 47 which transmit the vibrations of the vibrators 41, 42 to the plate 20.
The workpiece holding device 910 jumps the part 901 .
The workpiece holding device 910 holds a workpiece 900 having an adhesive 902 applied to its lower surface.
The plate 20 of the workpiece holding device 910 has an adsorption surface 19 on the lower surface thereof for adsorbing the workpiece 900 thereon.
The plate 20 of the workpiece holding device 910 vibrates the workpiece 900 attracted to the attraction surface 19 in a standing wave manner and up and down.

The controller 80 of the work holding device 910 applies vibration to the work 900 after adhering the part 901 to the adhesive 902.

<<<<Effects of the workpiece holding device 910>>>
The workpiece holding device 910 vibrates the workpiece 900 up and down, so that the parts 901 not adhering to the adhesive 902 can be dropped.
The workpiece holding device 910 vibrates the workpiece 900 up and down, so that only the parts 901 that are securely attached to the adhesive 902 can be picked up.

Embodiment 3.
In the third embodiment, differences from the first and second embodiments will be described.

<<<Configuration of Screen Printing Apparatus 700>>>
FIG. 32 is a diagram showing a screen printing apparatus 700 according to the third embodiment.
The screen printing apparatus 700 has a table unit 710 , a screen plate unit 720 , and a squeegee unit 730 .
The table unit 710 , the screen plate unit 720 and the squeegee unit 730 have a vibration unit 40 .
The base 10 is a housing for the screen printing apparatus 700 .

<<<Configuration of table unit 710>>>
FIG. 33 is a perspective view of the table unit 710 of the screen printing apparatus 700. As shown in FIG.
The table unit 710 is the vertical vibration device 100 described in the first embodiment without the frame 90 .
The table unit 710 has a printing table 711 on which the workpiece 900 is placed.
The printing table 711 corresponds to the plate 20 of the up-down vibration device 100 .
The printing table 711 has an adsorption surface 19 shown in FIG. 31 on its front surface 21, and adsorbs and fixes the workpiece 900 thereon.
As the printing table 711 vibrates up and down, the workpiece 900 vibrates only up and down.

<<<Configuration of Screen Plate Unit 720>>>
FIG. 34 is a perspective view of the screen plate unit 720 of the screen printing apparatus 700. As shown in FIG.
The screen plate unit 720 has a plate frame 721 and a screen 722 .
The plate frame 721 corresponds to the plate 20 of the vertical vibration device 100 .
The vibration units 40 are fixed to the left and right sides of the plate frame 721 .
As the screen frame 721 vibrates up and down, the screen 722 vibrates only up and down.

The lower portions of four vibration absorbers 11 are fixed to the four corners of the upper surface of the frame 721 .
The two bases 10 are fixed parts of the screen plate, and the upper parts of four vibration absorbing parts 11 are fixed to four places on the underside.
The plate frame 721 has four fixed shafts 13 on the top surface at four corners.
The two bases 10 have four fixed shafts 12 at four locations on the lower surfaces thereof.
The vibration absorbing portion 11 is a coupling member or a joint member that connects the plate frame 721 and the base 10 .
The vibration absorbing portion 11 absorbs the vibration of the screen plate and prevents the vibration of the plate frame 721 from being transmitted to the base 10 .
The vibration absorbing portion 11 ensures free vibration of the screen frame 721 relative to the base 10 .

<<<Configuration of squeegee unit 730>>>
FIG. 35 is a perspective view of the squeegee unit 730 of the screen printing apparatus 700. As shown in FIG.
The squeegee unit 730 includes a squeegee 731 and a holder 732 .
The holder 732 corresponds to the plate 20 .
The vibration unit 40 is fixed to the left and right upper surfaces of the holder 732 .
As the holder 732 vibrates up and down, the squeegee 731 vibrates only up and down.

The lower portions of two vibration absorbing parts 11 are fixed to two locations on both ends of the upper surface of the holder 732 .
A cylinder 30 is fixed to the base 10 .
The cylinder 30 moves two rods 31 up and down.
The lower part of the rod 31 serves as the fixed shaft 12 .
The upper parts of the two vibration absorbing parts 11 are fixed to the lower parts of the two rods 31 .
The holder 732 has two fixed shafts 13 at two locations on both ends of the upper surface.
The vibration absorbing portion 11 is a coupling member or a joint member that connects the rod 31 and the holder 732 .
The vibration absorbing portion 11 absorbs the vibration of the holder 732 and prevents the vibration of the holder 732 from being transmitted to the base 10 and the cylinder 30 .
The vibration absorbing portion 11 ensures free vibration of the holder 732 relative to the base 10 and the cylinder 30 .

The screen printing apparatus 700 may include at least one of the table unit 710, the screen plate unit 720, and the squeegee unit 730 described above.
The screen printing apparatus 700 is characterized in that the up-and-down vibration device 100 of the first embodiment is used in at least one of a table unit 710, a screen plate unit 720, and a squeegee unit 730.

*** Supplementary explanation of the embodiment ***
The above-described embodiment is merely an example of a preferred embodiment, and is not intended to limit the technical scope of the present invention.
The embodiment may be implemented partially or in combination with other embodiments. Also, the above-described embodiments may be combined.

10 base, 11 vibration absorbing part, 12 fixed shaft, 13 fixed shaft, 19 suction surface, 20 plate, 21 surface, 22 back surface, 23 side, 24 fixing point, 25 screw, 26 fulcrum, 28 suction groove, 29 suction port, 30 cylinder, 31 rod, 40 vibration unit, 41, 42, 43, 44 vibrator, 46 fixing part, 47 distributor, 48 horizontal part, 49 vertical part, 60 traveling wave, 70 standing wave, 80 controller, 81 air compressor, 82 air pipe, 83 regulator, 84 processor, 85 suction device, 86 air pipe, 88 signal line, 90 frame, 91 parts storage, 92 bottom plate, 93 gap, 94 inclination, 95 bottom surface, 96 recess, 97 hole, 100 Up and down vibration device, 200 component supply device, 700 screen printing device, 710 table unit, 711 printing table, 720 screen plate unit, 721 plate frame, 722 screen, 730 squeegee unit, 731 squeegee, 732 holder, 900 work, 901 component, 902 adhesive, 903 electrode, 910 work holding device.

Claims (15)

With the base,
Plate and
a vibration absorbing part attached between the base and the plate to absorb vibrations;
a plurality of vibrators for vibrating a plurality of points on the outer periphery of the plate from positions outside the plate;
a plurality of distributors that fix the plurality of vibrators at outer positions away from the sides of the plate with the vibration directions of the plurality of vibrators vertical to the plate, and transmit the vibrations of the plurality of vibrators to the plate;
The vibration absorbing portion is
A fixed shaft of the base;
A fixed shaft of the plate;
a coupling member that fixes a fixed shaft of the base and a fixed shaft of the plate ,
The coupling member has an absorption width for absorbing axial vibration, and when the maximum vibration width of the plate is outside the range of the absorption width, the vertical vibration device restricts the vibration width of the plate to the absorption width . 2. The vertical vibration device according to claim 1, wherein the coupling member has a vibration absorbing function for absorbing axial vibration of the plate when the maximum vibration amplitude of the plate is within the range of the absorption amplitude . A frame is provided to form a parts storage area,
The vertical vibration device according to claim 1 or 2, wherein a size of the frame in a plan view is smaller than a size of the plate. The vertical vibration device according to claim 3, wherein the bottom surface of the frame is uneven. The vertical vibration device according to claim 3 or 4, wherein the frame has a bottom plate fixed to the surface of the plate. The vertical vibration device according to any one of claims 3 to 5, wherein the frame has a raised bottom plate that is raised above the surface of the plate. The vertical vibration device according to any one of claims 1 to 6, wherein the multiple vibrators simultaneously generate traveling waves of the same frequency, wavelength, and amplitude at multiple locations on the outer periphery of the plate, vibrating the plate vertically. The vertical vibration device according to any one of claims 1 to 7, wherein the plate has a fixing point to which the distributor is fixed, and vibrates in a standing wave with the fixing point as a fulcrum. A vertical vibration device according to any one of claims 1 to 8,
A workpiece holding device for holding a workpiece,
The up-and-down vibration device is a part supplying device that jumps a part to be supplied to the workpiece, and the workpiece acquires the jumped part. The adhesive is disposed on the lower surface of the workpiece so as to be flat and free of irregularities;
The component supplying device according to claim 9 , wherein the workpiece holds the component on the lower surface of the workpiece only by the adhesive force of the adhesive. The component supply device according to claim 9 or 10, wherein the vertical vibration device does not attract the component to the workpiece by magnetic force, does not attract the component to the workpiece by suction force, and does not supply the component through a mask. The component supply device according to any one of claims 9 to 11, wherein the workpiece holding device holds a circuit board as the workpiece. A vertical vibration device according to any one of claims 1 to 8,
A screen printing apparatus in which the above-mentioned up-and-down vibration device is used in at least one of a table unit, a screen plate unit, and a squeegee unit. a plurality of distributors are used to fix the plurality of vibrators at positions outside the plate away from the sides thereof, with the vibration directions of the plurality of vibrators being vertical with respect to the surface of the plate;
The plurality of vibrators simultaneously generate traveling waves having the same frequency, the same wavelength, and the same amplitude at a plurality of locations on the outer periphery of the plate, and the plate is vibrated up and down while the vibration is absorbed by a vibration absorbing portion attached to a base and the plate;
The vibration absorbing section absorbs vibrations in the axial direction by a coupling member that fixes a fixed shaft of the base and a fixed shaft of the plate ,
The coupling member has an absorption width for absorbing axial vibration, and when the maximum vibration width of the plate is outside the range of the absorption width, the vibration width of the plate is restricted to the absorption width . It holds the workpiece with adhesive applied on the underside,
A component supplying method in which a component to be supplied to the workpiece is made to jump above the plate by the up-and-down vibration method described in claim 14, thereby adhering the component to the adhesive and attaching the component to the underside of the workpiece.

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