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JP7657019B2 - Dielectric powder and method for producing the same - Google Patents
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JP7657019B2 - Dielectric powder and method for producing the same - Google Patents

Dielectric powder and method for producing the same Download PDF

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JP7657019B2
JP7657019B2 JP2019146616A JP2019146616A JP7657019B2 JP 7657019 B2 JP7657019 B2 JP 7657019B2 JP 2019146616 A JP2019146616 A JP 2019146616A JP 2019146616 A JP2019146616 A JP 2019146616A JP 7657019 B2 JP7657019 B2 JP 7657019B2
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裕也 小川
優行 高井
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Daiichi Kigenso Kagaku Kogyo Co Ltd
Murata Manufacturing Co Ltd
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Description

本発明は、誘電体粉末およびその製造方法に関する。 The present invention relates to a dielectric powder and a method for producing the same .

積層セラミックコンデンサのように、誘電体粉末を用いて製造される電子部品が知られている。電子部品は、近年小型化が進んでおり、それに伴い、電子部品を製造する際に用いられる誘電体粉末も微小化が求められてきている。 Electronic components such as multilayer ceramic capacitors are known to be manufactured using dielectric powder. In recent years, electronic components have become increasingly smaller, and as a result, there is a demand for the dielectric powder used in manufacturing electronic components to also become smaller.

特開2017-178686号公報JP 2017-178686 A

しかしながら、誘電体粉末は、その製造過程で加えられる熱により粒成長してしまい、さらなる微小化が難しいという問題がある。 However, the heat applied during the manufacturing process causes grain growth in dielectric powder, making it difficult to further miniaturize it.

本発明は、上記課題を解決するものであり、加熱されたときの粒成長を抑制して微粒化することができる誘電体粉末およびそのような誘電体粉末の製造方法を提供することを目的とする。 The present invention is devised to solve the above-mentioned problems, and has an object to provide a dielectric powder that can be atomized by suppressing grain growth when heated , and a method for producing such a dielectric powder .

本発明の誘電体粉末は、少なくともCaおよびZrを含むペロブスカイト型化合物と、Pを含む化合物とを含み、
比表面積が5m 2 /g以上40m 2 /g以下であり、かつ、一次粒子径が33nm以上260nm以下であり、
前記Pは、前記Zr100モル部に対して0.01モル部以上10モル部以下含まれていることを特徴とする。
The dielectric powder of the present invention contains a perovskite type compound containing at least Ca and Zr, and a compound containing P,
The specific surface area is 5 m2 / g or more and 40 m2 /g or less, and the primary particle size is 33 nm or more and 260 nm or less,
The P content is in the range of 0.01 to 10 parts by mol relative to 100 parts by mol of the Zr .

前記Pを含む化合物は、リン酸化合物であってもよい。 The compound containing P may be a phosphate compound.

本発明の誘電体粉末の製造方法は、少なくともCaおよびZrを含むペロブスカイト型化合物と、Pを含む化合物とを含む誘電体粉末の製造方法であって、前記Caを含むCa化合物、前記Zrを含むZr化合物、および、Pを含む化合物の混合物を700℃以上1500℃以下の温度で熱処理する工程を含むことを特徴とする
前記誘電体粉末は、比表面積が5m 2 /g以上40m 2 /g以下であり、かつ、一次粒子径が33nm以上260nm以下であり、前記Pは、前記Zr100モル部に対して0.01モル部以上10モル部以下含まれていてもよい。
また、前記熱処理の後に前記混合物を粉砕する工程を含んでいてもよい。
The method for producing a dielectric powder of the present invention is a method for producing a dielectric powder containing at least a perovskite type compound containing Ca and Zr, and a compound containing P, and is characterized in that it includes a step of heat - treating a mixture of the Ca compound containing Ca, the Zr compound containing Zr, and the compound containing P at a temperature of 700°C or higher and 1500°C or lower.
The dielectric powder may have a specific surface area of 5 m2 /g or more and 40 m2 /g or less and a primary particle size of 33 nm or more and 260 nm or less, and the P may be contained in an amount of 0.01 molar parts or more and 10 molar parts or less relative to 100 molar parts of the Zr.
The method may also include a step of pulverizing the mixture after the heat treatment.

本発明によれば、加熱時の粒成長を抑制して微粒化することができる誘電体粉末を提供することができる。 The present invention provides a dielectric powder that can be atomized by suppressing grain growth during heating.

以下に本発明の実施形態を示して、本発明の特徴を具体的に説明する。 The following describes an embodiment of the present invention and explains its features in detail.

本発明の誘電体粉末は、下記の要件(以下、本発明の要件と呼ぶ)、すなわち、少なくともCaおよびZrを含むペロブスカイト型化合物と、Pを含む化合物とを含み、比表面積が5m 2 /g以上40m 2 /g以下であり、かつ、一次粒子径が33nm以上260nm以下であり、Pは、Zr100モル部に対して0.01モル部以上10モル部以下含まれているという要件を満たす。少なくともCaおよびZrを含むペロブスカイト型化合物は、例えばCaZrO3である。誘電体粉末がPを含む化合物を含有することにより、加熱による粒成長を抑制することができる。 The dielectric powder of the present invention satisfies the following requirements (hereinafter referred to as the requirements of the present invention), that is, it contains a perovskite type compound containing at least Ca and Zr and a compound containing P , has a specific surface area of 5 m2 / g to 40 m2 /g, a primary particle diameter of 33 nm to 260 nm, and P is contained in an amount of 0.01 molar parts to 10 molar parts per 100 molar parts of Zr . The perovskite type compound containing at least Ca and Zr is, for example, CaZrO3 . By containing the compound containing P in the dielectric powder, grain growth due to heating can be suppressed.

本発明の誘電体粉末において、比表面積は5m2/g以上40m2/g以下であり、かつ、一次粒子径が33nm以上260nm以下である。微粒化すると、粒子の結晶性が低下する場合があるが、後述するように、比表面積を40m2/g以下とすることにより、結晶性の低下を抑制することができる。 In the dielectric powder of the present invention, the specific surface area is 5 m2 /g or more and 40 m2 /g or less, and the primary particle size is 33 nm or more and 260 nm or less . When the particles are made finer, the crystallinity of the particles may decrease, but as described later, by setting the specific surface area to 40 m2 /g or less, the decrease in crystallinity can be suppressed.

上述した誘電体粉末は、例えば、一次粒子径が20nm以上150nm以下であるCa化合物、一次粒子径が2nm以上50nm以下であるZr化合物、および、Pを含む化合物を用いて製造することができる。 The above-mentioned dielectric powder can be produced, for example, using a Ca compound having a primary particle diameter of 20 nm or more and 150 nm or less, a Zr compound having a primary particle diameter of 2 nm or more and 50 nm or less, and a compound containing P.

上記Ca化合物は、Caを含む化合物であって、例えば、炭酸カルシウムおよび水酸化カルシウムのうちの少なくとも一方である。また、上記Zr化合物は、Zrを含む化合物であって、例えば、酸化ジルコニウムおよび水酸化ジルコニウムのうちの少なくとも一方である。また、Pを含む化合物は、例えば、リン酸化合物である。 The Ca compound is a compound containing Ca, for example, at least one of calcium carbonate and calcium hydroxide. The Zr compound is a compound containing Zr, for example, at least one of zirconium oxide and zirconium hydroxide. The P compound is, for example, a phosphate compound.

本発明の誘電体粉末は、上述したCaを含むCa化合物、Zrを含むZr化合物、および、Pを含む化合物を混合した混合物を700℃以上1500℃以下の温度で熱処理し、熱処理後に粉砕することによって作製することができる。 The dielectric powder of the present invention can be produced by heat treating a mixture of the Ca-containing Ca compound, the Zr-containing Zr compound, and the P-containing compound at a temperature of 700°C to 1500°C, and then pulverizing the mixture after the heat treatment.

本発明の誘電体粉末は、積層セラミックコンデンサなどの電子部品の製造に用いることができる。 The dielectric powder of the present invention can be used to manufacture electronic components such as multilayer ceramic capacitors.

<実施例>
初めに、一次粒子径が20nm以上150nm以下で、比表面積が7m2/g以上60m2/g以下であるCa化合物と、一次粒子径が2nm以上50nm以下で、比表面積が10m2/g以上200m2/g以下であるZr化合物と、Pを含む化合物とを用意した。ここでは、Ca化合物として炭酸カルシウムを用意し、Zr化合物として酸化ジルコニウムを用意した。
<Example>
First, prepared were a Ca compound having a primary particle size of 20 nm or more and 150 nm or less and a specific surface area of 7 m2 /g or more and 60 m2 /g or less, a Zr compound having a primary particle size of 2 nm or more and 50 nm or less and a specific surface area of 10 m2 /g or more and 200 m2 /g or less, and a compound containing P. Here, calcium carbonate was prepared as the Ca compound, and zirconium oxide was prepared as the Zr compound.

続いて、用意したCa化合物とZr化合物とを溶媒に投入して溶解させ、スラリーを作製した。溶媒として、純水を用いた。溶媒に投入するCa化合物とZr化合物とのモル比(Ca化合物/Zr化合物)は、0.980以上1.025以下であることが好ましく、0.993以上1.014以下であることがより好ましい。 Then, the prepared Ca compound and Zr compound were put into a solvent and dissolved to prepare a slurry. Pure water was used as the solvent. The molar ratio of the Ca compound and Zr compound put into the solvent (Ca compound/Zr compound) is preferably 0.980 or more and 1.025 or less, and more preferably 0.993 or more and 1.014 or less.

続いて、作製したスラリーに、Pを含む化合物を添加してボールミルで混合した後、ビーズミルにより粉砕し、攪拌しながら、70℃以上300℃以下の温度で乾燥させた。Pを含む化合物は、リン酸化合物であり、ここではリン酸水素アンモニウムを用いた。ただし、リン酸化合物がリン酸水素アンモニウムに限定されることはなく、リン酸ナトリウム、リン酸カルシウムなどを用いることもできる。 Then, a compound containing P was added to the prepared slurry and mixed in a ball mill, then pulverized in a bead mill and dried at a temperature of 70°C to 300°C while stirring. The compound containing P is a phosphate compound, and ammonium hydrogen phosphate was used here. However, the phosphate compound is not limited to ammonium hydrogen phosphate, and sodium phosphate, calcium phosphate, etc. can also be used.

その後、生成物をふるいにかけてから熱処理、具体的には、700℃以上1500℃以下の温度で焼成した。焼成温度が700℃未満の場合には、合成不足となり、1500℃より高い場合には、粒成長が抑制されにくくなる。 The product was then sieved and heat-treated, specifically, fired at a temperature between 700°C and 1500°C. If the firing temperature was less than 700°C, synthesis was insufficient, and if it was higher than 1500°C, grain growth was difficult to suppress.

その後、焼生物を水溶液に混ぜてスラリーにした後、ビーズミルで粉砕することによって、誘電体粉末を得た。この誘電体粉末において、Pは、Zr100モル部に対して0.001部モル以上10モル部以下含まれている。Pの含有量がZr100モル部に対して0.001モル部未満の場合には、焼成時に粒成長が抑制されるという効果が得られにくく、10モル部より多い場合には、結晶性が悪化し、Pを入れすぎているので、ジルコニアとカルシウムが接触しなくなり、ジルコン酸カルシウムを得にくい。したがって、セラミックコンデンサの材料として意味をなさなくなる。 The sintered product was then mixed with an aqueous solution to form a slurry, which was then pulverized in a bead mill to obtain a dielectric powder. In this dielectric powder, P is contained in an amount of 0.001 to 10 parts by mole per 100 parts by mole of Zr. If the P content is less than 0.001 parts by mole per 100 parts by mole of Zr, it is difficult to obtain the effect of suppressing grain growth during sintering, and if it is more than 10 parts by mole, the crystallinity deteriorates and, since too much P is added, the zirconia and calcium do not come into contact with each other, making it difficult to obtain calcium zirconate. Therefore, it becomes meaningless as a material for ceramic capacitors.

ここで、試料番号2の誘電体粉末の作製方法において、より詳しい数値を補足しておく。初めに、Ca化合物とZr化合物とを溶媒に投入して溶解させ、スラリーを作製した。溶媒として、純水を用いた。溶媒に投入するCa化合物とZr化合物とのモル比(Ca化合物/Zr化合物)は1.000とした。作製したスラリーに、Pを含む化合物を添加してボールミルで混合した後、ビーズミルにより粉砕し、攪拌しながら、100℃の温度で乾燥させた。Pを含む化合物は、リン酸化合物であり、ここではリン酸水素アンモニウムを用いた。生成物をふるいにかけてから1000℃の温度で焼成し、焼生物を水溶液に混ぜてスラリーにした後、ビーズミルで粉砕することによって、誘電体粉末を得た。 Here, we will provide more detailed numerical values for the method of producing the dielectric powder of sample number 2. First, Ca compounds and Zr compounds were put into a solvent and dissolved to produce a slurry. Pure water was used as the solvent. The molar ratio of Ca compounds to Zr compounds (Ca compounds/Zr compounds) put into the solvent was 1.000. A compound containing P was added to the produced slurry and mixed in a ball mill, then crushed in a bead mill and dried at a temperature of 100°C while stirring. The compound containing P was a phosphate compound, and ammonium hydrogen phosphate was used here. The product was sieved and then fired at a temperature of 1000°C, and the fired product was mixed with an aqueous solution to produce a slurry, and then crushed in a bead mill to obtain a dielectric powder.

ここでは、Pの添加量の異なる複数種類の誘電体粉末を作製して、比表面積およびX線回折によるCaZrO3の第二ピークの半値幅を測定した。比表面積は、例えば、流動法やBET1点法などにより測定することができる。また、X線回折によるCaZrO3の第二ピークの半値幅は、数値が低い方が結晶性が高いことを意味する。作製した試料番号1~15の誘電体粉末の比表面積、一次粒子径の平均値、X線回折によるCaZrO3の第二ピークの半値幅、および、Pの添加量を表1に示す。Pの添加量は、Zr100モル部に対するモル量である。 Here, several kinds of dielectric powders with different amounts of P added were prepared, and the specific surface area and the half width of the second peak of CaZrO 3 by X-ray diffraction were measured. The specific surface area can be measured, for example, by the flow method or the BET one-point method. The lower the value of the half width of the second peak of CaZrO 3 by X-ray diffraction, the higher the crystallinity. The specific surface area, the average value of the primary particle size, the half width of the second peak of CaZrO 3 by X-ray diffraction, and the amount of P added of the prepared dielectric powders of sample numbers 1 to 15 are shown in Table 1. The amount of P added is the molar amount relative to 100 molar parts of Zr.

Figure 0007657019000001
Figure 0007657019000001

表1において、試料番号に*が付されていない試料番号2~14の誘電体粉末は、本発明の要件を満たす誘電体粉末であり、試料番号に*が付されている試料番号1および15の誘電体粉末は、本発明の要件を満たしていない誘電体粉末である。 In Table 1, the dielectric powders of sample numbers 2 to 14 , which are not marked with an *, satisfy the requirements of the present invention, and the dielectric powders of sample numbers 1 and 15 , which are marked with an *, do not satisfy the requirements of the present invention.

Pを含有しておらず、本発明の要件を満たしていない試料番号1の誘電体粉末は、焼成時に粒成長が進み、結晶粒が粗大化する。 The dielectric powder of sample number 1, which does not contain P and does not meet the requirements of the present invention, undergoes grain growth during firing, resulting in coarsening of the crystal grains.

これに対して、Pを含む化合物を含有しており、本発明の要件を満たす試料番号2~14の誘電体粉末は、焼成時の粒成長が抑制される。したがって、本発明の要件を満たす誘電体粉末を用いて、積層セラミックコンデンサのような電子部品を製造すると、誘電体層を薄層化することができ、特性の優れた電子部品を製造することができる。 In contrast, the dielectric powders of sample numbers 2 to 14 , which contain a compound containing P and satisfy the requirements of the present invention, are suppressed in grain growth during firing. Therefore, when an electronic component such as a multilayer ceramic capacitor is manufactured using a dielectric powder satisfying the requirements of the present invention, the dielectric layer can be made thinner, and an electronic component with excellent characteristics can be manufactured.

また、本発明の要件を満たす試料番号2~14の誘電体粉末は、X線回折によるCaZrO3の第二ピークの半値幅が1.0未満であり、結晶性が高い Furthermore, the dielectric powders of sample numbers 2 to 14 which satisfy the requirements of the present invention have a half-width of the second peak of CaZrO 3 measured by X-ray diffraction of less than 1.0, and are highly crystalline .

一方、表1に示すように、比表面積が40m2/gより大きい試料番号15の誘電体粉末は、X線回折によるCaZrO3の第二ピークの半値幅が1.0より大きく、結晶性が低い。 On the other hand, as shown in Table 1, the dielectric powder of sample number 15 having a specific surface area of more than 40 m 2 /g has a half-width of the second peak of CaZrO 3 in X-ray diffraction of more than 1.0 and has low crystallinity.

本発明は、上記実施形態に限定されるものではなく、本発明の範囲内において、種々の応用、変形を加えることが可能である。 The present invention is not limited to the above embodiment, and various applications and modifications are possible within the scope of the present invention.

Claims (4)

少なくともCaおよびZrを含むペロブスカイト型化合物と、Pを含む化合物とを含み、
比表面積が5m2/g以上40m2/g以下であり、かつ、一次粒子径が33nm以上260nm以下であり、
前記Pは、前記Zr100モル部に対して0.01モル部以上10モル部以下含まれており、
前記Pを含む化合物は、リン酸化合物由来であることを特徴とする誘電体粉末。
A perovskite-type compound containing at least Ca and Zr, and a compound containing P,
The specific surface area is 5 m2 /g or more and 40 m2 /g or less, and the primary particle size is 33 nm or more and 260 nm or less,
The P is contained in an amount of 0.01 to 10 parts by mol relative to 100 parts by mol of the Zr,
The dielectric powder, wherein the compound containing P is derived from a phosphate compound.
少なくともCaおよびZrを含むペロブスカイト型化合物と、Pを含む化合物とを含む誘電体粉末の製造方法であって、
前記Caを含むCa化合物、前記Zrを含むZr化合物、および、リン酸化合物の混合物を700℃以上1500℃以下の温度で熱処理する工程を含み、
前記Pを含む化合物は、リン酸化合物由来であることを特徴とする誘電体粉末の製造方法。
A method for producing a dielectric powder containing a perovskite type compound containing at least Ca and Zr and a compound containing P, comprising:
The method includes a step of heat-treating a mixture of the Ca compound containing Ca, the Zr compound containing Zr, and a phosphate compound at a temperature of 700° C. or more and 1500° C. or less;
The method for producing a dielectric powder, wherein the compound containing P is derived from a phosphate compound.
前記誘電体粉末は、比表面積が5m2/g以上40m2/g以下であり、かつ、一次粒子径が33nm以上260nm以下であり、前記Pは、前記Zr100モル部に対して0.01モル部以上10モル部以下含まれていることを特徴とする請求項2に記載の誘電体粉末の製造方法。 3. The method for producing a dielectric powder according to claim 2, characterized in that the dielectric powder has a specific surface area of 5 m2 /g or more and 40 m2 /g or less and a primary particle diameter of 33 nm or more and 260 nm or less, and the P is contained in an amount of 0.01 molar parts or more and 10 molar parts or less relative to 100 molar parts of the Zr. 前記熱処理の後に前記混合物を粉砕する工程をさらに含むことを特徴とする請求項2または3に記載の誘電体粉末の製造方法。 The method for producing a dielectric powder according to claim 2 or 3, further comprising a step of pulverizing the mixture after the heat treatment.
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