JP7658672B2 - Heat Treatment Equipment - Google Patents

Description

This disclosure relates to a heat treatment device.

A technique is known in which a partition is provided in the space between the processing vessel and the heating means provided around it, dividing the space into a first space corresponding to the position where the temperature sensor is provided, and a second space excluding the first space (see, for example, Patent Document 1).

JP 2020-098808 A

This disclosure provides technology that can reduce temperature variation within a processing vessel.

A heat treatment apparatus according to one aspect of the present disclosure has a cylindrical processing vessel, an insulating member arranged around the processing vessel with a space therebetween, a heating element arranged on the inner side of the insulating member, and a partition structure arranged in the space, wherein the partition structure includes a plurality of first partition members extending in the longitudinal direction of the processing vessel and dividing the space, and a plurality of second partition members extending in the circumferential direction of the processing vessel and dividing the space, and each of the plurality of first partition members is freely expandable and contractible in the longitudinal direction of the processing vessel .

This disclosure makes it possible to reduce temperature variations within the processing vessel.

FIG. 1 is a vertical cross-sectional view showing an example of a heat treatment apparatus according to a first embodiment; Cross-sectional view of FIG. FIG. 2 is a perspective view for explaining the partition structure of FIG. 1 ; FIG. 1 is a perspective view showing an example of a heat treatment apparatus according to a second embodiment; FIG. 2 is a perspective view showing an example of a heat treatment apparatus according to a second embodiment; FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to a third embodiment; FIG. 7 is an exploded perspective view of FIG. FIG. 7 is a perspective view showing a modification of the horizontal partition member of FIG. 6 . FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to a fourth embodiment; FIG. 10 is an exploded perspective view of FIG. FIG. 10 is a diagram showing a modification of the horizontal partition member of FIG. 9 . FIG. 10 is a diagram showing another modified example of the horizontal partition member of FIG. 9 . FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to a fifth embodiment; FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to a sixth embodiment; FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to a seventh embodiment; FIG. 16 is an exploded perspective view of FIG. FIG. 16 is a diagram showing a modification of the vertical partition member of FIG. 15 . FIG. 16 is a diagram showing another modified example of the vertical partition member of FIG. 15 . FIG. 16 is a diagram showing yet another modified example of the vertical partition member of FIG. 15 . FIG. 16 is a diagram showing a modification of the horizontal partition member of FIG. 15 . FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to an eighth embodiment; FIG. 22 is a perspective view showing an example of the heat treatment apparatus of FIG. 21 . FIG. 22 is a perspective view showing a modification of the vertical partition member of FIG. 21 . FIG. 13 is a perspective view showing an example of a heat treatment apparatus according to a ninth embodiment; 25 is an exploded perspective view of FIG. FIG. 23 is a perspective view showing an example of a heat treatment apparatus according to a tenth embodiment; FIG. 23 is a perspective view showing an example of a heat treatment apparatus according to an eleventh embodiment; FIG. 23 is a perspective view showing an example of a heat treatment apparatus according to a twelfth embodiment; FIG. 23 is a perspective view showing an example of a heat treatment apparatus according to a thirteenth embodiment; FIG. 23 is a perspective view showing an example of a heat treatment apparatus according to a fourteenth embodiment;

Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the attached drawings. In all the attached drawings, the same or corresponding members or parts are denoted by the same or corresponding reference numerals, and duplicate descriptions will be omitted.

First Embodiment
An example of a heat treatment apparatus 1A according to a first embodiment will be described with reference to Figures 1 to 3. The heat treatment apparatus 1A according to the first embodiment is a batch-type vertical heat treatment apparatus that simultaneously performs heat treatment on a plurality of substrates W. The heat treatment apparatus 1A includes a processing vessel 10, a gas supply unit 30, an exhaust unit 40, a heating unit 50, a temperature sensor 60, a control unit 90, and the like.

The processing vessel 10 can reduce the pressure inside. The processing vessel 10 accommodates a substrate W. The substrate W is, for example, a semiconductor wafer. The processing vessel 10 includes an inner tube 11, an outer tube 12, and the like. The inner tube 11 has a cylindrical shape with an open lower end and an open upper end. The outer tube 12 has a cylindrical shape with a ceiling that is open at the lower end and closed at the upper end. The outer tube 12 is arranged to cover the outside of the inner tube 11. The inner tube 11 and the outer tube 12 are made of a heat-resistant material such as quartz, and are arranged coaxially to form a double tube structure. The inner tube 11 and the outer tube 12 are held at their lower ends by a manifold 13 made of, for example, stainless steel. The manifold 13 is fixed to a base plate 14. However, the entire processing vessel 10 may be made of, for example, quartz without providing the manifold 13.

A disk-shaped lid 15 made of, for example, stainless steel is attached to the opening at the lower end of the manifold 13 so as to be airtightly sealed via a seal member 16. A rotating shaft 18 that can rotate in an airtight state by, for example, a magnetic fluid seal 17 is inserted into the approximate center of the lid 15. The lower end of the rotating shaft 18 is connected to a rotating mechanism 19. A table 20 made of, for example, stainless steel is fixed to the upper end of the rotating shaft 18.

A thermal insulation cylinder 21 made of, for example, quartz is placed on the table 20. A boat 22 made of, for example, quartz is placed on the thermal insulation cylinder 21.

The boat 22 contains multiple (e.g., 50 to 150) substrates W at a predetermined interval (e.g., a pitch of about 10 mm). The boat 22, heat-retaining cylinder 21, table 20, and lid 15 are loaded (carried into) and unloaded (carried out) of the processing vessel 10 as a whole by a lifting mechanism 23, e.g., a boat elevator.

The gas supply unit 30 supplies a processing gas into the processing vessel 10. The gas supply unit 30 includes a gas nozzle 31, a gas supply system 32, etc.

The gas nozzle 31 is made of, for example, quartz. The gas nozzle 31 is provided so as to pass through the manifold 13 airtightly. The base end of the gas nozzle 31 is connected to the gas supply system 32, and the tip is located inside the inner tube 11. The gas nozzle 31 discharges the process gas introduced from the base end into the inner tube 11 from the opening at the tip.

The gas supply system 32 is connected to the base end of the gas nozzle 31. The gas supply system 32 includes a gas source, a valve, a flow controller (none of which are shown), and the like. The gas source includes a deposition gas, an etching gas, a cleaning gas, a purge gas, and the like. The gas supply system 32 introduces the processing gas from the gas source into the gas nozzle 31 by controlling the flow rate with the flow controller.

In the example of FIG. 1, the gas supply unit 30 includes one gas nozzle 31, but this is not limited thereto. For example, the gas supply unit 30 may include two or more gas nozzles.

The exhaust section 40 exhausts various processing gases from within the processing vessel 10. The exhaust section 40 includes a gas outlet 41, an exhaust system 42, etc.

The gas outlet 41 is provided at the top of the manifold 13. The gas outlet 41 is connected to an exhaust system 42.

The exhaust system 42 includes a pressure adjustment valve, a vacuum pump (neither shown), etc. The exhaust system 42 adjusts the pressure inside the processing vessel 10 with the pressure adjustment valve while exhausting the processing gas inside the processing vessel 10 with the vacuum pump.

The heating unit 50 heats the substrate W in the processing vessel 10. The heating unit 50 includes a heat insulating member 51, a protective cover 52, a heating element 53, a holding member 54, etc.

The insulating member 51 has a ceiling and is formed in a cylindrical shape with an open bottom end. The insulating member 51 is provided around the processing vessel 10 with a space S between them. The bottom end of the insulating member 51 is supported by the base plate 14. The insulating member 51 is formed, for example, from a mixture of soft amorphous silica and alumina, which have low thermal conductivity.

The protective cover 52 is attached so as to cover the entire outer periphery of the insulating member 51. The protective cover 52 is made of, for example, stainless steel.

The heating element 53 is arranged in a spirally wound manner on the inner periphery of the insulating member 51. The heating element 53 is held by the holding member 54 so as to be capable of thermal expansion and thermal contraction, with a predetermined gap between the heating element 53 and the inner surface of the insulating member 51. However, instead of being held by the holding member 54, the heating element 53 may be fixed by being fitted into a spiral groove (not shown) formed on the inner periphery of the insulating member 51. The heating element 53 is connected to a power source (not shown) and generates heat when power is supplied from the power source, thereby heating the substrate W held in the boat 22. The heating element 53 is divided into a plurality of heating regions (zones) in the vertical direction (the longitudinal direction of the processing vessel 10). When the heating element 53 is divided into a plurality of heating regions in the vertical direction in this way, the temperature in the vertical direction of the processing vessel 10 can be adjusted by controlling the amount of heat generated by the heating element 53 for each heating region. In the example of FIG. 1, the multiple heating regions include a TOP region, a CT region, a CTR region, a CB region, and a BTM region arranged from top to bottom. Note that the heating element 53 may form a single heating region without being divided into multiple heating regions.

The holding members 54 extend in the axial direction of the insulating member 51 on the inner surface of the insulating member 51 and are provided at predetermined intervals in the circumferential direction. The holding members 54 hold the heating element 53 so that it can thermally expand and contract.

The temperature sensor 60 measures the temperature inside the processing vessel 10. The temperature sensor 60 includes temperature measuring units 61-65. The temperature measuring units 61-65 are provided at intervals in the vertical direction between the inner tube 11 and the outer tube 12. The temperature measuring units 61-65 are provided in the BTM region, CB region, CTR region, CT region, and TOP region, respectively, and measure the temperatures of the BTM region, CB region, CTR region, CT region, and TOP region, respectively. The temperature measuring units 61-65 may be provided in the inner tube 11 or in the space S.

The control unit 90 is configured to control the operation of each part of the heat treatment device 1A. The control unit 90 may be, for example, a computer. The computer program that controls the operation of each part of the heat treatment device 1A is stored in a storage medium. The storage medium may be, for example, a flexible disk, a compact disk, a hard disk, a flash memory, a DVD, etc.

The heat treatment apparatus 1A also has a partition structure 100. The partition structure 100 is provided in the space S. The partition structure 100 is made of a heat-resistant material, for example, a ceramic material such as alumina (Al ₂ O ₃ ) or aluminum nitride (AlN), or quartz. The partition structure 100 includes vertical partition members 111-115, horizontal partition members 121-124, etc.

The vertical partition members 111-115 are spaced apart in the circumferential direction of the processing vessel 10. The lower end of each of the vertical partition members 111-115 is held by the manifold 13. Each of the vertical partition members 111-115 extends in the vertical direction to separate the space S. Each of the vertical partition members 111-115 has a rectangular plate shape, and the upper end extends above the boundary between the TOP region and the CT region.

The horizontal partition members 121 to 124 are provided at intervals in the vertical direction. The horizontal partition members 121 to 124 are provided at the boundary between the BTM area and the CB area, the boundary between the CB area and the CTR area, the boundary between the CTR area and the CT area, and the boundary between the CT area and the TOP area, respectively. Each of the horizontal partition members 121 to 124 extends in the horizontal direction to divide the space S. Each of the horizontal partition members 121 to 124 has a circular plate shape, a center coincident with the center of the outer pipe 12, an inner diameter approximately the same as the outer diameter of the outer pipe 12, and an outer diameter slightly smaller than the inner diameter of the heat insulating member 51. Each of the horizontal partition members 121 to 124 is detachably attached to the vertical partition members 111 to 115. However, each of the horizontal partition members 121 to 124 may be formed integrally with the vertical partition members 111 to 115.

As described above, the heat treatment apparatus 1A of the first embodiment has a plurality of vertical partition members 111-115 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 121-124 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Second Embodiment
An example of a heat treatment apparatus 1B according to a second embodiment will be described with reference to Fig. 4 and Fig. 5. Fig. 4 shows a state before a treatment container is attached inside a heat insulating member, and Fig. 5 shows a state after the treatment container is attached inside the heat insulating member.

The heat treatment apparatus 1B of the second embodiment differs from the heat treatment apparatus 1A in that it has a partition structure 200 instead of the partition structure 100. The rest of the configuration is the same as that of the heat treatment apparatus 1A. The following description will focus on the differences from the heat treatment apparatus 1A.

The partition structure 200 is provided in the space S. The partition structure 200 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 200 includes vertical partition members 211-215, horizontal partition members 221-224, a support member 230, and the like.

The vertical partition members 211-215 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 211-215 extends in the vertical direction to divide the space S. The lower end of each of the vertical partition members 211-215 extends to the lowermost heating area, and the upper end of each of the vertical partition members 211-215 extends to the uppermost heating area. Each of the vertical partition members 211-215 can be folded in a zigzag shape. That is, each of the vertical partition members 211-215 can be expanded and contracted in the vertical direction. For example, each of the vertical partition members 211-215 is folded and contracted when the processing vessel 10 is not attached inside the insulating member 51 (FIG. 4), and extends without being folded when the processing vessel 10 is attached inside the insulating member 51 (FIG. 5).

The horizontal partition members 221-224 may have the same configuration as the horizontal partition members 121-124 in the first embodiment. Each of the horizontal partition members 221-224 moves vertically as the vertical partition members 211-215 expand and contract. For example, when the vertical partition members 211-215 contract, each of the horizontal partition members 221-224 moves to the BTM region. Also, for example, when the vertical partition members 211-215 expand, each of the horizontal partition members 221-224 moves to the boundary between the BTM region and the CB region, the boundary between the CB region and the CTR region, the boundary between the CTR region and the CT region, and the boundary between the CT region and the TOP region, respectively, and divides the space S.

The support member 230 is connected to the upper ends of the vertical partition members 211 to 215. The support member 230 has a cap shape that fits along the ceiling of the outer pipe 12, and is held in the ceiling of the outer pipe 12 (Figure 5). When the support member 230 is held in the ceiling of the outer pipe 12, the vertical partition members 211 to 215 extend.

As described above, the heat treatment apparatus 1B of the second embodiment has a plurality of vertical partition members 211-215 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 221-224 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Third Embodiment
An example of a heat treatment apparatus 1C according to a third embodiment will be described with reference to Fig. 6 and Fig. 7. Note that in Fig. 6 and Fig. 7, illustration of components other than an outer tube and a partition structure is omitted.

The heat treatment apparatus 1C of the third embodiment differs from the heat treatment apparatus 1A in that it has a partition structure 300 instead of the partition structure 100. The rest of the configuration is the same as that of the heat treatment apparatus 1A. The following will mainly explain the differences from the heat treatment apparatus 1A.

The partition structure 300 is provided in the space S. The partition structure 300 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 300 includes vertical partition members 311-314, horizontal partition members 321-323, and the like.

The vertical partition members 311-314 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 311-314 is fixed to the outer peripheral wall of the outer tube 12. Each of the vertical partition members 311-314 extends in the vertical direction to separate the space S. Each of the vertical partition members 311-314 has a rectangular plate shape, with the lower end extending to the lowermost heating area and the upper end extending to the uppermost heating area.

The vertical partition member 311 has three notches 311n ₁ to 311n ₃ spaced apart in the up-down direction. The vertical partition member 312 has three notches 312n ₁ to 312n ₃ spaced apart in the up-down direction. The vertical partition member 313 has three notches 313n 1 to _{313n 3 spaced apart in the up-down direction. The vertical partition member 314 has three notches 314n 1 to} 314n ₃ spaced apart in the up _- down direction.

Each of the notches _311n1 to _311n3 , _312n1 to _312n3 , _313n1 to _313n3 , and _314n1 to _314n3 is formed, for example, at the boundary between adjacent heating regions. Each of the vertical partition members 311 to 314 holds the horizontal partition member 321 at the notches _311n1 , _312n1 , _313n1 , and _314n1 . Each of the vertical partition members 311 to 314 holds the horizontal partition member 322 at the notches _311n2 , _312n2 , _313n2 , and _314n2 . Each of the vertical partition members 311 to 314 holds the horizontal partition member 323 at the notches _311n3 , _312n3 , _313n3 , and _314n3 .

The horizontal partition members 321-323 are spaced apart in the vertical direction. Each of the horizontal partition members 321-323 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 321-323 extends horizontally to separate the space S. Each of the horizontal partition members 321-323 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51. Each of the horizontal partition members 321-323 has a notch 321n-323n formed therein.

The notches 321n to 323n are formed on the inner periphery of the horizontal partition members 321 to 323. The horizontal partition member 321 is attached to the vertical partition members 311 to 314 by moving it downward with the notch 321n aligned with the vertical partition members 311 to 314 (FIG. 7) and rotating it at the height of the notches 311n ₁ , 312n ₁ , 313n ₁ , and 314n ₁ (FIG. 6). The horizontal partition member 322 is attached to the vertical partition members 311 to 314 by moving it downward with the notch 322n aligned with the vertical partition members 311 to 314 (FIG. 7) and rotating it at the height of the notches 311n ₂ , 312n ₂ , 313n ₂ , and 314n ₂ (FIG. 6). The horizontal partition member 323 is attached to the vertical partition members 311 to 314 by moving it downward with the notches 323n aligned with the vertical partition members 311 to 314 (FIG. 7) and rotating it at the height of the notches 311n ₃ , 312n ₃ , 313n ₃ , and 314n ₃ (FIG. 6). In this way, the horizontal partition members 321 to 323 are detachably attached to the vertical partition members 311 to 314.

As described above, the heat treatment apparatus 1C of the third embodiment has a plurality of vertical partition members 311-314 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 321-323 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

In the heat treatment apparatus 1C of the third embodiment, the horizontal partition members 321 to 323 are described as having an annular plate shape, but the present invention is not limited to this. For example, at least one of the horizontal partition members 321 to 323 may be divided into a plurality of pieces in the circumferential direction of the treatment vessel 10. As an example, as shown in FIG. 8, the horizontal partition member 321 may include two divided pieces 321a and 321b having a semicircular plate shape. In this case, when the horizontal partition member 321 is attached to the vertical partition members 311 to 314, it can be attached from the side of the outer tube 12 without attaching it from above the vertical partition members 311 to 314, so that it is not necessary to provide a notch in the horizontal partition member 321. The horizontal partition members 322 and 323 may also be similar to the horizontal partition member 321.

Fourth embodiment
An example of a heat treatment apparatus 1D according to a fourth embodiment will be described with reference to Fig. 9 and Fig. 10. Note that in Fig. 9 and Fig. 10, illustration of components other than an outer tube and a partition structure is omitted.

The heat treatment apparatus 1D of the fourth embodiment differs from the heat treatment apparatus 1C in that it has a partition structure 400 instead of the partition structure 300. The rest of the configuration is the same as that of the heat treatment apparatus 1C. The following will focus on the differences from the heat treatment apparatus 1C.

The partition structure 400 is provided in the space S. The partition structure 400 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 400 includes vertical partition members 411-414, horizontal partition members 421-423, protrusions 431-434, and the like.

The vertical partition members 411-414 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 411-414 extends in the vertical direction to divide the space S. Each of the vertical partition members 411-414 has a rectangular plate shape, with its lower end extending to the lowermost heating area and its upper end extending to the uppermost heating area.

The vertical partition member 411 includes three divided pieces 411a to 411c that are divided in the vertical direction. The vertical partition member 412 includes three divided pieces 412a to 412c that are divided in the vertical direction. The vertical partition member 413 includes three divided pieces 413a to 413c that are divided in the vertical direction.

Segments 411a to 414a are formed integrally with horizontal partition member 421 on the lower surface of horizontal partition member 421. Segments 411b to 414b are formed integrally with horizontal partition member 422 on the lower surface of horizontal partition member 422. Segments 411c to 414c are formed integrally with horizontal partition member 423 on the lower surface of horizontal partition member 423.

The horizontal partition members 421-423 are spaced apart in the vertical direction. Each of the horizontal partition members 421-423 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 421-423 extends in the horizontal direction to separate the space S. Each of the horizontal partition members 421-423 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51. Each of the horizontal partition members 421-423 has a notch 421n-423n formed therein.

The notches 421n to 423n are formed on the inner periphery of the horizontal partition members 421 to 423. The horizontal partition member 421 is attached to the lowermost convex portions 431 to 434 by moving it downward with the notches 421n and the convex portions 431 to 434 aligned (FIG. 10) and rotating it at the height of the upper surfaces of the lowermost convex portions 431 to 434 (FIG. 9). The horizontal partition member 422 is attached to the middle-stage convex portions 431 to 434 by moving it downward with the notches 422n and the convex portions 431 to 434 aligned (FIG. 10) and rotating it at the height of the upper surfaces of the middle-stage convex portions 431 to 434 (FIG. 9). The horizontal partition member 423 is attached to the uppermost convex portion 431-434 by moving it downward with the notch 423n aligned with the convex portions 431-434 (FIG. 10) and rotating it at the same height as the top surface of the uppermost convex portion 431-434 (FIG. 9). In this way, the vertical partition members 411-414 and the horizontal partition members 421-423 are detachably attached to the outer tube 12.

The protrusions 431-434 are spaced apart in the circumferential direction of the processing vessel 10. Each of the protrusions 431-434 protrudes from the outer peripheral wall of the outer tube 12 and holds the horizontal partition members 421-423 on its upper surface. Each of the protrusions 431-434 has, for example, a rectangular parallelepiped shape. However, each of the protrusions 431-434 may have a cylindrical shape with its axial direction being the radial direction of the processing vessel 10.

As described above, the heat treatment apparatus 1D of the fourth embodiment has a plurality of vertical partition members 411-414 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 421-423 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

In the fourth embodiment of the heat treatment device 1D, the horizontal partition members 421 to 423 are formed separately, but this is not limiting. For example, as shown in FIG. 11, two horizontal partition members 421, 422 may be connected by split pieces 411b to 414b and formed as a single unit. Also, for example, two horizontal partition members 422, 423 may be formed as a single unit, or three horizontal partition members 421 to 423 may be formed as a single unit.

In the fourth embodiment of the heat treatment apparatus 1D, the horizontal partition members 421 to 423 are described as having an annular plate shape, but the present invention is not limited to this. For example, at least one of the horizontal partition members 421 to 423 may be divided into a plurality of pieces in the circumferential direction of the treatment vessel 10. As an example, as shown in FIG. 12, the horizontal partition member 421 may include two divided pieces 421a and 421b having a semi-annular plate shape. In this case, when the horizontal partition member 421 is attached to the lowermost convex parts 431 to 434, it can be attached from the side of the outer tube 12 without attaching it from above the convex parts 431 to 434, so that it is not necessary to provide a notch in the horizontal partition member 421. The horizontal partition members 422 and 423 may also be similar to the horizontal partition member 421.

Fifth embodiment
An example of a heat treatment apparatus 1E according to the fifth embodiment will be described with reference to Fig. 13. Note that in Fig. 13, configurations other than the outer tube and the partition structure are omitted from illustration.

The heat treatment apparatus 1E of the fifth embodiment differs from the heat treatment apparatus 1D in that it has a partition structure 500 instead of the partition structure 400. The rest of the configuration is the same as that of the heat treatment apparatus 1D. The following will focus on the differences from the heat treatment apparatus 1D.

The partition structure 500 is provided in the space S. The partition structure 500 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 500 includes vertical partition members 511-514, horizontal partition members 521-523, convex portions 531-534, and the like.

The vertical partition members 511 to 514 may have the same configuration as the vertical partition members 411 to 414 in the fourth embodiment.

The horizontal partition members 521 to 523 are different from the horizontal partition members 421 to 423 of the fourth embodiment in that they do not have the notches 421n to 423n. The rest of the configuration may be the same as the horizontal partition members 421 to 423.

The protrusions 531 to 534 are provided only at the bottom, unlike the protrusions 431 to 434 in the fourth embodiment.

In the partition structure 500, the horizontal partition member 521 is placed on the protrusions 431 to 434, the lower ends of the vertical partition members 511b to 514b are placed on the horizontal partition member 521, and the lower ends of the vertical partition members 511c to 514c are placed on the horizontal partition member 522 (Figure 13).

As described above, the heat treatment apparatus 1E of the fifth embodiment has a plurality of vertical partition members 511-514 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 521-523 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Sixth embodiment
An example of a heat treatment apparatus 1F according to the sixth embodiment will be described with reference to Fig. 14. Note that in Fig. 14, configurations other than an outer tube and a partition structure are omitted from illustration.

The heat treatment apparatus 1F of the sixth embodiment differs from the heat treatment apparatus 1E in that it has a partition structure 600 instead of the partition structure 500. The rest of the configuration is the same as that of the heat treatment apparatus 1E. The following will focus on the differences from the heat treatment apparatus 1D.

The partition structure 600 is provided in the space S. The partition structure 600 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 600 includes vertical partition members 611-614, horizontal partition members 621-623, a protrusion 630, and the like.

The vertical partition members 611 to 614 may have the same configuration as the vertical partition members 511 to 514 in the fifth embodiment.

The horizontal partition members 621 to 623 may have the same configuration as the horizontal partition members 521 to 523 in the fifth embodiment.

The protrusion 630 has a flange shape that protrudes from the outer peripheral wall of the outer tube 12, and holds the horizontal partition members 621 to 623 on its upper surface.

In the partition structure 600, the lower ends of the vertical partition members 611a to 614a are placed on the protrusion 630, the lower ends of the vertical partition members 611b to 614b are placed on the horizontal partition member 621, and the lower ends of the vertical partition members 611c to 614c are placed on the horizontal partition member 622 (Figure 14).

As described above, the heat treatment apparatus 1F of the sixth embodiment has a plurality of vertical partition members 611-614 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 621-623 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Seventh embodiment
An example of a heat treatment apparatus 1G according to the seventh embodiment will be described with reference to Fig. 15 and Fig. 16. Note that in Fig. 15 and Fig. 16, illustration of components other than the outer tube and the partition structure is omitted.

The seventh embodiment of the heat treatment apparatus 1G differs from the heat treatment apparatus 1A in that it has a partition structure 700 instead of the partition structure 100. The rest of the configuration is the same as that of the heat treatment apparatus 1A. The following description will focus on the differences from the heat treatment apparatus 1A.

The partition structure 700 is provided in the space S. The partition structure 700 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 700 includes vertical partition members 711-714, horizontal partition members 721-724, protrusions 731-734, and the like.

The vertical partition members 711-714 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 711-714 is detachably attached to the horizontal partition members 721-724. Each of the vertical partition members 711-714 extends in the vertical direction to divide the space S. Each of the vertical partition members 711-714 has a rectangular plate shape, with its lower end extending to the lowermost heating area and its upper end extending to the uppermost heating area.

Four notches 711n ₁ to 711n ₄ are formed at intervals in the vertical direction in the vertical partition member 711. The vertical partition member 711 is attached to the horizontal partition members 721 to 724 by inserting the notches 711n ₁ to 711n ₄ into the outer notches 721m to 724m.

Four notches 712n ₁ to 712n ₄ are formed at intervals in the vertical direction in the vertical partition member 712. The vertical partition member 712 is attached to the horizontal partition members 721 to 724 by inserting the notches 712n ₁ to 712n ₄ into the outer notches 721m to 724m.

Four notches 713n ₁ to 713n ₄ are formed at intervals in the vertical direction in the vertical partition member 713. The vertical partition member 713 is attached to the horizontal partition members 721 to 724 by inserting the notches 713n ₁ to 713n ₄ into the outer notches 721m to 724m.

Four notches 714n ₁ to 714n ₄ are formed at intervals in the vertical direction in the vertical partition member 714. The vertical partition member 711 is attached to the horizontal partition members 721 to 724 by inserting the notches 714n ₁ to 714n ₄ into the outer notches 721m to 724m.

The horizontal partition members 721-724 are spaced apart in the vertical direction. Each of the horizontal partition members 721-724 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 721-724 extends horizontally to separate the space S. Each of the horizontal partition members 721-724 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51. Each of the horizontal partition members 721-724 has inner notches 721n-724n and outer notches 721m-724m formed therein.

The inner notches 721n to 724n are formed on the inner periphery of the horizontal partition members 721 to 724. The horizontal partition member 721 is attached to the bottommost convex portion 731 to 734 by moving it downward with the inner notch 721n and the convex portions 731 to 734 aligned (FIG. 16) and rotating it at the height of the upper surface of the bottommost convex portion 731 to 734 (FIG. 15). The horizontal partition member 722 is attached to the second-lowest convex portion 731 to 734 by moving it downward with the inner notch 722n and the convex portions 731 to 734 aligned (FIG. 16) and rotating it at the height of the upper surface of the second-lowest convex portion 731 to 734 (FIG. 15). The horizontal partition member 723 is attached onto the third protrusion 731-734 from the bottom by moving it downward with the inner notch 723n aligned with the protrusions 731-734 (FIG. 16) and rotating it at the height of the upper surfaces of the third protrusion 731-734 from the bottom (FIG. 15). The horizontal partition member 724 is attached onto the topmost protrusion 731-734 by moving it downward with the inner notch 724n aligned with the protrusions 731-734 (FIG. 16) and rotating it at the height of the upper surfaces of the topmost protrusion 731-734 (FIG. 15). In this way, the horizontal partition members 721-724 are detachably attached onto the protrusions 731-734.

The outer notches 721m to 724m are formed on the outer periphery of the horizontal partition members 721 to 724.

The protrusions 731-734 are spaced apart in the circumferential direction of the processing vessel 10. Each of the protrusions 731-734 protrudes from the outer peripheral wall of the outer tube 12 and holds the horizontal partition members 721-724. Each of the protrusions 731-734 has, for example, a rectangular parallelepiped shape. However, each of the protrusions 731-734 may have a cylindrical shape with the radial direction of the processing vessel 10 as its axial direction.

As described above, the heat treatment apparatus 1G of the seventh embodiment has a plurality of vertical partition members 711-714 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 721-724 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

In the heat treatment apparatus 1G of the seventh embodiment, the vertical partition members 711 to 714 are formed with the rectangular notches 711n ₁ to 711n ₄ , 712n ₁ to 712n ₄ , 713n ₁ to 713n ₄ , and 714n ₁ to 714n ₄ in a side view, but the present invention is not limited to this. For example, as shown in FIG. 17, the notches 711n ₁ to 711n ₄ may be L-shaped in a side view. Similarly to the notches 711n ₁ to 711n ₄ , the notches 712n ₁ to 712n ₄ , 713n ₁ to 713n ₄ , and 714n ₁ to 714n ₄ may also be L-shaped in a side view. Since the notches 711n ₁ to 711n ₄ , 712n ₁ to 712n ₄ , 713n ₁ to 713n ₄ , and 714n ₁ to 714n ₄ are L-shaped in side view, the vertical partition members 711 to 714 are prevented from detaching from the horizontal partition members 721 to 724 due to vibration or the like.

In addition, in the seventh embodiment of the heat treatment device 1G, the vertical partition members 711-714 extend from the lowermost heating region to the uppermost heating region, but this is not limited to the above. For example, each of the vertical partition members 711-714 may be divided into multiple parts in the vertical direction. As an example, as shown in Figures 18 and 19, the vertical partition member 711 may include two divided pieces 711a and 711b divided in the vertical direction. Furthermore, the vertical partition members 712-714 may be similar to the vertical partition member 711.

In the seventh embodiment of the heat treatment apparatus 1G, the horizontal partition members 721 to 724 are described as having an annular plate shape, but the present invention is not limited to this. For example, at least one of the horizontal partition members 721 to 724 may be divided into a plurality of pieces in the circumferential direction of the treatment vessel 10. As an example, as shown in FIG. 20, the horizontal partition member 721 may include two divided pieces 721a and 721b having a semi-annular plate shape. In this case, when the horizontal partition member 721 is attached to the lowermost convex parts 731 to 734, it can be attached from the side of the outer tube 12 without attaching it from above the convex parts 731 to 734, so that it is not necessary to provide an inner notch in the horizontal partition member 721. In addition, the horizontal partition members 722 to 724 may be similar to the horizontal partition member 721.

Eighth embodiment
An example of a heat treatment apparatus 1H according to an eighth embodiment will be described with reference to Fig. 21 and Fig. 22. Note that in Fig. 21 and Fig. 22, illustration of components other than an outer tube and a partition structure is omitted.

The heat treatment apparatus 1H of the eighth embodiment differs from the heat treatment apparatus 1G in that it has a partition structure 800 instead of the partition structure 700. The rest of the configuration is the same as that of the heat treatment apparatus 1G. The following will focus on the differences from the heat treatment apparatus 1G.

The partition structure 800 is provided in the space S. The partition structure 800 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 800 includes vertical partition members 811-814, horizontal partition members 821-824, protrusions 831-834, and the like.

The vertical partition members 811-814 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 811-814 is detachably attached to the horizontal partition members 821-824. Each of the vertical partition members 811-814 extends in the vertical direction to divide the space S.

Vertical partition member 811 includes segments 811a to 811c, vertical partition member 812 includes segments 812a to 812c, vertical partition member 813 includes segments 813a to 813c, and vertical partition member 814 includes segments 814a to 814c. Segments 811a to 814a are attached between horizontal partition members 821 and 822. Segments 811b to 814b are attached between horizontal partition members 822 and 823. Segments 811c to 814c are attached between horizontal partition members 823 and 824.

The segments 811a to 811c include legs _811a1 to _811c1 , connecting portions _811a2 to _811c2 , and arms _811a3 to _811c3 . The segments 812a to 812c include legs _812a1 to _812c1 , connecting portions 812a2 _{to 812c2,} and arms 812a3 to _812c3 . _The segments 813a to 813c include legs _812a1 to _812c1 , connecting portions _812a2 to _812c2 , and arms _812a3 to _812c3 . The divided pieces 814a to 814c include leg portions 814a ₁ to 814c ₁ , connection portions 814a ₂ to 814c ₂ , and arm portions 814a ₃ to 814c ₃ .

The legs _811a1 to _814a1 have an arc-shaped plate shape with the same curvature as the horizontal partition member 821, and are placed on the horizontal partition member 821. The connecting portions _811a2 to _814a2 have a rectangular plate shape, and connect the legs _811a1 to _814a1 and the arms _811a3 to _814a3 . The arms _811a3 to _814a3 have an arc-shaped plate shape with the same curvature as the horizontal partition member 822, and support the horizontal partition member 822 on their upper surfaces.

The legs 811b ₁ to 814b ₁ have an arc plate shape with the same curvature as the horizontal partition member 822, and are placed on the horizontal partition member 822. The connecting portions 811b ₂ to 814b ₂ have a rectangular plate shape, and connect the legs 811b ₁ to 814b ₁ to the arm portions 811b ₃ to 814b _3. The arm portions 811b ₃ to 814b ₃ have an arc plate shape with the same curvature as the horizontal partition member 823, and support the horizontal partition member 823 on their upper surfaces.

The legs _811c1 to _814c1 have an arc plate shape with the same curvature as the horizontal partition member 823, and are placed on the horizontal partition member 823. The connecting portions _811c2 to _814c2 have a rectangular plate shape, and connect the legs _811c1 to _814c1 to the arm portions _811c3 to _814c3 . The arm portions _811c3 to _814c3 have an arc plate shape with the same curvature as the horizontal partition member 824, and support the horizontal partition member 824 on their upper surfaces.

The horizontal partition members 821-824 are spaced apart in the vertical direction. Each of the horizontal partition members 821-824 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 821-824 extends in the horizontal direction to separate the space S. Each of the horizontal partition members 821-824 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51. Each of the horizontal partition members 821-824 has a notch 821n-824n formed therein.

The notches 821n to 824n are formed on the inner periphery of the horizontal partition members 821 to 824. The horizontal partition member 821 is attached to the bottommost convex portion 831 to 834 by moving it downward with the notch 821n and the convex portions 831 to 834 aligned (FIG. 22) and rotating it at the height of the top surface of the bottommost convex portion 831 to 834 (FIG. 21). The horizontal partition member 822 is attached to the second-lowest convex portion 831 to 834 by moving it downward with the notch 822n and the convex portions 831 to 834 aligned (FIG. 22) and rotating it at the height of the top surface of the second-lowest convex portion 831 to 834 (FIG. 21). The horizontal partition member 823 is attached onto the third protrusion 831-834 from the bottom by moving it downward with the notch 823n aligned with the protrusions 831-834 (FIG. 22) and rotating it at the height of the upper surfaces of the third protrusion 831-834 from the bottom (FIG. 21). The horizontal partition member 824 is attached onto the topmost protrusion 831-834 by moving it downward with the notch 824n aligned with the protrusions 831-834 (FIG. 22) and rotating it at the height of the upper surfaces of the topmost protrusion 831-834 (FIG. 21). In this way, the horizontal partition members 821-824 are detachably attached onto the protrusions 831-834.

The convex portions 831 to 834 may have the same configuration as the convex portions 731 to 734 in the seventh embodiment.

As described above, the heat treatment apparatus 1H of the eighth embodiment has a plurality of vertical partition members 811-814 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 821-824 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

In the heat treatment device 1H of the eighth embodiment, the divided pieces include legs, connecting parts, and arms, but the present invention is not limited to this. For example, as shown in FIG. ₂₃ , the divided pieces 811a may have legs 811a1 and connecting parts _811a2 , but may not have arms _811a3 . The divided pieces 811b to 811c, 812a to 812c, 813a to 813c, and 814a to 814c may have the same configuration as the divided piece 811a. The legs, connecting parts, and arms included in the divided pieces may be formed separately or integrally.

Ninth embodiment
An example of a heat treatment apparatus 1I according to the ninth embodiment will be described with reference to Fig. 24 and Fig. 25. Note that in Fig. 24 and Fig. 25, illustration of the configuration other than the outer tube and the partition structure is omitted.

The heat treatment apparatus 1I of the ninth embodiment differs from the heat treatment apparatus 1G in that it has a partition structure 900 instead of the partition structure 700. The rest of the configuration is the same as that of the heat treatment apparatus 1G. The following description will focus on the differences from the heat treatment apparatus 1G.

The partition structure 900 is provided in the space S. The partition structure 900 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 900 includes vertical partition members 911-914, horizontal partition members 921-924, protrusions 931-934, and the like.

The vertical partition members 911-914 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 911-914 is detachably attached to the horizontal partition members 921-924. Each of the vertical partition members 911-914 extends in the vertical direction to divide the space S.

Vertical partition member 911 includes segments 911a to 911c, vertical partition member 912 includes segments 912a to 912c, vertical partition member 913 includes segments 913a to 913c, and vertical partition member 914 includes segments 914a to 914c. Segments 911a to 914a are attached between horizontal partition members 921 and 922. Segments 911b to 914b are attached between horizontal partition members 922 and 923. Segments 911c to 914c are attached between horizontal partition members 923 and 924.

The horizontal partition members 921-924 are spaced apart in the vertical direction. Each of the horizontal partition members 921-924 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 921-924 extends horizontally to separate the space S. Each of the horizontal partition members 921-924 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51. Each of the horizontal partition members 921-924 has notches 921n-924n and guide portions 921g-923g formed therein.

The notches 921n to 924n are formed on the inner periphery of the horizontal partition members 921 to 924. The horizontal partition member 921 is attached to the bottommost convex portion 931 to 934 by moving it downward with the notches 921n and the convex portions 931 to 934 aligned (FIG. 25) and rotating it at the height of the top surface of the bottommost convex portion 931 to 934 (FIG. 24). The horizontal partition member 922 is attached to the second-lowest convex portion 931 to 934 by moving it downward with the notches 922n and the convex portions 931 to 934 aligned (FIG. 25) and rotating it at the height of the top surface of the second-lowest convex portion 931 to 934 (FIG. 24). The horizontal partition member 923 is attached onto the third protrusion 931-934 from the bottom by moving it downward with the notch 923n aligned with the protrusions 931-934 (FIG. 25) and rotating it at the height of the upper surfaces of the third protrusion 931-934 from the bottom (FIG. 24). The horizontal partition member 924 is attached onto the topmost protrusion 931-934 by moving it downward with the notch 924n aligned with the protrusions 931-934 (FIG. 25) and rotating it at the height of the upper surfaces of the topmost protrusion 931-934 (FIG. 24). In this way, the horizontal partition members 921-924 are detachably attached onto the protrusions 931-934.

The guide portions 921g to 923g are fixed to the horizontal partition members 921 to 924, and hold the vertical partition members 911 to 914 between the adjacent horizontal partition members 921 to 924. The guide portion 921g includes a lower guide _921g1 fixed to the upper surface of the horizontal partition member 921 and an upper guide 921g2 fixed to the lower surface of the horizontal partition member 921, and holds the divided pieces 911a to 914a between the horizontal partition members 921 and 922. The guide portion 922g includes _a lower guide 922g1 fixed to the upper surface of the horizontal partition member ₉₂₂ and an upper guide _922g2 fixed to the lower surface of the horizontal partition member 923, and holds the divided pieces 911b to 914b between the horizontal partition members 922 and 923. The guide portion 923g includes a lower guide 923g1 fixed to the upper surface of the horizontal partition member ₉₂₃ and an upper guide _923g2 fixed to the lower surface of the horizontal partition member 924, and holds the divided pieces 911c to 914c between the horizontal partition members 923 and 924.

The convex portions 931 to 934 may have the same configuration as the convex portions 731 to 734 in the seventh embodiment.

As described above, the heat treatment apparatus 1I of the ninth embodiment has a plurality of vertical partition members 911-914 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 921-924 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Tenth embodiment
An example of a heat treatment apparatus 1J according to the tenth embodiment will be described with reference to Fig. 26. Note that in Fig. 26, illustration of the configuration other than the partition structure is omitted.

The heat treatment apparatus 1J of the tenth embodiment differs from the heat treatment apparatus 1A in that it has a partition structure 1000 instead of the partition structure 100. The rest of the configuration is the same as that of the heat treatment apparatus 1A. The following description will focus on the differences from the heat treatment apparatus 1A.

The partition structure 1000 is provided in the space S. The partition structure 1000 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 1000 includes vertical partition members 1011-1014, horizontal partition members 1021-1024, upper partition members 1031-1034, and the like.

The vertical partition members 1011-1014 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 1011-1014 is attached to a horizontal partition member 1021-1024. Each of the vertical partition members 1011-1014 extends in the vertical direction to divide the space S.

The horizontal partition members 1021-1024 are spaced apart in the vertical direction. Each of the horizontal partition members 1021-1024 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 1021-1024 extends in the horizontal direction to separate the space S. Each of the horizontal partition members 1021-1024 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51.

The upper partition members 1031-1034 are provided at intervals in the circumferential direction of the processing vessel 10 between the ceiling of the outer pipe 12 and the ceiling of the insulating member 51. Each of the upper partition members 1031-1034 extends in the radial direction of the outer pipe 12 and separates the space S between the ceiling of the outer pipe 12 and the ceiling of the insulating member 51. Each of the upper partition members 1031-1034 is attached to the upper surface of the horizontal partition member 1024, for example.

As described above, the heat treatment apparatus 1J of the tenth embodiment has a plurality of vertical partition members 1011-1014 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 1021-1024 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

The heat treatment apparatus 1J of the tenth embodiment also has upper partition members 1031-1034 that extend radially of the outer tube 12 and partition the space S between the ceiling of the outer tube 12 and the ceiling of the insulating member 51. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S between the ceiling of the outer tube 12 and the ceiling of the insulating member 51. As a result, the temperature variation within the processing vessel 10 can be further reduced.

Eleventh embodiment
An example of a heat treatment apparatus 1K according to the eleventh embodiment will be described with reference to Fig. 27. Note that in Fig. 27, configurations other than the outer tube and the partition structure are omitted from illustration.

The heat treatment apparatus 1K of the eleventh embodiment differs from the heat treatment apparatus 1A in that it has a partition structure 1100 instead of the partition structure 100. The rest of the configuration is the same as that of the heat treatment apparatus 1A. The following description will focus on the differences from the heat treatment apparatus 1A.

The partition structure 1100 is provided in the space S. The partition structure 1100 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 1100 includes vertical partition members 1111-1114, horizontal partition members 1121-1123, a convex portion 1130, a hanging portion 1140, and the like.

The vertical partition members 1111-1114 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 1111-1114 extends in the vertical direction to separate the space S.

The horizontal partition members 1121-1123 are spaced apart in the vertical direction. Each of the horizontal partition members 1121-1123 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 1121-1123 extends horizontally to separate the space S. Each of the horizontal partition members 1121-1123 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51. The horizontal partition members 1121-1123 are formed integrally with the vertical partition members 1111-1114.

The protrusion 1130 is attached to the top of the outer tube 12. The protrusion 1130 has, for example, a cylindrical shape with the axial direction being the up-down direction. However, the protrusion 1130 may also have a rectangular parallelepiped shape.

The hanging portion 1140 has one end attached to the convex portion 1130 and the other end attached to the vertical partition members 1111-1114, and holds the vertical partition members 1111-1114 in a suspended state relative to the convex portion 1130.

As described above, the heat treatment apparatus 1K of the eleventh embodiment has a plurality of vertical partition members 1111-1114 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 1121-1123 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

[Twelfth embodiment]
An example of a heat treatment apparatus 1L according to the twelfth embodiment will be described with reference to Fig. 28. Note that in Fig. 28, configurations other than the outer tube and the partition structure are omitted from illustration.

The heat treatment apparatus 1L of the twelfth embodiment differs from the heat treatment apparatus 1K in that it has a partition structure 1200 instead of the partition structure 1100. The rest of the configuration is the same as that of the heat treatment apparatus 1K. The following description will focus on the differences from the heat treatment apparatus 1K.

The partition structure 1200 is provided in the space S. The partition structure 1200 is formed of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 1200 includes vertical partition members 1211-1214, horizontal partition members 1221-1223, hanging portions 1231-1234, and the like.

The vertical partition members 1211 to 1214 may have the same configuration as the vertical partition members 1111 to 1114 in the eleventh embodiment.

The horizontal partition members 1221 to 1223 may have the same configuration as the horizontal partition members 1121 to 1123 in the eleventh embodiment.

The hanging parts 1231 to 1234 have one end attached to the ceiling of the insulation member 51 and the other end attached to the upper ends of the vertical partition members 1211 to 1214, and hold the vertical partition members 1211 to 1214 in a suspended state relative to the insulation member 51.

As described above, the heat treatment apparatus 1K of the twelfth embodiment has a plurality of vertical partition members 1211-1214 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 1221-1223 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Thirteenth embodiment
An example of a heat treatment apparatus 1M according to the thirteenth embodiment will be described with reference to Fig. 29. Note that in Fig. 29, illustration of components other than the outer tube and the partition structure is omitted.

The heat treatment apparatus 1M of the thirteenth embodiment differs from the heat treatment apparatus 1K in that it has a partition structure 1300 instead of the partition structure 1100. The rest of the configuration is the same as that of the heat treatment apparatus 1K. The following description will focus on the differences from the heat treatment apparatus 1K.

The partition structure 1300 is provided in the space S. The partition structure 1300 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 1300 includes vertical partition members 1311-1314, horizontal partition members 1321-1323, and the like.

The vertical partition members 1311 to 1314 may have the same configuration as the vertical partition members 1111 to 1114 in the eleventh embodiment.

The horizontal partition members 1321 to 1323 may have the same configuration as the horizontal partition members 1121 to 1123 of the eleventh embodiment. The lower ends of the horizontal partition members 1321 to 1323 are placed on the manifold 13.

As described above, the heat treatment apparatus 1K of the thirteenth embodiment has a plurality of vertical partition members 1311-1314 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 1321-1323 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

Fourteenth embodiment
An example of a heat treatment apparatus 1N according to a fourteenth embodiment will be described with reference to Fig. 30. Note that in Fig. 30, configurations other than the outer tube and the partition structure are omitted.

The heat treatment apparatus 1N of the 14th embodiment differs from the heat treatment apparatus 1K in that it has a partition structure 1400 instead of the partition structure 1100. The rest of the configuration is the same as that of the heat treatment apparatus 1K. The following will focus on the differences from the heat treatment apparatus 1K.

The partition structure 1400 is provided in the space S. The partition structure 1400 is made of a heat-resistant material, for example, a ceramic material such as Al ₂ O ₃ or AlN, or quartz. The partition structure 1400 includes vertical partition members 1411 to 1414, horizontal partition members 1421 to 1423, and the like.

The vertical partition members 1411 to 1414 are spaced apart in the circumferential direction of the processing vessel 10. Each of the vertical partition members 1411 to 1414 extends in the vertical direction to separate the space S.

The horizontal partition members 1421-1423 are spaced apart in the vertical direction. Each of the horizontal partition members 1421-1423 is provided at the boundary between adjacent heating regions. Each of the horizontal partition members 1421-1423 extends in the horizontal direction to separate the space S. Each of the horizontal partition members 1421-1423 has an annular plate shape, a center coincident with the center of the outer tube 12, an inner diameter approximately the same as the outer diameter of the outer tube 12, and an outer diameter slightly smaller than the inner diameter of the insulating member 51.

The vertical partition members 1411-1414 and the horizontal partition members 1421-1423 are formed integrally and fixed to the outer peripheral wall of the outer tube 12. The vertical partition members 1411-1414 and the horizontal partition members 1421-1423 may be formed integrally with the outer tube 12.

As described above, the heat treatment apparatus 1N of the 14th embodiment has a plurality of vertical partition members 1411-1414 that extend in the vertical direction and divide the space S, and a plurality of horizontal partition members 1421-1423 that extend in the horizontal direction and divide the space S. This makes it possible to suppress the occurrence of convection in the circumferential direction of the processing vessel 10 within the space S, and also to suppress the occurrence of convection between different heating regions. As a result, the temperature variation within the processing vessel 10 can be reduced.

In the above embodiment, the vertical partition members 111-114, 211-214, 311-314, 411-414, 511-514, 611-614, 711-714, 811-814, 911-914, 1011-1014, 1111-1114, 1211-1214, 1311-1314, and 1411-1414 are examples of first partition members.

In addition, in the above embodiment, horizontal partition members 121-124, 221-224, 321-323, 421-423, 521-523, 621-623, 721-724, 821-824, 921-924, 1021-1024, 1121-1123, 1221-1223, 1321-1323, and 1421-1423 are examples of second partition members.

In addition, in the above embodiment, the upper partition members 1031 to 1034 are an example of a third partition member.

The embodiments disclosed herein should be considered in all respects as illustrative and not restrictive. The above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims.

In the above embodiment, the partition structure includes four vertical partition members, but the present disclosure is not limited to this. For example, the partition structure may include two or three vertical partition members, or may include five or more vertical partition members.

In addition, in the above embodiment, the partition structure includes three or four horizontal partition members, but the present disclosure is not limited to this. For example, the partition structure may include two horizontal partition members, or may include five or more horizontal partition members.

1A to 1N Heat treatment apparatus 10 Treatment vessel 51 Heat insulating member 53 Heat generating element 100 Partition structure 111 to 114 Vertical partition members 121 to 124 Horizontal partition members S Space

Claims (16)

A cylindrical processing vessel;
a heat insulating member provided around the processing vessel with a space therebetween;
A heating element provided on an inner circumferential side of the heat insulating member;
A partition structure provided in the space;
having
The partition structure includes:
a plurality of first partition members extending in a longitudinal direction of the processing vessel and partitioning the space;
a plurality of second partition members extending in a circumferential direction of the processing vessel to partition the space;
Including ,
Each of the plurality of first partition members is extendable and contractible in a longitudinal direction of the processing vessel.
Heat treatment equipment. A cylindrical processing vessel;
a heat insulating member provided around the processing vessel with a space therebetween;
A heating element provided on an inner circumferential side of the heat insulating member;
A partition structure provided in the space;
having
The partition structure includes:
a plurality of first partition members extending in a longitudinal direction of the processing vessel and partitioning the space;
a plurality of second partition members extending in a circumferential direction of the processing vessel to partition the space;
Including ,
One or more of the plurality of first partition members and one or more of the plurality of second partition members are integrally formed.
Heat treatment equipment. A cylindrical processing vessel having one end closed ;
a heat insulating member provided around the processing vessel with a space therebetween;
A heating element provided on an inner circumferential side of the heat insulating member;
A partition structure provided in the space;
having
The partition structure includes:
a plurality of first partition members extending in a longitudinal direction of the processing vessel and partitioning the space;
a plurality of second partition members extending in a circumferential direction of the processing vessel to partition the space;
a support member held at the one end of the processing vessel;
Including ,
The support member is connected to the plurality of first partition members.
Heat treatment equipment. The partition structure is detachably attached to the processing vessel.
The heat treatment apparatus according to claim 1 . The partition structure is integrally formed with the processing vessel.
The heat treatment apparatus according to claim 2 . The partition structure is supported by the heat insulating member.
The heat treatment apparatus according to claim 2 . The plurality of first partition members are provided at intervals in a circumferential direction of the processing vessel.
The heat treatment apparatus according to claim 1 . Each of the plurality of first partition members has a rectangular plate shape.
The heat treatment apparatus according to claim 1 . At least one of the plurality of first partition members includes a plurality of divided pieces divided in a longitudinal direction of the processing vessel.
The heat treatment apparatus according to claim 2 . Each of the plurality of first partition members is extendable and contractible in a longitudinal direction of the processing vessel.
The heat treatment device according to claim 3 . Each of the plurality of second partition members has an annular plate shape.
The heat treatment apparatus according to claim 1 . At least one of the plurality of second partition members includes a plurality of divided pieces divided in a circumferential direction of the processing vessel.
The heat treatment apparatus according to claim 1 . The plurality of first partition members and the plurality of second partition members are detachably connected to each other.
The heat treatment apparatus according to claim 1 . the partition structure includes a plurality of protrusions protruding from an outer peripheral wall of the processing vessel and holding the plurality of second partition members;
The heat treatment apparatus according to claim 2 . The processing vessel has one end closed,
the partition structure includes a third partition member that partitions a space between the one end of the processing vessel and the heat insulating member.
The heat treatment apparatus according to claim 2 . The partition structure is formed of a heat-resistant material.
The heat treatment apparatus according to claim 1 .

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