JP7679682B2 - Multilayer wiring board, composite wiring board, packaged device, and method for manufacturing multilayer wiring board - Google Patents

Description

The present invention relates to a multilayer wiring board, a composite wiring board, a packaged device, and a method for manufacturing a multilayer wiring board.

In recent years, as semiconductor devices have become faster and more highly integrated, there is a demand for wiring boards for flip chip ball grid arrays (FC-BGA boards) on which semiconductor chips are mounted, with narrower pitches for the bonding terminals used to bond with the semiconductor chips and finer wiring within the board. On the other hand, bonding between FC-BGA boards and motherboards requires bonding with bonding terminals arranged at roughly the same pitch as before. In response to these demands, technology has been adopted to provide a multilayer wiring board containing fine wiring, also known as an interposer, between the FC-BGA board and the semiconductor chip.

One of these is silicon interposer technology. This technology manufactures interposers by forming a multi-layer wiring structure, each layer of which contains fine wiring, on a silicon wafer using semiconductor circuit manufacturing technology.

A method has also been developed in which the above multi-layer wiring structure is directly built into the FC-BGA substrate, rather than being formed on a silicon wafer. This method involves forming the above multi-layer wiring structure using chemical mechanical polishing (CMP) or the like in the manufacture of an FC-BGA substrate whose core layer is made of, for example, a glass epoxy substrate. This is disclosed in Patent Document 1.

There is also a method (hereinafter referred to as the transfer method) in which an interposer is formed on a support such as a glass substrate, the interposer is bonded to an FC-BGA substrate, and then the support is peeled off from the interposer, thereby providing the above-mentioned multilayer wiring structure on the FC-BGA substrate. This method is disclosed in Patent Document 2.

JP 2014-225671 A International Publication No. 2018/047861

The present invention aims to provide a multilayer wiring board, a composite wiring board, a packaged device, and a method for manufacturing a multilayer wiring board that have excellent insulation reliability.

According to one aspect of the present invention, there is provided a multilayer wiring board including an insulating resin layer having two or more layers stacked on top of each other, each of the two or more layers having a first surface and a second surface that is the back surface of the insulating resin layer, a first recess opening on the first surface, a groove opening on the first surface, and a second recess opening on the second surface and communicating with one or more of the first recesses, and formed integrally in the thickness direction; a land portion and a wiring portion in which the first recess and the groove portion of the insulating resin layer are respectively filled; and a via portion protruding from the first surface at the position of the land portion, the via portion being a conductor layer in which a recess of another insulating resin layer adjacent to the first surface side is filled; and an inorganic insulating layer including a first portion covering the first surface, a second portion covering the bottom surface of the groove portion, and a third portion covering the bottom surface of the first recess.

Here, the insulating resin layer being "integrally formed in the thickness direction" means that there are no internal interfaces that cross the thickness direction of the insulating resin layer, i.e., the insulating resin layer has a single-layer structure. Even if multiple insulating layers stacked on top of each other are made of the same material, their interfaces can be confirmed by observing the cross section with an electron microscope such as a scanning electron microscope.

According to another aspect of the present invention, a multilayer wiring board according to the above aspect is provided, in which the first portion is thicker than the second portion and the third portion.

According to another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which the inorganic insulating layer further includes a fourth portion covering the sidewall of the first recess and a fifth portion covering the sidewall of the groove, and the first portion is thicker than the fourth portion and the fifth portion.

According to yet another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which the first portion has a two-layer structure, and the inorganic insulating layer other than the first portion has a single-layer structure.

According to yet another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which the inorganic insulating layer includes a first inorganic insulating layer and a second inorganic insulating layer, the first inorganic insulating layer covers the first surface with the second inorganic insulating layer sandwiched therebetween, has a through hole and a slit at the position of the first recess and the position of the groove, respectively, and the second inorganic insulating layer extends over the entire inorganic insulating layer.

According to yet another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which the inorganic insulating layer contains one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon.

According to yet another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which each of the two or more layers further includes a first metal-containing layer that covers the periphery of the land portion, the side surfaces of the wiring portion and the via portion, the surface of the wiring portion facing the opening of the groove portion, and the surface of the land portion facing the first surface.

Alternatively, according to yet another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which each of the two or more layers further includes a first metal layer that covers the side surfaces of the land portion, the wiring portion, and the via portion and the surface on the first surface side.

According to yet another aspect of the present invention, there is provided a multilayer wiring board according to the above aspect, in which each of the two or more layers further includes a second metal-containing layer interposed between the first metal-containing layer and the conductor layer, the second metal-containing layer being made of the same material as the conductor layer or made of a metal material having a smaller ionization tendency than the material of the conductor layer.

According to yet another aspect of the present invention, there is provided a multilayer wiring board according to any of the above aspects, in which the first metal-containing layer contains titanium.

According to yet another aspect of the present invention, there is provided a composite wiring board comprising a first wiring board and a second wiring board joined to the first wiring board, the first and second wiring boards being electrically connected to each other via a joining electrode interposed between them, and the second wiring board being a multilayer wiring board according to any of the above aspects.

According to yet another aspect of the present invention, there is provided a composite wiring board according to the above aspect, in which the first wiring board is a wiring board for a flip chip ball grid array, and the second wiring board is an interposer.

According to yet another aspect of the present invention, there is provided a packaged device comprising a composite wiring board according to any of the above aspects and a functional device mounted on a surface of the second wiring board opposite the first wiring board.

Here, a "functional device" is a device that operates when supplied with at least one of power and an electrical signal, a device that outputs at least one of power and an electrical signal in response to an external stimulus, or a device that operates when supplied with at least one of power and an electrical signal and outputs at least one of power and an electrical signal in response to an external stimulus. The functional device is in the form of a chip, such as a semiconductor chip or a chip in which circuits and elements are formed on a substrate made of a material other than a semiconductor, such as a glass substrate. The functional device may include, for example, one or more of a large scale integrated circuit (LSI), a memory, an imaging element, a light-emitting element, and a MEMS (Micro Electro Mechanical Systems). The MEMS is, for example, one or more of a pressure sensor, an acceleration sensor, a gyro sensor, a tilt sensor, a microphone, and an acoustic sensor. According to one example, the functional device is a semiconductor chip including an LSI.

According to yet another aspect of the present invention, the method includes forming two or more laminated layers, and the formation of each of the two or more layers includes forming a recess in an insulating resin layer, forming a first inorganic insulating layer that covers the upper surface of the insulating resin layer and the inner surface of the recess, forming a dummy layer on the first inorganic insulating layer having a groove and at least one through hole communicating with the recess, removing the portion of the inorganic insulating layer including the first inorganic insulating layer that is exposed in the recess, the groove, and the through hole, forming a conductor layer on the dummy layer so as to fill the recess, the groove, and the through hole, and removing the recess, the groove, Alternatively, a method for manufacturing a multilayer wiring board is provided, which includes polishing the conductor layer so that the portion outside the through hole is removed, and obtaining the portion of the conductor layer in which the recess is filled, the portion in which the through hole is filled, and the portion in which the groove is filled as a via portion, a land portion, and a wiring portion, respectively, and then removing the dummy layer; forming a second inorganic insulating layer that covers the upper surface of the first inorganic insulating layer, the upper surface of the land portion, and the upper surface of the wiring portion; and providing an insulating resin layer that covers the second inorganic insulating layer and fills the gap between the land portion and the wiring portion.

According to another aspect of the present invention, there is provided a method for manufacturing a multilayer wiring board according to the above aspect, in which the second inorganic insulating layer is formed so as to further cover the side surface of the land portion and the side surface of the wiring portion.

According to yet another aspect of the present invention, there is provided a method for manufacturing a multilayer wiring board according to any of the above aspects, in which the inorganic insulating layer contains one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon.

According to yet another aspect of the present invention, there is provided a method for manufacturing a multilayer wiring board according to any of the above aspects, in which the formation of each of the two or more layers further includes forming a first metal-containing layer that covers the upper surface of the dummy layer and the inner surfaces of the recess, the groove, and the through hole before forming the conductor layer.

According to yet another aspect of the present invention, there is provided a method for manufacturing a multilayer wiring board according to the above aspect, in which the formation of each of the two or more layers further includes forming, on the first metal-containing layer, a second metal-containing layer made of the same material as the conductor layer or made of a metal material having a smaller ionization tendency than the material of the conductor layer, before forming the conductor layer.

According to yet another aspect of the present invention, there is provided a method for manufacturing a multilayer wiring board according to any one of the above aspects, in which the first metal-containing layer contains titanium.

1 is a schematic cross-sectional view of a packaged device according to an embodiment of the present invention; 2 is a cross-sectional view illustrating a multilayer wiring substrate included in the packaged device illustrated in FIG. 1 . 3 is an enlarged cross-sectional view showing a portion of the multilayer wiring board shown in FIG. 2 . 1 is a cross-sectional view illustrating a process of a method for manufacturing a multilayer wiring board according to an embodiment of the present invention. 6 is a cross-sectional view illustrating another step in the method for manufacturing a multilayer wiring board according to an embodiment of the present invention. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a process for producing a multilayer wiring board according to an embodiment of the present invention. FIG. 1A-1D are cross-sectional views illustrating schematic steps of a method for manufacturing a packaged device according to an embodiment of the present invention. 5A-5C are cross-sectional views each showing a schematic diagram of another process for manufacturing a packaged device according to an embodiment of the present invention. 5A-5C are cross-sectional views illustrating schematic steps of a method for manufacturing a packaged device in accordance with an embodiment of the present invention. 5A-5C are cross-sectional views illustrating schematic steps of a method for manufacturing a packaged device in accordance with an embodiment of the present invention. FIG. 11 is a cross-sectional view illustrating a portion of a multilayer wiring board according to a comparative example.

Below, an embodiment of the present invention will be described with reference to the drawings. The embodiment described below is a more concrete embodiment of any of the above aspects. The embodiment described below shows an example of a concrete embodiment of the technical idea of the present invention, and does not limit the technical idea of the present invention to the materials, shapes, structures, arrangements, etc. of the components described below. Various modifications can be made to the technical idea of the present invention within the technical scope defined by the claims.

In the drawings referred to in the following description, components having the same or similar functions are given the same reference numerals. It should be noted that the drawings are schematic, and the relationship between the dimension in the thickness direction and the dimension perpendicular to the thickness direction, i.e., the in-plane direction, and the relationship between the dimensions in the thickness direction of multiple layers, etc., may differ from the actual ones. Therefore, the specific dimensions should be determined with reference to the following description. It should also be noted that the dimensional relationship between two or more components may differ between multiple drawings. Furthermore, it should be noted that the same structure is drawn upside down in some drawings compared to other drawings.

In this disclosure, the terms "upper surface" and "lower surface" refer to the two main surfaces of a plate-like member or a layer contained therein, i.e., the surface perpendicular to the thickness direction and having the widest area, and the back surface thereof, respectively, the surface shown at the top and the surface shown at the bottom in the drawings. Additionally, "side surface" refers to a surface that is perpendicular or inclined to the main surface.

In addition, in this disclosure, the phrase "AA on BB" is used regardless of the direction of gravity. The state specified by the phrase "AA on BB" includes a state in which AA is in contact with BB. The phrase "AA on BB" does not exclude the presence of one or more other components between AA and BB.

Figure 1 is a cross-sectional view that shows a schematic diagram of a packaged device 1 according to one embodiment of the present invention.

As shown in FIG. 1, the packaged device 1 includes a composite wiring substrate 10, a functional device 20, a first underfill layer 30, and a first bonding electrode 40.

The functional device 20 is, for example, a semiconductor chip, or a chip in which circuits and elements are formed on a substrate made of a material other than a semiconductor, such as a glass substrate. Here, as an example, the functional device 20 is a semiconductor chip. That is, here, the packaged device 1 is a semiconductor package.

The packaged device 1 includes multiple functional devices 20. The packaged device 1 may include only one functional device as the functional device 20.

The functional device 20 is bonded to the composite wiring board 10 via the first bonding electrode 40. Here, the multiple functional devices 20 are bonded to the composite wiring board 10 by flip-chip bonding. One or more of the functional devices 20 may be bonded to the composite wiring board 10 by other bonding methods such as wire bonding.

The first bonding electrodes 40 are arranged at a narrow pitch between the functional device 20 and the composite wiring board 10. The first bonding electrodes 40 are made of, for example, solder. When the functional device 20 is bonded to the composite wiring board 10 by wire bonding, for example, a gold wire can be used to electrically connect the functional device 20 and the composite wiring board.

The first underfill layer 30 includes a portion interposed between the functional device 20 and the composite wiring board 10 and a portion that at least partially covers the side surface of the functional device 20. The first underfill layer 30 fixes the functional device 20 to the composite wiring board 10.

The composite wiring board 10 comprises a first wiring board and a second wiring board joined thereto. Here, the composite wiring board 10 comprises an FC-BGA board 11, a multilayer wiring board 12, a second underfill layer 13, and a second joining electrode 14.

The FC-BGA substrate 11 is an example of a first wiring substrate. The FC-BGA substrate 11 is joined to, for example, a motherboard (not shown).

The FC-BGA substrate 11 includes a core layer 111, an insulating layer 112, a conductor layer 113, an insulating layer 114, and a joining conductor 115.

The core layer 111 is an insulating layer. The core layer 111 is, for example, a fiber-reinforced substrate in which a woven or nonwoven fabric is impregnated with a thermosetting insulating resin. For example, glass fiber, carbon fiber, or aramid fiber can be used as the woven or nonwoven fabric. For example, epoxy resin can be used as the insulating resin.

Through holes are formed in the core layer 111. Part of the conductor layer 113 covers the side walls of the through holes. Here, part of the conductor layer 113 covers the side walls of the through holes provided in the core layer 111 so as to produce through holes whose side walls are made of a conductor. These through holes whose side walls are made of a conductor may be filled with an insulator.

The remaining conductor layers 113 and the insulating layers 112 form a multilayer wiring structure on both major surfaces of the core layer 111. Each multilayer wiring structure includes alternating stacks of conductor layers 113 and insulating layers 112.

The insulating layer 112 is, for example, an insulating resin layer. The insulating layer 112 has a through hole.

The conductor layer 113 is made of a metal such as copper or an alloy. The conductor layer 113 may have a single-layer structure or a multi-layer structure.

The conductor layer 113 includes a wiring portion and a land portion. The conductor layer 113 faces the core layer 111 with the insulating layer 112 sandwiched therebetween, and further includes a via portion that covers the sidewall of a through hole provided in the insulating layer 112.

The insulating layer 114 is provided on the multi-layer wiring structure. The insulating layer 114 is, for example, an insulating resin layer such as a solder resist. The insulating layer 114 has a through hole that communicates with the conductor layer 113 located on the outermost surface of the multi-layer wiring structure.

The joining conductor 115 is, for example, a metal bump provided on the portion of the conductor layer 113 that is exposed at the position of the through hole of the insulating layer 114. The joining conductor is also called a joining terminal. The joining conductor 115 is, for example, made of solder.

The multilayer wiring board 12 is an example of a second wiring board. The multilayer wiring board 12 is bonded to the functional device 20 via a first bonding electrode 40. The multilayer wiring board 12 is bonded to the FC-BGA board 11 via a second bonding electrode 14. That is, in this embodiment, the multilayer wiring board 12 is an interposer that mediates the bonding between the functional device 20 and the FC-BGA board 11. The thickness of the multilayer wiring board 12 is, for example, in the range of 10 μm to 300 μm. The multilayer wiring board 12 will be described in detail later.

The second bonding electrodes 14 are arranged between the multilayer wiring substrate 12 and the functional device 20. The pitch of the second bonding electrodes 14 is wider than the pitch of the first bonding electrodes 40, and narrower than the pitch of the bonding conductors 115 located on the underside of the FC-BGA substrate 11. The second bonding electrodes 14 are made of, for example, solder.

The second underfill layer 13 includes a portion interposed between the FC-BGA substrate 11 and the multilayer wiring substrate 12. The underfill layer is also called a sealing resin layer. The second underfill layer 13 fixes the multilayer wiring substrate 12 to the FC-BGA substrate 11.

The multilayer wiring board 12 will be described in more detail with reference to FIGS.
Fig. 2 is a cross-sectional view that shows a schematic view of a portion of the multilayer wiring board 12. Fig. 3 is a cross-sectional view that shows a schematic view of an enlarged portion of the multilayer wiring board 12 shown in Fig. 2. Fig. 3 specifically shows a portion of a first layer 70, a portion of a second layer 80, and their vicinities, which will be described later.

As shown in Figures 2 and 3, the multilayer wiring board 12 includes two or more stacked layers 50, an insulating resin layer 61, a seed adhesion layer 101, a seed layer 102, a conductor layer 103, a solder resist layer 104, a surface treatment layer 105, an insulating resin layer 107, and a conductor layer 108.

Here, two layers 50 are provided. The number of layers 50 may be three or more. In the following description, the two layers 50 will be referred to as a first layer 70 and a second layer 80.

The first layer 70 is provided on the insulating resin layer 61. The first layer 70 includes an insulating resin layer 71, a wiring layer 72, and an inorganic insulating layer 300.

The insulating resin layer 71 has insulating properties. The insulating resin layer 71 is provided on the insulating resin layer 61 via the inorganic insulating layer 300. The insulating resin layer 71 has a first surface 71a and a second surface 71b, which is the reverse surface of the first surface 71a.

In this embodiment, the first surface 71a is the surface on the insulating resin layer 61 side. The second surface 71b is the surface on the second layer 80 side. The insulating resin layer 71 is also formed with a groove 74, a land recess 75 which is a first recess, and a via recess 76 which is a second recess.

The groove portion 74 is formed on the first surface 71a of the insulating resin layer 71 and opens at the first surface 71a. The groove portion 74 is filled with the wiring portion 72b described below. There are multiple groove portions 74. The groove portion 74 has a depth that does not reach the second surface 71b of the insulating resin layer 71.

The groove 74 is formed so that its width gradually narrows toward the first surface 71a. The groove 74 has a side wall 74a, a bottom surface 74b, and an opening 74c.

In this embodiment, the groove 74 is formed in a trapezoidal shape when cut along a cut surface perpendicular to the direction in which the groove 74 extends. In other words, the cross section of the groove 74 at the cut surface is inverted tapered. The cross section of the groove 74 at this cut surface may also be rectangular.

The land recesses 75 are formed on the first surface 71a of the insulating resin layer 71 and open at the first surface 71a. The land recesses 75 are filled with the land portions 72a described below. A plurality of land recesses 75 are formed. Each of the plurality of land recesses 75 communicates with one of the groove portions 74. In addition, one or more of the land recesses 75 communicates with a via recess 76 that is included in the insulating resin layer 71 in which the land recess 75 is provided. Among the land recesses 75, the bottom surface 75b of one that communicates with the via recess 76 at the position of its bottom surface 75b is configured in an annular shape.

The land recess 75 has a side wall 75a, a bottom surface 75b, and an opening 75c. Here, the land recess 75 is formed in a shape in which the dimension in a direction perpendicular to the thickness direction gradually decreases from the second surface 71b toward the first surface 71a. That is, the land recess 75 has a cross section perpendicular to the thickness direction that is inversely tapered. The land recess 75 is formed, for example, in a truncated cone shape. The land recess 75 may have a cross section parallel to the thickness direction that is rectangular.

In addition, one or more of the land recesses 75 communicate with a recess in the insulating resin layer adjacent to the first layer 70. The recess in the insulating resin layer adjacent to the first layer 70 is a via hole 63 (described later) in the insulating resin layer 61. The edge of the land recess 75 that communicates with the via hole 63 and opens on the first surface 71a is surrounded by the opening edge of the via hole 63 on the first surface 71a side.

The via recess 76 is formed on the second surface 71b of the insulating resin layer 71 and opens at the second surface 71b. The via recess 76 is a recess for forming the via portion 73. A plurality of via recesses 76 are formed. Each of the via recesses 76 is connected to one of the land recesses 75. In other words, the via recess 76 is connected to one or more of the land recesses 75.

The via recess 76 has a side surface 76a, which is a side wall, and an opening 76c. The via recess 76 is formed in a shape in which the dimension in a direction perpendicular to the thickness direction gradually decreases from the second surface 71b toward the first surface 71a. In other words, the via recess 76 has a cross section perpendicular to the thickness direction that is inversely tapered. The via recess 76 is formed, for example, in a truncated cone shape. The via recess 76 may have a cross section parallel to the thickness direction that is rectangular.

The edge of the side surface 76a on the first surface 71a side is surrounded by the edge of the land recess 75 on the second surface 71b side. When observed in the thickness direction of the insulating resin layer 71, the position of the center of each via recess 76 approximately coincides with the position of the center of the land recess 75 that is connected to that via recess 76.

The insulating resin layer 71 configured in this manner is integrally formed in the thickness direction.

The wiring layer 72 fills the groove 74, the land recess 75, and the recess of the insulating resin layer adjacent to the first layer 70. Here, in this embodiment, the recess of the insulating resin layer adjacent to the first layer 70 is the via hole 63 of the insulating resin layer 61.

The wiring layer 72 includes a seed adhesion layer 78, a seed layer 79, and a conductor layer 77.

The conductor layer 77 fills the grooves 74 and the land recesses 75 of the insulating resin layer 71, and the via holes 63 of the insulating resin layer 61. The portion of the conductor layer 77 in which the grooves 74 are filled constitutes the wiring portion 72b. The portion of the conductor layer 77 in which the land recesses 75 are filled constitutes the land portion 72a. The portion of the conductor layer 77 in which the via holes 63 are filled constitutes the via portion 62. The via portion 62 protrudes from the first surface 71a at the position of the land portion 72a. The conductor layer 77 is made of, for example, copper.

The seed adhesion layer 78 is a first metal-containing layer. The seed adhesion layer 78 is a layer containing titanium. The seed adhesion layer 78 covers the side and bottom surfaces of the wiring portion 72b and the via portion 62. The seed adhesion layer 78 also covers the peripheral portions of the side and bottom surfaces of the land portion 72a.

The seed layer 79 is a second metal-containing layer. The seed layer 79 is a metal layer interposed between the seed adhesion layer 78 and the conductor layer 77. The seed layer 79 is made of the same material as the conductor layer 77 or a metal material having a smaller ionization tendency than the material of the conductor layer 77. The seed layer 79 is made of, for example, copper.

The inorganic insulating layer 300 includes a first portion 301 covering the first surface 71a, a second portion 302 covering the bottom surface 74b of the groove portion 74, a third portion 303 covering the bottom surface 75b of the land recess 75, a fourth portion 304 covering the side surface 75a which is the side wall of the land recess 75, and a fifth portion 305 covering the side surface 74a which is the side wall of the groove portion 74. The first portion 301 is thicker than the second portion 302, the third portion 303, the fourth portion 304, and the fifth portion 305. Note that the inorganic insulating layer 300 does not necessarily include the fourth portion 304 and the fifth portion 305.

The thickness of the first portion 301 is preferably in the range of 50 nm to 1000 nm, and more preferably in the range of 100 nm to 500 nm. If the first portion 301 is made thicker, warping or bending of the multilayer wiring board 12 becomes less likely to occur. However, if the first portion 301 is made thicker, the cost will increase.

The thickness of the inorganic insulating layer 300 other than the first portion 301 is preferably in the range of 10 nm to 500 nm, and more preferably in the range of 50 nm to 300 nm. Increasing this thickness makes it difficult for metal to diffuse from the conductor layer 77 to the insulating resin layer 71. However, increasing this thickness increases costs.

In this embodiment, the inorganic insulating layer 300 is described as having a configuration in which the first portion 301 has a two-layer structure, and the portion of the inorganic insulating layer 300 other than the first portion 301 has a single-layer structure. Specifically, in this embodiment, the inorganic insulating layer 300 includes a first inorganic insulating layer 160 and a second inorganic insulating layer 200.

The first inorganic insulating layer 160 covers the first surface 71a with the second inorganic insulating layer 200 sandwiched therebetween. The first inorganic insulating layer 160 has a through hole 161 at the position of the opening 75c of the land recess 75. The first inorganic insulating layer 160 also has a slit 162 at the position of the opening 74c of the groove portion 74.

The second inorganic insulating layer 200 has a shape that spreads across the entire inorganic insulating layer 300. The second inorganic insulating layer 200 includes an intervening portion 201, a first bottom covering portion 202, a second bottom covering portion 203, a first sidewall covering portion 204, and a second sidewall covering portion 205.

The intervening portion 201 is a portion interposed between the first surface 71a and the first inorganic insulating layer 160. The intervening portion 201, together with the first inorganic insulating layer 160, constitutes the first portion 301 of the inorganic insulating layer 300.

The first bottom surface covering portion 202 is a portion that covers the bottom surface 74b of the groove portion 74. The first bottom surface covering portion 202 constitutes the second portion 302 of the inorganic insulating layer 300.

The second bottom surface covering portion 203 is a portion that covers the bottom surface 75b of the land recess 75. The second bottom surface covering portion 203 constitutes the third portion 303 of the inorganic insulating layer 300. The second bottom surface covering portion 203 formed in the land recess 75 that communicates with the via recess 76 has a through hole 203a formed at the position of the via recess 76.

The first sidewall covering portion 204 is a portion that covers the sidewall of the land recess 75. The first sidewall covering portion 204 constitutes the fourth portion 304 of the inorganic insulating layer 300.

The second sidewall covering portion 205 is a portion that covers the sidewall of the groove portion 74. The second sidewall covering portion 205 constitutes the fifth portion 305 of the inorganic insulating layer 300.

The second layer 80 is provided on the first layer 70 as shown in FIG. 2. The second layer 80 has a structure similar to that of the first layer 70.

The second layer 80 includes an insulating resin layer 81, a wiring layer 82, a first inorganic insulating layer 170, and a second inorganic insulating layer 210. The insulating resin layer 81, the wiring layer 82, the first inorganic insulating layer 170, and the second inorganic insulating layer 210 correspond to the insulating resin layer 71, the wiring layer 72, the first inorganic insulating layer 160, and the second inorganic insulating layer 200, respectively.

The insulating resin layer 81 has a first surface 81a and a second surface 81b which is the reverse side of the first surface. The insulating resin layer 81 is formed with a groove 84, a land recess 85 which is a first recess, and a via recess 86 which is a second recess. The first surface 81a, the second surface 81b, the groove 84, the land recess 85, and the via recess 86 correspond to the first surface 71a, the second surface 71b, the groove 74, the land recess 75, and the via recess 76 of the insulating resin layer 71, respectively.

The side surface 84a, bottom surface 84b, and opening 84c of the groove portion 84 correspond to the side surface 74a, bottom surface 74b, and opening 74c of the groove portion 74, respectively. The side surface 85a, bottom surface 85b, and opening 85c of the land recess 85 correspond to the side surface 75a, bottom surface 75b, and opening 75c of the land recess 75, respectively. The side surface 86a and opening 86c of the via recess 86 correspond to the side surface 76a and opening 76c of the via recess 76, respectively.

The first inorganic insulating layer 170 covers the first surface 81a of the insulating resin layer 81 with the second inorganic insulating layer 210 sandwiched therebetween. The first inorganic insulating layer 170 has a through hole 171 and a slit 172 at the positions of the land recess 75 and the groove portion 74. The through hole 171 and the slit 172 correspond to the through hole 161 and the slit 162 of the first inorganic insulating layer 160, respectively.

The wiring layer 82 includes a seed adhesion layer 88, a seed layer 89, and a conductor layer 87. The seed adhesion layer 88, the seed layer 89, and the conductor layer 87 correspond to the seed adhesion layer 78, the seed layer 79, and the conductor layer 77, respectively.

The conductor layer 87 fills the grooves 84 and land recesses 85 of the insulating resin layer 81, and the via recesses 76 of the insulating resin layer 71. The portion of the conductor layer 87 in which the grooves 84 are filled constitutes the wiring portion 82b. The portion of the conductor layer 87 in which the land recesses 85 are filled constitutes the land portion 82a. The portion of the conductor layer 87 in which the via recesses 76 are filled constitutes the via portion 73. The wiring portion 82b, the land portion 82a, and the via portion 73 correspond to the wiring portion 72b, the land portion 72a, and the via portion 62, respectively.

The second inorganic insulating layer 210 includes an intervening portion 211, a first bottom covering portion 212, a second bottom covering portion 213, a first sidewall covering portion 214, and a second sidewall covering portion 215.

The intervening portion 211 is a portion interposed between the first surface 81a and the first inorganic insulating layer 170. The first bottom surface covering portion 212 is a portion covering the bottom surface 84b of the groove portion 84. The second bottom surface covering portion 213 is a portion covering the bottom surface 85b of the land recess 85. The second bottom surface covering portion 213 formed in the land recess 85 communicating with the via recess 86 has a through hole 213a formed at the position of the via recess 86. The first sidewall covering portion 214 is a portion covering the side surface 85a which is the side wall of the land recess 85. The second sidewall covering portion 215 is a portion covering the side surface 84a which is the side wall of the groove portion 84.

In the second layer 80, the first inorganic insulating layer 170 and the second inorganic insulating layer 210 constitute an inorganic insulating layer 310 that corresponds to the inorganic insulating layer 300 of the first layer 70. The inorganic insulating layer 310 includes a first portion 311, a second portion 312, a third portion 313, a fourth portion 314, and a fifth portion 315.

The first portion 311 is a portion covering the first surface 81a, and is composed of the first inorganic insulating layer 170 and the intermediate portion 211 of the second inorganic insulating layer 210. The second portion 312 is a portion covering the bottom surface 84b of the groove portion 84, and is composed of the first bottom surface covering portion 212 of the second inorganic insulating layer 210. The third portion 313 is a portion covering the bottom surface 85b of the land recess 85, and is composed of the second bottom surface covering portion 213 of the second inorganic insulating layer 210. The fourth portion 314 is a portion covering the side surface 85a, which is the side wall of the land recess 85, and is composed of the first side wall covering portion 214 of the second inorganic insulating layer 200. The fifth portion 315 is a portion covering the side surface 84a, which is the side wall of the groove portion 84, and is composed of the second side wall covering portion 215 of the second inorganic insulating layer 200.

The insulating resin layer 61 is provided on the first surface 71a side. The insulating resin layer 61 has a first surface 61a and a second surface 61b. The first surface 61a is the surface opposite to the first layer 70. The second surface 61b is the surface on the first layer 70 side.

A via hole 63 is formed in the insulating resin layer 61. The via hole 63 is a hole that penetrates the insulating resin layer 61 in the thickness direction and opens at the first surface 61a and the second surface 61b. The via hole 63 has a side surface 64 that is a side wall. The via hole 63 is formed in a shape such that the dimension in the direction perpendicular to the thickness direction gradually decreases from the second surface 61b toward the first surface 61a. The via hole 63 is formed, for example, in a truncated cone shape. As described above, the via hole 63 is filled with a part of the wiring layer 72.

The seed adhesion layer 101 is, for example, a first metal-containing layer. The seed adhesion layer 101 is, for example, a layer containing titanium. The seed adhesion layer 101 includes a portion that covers a part of the insulating resin layer 81 and a portion that covers the inner surface of the via recess 86.

The seed layer 102 is, for example, a second metal-containing layer. The seed layer 102 is a metal layer provided on the seed adhesion layer 101. The seed layer 102 is made of the same material as the conductor layer 103 or a metal material having a smaller ionization tendency than the material of the conductor layer 103. The seed layer 102 is made of, for example, copper.

The conductor layer 103 is provided on the seed adhesion layer 101. The conductor layer 103 has a recess 86 for a via embedded therein. The portion of the conductor layer 103 in which the recess 86 for a via is embedded is the via portion 83. The conductor layer 103 is electrically connected to the interlayer connection conductor layer 90, which is made up of the conductor layer 77 and the conductor layer 87, via the seed adhesion layer 101 and the seed layer 102. The conductor layer 103 is made of, for example, copper.

The solder resist layer 104 is provided on the insulating resin layer 81 and the conductor layer 103. The solder resist layer 104 has through holes 104a that expose parts of the conductor layer 103. These through holes 104a enable electrical connection between the multilayer wiring board 12 and the FC-BGA board 11 via the second bonding electrode 14.

The surface treatment layer 105 is provided on the portion of the conductor layer 103 that is exposed in the through hole 104a of the solder resist layer 104. The surface treatment layer 105 prevents oxidation of the surface of the conductor layer 103 and improves wettability to solder.

The insulating resin layer 107 is provided on the first surface 61a of the insulating resin layer 61 and a part of the wiring layer 72. The insulating resin layer 107 has a through hole at the position of the via portion 62.

The conductor layer 108 is formed in the through hole of the insulating resin layer 107. The conductor layer 108 is made of, for example, copper. The first bonding electrode 40 shown in FIG. 1 is connected to the conductor layer 108.

Next, an example of a method for manufacturing the multilayer wiring board 12 will be described. Figures 4 to 36 are cross-sectional views that outline an example of a method for manufacturing the multilayer wiring board 12.

In one example of this manufacturing method, the structure shown in Figure 5 is first obtained. Below, the steps for obtaining the structure in Figure 5 are explained in order.

First, as shown in FIG. 4, a release layer 3 is provided on one surface of a support 2 .
The support 2 is preferably transparent since light may be irradiated onto the peeling layer 3 through the support 2. The support 2 may be, for example, a glass plate. The glass plate has excellent flatness and high rigidity, and is therefore suitable for forming a fine pattern of the multilayer wiring board 12 on the support 2. In addition, the glass plate has a small CTE (Coefficient of Thermal Expansion) and is not easily distorted, and is therefore excellent in ensuring pattern arrangement accuracy and flatness.

When a glass plate is used as the support 2, it is desirable for the glass plate to be thick in order to prevent warping during the manufacturing process, for example, at least 0.5 mm, and preferably at least 1.2 mm. The CTE of the glass plate is preferably 3 ppm or more and 16 ppm or less, and is more preferably around 10 ppm in terms of the CTE of the FC-BGA substrate 11 and the functional device 20.

As the glass material for forming the support 2, for example, quartz glass, borosilicate glass, alkali-free glass, soda glass, or sapphire glass is used. If the support 2 does not need to be transparent when peeling it off, such as when a resin that foams when heated is used for the peeling layer 3, a material with less distortion, such as metal or ceramics, can be used for the support 2. In the example of this embodiment, a glass plate is used for the support 2.

The peeling layer 3 may be, for example, a resin that absorbs light such as UV light, generates heat or changes in quality, and becomes peelable, or a resin that foams when heated and becomes peelable. When using a resin that becomes peelable when exposed to light such as UV light, for example laser light, light is irradiated onto the support 2 from the side opposite to the side on which the peeling layer 3 is provided, and the support 2 is removed from the bond between the multilayer wiring board 12 on the support 2 and the FC-BGA board 11.

The peeling layer 3 can be selected from organic resins such as epoxy resin, polyimide resin, polyurethane resin, silicone resin, polyester resin, oxetane resin, maleimide resin, and acrylic resin, and inorganic layers such as amorphous silicon, gallium nitride, and metal oxide layers. The peeling layer 3 may further contain additives such as a photodecomposition promoter, a light absorber, a sensitizer, and a filler.

Furthermore, the peeling layer 3 may have a single-layer structure or a multi-layer structure. For example, a protective layer may be provided on the peeling layer 3 for the purpose of protecting the multilayer wiring board 12 formed on the support 2, and a layer for improving the adhesion between the support 2 and the peeling layer 3 may be provided between the support 2 and the peeling layer 3. Furthermore, a laser light reflecting layer or a metal layer may be provided between the peeling layer 3 and the multilayer wiring board 12. The configuration of the peeling layer 3 is not limited to this embodiment. In the example of this embodiment, the peeling layer 3 is made of a resin that absorbs UV light and becomes peelable.

Next, as shown in FIG. 5, a seed adhesion layer 5 and a seed layer 6 are provided on the peeling layer 3, for example in a vacuum. The seed adhesion layer 5 is a layer that improves the adhesion of the seed layer 6 to the peeling layer 3 and prevents peeling of the seed layer 6. The seed layer 6 also acts as a power supply layer for electrolytic plating in forming the wiring.

The seed adhesion layer 5 and the seed layer 6 can be formed by, for example, a sputtering method or a vapor deposition method. As the material of the seed adhesion layer 5 and the seed layer 6, for example, Cu, Ni, Al, Ti, Cr, Mo, W, Ta, Au, Ir, Ru, Pd, Pt, AlSi, AlSiCu, AlCu, NiFe, ITO (indium tin oxide), IZO (indium zinc oxide), AZO (aluminum-doped zinc oxide), ZnO, PZT (lead zirconate titanate), TiN, Cu ₃ N ₄ , Cu alloy, or a combination of a plurality of these can be used. In the example of this embodiment, in consideration of electrical characteristics, ease of manufacture, and cost, a titanium layer is formed as the seed adhesion layer 5 and a copper layer is formed as the seed layer 6 in sequence by a sputtering method.

The total thickness of the seed adhesion layer 5 and the seed layer 6 is preferably 1 μm or less. In this example, a titanium layer with a thickness of 50 nm is formed as the seed adhesion layer 5, and a copper layer with a thickness of 300 nm is formed as the seed layer 6.

Next, as shown in FIG. 6, a resist layer 140 is provided on the seed layer 6. The resist layer 140 is made of, for example, a photosensitive resin. As the photosensitive resin, for example, a photosensitive polyimide resin, a photosensitive benzocyclobutene resin, a photosensitive epoxy resin, or a modified product thereof can be used. The photosensitive resin may be in a liquid form or a film form.

When a liquid photosensitive resin is used as the material for the resist layer 140, the resist layer 140 can be formed by any of the following methods: slit coating, curtain coating, die coating, spray coating, electrostatic coating, inkjet coating, gravure coating, screen printing, gravure offset printing, spin coating, and doctor coating. When a film-like photosensitive resin is used for the resist layer 140, the resist layer 140 can be provided on the seed layer 6 by any of the following methods: lamination, vacuum lamination, vacuum pressing, etc.

Next, through holes 141 are formed in the resist layer 140, for example, by photolithography. Plasma treatment may be performed on the through holes 141 to remove residues from development. The thickness of the resist layer 140 is set according to the thickness of the conductor layer 108 to be provided in the through holes 141. In this embodiment, the thickness of the resist layer 140 is, for example, 8 μm.

The shape of the through holes 141 in a plan view is set according to the pitch of the bonding electrodes of the functional device 20 and the shape of the bonding electrodes. In this embodiment, the through holes 141 are circular, have an opening shape of φ25 μm, and have a pitch of 55 μm. Note that here, the plan view refers to the shape when viewed in the thickness direction of the resist layer 140.

Next, as shown in FIG. 7, a conductor layer 108 is formed on the seed layer 6 by electrolytic plating. The conductor layer 108 constitutes an electrode for bonding with the functional device 20. Electrolytic plating for forming the conductor layer 108 includes electrolytic nickel plating, electrolytic copper plating, electrolytic chromium plating, electrolytic Pd plating, electrolytic gold plating, electrolytic rhodium plating, and electrolytic iridium plating, among others, but electrolytic copper plating is preferable because it is simple, inexpensive, and has good electrical conductivity.

Since the conductor layer 108 serves as an electrode for bonding with the functional device 20, it is desirable that the thickness of the conductor layer 108 be 1 μm or more from the viewpoint of solder bonding, and 30 μm or less from the viewpoint of productivity.

Next, as shown in FIG. 8, the resist layer 140 is removed. The resist layer 140 can be dissolved or peeled off by dry etching or by immersion in an alkaline solution or solvent.

Next, as shown in FIG. 9, an insulating resin layer 107 is provided so as to encapsulate the conductor layer 108. The material forming the insulating resin layer 107 may be a photosensitive resin or a non-photosensitive resin, and further, it does not have to be the same material as the insulating resin layers 61, 71, and 81 described below.

Next, as shown in FIG. 10, the upper surface of the conductor layer 108 is exposed by surface polishing such as physical polishing or physical polishing and CMP processing. The conductor layer 108 may be fabricated by a semi-additive method.

Next, as shown in FIG. 11, an insulating resin layer 61 having a through hole at the position of the conductor layer 108 is provided on the conductor layer 108 and the insulating resin layer 107. The through hole of the insulating resin layer 61 is a via hole 63 that opens on the second surface 61b of the insulating resin layer 61. The via hole 63 may be formed so that its cross section has a rectangular shape, but it is preferable to form it in a forward tapered shape. Forming it in a forward tapered shape makes it easier to form the seed adhesion layer 78 and the seed layer 79 without causing discontinuities in the via hole 63.

The insulating resin layer 61 is made of, for example, a photosensitive resin. For example, the same material as that described above for the resist layer 140 can be used as the photosensitive resin. For example, the same material as that for the resist layer 140 can be used as the material for the insulating resin layer 61. Furthermore, the insulating resin layer 61 can be formed by, for example, a method similar to that for the resist layer 140.

Alternatively, the insulating resin layer 61 is made of a non-photosensitive resin. For example, polyimide resin, benzocyclobutene resin, epoxy resin, or modified products thereof can be used as the non-photosensitive resin. Non-photosensitive resins such as polyimide have excellent insulating properties and mechanical properties, and can also achieve high heat resistance. In addition, inorganic particles such as silica, alumina, and zirconia may be added to the non-photosensitive resin as a filler. Here, as an example, a non-photosensitive polyimide resin is used as the non-photosensitive resin.

The non-photosensitive resin may be in liquid or film form.

When a liquid non-photosensitive resin is used, the insulating resin layer 61 can be formed by a method selected from, for example, slit coating, curtain coating, die coating, spray coating, electrostatic coating, inkjet coating, gravure coating, screen printing, gravure offset printing, spin coating, and doctor coating.

When a film-like non-photosensitive resin is used as the insulating resin layer 61, lamination, vacuum lamination, vacuum pressing, etc. can be used.

Here, as an example, a photosensitive epoxy resin is applied onto the conductor layer 108 and the insulating resin layer 107 by spin coating. Photosensitive epoxy resin can be cured at a relatively low temperature and shrinks little when cured, which is advantageous for the subsequent formation of fine patterns. Also, here, as an example, the insulating resin layer 61 is formed to a thickness of 2 μm.

After the insulating resin layer 61 is formed, the surface may be planarized by physical polishing, or by physical polishing and polishing such as CMP. Similarly, the insulating resin layer 71 and the insulating resin layer 81 may also be planarized after formation.

Next, as shown in FIG. 12, a first inorganic insulating layer 160 is formed on the insulating resin layer 61 and the conductor layer 108. The first inorganic insulating layer 160 is formed so as to cover the upper surface of the insulating resin layer 61 and the inner surface of the via hole 63.

The first inorganic insulating layer 160 is formed, for example, by plasma CVD (Chemical Vapor Deposition). The material of the first inorganic insulating layer 160 includes, for example, one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon.

The material of the first inorganic insulating layer 160 may be the same as or different from the material of the second inorganic insulating layer 200, the first inorganic insulating layer 170, and the second inorganic insulating layer 210 described below. Even if two inorganic insulating layers in contact with each other are made of the same material, the interface between them can be confirmed by observing a cross section parallel to the thickness direction, for example, with a scanning electron microscope.

Next, as shown in FIG. 13, a resist layer 143 having grooves 144 and through holes 145, one or more of which communicate with the via holes 63, is formed on the first inorganic insulating layer 160. The resist layer 143 is an example of a dummy layer. The grooves 144 and the through holes 145 correspond to the groove portions 74 and the land recesses 75 of the insulating resin layer 71, respectively. The resist layer 143 may be made of the same material as the resist layer 140, for example. The resist layer 143 may be formed by the same method as the resist layer 140.

The through hole 145 is formed so that the opening diameter of the surface facing the insulating resin layer 61 is larger than the opening diameter of the second surface 61b of the via hole 63 of the insulating resin layer 61. The through hole 145 is also formed so that the opening on the second surface 61b of the via hole 63 is located inside the opening of the surface facing the insulating resin layer 61 of the through hole 145. The through hole 145 is also formed in a forward tapered shape. The groove 144 is also formed so that the cross section perpendicular to the length direction has a forward tapered shape.

The groove 144 and the through hole 145 may be formed to have a rectangular cross section, but forming them in a forward tapered shape makes it easier to form the seed adhesion layer 78 and the seed layer 79 without creating discontinuities in the groove 144 and the through hole 145.

In addition, when the groove 144 and the through hole 145 are formed so that their cross sections have a forward tapered shape, the contact area between the insulating resin layer 61 and the first inorganic insulating layer 160 is larger than when the cross sections are rectangular without changing their cross-sectional areas. Therefore, the adhesion between the insulating resin layer 61 and the first inorganic insulating layer 160 can be improved. Similarly, the adhesion between the insulating resin layer 61 and the conductor layer 108 can also be improved. Therefore, delamination can be made less likely to occur.

Next, as shown in FIG. 14, the portions of the first inorganic insulating layer 160 exposed in the via holes 63, the portions exposed in the grooves 144, and the portions exposed in the through holes 145 are removed. This removal is performed, for example, by dry etching using the resist layer 143 as a mask.

15, a seed adhesion layer 78 is formed to cover the upper surface of the resist layer 143, the inner surface of the via hole 63, the inner surface of the groove 144, the inner surface of the through hole 145, and the inner surface of the via hole 63. Next, a seed layer 79 is formed on the seed adhesion layer 78. The seed layer 79 is made of the same material as the conductor layer 77 or a metal material having a smaller ionization tendency than the material of the conductor layer 77.

The seed adhesion layer 78 and the seed layer 79 can be made of the same materials as those described above for the seed adhesion layer 5 and the seed layer 6, respectively. The seed adhesion layer 78 and the seed layer 79 can be formed by the same methods as those described above for the seed adhesion layer 5 and the seed layer 6, respectively.

In this embodiment, the seed adhesion layer 78 is formed of titanium from the viewpoints of electrical properties, ease of manufacture, and cost, and also to function as a copper diffusion prevention layer. Also, the seed layer 79 is formed of copper, taking into consideration the viewpoints of electrical properties, ease of manufacture, and cost. The seed adhesion layer 78 and the seed layer 79 are formed in sequence by a sputtering method.

The total thickness of the seed adhesion layer 78 and the seed layer 79 is preferably 1 μm or less. Note that materials other than titanium can be used for the seed adhesion layer 78 as long as they have the function of preventing copper diffusion. The material of the seed layer 79 may be the same as that of the conductor layer 77, or may be a metal material that has a smaller ionization tendency than the material of the conductor layer 77.

In this embodiment, the seed adhesion layer 78 is 50 nm thick and the seed layer 79 is 300 nm thick.

One or more other layers made of a metal material may be provided between the seed adhesion layer 78 and the seed layer 79. The layer provided between the seed adhesion layer 78 and the seed layer 79 is made of the same material as the conductor layer 77 or is made of a metal material that has a smaller ionization tendency than the material of the conductor layer 77.

Next, as shown in FIG. 16, a conductor layer 77 is formed on the seed layer 79 by, for example, electrolytic plating. The electrolytic plating for forming the conductor layer 77 is, for example, electrolytic copper plating. This electrolytic plating is performed so that the via holes 63, the through holes 145, and the grooves 144 are completely filled with the conductor layer 77, as shown in FIG. 16.

Next, as shown in FIG. 17, the conductor layer 77, the seed layer 79, and the seed adhesion layer 78 are subjected to polishing such as physical polishing and CMP (chemical mechanical polishing) to remove the portions of the conductor layer 77, the seed adhesion layer 78, and the seed layer 79 that are located outside the via hole 63, the through hole 145, or the groove 144. Note that this polishing may also remove the portions near the top surface of the resist layer 143.

In this manner, the portion of the conductor layer 77 in which the via hole 63 is filled, the portion in which the through hole 145 is filled, and the portion in which the groove 144 is filled are obtained as the via portion 62, the land portion 72a, and the wiring portion 72b, respectively. Compared to conventional semi-additive methods, this method does not require an etching process, and therefore can obtain a smooth conductor surface.

Next, as shown in FIG. 18, the resist layer 143 is removed. The resist layer 143 can be removed by dry etching or by immersion in an alkaline solution or solvent.

Next, as shown in FIG. 19, a first inorganic insulating layer 170 is formed to cover the upper surface of the first inorganic insulating layer 160, the upper surface of the land portion 72a, the side surface of the land portion 72a, the upper surface of the wiring portion 72b, and the side surface of the wiring portion 72b.

The second inorganic insulating layer 200 can be formed by a method similar to that described above for the first inorganic insulating layer 160. The material of the second inorganic insulating layer 200 may be the same as or different from the materials of the first inorganic insulating layer 160, the first inorganic insulating layer 170, and the second inorganic insulating layer 210.

A layer made of a silane coupling agent may be provided between the second inorganic insulating layer 200 and the seed adhesion layer 78, and between the second inorganic insulating layer 200 and the insulating resin layer 71. By providing a layer made of a silane coupling agent, the adhesion between the second inorganic insulating layer 200 and the seed adhesion layer 78, and the adhesion between the second inorganic insulating layer 200 and the insulating resin layer 71 can be improved. When the adhesion is improved, even if the multilayer wiring board 12 is warped due to, for example, heat, peeling of the second inorganic insulating layer 200 and the seed adhesion layer 78, and peeling of the second inorganic insulating layer 200 and the insulating resin layer 71 are less likely to occur.

The multilayer wiring board 12 of this embodiment also exhibits higher insulation reliability than a configuration in which an inorganic insulating layer is formed on a wiring portion formed by a conventional semi-additive method. When using a semi-additive method, the wiring portion is formed by etching, so the surface of the wiring portion is roughened.

If the surface of the wiring section is roughened, the conformability of the inorganic insulating layer decreases, and pinholes may form in the inorganic insulating layer. Copper diffuses through these pinholes, reducing the insulation reliability. Furthermore, if the inorganic insulating layer is made thicker to eliminate pinholes, the effect of the difference in linear expansion coefficient between copper and the inorganic insulating layer becomes stronger, and there is a risk of peeling occurring at the copper/inorganic insulating layer interface.

20, an insulating resin layer 71 having a recess 76 for a via is formed on the second inorganic insulating layer 200, for example, by a method similar to that described above for the insulating resin layer 61. The insulating resin layer 71 is formed so as to cover the second inorganic insulating layer 200 and to fill the gap between the land portion 72a and the wiring portion 72b. The material of the insulating resin layer 71 may be the same as or different from the material of the insulating resin layer 61 and the insulating resin layer 81 described later.

In this manner, the first layer 70 is obtained, which includes the insulating resin layer 71, the conductor layer 77, the seed adhesion layer 78, the seed layer 79, the first inorganic insulating layer 160, and the second inorganic insulating layer 200.

Next, by sequentially carrying out the same steps as those described with reference to Figures 12 to 20, the first inorganic insulating layer 170, the second inorganic insulating layer 210, the seed adhesion layer 88, the seed layer 89, the conductor layer 87 including the land portion 82a, the wiring portion 82b and the via portion 73, and the insulating resin layer 81 are formed as shown in Figures 21 to 29. In this manner, the second layer 80 including the insulating resin layer 81, the conductor layer 87, the seed adhesion layer 88, the seed layer 89, the first inorganic insulating layer 170, and the second inorganic insulating layer 210 is obtained.

In the process shown in FIG. 23, the resist layer 143 is used as a mask to remove the inorganic insulating layer including the first inorganic insulating layer 170, here the combination of the first inorganic insulating layer 170 and the second inorganic insulating layer 200, the portion exposed in the via recess 76, and the portion exposed in the groove 144 and the through hole 145 of the first inorganic insulating layer 170. The through hole 203a of the second inorganic insulating layer 200 is formed in this process.

The material of the first inorganic insulating layer 170 may be the same as or different from the materials of the first inorganic insulating layer 160, the second inorganic insulating layer 200, the second inorganic insulating layer 210, and the inorganic insulating layer 109. The material of the second inorganic insulating layer 210 may be the same as or different from the materials of the first inorganic insulating layer 160, the first inorganic insulating layer 170, the second inorganic insulating layer 200, and the inorganic insulating layer 109.

The material of the insulating resin layer 81 may be the same as or different from the material of the insulating resin layer 61 and the insulating resin layer 71.

The above sequence can be repeated one or more times to increase the number of layers 50 included in the multilayer wiring structure to three or more.

Then, in the same manner as described with reference to FIG. 14, as shown in FIG. 30, the portion of the second inorganic insulating layer 210 exposed in the via recess 86, i.e., the portion covering the bottom surface 85b of the land recess 85, is removed by etching to form a through hole 213a.

Next, for example, by a method similar to that described above for the seed adhesion layer 78 and the seed layer 79, a seed adhesion layer 101 and a seed layer 102 are sequentially formed on the insulating resin layer 81 and on the inner surface of the via recess 86, as shown in FIG. 31 .
32, a resist layer 146 having a through hole 147 is formed on the seed layer 102. The through hole 147 communicates with the via recess 86 of the second layer 80.

The resist layer 146 is made of a photosensitive resin. For example, the same material as described above for the resist layer 143 can be used as the photosensitive resin. The resist layer 146 having the through holes can be formed by the same method as described above for the resist layer 143.

Next, as shown in FIG. 33, a conductor layer 103 is formed on the seed layer 102. The conductor layer 103 can be formed, for example, by a method similar to that described above for the conductor layer 108.

Next, as shown in FIG. 34, the resist layer 146 is removed. The resist layer 146 can be removed, for example, by a method similar to that described above for the resist layer 143.

Next, as shown in FIG. 35, the exposed portion of the seed adhesion layer 101 is removed, and then the exposed portion of the seed layer 102 is removed. The resist layer 146 is removed, for example, with a solution or solvent. The seed adhesion layer 101 and the seed layer 102 can be removed, for example, by immersion in a chemical solution. The chemical solution for removing the seed adhesion layer 101 is, for example, an alkaline etching agent. The chemical solution for removing the seed layer 102 is, for example, an acidic etching agent.

Next, as shown in FIG. 36, a solder resist layer 104 is provided on the conductor layer 103. Next, through holes 104a are formed in the solder resist layer 104. The material for the solder resist layer 104 may be, for example, an insulating resin such as an epoxy resin or an acrylic resin. In an embodiment of the present invention, a photosensitive epoxy resin containing a filler is used as the solder resist layer 104.

Next, a surface treatment layer 105 is formed on the portion of the conductor layer 103 exposed in the through hole 104a. The surface treatment layer 105 is provided for the purpose of preventing oxidation of the surface of the conductor layer 103 and improving wettability to solder. In this embodiment, the surface treatment layer 105 is formed by electroless Ni/Pd/Au plating.

In addition, the surface treatment layer 105 may be an OSP (Organic Solderability Preservative) film, i.e., a surface treatment layer made of a water-soluble preflux. Alternatively, the surface treatment layer 105 may be an electroless tin plating or electroless Ni/Au plating layer.

In this manner, a multilayer wiring board 12 supported on the support 2, i.e., a multilayer wiring board with a support, is obtained.

By using the multilayer wiring board with support obtained in this manner, the packaged device 1 shown in Figure 1 can be manufactured, for example, by the following method.

Figure 37 is a cross-sectional view that shows a schematic diagram of one step in a method for manufacturing a packaged device according to one embodiment of the present invention. Figure 38 is a cross-sectional view that shows a schematic diagram of another step in a method for manufacturing a packaged device according to one embodiment of the present invention. Figure 39 is a cross-sectional view that shows a schematic diagram of yet another step in a method for manufacturing a packaged device according to one embodiment of the present invention. Figure 40 is a cross-sectional view that shows a schematic diagram of yet another step in a method for manufacturing a packaged device according to one embodiment of the present invention.

First, as shown in FIG. 37, a solder material is placed on the surface treatment layer 105, and then melted, cooled, and solidified to obtain the second bonding electrode 14.

Next, as shown in FIG. 38, the multilayer wiring board 12 on the support 2 and the FC-BGA board 11 are joined together, and then the second underfill layer 13 is formed between them. The material of the second underfill layer 13 may be, for example, one of epoxy resin, urethane resin, silicone resin, polyester resin, oxetane resin, and maleimide resin, or a mixture of two or more of these resins. The material of the second underfill layer 13 may also be mixed with a filler. The filler may be, for example, one of silica, titanium oxide, aluminum oxide, magnesium oxide, and zinc oxide, or two or more of these. The second underfill layer 13 may be formed, for example, by filling with a liquid material.

In this manner, a composite wiring board 10 is obtained that includes the FC-BGA board 11 and the multilayer wiring board 12. At this point, the support 2 remains on the multilayer wiring board 12.

Next, as shown in Figures 39 and 40, the support 2 is removed. One example of removal is peeling. For example, as shown in Figure 39, laser light 23 is irradiated from the back surface of the support 2, i.e., the surface of the support 2 opposite the FC-BGA substrate 11, to the peeling layer 3 formed at the interface with the support 2. By irradiating the laser light 23, it becomes possible to remove the support 2 from the multilayer wiring board 12, as shown in Figure 40.

If the release layer 3 remains on the composite wiring board 10, it is removed by, for example, etching. The seed adhesion layer 5 and the seed layer 6 are also removed by, for example, etching.

Next, as shown in FIG. 1, the functional device 20 is mounted to complete the packaged device 1. At this time, prior to mounting the functional device 20, the conductor layer exposed on the surface may be subjected to a surface treatment such as electroless Ni/Pd/Au plating, OSP, electroless tin plating, or electroless Ni/Au plating to prevent oxidation and improve the wettability of the solder bumps.

The joints are then sealed with a first underfill layer 30 .
As the material of the first underfill layer 30, for example, the materials exemplified as the materials of the second underfill layer 13 can be used. The first underfill layer 30 can be formed, for example, by the same method as that described above for the second underfill layer 13.

In this manner, the packaged device 1 shown in Figure 1 is completed.

In the above method, the multilayer wiring board 12 is bonded to the FC-BGA board 11, and then the functional device 20 is bonded to the multilayer wiring board 12. Alternatively, the functional device 20 may be bonded to the multilayer wiring board 12, and then the multilayer wiring board 12 may be bonded to the FC-BGA board 11.

In the packaged device 1 configured in this manner, in the first layer 70, the inorganic insulating layer 300 includes a first portion 301 that covers the first surface 71a of the insulating resin layer 71, a second portion 302 that covers the bottom surface 74b of the groove portion 74, and a third portion 303 that covers the bottom surface 75b of the land recess 75.

That is, the inorganic insulating layer 300 is interposed between the upper surface of the land portion 72a and the insulating resin layer 71, and between the upper surface of the wiring portion 72b and the insulating resin layer 71. The inorganic insulating layer 300 serves as a barrier layer that makes it difficult for metal to diffuse from the upper surfaces of the land portion 72a and the wiring portion 72b into the insulating resin layer 71.

Similarly, in the second layer 80, the inorganic insulating layer 310 includes a first portion 311 that covers the first surface 81a of the insulating resin layer 81, a second portion 312 that covers the bottom surface 84b of the groove portion 84, and a third portion 313 that covers the bottom surface 85b of the land recess 85. Therefore, the inorganic insulating layer 310 serves as a barrier layer that makes it difficult for metal to diffuse from the upper surfaces of the land portion 82a and the wiring portion 82b into the insulating resin layer 81.

As a result, metal diffusion from one of the adjacent insulating resin layers to the other is unlikely to occur. Therefore, the above-mentioned multilayer wiring board 12 achieves excellent insulation reliability. Therefore, the composite wiring board 10 and packaged device 1 that include the multilayer wiring board 12 also achieve excellent insulation reliability.

In addition, the first portion 301 covering the first surface 71a of the inorganic insulating layer 300 and the first portion 311 covering the first surface 81a of the inorganic insulating layer 310 improve the rigidity of the first layer 70 and the second layer 80, making it possible to make the multilayer wiring board 12 less likely to warp or bend.

In addition, in the inorganic insulating layer 300, the first portion 301 is thicker than the second portion 302 and the third portion 303. Similarly, in the inorganic insulating layer 310, the first portion 311 is thicker than the second portion 312 and the third portion 313. This further improves the rigidity of the first layer 70 and the second layer 80, making it less likely for the multilayer wiring board 12 to warp or bend.

In addition, the first inorganic insulating layer 160 contained in the inorganic insulating layer 300 functions as a protective layer for the insulating resin layer 61 when the resist layer 143 is removed. Similarly, the first inorganic insulating layer 170 contained in the inorganic insulating layer 310 functions as a protective layer for the insulating resin layer 71 when the resist layer 143 is removed.

In addition, in the above method, instead of using the resist layer 143 as a component of the multilayer wiring board 12, the resist layer 143 is removed after the conductor layer 77 is formed and polished, and the insulating resin layer 71 is provided. Similarly, instead of using the resist layer 143 as a component of the multilayer wiring board 12, the resist layer 143 is removed after the conductor layer 87 is formed and polished, and the insulating resin layer 81 is provided.

During the deposition and polishing process of the conductor layers 77, 87, etc., there is a risk of metal diffusing into the resist layer 143. The multilayer wiring board 12 described above does not include the resist layer 143 into which metal may be diffused, and is therefore advantageous in terms of achieving high insulation reliability.

Furthermore, the inorganic insulating layer 300 of the first layer 70 further includes a fourth portion 304 that covers the side surface 75a, which is the side wall of the land recess 75, and a fifth portion 305 that covers the side surface 74a, which is the side wall of the groove portion 74.

For this reason, in this embodiment, metal is less likely to diffuse from the side surfaces of the land portion 72a and the wiring portion 72bb into the insulating resin layer 81 compared to a structure in which the inorganic insulating layer 300 does not include a portion that covers the side walls of the land recess 75 and the groove portion 74.

Similarly, the inorganic insulating layer 310 of the second layer 80 further includes a fourth portion 314 that covers the side surface 85a, which is the side wall of the land recess 85, and a fifth portion 315 that covers the side surface 84a, which is the side wall of the groove portion 84.

For this reason, in this embodiment, metal is less likely to diffuse from the side surfaces of the land portion 82a and the wiring portion 82bb into the insulating resin layer 81 compared to a structure in which the inorganic insulating layer 310 does not include a portion that covers the side walls of the land recess 85 and the groove portion 84.

The above multilayer wiring board 12 therefore achieves excellent insulation reliability. Therefore, the composite wiring board 10 and packaged device 1 including the multilayer wiring board 12 also achieve excellent insulation reliability.

Furthermore, the inorganic insulating layer 300 can be easily formed because it is formed by stacking the first inorganic insulating layer 160 and the second inorganic insulating layer 200, which are formed in different processes. The same is true for the inorganic insulating layer 310.

Furthermore, the seed adhesion layer 78 also serves as a barrier layer that makes it difficult for metal to diffuse from the conductor layer 77 to the insulating resin layer 71 and the insulating resin layer 81. Also, when the seed layer 79 is made of a metal material that has a smaller ionization tendency than the material of the conductor layer 77, it also serves as a barrier layer that makes it difficult for metal to diffuse from the conductor layer 77 to the insulating resin layer 71 and the insulating resin layer 81. The same applies to the seed adhesion layer 88 and the seed layer 89.

Furthermore, the seed adhesion layer 78 covers the sides and bottoms of the land portion 72a, the via portion 73, and the groove portion 74, making it even more difficult for metal to diffuse from the conductor layer 77 to the insulating resin layer 71. The same is true for the seed adhesion layer 88.

The portions of the seed adhesion layer 78 and the seed layer 79 that cover the sides of the land portion 72a and the wiring portion 72b tend to be thinner as the distance from the top surface of the conductor layer 77 increases. Similarly, the portions of the seed adhesion layer 88 and the seed layer 89 that cover the sides of the land portion 82a and the wiring portion 82b tend to be thinner as the distance from the top surface of the conductor layer 87 increases. As the barrier layer becomes thinner, its ability to prevent metal diffusion decreases.

In contrast, in this embodiment, as described above, the second inorganic insulating layer 200 includes a portion covering the side surface 75a, which is the side wall of the land recess 75, and a portion covering the side surface 74a, which is the side wall of the groove portion 74. The second inorganic insulating layer 210 includes a portion covering the side surface 75a, which is the side wall of the land recess 85, and a portion covering the side surface 84a, which is the side wall of the groove portion 84.

Therefore, even if the thicknesses of the seed adhesion layer 78 and the seed layer 79 that cover the side surfaces of the land portion 72a and the wiring portion 72b, and the seed adhesion layer 88 and the seed layer 89 that cover the side surfaces of the land portion 82a and the wiring portion 72b, are reduced, the second inorganic insulating layers 200, 210 make it difficult for metal to diffuse from the side surfaces of the land portion 72a and the wiring portion 72b into the insulating resin layer 71.

Next, the effects of using the configuration of the multilayer wiring board 12 of the present embodiment and the manufacturing method thereof will be described with reference to a multilayer wiring board 150 shown in FIG. 41, which is a comparative example.

In this embodiment, as shown in Figs. 2 and 3, the gap between the land portion 72a and the wiring portion 72b is filled with the insulating resin layer 71. The inorganic insulating layer 300 includes a first portion 301 that covers the first surface 71a of the insulating resin layer 71. The gap between the land portion 82a and the wiring portion 82b is filled with the insulating resin layer 81. The inorganic insulating layer 310 includes a first portion 311 that covers the first surface 81a of the insulating resin layer 81.

As a result, metal diffusion from one of the adjacent insulating resin layers to the other is unlikely to occur. Therefore, the above-mentioned multilayer wiring board 12 achieves excellent insulation reliability. Therefore, the composite wiring board 10 and packaged device 1 that include the multilayer wiring board 12 also achieve excellent insulation reliability.

The sides of the land portions 72a, 82a of the interlayer connection conductor layer 90 contact the insulating resin layers 71, 81 via the seed adhesion layers 78, 88. By using titanium, which has good adhesion to the insulating resin layers 71, 81, for the seed adhesion layers 78, 88, it is possible to suppress peeling of the interlayer connection conductor layer 90 from the insulating resin layers 71, 81 due to the difference in linear expansion coefficient between copper and resin during temperature cycle testing.

As shown in FIG. 41, the multilayer wiring board of the comparative example is a multilayer wiring board 150 in which the conductor layers and the interlayer connection conductor layers are fabricated by the semi-additive method, which is a known technique. The multilayer wiring board 150 has the same configuration as the multilayer wiring board 12 of the present embodiment, but differs in the following points. Note that the components in the multilayer wiring board 150 that have the same functions as the multilayer wiring board 12 of the present embodiment are described using the same reference numerals as the multilayer wiring board 12. Note that the cross-sectional view of FIG. 41 depicts only the wiring portion 72b of the first layer 70, the land portion 72a, and their vicinity of the multilayer wiring board 150.

As shown in FIG. 41, the multilayer wiring board 150 of the comparative example differs from the multilayer wiring board 12 of the present embodiment in that it does not have an inorganic insulating layer 300 and an inorganic insulating layer 310. Furthermore, the multilayer wiring board 150 of the comparative example differs from the multilayer wiring board 12 of the present embodiment in that the seed adhesion layer 78 and the seed layer 79 of the wiring layer 72 do not cover the side surfaces of the conductor layer 77. Furthermore, the multilayer wiring board 150 of the comparative example differs from the multilayer wiring board 12 of the present embodiment in that the seed adhesion layer 88 and the seed layer 89 of the wiring layer 82 do not cover the side surfaces of the conductor layer 87.

The structure of the comparative multilayer wiring board 150 will be described with reference to the first layer 70. As shown in FIG. 41, in the comparative multilayer wiring board 150, the side of the conductor layer 77 of the wiring layer 72 contacts the insulating resin layer 71. That is, compared to the multilayer wiring board 12 of the present embodiment, the contact area of the conductor layer 77 with the insulating resin layer 71 is large. Therefore, the copper of the conductor layer 77 is likely to diffuse into the insulating resin layer 71. As a result, the insulating reliability of the insulating resin layer 71 is likely to decrease. In the comparative multilayer wiring board 150, the second layer 80 is similar to the first layer 70, that is, the insulating reliability of the insulating resin layer 81 is likely to decrease.

Furthermore, since the multilayer wiring board 150 of the comparative example does not have the inorganic insulating layer 300 and the inorganic insulating layer 310, the insulation reliability between the insulating resin layer 71 and the insulating resin layer 81 is also likely to decrease.

In addition, the side surface of the land portion 72a contacts the insulating resin layer 71. Therefore, due to the difference in the linear expansion coefficient between copper and resin during a temperature cycle test, peeling is likely to occur at the interface between the land portion 72a and the insulating resin layer 71. The same is true for the second layer 80, that is, peeling is likely to occur at the interface between the land portion 82a and the insulating resin layer 81.
<Confirmation of action and effect>
To confirm the effects of this embodiment, the following evaluations were performed on the multilayer wiring board 12 of this embodiment and the multilayer wiring board 150 of the comparative example.
<Evaluation method> Insulation reliability evaluation Evaluation was performed under an environment of bias: 3.3 V, 130° C./85% RH. The wiring rule was L/S=2/2 μm. In both the multilayer wiring board 12 and the multilayer wiring board 150, the thicknesses of the insulating resin layers were set to 1 μm, 1.5 μm, 2 μm, and 2.5 μm.

In the multilayer wiring board 12, the thickness of the first inorganic insulating layer 160 and the first inorganic insulating layer 170 was set to 50 nm. The pass condition was that the resistance value was ¹⁰ Ω or more after 192 hours under the above bias and environment. The number of evaluations for each resin thickness was N=10.
<Evaluation Results> Insulation Reliability Evaluation In the multilayer wiring board 150 of the comparative example, insulation failure was confirmed for all of the boards at 96 hours regardless of the thickness of the insulating resin layer. On the other hand, in the multilayer wiring board 12 of the present embodiment, the resistance value after 192 hours was 10 ⁶ Ω or more regardless of the thickness of the insulating resin layer, indicating good insulation reliability.

The above-mentioned embodiment is merely an example, and other specific details of the structure can of course be modified as appropriate.

In the above example, the first layer 70 is described as having a seed adhesion layer 78 that covers the side surface of the conductor layer 77. The seed adhesion layer 78 constitutes an inorganic insulating layer. In the case of the present embodiment in which the seed adhesion layer 78 is provided, the inorganic insulating layer 300 may be configured not to include a portion that covers the side wall of the groove portion 74 and a portion that covers the side wall of the land recess 75. Even in this configuration, the seed adhesion layer 78 can prevent diffusion of metal from the conductor layer 77 to the insulating resin layer 71. The same applies to the second layer 80.

In the above example, the multilayer wiring board 12 includes the first layer 70 and the second layer 80, but the multilayer wiring board 12 may further include one or more layers similar to the first layer 70 and the second layer 80.

In the above example, the inorganic insulating layer 300 is described as having a configuration including the first inorganic insulating layer 160 and the second inorganic insulating layer 200, but is not limited to this. In other examples, the inorganic insulating layer 300 may have a single-layer structure. That is, the inorganic insulating layer 300 may be formed integrally in the thickness direction. That is, the insulating layer does not have an internal interface that intersects with the thickness direction. The same applies to the inorganic insulating layer 310.

The present invention can be used in a semiconductor device having a wiring board equipped with an interposer or the like interposed between a main board and an IC chip.
The invention as originally claimed is set forth below.
[1]
The laminated laminate includes two or more layers laminated together, each of the two or more layers comprising:
an insulating resin layer having a first surface and a second surface which is the reverse side of the first surface, the insulating resin layer being integrally formed in a thickness direction, the insulating resin layer being provided with a first recess opening on the first surface, a groove opening on the first surface, and a second recess opening on the second surface and communicating with one or more of the first recesses;
a land portion and a wiring portion in which the first recess and the groove of the insulating resin layer are filled, respectively, and a via portion protruding from the first surface at the position of the land portion, the via portion being a conductor layer in which a recess of another insulating resin layer adjacent to the first surface side is filled;
an inorganic insulating layer including a first portion covering the first surface, a second portion covering a bottom surface of the groove portion, and a third portion covering a bottom surface of the first recess portion;
A multilayer wiring board including:
[2]
2. The multilayer wiring board according to item 1, wherein the first portion is thicker than the second portion and the third portion.
[3]
3. The multilayer wiring board according to item 1 or 2, wherein the inorganic insulating layer further includes a fourth portion covering a side wall of the first recess and a fifth portion covering a side wall of the groove portion, and the first portion is thicker than the fourth portion and the fifth portion.
[4]
4. The multilayer wiring board according to any one of claims 1 to 3, wherein the first portion has a two-layer structure, and the inorganic insulating layer other than the first portion has a single-layer structure.
[5]
5. The multilayer wiring board according to any one of claims 1 to 4, wherein the inorganic insulating layer includes a first inorganic insulating layer and a second inorganic insulating layer, the first inorganic insulating layer covers the first surface with the second inorganic insulating layer sandwiched therebetween, and has a through hole and a slit at the position of the first recess and the position of the groove, respectively, and the second inorganic insulating layer extends over the entire inorganic insulating layer.
[6]
6. The multilayer wiring board according to any one of claims 1 to 5, wherein the inorganic insulating layer contains one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon.
[7]
7. A multilayer wiring board as described in any one of claims 1 to 6, wherein each of the two or more layers further includes a first metal-containing layer that covers the peripheral edges of the land portion, the side surfaces of the wiring portion and the via portion, the surface of the wiring portion facing the opening of the groove portion, and the surface of the land portion facing the first surface.
[8]
8. The multilayer wiring board according to item 7, wherein each of the two or more layers further includes a second metal-containing layer interposed between the first metal-containing layer and the conductor layer and made of the same material as the conductor layer or made of a metal material having a smaller ionization tendency than the material of the conductor layer.
[9]
9. The multilayer wiring board according to item 7 or 8, wherein the first metal-containing layer contains titanium.
[10]
A composite wiring board comprising a first wiring board and a second wiring board joined to the first wiring board, the first and second wiring boards being electrically connected to each other via a joining electrode interposed between them, and the second wiring board being a multilayer wiring board as described in any one of items 1 to 9.
[11]
11. The composite wiring board according to item 10, wherein the first wiring board is a wiring board for a flip chip ball grid array, and the second wiring board is an interposer.
[12]
Item 12. The composite wiring board according to item 10 or 11,
a functional device mounted on a surface of the second wiring substrate opposite to the surface of the first wiring substrate;
A packaged device comprising:
[13]
forming two or more layers in a laminate, the forming of each of the two or more layers comprising:
forming a recess in an insulating resin layer;
forming a first inorganic insulating layer covering an upper surface of the insulating resin layer and an inner surface of the recess;
forming a dummy layer on the first inorganic insulating layer, the dummy layer having a groove and at least one through hole communicating with the recess;
removing a portion of an inorganic insulating layer including the first inorganic insulating layer that is exposed in the recess, the groove, and the through hole;
forming a conductor layer on the dummy layer so as to fill the recess, the groove, and the through hole;
polishing the conductor layer so as to remove a portion located outside the recess, the groove, or the through hole, thereby obtaining a portion of the conductor layer in which the recess is filled, a portion in which the through hole is filled, and a portion in which the groove is filled as a via portion, a land portion, and a wiring portion, respectively;
Thereafter, removing the dummy layer;
forming a second inorganic insulating layer covering an upper surface of the first inorganic insulating layer, an upper surface of the land portion, and an upper surface of the wiring portion;
providing an insulating resin layer that covers the second inorganic insulating layer and fills the gap between the land portion and the wiring portion;
A method for manufacturing a multilayer wiring board comprising the steps of:
[14]
14. The method for manufacturing a multilayer wiring board according to item 13, wherein the second inorganic insulating layer is formed so as to further cover a side surface of the land portion and a side surface of the wiring portion.
[15]
Item 15. The method for manufacturing a multilayer wiring board according to item 13 or 14, wherein the inorganic insulating layer contains one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon.
[16]
16. The method for manufacturing a multilayer wiring board according to any one of claims 13 to 15, wherein the formation of each of the two or more layers further includes forming a first metal-containing layer that covers an upper surface of the dummy layer and the inner surfaces of the recess, the groove, and the through hole before forming the conductor layer.
[17]
Item 17. The method for manufacturing a multilayer wiring board according to item 16, wherein the formation of each of the two or more layers further includes forming a second metal-containing layer on the first metal-containing layer before forming the conductor layer, the second metal-containing layer being made of the same material as the conductor layer or made of a metal material having a smaller ionization tendency than the material of the conductor layer.
[18]
18. The method for manufacturing a multilayer wiring board according to item 16 or 17, wherein the first metal-containing layer contains titanium.

1...packaged device, 2...support, 3...peeling layer, 5...seed adhesion layer, 6...seed layer, 10...composite wiring board, 11...FC-BGA board, 12...multilayer wiring board, 50...layer, 61...insulating resin layer, 62...via portion, 63...via hole, 64...side surface, 70...first layer, 71...insulating resin layer, 72...wiring layer, 72a...land portion, 72b...wiring portion, 73...via portion, 74...groove portion, 74a...side surface, 74b...bottom surface, 74c...opening, 75...land recess, 75a...side surface, 75c...opening, 77...conductor layer, 78...seed adhesion layer, 79...seed layer, 80...second layer, 81...insulating resin layer, 82...wiring layer, 82a...land portion, 82b...wiring portion, 83...via portion, 84...groove portion, 84a...side surface, 84b...bottom surface surface, 84c...opening, 85a...side, 87...conductor layer, 88...seed adhesion layer, 89...seed layer, 134...solder resist layer, 140...resist layer, 141...through hole, 143...resist layer, 144...groove, 145...through hole, 146...resist layer, 147...through hole, 150...multilayer wiring board of comparative example, 160...first inorganic insulating layer, 161...through hole, 162...slit, 170...first inorganic insulating layer, 171...through hole, 172...slit, 300...inorganic insulating layer, 301...first part, 302...second part, 303...third part, 304...fourth part, 305...fifth part, 310...inorganic insulating layer, 311...first part, 312...second part, 313...third part, 314...fourth part, 315...fifth part.

Claims (17)

The laminated laminate includes two or more layers laminated together, each of the two or more layers comprising:
an insulating resin layer having a first surface and a second surface which is the reverse side of the first surface, the insulating resin layer being integrally formed in a thickness direction, the insulating resin layer being provided with a first recess opening on the first surface, a groove opening on the first surface, and a second recess opening on the second surface and communicating with one or more of the first recesses;
a land portion and a wiring portion in which the first recess and the groove of the insulating resin layer are filled, respectively, and a via portion protruding from the first surface at the position of the land portion, the via portion being a conductor layer in which a recess of another insulating resin layer adjacent to the first surface side is filled;
an inorganic insulating layer including a first portion covering the first surface, a second portion covering a bottom surface of the groove portion, and a third portion covering a bottom surface of the first recess portion;
A multilayer wiring board, wherein each of the two or more layers further includes a first metal-containing layer that covers the side surfaces of the land portion, the wiring portion and the via portion, the surface of the wiring portion facing the opening of the groove portion, and the peripheral portion of the surface of the land portion facing the first surface . The multilayer wiring board according to claim 1, wherein the first portion is thicker than the second portion and the third portion. The multilayer wiring board according to claim 1 or 2, wherein the inorganic insulating layer further includes a fourth portion covering the sidewall of the first recess and a fifth portion covering the sidewall of the groove, and the first portion is thicker than the fourth portion and the fifth portion. The multilayer wiring board according to any one of claims 1 to 3, wherein the first portion has a two-layer structure, and the inorganic insulating layer other than the first portion has a single-layer structure. The multilayer wiring board according to any one of claims 1 to 4, wherein the inorganic insulating layer includes a first inorganic insulating layer and a second inorganic insulating layer, the first inorganic insulating layer covers the first surface with the second inorganic insulating layer sandwiched therebetween, and has a through hole and a slit at the position of the first recess and the position of the groove, respectively, and the second inorganic insulating layer spreads over the entire inorganic insulating layer. The multilayer wiring board according to any one of claims 1 to 5, wherein the inorganic insulating layer contains one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon. 7. The multilayer wiring board according to claim 1, wherein each of the two or more layers further includes a second metal-containing layer interposed between the first metal-containing layer and the conductor layer and made of the same material as the conductor layer or made of a metal material having a smaller ionization tendency than the material of the conductor layer. 8. The multilayer wiring board according to claim 1 , wherein the first metal-containing layer contains titanium. A composite wiring board comprising a first wiring board and a second wiring board joined to the first wiring board, the first and second wiring boards being electrically connected to each other via a joining electrode interposed between them, and the second wiring board being a multilayer wiring board as defined in any one of claims 1 to 8 . 10. The composite wiring board according to claim 9 , wherein the first wiring board is a wiring board for a flip chip ball grid array, and the second wiring board is an interposer. The composite wiring board according to claim 9 or 10 ,
a functional device mounted on a surface of the second wiring board opposite to the first wiring board. forming two or more layers in a laminate, the forming of each of the two or more layers comprising:
forming a recess in an insulating resin layer;
forming a first inorganic insulating layer covering an upper surface of the insulating resin layer and an inner surface of the recess;
forming a dummy layer on the first inorganic insulating layer, the dummy layer having a groove and at least one through hole communicating with the recess;
removing a portion of an inorganic insulating layer including the first inorganic insulating layer that is exposed in the recess, the groove, and the through hole;
forming a conductor layer on the dummy layer so as to fill the recess, the groove, and the through hole;
polishing the conductor layer so as to remove a portion located outside the recess, the groove, or the through hole, thereby obtaining a portion of the conductor layer in which the recess is filled, a portion in which the through hole is filled, and a portion in which the groove is filled as a via portion, a land portion, and a wiring portion, respectively;
Thereafter, removing the dummy layer;
forming a second inorganic insulating layer covering an upper surface of the first inorganic insulating layer, an upper surface of the land portion, and an upper surface of the wiring portion;
providing an insulating resin layer that covers the second inorganic insulating layer and fills the gap between the land portion and the wiring portion. The method for manufacturing a multilayer wiring board according to claim 12 , wherein the second inorganic insulating layer is formed so as to further cover a side surface of the land portion and a side surface of the wiring portion. 14. The method for manufacturing a multilayer wiring board according to claim 12 or 13, wherein the inorganic insulating layer contains one or more insulators selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon oxide doped with fluorine, and silicon oxide doped with carbon . 15. The method for manufacturing a multilayer wiring board according to claim 12, wherein the formation of each of the two or more layers further includes forming a first metal-containing layer that covers an upper surface of the dummy layer and the inner surfaces of the recess, the groove, and the through hole before forming the conductor layer. The method for manufacturing a multilayer wiring board according to claim 15, wherein the formation of each of the two or more layers further includes forming a second metal-containing layer on the first metal-containing layer before forming the conductor layer, the second metal-containing layer being made of the same material as the conductor layer or made of a metal material having a smaller ionization tendency than the material of the conductor layer . 17. The method for manufacturing a multilayer wiring board according to claim 15 , wherein the first metal-containing layer contains titanium.