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JP7679688B2 - Glass Materials - Google Patents
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JP7679688B2 - Glass Materials - Google Patents

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JP7679688B2
JP7679688B2 JP2021079730A JP2021079730A JP7679688B2 JP 7679688 B2 JP7679688 B2 JP 7679688B2 JP 2021079730 A JP2021079730 A JP 2021079730A JP 2021079730 A JP2021079730 A JP 2021079730A JP 7679688 B2 JP7679688 B2 JP 7679688B2
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recess
glass member
glass
view
depth
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JP2022024995A (en
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真悟 関
修 佐藤
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AGC Inc
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Asahi Glass Co Ltd
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Priority to US17/304,671 priority Critical patent/US11691914B2/en
Priority to CN202110800492.2A priority patent/CN113998898B/en
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Description

本発明は、ガラス部材に関する。 The present invention relates to a glass member.

ガラス部材の製造工程上の管理を目的として、ガラス部材の表面にガラス部材等に関する種々の情報が取得可能な、文字、記号、図形等の組み合わせからなるマークを形成したガラス部材が知られている。 For the purpose of managing the manufacturing process of glass components, glass components are known that have marks formed on their surfaces that are made up of a combination of letters, symbols, figures, etc., from which various information about the glass components can be obtained.

このようなマークを有するガラス部材として、例えば、環状の溝で形成されたドットを構成単位とする情報表示部を表面に備える板ガラスが開示されている(例えば、特許文献1参照)。特許文献1の板ガラスでは、マークは、ガラス部材の表面にレーザを照射してガラスを消失し、レーザの照射領域にドットを生じさせることで形成している。 As an example of a glass member having such a mark, there is disclosed a plate glass having an information display portion on its surface, the constituent units of which are dots formed in annular grooves (see, for example, Patent Document 1). In the plate glass of Patent Document 1, the mark is formed by irradiating the surface of the glass member with a laser, causing the glass to disappear and creating dots in the laser irradiated area.

また、平板部と枠部とを備え、平板部と枠部とで囲まれた凹部をウェットエッチングで形成した光学用カバーガラスが開示されている(例えば、特許文献2参照)。 An optical cover glass has also been disclosed that has a flat plate portion and a frame portion, and a recess surrounded by the flat plate portion and the frame portion is formed by wet etching (see, for example, Patent Document 2).

特開2016-210644号公報JP 2016-210644 A 特開2011-37694号公報JP 2011-37694 A

しかしながら、特許文献1に記載の技術のように、レーザ光をガラス部材の表面に照射してマークを加工する場合、ごく短時間に高エネルギー密度のレーザ光をガラス板に照射することでガラスを気化させてマークを形成している。そのため、レーザ加工部の非加工部との境界部分に多くの微小なクラックが形成され易く、マークの輪郭が不明瞭となる可能性がある。 However, when irradiating the surface of a glass member with laser light to process a mark, as in the technology described in Patent Document 1, the mark is formed by vaporizing the glass by irradiating the glass plate with high-energy density laser light for a very short period of time. This can easily cause many tiny cracks to form at the boundary between the laser-processed area and the non-processed area, making the outline of the mark unclear.

また、特許文献2に記載の技術のように、エッチングにより凹部を加工する場合、エッチング加工部と非加工部との境界部分の角度は緩やかとなるように形成され易く、マークの輪郭が不明瞭となる可能性がある。 In addition, when processing recesses by etching, as in the technology described in Patent Document 2, the angle of the boundary between the etched and unetched areas tends to be gentle, which can make the outline of the mark unclear.

ガラス部材の表面に設けられるマークがガラス部材の位置決め用に使用される場合、マークの視認性の良否が位置決めの精度に影響する。例えば、カメラを用いた光学装置を用いてガラス部材の位置決めを行って、ガラス部材を加工する場合、マークの輪郭が不明瞭であると、ガラス部材の正確な位置決めができず、ガラス部材の加工や印刷層の形成を高精度にできない可能性がある。 When a mark provided on the surface of a glass member is used to position the glass member, the visibility of the mark affects the accuracy of the positioning. For example, when a glass member is positioned using an optical device that uses a camera and then processed, if the outline of the mark is unclear, the glass member cannot be positioned accurately, and it may not be possible to process the glass member or form the printing layer with high accuracy.

本発明の一態様は、視認性に優れた凹部を有するガラス部材を提供することを目的とする。 One aspect of the present invention aims to provide a glass member having a recess with excellent visibility.

本発明に係るガラス部材の一態様は、凹部を備えるガラス部材であって、断面視において、前記ガラス部材の主面と前記凹部の開口端面とのなす角度が、90°~130°である。 One aspect of the glass member according to the present invention is a glass member having a recess, in which the angle between the main surface of the glass member and the opening end surface of the recess is 90° to 130° in a cross-sectional view.

本発明の一態様は、視認性に優れた凹部を有するガラス部材を提供することができる。 One aspect of the present invention is to provide a glass member having a recess with excellent visibility.

本発明の実施形態に係るガラス部材の平面図である。FIG. 2 is a plan view of a glass member according to an embodiment of the present invention. 図1のI-I断面図である。FIG. 2 is a cross-sectional view taken along the line II of FIG. 図1の凹部の拡大図である。FIG. 2 is an enlarged view of the recess in FIG. 1 . 図3のII-II断面図である。This is a cross-sectional view of FIG. 3 taken along line II-II. 図4の部分拡大図である。FIG. 5 is a partially enlarged view of FIG. 4 . ガラス部材の製造方法を示すフローチャートである。3 is a flowchart showing a method for manufacturing a glass member. 例1-1のガラス部材の凹部を含む表面のSEM写真である。1 is a SEM photograph of a surface including a recess of the glass member of Example 1-1. 例1-1のガラス部材の凹部を含む断面のSEM写真である。1 is a SEM photograph of a cross section including a recess of the glass member of Example 1-1. 図8の部分拡大図である。FIG. 9 is a partially enlarged view of FIG. 8 . 例1-3のガラス部材の凹部を含む表面のSEM写真である。1 is a SEM photograph of a surface including a recess of the glass member of Example 1-3. 例1-3のガラス部材の凹部を含む断面のSEM写真である。1 is a SEM photograph of a cross section including a recess of the glass member of Example 1-3. 図11の部分拡大図である。FIG. 12 is a partially enlarged view of FIG. 例1-5のガラス部材の凹部を含む表面のSEM写真である。1 is a SEM photograph of a surface including a recess of the glass member of Example 1-5. 例1-5のガラス部材の凹部を含む断面のSEM写真である。1 is a SEM photograph of a cross section including a recess of the glass member of Example 1-5. 例3-1のガラス部材の凹部を含む表面のSEM写真である。1 is a SEM photograph of a surface including a recess of the glass member of Example 3-1. 例3-2のガラス部材の凹部を含む表面のSEM写真である。1 is a SEM photograph of a surface including a recess of the glass member of Example 3-2.

以下、本発明の実施の形態について、詳細に説明する。なお、説明の理解を容易にするため、各図面において同一の構成要素に対しては同一の符号を付して、重複する説明は省略する。また、図面における各部材の縮尺は実際とは異なる場合がある。本明細書において数値範囲を示すチルダ「~」は、別段の断わりがない限り、その前後に記載された数値を下限値及び上限値として含むことを意味する。 The following is a detailed description of an embodiment of the present invention. To facilitate understanding of the description, the same components in each drawing are given the same reference numerals, and duplicate descriptions are omitted. The scale of each member in the drawings may differ from the actual scale. In this specification, a tilde "~" indicating a numerical range means that the numerical values before and after it are included as the lower and upper limits, unless otherwise specified.

<ガラス部材>
本発明の実施形態に係るガラス部材について説明する。図1は、本実施形態に係るガラス部材の平面図であり、図2は、図1のI-I断面図である。図1及び図2に示すように、本実施形態に係るガラス部材1は、その主面1aに、凹部10と、印刷層20とを有する板状部材であり、主面1aは平坦であり、凹部10をガラス部材1の位置決め用のマークとして用いるものである。なお、ガラス部材1は、湾曲して形成されていてもよい。
<Glass components>
A glass member according to an embodiment of the present invention will be described. Fig. 1 is a plan view of the glass member according to this embodiment, and Fig. 2 is a cross-sectional view taken along line I-I of Fig. 1. As shown in Figs. 1 and 2, the glass member 1 according to this embodiment is a plate-like member having a recess 10 and a printed layer 20 on its main surface 1a, the main surface 1a being flat, and the recess 10 being used as a mark for positioning the glass member 1. The glass member 1 may be formed in a curved shape.

ガラス部材1の平面視における外形形状は、特に限定されず、直線部分、曲線部分等を含むことができ、円形や楕円形状のような曲線部分のみからなってもよい。例えば、ガラス部材1は、平面視において、角C1~C4に丸みを有する略四角形状に形成されており、それぞれの角C1~C4の丸みは異なる曲率を有している。主面1aは、ガラス部材1における表面(上の面)となり、主面1aの反対側に位置する面がガラス部材1の裏面(下の面)となる。なお、角C1~C4の曲率は、いずれも同じでもよいし、4つの角C1~C4のうちの少なくとも1つが異なっていてもよい。また、丸みを有する角の数は、ガラス部材1の平面視において、3つ以上であればよい。 The external shape of the glass member 1 in plan view is not particularly limited, and may include straight and curved parts, or may be composed of only curved parts such as a circle or an ellipse. For example, the glass member 1 is formed in a substantially rectangular shape with rounded corners C1 to C4 in plan view, and the rounded corners C1 to C4 have different curvatures. The main surface 1a is the front surface (upper surface) of the glass member 1, and the surface opposite the main surface 1a is the back surface (lower surface) of the glass member 1. The curvatures of the corners C1 to C4 may all be the same, or at least one of the four corners C1 to C4 may be different. The number of rounded corners may be three or more in plan view of the glass member 1.

本実施形態では、ガラス部材1は、凹部10をガラス部材1の位置決め用のマークとして用いることができるため、ガラス部材1の平面視において、外形形状が互いに平行又は直交する位置関係にある直線部分を有していなくてもよい。さらに、ガラス部材1は、平面視において、外形形状が直線部分を有していなくてもよい。すなわち、ガラス部材1は、平面視において、直交する2つの直線部分を有しないで構成することができる。 In this embodiment, the recess 10 of the glass member 1 can be used as a mark for positioning the glass member 1, so that the outer shape of the glass member 1 does not have to have straight line portions that are parallel or perpendicular to each other in a plan view. Furthermore, the outer shape of the glass member 1 does not have to have straight line portions in a plan view. In other words, the glass member 1 can be configured not to have two straight line portions that are perpendicular to each other in a plan view.

ガラス部材1の端面は、主面1a及び裏面の端部に対して略垂直に形成されていてもよいし、傾斜して形成されていてもよい。 The end faces of the glass member 1 may be formed substantially perpendicular to the ends of the main surface 1a and the back surface, or may be formed at an angle.

ガラス部材1としては、例えば、ガラスウェハ(ガラス基板)、ガラスパネル、ガラスレンズ等が挙げられる。ガラス部材1の材質としては、ソーダライムシリカガラス、ホウケイ酸ガラス、アルミノシリケートガラス等を用いることができる。 Examples of the glass member 1 include a glass wafer (glass substrate), a glass panel, a glass lens, etc. Examples of the material that can be used for the glass member 1 include soda-lime silica glass, borosilicate glass, aluminosilicate glass, etc.

ガラス部材1は、物理強化、化学強化されていてもよい。化学強化する場合、ガラス部材1の表面に含まれる、例えば、LiイオンやNaイオン等のようなイオン半径が小さいイオンを、例えば、Kイオン等のように相対的にイオン半径が大きいイオンに置換する。これにより、ガラス部材1の表面から所定の深さに圧縮応力層を形成する。ガラス部材1を化学強化して、ガラス部材1の表面に圧縮応力層を形成することで、ガラス部材1の強度を向上させ、接触等によりガラス部材1が破損することを抑制することができる。 The glass member 1 may be physically strengthened or chemically strengthened. When chemically strengthening, ions with a small ionic radius, such as Li ions and Na ions, contained in the surface of the glass member 1 are replaced with ions with a relatively large ionic radius, such as K ions. This forms a compressive stress layer at a predetermined depth from the surface of the glass member 1. By chemically strengthening the glass member 1 and forming a compressive stress layer on the surface of the glass member 1, the strength of the glass member 1 can be improved and damage to the glass member 1 due to contact, etc. can be suppressed.

図1に示すように、凹部10は、ガラス部材1の主面1aの異なる端面近傍に2つ形成されている。凹部10は、主面1aに、円環状の溝に形成されている。図3は、図1の凹部10の拡大図であり、図4は、図3のII-II断面図である。図3に示すように、凹部10は、主面1aに、平面視において、円環状に形成され、図4に示すように、凹部10は、断面視において、溝を形成している。 As shown in FIG. 1, two recesses 10 are formed near different end faces of the main surface 1a of the glass member 1. The recesses 10 are formed as annular grooves in the main surface 1a. FIG. 3 is an enlarged view of the recesses 10 in FIG. 1, and FIG. 4 is a cross-sectional view taken along line II-II in FIG. 3. As shown in FIG. 3, the recesses 10 are formed as annular grooves in the main surface 1a in a plan view, and as shown in FIG. 4, the recesses 10 form grooves in a cross-sectional view.

なお、凹部10は、円形状の窪み、楕円形状に形成された溝、楕円形状の窪み等、平面視における凹部10とガラス部材1の主面1aとの輪郭が曲線形状であってもよい。また、多角形の溝、多角形の窪み、十字形状の溝等、平面視における凹部10とガラス部材1の主面1aとの輪郭が、直線形状であってもよい。さらに、凹部10は、平面視における凹部10とガラス部材1の主面1aとの輪郭が、曲面形状と直線形状とからなってもよい。 The recess 10 may be a circular recess, an elliptical groove, an elliptical recess, etc., in which the contour between the recess 10 and the main surface 1a of the glass member 1 in a planar view is curved. Also, the recess 10 may be a polygonal groove, a polygonal recess, a cross-shaped groove, etc., in which the contour between the recess 10 and the main surface 1a of the glass member 1 in a planar view is linear. Furthermore, the recess 10 may be a curved and linear contour, in which the contour between the recess 10 and the main surface 1a of the glass member 1 in a planar view is curved and linear.

凹部10は、前述した図形以外に、記号、文字列、バーコード、2次元コード等を構成してもよい。 In addition to the shapes described above, the recess 10 may also form symbols, character strings, bar codes, two-dimensional codes, etc.

ガラス部材1の主面1aに形成される凹部10の個数は、1個でよいし、3個以上であってもよい。 The number of recesses 10 formed on the main surface 1a of the glass member 1 may be one or may be three or more.

凹部10は、ガラス部材1の主面1aおよび主面1aの反対側の主面の両面に形成されてもよい。 The recess 10 may be formed on both the main surface 1a of the glass member 1 and the main surface opposite the main surface 1a.

図5は、図4の部分拡大図である。図5に示すように、凹部10の側面11(壁面)は、開口端面111と、中間側面112と、底部側面113とを有している。 Figure 5 is a partially enlarged view of Figure 4. As shown in Figure 5, the side surface 11 (wall surface) of the recess 10 has an opening end surface 111, an intermediate side surface 112, and a bottom side surface 113.

開口端面111は、図5に示すように、凹部10の深さH0(図4参照)を100%とした際に、凹部10の深さH0(図4参照)に対して凹部10の主面1aから垂直方向に5%の深さH1おける凹部10の側面11の位置(5%深さ凹部位置)11aと主面1aとの間の側面である。 As shown in FIG. 5, when the depth H0 (see FIG. 4) of the recess 10 is taken as 100%, the opening end surface 111 is the side surface between the position 11a (5% depth recess position) of the side surface 11 of the recess 10 at a depth H1 of 5% in the vertical direction from the main surface 1a of the recess 10 with respect to the depth H0 (see FIG. 4) of the recess 10, and the main surface 1a.

なお、凹部10の深さH0は、断面視において、ガラス部材1の主面1aから凹部10の底部のうちで最も深い部分までの距離、すなわち凹部10の底面12の最大深さとする。 The depth H0 of the recess 10 is the distance from the main surface 1a of the glass member 1 to the deepest part of the bottom of the recess 10 in a cross-sectional view, i.e., the maximum depth of the bottom surface 12 of the recess 10.

中間側面112は、図4に示すように、凹部10の深さH0を100%とした際に、凹部10の深さH0に対して主面1aから垂直方向に5%深さ凹部位置11aと、凹部10の深さH0に対して主面1aから垂直方向に50%の深さH2における凹部10の側面11の位置(50%深さ凹部位置)11bとの間の側面である。 As shown in FIG. 4, when the depth H0 of the recess 10 is taken as 100%, the intermediate side 112 is between a recess position 11a that is 5% deeper from the main surface 1a in the vertical direction with respect to the depth H0 of the recess 10, and a position (50% deeper recess position) 11b of the side 11 of the recess 10 at a depth H2 that is 50% deeper from the main surface 1a in the vertical direction with respect to the depth H0 of the recess 10.

底部側面113は、図4に示すように、中間側面112と底面12との間の側面である。 The bottom side 113 is the side between the intermediate side 112 and the bottom side 12, as shown in FIG. 4.

図5に示すように、凹部10の、断面視において、ガラス部材1の主面1a(ガラス部材主面)と凹部10の開口端面111とのなす角度αが、90°~130°である。角度αは、好ましくは92°~120°であり、より好ましくは95°~115°であり、更に好ましくは100°~110°である。角度αが90°~130°であれば、凹部10と主面1aとの境界が明確であり、凹部10の輪郭を明瞭にすることができる。また、角度αは適度な傾きであるため、凹部10の形成に要する費用を抑えることができる。 As shown in FIG. 5, in a cross-sectional view of the recess 10, the angle α between the main surface 1a of the glass member 1 (main surface of the glass member) and the opening end surface 111 of the recess 10 is 90° to 130°. The angle α is preferably 92° to 120°, more preferably 95° to 115°, and even more preferably 100° to 110°. If the angle α is 90° to 130°, the boundary between the recess 10 and the main surface 1a is clear, and the outline of the recess 10 can be made clear. In addition, because the angle α is a moderate inclination, the cost required for forming the recess 10 can be reduced.

なお、開口端面111の角度αとは、5%深さ凹部位置11aから主面1a側に凹部10の形状に沿って引いた直線と主面1aとのなす角度をいう。5%深さ凹部位置11aが曲線である場合は、開口端面111の角度αは、5%深さ凹部位置11aにおける接線と主面1aとのなす角度とする。 The angle α of the opening end surface 111 refers to the angle between the main surface 1a and a straight line drawn from the 5% depth recess position 11a toward the main surface 1a along the shape of the recess 10. If the 5% depth recess position 11a is a curve, the angle α of the opening end surface 111 is the angle between the tangent at the 5% depth recess position 11a and the main surface 1a.

開口端面111よりも底面12側の側面11のうち、中間側面112が、断面視において、ガラス部材1の主面1aに対して90°~130°の角度βを有することが好ましい。角度βは、より好ましくは92°~120°であり、さらに好ましくは95°~115°であり、最も好ましくは100°~110°である。角度βが90°~130°であれば、角度βは角度αに近い角度とすることができるため、凹部10の側面11の傾きの変化を抑えることができる。そのため、凹部10と主面1aとの境界が不明確となることを抑えることができる。 Of the side surfaces 11 closer to the bottom surface 12 than the opening end surface 111, it is preferable that the middle side surface 112 has an angle β of 90° to 130° with respect to the main surface 1a of the glass member 1 in a cross-sectional view. The angle β is more preferably 92° to 120°, even more preferably 95° to 115°, and most preferably 100° to 110°. If the angle β is 90° to 130°, the angle β can be set close to the angle α, so that the change in the inclination of the side surface 11 of the recess 10 can be suppressed. This makes it possible to prevent the boundary between the recess 10 and the main surface 1a from becoming unclear.

なお、中間側面112の角度βとは、5%深さ凹部位置11aと50%深さ凹部位置11bとを結ぶ直線と主面1aとのなす角度をいう。 The angle β of the intermediate side surface 112 refers to the angle between the main surface 1a and the straight line connecting the 5% depth recess position 11a and the 50% depth recess position 11b.

また、凹部10は、平面視で、凹部10の外形の真円度が外形寸法の5%以下であることが好ましく、より好ましくは3%以下であり、さらに好ましくは1%以下である。凹部10の外形の真円度が外形寸法の5%以下であれば、凹部10の形状をより明確とし、凹部10の輪郭をより明瞭に確認することができる。 In addition, the circularity of the outer shape of the recess 10 in plan view is preferably 5% or less of the outer dimensions, more preferably 3% or less, and even more preferably 1% or less. If the circularity of the outer shape of the recess 10 is 5% or less of the outer dimensions, the shape of the recess 10 is clearer, and the outline of the recess 10 can be more clearly identified.

なお、真円度は、JIS B0621-1984 幾何偏差の定義及び表示に基づいて求めることができる。 Circularity can be determined based on JIS B0621-1984, Definition and Display of Geometric Deviation.

凹部10は、図4に示すように、底面12に曲面を有することが好ましい。凹部10は、底面12が曲面を有していれば、凹部10は容易に形成することができると共に、凹部10に角がないため、形状の崩れを生じ難くすることができる。また、ガラス部材1に曲げ応力等が作用した場合に、凹部10に起因する割れを抑制することができる。 As shown in FIG. 4, it is preferable that the recess 10 has a curved bottom surface 12. If the bottom surface 12 of the recess 10 has a curved surface, the recess 10 can be easily formed, and since the recess 10 has no corners, it is less likely to lose its shape. In addition, when bending stress or the like is applied to the glass member 1, cracks caused by the recess 10 can be suppressed.

底面12の表面粗さRqは、凹部10の側面11の表面粗さRqよりも小さいことが好ましい。底面12の表面粗さRqが凹部10の側面11の表面粗さRqよりも小さければ、底面12が外部から確認し易くなるため、外部から凹部10を認識し易くすることができる。 It is preferable that the surface roughness Rq of the bottom surface 12 is smaller than the surface roughness Rq of the side surface 11 of the recess 10. If the surface roughness Rq of the bottom surface 12 is smaller than the surface roughness Rq of the side surface 11 of the recess 10, the bottom surface 12 can be easily seen from the outside, and therefore the recess 10 can be easily recognized from the outside.

なお、表面粗さRqとは、JIS B 0601:2001に規定されている二乗平均平方根粗さRqである。この二乗平均平方根粗さRqは、表面粗さの標準偏差を意味する。表面粗さRqは、レーザ顕微鏡を用いて測定することができる。 The surface roughness Rq is the root mean square roughness Rq defined in JIS B 0601:2001. This root mean square roughness Rq means the standard deviation of the surface roughness. The surface roughness Rq can be measured using a laser microscope.

凹部10は、凹部10の深さH0のガラス部材1の厚さに対する比(凹部10の深さH0/ガラス部材1の厚さ)が下記式(1)を満たすことが好ましい。すなわち、凹部10の深さH0/ガラス部材1の厚さは、0.05~0.5であることが好ましく、より好ましくは0.10~0.4であり、さらに好ましくは0.15~0.25である。凹部10の深さ/ガラス部材1の厚さが0.05~0.5であれば、凹部10は、溝を形成するのに十分な深さを有することができるため、外部から認識することができる。また、凹部10の深さに対して、ガラス部材1の厚さを十分確保することができるため、ガラス部材1の強度を高く維持することができる。0.05<凹部10の深さH0/ガラス部材1の厚さ<0.5 ・・・(1) The ratio of the depth H0 of the recess 10 to the thickness of the glass member 1 (depth H0 of the recess 10/thickness of the glass member 1) preferably satisfies the following formula (1). That is, the depth H0 of the recess 10/thickness of the glass member 1 is preferably 0.05 to 0.5, more preferably 0.10 to 0.4, and even more preferably 0.15 to 0.25. If the depth of the recess 10/thickness of the glass member 1 is 0.05 to 0.5, the recess 10 can have a sufficient depth to form a groove, and can be recognized from the outside. In addition, the thickness of the glass member 1 can be sufficiently secured relative to the depth of the recess 10, and therefore the strength of the glass member 1 can be maintained high. 0.05<depth H0 of the recess 10/thickness of the glass member 1<0.5 ... (1)

図1及び図2に示すように、印刷層20は、平面視において、主面1aの上に、凹部10とは異なる位置に設けられている。印刷層20は、例えば、型式記号、製造番号、遮光層等である。凹部10があると、印刷層20の形成を行う際、位置決め用のアライメントマークとしての機能を有することができる。印刷層20は、黒インク等の有色のインク層で形成することができる。 As shown in Figures 1 and 2, the printing layer 20 is provided on the main surface 1a at a position different from the recess 10 in a plan view. The printing layer 20 is, for example, a model symbol, a manufacturing number, a light-shielding layer, etc. If there is a recess 10, it can function as an alignment mark for positioning when forming the printing layer 20. The printing layer 20 can be formed of a colored ink layer such as black ink.

また、ガラス部材1は、その主面1aにAR膜、遮光層等を有していてもよい。 The glass member 1 may also have an AR film, a light-shielding layer, etc. on its main surface 1a.

(ガラス部材の製造方法)
本実施形態に係るガラス部材1の製造方法について説明する。図6は、本実施形態に係るガラス部材1の製造方法を示すフローチャートである。
(Method of Manufacturing Glass Member)
A method for manufacturing the glass member 1 according to this embodiment will now be described. Fig. 6 is a flowchart showing a method for manufacturing the glass member 1 according to this embodiment.

図6に示すように、本実施形態に係るガラス部材の製造方法では、まず、ガラス素板を準備する(ガラス素板の準備工程:ステップS11)。 As shown in FIG. 6, in the method for manufacturing a glass member according to this embodiment, first, a raw glass plate is prepared (preparation process of raw glass plate: step S11).

ガラス素板を形成するガラス素材としては、例えば、ホウケイ酸ガラス、ソーダライムガラス、高シリカガラス等を用いることができる。ガラス素板の大きさ、厚さ、形状等は、完成品であるガラス部材1の用途等に応じて適宜選択される。 The glass material that can be used to form the glass plate can be, for example, borosilicate glass, soda-lime glass, high silica glass, etc. The size, thickness, shape, etc. of the glass plate can be appropriately selected depending on the application of the finished glass member 1.

ガラス素板は、フロート法、ダウンドロー法(例えば、オーバーフローダウンドロー法)、リドロー法、プレス成形法、引き上げ法等の公知の製造方法を用いて製造することができる。ガラス素板の製造方法としては、生産性及びコストに優れている点から、フロート法を用いることが好ましい。 The glass plate can be manufactured using known manufacturing methods such as the float method, the downdraw method (e.g., the overflow downdraw method), the redraw method, the press molding method, and the pull-up method. As a manufacturing method for the glass plate, it is preferable to use the float method because of its excellent productivity and cost.

次に、ガラス素板を、複数のガラス基材に切断する(ガラス素板の切断工程:ステップS12)。 Next, the glass plate is cut into multiple glass substrates (glass plate cutting process: step S12).

ガラス素板の切断方法としては、例えば、ガラス素板の表面にレーザ光を照射してガラス素板の表面上で、レーザ光の照射領域を移動させることで切断する方法、カッターホイール等の機械的に切断する方法等を用いることができる。 Methods for cutting the raw glass plate include, for example, a method of cutting by irradiating the surface of the raw glass plate with laser light and moving the irradiated area of the laser light on the surface of the raw glass plate, and a mechanical cutting method using a cutter wheel, etc.

次いで、ガラス基材を、平面視において、前述したような形状に加工すると共に、ガラス基材の表面に凹部10を形成する(ガラス基材の外形の加工及び凹部の形成工程:ステップS13)。なお、ガラス基材の表面は、図1及び図2に示すガラス部材1の主面1aに相当し、以下、ガラス基材の表面を主面1aという。 Next, the glass substrate is processed into the shape described above in plan view, and a recess 10 is formed on the surface of the glass substrate (processing the outer shape of the glass substrate and forming a recess: step S13). The surface of the glass substrate corresponds to the main surface 1a of the glass member 1 shown in Figures 1 and 2, and hereinafter the surface of the glass substrate is referred to as the main surface 1a.

ガラス基材の外形の加工及び凹部10の形成は、同時に行っているが、別々に行ってもよい。別々に行う場合は、凹部10を形成し、次いで凹部10を基準として外形を加工する。このようにすることで、精度の高い外形加工を行うことができる。また、ガラス基材の外形の加工の前工程、後工程又は同時に、ガラス基材の板厚を適宜の厚さとなるように加工してもよい。ガラス基材の板厚の加工方法としては、研磨やスリミング(薬液を用いたケミカル研磨)等が挙げられる。 The processing of the outer shape of the glass substrate and the formation of the recess 10 are performed simultaneously, but they may be performed separately. When performed separately, the recess 10 is formed, and then the outer shape is processed using the recess 10 as a reference. In this way, the outer shape can be processed with high precision. In addition, the thickness of the glass substrate may be processed to an appropriate thickness before, after, or simultaneously with the processing of the outer shape of the glass substrate. Methods for processing the thickness of the glass substrate include polishing and slimming (chemical polishing using a chemical solution).

ガラス基材の輪郭形状等外形の加工及び凹部10の形成は、レーザとウェットエッチングとを組み合せて用いることで行うことができる。 The processing of the glass substrate's contour and other external shapes and the formation of the recesses 10 can be performed by using a combination of laser and wet etching.

レーザとしては、CO2レーザ、Nd:YAGレーザ等を使用することができ、半導体レーザ励起型YAGレーザが、集光性が良く好適である。レーザをガラス基材の主面1aに集光させることによって、ガラス基材の主面1a及びその下部に改質領域を形成することができる。なお、レーザを集光させる時には、フェムト秒レーザによって行うことが、レーザ集光部分周辺のガラス基材が熱的損傷及び化学的損傷を殆ど受けないため、好ましい。 As the laser, CO2 laser, Nd:YAG laser, etc. can be used, and a semiconductor laser pumped YAG laser is preferable because of its good focusing ability. By focusing the laser on the main surface 1a of the glass substrate, a modified region can be formed on the main surface 1a of the glass substrate and below it. In addition, when focusing the laser, it is preferable to use a femtosecond laser because the glass substrate around the laser focusing portion is hardly thermally or chemically damaged.

ウェットエッチングは、ガラス基材をエッチング液に浸漬することで行われる。エッチング液には、ガラス部材1を構成する材料により最適なものを用いることが好ましく、フッ化水素、フッ化アンモニウム、フッ化カリウム、フッ化ナトリウム等のフッ化物を含有する水溶液;塩酸、硫酸、リン酸、硝酸等の無機酸を含有する水溶液;酢酸、コハク酸等の有機酸を含有する水溶液を好適に使用することができる。これらは、一種単独で用いてもよいし二種以上を併用してもよい。 Wet etching is performed by immersing the glass substrate in an etching solution. It is preferable to use an etching solution that is optimal for the material constituting the glass member 1, and suitable solutions include aqueous solutions containing fluorides such as hydrogen fluoride, ammonium fluoride, potassium fluoride, and sodium fluoride; aqueous solutions containing inorganic acids such as hydrochloric acid, sulfuric acid, phosphoric acid, and nitric acid; and aqueous solutions containing organic acids such as acetic acid and succinic acid. These may be used alone or in combination of two or more.

ガラス基材の外周表面と主面1aの特定の位置にレーザを照射して改質領域を形成した後、ガラス部材をエッチング液に浸漬してウェットエッチングを行う。エッチング液にガラス部材を浸漬すると、レーザを照射して形成した改質領域にはレーザが照射されていない非改質領域よりもエッチング液が浸透し易くなっており、改質領域は非改質領域よりもエッチングの進行を促進させることができる。よって、改質領域のエッチングレートは、未改質領域のエッチングレートよりも高いため、改質領域は未改質領域よりもエッチングを進行させることができる。 After forming modified regions by irradiating the outer peripheral surface and specific positions of the main surface 1a of the glass substrate with a laser, the glass member is immersed in an etching solution to perform wet etching. When the glass member is immersed in the etching solution, the etching solution penetrates more easily into the modified regions formed by laser irradiation than into the unmodified regions not irradiated with the laser, and the etching can be promoted more in the modified regions than in the unmodified regions. Therefore, the etching rate of the modified regions is higher than the etching rate of the unmodified regions, and therefore etching can be promoted more in the modified regions than in the unmodified regions.

これにより、改質領域に沿った任意の輪郭形状を形成し、平面視において、角に丸みを有する略四角形状であって、それぞれの角が異なる曲率を有するように加工されたガラス部材1が得られる。ガラス部材1の主面1aの特定の位置に、改質領域に沿った、円環状の凹部10を形成することができる。 This allows the glass member 1 to be obtained with an arbitrary contour shape formed along the modified region, and with a generally rectangular shape with rounded corners in a plan view, each corner having a different curvature. A ring-shaped recess 10 can be formed along the modified region at a specific position on the main surface 1a of the glass member 1.

次いで、ガラス部材1の主面1a及び裏面を化学強化する(化学強化工程:ステップS14)。 Next, the main surface 1a and the back surface of the glass member 1 are chemically strengthened (chemical strengthening process: step S14).

ガラス部材1を化学強化することで、ガラス部材1の主面1a及び裏面に含まれる、例えば、LiイオンやNaイオン等のようなイオン半径が小さいイオンを、例えば、Kイオン等のように相対的にイオン半径が大きいイオンに置換する。これにより、ガラス部材1の主面1a及び裏面から所定の深さの強化層を形成する。ガラス部材1を化学強化して、ガラス部材1の主面1a及び裏面に強化層を形成することで、ガラス部材1の強度を向上させ、接触等によりガラス部材1が破損することを抑制することができる。 By chemically strengthening the glass member 1, ions with a small ionic radius, such as Li ions and Na ions, contained in the principal surface 1a and rear surface of the glass member 1 are replaced with ions with a relatively large ionic radius, such as K ions. This forms a strengthened layer to a predetermined depth from the principal surface 1a and rear surface of the glass member 1. By chemically strengthening the glass member 1 and forming a strengthened layer on the principal surface 1a and rear surface of the glass member 1, the strength of the glass member 1 can be improved and damage to the glass member 1 due to contact, etc. can be suppressed.

次いで、ガラス部材1の主面1aの端面近傍に印刷層20を形成する(印刷層の形成工程:ステップS15)。 Next, a printed layer 20 is formed near the end face of the main surface 1a of the glass member 1 (printed layer formation process: step S15).

印刷層20は、スプレー印刷、インクジェット印刷、スクリーン印刷等の印刷方法を用いて形成することができる。中でも、スクリーン印刷は、印刷層20の平均厚さを均一としつつ、印刷層20を所望の形状に形成し易いため、好ましく用いることができる。 The printed layer 20 can be formed using a printing method such as spray printing, inkjet printing, screen printing, etc. Among these, screen printing is preferably used because it is easy to form the printed layer 20 into the desired shape while making the average thickness of the printed layer 20 uniform.

これにより、主面1aに印刷層20を有するガラス部材1が得られる。 This results in a glass member 1 having a printed layer 20 on the main surface 1a.

なお、必要に応じて、ガラス部材1の主面1a及び/又は裏面にAR膜や遮光層を成膜(形成)して反射防止処理を施してもよい。 If necessary, an anti-reflection treatment may be performed by depositing (forming) an AR film or a light-shielding layer on the main surface 1a and/or the back surface of the glass member 1.

このように、ガラス部材1は、主面1aに凹部10を備え、凹部10を、断面視で、ガラス部材1の主面1aと開口端面111とのなす角度αが90°~130°となるように形成している。これにより、ガラス部材1は、凹部10と主面1aとの境界を明確にし、凹部10の輪郭を明瞭にすることができるので、凹部10を外部から認識し易くすることができる。よって、ガラス部材1は、視認性に優れた凹部10を有することができる。 In this way, the glass member 1 has a recess 10 on the principal surface 1a, and the recess 10 is formed so that the angle α between the principal surface 1a of the glass member 1 and the opening end surface 111 is 90° to 130° in a cross-sectional view. This allows the glass member 1 to clearly define the boundary between the recess 10 and the principal surface 1a and to clearly define the outline of the recess 10, making it easier to recognize the recess 10 from the outside. Therefore, the glass member 1 can have a recess 10 with excellent visibility.

また、ガラス部材1は、主面1aと開口端面111とのなす角度αを90°~130°とすることで、角度αは適度な傾きを有しており、凹部10を形成するための負担を軽減することができるため、凹部10の形成に要する費用を抑えることができる。 In addition, by setting the angle α between the main surface 1a and the opening end surface 111 of the glass member 1 to 90° to 130°, the angle α has a moderate inclination, which reduces the burden of forming the recess 10, and therefore reduces the cost required to form the recess 10.

さらに、ガラス部材1は、その輪郭形状の加工と同時に凹部10を形成することができるため、加工の工程を増やすことなく凹部10を形成することができる。そのため、ガラス部材1は、費用を低減しつつ製造することができる。 Furthermore, the recess 10 can be formed in the glass member 1 at the same time as the contour shape is processed, so the recess 10 can be formed without increasing the number of processing steps. Therefore, the glass member 1 can be manufactured at reduced cost.

ガラス部材1は、凹部10の断面視において、開口端面111よりも底面12側の側面、中間側面112が、底面12ガラス部材1の主面1aに対して90°~130°の角度βを有することができる。これにより、開口端面111から底面12側にかけて凹部10の側面11の傾きの変化を抑えることができ、凹部10と主面1aとの境界が不明確となるのを抑えられることができるため、凹部10の輪郭をより明瞭にすることができる。よって、ガラス部材1は、凹部10をより認識し易くすることができるので、凹部10の視認性をより向上させることができる。 In the cross-sectional view of the recess 10, the glass member 1 has an angle β of 90° to 130° between the side surface 112 closer to the bottom surface 12 than the opening end surface 111 and the intermediate side surface 112 relative to the bottom surface 12 and the main surface 1a of the glass member 1. This makes it possible to suppress the change in the inclination of the side surface 11 of the recess 10 from the opening end surface 111 to the bottom surface 12 side, and to suppress the boundary between the recess 10 and the main surface 1a from becoming unclear, thereby making the outline of the recess 10 clearer. Therefore, the glass member 1 makes the recess 10 easier to recognize, and thus can further improve the visibility of the recess 10.

ガラス部材1は、凹部10を、円環状の溝に形成することができる。これにより、凹部10は主面1aに容易に形成することができる。また、凹部10が円環状に形成されることで、全方位で略均等に同一形状で認識することができるため、凹部10の視認性を高めることができる。 In the glass member 1, the recess 10 can be formed as a circular groove. This allows the recess 10 to be easily formed on the main surface 1a. Furthermore, by forming the recess 10 in a circular shape, it can be recognized as having a substantially uniform shape in all directions, thereby improving the visibility of the recess 10.

ガラス部材1は、平面視における、凹部10の外形の真円度を外形寸法の5%以下とすることができる。これにより、凹部10の外形をより明確に把握することができるため、凹部10をより確認し易くすることができるため、凹部10の視認性をより高めることができる。 The glass member 1 can have the circularity of the outer shape of the recess 10 in a plan view be 5% or less of the outer dimensions. This allows the outer shape of the recess 10 to be more clearly grasped, making the recess 10 easier to see and thus improving the visibility of the recess 10.

ガラス部材1は、凹部10に、平面視において、直線形状を含むことができる。凹部10が直線形状を含むように形成されることで、凹部10は主面1aに容易に形成できる。また、凹部10の外形がより明確に把握し易くなるため、凹部10の視認性をより高めることができる。さらに、底面12の形状は崩れ難く、凹部10の形状を安定して維持できるため、凹部10の視認性の低下が抑えられる。 In the glass member 1, the recess 10 may include a linear shape in a plan view. By forming the recess 10 to include a linear shape, the recess 10 can be easily formed on the main surface 1a. In addition, the external shape of the recess 10 can be more clearly grasped, so the visibility of the recess 10 can be further improved. Furthermore, the shape of the bottom surface 12 is less likely to collapse, and the shape of the recess 10 can be stably maintained, so a decrease in the visibility of the recess 10 is suppressed.

ガラス部材1は、凹部10の底面12に曲面を有することができる。これにより、底面12は湾曲して形成することができるため、凹部10が側面11と底面12との間に角(カド)を有している場合等よりも、底面12の形状は崩れ難く、凹部10の形状を安定して維持することができる。よって、ガラス部材1は、凹部10の視認性が低下することを抑えることができる。 The glass member 1 can have a curved surface on the bottom surface 12 of the recess 10. This allows the bottom surface 12 to be formed in a curved shape, so the shape of the bottom surface 12 is less likely to collapse and the shape of the recess 10 can be stably maintained compared to when the recess 10 has a corner between the side surface 11 and the bottom surface 12. Therefore, the glass member 1 can prevent the visibility of the recess 10 from decreasing.

ガラス部材1は、凹部10の底面12の表面粗さRqを凹部10の側面11の表面粗さRqよりも小さくすることができる。これにより、底面12を外部から確認し易くすることができるので、凹部10がより認識し易くなり、凹部10の視認性をより高めることができる。 The glass member 1 can have a surface roughness Rq of the bottom surface 12 of the recess 10 smaller than the surface roughness Rq of the side surface 11 of the recess 10. This makes it easier to check the bottom surface 12 from the outside, making the recess 10 easier to recognize and further improving the visibility of the recess 10.

ガラス部材1は、凹部10の深さ/ガラス部材1の厚さを0.05~0.5とすることができる。これにより、凹部10はガラス部材1の厚さに対して所定の深さを有しつつ、ガラス部材1の強度低下を抑えることができる。そのため、ガラス部材1は、凹部10を外部から認識し易くすることができると共に、ガラス部材1の強度を維持することができる。 The glass member 1 can have a depth of the recess 10/thickness of the glass member 1 of 0.05 to 0.5. This allows the recess 10 to have a predetermined depth relative to the thickness of the glass member 1 while preventing a decrease in the strength of the glass member 1. Therefore, the glass member 1 can make the recess 10 easier to recognize from the outside while maintaining the strength of the glass member 1.

ガラス部材1は、平面視において、その外形形状が互いに平行又は直交する位置関係にある直線部分を有しないように形成することができる。これにより、ガラス部材1は、外形形状が位置基準として用い難い形状である場合でも、凹部10を目印として用いることで、ガラス部材1の位置を正確に把握することができるので、ガラス部材1の位置決めを高精度に行うことができる。 The glass member 1 can be formed so that its external shape does not have straight line portions that are parallel or perpendicular to each other in a plan view. As a result, even if the external shape of the glass member 1 is difficult to use as a positioning reference, the position of the glass member 1 can be accurately grasped by using the recess 10 as a marker, so that the positioning of the glass member 1 can be performed with high precision.

ガラス部材1は、平面視において、外形形状が直線部分を有しないように形成することもできる。これにより、ガラス部材1は、平面視において円形等のように、外形形状が位置基準としてより取り難い形状である場合でも、凹部10を目印として用いることで、ガラス部材1の位置を正確に把握することができるので、ガラス部材1の位置決めを高精度に行うことができる。 The glass member 1 can also be formed so that its outer shape does not have any straight lines in a plan view. As a result, even if the outer shape of the glass member 1 is difficult to use as a positioning reference, such as a circle in a plan view, the position of the glass member 1 can be accurately determined by using the recess 10 as a marker, so that the positioning of the glass member 1 can be performed with high precision.

ガラス部材1は、平面視において、凹部10と相違する位置に印刷層20を備えることができる。ガラス部材1は、凹部10を、印刷層20の形成を行う際等の位置決め用のアライメントマークとして機能させることができるので、主面1aに形成される印刷層20等の位置精度を高めることができる。 The glass member 1 can have a printed layer 20 at a position different from the recess 10 in a plan view. The glass member 1 can have the recess 10 function as an alignment mark for positioning when forming the printed layer 20, etc., and therefore can improve the positional accuracy of the printed layer 20 formed on the main surface 1a.

このように、ガラス部材1は、視認性に優れた凹部10を備えることで、ガラス部材1が異形状ガラスで形成されている場合でもガラス部材1の位置決めを容易かつ正確に行うことができる。そのため、ガラス部材1は、カバーガラス、撮像装置の保護ガラス等のように、平面視において直線部分が有し難く、表面に曲面を含みやすいガラス物品に好適に用いることができる。 In this way, the glass member 1 has a highly visible recess 10, so that the glass member 1 can be positioned easily and accurately even if the glass member 1 is made of irregularly shaped glass. Therefore, the glass member 1 can be suitably used for glass articles that are unlikely to have straight lines in a plan view and tend to include curved surfaces on the surface, such as cover glass and protective glass for imaging devices.

なお、本実施形態においては、ガラス部材1は、端面に位置合わせ部や、外周の一部を切り欠いたオリフラ部等を有していてもよい。 In this embodiment, the glass member 1 may have an alignment portion on the end face, an orientation flat portion formed by cutting out a portion of the outer periphery, etc.

以下、例を示して実施形態を更に具体的に説明するが、実施形態はこれらの例により限定されるものではない。例1-1~例1-4、例2-1~例2-12、例3-1及び例3-2は実施例であり、例1-5は比較例である。 The following examples are provided to further explain the embodiments, but the embodiments are not limited to these examples. Examples 1-1 to 1-4, 2-1 to 2-12, 3-1, and 3-2 are working examples, and Example 1-5 is a comparative example.

<例1-1>
[ガラス部材の作製]
ガラス部材として、外形寸法100mm×100mm、厚さ400μmのソーダライムガラス(AS2ガラス、AGC社製)を準備して、その表面にレーザを円環状に照射して改質領域を形成した。その後、ガラス部材をエッチング液に浸漬して、ガラス部材の表面をエッチング処理することで、ガラス部材の表面に円環状の凹部を形成した。
<Example 1-1>
[Preparation of Glass Member]
As a glass member, a soda lime glass (AS2 glass, manufactured by AGC) with outer dimensions of 100 mm×100 mm and thickness of 400 μm was prepared, and a laser was irradiated onto the surface of the glass member in an annular shape to form a modified region. After that, the glass member was immersed in an etching solution to etch the surface of the glass member, thereby forming an annular recess on the surface of the glass member.

[凹部の評価]
ガラス部材の凹部を含む表面をSEMで観察した。ガラス部材の凹部を含む表面を図7に示す。その後、凹部が形成されたガラス部材を樹脂に包埋した。そして、ガラス部材の側面を研磨して凹部の断面を露出させ、凹部の断面をSEMで観察した。ガラス部材の凹部を含む断面を図8に示し、図8の部分拡大図を図9に示す。図7~図9に示すように、凹部は、円環状の溝に形成され、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部の視認性が高いことが確認された。また、凹部の底面は曲面を有しているのが確認された。凹部の視認性の結果を表1に示す。なお、表1では、凹部の視認性は、以下の評価基準に基づいて示す。
(評価基準)
○:凹部とガラス部材の表面との輪郭が明瞭に認識でき、凹部の視認性が高い。
×:凹部とガラス部材の表面との輪郭が不明瞭であり、凹部の視認性が低い。
[Evaluation of recesses]
The surface of the glass member including the recess was observed by SEM. The surface of the glass member including the recess is shown in FIG. 7. The glass member with the recess formed thereon was then embedded in resin. The side surface of the glass member was then polished to expose the cross section of the recess, and the cross section of the recess was observed by SEM. The cross section of the glass member including the recess is shown in FIG. 8, and a partial enlarged view of FIG. 8 is shown in FIG. 9. As shown in FIGS. 7 to 9, the recess was formed as a circular groove, and the contour of the recess and the surface of the glass member could be clearly recognized, and it was confirmed that the visibility of the recess was high. It was also confirmed that the bottom surface of the recess had a curved surface. The results of the visibility of the recess are shown in Table 1. In Table 1, the visibility of the recess is shown based on the following evaluation criteria.
(Evaluation Criteria)
◯: The outline of the recess and the surface of the glass member can be clearly recognized, and the recess is highly visible.
×: The outline between the recess and the surface of the glass member is unclear, and the visibility of the recess is low.

図9に示す凹部の断面図から、凹部の開口径及び深さを測定し、開口端面の角度と、中間側面の角度と、底面の曲率半径と、凹部の深さ/ガラス厚さとを算出した。なお、開口端面の角度と中間側面の角度凹部との、左側は凹部の断面におけるガラス部材の内側の側面であり、右側は凹部の断面におけるガラス部材の外側の側面である。凹部の、開口径、深さ、開口端面の角度、中間側面の角度及び底面の曲率半径と、凹部の深さ/ガラス厚さとの測定結果を表1に示す。 The opening diameter and depth of the recess were measured from the cross-sectional view of the recess shown in Figure 9, and the angle of the opening end face, the angle of the middle side face, the radius of curvature of the bottom face, and the depth of the recess/glass thickness were calculated. Note that the left side of the opening end face angle and the middle side face angle recess is the inner side face of the glass member in the cross-section of the recess, and the right side is the outer side face of the glass member in the cross-section of the recess. The measurement results of the opening diameter, depth, opening end face angle, middle side face angle, and radius of curvature of the bottom face, and the depth of the recess/glass thickness of the recess are shown in Table 1.

なお、開口端面の角度は、凹部の深さを100%とし、凹部の深さに対して主面から垂直方向に5%の深さにおける凹部の側面の位置(5%深さ凹部位置)からガラス部材の表面側に凹部の形状に沿って引いた直線とガラス部材の表面とがなす角度である。中間側面の角度は、5%深さ凹部位置と、凹部の深さに対して主面から垂直方向に50%の深さの凹部の側面の位置(50%深さ凹部位置)とを結ぶ直線とガラス部材の表面とのなす角度をいう。 The angle of the opening end face is the angle between the surface of the glass member and a straight line drawn from the position of the side of the recess at a depth of 5% from the main surface in a vertical direction relative to the depth of the recess (5% depth recess position) to the surface side of the glass member along the shape of the recess, assuming the depth of the recess to be 100%. The angle of the intermediate side face is the angle between the surface of the glass member and a straight line connecting the 5% depth recess position and the position of the side of the recess at a depth of 50% from the main surface in a vertical direction relative to the depth of the recess (50% depth recess position).

また、凹部の表面粗さRqをレーザ顕微鏡(形状測定レーザーマイクロスコープVK-100、キーエンス社製)を用いて測定した。凹部の開口の中心に位置する底部とその周辺の湾曲した面の領域を底面とした。凹部の断面におけるガラス部材の内側の側面を左側側面とし、凹部の断面におけるガラス部材の外側の側面を右側側面とした。凹部の、底面、左側側面及び右側側面の表面粗さRqの測定結果を表1に示す。 The surface roughness Rq of the recess was measured using a laser microscope (shape measuring laser microscope VK-100, manufactured by Keyence Corporation). The bottom located at the center of the opening of the recess and the curved surface area around it were defined as the bottom surface. The inner side surface of the glass member in the cross section of the recess was defined as the left side surface, and the outer side surface of the glass member in the cross section of the recess was defined as the right side surface. The measurement results of the surface roughness Rq of the bottom surface, left side surface, and right side surface of the recess are shown in Table 1.

<例1-2>
例1-1において、開口径が110μm、深さが69μmとなるように凹部を形成したこと以外は、例1-1と同様にして行った。凹部は、例1-1と同様、円環状の溝に形成され、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部の視認性が高いことが確認された。また、凹部の底面は曲面を有しているのが確認された。ガラス部材に形成した凹部の、開口径、深さ、開口端面の角度、中間側面の角度及び底面の曲率半径と、凹部の深さ/ガラス厚さとを測定した結果と、視認性の評価結果とを表1に示す。
<Example 1-2>
In Example 1-1, the procedure was the same as in Example 1-1, except that the recess was formed so that the opening diameter was 110 μm and the depth was 69 μm. The recess was formed as a circular groove as in Example 1-1, and the outline of the recess and the surface of the glass member could be clearly recognized, and it was confirmed that the visibility of the recess was high. It was also confirmed that the bottom surface of the recess had a curved surface. Table 1 shows the results of measuring the opening diameter, depth, angle of the opening end face, angle of the middle side face, and radius of curvature of the bottom surface, as well as the depth of the recess/glass thickness of the recess formed in the glass member, and the evaluation results of visibility.

<例1-3>
例1-1において、開口径が112μm、深さが93μmとなるように凹部を形成したこと以外は、例1-1と同様にして行った。ガラス部材の凹部を含む表面を図10に示し、ガラス部材の凹部を含む断面を図11に示し、図11の部分拡大図を図12に示す。図10~図12に示すように、凹部は、例1-1と同様、円環状の溝に形成され、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部の視認性が高いことが確認された。また、凹部の底面は曲面を有していることが確認された。ガラス部材に形成した凹部の、開口径、深さ、開口端面の角度、中間側面の角度及び底面の曲率半径と、凹部の深さ/ガラス厚さと、表面粗さRqとを測定した結果と、視認性の評価結果とを表1に示す。
<Example 1-3>
In Example 1-1, the procedure was the same as in Example 1-1, except that the recess was formed so that the opening diameter was 112 μm and the depth was 93 μm. FIG. 10 shows the surface including the recess of the glass member, FIG. 11 shows a cross section including the recess of the glass member, and FIG. 12 shows a partially enlarged view of FIG. 11. As shown in FIG. 10 to FIG. 12, the recess was formed in a circular groove like in Example 1-1, and the outline of the recess and the surface of the glass member could be clearly recognized, and it was confirmed that the visibility of the recess was high. It was also confirmed that the bottom surface of the recess had a curved surface. Table 1 shows the results of measuring the opening diameter, depth, angle of the opening end face, angle of the middle side face, and radius of curvature of the bottom surface, depth of the recess/glass thickness, and surface roughness Rq of the recess formed in the glass member, as well as the evaluation results of visibility.

<例1-4>
例1-1において、開口径が112μm、深さが94μmとなるように凹部を形成したこと以外は、例1-1と同様にして行った。凹部は、例1-1と同様、円環状の溝に形成され、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部の視認性が高いことが確認された。また、凹部の底面は曲面を有していることが確認された。ガラス部材に形成した凹部の、開口径、深さ、開口端面の角度、中間側面の角度及び底面の曲率半径と、凹部の深さ/ガラス厚さとを測定した結果と、視認性の評価結果とを表1に示す。
<Example 1-4>
In Example 1-1, the procedure was the same as in Example 1-1, except that the recess was formed so that the opening diameter was 112 μm and the depth was 94 μm. The recess was formed as a circular groove as in Example 1-1, and the outline of the recess and the surface of the glass member was clearly recognizable, confirming that the visibility of the recess was high. It was also confirmed that the bottom surface of the recess had a curved surface. Table 1 shows the results of measuring the opening diameter, depth, angle of the opening end face, angle of the middle side face, and radius of curvature of the bottom surface, as well as the depth of the recess/glass thickness of the recess formed in the glass member, and the evaluation results of visibility.

<例1-5>
ガラス部材として、外形寸法100mm×100mm、厚さ1.0mmホウケイ酸ガラス(FP-1ガラス、AGCテクノグラス社製)の表面にレジストを形成してマスキングした後、ドライエッチングして、ガラス部材に矩形状の凹部(6mm×5mm、深さ400μm)を形成した。ガラス部材の凹部を含む表面を図13に、ガラス部材の凹部を含む断面を図14に示す。図13及び図14に示すように、凹部は、ガラス部材の主面から凹部の底面にかけて緩やかな側面を形成し、凹部とガラス部材の表面との輪郭は不明瞭であり、凹部の視認性が低いことが確認された。ガラス部材に形成した凹部の、深さ、開口端面の角度及び中間側面の角度と、凹部の深さ/ガラス厚さとを測定した結果と、視認性の評価結果とを表1に示す。
<Example 1-5>
A resist was formed on the surface of a borosilicate glass (FP-1 glass, manufactured by AGC Technoglass) having an outer dimension of 100 mm×100 mm and a thickness of 1.0 mm as a glass member, and the surface was masked with a dry etching to form a rectangular recess (6 mm×5 mm, depth 400 μm) in the glass member. FIG. 13 shows the surface of the glass member including the recess, and FIG. 14 shows a cross section of the glass member including the recess. As shown in FIG. 13 and FIG. 14, the recess forms a gentle side from the main surface of the glass member to the bottom surface of the recess, and the outline between the recess and the surface of the glass member is unclear, and it was confirmed that the visibility of the recess is low. Table 1 shows the results of measuring the depth, the angle of the opening end face, and the angle of the middle side face, and the depth of the recess/glass thickness of the recess formed in the glass member, as well as the evaluation results of the visibility.

Figure 0007679688000001
Figure 0007679688000001

表1に示すように、例1-1~例1-4は、凹部を明瞭に確認することができたが、例1-5では、凹部が不明瞭であった。よって、例1-1~1-4は、例1-5と異なり、開口端面の角度を124°以下とすることで、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部は優れた視認性を有することができるので、凹部は位置決めのマークとして有効に用いることができるといえる。 As shown in Table 1, in Examples 1-1 to 1-4, the recesses were clearly visible, but in Example 1-5, the recesses were unclear. Therefore, unlike Example 1-5, in Examples 1-1 to 1-4, the angle of the opening end face is set to 124° or less, which allows the outline of the recesses and the surface of the glass member to be clearly recognized, and the recesses have excellent visibility, so it can be said that the recesses can be effectively used as positioning marks.

<例2-1~例2-12>
例1-1と同様にしてガラス部材を作製した。なお、例2-1~例2-12のガラス部材は、開口端面の角度(左側、右側の平均)が104°~125°の範囲内、中間側面の角度(左側、右側の平均)が102°~115°の範囲内であった。作製したガラス部材を、CNC画像測定システム(NEXIV、株式会社ニコンインステック社製)を用いて、凹部の外形寸法及び凹部外形の真円度を測定し、外形寸法に対する真円度の割合を算出した。ガラス部材に形成した凹部の外形寸法、凹部外形の真円度及び外形寸法に対する真円度の割合を算出した結果とを表2に示す。
<Example 2-1 to Example 2-12>
Glass members were prepared in the same manner as in Example 1-1. The glass members of Examples 2-1 to 2-12 had an opening end face angle (average of the left and right sides) in the range of 104° to 125°, and an intermediate side face angle (average of the left and right sides) in the range of 102° to 115°. The outer dimensions and roundness of the recessed portion of the prepared glass members were measured using a CNC image measuring system (NEXIV, manufactured by Nikon Instech Co., Ltd.), and the ratio of the roundness to the outer dimensions was calculated. The outer dimensions of the recessed portion formed in the glass member, the roundness of the recessed portion, and the calculation results of the ratio of the roundness to the outer dimensions are shown in Table 2.

また、凹部の表面及び断面を例1-1と同様にして観察した結果、凹部は、例1-1と同様、円環状の溝に形成され、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部の視認性が高いことが確認された。また、凹部の底面は曲面を有しているのが確認された。視認性の評価結果を表2に示す。 Furthermore, when the surface and cross section of the recess were observed in the same manner as in Example 1-1, it was confirmed that the recess was formed as a circular groove, as in Example 1-1, and the outline between the recess and the surface of the glass member was clearly recognizable, confirming that the visibility of the recess was high. It was also confirmed that the bottom surface of the recess was curved. The visibility evaluation results are shown in Table 2.

Figure 0007679688000002
Figure 0007679688000002

表2に示すように、例2-1~2-12は、いずれも、凹部を明瞭に確認することができた。よって、例2-1~2-12は、外形寸法に対する真円度の割合を約0.40以下とすることで、凹部とガラス部材の表面との輪郭を明瞭に認識でき、凹部は優れた視認性を有することができるので、位置決めのマークとして有効に用いることができるといえる。 As shown in Table 2, the recesses could be clearly confirmed in all of Examples 2-1 to 2-12. Therefore, by setting the ratio of circularity to the outer dimensions to approximately 0.40 or less in Examples 2-1 to 2-12, the outline between the recesses and the surface of the glass member could be clearly recognized, and the recesses had excellent visibility, so they can be effectively used as positioning marks.

<例3-1及び例3-2>
例1-1と同様にしてガラス部材を作製した。例3-1のガラス部材の凹部を含む表面を図15に、例3-2のガラス部材の凹部を含む表面を図16に示す。図15に示すように、例3-1のガラス部材は、円環状の溝と直線からなる記号が形成されていることが確認された。また、図16に示すように、例3-2のガラス部材は、円形状の窪みを複数配置したマトリックス型の2次元コードが形成されていることが確認された。
<Example 3-1 and Example 3-2>
Glass members were produced in the same manner as in Example 1-1. The surface including the recess of the glass member of Example 3-1 is shown in FIG. 15, and the surface including the recess of the glass member of Example 3-2 is shown in FIG. 16. As shown in FIG. 15, it was confirmed that a symbol consisting of annular grooves and straight lines was formed in the glass member of Example 3-1. Also, as shown in FIG. 16, it was confirmed that a matrix-type two-dimensional code in which a plurality of circular depressions were arranged was formed in the glass member of Example 3-2.

よって、例3-1及び例3-2は、凹部とガラス部材の主面との輪郭を明瞭に認識でき、凹部は優れた視認性を有することができるので、識別記号として有効に用いることができるといえる。 Therefore, in Examples 3-1 and 3-2, the outline between the recess and the main surface of the glass member is clearly recognizable, and the recess has excellent visibility, so it can be said that they can be effectively used as identification symbols.

以上の通り、実施形態を説明したが、上記実施形態は、例として提示したものであり、上記実施形態により本発明が限定されるものではない。上記実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の組み合わせ、省略、置き換え、変更等を行うことが可能である。これら実施形態やその変形は、発明の範囲や要旨に含まれると共に、特許請求の範囲に記載された発明とその均等の範囲に含まれる。 Although the embodiments have been described above, they are presented as examples, and the present invention is not limited to the above embodiments. The above embodiments can be implemented in various other forms, and various combinations, omissions, substitutions, modifications, etc. can be made without departing from the gist of the invention. These embodiments and their variations are included in the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims.

1 ガラス部材
1a 主面(表面)
10 凹部
11 側面
111 開口端面
112 中間側面
12 底面
20 印刷層
1 Glass member 1a Main surface (front surface)
REFERENCE SIGNS LIST 10 Recess 11 Side surface 111 Open end surface 112 Middle side surface 12 Bottom surface 20 Printing layer

Claims (9)

凹部を備えるガラス部材であって、
断面視において、前記ガラス部材の主面と前記凹部の開口端面とのなす角度が、90°~130°であり、
断面視において、前記凹部の、前記開口端面よりも底面側の側面が、前記ガラス部材の主面に対して90°~130°の角度を有し、
前記凹部の底面の表面粗さRqが、前記凹部の側面の表面粗さRqよりも小さいガラス部材。
A glass member having a recess,
an angle between a main surface of the glass member and an opening end surface of the recess is 90° to 130° in a cross-sectional view;
In a cross-sectional view, a side surface of the recess that is closer to a bottom surface than the opening end surface has an angle of 90° to 130° with respect to a main surface of the glass member,
A glass member in which the surface roughness Rq of a bottom surface of the recess is smaller than the surface roughness Rq of a side surface of the recess .
前記凹部は、円環状の溝又は円形状の窪みである請求項1に記載のガラス部材。 The glass member according to claim 1 , wherein the recess is an annular groove or a circular depression. 平面視における、前記凹部の外形の真円度が、外形寸法の5%以下である請求項に記載のガラス部材。 3. The glass member according to claim 2 , wherein the circularity of the outer shape of the recess in a plan view is 5% or less of the outer dimension. 前記凹部は、平面視において、直線形状を含む請求項1~の何れか1項に記載のガラス部材。 The glass member according to claim 1 , wherein the recess includes a linear shape in a plan view. 前記凹部は、底面に曲面を有する請求項1~の何れか1項に記載のガラス部材。 The glass member according to any one of claims 1 to 4 , wherein the recess has a curved bottom surface. 前記凹部の深さの前記ガラス部材の厚さに対する比が、0.05~0.5である請求項1~の何れか1項に記載のガラス部材。 6. The glass member according to claim 1 , wherein the ratio of the depth of the recess to the thickness of the glass member is 0.05 to 0.5. 前記ガラス部材は、平面視において、外形形状が互いに平行又は直交する位置関係にある直線部分を有しない請求項1~の何れか1項に記載のガラス部材。 The glass member according to any one of claims 1 to 6 , wherein the outer shape of the glass member does not have straight line portions that are in a parallel or perpendicular positional relationship with each other in a plan view. 前記ガラス部材は、平面視において、外形形状が直線部分を有しない請求項のガラス部材。 The glass member according to claim 7 , wherein the outer shape of the glass member does not include any straight line portions in a plan view. 平面視において、前記凹部とは異なる位置に印刷層を備える請求項1~の何れか1項に記載のガラス部材。 The glass member according to claim 1 , further comprising a printed layer at a position different from the recess in plan view.
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JP2000312983A (en) 1999-04-27 2000-11-14 Yaskawa Electric Corp Laser marking method
JP2002154846A (en) 2000-11-17 2002-05-28 National Institute Of Advanced Industrial & Technology Glass substrate processing method
JP2011037694A (en) 2009-07-15 2011-02-24 Asahi Glass Co Ltd Method for producing cover glass for optical use and cover glass for optical use
JP2016210644A (en) 2015-05-01 2016-12-15 日本電気硝子株式会社 Plate glass, and method of forming information display portion on plate glass
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