JP7684255B2 - Anisotropic rare earth sintered magnet and its manufacturing method - Google Patents
Anisotropic rare earth sintered magnet and its manufacturing method Download PDFInfo
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Description
本発明は、Nd2Fe14B型結晶の化合物を主相とし、かつCeを含有する異方性希土類焼結磁石及びその製造方法に関する。 The present invention relates to an anisotropic rare earth sintered magnet having a main phase of a Nd 2 Fe 14 B type crystal compound and containing Ce, and to a method for producing the same.
Nd-Fe-B焼結磁石は、自動車の電動化や 産業用モータの高性能化・省電力化などを背景に、今後さらに需要が高まり、生産量が増加すると予想されている。しかし原料として用いられるNd、Pr、DyやTbなどの希土類元素は高価であり、また将来的な供給安定性へのリスクも有する。このためNdの一部を、地殻中の元素含有率がより高く、安価であるCeなどで置き換える研究が行われている。 Demand for Nd-Fe-B sintered magnets is expected to grow further in the future, driven by the electrification of automobiles and the trend toward higher performance and energy saving in industrial motors. However, the rare earth elements used as raw materials, such as Nd, Pr, Dy and Tb, are expensive and pose a risk to future supply stability. For this reason, research is being conducted to replace some of the Nd with Ce, which is an inexpensive element with a higher concentration in the earth's crust.
例えば特許文献1では、主相及び粒界相を備え、全体組成が(R2 (1-x)R1 x)yFe(100-y-w-z-v)CowBzM1 v・(R3 (1-p)M2 p)q(ただし、R1はCe、La、Y、及びScから選ばれる元素、R2及びR3はNd、Pr、Gd、Tb、Dy、及びHoから選ばれる元素、M1は所定の元素等、M2はR3と合金化する遷移金属元素等)で表され、主相がR2Fe14B型の結晶構造を有し、主相の平均粒径が1~20μmであり、主相がコア部及びシェル部を有し、シェル部の厚さが25~150nmであり、かつ、コア部の軽希土類元素比をa、シェル部の軽希土類元素比をbとしたとき、0≦b≦0.30及び0≦b/a≦0.50を満足する、保磁力と残留磁化の両方に優れる希土類磁石及びその製造方法が示されている。 For example, in Patent Document 1, a steel sheet is disclosed that includes a main phase and a grain boundary phase, and has an overall composition represented by (R 2 (1-x) R 1 x ) y Fe (100-y-w-z-v) Co w B z M 1 v . (R 3 (1-p) M 2 p ) q (wherein R 1 is an element selected from Ce, La, Y, and Sc, R 2 and R 3 are elements selected from Nd, Pr, Gd, Tb, Dy, and Ho, M 1 is a predetermined element, etc., and M 2 is a transition metal element that is alloyed with R 3 , etc.), and the main phase is R 2 Fe 14 The present invention discloses a rare earth magnet having excellent coercivity and residual magnetization, the magnet having a B-type crystal structure, an average grain size of the main phase of 1 to 20 μm, the main phase having a core and a shell, the thickness of the shell being 25 to 150 nm, and satisfying 0≦b≦0.30 and 0≦b/a≦0.50, where a is the light rare earth element ratio in the core and b is the light rare earth element ratio in the shell. The magnet also has a manufacturing method therefor.
また特許文献2では、R、T及びBを含む主相粒子と、粒界相とを備え、RはNd及びCeを含み、TはFeを含み、粒界相はR‐T相及びRリッチ相を含み、R‐T相はR及びTの金属間化合物を含有し、Rリッチ相におけるRの含有量はR‐T相におけるRの含有量よりも大きく、R‐T相におけるCe/R×100=65~100、Rリッチ相におけるRの含有量が70~100原子%である希土類磁石が示されている。 Patent Document 2 also discloses a rare earth magnet that has main phase particles containing R, T and B, and a grain boundary phase, where R contains Nd and Ce, T contains Fe, the grain boundary phase includes an R-T phase and an R-rich phase, the R-T phase contains intermetallic compounds of R and T, the R content in the R-rich phase is greater than the R content in the R-T phase, Ce/R x 100 = 65-100 in the R-T phase, and the R content in the R-rich phase is 70-100 atomic %.
特許文献3では、全体組成が、式(Nd(1-x-y)CexR1 y)p(Fe(1-z)Coz)(100-p-q-r-s)BqGarMs(ただし、R1は、Nd及びCe以外の希土類元素及びYから選ばれる1種以上、Mは、Al、Cu、Au、Ag、Zn、In、Mn、Zr、及びTiから選ばれる1種以上並びに不可避的不純物元素であり、かつ、12≦p≦20、4.0≦q≦6.5、0≦r≦1.0、0≦s≦0.5、0<x≦0.35、0≦y≦0.10、及び0.050≦z0.140)で表され、かつ、磁性相、及び前記磁性相の周囲に存在する粒界相を備える、希土類磁石及びその製造方法が示されている。 In Patent Document 3, the overall composition is represented by the formula (Nd (1-xy) CexR1y ) p (Fe (1-z) Coz ) (100-pq-rs) BqGarMs ( where R The rare earth magnet has a magnetic phase and a grain boundary phase surrounding the magnetic phase, and a method for manufacturing the same is disclosed. In the rare earth magnet, p< 0.1 is one or more elements selected from rare earth elements other than Nd and Ce and Y, M is one or more elements selected from Al, Cu, Au, Ag, Zn, In, Mn, Zr, and Ti, and unavoidable impurity elements, and is represented by the formula: 12≦p≦20, 4.0≦q≦6.5, 0≦r≦1.0, 0≦s≦0.5, 0<x≦0.35, 0≦y≦0.10, and 0.050≦z0.140.
特許文献4では、希土類元素R、遷移金属元素T、及びホウ素Bを含有する複数の主相粒子と、複数の主相粒子の間に位置する粒界相とを備え、RがNd及びCeを含み、TがFeを含み、永久磁石におけるRの含有量の合計が[R]原子%であり、永久磁石におけるTの含有量の合計が[T]原子%であり、永久磁石におけるBの含有量が[B]原子%であり、永久磁石におけるCeの含有量が[Ce]原子%であり、[Ce]/[R]が0.1~0.6であり、[T]/[B]が14~18であり、粒界相が、R及びTの金属間化合物を含有するR‐T相を含み、永久磁石の単位断面の面積がA0 であり、単位断面におけるR‐T相の面積の合計がAL であり、AL /A0 が0.05~0.5である、抗折強度が高い永久磁石が示されている。 Patent Document 4 discloses a permanent magnet having high flexural strength, which comprises a plurality of main phase particles containing a rare earth element R, a transition metal element T, and boron B, and a grain boundary phase located between the plurality of main phase particles, where R contains Nd and Ce, T contains Fe, the total content of R in the permanent magnet is [R] atomic %, the total content of T in the permanent magnet is [T] atomic %, the content of B in the permanent magnet is [B] atomic %, the content of Ce in the permanent magnet is [Ce] atomic %, [Ce]/[R] is 0.1-0.6, [T]/[B] is 14-18, the grain boundary phase includes an R-T phase containing an intermetallic compound of R and T, the area of a unit cross section of the permanent magnet is A0, the total area of the R-T phase in the unit cross section is AL, and AL/A0 is 0.05-0.5.
特許文献5では、(CexNd(1-x))yFe(100-y-w-z-v)CowBzMv(式中、MはGa、Al、Cu、Au、Ag、Zn、In、Mnの少なくとも1種であり、0≦x≦0.75、5≦y≦20、4≦z≦6.5、0≦w≦8、0≦v≦2)の全体組成を有する結晶粒であって、コア部1とその周囲のシェル部2とから構成され、コア部1よりもシェル部2においてNd濃度が高い結晶粒を備えている希土類磁石が示されている。 Patent Document 5 discloses a rare earth magnet comprising crystal grains having an overall composition of (Ce x Nd (1-x) ) y Fe (100-y-w-z-v) Co w B z M v (wherein M is at least one of Ga, Al, Cu, Au, Ag, Zn, In, and Mn, and 0≦x≦0.75, 5≦y≦20, 4≦z≦6.5, 0≦w≦8, 0≦v≦2), which is composed of a core portion 1 and a surrounding shell portion 2, with the shell portion 2 having a higher Nd concentration than the core portion 1.
特許文献6では、Rとして、R1とCeを必須とするR-T-B系磁石において、原料となるR-T-B系磁石に長時間熱処理を施すことにより、主相粒子をコアシェル化し、コア部におけるR1とCeの質量濃度をそれぞれαNd、αCe、前記シェル部におけるR1とCeの質量濃度をそれぞれβR1、βCe、としたときに、前記シェル部におけるR1とCeの質量濃度比率(βR1/βCe=B)と、前記コア部におけるR1とCeの質量濃度比率(αR1/αCe=A)の比(B/A)が1.1以上とすることで、Ce添加によりめっきとの密着強度を向上させつつ、保磁力低下を抑制するR-T-B系焼結磁石が示されている。 Patent Document 6 discloses an R-T-B magnet in which R1 and Ce are essential as R, and the raw material R-T-B magnet is subjected to a long-term heat treatment to turn the main phase particles into a core-shell. When the mass concentrations of R1 and Ce in the core portion are αNd and αCe, respectively, and the mass concentrations of R1 and Ce in the shell portion are βR1 and βCe, respectively, the ratio (B/A) of the mass concentration ratio of R1 and Ce in the shell portion (βR1/βCe=B) to the mass concentration ratio of R1 and Ce in the core portion (αR1/αCe=A) is set to 1.1 or more, thereby improving the adhesion strength with the plating by adding Ce, while suppressing a decrease in coercivity.
上述したように、Ceを含有するR-T-B系磁石において、コアシェル構造を有する主相粒を備えたり、あるいはR-T金属間化合物を粒界相としたりすることで、良好な特性が得られることが提示されている。しかし主相であるR2Fe14B化合物の室温における磁気特性は、R=Ndのときに飽和磁化Ms1.60T、異方性磁界μ0HA6.7Tであるのに対して、R=CeではMs1.17T、μ0HA3.0Tと低いため、Ce含有量が多いと磁石特性が低下する課題を解決するのは難しい。 As mentioned above, it has been proposed that good properties can be obtained in R-T-B magnets containing Ce by providing main phase grains with a core-shell structure or by using an R-T intermetallic compound as the grain boundary phase. However, the magnetic properties of the main phase R 2 Fe 14 B compound at room temperature are low, with a saturation magnetization M s of 1.60 T and an anisotropic magnetic field μ 0 H A of 6.7 T when R=Nd, but M s of 1.17 T and μ 0 H A of 3.0 T when R=Ce, making it difficult to solve the problem of reduced magnetic properties when the Ce content is high.
本発明は、上記課題を鑑みてなされたものであり、Nd2Fe14B型結晶の化合物を主相とし、かつCeを含有する異方性希土類焼結磁石において、良好な磁気特性を示す異方性希土類焼結磁石およびその製造方法を提供することを目的とする。 The present invention has been made in consideration of the above problems, and aims to provide an anisotropic rare earth sintered magnet that has a Nd2Fe14B type crystal compound as a main phase and contains Ce, and that exhibits good magnetic properties, and a method for producing the same.
本発明者らは、上記目的を達成するために検討を重ねた結果、Nd2Fe14B型結晶の化合物を主相とし、かつCeを含有する異方性希土類焼結磁石において、粒の中心部におけるCe/R’比(R’は希土類元素から選ばれ、かつNdを必須とする1種以上の元素)が粒の外殻部におけるCe/R’比より低い主相粒が存在するとともに、粒界部にCeを含むR’リッチ相及びCeを含むR’(Fe,Co)2相が存在するときに良好な磁気特性が得られることを見出し、本発明を完成した。 As a result of extensive investigations to achieve the above-mentioned object, the inventors have discovered that in an anisotropic rare earth sintered magnet containing Ce and having a main phase of an Nd 2 Fe 14 B type crystal compound, there are main phase grains in which the Ce/R' ratio (R' is one or more elements selected from rare earth elements, with Nd being an essential element) in the center of the grain is lower than the Ce/R' ratio in the outer shell of the grain, and an R'-rich phase containing Ce and an R'(Fe, Co) 2 phase containing Ce are present in the grain boundary portions, and thus good magnetic properties can be obtained, thereby completing the present invention.
従って、本発明は下記の異方性希土類焼結磁石及びその製造方法を提供する。
(1)組成が式Rx(Fe1-aCoa)100-x-y-zByMz(Rは希土類元素から選ばれ、かつNd及びCeを必須とする2種以上の元素、MはAl、Si、Ti、V、Cr、Mn、Ni、Cu、Zn、Ga、Ge、Zr、Nb、Mo、Ag、In、Sn、Hf、Ta、W、Pb、Biからなる群より選ばれる1種以上の元素であり、x、y、z、aは各々、12≦x≦17原子%、3.5≦y≦6.0原子%、0≦z≦3原子%、0≦a≦0.1)で表される異方性希土類焼結磁石であって、主相がNd2Fe14B型結晶の化合物からなり、粒の中心部におけるCe/R’比(R’は希土類元素から選ばれ、かつNdを必須とする1種以上の元素)が粒の外殻部におけるCe/R’比より低い主相粒が存在するとともに、粒界部にCeを含むR’リッチ相及びCeを含むR’(Fe,Co)2相が存在することを特徴とする異方性希土類焼結磁石。
(2)前記主相と前記R’(Fe,Co)2相の間に、20原子%以上のRを含み、かつ厚さが20nm以下の境界相が形成されていることを特徴とする(1)に記載の異方性希土類焼結磁石。
(3)前記主相粒において、中心部のR’にCeが含まれない主相粒が存在することを特徴とする(1)または(2)に記載の異方性希土類焼結磁石。
(4)前記主相粒において、中心部のR’がNd、またはNd及びPrからなる主相粒が存在することを特徴とする(1)~3のいずれかに記載の異方性希土類焼結磁石。
(5)前記R’(Fe,Co)2相が、室温以上でフェロ磁性又はフェリ磁性を示す相であることを特徴とする(1)~(4)のいずれかに記載の異方性希土類焼結磁石。
(6)前記R’(Fe,Co)2相におけるCe/R’比が主相粒外殻部のCe/R’比より高いことを特徴とする(1)~(5)のいずれかに記載の異方性希土類焼結磁石。
(7)前記R’リッチ相におけるCe/R’比が主相粒外殻部のCe/R’比より高いことを特徴とする(1)~(6)のいずれかに記載の異方性希土類焼結磁石。
(8)前記R’リッチ相及びR’(Fe,Co)2相を、合計で1体積%以上含むことを特徴とする(1)~(7)のいずれかに記載の異方性希土類焼結磁石。
(9)前記焼結体の組成におけるCe/R’比が0.01以上0.3以下であることを特徴とする(1)~(8)のいずれかに記載の異方性希土類焼結磁石。
(10)前記焼結磁石に含まれるBリッチ相が5体積%以下であることを特徴とする(1)~(9)のいずれかに記載の異方性希土類焼結磁石。
(11)隣接する主相粒の間に二粒子間粒界相が形成されていることを特徴とする(1)~(10)のいずれかに記載の異方性希土類焼結磁石。
(12)前記主相と前記R’(Fe,Co)2相の間に形成された前記の境界相におけるCe/R’が、前記の隣接する主相粒の間に形成された二粒子間粒界相におけるCe/R’よりも高いことを特徴とする(11)に記載の異方性希土類焼結磁石。
(13)室温の保磁力HcJ(room)が10kOe以上であり、保磁力の温度係数βの値が、β≧(0.01×HcJ(室温)-0.720)%/Kで示されることを特徴とする(1)~(12)のいずれかに記載の異方性希土類焼結磁石。
(14)Nd2Fe14B型結晶の化合物相を含む合金と、それよりR’組成比及びCe/R’比が高い合金を粉砕、混合し、磁場印加中で圧粉成形して成形体とした後、800℃以上1200℃以下の温度で焼結することを特徴とする(1)~(13)に記載の異方性希土類焼結磁石の製造方法。
(15)Nd2Fe14B型結晶の化合物相を含む合金を粉砕し、磁場印加中で圧粉成形して成形体とした後、800℃以上1200℃以下の温度で焼結し、その焼結体にCeを含む材料を接触させて、600℃以上焼結温度以下の温度で熱処理を施すことによりCeを焼結体内部に拡散させることを特徴とする(1)~(14)に記載の異方性希土類焼結磁石の製造方法。
(16)焼結体に接触させるCeを含む材料が、Ce金属、Ce含有合金、Ceを含む化合物から選ばれる1種以上であり、またその形態が、粉末、薄膜、薄帯、箔、及び気体から選ばれる1種以上であることを特徴とする(15)に記載の異方性希土類焼結磁石の製造方法。
(17)焼結体に300~800℃の温度で熱処理を施すことを特徴とする(14)~(16)のいずれかに記載の異方性希土類焼結磁石の製造方法。
(18)焼結体に600~1000℃の温度で熱処理を施した後、少なくとも550℃以下まで1℃/分以上50℃/分以下の冷却速度で冷却し、さらに300~800℃の温度で熱処理を施すことを特徴とする(14)~(17)のいずれかに記載の異方性希土類焼結磁石の製造方法。
Therefore, the present invention provides the following anisotropic rare earth sintered magnet and method for producing the same.
(1) An anisotropic rare earth sintered magnet having a composition represented by the formula R x (Fe 1-a Co a ) 100-x-y-z B y M z (R is two or more elements selected from rare earth elements, with Nd and Ce being essential, M is one or more elements selected from the group consisting of Al, Si, Ti, V, Cr, Mn, Ni, Cu, Zn, Ga, Ge, Zr, Nb, Mo, Ag, In, Sn, Hf, Ta, W, Pb, and Bi, and x, y, z, and a are 12≦x≦17 atomic %, 3.5≦y≦6.0 atomic %, 0≦z≦3 atomic %, and 0≦a≦0.1, respectively), and the main phase is Nd 2 Fe 14 An anisotropic rare earth sintered magnet is characterized in that it is made of a B-type crystal compound, has main phase grains in which the Ce/R' ratio (R' is one or more elements selected from rare earth elements, and Nd is an essential element) at the center of the grain is lower than the Ce/R' ratio at the outer periphery of the grain, and has an R'-rich phase containing Ce and an R'(Fe, Co) 2 phase containing Ce at grain boundaries.
(2) The anisotropic rare earth sintered magnet according to (1 ), characterized in that a boundary phase containing 20 atomic % or more of R and having a thickness of 20 nm or less is formed between the main phase and the R'(Fe, Co) two phases.
(3) The anisotropic rare earth sintered magnet according to (1) or (2), wherein the main phase grains include main phase grains in which R' at the center does not contain Ce.
(4) The anisotropic rare earth sintered magnet according to any one of (1) to (3), wherein the main phase grains include main phase grains in which R' at the center is Nd or Nd and Pr.
(5) The anisotropic rare earth sintered magnet according to any one of (1) to (4), wherein the R'(Fe, Co) 2 phase is a phase that exhibits ferromagnetism or ferrimagnetism at room temperature or higher.
(6) The anisotropic rare earth sintered magnet according to any one of (1) to (5), wherein the Ce/R' ratio in the R'(Fe, Co) 2 phase is higher than the Ce/R' ratio in the outer shell portion of the main phase grains.
(7) An anisotropic rare earth sintered magnet according to any one of (1) to (6), wherein the Ce/R' ratio in the R'-rich phase is higher than the Ce/R' ratio in the outer shell portion of the main phase grains.
(8) The anisotropic rare earth sintered magnet according to any one of (1) to (7), characterized in that the R'-rich phase and the R'(Fe, Co) 2 phase are contained in a total amount of 1 volume % or more.
(9) The anisotropic rare earth sintered magnet according to any one of (1) to (8), wherein the Ce/R′ ratio in the composition of the sintered body is 0.01 or more and 0.3 or less.
(10) The anisotropic rare earth sintered magnet according to any one of (1) to (9), wherein the B-rich phase contained in the sintered magnet is 5 volume % or less.
(11) An anisotropic rare earth sintered magnet according to any one of (1) to (10), characterized in that a grain boundary phase is formed between adjacent main phase grains.
(12) The anisotropic rare earth sintered magnet according to ( 11 ), wherein the Ce/R' in the boundary phase formed between the main phase and the R'(Fe, Co) two phases is higher than the Ce/R' in the grain boundary phase between two grains formed between adjacent main phase grains.
(13) An anisotropic rare earth sintered magnet as described in any one of (1) to (12), characterized in that the coercive force HcJ (room) at room temperature is 10 kOe or more, and the value of the temperature coefficient of coercive force β is expressed as β≧(0.01×HcJ (room temperature) −0.720)%/K.
(14) A method for producing an anisotropic rare earth sintered magnet according to any one of (1) to ( 13 ), characterized in that an alloy containing a Nd2Fe14B type crystal compound phase and an alloy having a higher R' composition ratio and Ce/R' ratio than that of the alloy are crushed and mixed, compacted into a green body by applying a magnetic field, and then sintered at a temperature of 800°C to 1200°C.
(15) A method for producing an anisotropic rare earth sintered magnet according to any one of (1) to (14), characterized in that an alloy containing a compound phase of Nd2Fe14B type crystal is pulverized, compacted in an applied magnetic field to form a green body, sintered at a temperature of 800°C to 1200°C, and the sintered body is brought into contact with a material containing Ce, and heat-treated at a temperature of 600°C to the sintering temperature to diffuse Ce into the sintered body.
(16) The method for producing an anisotropic rare earth sintered magnet according to (15), characterized in that the Ce-containing material brought into contact with the sintered body is one or more selected from the group consisting of Ce metal, a Ce-containing alloy, and a Ce-containing compound, and is in the form of one or more selected from the group consisting of a powder, a thin film, a thin ribbon, a foil, and a gas.
(17) A method for producing an anisotropic rare earth sintered magnet according to any one of (14) to (16), characterized in that the sintered body is subjected to a heat treatment at a temperature of 300 to 800° C.
(18) A method for producing an anisotropic rare earth sintered magnet according to any one of (14) to (17), characterized in that the sintered body is subjected to a heat treatment at a temperature of 600 to 1000°C, then cooled to at least 550°C at a cooling rate of 1°C/min to 50°C/min, and further subjected to a heat treatment at a temperature of 300 to 800°C.
本発明によれば、Nd2Fe14B型結晶の化合物を主相とし、かつCeを含有する異方性希土類焼結磁石において、良好な磁気特性を示す異方性希土類焼結磁石を得ることができる。 According to the present invention, it is possible to obtain an anisotropic rare earth sintered magnet that has a Nd 2 Fe 14 B type crystal compound as a main phase and contains Ce, and that exhibits excellent magnetic properties.
以下、本発明の実施形態について説明する。本発明の磁石は、組成が下式
Rx(Fe1-aCoa)100-x-y-zByMz
で表され、Nd2Fe14B型結晶の化合物が主相であり、主相粒子には粒の中心部と外殻部でCe/R’比率が異なる粒子が存在し、また粒界部にはCeを含むR’リッチ相及びCeを含むR’(Fe,Co)2相が存在する異方性希土類焼結磁石である。まず各成分について以下に説明する。なお、Rは希土類元素から選ばれ、かつNd及びCeを必須とする2種以上の元素、MはAl、Si、Ti、V、Cr、Mn、Ni、Cu、Zn、Ga、Ge、Zr、Nb、Mo、Ag、In、Sn、Hf、Ta、W、Pb、Biからなる群より選ばれる1種以上の元素である。また、x、y、z、aは各々、12≦x≦17原子%、3.5≦y≦6.0原子%、0≦z≦3原子%、0≦a≦0.1である。さらに、R’は希土類元素から選ばれ、かつNdを必須とする1種以上の元素である。
なお、R’リッチ相はR’が40原子%を超えて含まれる相である。またR’(Fe,Co)2相はMgCu2構造を有し、ラーベス(Laves)相と呼ばれる化合物相である。
Hereinafter, an embodiment of the present invention will be described. The magnet of the present invention has a composition represented by the following formula: R x (Fe 1-a Co a ) 100-x-y-z B y M z
The anisotropic rare earth sintered magnet is represented by the formula: Nd 2 Fe 14 B type crystal compound is the main phase, the main phase particles have particles with different Ce/R' ratios at the center and outer shell of the grain, and the grain boundary has an R'-rich phase containing Ce and an R'(Fe,Co) 2 phase containing Ce. First, each component will be described below. R is selected from rare earth elements, and two or more elements with Nd and Ce as essential elements, and M is one or more elements selected from the group consisting of Al, Si, Ti, V, Cr, Mn, Ni, Cu, Zn, Ga, Ge, Zr, Nb, Mo, Ag, In, Sn, Hf, Ta, W, Pb, and Bi. Also, x, y, z, and a are 12≦x≦17 atomic %, 3.5≦y≦6.0 atomic %, 0≦z≦3 atomic %, and 0≦a≦0.1, respectively. Furthermore, R' is at least one element selected from rare earth elements, with Nd being essential.
The R'-rich phase is a phase containing more than 40 atomic % of R. The R'(Fe,Co) 2 phase has a MgCu2 structure and is a compound phase known as a Laves phase.
上述したように、Rは希土類元素から選ばれ、かつNd及びCeを必須とする2種以上の元素である。具体的には、RはNd及びCeを必ず含有し、さらにSc、Y、La、Pr、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及びLuより選ばれる1種以上の元素を含んでもよい。Rは主相であるNd2Fe14B型結晶構造の化合物を形成するのに必要な元素である。Rの含有量は12原子%以上17原子%以下とする。12.5原子%以上16原子%以下であれば、より好ましい。12原子%未満ではα-Fe相が析出して焼結し難しく、一方、17原子%を超えるとNd2Fe14B型化合物相の体積比が低下して良好な磁気特性が得られない。Nd2Fe14B型化合物はRがNdのとき特に高い磁気特性を示すので、本発明の異方性希土類焼結磁石はNdを必須とする。また磁石の低コスト化と元素の供給安定化を図るために、希土類元素の中で元素存在比の高いCeを必ず含むものとする。焼結体組成のRに含まれるCeは、原子比でRの1%以上30%以下であることが好ましく、3%以上25%以下であればさらに好ましく、5%以上20%以下が特に好ましい。Ce比がこのような範囲であることで、高い残留磁束密度Brと高い保磁力HcJ、さらに良好なHcJ温度特性を兼ね備えた異方性焼結磁石が得られる。 As described above, R is selected from rare earth elements and is two or more elements, with Nd and Ce being essential. Specifically, R necessarily contains Nd and Ce, and may further contain one or more elements selected from Sc, Y, La, Pr, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu. R is an element necessary for forming a compound of Nd 2 Fe 14 B type crystal structure, which is the main phase. The content of R is 12 atomic % or more and 17 atomic % or less. It is more preferable if it is 12.5 atomic % or more and 16 atomic % or less. If it is less than 12 atomic %, the α-Fe phase precipitates and sintering is difficult, while if it exceeds 17 atomic %, the volume ratio of the Nd 2 Fe 14 B type compound phase decreases and good magnetic properties cannot be obtained. Since Nd2Fe14B type compounds exhibit particularly high magnetic properties when R is Nd, the anisotropic rare earth sintered magnet of the present invention requires Nd. In addition, in order to reduce the cost of the magnet and stabilize the supply of elements, Ce, which has a high elemental abundance ratio among rare earth elements, must be included. The amount of Ce contained in R in the sintered body composition is preferably 1% to 30% of R in atomic ratio, more preferably 3% to 25%, and particularly preferably 5% to 20%. By keeping the Ce ratio in this range, an anisotropic sintered magnet can be obtained that has a high residual magnetic flux density B r , a high coercive force H cJ , and good H cJ temperature characteristics.
BもNd2Fe14B型化合物を形成するのに必須の元素である。Bの含有量は、3.5原子%以上6.0原子%以下とする。5.0原子%以上5.8原子%以下であれば、より好ましい。3.5原子%未満ではR2Fe17相やα-Fe相などの磁気特性に悪影響を与える相が析出し、一方、6.0原子%を超えるとBリッチ相などの異相が形成されて主相の体積比が低下し、良好な磁気特性が得られない。 B is also an essential element for forming a Nd 2 Fe 14 B type compound. The B content is 3.5 atomic % or more and 6.0 atomic % or less. It is more preferable that it is 5.0 atomic % or more and 5.8 atomic % or less. If it is less than 3.5 atomic %, phases that adversely affect the magnetic properties, such as the R 2 Fe 17 phase and the α-Fe phase, are precipitated, while if it exceeds 6.0 atomic %, a different phase, such as a B-rich phase, is formed, the volume ratio of the main phase decreases, and good magnetic properties cannot be obtained.
上述したように、MはAl、Si、Ti、V、Cr、Mn、Ni、Cu、Zn、Ga、Ge、Zr、Nb、Mo、Ag、In、Sn、Hf、Ta、W、Pb及びBiより選ばれる1種以上の元素である。これらの元素は、Nd2Fe14B型化合物主相中に固溶したり、粒界相を形成したりしてHcJを増大させる効果を有するが、過剰に含まれると、磁石のBrを低下させる。そのためMを含む場合、その含有量は全て合わせて3原子%以下とする。2原子%以下であればさらに好ましく、1原子%以下は特に好ましい。 As mentioned above, M is one or more elements selected from Al, Si, Ti, V, Cr, Mn, Ni, Cu, Zn, Ga, Ge, Zr, Nb, Mo, Ag, In, Sn, Hf, Ta, W, Pb, and Bi. These elements have the effect of increasing HcJ by dissolving in the Nd2Fe14B type compound main phase or forming a grain boundary phase, but if contained in excess, it reduces the Br of the magnet. Therefore, when M is contained, its content is set to 3 atomic % or less in total. It is more preferable if it is 2 atomic % or less, and particularly preferable if it is 1 atomic % or less.
本発明の異方性希土類焼結磁石は、R、BとともにFeを必須の構成元素とする。さらにCoでFeの一部を置換しても良い。Coによる置換は、主相であるNd2Fe14B型化合物のキュリー温度Tcを高める効果がある。Coの置換率は原子比で10%以下とする。置換率が10%を超えるとMsは逆に低下する。Fe及びCoの割合は、R、B及びMの残部とする。この他に、原材料から取り込まれたり、製造工程で混入したりする不可避不純物、具体的にはH、C、N、O、F、P、S、Mg、Cl、Caなどを含有してもよいが、良好な磁気特性を得る観点から、含有量は合計で3重量%以下が好ましく、1重量%以下がさらに好ましい。特にC、N、Oは合計で1重量%以下が好ましく、0.5重量%以下がさらに好ましく、0.3重量%以下が特に好ましい。 The anisotropic rare earth sintered magnet of the present invention has Fe as an essential element together with R and B. Furthermore, a part of Fe may be substituted with Co. Substitution with Co has the effect of increasing the Curie temperature Tc of the Nd2Fe14B type compound which is the main phase. The substitution rate of Co is 10% or less in atomic ratio. If the substitution rate exceeds 10%, Ms decreases conversely. The ratio of Fe and Co is the remainder of R, B and M. In addition, inevitable impurities that are taken in from raw materials or mixed in during the manufacturing process, specifically H, C, N, O, F, P, S, Mg, Cl, Ca, etc. may be contained, but from the viewpoint of obtaining good magnetic properties, the content is preferably 3% by weight or less in total, more preferably 1% by weight or less. In particular, C, N, and O are preferably 1% by weight or less in total, more preferably 0.5% by weight or less, and particularly preferably 0.3% by weight or less.
次に、本発明の異方性希土類焼結磁石を構成する相について説明する。
本発明の異方性希土類焼結磁石における主相は、Nd2Fe14B型結晶構造の化合物からなる。主相の平均結晶粒径は1μm以上15μm以下が好ましい。1.5μm以上10μm以下の範囲であればさらに好ましく、2μm以上5μm以下が特に好ましい。平均結晶粒径をこのような範囲とすることで、結晶粒の配向度の低下による残留磁束密度Brの減少や、保磁力HcJの低下を抑制できる。主相の体積率は、良好なBrやHcJを得る観点から、磁石全体に対して80体積%以上99体積%未満が好ましく、90体積%以上99体積%以下であればさらに好ましい。
なお、主相の結晶粒径については、焼結磁石の断面を鏡面になるまで研磨し、エッチング液(硝酸+塩酸+グリセリンの混合液など)に浸漬して粒界相を選択的に除去した後、この断面の任意の10箇所以上についてレーザー顕微鏡で観察を行い、得られた観察像から画像解析により各粒子の断面積を算出し、これらを円とみなした時の平均直径を平均結晶粒径とすることで算出することができる。
また、主相及び各相の体積率については、焼結磁石の断面を鏡面になるまで研磨した後、EPMAを用いて異方性希土類焼結磁石の組織観察と各相の組成分析を行い、主相、R’リッチ相及びR’(Fe,Co)2相の存在を確認した上で、反射電子像の画像における面積比が各相の体積率に等しいものとして算出することができる。
Next, the phases that make up the anisotropic rare earth sintered magnet of the present invention will be described.
The main phase in the anisotropic rare earth sintered magnet of the present invention is made of a compound having a Nd2Fe14B type crystal structure. The average crystal grain size of the main phase is preferably 1 μm or more and 15 μm or less. A range of 1.5 μm or more and 10 μm or less is more preferable, and a range of 2 μm or more and 5 μm or less is particularly preferable. By setting the average crystal grain size in such a range, it is possible to suppress a decrease in the residual magnetic flux density B r and a decrease in the coercive force H cJ due to a decrease in the degree of orientation of the crystal grains. From the viewpoint of obtaining good B r and H cJ , the volume fraction of the main phase is preferably 80 volume % or more and less than 99 volume % of the entire magnet, and more preferably 90 volume % or more and 99 volume % or less.
The crystal grain size of the main phase can be calculated by polishing a cross section of the sintered magnet until it becomes a mirror surface, immersing it in an etching solution (such as a mixture of nitric acid + hydrochloric acid + glycerin) to selectively remove the grain boundary phase, and then observing at least 10 random points on the cross section with a laser microscope. The cross-sectional area of each particle is calculated from the obtained observation images by image analysis, and the average diameter when these are regarded as circles is taken as the average crystal grain size.
In addition, the volume fractions of the main phase and each phase can be calculated by polishing the cross section of the sintered magnet until it becomes a mirror surface, and then observing the structure of the anisotropic rare earth sintered magnet using an EPMA and analyzing the composition of each phase, and confirming the presence of the main phase, the R'-rich phase, and the R'(Fe, Co) 2 phase, and then assuming that the area ratio in the backscattered electron image is equal to the volume fraction of each phase.
R’2Fe14B化合物は、R’=Ndのときに飽和磁化Msが最も高く、Ndの一部をCeで置換した場合は、Ce置換量が大きいほどMsが低下する。そのため本発明の磁石では、Ce置換による磁石のBr減少の影響を小さくするために、主相粒の中心部と外殻部でCe/R’比(R’に対するCeの原子比率)が異なり、粒の中心部におけるCe/R’比が粒の外殻部におけるCe/R’比より低い主相粒が存在するものとする。ただし、Ce濃度分布が均一である主相粒が一部含まれても良い。ここで、外殻部とは主相粒の表面を含む領域であり、中心部とはそれ以外の内部領域を指すものとする。このような組織形態をとることにより、Ce/R’比の低い主相粒の中心付近の領域ではMs低下が抑制され、Ce置換による磁石のBr減少量を小さくすることができる。主相粒の中心部のR’にCeが含まれない場合はより好ましく、粒中心部のR’がNd、またはNd及びPrからなる場合はさらに好ましい。
一方、後述するように、粒界部にCeを含むR’リッチ相とR’(Fe,Co)2相が形成されると、室温でのHcJが増大するとともに、HcJの温度変化が小さくなり、優れた磁気特性を示すようになる。これらの相を効率良く形成するため、本発明の磁石では、主相粒外殻部のCe/R’比が主相粒中心部のCe/R’比より高い構造とする。これにより粒界部のCe濃度も高まり、R’(Fe,Co)2相が粒界部に形成されやすくなる。これに対し、粒のCe/R’比が均一な場合は、R’(Fe,Co)2相を有意に形成するために、焼結体のCe置換量を高める必要があり、Msの大幅な低下を招く。
粒の外殻部におけるCe/R’比が高いと、粒表面のHAは低下するが、Ceを含有するR’リッチ相やR’(Fe,Co)2相によるHcJの増大効果が大きいため、HAの低下による負の効果は低減する。
上述とは逆に、粒の中心部におけるCe/R’比が粒の外殻部におけるCe/R’比より高い主相粒が存在する場合は、Ce/R’比の高い主相粒の中心近傍の領域でのMs低下が顕著となるため、本発明の磁石における指針と相容れない。このため、本発明の磁石において、粒の中心部におけるCe/R’比が粒の外殻部におけるCe/R’比より高い主相粒は存在しないものとする。
Ce/R’比の高い外殻部の厚みは特に限定されないものの、外殻部の内側の部分の体積率を大きくする観点から、1nm~2μmが好ましく、2nm~1μmであれば特に好ましい。
The R' 2 Fe 14 B compound has the highest saturation magnetization Ms when R'=Nd, and when part of Nd is substituted with Ce, the larger the Ce substitution amount, the lower the Ms. Therefore, in the magnet of the present invention, in order to reduce the effect of the decrease in B r of the magnet due to Ce substitution, the Ce/R' ratio (atomic ratio of Ce to R') is different between the center and the outer shell of the main phase grain, and there are main phase grains in which the Ce/R' ratio in the center of the grain is lower than the Ce/R' ratio in the outer shell of the grain. However, some main phase grains may be included in which the Ce concentration distribution is uniform. Here, the outer shell refers to the region including the surface of the main phase grain, and the center refers to the other internal region. By adopting such a structure, the decrease in Ms is suppressed in the region near the center of the main phase grain with a low Ce/R' ratio, and the decrease in B r of the magnet due to Ce substitution can be reduced. It is more preferable that R' in the center of the main phase grain does not contain Ce, and it is even more preferable that R' in the center of the grain consists of Nd, or Nd and Pr.
On the other hand, as described later, when an R'-rich phase containing Ce and an R'(Fe, Co) 2 phase are formed in the grain boundary, HcJ at room temperature increases and the temperature change of HcJ becomes small, resulting in excellent magnetic properties. In order to efficiently form these phases, the magnet of the present invention has a structure in which the Ce/R' ratio of the outer shell of the main phase grain is higher than the Ce/R' ratio of the center of the main phase grain. This increases the Ce concentration in the grain boundary, making it easier for the R'(Fe, Co) 2 phase to form in the grain boundary. In contrast, when the Ce/R' ratio of the grains is uniform, it is necessary to increase the Ce substitution amount of the sintered body in order to significantly form the R'(Fe, Co) 2 phase, which leads to a significant decrease in Ms.
When the Ce/R' ratio in the outer shell of the grain is high, the H A of the grain surface decreases, but the negative effect of the decrease in H A is reduced because the effect of increasing H cJ due to the Ce-containing R'-rich phase and the R'(Fe,Co) 2 phase is large.
Conversely, if there are main phase grains in which the Ce/R' ratio in the center is higher than the Ce/R' ratio in the outer periphery of the grain, the drop in Ms will be significant in the region near the center of the main phase grain with the high Ce/R' ratio, which is incompatible with the guidelines for the magnet of the present invention. For this reason, it is assumed that there are no main phase grains in the magnet of the present invention in which the Ce/R' ratio in the center is higher than the Ce/R' ratio in the outer periphery of the grain.
The thickness of the outer shell part having a high Ce/R' ratio is not particularly limited, but from the viewpoint of increasing the volume ratio of the inner part of the outer shell part, it is preferably 1 nm to 2 μm, and particularly preferably 2 nm to 1 μm.
R’リッチ相及びR’(Fe,Co)2相は、磁石組織の粒界部に形成される。粒界部には粒界三重点に加えて二粒子間粒界相なども含まれる。ここで、R’が40原子%を超えて含まれる相とする。本発明者らは、粒界部にCeを含有するR’リッチ相とR’(Fe,Co)2相が存在するときに、磁石の室温におけるHcJが向上し、さらにHcJの温度特性も向上することを見出した。2つの相が共存する組織を得るために、焼結体の組成におけるCe/R’比は0.01以上0.3以下であることが好ましい。0.01未満ではR’(Fe,Co)2相が形成されず、0.3を超えるとR’リッチ相が存在し難くなる。0.03以上0.25以下であればさらに好ましく、0.05以上0.2以下が特に好ましい。 The R'-rich phase and the R'(Fe,Co) 2 phase are formed in the grain boundary of the magnet structure. The grain boundary includes the grain boundary triple point as well as the grain boundary phase between two grains. Here, the phase contains more than 40 atomic % of R'. The inventors have found that when the R'-rich phase containing Ce and the R'(Fe,Co) 2 phase are present in the grain boundary, the H cJ of the magnet at room temperature is improved, and the temperature characteristics of the H cJ are also improved. In order to obtain a structure in which the two phases coexist, the Ce/R' ratio in the composition of the sintered body is preferably 0.01 or more and 0.3 or less. If it is less than 0.01, the R'(Fe,Co) 2 phase is not formed, and if it exceeds 0.3, the R'-rich phase is difficult to exist. If it is 0.03 or more and 0.25 or less, it is more preferable, and if it is 0.05 or more and 0.2 or less, it is particularly preferable.
R’リッチ相とR’(Fe,Co)2相は、主として4つの効果をもたらす。第1の効果は、焼結を促進させる作用である。焼結温度ではR’リッチ相もR’(Fe,Co)2相も溶融して液相となるため、液相焼結が進行し、これらの相を含まない場合の固相焼結に比べて速やかに焼結が完了する。またR’リッチ相とR’(Fe,Co)2相が共存することで、液相生成温度はどちらか一方の相のみの場合より降下する傾向を示し、液相焼結がより速やかに進行する。 The R'-rich phase and the R'(Fe,Co) 2 phase mainly bring about four effects. The first effect is the action of promoting sintering. At the sintering temperature, both the R'-rich phase and the R'(Fe,Co) 2 phase melt and become liquid phase, so liquid phase sintering proceeds and sintering is completed more quickly than solid phase sintering in which these phases are not included. In addition, by coexisting the R'-rich phase and the R'(Fe,Co) 2 phase, the liquid phase generation temperature tends to decrease more than in the case of only one of the phases, and liquid phase sintering proceeds more quickly.
第2の効果は、主相粒表面のクリーニングである。本発明の異方性希土類焼結磁石は核発生型の保磁力機構を有するため、逆磁区の核生成が生じにくくなるように、主相粒表面が平滑であることが望ましい。R’リッチ相とR’(Fe,Co)2相は、焼結工程、もしくはその後の時効工程において、主相粒の表面を平滑化する役割を果たしており、このクリーニング効果によって保磁力低減の要因となる逆磁区の核生成が抑制される。R’(Fe,Co)2相は、R’が40原子%未満の他相、例えば、R’M3、R’M2、R’(Fe,Co)MやR’(Fe,Co)2M2などの化合物相と比べて主相に対する濡れ性が比較的高い。特に、この相はR’リッチ相と共存することで主相粒の表面を被覆しやすくなり、大きなクリーニング効果が生じる。これにより逆磁区の核生成が抑制され、室温での保磁力が増加するとともに、高温下での保磁力低下も小さくなり、良好なHcJの温度依存性を示すようになると考えられる。 The second effect is cleaning of the main phase grain surface. Since the anisotropic rare earth sintered magnet of the present invention has a nucleation-type coercive force mechanism, it is desirable that the main phase grain surface is smooth so that nucleation of reverse magnetic domains is unlikely to occur. The R'-rich phase and the R'(Fe,Co) 2 phase play a role in smoothing the surface of the main phase grains in the sintering process or the subsequent aging process, and this cleaning effect suppresses nucleation of reverse magnetic domains, which is a factor in reducing coercive force. The R'(Fe,Co) 2 phase has a relatively high wettability with respect to the main phase compared to other phases in which R' is less than 40 atomic %, such as compound phases such as R'M 3 , R'M 2 , R'(Fe,Co)M and R'(Fe,Co) 2 M 2 . In particular, this phase is easily able to cover the surface of the main phase grains by coexisting with the R'-rich phase, resulting in a large cleaning effect. This is believed to suppress nucleation of reverse magnetic domains, increase the coercive force at room temperature, reduce the decrease in coercive force at high temperatures, and provide good temperature dependence of HcJ .
第3の効果は、主相粒間の磁気的相互作用を弱める効果である。R’リッチ相とR’(Fe,Co)2相が存在する磁石では、最適な焼結処理、もしくは時効処理を行うことで、隣接する主相粒間に、主相よりR’を多く含有する二粒子間粒界相が形成される。これにより主相粒間の磁気的相互作用が弱まり保磁力が発現するが、二粒子間粒界相がCeを含有すると、主相粒間の磁気的相互作用を弱める効果はより大きくなり、保磁力をさらに増大させる方向に作用すると考えられる。 The third effect is the effect of weakening the magnetic interaction between main phase grains. In magnets that have two phases, an R'-rich phase and an R'(Fe, Co) phase, an optimal sintering process or aging process is performed to form an interparticle grain boundary phase between adjacent main phase grains that contains more R' than the main phase. This weakens the magnetic interaction between the main phase grains and exerts coercive force, but if the interparticle grain boundary phase contains Ce, the effect of weakening the magnetic interaction between the main phase grains becomes even greater, and it is believed to act in the direction of further increasing the coercive force.
第4の効果は、R’(Fe,Co)2相と主相の間での境界相形成を促進する効果である。粒界部にR’リッチ相とR’(Fe,Co)2相が存在する磁石では、組成や粉末粒径などの条件に合わせて焼結や、その後の熱処理を最適に行うことにより、主相粒間だけでなく、R’(Fe,Co)2相と主相粒の間にも薄い厚みを有する境界相が形成される。本発明の磁石におけるR’(Fe,Co)2相は磁性相であるが、この薄い境界相が形成されることで、R’(Fe,Co)2相と主相の間の磁気的相互作用が弱まって、高い保磁力が得られる。
粒界部にR’リッチ相が存在しない磁石では、R’(Fe,Co)2相と主相粒間の薄い境界相や主相粒間の二粒子間粒界相が形成されにくい、あるいは主相粒の表面がこれらで完全に被覆された組織となりにくいため、十分な保磁力を示す磁石が得られにくい。
The fourth effect is the effect of promoting the formation of a boundary phase between the R'(Fe, Co) 2 phase and the main phase. In magnets in which an R'-rich phase and an R'(Fe, Co) 2 phase exist at the grain boundary, a thin boundary phase is formed not only between the main phase grains but also between the R'(Fe, Co) 2 phase and the main phase grains by optimally performing sintering and subsequent heat treatment according to conditions such as the composition and powder particle size. The R'(Fe, Co) 2 phase in the magnet of the present invention is a magnetic phase, but the formation of this thin boundary phase weakens the magnetic interaction between the R'(Fe, Co) 2 phase and the main phase, resulting in a high coercive force.
In magnets that do not have an R'-rich phase at the grain boundaries, it is difficult to form a thin boundary phase between the R'(Fe, Co) 2 phase and the main phase grains, or a grain boundary phase between two particles of the main phase grains, or it is difficult for the surfaces of the main phase grains to become completely covered by these phases, making it difficult to obtain a magnet that exhibits sufficient coercivity.
R’リッチ相は、上記のとおり、R’が少なくとも40原子%を超えて含まれるものとする。R’が40原子%を超えていると、主相との濡れ性がさらに良好となり、上述の効果がさらに得られやすくなる。R’を50原子以上含有するとさらに好ましく、60原子以上含有すれば特に好ましい。R’リッチ相はR’メタル相でも良いし、アモルファス相やR’3(Fe,Co,M)、R’2(Fe,Co,M)、R’5(Fe,Co,M)3、R’(Fe,Co,M)のように高R’組成で低融点の金属間化合物であっても良い。またFe、Co、M元素や、H、B、C、N、O、F、P、S、Mg、Cl、Caなどの不純物元素を、合計で60原子%未満まで含んで良い。
また、Rリッチ相のCe/R比が高いほど、主相粒間の磁気的相互作用が低減する効果は大きくなる。そのため、Ceを効率よく磁気特性の向上に作用させるために、Rリッチ相におけるCe/R比は、主相粒外殻部のCe/R比よりも高いことが好ましい。
As described above, the R'-rich phase contains at least 40 atomic % of R'. If the R' content exceeds 40 atomic %, the wettability with the main phase is further improved, and the above-mentioned effect is more easily obtained. It is more preferable to contain 50 atoms or more of R', and particularly preferable to contain 60 atoms or more. The R'-rich phase may be an R' metal phase, an amorphous phase, or an intermetallic compound with a high R' composition and a low melting point, such as R ' 3 (Fe, Co, M), R' 2 (Fe, Co, M), R' 5 (Fe, Co, M) 3 , or R' (Fe, Co, M). It may also contain Fe, Co, M elements, and impurity elements such as H, B, C, N, O, F, P, S, Mg, Cl, and Ca, up to a total of less than 60 atomic %.
Furthermore, the higher the Ce/R ratio in the R-rich phase, the greater the effect of reducing the magnetic interaction between the main phase grains. Therefore, in order to allow Ce to efficiently act to improve the magnetic properties, it is preferable that the Ce/R ratio in the R-rich phase is higher than the Ce/R ratio in the outer shell portion of the main phase grains.
一方、R’(Fe,Co)2相はMgCu2型結晶のLaves化合物であるが、EPMAなどを用いて組成分析した場合、測定ばらつきなどを考慮して、R’を20原子%以上40原子%未満含有するものとする。また、M元素によりFe、Coの一部が置換されても良い。ただし、Mの置換量はMgCu2型結晶構造が保持される範囲内とする。 On the other hand, the R'(Fe,Co) 2 phase is a Laves compound of MgCu2 type crystal, but when composition analysis is performed using EPMA or the like, taking into consideration measurement variations, etc., it is assumed that it contains 20 atomic % or more and less than 40 atomic % of R'. In addition, a part of Fe and Co may be substituted with the M element. However, the amount of substitution of M is within a range in which the MgCu2 type crystal structure is maintained.
本発明の異方性希土類焼結磁石におけるR’(Fe,Co)2相は磁性相である。ここでいう磁性相とは、フェロ磁性もしくはフェリ磁性を示し、キュリー温度Tcが室温(23℃)以上である相とする。R’Fe2はCeFe2を除いてTcが室温以上であり、CeFe2もR’の10%以上が他の元素で置換されればTcは室温以上になる。一方、R’Co2はGdCo2を除いてTcが室温以下、もしくは常磁性相だが、本発明の異方性希土類焼結磁石ではCoによるFeの置換原子比率が0.1以下なので、ほとんどの場合R’(Fe,Co)2相は磁性相となる。一般に、組織中に含まれる軟磁性相は磁気特性に悪影響を及ぼすことが多いが、本発明の異方性希土類焼結磁石ではR’(Fe,Co)2相による主相粒表面のクリーニング効果や二粒子間粒界相を形成する効果の方が大きく、磁性相であっても室温HcJの増大やHcJの温度依存性改善に寄与すると考えられる。
また、R’(Fe,Co)2相は、R’がNd、Prのみでは安定に存在し難く、Ceを含むことで平衡相として粒界部に形成される。そのため、R’(Fe,Co)2相のCe/R’比は、主相粒外殻部のCe/R’比よりも高いことが好ましい。
The R'(Fe,Co) 2 phase in the anisotropic rare earth sintered magnet of the present invention is a magnetic phase. The magnetic phase here refers to a phase that exhibits ferromagnetism or ferrimagnetism and has a Curie temperature Tc of room temperature (23°C) or higher. R'Fe2 has a Tc of room temperature or higher except for CeFe2 , and CeFe2 also has a Tc of room temperature or higher if 10% or more of R' is replaced with another element. On the other hand, R'Co2 has a Tc of room temperature or lower except for GdCo2 , or is a paramagnetic phase, but in the anisotropic rare earth sintered magnet of the present invention, the atomic ratio of Fe substituted by Co is 0.1 or less, so in most cases the R'(Fe,Co) 2 phase is a magnetic phase. Generally, soft magnetic phases contained in a structure often have an adverse effect on magnetic properties, but in the anisotropic rare earth sintered magnet of the present invention, the cleaning effect of the main phase grain surfaces by the R'(Fe, Co) 2 phase and the effect of forming grain boundary phases between two particles are greater, and it is believed that even the magnetic phase contributes to an increase in room temperature HcJ and an improvement in the temperature dependence of HcJ .
In addition, the R'(Fe,Co) 2 phase is unlikely to exist stably when R' is composed only of Nd and Pr, and is formed as an equilibrium phase at the grain boundary by including Ce. Therefore, it is preferable that the Ce/R' ratio of the R'(Fe,Co) 2 phase is higher than the Ce/R' ratio of the outer shell portion of the main phase grain.
R’リッチ相とR’(Fe,Co)2相の形成量は、合わせて1体積%以上であることが好ましく、1体積%以上20体積%未満とすることがより好ましい。また、1.5体積%以上15体積%未満がさらに好ましく、2体積%以上10体積%未満の範囲がよりさらに好ましい。またR’リッチ相とR’(Fe,Co)2相は、各々0.5体積%以上であることが好ましい。このような範囲とすることで、主相粒と接する面積が確保され、HcJ増大の効果が得られやすい。また、Brの低下も抑えられ、所望の磁気特性が得られやすい。 The total amount of the R'-rich phase and the R'(Fe,Co) 2 phase is preferably 1% by volume or more, more preferably 1% by volume or more and less than 20% by volume. Moreover, it is more preferable that it is 1.5% by volume or more and less than 15% by volume, and even more preferable that it is 2% by volume or more and less than 10% by volume. Moreover, it is preferable that the R'-rich phase and the R'(Fe,Co) 2 phase are each 0.5% by volume or more. By setting it in such a range, the area in contact with the main phase grains is secured, and the effect of increasing HcJ is easily obtained. Moreover, the decrease in B r is also suppressed, and the desired magnetic properties are easily obtained.
本発明の焼結磁石における、より好ましい組織では、R’(Fe,Co)2相と主相の間に薄い厚みを有する境界相が形成される。R’(Fe,Co)2相と主相がこの薄い境界相で隔てられることで両相間の磁気的相互作用が弱まり、室温HcJやHcJの温度依存性がさらに改善される。
この境界相は、原子配列の乱れたアモルファス状であっても良いし、原子配列に規則性を有しても良い。STEM(走査透過電子顕微鏡)などの装置を用いて境界相を観察した場合、その組成は20原子%以上のR’を含むものとする。R’の含有量が20原子%以上であれば、境界相による保磁力改善効果が得られやすい。R’の含有量は25原子%以上であればより好ましく、30原子%以上であればさらに好ましい。また、R’やFe,Co,Mの他にC、N、Oなどの元素を含んでもよい。
境界相の厚さは0.1nm以上20nm以下であることが好ましい。このような範囲であれば、R(Fe,Co)2相と主相間の磁気的相互作用が弱まる効果が生じ、かつ境界相形成による主相の体積率減少も抑えることができる。厚さは0.2nm以上10nm以下がさらに好ましく、0.5nm以上5nm以下が特に好ましい。
In a more preferred structure of the sintered magnet of the present invention, a thin boundary phase is formed between the R'(Fe,Co) 2 phase and the main phase. By separating the R'(Fe,Co) 2 phase and the main phase by this thin boundary phase, the magnetic interaction between the two phases is weakened, and the room temperature HcJ and the temperature dependence of HcJ are further improved.
This boundary phase may be amorphous with a disordered atomic arrangement, or may have regular atomic arrangement. When the boundary phase is observed using a device such as a scanning transmission electron microscope (STEM), its composition contains 20 atomic % or more of R'. If the content of R' is 20 atomic % or more, the effect of improving the coercive force due to the boundary phase is easily obtained. The content of R' is more preferably 25 atomic % or more, and even more preferably 30 atomic % or more. In addition to R', Fe, Co, and M, elements such as C, N, and O may be included.
The thickness of the boundary phase is preferably 0.1 nm or more and 20 nm or less. In this range, the effect of weakening the magnetic interaction between the R(Fe, Co) 2 phase and the main phase is produced, and the reduction in the volume fraction of the main phase due to the formation of the boundary phase can be suppressed. The thickness is more preferably 0.2 nm or more and 10 nm or less, and particularly preferably 0.5 nm or more and 5 nm or less.
R’(Fe,Co)2相と主相の間に形成されたこの薄い境界相のCe/R’は、主相粒間に形成される二粒子間粒界相のCe/R’よりも高いことが好ましい。境界相はCeを多く含有するR’(Fe,Co)2相と隣接しているため、高いCe/R’組成を安定に実現しやすい。Ce/R’が高いほど磁気的相互作用を弱める効果は大きくなるので、主相粒表面がこの相で覆われる面積が増えると、磁石はさらに高い室温HcJを示すようになる。境界相のCe/R’の値は0.2以上が好ましい。0.3以上がさらに好ましく、0.35以上が特に好ましい。
このように、主相粒とR’(Fe,Co)2相の間にCe/R’の高い境界相が形成される組織形態をとることで、主相-R’(Fe,Co)2相間の磁気的相互作用が弱まり、高い室温HcJと良好なHcJ温度依存性が得られる。
The Ce/R' of this thin boundary phase formed between the R'(Fe,Co) 2 phase and the main phase is preferably higher than the Ce/R' of the grain boundary phase between two grains formed between the main phase grains. Since the boundary phase is adjacent to the R'(Fe,Co) 2 phase containing a large amount of Ce, it is easy to stably realize a high Ce/R' composition. The higher the Ce/R', the greater the effect of weakening the magnetic interaction, so that if the area of the main phase grain surface covered by this phase increases, the magnet will exhibit a higher room temperature HcJ . The value of Ce/R' of the boundary phase is preferably 0.2 or more. It is more preferably 0.3 or more, and particularly preferably 0.35 or more.
In this way, by adopting a structural form in which a boundary phase with a high Ce/R' ratio is formed between the main phase grains and the R'(Fe, Co) two phases, the magnetic interaction between the main phase and the R'(Fe, Co) two phases is weakened, resulting in a high room temperature HcJ and good temperature dependence of HcJ .
なお、上述したR’(Fe,Co)2相と主相の間に形成された境界相や、主相粒間の二粒子間粒界相の厚さは、例えば、STEM装置(日本電子株式会社製JEM-ARM200F)を用いて、主相粒同士が隣接する箇所、及びR’(Fe,Co)2相と主相が隣接する箇所の観察を行い、得られたHAADF像(High-Angle Annular Dark Field)から算出することができる。 The thickness of the boundary phase formed between the R'(Fe, Co) 2 phase and the main phase and the grain boundary phase between two particles between the main phase grains can be calculated from the obtained HAADF (High-Angle Annular Dark Field) image by observing the areas where the main phase grains are adjacent to each other and the areas where the R'(Fe, Co) 2 phase and the main phase are adjacent using, for example, an STEM device (JEM-ARM200F manufactured by JEOL Ltd.).
この他、本発明の異方性希土類焼結磁石には、不可避的に混入したC、N、O によって形成されるR’酸化物、R’炭化物、R’窒化物、R’オキシカーバイド、M炭化物などが含まれても良い。磁気特性の劣化を抑制する観点から、これらの体積比は10体積%以下が好ましく、5体積%以下がさらに好ましい。 In addition, the anisotropic rare earth sintered magnet of the present invention may contain R' oxides, R' carbides, R' nitrides, R' oxycarbides, M carbides, etc., which are formed by the unavoidably mixed C, N, and O. From the viewpoint of suppressing deterioration of the magnetic properties, the volume ratio of these is preferably 10 volume % or less, and more preferably 5 volume % or less.
上記以外の相はできるだけ少ない方が好ましく、例えばR’1+ε(Fe,Co)4B4で表されるBリッチ相は、主相やR’リッチ相、R’(Fe,Co)2相の体積比率の低下を抑えるために、5体積%以下であることが好ましい。また著しい磁気特性の低下を防ぐ観点から、α-(Fe,Co)相やR’2(Fe,Co,M)17相は、本発明の異方性希土類焼結磁石には含まれないことが好ましい。 For example, the B-rich phase represented by R'1 +ε (Fe,Co) 4B4 is preferably 5 volume % or less in order to suppress a decrease in the volume ratio of the main phase, the R'-rich phase, and the R'(Fe,Co) 2 phase. Also, from the viewpoint of preventing a significant decrease in the magnetic properties, it is preferable that the α-(Fe,Co) phase and the R'2 (Fe,Co,M) 17 phase are not included in the anisotropic rare earth sintered magnet of the present invention.
次に、製造方法について説明する。本発明の異方性希土類焼結磁石は粉末冶金法によって製造されるが、主相粒の中心部と外殻部でCe/R’比の異なる構造を有する磁石を製造する手段として、たとえば二合金法や粒界拡散法などの例を挙げることができる。 Next, the manufacturing method will be described. The anisotropic rare earth sintered magnet of the present invention is manufactured by powder metallurgy, but examples of methods for manufacturing a magnet having a structure in which the Ce/R' ratio differs between the center and outer shell of the main phase grains include the two-alloy method and the grain boundary diffusion method.
まず原料合金を作製するために、R’、Fe、Co、Mのメタル原料、合金、フェロ合金などを用い、製造工程中の原料ロス等を考慮した上で、最終的に得られる焼結体が所定の組成になるよう調整する。これらの原料を、高周波炉、あるいはアーク炉などで溶解して合金を作製する。溶湯からの冷却は鋳造法でもよいし、ストリップキャスト法で薄片としてもよい。ストリップキャスト法の場合は、冷却速度を調整して主相の平均結晶粒径、もしくは平均の粒界相間隔が1μm以上となるように合金を作製するのが好ましい。1μm未満では、微粉砕後の粉末が多結晶となり、磁場中成形の工程において主相結晶粒が十分に配向せずBrの低下を招く。平均結晶粒径は、例えば、合金の断面を研磨してエッチング処理後に組織観察を行い、ロール接触面に平行な線を等間隔に20本引き、これらの線がエッチングで除去された粒界相部と交わる交点を数えることで算出できる。合金中にα-Feが析出する場合は、α-Feを除去してNd2Fe14B型化合物相の形成量が増えるように、合金に熱処理を施しても良い。 First, to prepare the raw alloy, metal raw materials, alloys, ferroalloys, etc. of R', Fe, Co, M are used, and the final sintered body is adjusted to have a predetermined composition after considering the raw material loss during the manufacturing process. These raw materials are melted in a high-frequency furnace or an arc furnace to prepare the alloy. The cooling from the molten metal may be performed by casting, or may be made into thin pieces by strip casting. In the case of the strip casting method, it is preferable to adjust the cooling rate to prepare the alloy so that the average crystal grain size of the main phase or the average grain boundary phase interval is 1 μm or more. If it is less than 1 μm, the powder after fine pulverization becomes polycrystalline, and the main phase crystal grains are not sufficiently oriented in the process of molding in a magnetic field, resulting in a decrease in B r . The average crystal grain size can be calculated, for example, by polishing the cross section of the alloy, etching it, and then observing the structure, drawing 20 lines parallel to the roll contact surface at equal intervals, and counting the intersections where these lines intersect with the grain boundary phase portion removed by etching. If α-Fe precipitates in the alloy, the alloy may be heat treated to remove the α-Fe and increase the amount of Nd 2 Fe 14 B type compound phase formed.
上記の原料合金を、ブラウンミルなどの機械粉砕や水素化粉砕などの手段により平均粒径0.05~3mmの粉末になるよう粗粉砕する。あるいはHDDR法(水素不均化脱離再結合法)を適用しても良い。さらに粗粉をボールミルや高圧窒素などを用いたジェットミルなどにより微粉砕し、平均粒径0.5~20μm、より好ましくは1~10μmの粉末とする。なお微粉砕工程の前後に、必要に応じて潤滑剤等を添加してもよい。 The above raw alloy is coarsely pulverized into powder with an average particle size of 0.05 to 3 mm by mechanical pulverization using a Braun mill or other means, or by hydrogen pulverization. Alternatively, the HDDR method (hydrogen disproportionation desorption recombination method) may be applied. The coarse powder is then finely pulverized using a ball mill or a jet mill using high-pressure nitrogen to obtain powder with an average particle size of 0.5 to 20 μm, more preferably 1 to 10 μm. Note that a lubricant may be added before or after the fine pulverization process, as necessary.
二合金法を用いる場合は、組成の異なる2種の原料合金を作製する。なお、3種類以上の合金を用いてもよい。このとき、Nd2Fe14B型化合物相を主体としてCe/R’比が相対的に低い合金Aと、それより相対的にR’組成比及びCe/R’比が高い合金Bを組み合わせて、平均組成が所定の組成となるよう調整するのが好ましい。これらの合金を鋳造法やストリップキャスト法で作製し、粉砕する。各合金粉末を混合する工程は、微粉砕前の粗粉状態で行っても良いし、微粉砕後に行っても良い。 When the two-alloy method is used, two kinds of raw alloys with different compositions are prepared. Three or more kinds of alloys may be used. In this case, it is preferable to combine an alloy A mainly composed of a Nd 2 Fe 14 B type compound phase and having a relatively low Ce/R′ ratio with an alloy B having a relatively higher R′ composition ratio and Ce/R′ ratio than that, and adjust the average composition to a predetermined composition. These alloys are prepared by a casting method or a strip casting method, and then pulverized. The process of mixing the alloy powders may be performed in a coarse powder state before fine pulverization, or may be performed after fine pulverization.
次に磁場プレス装置を用いて、合金粉末の磁化容易軸を印加磁場中で配向させながら成形し、圧粉成形体とする。成形は、合金粉末の酸化を抑制するために真空、窒素ガス雰囲気、Arなどの不活性ガス雰囲気などで行うのが好ましい。
圧粉成形体を焼結する工程は、焼結炉を用いて真空または不活性雰囲気中で、800℃以上1200℃以下の温度で行うものとする。800℃未満では焼結が進行し難いため高い焼結密度が得られず、1200℃を超えるとNd2Fe14B型化合物の主相が分解してα-Feが析出する。焼結温度は特に900~1100℃の範囲が好ましい。焼結時間は0.5~20時間が好ましく、1~10時間がより好ましい。焼結は、昇温した後、一定温度で保持するパターンでも良いし、結晶粒の微細化を図るために、第1の焼結温度まで昇温後により低い第2の焼結温度で所定時間保持する2段階焼結パターンを用いても良い。また、複数回の焼結を行っても良いし、あるいは放電プラズマ焼結法などを適用しても良い。焼結後の冷却速度は特に制限されないが、少なくとも600℃以下、好ましくは200℃以下まで、好ましくは1℃/分以上100℃/分以下、より好ましくは5℃/分以上50℃/分以下の冷却速度で冷却することができる。室温保磁力と保磁力の温度特性を向上させるため、さらに300~800℃で0.5~50時間の時効熱処理を施すことが好ましい。時効熱処理後は、少なくとも200℃以下、好ましくは100℃以下まで、好ましくは1℃/分以上100℃/分以下、より好ましくは5℃/分以上50℃/分以下の冷却速度で冷却することができる。時効熱処理は複数回行ってもよい。また焼結熱処理と時効熱処理の間に、600~1000℃で0.5~50時間の中間熱処理を施してもよい。
Next, the alloy powder is molded into a green compact using a magnetic field press while aligning the magnetization easy axis of the alloy powder in an applied magnetic field. The molding is preferably performed in a vacuum, a nitrogen gas atmosphere, or an inert gas atmosphere such as Ar to suppress oxidation of the alloy powder.
The step of sintering the powder compact is carried out at a temperature of 800°C to 1200°C in a vacuum or inert atmosphere using a sintering furnace. Sintering is difficult to proceed at temperatures below 800°C, so a high sintered density cannot be obtained, and at temperatures above 1200°C, the main phase of the Nd 2 Fe 14 B type compound decomposes and α-Fe precipitates. The sintering temperature is preferably in the range of 900 to 1100°C. The sintering time is preferably 0.5 to 20 hours, more preferably 1 to 10 hours. Sintering may be performed in a pattern in which the temperature is raised and then held at a constant temperature, or in order to refine the crystal grains, a two-stage sintering pattern in which the temperature is raised to a first sintering temperature and then held at a lower second sintering temperature for a predetermined time may be used. Sintering may also be performed multiple times, or a spark plasma sintering method or the like may be applied. The cooling rate after sintering is not particularly limited, but can be at least 600°C or less, preferably 200°C or less, preferably at a cooling rate of 1°C/min to 100°C/min, more preferably 5°C/min to 50°C/min. In order to improve the room temperature coercivity and the temperature characteristic of the coercivity, it is preferable to further perform an aging heat treatment at 300 to 800°C for 0.5 to 50 hours. After the aging heat treatment, it can be cooled at a cooling rate of at least 200°C or less, preferably 100°C or less, preferably 1°C/min to 100°C/min, more preferably 5°C/min to 50°C/min. The aging heat treatment may be performed multiple times. In addition, an intermediate heat treatment at 600 to 1000°C for 0.5 to 50 hours may be performed between the sintering heat treatment and the aging heat treatment.
主相粒とR(Fe,Co)2粒界相の間に薄い境界相を形成するには、中間熱処理後に1℃/分以上50℃/分以下、好ましくは2℃/分以上30℃/分以下の冷却速度で、少なくとも550℃以下、好ましくは400℃以下まで冷却することが好ましい。 In order to form a thin boundary phase between the main phase grains and the R(Fe, Co) 2 grain boundary phase, it is preferable to cool the steel sheet after the intermediate heat treatment to at least 550°C or less, preferably 400°C or less, at a cooling rate of 1°C/min to 50°C/min, preferably 2°C/min to 30°C/min.
上記の中間熱処理や時効熱処理を、組成や粉末粒径などに合わせて最適な条件で行うことにより、粒界部にRリッチ相とR(Fe,Co)2相が形成される。より好ましい場合には、隣接する主相粒間に二粒子間粒界相が形成され、さらにR(Fe,Co)2相と主相粒との間に薄い境界相が形成される。これにより、室温保磁力の増大と保磁力の温度特性向上がもたらされる。焼結体を所定の形状に切断・研削し、着磁を施すことで焼結磁石となる。 By carrying out the above intermediate heat treatment and aging heat treatment under optimal conditions according to the composition, powder grain size, etc., an R-rich phase and an R(Fe, Co) 2 phase are formed at the grain boundaries. In more preferable cases, an interparticle grain boundary phase is formed between adjacent main phase grains, and a thin boundary phase is formed between the R(Fe, Co) 2 phase and the main phase grains. This leads to an increase in room temperature coercivity and an improvement in the temperature characteristics of the coercivity. The sintered body is cut and ground into a specified shape and magnetized to produce a sintered magnet.
図1に示すように、二合金法による焼結磁石では、主として合金Aの成分によりNd2Fe14B型化合物からなる主相が形成され、主として合金Bの成分によりR’リッチ相、R’(Fe,Co)2相や主相粒10の外殻部が形成される。そのため、粒界部20に形成されたR’リッチ相やR’(Fe,Co)2相のCe/R’原子比は、主相粒内部のCe/R’原子比より高くなる。また粒界部20のCeの一部は主相粒10の表層部でR’原子を置換し、中心部と外殻部でCe濃度が異なるコアシェル構造を形成する。 1, in the sintered magnet by the two-alloy method, the main phase made of Nd2Fe14B type compound is formed mainly by the components of alloy A, and the R'-rich phase, R'(Fe,Co) 2 phase, and the outer shell of the main phase grain 10 are formed mainly by the components of alloy B. Therefore, the Ce/R' atomic ratio of the R'-rich phase and R'(Fe,Co) 2 phase formed in the grain boundary portion 20 is higher than the Ce/R' atomic ratio inside the main phase grain. Also, some of the Ce in the grain boundary portion 20 replaces R' atoms in the surface layer portion of the main phase grain 10, forming a core-shell structure with different Ce concentrations in the center and outer shell.
一方、粒界拡散法では、まず上述と同様に単合金法又は二合金法により焼結体を作製する。このとき焼結体組成のR’はCeを含まない方が好ましい。 On the other hand, in the grain boundary diffusion method, a sintered body is first produced by the single alloy method or the two-alloy method as described above. In this case, it is preferable that R' in the sintered body composition does not contain Ce.
次に、得られた焼結体に対してCeの粒界拡散を施す。焼結体を必要に応じて切断、研削した後、その表面上にCeを含む金属、合金、酸化物、フッ化物、酸フッ化物、水素化物、炭化物等のCeを含む化合物から選ばれる拡散材料を、粉末、薄膜、薄帯、箔などの形態で設置する。例えば、上記材料の粉末を水もしくは有機溶媒などと混合してスラリーとし、それを焼結体上にコーティングした後、乾燥させても良いし、蒸着、スパッタ、CVDなどの手段で上記物質を薄膜として焼結体表面に設置しても良い。設置量としては、10~1000μg/mm2であることが好ましく、特に20~500μg/mm2が好ましい。このような範囲であれば、HcJの増大が十分に得られ、また、CeによるBrの低下を低減できる。 Next, the obtained sintered body is subjected to grain boundary diffusion of Ce. After cutting and grinding the sintered body as necessary, a diffusion material selected from compounds containing Ce, such as metals, alloys, oxides, fluorides, oxyfluorides, hydrides, and carbides, is placed on the surface of the sintered body in the form of powder, thin film, thin strip, foil, etc. For example, the powder of the above material may be mixed with water or an organic solvent to form a slurry, which may be coated on the sintered body and then dried, or the above material may be placed on the surface of the sintered body as a thin film by means of deposition, sputtering, CVD, etc. The amount of the material to be placed is preferably 10 to 1000 μg/mm 2 , and particularly preferably 20 to 500 μg/mm 2. Within such a range, a sufficient increase in H cJ can be obtained, and a decrease in B r due to Ce can be reduced.
この焼結体を、表面にCeを設置した状態で真空中又は不活性ガス雰囲気中で熱処理する。熱処理温度は600℃以上焼結温度以下が好ましく、700℃以上1000℃以下が特に好ましい。熱処理時間は0.5~50時間が好ましく、特に1~20時間が好ましい。熱処理後の冷却速度は特に限定されないが、1~20℃/分、特に2~10℃/分が好ましい。焼結体上に配置されたCeは、この拡散熱処理により粒界部を経由して焼結体内部へと浸透していく。このとき、図2に示すように主相粒10の表層部のR’原子がCeで置換され、主相粒10の中心部と外殻部でCe/R’比が異なるコアシェル構造が形成されるとともに、粒界部20にCeを含むR’リッチ相やR’(Fe,Co)2相が形成され、HcJが増大する。 The sintered body is heat-treated in a vacuum or in an inert gas atmosphere with Ce placed on the surface. The heat treatment temperature is preferably 600°C or higher and the sintering temperature or lower, and particularly preferably 700°C or higher and 1000°C or lower. The heat treatment time is preferably 0.5 to 50 hours, and particularly preferably 1 to 20 hours. The cooling rate after the heat treatment is not particularly limited, but is preferably 1 to 20°C/min, and particularly preferably 2 to 10°C/min. The Ce placed on the sintered body penetrates into the inside of the sintered body via the grain boundary portion by this diffusion heat treatment. At this time, as shown in FIG. 2, the R' atoms in the surface layer portion of the main phase grain 10 are replaced with Ce, and a core-shell structure with different Ce/R' ratios is formed between the center and outer shell portion of the main phase grain 10, and an R'-rich phase containing Ce or an R'(Fe, Co) 2 phase is formed in the grain boundary portion 20, and HcJ increases.
拡散熱処理された焼結体は、室温保磁力と保磁力の温度特性を向上させるため、二合金法の場合と同様に、さらに300~800℃で0.5~50時間の時効熱処理を施すことが好ましい。 As with the two-alloy method, it is preferable to further subject the diffusion heat-treated sintered body to aging heat treatment at 300 to 800°C for 0.5 to 50 hours in order to improve the room temperature coercivity and the temperature characteristics of the coercivity.
主相粒とR(Fe,Co)2粒界相の間に薄い境界相を形成するために、拡散処理後の焼結体に対して、二合金法の場合と同様の中間熱処理を行ってもよいが、この場合は拡散熱処理と兼ねることで省略することもできる。焼結体組成や粉末粒径、拡散材料などに合わせて最適な熱処理を施すことで、粒界部にRリッチ相とR(Fe,Co)2相が形成され、さらにR(Fe,Co)2相と主相粒との間に薄い境界相が形成される。より好ましい場合には、隣接する主相粒間に二粒子間粒界相が形成され、室温保磁力の増大と保磁力の温度特性向上が図られる。 In order to form a thin boundary phase between the main phase grains and the R(Fe, Co) 2 grain boundary phase, the sintered body after the diffusion treatment may be subjected to an intermediate heat treatment similar to that in the two-alloy method, but in this case, it can be omitted by combining it with the diffusion heat treatment. By performing an optimal heat treatment according to the sintered body composition, powder particle size, diffusion material, etc., an R-rich phase and an R(Fe, Co) 2 phase are formed at the grain boundary portion, and further a thin boundary phase is formed between the R(Fe, Co) 2 phase and the main phase grains. In a more preferable case, a two-particle grain boundary phase is formed between adjacent main phase grains, and the room temperature coercivity and the temperature characteristic of the coercivity are increased.
また、さらなる磁気特性向上のため、この焼結体の表面に、別途またはCeと同時に、DyやTbを設置して拡散熱処理を施してもよい。 To further improve the magnetic properties, Dy or Tb may be placed on the surface of the sintered body, either separately or simultaneously with Ce, and a diffusion heat treatment may be performed.
このようにして作製された本発明の異方性希土類焼結磁石は、室温で少なくとも12kG以上の残留磁束密度Brと、10kOe以上の保磁力HcJを示す。また保磁力の温度係数βは、β≧(0.01×HcJ(室温)-0.720)%/Kなる特性を示す。ここでβ=ΔHcJ/ΔT×100/HcJ(室温)、(ΔHcJ=HcJ(室温)-HcJ(140℃)、ΔT=室温-140(℃))とする。β≧(0.01×HcJ(室温)-0.7)%/Kであればさらに好ましい。本発明の異方性希土類焼結磁石は、Ceを含まないNd-Fe-B焼結磁石に比べて保磁力の温度変化が小さく、高温での使用に適している。 The anisotropic rare earth sintered magnet of the present invention thus produced exhibits a residual magnetic flux density B r of at least 12 kG or more at room temperature, and a coercive force H cJ of at least 10 kOe. The temperature coefficient β of the coercive force exhibits the following characteristic: β≧(0.01×H cJ(room temperature) −0.720)%/K, where β=ΔH cJ /ΔT×100/H cJ(room temperature) , (ΔH cJ =H cJ(room temperature) −H cJ(140° C.) , ΔT=room temperature−140(° C.)). It is even more preferable if β≧(0.01×H cJ(room temperature) −0.7)%/K. The anisotropic rare earth sintered magnet of the present invention exhibits a smaller change in coercive force with temperature than a Ce-free Nd—Fe—B sintered magnet, making it suitable for use at high temperatures.
以下、実施例及び比較例を示し、本発明を具体的に説明するが、本発明は以下の実施例に限定されるものではない。 The present invention will be specifically explained below with examples and comparative examples, but the present invention is not limited to the following examples.
[実施例1]
Ndメタル、Prメタル、電解鉄、Coメタル、フェロボロン、Alメタル、Cuメタルを用いて、組成がNd10.6原子%、Pr2.7原子%、Co1.0原子%、B6.0原子%、Al0.5原子%、Cu0.1原子%、残部Feとなるよう調整し、高周波誘導炉を用いてArガス雰囲気中で溶解後、周速2m/secで回転する水冷Cuロール上でストリップキャストすることにより、厚さ0.2~0.4mm程度の合金薄帯を作製した。この合金の断面を研磨してエッチング処理後、レーザー顕微鏡(オリンパス株式会社製、LEXT OLS4000)にて組織観察を行った。観察した箇所は薄帯が冷却ロールに接触した面から約0.15mmの位置とし、20箇所の観察を行った。各画像についてロール接触面に平行な線を等間隔に20本引き、これらの線がエッチングで除去された粒界相部と交わる交点を数えて、平均の粒界相間隔を算出したところ、4.7μmであった。この合金に常温で水素吸蔵処理を行った後、真空中400℃で加熱する脱水素化処理を施して粗粉末とした(これを実1A粉末とする)。次に、Ceメタルと電解鉄を原料とし、高周波誘導炉を用いて組成がCe33原子%、残部Feとなるよう調整した合金インゴットを製造し、870℃で20時間熱処理した後、機械粉砕により粗粉末とした(実1B粉末とする)。実1A粉末と実1B粉末を重量比93:7で混合した後、窒素気流中のジェットミルで粉砕して、平均粒径3.1μmの微粉末とした。次に、微粉末を不活性ガス雰囲気中で成形装置の金型に充填し、15kOe(=1.19MA/m)の磁界中で配向させながら、磁界に対して垂直方向に0.6Ton/cm2の圧力で加圧成形した。得られた圧粉成形体を真空中1040℃で3時間焼結した後、室温まで冷却して一旦取り出し、さらに510℃で2時間の熱処理を施して、実施例1の焼結体サンプルを得た。
[Example 1]
Using Nd metal, Pr metal, electrolytic iron, Co metal, ferroboron, Al metal, and Cu metal, the composition was adjusted to Nd 10.6 atomic %, Pr 2.7 atomic %, Co 1.0 atomic %, B 6.0 atomic %, Al 0.5 atomic %, Cu 0.1 atomic %, and the balance Fe, and after melting in an Ar gas atmosphere using a high-frequency induction furnace, strip casting was performed on a water-cooled Cu roll rotating at a peripheral speed of 2 m/sec to produce an alloy ribbon with a thickness of about 0.2 to 0.4 mm. The cross section of this alloy was polished and etched, and then the structure was observed with a laser microscope (Olympus Corporation, LEXT OLS4000). The observation points were located at a position about 0.15 mm from the surface where the ribbon contacted the cooling roll, and 20 observation points were observed. For each image, 20 lines parallel to the roll contact surface were drawn at equal intervals, and the intersections of these lines with the grain boundary phase portion removed by etching were counted to calculate the average grain boundary phase interval, which was 4.7 μm. This alloy was subjected to hydrogen absorption treatment at room temperature, and then subjected to dehydrogenation treatment by heating in a vacuum at 400 ° C. to obtain a coarse powder (this is referred to as the actual 1A powder). Next, an alloy ingot was manufactured using Ce metal and electrolytic iron as raw materials, with a composition adjusted to 33 atomic % Ce and the remainder Fe using a high-frequency induction furnace, and was heat-treated at 870 ° C. for 20 hours, and then mechanically pulverized to obtain a coarse powder (referred to as the actual 1B powder). The actual 1A powder and the actual 1B powder were mixed in a weight ratio of 93:7, and then pulverized with a jet mill in a nitrogen stream to obtain a fine powder with an average particle size of 3.1 μm. Next, the fine powder was filled into a mold of a molding machine in an inert gas atmosphere, and while being oriented in a magnetic field of 15 kOe (=1.19 MA/m), it was pressure-molded in a direction perpendicular to the magnetic field at a pressure of 0.6 Ton/ cm2 . The obtained powder compact was sintered in a vacuum at 1040°C for 3 hours, then cooled to room temperature, taken out, and further subjected to a heat treatment at 510°C for 2 hours to obtain a sintered body sample of Example 1.
得られた焼結体サンプルを、高周波誘導結合プラズマ発光分光分析装置(株式会社日立ハイテクサイエンス製、SPS3520UV-DD)を使用して高周波誘導結合プラズマ発光分光分析法(ICP‐OES)で分析した結果、組成はNd9.9Pr2.5Ce1.8Febal.Co1.0B5.6Al0.5Cu0.1であった。サンプルの一部を粉砕した粉末のX線回折測定から、主相の結晶構造はNd2Fe14B型であることを確認した。EPMA装置(日本電子株式会社製、JXA-8500F)を用いて焼結体の組織観察と各相の組成分析を行ったところ、主相粒の中心部と外殻部で組成が異なるコア/シェル構造が形成されていた。コアに相当する中心部のR’にはCeが含まれておらず、粒外殻部のR’はCeを含んでいた。また、粒界部にはR’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在することを確認した。各相の体積比率は、反射電子像の画像における面積比に等しいものとして算出している。α-Fe相やR’2(Fe,Co,M)17相は観察されなかった。なお酸化物などの相も存在するため、相比の合計は100%に満たない。R’(Fe,Co)2相の分析値をもとに同じ組成の合金をアーク溶解で作製し800℃10hrの均質化処理後、VSMで磁化-温度測定を行ったところ、キュリー温度Tcは66℃であった。 The obtained sintered body sample was analyzed by inductively coupled plasma optical emission spectroscopy (ICP-OES) using a high-frequency inductively coupled plasma optical emission spectroscopy analyzer (Hitachi High-Tech Science Corporation, SPS3520UV-DD), and the composition was Nd 9.9 Pr 2.5 Ce 1.8 Fe bal. Co 1.0 B 5.6 Al 0.5 Cu 0.1 . From the X-ray diffraction measurement of the powder obtained by pulverizing a part of the sample, it was confirmed that the crystal structure of the main phase was Nd 2 Fe 14 B type. When the structure of the sintered body and the composition analysis of each phase were performed using an EPMA device (JXA-8500F, manufactured by JEOL Ltd.), a core / shell structure with different compositions was formed in the center and outer shell of the main phase grain. Ce was not contained in R' in the center corresponding to the core, and Ce was contained in R' in the outer shell of the grain. It was also confirmed that the grain boundary portion contained 1 volume % or more of each of the R'-rich phase and the R'(Fe, Co) 2 phase. The volume ratio of each phase was calculated as being equal to the area ratio in the backscattered electron image. The α-Fe phase and the R' 2 (Fe, Co, M) 17 phase were not observed. The total phase ratio was less than 100% because oxides and other phases were also present. Based on the analysis value of the R'(Fe, Co) 2 phase, an alloy of the same composition was prepared by arc melting and homogenized at 800°C for 10 hours, and then magnetization-temperature measurements were performed using a VSM, revealing that the Curie temperature Tc was 66°C.
この焼結体サンプルに、エッチングを行って観察した結果から上述のように算出した主相の平均結晶粒径は、4.3μmであった。磁気特性をB-Hトレーサで測定したところ、室温でBr14.0kG、HcJ13.6kOeの値を示した。またHcJの温度係数βは-0.575%/Kであった。表1に、焼結体のICP組成分析値、平均結晶粒径、主相の結晶構造を示す。また表2に、焼結熱処理と時効熱処理の条件、B-Hトレーサで測定した磁気特性の結果を、表3にEPMAで測定した各相の組成分析値を示す。 The average crystal grain size of the main phase, calculated as described above from the results of etching and observing the sintered body sample, was 4.3 μm. When the magnetic properties were measured with a B-H tracer, the values of B r 14.0 kG and H cJ 13.6 kOe were obtained at room temperature. The temperature coefficient β of H cJ was -0.575%/K. Table 1 shows the ICP compositional analysis values of the sintered body, the average crystal grain size, and the crystal structure of the main phase. Table 2 shows the conditions of the sintering heat treatment and the aging heat treatment, and the results of the magnetic properties measured with the B-H tracer, and Table 3 shows the compositional analysis values of each phase measured with an EPMA.
[比較例1]
Ndメタル、Prメタル、Ceメタル、電解鉄、Coメタル、フェロボロン、Alメタル、Cuメタルを用いて組成を調整し、ストリップキャスト合金薄帯を作製した。この合金の断面画像から算出した平均の粒界相間隔は4.4μmであった。この合金に、水素吸蔵処理及び真空中400℃で加熱する脱水素化処理を施して粗粉末とした後、窒素気流中のジェットミルで粉砕して平均粒径3.1μmの微粉末とした。磁界中加圧成形により圧粉成形体とした後、真空中1040℃で3時間の焼結を行い、室温まで冷却して一旦取り出し、さらに510℃で2時間の熱処理を施して、比較例1の焼結体サンプルを得た。
[Comparative Example 1]
The composition was adjusted using Nd metal, Pr metal, Ce metal, electrolytic iron, Co metal, ferroboron, Al metal, and Cu metal to prepare a strip cast alloy ribbon. The average grain boundary phase interval calculated from the cross-sectional image of this alloy was 4.4 μm. This alloy was subjected to hydrogen absorption treatment and dehydrogenation treatment by heating at 400 ° C in a vacuum to obtain a coarse powder, and then pulverized with a jet mill in a nitrogen gas flow to obtain a fine powder with an average particle size of 3.1 μm. After being made into a powder compact by pressure molding in a magnetic field, it was sintered in a vacuum at 1040 ° C for 3 hours, cooled to room temperature, taken out, and further subjected to heat treatment at 510 ° C for 2 hours to obtain a sintered body sample of Comparative Example 1.
ICP分析より、比較例1の焼結体組成はNd10.0Pr2.6Ce1.8Febal.Co1.0B5.6Al0.4Cu0.1であった。主相はNd2Fe14B型結晶構造であることをX線回折で確認した。EPMA装置で組織観察と各相の組成分析を行ったところ、主相粒内の組成はほぼ均一であり、中心部と外殻部でCe濃度に差はなかった。また、粒界部にR’リッチ相は存在していたが、R’(Fe,Co)2相は確認できなかった。主相の平均結晶粒径は、4.0μmであった。B-Hトレーサで測定した磁気特性は、室温でBr13.7kG、HcJ9.8kOeであり、HcJの温度係数βは-0.641%/Kであった。結果を表1~3に示す。 From the ICP analysis, the composition of the sintered body of Comparative Example 1 was Nd 10.0 Pr 2.6 Ce 1.8 Fe bal. Co 1.0 B 5.6 Al 0.4 Cu 0.1 . The main phase was confirmed to have a Nd 2 Fe 14 B type crystal structure by X-ray diffraction. When the structure observation and composition analysis of each phase were performed with an EPMA device, the composition in the main phase grain was almost uniform, and there was no difference in Ce concentration between the center and the outer shell. In addition, an R'-rich phase was present in the grain boundary, but the R'(Fe, Co) 2 phase could not be confirmed. The average crystal grain size of the main phase was 4.0 μm. The magnetic properties measured with a B-H tracer were B r 13.7 kG, H cJ 9.8 kOe at room temperature, and the temperature coefficient β of H cJ was -0.641%/K. The results are shown in Tables 1 to 3.
[実施例2、比較例2]
実施例2では、実施例1と同様に、組成がNd12.8原子%、Co1.0原子%、B5.9原子%、Al0.2原子%、Zr0.05原子%、残部Feで、厚さ0.2~0.4mm程度、平均の粒界相間隔3.9μmのストリップキャスト合金薄帯を作製し、水素吸蔵処理及び脱水素化処理を施して粗粉末(実2A粉末)とした。一方、組成がCe80原子%、Cu10原子%、残部Feとなるよう調整した合金を、高周波誘導炉を用いて石英管内で溶解し、周速23m/secで回転するCuロール上に噴射して、厚さ100~250μm程度の急冷合金薄帯を作製した。この合金薄帯をボールミル粉砕により粗粉末(実2B粉末)とした。実2A粉末と実2B粉末を重量比96:4で混合した後、窒素気流中のジェットミルで粉砕して、平均粒径2.8μmの微粉末とした。磁界中加圧成形により圧粉成形体とした後、真空中で1020℃2時間の焼結を行い、室温まで冷却して一旦取り出し、さらに530℃で4時間の熱処理を施して、実施例2の焼結体サンプルを得た。
[Example 2, Comparative Example 2]
In Example 2, similarly to Example 1, a strip cast alloy ribbon having a composition of Nd 12.8 atomic %, Co 1.0 atomic %, B 5.9 atomic %, Al 0.2 atomic %, Zr 0.05 atomic %, and the balance Fe, with a thickness of about 0.2 to 0.4 mm and an average grain boundary phase interval of 3.9 μm was prepared, and subjected to hydrogen absorption treatment and dehydrogenation treatment to obtain a coarse powder (actual 2A powder). On the other hand, an alloy adjusted to have a composition of Ce 80 atomic %, Cu 10 atomic %, and the balance Fe was melted in a quartz tube using a high-frequency induction furnace, and sprayed onto a Cu roll rotating at a peripheral speed of 23 m/sec to produce a quenched alloy ribbon having a thickness of about 100 to 250 μm. This alloy ribbon was crushed into a coarse powder (actual 2B powder) by ball milling. The powders of Example 2A and Example 2B were mixed in a weight ratio of 96:4, and then pulverized in a jet mill in a nitrogen gas flow to obtain fine powder with an average particle size of 2.8 μm. The powder was then pressed in a magnetic field to obtain a green compact, which was then sintered in a vacuum at 1020° C. for 2 hours, cooled to room temperature, removed, and further heat-treated at 530° C. for 4 hours to obtain a sintered sample of Example 2.
比較例2では、組成がNd7.8原子%、Ce5.0原子%、Co1.0原子%、B5.9原子%、Al0.2原子%、Zr0.05原子%、残部Feで、厚さ0.2~0.4mm程度、平均の粒界相間隔4.2μmのストリップキャスト合金薄帯を作製し、水素吸蔵処理及び脱水素化処理を施して粗粉末(比2A粉末)とした。一方、組成がNd80原子%、Cu10原子%、残部Feとなるよう調整した合金を、高周波誘導炉を用いて石英管内で溶解し、周速22m/secで回転するCuロール上に噴射して、厚さ100~250μm程度の急冷合金薄帯を作製した。この合金薄帯をボールミル粉砕により粗粉末(比2B粉末)とした。比2A粉末と比2B粉末を重量比96:4で混合した後、窒素気流中のジェットミルで粉砕して、平均粒径2.8μmの微粉末とした。磁界中加圧成形により圧粉成形体とした後、真空中で1020℃2時間の焼結を行い、室温まで冷却して一旦取り出し、さらに530℃で4時間の熱処理を施して、比較例2の焼結体サンプルを得た。 In Comparative Example 2, a strip cast alloy ribbon with a composition of Nd 7.8 atomic %, Ce 5.0 atomic %, Co 1.0 atomic %, B 5.9 atomic %, Al 0.2 atomic %, Zr 0.05 atomic %, and the remainder Fe, was prepared with a thickness of about 0.2 to 0.4 mm and an average grain boundary phase spacing of 4.2 μm, and was subjected to hydrogen absorption and dehydrogenation treatment to obtain a coarse powder (ratio 2A powder). On the other hand, an alloy adjusted to a composition of Nd 80 atomic %, Cu 10 atomic %, and the remainder Fe was melted in a quartz tube using a high-frequency induction furnace and sprayed onto a Cu roll rotating at a peripheral speed of 22 m/sec to produce a quenched alloy ribbon with a thickness of about 100 to 250 μm. This alloy ribbon was crushed into a coarse powder (ratio 2B powder) by ball milling. The powders of ratio 2A and ratio 2B were mixed in a weight ratio of 96:4, then pulverized in a jet mill in a nitrogen stream to obtain fine powder with an average particle size of 2.8 μm. After being pressed in a magnetic field to produce a powder compact, the compact was sintered in a vacuum at 1020°C for 2 hours, cooled to room temperature, removed, and further heat-treated at 530°C for 4 hours to obtain a sintered sample of Comparative Example 2.
実施例2及び比較例2の焼結体組成は、ICP分析で各々Nd12.4Ce1.7Febal.Co1.0B5.7Al0.1Cu0.2Zr0.1及びNd9.2Ce4.9Febal.Co0.9B5.8Al0.1Cu0.2Zr0.1であった。組織観察したところ、実施例2は、中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在しており、また粒界部にはR’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在していた。R’(Fe,Co)2相の分析値をもとにアーク溶解で作製した同組成の合金のTcは74℃であった。一方、比較例2は主相粒の中心部、外殻部ともにCeを含んでおり、Ce/R’比は粒中心部の方が粒外殻部より高かった。また、粒界部にはR’(Fe,Co)2相とR’Cu2相が形成されており、R’リッチ相は確認できなかった。主相の平均結晶粒径は、実施例2が3.8μm、比較例2が3.6μmであった。結果を表1~3に示す。実施例2は室温磁気特性、HcJの温度特性ともに比較例2より良好であった。 The compositions of the sintered bodies of Example 2 and Comparative Example 2 were Nd 12.4 Ce 1.7 Fe bal. Co 1.0 B 5.7 Al 0.1 Cu 0.2 Zr 0.1 and Nd 9.2 Ce 4.9 Fe bal. Co 0.9 B 5.8 Al 0.1 Cu 0.2 Zr 0.1 , respectively, as determined by ICP analysis. When the structure was observed, it was found that in Example 2, the center did not contain Ce, and many main phase grains containing Ce were present in the outer shell of the grains, and the grain boundaries contained 1 volume % or more of R'-rich phase and R'(Fe, Co) 2 phase. The Tc of the alloy of the same composition produced by arc melting based on the analysis value of R'(Fe, Co) 2 phase was 74°C. On the other hand, in Comparative Example 2, both the center and outer shell of the main phase grains contained Ce, and the Ce/R' ratio was higher in the center of the grain than in the outer shell of the grain. In addition, R'(Fe,Co) 2 phase and R'Cu 2 phase were formed in the grain boundary, and no R'-rich phase was observed. The average crystal grain size of the main phase was 3.8 μm in Example 2 and 3.6 μm in Comparative Example 2. The results are shown in Tables 1 to 3. Example 2 was better than Comparative Example 2 in both room temperature magnetic properties and HcJ temperature properties.
[実施例3~5]
実施例3は、組成がNd13.0原子%、B6.1原子%、残部Feとなるよう調整したストリップキャスト合金と、組成がCe70原子%、La5原子%、Ni6原子%、残部Alとなるよう調整しアーク溶解した合金を作製し、実施例1と同様に粗粉末として重量比94:6で混合した。ジェットミル粉砕、磁界中加圧成形で作製した圧粉成形体を、1010℃の真空中で3時間焼結した。その後、480℃で1時間の時効熱処理を行って焼結体サンプルとした。
[Examples 3 to 5]
In Example 3, a strip cast alloy adjusted to have a composition of 13.0 atomic % Nd, 6.1 atomic % B, and the balance Fe, and an alloy adjusted to have a composition of 70 atomic % Ce, 5 atomic % La, 6 atomic % Ni, and the balance Al, were prepared by arc melting, and mixed in a weight ratio of 94:6 as coarse powders as in Example 1. A powder compact produced by jet mill pulverization and pressure molding in a magnetic field was sintered in a vacuum at 1010°C for 3 hours. Then, an aging heat treatment was performed at 480°C for 1 hour to obtain a sintered sample.
実施例4は、組成がNd12.8原子%、B6.0原子%、Al0.5原子%、Cr0.2原子%、Ti0.3原子%、残部Feとなるよう調整したストリップキャスト合金と、組成がCe28原子%、Gd7原子%、Co30原子%、残部Feとなるよう調整した鋳造合金を作製し、実施例1と同様に粗粉末として重量比90:10で混合した。ジェットミル粉砕、磁界中加圧成形で作製した圧粉成形体を、1030℃の真空中で1.5時間焼結した。得られた焼結体を900℃で1時間熱処理し、冷却速度3.8℃/分で500℃以下まで冷却した後、600℃で3時間の時効熱処理を行って焼結体サンプルとした。 In Example 4, a strip cast alloy with a composition of Nd 12.8 atomic %, B 6.0 atomic %, Al 0.5 atomic %, Cr 0.2 atomic %, Ti 0.3 atomic %, and the balance Fe was prepared, and a cast alloy with a composition of Ce 28 atomic %, Gd 7 atomic %, Co 30 atomic %, and the balance Fe was prepared, and mixed in a weight ratio of 90:10 as coarse powder as in Example 1. The powder compact produced by jet mill crushing and pressure molding in a magnetic field was sintered in a vacuum at 1030°C for 1.5 hours. The obtained sintered body was heat treated at 900°C for 1 hour, cooled to 500°C or less at a cooling rate of 3.8°C/min, and then aged at 600°C for 3 hours to obtain a sintered body sample.
実施例5は、組成がNd13.0原子%、B6.0原子%、残部Feとなるよう調整したストリップキャスト合金と、組成がCe56原子%、Y9原子%、Si10原子%、Ga8原子%、残部Coとなるよう調整しアーク溶解した合金を作製し、実施例1と同様に粗粉末として重量比95:5で混合した。ジェットミル粉砕、磁界中加圧成形で作製した圧粉成形体を、1060℃の真空中で2時間焼結した。得られた焼結体を960℃で2時間熱処理し、冷却速度4.5℃/分で500℃以下まで冷却した後、680℃で3時間の時効熱処理を行って焼結体サンプルとした。 In Example 5, a strip cast alloy adjusted to have a composition of 13.0 atomic % Nd, 6.0 atomic % B, and the balance Fe, and an arc-melted alloy adjusted to have a composition of 56 atomic % Ce, 9 atomic % Y, 10 atomic % Si, 8 atomic % Ga, and the balance Co were prepared and mixed in a weight ratio of 95:5 as coarse powders as in Example 1. The powder compacts prepared by jet mill crushing and pressure molding in a magnetic field were sintered in a vacuum at 1060°C for 2 hours. The obtained sintered bodies were heat-treated at 960°C for 2 hours, cooled to below 500°C at a cooling rate of 4.5°C/min, and then aged at 680°C for 3 hours to obtain sintered body samples.
実施例3~5の結果を表1~3に示す。いずれの焼結体組織も、粒中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在しており、粒界部にはR’リッチ相とR’(Fe,Co)2相が合計で1体積%以上存在していた。また、磁気特性はいずれも室温のHcJが10kOe以上、HcJの温度係数βが(0.01×HcJ(室温)-0.720)%/K 以上であり、良好な磁気特性を示した。 The results of Examples 3 to 5 are shown in Tables 1 to 3. In all of the sintered body structures, the grain center did not contain Ce, and many main phase grains containing Ce were present in the grain outer shell, and the grain boundary portion contained an R'-rich phase and an R'(Fe, Co) 2 phase in a total amount of 1 volume % or more. In addition, the magnetic properties were good, with HcJ at room temperature being 10 kOe or more and the temperature coefficient β of HcJ being (0.01 x HcJ (room temperature) - 0.720) %/K or more.
[実施例6、比較例3]
Ndメタル、電解鉄、Coメタル、フェロボロン、Alメタルを用いて組成を調整し、ストリップキャスト合金薄帯を作製した。この合金の断面画像から算出した平均の粒界相間隔は4.8μmであった。この合金に、水素吸蔵処理及び真空中400℃で加熱する脱水素化処理を施して粗粉末とし、窒素気流中のジェットミルで粉砕して平均粒径3.5μmの微粉末とした。磁界中加圧成形により圧粉成形体として、真空中1040℃で3時間の焼結を行った。さらに、得られた焼結体を切削加工して10×10×3mmのサイズとした。
次に、Ceメタル、Dyメタル、電解鉄、Coメタル、Cuメタルを原料とし、高周波誘導炉を用いて組成がCe25原子%、Dy8原子%、Co30原子%、Cu10原子%、残部Feとなるよう調整した合金インゴットを製造し、420℃で20時間熱処理した後、ボールミルで粉砕して平均粒径14.6μmの粉末とした。この粉末とエタノールを重量比で1:1の割合で混合・攪拌した液中に、上記の焼結体を浸して引き上げ、送風で乾燥して、焼結体表面への粉末塗布を行った。この試料に真空中で870℃、10時間の拡散熱処理を施してから冷却速度5℃/分で500℃以下まで冷却し、さらにArガス雰囲気中560℃で2時間の時効熱処理を施して、実施例6の焼結体サンプルとした。一方、上記の粉末塗布と拡散熱処理を行わず、Arガス雰囲気中560℃で2時間の時効熱処理のみ施したものを、比較例3の焼結体サンプルとした。
[Example 6, Comparative Example 3]
The composition was adjusted using Nd metal, electrolytic iron, Co metal, ferroboron, and Al metal to produce a strip cast alloy ribbon. The average grain boundary phase spacing calculated from the cross-sectional image of this alloy was 4.8 μm. This alloy was subjected to hydrogen absorption treatment and dehydrogenation treatment by heating at 400 ° C in a vacuum to obtain a coarse powder, which was then pulverized with a jet mill in a nitrogen gas flow to obtain a fine powder with an average particle size of 3.5 μm. A powder compact was formed by pressure molding in a magnetic field, and sintered in a vacuum at 1040 ° C for 3 hours. The obtained sintered body was then cut to a size of 10 × 10 × 3 mm.
Next, an alloy ingot was manufactured using Ce metal, Dy metal, electrolytic iron, Co metal, and Cu metal as raw materials, and the composition was adjusted to Ce 25 atomic %, Dy 8 atomic %, Co 30 atomic %, Cu 10 atomic %, and the balance Fe using a high-frequency induction furnace. After heat treatment at 420 ° C for 20 hours, it was pulverized in a ball mill to obtain a powder with an average particle size of 14.6 μm. The above sintered body was immersed in a liquid in which this powder and ethanol were mixed and stirred at a weight ratio of 1:1, pulled up, dried by blowing air, and powder coating was performed on the surface of the sintered body. This sample was subjected to a diffusion heat treatment at 870 ° C for 10 hours in a vacuum, and then cooled to 500 ° C or less at a cooling rate of 5 ° C / min, and further subjected to an aging heat treatment at 560 ° C for 2 hours in an Ar gas atmosphere to obtain a sintered body sample of Example 6. On the other hand, a sintered body sample of Comparative Example 3 was prepared by subjecting the above powder coating and diffusion heat treatment to only aging heat treatment at 560° C. for 2 hours in an Ar gas atmosphere.
ICP分析より、実施例6、比較例3の焼結体組成は、各々Nd13.6Dy0.1Ce0.6Febal.Co1.2B5.8Al0.2Cu0.1,Nd14.0Febal.Co0.4B6.0Al0.1であった。焼結体表面から500μm深さ位置でのEPMA組織観察より、実施例6では、中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在しており、また粒界部にはR’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在していた。R’(Fe,Co)2相の分析値をもとにアーク溶解で作製した同組成の合金のTcは131℃であった。一方、比較例3はCeを含まず、粒界部にはR’リッチ相が存在していたが、R’(Fe,Co)2相は確認できなかった。主相の平均結晶粒径は、実施例6、比較例3いずれも4.6μmであった。結果を表1、2及び4に示す。実施例6は、比較例3よりも良好なHcJの温度特性を示した。 From the ICP analysis, the compositions of the sintered bodies of Example 6 and Comparative Example 3 were Nd 13.6 Dy 0.1 Ce 0.6 Fe bal. Co 1.2 B 5.8 Al 0.2 Cu 0.1 and Nd 14.0 Fe bal. Co 0.4 B 6.0 Al 0.1 , respectively. From the EPMA structure observation at a depth of 500 μm from the surface of the sintered body, in Example 6, the center did not contain Ce, and many main phase grains containing Ce were present in the outer shell of the grains, and the R'-rich phase and the R'(Fe, Co) 2 phase were each present at 1 vol % or more in the grain boundary. The Tc of the alloy of the same composition produced by arc melting based on the analysis value of the R'(Fe, Co) 2 phase was 131 ° C. On the other hand, Comparative Example 3 did not contain Ce, and an R'-rich phase was present in the grain boundary, but no R'(Fe, Co) 2 phase was observed. The average crystal grain size of the main phase was 4.6 μm in both Example 6 and Comparative Example 3. The results are shown in Tables 1, 2, and 4. Example 6 showed better HcJ temperature characteristics than Comparative Example 3.
[実施例7~9]
実施例7では、Ndメタル、Prメタル、電解鉄、Coメタル、フェロボロン、Alメタル、純シリコン、Nbメタルを用いて、組成がNd11.6原子%、Pr2.9原子%、B5.7原子%、Co1.0原子%、Al0.3原子%、Si0.3原子%、Nb0.5原子%、残部Feとなるよう調整し、ストリップキャスト合金薄帯を作製した。この合金の断面画像から算出した平均の粒界相間隔は4.4μmであった。この合金に、水素吸蔵処理及び真空中400℃で加熱する脱水素化処理を施して粗粉末とし、窒素気流中のジェットミルで粉砕して平均粒径3.1μmの微粉末とした。磁界中加圧成形により圧粉成形体として、真空中1040℃で3時間の焼結を行った。得られた焼結体を切削加工により10×10×3mmのサイズとした。
次に、スパッタリング装置(キャノンアネルバ株式会社製、EB1000)に、直径2インチ、厚み3mmの金属Ceターゲットを設置し、投入電力300W、Ar圧0.5Paでスパッタリングを40分間行って、上記焼結体の10×10mm面の1面にCe膜を成膜した。この試料に真空中800℃、15時間の拡散熱処理を施してから冷却速度5.3℃/分で500℃以下まで冷却し、さらにArガス雰囲気中550℃で1時間の時効熱処理を施して、実施例7の焼結体サンプルとした。
[Examples 7 to 9]
In Example 7, Nd metal, Pr metal, electrolytic iron, Co metal, ferroboron, Al metal, pure silicon, and Nb metal were used to adjust the composition to Nd 11.6 atomic %, Pr 2.9 atomic %, B 5.7 atomic %, Co 1.0 atomic %, Al 0.3 atomic %, Si 0.3 atomic %, Nb 0.5 atomic %, and the remainder Fe, and a strip cast alloy ribbon was produced. The average grain boundary phase spacing calculated from the cross-sectional image of this alloy was 4.4 μm. This alloy was subjected to a hydrogen absorption treatment and a dehydrogenation treatment in which it was heated in a vacuum at 400 ° C. to obtain a coarse powder, which was then pulverized in a jet mill in a nitrogen gas flow to obtain a fine powder with an average particle size of 3.1 μm. The powder was pressed in a magnetic field to obtain a compact, and sintered in a vacuum at 1040 ° C. for 3 hours. The obtained sintered body was cut to a size of 10 × 10 × 3 mm.
Next, a metal Ce target with a diameter of 2 inches and a thickness of 3 mm was placed in a sputtering device (Canon Anelva Corporation, EB1000), and sputtering was performed for 40 minutes with an input power of 300 W and an Ar pressure of 0.5 Pa to form a Ce film on one surface of the 10 × 10 mm surface of the sintered body. This sample was subjected to a diffusion heat treatment at 800 ° C. in a vacuum for 15 hours, and then cooled to 500 ° C. or less at a cooling rate of 5.3 ° C. / min, and further subjected to an aging heat treatment at 550 ° C. in an Ar gas atmosphere for 1 hour to obtain a sintered body sample of Example 7.
実施例8では、組成がNd14.1原子%、B6.0原子%、Al0.5原子%、Cu0.1原子%、残部Feとなるよう調整したストリップキャスト合金を作製し、ストリップキャスト合金薄帯を作製した。この合金の断面画像から算出した平均の粒界相間隔は4.8μm であった。この合金に、水素吸蔵処理及び真空中400℃で加熱する脱水素化処理を施して粗粉末とし、窒素気流中のジェットミルで粉砕して平均粒径3.3μmの微粉末とした。磁界中加圧成形により圧粉成形体として、真空中1030℃で2時間の焼結を行った。得られた焼結体を切削加工により10×10×3mmのサイズとした。
次に、Ce酸化物粉、純水を重量比で3:2の割合で混合・攪拌した液中に、上記の焼結体を浸して引き上げ、送風で乾燥して、焼結体表面への粉末塗布を行った。この試料に真空中880℃、20時間の拡散熱処理を施してから冷却速度4.2℃/分で450℃以下まで冷却し、さらにArガス雰囲気中510℃で2時間の時効熱処理を施して、実施例8の焼結体サンプルとした。
In Example 8, a strip cast alloy was prepared with a composition adjusted to Nd 14.1 atomic %, B 6.0 atomic %, Al 0.5 atomic %, Cu 0.1 atomic %, and the balance Fe, and a strip cast alloy ribbon was prepared. The average grain boundary phase spacing calculated from the cross-sectional image of this alloy was 4.8 μm. This alloy was subjected to hydrogen absorption treatment and dehydrogenation treatment by heating at 400 ° C in a vacuum to obtain a coarse powder, which was then pulverized with a jet mill in a nitrogen gas flow to obtain a fine powder with an average particle size of 3.3 μm. A powder compact was formed by pressure molding in a magnetic field, and sintered in a vacuum at 1030 ° C for 2 hours. The obtained sintered body was cut to a size of 10 × 10 × 3 mm.
Next, the sintered body was immersed in a liquid in which Ce oxide powder and pure water were mixed and stirred in a weight ratio of 3:2, pulled out, dried by blowing air, and the powder was applied to the surface of the sintered body. This sample was subjected to a diffusion heat treatment at 880°C in a vacuum for 20 hours, cooled to 450°C or less at a cooling rate of 4.2°C/min, and further subjected to an aging heat treatment at 510°C for 2 hours in an Ar gas atmosphere to obtain a sintered body sample of Example 8.
実施例9では、組成がNd14.5原子%、Co1.0原子%、B6.2原子%、Al0.2原子%、Cu0.1原子%、Zr0.05原子%、残部Feとなるよう調整したストリップキャスト合金と、組成がCe30原子%、Co35原子%、残部Feとなるよう調整しアーク溶解した合金を作製し、実施例1と同様に粗粉末として重量比95:5で混合し、窒素気流中のジェットミルで粉砕して平均粒径3.7μmの微粉末とした。磁界中加圧成形により圧粉成形体として、真空中1020℃で3時間の焼結を行った。得られた焼結体を切削加工により10×10×3mmのサイズとした。
次に、Tb酸化物粉、純水を重量比で1:1の割合で混合・攪拌した液中に、上記の焼結体を浸して引き上げ、送風で乾燥して、焼結体表面への粉末塗布を行った。この試料に真空中830℃、20時間の拡散熱処理を施してから冷却速度5℃/分で500℃以下まで冷却し、さらにArガス雰囲気中530℃で1.5時間の時効熱処理を施して、実施例9の焼結体サンプルとした。
In Example 9, a strip cast alloy adjusted to have a composition of Nd 14.5 atomic %, Co 1.0 atomic %, B 6.2 atomic %, Al 0.2 atomic %, Cu 0.1 atomic %, Zr 0.05 atomic %, and the balance Fe, and an alloy adjusted to have a composition of Ce 30 atomic %, Co 35 atomic %, and the balance Fe and arc melted were prepared, and mixed as in Example 1 in a weight ratio of 95:5 as coarse powder, and pulverized in a jet mill in a nitrogen gas flow to obtain a fine powder with an average particle size of 3.7 μm. A powder compact was formed by pressure molding in a magnetic field, and sintered in a vacuum at 1020 ° C for 3 hours. The obtained sintered body was cut to a size of 10 × 10 × 3 mm.
Next, the above sintered body was immersed in a liquid in which Tb oxide powder and pure water were mixed and stirred in a weight ratio of 1:1, pulled out, dried by blowing air, and the powder was applied to the surface of the sintered body. This sample was subjected to a diffusion heat treatment at 830°C in a vacuum for 20 hours, cooled to 500°C or less at a cooling rate of 5°C/min, and further subjected to an aging heat treatment at 530°C in an Ar gas atmosphere for 1.5 hours to obtain a sintered body sample of Example 9.
実施例7~9の結果を表1、2及び4に示す。いずれの焼結体組織も、中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在しており、粒界部にはR’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在していた。また、磁気特性はいずれも室温のHcJが10kOe以上、HcJの温度係数βが(0.01×HcJ(室温)-0.720)%/K 以上であり、良好な磁気特性を示した。 The results of Examples 7 to 9 are shown in Tables 1, 2, and 4. In all of the sintered body structures, the center did not contain Ce, and many main phase grains containing Ce were present in the outer shell of the grains, and an R'-rich phase and an R'(Fe, Co) 2 phase were each present at 1 volume % or more in the grain boundaries. In addition, the magnetic properties were good, with HcJ at room temperature being 10 kOe or more and the temperature coefficient β of HcJ being (0.01 x HcJ (room temperature) - 0.720) %/K or more.
[実施例10、比較例4]
組成がNd13.5原子%、B6.0原子%、Al0.5原子%、Cu0.2原子%、残部Feで、厚さ0.2~0.4mm程度、平均の粒界相間隔4.1μmのストリップキャスト合金薄帯を作製し、水素吸蔵処理及び脱水素化処理を施して粗粉末(実10A粉末)とした。次に、アーク溶解炉を用いて組成がCe35原子%、Co10原子%、残部Feとなるよう調整した合金を作製し、850℃で15時間熱処理した後、機械粉砕により粗粉末(実10B粉末)とした。実10A粉末と実10B粉末を重量比92:8で混合した後、窒素気流中のジェットミルで粉砕して、平均粒径3.6μmの微粉末とした。磁界中加圧成形により圧粉成形体とした後、真空中で1000℃2時間の焼結を行い、室温まで冷却して一旦取り出し、さらに500℃で3時間の熱処理を施して、実施例10の焼結体サンプルを得た。
一方、焼結までの工程を実施例10と同様に作製したサンプルに、980℃で1時間の熱処理を施し、その後Ar雰囲気中で冷却したものを、比較例4とした。
[Example 10, Comparative Example 4]
A strip cast alloy ribbon having a composition of Nd 13.5 atomic %, B 6.0 atomic %, Al 0.5 atomic %, Cu 0.2 atomic %, and the balance Fe, with a thickness of about 0.2 to 0.4 mm and an average grain boundary phase interval of 4.1 μm was produced, and subjected to hydrogen absorption treatment and dehydrogenation treatment to obtain a coarse powder (actual 10A powder). Next, an alloy having a composition adjusted to Ce 35 atomic %, Co 10 atomic %, and the balance Fe was produced using an arc melting furnace, and after heat treatment at 850 ° C. for 15 hours, it was mechanically pulverized to obtain a coarse powder (actual 10B powder). The actual 10A powder and the actual 10B powder were mixed in a weight ratio of 92:8, and then pulverized with a jet mill in a nitrogen stream to obtain a fine powder with an average particle size of 3.6 μm. After being pressure-molded in a magnetic field to produce a green compact, the green compact was sintered in a vacuum at 1000°C for 2 hours, cooled to room temperature, removed, and further heat-treated at 500°C for 3 hours to obtain a sintered compact sample of Example 10.
On the other hand, a sample prepared in the same manner as in Example 10 up to the sintering step was subjected to a heat treatment at 980° C. for 1 hour and then cooled in an Ar atmosphere to prepare Comparative Example 4.
ICP分析より、実施例10及び比較例4の焼結体組成はNd12.5Ce2.1Febal.Co0.7B5.8Al0.4Cu0.1であった。EPMA組織観察では、どちらも中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在していた。実施例10では、粒界部にR’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在していた。R’(Fe,Co)2相の分析値をもとにアーク溶解で作製した同組成の合金のTcは70℃であった。一方、比較例4は、粒界部にR’リッチ相が存在していたが、R’(Fe,Co)2相は確認できなかった。主相の平均結晶粒径は、実施例10、比較例4いずれも4.9μmであった。結果を表1、2及び4に示す。実施例10は、比較例4よりも室温HcJが高く、HcJの温度特性も良好であった。 From the ICP analysis, the sintered body composition of Example 10 and Comparative Example 4 was Nd 12.5 Ce 2.1 Fe bal. Co 0.7 B 5.8 Al 0.4 Cu 0.1 . From the EPMA structure observation, both did not contain Ce in the center, and many main phase grains containing Ce were present in the outer shell of the grain. In Example 10, the R'-rich phase and the R'(Fe, Co) 2 phase were present at 1 volume % or more in the grain boundary. The T c of the alloy of the same composition prepared by arc melting based on the analysis value of the R'(Fe, Co) 2 phase was 70 ° C. On the other hand, in Comparative Example 4, the R'-rich phase was present in the grain boundary, but the R'(Fe, Co) 2 phase could not be confirmed. The average crystal grain size of the main phase was 4.9 μm in both Example 10 and Comparative Example 4. The results are shown in Tables 1, 2 and 4. Example 10 had a higher room temperature HcJ than Comparative Example 4, and the temperature characteristics of HcJ were also good.
[実施例11]
組成がNd13.5原子%、B5.9原子%、Co1.0原子%、Al0.5原子%、Cu0.2原子%、Zr0.1原子%、残部Feで、厚さ0.2~0.4mm程度、平均の粒界相間隔4.2μmのストリップキャスト合金薄帯を作製し、水素吸蔵処理及び脱水素化処理を施して粗粉末(実11A粉末)とした。次に、アーク溶解炉を用いて組成がCe33.3原子%、Co1.0原子%、残部Feとなるよう調整した合金インゴットを作製し、860℃で18時間熱処理した後、機械粉砕により粗粉末(実11B粉末)とした。実11A粉末と実11B粉末を重量比93:7で混合した後、窒素気流中のジェットミルで粉砕して、平均粒径2.9μmの微粉末とした。磁界中加圧成形により圧粉成形体とした後、真空中で1020℃3時間の焼結を行い、室温まで冷却して一旦取り出した。次に、Ar雰囲気中で900℃1時間の中間熱処理を行い、その後5℃/分の冷却速度で450℃以下まで冷却してから、引き続き510℃で3時間の低温熱処理を行い、実施例11の焼結体サンプルを得た。
[Example 11]
A strip cast alloy ribbon having a composition of Nd13.5 atomic %, B5.9 atomic %, Co1.0 atomic %, Al0.5 atomic %, Cu0.2 atomic %, Zr0.1 atomic %, and the balance Fe, with a thickness of about 0.2 to 0.4 mm and an average grain boundary phase spacing of 4.2 μm was produced, and subjected to hydrogen absorption treatment and dehydrogenation treatment to obtain a coarse powder (actual 11A powder). Next, an alloy ingot adjusted to have a composition of Ce33.3 atomic %, Co1.0 atomic %, and the balance Fe was produced using an arc melting furnace, and after heat treatment at 860 ° C. for 18 hours, it was mechanically pulverized to obtain a coarse powder (actual 11B powder). The actual 11A powder and the actual 11B powder were mixed in a weight ratio of 93:7, and then pulverized with a jet mill in a nitrogen stream to obtain a fine powder with an average particle size of 2.9 μm. After forming a powder compact by pressure molding in a magnetic field, the compact was sintered in a vacuum at 1020°C for 3 hours, cooled to room temperature, and removed. Next, intermediate heat treatment was performed at 900°C for 1 hour in an Ar atmosphere, and then cooled to 450°C or less at a cooling rate of 5°C/min, followed by low-temperature heat treatment at 510°C for 3 hours to obtain a sintered compact sample of Example 11.
この焼結体の組成は、ICP分析よりNd12.7Ce1.8Febal.Co1.1B5.6Al0.5Cu0.1Zr0.1であった。EPMA組織観察では、中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在していた。また、粒界部にR’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在していた。R’(Fe,Co)2相の分析値をもとにアーク溶解で作製した同組成の合金のTcは68℃ であった。主相の平均結晶粒径は、3.9μmであった。結果を表1、2及び5に示す。 The composition of this sintered body was Nd 12.7 Ce 1.8 Fe bal. Co 1.1 B 5.6 Al 0.5 Cu 0.1 Zr 0.1 by ICP analysis. EPMA structure observation showed that there were many main phase grains that did not contain Ce in the center and contained Ce in the outer shell of the grains. In addition, R'-rich phase and R'(Fe, Co) 2 phase were present at 1 volume % or more each in the grain boundary. The T c of an alloy of the same composition prepared by arc melting based on the analysis value of R'(Fe, Co) 2 phase was 68 ° C. The average crystal grain size of the main phase was 3.9 μm. The results are shown in Tables 1, 2 and 5.
FIB-SEM装置(FEI社製Scios)を用いて、実施例11のサンプルから観察用試料を切り出し、STEM装置(日本電子株式会社製JEM-ARM200F)で観察したところ、図5のHAADF像で示すように、粒界部のR’(Fe,Co)2相と主相の間に境界相が形成されていることを確認した。この境界相の厚みは平均で1.4nmであり、EDS分析で測定した境界相の組成はNd22.5Ce13.5Febal.Co3.0Cu1.7であった。一方、隣接するR’(Fe,Co)2相のEDS分析組成はNd14.7Ce19.5Febal.Co2.3Cu0.1であった。これより、この境界相がR’(Fe,Co)2相とは異なる組成を有する相であることがわかる。
同じ試料の別の箇所では、隣接する主相粒の間に平均厚み約2.4nmの二粒子間粒界相が存在しており、その平均組成は、EDS分析値でNd26.8Ce6.9Febal.Co7.4Cu12.5Zr0.5であった。これより、主相とR’(Fe,Co)2相の間に形成された境界相、及び主相粒間の二粒子間粒界相についてCe/R’を算出すると、各々0.37,0.20となり、前者の方が高いCe/R’を示すことがわかる。
Using a FIB-SEM device (Scios manufactured by FEI), a specimen for observation was cut out from the sample of Example 11, and observed with a STEM device (JEM-ARM200F manufactured by JEOL Ltd.). As shown in the HAADF image in FIG. 5, it was confirmed that a boundary phase was formed between the R ' (Fe , Co ) 2 phase at the grain boundary and the main phase. The thickness of this boundary phase was 1.4 nm on average, and the composition of the boundary phase measured by EDS analysis was Nd22.5Ce13.5Febal.Co3.0Cu1.7 . On the other hand, the EDS analysis composition of the adjacent R '(Fe,Co ) 2 phase was Nd14.7Ce19.5Febal.Co2.3Cu0.1 . This shows that this boundary phase is a phase having a different composition from the R'(Fe , Co) 2 phase.
In another location of the same sample, a grain boundary phase with an average thickness of about 2.4 nm exists between adjacent main phase grains, and its average composition was Nd 26.8 Ce 6.9 Fe bal. Co 7.4 Cu 12.5 Zr 0.5 as determined by EDS analysis. From this, the Ce/R' ratios calculated for the boundary phase formed between the main phase and the R'(Fe,Co) 2 phase, and the grain boundary phase between two grains between the main phase grains are 0.37 and 0.20, respectively, indicating that the former exhibits a higher Ce/R' ratio.
[実施例12]
組成がNd10.6原子%、Pr2.5原子%、B5.9原子%、残部Feで、厚さ0.2~0.4mm程度、平均の粒界相間隔4.0μmのストリップキャスト合金薄帯を作製し、水素吸蔵処理及び脱水素化処理を施した後、窒素気流中のジェットミルで粉砕して、平均粒径3.0μmの微粉末とした。磁界中加圧成形により圧粉成形体とし、真空中で1040℃2時間の焼結を行って得られた焼結体を切削加工により10×10×3mmのサイズとした。
次に、組成がCe30Febal.Co20Al20Cu5V5で直径2インチ、厚み3mmのターゲットを用い、投入電力250W、Ar圧0.4Paでスパッタリングを90分間行って、上記焼結体の10×10mm面の1面にCe膜を成膜した。この試料に真空中840℃、25時間の拡散熱処理を施した後、4.5℃/分の冷却速度で500℃以下まで冷却してから、さらにArガス雰囲気中540℃で3時間の時効熱処理を施して、実施例12の焼結体サンプルとした。
[Example 12]
A strip cast alloy ribbon with a composition of 10.6 atomic % Nd, 2.5 atomic % Pr, 5.9 atomic % B, and the balance Fe, a thickness of about 0.2 to 0.4 mm, and an average grain boundary phase spacing of 4.0 μm was produced, which was subjected to hydrogen absorption and dehydrogenation treatments, and then pulverized in a jet mill in a nitrogen stream to obtain a fine powder with an average particle size of 3.0 μm. A powder compact was formed by pressure molding in a magnetic field, and the sintered body obtained by sintering in a vacuum at 1040° C. for 2 hours was cut to a size of 10 × 10 × 3 mm.
Next, a Ce film was formed on one surface of the 10×10 mm surface of the sintered body by sputtering for 90 minutes using a target having a composition of Ce 30 Fe bal. Co 20 Al 20 Cu 5 V 5 , a diameter of 2 inches, and a thickness of 3 mm, at an input power of 250 W and an Ar pressure of 0.4 Pa. This sample was subjected to a diffusion heat treatment at 840° C. in a vacuum for 25 hours, cooled to 500° C. or less at a cooling rate of 4.5° C./min, and then subjected to an aging heat treatment at 540° C. in an Ar gas atmosphere for 3 hours to obtain a sintered body sample of Example 12.
実施例12の焼結体組成は、ICP分析よりNd10.2Pr2.4Ce1.0Febal.Co0.6B5.6Al0.2Cu0.1V0.1であった。EPMA組織観察では、中心部にCeを含まず、粒外殻部にCeを含有する主相粒が多く存在していた。また粒界部には、R’リッチ相とR’(Fe,Co)2相が各々1体積%以上存在していた。R’(Fe,Co)2相の分析値をもとにアーク溶解で作製した同組成の合金のTcは78℃であった。結果を表1、2及び5に示す。 The composition of the sintered body of Example 12 was Nd 10.2 Pr 2.4 Ce 1.0 Fe bal. Co 0.6 B 5.6 Al 0.2 Cu 0.1 V 0.1 by ICP analysis. EPMA structure observation showed that the main phase grains contained no Ce in the center and many Ce-containing grains in the outer shell. In addition, the grain boundary part contained 1 vol% or more of R'-rich phase and R'(Fe,Co) 2 phase. The Tc of the alloy of the same composition produced by arc melting based on the analysis value of R'(Fe,Co) 2 phase was 78°C. The results are shown in Tables 1, 2 and 5.
実施例12の組織についてSTEM観察を行い、R’(Fe,Co)2相と主相の間に平均厚み1.6nmで、組成がNd20.1Pr2.6Ce13.7Febal.Co2.5Cu1.9の境界相が形成されていることを確認した。これより境界相のCe/R’は0.38と計算される。一方、同じ試料の別箇所では、隣接する主相粒の間に、平均の厚みが約1.8nmの二粒子間粒界相が存在しており、その平均組成はNd17.7Pr6.2Ce6.9Febal.Co7.3Cu8.9V0.4であった。(Ce/R’=0.22)これより主相とR’(Fe,Co)2相の間に形成された境界相のCe/R’は、二粒子間粒界相のCe/R’より高いことがわかる。 The structure of Example 12 was observed by STEM, and it was confirmed that a boundary phase with an average thickness of 1.6 nm and a composition of Nd 20.1 Pr 2.6 Ce 13.7 Fe bal. Co 2.5 Cu 1.9 was formed between the R'(Fe, Co) 2 phase and the main phase. From this, the Ce/R' of the boundary phase was calculated to be 0.38. Meanwhile, in another part of the same sample, a grain boundary phase with an average thickness of about 1.8 nm was present between adjacent main phase grains, and its average composition was Nd 17.7 Pr 6.2 Ce 6.9 Fe bal. Co 7.3 Cu 8.9 V 0.4 . (Ce/R'=0.22) This shows that the Ce/R' of the boundary phase formed between the main phase and the R'(Fe, Co) two phases is higher than the Ce/R' of the grain boundary phase between the two particles.
11 主相(Ce/R’が高い領域)
12 主相(Ce/R’が低い領域)
21 R’リッチ相
22 R’(Fe,Co)2相
31 隣接する主相粒の間に形成された二粒子間粒界相
32 R’(Fe,Co)2相と主相の間に形成された境界相
11 Main phase (region with high Ce/R′)
12 Main phase (low Ce/R′ region)
21 R'-rich phase 22 R'(Fe, Co) 2 phase 31 Intergranular grain boundary phase formed between adjacent main phase grains 32 Boundary phase formed between R'(Fe, Co) 2 phase and main phase
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