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JP7688809B2 - High-temperature resistant liquid reflux and exhaust structure for preparing fine powders by gas phase method - Google Patents
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JP7688809B2 - High-temperature resistant liquid reflux and exhaust structure for preparing fine powders by gas phase method - Google Patents

High-temperature resistant liquid reflux and exhaust structure for preparing fine powders by gas phase method Download PDF

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JP7688809B2
JP7688809B2 JP2023516463A JP2023516463A JP7688809B2 JP 7688809 B2 JP7688809 B2 JP 7688809B2 JP 2023516463 A JP2023516463 A JP 2023516463A JP 2023516463 A JP2023516463 A JP 2023516463A JP 7688809 B2 JP7688809 B2 JP 7688809B2
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JP2023540814A (en
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筆 鐘
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江蘇博遷新材料股▲ふん▼有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D1/00Evaporating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D5/00Condensation of vapours; Recovering volatile solvents by condensation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/12Making metallic powder or suspensions thereof using physical processes starting from gaseous material
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B19/00Obtaining zinc or zinc oxide
    • C22B19/04Obtaining zinc by distilling
    • C22B19/16Distilling vessels

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Description

本発明は、微粉末調製技術の分野に属し、特に、気相法による微粉末の調製に用いる耐高温の液体還流と排気構造に関するものである。 The present invention belongs to the field of fine powder preparation technology, and in particular, relates to a high-temperature resistant liquid reflux and exhaust structure used in the preparation of fine powder by a gas phase method.

蒸発濃縮の気相法による微小粉体粒子の調製工程は、調製する材料をまず高温で加熱して気化させ、気体状態から液体状態へと固化・成形する工程である。調製する微粉末粒子は、微小な物質であり、前記微粉末粒子について、ナノ、サブミクロン、ミクロンの粉末がほとんどであり、成形された粒子に対して、サイズが小さく、成形速度が非常に速く、非常に高温で形成されるため、蒸気排出の原理は簡単であるが、実際に適用することは非常に困難である。坩堝のキャビティから蒸気が排出された後、冷えると蒸気が液体や固体に凝縮しやすく、液体は、坩堝から外に流出しやすく、そのため、材料ロスになり、固体物質が発生されて、排出口がふさがれて生産継続に影響されてしまう。 The process of preparing fine powder particles using the vapor phase method of evaporation and concentration is a process in which the material to be prepared is first heated at a high temperature to vaporize it, and then solidified and molded from the gaseous state into a liquid state. The fine powder particles to be prepared are tiny substances, and most of the fine powder particles are nano, submicron, or micron powders. Compared to molded particles, they are small in size, have a very fast molding speed, and are formed at a very high temperature. Although the principle of steam discharge is simple, it is very difficult to apply in practice. After the steam is discharged from the cavity of the crucible, when it cools down, the steam is likely to condense into liquid or solid, and the liquid is likely to flow out of the crucible, which results in material loss, solid substances are generated, and the discharge port is blocked, affecting production continuity.

本発明の目的は、気相法による微粉末の調製に用いる耐高温の液体還流と排気構造を提供し、坩堝のキャビティから蒸気が排出された後、冷えると蒸気が液体や固体に凝縮しやすく、液体は、坩堝から外に流出しやすく、そのため、材料ロスになり、固体物質が発生されて、排出口がふさがれて生産継続に影響されてしまうという問題を解決する。 The object of the present invention is to provide a high-temperature resistant liquid reflux and exhaust structure for use in preparing fine powders by the vapor phase method, which solves the problem that after vapor is discharged from the cavity of the crucible, the vapor is likely to condense into liquid or solid when cooled, and the liquid is likely to flow out of the crucible, resulting in material loss and the generation of solid substances that block the exhaust port and affect production continuity.

本発明は、気相法による微粉末の調製に用いる耐高温の液体還流と排気構造であって、
一端が坩堝蒸発気出口に接続され、他端がバックシーケンス装置に接続される、液体還流と排気を共有する配管と、前記配管の外側に順次設置された保温構造及びケースと、を含み、前記ケースは、ジャケット構造であり、前記ケースには、ジャケット構造と連通する冷却液入口及び冷却液出口が設置され、前記配管の下端は、前記ケースから突出して蒸発器内に挿入され、坩堝蒸発気出口と接続され、前記配管の上端は、前記バックシーケンス装置に接続され、前記ケースの下端には、前記蒸発器のハウジングと接続するための下接続部が設置され、前記ケースの上端には、バックシーケンス装置と接続するための上接続部が設置され、前記配管内部の温度は、調製される粉末材料の融点温度と沸点温度との間であり、前記配管内に存在する気相の前記粉末材料はバックシーケンス装置に排気され、かつ液相の前記粉末材料は坩堝に液体還流され、調製する粉末材料の固形物が配管を塞がないようにすることを特徴とする。
The present invention provides a high-temperature resistant liquid reflux and exhaust structure for preparing fine powder by a gas phase method, comprising:
The present invention is characterized in that it includes a pipe that shares liquid reflux and exhaust, one end of which is connected to a crucible vapor outlet and the other end of which is connected to a backsequence device, and a heat-insulating structure and a case that are sequentially installed on the outside of the pipe, the case having a jacket structure, a cooling liquid inlet and a cooling liquid outlet that communicate with the jacket structure, a lower end of the pipe protruding from the case and inserted into an evaporator and connected to the crucible vapor outlet, an upper end of the pipe connected to the backsequence device, a lower connection part for connecting to a housing of the evaporator is installed at the lower end of the case, and an upper connection part for connecting to the backsequence device is installed at the upper end of the case, the temperature inside the pipe is between the melting point temperature and the boiling point temperature of the powder material to be prepared, the powder material in the gas phase present in the pipe is exhausted to the backsequence device, and the powder material in the liquid phase is liquid-refluxed to the crucible, so that the solid of the powder material to be prepared does not clog the pipe .

選択的に、前記配管の材質は、高温条件下で調製される粉末材料と物理的または化学的反応しにくい材料である。 Optionally, the material of the piping is one that is unlikely to react physically or chemically with the powder material prepared under high temperature conditions.

選択的に、前記蒸発器内の坩堝蒸発気出口と、前記配管と、前記バックシーケンス装置の接続口との三者は、断面の形状及び寸法が一致し、または、断面の形状及び寸法が相違する。 Optionally, the crucible vapor outlet in the evaporator, the piping, and the connection port of the backsequence device have the same cross-sectional shape and dimensions, or the cross-sectional shapes and dimensions are different.

選択的に、蒸発器とケースとが接続された接続箇所のキャビティの内部形状及び内径と、ケースのキャビティの内部形状及び内径と、バックシーケンス装置とケースとが接続された接続箇所のキャビティの内部形状及び内径との三者は、一致しまたは類似であり、あるいは、相違し、蒸発器とケースとが接続された接続箇所のキャビティの内部形状及び内径と、ケースのキャビティの内部形状及び内径と、バックシーケンス装置とケースとが接続された接続箇所のキャビティの内部形状及び内径とが相違する場合に、接続箇所は、段差接続、変形接続であり、または、ケースは、前端側ケースと後端側ケースとの内部形状及び内径が相違する。 Optionally, the internal shape and inner diameter of the cavity at the connection point where the evaporator and case are connected, the internal shape and inner diameter of the cavity of the case, and the internal shape and inner diameter of the cavity at the connection point where the backsequence device and case are connected are the same or similar, or are different. If the internal shape and inner diameter of the cavity at the connection point where the evaporator and case are connected, the internal shape and inner diameter of the cavity of the case, and the internal shape and inner diameter of the cavity at the connection point where the backsequence device and case are connected are different, the connection point is a stepped connection or a deformed connection, or the internal shapes and inner diameters of the front and rear end cases are different.

選択的に、前記ケースは、多段接続であり、または隣接する機能構造のケースと共有する。 Optionally, the case is multi-stage connected or shares a case with an adjacent functional structure.

選択的に、前記配管の外側には、固定構造が設置されている。 Optionally, a fixed structure is provided on the outside of the piping.

選択的に、前記配管は、隣接する2つのセクションがスナップによって互いに接続された多セクションスプライス構造であり、または、前記配管は、前後端設備の一体構造における機能セクションである。 Optionally, the piping is a multi-section splice structure in which two adjacent sections are connected to each other by snaps, or the piping is a functional section in an integral structure of front and rear end equipment.

本技術案には、高温の蒸気と、キャリアガスを伴う液化または固化した可能性のある粒子を、液体還流と排気を共有する配管を通してスムーズに輸送し、他の機器の内部配管と接続して次の構造体に移行できるように、内部循環配管接続口を設計することで保温設計と温度制御を実現するものである。この配管内で調製する材料が固体から液体へスムーズに融解され、または液体状態に収束してできた液体は、この配管を通って高温蒸発器内の坩堝に戻すことができる。 This technical proposal involves smoothly transporting high-temperature steam and particles that may have been liquefied or solidified and are accompanied by a carrier gas through piping that shares liquid reflux and exhaust, and connecting them to the internal piping of other equipment so that they can be transferred to the next structure, thereby realizing heat retention design and temperature control. The liquid that is created when the material being prepared in this piping smoothly melts from solid to liquid, or converges to a liquid state, can be returned to the crucible in the high-temperature evaporator through this piping.

本発明の耐高温の液体還流と排気構造の概略図である。FIG. 2 is a schematic diagram of the high-temperature resistant liquid reflux and exhaust structure of the present invention.

という用語があることに注意されたい。
以下、本発明の技術的解決策を実施形態により詳細に説明するが、これらは例示に過ぎず、本発明の技術的解決策の説明および例示にのみ用いることができ、本発明の技術的解決策を限定するものと解釈することはできない。本発明の説明において、「中央」、「上」、「下」、「左」、「右」、「前」、「後」、「縦」、「横」、「内側」、「外側」などの向きや位置関係を示すものは、添付図面に示された向きや位置関係に基づいており、本発明の説明を容易にし簡略化することのみを目的としており、参照された装置や要素が必ず必要となることを示したり示唆したりするものではない。また、「第1」、「第2」、「第3」という用語は、説明の目的のみに使用され、参照される装置または要素の特定の方向、構造、動作を示すものと解釈されるものではない。「第1」、「第2」、「第3」の用語は、記述的な目的のためにのみ使用されており、相対的な重要性を示したり示唆したりするものと理解されるものではない。本発明の説明において、特に明示的に指定および限定されない限り、「搭載」、「接続」、「連結」という用語は、例えば、固定接続、取り外し可能な接続、一体型接続、機械的接続、電気的接続、直接接続、中間媒体を介した間接接続、2つのコンポーネントの内部接続のように広義に理解されることに留意されたい。当業者にとって、本発明の文脈における上記の用語の具体的な意味は、その都度理解することができる。
Please note that there is a term
The technical solution of the present invention will be described in detail below through the embodiments, which are merely illustrative and can only be used to describe and illustrate the technical solution of the present invention, and cannot be construed as limiting the technical solution of the present invention. In the description of the present invention, the directions and positional relationships such as "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", and "outer" are based on the directions and positional relationships shown in the accompanying drawings, and are intended only to facilitate and simplify the description of the present invention, and do not indicate or suggest that the referenced devices or elements are necessarily required. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and are not to be construed as indicating a particular direction, structure, or operation of the referenced devices or elements. The terms "first", "second", and "third" are used for descriptive purposes only, and are not to be understood as indicating or suggesting relative importance. It should be noted that in the description of the present invention, unless otherwise expressly specified and limited, the terms "mounted", "connected" and "coupled" are understood in a broad sense, such as fixed connection, detachable connection, integral connection, mechanical connection, electrical connection, direct connection, indirect connection through an intermediate medium, and internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the context of the present invention in each case.

蒸発濃縮の気相法による粉末材料の調製では、高温蒸発器内の坩堝に高温蒸気が形成される。キャリアガスは、坩堝蒸気排出口と、耐高温の液体還流と排気構造の接続部を通過するとともに、耐高温の液体還流と排気の共通配管に入り、高温キャリアガスに運ばれる高温エネルギーにより、耐高温の液体還流と排気構造の内部配管のキャビティを調製する材料の融点以上の温度に維持する。高温キャリアガスとともに運ばれた粉体原料の蒸気は、液体還流と排気配管内にあり、一部の蒸気は冷えされるので、凝縮して液体状態となり、気体または液体状態の粒子は内部配管の内壁に衝突して付着され、高温により、内部配管に存在する粉体原料を液相として内部配管を通して坩堝に還流させ、または、内部配管に存在する固相粉体原料を急速に液相に溶解させて坩堝に還流させる。高温を維持することで、調製粉体原料の固形物による配管の目詰まりの発生を防止できる。 In the preparation of powder materials by the vapor-phase method of evaporation and concentration, high-temperature vapor is formed in the crucible in the high-temperature evaporator. The carrier gas passes through the crucible vapor outlet and the connection part of the high-temperature resistant liquid reflux and exhaust structure, and enters the common pipe for the high-temperature resistant liquid reflux and exhaust, and the high-temperature energy carried by the high-temperature carrier gas maintains the cavity of the internal pipe of the high-temperature resistant liquid reflux and exhaust structure at a temperature above the melting point of the material to be prepared. The vapor of the powder raw material carried with the high-temperature carrier gas is in the liquid reflux and exhaust pipes, and some of the vapor is cooled, so it condenses into a liquid state, and the particles in the gas or liquid state collide with and adhere to the inner wall of the internal pipe, and the high temperature causes the powder raw material present in the internal pipe to be returned to the crucible through the internal pipe as a liquid phase, or the solid-phase powder raw material present in the internal pipe to be rapidly dissolved into a liquid phase and returned to the crucible. By maintaining a high temperature, it is possible to prevent the solid matter of the prepared powder raw material from clogging the pipes.

高温状態を維持するために、この製造工程は循環型のプロセスであり、坩堝内の高温気流が常に構造体に熱を運び、この構造体の外側には耐熱性の保温材料が設置されている。さらに、内部配管構造の外側には、加熱構造(例えば、中周波加熱や抵抗線加熱による)が設けられる。また、内部配管を長期間保護するために、他の側面に補強構造を設け、内部配管の変形や破損を防止することも可能である。高温の蒸気と、キャリアガスを伴う液化または固化した可能性のある粒子を、液体還流と排気を共有する配管を通してスムーズに輸送し、他の機器の内部配管と接続して次の構造体に移行できる。この配管内で調製する材料が固体から液体へスムーズに融解され、または液体状態に収束してできた液体は、この配管を通って高温蒸発器内の坩堝に戻すことができる。 To maintain a high temperature state, this manufacturing process is a circulatory process, and the high-temperature air flow in the crucible always carries heat to the structure, and heat-resistant insulation materials are installed on the outside of this structure. In addition, a heating structure (for example, by medium-frequency heating or resistance wire heating) is provided on the outside of the internal piping structure. In addition, in order to protect the internal piping for a long time, a reinforcing structure can be provided on the other side to prevent deformation or damage of the internal piping. High-temperature steam and particles that may have been liquefied or solidified with the carrier gas can be smoothly transported through a pipe that shares the liquid return and exhaust, and can be connected to the internal piping of other equipment and transferred to the next structure. The liquid that is created when the material to be prepared in this pipe is smoothly melted from solid to liquid or converges to a liquid state can be returned to the crucible in the high-temperature evaporator through this pipe.

図1に示すように、本開示は、気相法による微粉末の調製に用いる耐高温の液体還流と排気構造を提供する。前記気相法による微粉末の調製に用いる耐高温の液体還流と排気構造は、液体還流と排気を共有する配管9と、配管9の外側に順次設置された保温構造4及びケース5と、を含む。 As shown in FIG. 1, the present disclosure provides a high-temperature resistant liquid reflux and exhaust structure for use in preparing fine powder by a gas phase method. The high-temperature resistant liquid reflux and exhaust structure for use in preparing fine powder by a gas phase method includes a pipe 9 that shares the liquid reflux and exhaust, and a heat-retaining structure 4 and a case 5 that are sequentially installed on the outside of the pipe 9.

前記配管9の下端は、前記ケース5から突出して蒸発器内に挿入され、坩堝蒸発気出口と接続される。前記ケース5の下端には、前記蒸発器のハウジング2と接続するための下接続部3が設置され、前記ケース5の上端には、バックシーケンス装置と接続するための上接続部6が設置されている。配管9の上端はバックシーケンス装置と接続する。 The lower end of the piping 9 protrudes from the case 5 and is inserted into the evaporator and connected to the crucible vapor outlet. A lower connection part 3 for connecting to the housing 2 of the evaporator is provided at the lower end of the case 5, and an upper connection part 6 for connecting to a back sequence device is provided at the upper end of the case 5. The upper end of the piping 9 connects to the back sequence device.

粉体調製サイクルで長期間使用でき、調製する粉体に影響を与えない構造にするために、前記配管9の材質は、高温条件下で調製される粉末材料と物理的または化学的反応しにくい材料である。 In order to ensure that the structure can be used for a long period of time in the powder preparation cycle and does not affect the powder being prepared, the material of the piping 9 is one that is unlikely to react physically or chemically with the powder material being prepared under high temperature conditions.

配管9の内部は、液体還流と排気の両方に用いられる。配管9の内部温度は、調製される粉末材料の融点温度以上であり、または、融点温度と沸点温度との間である。この構造では、液体還流と排気機能を実現するために、粉体粒子の気相・液相の衝突成長現象が一部で発生される。 The inside of pipe 9 is used for both liquid reflux and exhaust. The temperature inside pipe 9 is equal to or higher than the melting point temperature of the powder material being prepared, or between the melting point temperature and the boiling point temperature. In this structure, the gas-liquid collision growth phenomenon of powder particles is partially generated to achieve the liquid reflux and exhaust functions.

配管9の外壁とケース5との間には、主に断熱材や耐高温材料からなる保温構造4が配置されている。保温構造4は、内部構造を断熱し、内部温度を調製の粉末材料の融点以上に制御することで、配管9内に存在する粉末材料が液相として坩堝に還流されたり、配管9内の固相の粉末材料が速やかに液相に溶けて坩堝内に還流される。高温を維持することは、調製する粉末材料の固形物が配管9を塞がないようにする。 A heat-retaining structure 4, mainly made of insulating material and high-temperature resistant material, is disposed between the outer wall of the pipe 9 and the case 5. The heat-retaining structure 4 insulates the internal structure and controls the internal temperature to above the melting point of the powder material being prepared, so that the powder material present in the pipe 9 is returned to the crucible as a liquid phase, or the solid-phase powder material in the pipe 9 quickly melts into a liquid phase and is returned to the crucible. Maintaining a high temperature prevents the solids of the powder material being prepared from clogging the pipe 9.

前記ケース5は、ジャケット構造である。前記ケース5には、ジャケット構造と連通する冷却液入口及び冷却液出口が設置されている。ジャケット構造内部に循環冷却水が供給されることにより、設備を冷却し保護する。ケース5は、複数のセクション構造であってもよいし、隣接する機能構造のハウジングと共用してもよい。 The case 5 has a jacket structure. The case 5 is provided with a cooling liquid inlet and a cooling liquid outlet that communicate with the jacket structure. Circulating cooling water is supplied inside the jacket structure to cool and protect the equipment. The case 5 may be a multi-section structure, or may be shared with the housing of an adjacent functional structure.

前記蒸発器内の坩堝1の蒸発気出口と、前記配管9と、前記バックシーケンス装置の接続口との三者は、断面の形状及び寸法が一致し、または、断面の形状及び寸法が相違する。サイズや比率、形状の変更は、この構造を機能的に実現するための代替案ではない。液体還流と排気を共有する配管の内部は変形可能である。 The vapor outlet of the crucible 1 in the evaporator, the piping 9, and the connection port of the back sequence device have the same cross-sectional shape and dimensions, or they have different cross-sectional shapes and dimensions. Changes in size, ratio, and shape are not alternatives for functionally realizing this structure. The inside of the piping that shares the liquid return and exhaust can be modified.

蒸発器と配管9とが接続された接続箇所のキャビティの内部形状及び内径と、ケース5のキャビティの内部形状及び内径と、バックシーケンス装置とケースとが接続された接続箇所のキャビティの内部形状及び内径との三者は、一致しまたは類似であり、あるいは、相違する。蒸発器と配管9とが接続された接続箇所のキャビティの内部形状及び内径と、ケース5のキャビティの内部形状及び内径と、バックシーケンス装置とケースとが接続された接続箇所のキャビティの内部形状及び内径とが相違する場合に、接続箇所は、段差接続、変形接続であり、または、ケース5は、前端側ケースと後端側ケースとの内部形状及び内径が相違する。形状や大きさ、比率の選択は、この耐高温の液体還流と排気構造の機能を使用することの代替としてではなく、ニーズに合わせて設計できる。前記ケースは、多段接続であり、または隣接する機能構造のケースと共有する。前記ケースの大きさや形状、前後の接続方式は、この耐高温の液体還流と排気構造の機能の制限や変更として使用されることはない。 The internal shape and inner diameter of the cavity at the connection point where the evaporator and piping 9 are connected, the internal shape and inner diameter of the cavity of the case 5, and the internal shape and inner diameter of the cavity at the connection point where the back sequence device and the case are connected are the same, similar, or different. When the internal shape and inner diameter of the cavity at the connection point where the evaporator and piping 9 are connected, the internal shape and inner diameter of the cavity of the case 5, and the internal shape and inner diameter of the cavity at the connection point where the back sequence device and the case are connected are different, the connection point is a stepped connection, a deformed connection, or the internal shape and inner diameter of the front end case and the rear end case of the case 5 are different. The selection of the shape, size, and ratio can be designed according to needs, not as a substitute for using the function of this high-temperature resistant liquid reflux and exhaust structure. The case is multi-stage connected or shared with the case of an adjacent functional structure. The size and shape of the case, as well as the front and rear connection method, are not used to limit or change the functionality of this high-temperature resistant liquid reflux and exhaust structure.

配管と坩堝蒸発気出口の接続口11に、パイプの下端を、坩堝蒸気排出口構造の内部またはそのリム内に延長することにより、還流液が坩堝内に流れ込み、坩堝外に漏れないことがなる。 By extending the lower end of the pipe to the inside of the crucible vapor exhaust structure or within its rim, the reflux liquid flows into the crucible and does not leak out of the crucible.

高温環境下では、長時間の作業性を確保するために、配管9の外側には、固定構造8が設置されていることにより、高温下での配管9の変形、破損、倒壊を防止することができる。固定構造8は、配管9と同じ材料で作られてもよいし、他の耐高温材料で作られてもよい。さらに、配管9の外側に加熱設備7を設けてもよい。 In order to ensure long-term workability in a high-temperature environment, a fixing structure 8 is installed on the outside of the pipe 9, which can prevent the pipe 9 from deforming, breaking, or collapsing under high temperatures. The fixing structure 8 may be made of the same material as the pipe 9, or may be made of another high-temperature resistant material. Furthermore, a heating device 7 may be provided on the outside of the pipe 9.

前記配管9は、隣接する2つのセクションがスナップによって互いに接続された多セクションスプライス構造であり、または、前記配管9は、前後端設備の一体構造における機能セクションである。 The piping 9 is a multi-section splice structure in which two adjacent sections are connected to each other by a snap, or the piping 9 is a functional section in an integrated structure of front and rear end equipment.

本発明の実施形態を説明したが、本発明の原理および精神から逸脱することなく、これらの実施形態に対して様々な変形、修正、置換、および変種を行うことができることは、当業者には理解され、その範囲は添付の請求項によって極めてよく定義されている。 Although embodiments of the present invention have been described, it will be understood by those skilled in the art that various modifications, alterations, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is best defined by the appended claims.

1:坩堝
2:蒸発器のハウジング
3:下接続部
4:保温構造
5:ケース
6:上接続部
7:加熱設備
8:固定構造
9:配管
10:配管とバックシーケンス装置の接続口
11:配管と坩堝蒸発気出口の接続口
1: Crucible 2: Evaporator housing 3: Lower connection 4: Heat retention structure 5: Case 6: Upper connection 7: Heating equipment 8: Fixing structure 9: Piping 10: Connection port between piping and back sequence device 11: Connection port between piping and crucible vapor outlet

Claims (3)

気相法による微粉末の調製に用いる耐高温の液体還流と排気構造であって、
一端が坩堝蒸発気出口に接続され、他端がバックシーケンス装置に接続される、液体還流と排気を共有する配管と、
前記配管の外側に順次設置された保温構造及びケースと、を含み、 前記ケースは、ジャケット構造であり、前記ケースには、ジャケット構造と連通する冷却液入口及び冷却液出口が設置され、
前記配管の下端は、前記ケースから突出して蒸発器内に挿入され、坩堝蒸発気出口と接続され、前記配管の上端は、前記バックシーケンス装置に接続され、
前記ケースの下端には、前記蒸発器のハウジングと接続するための下接続部が設置され、前記ケースの上端には、バックシーケンス装置と接続するための上接続部が設置され、
前記配管内部の温度は、調製される粉末材料の融点温度と沸点温度との間であり、
前記配管内に存在する気相の前記粉末材料はバックシーケンス装置に排気され、かつ液相の前記粉末材料は坩堝に液体還流され、
調製する粉末材料の固形物が配管を塞がないようにする
ことを特徴とする気相法による微粉末の調製に用いる耐高温の液体還流と排気構造。
A high-temperature resistant liquid reflux and exhaust structure for preparing fine powder by a gas phase method,
A pipe shared with liquid reflux and exhaust, one end of which is connected to the crucible vapor outlet and the other end of which is connected to a back sequence device;
a heat insulating structure and a case sequentially installed on the outside of the piping, the case being a jacket structure, the case being provided with a cooling liquid inlet and a cooling liquid outlet communicating with the jacket structure,
The lower end of the pipe protrudes from the case and is inserted into the evaporator and connected to a crucible vapor outlet, and the upper end of the pipe is connected to the back sequence device;
A lower connection part is provided at the lower end of the case for connecting with the housing of the evaporator, and an upper connection part is provided at the upper end of the case for connecting with a back sequence device;
The temperature inside the pipe is between the melting point temperature and the boiling point temperature of the powder material to be prepared,
The powder material in the gas phase present in the pipe is exhausted to a back sequence device, and the powder material in the liquid phase is liquid-backflowed to a crucible;
Ensure that the solids of the powder ingredients being prepared do not block the piping .
A high-temperature resistant liquid reflux and exhaust structure used in the preparation of fine powder by a vapor phase method.
前記配管の材質は、高温条件下で調製される粉末材料と物理的または化学的反応しにくい材料であることを特徴とする請求項1に記載の気相法による微粉末の調製に用いる耐高温の液体還流と排気構造。 The high-temperature resistant liquid reflux and exhaust structure used in the preparation of fine powders by the gas phase method described in claim 1, characterized in that the material of the piping is a material that is unlikely to react physically or chemically with the powder material prepared under high-temperature conditions. 前記蒸発器内の坩堝蒸発気出口と、前記配管と、前記バックシーケンス装置の接続口との三者は、断面の形状及び寸法が一致し、または、断面の形状及び寸法が相違することを特徴とする請求項1または請求項2に記載の気相法による微粉末の調製に用いる耐高温の液体還流と排気構造。

3. A high-temperature resistant liquid reflux and exhaust structure used for preparing fine powder by a gas phase method as described in claim 1 or claim 2, characterized in that the cross-sectional shapes and dimensions of the crucible vapor outlet in the evaporator, the piping, and the connection port of the back-sequence device are the same or different.

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