JP7696038B2 - Sheet peeling device and sheet peeling method - Google Patents

Description

The present invention relates to a sheet peeling device and a sheet peeling method.

A sheet peeling device is known that peels off an inner sheet from an adherend having an inner sheet attached to one side and a second adhesive sheet attached to the other side (see, for example, Patent Document 1).

JP 2017-162870 A

However, the substrate transfer device 1 (sheet peeling device) described in Patent Document 1 only discloses a technique for peeling the inner sheet from the wafer W (adherend) while avoiding adhesion between the adhesive tape T1 (inner sheet) and the adhesive tape T2 (second adhesive sheet).

The object of the present invention is to provide a sheet peeling device and a sheet peeling method that can peel the inner sheet from the second adhesive sheet even if the inner sheet and the second adhesive sheet are adhered to each other.

The present invention employs the configuration described in the claims.

According to the present invention, a peeling tape having an adhesive strength that does not come off the inner sheet even when the tension required to peel the inner sheet from the second adhesive sheet is applied is applied to the inner sheet, so that even if the inner sheet and the second adhesive sheet are adhered to each other, the inner sheet can be peeled off from the second adhesive sheet.

FIG. 2 is an explanatory diagram of a transfer device according to an embodiment of the present invention. FIG. FIG. 11 is an explanatory diagram of a transfer device according to a modified example of the present invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a given plane, and the Z-axis is an axis orthogonal to the given plane. Furthermore, in this embodiment, the view from the front direction of Fig. 1 parallel to the Y-axis is used as a reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the front direction perpendicular to the paper surface, the Y-axis arrow direction, and "rear" is the opposite direction.

The transfer apparatus EA of the present invention includes a sheet cutting means 10 for cutting a first adhesive sheet AS1 attached to one surface WK1 of an adherend WK to a size that extends beyond the outer edge of the adherend WK, and dividing the first adhesive sheet AS1 into an inner sheet AS1A attached to the adherend WK and an outer sheet AS1B positioned outside the inner sheet AS1A, a transport means 20 for positioning a second ring frame RF2 as a second frame member in the vicinity of the adherend WK, and a conveying means 21 for conveying the second ring frame RF2 to the outer edge of the adherend WK. The apparatus is provided with sheet application means 30 for applying a second adhesive sheet AS2 of a size that overflows from the adherend WK to the other surface WK2 of the adherend WK, an inversion means 40 for inverting the adherend WK to which the second adhesive sheet AS2 has been applied, and a sheet peeling means 50 as a sheet peeling device for applying a peeling tape PT to the inner sheet AS1A and applying tension to the peeling tape PT to peel the inner sheet AS1A from the adherend WK, and is arranged near an adherend transport means 60 for transporting the adherend WK.
In this embodiment, the adherend WK supplied to the transfer apparatus EA is supported by a first ring frame RF1 serving as a first frame member via a first adhesive sheet AS1, forming a first integrated object UP1.

The sheet cutting means 10 is made up of multiple arms, and is equipped with a so-called articulated robot 11 as a driving device that can displace what is supported by the tip arm 11A, which is the working part, to any position and angle within its working range, and a cutting blade 12 as a cutting member supported by the tip arm 11A of the articulated robot 11 via a bracket 12A.

The transfer means 20 includes an articulated robot 11 shared with the sheet cutting means 10, and a suction pad 22 (holding means) that is supported by the distal arm 11A of the articulated robot 11 via a frame 21 and to which suction force is applied by a decompression means (not shown) such as a decompression pump or vacuum ejector.

The sheet attachment means 30 includes a support roller 31 that supports the original roll RS on which the second adhesive sheet AS2 is temporarily attached to the strip-shaped release sheet RL, a guide roller 32 that guides the original roll RS, a release plate 33 that serves as a release means for folding back the release sheet RL at the release edge 33A and peeling the second adhesive sheet AS2 from the release sheet RL, a pressure roller 34 that serves as a pressing means for pressing the second adhesive sheet AS2 against the adherend WK to attach it, a drive roller 35 that is supported by an output shaft (not shown) of a rotary motor 35A that serves as a drive device and that pinches the release sheet RL between itself and the pinch roller 35B, and a recovery roller 36 that serves as a recovery means that is supported by an output shaft (not shown) of the drive device and that constantly applies a predetermined tension to the release sheet RL that exists between itself and the pinch roller 35B while the transfer device EA is in automatic operation and recovers the release sheet RL.

The reversing means 40 includes a linear motor 41 as a driving device, a frame 42 supported on the output shaft 41A of the linear motor, arms 43 extending forward supported on both the left and right ends of the frame 42, a rotary motor 44 as a driving device supported in front of each arm 43, and a chuck motor 45 (holding means) as a driving device each supported on the output shaft 44A and having a pair of chuck arms 45A.

The sheet peeling means 50 includes a tape support means 51 that rotatably supports a wound heat-sensitive adhesive peeling tape PT, a payout means 52 that clamps the peeling tape PT supported by the tape support means 51 between the tape support means 51 and the peeling tape PT and applies a payout force to the peeling tape PT, a lead holding means 53 that holds the lead end of the peeling tape PT, a holding assistance means 54 that assists the lead holding means 53 in holding the peeling tape PT, a peeling tape application means 55 that presses the peeling tape PT against the inner sheet AS1A to apply it, a cutting means 56 that cuts the peeling tape PT, and a tension application means 57 that applies tension to the peeling tape PT. The peeling tape PT has an adhesive strength that does not come off the inner sheet AS1A even when the tension required to peel the inner sheet AS1A from the second adhesive sheet AS2 is applied, and is configured to apply it to the inner sheet AS1A. In this embodiment, the sheet peeling means 50 is configured to attach the peeling tape PT to the inner sheet AS1A at a position where the inner sheet AS1A is not in contact with the second adhesive sheet AS2.

The tape support means 51 comprises a pivot arm 51B which can rotate around an axis 51A, a support roller 51C supported on its free end side and which supports the wound peeling tape PT, and a spring 51D as a biasing means which biases the support roller 51C in the direction of the payout means 52.
The pay-out means 52 includes a rotary motor 52A as a driving device, and a pay-out roller 52B supported by an output shaft (not shown) of the motor 52A and configured to apply a rotational force to the peeling tape PT supported by a support roller 51C.
The lead holding means 53 includes a storage means 53C supported by an output shaft 53B of a linear motor 53A as a driving device, and a suction means 53F (holding means) as a support means such as a pressure reducing pump or a vacuum ejector capable of suction and holding via a suction hole 53E formed in an suction surface 53D, which is the bottom surface of the storage means 53C.
The auxiliary holding means 54 includes a linear motor 54A as a driving device, and an auxiliary roller 54C supported by an output shaft 54B of the linear motor 54A for bringing the peeling tape PT into contact with the adsorption surface 53D.
The peeling tape application means 55 includes a linear motor 55A as a driving device housed within the housing means 53C, a pressing member 55C supported by its slider 55B and pressing the peeling tape PT against the inner sheet AS1A, and a heating means 55D such as a coil heater or the heating side of a heat pipe provided inside the pressing member 55C.
The cutting means 56 includes a linear motor 56A as a driving device housed in the housing means 53C, and a cutting blade 56C supported by a slider 56B thereof and capable of cutting the peeling tape PT.
The tension applying means 57 includes a linear motor 57A as a driving device and a peeling roller 57C supported by a slider 57B thereof.

The adherend transport means 60 comprises a linear motor 61 as a driving device, a first support table 62 supported by a first slider 61A of the linear motor 61, and a second support table 63 supported by a second slider 61B of the linear motor 61.
The first support table 62 is provided with an inner support surface 62A (holding means) that can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, a groove 62B that is formed on the outside of the inner support surface 62A and has a ring-shaped recess when viewed from above in a plan view, and an outer support surface 62C (holding means) that is formed on the outside of the groove 62B and can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector.
The second support table 63 is provided with a holding portion 63A (holding means) on its upper surface which is capable of being adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and a strong holding portion 63B (holding means) which is arranged in a ring shape in a plan view inside the holding portion 63A and holds the protruding portion of the inner sheet AS1A that protrudes from the adherend WK with an adsorption holding force stronger than that of the holding portion 63A.

Next, the operation of the transfer device EA will be described.
First, a user of the transfer device EA (hereinafter simply referred to as "user") sets the original roll RS and peeling tape PT as shown in the figure in the transfer device EA, in which each member is arranged in the initial position shown by the solid line in Fig. 1, and then inputs a signal to start automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Then, the sheet peeling means 50 drives the suction means 53F to start suctioning and holding the peeling tape PT on the suction surface 53D, and the sheet sticking means 30 drives the rotating motor 35A to pay out the original roll RS, and when the leading end of the leading second adhesive sheet AS2 in the payout direction is peeled off by a predetermined length by the peeling edge 33A of the peeling plate 33, the driving of the rotating motor 35A is stopped. Next, when a user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the first integrated object UP1 on the first support table 62 as shown by the solid line in Figure 1, the adherend conveying means 60 drives a pressure reducing means (not shown) and begins to adsorb and hold the first integrated object UP1 on the inner and outer support surfaces 62A and 62C.

Then, the sheet cutting means 10 drives the articulated robot 11, and as shown by the two-dot chain line in Fig. 1, the cutting blade 12 pierces the first adhesive sheet AS1 at a position a predetermined distance away from the outer edge of the adherend WK, and the cutting blade 12 rotates once along the groove 62B, and then returns to its initial position. This causes the first adhesive sheet AS1 to be divided into the inner sheet AS1A and the outer sheet AS1B. Next, the transfer means 20 drives the articulated robot 11, and separates the cutting blade 12 held by the distal arm 11A, and holds the suction pad 22 with the distal arm 11A, and then abuts the suction pad 22 against the upper surface of the first ring frame RF1, and drives the pressure reducing means (not shown) to start suction and holding the first ring frame RF1 with the suction pad 22. Then, when the adherend transport means 60 stops driving the pressure reducing means (not shown) and releases the suction and holding of the first integrated object UP1 on the outer support surface 62C, the transfer means 20 drives the articulated robot 11 to transport the first ring frame RF1 to which the outer sheet AS1B is attached to a predetermined collection position (not shown), and then stops driving the pressure reducing means (not shown) and releases the suction and holding of the first ring frame RF1 on the suction pad 22. Next, the transfer means 20 drives the articulated robot 11 to abut the suction pad 22 on the upper surface of the uppermost second ring frame RF2 accumulated in the frame stocker section ST, and then drives the pressure reducing means (not shown) to start suction and holding of the second ring frame RF2 on the suction pad 22. Thereafter, the transfer means 20 drives the articulated robot 11 to place the second ring frame RF2 on the outer support surface 62C, and the adherend transport means 60 drives the pressure reducing means (not shown) and starts suction and holding of the second ring frame RF2 on the outer support surface 62C. Next, the transport means 20 stops driving the pressure reducing means (not shown) and releases the suction hold of the second ring frame RF2 by the suction pad 22, then drives the articulated robot 11 to return the suction pad 22 to its initial position, detaches the suction pad 22 that was held by the distal arm 11A, and holds the cutting blade 12 with the distal arm 11A.

Then, the adherend transport means 60 drives the linear motor 61 to move the first support table 62 to the right, and when the first support table 62 reaches a predetermined position relative to the sheet attachment means 30, the sheet attachment means 30 drives the rotary motor 35A to pay out the original roll RS in accordance with the moving speed of the first support table 62. As a result, the second adhesive sheet AS2 is peeled off from the release sheet RL, and the second adhesive sheet AS2 peeled off from the release sheet RL is pressed by the pressure roller 34 against the upper surface of the second ring frame RF2 and the other surface WK2 of the adherend WK, as shown by the two-dot chain line in Figure 1, and is attached. At this time, the second adhesive sheet AS2 may or may not be attached to the inner sheet AS1A. Next, the entire leading second adhesive sheet AS2 is attached to the second ring frame RF2 and the adherend WK to form the second integrated object UP2, and when the leading end of the next second adhesive sheet AS2 following the leading second adhesive sheet AS2 in the payout direction is peeled off by a predetermined length at the peeling edge 33A of the peeling plate 33, the sheet attachment means 30 stops driving the rotation motor 35A.

After that, the first support table 62 continues to move to the right, and when the first support table 62 reaches directly below the reversing means 40 as shown by the two-dot chain line in Fig. 1, the adherend transport means 60 stops driving the linear motor 61. After that, the reversing means 40 drives the linear motor 41, and as shown by the two-dot chain line in Fig. 1, the frame 42 is lowered, and then the chuck motors 45 are driven to grip the second ring frame RF2 with each chuck arm 45A. Next, when the adherend transport means 60 stops driving the decompression means (not shown) and releases the suction and holding of the second integrated object UP2 on the inner and outer support surfaces 62A and 62C, the reversing means 40 drives the linear motor 41 and the rotary motor 44 to lift the second integrated object UP2 to a predetermined height and then turns the second integrated object UP2 upside down. Then, the adherend transport means 60 drives the linear motor 61 to return the first support table 62 to its initial position and moves the second support table 63 directly below the reversing means 40, after which the reversing means 40 drives the linear motor 41 to place the second integrated object UP2 on the second support table 63 with the second adhesive sheet AS2 facing the second support table 63. Next, the adherend transport means 60 drives the decompression means (not shown) to start suction and holding the second integrated object UP2 at the holding portion 63A and the strong holding portion 63B, and the reversing means 40 drives the linear motor 41 and the chuck motor 45 to return the frame 42 and the chuck arm 45A to their initial positions.

Thereafter, the adherend transport means 60 drives the linear motor 61 to move the second support table 63 to the right, and when the left end of the adherend WK is located directly below the pressing member 55C, as shown by the two-dot chain line in Fig. 1, the driving of the linear motor 61 is stopped. Next, the sheet peeling means 50 drives the linear motor 54A to retract the auxiliary roller 54C from below the storage means 53C, as shown by the two-dot chain line in Fig. 1, and then drives the rotary motor 52A and the linear motor 53A to lower the storage means 53C to a predetermined position directly above the inner sheet AS1A while paying out the peeling tape PT. Then, the sheet peeling means 50 drives the linear motor 55A, and as shown in FIG. 2(A), the pressing member 55C is lowered to bring the peeling tape PT into contact with the inner sheet AS1A directly above the left end of the adherend WK, and then the heating means 55D is driven to heat the peeling tape PT and adhere it to the inner sheet AS1A.

Next, the sheet peeling means 50 stops driving the suction means 53F and releases the suction and holding of the peeling tape PT on the suction surface 53D, then drives the linear motor 53A and the linear motor 55A to return the storage means 53C and the pressing member 55C to their initial positions. After that, the sheet peeling means 50 drives the linear motor 57A and moves the peeling roller 57C to the right as shown in FIG. 2B, applying tension to the peeling tape PT to peel the inner sheet AS1A from the adherend WK. At this time, since the strong holding portion 63B is provided on the second support table 63, even if the second adhesive sheet AS2 and the inner sheet AS1A are adhered to each other, the second adhesive sheet AS2 rises up together with the inner sheet AS1A and does not lift up and damage the adherend WK. Next, when the entire inner sheet AS1A is peeled off from the adherend WK to form the third integrated object UP3, the sheet peeling means 50 stops driving the linear motor 57A, and then drives the linear motor 54A and the suction means 53F to return the auxiliary roller 54C to its initial position and start suction holding of the peeling tape PT on the suction surface 53D as shown in Fig. 2(C).Then, the sheet peeling means 50 drives the linear motor 56A, and as shown in Fig. 2(C), raises and lowers the cutting blade 56C to cut the peeling tape PT, and when the operator or a transport means (not shown) collects the inner sheet AS1A, the sheet peeling means 50 drives the linear motor 57A to return the peeling roller 57C to its initial position. Next, the adherend transport means 60 drives the linear motor 61, returns the second support table 63 to its initial position, stops driving the pressure reducing means (not shown), and releases the suction hold of the third integrated object UP3 by the holding portion 63A and the strong holding portion 63B. Then, the operator or the transport means (not shown) transports the third integrated object UP3 on the second support table 63 to the next process, and the same operations as above are repeated thereafter.

According to the above embodiment, the peeling tape PT is attached to the inner sheet AS1A, and has an adhesive strength that does not come off the inner sheet AS1A even when the tension required to peel the inner sheet AS1A from the second adhesive sheet AS2 is applied. Therefore, even if the inner sheet AS1A and the second adhesive sheet AS2 are adhered to each other, the inner sheet AS1A can be peeled off from the second adhesive sheet AS2.

The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the sheet cutting means may be anything that can cut the first adhesive sheet attached to one side of the adherend to a size that extends beyond the outer edge of the adherend, and separate the first adhesive sheet into an inner sheet attached to the adherend and an outer sheet positioned outside the inner sheet, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same goes for other means and steps).

The sheet cutting means 10 may cut the first adhesive sheet AS1 from the attached side of the first adhesive sheet AS1, or may cut the first adhesive sheet AS1 from the non-attached side of the first adhesive sheet AS1, the driving device (the articulated robot 11 in the above embodiment) that moves the cutting blade 12 may not be shared with the driving device that moves the suction pad 22 by the transport means 20, and the cutting blade 12 may be moved by another driving device, the cutting blade 12 may not be detachable from the articulated robot 11, and the articulated robot 11 may directly support the cutting blade 12 without using the bracket 12A.

The transfer means 20 may not be provided in the transfer device EA of the present invention in the case where the drive device (the articulated robot 11 in the above embodiment) for moving the suction pad 22 is not shared with the drive device for moving the cutting blade 12 in the sheet cutting means 10, but may be moved by another drive device, the suction pad 22 may not be detachable from the articulated robot 11, the articulated robot 11 may directly support the cutting suction pad 22 without going through the frame 21, at least one of the first ring frame RF1 and the outer sheet AS1B does not have to be removed from the first support table 62, the outer sheet AS1B or the first ring frame RF1 to which the outer sheet AS1B is attached is transported to a predetermined collection position by another device or by hand, the second ring frame RF2 is placed on the first support table 62 by another device or by hand, or the second ring frame RF2 is not placed on the first support table 62.

The sheet attachment means 30 may unroll a base roll in which a closed loop or a cut in the entire short width direction is formed in the strip-shaped adhesive sheet base material temporarily attached to the release sheet RL, and a predetermined area partitioned by the cut is the second adhesive sheet AS2. Alternatively, a base roll in which a strip-shaped adhesive sheet base material is temporarily attached to the release sheet RL may be used, and a cut means may be used to form a closed loop or a cut in the entire short width direction in the strip-shaped adhesive sheet base material, and a predetermined area partitioned by the cut is the second adhesive sheet AS2. Alternatively, the strip-shaped adhesive sheet base material may be attached to the adherend WK. When the second adhesive sheet AS2 is peeled off from the release sheet RL, the torque of the rotating motor 35A may be controlled so that a predetermined tension is applied to the base roll RS. Alternatively, instead of the rollers such as the support roller 31 and the guide roller 32, the base roll RS and the release sheet RL may be supported or guided by a plate-shaped member or a shaft member. Alternatively, the base roll RS may not be wound. For example, the second adhesive sheet AS2 may be supported in a fan-fold fold, or a pressing means may be adopted that is supported by the output shaft of a linear motor as a driving device, and that holds the second adhesive sheet AS2 with a holding member that can be adsorbed and held by a decompression means (not shown) such as a decompression pump or vacuum ejector, and that presses the second adhesive sheet AS2 held by the holding member to adhere to the adherend WK, or a recovery means may be adopted that recovers the release sheet RL by fan-folding the release sheet RL, shredding it with a shredder or the like, or randomly piling it up, or a recovery means may not be adopted, or the first support table 62 may move itself to adhere the second adhesive sheet AS2 to the adherend WK without moving or while moving, or the second adhesive sheet AS2 to which the release sheet RL is not temporarily attached may be unrolled and adhered to the adherend WK, or a configuration in which the second adhesive sheet AS2 is adhered only to the adherend WK may be adopted.

The inversion means 40 may be configured to hold at least one of the second ring frame RF2, the second adhesive sheet AS2, the inner sheet AS1A and the substrate WK in the second integrated object UP2 and invert the second integrated object UP2, or may be configured to invert the second integrated object UP2 without raising the second integrated object UP2, for example by retracting the first support table 62 from below the second integrated object UP2, or may be configured to be supported by the first support table 62 or the second support table 63, there may be one or three or more rotation motors 44 and there may be one or three or more chuck motors 45, or the transfer device EA of the present invention may not be provided with the inversion means 40 if the sheet peeling means 50 is configured to peel off the inner sheet AS1A, for example, from below the second integrated object UP2 supported by the first support table 62 while the second integrated object UP2 is formed by the sheet attachment means 30.

The sheet peeling means 50 may apply the peeling tape PT to an area of the inner sheet AS1A that is not attached to the adherend WK, as shown in FIG. 3(A), or may apply the peeling tape PT to an area closer to the center of the adherend WK than the outer edge of the adherend WK, as shown in FIG. 3(B), or may be configured to apply a sheet of peeling tape PT to the inner sheet AS1A, or may employ a pinch roller that pinches the peeling tape PT between the support roller 51C and the pay-out roller 52B and pays out the peeling tape PT without forcing the support roller 51C in the direction of the pay-out means 52, or may employ a linear motor to drive the pay-out means 52. At least one of the driving of the linear motor 57A and the driving of the linear motor 61 may be used to apply tension to the peeling tape PT to peel off the inner sheet AS1A from the adherend WK, or when the storage means 53C is lowered to a predetermined position directly above the inner sheet AS1A, the lead end of the peeling tape PT, which is sucked and held by the suction surface 53D, may be brought into contact with the inner sheet AS1A, or the storage means 53C may be omitted, or the holding auxiliary means 54 may not be employed and the peeling tape PT after the inner sheet AS1A has been peeled off may be held only by the lead holding means 53, or the holding auxiliary means 54 may be used in place of the auxiliary roller 54C. Alternatively, a configuration in which the peeling tape PT is brought into contact with the adsorption surface 53D by a rod-shaped member, a plate-shaped member, air blowing, or the like may be adopted, a configuration in which the pressure-sensitive adhesive peeling tape PT is attached to the inner sheet AS1A without or with the heating means 55D, a configuration in which the peeling tape PT is attached to the inner sheet AS1A by blowing gas instead of the pressing member 55C may be adopted, at least one of the peeling tape attaching means 55 and the cutting means 56 may not be contained in the containing means 53C, the peeling tape PT may not be cut, or the cutting means The peeling tape PT may be cut by other devices or by hand without using the linear motor 57A and peeling roller 57C, and for example, the second support table 63 may be moved without moving or while moving the peeling tape holding members such as the tape support means 51, the payout means 52, and the lead holding means 53, the peeling tape holding members may be moved without moving the second support table 63, or another device supporting the second integrated object UP2 may be moved relative to the peeling tape holding members to apply tension to the peeling tape PT and peel the inner sheet AS1A from the adherend WK.

The adherend transport means 60 may have separate drive devices for moving the first support table 62 and the second support table 63, or may have the first support table 62 perform the same operation as the second support table 63 without adopting the second support table 63, or may adopt a drive device for moving at least one of the first support table 62 and the second support table 63 in the forward and backward directions so that the adherend WK can also be moved in the left and right directions within the working area of each means, the planar shape of the groove 62B formed in the first support table 62 may be any ring shape such as a polygonal ring shape such as a triangle or a square, a circular ring shape, an elliptical ring shape, or the groove 62B may not be formed in the first support table 62, or a system for applying a holding force to the inner support surface 62A and the outer support surface 62C may be a single system, or the systems for applying a holding force to them may be separate systems. A system for each may be provided for a total of two systems, or one system may be provided for imparting a holding force to the holding portion 63A and the strong holding portion 63B, or one system each may be provided for imparting a holding force to them for a total of two systems, or the strong holding portion 63B may be formed in a part or all (annular) corresponding to the area on the inner sheet AS1A where the adherend WK is not attached, or it may be provided in the transfer device EA of the present invention, or it may not be provided, and if it is not provided in the transfer device EA of the present invention, the adherend WK may be transported by another device, or other means such as the sheet attachment means 30 and the sheet peeling means 60 may move without transporting the adherend WK, or if it is provided in the transfer device EA of the present invention, the adherend WK may be transported and other means such as the sheet attachment means 30 and the sheet peeling means 60 may move.

The adherend WK supplied to the transfer device EA may have only the first adhesive sheet AS1 affixed thereto, without being supported by the first ring frame RF1.
The first and second frame members may be, for example, non-annular members other than the annular first and second ring frames RF1, RF2.

The materials, types, shapes, etc. of the first and second adhesive sheets AS1, AS2, the peeling tape PT, and the adherend WK in the present invention are not particularly limited. For example, the first and second adhesive sheets AS1, AS2, the peeling tape PT, and the adherend WK may be circular, elliptical, polygonal such as triangular or rectangular, or other shapes, and the first and second sheets AS1, AS2, and the peeling tape PT may be pressure-sensitive, heat-sensitive, or other adhesive forms. When the first and second adhesive sheets AS1, AS2 with heat-sensitive adhesive properties are used, they may be bonded by an appropriate method such as providing a heating means such as a coil heater or the heating side of a heat pipe for heating the first and second adhesive sheets AS1, AS2. In addition, such first and second adhesive sheets AS1, AS2 and peeling tape PT may be, for example, a single layer of only an adhesive layer, a layer having an intermediate layer between the substrate and the adhesive layer, a layer having three or more layers such as a cover layer on the upper surface of the substrate, or even a so-called double-sided adhesive sheet in which the substrate can be peeled off from the adhesive layer, and the double-sided adhesive sheet may be a single layer or multiple layer with an intermediate layer or a single layer or multiple layer without an intermediate layer. In addition, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic, a wooden board, or a resin, or may be a composite formed of two or more of these, and may be a member or an article of any shape. In addition, the first and second adhesive sheets AS1 and AS2 may be read in terms of their functions and uses, and may refer to any sheet, film, tape, etc., such as an information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, or recording layer forming resin sheet.

The driving equipment in the above-described embodiments may be electric equipment such as a rotary motor, a linear motor, a single-axis robot, or a multi-joint robot having joints on two or more axes, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or a direct or indirect combination of these may also be used.
In the above embodiment, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable material such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable material, or other members such as a rotating or non-rotating shaft or blade may be used instead of the roller, when a pressing means or pressing member such as a pressing roller or a pressing head that presses the object to be pressed is used, a member such as a roller, a round bar, a blade material, rubber, resin, sponge, or the like may be used instead of or in combination with the above-mentioned examples, or a configuration in which pressing is performed by spraying air or gas, or the like, the pressing means may be made of a deformable material such as rubber or resin, or the like, or the like may be made of a non-deformable material, and when a peeling means or peeling member such as a peeling plate or peeling roller that peels the object to be peeled is used, a plate-shaped member, a round bar, a roller, or the like may be used instead of or in combination with the above-mentioned examples. A member such as a roller may be used, or the peeling part may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is used, a configuration in which the supported member is supported (held) may be used with a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), a magnetic force, Bernoulli adsorption, suction adsorption, a driving device, or the like. When a cutting means or a cutting member that cuts a member to be cut or forms an incision or cutting line in a member to be cut is used, a cutting means that cuts with a cutter blade, a laser cutter, an ion beam, fire, heat, water pressure, an electric heating wire, or spraying of gas or liquid, or the like may be used instead of or in combination with the above-mentioned examples. A cutting means that moves a cutting means by combining appropriate driving devices to perform cutting. When a biasing means is used, it may be made of a spring, rubber, resin, or the like.

EA: Transfer device 10: Sheet cutting means 30: Sheet attachment means 50: Sheet peeling means AS1: First adhesive sheet AS1A: Inner sheet AS1B: Outer sheet AS2: Second adhesive sheet PT: Peeling tape WK: Adherend WK1: One side WK2: Other side

Claims (2)

A sheet peeling device for peeling an inner sheet from an adherend having an inner sheet attached to one side and a second adhesive sheet attached to the other side in a size that protrudes from the outer edge, comprising:
a peeling tape having an adhesive strength such that the peeling tape will not come off the inner sheet even when tension necessary for peeling the inner sheet adhered to the second adhesive sheet is applied under conditions in which the outer edge of the inner sheet and the second adhesive sheet are in an adhered state when the inner sheet is peeled off from the adherend, and a sheet attachment means for attaching the peeling tape to an area of the inner sheet directly above the outer edge of the adherend or an area of the inner sheet closer to the center of the adherend than the outer edge of the adherend;
a sheet peeling means for applying tension to the peeling tape attached to the inner sheet to peel the inner sheet from the adherend, the sheet peeling device comprising: A sheet peeling method for peeling an inner sheet from an adherend having an inner sheet attached to one side and a second adhesive sheet attached to the other side in a size that protrudes from the outer edge, comprising:
preparing a peeling tape having an adhesive strength such that the peeling tape will not come off the inner sheet even when a tension necessary for peeling the inner sheet adhered to the second adhesive sheet is applied under conditions in which the outer edge of the inner sheet and the second adhesive sheet are in an adhered state when the inner sheet is peeled off from the adherend;
a step of attaching the peeling tape to an area of the inner sheet immediately above an outer edge of the adherend or an area of the inner sheet closer to a center of the adherend than the outer edge of the adherend;
and a step of applying tension to the peeling tape attached to the inner sheet to peel the inner sheet from the adherend.