JP7698536B2 - SUBSTRATE PROCESSING APPARATUS, ANALYSIS METHOD, DISPLAY DEVICE AND PROGRAM - Google Patents

Description

The present invention relates to a substrate processing apparatus and a technology for displaying and analyzing the operating status of the substrate processing apparatus.

Conventionally, in substrate processing equipment that processes semiconductor substrates (hereinafter simply referred to as "substrates"), for example, a FOUP or the like that contains the substrate is opened by a load port, and the substrate is removed from the FOUP or the like by an indexer robot. The substrate is then handed over from the indexer robot to a center robot, which then transports the substrate to one of multiple processing units, where it is subjected to various processes.

In such substrate processing apparatus, if an abnormality occurs in a processing unit, the amount of substrates processed and the yield decrease. Patent Document 1 discloses a technique for analyzing time-series data of the measurement results of physical quantities (e.g., temperature) that indicate the state of a processing unit, to identify the processing unit in which an abnormality has occurred and the cause of the abnormality.

JP 2020-47077 A

However, in the above-mentioned substrate processing apparatus, even if no abnormality occurs in the operating parts such as the load port, indexer robot, center robot, and processing units, the substrate processing volume of the apparatus as a whole may decrease, for example, when substrates are not supplied to a certain operating part and the waiting time is long. In such cases, the cause of the decrease in processing volume cannot be identified by simply detecting an abnormality in the processing unit as in Patent Document 1. For this reason, there is a demand to know the relationship between the substrate processing results and the operating status of the operating parts in the substrate processing apparatus.

The present invention was developed in consideration of the above problems, and aims to easily recognize the detailed operating status of the operating parts in association with the processing results of the substrate.

The invention according to claim 1 is a substrate processing apparatus comprising: a load port group which is a group of load ports which hold carriers in which a plurality of substrates are stored; a processing unit group which is a group of processing units in which substrate processing is performed; a transport mechanism which transports substrates between the load port group and the processing unit group; an information storage unit which stores operation information which is information relating to the operation of an operating part group including the load port group, the processing unit group and the transport mechanism; an information display unit; and a display control unit which causes the information display unit to display the operation information in a predetermined display mode, the operation information being processing result information which indicates a processing result of the substrate in the substrate processing apparatus; and operating status information which indicates a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of the operating parts included in the operating part group. the operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states which are major classifications and a plurality of minor operating states which are further classified into the plurality of major operating states, and the display control unit displays the processing result information on the information display unit in a state where the information is organized with respect to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus, the display control unit displays the operating state information on the information display unit in a state where the information is organized with respect to sorting items selected from the group of sorting items , and the display control unit displays the operating state information related to the load port group on the information display unit in a state where the information is arranged side by side for each load port.
The invention of claim 2 is a substrate processing apparatus comprising: a load port group which is a group of load ports which hold carriers in which a plurality of substrates are stored; a processing unit group which is a group of processing units in which substrate processing is performed; a transport mechanism which transports substrates between the load port group and the processing unit group; an information storage unit which stores operation information which is information relating to the operation of an operating part group including the load port group, the processing unit group and the transport mechanism; an information display unit; and a display control unit which causes the information display unit to display the operation information in a predetermined display mode, the operation information including processing result information which indicates a result of substrate processing in the substrate processing apparatus, and operation status information which indicates a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of operating parts included in the operating part group, The operating states of the operating parts are each hierarchically classified into a plurality of major category operating states and a plurality of minor category operating states which are further classified into the plurality of major category operating states, and the display control unit displays the processing result information on the information display unit in a state where the processing result information is organized with respect to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus, and the display control unit classifies the operating state information into the plurality of major category operating states and the plurality of minor category operating states in a state where the operating state information is organized with respect to sorting items selected from the group of sorting items, and displays the information display unit with the operating state information classified with respect to sorting items selected from the group of sorting items, and reference processing result information which is the processing result information for a predetermined reference aggregation period is prepared in advance, and the display control unit displays the processing result information for the selected specified aggregation period and the reference processing result information in a comparable manner.
The invention of claim 3 is a substrate processing apparatus comprising: a load port group which is a group of load ports which hold carriers storing a plurality of substrates; a processing unit group which is a group of processing units in which substrate processing is performed; a transport mechanism which transports substrates between the load port group and the processing unit group; an information storage unit which stores operation information which is information relating to operation of an operating part group including the load port group, the processing unit group and the transport mechanism; an information display unit; and a display control unit which displays the operation information on the information display unit in a predetermined display mode, wherein the operation information includes processing result information which indicates a processing result of the substrate in the substrate processing apparatus, and operating status information which indicates a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of the operating parts included in the operating part group, and the operating statuses of the substrate processing apparatus and the operating parts are each divided into a plurality of major operating statuses which are major classifications; The plurality of major category operation states are further classified hierarchically into a plurality of minor category operation states, and the display control unit displays the processing result information on the information display unit in a state where the information is organized according to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus. The display control unit classifies the operation status information into the plurality of major category operation states and the plurality of minor category operation states in a state where the information is organized according to sorting items selected from the group of sorting items, and displays them on the information display unit. Reference operation status information, which is the operation status information for a predetermined reference aggregation period, is prepared in advance, and the display control unit displays the operation status information for a selected specified aggregation period, and highlights major category operation states or minor category operation states among the operation status information for the specified aggregation period that have deteriorated to a predetermined degree or more compared to the reference operation status information.

The invention described in claim 4 is a substrate processing apparatus described in any one of claims 1 to 3 , wherein, when the display control unit classifies the operating status information into the plurality of major operating states after organizing the sorting items and displays the information on the information display unit, the display control unit displays the information in a first graph color-coded for each major operating state, and when the display control unit classifies the operating status information into the plurality of minor operating states after organizing the sorting items and displays the information on the information display unit, the display control unit displays the information in a second graph color-coded for each minor operating state, and in the second graph, a plurality of minor operating states corresponding to one major operating state are color-coded in a color similar to the color of the one major operating state in the first graph.

The invention described in claim 5 is a substrate processing apparatus described in any one of claims 1 to 4 , wherein the operating status information includes timestamps which are the start and end points of the operating status associated with the operating status of the operating part, and the display control unit causes the information display unit to display a time series display showing the operating status in chronological order.

The invention described in claim 6 is a substrate processing apparatus described in any one of claims 1 to 5 , wherein the display control unit displays the operating status information regarding the operating part group on the information display unit in a state in which the operating part group is listed according to the type of operating part included in the operating part group.

The invention described in claim 7 is a substrate processing apparatus described in any one of claims 1 to 6 , wherein the display control unit displays the operating status information regarding the processing unit group on the information display unit in a state in which each processing unit is listed side by side.

The invention described in claim 8 is a substrate processing apparatus described in any one of claims 1 to 7 , wherein the group of organized items includes one or more of the operating period, operating time zone, operating day of the week, and processing recipe as organized items, and the display control unit is capable of displaying the processing result information on the information display unit in a state where it is organized with respect to the one or more items.

The invention described in claim 9 is a substrate processing apparatus described in any one of claims 1 to 8 , wherein the group of organized items includes one or more of the operating period, operating time zone, and operating day of the week as organized items, and the display control unit is capable of displaying the operating status information on the information display unit in a state where it is organized with respect to the one or more items.

The invention described in claim 10 is a substrate processing apparatus described in any one of claims 1 to 9 , wherein the display control unit also causes the information display unit to display the processing result information and the operating status information of other substrate processing apparatuses having the same configuration as the substrate processing apparatus.

The invention described in claim 11 is an analysis method for analyzing the operating status of a substrate processing apparatus, comprising: a) a step of displaying the processing result information on the information display unit in a state where the processing result information is organized for any operating period of the substrate processing apparatus in the substrate processing apparatus described in any one of claims 1 to 10 ; b) a step of classifying the operating status information into the plurality of major operating states in a state where the operating status information is organized for the operating period and displaying it on the information display unit; c) a step of classifying one major operating state among the plurality of major operating states that is believed to be a cause of deterioration in processing results into the plurality of minor operating states and displaying them on the information display unit; and d) a step of focusing on one minor operating state among the plurality of minor operating states that is believed to be a cause of deterioration in processing results, selecting an associated operating part group which is a set of operating parts among the operating part group that are related to the one minor operating state, and displaying on the information display unit a time series display showing the operating status of the substrate processing apparatus in time series, and a time series display showing the operating status of each of the associated operating part groups in time series.

The invention of claim 12 is a display device for displaying an operating state of a substrate processing apparatus including a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group which is a group of processing units in which substrate processing is performed, and a transport mechanism that transports substrates between the load port group and the processing unit group, the display device comprising an information display section, and a display control section that causes the information display section to display operation information, which is information related to the operation of an operating part group including the load port group, the processing unit group, and the transport mechanism, in a predetermined display mode, the operation information comprising processing result information indicating a processing result of the substrate in the substrate processing apparatus, and operating state information indicating a temporal breakdown of the operating state of the substrate processing apparatus and a temporal breakdown of the operating state of the operating parts included in the operating part group. and the operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states which are major classifications and a plurality of minor operating states which are further classified into the plurality of major operating states, and the display control unit displays the processing result information on the information display unit in a state where the information is organized with respect to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus, and the display control unit displays the operating state information on the information display unit in a state where the information is organized with respect to sorting items selected from the group of sorting items , and the display control unit displays the operating state information related to the load port group on the information display unit in a state where the information is arranged side by side for each load port.
The invention described in claim 13 is a display device for displaying an operating state of a substrate processing apparatus including a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group which is a group of processing units in which substrate processing is performed, and a transport mechanism that transports substrates between the load port group and the processing unit group, the display device comprising an information display section, and a display control section that causes operation information, which is information relating to the operation of an operating part group including the load port group, the processing unit group, and the transport mechanism, to be displayed on the information display section in a predetermined display mode, the operation information including processing result information indicating a processing result of the substrate in the substrate processing apparatus, and operating state information indicating a temporal breakdown of the operating state of the substrate processing apparatus and a temporal breakdown of the operating state of the operating parts included in the operating part group, The operating states of the operating parts are each hierarchically classified into a plurality of major category operating states and a plurality of minor category operating states which are further classified into the plurality of major category operating states, and the display control unit displays the processing result information on the information display unit in a state where the processing result information is organized with respect to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus, and the display control unit classifies the operating state information into the plurality of major category operating states and the plurality of minor category operating states in a state where the operating state information is organized with respect to sorting items selected from the group of sorting items, and displays the information display unit with the operating state information classified with respect to sorting items selected from the group of sorting items, and reference processing result information which is the processing result information for a predetermined reference aggregation period is prepared in advance, and the display control unit displays the processing result information for the selected specified aggregation period and the reference processing result information in a comparable manner.
The invention described in claim 14 is a display device for displaying an operating status of a substrate processing apparatus including a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group which is a group of processing units in which substrate processing is performed, and a transport mechanism that transports substrates between the load port group and the processing unit group, the display device including an information display unit and a display control unit that causes operation information, which is information related to the operation of an operating part group including the load port group, the processing unit group, and the transport mechanism, to be displayed on the information display unit in a predetermined display mode, the operation information including processing result information indicating a processing result of the substrate in the substrate processing apparatus and operating status information indicating a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of the operating parts included in the operating part group, the operating statuses of the substrate processing apparatus and the operating parts being respectively divided into a plurality of major operating statuses which are major classifications, The plurality of major category operation states are further classified hierarchically into a plurality of minor category operation states, and the display control unit displays the processing result information on the information display unit in a state where the information is organized according to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus. The display control unit classifies the operation status information into the plurality of major category operation states and the plurality of minor category operation states in a state where the information is organized according to sorting items selected from the group of sorting items, and displays them on the information display unit. Reference operation status information, which is the operation status information for a predetermined reference aggregation period, is prepared in advance, and the display control unit displays the operation status information for a selected specified aggregation period, and highlights major category operation states or minor category operation states among the operation status information for the specified aggregation period that have deteriorated to a predetermined degree or more compared to the reference operation status information.

The invention described in claim 15 is a program for displaying, on an information display unit in a predetermined display mode, operation information relating to operation of an operating part group including a load port group, which is a group of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group, which is a group of processing units in which substrate processing is performed, and a transport mechanism that transports substrates between the load port group and the processing unit group, the operation information including processing result information indicating a processing result of the substrate in the substrate processing apparatus and operation status information indicating a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of operating parts included in the operating unit group, and the substrate processing apparatus and The operating states of the operating parts and the operating states of the operating units are each hierarchically classified into a plurality of major category operating states which are major classifications and a plurality of minor category operating states which are further classified into the plurality of major category operating states, and when the program is executed by a computer, the processing result information is displayed on the information display unit in a state where it is organized according to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus, the operating status information is classified into the plurality of major category operating states and the plurality of minor category operating states in a state where it is organized according to sorting items selected from the group of sorting items and displayed on the information display unit , and the operating status information relating to the load port group is displayed on the information display unit in a state where it is listed side by side for each load port.
The invention of claim 16 is a program for displaying, on an information display unit, operation information relating to operation of an operating part group including a load port group, which is a group of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group, which is a group of processing units in which substrate processing is performed, and a transport mechanism that transports substrates between the load port group and the processing unit group, in a predetermined display mode, the operation information including processing result information indicating a processing result of a substrate in the substrate processing apparatus, and operation status information indicating a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of operating parts included in the operating part group, and the operating statuses of the substrate processing apparatus and the operating parts are each approximately The operating status information is hierarchically classified into a plurality of major operating states which are a classification, and a plurality of minor operating states which are further classified into the plurality of major operating states, and reference processing result information which is the processing result information for a predetermined reference aggregation period is prepared in advance, and when the program is executed by a computer, the processing result information is displayed on the information display unit in a state where it is organized according to sorting items selected from a predetermined group of sorting items including any operation period of the substrate processing apparatus, and the operating status information is classified into each of the plurality of major operating states and the plurality of minor operating states in a state where it is organized according to sorting items selected from the group of sorting items, and displayed on the information display unit, and the processing result information for the selected specified aggregation period and the reference processing result information are displayed so that they can be compared.
The invention described in claim 17 is a program for displaying, on an information display unit in a predetermined display mode, operation information relating to operation of an operating part group including a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group which is a group of processing units in which substrate processing is performed, and a transport mechanism that transports substrates between the load port group and the processing unit group, the operation information including processing result information indicating a processing result of a substrate in the substrate processing apparatus, and operation status information indicating a temporal breakdown of the operating status of the substrate processing apparatus and a temporal breakdown of the operating status of operating parts included in the operating part group, the operating statuses of the substrate processing apparatus and the operating parts are each divided into a plurality of major operating statuses which are major classifications, and a plurality of major operating statuses which are further divided into a plurality of major operating statuses. and a plurality of small section operating states classified into a plurality of major section operating states and a plurality of small section operating states classified into a plurality of minor section operating states, and reference operating state information, which is the operating state information for a specified reference aggregation period, is prepared in advance, and when the program is executed by a computer, the processing result information is displayed on the information display unit in a state where it is organized with respect to sorting items selected from a specified group of sorting items including any operation period of the substrate processing apparatus, and the operating state information is classified into the plurality of major section operating states and the plurality of small section operating states and displayed on the information display unit in a state where it is organized with respect to sorting items selected from the group of sorting items, the operating state information for a selected specified aggregation period is displayed, and among the operating state information for the specified aggregation period, major section operating states or small section operating states that have deteriorated to a specified degree or more compared to the reference operating state information are highlighted.

The present invention makes it easy to recognize the detailed operating status of the operating parts in relation to the processing results of the substrate.

1 is a plan view of a substrate processing apparatus according to an embodiment; FIG. 2 is a front view showing the inside of the substrate processing apparatus. FIG. 2 illustrates an example of a processing unit. FIG. 1 illustrates a configuration of a computer. FIG. 2 is a block diagram showing functions realized by a computer. FIG. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram illustrating graph elements. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 13 is a diagram showing a flow of an operation state analysis. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is a diagram showing a screen of a display. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen. FIG. 2 is an enlarged view of a portion of a display screen.

Figure 1 is a plan view of a substrate processing apparatus 1 according to one embodiment of the present invention. Figure 2 is a view of the substrate processing apparatus 1 taken along line II-II in Figure 1. Note that each of the figures referred to below is appropriately illustrated with an XYZ Cartesian coordinate system in which the Z-axis direction is the vertical direction (i.e., the up-down direction) and the XY plane is the horizontal plane. Also, part of the (+X) side of the substrate processing apparatus 1 is not shown in Figure 2.

The substrate processing apparatus 1 is an apparatus that performs continuous processing on a plurality of substantially disk-shaped semiconductor substrates 9 (hereinafter simply referred to as "substrates 9"). In the substrate processing apparatus 1, for example, liquid processing is performed in which a processing liquid is supplied to the substrates 9.

The substrate processing apparatus 1 includes multiple load ports 11, an indexer block 10, a processing block 20, a placement unit 40, and a computer 8. The indexer block 10 and the processing block 20 are also called an indexer cell and a processing cell, respectively. The indexer block 10 is also called an Equipment Front End Module (EFEM) unit, etc. In the example shown in FIG. 1, three load ports 11, the indexer block 10, and the processing block 20 are arranged adjacent to each other in this order from the (-X) side to the (+X) side. In the following description, the multiple load ports 11 are also collectively called a "load port group 110."

The load port group 110, which is a collection of load ports 11, is arranged in the Y direction along the (-X) sidewall of the indexer block 10. Each of the multiple load ports 11 is a holder that holds a carrier 95. The carrier 95 is capable of storing multiple disk-shaped substrates 9. The carrier 95 is, for example, a FOUP (Front Opening Unified Pod) that stores the substrates 9 in an enclosed space. The carrier 95 is not limited to a FOUP, and may be, for example, a SMIF (Standard Mechanical Inter Face) pod. The number of load ports 11 included in the load port group 110 may be one, or two or more.

The load port 11 also serves as an opening/closing mechanism for opening and closing the carrier 95. An opening and a carrier shutter are provided in the side wall on the (-X) side of the indexer block 10 at a position corresponding to the carrier 95 on each load port 11. When the substrate 9 is loaded or unloaded from the carrier 95, the carrier 95 and the carrier shutter are automatically opened and closed.

A carrier 95 containing a plurality of unprocessed substrates 9 is brought into each load port 11 from outside the substrate processing apparatus 1 by an AGV (Automated Guided Vehicle) or the like and placed thereon. In addition, the processed substrates 9 that have completed processing in the processing block 20 are stored again in the carrier 95 held in the load port 11. The carrier 95 containing the processed substrates 9 is transported outside the substrate processing apparatus 1 by the AGV or the like. In other words, the load port 11 functions as a substrate accumulation section that accumulates unprocessed substrates 9 and processed substrates 9.

The indexer block 10 receives unprocessed substrates 9 from the carrier 95 and passes them to the processing block 20. The indexer block 10 also receives processed substrates 9 that have been removed from the processing block 20 and transports them into the carrier 95. An indexer robot 12 that transports substrates 9 into and out of the carrier 95 is disposed in the internal space 100 of the indexer block 10.

The indexer robot 12 comprises two transport arms 121a and 121b, an arm stage 122, and a movable table 123. The two transport arms 121a and 121b are mounted on the arm stage 122. The movable table 123 is screwed to a ball screw 124 that extends parallel to the arrangement direction of the multiple load ports 11 (i.e., along the Y direction), and is provided so as to be freely slidable relative to two guide rails 125. When the ball screw 124 is rotated by a rotary motor (not shown), the entire indexer robot 12 including the movable table 123 moves horizontally along the Y direction.

The arm stage 122 is mounted on a movable base 123. The movable base 123 contains a motor (not shown) that rotates the arm stage 122 around a rotation axis facing in the vertical direction (i.e., the Z direction), and a motor (not shown) that moves the arm stage 122 in the vertical direction. Transport arms 121a and 121b are arranged vertically spaced apart on the arm stage 122.

The tips of the transport arms 121a and 121b are each provided with a hand 126 that is approximately U-shaped in a plan view. The hand 126 has, for example, a base portion that extends in the width direction and two claw portions that extend approximately parallel in the longitudinal direction perpendicular to the width direction from both ends of the base portion in the width direction. The transport arms 121a and 121b each support the bottom surface of one substrate 9 with the hand 126. The hand 126 is provided with a clamping mechanism (not shown), and the relative position of the substrate 9 with respect to the hand 126 is fixed with high positional accuracy. The clamping mechanism may be, for example, a plurality of protrusions that contact the side edges of the substrate 9 to mechanically limit the position of the substrate 9, or a plurality of suction ports that adsorb the bottom surface of the substrate 9.

The transport arms 121a and 121b move independently of each other in the horizontal direction (i.e., the radial direction centered on the rotation axis of the arm stage 122) by bending and extending the multi-joint mechanism by a drive mechanism (not shown) built into the arm stage 122. In other words, the hand 126 is provided on the indexer robot 12 so that it can move forward and backward, rise and fall, and rotate freely. The number of transport arms on the indexer robot 12 may be one, or three or more.

The indexer robot 12 is a transport robot that transports the substrate 9 between the carrier 95 and the placement unit 40 by individually accessing the transport arms 121a and 121b, which hold the substrate 9 by the hand 126, to the carrier 95 and the placement unit 40 placed on the load port 11. The above-mentioned movement mechanism in the indexer robot 12 is not limited to the above example, and may be another mechanism. For example, a belt feed mechanism using a pulley and a timing belt may be adopted as a mechanism for moving the transport arms 121a and 121b in the vertical direction.

The processing block 20 is provided with a transport path 23 used to transport the substrate 9, and a number of processing units 21 arranged around the transport path 23. In the example shown in FIG. 1, the transport path 23 extends in the X direction at the center of the processing block 20 in the Y direction. A center robot 22 is arranged in the internal space 230 of the transport path 23 to transport the substrate 9 to and from each processing unit 21.

The center robot 22 includes two transport arms 221a and 221b, an arm stage 222, and a base 223. The two transport arms 221a and 221b are mounted on the arm stage 222. The base 223 is fixed to the frame of the processing block 20. Therefore, the base 223 of the center robot 22 does not move horizontally or vertically. Note that the base 223 of the center robot 22 may be movable, for example, horizontally.

The arm stage 222 is mounted on a base 223. The base 223 contains a motor (not shown) that rotates the arm stage 222 around a rotation axis facing in the vertical direction, and a motor (not shown) that moves the arm stage 222 in the vertical direction. Transport arms 221a and 221b are arranged vertically spaced apart on the arm stage 222.

The tips of the transport arms 221a and 221b are each provided with a hand 226 that is approximately U-shaped in a plan view. The hand 226 has, for example, a base portion that extends in the width direction and two claw portions that extend approximately parallel in the longitudinal direction perpendicular to the width direction from both ends of the base in the width direction. The transport arms 221a and 221b each support the bottom surface of one substrate 9 with the hand 226. The hand 226 is provided with a clamping mechanism (not shown), and the relative position of the substrate 9 with respect to the hand 226 is fixed with high positional accuracy. The clamping mechanism may be, for example, a plurality of protrusions that contact the side edges of the substrate 9 to mechanically limit the position of the substrate 9, or a plurality of suction ports that adsorb the bottom surface of the substrate 9.

The transport arms 221a and 221b move independently of each other in the horizontal direction (i.e., the radial direction around the rotation axis of the arm stage 222) by bending and extending the multi-joint mechanism using a drive mechanism (not shown) built into the arm stage 222. In other words, the hand 226 is provided on the center robot 22 so that it can move forward and backward, rise and fall, and rotate freely. The number of transport arms on the center robot 22 may be one, or three or more.

The center robot 22 is a transport robot that transports the substrate 9 between the placement unit 40 and the processing units 21 by having the transport arms 221a and 221b, which hold the substrate 9 by the hand 226, access the placement unit 40 and the multiple processing units 21 individually. The above-mentioned movement mechanism in the center robot 22 is not limited to the above example, and may be another mechanism. For example, a belt feed mechanism using a pulley and a timing belt may be adopted as a mechanism for moving the transport arms 221a and 221b in the vertical direction.

Each processing unit 21 is a processing section that performs a predetermined process on the substrate 9. In the example shown in Figures 1 and 2, twelve processing units 21 are provided in the processing block 20. Specifically, four groups of three processing units 21 stacked in the Z direction are arranged around the center robot 22 in a plan view. In the following description, the multiple processing units 21 are collectively referred to as a "processing unit group 210." The number of processing units 21 included in the processing unit group 210 may be changed in various ways within a range of one or more.

The placement unit 40 is provided at the connection between the indexer block 10 and the processing block 20. As described above, the indexer robot 12 and the center robot 22 can access the placement unit 40. The placement unit 40 is connected to the processing unit group 210, which is a collection of processing units 21, via the transport path 23 on which the center robot 22 is arranged.

The indexer robot 12 places the unprocessed substrate 9 removed from the carrier 95 on the placement unit 40. The center robot 22 removes the unprocessed substrate 9 from the placement unit 40 and carries it into the processing unit 21. The center robot 22 also places the processed substrate 9 removed from the processing unit 21 on the placement unit 40. The indexer robot 12 removes the processed substrate 9 from the placement unit 40 and carries it into the carrier 95. In other words, the indexer robot 12 and the center robot 22 are a transport mechanism that transports the substrate 9 between the load port group 110 and the processing unit group 210. The placement unit 40 temporarily holds the unprocessed substrate 9 transferred from the indexer robot 12 to the center robot 22 and the processed substrate 9 transferred from the center robot 22 to the indexer robot 12.

Figure 3 is a diagram showing an example of a processing unit 21. The processing unit 21 includes a housing 31, a substrate holder 32, a substrate rotation mechanism 33, a cup portion 34, and a processing nozzle 35. The substrate holder 32, the substrate rotation mechanism 33, the cup portion 34, and the processing nozzle 35 are housed inside the housing 31. An opening 311 is provided on the side wall of the housing 31 for carrying the substrate 9 inside by the center robot 22 (see Figures 1 and 2). The opening 311 is openable and closable, and is opened when the substrate 9 is carried in and out, and is closed when the substrate 9 is processed. In the processing unit 21, for example, liquid processing is performed by supplying a processing liquid to the substrate 9.

In the example shown in FIG. 3, the substrate holding unit 32 is a mechanical chuck that holds the substrate 9 in a horizontal state. The substrate holding unit 32 includes a base 321, a shaft 322, and a plurality of chuck pins 323. The base 321 is a substantially disk-shaped member centered on a rotation axis J1 that faces the vertical direction. In the following description, the vertical direction in FIG. 3 is described as coinciding with the Z direction described above, but this does not necessarily have to be the case. The shaft 322 is a substantially cylindrical or columnar member centered on the rotation axis J1. The shaft 322 extends downward from the bottom surface of the base 321 and is connected to the substrate rotation mechanism 33.

A number of chuck pins 323 (e.g., six) are erected on the upper surface of the base 321. The number of chuck pins 323 are arranged circumferentially on the outer periphery of the upper surface of the base 321. The number of chuck pins 323 directly contact the outer periphery of the substrate 9 and mechanically hold the outer periphery of the substrate 9. When the substrate 9 is held by the number of chuck pins 323, the upper surface of the base 321 faces the lower surface of the substrate 9 in the vertical direction while being spaced downward from the lower surface of the substrate 9.

The substrate rotation mechanism 33 rotates the substrate 9 held by the substrate holding part 32 by rotating the substrate holding part 32 around the rotation axis J1. The substrate rotation mechanism 33 is, for example, an electric motor connected to the shaft 322 of the substrate holding part 32. The substrate rotation mechanism 33 may be a rotation mechanism other than an electric motor. The substrate rotation mechanism 33 is housed inside a cover 331 arranged below the substrate holding part 32.

The processing nozzle 35 ejects the processing liquid from above the substrate 9 toward the upper surface of the substrate 9. In FIG. 3, the configuration for supporting the processing nozzle 35 above the substrate 9 is omitted. The cup portion 34 is a substantially cylindrical member that surrounds the entire circumference of the substrate holding portion 32. The cup portion 34 is a liquid receiver that receives the processing liquid and the like that splashes from the rotating substrate 9 to the surroundings. The cup portion 34 can be moved up and down by a cup lifting mechanism (not shown). When the substrate 9 is processed, the cup portion 34 is disposed in a position facing the side edge of the substrate 9 in the radial direction (hereinafter also simply referred to as the "radial direction") centered on the rotation axis J1, as shown in FIG. 3. In addition, when the substrate 9 is transferred between the hand 226 of the center robot 22 and the substrate holding portion 32, the cup portion 34 moves downward from the position shown in FIG. 3.

Figure 4 is a diagram showing the configuration of the computer 8. The computer 8 is a normal computer equipped with a processor 81, a memory 82, an input/output unit 83, and a bus 84. The bus 84 is a signal circuit that connects the processor 81, the memory 82, and the input/output unit 83. The memory 82 stores various information. For example, the memory 82 reads and stores a program 89 that is pre-stored in the storage medium 80. The storage medium 80 is, for example, a USB memory or a CD-ROM. The processor 81 executes various processes (for example, numerical calculations) while using the memory 82, etc., according to the program 89, etc. stored in the memory 82. The input/output unit 83 includes a keyboard 85 and a mouse 86 that accept input from an operator, a display 87 that displays the output, etc. from the processor 81, and a transmission unit 88 that transmits the output, etc. from the processor 81.

Figure 5 is a block diagram showing functions realized by the computer 8 executing the program 89. The substrate processing apparatus 1 includes an information storage unit 61 and a display control unit 62 as functions realized by the computer 8. The information storage unit 61 is mainly realized by the memory 82, and stores various information such as operation information described below. The display control unit 62 is mainly realized by the processor 81, and extracts information corresponding to the input from the operation information stored in the information storage unit 61 based on input from the keyboard 85 and mouse 86, and displays the information in a predetermined display mode (i.e., format) on the display 87, which is the information display unit.

The operation information stored in the information storage unit 61 is information about the operation of the operating part group, which is a collection of operating parts such as the load port group 110, the transport mechanism (i.e., the indexer robot 12 and the center robot 22), and the processing unit group 210. The operating part group may include components other than the load port group 110, the transport mechanism, and the processing unit group 210 as operating parts (e.g., a chemical cabinet that supplies processing liquid to the processing unit group 210). As shown in FIG. 6, the operation information 70 includes processing result information 71 and operating status information 72. The processing result information 71 is information indicating the processing result of the substrate 9 in the substrate processing apparatus 1. The operating status information 72 is information indicating the time breakdown of the operating status of the substrate processing apparatus 1 and the time breakdown of the operating status of the operating parts included in the operating part group. The information storage unit 61 acquires electrical signals such as command signals from an operation control unit that controls the operation of the operating part group, and generates and stores the processing result information 71 and the operating status information 72 based on the command signals. The operation control unit is realized by the computer 8 described above.

The processing result information 71 includes, for example, the number of substrates 9 processed in the substrate processing apparatus 1 during a predetermined period, the number of substrates processed normally, and the number of substrates processed abnormally. The predetermined period is, for example, one day, one week, one month, etc. The processing result information 71 may include various information other than the above. For example, the processing number of substrates 9 processed by recipe in the substrate processing apparatus 1, the number of substrates 9 processed per available processing time, the number of substrates 9 processed per processing unit 21, the number of substrates 9 checked by an alarm, the amount of processing liquid used in the substrate processing apparatus 1, etc. may be included in the processing result information 71. The processing result information 71 can be acquired by various known means related to substrate processing. For example, the number of substrates 9 processed can be acquired by counting the number of substrates 9 that are brought into the substrate processing apparatus 1 and taken out after processing.

The operating states of the substrate processing apparatus 1 and the group of operating parts, the time breakdown of which is shown by the operating state information 72, are each hierarchically classified into a number of broad operating state categories, which are in turn further classified into a number of sub-categorised operating states.

Table 1 shows an example of a hierarchical classification of operating states. In the example shown in Table 1, the broad operating state categories include three operating states: "stopped," "standby," and "processing." In this embodiment, the operating states of the substrate processing apparatus 1, each load port 11, indexer robot 12, center robot 22, and each processing unit 21 are classified hierarchically as shown in Table 1.

The "stopped" state is classified into five sub-operational states: "Power Off," "Not Ready," "Alarm Stop," "Maintenance Required," and "Recovery in Progress." "Power Off" indicates a state in which the power to the substrate processing apparatus 1 or the operating units is turned off. "Not Ready" indicates a state in which the substrate processing apparatus 1 or the operating units are not ready to process substrates 9. "Alarm Stop" indicates a state in which processing of substrates 9 has been stopped due to an alarm. "Recovery Required" indicates a state in which the apparatus has stopped due to abnormal processing or the like, and recovery work by the operator is required. "Recovery in Progress" indicates a state in which recovery work is being performed by the operator.

The "standby" state is classified into three sub-operation states: "ready," "operator stop," and "preparation." "Waiting" indicates a state in which the substrate 9 can be processed, but is on standby because there is no instruction to process the substrate 9. "Stop" indicates a state in which processing of the substrate 9 has been suspended due to a stop instruction from the operator. "Preparation" is a preparatory process for processing the substrate 9, and indicates a state in which processing of the substrate starts automatically after the preparatory process is completed. The "processing" state includes one sub-operation state, "execute." "Processing" indicates a state in which the substrate 9 is being processed normally. The "processing" state may also be classified into multiple sub-operation states, similar to the "stop" and "standby" states.

The operating status information 72 can be obtained by various known means related to substrate processing, such as, for example, tallying up signals from a control unit that controls each operating unit. The above-mentioned hierarchical classification of operating states may be modified in various ways. For example, the major operating states and minor operating states may be classified according to classification criteria different from those in Table 1. Furthermore, the major operating states and minor operating states do not need to be classified in common in the substrate processing apparatus 1 and the multiple operating units, and may be different from each other. The operating status information 72 may include information other than the major operating states and minor operating states. For example, the multiple minor operating states may be further classified into multiple fine operating states. Alternatively, the operating status information 72 may include sub-data such as the number of alarms generated in the substrate processing apparatus 1 and the residence time of the substrate 9 in the processing block 20.

The display control unit 62 displays the processing result information 71 on the display 87 in a state where the information is organized according to one or more sorting items selected from a predetermined group of sorting items. The group of sorting items includes any operation period of the substrate processing apparatus 1 as an organized item. The operation period is, for example, the day on which the substrate 9 was processed in the substrate processing apparatus 1 (hereinafter also referred to as the "processing date"). The operation period may also be, for example, the week, month, and/or year on which the substrate 9 was processed in the substrate processing apparatus 1. The group of sorting items may include various sorting items other than the operation period (for example, recipe type, etc.). The display control unit 62 displays, for example, the number of substrates 9 processed in the substrate processing apparatus 1 on the display 87 in a state where the information is organized according to the processing date, which is one sorting item.

7 is a diagram showing an example of a display on the display 87. The graph 511 in FIG. 7 is a bar graph showing the number of substrates 9 processed (i.e., details of production volume) on each processing day of the substrate processing apparatus 1 during a specified period (April 1 to 15). The specified period (hereinafter also referred to as the "designated tally period") is displayed at the top of the display 87. The designated tally period can be changed by input by the operator, etc. The horizontal axis of the graph 511 indicates the processing date, which is one sorting item, and the vertical axis indicates the number of substrates processed. In addition, the total number of substrates 9 processed (i.e., total production volume) during the specified tally period is displayed in the window 512 at the upper left of the graph 511. As shown in FIG. 7, the sorting items are parameters that are the basis (e.g., the axis of the graph) when displaying the processing result information 71, and the processing result information 71 to be analyzed is displayed on the display 87 divided by the sorting items (i.e., in a state where the sorting items are sorted). In other words, the sorting items are also analysis items for analyzing the processing result information 71. Additionally, as described below, the sorting items are parameters that serve as criteria (e.g., graph axes) when displaying the operational status information 72, and are also analysis items for analyzing the operational status information 72.

Graph 513 in FIG. 7 is a pie chart showing the operating status information 72 of the substrate processing apparatus 1. Graph 513 shows the operating status of the substrate processing apparatus 1 during the specified collection period (April 1st to 15th) categorized into major operating status categories (i.e., processing, standby, and stopped). In other words, graph 513 shows the breakdown of the operating status of the substrate processing apparatus 1 during the specified collection period.

The display control unit 62 can display the processing result information 71 and the operating status information 72 on the display 87 for other substrate processing apparatuses 1 having the same configuration as the substrate processing apparatus 1 described above. The processing result information 71 and the operating status information 72 for the other substrate processing apparatuses 1 may be stored in the information storage unit 61 in the computer 8 of the substrate processing apparatus 1 shown in FIG. 1, or may be stored in the computer of the other substrate processing apparatus 1 that is accessible by the computer 8.

The display control unit 62 may be realized by a shared computer connected to the multiple substrate processing apparatuses 1, and the processing result information 71 and operating status information 72 of each substrate processing apparatus 1 stored in the information storage unit 61 of each substrate processing apparatus 1 may be displayed on the display of the shared computer. In this case, the shared computer and the multiple substrate processing apparatuses 1, etc., constitute a substrate processing system. The above-mentioned information storage unit 61 may also be realized by the shared computer, and the processing result information 71 and operating status information 72 of each substrate processing apparatus 1 may be stored in the information storage unit 61 of the shared computer.

The switching window 514 on the left side of FIG. 7 displays the names of multiple substrate processing apparatus 1, "Apparatus A," "Apparatus B," "Apparatus C," and "Apparatus D." For example, by clicking on any one of the names, the processing result information 71 and operating status information 72 of the corresponding substrate processing apparatus 1 are displayed on the display 87. In FIG. 7, the processing result information 71 and operating status information 72 of the substrate processing apparatus 1 corresponding to apparatus A, which is indicated by white text, are displayed. Note that when the processing result information 71 and operating status information 72 of multiple substrate processing apparatus 1 are displayed on the display 87 in this manner, the above-mentioned group of organized items also includes the names of the substrate processing apparatus 1.

In addition, by clicking "All Equipment," which combines Equipment A to Equipment D, in the switching window 514 on the left side of FIG. 7, processing result information 71 and operating status information 72 for the four substrate processing equipment 1 (i.e., Equipment A to Equipment D) combined are displayed on the display 87. Specifically, graph 511 shows the total number of substrates 9 processed by the four substrate processing equipment 1 for each processing date during the specified collection period (April 1st to 15th). In addition, graph 513 shows a breakdown of the operating status of the four substrate processing equipment 1 combined.

The display control unit 62 can also display on the display 87 the processing result information 71 and the operating status information 72 for each of the three load ports 11, the indexer robot 12, the center robot 22, and the twelve processing units 21 (see Figures 1 and 2), which are the operating parts of the substrate processing apparatus 1. The names (LP1 to LP3, IR, CR, and MPC1 to MPC12) of the operating parts of the apparatus A, which is the currently selected substrate processing apparatus 1, are displayed in the switching window 514 in Figure 7, and by clicking on any one of the names, for example, the processing result information 71 and the operating status information 72 of the corresponding operating part are displayed on the display 87. Note that the processing result information 71 and the operating status information 72 of each operating part can be displayed in the same manner for the apparatuses B to D.

FIG. 8 shows a graph 511 in FIG. 7 changed to a stacked bar graph 511a (hereinafter, simply referred to as "graph 511a") showing the breakdown of the operation state of the substrate processing apparatus 1 for each processing day in the specified collection period (i.e., the details of the operation rate). The change of the graph is realized, for example, by the operator operating the mouse 86 or the like to switch a pull-down menu for graph display on the display 87. The same is true for the change of the graph, etc., described later. In this way, the display control unit 62 can also classify the operation state information 72 into a plurality of major operation states in a state where the operation state information 72 is organized for the processing date (i.e., one sorting item selected from the above-mentioned sorting item group) and display it on the display 87. In other words, the operation state information 72 to be analyzed is displayed on the display 87 in a state where it is classified into a plurality of major operation states. In the graph 511a, for example, the three major operation states "processing", "standby", and "stop" are displayed in different colors for each major operation state. In Fig. 8, graph 513 is the same as in Fig. 7, and is color-coded in the same way as graph 511a. Note that graph 511a may be displayed as a graph (e.g., a stacked bar graph or a pie chart) other than the stacked vertical bar graph illustrated in Fig. 8. The same applies to graphs 511b to 511d and 526 to 528 described later.

In FIG. 9, the graph 511a in FIG. 8 is replaced with a stacked bar graph 511b (hereinafter, simply referred to as "graph 511b") showing a more detailed breakdown of the operating status of the substrate processing apparatus 1 for each processing day in the specified collection period. If the graphs 511a and 511b are called the "first graph" and the "second graph", respectively, the second graph is a subdivision of the first graph. In this way, the display control unit 62 can also classify the operating status information 72 into a plurality of sub-categories of operating status (see Table 1) in a state where the operating status information 72 is organized for the processing date (i.e., one sorting item selected from the above-mentioned sorting item group) and display it on the display 87. In other words, the operating status information 72 to be analyzed is displayed on the display 87 in a state where it is classified into a plurality of sub-categories of operating status, and is divided by processing date.

In FIG. 9, graph 513 in FIG. 8 has also been changed to graph 513b, which shows the operating states of the substrate processing apparatus 1 during the specified collection period classified into sub-category operating states. Also, in FIG. 9, to make the graph easier to understand, three sub-category operating states included in the large category operating state "standby" in graphs 511b and 513b are surrounded by thick lines. Note that for the actual graph 511b, a legend showing multiple sub-category operating states is displayed in window 515. Similarly, a legend showing multiple sub-category operating states is displayed for graph 513b.

10 is an enlarged view of the leftmost graph element 516b of the graph 511b in FIG. 9. When the graphs 511a and 511b are displayed in color, the three sub-division operation states "Waiting for instructions", "Stop instruction" and "Preparation processing" corresponding to the large division operation state "Standby" are preferably color-coded in the same color as the color of "Standby" in the graph 511a (see FIG. 8) in the graph element 516b. Also, preferably, the five sub-division operation states "Power off", "Before preparation", "Alarm processing stopped", "Recovery work required" and "Recovery work in progress" corresponding to the large division operation state "Stop" are color-coded in the same color as the color of "Stop" in the graph 511a. More preferably, the sub-division operation state "Processing" corresponding to the large division operation state "Processing" is colored in the same color as the color of "Processing" in the graph 511a. This allows the operator to easily recognize the details of the operation state of the substrate processing apparatus 1. In this embodiment, "similar colors" refers to similar colors that are adjacent to each other on the color wheel, as well as colors that are variations on the tone of one color.

When "standby" is displayed in green in graph 511a, "waiting for instructions", "stop instruction" and "preparation processing" are displayed in, for example, dark green, medium green and light green, respectively, in graph 511b. Also, when "stop" is displayed in red in graph 511a, "power off", "pre-preparation", "alarm processing stopped", "recovery work required" and "recovery work in progress" are displayed in, for example, different shades of red, respectively, in graph 511b. Graph 513b is also displayed in the same color as graph 511b.

In the substrate processing apparatus 1, the graph 511 (see FIG. 7) showing the number of substrates 9 processed on each processing day and the graph 511a and/or graph 511b (see FIG. 8 and FIG. 9) showing the operating status on each processing day may be displayed simultaneously on the display 87. Alternatively, the graph 511a showing the operating status on each processing day classified into major operating status categories and the graph 511b showing the operating status on each processing day classified into minor operating status categories may be displayed simultaneously on the display 87.

In FIG. 11, a stacked bar graph 511c (hereinafter also simply referred to as "graph 511c") showing a detailed breakdown of the operation status of each load port 11 for one processing day (e.g., 4/1) among the multiple processing days for which the operation status is shown in graph 511b in FIG. 9 is displayed on the display 87. In other words, the display control unit 62 organizes the operation status information 72 for the load port group 110 classified into the small operation status category by the names of the load ports 11 (i.e., LP1 to LP3) as the above-mentioned sorting items, and displays the information on each load port 11 side by side as graph 511c on the display 87. This makes it easy to compare the operation statuses of the multiple load ports 11 included in the load port group 110. Note that the operation status information 72 for the load port group 110 classified into the large operation status category may also be displayed on the graph 511c.

In FIG. 12, a stacked bar graph 511d (hereinafter also simply referred to as "graph 511d") showing a detailed breakdown of the operation status of each processing unit 21 for one processing day (e.g., 4/1) among the multiple processing days whose operation status is shown in graph 511b in FIG. 9 is displayed on the display 87. In other words, the display control unit 62 organizes the operation status information 72 for the processing unit group 210 classified into the small operation status by the above-mentioned sorting item, using the names of the processing units 21 (i.e., MPC1 to MPC12) as the sorting items, and displays the information on the operation status 72 for each processing unit 21 on the display 87 as graph 511d in a state where the information is listed for each processing unit 21. This makes it possible to easily compare the operation statuses of the multiple processing units 21 included in the processing unit group 210. Note that the graph 511d may also display the operation status information 72 for the processing unit group 210 classified into the large operation status.

The above-mentioned operating status information 72 includes a time breakdown of the operating status of each operating part, as well as time stamps indicating the start and end points of the operating status associated with the operating status of each operating part. For example, if the operating status of the load port 11 transitions from the sub-category operating status "waiting for instructions" to "processing", the end point of "waiting for instructions" (i.e., the end time) and the start point of "processing" (i.e., the start time) are included as time stamps in the operating status information 72. Also, if the operating status of the load port 11 transitions from the sub-category operating status "processing" to "preparation processing", the end point of "processing" (i.e., the end time) and the start point of "preparation processing" (i.e., the start time) are included as time stamps in the operating status information 72.

Specifically, when a command signal or the like corresponding to "processing" is sent from the operation control unit to a load port 11 in the "waiting for instructions" state, the time when the command signal or the like is sent is acquired by the information storage unit 61 as the end point of "waiting for instructions" and the start point of "processing", and is included as a timestamp in the operation status information 72. Also, when a command signal or the like corresponding to "preparation processing" is sent from the operation control unit to a load port 11 in the "processing" state, the time when the command signal or the like is sent is acquired by the information storage unit 61 as the end point of "processing" and the start point of "preparation processing", and is included as a timestamp in the operation status information 72.

The display control unit 62 can display on the display 87 a time series display (so-called timeline) showing the operation states of the operating parts in chronological order based on the time stamps. FIG. 13 is a diagram showing a time series display 517 of the operation states of one load port 11. Each rectangle in the time series display 517 corresponds to a subdivision operation state of the operation state of the load port 11. In FIG. 13, the application of parallel diagonal lines to each subdivision operation state is omitted. The window 518 displays the time stamps of each subdivision operation state of the load port 11. The operator can easily recognize the change over time in the operation state of the operating parts based on the time series display 517 and the time stamps. In the substrate processing apparatus 1, a time series display 517 of the operation states of operating parts other than the load port 11 (e.g., the processing unit 21) may be displayed on the display 87. In addition, the time series display 517 of the operation states of multiple operating parts may be displayed simultaneously on the display 87 with each operating part listed side by side.

Next, we will explain the analysis of the operating status of the substrate processing apparatus 1 using the above-mentioned processing result information 71 and operating status information 72 displayed on the display 87. Figure 14 is a diagram showing an example of the flow of the operating status analysis.

First, the operator causes the display 87 to display the processing result information 71 and operating status information 72 for the above-mentioned four substrate processing apparatuses 1 (i.e., apparatus A to apparatus D) as shown in FIG. 15. The bar graph 521 shows the total number of substrates 9 processed by the four substrate processing apparatuses 1 for each processing date during the above-mentioned specified collection period (April 1st to 15th). In other words, the processing result information 71 is displayed as graph 521 in a state where it is organized according to the processing date of the substrate 9 (step S11). Graph 523 also shows the details of the operating status of the four substrate processing apparatuses 1 combined. Window 522 displays the total number of substrates 9 processed (i.e., the total production volume) during the specified collection period.

When the operator confirms that the total number of substrates 9 processed during the specified tally period is lower than usual and that there are processing days (e.g., 4/1 and 4/2) on which the number of processed substrates is fewer than the other processing days, the operator causes the display 87 to display a bar graph 525 indicating the number of substrates processed for each substrate processing apparatus 1 during the specified tally period (step S12), as shown in FIG. 16. Specifically, in accordance with the operator's operation, the display control unit 62 causes the display 87 to display a graph 525 based on the processing result information 71. This allows the operator to confirm which substrate processing apparatus 1 is causing the decrease in the number of substrates processed.

When the operator confirms that the number of substrates processed by the substrate processing apparatus 1 named "apparatus A" during the designated collection period is less than the number of substrate processing apparatuses 1, the operator causes the display 87 to display a stacked vertical bar graph 526 (hereinafter, also simply referred to as "graph 526"), which shows the breakdown of the operation status of the apparatus A for each processing day during the designated collection period, classified into a plurality of major operation status categories, as shown in FIG. 17 (step S13). In other words, the operation status information 72 related to the apparatus A is displayed in a state where it is organized for the processing days of the substrates 9 and classified into a plurality of major operation status categories. Specifically, the operator operates the switching window 524, and the display control unit 62 causes the display 87 to display the graph 526 based on the operation status information 72. This allows the operator to easily recognize one or more major operation status categories that are considered to be the cause of the decrease in the number of substrates processed by the substrate processing apparatus 1 (i.e., the cause of the deterioration of the processing results). In the following, the information displayed by the operator on the display 87 is that of the apparatus A, unless otherwise specified.

Between steps S12 and S13, a bar graph showing the number of sheets processed by device A on each processing day may be displayed on the display 87. This allows the operator to clearly recognize that device A is the cause of the decrease in the number of sheets processed on processing days with a small number of sheets processed (e.g., 4/1 and 4/2).

In step S13, if the operator determines that the "standby" state among the multiple major operating states is the cause of the decrease in the number of sheets processed, the "standby" state is classified into multiple minor operating states and displayed on the display 87. In this embodiment, as shown in FIG. 18, a stacked vertical bar graph 527 (hereinafter also simply referred to as "graph 527") in which multiple major operating states are classified into minor operating states for the breakdown of the operating states of device A for each processing day in the specified aggregation period is displayed on the display 87 (step S14). This allows the operator to easily recognize one or more minor operating states that are considered to be the cause of the decrease in the number of sheets processed (i.e., the cause of the deterioration of the processing results) among the multiple minor operating states included in the "standby" state.

When the operator determines that the "waiting for instructions" state is the cause of the decrease in the number of processed wafers among the multiple sub-operation states included in the "standby" state, he/she selects a related operating part group, which is a set of operating parts related to the "waiting for instructions" state, from the operating part group of the substrate processing apparatus 1. In this case, since the substrate 9 is not being processed (i.e., the substrate 9 is in the "waiting for instructions" state) even though the substrate 9 can be processed, it is assumed that the time during which the substrate 9 to be processed has not been carried into the substrate processing apparatus 1 (i.e., the carrier 95 is waiting to be carried in) is long, so the operator selects multiple load ports 11 as the related operating part group. Then, as shown in FIG. 19, for a processing day (e.g., 4/1) on which the number of processed wafers is smaller than other processing days, a stacked vertical bar graph 528 (hereinafter also referred to simply as "graph 528") showing the breakdown of the operating states of the multiple load ports 11 classified into multiple sub-operation states is displayed on the display 87 (step S15). In graph 528, the "waiting for instructions" state is long for each of the multiple load ports 11, so the operator can guess that each load port 11 is waiting for the carrier 95 to be loaded.

To check the detailed operating status of the substrate processing apparatus 1, the operator causes the display 87 to display a time series display 531 showing the operating status of the substrate processing apparatus 1 (i.e., apparatus A) in chronological order, as shown in FIG. 20 (step S16). In FIG. 20, the time series display 531 shows an enlarged view of the time period during which the substrate processing apparatus 1 was in the "waiting for instructions" state for a long period.

Next, the operator causes the display 87 to display a time series display 532 showing the operation status of the above-mentioned related operating unit group (i.e., the load port group 110) in chronological order (step S17), as shown in FIG. 21. In FIG. 21, the time series display 532 showing the operation status of each load port 11 in chronological order is displayed on the display 87 together with the time series display 531 of the substrate processing apparatus 1, with each load port 11 listed side by side. This allows the operator to easily compare the time series of the substrate processing apparatus 1 with the time series of the above-mentioned related operating unit group.

The operator compares time series display 531 with time series display 532 and confirms that the timing of the "waiting for instructions" state of substrate processing apparatus 1 and the "waiting for instructions" state of load port group 110 are approximately the same. This enables the operator to identify that the cause of the decrease in the number of processed substrates on 4/1 in substrate processing apparatus 1 (apparatus A) (i.e., the cause of the deterioration in processing results) is the increase in the "waiting for instructions" state due to an insufficient amount of carriers 95 being brought in (step S18).

As described above, the substrate processing apparatus 1 includes the load port group 110, the processing unit group 210, a transport mechanism (the indexer robot 12 and the center robot 22 in the above example), an information storage unit 61, an information display unit (i.e., the display 87), and a display control unit 62. The load port group 110 is a collection of load ports 11 that hold carriers 95 in which a plurality of substrates 9 are stored. The processing unit group 210 is a collection of processing units 21 in which the substrates 9 are processed. The transport mechanism transports the substrates 9 between the load port group 110 and the processing unit group 210. The information storage unit 61 stores operation information 70, which is information related to the operation of the operating part group including the load port group 110, the processing unit group 210, and the transport mechanism. The display control unit 62 causes the display 87 to display the operation information 70 in a predetermined display mode.

The operation information 70 includes processing result information 71 indicating the processing result of the substrate 9 in the substrate processing apparatus 1, and operation status information 72 indicating the time breakdown of the operation status of the substrate processing apparatus 1 and the time breakdown of the operation status of the operation units included in the operating unit group. The operation status of the substrate processing apparatus 1 and the operating units are each hierarchically classified into a plurality of major operating statuses, which are major classifications, and a plurality of minor operating statuses into which the plurality of major operating statuses are further classified. The display control unit 62 displays the processing result information 71 on the display 87 in a state in which the information is organized according to sorting items selected from a predetermined sorting item group including any operation period of the substrate processing apparatus 1. The display control unit 62 displays the operation status information 72 on the display 87 in a state in which the information is organized according to sorting items selected from the above sorting item group, and classifies the information into a plurality of major operating statuses and a plurality of minor operating statuses. This allows an operator looking at the display 87 to easily recognize the detailed operation status of the operating units in association with the processing result of the substrate 9.

As described above, when the display control unit 62 classifies the operation status information 72 into a plurality of large operation statuses in a state where the operation status information 72 is organized according to the above-mentioned organized items and displays them on the display 87, it is preferable that the display control unit 62 displays them in a first graph (for example, the stacked vertical bar graph 511a in FIG. 8) in which each large operation status is colored. Also, when the display control unit 62 classifies the operation status information 72 into a plurality of small operation statuses in a state where the operation status information 72 is organized according to the above-mentioned organized items and displays them on the display 87, it is preferable that the display control unit 62 displays them in a second graph (for example, the stacked vertical bar graph 511b in FIG. 9) in which each small operation status is colored. In addition, in the second graph, it is preferable that the plurality of small operation statuses corresponding to one large operation status are colored in a similar color to the color of the one large operation status in the first graph. This allows the operator to easily recognize the rough breakdown and detailed breakdown of the operation status of the operating parts in correspondence with each other.

As described above, it is preferable that the operating status information 72 includes timestamps that are the start and end points of an operating status associated with the operating status of the operating part. It is also preferable that the display control unit 62 displays on the display 87 a time series display (e.g., time series display 517 in FIG. 13) that shows the operating status in chronological order. This allows the operator to easily recognize changes over time in the operating status of the operating part.

As described above, it is preferable that the display control unit 62 displays the operation status information 72 regarding the load port group 110 on the display 87 in a state in which each load port 11 is listed side by side (for example, as shown in graph 511c in FIG. 11). This allows the operator to easily compare the operation status of multiple load ports 11 included in the load port group 110.

As described above, it is preferable that the display control unit 62 displays the operation status information 72 regarding the processing unit group 210 on the display 87 in a state in which each processing unit 21 is listed side by side (for example, as shown in graph 511d in FIG. 12). This allows the operator to easily compare the operation statuses of the multiple processing units 21 included in the processing unit group 210.

As described above, it is preferable that the display control unit 62 also displays on the display 87 the processing result information 71 and operating status information 72 of other substrate processing apparatuses 1 having the same configuration as the substrate processing apparatus 1. This makes it possible to easily compare the processing results and operating status of multiple substrate processing apparatuses 1. It is also possible to easily tally up the processing results of multiple substrate processing apparatuses 1.

As described above, the analysis method for analyzing the operating state of the substrate processing apparatus 1 includes a step (step S11) of displaying the processing result information 71 on the information display unit (i.e., the display 87) in a state in which the processing result information 71 is organized for any operating period of the substrate processing apparatus 1, a step (step S13) of classifying the operating state information 72 into a plurality of major operating states in a state in which the operating state information 72 is organized for the operating period, and displaying the classified operating state information 72 on the display 87, and a step (step S14) of classifying one of the plurality of major operating states that is considered to be the cause of deterioration of the processing result into a plurality of minor operating states and displaying the classified operating state information 72. and a step (step S16-S17) of selecting a related operating part group which is a collection of operating parts related to the one sub-section operating state among the group of operating parts (in the above example, the load port group 110), and displaying on the display 87 a time series display showing the operating states of the substrate processing apparatus 1 in time series (in the above example, the time series display 531) and a time series display showing the operating states of each of the related operating part groups in time series (in the above example, the time series display 532). This allows the operator to easily identify the cause of the deterioration of the processing results in the substrate processing apparatus 1.

In the above example, the computer 8 of the substrate processing apparatus 1 prestores the program 89 for displaying the operation information 70, but the present invention is not limited to this. For example, the program 89 may be later introduced (i.e., retrofitted) into a substrate processing apparatus 1 that is already in use. In this case, the program 89 for displaying the operation information 70 on the display 87 in a predetermined display mode is executed by the computer 8, so that the processing result information 71 is displayed on the display 87 in a state where it is organized for sorting items selected from a predetermined sorting item group including any operation period of the substrate processing apparatus 1. In addition, the operation status information 72 is displayed on the display 87 in a state where it is organized for sorting items selected from the sorting item group, and is classified into a plurality of major operating statuses and a plurality of minor operating statuses. As a result, as in the above, an operator looking at the display 87 can easily recognize the detailed operating status of the operating parts in association with the processing result of the substrate 9.

In the above example, the configuration related to the display of the operation information 70 is included in the substrate processing apparatus 1, but the configuration may be provided as a display device separate from the substrate processing apparatus 1. In this case, the display device includes an information display unit (i.e., a display 87) and a display control unit 62. The display control unit 62 causes the display 87 to display the operation information 70 in a predetermined display mode. The display control unit 62 causes the display 87 to display the processing result information 71 in a state in which the processing result information 71 is organized with respect to the sorting items selected from a predetermined sorting item group including any operation period of the substrate processing apparatus 1. The display control unit 62 also causes the display 87 to display the operation status information 72 on the display 87 in a state in which the processing result information 71 is organized with respect to the sorting items selected from the sorting item group. In this way, as in the above, an operator looking at the display 87 can easily recognize the detailed operation status of the operating unit in association with the processing result of the substrate 9. The display device may display the operation information 70 of one substrate processing apparatus 1, or may display the operation information 70 of multiple substrate processing apparatuses 1.

Figure 22 is a diagram showing an example of the display on the display 87 that is different from Figure 7 and the like. In the example shown in Figure 22, processing result information 71 (see Figure 6) of the substrate processing apparatus 1 during a specified specified tallying period (April 1st to 15th) is displayed on the display 87. Specifically, the number of substrates 9 processed by the substrate processing apparatus 1 during the specified tallying period is displayed on the display 87 by the display control unit 62 (see Figure 5) in a state organized from various perspectives.

In the window 531 in FIG. 22, the processing result information 71 in the designated tally period and the processing result information in a predetermined reference tally period (hereinafter also referred to as "reference processing result information") are displayed in a comparative manner, for example, in a table format. In the example shown in FIG. 22, for the substrate processing apparatus 1, the number of substrates 9 processed in the designated tally period, the number of substrates 9 processed in the reference tally period, and the difference in the number of substrates 9 processed between the designated tally period and the reference tally period are displayed in the window 531 as numerical values (in FIG. 22, the numerical values are indicated by "****"). The reference processing result information is prepared in advance and stored in the information storage unit 61 (see FIG. 5). The reference tally period is displayed at the top of the window 531, and in the example shown in FIG. 22, it is March 1st to 15th. The designated tally period and the reference tally period may be changed as appropriate. In addition, the length of the reference tally period may be the same as the length of the designated tally period, or may be different. In window 531, information other than the number of substrates 9 processed (e.g., the number of substrates 9 processed per unit time) may be displayed instead of or together with the number of substrates processed.

The display control unit 62 displays the processing result information 71 in windows 532 to 536, with the processing result information 71 organized according to each of the multiple sorting items included in the group of sorting items described above. FIGS. 23 to 27 are enlarged views of windows 532 to 536, respectively. As shown in FIG. 23, window 532 displays a bar graph in which the number of substrates 9 processed by substrate processing apparatus 1 during the specified aggregation period is organized by processing date, similar to graph 511 in FIG. 7. The horizontal axis of the graph in window 532 indicates the processing date, and the vertical axis indicates the number of substrates 9 processed.

As shown in FIG. 24, window 533 displays a bar graph showing the number of substrates 9 processed by substrate processing apparatus 1 during a specified collection period, organized by operating time period. The vertical axis of the graph in window 533 indicates the operating time period, and the horizontal axis indicates the number of substrates 9 processed. In this graph, one day (24 hours) is equally divided into 24 time periods, and the total number of substrates 9 processed in each time period during the specified collection period is shown. Note that the number of divisions of a day (i.e., how many operating time periods it is divided into) may be changed in various ways. Furthermore, when dividing a day into multiple operating time periods, it is not necessary to divide it equally; for example, important time periods may be divided finely and less important time periods may be divided roughly.

As shown in FIG. 25, window 534 displays a bar graph showing the number of substrates 9 processed by substrate processing apparatus 1 during a specified collection period, organized by the day of the week in operation. The vertical axis of the graph in window 534 indicates the day of the week in operation, and the horizontal axis indicates the number of substrates 9 processed. The graph shows the total number of substrates 9 processed for each day of the week in the specified collection period. Note that the graph may show multiple days of the week (for example, two days with the shortest usage time of substrate processing apparatus 1) together in a single graph element.

As shown in FIG. 26, window 535 displays a bar graph showing the number of substrates 9 processed by substrate processing apparatus 1 during the specified tallying period, listed side by side for each processing unit 21 of processing unit group 210. In other words, this graph is a graph in which the number of substrates 9 processed by substrate processing apparatus 1 during the specified tallying period is organized by the name (i.e., identifier) of the processing unit 21. The vertical axis of the graph in window 535 indicates the name of the processing unit 21, and the horizontal axis indicates the number of substrates 9 processed. This graph shows the total number of substrates 9 processed by each processing unit 21 during the specified tallying period.

27, window 536 displays a bar graph in which the number of substrates 9 processed in substrate processing apparatus 1 during a specified tabulation period is organized by the type of processing recipe. The vertical axis of the graph in window 536 indicates the type of processing recipe, and the horizontal axis indicates the number of substrates 9 processed. The graph shows the total number of substrates 9 processed by each processing recipe during the specified tabulation period.

Figure 28 is a diagram showing another example of the display on the display 87. In the example shown in Figure 28, the operating status information 72 (see Figure 6) of the substrate processing apparatus 1 during the above-mentioned designated collection period (April 1st to 15th) is displayed on the display 87. Specifically, the time breakdown of the operating status of the substrate processing apparatus 1 during the designated collection period and the time breakdown of the operating status of the movable parts of the substrate processing apparatus 1 are displayed on the display 87 by the display control unit 62 (see Figure 5) in a state organized from various perspectives.

In the window 541 in FIG. 28, the operating status information 72 in the specified aggregation period and the operating status information in the reference aggregation period (hereinafter also referred to as "reference operating status information") are displayed in a comparative manner, for example, in a table format. In the example shown in FIG. 28, for the substrate processing apparatus 1, the time breakdown of the sub-category operating status in the specified aggregation period, the time breakdown of the sub-category operating status in the reference aggregation period, and the difference in the time breakdown between the specified aggregation period and the reference aggregation period are displayed in the window 541 as numerical values (in FIG. 28, the numerical values are indicated by "****"). The numerical values are, for example, the percentages (%) of the total time of each sub-category operating status in the specified aggregation period or the reference aggregation period. The reference operating status information is prepared in advance and stored in the information storage unit 61 (see FIG. 5). The reference aggregation period is displayed in the upper part of the window 531, and in the example shown in FIG. 28, it is March 1st to 15th. The specified aggregation period and the reference aggregation period may be changed as appropriate. The length of the reference aggregation period may be the same as the length of the specified aggregation period, or it may be different. Window 547, located to the right of window 541, displays a pie chart showing the time breakdown of the subdivision operating status in the specified aggregation period.

The display control unit 62 displays the operation status information 72 in windows 542 to 546, with the operation status information 72 organized according to each of the multiple organized items included in the above-mentioned organized item group. FIGS. 29 to 33 are enlarged views of windows 542 to 546, respectively. As shown in FIG. 29, window 542 displays a stacked vertical bar graph, similar to graph 527 in FIG. 18, which shows a time breakdown of the sub-category operation status of the substrate processing apparatus 1 during the specified aggregation period, organized with processing dates as the organized item. The horizontal axis of the graph in window 542 shows the processing date, and the vertical axis shows the time breakdown of the sub-category operation status (i.e., the proportion of the total time of each sub-category operation status to the daily usage time of the substrate processing apparatus 1).

As shown in FIG. 30, window 543 displays a stacked bar graph showing the time breakdown of the subdivision operation status of substrate processing apparatus 1 during the specified collection period, organized by operation time slot. The vertical axis of the graph in window 543 indicates the operation time slot, and the horizontal axis indicates the time breakdown of the subdivision operation status. In this graph, one day (24 hours) is equally divided into 24 time slots, and the time breakdown of the subdivision operation status of each time slot during the specified collection period is shown. Note that the number of divisions of a day (i.e., how many operation slots a day is divided into) may be changed in various ways. Furthermore, when dividing a day into multiple operation slots, it is not necessary to divide them equally; for example, important time slots may be divided finely and less important time slots may be divided roughly.

As shown in FIG. 31, window 544 displays a stacked bar graph showing the time breakdown of the subdivision operation status of the substrate processing apparatus 1 during the specified collection period, organized by the day of the week in operation. The vertical axis of the graph in window 544 indicates the day of the week in operation, and the horizontal axis indicates the time breakdown of the subdivision operation status. The graph shows the time breakdown of the subdivision operation status for each day of the week during the specified collection period. Note that the graph may show multiple days of the week (for example, two days with short usage times of the substrate processing apparatus 1) together in a single graph element.

As shown in FIG. 32, the window 545 displays stacked bar graphs showing the time breakdown of the subdivision operation states in the specified collection period for each of the load port group 110, the transport mechanism (i.e., the indexer robot 12 and the center robot 22), and the processing unit group 210. In other words, the graph displays the operation state information 72 for the above-mentioned operating part group in the specified collection period, with the types of movable parts included in the operating part group listed side by side. In other words, the graph is a graph that organizes the time breakdown of the subdivision operation states of the substrate processing apparatus 1 in the specified collection period, with the type of movable part as the organization item. The vertical axis of the graph in the window 545 indicates the type of movable part, and the horizontal axis indicates the time breakdown of the subdivision operation states. Note that LP on the vertical axis indicates the load port group 110, Robot indicates the indexer robot 12 and the center robot 22, and MPC indicates the processing unit group 210.

As shown in FIG. 33, window 546 displays a stacked bar graph showing operation status information 72 for the load port group 110 during the specified aggregation period, with each load port 11 listed side by side. In other words, this graph is a graph that organizes the time breakdown of the sub-category operation status of the load port group 110 during the specified aggregation period, with the names (i.e., identifiers) of the load ports 11 as the organizing items. The vertical axis of the graph in window 546 indicates the names of the load ports 11, and the horizontal axis indicates the time breakdown of the sub-category operation status. This graph shows the time breakdown of the sub-category operation status of each load port 11 during the specified aggregation period.

In addition, the window 546 may display, for example, a graph showing the operation status information 72 for the processing unit group 210 during the specified collection period, with each processing unit 21 listed side by side. Alternatively, the window 546 may display, for example, a graph showing the operation status information 72 for the indexer robot 12 and the center robot 22 during the specified collection period, with each robot listed side by side.

In the graphs displayed in the above-mentioned windows 542 to 546, if there is a sub-section operation state in the operation state information 72 for the specified aggregation period that is worse than the reference operation state information by a predetermined degree or more, it is preferable that the display control unit 62 highlights the part in the graph that shows the sub-section operation state (i.e., displays it more prominently than the surrounding area). Specifically, for example, in the graph showing the time breakdown of the sub-section operation state for each load port 11 shown in FIG. 33, if the time breakdown of "waiting for instructions" for LP1 is a predetermined times (e.g., twice) longer than the time breakdown of "waiting for instructions" for LP1 in the reference operation state information, the "waiting for instructions" part of LP1 in FIG. 33 is displayed brighter than the surrounding area or flashes. This makes it easy to recognize load ports 11 that may have some kind of abnormality and sub-section operation states that are likely to have an abnormality in the load port 11.

The graphs displayed in windows 542 to 546 may also display a time breakdown of the major operating states of the substrate processing apparatus 1 during the specified collection period. In this case, similarly to the above, if there is a major operating state in the operating state information 72 during the specified collection period that has deteriorated to a predetermined degree or more compared to the reference operating state information, it is preferable that the display control unit 62 highlights the portion of the graph that shows that major operating state (i.e., displays it so that it stands out more than its surroundings).

The table shown in FIG. 22 and the graphs shown in FIG. 23 to FIG. 27 display processing result information 71 for one substrate processing apparatus 1, but processing result information 71 for a group of substrate processing apparatuses including multiple substrate processing apparatuses 1 may be displayed in a similar manner. The table shown in FIG. 28 and the graphs shown in FIG. 29 to FIG. 33 display operating status information 72 for one substrate processing apparatus 1, but operating status information 72 for a group of substrate processing apparatuses including multiple substrate processing apparatuses 1 may be displayed in a similar manner. In either case, the above-mentioned group of organized items includes the name (i.e., identifier) of the substrate processing apparatus 1.

As described above, in the substrate processing apparatus 1, the above-mentioned group of organized items preferably includes one or more of the operating period, operating time zone, operating day, and processing recipe as organized items, and the display control unit 62 is capable of displaying the processing result information 71 on the information display unit (i.e., the display 87) in a state where the processing result information 71 is organized according to the one or more items. This allows an operator looking at the display 87 to easily analyze the processing results of the substrate 9 in the substrate processing apparatus 1 from various angles.

As described above, in the substrate processing apparatus 1, reference processing result information, which is processing result information for a specified reference tally period, is prepared in advance, and it is preferable that the display control unit 62 displays the processing result information 71 for the selected specified tally period and the reference processing result information in a comparable manner. This makes it easy to recognize the presence of an abnormality when an abnormality occurs in the processing of the substrates 9 during the specified tally period.

As described above, in the substrate processing apparatus 1, it is preferable that the display control unit 62 displays the operating status information 72 relating to the operating part group on the display 87 in a state in which the operating parts included in the operating part group are listed side by side by type. This makes it possible to easily check the operating status of the substrate processing apparatus 1 during the specified collection period by type of movable part. Furthermore, if an abnormality occurs in the operating status of the substrate processing apparatus 1, it is possible to easily analyze which type of movable part is the cause of the abnormality.

As described above, in the substrate processing apparatus 1, the group of items to be organized preferably includes one or more of the operating period, operating time zone, and operating day of the week as the organized items, and the display control unit 62 is capable of displaying the operating status information 72 on the display 87 in a state where the information is organized with respect to the one or more items. This allows an operator looking at the display 87 to easily analyze the operating status of the substrate processing apparatus 1 from various angles.

As described above, in the substrate processing apparatus 1, reference processing result information, which is processing result information for a specified reference collection period, is prepared in advance, and the display control unit 62 preferably displays the operating status information 72 for the selected specified collection period, and highlights the major operating status or minor operating status of the operating status information 72 for the specified collection period that has deteriorated to a specified degree or more compared to the reference operating status information. This makes it possible to easily identify, when an abnormality occurs in the operating status of the substrate processing apparatus 1, the moving part in which the abnormality may occur, and the major operating status or minor operating status that is thought to be the cause of the abnormality in the moving part.

Various modifications are possible for the above-described substrate processing apparatus 1, display device, program 89, and analysis method for analyzing the operating status of the substrate processing apparatus 1.

For example, in this analysis method, causes of the deterioration of the processing results of the substrate processing apparatus 1 may be identified other than the increase in the "waiting for instructions" state due to the insufficient amount of carriers 95 loaded as described above. In addition, the number of operating parts included in the group of related operating parts described above may be changed in various ways within a range of 1 or more.

In the substrate processing apparatus 1, the operation information 70 (i.e., the processing result information 71 and the operating status information 72) displayed on the display 87 may be used for purposes other than identifying the cause of deterioration in the processing results. Furthermore, the display control unit 62 may cause the display 87 to display various graphs, data, etc. other than those described above, in accordance with instructions from the operator.

In the substrate processing apparatus 1, in a graph (e.g., stacked vertical bar graph 511a in FIG. 8) that displays operation status information 72 classified into major operation statuses, and in a graph (e.g., stacked vertical bar graph 511b in FIG. 9) that displays operation status information 72 classified into minor operation statuses, corresponding major operation statuses and minor operation statuses do not necessarily need to be displayed in similar colors. However, it is preferable that corresponding major operation statuses and minor operation statuses have common visible features on the graph (e.g., hatching features, etc.) so that the operator can easily recognize the correspondence between the major operation statuses and minor operation statuses.

The operation information stored in the information storage unit 61 does not necessarily need to include operation status information 72 for all of the operating parts included in the operating part group, but only needs to include operation status information 72 for at least some of the operating parts included in the operating part group.

In the substrate processing apparatus 1, the time series of the operating status of the operating parts does not necessarily need to be displayed on the display 87.

The processing block 20 of the substrate processing apparatus 1 may be provided with processing units of various structures other than the processing unit 21. Furthermore, in the processing units, various processes other than liquid processing on the substrate 9 may be performed.

The above-mentioned substrate processing apparatus 1 may be used to process glass substrates used in flat panel displays such as liquid crystal displays or organic electroluminescence (EL) displays, or glass substrates used in other displays, in addition to semiconductor substrates. The above-mentioned substrate processing apparatus 1 may also be used to process substrates for optical disks, substrates for magnetic disks, substrates for magneto-optical disks, substrates for photomasks, ceramic substrates, and substrates for solar cells.

The configurations in the above embodiment and each modified example may be combined as appropriate as long as they are not mutually inconsistent.

REFERENCE SIGNS LIST 1 Substrate processing apparatus 9 Substrate 11 Load port 12 Indexer robot 21 Processing unit 22 Center robot 61 Information storage section 62 Display control section 70 Operation information 71 Processing result information 72 Operation status information 87 Display 110 Load port group 210 Processing unit group S11 to S18 Steps

Claims (17)

A substrate processing apparatus, comprising:
a load port group which is a group of load ports for holding a carrier containing a plurality of substrates;
a processing unit group which is a collection of processing units in which substrate processing is performed;
a transport mechanism that transports substrates between the load port group and the processing unit group;
an information storage unit for storing operation information which is information relating to the operation of a group of operating parts including the group of load ports, the group of processing units, and the transfer mechanism;
An information display unit;
a display control unit that causes the operation information to be displayed on the information display unit in a predetermined display mode;
Equipped with
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
the display control unit causes the processing result information to be displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including an arbitrary operation period of the substrate processing apparatus;
the display control unit classifies the operation status information into the plurality of major operation statuses and the plurality of minor operation statuses in a state where the operation status information is organized with respect to the organized items selected from the organized item group, and displays the information on the information display unit ;
the display control unit causes the operation status information relating to the group of load ports to be displayed on the information display unit in a state in which each load port is listed side by side . A substrate processing apparatus, comprising:
a load port group which is a group of load ports for holding a carrier containing a plurality of substrates;
a processing unit group which is a collection of processing units in which substrate processing is performed;
a transport mechanism that transports substrates between the load port group and the processing unit group;
an information storage unit for storing operation information which is information relating to the operation of a group of operating parts including the group of load ports, the group of processing units, and the transfer mechanism;
An information display unit;
a display control unit that causes the operation information to be displayed on the information display unit in a predetermined display mode;
Equipped with
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
the display control unit causes the processing result information to be displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including an arbitrary operation period of the substrate processing apparatus;
the display control unit classifies the operation status information into the plurality of major operation statuses and the plurality of minor operation statuses in a state where the operation status information is organized with respect to the organized items selected from the organized item group, and displays the information on the information display unit;
Reference processing result information, which is the processing result information for a predetermined reference aggregation period, is prepared in advance;
The substrate processing apparatus according to claim 1, wherein the display control unit displays the processing result information and the reference processing result information in a selected designated aggregation period so as to be comparable to each other. A substrate processing apparatus, comprising:
a load port group which is a group of load ports for holding a carrier containing a plurality of substrates;
a processing unit group which is a collection of processing units in which substrate processing is performed;
a transport mechanism that transports substrates between the load port group and the processing unit group;
an information storage unit for storing operation information which is information relating to the operation of a group of operating parts including the group of load ports, the group of processing units, and the transfer mechanism;
An information display unit;
a display control unit that causes the operation information to be displayed on the information display unit in a predetermined display mode;
Equipped with
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
the display control unit causes the processing result information to be displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including an arbitrary operation period of the substrate processing apparatus;
the display control unit classifies the operation status information into the plurality of major operation statuses and the plurality of minor operation statuses in a state where the operation status information is organized with respect to the organized items selected from the organized item group, and displays the information on the information display unit;
Reference operating status information, which is the operating status information for a predetermined reference aggregation period, is prepared in advance;
The display control unit displays the operating status information for a selected designated aggregation period, and highlights major category operating statuses or minor category operating statuses among the operating status information for the designated aggregation period that have deteriorated to a predetermined degree or more compared to the reference operating status information. 4. The substrate processing apparatus according to claim 1,
the display control unit, when classifying the operation status information into the plurality of major operation status categories in a state where the operation status information is organized according to the organization items and displaying the information on the information display unit, displays the information in a first graph that is color-coded for each major operation status category,
The substrate processing apparatus is characterized in that, when the display control unit classifies the operation status information into the plurality of sub-division operation states in a state where the information is organized according to the organized items and displayed on the information display unit, the display control unit displays the information in a second graph color-coded for each sub-division operation state, and in the second graph, a plurality of sub-division operation states corresponding to one major division operation state are color-coded in a color similar to the color of the one major division operation state in the first graph. 5. The substrate processing apparatus according to claim 1,
the operational status information includes time stamps that are associated with the operational status of the operating unit and are the start and end points of the operational status;
The substrate processing apparatus according to claim 1, wherein the display control unit causes the information display unit to display a time series display showing the operating states in chronological order. 6. The substrate processing apparatus according to claim 1,
The substrate processing apparatus is characterized in that the display control unit displays the operating status information regarding the group of operating parts on the information display unit in a state in which the operating parts are listed side by side by type of operating part included in the group of operating parts. 7. The substrate processing apparatus according to claim 1,
The substrate processing apparatus according to claim 1, wherein the display control unit causes the operation status information regarding the group of processing units to be displayed on the information display unit in a state in which each processing unit is listed side by side. 8. The substrate processing apparatus according to claim 1,
The group of organized items includes one or more items selected from the operating period, the operating time zone, the operating day of the week, and the processing recipe as organized items;
The substrate processing apparatus according to claim 1, wherein the display control unit is capable of displaying the processing result information on the information display unit in a state in which the processing result information is organized with respect to the one or more items. 9. The substrate processing apparatus according to claim 1,
The group of organized items includes one or more items selected from the operating period, the operating time zone, and the operating day of the week as organized items;
The substrate processing apparatus according to claim 1, wherein the display control unit is capable of displaying the operation status information on the information display unit in an organized state with respect to the one or more items. 10. The substrate processing apparatus according to claim 1,
The substrate processing apparatus, wherein the display control unit causes the information display unit to also display the processing result information and the operating status information of other substrate processing apparatuses having the same configuration as the substrate processing apparatus. An analysis method for analyzing an operating state of a substrate processing apparatus, comprising:
a) displaying the processing result information on the information display unit in a state in which the processing result information is organized for an arbitrary operation period of the substrate processing apparatus in the substrate processing apparatus according to any one of claims 1 to 10 ;
b) classifying the operation status information into the plurality of major operation status categories in a state where the operation status information is organized with respect to the operation period, and displaying the information on the information display unit;
c) classifying one of the plurality of major operating states, which is considered to be a cause of deterioration of the processing result, into the plurality of minor operating states and displaying the classification result on the information display unit;
d) focusing on one sub-section operation state among the plurality of sub-section operation states that is considered to be the cause of deterioration of processing results, selecting an associated operating part group which is a collection of operating parts related to the one sub-section operation state from the operating part group, and displaying on the information display unit a time series display showing the operating states of the substrate processing apparatus in chronological order, and a time series display showing the operating states of each of the associated operating part groups in chronological order;
An analysis method comprising: 1. A display device that displays an operating state of a substrate processing apparatus, the display device comprising: a load port group which is a group of load ports that hold a carrier storing a plurality of substrates; a processing unit group which is a group of processing units that perform processing of the substrates; and a transport mechanism that transports the substrates between the load port group and the processing unit group,
An information display unit;
a display control unit that displays operation information, which is information related to the operation of a group of operating parts including the group of load ports, the group of processing units, and the transport mechanism, on the information display unit in a predetermined display mode;
Equipped with
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
the display control unit causes the processing result information to be displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including an arbitrary operation period of the substrate processing apparatus;
the display control unit classifies the operating status information into the plurality of major operating status categories and the plurality of minor operating status categories in a state where the operating status information is organized with respect to the organized items selected from the organized item group, and displays the information on the information display unit ;
The display device according to the present invention, wherein the display control unit causes the operation status information relating to the group of load ports to be displayed on the information display unit in a state in which the operation status information is listed for each load port . 1. A display device that displays an operating state of a substrate processing apparatus, the display device comprising: a load port group which is a group of load ports that hold a carrier storing a plurality of substrates; a processing unit group which is a group of processing units that perform processing of the substrates; and a transport mechanism that transports the substrates between the load port group and the processing unit group,
An information display unit;
a display control unit that displays operation information, which is information related to the operation of a group of operating parts including the group of load ports, the group of processing units, and the transport mechanism, on the information display unit in a predetermined display mode;
Equipped with
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
the display control unit causes the processing result information to be displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including an arbitrary operation period of the substrate processing apparatus;
the display control unit classifies the operation status information into the plurality of major operation statuses and the plurality of minor operation statuses in a state where the operation status information is organized with respect to the organized items selected from the organized item group, and displays the information on the information display unit;
Reference processing result information, which is the processing result information for a predetermined reference aggregation period, is prepared in advance;
The display device according to the present invention, characterized in that the display control unit displays the processing result information and the reference processing result information in a selected designated aggregation period in a manner that allows comparison therebetween. 1. A display device that displays an operating state of a substrate processing apparatus, the display device comprising: a load port group which is a group of load ports that hold a carrier storing a plurality of substrates; a processing unit group which is a group of processing units that perform processing of the substrates; and a transport mechanism that transports the substrates between the load port group and the processing unit group,
An information display unit;
a display control unit that displays operation information, which is information related to the operation of a group of operating parts including the group of load ports, the group of processing units, and the transport mechanism, on the information display unit in a predetermined display mode;
Equipped with
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
the display control unit causes the processing result information to be displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including an arbitrary operation period of the substrate processing apparatus;
the display control unit classifies the operation status information into the plurality of major operation statuses and the plurality of minor operation statuses in a state where the operation status information is organized with respect to the organized items selected from the organized item group, and displays the information on the information display unit;
Reference operating status information, which is the operating status information for a predetermined reference aggregation period, is prepared in advance;
The display control unit displays the operation status information for a selected specified aggregation period, and highlights major category operation statuses or minor category operation statuses that have deteriorated to a predetermined degree or more compared to the reference operation status information among the operation status information for the specified aggregation period. 1. A program for displaying, on an information display unit in a predetermined display mode, operation information relating to operation of an operating part group including a load port group, the processing unit group, and the transport mechanism, for a substrate processing apparatus including: a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored; a processing unit group which is a group of processing units in which substrate processing is performed; and a transport mechanism that transports substrates between the load port group and the processing unit group, the program comprising:
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
When the program is executed by a computer,
the processing result information is displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including any operation period of the substrate processing apparatus;
the operating status information is classified into the plurality of major operating statuses and the plurality of minor operating statuses in a state where the operating status information is organized with respect to the organized items selected from the organized item group, and is displayed on the information display unit ;
a program for displaying the operation status information relating to the group of load ports on the information display unit in a state in which the operation status information is listed for each load port . 1. A program for displaying, on an information display unit in a predetermined display mode, operation information relating to operation of an operating part group including a load port group, the processing unit group, and the transport mechanism, for a substrate processing apparatus including: a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored; a processing unit group which is a group of processing units in which substrate processing is performed; and a transport mechanism that transports substrates between the load port group and the processing unit group, the program comprising:
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
Reference processing result information, which is the processing result information for a predetermined reference aggregation period, is prepared in advance;
When the program is executed by a computer,
the processing result information is displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including any operation period of the substrate processing apparatus;
the operating status information is classified into the plurality of major operating statuses and the plurality of minor operating statuses in a state where the operating status information is organized with respect to the organized items selected from the organized item group, and is displayed on the information display unit;
A program characterized in that the processing result information and the reference processing result information for a selected designated aggregation period are displayed so as to be comparable. 1. A program for displaying, on an information display unit in a predetermined display mode, operation information relating to operation of an operating part group including a load port group, the processing unit group, and the transport mechanism, for a substrate processing apparatus including: a load port group which is a group of load ports that hold carriers in which a plurality of substrates are stored; a processing unit group which is a group of processing units in which substrate processing is performed; and a transport mechanism that transports substrates between the load port group and the processing unit group, the program comprising:
The operation information is
Processing result information indicating a processing result of the substrate in the substrate processing apparatus;
Operational state information indicating a time breakdown of an operation state of the substrate processing apparatus and a time breakdown of an operation state of an operation unit included in the operation unit group;
Including,
The operating states of the substrate processing apparatus and the operating unit are each hierarchically classified into a plurality of major operating states that are major classifications and a plurality of minor operating states that are further classified into the plurality of major operating states,
Reference operating status information, which is the operating status information for a predetermined reference aggregation period, is prepared in advance;
When the program is executed by a computer,
the processing result information is displayed on the information display unit in a state where the processing result information is organized with respect to an organized item selected from a predetermined organized item group including any operation period of the substrate processing apparatus;
the operating status information is classified into the plurality of major operating statuses and the plurality of minor operating statuses in a state where the operating status information is organized with respect to the organized items selected from the organized item group, and is displayed on the information display unit;
A program characterized in that the operation status information for a selected specified aggregation period is displayed, and among the operation status information for the specified aggregation period, major category operation statuses or minor category operation statuses that have deteriorated to a predetermined degree or more compared to the reference operation status information are highlighted.

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