JP7701150B2 - Auxiliary equipment - Google Patents

Description

The present invention relates to an auxiliary device that is connected to a cutting device.

The wafer, on whose surface multiple devices such as ICs and LSIs are formed and partitioned along planned division lines, is then divided into individual device chips by a cutting machine, and each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

The cutting device includes a chuck table with a holding surface for holding the wafer, cutting means having a cutting blade attached with a fixing nut for cutting the wafer held on the chuck table, X-axis feed means for feeding the chuck table in the X-axis direction for processing, Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, and the holding surface is defined in the X-axis and Y-axis directions, so that the wafer can be divided into individual device chips with high precision.

The applicant has also proposed an automatic blade exchange device that can automatically exchange cutting blades attached to cutting means (see, for example, Patent Document 1).

JP 2007-98536 A

However, there is a problem in that it is difficult to install an automatic exchange device on a cutting device that has already been delivered to a user.

In light of the above, the objective of the present invention is to provide an auxiliary device that can automatically replace cutting blades and that can be attached to a cutting device that has already been delivered to a user.

According to the present invention, there is provided the following auxiliary device that solves the above-mentioned problems: That is, the auxiliary device includes a chuck table having a holding surface for holding a workpiece, cutting means having a cutting blade attached by a fixing nut for cutting the workpiece held on the chuck table, X-axis feed means for feeding the chuck table in an X-axis direction for processing, Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction, and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, and the holding surface is connected to the cutting device defined in the X-axis direction and the Y-axis direction, and further includes cutting blade storage means for storing a plurality of cutting blades, carry-in/out means for carrying cutting blades in and out of the cutting blade storage means, and Y-axis positioning means for positioning the carry-in/out means at an operating position and a retreat position in the Y-axis direction relative to the cutting blade storage means, An auxiliary device is provided which is at least equipped with a Z-axis movement means which moves the loading/unloading means in the Z-axis direction, and an X-axis movement means which moves the loading/unloading means in the X-axis direction to align the X-axis position of the cutting blade attached to the spindle of the cutting means with the X-axis position of the cutting blade carried out of the cutting blade storage means by the loading/unloading means, and position the cutting blade carried out of the cutting blade storage means by the loading/unloading means in a position where it can be replaced with the cutting blade attached to the spindle of the cutting means, wherein the loading/unloading means is equipped with at least a Z rotating shaft extending in the Z-axis direction, a blade holding portion which is radially connected to the Z rotating shaft and sucks and holds the cutting blade, and a fixed nut holding portion which screws and unscrews the fixing nut into and from a male screw formed at the tip of the spindle, and two blade holding portions are provided for each fixing nut holding portion.

Preferably, the cutting blade storage means includes a drive gear having a rotation axis extending in the Y-axis direction, a driven gear spaced from the drive gear in the Z-axis direction and having a rotation axis extending in the Y-axis direction, an endless track wound around the drive gear and the driven gear, and a support shaft extending in the Y-axis direction, arranged at a predetermined interval on the endless track, inserted into a central opening of the cutting blade, and supporting the cutting blade.
It is preferable that the distance between the drive gear and the driven gear in the Z-axis direction is adjustable and the length of the endless track is also adjustable .
The transport means is arranged in a frame body, the frame body is slidably supported on a guide rail extending in the Y-axis direction arranged on the lifting table, and it is desirable that the Y-axis positioning means position the cutting blade storage means at the active position and the retracted position in the Y-axis direction.
It is preferable that the loading/unloading means is disposed on a first movable body disposed inside the frame body, the first movable body is slidably supported in a suspended state on a first guide rail extending in the X-axis direction disposed at the bottom of the second movable body, and the second movable body is slidably supported in a suspended state on a second guide rail extending in the X-axis direction disposed on the ceiling of the frame body, and the loading/unloading means is configured to be freely advanced and advanced in the X-axis direction by the first movable body and the second movable body.
It is preferable that a dressing board accommodating section for accommodating a dressing board for dressing the cutting blade is provided at the bottom of the frame body, and that the first movable body is provided with a holding means for holding the dressing board accommodated in the dressing board accommodating section.
An end face correction jig accommodating section is provided at the bottom of the frame for accommodating an end face correction jig for adjusting the outer peripheral end face of the mounting flange formed at the tip of the spindle of the cutting means and supporting the back of the cutting blade, and it is convenient for the end face correction jig to be held by the holding means provided on the first movable body.

The auxiliary device of the present invention comprises a chuck table having a holding surface for holding a workpiece, cutting means having a cutting blade attached by a fixing nut for cutting the workpiece held on the chuck table, X-axis feed means for feeding the chuck table in an X-axis direction for processing, Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction, and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, and the holding surface is an auxiliary device connected to a cutting device defined in the X-axis direction and the Y-axis direction, and further comprises cutting blade storage means for storing a plurality of cutting blades, carry-in/out means for carrying cutting blades in and out of the cutting blade storage means, Y-axis positioning means for positioning the carry-in/out means at an operating position and a retreat position in the Y-axis direction relative to the cutting blade storage means, and a Z-axis feed means for indexing and feeding the cutting means in the Z-axis direction. and X-axis movement means for moving the loading/unloading means in the X-axis direction to align the X-axis position of the cutting blade attached to the spindle of the cutting means with the X-axis position of the cutting blade carried out from the cutting blade storage means by the loading/unloading means, and positioning the cutting blade carried out from the cutting blade storage means by the loading/unloading means at a position where it can be replaced with the cutting blade attached to the spindle of the cutting means. The loading/unloading means at least comprises a Z rotation axis extending in the Z-axis direction, a blade holding part that is radially connected to the Z rotation axis and sucks and holds the cutting blade, and a fixed nut holding part that screws the fixing nut into and unscrews from a male screw formed at the tip of the spindle, and since two blade holding parts are provided for one fixed nut holding part, it can be attached to a cutting device that has already been delivered to a user.

1 is a perspective view of an auxiliary device constructed in accordance with the present invention; FIG. 2 is an exploded perspective view of the cutting blade storage means shown in FIG. 1 . FIG. 3 is a perspective view of the support shaft shown in FIG. 2 . FIG. 3 is a cross-sectional view of the support shaft shown in FIG. 2 . FIG. 2 is a perspective view of the loading/unloading means shown in FIG. FIG. 2 is an exploded perspective view of the frame, the lift table, and the base stand shown in FIG. 1 . FIG. 2 is an exploded perspective view of the frame shown in FIG. 1 . FIG. 4 is an exploded perspective view of a frame in which a holding means is disposed. 9 is a perspective view of the dressing board and end surface correction jig shown in FIG. 8 . FIG. 2 is a perspective view of a cutting device to which the auxiliary device shown in FIG. 1 is connected. FIG. 11 is a perspective view of the chuck table shown in FIG. 10 . FIG. 11 is a perspective view of the cutting means shown in FIG. 10 . FIG. 13 is a perspective view of the cutting means in a state in which the blade cover shown in FIG. 12 is opened. FIG. 11 is an exploded perspective view of the cutting means shown in FIG. 10 . 11 is a perspective view showing a state in which the auxiliary device shown in FIG. 1 is connected to the cutting device shown in FIG. 10 . 2 is a perspective view showing a state in which the cutting blade storage means and the transport means of the auxiliary device shown in FIG. 1 face each other; 17 is a perspective view showing a state in which the frame body has advanced toward the cutting blade storage means from the state shown in FIG. 16 . 18 is a perspective view showing a state in which the frame body is retracted from the state shown in FIG. 17 and the lift table is raised. 19 is a perspective view showing a state in which the first moving body has advanced toward the cutting device from the state shown in FIG. 18 . 20 is a perspective view showing a state in which the second moving body has advanced toward the cutting device from the state shown in FIG. 19 . An oblique view showing the state in which a dressing board is being transported by the transport means shown in Figure 8. 9 is a perspective view showing a state in which the end face correction jig is being carried in by the carry-in/out means shown in FIG. 8 .

Below, a preferred embodiment of an auxiliary device constructed according to the present invention will be described with reference to the drawings.

With reference to FIG. 1, the auxiliary device generally designated by the reference numeral 2 includes at least a cutting blade storage means 4 for storing a plurality of cutting blades, a loading/unloading means 6 for loading and unloading cutting blades from the cutting blade storage means 4, a Y-axis positioning means 8 for positioning the loading/unloading means 6 in an active position in the Y-axis direction and a retreated position with respect to the cutting blade storage means 4, a Z-axis moving means 10 for moving the loading/unloading means 6 in the Z-axis direction, and an X-axis moving means 12 for moving the loading/unloading means 6 in the X-axis direction to act on the cutting blade attached to the spindle of the cutting means of the cutting device. The X-axis direction is the direction indicated by the arrow X in FIG. 1, the Y-axis direction is the direction indicated by the arrow Y in FIG. 1 and perpendicular to the X-axis direction, and the Z-axis direction is the direction indicated by the arrow Z in FIG. 1 and perpendicular to the X-axis direction and the Y-axis direction. The plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

As shown in FIG. 2, the cutting blade storage means 4 includes a drive gear 16 having a rotation axis 14 extending in the Y-axis direction, a driven gear 20 having a rotation axis 18 extending in the Y-axis direction and spaced apart from the drive gear 16 in the Z-axis direction, an endless track 22 wound around the drive gear 16 and the driven gear 20, and a support shaft 24 extending in the Y-axis direction that is disposed at a predetermined interval on the endless track 22 and inserted into the central opening of the cutting blade to support the cutting blade.

With reference to Figures 1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a base plate 26 (see Figure 1), a support wall 28 extending upward from the upper surface of the base plate 26, and a motor 30 fixed to one side of the support wall 28. As shown in Figure 2, the motor 30 is connected to the rotating shaft 14 of the drive gear 16, and the motor 30 rotates the drive gear 16 with the Y-axis direction as its axis.

As shown in FIG. 2, the driven gear 20 is disposed above the drive gear 16, and the rotation shaft 18 of the driven gear 20 is supported by a support wall 28 so as to be rotatable about the Y-axis direction and movable up and down in the Z-axis direction. The support wall 28 is provided with a lifting means (not shown) for lifting the driven gear 20 up and down in the Z-axis direction. The lifting means may be configured to include a ball screw connected to the rotation shaft 18 of the driven gear 20 and extending in the Z-axis direction, and a motor for rotating the ball screw.

The endless track 22 is made up of a number of interconnected link pieces (reference numbers omitted) and is wound around the drive gear 16 and the driven gear 20. The endless track 22 rotates in response to the rotation of the drive gear 16 by the motor 30.

In the cutting blade storage means 4 of the illustrated embodiment, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction with the lifting means. In addition, in the cutting blade storage means 4, the length of the endless track 22 can also be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

As shown in FIG. 2, multiple support shafts 24 are arranged on the endless track 22 at predetermined intervals. Also, as can be understood by referring to FIG. 3 together with FIG. 2, the support shaft 24 has a cylindrical base 32 connected to the endless track 22 and a cylindrical shaft portion 34 extending in the Y-axis direction from the end face of the base 32. The diameter of the shaft portion 34 is smaller than the diameter of the base 32.

Figure 3 also shows the cutting blade 36 supported by the support shaft 24. The cutting blade 36 has an annular base 38 and an annular cutting blade 40 fixed to the outer periphery of the base 38. The base 38 can be made of an appropriate metal material such as an aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting blade 40 is formed to a predetermined thickness (for example, about 10 to 30 μm) from abrasive grains such as diamond and a binder such as metal or resin, and protrudes radially outward from the outer periphery of the base 38.

In the support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the cutting blade 36, and multiple (e.g., five) cutting blades 36 are supported by the shaft portion 34. In the illustrated embodiment, as can be understood by referring to FIG. 2, cutting blades 36 are supported on half of the multiple support shafts 24. Also, as shown in FIG. 3, multiple ball plungers 42 are attached at intervals in the circumferential direction to the tip side of the shaft portion 34 to prevent the cutting blade 36 supported by the shaft portion 34 from popping out.

As shown in FIG. 4, a flow passage 32a is formed inside each base 32 of the support shaft 24, and a plurality of flow passages 22a are formed in the endless track 22, which are connected to one end of each flow passage 32a. The other end of each flow passage 32a opens at the end face of the base 32 radially outward from the shaft 34, as shown in FIG. 2. Also, as shown in FIG. 2, the support wall 28 is provided with an air nozzle 44 that protrudes in the Y-axis direction below the drive gear 16, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the support shaft 24 located at the lowest end in the orbit of the support shaft 24 accompanying the rotation of the endless track 22 faces the tip of the air nozzle 44.

When the cutting blade 36 located at the tip of the shaft 34 is removed, high-pressure air is supplied from the air nozzle 44 to the flow path 32a of the base 32 of the support shaft 24 located at the lowest end via the flow path 22a of the endless track 22, so that the cutting blade 36 remaining on the shaft 34 can be pushed out to the tip of the shaft 34. However, the action of the ball plunger 42 prevents the cutting blade 36 from falling off the shaft 34.

The loading/unloading means 6 will be described with reference to FIG. 5. The loading/unloading means 6 includes at least a Z-rotating shaft 46 extending in the Z-axis direction, a blade holding section 48 that is radially connected to the Z-rotating shaft 46 and sucks and holds the cutting blade 36, and a fixing nut holding section 50 that screws and unscrews a fixing nut onto a male thread formed at the tip of the spindle of the cutting device.

As shown in FIG. 5, the loading/unloading means 6 of the illustrated embodiment further includes a casing 52, which has a regular hexagonal top plate 54 and six rectangular side walls 56 that hang down from the periphery of the top plate 54. The Z rotation shaft 46 protrudes from the upper surface of the top plate 54. A motor (not shown) connected to the Z rotation shaft 46 is housed inside the casing 52.

In the illustrated embodiment, of the six side walls 56 of the casing 52, blade holders 48 are attached to four side walls 56, and fixed nut holders 50 are attached to two side walls 56, with the two fixed nut holders 50 being provided on a pair of opposing side walls 56. In this way, the loading/unloading means 6 is provided with two blade holders 48 for one fixed nut holder 50.

The blade holding portion 48 is formed in a cylindrical shape, and the end surface 58 of the blade holding portion 48 is provided with a circular central opening 60 capable of receiving the shaft portion 34 of the support shaft 24 and the tip of the spindle of the cutting device, and a plurality of suction holes 62 arranged at equal intervals in the circumferential direction around the central opening 60. Each suction hole 62 is connected to a suction means (not shown).

When the blade holding section 48 is positioned so that the end face 58 of the blade holding section 48 contacts the base 38 of the cutting blade 36 stored in the cutting blade storage means 4, the suction means generates suction force in each suction hole 62 to hold the cutting blade 36 by suction.

Continuing the explanation with reference to FIG. 5, the fixed nut holder 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, an annular rotor 66 rotatably housed inside the housing 64, and a motor (not shown) that rotates the rotor 66.

The rotor 66 has a central opening 68 that can receive the tip of the spindle of the cutting device. A plurality of suction holes 70 and a plurality of pins 72 are alternately provided at intervals in the circumferential direction on the end surface 66a of the rotor 66. Each suction hole 70 is connected to a suction means (not shown). The pin 72 is positioned at a position protruding from the end surface 66a of the rotor 66 (position shown in FIG. 5) by a spring (not shown) built into the rotor 66, and when the pin 72 is pushed toward the inside of the rotor 66, the spring contracts and is accommodated inside the rotor 66. The pin 72 is also positioned to correspond to the position of the pin hole formed in the fixing nut.

In the fixed nut holding section 50, the suction means generates suction force at each suction hole 70 to hold the fixed nut by suction, and with the pin 72 inserted into the pin hole formed in the fixed nut, the motor rotates the rotor 66, allowing the fixed nut for fixing the cutting blade 36 to the spindle of the cutting device to be screwed and unscrewed from the male thread formed at the tip of the spindle.

When unscrewing (removing) the fixed nut from the spindle, even if the position of the pin 72 of the fixed nut holding portion 50 is misaligned with the position of the pin hole of the fixed nut, if the end face 66a of the rotor 66 is positioned on the end face of the fixed nut attached to the spindle, the pin 72 is housed inside the rotor 66, and then the motor is rotated by the rotor 66, when the position of the pin 72 matches the position of the pin hole, the pin 72 is pushed out by the spring and inserted into the pin hole.

The loading/unloading means 6, which may be configured as described above, is disposed inside a frame 74 in the illustrated embodiment, as shown in FIG. 1. The frame 74 is supported on a lift table 76 so as to be movable in the Y-axis direction, and the lift table 76 is supported on a base stand 78 so as to be movable up and down in the Z-axis direction.

Explaining with reference to FIG. 1 and FIG. 6, the frame 74 includes a rectangular plate-shaped bottom 80, four pillars 82 extending upward from the four corners of the upper surface of the bottom 80, and a plate-shaped ceiling 84 (see FIG. 1) fixed to the upper ends of the pillars 82. A pair of guided members 86, each having a groove 86a extending in the Y-axis direction, are provided on the underside of the bottom 80 at a distance in the X-axis direction.

The lift table 76 includes a rectangular top plate 88 and four cylindrical legs 90 extending downward from the four corners of the bottom surface of the top plate 88. A pair of guide rails 92 extending in the Y-axis direction at a distance in the X-axis direction are provided on the upper surface of the top plate 88, and the pair of guide rails 92 slidably engage with grooves 86a of a pair of guided members 86 of the frame body 74.

The Y-axis positioning means 8 is provided on the upper surface of the top plate 88 of the lift table 76. The Y-axis positioning means 8 has a ball screw 94 that extends in the Y-axis direction between a pair of guide rails 92, and a motor 96 that rotates the ball screw 94. A nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom portion 80 of the frame body 74.

In the Y-axis direction positioning means 8, the rotational motion of the motor 96 is converted to linear motion by the ball screw 94 and transmitted to the frame body 74, which moves in the Y-axis direction along a pair of guide rails 92. In this way, the frame body 74 on which the loading/unloading means 6 is arranged is slidably supported by the guide rails 92 extending in the Y-axis direction arranged on the lift table 76, and is positioned by the Y-axis direction positioning means 8 at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means 4.

The above-mentioned operating position is a position where the blade holding part 48 of the loading/unloading means 6 is close to the cutting blade storage means 4, and the cutting blade 36 supported by the cutting blade storage means 4 can be sucked and held by the blade holding part 48. The above-mentioned retracted position is a position where the blade holding part 48 of the loading/unloading means 6 is farther away from the cutting blade storage means 4 than the above-mentioned operating position.

As shown in FIG. 6, the base stand 78 includes a frame 98 and a rectangular base plate 100 fixed to the upper part of the frame 98. Four circular holes 102 are formed at the four corners of the base plate 100, into which the legs 90 of the lift table 76 are slidably inserted. In addition, a female screw 104 is formed in the center of the base plate 100.

Continuing the explanation with reference to FIG. 6, the Z-axis moving means 10 is connected to the lift table 76 and the base frame 78. The Z-axis moving means 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is screwed into the female thread 104 of the base plate 100. The connecting plate 110 is fixed to the underside of the top plate 88 of the lift table 76 by an appropriate connecting means such as a bolt (not shown).

In the Z-axis moving means 10, the ball screw 106 converts the rotational motion of the motor 108 into linear motion, and the lift table 76 is raised and lowered relative to the base stand 78, thereby moving the frame 74 in which the loading/unloading means 6 is disposed in the Z-axis direction.

Referring to FIG. 7, the loading/unloading means 6 is disposed on a first moving body 112 disposed inside the frame body 74, the first moving body 112 is slidably supported while suspended from a first guide rail 116 disposed at the bottom of the second moving body 114 and extending in the X-axis direction, and the second moving body 114 is slidably supported while suspended from a second guide rail 118 disposed on the ceiling portion 84 of the frame body 74 and extending in the X-axis direction.

The first moving body 112 has a rectangular plate-shaped main body 120. A circular hole 122 is formed in the center of the main body 120. The Z rotation shaft 46 of the loading/unloading means 6 is inserted into the circular hole 122, and the Z rotation shaft 46 is fixed to the main body 120 so as not to rotate. When the motor of the loading/unloading means 6 connected to the Z rotation shaft 46 is driven, the casing 52 of the loading/unloading means 6 rotates relative to the first moving body 112, and the blade holding portion 48 and the fixed nut holding portion 50 are positioned in any orientation.

A pair of guided members 124 with grooves 124a extending in the X-axis direction are provided at a distance in the Y-axis direction on the upper surface of the main body 120 of the first moving body 112, and a block 126 with a through hole 126a extending in the X-axis direction is fixed to the upper surface.

The second moving body 114 has a rectangular plate-shaped main body 128, and a pair of first guide rails 116 are provided on the underside of the main body 128 at a distance in the Y-axis direction. The first guide rails 116 slidably engage with the grooves 124a of a pair of guided members 124 of the first moving body 112, and the first moving body 112 is slidably supported in a state where it is suspended from the first guide rails 116 arranged on the second moving body 114.

Below the main body 128 of the second moving body 114, a first X-axis moving means is provided for moving the first moving body 112 in the X-axis direction relative to the second moving body 114. In the illustrated embodiment, the first X-axis moving means is composed of an air cylinder 130. The cylinder tube 130a of the air cylinder 130 is fixed to the underside of the main body 128 and extends in the X-axis direction between the pair of first guide rails 116. The tip of the piston rod 130b of the air cylinder 130 is engaged and connected to the through hole 126a of the block 126 of the first moving body 112.

The air cylinder 130, which serves as the first X-axis moving means, moves the first moving body 112 in the X-axis direction along the first guide rail 116 relative to the second moving body 114 by advancing and retracting the piston rod 130b.

A pair of guided members 132 with grooves 132a extending in the X-axis direction are provided at intervals in the Y-axis direction on the upper surface of the main body 128 of the second moving body 114, and a block 134 with a female screw 134a extending in the X-axis direction is fixed to it.

The second guide rails 118 are provided as a pair at a distance in the Y-axis direction on the underside of the ceiling portion 84 of the frame body 74. The second guide rails 118 slidably engage with grooves 132a of a pair of guided members 132 of the second moving body 114, and the second moving body 114 is slidably supported in a state where it is suspended from the second guide rails 118 disposed on the ceiling portion 84 of the frame body 74 .

A second X-axis moving means 136 is provided below the ceiling 84 of the frame 74 to move the second moving body 114 in the X-axis direction relative to the ceiling 84. In the illustrated embodiment, the second X-axis moving means 136 has a ball screw 138 extending in the X-axis direction between the pair of second guide rails 118, and a motor 140 that rotates the ball screw 138. The ball screw 138 is threaded into the female screw 134a of the block 134 of the second moving body 114, and the motor 140 is fixed to the underside of the ceiling 84.

The second X-axis moving means 136 converts the rotational motion of the motor 140 into linear motion using a ball screw 138 and transmits it to the second moving body 114, moving the second moving body 114 in the X-axis direction along the second guide rail 118 relative to the ceiling portion 84.

The X-axis moving means 12 in the illustrated embodiment includes an air cylinder 130 as a first X-axis moving means, and a second X-axis moving means 136 having a ball screw 138 and a motor 140. In the illustrated embodiment, the air cylinder 130 as the first X-axis moving means moves the first moving body 112, thereby enabling the loading/unloading means 6 to be quickly advanced in the X-axis direction, and the second X-axis moving means 136 moves the second moving body 114, thereby enabling the X-axis position of the loading/unloading means 6 to be easily fine-tuned. In this way, the loading/unloading means 6 is configured to be freely advanced in the X-axis direction by the first moving body 112 and the second moving body 114.

The auxiliary device 2 is not limited to the above-mentioned configuration, and may further have a configuration as shown in Figures 8 and 9. In the configuration shown in Figures 8 and 9, a dressing board accommodating section 144 (see Figure 9) for accommodating a dressing board 142 for dressing the cutting blade 36 is provided at the bottom 80 of the frame body 74, and a holding means 146 (see Figure 8) for holding the dressing board 142 accommodated in the dressing board accommodating section 144 is provided on the first movable body 112.

The dressing board 142 may be a rectangular plate of green carbide or alundum-based abrasive grains formed using a binder such as a resin bond. Each side of the dressing board 142 is, for example, about 5 cm. As shown in FIG. 9, the dressing board storage section 144 in the illustrated embodiment is composed of three rectangular recesses provided on both sides in the Y-axis direction of the upper surface of a rectangular tray 148, and the tray 148 is placed on the upper surface of the bottom 80 of the frame 74.

8, the holding means 146 in the illustrated embodiment is provided in pair on both ends in the Y-axis direction of the first moving body 112. The holding means 146 includes a fixed piece 150 fixed to the Y-axis end of the main body 120 of the first moving body 112, a lifting piece 152 supported on the underside of the fixed piece 150 so as to be freely raised and lowered in the Z-axis direction, a lifting means (not shown) for lifting and lowering the lifting piece 152, and a plurality of suction pads 154 arranged on the underside of the lifting piece 152. The lifting means may be composed of an appropriate actuator such as an air cylinder. Each suction pad 154 is connected to a suction means.

In the holding means 146, the lifting piece 152 is lowered by the lifting means to bring each suction pad 154 into contact with the dressing board 142 housed in the dressing board housing section 144, and the suction means generates a suction force on each suction pad 154, so that each suction pad 154 holds the dressing board 142 by suction.

In addition, an end face correction jig accommodating section 158 (see FIG. 9) is provided on the bottom 80 of the frame 74 to accommodate an end face correction jig 156 that adjusts the outer peripheral end face of the mount flange that is formed at the tip of the spindle of the cutting means and supports the back of the cutting blade 36. The end face correction jig 156 has a rectangular base plate 160 and a grindstone 162 fixed to the upper surface of the base plate 160. As shown in FIG. 9, the end face correction jig accommodating section 158 in the illustrated embodiment is composed of a pair of rectangular recesses provided on both ends of the upper surface of the tray 148 in the Y-axis direction.

The end face correction jig 156 housed in the end face correction jig housing section 158 is held by suction using the suction pad 154 of the holding means 146 arranged on the first moving body 112.

Next, the cutting device 170 to which the above-mentioned auxiliary device 2 is connected will be described with reference to Figures 10 to 15.

As shown in FIG. 10, the cutting device 170 includes a chuck table 172 with a holding surface for holding the workpiece, cutting means 174 having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table 172, X-axis feed means 176 for feeding the chuck table 172 in the X-axis direction, Y-axis feed means 178 for indexing and feeding the cutting means 174 in the Y-axis direction perpendicular to the X-axis direction, and Z-axis feed means 180 for cutting and feeding the cutting means 174 in the Z-axis direction perpendicular to the X-axis and Y-axis directions.

Explaining with reference to Figures 10 and 11, the cutting device 170 comprises an X-axis movable plate 184 provided on the upper surface of a base 182 (see Figure 10) so as to be movable in the X-axis direction, a support 186 fixed to the upper surface of the X-axis movable plate 184, and a cover plate 188 fixed to the upper end of the support 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support 186 and extends upward through the circular opening 188a of the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built into the support 186.

As shown in FIG. 11, a circular porous suction chuck 190 connected to a suction means (not shown) is disposed on the upper end of the chuck table 172. In the chuck table 172, the suction means generates a suction force on the upper surface of the suction chuck 190, thereby suction-holding the workpiece placed on the upper surface of the suction chuck 190. In this manner, in the chuck table 172, the upper surface of the suction chuck 190 serves as a holding surface for holding the workpiece, and the holding surface is positioned on an XY plane defined by the X-axis and Y-axis directions. In addition, a plurality of clamps 192 are disposed at intervals around the periphery of the chuck table 172.

Continuing the explanation with reference to FIG. 11, a pair of rectangular sub-tables 194 are arranged on the upper surface of the cover plate 188 with a gap therebetween in the Y-axis direction. A plurality of suction holes 196 connected to suction means (not shown) are formed on the upper surface of each sub-table 194. In the sub-table 194, the suction means generates a suction force in each suction hole 196, thereby suction-holding the dressing board 142 or end surface correction jig 156 that has been brought in and held by the suction pad 154 of the holding means 146 arranged on the first moving body 112.

As shown in FIG. 11, the X-axis feed means 176 has a ball screw 198 that is connected to the X-axis movable plate 184 and extends in the X-axis direction, and a motor 200 that rotates the ball screw 198. The X-axis feed means 176 converts the rotational motion of the motor 200 into linear motion using the ball screw 198 and transmits it to the X-axis movable plate 184, moving the X-axis movable plate 184 along the guide rail 182a of the base 182 and feeding the chuck table 172 for processing in the X-axis direction.

As shown in FIG. 10, the cutting device 170 includes a gate-shaped frame 202 arranged across the chuck table 172. The frame 202 has a pair of support columns 204 that extend upward from the upper surface of the base 182 at a distance in the Y-axis direction, and a beam 206 that is spanned between the upper ends of the pair of support columns 204 and extends in the Y-axis direction. A pair of cutting means 174 is provided on one side of the beam 206 (the side on the back side in FIG. 10) at a distance in the Y-axis direction. In the cutting device 170 of the illustrated embodiment, a pair of cutting means 174 is provided so that the cutting blades 36 face each other, and the workpiece held on the chuck table 172 can be simultaneously cut by the pair of cutting blades 36. Note that there may be only one cutting means 174.

As shown in FIG. 12, each cutting means 174 includes a rectangular Y-axis movable member 208 supported on one side of a beam 206 so as to be movable in the Y-axis direction, a Z-axis movable member 210 with an L-shaped cross section supported on the Y-axis movable member 208 so as to be movable up and down in the Z-axis direction, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

A pair of guided grooves 208a are formed on one side of the Y-axis movable member 208 (the side facing the viewer in FIG. 12) that extend in the Y-axis direction and are spaced apart in the Z-axis direction, and the guided grooves 208a are slidably connected to a pair of guide rails (not shown) that extend in the Y-axis direction and are spaced apart in the vertical direction on one side of the beam 206.

The Y-axis feed means 178 has a ball screw 214 that extends in the Y-axis direction on one side of the beam 206, and a motor 216 that rotates the ball screw 214. The ball screw 214 is connected to the Y-axis movable member 208. The Y-axis feed means 178 converts the rotational motion of the motor 216 into linear motion using the ball screw 214 and transmits it to the Y-axis movable member 208, indexing and feeding the Y-axis movable member 208 in the Y-axis direction along a guide rail attached to one side of the beam 206.

A pair of guide rails (not shown) are formed on the other side of the Y-axis movable member 208 (the side facing the rear in FIG. 12) that extend in the Z-axis direction at a distance in the Y-axis direction, and the Z-axis movable member 210 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 208.

The Z-axis feed means 180 has a ball screw (not shown) that is connected to the Z-axis movable member 210 and extends in the Z-axis direction, and a motor 218 that rotates the ball screw. The Z-axis feed means 180 converts the rotational motion of the motor 218 into linear motion using the ball screw and transmits it to the Z-axis movable member 210, and feeds the Z-axis movable member 210 in the Z-axis direction along the guide rail of the Y-axis movable member 208.

Referring to FIG. 13, the spindle housing 212 supports a cylindrical spindle 220 that can rotate about the Y-axis direction, and houses a motor (not shown) that rotates the spindle 220. A cutting blade 36 that cuts the workpiece is removably fixed to the tip of the spindle 220 by a fixing nut 222.

A blade cover 224 that covers the cutting blade 36 is attached to the tip of the spindle housing 212. The blade cover 224 has a first cover member 224a fixed to the tip of the spindle housing 212 and a second cover member 224b movably attached to the tip of the first cover member 224a. The second cover member 224b is adapted to be moved in the X-axis direction by an appropriate actuator (not shown) such as an air cylinder, and is positioned in the open position shown in FIG. 13 when replacing the cutting blade 36, and is positioned in the closed position shown in FIG. 12 when cutting processing is performed.

As shown in FIG. 14, an annular mount flange 226 that protrudes radially outward is provided on the outer peripheral surface of the tip side of the spindle 220. An annular recess 226a is formed in the radially inner portion of the tip surface of the mount flange 226, and the outer peripheral portion of the tip surface of the mount flange 226 forms an annular receiving portion 226b that protrudes in the axial direction. In addition, a male thread 228 is formed on the outer peripheral surface of the spindle 220 further toward the tip side than the mount flange 226.

Then, the central opening 38a of the cutting blade 36 fits into the tip of the spindle 220, and the male thread 228 of the spindle 220 is screwed (fastened) into the fixing nut 222, so that the cutting blade 36 is sandwiched between the receiving portion 226b of the mounting flange 226 and the fixing nut 222 and detachably fixed to the tip of the spindle 220. In addition, a number of pin holes 222a into which the pins 72 of the fixing nut holding portion 50 of the loading/unloading means 6 are inserted are formed at equal intervals in the circumferential direction on the side of the nut 222.

As shown in FIG. 10, a pair of imaging means 230 for imaging the workpiece held on the chuck table 172 is attached to the other side (the side on the near side in FIG. 10) of the beam 206 of the frame 202 so as to be movable in the Y-axis direction, and a pair of moving means 232 for moving the imaging means 230 in the Y-axis direction is also attached. The moving means 232 has a ball screw 234 extending in the Y-axis direction on the other side of the beam 206, and a motor 236 for rotating the ball screw 234. The ball screw 234 is connected to the imaging means 230. The moving means 232 converts the rotational motion of the motor 236 into linear motion and transmits it to the imaging means 230, and moves the imaging means 230 in the Y-axis direction along a guide rail 206a attached to the other side of the beam 206. Note that there may be only one imaging means 230.

When cutting a workpiece such as a wafer using the cutting device 170, the workpiece is first attracted to the chuck table 172. Next, the X-axis feed means 176 moves the chuck table 172 below the imaging means 230, and the moving means 232 adjusts the Y-axis position of the imaging means 230. Next, the imaging means 230 captures an image of the workpiece from above to detect the cutting area of the workpiece.

Then, based on the cutting area of the workpiece detected by the imaging means 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of the workpiece relative to the cutting blades 36 of the cutting means 174. Next, the chuck table 172 is moved in the X-axis direction by the X-axis feed means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, to position the pair of cutting blades 36 above the cutting area of the workpiece.

Next, the Z-axis feed means 180 lowers the spindle housing 212, and the cutting edge 40 of the cutting blade 36, which is rotating at high speed, cuts into the cutting area of the workpiece. At the same time, cutting water is supplied to the portion where the cutting edge 40 of the cutting blade 36 has cut, while the chuck table 172 is moved in the X-axis direction to perform a predetermined cutting process on the cutting area of the workpiece. The Y-axis feed means 178 indexes and moves the spindle housing 212 in the Y-axis direction, and the above cutting process is repeated as appropriate, until the entire cutting area of the workpiece is cut. After the cutting process is completed, the cut workpiece is transported to the next process.

When the cutting process is repeated, the cutting blade 36 wears, and when the cutting blade 36 wears to a certain extent, the cutting accuracy cannot be maintained, and therefore the cutting blade 36 attached to the spindle 220 must be replaced with a new cutting blade 36. Even if the cutting blade 36 attached to the spindle 220 has not worn to a certain extent, when cutting a workpiece made of a material different from that of the workpiece previously cut, it may be necessary to replace the cutting blade 36 with one that matches the material of the workpiece.

In the illustrated embodiment, as shown in FIG. 15, an auxiliary device 2 capable of automatically replacing the cutting blade 36 of the cutting device 170 is connected to the cutting device 170, and a method for replacing the cutting blade 36 using the auxiliary device 2 will be described below.

As shown in FIG. 15, the auxiliary device 2 is disposed at the rear of the cutting device 170 in the X-axis direction, so that it can be attached to a cutting device 170 that has already been delivered to a user. When using the auxiliary device 2 to replace the cutting blade 36 attached to the cutting device 170, first rotate the endless track 22 of the cutting blade storage means 4, and position the support shaft 24 supporting the new cutting blade 36 to be brought into the cutting device 170 at a predetermined position (for example, the lowest end position in the track of the support shaft 24).

Next, as shown in FIG. 16, the casing 52 is rotated by a motor connected to the Z rotation shaft 46 of the loading/unloading means 6, so that the side wall 56 of the casing 52 to which the blade holding part 48 is attached is aligned in the X-axis direction, and the blade holding part 48 faces the cutting blade storage means 4. In addition, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft part 34 of the support shaft 24 in the above-mentioned predetermined position can be inserted into the central opening 60 of the blade holding part 48 (see FIG. 5).

Next, as shown in FIG. 17, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the loading/unloading means 6 is positioned at an operating position where the cutting blade 36 supported by the support shaft 24 can be held by the blade holding part 48. As a result, the shaft part 34 of the support shaft 24 in the predetermined position is inserted into the central opening 60 of the blade holding part 48, and the end face of the cutting blade 36 located at the tip side of the shaft part 34 is brought into contact with the end face 58 of the blade holding part 48. Next, suction force is generated in each suction hole 62 of the blade holding part 48, and the cutting blade 36 located at the tip side of the shaft part 34 is suction-held by the blade holding part 48.

Next, the Y-axis positioning means 8 is operated to move the loading/unloading means 6 away from the cutting blade storage means 4 in the Y-axis direction and position it in the retreated position. Next, the casing 52 of the loading/unloading means 6 is rotated 180° to face the blade holding part 48 opposite the blade holding part 48 that suction-holds the cutting blade 36 to the cutting blade storage means 4. Next, the Y-axis positioning means 8 is operated to position the loading/unloading means 6 in an operating position where the cutting blade 36 of the support shaft 24 can be held by the blade holding part 48 on the opposite side. Next, suction force is generated in each suction hole 62 of the blade holding part 48 on the opposite side, and the cutting blade 36 located at the tip side of the shaft part 34 is suction-held by the blade holding part 48. As a result, a new cutting blade 36 is suction-held by a pair of opposing blade holding parts 48 out of the four blade holding parts 48.

Next, as shown in FIG. 18, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the lifting table 76 is moved in the Z-axis direction by the Z-axis moving means 10. This separates the loading/unloading means 6 from the cutting blade storage means 4 and positions it in a retracted position, and adjusts the Y-axis and Z-axis positions of the loading/unloading means 6 relative to the cutting device 170. The Y-axis position of the loading/unloading means 6 after the position adjustment is between the pair of cutting means 174 of the cutting device 170, and the Z-axis position of the loading/unloading means 6 after the position adjustment is above the holding surface of the chuck table 172.

19, the first moving body 112 is moved in the X-axis direction by the air cylinder 130 as the first X-axis moving means, and the carrying-in/out means 6 is advanced toward between the pair of cutting means 174 of the cutting device 170. Next, as shown in FIG. 20, the second moving body 114 is moved in the X-axis direction by the second X-axis moving means 136, and the X-axis position of the carrying-in/out means 6 relative to the pair of cutting means 174 is adjusted. Specifically, the X-axis position of the center of the new pair of cutting blades 36 held by suction by the pair of blade holding parts 48 of the carrying-in/out means 6 is aligned with the X-axis position of the center of the pair of cutting blades 36 attached to the pair of cutting means 174. In addition, the Z-axis moving means 10 of the auxiliary device 2 or the Z-axis feed means 180 of the cutting device 170 is operated to align the Z-axis position of the center of the cutting blade 36 of the blade holding part 48 with the Z-axis position of the center of the cutting blade 36 of the cutting means 174.

Next, the casing 52 of the loading/unloading means 6 is rotated 60° so that the pair of fixed nut holders 50 face the cutting blades 36 of the pair of cutting means 174. The casing 52 may be rotated 60° before the first and second moving bodies 112, 114 are advanced.

Next, the second cover member 224b of each blade cover 224 of the pair of cutting means 174 is positioned in the open position (see FIG. 13). Next, the cutting means 174 is moved in the Y-axis direction by the Y-axis feed means 178 of the cutting device 170, and the fixing nut 222 fixing the cutting blade 36 to the spindle 220 is brought into contact with the end face 66a of the rotating body 66 of the fixing nut holding part 50. Then, the pin 72 of the fixing nut holding part 50 is pushed by the fixing nut 222 and accommodated inside the rotating body 66, and the tip of the spindle 220 is accommodated in the central opening 68 of the rotating body 66.

Next, when the motor of the fixed nut holding part 50 rotates the rotor 66, when each pin 72 matches with the pin hole 222a of the fixed nut 222, each pin 72 fits into the pin hole 222a, and the rotational motion of the rotor 66 is transmitted to the fixed nut 222 via each pin 72, loosening the fixed nut 222. This allows the fixed nut 222 to be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. In addition, suction force is generated in each suction hole 70 of the fixed nut holding part 50, and the removed fixed nut 222 is sucked and held by the fixed nut holding part 50.

Next, the cutting means 174 is moved away from the loading/unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading/unloading means 6 is rotated 60° so that the empty blade holding portion 48 that is not holding the cutting blade 36 by suction faces the cutting blade 36 of the cutting means 174.

Then, the cutting means 174 is brought closer to the loading/unloading means 6 by the Y-axis feed means 178, and the spindle 220 of the cutting means 174 is inserted into the central opening 60 of the blade holding part 48, while the end face of the cutting blade 36 of the cutting means 174 is brought into contact with the end face 58 of the empty blade holding part 48. Next, suction force is generated in each suction hole 62 of the blade holding part 48, and the cutting blade 36 of the cutting means 174 is suction-held by the blade holding part 48.

Then, the cutting means 174 is moved away from the loading/unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading/unloading means 6 is rotated 60° so that the blade holding portion 48, which is holding the new cutting blade 36 by suction, faces the spindle 220 of the cutting means 174.

Then, the cutting means 174 is brought closer to the loading/unloading means 6 by the Y-axis feed means 178, and the spindle 220 is inserted into the central opening 38a of the new cutting blade 36, so that the end face of the cutting blade 36 comes into contact with the receiving portion 226b of the mounting flange 226 of the spindle 220. Next, the suction force of the blade holding portion 48 is released, and the new cutting blade 36 is transferred from the blade holding portion 48 to the spindle 220.

Then, the cutting means 174 is moved away from the loading/unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading/unloading means 6 is rotated 60° so that the fixing nut holding part 50, which is holding the removed fixing nut 222 by suction, faces the spindle 220 of the cutting means 174.

Next, the cutting means 174 is brought close to the carry-in/out means 6 by the Y-axis feed means 178, and the fixed nut 222 held by suction by the fixed nut holding part 50 is fitted to the tip of the spindle 220. Next, the motor of the fixed nut holding part 50 is operated in the opposite direction to when the fixed nut 222 was removed, to rotate the fixed nut 222, and the fixed nut 222 is screwed (fastened) to the male thread 228 of the spindle 220. This allows a new cutting blade 36 to be attached to the cutting means 174 to be sandwiched between the receiving part 226b of the mount flange 226 of the spindle 220 and the fixed nut 222 and fixed to the spindle 220. Next, after releasing the suction force of the fixed nut holding part 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned in the closed position. As described above, the removal and installation of the fixing nuts 222 and the cutting blades 36 may be performed simultaneously for the pair of cutting means 174 or separately.

Then, the first and second movable bodies 112, 114 are retracted, and the casing 52 of the loading/unloading means 6 is rotated 60° so that one of the pair of removed cutting blades 36 faces the cutting blade storage means 4. In addition, the endless track 22 of the cutting blade storage means 4 is rotated, and the empty support shaft 24 that does not support the cutting blade 36 is positioned at a predetermined position (for example, the lowest end position in the track of the support shaft 24).

Then, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft part 34 of the support shaft 24 at the specified position can be inserted into the central opening 38a of one of the cutting blades 36 held by suction in the blade holding part 48.

Then, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the support shaft 24 in the above-mentioned predetermined position is inserted into the central opening 38a of one of the cutting blades 36 held by suction by the blade holding portion 48, and the end face of one of the cutting blades 36 is brought into contact with the end face of the base portion 32 of the support shaft 24. Next, the suction force of the blade holding portion 48 is released, and one of the pair of removed cutting blades 36 is transferred to the support shaft 24.

The Y-axis positioning means 8 separates the loading/unloading means 6 from the cutting blade storage means 4, and rotates the casing 52 of the loading/unloading means 6 180° to bring the blade holder 48 on the opposite side, which holds the other of the pair of removed cutting blades 36 by suction, into the cutting blade storage means 4. Next, the Y-axis positioning means 8 moves the frame 74 in the Y-axis direction, and the shaft 34 of the support shaft 24 at the above-mentioned predetermined position is inserted into the central opening 38a of the other cutting blade 36 held by the blade holder 48 on the opposite side by suction, and the end face of the other cutting blade 36 is brought into contact with the end face of the cutting blade 36 supported by the support shaft 24. Next, the suction force of the blade holder 48 is released, and the other of the pair of removed cutting blades 36 is transferred to the support shaft 24.

As described above, the auxiliary device 2 in the illustrated embodiment can be attached to a cutting device 170 that has already been delivered to a user, and the cutting blade 36 attached to the cutting means 174 of the cutting device 170 can be replaced.

Next, we will explain how to transport the dressing board 142 or the end surface correction jig 156 into the cutting device 170 when the auxiliary device 2 has the configuration shown in Figures 8 and 9.

When the auxiliary device 2 is used to transport the dressing board 142 to the cutting device 170, first, the pair of lifting pieces 152 are lowered by the lifting means of the holding means 146, and each suction pad 154 is brought into contact with two of the dressing boards 142 housed in the dressing board housing section 144. Next, the suction means generates a suction force on each suction pad 154, and each suction pad 154 holds the dressing board 142 by suction. Next, the lifting pieces 152 holding the dressing board 142 by suction are raised.

Then, the Y-axis positioning means 8 and the Z-axis moving means 10 adjust the Y-axis position and the Z-axis position of the loading/unloading means 6 relative to the cutting device 170, and then, as shown in FIG. 21, the X-axis moving means 12 (the air cylinder 130 as the first X-axis moving means and the second X-axis moving means 136) advances the loading/unloading means 6 toward the cutting device 170, and the dressing board 142 held by suction by the lifting piece 152 is positioned above the sub-table 194.

Then, the lifting piece 152 is lowered so that the underside of the dressing board 142 comes into contact with the upper surface of the sub-table 194. Next, suction force is generated in each suction hole 196 of the sub-table 194, the dressing board 142 is sucked and held by the sub-table 194, and the suction force of the holding means 146 is released. In this way, the auxiliary device 2 can be attached to the cutting device 170 that has already been delivered to the user, and the dressing board 142 can be transported to the cutting device 170.

Then, the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178 to position the cutting blade 36 attached to the cutting means 174 above the dressing board 142, and then the spindle housing 212 is lowered by the Z-axis feed means 180, and the cutting edge 40 of the cutting blade 36 rotates at high speed to cut the dressing board 142. This allows dressing (sharpening) to be performed to correct the cutting edge 40 of the cutting blade 36.

When the end face correction jig 156 is brought into the cutting device 170 using the auxiliary device 2, the pair of lifting pieces 152 are first lowered by the lifting means of the holding means 146, and each suction pad 154 is brought into contact with the upper surface of the substrate 160 of the pair of end face correction jig 156 housed in the end face correction jig housing section 158. Next, the suction means generates a suction force on each suction pad 154, and each suction pad 154 suction-holds the end face correction jig 156. Next, the lifting pieces 152 holding the end face correction jig 156 by suction are raised.

Next, the Y-axis positioning means 8 and the Z-axis moving means 10 adjust the Y-axis position and Z-axis position of the loading/unloading means 6 relative to the cutting device 170, and then, as shown in FIG. 22, the X-axis moving means 12 advances the loading/unloading means 6 toward the cutting device 170, and the end face correction jig 156 held by suction by the lifting piece 152 is positioned above the sub-table 194.

Then, the lifting piece 152 is lowered so that the underside of the substrate 160 of the end face correction jig 156 comes into contact with the upper surface of the sub-table 194. Next, suction force is generated in each suction hole 196 of the sub-table 194, the end face correction jig 156 is sucked and held by the sub-table 194, and the suction force of the holding means 146 is released. In this way, the auxiliary device 2 can be attached to the cutting device 170 that has already been delivered to the user, and the end face correction jig 156 can be transported to the cutting device 170.

Then, the blade holder 48 and the fixed nut holder 50 of the loading/unloading means 6 remove the fixed nut 222 and the cutting blade 36 from the spindle 220 of the cutting means 174, and then the Z-axis feed means 180 is operated to bring the receiving portion 226b of the mount flange 226 of the spindle 220 into contact with the grindstone 162 of the end face correction jig 156. Next, the Y-axis feed means 178 moves the spindle housing 212 in the Y-axis direction, and the receiving portion 226b of the mount flange 226 of the rotated spindle 220 comes into contact with the grindstone 162 of the end face correction jig 156. This allows the grindstone 162 to grind the receiving portion 226b (outer peripheral end face) of the mount flange 226 to make it flat.

In the illustrated embodiment, the loading/unloading means 6 of the auxiliary device 2 is provided with four blade holders 48 and two fixed nut holders 50 in correspondence with the cutting device 170 being provided with a pair of cutting means 174. However, if the cutting device 170 is provided with a single cutting means 174, the loading/unloading means 6 may be provided with two blade holders 48 and one fixed nut holder 50. Also, if the cutting device 170 is provided with a single cutting means 174, the number of holders 146 that hold the dressing board 142 and the end face correction jig 156 may be one.

2: Auxiliary device 4: Cutting blade storage means 6: Loading/unloading means 8: Y-axis direction positioning means 10: Z-axis movement means 12: X-axis movement means 14: Rotation shaft 16: Drive gear 18: Rotation shaft 20: Driven gear 22: Caterpillar track 24: Support shaft 36: Cutting blade 38a: Central opening 46: Z rotation shaft 48: Blade holder 50: Fixed nut holder 74: Frame 76: Lifting table 80: Bottom (frame)
84: Ceiling part (frame)
92: Guide rail (lifting table)
112: First moving body 114: Second moving body 116: First guide rail 118: Second guide rail 142: Dressing board 144: Dressing board storage section 146: Holding means 156: End face correction jig 158: End face correction jig storage section

Claims (7)

an auxiliary device comprising: a chuck table having a holding surface for holding a workpiece; cutting means having a cutting blade attached by a fixing nut for cutting the workpiece held on the chuck table; X-axis feed means for feeding the chuck table in an X-axis direction for processing; Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is connected to the cutting device defined in the X-axis and Y-axis directions;
the cutting blade storage means storing a plurality of cutting blades; a carrying-in/out means for carrying cutting blades in and out of the cutting blade storage means; a Y-axis positioning means for positioning the carrying-in/out means in an active position and a retracted position in the Y-axis direction with respect to the cutting blade storage means; a Z-axis moving means for moving the carrying-in/out means in the Z-axis direction; and an X-axis moving means for moving the carrying-in/out means in the X-axis direction to align the X-axis position of the cutting blade attached to the spindle of the cutting means with the X-axis position of the cutting blade carried out of the cutting blade storage means by the carrying-in/out means, and positioning the cutting blade carried out of the cutting blade storage means by the carrying-in/out means in a position where it can be replaced with the cutting blade attached to the spindle of the cutting means ,
The carry-in/out means includes at least a Z rotation shaft extending in the Z-axis direction, a blade holding portion radially connected to the Z rotation shaft and sucking and holding the cutting blade, and a fixing nut holding portion that screws the fixing nut into and out of a male screw formed at the tip of the spindle,
The auxiliary device has two of the blade holding portions for one of the fixing nut holding portions. The auxiliary device according to claim 1, wherein the cutting blade storage means includes a drive gear having a rotation axis extending in the Y-axis direction, a driven gear having a rotation axis extending in the Y-axis direction and spaced apart from the drive gear in the Z-axis direction, an endless track wound around the drive gear and the driven gear, and a support shaft extending in the Y-axis direction that is disposed at a predetermined interval on the endless track and inserted into the central opening of the cutting blade to support the cutting blade. An auxiliary device as described in claim 2, in which the distance between the driving gear and the driven gear in the Z-axis direction can be adjusted and the length of the endless track can also be adjusted. 2. An auxiliary device as described in claim 1, wherein the transport means is arranged on a frame body, the frame body is slidably supported on a guide rail extending in the Y-axis direction arranged on the lifting table, and the Y-axis positioning means positions the cutting blade storage means at the working position and the retracted position in the Y -axis direction. 5. An auxiliary device as claimed in claim 4, wherein the carrying-in/out means is disposed on a first movable body disposed inside the frame, the first movable body is slidably supported in a state suspended from a first guide rail disposed on the lower part of a second movable body and extending in the X-axis direction, the second movable body is slidably supported in a state suspended from a second guide rail disposed on a ceiling part of the frame body and extending in the X-axis direction, and the carrying-in/out means is configured to be freely advanced in the X -axis direction by the first movable body and the second movable body. An auxiliary device as described in claim 5, wherein a dressing board accommodating section for accommodating a dressing board for dressing the cutting blade is arranged at the bottom of the frame body, and a holding means for holding the dressing board accommodated in the dressing board accommodating section is arranged on the first movable body. An auxiliary device as described in claim 6, wherein an end face correction tool accommodating section is disposed at the bottom of the frame body for accommodating an end face correction tool for adjusting the outer peripheral end face of a mount flange formed at the tip of the spindle of the cutting means and supporting the back of the cutting blade, and the end face correction tool is held by the holding means disposed on the first movable body.