JP7704629B2 - Peeling device - Google Patents

Description

The present invention relates to a peeling device that peels off a protective material from a workpiece.

Chips of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, by thinning a workpiece such as a wafer on which many devices are formed, and then dividing it into areas containing individual devices.

One method for thinning a workpiece is to grind the back side of the workpiece. This grinding is generally performed with a protective material attached to the front side of the workpiece to protect the device. Another method for dividing a workpiece is to cut from the front side of the workpiece. This cutting is generally performed in a frame unit state in which the workpiece is integrated with an annular frame via a dicing tape attached to the back side of the workpiece to facilitate handling before and after division of the workpiece.

Therefore, after thinning the workpiece and before dividing it, it is necessary to attach the back surface of the workpiece to the central region of a dicing tape whose outer periphery is attached to an annular frame, and peel off the protective material from the surface of the workpiece. For example, the protective material (protective tape) is peeled off from the surface of the workpiece by attaching a peeling tape to an end of the protective material, and then relatively moving a holding table that holds the workpiece and a gripping unit (clamping means) that grips one end of the peeling tape (see, for example, Patent Document 1).

JP 2012-28478 A

A peeling device that peels off protective materials from workpieces is provided with a collection box that collects the protective materials. This collection box generally includes a bottom wall and a side wall that stands upright from the outer periphery of the bottom wall, and is open on the top side. The collection box is also incorporated in the peeling device in such a manner that it can be easily separated in order to remove the collected protective materials and empty the collection box.

When the protective member is peeled off from the workpiece in this peeling device, the gripping unit that grips one end of the peeling tape attached to the protective member is moved and stopped above the collection box, and the protective member is dropped into the collection box together with the peeling tape. However, when the gripping unit is moved and then stopped in this manner, an inertial force acts on the peeling tape and protective member, causing the protective member to swing together with the peeling tape, one end of which is gripped by the gripping unit.

If the peeling tape and protective member are dropped into the collection box in this shaking state, the peeling tape and protective member may stick to the side wall of the collection box. In such a case, the collected protective member may need to be removed from the collection box more frequently, and this work may become cumbersome.

In view of this, the object of the present invention is to provide a peeling device that can peel protective materials off workpieces without increasing the frequency of removing collected protective materials from a collection box and without complicating this task.

According to the present invention, a peeling device for peeling a protective material from a workpiece having a protective material attached to one surface thereof is provided, the peeling device comprising: a holding table for holding the workpiece from the other surface thereof; a gripping unit for gripping one end of a peeling tape attached to the protective material attached to the one surface of the workpiece held on the holding table; a collection box for collecting the protective material dropped from the gripping unit together with the peeling tape; a moving mechanism for moving the gripping unit from above the holding table to above the collection box; and a control unit for controlling the operation of the holding table, the gripping unit, and the moving mechanism, the control unit positioning the gripping unit above the collection box, causing the gripping unit to wait for a preset time, and then dropping the protective material from the gripping unit together with the peeling tape.

The peeling device of the present invention is equipped with a control unit that positions the gripping unit above the collection box, waits the gripping unit for a preset time, and then drops the protective material from the gripping unit together with the peeling tape. Therefore, in the peeling device of the present invention, the peeling tape and protective material can be dropped into the collection box after the shaking of the peeling tape and protective material caused by the movement of the gripping unit has subsided.

In this case, the likelihood that the protective material dropped from the gripping unit will stick to the side wall of the collection box can be reduced. As a result, the peeling device of the present invention can peel the protective material off of the workpiece without increasing the frequency of the task of removing the collected protective material from the collection box and without complicating this task.

FIG. 1 is a perspective view illustrating an example of a peeling device. FIG. 2 is a perspective view illustrating an example of a frame unit. FIG. 3 is a perspective view illustrating the holding table. 4A and 4B are partial cross-sectional side views that diagrammatically show the state of the periphery of the holding table when the protective material is peeled off from the surface of the workpiece. 5A and 5B are partial cross-sectional side views that diagrammatically show the state of the periphery of the holding table when the protective material is peeled off from the surface of the workpiece. 6A and 6B are partial cross-sectional side views that diagrammatically show the state of the periphery of the holding table when the protective film is peeled off from the surface of the workpiece. 7A and 7B are side views that typically show the state of the periphery of a recovery box when the protective material peeled off from the surface of a workpiece is dropped into the recovery box together with the peeling tape. 8A and 8B are side views that typically show the state of the periphery of a recovery box when the protective material peeled off from the surface of a workpiece is dropped into the recovery box together with the peeling tape.

An embodiment of the present invention will be described with reference to the attached drawings. Fig. 1 is a perspective view showing a schematic example of a stripping device that strips a protective material from a workpiece. Note that the X-axis direction (front-back direction) and the Y-axis direction (left-right direction) shown in Fig. 1 are directions perpendicular to each other on a horizontal plane, and the Z-axis direction (up-down direction) is a direction (vertical direction) perpendicular to each of the X-axis direction and the Y-axis direction. Also, some of the components are shown in a simplified form in Fig. 1.

The peeling device 2 shown in FIG. 1 has a support surface 4a parallel to the X-axis direction and the Y-axis direction, and is equipped with a rectangular parallelepiped support table 4 extending along the X-axis direction. A first moving mechanism (holding table moving mechanism) 6 that moves a holding table 16 (described later) along the X-axis direction is provided on the support surface 4a of the support table 4.

The first moving mechanism 6 has a pair of guide rails 8 that are fixed to the support surface 4a and extend along the X-axis direction. A moving plate 10 is connected to the upper surface of the pair of guide rails 8 in a manner that allows it to slide along the pair of guide rails 8. A screw shaft 12 that extends along the X-axis direction is disposed between the pair of guide rails 8.

A motor 14 for rotating the screw shaft 12 is connected to the front end of the screw shaft 12. A nut portion that accommodates balls that roll on the surface of the rotating screw shaft 12 is provided on the surface of the screw shaft 12 where a spiral groove is formed, forming a ball screw. In other words, when the screw shaft 12 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the X-axis direction.

Furthermore, this nut part is fixed to the underside of the movable plate 10. Therefore, when the screw shaft 12 is rotated by the motor 14, the movable plate 10 moves along the X-axis direction together with the nut part. A holding table 16 that holds a frame unit including a workpiece, which will be described later, is provided on the upper surface of this movable plate 10.

Figure 2 is a perspective view showing a schematic example of a frame unit held on a holding table 16. The frame unit 11 shown in Figure 2 has a disk-shaped workpiece 13 that has been ground from the back surface (lower surface, the other surface) to a desired thickness.

This workpiece 13 is, for example, a wafer made of a semiconductor material such as silicon (Si) and having a notch 13a formed on the side. The workpiece 13 is divided into multiple regions by multiple intended division lines that intersect with each other, and devices such as ICs or LSIs are formed on the surface (top) side of each region.

Furthermore, a disk-shaped protective member 15 having a diameter roughly equal to that of the workpiece 13 is provided on the surface (top surface, one side) of the workpiece 13 so as to cover the device. This protective member 15 is made of, for example, resin, and is provided to protect the device by absorbing the impact applied to the front surface side when the workpiece 13 is ground from the back surface side.

After the workpiece 13 is ground from the back side, the central region of a disk-shaped dicing tape 17 having a diameter longer than that of the workpiece 13 is attached to the back side of the workpiece 13. The dicing tape 17 has, for example, a flexible film-like tape base material and an adhesive layer (glue layer) provided on one surface of the tape base material (the surface facing the workpiece 13).

The tape substrate is made of, for example, polyolefin (PO), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), etc. The adhesive layer is made of, for example, ultraviolet-curing silicone rubber, acrylic material, or epoxy material, etc.

In addition, an annular frame 19 made of a metal material such as aluminum or stainless steel is attached to the outer periphery of the dicing tape 17. A circular opening having a diameter longer than the diameter of the workpiece 13 is formed in this annular frame 19. The dicing tape 17 is attached to the annular frame 19 so as to cover this opening.

The frame unit 11 shown in FIG. 2 is loaded onto the holding table 16 shown in FIG. 1 with the dicing tape 17 facing down. FIG. 3 is a perspective view showing the holding table 16. This holding table 16 has a cylindrical housing 18. A cylindrical recess is formed in the upper part of this housing 18, and a disk-shaped porous plate 20 is fixed in this recess.

The porous plate 20 is connected to a suction source (not shown) such as a vacuum pump via a suction passage (not shown) formed inside the housing 18, piping connected to the housing 18, an electric valve, etc. In addition, a circular frame holder 22 is provided around the periphery of the housing 18. A circular groove 22a is formed on the upper surface of the frame holder 22.

The groove 22a is connected to a suction source (not shown) such as a vacuum pump via a plurality of suction passages 22b that open at the bottom surface of the groove 22a, piping connected to the frame holding part 22, an electric valve, etc. Note that this suction source may be the same as the suction source that is connected to the porous plate 20, or it may be different.

When holding the frame unit 11 on the holding table 16, first, the frame unit 11 is brought onto the upper surface of the porous plate 20 and the upper surface of the frame holding part 22 so that the dicing tape 17 is facing down. Then, the suction source is operated and the electric valve provided between the suction source and the porous plate 20 and groove 22a is opened.

As a result, the workpiece 13 is sucked from the porous plate 20 side through the central region of the dicing tape 17, and the annular frame 19 is sucked from the frame holding part 22 side through the peripheral region of the dicing tape 17. As a result, the frame unit 11 is held on the holding table 16.

Furthermore, below the frame holding part 22, a plurality of air cylinders 24 are provided at approximately equal intervals along the circumferential direction of the frame holding part 22. Each of the plurality of air cylinders 24 has a piston rod 24a that is movable along the Z-axis direction, and the frame holding part 22 is connected to the upper end of this piston rod 24a.

Therefore, in the holding table 16, by operating the multiple air cylinders 24 while the frame unit 11 is held on the holding table 16, it is possible to lower the position of the annular frame 19 below the position of the workpiece 13, etc.

As shown in FIG. 1, a rectangular parallelepiped support base 26 is provided above the holding table 16. The support base 26 has a support surface 26a parallel to the X-axis direction and the Z-axis direction and extends along the X-axis direction. A second movement mechanism (moving mechanism for the holding table and heating plate) 28 is provided on the support surface 26a of the support base 26, which moves the gripping unit 42 and heating plate 48 (described later) along the X-axis direction.

The second moving mechanism 28 has a pair of guide rails 30 that are fixed to the support surface 26a and extend along the X-axis direction. A moving plate 32 is connected to the front surface side of the pair of guide rails 30 in a manner that allows it to slide along the pair of guide rails 30. A screw shaft 34 that extends along the X-axis direction is disposed between the pair of guide rails 30.

A motor 36 for rotating the screw shaft 34 is connected to the front end of the screw shaft 34. A nut portion that accommodates balls that roll on the surface of the rotating screw shaft 34 is provided on the surface of the screw shaft 34 where a spiral groove is formed, forming a ball screw. In other words, when the screw shaft 34 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the X-axis direction.

The nut portion is fixed to the rear surface of the movable plate 32. Therefore, when the screw shaft 34 is rotated by the motor 36, the movable plate 32 moves along the X-axis direction together with the nut portion. In addition, a pair of air cylinders 38, 40 are provided on the front surface of the movable plate 32, aligned front to back.

The air cylinder 38 located at the front has a piston rod 38a that can move along the Z-axis direction, and a gripping unit 42 that grips the peeling tape 21 (described later) is connected to the lower end of the piston rod 38a. The gripping unit 42 has an L-shaped fixed claw 44.

The fixed claw 44 has a rectangular parallelepiped-shaped erected portion 44a extending along the Z-axis direction, and a rectangular parallelepiped-shaped bottom portion 44b extending rearward from the lower end of the erected portion 44a. In addition, a rectangular parallelepiped-shaped movable claw 46 that is movable along the Z-axis direction is provided on the rear surface of the erected portion 44a.

The air cylinder 40, located behind the air cylinder 38, has a piston rod 40a that can move along the Z-axis direction, and the lower end of this piston rod 40a is connected to a rectangular heating plate 48 that heats the peeling tape 21 (described later). A heating wire is built into this heating plate 48, and by generating an electric current in this heating wire, the heating plate 48 is heated, centered around the lower end of the heating plate 48.

Furthermore, a rectangular parallelepiped support base 50 having a support surface 50a parallel to the Y-axis direction and the Z-axis direction and extending along the Y-axis direction is provided on the rear lower side of the air cylinder 40. A third movement mechanism (cutter movement mechanism) 52 that moves a cutter 62 (described later) along the Y-axis direction is provided on the support surface 50a of this support base 50.

The third movement mechanism 52 has a pair of guide rails 54 that are fixed to the support surface 50a and extend along the Y-axis direction. An air cylinder 56 is connected to the front side of the pair of guide rails 54 in a manner that allows it to slide along the pair of guide rails 54. A screw shaft 58 that extends along the Y-axis direction is disposed between the pair of guide rails 54.

A motor 60 for rotating the screw shaft 58 is connected to one end of the screw shaft 58. A nut portion that accommodates balls that roll on the surface of the rotating screw shaft 58 is provided on the surface of the screw shaft 58 where a spiral groove is formed, forming a ball screw. In other words, when the screw shaft 58 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the Y-axis direction.

The nut is fixed to the rear side of the air cylinder 56. Therefore, when the motor 60 rotates the screw shaft 58, the air cylinder 56 moves along the Y-axis direction together with the nut. The air cylinder 56 also has a piston rod 56a that can move along the Z-axis direction, and a disk-shaped cutter 62 is connected to the lower end of the piston rod 56a.

Below the cutter 62, a work table 64 is provided to cut the peeling tape 21, which will be described later. This work table 64 is provided at a position higher than the upper surface of the holding table 16 (the upper surface of the porous plate 20 and the upper surface of the frame holding part 22). In addition, a groove 64a extending along the Y-axis direction is formed in the work table 64.

Then, when the peeling tape 21 is placed on the workbench 64, the cutter 62, whose lower end is positioned inside the groove 64a, is moved along the Y-axis direction, and the peeling tape 21 is cut by the cutter 62.

Furthermore, a peeling tape supply unit 66 is provided at the rear upper side of the workbench 64. This peeling tape supply unit 66 has a supply roller 68. The peeling tape 21 is wound around this supply roller 68. This peeling tape 21 has, for example, a tape base material and a thermosetting resin layer provided on one surface of this tape base material (the surface facing the supply roller 68).

In addition, below the supply roller 68, a pair of guide rollers 70 aligned along the Z-axis direction are provided, and the peeling tape 21 is pulled downward by the pair of guide rollers 70. Furthermore, below the pair of guide rollers 70, a pair of feed rollers 72 aligned along the Z-axis direction are provided, and the peeling tape 21 is fed forward by the pair of feed rollers 72.

Furthermore, the peeling tape supply unit 66 is connected to a fourth movement mechanism (movement mechanism for the peeling tape supply unit) (not shown) that moves the peeling tape supply unit 66 along the Z-axis direction. This fourth movement mechanism is, for example, a ball screw type movement mechanism.

In addition, below the peeling tape supply unit 66, a collection box 74 is provided to collect the protective material 15 peeled off from the workpiece 13. For convenience, only the outline of this collection box 74 is shown by a dashed line in FIG. 1. Specifically, the collection box 74 includes a bottom wall and a side wall erected from the outer periphery of the bottom wall, and its upper surface is open.

The peeling device 2 is further provided with a cover (not shown) that covers the above-mentioned components. A touch panel 76 is disposed on the front surface of the cover. The touch panel 76 is configured with an input device, such as a capacitive or resistive touch sensor, and a display device, such as a liquid crystal display or an organic EL (Electro Luminescence) display, and functions as a user interface.

The components of the peeling device 2 are connected to a control unit 78. For convenience, the control unit 78 is shown as a functional block in FIG. 1. Specifically, the control unit 78 has a central processing unit (CPU) and a storage device including a main storage device and an auxiliary storage device, and controls the operation of the above-mentioned components.

The main storage device is composed of volatile memory such as DRAM (Dynamic Random Access Memory) or SRAM (Static Random Access Memory). The auxiliary storage device is composed of non-volatile memory such as SSD (Solid State Drive) (NAND type flash memory) or HDD (Hard Disk Drive) (magnetic storage device). The CPU reads out various programs and/or data stored in the main storage device and/or auxiliary storage device to control the operation of the above-mentioned components.

For example, the CPU reads data from the auxiliary storage device on the time (standby time) for which the gripping unit 42, which grips the tip of the peeling tape 21 attached to the protective member 15 peeled off from the surface of the workpiece 13, is to wait above the collection box 74. The CPU then controls the gripping unit 42 to wait for this standby time and then drop the protective member 15 together with the peeling tape 21 from the gripping unit 42.

Figures 4 (A) and 4 (B), 5 (A) and 5 (B), and 6 (A) and 6 (B) are partial cross-sectional side views that show the state of the vicinity of the holding table 16 when the protective member 15 is peeled off from the surface of the workpiece 13. Also, Figures 7 (A) and 7 (B), and 8 (A) and 8 (B) are side views that show the state of the vicinity of the recovery box 74 when the protective member 15 peeled off from the surface of the workpiece 13 is dropped into the recovery box 74 together with the peeling tape 21.

In the peeling device 2, for example, the protective material 15 is peeled off from the surface of the workpiece 13 in the following order, and the peeled protective material 15 is dropped into the collection box 74. Specifically, first, the control unit 78 operates the first moving mechanism 6 to move the holding table 16 forward so that the frame unit 11 is not hindered from being carried onto the holding table 16 by the gripping unit 42 and the workbench 64, etc.

Next, the frame unit 11 is loaded onto the holding table 16 so that the protective member 15 faces upward. Next, the control unit 78 operates the suction source communicating with the porous plate 20 and the suction source communicating with the groove 22a and suction path 22b of the frame holding part 22. Next, the control unit 78 opens the electric valves provided between these suction sources and the porous plate 20 or the frame holding part 22.

As a result, the workpiece 13 is sucked from the porous plate 20 side through the central region of the dicing tape 17, and the annular frame 19 is sucked from the frame holding part 22 side through the peripheral region of the dicing tape 17 (see FIG. 4(A)). As a result, the frame unit 11 is held on the holding table 16.

Next, the control unit 78 controls the multiple air cylinders 24 to lower the piston rod 24a so as to lower the frame holding portion 22. At this time, the annular frame 19, which is attracted to the frame holding portion 22, also lowers (see FIG. 4(B)). This makes it possible to prevent the protective member 15 peeled off from the surface of the workpiece 13 from adhering to the annular frame 19, etc.

Next, the control unit 78 operates the first moving mechanism 6 to move the holding table 16 backward so that the work table 64 etc. is positioned above the frame unit 11 held by the holding table 16. Next, the control unit 78 operates the second moving mechanism 28 to move the gripping unit 42 closer to the peeling tape supply unit 66.

Next, the control unit 78 operates the pair of guide rollers 70 and the pair of feed rollers 72 so that the peeling tape 21 is sent out toward the gripping unit 42. This positions the tip (one end) of the peeling tape 21 between the bottom 44b of the fixed claw 44 and the movable claw 46.

Next, the movable claw 46 is brought close to the bottom 44b of the fixed claw 44 so that the tip of the peeling tape 21 is pinched between the bottom 44b of the fixed claw 44 and the movable claw 46, i.e., gripped by the gripping unit 42. Next, the control unit 78 operates the second moving mechanism 28 so that the gripping unit 42 moves away from the peeling tape supply unit 66 and the front end of the protective member 15 is positioned directly below the heating plate 48.

As a result, the peeling tape 21 is pulled out by the gripping unit 42 until its tip is positioned in front of the work table 64. Next, the control unit 78 operates the air cylinder 40 to lower the piston rod 40a connected to the heating plate 48 so that a portion of the peeling tape 21 located directly below the heating plate 48 is pressed against the protective member 15 (see FIG. 5(A)).

Next, the control unit 78 generates an electric current in the heating wire built into the heating plate 48, heating the vicinity of the lower end of the heating plate 48. This causes a part of the peeling tape 21 to be attached to the protective member 15. Next, the control unit 78 operates the air cylinder 56 to lower the piston rod 56a connected to the cutter 62 so that the lower end of the cutter 62 is positioned inside the groove 64a.

Next, the control unit 78 operates the third moving mechanism 52 so that the portion of the peeling tape 21 located above the groove 64a of the work table 64 is cut by the cutter 62. Next, the control unit 78 operates the air cylinder 40 to raise the piston rod 40a connected to the heating plate 48 so as to separate the heating plate 48 from the peeling tape 21 (see FIG. 5(B)).

Next, the control unit 78 operates the air cylinder 38 to raise the piston rod 38a connected to the gripping unit 42 so as to raise the gripping unit 42 (see FIG. 6A). This causes the front end of the protective member 15 to be peeled off from the surface of the workpiece 13 together with the peeling tape 21.

Next, the control unit 78 operates the first moving mechanism 6 and the second moving mechanism 28 so that the entire protective member 15 is peeled off from the surface of the workpiece 13 (see FIG. 6B). That is, the gripping unit 42 that grips the tip of the peeling tape 21 and the holding table 16 that holds the frame unit 11 are moved relatively along the X-axis direction.

Next, the control unit 78 operates the second moving mechanism 28 so that the gripping unit 42, which grips the tip of the peeling tape 21 integrated with the protective member 15 peeled off from the surface of the workpiece 13, is positioned above the collection box 74 (see FIG. 7(A)). Then, when the gripping unit 42 reaches above the collection box 74, the control unit 78 stops the operation of the second moving mechanism 28 (see FIG. 7(B)).

When the gripping unit 42 is moved and then stopped in this manner, an inertial force acts on the peeling tape 21 and the protective member 15, causing the protective member 15 to vibrate together with the peeling tape 21, the tip of which is gripped by the gripping unit 42. Then, in order to drop the protective member 15 into the collection box 74 after this vibration has subsided, the control unit 78 keeps the gripping unit 42 waiting for a preset time (e.g., 10 seconds or more and 20 seconds or less) (see FIG. 8 (A)).

This time is set by the operator via the touch panel 76, for example, and can be changed. After this time has elapsed, the control unit 78 operates the gripping unit 42, i.e., moves the movable claw 46 away from the bottom 44b of the fixed claw 44, so that the protective member 15 is dropped into the collection box 74 together with the peeling tape 21 (see FIG. 8(B)).

The above-mentioned peeling device 2 includes a control unit 78 that positions the gripping unit 42 above the collection box 74, waits the gripping unit 42 for a preset time, and then drops the protective member 15 together with the peeling tape 21 from the gripping unit 42. Therefore, in the peeling device 2, the peeling tape 21 and the protective member 15 can be dropped into the collection box 74 after the shaking of the peeling tape 21 and the protective member 15 caused by the movement of the gripping unit 42 has subsided.

In this case, the likelihood that the protective material 15 dropped from the gripping unit 42 will stick to the side wall of the collection box 74 can be reduced. As a result, the peeling device 2 can peel the protective material 15 from the workpiece 13 without increasing the frequency of the work of removing the collected protective material 15 from the collection box 74 and without complicating this work.

The structures and methods of the above-described embodiments can be modified as appropriate without departing from the scope of the present invention.

2: Peeling device 4: Support table (4a: supporting surface)
6: First moving mechanism (holding table moving mechanism)
8: Guide rail 10: Moving plate 11: Frame unit 12: Screw shaft 13: Workpiece (13a: notch)
14: Motor 15: Protective member 16: Holding table 17: Dicing tape 18: Housing 19: Annular frame 20: Porous plate 21: Peeling tape 22: Frame holding portion (22a: groove, 22b: suction path)
24: Air cylinder (24a: piston rod)
26: Support stand (26a: Support surface)
28: Second moving mechanism (moving mechanism for gripping unit)
30: Guide rail 32: Moving plate 34: Screw shaft 36: Motor 38: Air cylinder (38a: piston rod)
40: Air cylinder (40a: piston rod)
42: gripping unit 44: fixed claw (44a: standing portion, 44b: bottom portion)
46: Movable claw 48: Heating plate 50: Support stand (50a: Support surface)
52: Third moving mechanism (cutter moving mechanism)
54: Guide rail 56: Air cylinder (56a: piston rod)
58: Screw shaft 60: Motor 62: Cutter 64: Work table (64a: groove)
66: peeling tape supply unit 68: supply roller 70: guide roller 72: delivery roller 74: collection box 76: touch panel 78: control unit

Claims (1)

A peeling device for peeling a protective material from a workpiece having a protective material attached to one surface thereof, comprising:
a holding table that holds the workpiece from the other surface side;
a gripping unit that grips one end of a peeling tape that is to be attached to the protective member that is attached to the one surface of the workpiece held on the holding table;
a recovery box for recovering the protective member dropped together with the peeling tape from the gripping unit;
a moving mechanism that moves the gripping unit from above the holding table to above the collection box;
a control unit for controlling operations of the holding table, the gripping unit and the moving mechanism,
The control unit positions the gripping unit above the collection box, and then causes the gripping unit to wait for a predetermined time, and then drops the protective material together with the peeling tape from the gripping unit.

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