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JP7704710B2 - Composite Film - Google Patents
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JP7704710B2 - Composite Film - Google Patents

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JP7704710B2
JP7704710B2 JP2022069502A JP2022069502A JP7704710B2 JP 7704710 B2 JP7704710 B2 JP 7704710B2 JP 2022069502 A JP2022069502 A JP 2022069502A JP 2022069502 A JP2022069502 A JP 2022069502A JP 7704710 B2 JP7704710 B2 JP 7704710B2
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copper foil
conductive layer
conductive
composite film
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JP2023159661A (en
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淳 篠崎
惇郎 佐野
達也 中津川
周介 片平
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Furukawa Electric Co Ltd
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Priority to JP2022069502A priority Critical patent/JP7704710B2/en
Priority to PCT/JP2023/015078 priority patent/WO2023204144A1/en
Priority to CN202380032573.XA priority patent/CN118923221A/en
Priority to KR1020247033567A priority patent/KR20250002211A/en
Priority to TW112114297A priority patent/TW202406736A/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0083Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising electro-conductive non-fibrous particles embedded in an electrically insulating supporting structure, e.g. powder, flakes, whiskers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0084Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising a single continuous metallic layer on an electrically insulating supporting structure, e.g. metal foil, film, plating coating, electro-deposition, vapour-deposition
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0088Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising a plurality of shielding layers; combining different shielding material structure

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

本発明は複合フィルムに関する。 The present invention relates to a composite film.

近年、スマートフォン、医療機器、自動車等の電子機器については、高集積化、高性能化が進んでおり、それとともに電子機器の電磁干渉(EMI:Electromagnetic Interference)を抑制するEMI対策の重要性が増している。そのため、電子機器の筐体内外からの電磁波による該電子機器の誤作動、通信データ品質の劣化などの不具合を防ぐために、ノイズフィルタ、電磁波吸収シート等の部材が電子機器に用いられている。
このような部材の中でも、EMI対策フィルムと呼ばれる複合フィルムが、多くの電子機器に用いられている。EMI対策フィルムは、金属等からなる電磁波遮蔽層と、導電性粘着剤又は導電性接着剤からなる導電層とが積層された構造を有する複合フィルムである。電磁波遮蔽層としては、高い導電率、シールド性、工業生産性の観点から、銅箔が用いられることがある。
In recent years, electronic devices such as smartphones, medical devices, and automobiles have become highly integrated and perform better, and at the same time, the importance of EMI (Electromagnetic Interference) countermeasures to suppress the electromagnetic interference of electronic devices has increased. Therefore, in order to prevent problems such as malfunction of the electronic devices and deterioration of communication data quality due to electromagnetic waves from inside and outside the housing of the electronic devices, components such as noise filters and electromagnetic wave absorbing sheets are used in the electronic devices.
Among such members, a composite film called an EMI countermeasure film is used in many electronic devices. The EMI countermeasure film is a composite film having a structure in which an electromagnetic wave shielding layer made of a metal or the like and a conductive layer made of a conductive adhesive or conductive adhesive are laminated. As the electromagnetic wave shielding layer, copper foil is sometimes used from the viewpoints of high conductivity, shielding properties, and industrial productivity.

そして、EMI対策フィルムは、フレキシブル基板(FPC:Flexible printed circuits)やチップ・オン・フィルム技術(COF:Chip on Film)におけるシールドフィルムとして、あるいは、電子機器の筐体内での接地強化用の導電テープとして、非常に多く用いられている。
電子機器にEMI対策フィルムを装着する際には、通常は、電磁波遮蔽層が導電層を介して電子機器内の金属部分に貼り付けられる。そして、EMI対策フィルムの電磁波遮蔽層が電子機器内の金属部分に貼り付けられた際に、電磁波遮蔽層から電子機器内の金属部分までの接続電気抵抗が低いほど、電磁干渉を抑制する性能が優れている(以下、EMI対策フィルムが有する、電磁干渉を抑制する性能を「EMI耐性」と記すこともある)。このEMI耐性は上記接続電気抵抗で評価することができるが、配線抵抗によって模擬的に評価されることもある。
EMI control films are widely used as shielding films in flexible printed circuits (FPCs) and chip-on-film (COF) technology, or as conductive tapes for strengthening grounding within the housings of electronic devices.
When an EMI countermeasure film is attached to an electronic device, the electromagnetic wave shielding layer is usually attached to a metal part in the electronic device via a conductive layer. When the electromagnetic wave shielding layer of the EMI countermeasure film is attached to the metal part in the electronic device, the lower the connection electric resistance from the electromagnetic wave shielding layer to the metal part in the electronic device, the better the performance of suppressing electromagnetic interference (hereinafter, the performance of the EMI countermeasure film to suppress electromagnetic interference may be referred to as "EMI resistance"). This EMI resistance can be evaluated by the connection electric resistance, but it may also be evaluated in a simulated manner by wiring resistance.

特許第6872449号公報Patent No. 6872449

前述したように、近年においてはEMI対策の重要性が増しているので、接続電気抵抗がより低い複合フィルムが求められている。
本発明は、接続電気抵抗が低い複合フィルムを提供することを課題とする。
As described above, since EMI countermeasures have become increasingly important in recent years, there is a demand for composite films with lower connection electrical resistance.
An object of the present invention is to provide a composite film having low connection electrical resistance.

上記課題を解決するため、本発明者らは、複合フィルムの接続電気抵抗(配線抵抗)を低減するためには、電磁波遮蔽層である銅箔として接触抵抗の低い銅箔を使用することが有効であると考え、銅箔の表面形状に注目した。しかしながら、原理上は最も接触抵抗が低くなる、表面が清浄且つ平滑な(表面粗度の小さい)銅箔を使用してEMI対策フィルムを作製しても、EMI対策フィルムの配線抵抗が予測していたほど低くならないことが分かった。一方で、平滑で表面粗度の小さい銅箔よりも、表面粗度が比較的大きい銅箔を使用した方が、EMI対策フィルムの配線抵抗が低い場合がある実験結果が得られ、本発明者らはここに注目した。 In order to solve the above problems, the inventors considered that using copper foil with low contact resistance as the copper foil that is the electromagnetic wave shielding layer would be effective in reducing the connection electrical resistance (wiring resistance) of the composite film, and focused on the surface shape of the copper foil. However, it was found that even if an EMI control film is produced using copper foil with a clean and smooth surface (low surface roughness), which in principle has the lowest contact resistance, the wiring resistance of the EMI control film is not as low as expected. On the other hand, experimental results were obtained showing that in some cases the wiring resistance of the EMI control film is lower when copper foil with a relatively large surface roughness is used rather than smooth copper foil with a small surface roughness, and the inventors focused on this point.

「日本伸銅協会技術標準JCBA T323:2011の表面接触電気抵抗の測定方法」では、被測定物と金(Au)プローブとの間の接触抵抗を測定すると定められている。銅箔の接触抵抗を測定する場合には、金属剛体同士の間の接触抵抗になるために、自ずと互いの表面形状に応じた空隙が接触界面に生じるので、その分、微視的な真実接触面積が小さくなる。したがって、銅箔の表面粗度が大きくAuプローブとの真実接触面積が小さいと、接触抵抗の測定値は大きくなり、銅箔の表面粗度が小さくAuプローブとの真実接触面積が大きいと、接触抵抗の測定値は低い傾向になると理解されている。 The "Japan Copper and Brass Association Technical Standard JCBA T323:2011: Method for Measuring Surface Contact Electrical Resistance" stipulates that the contact resistance between the object to be measured and a gold (Au) probe is to be measured. When measuring the contact resistance of copper foil, the contact resistance is between two rigid metal bodies, so naturally, gaps occur at the contact interface according to the surface shapes of the two bodies, and the microscopic real contact area is accordingly smaller. Therefore, it is understood that if the copper foil has a large surface roughness and a small real contact area with the Au probe, the measured contact resistance will tend to be large, and if the copper foil has a small surface roughness and a large real contact area with the Au probe, the measured contact resistance will tend to be low.

一方、EMI対策フィルムの用途に用いられる複合フィルムの場合においては、銅箔と接触するのは導電性粘着剤又は導電性接着剤であり、銅箔と貼り合わせた際には銅箔の表面形状に導電性粘着剤又は導電性接着剤が追従するため、銅箔と導電性粘着剤又は導電性接着剤との接触界面には基本的には空隙は生じにくい。 On the other hand, in the case of composite films used as EMI protection films, it is the conductive adhesive or conductive glue that comes into contact with the copper foil, and when the film is attached to the copper foil, the conductive adhesive or conductive glue conforms to the surface shape of the copper foil, so that gaps are generally unlikely to form at the contact interface between the copper foil and the conductive adhesive or conductive glue.

このことから、複合フィルムがEMI対策フィルムとして使用される場合には、表面粗度が最も小さい銅箔よりも、すなわち完全平滑な表面を有する銅箔よりも、表面粗度が比較的大きい銅箔を用いた方が、銅箔の接触抵抗は小さくなると考えられる。すなわち、銅箔の表面の表面粗度が大きくなっても、その形状に導電層が追従するため、銅箔と導電層の接触界面には空隙が生じにくく、銅箔の表面の表面粗度が大きい分、真実接触面積が大きくなるので、銅箔の接触抵抗は小さくなると考えられる。 For this reason, when a composite film is used as an EMI control film, it is believed that the contact resistance of the copper foil will be smaller if a copper foil with a relatively large surface roughness is used rather than a copper foil with the smallest surface roughness, i.e., a copper foil with a completely smooth surface. In other words, even if the surface roughness of the copper foil surface becomes large, the conductive layer follows the shape of the copper foil, so gaps are unlikely to occur at the contact interface between the copper foil and the conductive layer, and the true contact area becomes larger due to the larger surface roughness of the copper foil surface, so the contact resistance of the copper foil is believed to be smaller.

本発明者らが上記の考え方を検証したところ、表面粗度が比較的大きい銅箔を用いたEMI対策フィルムは、完全平滑な表面を有する銅箔を用いたEMI対策フィルムよりも、配線抵抗が低いことが明らかとなった。
また、これらの知見を基礎として本発明者らが鋭意研究を行った結果、配線抵抗がより低いEMI対策フィルムを得るためには、導電層に含有される導電性フィラーの数平均粒子径と銅箔の表面粗度との関係性が重要であることが明らかとなった。すなわち、本発明者らは、銅箔の表面形状に応じて導電層が追従するだけではなく、導電性フィラーの分布も銅箔の表面形状に追従することによって、導電性フィラーと銅箔の表面との接触点を増やすことが必要であること、そのためには導電性フィラーの数平均粒子径と銅箔の表面粗度との関係が重要であることを見出した。
When the inventors verified the above idea, it became clear that an EMI protection film using copper foil with a relatively large surface roughness has a lower wiring resistance than an EMI protection film using copper foil with a completely smooth surface.
Based on these findings, the present inventors have conducted intensive research and have found that in order to obtain an EMI countermeasure film with lower wiring resistance, the relationship between the number average particle size of the conductive filler contained in the conductive layer and the surface roughness of the copper foil is important. That is, the present inventors have found that it is necessary to increase the contact points between the conductive filler and the surface of the copper foil by not only making the conductive layer conform to the surface shape of the copper foil, but also making the distribution of the conductive filler conform to the surface shape of the copper foil, and that for this purpose, the relationship between the number average particle size of the conductive filler and the surface roughness of the copper foil is important.

具体的には、導電性フィラーの数平均粒子径、銅箔の表面の展開面積比Sdr、銅箔の表面のスキューネスSsk、及び銅箔の接触抵抗を所定の範囲内に制御すれば、単に平滑で接触抵抗の低い銅箔を使用するよりも、EMI対策フィルムの配線抵抗を大幅に低減できることを見出した。 Specifically, it was found that by controlling the number average particle size of the conductive filler, the developed area ratio Sdr of the copper foil surface, the skewness Ssk of the copper foil surface, and the contact resistance of the copper foil within a specified range, the wiring resistance of the EMI control film can be significantly reduced compared to simply using a copper foil that is smooth and has low contact resistance.

すなわち、本発明の一態様に係る複合フィルムは、銅箔と、導電性フィラーを含有する導電性粘着剤又は導電性フィラーを含有する導電性接着剤からなり且つ銅箔が有する2つの表面のうち少なくとも一方の表面に積層された導電層と、を有する複合フィルムである。そして、本発明の一態様に係る複合フィルムは、導電性フィラーの数平均粒子径が0.12μm以上7μm以下であり、銅箔が有する2つの表面のうち導電層が積層された表面の展開面積比Sdrが0.01%以上40%以下、スキューネスSskが-1.0以上1.0以下、接触抵抗が2mΩ以上30mΩ以下であることを要旨とする。 That is, the composite film according to one embodiment of the present invention is a composite film having a copper foil and a conductive layer made of a conductive pressure-sensitive adhesive containing a conductive filler or a conductive adhesive containing a conductive filler and laminated on at least one of the two surfaces of the copper foil. The composite film according to one embodiment of the present invention has a number average particle diameter of the conductive filler of 0.12 μm or more and 7 μm or less, a developed area ratio Sdr of the surface on which the conductive layer is laminated out of the two surfaces of the copper foil of 0.01% or more and 40% or less, a skewness Ssk of -1.0 or more and 1.0 or less, and a contact resistance of 2 mΩ or more and 30 mΩ or less.

本発明に係る複合フィルムは、接続電気抵抗が低い。 The composite film of the present invention has low connection electrical resistance.

本発明の一実施形態に係る複合フィルムを説明する断面図である。FIG. 1 is a cross-sectional view illustrating a composite film according to one embodiment of the present invention. 図1の複合フィルムの変形例を説明する断面図である。FIG. 2 is a cross-sectional view illustrating a modified example of the composite film of FIG. 1 .

本発明の一実施形態について説明する。なお、以下に説明する実施形態は、本発明の一例を示したものである。また、本実施形態には種々の変更又は改良を加えることが可能であり、その様な変更又は改良を加えた形態も本発明に含まれ得る。 One embodiment of the present invention will be described. Note that the embodiment described below is merely one example of the present invention. In addition, various modifications and improvements can be made to this embodiment, and such modifications and improvements can also be included in the present invention.

本実施形態に係る複合フィルム1は、図1に示すように、電磁波遮蔽層をなす銅箔10と、導電性フィラーを含有する導電性粘着剤又は導電性フィラーを含有する導電性接着剤からなり且つ銅箔10が有する2つの表面のうち少なくとも一方の表面10aに積層された導電層20と、を有する。図1の複合フィルム1は、銅箔10が有する2つの表面のうち一方の表面10aのみに導電層20が積層された例である。 As shown in FIG. 1, the composite film 1 according to this embodiment has a copper foil 10 forming an electromagnetic wave shielding layer, and a conductive layer 20 made of a conductive adhesive containing a conductive filler or a conductive adhesive containing a conductive filler and laminated on at least one surface 10a of the two surfaces of the copper foil 10. The composite film 1 in FIG. 1 is an example in which the conductive layer 20 is laminated only on one surface 10a of the two surfaces of the copper foil 10.

導電層20に含有される導電性フィラーの数平均粒子径は、0.12μm以上7μm以下である。また、銅箔10が有する2つの表面のうち導電層20が積層された表面10aの展開面積比Sdrは、0.01%以上40%以下であり、同じく表面10aのスキューネスSskは、-1.0以上1.0以下である。さらに、銅箔10が有する2つの表面のうち導電層20が積層された表面10aの接触抵抗は、2mΩ以上30mΩ以下である。 The number average particle diameter of the conductive filler contained in the conductive layer 20 is 0.12 μm or more and 7 μm or less. Furthermore, the developed area ratio Sdr of the surface 10a on which the conductive layer 20 is laminated, of the two surfaces of the copper foil 10, is 0.01% or more and 40% or less, and the skewness Ssk of the surface 10a is -1.0 or more and 1.0 or less. Furthermore, the contact resistance of the surface 10a on which the conductive layer 20 is laminated, of the two surfaces of the copper foil 10, is 2 mΩ or more and 30 mΩ or less.

このような構成から、本実施形態に係る複合フィルム1は、接続電気抵抗(配線抵抗)が低い。よって、本実施形態に係る複合フィルム1は、シールド性が高く電磁干渉を抑制する性能(EMI耐性)が優れているので、EMI対策フィルムとして好適に用いることができる。 Due to this configuration, the composite film 1 according to this embodiment has low connection electrical resistance (wiring resistance). Therefore, the composite film 1 according to this embodiment has high shielding properties and excellent performance in suppressing electromagnetic interference (EMI resistance), and can be suitably used as an EMI countermeasure film.

したがって、本実施形態に係る複合フィルム1は、各種電子機器に対してEMI対策フィルムとして用いることができ、優れたEMI耐性を示す。本実施形態に係る複合フィルム1は、スマートフォン、医療機器、自動車等の電子機器に対して好適に使用することができ、特にスマートフォン等のモバイル型の電子機器に対して好適に使用可能である。 Therefore, the composite film 1 according to this embodiment can be used as an EMI protection film for various electronic devices and exhibits excellent EMI resistance. The composite film 1 according to this embodiment can be suitably used for electronic devices such as smartphones, medical devices, and automobiles, and is particularly suitable for use in mobile electronic devices such as smartphones.

なお、本実施形態に係る複合フィルム1は、離型フィルム30、絶縁層40、及びキャリアフィルム50のうち少なくとも1つをさらに備えていてもよい。すなわち、本実施形態に係る複合フィルム1の変形例は、図2に示すように、導電層20の上に離型フィルム30がさらに積層された構造を有していてもよい。また、本実施形態に係る複合フィルム1の変形例は、図2に示すように、銅箔10が有する2つの表面のうち導電層20が積層された表面10aとは反対側の表面10bに、銅箔10を電気的に保護する絶縁層40がさらに積層された構造を有していてもよい。さらに、本実施形態に係る複合フィルム1の変形例は、図2に示すように、支持体であるキャリアフィルム50が絶縁層40の上にさらに積層された構造を有していてもよい。 The composite film 1 according to the present embodiment may further include at least one of the release film 30, the insulating layer 40, and the carrier film 50. That is, a modified example of the composite film 1 according to the present embodiment may have a structure in which the release film 30 is further laminated on the conductive layer 20, as shown in FIG. 2. In addition, a modified example of the composite film 1 according to the present embodiment may have a structure in which an insulating layer 40 that electrically protects the copper foil 10 is further laminated on the surface 10b opposite to the surface 10a on which the conductive layer 20 is laminated, as shown in FIG. 2. Furthermore, a modified example of the composite film 1 according to the present embodiment may have a structure in which the carrier film 50, which is a support, is further laminated on the insulating layer 40, as shown in FIG. 2.

図2には、離型フィルム30、絶縁層40、キャリアフィルム50を全て備える複合フィルム1の例を示したが、本実施形態に係る複合フィルム1の変形例は、これに限定されるものではない。ただし、銅箔10が有する2つの表面10a、10bの両方に導電層20が積層されている場合には、複合フィルム1は絶縁層40とキャリアフィルム50を備えることはない。 Figure 2 shows an example of a composite film 1 that includes a release film 30, an insulating layer 40, and a carrier film 50, but the modified example of the composite film 1 according to this embodiment is not limited to this. However, if a conductive layer 20 is laminated on both of the two surfaces 10a, 10b of the copper foil 10, the composite film 1 does not include an insulating layer 40 and a carrier film 50.

以下に、本実施形態に係る複合フィルム1について、さらに詳細に説明する。
(1)銅箔について
本実施形態に係る複合フィルム1の銅箔10として、電解銅箔、圧延銅箔のいずれも用いることができるし、蒸着、スパッタリング等の既知の方法にて形成された銅箔も用いることができる。また、エッチング、電解研磨等の既知の方法にて表面形状及び厚さを調整した銅箔を、本実施形態に係る複合フィルム1の銅箔10として用いてもよい。
The composite film 1 according to this embodiment will be described in further detail below.
(1) Copper Foil As the copper foil 10 of the composite film 1 according to this embodiment, either an electrolytic copper foil or a rolled copper foil can be used, and a copper foil formed by a known method such as vapor deposition or sputtering can also be used. Furthermore, a copper foil whose surface shape and thickness have been adjusted by a known method such as etching or electrolytic polishing may be used as the copper foil 10 of the composite film 1 according to this embodiment.

エッチングに使用するエッチング液の一例としては、メック株式会社製のCZ-8100、CB-5602AYが挙げられる。エッチング液の温度、エッチング時間、エッチング液の撹拌条件等のエッチングの条件は、適宜調整することができる。
粗化めっきを施した銅箔も使用できるが、表面の展開面積比Sdrが過剰に大きくなりやすいので、粗化めっき時の電流密度や電解時間を小さくするなどの対処がなされることが好ましい。めっき法を用いる場合は、導電率や接触抵抗の観点から、銅(Cu)によるめっきが好ましい。
Examples of the etching solution used for etching include CZ-8100 and CB-5602AY manufactured by MEC Co., Ltd. Etching conditions such as the temperature of the etching solution, etching time, and stirring conditions of the etching solution can be appropriately adjusted.
Copper foil subjected to roughening plating can also be used, but since the surface development area ratio Sdr tends to become excessively large, it is preferable to take measures such as reducing the current density and electrolysis time during roughening plating. When a plating method is used, plating with copper (Cu) is preferable from the viewpoint of electrical conductivity and contact resistance.

本実施形態に係る複合フィルム1の銅箔10の厚さは、2μm以上40μm以下であることが好ましい。
また、保管時の変色を防ぐ目的や、複合フィルムの製造時及び使用時の熱履歴での変色を防ぐ目的で、表面形状及び厚さを調整した後に防錆処理を施した銅箔を、本実施形態に係る複合フィルム1の銅箔10として用いてもよい。防錆処理の例としては、ニッケル(Ni)、亜鉛(Zn)、クロム(Cr)、モリブデン(Mo)、コバルト(Co)、ケイ素(Si)、及びタングステン(W)のうちの少なくとも1種の金属を含有するめっき処理や、ベンゾトリアゾール等の有機化合物を用いた有機処理が挙げられる。
The thickness of the copper foil 10 of the composite film 1 according to this embodiment is preferably 2 μm or more and 40 μm or less.
Furthermore, for the purpose of preventing discoloration during storage or discoloration due to thermal history during the manufacture and use of the composite film, a copper foil that has been subjected to rust prevention treatment after adjusting the surface shape and thickness may be used as the copper foil 10 of the composite film 1 according to this embodiment. Examples of rust prevention treatments include plating treatments containing at least one metal selected from nickel (Ni), zinc (Zn), chromium (Cr), molybdenum (Mo), cobalt (Co), silicon (Si), and tungsten (W), and organic treatments using an organic compound such as benzotriazole.

本実施形態に係る複合フィルム1の銅箔10が有する2つの表面10a、10bのうち導電層20が積層された表面10aの展開面積比Sdrは、0.01%以上40%以下である必要があるが、複合フィルム1の接続電気抵抗をより低くするためには、0.01%以上10%以下であることが好ましく、0.05%以上10%以下であることがより好ましい。 Of the two surfaces 10a, 10b of the copper foil 10 of the composite film 1 in this embodiment, the developed area ratio Sdr of the surface 10a on which the conductive layer 20 is laminated must be 0.01% or more and 40% or less. In order to further reduce the connection electrical resistance of the composite film 1, however, it is preferably 0.01% or more and 10% or less, and more preferably 0.05% or more and 10% or less.

また、銅箔10が有する2つの表面10a、10bのうち導電層20が積層された表面10aのスキューネスSskは、-1.0以上1.0以下である必要があるが、複合フィルム1の接続電気抵抗をより低くするためには、-0.7以上1.0以下であることが好ましく、-0.5以上0.8以下であることがより好ましい。 In addition, the skewness Ssk of the surface 10a, on which the conductive layer 20 is laminated, of the two surfaces 10a, 10b of the copper foil 10, must be -1.0 or more and 1.0 or less. In order to further reduce the connection electrical resistance of the composite film 1, it is preferably -0.7 or more and 1.0 or less, and more preferably -0.5 or more and 0.8 or less.

さらに、銅箔10が有する2つの表面10a、10bのうち導電層20が積層された表面10aの接触抵抗は、2mΩ以上30mΩ以下である必要があるが、複合フィルム1の接続電気抵抗をより低くするためには、2mΩ以上25mΩ以下であることが好ましく、2mΩ以上20mΩ以下であることがより好ましい。
さらに、銅箔10が有する2つの表面10a、10bのうち導電層20が積層された表面10aのクルトシスSkuは、複合フィルム1の接続電気抵抗をより低くするためには、3.0以上3.6以下であることが好ましい。
Furthermore, the contact resistance of the surface 10a, on which the conductive layer 20 is laminated, of the two surfaces 10a, 10b of the copper foil 10 must be 2 mΩ or more and 30 mΩ or less. In order to further reduce the connection electrical resistance of the composite film 1, however, it is preferably 2 mΩ or more and 25 mΩ or less, and more preferably 2 mΩ or more and 20 mΩ or less.
Furthermore, in order to lower the connection electrical resistance of the composite film 1, it is preferable that the kurtosis Sku of the surface 10a, on which the conductive layer 20 is laminated, of the two surfaces 10a, 10b of the copper foil 10 is 3.0 or more and 3.6 or less.

(2)導電層について
本実施形態に係る複合フィルム1の導電層20は、導電性フィラーを含有する導電性粘着剤又は導電性フィラーを含有する導電性接着剤からなる。導電性粘着剤及び導電性接着剤は、導電層20に導電性を付与する導電性フィラーと樹脂を含有する。
(2) Conductive Layer The conductive layer 20 of the composite film 1 according to this embodiment is made of a conductive pressure-sensitive adhesive containing a conductive filler or a conductive adhesive containing a conductive filler. The conductive pressure-sensitive adhesive and the conductive adhesive contain a conductive filler and a resin that impart conductivity to the conductive layer 20.

導電性粘着剤は、常温での粘着性を有してもよい。導電性接着剤に含有される樹脂は、熱硬化性樹脂でもよいし、熱可塑性樹脂でもよい。熱硬化性樹脂を含有する導電性接着剤は、複合フィルム1において、未硬化、Bステージ、硬化済みのいずれの状態であってもよい。 The conductive adhesive may have adhesiveness at room temperature. The resin contained in the conductive adhesive may be a thermosetting resin or a thermoplastic resin. The conductive adhesive containing a thermosetting resin may be in any of the following states in the composite film 1: uncured, B-stage, or cured.

導電性粘着剤、導電性接着剤に含有される樹脂の例としては、エポキシ系、フェノール系、アミノ系、アルキッド系、ウレタン系、合成ゴム系、アクリレート系、アクリル系、シリコーン系、イミド系、イソシアネート系、塩化ビニル系、酢酸ビニル系、スチレン系、ハイドロカーボン系の樹脂及び粘着剤が挙げられる。これらの樹脂の中では、耐熱性に優れる点からエポキシ樹脂が好ましい。 Examples of resins contained in conductive adhesives and conductive adhesives include epoxy-based, phenol-based, amino-based, alkyd-based, urethane-based, synthetic rubber-based, acrylate-based, acrylic-based, silicone-based, imide-based, isocyanate-based, vinyl chloride-based, vinyl acetate-based, styrene-based, and hydrocarbon-based resins and adhesives. Among these resins, epoxy resins are preferred because of their excellent heat resistance.

導電性フィラーの例としては、金属の粒子や、炭素の粒子が挙げられる。金属の種類は、例えば、銀(Ag)、白金(Pt)、金、銅、ニッケル、パラジウム(Pd)、アルミニウム(Al)、ハンダ、又はこれらの合金が挙げられる。炭素の粒子の例としては、黒鉛粒子、焼成カーボン粒子、めっきされた焼成カーボン粒子が挙げられる。これらの粒子の中では、導電層20を作製する際の成形性、工業生産性の観点から、銅粒子、黒鉛粒子が好ましい。 Examples of conductive fillers include metal particles and carbon particles. Examples of metal types include silver (Ag), platinum (Pt), gold, copper, nickel, palladium (Pd), aluminum (Al), solder, and alloys thereof. Examples of carbon particles include graphite particles, baked carbon particles, and plated baked carbon particles. Among these particles, copper particles and graphite particles are preferred from the viewpoints of moldability and industrial productivity when producing the conductive layer 20.

導電性フィラーの数平均粒子径は0.12μm以上7μm以下である必要がある。導電性フィラーの数平均粒子径が0.12μm以上であれば、導電性フィラーと銅箔10との接触点数と導電性フィラーの表面積を増やすことができるので、導電層20の導電性が優れたものとなる。一方、導電性フィラーの数平均粒子径が7μm以下であれば、プリント配線板や金属筐体のグランド(GND)開口部の形状や段差に対して、導電性粘着剤、導電性接着剤が流動して導電層20が追従しやすくなるので、目的箇所を導電層20で十分に充填できる。 The number average particle diameter of the conductive filler must be 0.12 μm or more and 7 μm or less. If the number average particle diameter of the conductive filler is 0.12 μm or more, the number of contact points between the conductive filler and the copper foil 10 and the surface area of the conductive filler can be increased, resulting in excellent conductivity of the conductive layer 20. On the other hand, if the number average particle diameter of the conductive filler is 7 μm or less, the conductive adhesive or conductive adhesive flows and the conductive layer 20 easily follows the shape and steps of the ground (GND) opening of the printed wiring board or metal housing, so that the target area can be sufficiently filled with the conductive layer 20.

さらに、銅箔10の表面に直交する平面で導電層20を切断した場合に現れる導電層20の断面において、導電層20の断面の面積に対する導電性フィラーの断面の面積の割合(以下、「導電性フィラーの断面面積率」と記すこともある)は、30%以上85%以下であることが好ましく、45%以上80%以下であることがより好ましい。 Furthermore, in the cross section of the conductive layer 20 that appears when the conductive layer 20 is cut in a plane perpendicular to the surface of the copper foil 10, the ratio of the cross-sectional area of the conductive filler to the cross-sectional area of the conductive layer 20 (hereinafter sometimes referred to as the "cross-sectional area ratio of the conductive filler") is preferably 30% or more and 85% or less, and more preferably 45% or more and 80% or less.

導電性フィラーの断面面積率が30%以上であれば、導電性フィラーと銅箔10との接触点数と導電性フィラーの表面積を増やすことができるので、導電層20の導電性が優れたものとなる。一方、導電性フィラーの断面面積率が85%以下であれば、複合フィルム1の可撓性が優れたものとなる。 If the cross-sectional area ratio of the conductive filler is 30% or more, the number of contact points between the conductive filler and the copper foil 10 and the surface area of the conductive filler can be increased, resulting in excellent conductivity of the conductive layer 20. On the other hand, if the cross-sectional area ratio of the conductive filler is 85% or less, the flexibility of the composite film 1 will be excellent.

導電層20の厚さは、5μm以上50μm以下であることが好ましい。導電層20の厚さが5μm以上であれば、プリント配線板や電子機器の金属筐体のグランド(GND)開口部の形状や段差に対して、導電層20が追従しやすくなるので、目的箇所を導電層20で十分に充填できる。一方、導電層20の厚さが50μm以下であれば、複合フィルム1の可撓性が優れたものとなるので、より薄いスペースへの複合フィルム1の実装が可能になる。 The thickness of the conductive layer 20 is preferably 5 μm or more and 50 μm or less. If the thickness of the conductive layer 20 is 5 μm or more, the conductive layer 20 can easily conform to the shape and steps of the ground (GND) opening of the printed wiring board or the metal housing of an electronic device, so that the target area can be sufficiently filled with the conductive layer 20. On the other hand, if the thickness of the conductive layer 20 is 50 μm or less, the flexibility of the composite film 1 is excellent, so that the composite film 1 can be mounted in a thinner space.

なお、導電層20は、等方導電性を有していてもよいし、異方導電性を有していてもよい。
また、導電性フィラーは粒子状であってもよいが、針状、繊維状であってもよい。導電性フィラーが針状又は繊維状である場合は、導電性フィラーの数平均粒子径は、針状又は繊維状の導電性フィラーの直径に基づいて算出される数平均直径である。
The conductive layer 20 may have isotropic conductivity or anisotropic conductivity.
The conductive filler may be particulate, needle-like, or fibrous. When the conductive filler is needle-like or fibrous, the number average particle size of the conductive filler is the number average diameter calculated based on the diameter of the needle-like or fibrous conductive filler.

さらに、導電層20に可撓性を付与するために、ゴム成分(カルボキシ変性ニトリルゴム、アクリルゴム等)、粘着付与剤、硬化剤(イソシアネート化合物等)等の添加剤を導電性粘着剤、導電性接着剤に添加してもよい。また、導電層20の難燃性、成形性、機械的特性を高めるために、それらの性能を高める添加剤を導電性粘着剤、導電性接着剤に添加してもよい。 Furthermore, in order to impart flexibility to the conductive layer 20, additives such as rubber components (carboxy-modified nitrile rubber, acrylic rubber, etc.), tackifiers, and curing agents (isocyanate compounds, etc.) may be added to the conductive adhesive or conductive pressure-sensitive adhesive. Also, in order to improve the flame retardancy, moldability, and mechanical properties of the conductive layer 20, additives that enhance these properties may be added to the conductive adhesive or conductive pressure-sensitive adhesive.

(3)離型フィルムについて
離型フィルム30は、基材の表面を離型剤で処理したものであり、導電層20を保護するためのものである。すなわち、導電層20が有する2つの表面のうち銅箔10に対向する表面とは反対側の表面を離型フィルム30で覆うことにより、導電層20が有する粘着性、接着性の低下を防いでいる。なお、離型フィルム30の離型剤で処理された表面が導電層20に対向するように、導電層20上に離型フィルム30が積層される。
(3) Regarding the release film The release film 30 is a substrate surface treated with a release agent, and serves to protect the conductive layer 20. That is, by covering the surface opposite to the surface facing the copper foil 10, of the two surfaces of the conductive layer 20, with the release film 30, a decrease in the tackiness and adhesiveness of the conductive layer 20 is prevented. The release film 30 is laminated on the conductive layer 20 so that the surface of the release film 30 treated with the release agent faces the conductive layer 20.

離型フィルム30の基材の材質としては、例えば樹脂、紙が挙げられる。樹脂の種類としては、例えば、ポリエチレンイソフタレート、ポリブチレンテレフタレート、ポリエチレンナフタレート、ポリオレフィン、ポリアセテート、ポリカーボネート、ポリフェニレンサルファイド、ポリアミド、エチレン-酢酸ビニル共重合体、ポリ塩化ビニル、ポリスチレン、ポリ塩化ビニリデン、合成ゴム、液晶ポリマー等が挙げられる。また、基材として紙を用いた離型フィルム30の例としては、剥離紙が挙げられる。 Examples of the material of the base material of the release film 30 include resin and paper. Examples of types of resin include polyethylene isophthalate, polybutylene terephthalate, polyethylene naphthalate, polyolefin, polyacetate, polycarbonate, polyphenylene sulfide, polyamide, ethylene-vinyl acetate copolymer, polyvinyl chloride, polystyrene, polyvinylidene chloride, synthetic rubber, liquid crystal polymer, etc. An example of a release film 30 using paper as the base material is release paper.

(4)絶縁層について
絶縁層40は、電子機器等に複合フィルム1を実装した際に銅箔10を保護するためのものである。すなわち、銅箔10を絶縁層40で覆うことにより、銅箔10に対する電気的接触を防いでいる。
(4) Regarding the Insulating Layer The insulating layer 40 is intended to protect the copper foil 10 when the composite film 1 is mounted on an electronic device, etc. That is, by covering the copper foil 10 with the insulating layer 40, electrical contact with the copper foil 10 is prevented.

絶縁層40は、例えば、熱硬化性樹脂と硬化剤とを含有する塗料を、銅箔10が有する2つの表面のうち導電層20が積層された表面10aとは反対側の表面10bに塗布し、半硬化又は硬化させることによって形成することができる。また、絶縁層40は、例えば、熱可塑性樹脂を含有する塗料を、銅箔10が有する2つの表面のうち導電層20が積層された表面10aとは反対側の表面10bに塗布することによっても形成することができる。さらに、絶縁層40は、例えば、熱可塑性樹脂を含有する樹脂組成物を、銅箔10が有する2つの表面のうち導電層20が積層された表面10aとは反対側の表面10b上に、フィルム状に溶融成形することによっても形成することができる。
電子機器等に複合フィルム1をハンダ付け等によって実装する場合があるので、絶縁層40は耐熱性を有することが好ましいが、この点からは、絶縁層40は、熱硬化性樹脂と硬化剤とを含有する塗料を用いて形成することが好ましい。
The insulating layer 40 can be formed, for example, by applying a paint containing a thermosetting resin and a curing agent to the surface 10b opposite the surface 10a on which the conductive layer 20 is laminated, among the two surfaces of the copper foil 10, and semi-curing or curing the paint. The insulating layer 40 can also be formed, for example, by applying a paint containing a thermoplastic resin to the surface 10b opposite the surface 10a on which the conductive layer 20 is laminated, among the two surfaces of the copper foil 10. Furthermore, the insulating layer 40 can also be formed, for example, by melt-molding a resin composition containing a thermoplastic resin into a film on the surface 10b opposite the surface 10a on which the conductive layer 20 is laminated, among the two surfaces of the copper foil 10.
Since the composite film 1 may be mounted on electronic devices, etc., by soldering or the like, it is preferable that the insulating layer 40 has heat resistance. From this point of view, it is preferable that the insulating layer 40 is formed using a paint containing a thermosetting resin and a curing agent.

絶縁層40の形成に用いる熱硬化性樹脂の例としては、アミド樹脂、エポキシ樹脂、フェノール樹脂、アミノ樹脂、アルキッド樹脂、ウレタン樹脂、合成ゴム、紫外線硬化アクリレート樹脂等が挙げられる。これらの熱硬化性樹脂の中では、耐熱性に優れる点から、アミド樹脂、エポキシ樹脂が好ましい。 Examples of thermosetting resins used to form the insulating layer 40 include amide resins, epoxy resins, phenolic resins, amino resins, alkyd resins, urethane resins, synthetic rubbers, and ultraviolet-cured acrylate resins. Among these thermosetting resins, amide resins and epoxy resins are preferred because of their excellent heat resistance.

絶縁層40の形成に用いる熱可塑性樹脂の例としては、芳香族ポリエーテルケトン、ポリイミド、ポリアミドイミド、ポリアミド、ポリサルホン、ポリエーテルサルホン、ポリフェニレンサルホン、ポリフェニレンスルフィド、ポリフェニレンサルフィドサルホン、ポリフェニレンサルフィドケトン等が挙げられる。
絶縁層40には、耐候性、隠蔽性、難燃性、意匠性等の付与や着色を目的として、公知のフィラーを配合してもよい。
Examples of thermoplastic resins used to form the insulating layer 40 include aromatic polyether ketone, polyimide, polyamide imide, polyamide, polysulfone, polyether sulfone, polyphenylene sulfone, polyphenylene sulfide, polyphenylene sulfide sulfone, polyphenylene sulfide ketone, and the like.
The insulating layer 40 may contain a known filler for the purpose of imparting weather resistance, concealment properties, flame retardancy, design properties, and coloring.

(5)キャリアフィルムについて
キャリアフィルム50は、複合フィルム1を補強し保護する支持体である。また、キャリアフィルム50は、絶縁層40が有する2つの表面のうち銅箔10に対向する表面とは反対側の表面上に積層される。キャリアフィルム50の構造の例としては、基材と接着層の積層構造が挙げられる。キャリアフィルム50の基材としては、離型フィルム30の基材として例示したものと同様のものが使用できる。接着層を形成する材料としては、アクリル系粘着剤、ウレタン系粘着剤、ゴム系粘着剤等が挙げられる。
(5) Carrier Film The carrier film 50 is a support that reinforces and protects the composite film 1. The carrier film 50 is laminated on one of the two surfaces of the insulating layer 40 opposite to the surface facing the copper foil 10. An example of the structure of the carrier film 50 is a laminated structure of a substrate and an adhesive layer. The substrate of the carrier film 50 may be the same as the substrate of the release film 30. Examples of materials that form the adhesive layer include an acrylic adhesive, a urethane adhesive, and a rubber adhesive.

〔実施例〕
以下に実施例及び比較例を示して、本発明をさらに具体的に説明する。
(A)銅箔
実施例1~16及び比較例1~5の複合フィルムを製造するための原料である銅箔として、表1に示す表面粗度(表面の展開面積比Sdr、スキューネスSsk、クルトシスSku)を有する厚さ6μmの銅箔を用意した。これらの銅箔は、市販の電解銅箔、又は、該市販の電解銅箔をエッチング処理して表面粗度を調整した銅箔である。エッチング処理のエッチング液にはメック株式会社製のCB-5601AYを用い、エッチング液の温度、エッチング時間、エッチング液の撹拌条件等の調整によって表面粗度を調整した。
[Example]
The present invention will be described in more detail below with reference to examples and comparative examples.
(A) Copper foil As the raw material for producing the composite films of Examples 1 to 16 and Comparative Examples 1 to 5, copper foils having a thickness of 6 μm and having the surface roughness (surface developed area ratio Sdr, skewness Ssk, kurtosis Sku) shown in Table 1 were prepared. These copper foils were commercially available electrolytic copper foils, or copper foils in which the surface roughness of the commercially available electrolytic copper foils was adjusted by etching. CB-5601AY manufactured by MEC Co., Ltd. was used as the etching solution for the etching treatment, and the surface roughness was adjusted by adjusting the temperature of the etching solution, the etching time, the stirring conditions of the etching solution, etc.

銅箔の表面粗度は、株式会社キーエンス製の共焦点レーザー顕微鏡VK-X1050及びVK-X1000を用いて測定した。表1に示した数値は、表面の展開面積比Sdr、スキューネスSsk、クルトシスSkuいずれについても、任意の3点の測定値の平均値である。
なお、共焦点レーザー顕微鏡の対物レンズ倍率は100倍、スキャンモードはレーザーコンフォーカル、測定サイズは2048×1536、測定品質はHigh Precision、ピッチは0.08μmである。
The surface roughness of the copper foil was measured using confocal laser microscopes VK-X1050 and VK-X1000 manufactured by Keyence Corp. The values shown in Table 1 are the average values of the measurements taken at any three points for the surface developed area ratio Sdr, skewness Ssk, and kurtosis Sku.
The objective lens magnification of the confocal laser microscope was 100 times, the scan mode was laser confocal, the measurement size was 2048×1536, the measurement quality was high precision, and the pitch was 0.08 μm.

また、表面の展開面積比Sdr、スキューネスSsk、クルトシスSkuは、付属の解析ソフトウェアを用いて、測定データに対して下記に示す基準面補正、平滑化画像処理、及びフィルター処理を行った後に、100μm×100μmの任意の視野で演算を行うことによって算出した。
基準面補正:全面
平滑化:3×3、ガウシアン
フィルター処理:Lフィルター0.025mm
In addition, the surface developed area ratio Sdr, skewness Ssk, and kurtosis Sku were calculated by performing the reference plane correction, smoothing image processing, and filter processing described below on the measurement data using the attached analysis software, and then performing calculations in an arbitrary field of view of 100 μm x 100 μm.
Reference surface correction: Full surface Smoothing: 3x3, Gaussian Filter processing: L filter 0.025mm

さらに、これらの銅箔が有する2つの表面のうち導電層を積層する表面について、導電層を積層する前に、「日本伸銅協会技術標準JCBA T323:2011の表面接触電気抵抗の測定方法」で定められている方法によって、接触抵抗を測定した。接触抵抗の測定には、株式会社山崎精機研究所製の電気接点シミュレーターCRS-113-AUを用い、プローブとしては直径1mmのAuプローブを用いた。測定条件は、接触荷重0.1N、交流周波数287Hz、測定電流1mAである。結果を表1に示す。なお、表1に示した数値は、任意の10点の測定値の平均値である。 Furthermore, the contact resistance of the surface on which the conductive layer was to be laminated, out of the two surfaces of these copper foils, was measured before the conductive layer was laminated, using the method stipulated in the "Method for measuring surface contact electrical resistance, JCBA T323:2011, technical standard of the Japan Copper and Brass Association." The contact resistance was measured using an electric contact simulator CRS-113-AU manufactured by Yamazaki Seiki Kenkyusho Co., Ltd., and an Au probe with a diameter of 1 mm. The measurement conditions were a contact load of 0.1 N, an AC frequency of 287 Hz, and a measurement current of 1 mA. The results are shown in Table 1. The values shown in Table 1 are the average values of measurements taken at 10 random points.

Figure 0007704710000001
Figure 0007704710000001

(B)導電層
銅箔が有する2つの表面のうち一方の表面に導電層を積層して、実施例1~16及び比較例1~5の複合フィルムを作製した。この導電層は、アクリル系樹脂と導電性フィラーを含有する導電性粘着剤を銅箔上に膜状に塗工した後に、80℃で3分間加熱して溶剤を揮発させることによって形成した。
(B) Conductive Layer A conductive layer was laminated on one of the two surfaces of the copper foil to produce the composite films of Examples 1 to 16 and Comparative Examples 1 to 5. This conductive layer was formed by coating a conductive adhesive containing an acrylic resin and a conductive filler onto the copper foil in the form of a film, and then heating at 80° C. for 3 minutes to volatilize the solvent.

アクリル系樹脂は、DIC株式会社製のアクリル系粘着剤ファインタックCT-5030であり、導電性フィラーは銅粉である。銅粉の数平均粒子径は、表1に示すとおりである。
導電層における導電性フィラーの断面面積率が表1に記載の数値となるように、導電性粘着剤中の導電性フィラーの含有量を調整した。また、複合フィルムの導電層の厚さが30μmとなるように、銅箔上に塗工した膜状の導電性粘着剤の厚さを調整した。
The acrylic resin is an acrylic adhesive Finetac CT-5030 manufactured by DIC Corporation, and the conductive filler is copper powder. The number average particle diameter of the copper powder is as shown in Table 1.
The content of the conductive filler in the conductive adhesive was adjusted so that the cross-sectional area ratio of the conductive filler in the conductive layer was the value shown in Table 1. In addition, the thickness of the film-like conductive adhesive coated on the copper foil was adjusted so that the thickness of the conductive layer of the composite film was 30 μm.

(C)複合フィルム
作製した実施例1~16及び比較例1~5の複合フィルムについて、導電性フィラーの数平均粒子径と断面面積率を算出した。結果を表1に示す。
導電性フィラーの断面面積率の算出方法について、以下に説明する。まず、導電層の断面のうち任意の正方形状の領域を走査電子顕微鏡で観察し、上記の正方形状の領域の画像データを得た。導電層の断面は、銅箔の表面に直交する平面(すなわち、導電層の厚さ方向に対して平行な平面)で導電層を切断した場合に現れる導電層の断面である。また、観察する正方形状の領域の一辺は25μmとした。
(C) Composite Film The number average particle size and cross-sectional area ratio of the conductive filler were calculated for the composite films produced in Examples 1 to 16 and Comparative Examples 1 to 5. The results are shown in Table 1.
The method for calculating the cross-sectional area ratio of the conductive filler is described below. First, an arbitrary square-shaped region of the cross section of the conductive layer was observed with a scanning electron microscope to obtain image data of the square-shaped region. The cross section of the conductive layer is the cross section of the conductive layer that appears when the conductive layer is cut along a plane perpendicular to the surface of the copper foil (i.e., a plane parallel to the thickness direction of the conductive layer). In addition, one side of the square-shaped region to be observed was 25 μm.

次に、その画像データを画像編集ソフトによって処理して、導電性フィラーの粒子の部分とそれ以外の部分とに分けた2値化画像を作製した。そして、得られた2値化画像から、導電層の断面の面積(すなわち、上記の正方形状の領域の面積)と導電性フィラーの断面の面積とを求め、導電性フィラーの断面の面積を上記の正方形状の領域の面積で除することによって導電性フィラーの断面面積率を算出した。以上の手順を任意の3か所に対して行い、それら断面面積率の平均値を算出した。結果を表1に示す。 Next, the image data was processed using image editing software to create a binary image that was divided into the conductive filler particle portion and the other portion. From the resulting binary image, the cross-sectional area of the conductive layer (i.e., the area of the square region described above) and the cross-sectional area of the conductive filler were obtained, and the cross-sectional area ratio of the conductive filler was calculated by dividing the cross-sectional area of the conductive filler by the area of the square region described above. The above procedure was performed for three arbitrary locations, and the average cross-sectional area ratio was calculated. The results are shown in Table 1.

導電性フィラーの数平均粒子径の算出方法について、以下に説明する。上記の正方形状の領域内に存在する導電性フィラーの粒子について、その最小径及び最大径を測定し、最小径と最大径の平均値をその粒子の粒子径とした。そして、上記の正方形状の領域内に存在する全ての導電性フィラーの粒子について粒子径を測定し、その算術平均値を導電性フィラーの数平均粒子径とした。結果を表1に示す。 The method for calculating the number average particle diameter of the conductive filler is described below. The minimum and maximum diameters of the conductive filler particles present in the above square region were measured, and the average of the minimum and maximum diameters was taken as the particle diameter of the particle. The particle diameters of all the conductive filler particles present in the above square region were then measured, and the arithmetic average value was taken as the number average particle diameter of the conductive filler. The results are shown in Table 1.

実施例1~16及び比較例1~5の複合フィルムについて、配線抵抗の測定を行った。配線抵抗の測定方法について、以下に説明する。銅からなるサンプル貼付用電極が2個並んで露出しているプリント配線板を用意した。これらのサンプル貼付用電極は、一辺4mmの正方形状であり、2個のサンプル貼付用電極の中心間距離は12mmとした。 The wiring resistance was measured for the composite films of Examples 1 to 16 and Comparative Examples 1 to 5. The method for measuring the wiring resistance is described below. A printed wiring board was prepared on which two sample attachment electrodes made of copper were exposed side by side. These sample attachment electrodes were square with sides of 4 mm, and the center-to-center distance between the two sample attachment electrodes was 12 mm.

2個のサンプル貼付用電極のそれぞれの近傍に、抵抗測定用電極を露出させた。詳述すると、サンプル貼付用電極の近傍部分のうち、隣接するサンプル貼付用電極が有る側とは異なる側に、抵抗測定用電極を形成した。サンプル貼付用電極とその近傍に形成されている抵抗測定用電極とは、プリント配線板の内層回路を通して電気的に接続されていて一対をなしているが、2個のサンプル貼付用電極同士は電気的に接続されていない。なお、2個のサンプル貼付用電極と2個の抵抗測定用電極とには、いずれもプリント配線板用途で一般的な無電解ニッケルめっきと金めっきが施されており、電極表面の酸化等の影響を最小化してある。 A resistance measurement electrode was exposed near each of the two sample attachment electrodes. More specifically, a resistance measurement electrode was formed on a side of the sample attachment electrode that differs from the side where the adjacent sample attachment electrode is located. The sample attachment electrode and the resistance measurement electrode formed in its vicinity are electrically connected to each other through the inner layer circuit of the printed wiring board to form a pair, but the two sample attachment electrodes are not electrically connected to each other. The two sample attachment electrodes and the two resistance measurement electrodes are both electroless nickel plated and gold plated, which are common in printed wiring board applications, to minimize the effects of oxidation of the electrode surface.

まず、二対のサンプル貼付用電極と抵抗測定用電極について、サンプル貼付用電極に複合フィルムを貼り付けていない状態で、サンプル貼付用電極と抵抗測定用電極との間の電気抵抗をそれぞれ4端子法によって測定した。そして、得られた2つの電気抵抗の和を、測定基板抵抗として記録した。 First, for two pairs of electrodes for attaching samples and electrodes for measuring resistance, the electrical resistance between the electrodes for attaching samples and the electrodes for measuring resistance was measured using the four-terminal method without the composite film attached to the electrodes for attaching samples. The sum of the two electrical resistances obtained was then recorded as the measured substrate resistance.

次に、2個のサンプル貼付用電極間に跨がるように実施例又は比較例の複合フィルムを貼り付け、株式会社イマダ製の剥離試験用圧着ローラーAPR-97を用いて圧着させた後に、30分間静置した。そして、2個の抵抗測定用電極の間の電気抵抗を4端子法によって測定し、この測定値から測定基板抵抗を差し引いた値を、該複合フィルムの配線抵抗とした。配線抵抗の測定は5回行い、その平均値を、実施例1~16及び比較例1~5の複合フィルムのそれぞれの配線抵抗とした。上記の電気抵抗の測定は、いずれも温度25℃、湿度40~50%RHの環境下で行った。 Next, the composite film of the Example or Comparative Example was attached so as to straddle the two sample attachment electrodes, and was pressed using a peel test pressure roller APR-97 manufactured by Imada Co., Ltd., and then left to stand for 30 minutes. The electrical resistance between the two resistance measurement electrodes was measured using the four-terminal method, and the value obtained by subtracting the measured substrate resistance from this measurement was regarded as the wiring resistance of the composite film. The wiring resistance was measured five times, and the average value was regarded as the wiring resistance of each of the composite films of Examples 1 to 16 and Comparative Examples 1 to 5. All of the above electrical resistance measurements were performed in an environment with a temperature of 25°C and a humidity of 40 to 50% RH.

配線抵抗の測定結果を表1に示す。なお、表1に示した配線抵抗の測定結果は、下記の評価基準に基づいて評価した結果を示してある。
AA(合格):配線抵抗が10mΩ未満
A(合格):配線抵抗が10mΩ以上30mΩ未満
B(合格):配線抵抗が30mΩ以上100mΩ未満
C(不合格):配線抵抗が100mΩ以上500mΩ未満
D(不合格):配線抵抗が500mΩ以上
The measurement results of the wiring resistance are shown in Table 1. The measurement results of the wiring resistance shown in Table 1 are evaluated based on the following evaluation criteria.
AA (pass): Wiring resistance is less than 10 mΩ A (pass): Wiring resistance is 10 mΩ or more and less than 30 mΩ B (pass): Wiring resistance is 30 mΩ or more and less than 100 mΩ C (fail): Wiring resistance is 100 mΩ or more and less than 500 mΩ D (fail): Wiring resistance is 500 mΩ or more

表1から分かるように、実施例1~16の複合フィルムは、比較例1~5の複合フィルムに比べて、配線抵抗が低かった。よって、実施例1~16の複合フィルムは、比較例1~5の複合フィルムに比べて、電磁干渉を抑制する性能(EMI耐性)が優れていると言える。したがって、実施例1~16の複合フィルムは、EMI対策フィルムとして好適に用いることができる。 As can be seen from Table 1, the composite films of Examples 1 to 16 had lower wiring resistance than the composite films of Comparative Examples 1 to 5. Therefore, it can be said that the composite films of Examples 1 to 16 have superior electromagnetic interference suppression performance (EMI resistance) compared to the composite films of Comparative Examples 1 to 5. Therefore, the composite films of Examples 1 to 16 can be suitably used as EMI countermeasure films.

1・・・複合フィルム
10・・・銅箔
10a・・・導電層が積層された表面
10b・・・導電層が積層された表面とは反対側の表面
20・・・導電層
30・・・離型フィルム
40・・・絶縁層
50・・・キャリアフィルム
REFERENCE SIGNS LIST 1 Composite film 10 Copper foil 10a Surface on which conductive layer is laminated 10b Surface opposite to surface on which conductive layer is laminated 20 Conductive layer 30 Release film 40 Insulating layer 50 Carrier film

Claims (5)

銅箔と、導電性フィラーを含有する導電性粘着剤又は導電性フィラーを含有する導電性接着剤からなり且つ前記銅箔が有する2つの表面のうち少なくとも一方の表面に積層された導電層と、を有する複合フィルムであって、
前記銅箔の厚さが2μm以上40μm以下、
前記導電層の厚さが5μm以上50μm以下、
前記導電性フィラーの数平均粒子径が0.12μm以上7μm以下
前記銅箔の表面に直交する平面で前記導電層を切断した場合に現れる前記導電層の断面において、前記導電層の断面の面積に対する前記導電性フィラーの断面の面積の割合が30%以上85%以下であり、
前記銅箔が有する2つの表面のうち前記導電層が積層された表面の展開面積比Sdrが0.01%以上6.6%以下、スキューネスSskが-1.0以上1.0以下、クルトシスSkuが3.0以上3.6以下、接触抵抗が2mΩ以上30mΩ以下であり、
前記接触抵抗は、「日本伸銅協会技術標準JCBA T323:2011の表面接触電気抵抗の測定方法」で定められている方法によって、接触荷重0.1N、交流周波数287Hz、測定電流1mAという測定条件で測定したものである複合フィルム。
A composite film having a copper foil and a conductive layer made of a conductive pressure-sensitive adhesive containing a conductive filler or a conductive adhesive containing a conductive filler and laminated on at least one of two surfaces of the copper foil,
The thickness of the copper foil is 2 μm or more and 40 μm or less,
The thickness of the conductive layer is 5 μm or more and 50 μm or less,
The number average particle size of the conductive filler is 0.12 μm or more and 7 μm or less ,
In a cross section of the conductive layer that appears when the conductive layer is cut along a plane perpendicular to a surface of the copper foil, a ratio of a cross-sectional area of the conductive filler to a cross-sectional area of the conductive layer is 30% or more and 85% or less ;
the copper foil has two surfaces, the surface on which the conductive layer is laminated has a developed area ratio Sdr of 0.01% or more and 6.6 % or less, a skewness Ssk of -1.0 or more and 1.0 or less, a kurtosis Sku of 3.0 or more and 3.6 or less, and a contact resistance of 2 mΩ or more and 30 mΩ or less,
The contact resistance was measured under the measurement conditions of a contact load of 0.1 N, an AC frequency of 287 Hz, and a measurement current of 1 mA according to the method defined in the "Method for measuring surface contact electrical resistance of the Japan Copper and Brass Association Technical Standard JCBA T323:2011." Composite film.
前記導電層の上に離型フィルムがさらに積層された請求項に記載の複合フィルム。 The composite film according to claim 1 , further comprising a release film laminated on the conductive layer. 前記銅箔が有する2つの表面のうち前記導電層が積層された表面とは反対側の表面に、前記銅箔を電気的に保護する絶縁層がさらに積層された請求項に記載の複合フィルム。 2. The composite film according to claim 1 , further comprising an insulating layer for electrically protecting the copper foil, which is laminated on the surface opposite to the surface on which the conductive layer is laminated, of the two surfaces of the copper foil. 支持体であるキャリアフィルムが前記絶縁層の上にさらに積層された請求項に記載の複合フィルム。 4. The composite film according to claim 3 , further comprising a carrier film as a support laminated on the insulating layer. EMI対策フィルムとして使用される請求項に記載の複合フィルム。 The composite film according to claim 1 , which is used as an EMI countermeasure film.
JP2022069502A 2022-04-20 2022-04-20 Composite Film Active JP7704710B2 (en)

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WO2014132951A1 (en) 2013-02-26 2014-09-04 タツタ電線株式会社 Reinforcing member for flexible printed wiring substrate, flexible printed wiring substrate, and shield printed wiring substrate
WO2018110579A1 (en) 2016-12-14 2018-06-21 古河電気工業株式会社 Surface treated copper foil and copper-clad laminate
WO2018207786A1 (en) 2017-05-09 2018-11-15 Jx金属株式会社 Electrolytic copper foil, copper-clad laminate, printed wiring board, production method therefor, electronic device, and production method therefor

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KR102608700B1 (en) * 2015-12-25 2023-11-30 타츠타 전선 주식회사 Electromagnetic wave shielding film and its manufacturing method
JP2022021641A (en) * 2020-07-22 2022-02-03 信越ポリマー株式会社 Electromagnetic wave shield film and electromagnetic wave shield film-attached printed wiring board

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WO2013108599A1 (en) 2012-01-17 2013-07-25 パナソニック株式会社 Wiring substrate and production method therefor
WO2014132951A1 (en) 2013-02-26 2014-09-04 タツタ電線株式会社 Reinforcing member for flexible printed wiring substrate, flexible printed wiring substrate, and shield printed wiring substrate
WO2018110579A1 (en) 2016-12-14 2018-06-21 古河電気工業株式会社 Surface treated copper foil and copper-clad laminate
WO2018207786A1 (en) 2017-05-09 2018-11-15 Jx金属株式会社 Electrolytic copper foil, copper-clad laminate, printed wiring board, production method therefor, electronic device, and production method therefor

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