JP7710914B2 - Substrate rotation device for film forming equipment - Google Patents

Description

The present invention relates to a substrate rotation device for a film forming apparatus.

Film deposition devices for forming a coating on the surface of an object have been known for some time. For example, Patent Document 1 discloses a hot filament CVD device that deposits a diamond coating on the surface of a substrate by the hot filament CVD method. Also, for example, Patent Document 2 discloses a hot filament CVD device that deposits a silicon-based layer on a substrate by the hot filament CVD method (called the hot wire CVD method in Patent Document 1).

The hot filament CVD apparatus in Reference 1 has a mechanism that can hold multiple cutting tools in the chamber where the film is formed. As seen in the hot filament CVD apparatus in Reference 1, known film formation apparatuses form films on multiple substrates at once.

In addition, in order to deposit the film uniformly in the circumferential direction of the substrate, each substrate is rotated (in this specification, this refers to rotation around a rotation axis passing through the substrate). In the hot filament CVD device of Patent Document 2, each of the substrates is supported by a support, and each support is rotated by a rotary motor. This causes each substrate to rotate together with the support.

JP 2020-41181 A JP 2004-84012 A

In the hot filament CVD apparatus of Patent Document 2, the number of rotary motors is the same as the number of supports. If, as in this hot filament CVD apparatus, the same number of rotary actuators as the number of substrate holding members are provided in order to rotate multiple substrates, the substrate rotation device becomes large-scale.

The present invention has been made in consideration of these points, and its purpose is to provide a substrate rotation device for a film forming apparatus that is capable of rotating multiple substrates with a simple configuration.

The substrate rotation device for a film formation apparatus according to the present invention includes a plurality of holding members each holding a substrate as a film formation target, a plurality of bearings supporting the plurality of holding members so that the holding members can be rotated about a plurality of rotation axes parallel to each other, a rotating body having a plurality of connection parts respectively connected to the plurality of holding members, and a drive unit for rotating the rotating body about a rotation axis parallel to the plurality of rotation axes. The drive unit is configured to rotate the rotating body while maintaining the orientation of the rotating body when viewed in the axial direction of the rotation axis. Each of the connection parts is arranged to rotate around the rotation axis of the holding member corresponding to each of the connection parts when the rotating body is rotated by the drive unit.

According to the base rotation device, the rotating body rotates while maintaining the orientation of the rotating shaft when viewed in the axial direction, and each of the multiple connection parts provided on the rotating body rotates around the rotation axis of the corresponding holding member. This causes the holding members connected to each connection part and supported by the bearing part to rotate on their own axes. Therefore, according to the base rotation device, it is possible to rotate multiple bases on their own axes with a simple configuration of one rotating body and a drive part that rotates the rotating body.

According to a preferred embodiment of the present invention, the drive unit includes a first drive unit and a second drive unit. The first drive unit includes a first connecting member slidably connected to the rotating body and rotates the first connecting member around a first pivot axis parallel to the multiple rotation axes. The second drive unit includes a second connecting member slidably connected to the rotating body and rotates the second connecting member around a second pivot axis parallel to the multiple rotation axes in synchronization with the rotation of the first connecting member.

According to the base rotation device, the first connecting member and the second connecting member, both of which are slidably connected to the rotating body, rotate in synchronization around their respective rotation axes parallel to the rotation axis of the holding member. This allows the rotating body to rotate without changing the orientation of the rotating body when viewed in the axial direction of the rotation axis.

According to a preferred embodiment of the above aspects, the drive unit includes an actuator having a rotating main shaft, and a transmission mechanism that connects the main shaft of the actuator to the first drive unit and the second drive unit. The transmission mechanism transmits the rotation of the main shaft to the first drive unit and the second drive unit.

According to the base rotation device, the first drive unit and the second drive unit are driven by a single actuator via a transmission mechanism. Therefore, it is easy to rotate the first connecting member and the second connecting member in synchronization.

According to a preferred embodiment of the present invention, the rotating body is configured in a plate shape extending along a horizontal plane. The base body rotation device further includes a plurality of support parts that are provided below the rotating body and support the rotating body. Each of the plurality of support parts includes a rotatable ball that abuts against the underside of the rotating body and supports the rotating body.

With the base rotation device, each ball of the multiple support parts is rotatable, so the balls can support the rotating body so that it can rotate.

According to a preferred embodiment of the present invention, each of the connection parts includes a pin. Each of the holding members includes a force-receiving part against which the pin abuts when the pin rotates around the rotation axis.

The base rotation device described above rotates the holding member with a simple structure in which the pin abuts against the force receiving part and pushes against it. Therefore, compared to connections using gears, for example, the risk of the connection part and the holding member becoming galled can be reduced.

According to a preferred embodiment of the above aspects, the pin is configured to break or bend so as not to be able to contact the force receiving portion when the rotation of the holding member is stopped while the drive unit is rotating the rotating body.

According to the base rotation device described above, when the rotation of the holding member is stopped while the drive unit is rotating the rotating body, the pin no longer abuts against the force receiving part. In other words, the connection between the holding member, whose rotation is hindered, and the rotating body is severed. Therefore, even if the rotation of the holding member is hindered for some reason, the rotational resistance of the holding member is unlikely to affect the rotation of the rotating body and the rotation of other holding members.

According to another preferred embodiment, the force receiving portion is configured to break or bend so as not to be able to abut against the pin when the rotation of the holding member is stopped while the drive portion is rotating the rotating body. The base body rotation device described above can achieve the same effect as a configuration in which the pin breaks or bends.

According to a preferred embodiment of the present invention, the base rotating device further includes a plate on which the plurality of bearings are provided and which extends along a horizontal plane. The holding members are exposed on an upper surface of the plate. The rotating body and the driving unit are disposed below the plate.

According to the above-mentioned base rotation device, the rotating body and the drive unit are arranged on the lower side of the plate, not on the upper side of the plate where the multiple holding members are exposed and the base is held by the holding members. Therefore, multiple holding members can be provided on the plate.

The substrate rotation device for a film forming apparatus according to the present invention can rotate multiple substrates with a simple configuration.

FIG. 2 is a schematic perspective view of a film forming apparatus. FIG. 2 is a partially cutaway plan view of a substrate rotating device. FIG. 2 is a cross-sectional view of a substrate rotating device. FIG. 4 is a partially cutaway side view of the lower part of the holder and the bearing.

The following describes an embodiment of the present invention with reference to the drawings. FIG. 1 is a schematic perspective view of a film forming apparatus 100 according to one embodiment. In the following description, "front" means the direction in which an operator on the front side of the film forming apparatus 100 moves away from the film forming apparatus 100. "Rear" means the direction in which an operator on the front side of the film forming apparatus 100 approaches the film forming apparatus 100. "Left," "right," "upper," and "lower" mean the left, right, upper, and lower sides when the film forming apparatus 100 is viewed from the front side. The symbols F, Rr, L, R, U, and D in the drawings represent the front, rear, left, right, upper, and lower sides, respectively. However, the above directions are merely defined for the convenience of explanation, and do not limit the installation mode of the film forming apparatus 100, nor do they limit the present invention.

The film forming apparatus 100 according to this embodiment is a hot filament CVD apparatus. In a hot filament CVD apparatus, a raw material gas introduced into a chamber is heated by a hot filament, and a product generated from the raw material gas is deposited on a substrate. In this embodiment, the film forming apparatus 100 generates diamond by heating a hydrocarbon gas and a hydrogen gas to a high temperature by a hot filament 102. The generated diamond forms a diamond film on the surface of the substrate. The film forming apparatus 100 according to this embodiment is an apparatus that performs diamond coating on a cutting tool 5. The cutting tool 5 is, for example, a drill or an end mill. However, the substrate, which is the object of film formation, is not limited to the cutting tool 5. By performing diamond coating on the cutting tool 5, the durability of the cutting tool 5 can be improved.

As shown in FIG. 1, the film forming apparatus 100 includes a chamber 101 and a plurality of thermal filaments 102. The chamber 101 is a closed furnace body. However, FIG. 1 illustrates the chamber 101 with some of the walls removed. Diamond is produced in the chamber 101 and is coated on the cutting tool 5. A vacuum pump (not shown) is connected to the chamber 101. The chamber 101 is also provided with an inlet for a raw material gas (not shown). The chamber 101 is configured to be highly airtight so that the pressure inside can be reduced by the vacuum pump.

The thermal filament 102 is a wire that generates heat when electricity is passed through it. The thermal filament 102 is made of, for example, tungsten. The multiple thermal filaments 102 are each stretched approximately horizontally within the chamber 101. The multiple thermal filaments 102 are arranged side by side in the front-to-back and up-to-down directions, and each extends in the left-to-right direction.

A substrate rotation device 10 capable of holding and rotating a plurality of cutting tools 5 is provided within the chamber 101. As shown in FIG. 1, the substrate rotation device 10 is provided below the plurality of thermal filaments 102. FIG. 2 is a partially cutaway plan view of the substrate rotation device 10. FIG. 3 is a cross-sectional view of the substrate rotation device 10. As shown in FIGS. 2 and 3, the substrate rotation device 10 includes a base plate 20, a swing plate 30, a plurality of support parts 40 that support the swing plate 30, a drive part 50 that rotates the swing plate 30, an upper plate 60, a plurality of bearings 70 provided on the upper plate 60, and a plurality of holders 80 that are supported by the plurality of bearings 70, respectively. Each of the plurality of holders 80 is configured to be capable of holding one cutting tool 5.

The base plate 20 is configured in a rectangular flat plate shape in a plan view. The base plate 20 is placed on the bottom surface of the chamber 101. A part of the drive unit 50 and a plurality of support parts 40 are provided on the base plate 20. The plurality of support parts 40 are provided below the swing plate 30 and support the swing plate 30. As shown in FIG. 2, the number of support parts 40 is four here. The four support parts 40 are each provided near the corners of the base plate 20. However, the number and positions of the plurality of support parts 40 are not limited as long as they support the swing plate 30 so as to be rotatable along a horizontal plane. For example, the number of support parts 40 may be three. Each of the plurality of support parts 40 has a rotatable ball 41. Here, the ball 41 is a metal sphere. The ball 41 abuts against the lower surface of the swing plate 30 and supports the swing plate 30 so as to be rotatable. Each support portion 40 has a ball holder 42 that rotatably holds the ball 41.

The drive unit 50 rotates the swing plate 30 around a rotation axis Ax0 that extends in the vertical direction. The rotation axis Ax0 of the swing plate 30 will be described later. As shown in FIG. 3, the drive unit 50 includes a first drive unit 51, a second drive unit 52, a drive motor 53, and a transmission mechanism 54. Here, the transmission mechanism 54 includes a main drive gear 54a and a connecting gear 54b.

Here, the drive motor 53 is an electric motor. As shown in FIG. 3, the drive motor 53 has a main shaft 53a. Here, the main shaft 53a extends in the vertical direction and rotates around a vertical line. The drive motor 53 is provided outside the chamber 101. The main gear 54a is provided at the tip of the main shaft 53a. When the drive motor 53 rotates the main shaft 53a, the main gear 54a rotates along a horizontal plane.

As shown in FIG. 3, the first drive unit 51 includes a first driven gear 51a and a first connecting pin 51b. The first driven gear 51a is provided in front of the driving gear 54a and meshes with the driving gear 54a. When the driving motor 53 is driven and the driving gear 54a rotates, the first driven gear 51a also rotates along a horizontal plane. The first connecting pin 51b extends upward from the first driven gear 51a. The first connecting pin 51b is a cylindrical member. As shown in FIG. 3, the first connecting pin 51b is provided at a position radially shifted from the rotation center Ax1 of the first driven gear 51a. The distance (shift amount) between the rotation center Ax1 of the first driven gear 51a and the first connecting pin 51b is a distance R1. When the first driven gear 51a rotates around the rotation center Ax1, the first connecting pin 51b revolves around the rotation center Ax1 of the first driven gear 51a, tracing a circle with a rotation radius R1. Hereinafter, the rotation center Ax1 of the first driven gear 51a is also referred to as the first rotation axis Ax1. The first rotation axis Ax1 extends in the vertical direction. The first driving unit 51 revolves the first connecting pin 51b around the first rotation axis Ax1.

The connecting gear 54b is provided in front of the first driven gear 51a and meshes with the first driven gear 51a. When the first driven gear 51a rotates, the connecting gear 54b also rotates along a horizontal plane. The second driving unit 52 is provided further forward of the connecting gear 54b and has a configuration similar to that of the first driving unit 51. The second driving unit 52 includes a second driven gear 52a and a second connecting pin 52b. The second driven gear 52a is provided in front of the connecting gear 54b and meshes with the connecting gear 54b. When the connecting gear 54b rotates, the second driven gear 52a also rotates along a horizontal plane. The radius of the second driven gear 52a is set to be the same as the radius of the first driven gear 51a. Therefore, the second driven gear 52a rotates in synchronization with the first driven gear 51a.

The second connecting pin 52b extends upward from the second driven gear 52a. The second connecting pin 52b is a cylindrical member. As shown in FIG. 3, the second connecting pin 52b is provided at a position radially shifted by a distance R1 from the rotation center Ax2 of the second driven gear 52a. When the second driven gear 52a rotates around the rotation center Ax2, the second connecting pin 52b revolves around the rotation center Ax2 of the second driven gear 52a, drawing a circle with a turning radius R1. Hereinafter, the rotation center Ax2 of the second driven gear 52a is also referred to as the second turning axis Ax2. The second turning axis Ax2 is parallel to the first turning axis Ax1. Here, the second turning axis Ax2 extends in the vertical direction. With this configuration, the second drive unit 52 rotates the second connecting pin 52b around the second pivot axis Ax2, which is parallel to the first pivot axis Ax1, in synchronization with the rotation of the first connecting pin 51b.

The main gear 54a and the connecting gear 54b constitute a transmission mechanism 54 that connects the main shaft 53a of the drive motor 53 to the first drive unit 51 and the second drive unit 52. The transmission mechanism 54 transmits the rotation of the main shaft 53a of the drive motor 53 to the first drive unit 51 and the second drive unit 52. The first connecting pin 51b and the second connecting pin 52b are rotated by the drive motor 53 via the transmission mechanism 54, the first drive unit 51, and the second drive unit 52. The transmission mechanism 54 connecting the main shaft 53a of the drive motor 53 to the second drive unit 52 also includes the first drive unit 51 being interposed between the main shaft 53a of the drive motor 53 and the second drive unit 52, as in this embodiment. However, the transmission mechanism 54 may connect the drive motor 53 and the second drive unit 52 without the first drive unit 51 being interposed. The configuration of the transmission mechanism 54 is not particularly limited. The transmission mechanism 54 may further include other gears. The transmission mechanism 54 may include, for example, a chain or a cam. The actuators that drive the first drive unit 51 and the second drive unit 52 are not limited to electric motors. The actuators that drive the first drive unit 51 and the second drive unit 52 may be, for example, air-driven rotary actuators.

The swing plate 30 is supported by a plurality of support parts 40 and is connected to the first connecting pin 51b and the second connecting pin 52b. As shown in FIG. 3, the lower surface of the swing plate 30 is provided with a first insertion hole 31 into which the first connecting pin 51b is inserted and a second insertion hole 32 into which the second connecting pin 52b is inserted. The first connecting pin 51b and the first insertion hole 31 are connected so as to slide between them. The first connecting pin 51b is connected to the swing plate 30 so as to be slidable. Similarly, the second connecting pin 52b and the second insertion hole 32 are connected so as to slide between them. The second connecting pin 52b is connected to the swing plate 30 so as to be slidable. However, the connecting member slidably connected to the swing plate 30 is not limited to the first connecting pin 51b and the second connecting pin 52b. For example, if the swing plate 30 has a convex portion, and the first drive unit 51 and the second drive unit 52 each have a concave portion corresponding to the convex portion, the connecting member slidably connected to the swing plate 30 may be the concave portion configured to slide relative to the convex portion.

As shown in FIG. 2, the swing plate 30 is a rectangular flat plate-like member in a plan view. The swing plate 30 spreads along a horizontal plane. However, the shape of the swing plate 30 is not particularly limited. The swing plate 30 does not have to be flat, for example. When the first connecting pin 51b and the second connecting pin 52b rotate in a circle with a rotation radius R1, the swing plate 30 also rotates in a circle with a rotation radius R1 around the rotation axis Ax0 parallel to the first rotation axis Ax1 and the second rotation axis Ax2. The rotation axis Ax0 of the swing plate 30 extends in the vertical direction. Here, the swing plate 30 rotates along a horizontal plane. At this time, the swing plate 30 is restricted from rotating by engaging with both the first connecting pin 51b and the second connecting pin 52b, which rotate synchronously. Therefore, the orientation of the swing plate 30 in the axial view of the pivot axis Ax0 (here, in plan view) is maintained even while the swing plate 30 is pivoting. As a result, all points on the swing plate 30 pivot on a horizontal plane, tracing a circle with a pivot radius R1. For convenience, the pivot axis Ax0 of the swing plate 30 is illustrated in the position shown in FIG. 2. However, the pivot axis Ax0 of the swing plate 30 can pass through all points on the swing plate 30 in plan view.

As shown in FIG. 3, the swing plate 30 has a plurality of connection parts 33 that are respectively connected to a plurality of holders 80. Each connection part 33 is arranged to rotate around the rotation axis Ax of the corresponding holder 80 when the swing plate 30 is rotated by the drive unit 50. The rotation axes Ax of the plurality of holders 80 extend in the vertical direction. The rotation axes Ax of the plurality of holders 80 are parallel to each other. In addition, the rotation axis Ax of each holder 80, the rotation axis Ax0 of the swing plate 30, the first rotation axis Ax1, and the second rotation axis Ax2 are also parallel to each other. Here, the connection part 33 has a rotation pin 33a. When the swing plate 30 is rotated by the drive unit 50, each rotation pin 33a rotates around the rotation axis Ax of the corresponding holder 80, drawing a circle with a rotation radius R1. The rotation axis of the rotation pin 33a approximately coincides with the rotation axis Ax of the corresponding holder 80. Each of the pivot pins 33a is configured in a rod shape and extends upward from the upper surface of the swing plate 30. Here, each of the pivot pins 33a is configured in a cylindrical shape. However, the shape of the pivot pins 33a is not limited to a cylindrical shape. For example, each of the pivot pins 33a may be configured in a rectangular column shape.

The upper plate 60 is disposed above the swing plate 30. The swing plate 30 and the drive unit 50 are disposed below the upper plate 60. In this embodiment, the upper plate 60 is also configured as a rectangular flat plate in a plan view. However, the shape of the upper plate 60 is not particularly limited. The upper plate 60 is fixed to the base plate 20 so as not to move. The upper plate 60 spreads along a horizontal plane. The upper plate 60 is provided with a plurality of bearings 70. The bearings 70 are provided in a matrix in the front-rear and left-right directions. A plurality of bearing insertion holes 61 into which the bearings 70 are respectively inserted are formed in a matrix on the upper surface of the upper plate 60. The bearing insertion holes 61 penetrate the upper plate 60 in the up-down direction.

Figure 4 is a partially cutaway side view of the lower part of the holder 80 and the bearing 70. As shown in Figure 4, each bearing 70 has a through hole 71 into which the holder 80 is inserted. The through hole 71 is configured to be approximately circular in a plan view and penetrates the bearing 70 in the vertical direction. The rotation axis Ax passes through the center of the through hole 71. The multiple bearings 70 support the multiple holders 80 so that they can each rotate around the rotation axis Ax. The bearings 70 are, for example, bushes. However, the configuration of the bearing part that rotatably supports the holder 80 is not limited as long as it can rotatably support the holder 80. The bearing part may be, for example, a through hole formed in the upper plate 60.

As shown in FIG. 4, the holder 80 includes a work holder 81 that holds the cutting tool 5 as a base, a shaft portion 82 inserted into the through hole 71, and a force receiving lever 83 connected to the connection portion 33 of the swing plate 30. The shaft portion 82 has a cross-sectional shape corresponding to the through hole 71 of the bearing 70 and is inserted into the through hole 71. The shaft portion 82 and the bearing 70 slide against each other, so that the holder 80 can rotate along the through hole 71 of the bearing 70. The work holder 81 is connected to the upper portion of the shaft portion 82. As shown in FIG. 3, the work holder 81 protrudes above the upper surface of the upper plate 60. Here, the work holder 81 is configured in a cylindrical shape with an open upper surface. A rod-shaped cutting tool 5 is inserted inside the cylinder of the work holder 81. However, the shape of the work holder 81 only needs to correspond to the shape of the cutting tool 5, and is not limited to a cylindrical shape. The blade portion 5a of the cutting tool 5 protrudes above the work holder 81 and is exposed inside the chamber 101. When the cutting tool 5 is held by the holder 80, the blade portion 5a is located between the heat filaments 102 arranged in the front-rear direction. As shown in FIG. 3, the blade portion 5a is located at the same position as the heat filaments 102 in the vertical direction.

In this embodiment, the holder 80 protrudes upward from the upper plate 60. However, the holder 80 may be embedded in the upper plate 60 so as to be recessed from the upper surface of the upper plate 60. It is sufficient that the holder 80 is exposed at least from the upper surface of the upper plate 60.

As shown in FIG. 4, the force receiving lever 83 of the holder 80 is provided below the shaft portion 82. The force receiving lever 83 is a member against which the pivot pin 33a abuts when the pivot pin 33a pivots around the rotation axis Ax of the holder 80. As shown in FIG. 4, the force receiving lever 83 protrudes radially outward from the shaft portion 82. Here, the force receiving lever 83 is a rod-shaped member extending horizontally. However, the shape of the force receiving lever 83 is not particularly limited. The force receiving lever 83 extends radially outward from the rotation path of the pivot pin 33a so that the force receiving lever 83 abuts against the pivot pin 33a when the pivot pin 33a pivots around the rotation axis Ax of the holder 80. The force receiving lever 83 has a tip at a position horizontally spaced a distance R1 or more from the rotation axis Ax of the holder 80.

When the drive motor 53 is driven and the multiple pivot pins 33a rotate around their respective pivot axes (the rotation axis Ax of the corresponding holder 80), the pivot pins 33a come into contact with the force-receiving lever 83. This transmits the pivot force of the pivot pins 33a to the holder 80. As a result, each holder 80 rotates around the rotation axis Ax. The cutting tool 5 rotates together with the holder 80.

In this embodiment, the multiple holders 80 are rotated at an extremely slow rotation speed. However, the rotation speed of the holders 80 is not limited. The multiple holders 80 may be rotated continuously during deposition. Alternatively, the multiple holders 80 may be rotated intermittently (for example, 90 degrees at a time). By rotating the cutting tool 5 together with the holder 80, the variation in the distance from the thermal filament 102 due to the circumferential position of the cutting tool 5 is eliminated. This allows diamond to be deposited evenly on the blade portion 5a of each cutting tool 5.

In this embodiment, each of the pivot pins 33a is configured to bend and become unable to abut against the force-receiving lever 83 when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30. The situation in which the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30 is, for example, a situation in which the holder 80 and the bearing 70 are scraped together. The pivot pins 33a may be configured, for example, to be thin in part or in whole so that they bend easily when a force is applied. The pivot pins 33a may be configured to break and become unable to abut against the force-receiving lever 83 when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30. The pivot pins 33a may be configured, for example, of a brittle material such as cemented carbide or ceramics, or may be subjected to a brittle treatment (for example, quenching) so that they break easily when a force is applied.

However, it may be the force receiving lever 83 that breaks or bends when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30. The force receiving lever 83 may be configured to break or bend so as not to come into contact with the pivot pin 33a when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30.

[Effects of this embodiment]
The effects of the substrate rotation device 10 according to this embodiment will be described below. The substrate rotation device 10 for a film forming apparatus according to this embodiment includes a plurality of holders 80 each holding a substrate (e.g., a cutting tool 5) that is a film forming target, a plurality of bearings 70 supporting the plurality of holders 80 so that the holders 80 can be rotated about a plurality of rotation axes Ax parallel to each other, a swing plate 30 having a plurality of connection parts 33 connected to the plurality of holders 80, and a drive unit 50 for rotating the swing plate 30 about a rotation axis Ax0 parallel to the plurality of rotation axes Ax. The drive unit 50 rotates the swing plate 30 while maintaining the orientation of the swing plate 30 in the axial view of the rotation axis Ax0. Each connection part 33 is arranged so that when the swing plate 30 is rotated by the drive unit 50, it rotates about the rotation axis Ax of the holder 80 corresponding to each connection part 33. According to the base body rotation device 10, the swing plate 30 rotates while maintaining the orientation of the rotation axis Ax0 as viewed in the axial direction, so that the multiple connection parts 33 provided on the swing plate 30 each rotate around the rotation axis Ax of the corresponding holder 80. As a result, the holder 80 connected to each connection part 33 and supported by the bearing 70 rotates on its axis. Therefore, according to the base body rotation device 10, it is possible to rotate multiple bases on its axis with a simple configuration of one swing plate 30 and a drive part 50 that rotates the swing plate 30.

The above configuration is simpler than a conventional configuration in which, for example, multiple actuators each rotate one holder. The above configuration is also simpler than a configuration in which, for example, the driving force of one actuator is transmitted to multiple holders via multiple gears or the like. Such a conventional configuration is prone to failure in a short period of time in a high temperature environment in the chamber 101 of the film formation apparatus 100 (in a hot filament CVD apparatus, the temperature of the substrate can reach 600°C or higher) and in a reactive gas atmosphere. For example, a configuration in which gears mesh with each other is prone to the gears grinding against each other due to dimensional changes caused by thermal expansion of the gears in a high temperature environment. In addition, in a reactive gas atmosphere environment, for example, products of the reaction of the reactive gas are likely to adhere to the bearings, etc., causing rotation problems. In contrast, the configuration of the substrate rotation device 10 according to this embodiment is simple, so it is less likely to fail even in the above-mentioned environment. Products of the reactive gas can adhere to the moving parts regardless of the configuration of the substrate rotation device, but a simpler configuration of the substrate rotation device reduces the risk of failure due to adhesion of the products.

Furthermore, the above configuration makes it possible to arrange the holders 80 densely on the upper plate 60. In a conventional configuration in which multiple actuators each rotate one holder, the actuators take up space, so there is a limit to how densely the holders can be arranged. In a configuration in which the driving force of one actuator is transmitted to multiple holders via multiple gears, etc., the gears take up space, so there is also a limit to how densely the holders can be arranged. In contrast, in this embodiment, the space required for rotation of one holder 80 fits within the rotational orbit of the holder 80 (more specifically, the rotational orbit of the force-receiving lever 83). Therefore, the holders 80 can be arranged densely.

One swing plate 30 has multiple connection parts 33 and rotates multiple holders 80. However, the base rotation device 10 may have multiple swing plates 30 each configured to rotate multiple holders 80. In that case, one drive unit 50 may rotate multiple swing plates 30.

In this embodiment, the drive unit 50 includes a first drive unit 51 and a second drive unit 52. The first drive unit 51 includes a first connecting pin 51b slidably connected to the swing plate 30, and rotates the first connecting pin 51b around a first rotation axis Ax1 parallel to the rotation axis Ax of the holder 80. The second drive unit 52 includes a second connecting pin 52b slidably connected to the swing plate 30, and rotates the second connecting pin 52b around a second rotation axis Ax2 parallel to the rotation axis Ax of the holder 80 in synchronization with the rotation of the first connecting pin 51b. According to the base rotation device 10, the first connecting pin 51b and the second connecting pin 52b, both of which are slidably connected to the swing plate 30, rotate in synchronization with each other around the respective rotation axes Ax1 and Ax2 parallel to the rotation axis Ax of the holder 80. This allows the swing plate 30 to rotate without changing the orientation of the swing plate 30 when viewed in the axial direction of the rotation axis Ax0. The drive unit 50 may further include another drive unit that includes another connecting member that rotates in synchronization with the first connecting pin 51b and the second connecting pin 52b.

Furthermore, in this embodiment, the drive unit 50 includes a drive motor 53 having a main shaft 53a, and a transmission mechanism 54 that connects the main shaft 53a of the drive motor 53 to the first drive unit 51 and the second drive unit 52. The transmission mechanism 54 transmits the rotation of the main shaft 53a to the first drive unit 51 and the second drive unit 52. According to the base rotation device 10, the first drive unit 51 and the second drive unit 52 are driven by one drive motor 53 via the transmission mechanism 54. Therefore, the first connecting pin 51b and the second connecting pin 52b can be easily rotated in synchronization.

The first connecting pin 51b and the second connecting pin 52b may be rotated in synchronization by separate actuators. Alternatively, only one of the first connecting pin 51b and the second connecting pin 52b may be rotated by an actuator, and the other may be rotated passively.

In this embodiment, the swing plate 30 is configured as a plate extending along a horizontal plane, and the base rotation device 10 includes a plurality of support parts 40 that are provided below the swing plate 30 and support the swing plate 30. Each of the support parts 40 includes a rotatable ball 41 that abuts against the lower surface of the swing plate 30 and supports the swing plate 30. According to the base rotation device 10, since each ball 41 of the plurality of support parts 40 is rotatable, the swing plate 30 can be supported so as to be rotatable by the ball 41. Since this configuration is simple, it is unlikely to break down even in the high-temperature gas atmosphere in the chamber 101. Furthermore, this simple configuration also contributes to reducing the cost of the base rotation device 10.

In this embodiment, each connection part 33 has a pivot pin 33a, and each holder 80 has a force-receiving lever 83 against which the pivot pin 33a abuts when the pivot pin 33a rotates around the rotation axis Ax of the holder 80. According to the base rotation device 10, the holder 80 rotates by a simple configuration in which the pivot pin 33a abuts against the force-receiving lever 83 and pushes the force-receiving lever 83. Therefore, compared to, for example, a connection by a gear, the risk of the connection part 33 and the holder 80 being galled can be reduced. Furthermore, in this embodiment, the pivot pin 33a and the force-receiving lever 83 are connected so as to be separable. Therefore, the risk of the connection part 33 and the holder 80 being galled can be further reduced. The high-temperature gas atmosphere in the chamber 101 is an environment in which the movable part is likely to be galled. The configuration in which the force of the drive unit 50 is transmitted to the holder 80 by the pivot pin 33a coming into contact with the force-receiving lever 83 is particularly effective in such an environment.

In this embodiment, the pivot pin 33a is configured to bend so as not to abut against the force receiving lever 83 when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30. The pivot pin 33a may be bent so as not to abut against the force receiving lever 83. With this configuration, when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30, the pivot pin 33a does not abut against the force receiving lever 83. In other words, the connection between the holder 80 whose rotation is inhibited and the swing plate 30 is cut off. Therefore, even if the rotation of the holder 80 is inhibited for some reason, the rotation resistance of the holder 80 is unlikely to affect the rotation of the swing plate 30 and the rotation of other holders 80. If the pivot pin 33a continues to abut against the force-receiving lever 83 even when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30, the rotation of all the holders 80 will stop due to a rotation failure of one holder 80. The structure in which the pivot pin 33a breaks or bends is intended to prevent such a situation. Also, with such a structure in which the pivot pin 33a is deformed (bends or breaks), by inspecting the pivot pin 33a after film formation, it is easy to see that the substrate corresponding to the deformed pivot pin 33a has not rotated at least partway through. Therefore, it is possible to reliably exclude the substrate as a substrate with a film formation failure.

The same applies when the rotation of the holder 80 is stopped while the drive unit 50 is rotating the swing plate 30, and the force receiving lever 83 is configured to break or bend so that it cannot abut against the pivot pin 33a.

The base body rotation device 10 according to this embodiment is provided with a plurality of bearings 70 and an upper plate 60 extending along a horizontal plane. The holder 80 is exposed on the upper surface of the upper plate 60. The swing plate 30 and the drive unit 50 are disposed below the upper plate 60. According to this base body rotation device 10, the swing plate 30 and the drive unit 50 are disposed below the upper plate 60, not on the upper surface side of the upper plate 60 where the plurality of holders 80 are exposed. Therefore, a large number of holders 80 can be provided on the upper plate 60. In addition, the upper plate 60 can protect the swing plate 30 and the drive unit 50 from the high-temperature gas atmosphere generated above the upper plate 60.

[Other embodiments]
A preferred embodiment has been described above. However, the above embodiment is merely an example, and various other embodiments are possible. For example, in the above embodiment, the swing plate 30 is provided below the holder 80. However, the positional relationship between the holding member that holds the base body and the rotating body is not limited to this. For example, the rotating body may be provided above the holding member. For example, the multiple holding members may be provided so as to be aligned in the vertical direction, and the rotating body may be provided to the side of the multiple holding members.

The rotation of the rotating body is not limited to being caused by the synchronous rotation of two or more connecting pins. For example, the rotating body may be slidably connected to one rotating connecting member, and the connection part and the holding member may be connected so that the positional relationship cannot be changed, thereby maintaining the orientation of the rotating shaft as viewed in the axial direction. With such a configuration, the rotating body can be rotated while maintaining its orientation. The support part that supports the rotating body is not limited to one equipped with a ball. The support part may be, for example, a member whose tip is formed into a curved surface. If the rotating body can be supported by the drive part, a support part may not be provided.

The connection part may not include a pivot pin. For example, the connection part may include a recess through which the force-receiving lever is inserted. The connection part may not be able to separate from the holding member. The pivot pin may extend in a direction intersecting the rotation axis of the holder, rather than in a direction parallel to the rotation axis. For example, the force-receiving part of the holding member that abuts against the pivot pin may be a recess through which the pivot pin extending radially of the holding member is inserted.

A part or all of the substrate rotation device may be removable from the chamber of the film formation device. Using the symbols of the above-mentioned embodiment, for example, in one preferred example, a rail may be provided in the chamber 101 of the film formation device 100 to support members (hereinafter also referred to as the upper mechanism) other than the drive motor 53 and the main gear 54a of the substrate rotation device 10 so that they can slide forward and backward. The upper mechanism is a part of the substrate rotation device 10 that is directly or indirectly supported by the base plate 20. In this configuration, the upper mechanism can be easily inserted and removed from the chamber 101 along the rail. When connecting the upper mechanism and the drive motor 53, the upper mechanism and the drive motor 53 can be connected by simply pushing the upper mechanism until the main gear 54a and the first driven gear 51a come into contact. According to this configuration, the substrate can be attached and the upper mechanism can be cleaned with the upper mechanism pulled out or removed from the chamber 101. Therefore, these operations are easy. Also, as mentioned above, the upper mechanism and the drive motor 53 can be easily connected or disconnected.

There are no particular limitations on the deposition method or configuration of the deposition device. The material used for deposition is not limited to diamond. The arrangement of the holding members in the substrate rotation device is not limited to a matrix, and can be any arrangement.

5 Cutting tool (base)
10 Base body rotating device 30 Swing plate (rotating body)
33 Connection portion 33a Swivel pin (pin)
40 Support portion 41 Ball 50 Drive portion 51 First drive portion 51b First connecting pin (first connecting member)
52 Second drive portion 52b Second connecting pin (second connecting member)
53 Drive motor (actuator)
53a Main shaft 54 Transmission mechanism 60 Upper plate (plate)
70 Bearing (bearing part)
80 Holder (holding member)
83 Force receiving lever (force receiving part)
100 Film forming apparatus 101 Chamber 102 Hot filament Ax Rotation axis of holder (rotation axis of pivot pin)
Ax0: Swing plate pivot axis Ax1: First pivot axis Ax2: Second pivot axis

Claims (8)

A plurality of holding members each holding a substrate which is an object to be film-formed;
a plurality of bearings supporting the plurality of holding members so as to be rotatable about a plurality of rotation axes parallel to each other;
A rotating body including a plurality of connection portions respectively connected to the plurality of holding members;
a drive unit that rotates the rotating body around a rotation axis parallel to the plurality of rotation axes,
The drive unit is configured to rotate the rotating body while maintaining an orientation of the rotating body when viewed in the axial direction of the rotating shaft,
Each of the connection parts is arranged to rotate around a rotation axis of the holding member corresponding to each of the connection parts when the rotating body is rotated by the drive part.
Substrate rotation device for film formation equipment. The drive unit is
a first drive unit including a first connecting member slidably connected to the rotating body and configured to rotate the first connecting member about a first rotation axis parallel to the plurality of rotation axes;
a second connecting member slidably connected to the rotating body, and a second drive unit configured to rotate the second connecting member around a second rotation axis parallel to the multiple rotation axes in synchronization with the rotation of the first connecting member,
2. The substrate rotating device according to claim 1. The drive unit is
An actuator having a rotating main shaft;
a transmission mechanism that connects the main shaft of the actuator to the first drive unit and the second drive unit and transmits rotation of the main shaft to the first drive unit and the second drive unit,
3. The substrate rotating device according to claim 2. The rotating body is configured in a plate shape extending along a horizontal plane,
Further comprising a plurality of support parts provided below the rotating body and supporting the rotating body,
The plurality of support parts each include a rotatable ball that contacts the lower surface of the rotating body and supports the rotating body.
The substrate rotating device according to any one of claims 1 to 3. Each of the connections comprises a pin;
Each of the holding members includes a force receiving portion against which the pin abuts when the pin rotates around the rotation axis.
The substrate rotating device according to any one of claims 1 to 4. The pin is configured to break or bend so as not to be able to contact the force receiving portion when the rotation of the holding member is stopped while the driving portion is rotating the rotating body.
6. The substrate rotating device according to claim 5. The force receiving portion is configured to break or bend so as not to be able to contact the pin when the rotation of the holding member is stopped while the drive portion is rotating the rotating body.
6. The substrate rotating device according to claim 5. The bearing portion is provided, and the bearing portion further includes a plate extending along a horizontal plane,
Each of the holding members is exposed on an upper surface of the plate,
The rotating body and the drive unit are disposed below the plate.
The substrate rotating device according to any one of claims 1 to 7.